CN115142139A - Material system is sent again to single crystal growing furnace - Google Patents
Material system is sent again to single crystal growing furnace Download PDFInfo
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- CN115142139A CN115142139A CN202211059656.1A CN202211059656A CN115142139A CN 115142139 A CN115142139 A CN 115142139A CN 202211059656 A CN202211059656 A CN 202211059656A CN 115142139 A CN115142139 A CN 115142139A
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
- C30B35/005—Transport systems
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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Abstract
The invention discloses a feeding system of a single crystal furnace, which comprises a hopper, a feeding mechanism, a discharging mechanism and a driving assembly, wherein the feeding mechanism comprises a first groove body and a first spiral shaft, the discharging mechanism comprises a second groove body and a second spiral shaft, the first spiral shaft is provided with a first blade with the diameter gradually reduced along the material transportation direction, and the second spiral shaft is provided with a second blade with the diameter gradually reduced along the material transportation direction. During the material transportation process, part of the materials with the particle size smaller than or equal to the first particle size are preferentially conveyed to the single crystal furnace and spread on the surface of the silicon liquid, and the rest of the materials are conveyed to the single crystal furnace and fall on the part of the materials with the particle size smaller than or equal to the first particle size, so that the impact is slowed down. Therefore, the problem of splashing of silicon liquid caused by throwing large-particle-size materials into the single crystal furnace is solved, material loss caused by splashing of the silicon liquid and damage to the single crystal furnace are avoided, the production cost is reduced, and the service life of the single crystal furnace is prolonged.
Description
Technical Field
The invention relates to the technical field of monocrystalline silicon manufacturing, in particular to a compound feeding system of a monocrystalline furnace.
Background
The current single crystal furnace is divided into three parts. One is that a quartz tube container is repeatedly thrown from top to bottom through an auxiliary furnace chamber of a single crystal furnace; secondly, a quartz tube channel is arranged at the furnace cover of the single crystal furnace and faces the edge of the inner wall of the crucible for repeated casting; and thirdly, a quartz material pipe is extended into the position of a secondary feeding hole of the main furnace chamber, and silicon materials are fed on the crucible along the secondary feeding hole.
Most of the existing single crystal furnace re-feeding and feeding systems adopt a fixed or movable linear vibration feeder or a rotary vibration feeder to vibrate silicon materials into a crucible of the single crystal furnace through a quartz material pipe.
The vibration feeding is not beneficial to the conveying of granular silicon, the feeding speed of the silicon material with small grain size is far lower than that of the silicon material with large grain size, and the silicon material with large grain size impacts silicon liquid when entering the single crystal furnace, so that the silicon liquid splashes, and the loss of the silicon material and the damage to components inside the single crystal furnace are caused.
Therefore, the development of a feeding system of a single crystal furnace capable of solving the problem of splashing of the silicon liquid in the feeding process is urgently needed.
Disclosure of Invention
In order to solve the defects of the prior art, the invention aims to provide a re-feeding system of a single crystal furnace, which can solve the problem of splashing of silicon liquid in the feeding process.
In order to achieve the purpose, the invention adopts the following technical scheme:
a single crystal growing furnace throws material feeding system again, and material feeding system includes: a hopper; the feeding mechanism is at least partially communicated with the hopper; the feeding mechanism is at least partially arranged between the hopper and the discharging mechanism; the driving assembly is used for driving the feeding mechanism and the discharging mechanism; under the condition that the feeding system conveys materials, at least part of the feeding mechanism is communicated with the discharging mechanism; feed mechanism includes: a first tank body; a first screw shaft at least partially disposed in the first slot; the blanking structure comprises: a second tank body; a second screw shaft at least partially disposed in the second trough; under the condition that the feeding system conveys materials, the first groove body is communicated with the second groove body, and the driving assembly drives the first spiral shaft and the second spiral shaft so that the materials are conveyed into the single crystal furnace through the first spiral shaft and the second spiral shaft; the first screw shaft is provided with a first blade, the second screw shaft is provided with a second blade, and at least one of the diameter of the first blade and the diameter of the second blade is reduced in sequence along the conveying direction of the materials.
Further, the difference between the maximum diameter of the first blade and the minimum diameter of the first blade is greater than or equal to 7mm and less than or equal to 13mm, and the difference between the maximum diameter of the second blade and the minimum diameter of the second blade is greater than or equal to 7mm and less than or equal to 13mm.
Further, the difference between the maximum diameter of the first blade and the minimum diameter of the first blade is greater than or equal to 9mm and less than or equal to 11mm, and the difference between the maximum diameter of the second blade and the minimum diameter of the second blade is greater than or equal to 9mm and less than or equal to 11mm.
Furthermore, a first conveying channel is formed between the first blade and the inner wall of the first groove body, a second conveying channel is formed between the second blade and the inner wall of the second groove body, the first conveying channel and the second conveying channel are used for conveying materials with the grain size smaller than or equal to the first grain size, the first screw shaft and the second screw shaft are used for conveying materials with the grain size smaller than or equal to the second grain size, and the first grain size is smaller than the second grain size.
