WO2024032986A1 - Appareil et procédé d'étalonnage de dispositif de mesure - Google Patents

Appareil et procédé d'étalonnage de dispositif de mesure Download PDF

Info

Publication number
WO2024032986A1
WO2024032986A1 PCT/EP2023/068508 EP2023068508W WO2024032986A1 WO 2024032986 A1 WO2024032986 A1 WO 2024032986A1 EP 2023068508 W EP2023068508 W EP 2023068508W WO 2024032986 A1 WO2024032986 A1 WO 2024032986A1
Authority
WO
WIPO (PCT)
Prior art keywords
calibration
measuring
carrier
measuring device
section
Prior art date
Application number
PCT/EP2023/068508
Other languages
German (de)
English (en)
Inventor
Martin Leibfritz
Original Assignee
Helmut Fischer GmbH Institut für Elektronik und Messtechnik
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Helmut Fischer GmbH Institut für Elektronik und Messtechnik filed Critical Helmut Fischer GmbH Institut für Elektronik und Messtechnik
Publication of WO2024032986A1 publication Critical patent/WO2024032986A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/042—Calibration or calibration artifacts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence

Definitions

  • Calibration device for a measuring device and method for calibrating a measuring device
  • the invention relates to a calibration device for a measuring device and a method for calibrating a measuring device with such a calibration device for material or layer thickness analysis.
  • a calibration device for calibrating measuring devices for non-destructively measuring the thickness of thin layers comprises a carrier plate made of a base material and several calibration standards applied to the carrier plate.
  • the individual calibration standards have different layer thicknesses to which the measuring device must be calibrated. It is envisaged that the measuring device is placed on the support plate with a base and the measuring probe of the measuring device is successively placed on the selected calibration standard in order to carry out the calibration. This calibration can achieve increased measurement accuracy of the measuring device. After the measuring device has been calibrated, the individual measurements are carried out on measurement objects according to the measurement task.
  • measuring devices which enable material analysis using X-ray fluorescence, for example to determine different proportions of elements in a material or a coating. Furthermore, measuring devices enable layer thickness analysis using X-ray fluorescence. With such measuring devices for material or layer thickness analysis, it is necessary that these measuring devices, which have an X-ray fluorescence device, be calibrated.
  • the calibration of such measuring devices requires an increased amount of time for the calibration due to the implementation of several measurements on different calibration standards and a subsequent reconstruction time, which the operating personnel of such a measuring device employ in order to measure a given batch of measurement objects.
  • the calibration standard there may be a risk that the calibration will not be carried out in the isocenter of the measuring device and As a result, calibration errors can occur, which lead to lower measurement quality.
  • the invention is based on the object of proposing a calibration device for a measuring device for material analysis or layer thickness analysis, which enables improved calibration to increase the measurement accuracy of the calibrated measuring devices. Furthermore, the invention is based on the object of proposing a method for calibrating a measuring device for material or layer thickness analysis, which enables increased precision of the calibration and improved measurement accuracy of the measuring device for the subsequent measuring task.
  • a calibration device for a measuring device in particular an X-ray fluorescence measuring device, for material analysis or layer thickness analysis, which has a housing with a carrier which comprises several sections, at least one calibration standard being provided in at least one section, and with a drive through which the sections of the carrier can be moved alternately or sequentially into a measuring position and with a control provided in the housing which controls the drive for positioning the carrier in the measuring position and with a data interface through which the control of the calibration device with a Data interface of a control device of the measuring device to be calibrated communicates.
  • the calibration device is preferably designed separately from the measuring device and/or as an independent structural unit from the measuring device.
  • Such a calibration device makes it possible for at least one section of the carrier, which accommodates or has a calibration standard, to be moved into a measuring position on or in the measuring device in order to subsequently carry out a measurement of the measuring device to be calibrated, in which the X-rays from the measuring device are reflected on the Calibration standard is directed to record a calibration value.
  • the calibration device Through the communication of the measuring device with the calibration device via the respective data interface can be transferred to the respective measuring position sequentially or alternately via the control in the calibration device with regard to its sections, so that, for example, a corresponding number and / or selection of calibration standards, which were selected by the control device of the measuring device based on the subsequent measuring task, can be successively moved into the measuring position in order to carry out the calibration of the measuring device.
  • the calibration device After calibrating the measuring device, the calibration device can be used for a subsequent measuring device to be calibrated.
  • the carrier has several sections arranged in a row, which can be successively moved into the measuring position. This makes it possible to easily control the calibration device and to carry out the calibration using measuring devices in a time-saving manner using the calibration device.
  • each section of the carrier has an identification code, which can be read by an optical camera of the calibration device or the measuring device and the respective identified section can be transferred to the measuring position by the control.
  • This, preferably individualized, identification code can be, for example, a QR code or a one-dimensional code, such as a barcode, or any combination of numbers and/or numbers.
  • the respective calibration standard assigned to the section can then be selected and transferred to the measuring position for calibrating the measuring device. This can increase the process reliability for calibrating the measuring device.
  • the drive for controlling a movement of the carrier of the calibration device has a position sensor and one of the sections is aligned with the position sensor in a starting position or initial position and the other sections can be controlled in a defined manner by detecting the angle of rotation or increments of the position sensor and in the respective measuring position can be transferred.
  • This allows an alternative control and alignment of the individual sections of the carrier to the measuring position.
  • the carrier has an indexing, which is queried by the control in the housing and from this a zero position or a start position is detected in order to subsequently determine the traversing movement of the carrier with knowledge of the respective position of the sections relative to each other in the respective section to transfer the measuring position.
  • the carrier is designed as a rotating disk which has several sections distributed over the circumference. These sections are preferably designed in the form of a piece of cake.
  • the sections distributed over the circumference are arranged evenly distributed on the carrier.
  • two, four, six, eight or twelve sections can be provided on a carrier in order to accommodate a minimum number of calibration standards.
  • calibration standards made of the pure elements gold, silver, platinum, lead and/or chromium can be provided.
  • individual sections have a receptacle for positioning a calibration standard.
  • calibration standards are preferably manufactured in accredited test laboratories and provided as a coated base material or consisting of a film. The wearer can use these individually for the respective calibration task Calibration standards are equipped.
  • a receptacle for aligning the calibration standards is preferably provided.
  • a support surface is formed in the section of the carrier, on which the calibration standard can be positioned.
  • the carrier has a predetermined number of sections or a fixed configuration in all sections with calibration standards that differ from one another.
  • a pre-assembled carrier or a pre-assembled calibration device can thus be designed for specific measuring tasks of the measuring device.
  • the carrier is provided in the housing in a replaceable manner for driving.
  • a receiving space can be provided in the housing in which the individual carriers can be stored.
  • the carrier has a pinhole in at least one section. This enables, for example, a measurement object to be aligned with the pinhole and a measurement to be carried out by the measuring device and then the carrier plate to be transferred to a further measuring position, in which the section of the carrier arranged in the measuring position is connected to a calibration standard or a verification standard, which is not used calibration is used. This allows a comparison to be carried out between the measured values of the measurement object, the calibration standard and/or verification standard in order to determine whether the measurement carried out on the measurement objects is within a defined limit range or below a predetermined threshold value.
  • the carrier has a perforated diaphragm covered with a film at least in one of the sections.
  • the film is designed as a Mylar film. This makes it possible to place small measuring objects in the section whose surface area is smaller than the pinhole.
  • Mylar films are invisible to X-rays, which means that the Mylar film does not contain any components that affect the primary radiation and the secondary radiation emitted by the measurement object in the range of X-ray fluorescence.
  • the carrier of the calibration device is preferably made of a material that is low-reflection, in particular non-reflective, and/or at least low-absorption, in particular absorption-free, for X-rays.
  • a plastic material free of additives is provided.
  • the carrier can be made of a thermoplastic material, in particular polyethylene, polycarbonate or polymethyl methacrylate.
  • the data interface provided on the housing of the calibration device is preferably designed for wireless communication with the measuring device to be calibrated. Common standards, such as WiFi or Bluetooth or the like, can be used. Alternatively, the data interface on the housing of the calibration device can also be designed for wired communication with the measuring device. These can, for example, be known USB interfaces and their variants.