Further, along the direction of transportation of material, the ratio of the length of first cell body and the length of second cell body is more than or equal to 0.5 and less than or equal to 1.5.
Further, the blanking mechanism comprises a first state and a second state relative to the feeding mechanism, when the blanking mechanism is in the first state relative to the feeding mechanism, the first tank body is communicated with the second tank body, and the second tank body is in the first position; when the blanking mechanism is in a second state relative to the feeding mechanism, the first groove body is not communicated with the second groove body, and the second groove body is in a second position.
Further, the first groove body is provided with a third groove body extending along the up-down direction of the feeding system, and the third groove body and the first groove body are integrally formed or fixedly connected.
Further, along the up-down direction of the feeding system, the distance between the first tank body and the second tank body is a first length, the length of the third tank body along the up-down direction is a second length, and the first length is larger than or equal to the second length; or the third groove body is arranged to be a telescopic structure, when the second groove body is in the first position, the third groove body is in the first mode, and when the second groove body is in the second position, the third groove body is in the second mode.
Furthermore, the blanking mechanism is connected with the driving assembly through a bendable connecting shaft; when the blanking mechanism is in a first state relative to the feeding mechanism, the connecting shaft is in a normal state; when the blanking mechanism is in a second state relative to the feeding mechanism, the connecting shaft is in a bent state.
Further, under the condition that the feeding system conveys materials, if the materials are conveyed to the first groove body from the hopper, the first blade is provided with a first blocking mechanism for blocking the movement of the materials; if the material is carried to the second cell body from first cell body, the second leaf forms has the second barrier mechanism that hinders the material motion.
The application provides a single crystal growing furnace is material feeding system again, this feeding system includes hopper, feed mechanism, unloading mechanism and drive assembly, and wherein feed mechanism includes first cell body and first screw axis, and unloading mechanism includes second cell body and second screw axis, is provided with the first blade that reduces gradually along material direction of transportation diameter on the first screw axis, is provided with the second blade that reduces gradually along material direction of transportation diameter on the second screw axis. During the material transportation process, part of the materials with the particle size smaller than or equal to the first particle size are preferentially conveyed to the single crystal furnace and spread on the surface of the silicon liquid, and the rest of the materials are conveyed to the single crystal furnace and fall on the part of the materials with the particle size smaller than or equal to the first particle size, so that the impact is slowed down. Therefore, the problem of splashing of silicon liquid caused by throwing large-particle-size materials into the single crystal furnace is solved, material loss caused by splashing of the silicon liquid and damage to the single crystal furnace are avoided, the production cost is reduced, and the service life of the single crystal furnace is prolonged.
Drawings
FIG. 1 is a schematic view of the internal structure of a feeding system in an embodiment of the present invention;
FIG. 2 is a schematic view of the overall structure of a feeding system in an embodiment of the present invention;
FIG. 3 is a schematic cross-sectional view of a feeding system according to an embodiment of the present invention;
FIG. 4 is a partially enlarged schematic view of a feeding mechanism of the feeding system in the embodiment of the invention;
FIG. 5 is a partially enlarged schematic view of a blanking mechanism of the feeding system in the embodiment of the invention;
FIG. 6 is a schematic enlarged view of a left side of a blanking mechanism of the feeding system in the embodiment of the invention;
FIG. 7 is a schematic structural diagram of a first transmission portion according to an embodiment of the present invention;
fig. 8 is a partially enlarged schematic view of a feeding system in an embodiment of the present invention.
Detailed Description
The present invention will be described in detail with reference to the specific embodiments shown in the drawings, which are not intended to limit the present invention, and structural, methodological, or functional changes made by those skilled in the art according to the specific embodiments are included in the scope of the present invention.
It will be understood that when an element is referred to as being "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only and do not represent the only embodiments.
In the description of the present invention, it is to be understood that the terms "first", "second" and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implying any number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
In order to clearly explain the technical scheme of the application, a front side, a rear side, a left side, a right side, an upper side and a lower side are defined as shown in fig. 1.
Referring to fig. 1 and fig. 2, a feeding system 100 of a single crystal furnace is shown, according to an embodiment of the present application, where the feeding system 100 is installed inside a furnace body of a double feeder. The feeding system 100 includes: hopper 11, feed mechanism 12, unloading mechanism 13 and drive assembly 14.
Wherein, the hopper 11 is at least partially arranged above the feeding mechanism 12, and the blanking mechanism 13 is at least partially arranged below the feeding mechanism 12, i.e. the feeding mechanism 12 is at least partially arranged between the hopper 11 and the blanking mechanism 13. The hopper 11 is used for placing materials. The feeding mechanism 12 is at least partially communicated with the hopper 11, and the feeding mechanism 12 and the hopper 11 are relatively fixed in position. In the case of the feeding system 100 for conveying material, the feeding mechanism 12 is at least partially in communication with the discharging mechanism 13. The driving assembly 14 is arranged outside the furnace body of the re-feeder and is used for driving the feeding mechanism 12 and the discharging mechanism 13. When the feeding system 100 conveys materials, the materials enter the feeding mechanism 12 from the hopper 11 due to self gravity, the driving assembly 14 drives the feeding mechanism 12 to convey the materials from the feeding mechanism 12 to the discharging mechanism 13, and the driving assembly 14 drives the discharging mechanism 13 to convey the materials from the discharging mechanism 13 to the single crystal furnace.