  • the carrier is accommodated in the housing by an axis so that it can rotate to an X/Y plane, which can be rotated parallel to a measuring surface of the measuring device.
  • the individual sections can be gradually transferred to a measuring point in the measuring surface of the measuring device, which is exposed to X-rays by an X-ray fluorescence device in the measuring device.
  • the carrier protrudes with an arc segment-shaped section relative to an end face of the housing. This protruding arc segment-shaped section can be aligned with a measuring point in the measuring surface of the measuring device.
  • the calibration standard, the identification code, the pinhole and/or the pinhole covered with a film are provided in the respective section of the arc segment-shaped section, which protrudes from the housing.
  • the carrier can be rotated completely within the housing in an X/Y plane and is arranged parallel to the measuring surface of the measuring device.
  • the housing advantageously has a housing opening on the wall section facing the measuring surface of the measuring device.
  • the housing of the calibration device has a support surface or support points and the plane of the support surface or the support point and a measuring point or a measuring surface of the calibration standard or the measurement object on or on the carrier are at a distance of less than 10 mm, preferably less than 5 mm, preferably less than 3 mm.
  • a small distance is advantageous for achieving maximum intensity in the secondary radiation.
  • the calibration standards are designed as pure elements or as layer elements consisting of a base material and a coating.
  • pure elements mean a purity of more than 99% gold. The same applies to other precious metals.
  • the object on which the invention is based is further achieved by a method for calibrating a measuring device for material or layer thickness analysis, in particular an X-ray fluorescence measuring device. advises, solved, in which a measuring task to be subsequently carried out is called up and selected in a control device of the measuring device and in which a calibration device according to one of the above-described embodiments is transferred to a calibration position to the measuring device and in which individual calibration standards arranged in the sections of the carrier are moved into a measuring position procedure, in which the selected section of the carrier is aligned with the measuring point in the measuring surface of the measuring device and in which measurement data from the calibration standards arranged in the respective sections of the carrier are forwarded to a control device and a calibration value is determined from the measurement data from each calibration standard and in which the standard values stored in the control device are compared with the recorded calibration values and correction values are determined and used as a basis for subsequent measuring tasks with the measuring device.
  • This method has the advantage that the operating personnel can devote themselves to further activities during the calibration of the measuring device, since the calibration of the measuring device for the subsequent measuring task is carried out by the calibration device. This also means that operating errors can be ruled out, for example by swapping calibration standards or not aligning them with the isocenter of the measuring point in the measuring surface of the measuring device.
  • the at least one section of the carrier of the calibration device is aligned with the measuring point of the measuring device for assuming the calibration position.
  • the calibration device can preferably be positioned on the measuring surface of the measuring device in order to subsequently carry out an adjustment in the alignment of the at least one section of the carrier to the measuring point in the measuring surface of the measuring device.
  • the alignment of the calibration standard in the section of the carrier to the measuring point is displayed in the measuring surface of the measuring device with a position laser of the measuring device or in a display of the measuring device with a device that detects the measuring point camera is displayed. This makes it easy to ensure that the calibration position is taken.
  • communication is established between the calibration device and the measuring device in the calibration position via the data interface of the calibration device and the control device in the measuring device.
  • an active coupling in particular in the case of wireless communication, is required.
  • secure and wireless communication can be independently established between the calibration device and the measuring device.
  • communication can be wired.
  • a further preferred embodiment of the method provides that the number and/or the respective calibration standards used for calibration are selected by the control device of the measuring device based on the selected measuring task. This can prevent confusion between calibration standards or incorrect calibration due to a reduced number of calibration standards.
  • a carrier equipped with calibration standards is selected for the subsequent measuring task of the measuring device.
  • the carrier can be permanently installed in a prefabricated calibration device.
  • the calibration device can also be equipped with a selected carrier comprising a sorting of calibration standards, or the selected sections of the carrier can be equipped with predetermined calibration standards.
  • quality control it can be provided for quality control that, for example, several pre-assembled calibration devices are used in order to save time in preparing the calibration device for the calibration task.
  • it can also be provided that for individual and a large number of different ones Measuring tasks the calibration device is selected with a carrier in which the individual sections can be individually equipped with calibration standards.
  • the at least a predetermined number of sections are recorded with the respective calibration standards of the calibration device and stored in the control device of the measuring device.
  • the control of the calibration device is controlled by the control device of the measuring device and preferably the calibration standards selected for the measuring task are successively transferred to the measuring position. This allows a secure and traceable calibration to be carried out.
  • a verification standard which was not used for the calibration of the measuring device is transferred to the measuring position and the calibration value is compared with the verification value of the verification standard. This allows an additional adjustment to be carried out for the calibration that has taken place. In particular, it can be monitored whether there were external influences during the calibration of the measuring device, such as temperature fluctuations, which could have led to a falsification of the calibration of the measuring device.
  • a measurement object is measured by placing it on a pinhole or a pinhole of the carrier covered with a film and then a reference value is recorded and then a difference between the verification value and the reference value is determined. If the reference value is smaller than a predetermined threshold value, the calibration can be completed and The measuring device can then be controlled for the measuring task. If the reference value is greater than a predetermined threshold value, a request to repeat the calibration can be made.
  • the calibration device comprises a measuring support which is positioned behind the carrier in a primary radiation directed onto the carrier and that the carrier is equipped with a pinhole and an at least predetermined number of sections with calibration standards according to one or several measurements of measurement objects on the measurement support are moved to the measurement position for calibration.
  • the carrier arranged in the calibration device is replaced and a changer is used for measurement objects.
  • a changer for measurement objects is designed analogously to the carrier, but a predetermined number of measurement objects can be placed on it, so that a successive measurement of measurement objects can be automatically controlled by the measuring device via the calibration device.
  • Figure 1 is a schematic side view of a calibration device
  • Figure 2 is a schematic view from above of a calibration device according to Figure 1
  • FIG. 3 shows a schematic view from above of a carrier of the calibration device according to FIG. 1,
  • Figure 4 is a schematic sectional view of a section of the carrier according to Figure 3,
  • Figure 5 is a schematic sectional view along line V-V of the carrier in Figure 3,
  • FIG. 6 shows a schematic side view of the calibration device in a calibration position relative to the measuring device
  • Figure 7 is a schematic side view of an alternative embodiment to Figure 6, and
  • Figure 8 is a schematic side view of a further alternative embodiment to Figure 6.
  • FIG. 1 A schematic side view of a calibration device 11 is shown in FIG. A view from above of the calibration device 11 is shown in Figure 2.
  • This calibration device 11 comprises a housing 12. On an underside of the housing 12, a support surface or support points 14, which lie in a support plane 24, are provided for positioning on a surface.
  • the housing 12 includes a drive 16, in particular an electric motor, which is rotatably driven by a controller 17.
  • This drive 16 controls a movement of a carrier 18 relative to the housing 12.
  • This carrier 18 has a base body 19, which is designed, for example, in the form of a rotating disk.
  • the axis of rotation 20 of the carrier 18 is preferably aligned perpendicular to the support plane 24 of the support points 14.
  • the carrier 18 is arranged in a position relative to the housing 12 in such a way that an arc segment-shaped section 21 of the carrier 18 protrudes from an end face 22 or a front side of the housing 12.
  • the further part of a carrier 18 is positioned within an open receptacle 23 in the housing 12. It is preferably provided that a distance between the carrier 18 or an underside of the carrier 18 and a support plane 24 formed by the support points 14 or a support surface of the housing 12 has a distance A that is less than 10 mm, preferably less than 5 mm, in particular smaller than 3 mm.
  • the data interface 26 can have a mechanically designed plug-in connection for wired communication and/or for supplying energy.
  • the data interface 26 can also be designed as a wireless communication interface.
  • the calibration device 11 can have a separate power supply to a power network or be operated with accumulators.
  • the carrier 18 of the calibration device 11 according to Figures 1 and 2 is shown in a top view in Figure 3.