Wherein, feed mechanism 12 includes: a first slot 121 and a first screw shaft 122, the first screw shaft 122 being at least partially disposed in the first slot 121. The blanking mechanism 13 includes: a second slot 131 and a second screw shaft 132, the second screw shaft 132 being at least partially disposed in the second slot 131.
Alternatively, the first screw shaft 122 is rotatably connected to the first slot 121, and the second screw shaft 132 is rotatably connected to the second slot 131, so that the driving assembly 14 can control the first screw shaft 122 and the second screw shaft 132 to rotate, which is beneficial to material conveying, and limits the movable range of the first screw shaft 122, thereby improving the structural stability of the feeding system 100. Specifically, the first screw shaft 122 may be rotatably coupled to the first groove 121 by a bearing, and the second screw shaft 132 may be rotatably coupled to the second groove 131 by a bearing.
In the case that the feeding system 100 conveys the material, the first trough body 121 is communicated with the second trough body 131, and the driving assembly 14 drives the first screw shaft 122 and the second screw shaft 132, so that the material is conveyed into the single crystal furnace through the first screw shaft 122 and the second screw shaft 132. Specifically, the driving assembly 14 drives the first screw shaft 122 so that the material is transferred from the first trough body 121 to the second trough body 131, and at the same time, the driving assembly 14 drives the second screw shaft 132 so that the material in the second trough body 131 is transferred to the single crystal furnace. Through the above arrangement, the driving assembly 14 drives the first screw shaft 122 and the second screw shaft 132, the material is driven by the first screw shaft 122 and the second screw shaft 132 to be transported forward, the material conveying speed can be controlled by controlling the rotation speed of the first screw shaft 122 and the second screw shaft 132, and compared with the traditional vibration feeding, the material conveying speed can be controlled more favorably, and the use requirement can be met more.
As an alternative implementation manner, a covering part is arranged at the joint of the hopper 11 and the feeding mechanism 12, and the covering part covers the joint of the hopper 11 and the feeding mechanism 12. In this implementation, the cover can compensate for installation errors when the hopper 11 is docked with the feeding mechanism 12. In addition, the covering part covers the joint of the hopper 11 and the feeding mechanism 12, so that the materials can be prevented from leaking when being conveyed from the hopper 11 to the feeding mechanism 12, the materials are prevented from being polluted, and the crystallization quality of the single crystal furnace is improved. In this embodiment, the cover may be a silicone sleeve.
Alternatively, in the present embodiment, the inner wall of the hopper 11, the inner wall of the first groove 121, and the inner wall of the second groove 131 are coated with polyurethane. Under the implementation mode, the materials can be prevented from being polluted in the conveying process of the feeding system 100, and the crystallization quality of the single crystal furnace is improved.
Referring to fig. 3, fig. 4, fig. 5 and fig. 6, as an implementation manner, a first blade 123 is disposed on the first screw shaft 122, a second blade 133 is disposed on the second screw shaft 132, diameters of the first blade 123 decrease sequentially along a transporting direction of the material, and/or diameters of the second blade 133 decrease sequentially along the transporting direction of the material, that is, at least one of the diameters of the first blade 123 and the second blade 133 decreases sequentially along the transporting direction of the material; and the difference between the maximum diameter R1 of the first blade 123 and the minimum diameter R2 of the first blade 123 is equal to or greater than 7mm and equal to or less than 13mm, and/or the difference between the maximum diameter R3 of the second blade 133 and the minimum diameter R4 of the second blade 133 is equal to or greater than 7mm and equal to or less than 13mm. Wherein, the direction of transportation of material indicates that the material gets into first cell body 121 from hopper 11, and the material transports to second cell body 131 through first cell body 121, and the direction of transportation of material in transporting to the single crystal growing furnace through second cell body 131. In this embodiment, the direction of transport of the material is from back to front.
In this implementation manner, in the process of conveying the materials in the first trough body 121, part of the materials with the particle size smaller than or equal to the first particle size in the materials can be conveyed to the second trough body 131 through the area formed between the first blade 123 and the inner wall of the first trough body 121; and part of the materials with the particle size smaller than or equal to the second particle size can be conveyed to the second groove body 131 along with the movement of the first blade 123. When the material passes through the first trough body 121, part of the material with the particle size smaller than or equal to the first particle size is preferentially conveyed to the second trough body 131. Therefore, the material is mostly the material with the particle size smaller than or equal to the first particle size when the material is just conveyed to the second chute body 131.
The particle size is the maximum width distance value of the material, and the first particle size is smaller than the second particle size.
Similarly, in the process of conveying the materials in the second trough body 131, part of the materials with the particle size smaller than or equal to the first particle size can be conveyed into the single crystal furnace through the region formed between the second blade 133 and the inner wall of the second trough body 131; a portion of the material having a particle size of the second particle size or less may be transferred into the single crystal furnace with the movement of the second blade 133. When the material passes through the second groove 131, a part of the material with the particle size smaller than or equal to the first particle size is preferentially conveyed to the single crystal furnace.
Therefore, part of the materials with the particle size smaller than or equal to the first particle size are preferentially conveyed into the single crystal furnace and spread on the surface of the silicon liquid, and the rest of the materials are subsequently conveyed into the single crystal furnace and fall on the part of the materials with the particle size smaller than or equal to the first particle size, so that the impact is relieved. Therefore, the problem of splashing of silicon liquid caused by throwing large-particle-size materials into the single crystal furnace is solved, material loss caused by splashing of the silicon liquid and damage to the single crystal furnace are avoided, the production cost is reduced, and the service life of the single crystal furnace is prolonged.
Preferably, the difference between the maximum diameter R1 of the first blade 123 and the minimum diameter R2 of the first blade 123 is 9mm or more and 11mm or less, and the difference between the maximum diameter R3 of the second blade 133 and the minimum diameter R4 of the second blade 133 is 9mm or more and 11mm or less. In the present embodiment, the difference between the maximum diameter R1 of the first blade 123 and the minimum diameter R2 of the first blade 123 is 10mm, and the difference between the maximum diameter R3 of the second blade 133 and the minimum diameter R4 of the second blade 133 is 10mm. Under this implementation, the diameter change of first blade 123 is less, and the diameter change of second blade 133 is also less to make between the inner wall of first cell body 121 and first blade 123, be difficult for blockking up the material between the inner wall of second cell body 131 and the second blade 133, the conveying efficiency of material is higher and the material is better at the effect that prevents that the silicon liquid from splashing in the in-process of carrying to the single crystal growing furnace.
Optionally, in the material transporting direction, the first blade 123 and the second blade 133 are both transitioned in an archimedes spiral shape, and the first blade 123 and the second blade 133 are both gradually reduced in diameter. Under this implementation, the diameter of first blade 123 and second blade 133 reduces more smoothly, is difficult for blockking up the material.
Alternatively, the first screw shaft 122, the second screw shaft 132, the first blade 123 and the second blade 133 may be made of a non-metal material such as molybdenum, quartz, tungsten or silicon nitride. Under the implementation mode, the materials can be prevented from being polluted in the conveying process of the feeding system 100, and the crystallization quality of the single crystal furnace is improved.
As an optional implementation manner, in the case that the feeding system 100 conveys the material, if the material is conveyed from the hopper 11 to the first groove 121, the first blade 123 forms a first blocking mechanism that blocks the movement of the material, that is, the material enters the first groove 121 at a certain speed and is blocked by the first blocking mechanism formed by the first blade 123 to decelerate; if the material is conveyed from the first slot 121 to the second slot 131, the second blade 133 forms a second blocking mechanism for blocking the movement of the material, that is, the material enters the second slot 131 at a certain speed and then is blocked and decelerated by the second blocking mechanism formed by the second blade 133. Under this implementation, the conveying speed of material is lower compared with conventional feeding speed in prior art, can effectively solve the problem that conventional pay-off leads to the silicon liquid that the material strikes the liquid level and causes to splash among the prior art because of higher feeding speed, has avoided the material loss that the silicon liquid splashes and the harm that causes to the single crystal growing furnace for manufacturing cost reduces, and has prolonged single crystal growing furnace life.
Optionally, in the transportation direction of the material, the ratio of the length L1 of the first chute body 121 to the length L2 of the second chute body 131 is greater than or equal to 0.5 and less than or equal to 1.5. Further, the ratio of the length L1 of the first slot body 121 to the length L2 of the second slot body 131 is greater than or equal to 0.7 and less than or equal to 1.3. Further, the ratio of the length L1 of the first slot body 121 to the length L2 of the second slot body 131 is greater than or equal to 0.9 and less than or equal to 1.1. Under this implementation, the length of the first groove 121 and the second groove 131 is more reasonable, so that the structure of the feeding system 100 is more compact while the material is better conveyed into the single crystal furnace, and the space utilization rate of the feeding system 100 is improved.
As an optional implementation manner, the blanking mechanism 13 in the feeding system 100 includes a first state and a second state relative to the feeding mechanism 12, when the blanking mechanism 13 is in the first state relative to the feeding mechanism 12, the first tank 121 is communicated with the second tank 131, and the second tank 131 is in the first position, at this time, the feeding system 100 is in the working state, and the material can be conveyed to the single crystal furnace; when the blanking mechanism 13 is in the second state relative to the feeding mechanism 12, the first chute body 121 and the second chute body 131 are not communicated, and the second chute body 131 is in the second position, at this time, the feeding system 100 is in the non-working state, and the material stops being conveyed. The first position refers to a position of the second chute 131 when the feeding system 100 works, and the second position refers to a position of the second chute 131 when the feeding system 100 does not work.