  • This carrier 18 has a plurality of sections 28. These sections 28 are preferably evenly distributed over the circumference. In this case, the sections 28 can be of the same size. For example, these can be designed in the shape of a piece of cake.
  • This section 28 of the carrier 18 can be equipped with a calibration standard 34.
  • This calibration standard 34 can be permanently integrated into the carrier 18.
  • a receptacle 35 can be provided in section 28 for positioning the calibration standard 34.
  • This receptacle 35 can be designed in the form of a recess, as shown in Figure 4, which shows a sectional view along line IV-IV in Figure 3.
  • a calibration standard 34 can be inserted into this receptacle 34.
  • the carrier 18 can also be designed to hold a measurement object.
  • it can be a section 29 which comprises a perforated screen 31 which is covered by a film, in particular Mylar film 32, as shown in Figure 4.
  • a measurement object can be placed on the The top of the carrier 18 or the film 32 can be placed, which is smaller in diameter than the pinhole 31.
  • a section 30 can be formed in the carrier 18, as shown in a sectional view along the line VV according to Figure 3 in Figure 5 is shown.
  • This section 30 can only consist of a pinhole 31.
  • the pinhole 31 represents a through hole with a free passage.
  • an alternative embodiment and arrangement of the calibration standard 34 to the carrier 18 is shown. In this arrangement, the calibration standard 34 is firmly arranged or integrated into the base body 19 of the carrier 18.
  • the carrier 18 is rotatably mounted about the vertical axis 20. It can be provided that the carrier 18 is arranged interchangeably in the housing 12 and can be coupled to the drive 16.
  • the carrier 18 can have an indexing so that it can be connected to a drive shaft of the drive 16 in a defined orientation.
  • the drive 16 itself can include a position sensor so that the location and position of the indexing of the drive shaft of the controller 17 is known.
  • a defined positioning of the individual sections 28, 29, 30 in a measuring position 49 (FIGS. 2 and 6) can be controlled by means of the control 17 of the calibration device 11. In this measuring position 49, a sufficient area of each section 28, 29, 30 of the carrier 18 protrudes from the end face 22 of the housing 12.
  • the base body 19 of the carrier 18 preferably consists of a thermoplastic material without additives that lead to absorption and/or reflection of the X-rays. Polyethylene, polycarbonate or polymethyl methacrylate is preferred.
  • the calibration standard 34 can be designed as a so-called pure element in order to calibrate a measuring device 42, in particular an X-ray fluorescence measuring device according to FIG. 6, for material analysis. Such pure elements can consist of precious metals with a very high degree of purity.
  • the calibration standard 34 can also be designed as a base body with a coating in order to calibrate the measuring device 42 for a layer thickness analysis.
  • the calibration standard 34 can include an identification code, such as a QR code or barcode.
  • This measuring device 42 is an X-ray fluorescence measuring device.
  • This measuring device 42 includes an X-ray fluorescence device 43, which includes a beam generating source 44 for generating X-rays and at least one detector 46.
  • the beam generating source 44 emits a primary radiation 45 which is directed at a measuring point 47 in a measuring surface 48 of the measuring device 42.
  • the secondary radiation 52 emitted by a measurement object 51 resting on the measurement point 47 or a calibration standard 34 on the carrier 18 is detected by the detector 46 to determine measured values.
  • These measured values are forwarded to a control device 54 of the measuring device 42.
  • This control device 54 is connected to a data interface 55.
  • An optical device 56 is also shown schematically in the measuring device 42.
  • This optical device 56 in particular camera, captures images from the measuring point 47 via a mirror, not shown, which is coupled into the beam path in order to take photographs of the measuring point 47.
  • the calibration device 11 is separate from the measuring device 42, in particular the measuring device 42 for layer thickness analysis.
  • the calibration device 11 can be used for the successive calibration of several measuring devices 42.
  • the calibration device 11 is designed to be detachable from the measuring device 42.
  • the calibration device 11 is an independent unit. To calibrate the measuring device 42, the calibration device 11 is moved into a calibration position 58 on or in the measuring device 42. In this calibration position 58, the calibration device 11 is preferably positioned on the measuring surface 48 of the measuring device 42.
  • An arc segment-shaped section 21 of the carrier 18 protrudes from the housing 12 of the calibration device 11 and is aligned with the measuring point 47 of the measuring device 42, so that the primary radiation generated by the radiation source 44 is directed to the sections 28, 29, 30 of the carrier 18, which belong to the Measuring point 47 can be aligned.
  • a position laser or the optical device 56 provided on or in the measuring device 42 can be provided.
  • the position of the section 28 of the carrier 18 relative to the measuring point 47 is output, for example, in a display 57 of the measuring device 42.
  • An acoustic signal can also be emitted.
  • a calibration of the measuring device 42 by the calibration device 11 can be carried out as follows: On a control panel 59 of the measuring device 42, which can also be designed separately from the measuring device 42 in the form of a portable communication device, in particular a tablet, is carried out via operating software in the control device 54 a measurement task of the measuring device 42 to be carried out subsequently is selected.
  • the control device 54 outputs the corresponding number of calibration standards 34 and/or the types of calibration standards 34.
  • the calibration device 11 can include a pre-assembled carrier 18, which includes, among other things, the calibration standards 34 necessary for the calibration task.
  • a carrier 18 can also be equipped with corresponding calibration standards 34.
  • the carrier 18 can also be replaced by another carrier for the housing 12 of the calibration device 11, which includes the calibration standards for the subsequent measuring task.
  • the controller 17 then transmits the calibration device 11 to the control device 54 of the measuring device 42 information about the sections 28, 29, 30 of the carrier 18 aligned with the measuring point 47 in a measuring position 49.
  • the calibration process is then started by the control device 54 of the measuring device 42, in which the individual sections 28, 29, 30 are selected to carry out the corresponding measurements for the calibration. For example, several sections 28 are controlled, each with different calibration standards 34. From the position recognition of the sections 28, 29, 30 to the measuring position 49, the calibration standard 34 can be assigned to the measured values for determining the calibration value.
  • the respective section 28, 29, 30 in the measuring position 49 can be recognized by the controller 17, provided that the carrier 18 has been aligned with the drive 16 in the calibration device 11.
  • an identification code of the calibration standard 34 or in the section 28, 29, 30 can be queried for recognition by the measuring device 42 or the calibration device 11.
  • the calibration device 11 can be removed from the calibration position 58 for the subsequent measuring task, which is carried out with the measuring device 42.
  • the measurement objects can then be placed one after the other on the measuring point 47 and individual measurements can be carried out and saved.
  • the carrier 18 is replaced by a changer for receiving measurement objects in the calibration device 11. Subsequently, the further clocking or positioning of the measurement objects on the changer can be controlled by the control 17 of the calibration device 11 or by the control device 54.
  • the calibration of the measuring device 42 by the calibration device 11 can also include a further step. After recording the calibration values from the predetermined number of calibration standards 34 in the respective sections 28 of the carrier 18, the carrier 18 can be transferred to the measuring position 49, for example with the section 29 or the section 30. A reference object is then placed on the pinhole 31 or on a film 32 covering the pinhole 31 and a measurement is carried out. This reference object or this reference standard has not previously been used to calibrate the measuring device 42. However, this reference object is standardized like the calibration standard 34. The determined reference value can then be compared with the calibration value. If there is a difference value that is greater than a specified threshold value, a new calibration would have to be carried out. If this difference value is smaller than a threshold value, the calibration can be considered to have been carried out correctly.
  • FIG. 7 shows an alternative embodiment of the calibration device 11 in the calibration position 58 to the measuring device 42.
  • a measuring support 62 is provided adjacent to the carrier 18.
  • This measuring support 62 can be detachably attached to an end face 22 of the housing 12.
  • the measurement support 62 preferably comprises a perforated diaphragm 31, which is covered in particular with a film 32 on which the measurement object 51 can be positioned.
  • the film 32 is preferably a Mylar film.
  • the primary radiation of the X-ray fluorescence device 43 directly hits the underside of the film 32 of the measurement support 62, on which the measurement object 51 rests.
  • the resulting measured values can be recorded directly by the detector 46.
  • the calibration device 11 can be controlled so that the individual sections 28 are positioned at the measuring point 47 for the acquisition of calibration values. This arrangement enables, for example, calibration, measurement and calibration, etc. to take place. It can also be provided that a calibration, a predetermined number of measurements and another calibration take place.
  • the calibration device 11 is integrated into the measuring device 42. It is provided that the carrier 18 of the calibration device 11 is positioned below the measuring surface 48, i.e. between the measuring point 47 and the X-ray fluorescence device 43. All of the aforementioned embodiments and alternatives are also possible in this alternative embodiment.
  • This arrangement has the particular advantage that with very thin foils that are used for the calibration standard 34, a small distance to the X-ray fluorescence device 43 is created, which enables maximum intensity for the signal acquisition for evaluating the measured values.
  • the measuring surface 48 can, for example, be at least partially foldable or removable, so that easy access to the calibration device 11 integrated in the measuring device 42 is provided.