As shown in fig. 3, at this time, the discharging mechanism 13 is in a first state relative to the feeding mechanism 12, the second trough body 131 is in a first position, the first trough body 121 is communicated with the second trough body 131, and the second trough body 131 partially extends into the single crystal furnace so as to convey the material, and at this time, the feeding system 100 is in a working state. When the blanking mechanism 13 is in the second state relative to the feeding mechanism 12, the second groove body 131 is in the second position, the first groove body 121 and the second groove body 131 are not communicated, the part of the second groove body 131 extending into the single crystal furnace retracts, and at this time, the feeding system 100 does not work.
Specifically, the feeding system 100 further includes a moving mechanism, and the second slot 131 is fixedly connected to the moving mechanism, and the moving mechanism is used for assisting the second slot 131 to move between the first position and the second position. In this embodiment, the moving mechanism includes a vehicle body, a pulley, and a rail. The vehicle body is fixedly connected with the second groove body 131 and arranged below the second groove body 131, and the vehicle body can move on the track through the pulleys. Through the arrangement, the second slot body 131 can move between the first position and the second position conveniently, operation is facilitated, the movement range of the second slot body 131 is limited on the track, the second slot body 131 is not prone to dislocation when moving, and the structural stability of the feeding system 100 is improved.
As an optional implementation manner, a quartz tube may be disposed inside the second groove body 131, the quartz tube and the second screw shaft 132 are coaxially disposed, the second groove body 131 is disposed around the quartz tube, the length of the quartz tube is the same as that of the second groove body 131, the quartz tube and the second groove body 131 are isolated by using a high temperature resistant foamed silica gel pad, and the quartz tube is opened at a connection between the second groove body 131 and the first groove body 121 for conveying a material. Under the implementation mode, when the second groove body 131 is located at the first position, the quartz tube extends into the single crystal furnace, and due to the high-temperature resistance of the quartz tube, the quartz tube is not easy to damage, and the service life of the feeding system 100 is long.
As shown in fig. 3, as an alternative implementation manner, the first groove 121 is provided with a third groove extending along the up-down direction of the feeding system 100, and the third groove and the first groove 121 are integrally formed or fixedly connected. Under this implementation, the material is behind through first cell body 121, and the part material that the speed is very fast can be blockked and then get into second cell body 131 smoothly by the third cell body, prevents that the material from causing the material to leak or be polluted in transportation process, reduces unnecessary material loss, reduction in production cost.
As an alternative implementation manner, along the up-down direction of the feeding system 100, the distance between the first slot body 121 and the second slot body 131 is a first length, the length of the third slot body along the up-down direction is a second length, and the first length is greater than or equal to the second length. Under the implementation mode, the third groove body can better prevent the materials from leaking under the condition that the normal work of the second groove body 131 is not influenced.
Optionally, the third slot is provided as a retractable structure, and when the second slot 131 is in the first position, the third slot is in the first mode. That is, when the blanking mechanism 13 is in the first state relative to the feeding mechanism 12 and the feeding system 100 starts to work, the third slot body is extended, and at this time, the third slot body may be located on the upper side of the second slot body 131, and the third slot body may also be at least partially located in the second slot body 131. When the second channel 131 is in the second position, the third channel is in the second mode. That is, when the feeding system 100 stops working when the blanking mechanism 13 is in the second state relative to the feeding mechanism 12, the third chute body is shortened. In the implementation mode, the third tank body can be extended or shortened according to the working state of the feeding system 100, and the third tank body is in the first mode when the feeding system 100 starts to work, so that the material is prevented from leaking, and the production cost is reduced; when the feeding system 100 stops working, the third tank body is in the second mode, so that the volume is reduced, and the space utilization rate of the feeding system 100 is improved.
Optionally, a vertically downward polytetrafluoroethylene elbow may be disposed below the third tank, and the polytetrafluoroethylene elbow and the third tank are integrally formed or fixedly connected. The polytetrafluoroethylene elbow has the characteristic of chemical corrosion resistance, so the service life of the third tank body can be prolonged through the realization mode.
As an alternative implementation, the driving assembly 14 in the feeding system 100 includes a first driving part 141 and a second driving part 142. The first driving part 141 is disposed coaxially with the first screw shaft 122 of the feeding mechanism 12, the first driving part 141 is used for driving the feeding mechanism 12, the second driving part 142 is disposed coaxially with the second screw shaft 132 of the blanking mechanism 13, and the second driving part 142 is used for driving the blanking mechanism 13. In this implementation manner, the feeding system 100 can adjust the conveying speed of the materials in the feeding mechanism 12 and the discharging mechanism 13 by respectively controlling the operating speeds of the first driving portion 141 and the second driving portion 142, so as to meet different material conveying requirements. It can be understood that the first driving part 141 and the first screw shaft 122 of the feeding mechanism 12 may be arranged non-coaxially, and the first driving part 141 transmits the driving force to the feeding mechanism 12 through other transmission structures; the second driving part 142 and the second screw shaft 132 of the blanking mechanism 13 may be arranged coaxially, and the second driving part 142 transmits the driving force to the blanking mechanism 13 through another transmission structure, which is not limited in the present application.
Referring to fig. 7, in the present embodiment, the first driving portion 141 includes a first motor 1411 and a first speed reducer 1412, and the first motor 1411 and the first speed reducer 1412 are connected by a coupling; the second driving part 142 has a structure substantially identical to that of the first driving part 141. Under this implementation, drive assembly 14 can provide great output torque, improves feeding system 100's transport capacity, and gear motor's functioning speed is lower, makes the speed of material when carrying lower, can effectively prevent that the material from leading to the fact because of the speed is too fast leaking or because of too fast striking silicon liquid surface causes the silicon liquid to splash, has reduced manufacturing cost, has improved equipment production efficiency.
Optionally, the feeding system 100 further includes a transmission assembly 15, and the transmission assembly 15 is used for transmitting the driving force output by the driving assembly 14 to the feeding mechanism 12 and the discharging mechanism 13. The transmission assembly 15 includes a first transmission part 151 and a second transmission part 152. One end of the first transmission unit 151 is connected to the first driving unit 141, and the other end of the first transmission unit 151 is connected to the first screw shaft 122, so that the driving force output from the first driving unit 141 is transmitted to the loading mechanism 12 through the first transmission unit 151. One end of the second transmission part 152 is connected to the second driving part 142, and the other end of the second transmission part 152 is connected to the second screw shaft 132, so that the driving force output from the second driving part 142 is transmitted to the blanking mechanism 13 through the second transmission part 152. Specifically, in the present embodiment, the first transmission part 151 includes a first magnetic fluid and a first coupling. The first magnetic fluid is arranged outside the double feeder furnace body, the outside of the first magnetic fluid is connected with the first driving part 141, the inside of the first magnetic fluid is connected with one end of a first coupling, and the other end of the first coupling is connected with the first screw shaft 122 in the feeding mechanism 12. The second transmission part 152 includes a second magnetic fluid, a second coupling, a bendable connecting shaft 1521, and a third coupling. The second magnetic fluid is arranged outside the furnace body of the double feeder, the outside of the second magnetic fluid is connected with the second driving part 142, the inside of the second magnetic fluid is connected with one end of a second coupler, the other end of the second coupler is connected with one end of the bendable connecting shaft 1521, the other end of the connecting shaft 1521 is connected with one end of a third coupler, and the other end of the third coupler is connected with the second spiral shaft 132.
Under this implementation, drive assembly 14 can set up in the outside of the ware furnace body of throwing again, in throwing the ware furnace body again with drive power transmission through drive assembly 15, this implementation can be with the drive power transmission of drive assembly 14 output from the ordinary pressure environment to the vacuum environment in the ware furnace body of throwing again promptly, thereby solved drive assembly 14 and the indirect problem of contact of material, not only avoided the short circuit risk of high-voltage electrical components and parts under the vacuum environment, also can guarantee to drive the power transmission in-process not to cause the destruction to the furnace body gas tightness.
Referring to fig. 8, in the present embodiment, the blanking mechanism 13 is connected to the second driving portion 142 through the second transmission portion 152, and the second transmission portion 152 includes a second magnetic fluid, a second coupling, a bendable connecting shaft 1521, and a third coupling. When the blanking mechanism 13 is in a first state relative to the feeding mechanism 12, the connecting shaft 1521 is in a normal state, and at this time, the feeding system 100 can work normally; when the blanking mechanism 13 is in the second state relative to the feeding mechanism 12, the connecting shaft 1521 is in the bending state, at this time, the connecting shaft 1521 cannot work normally, and if the second driving portion 142 is started accidentally, the second driving portion 142 will give an overload alarm. Under this implementation, the feeding system 100 realizes the control of the working state of the blanking mechanism 13 through the connecting shaft 1521, and when the second driving portion 142 is started when the blanking mechanism 13 is in the second state, the second driving portion 142 will overload and alarm, thereby avoiding the loss caused by misoperation and improving the safety performance of the feeding system 100.
As one implementation manner, a first conveying channel is formed between the first blade 123 and the inner wall of the first trough body 121, a second conveying channel is formed between the second blade 133 and the inner wall of the second trough body 131, the first conveying channel and the second conveying channel are both used for conveying materials with a particle size smaller than or equal to a first particle size, and the first screw shaft 122 and the second screw shaft 132 are both used for conveying materials with a particle size smaller than or equal to a second particle size, wherein the first particle size is smaller than the second particle size.