Abstract

L'invention concerne un appareil et un procédé d'étalonnage d'un dispositif de mesure pour l'analyse de matériaux ou d'épaisseurs de couches à l'aide d'un appareil d'étalonnage (11), constitué d'un boîtier (12) avec un support (18) comprenant une pluralité de sections (28, 29, 30), au moins un étalon (34) étant prévu dans au moins une section (28), comportant un entraînement (16) qui peut être utilisé pour transférer alternativement ou successivement les sections (28, 29, 30) du support (18) dans une position de mesure (49), comportant un dispositif de commande (17) qui commande l'entraînement (16) de façon à déplacer le support (18), et comportant une interface de données (26) qui est connectée au dispositif de commande (17) et qui est prévue pour communiquer avec le dispositif de mesure (42).
PCT/EP2023/068508 2022-08-08 2023-07-05 Appareil et procédé d'étalonnage de dispositif de mesure WO2024032986A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102022119877.4 2022-08-08
DE102022119877.4A DE102022119877A1 (de) 2022-08-08 2022-08-08 Kalibriervorrichtung für ein Messgerät sowie Verfahren zur Kalibrierung eines Messgeräts

Publications (1)

Publication Number Publication Date
WO2024032986A1 true WO2024032986A1 (fr) 2024-02-15

Family

ID=87280682

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2023/068508 WO2024032986A1 (fr) 2022-08-08 2023-07-05 Appareil et procédé d'étalonnage de dispositif de mesure

Country Status (2)

Country Link
DE (1) DE102022119877A1 (fr)
WO (1) WO2024032986A1 (fr)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61223507A (ja) * 1985-03-29 1986-10-04 Fuji Electric Co Ltd 圧延コントロール用放射線透過式厚さ計の校正方法
DE10200237B4 (de) * 2002-01-05 2006-11-30 APC Analytische Produktions-Steuerungs- und Controllgeräte GmbH Vorrichtung zur Röntgenfloureszenzanalyse von mineralischen Schüttgütern
DE202012012128U1 (de) * 2012-11-05 2014-02-10 Franz Brenk Gmbh & Co. Kg Kalibrierstandard und Verwendung eines solchen Kalibrierstandards
US20160011129A1 (en) * 2014-07-08 2016-01-14 Hitachi High-Tech Science Corporation Sample Plate for X-Ray Analysis and X-Ray Fluorescent Analyzer
DE102005054589B4 (de) 2005-11-14 2017-11-02 Immobiliengesellschaft Helmut Fischer Gmbh & Co. Kg Kalibriernormal
CN109490348A (zh) * 2019-01-21 2019-03-19 长沙开元仪器有限公司 Xrf探测器及用于xrf探测器的标样校准装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1398091A (fr) 1964-03-26 1965-05-07 Radiologie Cie Gle Perfectionnements aux appareils de dosage par fluorescence chi
CN214150511U (zh) 2020-12-25 2021-09-07 深圳力越新材料有限公司 用于x荧光分析仪的校准装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61223507A (ja) * 1985-03-29 1986-10-04 Fuji Electric Co Ltd 圧延コントロール用放射線透過式厚さ計の校正方法
DE10200237B4 (de) * 2002-01-05 2006-11-30 APC Analytische Produktions-Steuerungs- und Controllgeräte GmbH Vorrichtung zur Röntgenfloureszenzanalyse von mineralischen Schüttgütern
DE102005054589B4 (de) 2005-11-14 2017-11-02 Immobiliengesellschaft Helmut Fischer Gmbh & Co. Kg Kalibriernormal
DE202012012128U1 (de) * 2012-11-05 2014-02-10 Franz Brenk Gmbh & Co. Kg Kalibrierstandard und Verwendung eines solchen Kalibrierstandards
US20160011129A1 (en) * 2014-07-08 2016-01-14 Hitachi High-Tech Science Corporation Sample Plate for X-Ray Analysis and X-Ray Fluorescent Analyzer
CN109490348A (zh) * 2019-01-21 2019-03-19 长沙开元仪器有限公司 Xrf探测器及用于xrf探测器的标样校准装置