In this implementation manner, in the conveying process of the material in the first tank 121, part of the material with the particle size smaller than or equal to the first particle size in the material may be conveyed to the second tank 131 through the area formed between the first blade 123 and the inner wall of the first tank 121; and part of the materials with the particle size smaller than or equal to the second particle size can be conveyed to the second groove body 131 along with the movement of the first blade 123. When the material passes through the first chute body 121, a part of the material with the particle size smaller than or equal to the first particle size is preferentially conveyed to the second chute body 131. Therefore, the material is mostly the material with the particle size smaller than or equal to the first particle size when being conveyed to the second chute body 131.
The particle size is the maximum width distance value of the material, and the first particle size is smaller than the second particle size.
Similarly, in the process of conveying the materials in the second trough body 131, part of the materials with the particle size smaller than or equal to the first particle size in the materials can be conveyed to the single crystal furnace through the area formed between the second blade 133 and the inner wall of the second trough body 131; a portion of the material having a particle size of the second particle size or less may be transferred into the single crystal furnace with the movement of the second blade 133. When the material passes through the second groove 131, a part of the material with the particle size smaller than or equal to the first particle size is preferentially conveyed to the single crystal furnace.
Therefore, part of the materials with the particle size smaller than or equal to the first particle size are preferentially conveyed into the single crystal furnace and spread on the surface of the silicon liquid, and the rest of the materials are subsequently conveyed into the single crystal furnace and fall on the part of the materials with the particle size smaller than or equal to the first particle size, so that the impact is relieved. Therefore, the problem of splashing of silicon liquid caused by throwing large-particle-size materials into the single crystal furnace is solved, material loss caused by splashing of the silicon liquid and damage to the single crystal furnace are avoided, the production cost is reduced, and the service life of the single crystal furnace is prolonged.
It can be understood that, as an alternative implementation manner, along the transportation direction of the material, the diameter of the first blade 123 is unchanged, the diameter of the second blade 133 is unchanged, the inner diameter of the first trough body 121 is gradually increased, the inner diameter of the second trough body 131 is gradually increased, a first conveying channel is formed between the first blade 123 and the inner wall of the first trough body 121, and a second conveying channel is formed between the second blade 133 and the inner wall of the second trough body 131.
As an optional implementation manner, in the case that the feeding system 100 conveys the material, if the material is conveyed from the hopper 11 to the first groove body 121, the first blade 123 forms a first blocking mechanism for blocking the movement of the material, that is, the material enters the first groove body 121 at a certain speed and is blocked and decelerated by the first blocking mechanism formed by the first blade 123; if the material is conveyed from the first slot 121 to the second slot 131, the second blade 133 forms a second blocking mechanism for blocking the movement of the material, and the material enters the second slot 131 at a certain speed and then is blocked and decelerated by the second blocking mechanism formed by the second blade 133. Under this implementation, the conveying speed of material is lower compared with conventional feeding speed in the prior art, can effectively solve the problem that the conventional feeding causes the silicon liquid to splash because of the material impact liquid level caused by higher feeding speed in the prior art, avoid the material loss caused by the splashing of the silicon liquid and the damage to the single crystal furnace, reduce the production cost and prolong the service life of the single crystal furnace.
In summary, the present application provides a feeding system 100 for a single crystal furnace, the feeding system 100 includes a hopper 11, a feeding mechanism 12, a discharging mechanism 13 and a driving assembly 14, wherein the feeding mechanism 12 includes a first groove 121 and a first screw shaft 122, the discharging mechanism 13 includes a second groove 131 and a second screw shaft 132, the first screw shaft 122 is provided with a first blade 123 with a diameter gradually decreasing along a material transportation direction, and the second screw shaft 132 is provided with a second blade 133 with a diameter gradually decreasing along the material transportation direction. During material transportation, part of the materials with the particle size smaller than or equal to the first particle size are preferentially conveyed to the single crystal furnace and spread on the surface of the silicon liquid, and the rest of the materials are conveyed to the single crystal furnace and fall onto the part of the materials with the particle size smaller than or equal to the first particle size, so that impact is relieved. Therefore, the problem of splashing of silicon liquid caused by throwing large-particle-size materials into the single crystal furnace is solved, material loss caused by splashing of the silicon liquid and damage to the single crystal furnace are avoided, the production cost is reduced, and the service life of the single crystal furnace is prolonged.
While the invention has been described with reference to certain preferred embodiments, it will be understood by those skilled in the art that the following descriptions of the preferred embodiments are provided for illustration purposes only, and not for the purpose of limiting the invention as defined by the appended claims: rather, the invention is to cover all modifications, alternatives, combinations and simplifications which may be included within the spirit and scope of the invention as defined by the appended claims.