Also Published As

Publication number Publication date
DE102022119877A1 (de) 2024-02-08

Similar Documents

Publication Publication Date Title
DE2800225C2 (de) Verfahren zur Bestimmung der Konzentration einer anomalen Substanz in einer flüssigen Probe und eine Anlage zum kontinuierlichen selbsttätigen Analysieren einer flüssigen Probe nach diesem Verfahren
DE4117008C2 (de) Verfahren zum Kalibrieren einer Meßvorrichtung zum Erfassen eines Aggregationsbildes
EP1757902B1 (fr) Procédé et dispositif pour mesurer la forme d'un objet dentaire
AT400768B (de) Tragbares spektralphotometer
DE19721688B4 (de) Oberflächenerfassungseinrichtung und Verfahren zur Oberflächenerfassung
EP2642326B1 (fr) Etalonnage automatique d'un microscope à balayage
DE3037622A1 (de) Optoelektronisches messverfahren und einrichtungen zum bestimmen der oberflaechenguete streuend reflektierender oberflaechen
DE102015217637B4 (de) Betreiben eines konfokalen Weißlichtsensors an einem Koordinatenmessgerät und Anordnung
DE19751545A1 (de) Strahlungstiefendosismessvorrichtung und Teilchenstrahldetektor
DE4428363C2 (de) Röntgen-Mikrodiffraktometer
DD140290A5 (de) Kombiniertes goniophotometer und reflektometer(gonioreflektometer)zur beurteilung des oberflaechenglanzvermoegens
DE102010004824B4 (de) V-Block Messvorrichtung zur Bestimmung optischer Materialkonstanten und Verfahren zur Bestimmung optischer Materialkonstanten mittels einer V-Block-Messvorrichtung
WO2016015921A1 (fr) Dispositif de mesure de la réflexion
DE3706271C2 (fr)
DE2405810B2 (de) Digital-photometer zur selbsttaetigen messung der enzymaktivitaet mehrerer proben
EP1185397B1 (fr) Procede pour mesurer un dispositif de manutention
WO2024032986A1 (fr) Appareil et procédé d'étalonnage de dispositif de mesure
DE102010033614B4 (de) Spektroskopisches Reflektometer
DE102017223343A1 (de) Optische abtasthöhenmessvorrichtung
EP1379845B1 (fr) Dispositif de detection simultanee de rayonnements de longueurs d'ondes differentes
DE102014203918B4 (de) Verfahren und Vorrichtungen zur Erfassung der Oberflächenstruktur und Beschaffenheit einer Probe
DE102006021632A1 (de) Medizintechnisches Gerät, Prüfkörper sowie Verfahren zur Überprüfung der Positioniergenauigkeit eines Patiententisches in Bezug auf ein Isozentrum eines medizintechnischen Geräts
DE3841244C2 (fr)
DE102005025291A1 (de) Verfahren und Vorrichtung zur Bestimmung von Oberflächeneigenschaften
EP3531067A1 (fr) Dispositif et procédé de mesure d'au moins un objet optiquement actif

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 23741282

Country of ref document: EP

Kind code of ref document: A1