Claims (10)
1. A single crystal growing furnace material system of throwing again, the material system includes:
a hopper;
a feed mechanism in communication with at least a portion of the hopper;
the feeding mechanism is at least partially arranged between the hopper and the blanking mechanism;
the driving assembly is used for driving the feeding mechanism and the discharging mechanism;
under the condition that the feeding system conveys materials, the feeding mechanism is at least partially communicated with the discharging mechanism;
it is characterized in that the preparation method is characterized in that,
the feed mechanism includes:
a first tank body;
a first screw shaft at least partially disposed in the first trough;
the blanking structure comprises:
a second tank body;
a second screw shaft at least partially disposed in the second trough;
under the condition that the feeding system conveys the materials, the first groove body is communicated with the second groove body, and the driving assembly drives the first screw shaft and the second screw shaft so that the materials are conveyed into the single crystal furnace through the first screw shaft and the second screw shaft;
the first screw shaft is provided with a first blade, the second screw shaft is provided with a second blade, and at least one of the diameter of the first blade and the diameter of the second blade is sequentially reduced along the conveying direction of the material.
2. The single crystal furnace material re-feeding system according to claim 1, wherein the difference between the maximum diameter of the first blade and the minimum diameter of the first blade is greater than or equal to 7mm and less than or equal to 13mm, and the difference between the maximum diameter of the second blade and the minimum diameter of the second blade is greater than or equal to 7mm and less than or equal to 13mm.
3. The single crystal furnace material re-feeding system according to claim 1 or 2, wherein the difference between the maximum diameter of the first blade and the minimum diameter of the first blade is 9mm or more and 11mm or less, and the difference between the maximum diameter of the second blade and the minimum diameter of the second blade is 9mm or more and 11mm or less.
4. The single crystal furnace material re-feeding system as claimed in claim 1, wherein a first conveying channel is formed between the first blade and the inner wall of the first tank, a second conveying channel is formed between the second blade and the inner wall of the second tank, the first conveying channel and the second conveying channel are both used for conveying the material with the particle size smaller than or equal to a first particle size, the first screw shaft and the second screw shaft are both used for conveying the material with the particle size smaller than or equal to a second particle size, and the first particle size is smaller than the second particle size.
5. The single crystal furnace material re-feeding system as claimed in claim 1, 2 or 4, wherein the ratio of the length of the first trough body to the length of the second trough body is greater than or equal to 0.5 and less than or equal to 1.5 along the transportation direction of the material.
6. The single crystal furnace re-feeding system as claimed in claim 1, 2 or 4, wherein the blanking mechanism comprises a first state and a second state relative to the feeding mechanism, when the blanking mechanism is in the first state relative to the feeding mechanism, the first tank body is communicated with the second tank body, and the second tank body is in a first position; when the blanking mechanism is in the second state relative to the feeding mechanism, the first tank body is not communicated with the second tank body, and the second tank body is in the second position.
7. The single crystal furnace material re-feeding system as claimed in claim 6, wherein the first tank body is provided with a third tank body extending along the vertical direction of the material feeding system, and the third tank body and the first tank body are integrally formed or fixedly connected.
8. The re-feeding system of the single crystal furnace as claimed in claim 7, wherein along the vertical direction of the feeding system, the distance between the first trough body and the second trough body is a first length, the length of the third trough body along the vertical direction is a second length, and the first length is greater than or equal to the second length; or the third groove body is of a telescopic structure, when the second groove body is located at the first position, the third groove body is located in the first mode, and when the second groove body is located at the second position, the third groove body is located in the second mode.
9. The single crystal furnace repeated feeding system according to claim 6, wherein the blanking mechanism and the driving assembly are connected through a bendable connecting shaft; when the blanking mechanism is in the first state relative to the feeding mechanism, the connecting shaft is in a normal state; when the blanking mechanism is in the second state relative to the feeding mechanism, the connecting shaft is in a bent state.
10. The single crystal furnace re-feeding system as claimed in claim 1, 2 or 4, wherein under the condition that the feeding system conveys the material, if the material is conveyed from the hopper to the first trough body, the first blade is provided with a first blocking mechanism for blocking the movement of the material; if the material is conveyed to the second groove body from the first groove body, a second blocking mechanism for blocking the material to move is formed on the second blade.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211059656.1A CN115142139B (en) | 2022-09-01 | 2022-09-01 | Single crystal growing furnace material system of throwing again |
| PCT/CN2023/079692 WO2024045538A1 (en) | 2022-09-01 | 2023-03-03 | Re-charging feeding system for single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211059656.1A CN115142139B (en) | 2022-09-01 | 2022-09-01 | Single crystal growing furnace material system of throwing again |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN115142139A true CN115142139A (en) | 2022-10-04 |
| CN115142139B CN115142139B (en) | 2022-11-22 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211059656.1A Active CN115142139B (en) | 2022-09-01 | 2022-09-01 | Single crystal growing furnace material system of throwing again |
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| Country | Link |
|---|---|
| CN (1) | CN115142139B (en) |
| WO (1) | WO2024045538A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2024045538A1 (en) * | 2022-09-01 | 2024-03-07 | 浙江求是半导体设备有限公司 | Re-charging feeding system for single crystal furnace |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN115142139B (en) | 2022-11-22 |
| WO2024045538A1 (en) | 2024-03-07 |
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