WO2023273446A1

WO2023273446A1 - Atomic layer deposition device

Info

Publication number: WO2023273446A1
Application number: PCT/CN2022/083415
Authority: WO
Inventors: 陈蓉; 邵华晨; 刘潇; 向俊任; 李嘉伟; 弋戈
Original assignee: 华中科技大学; 华中科技大学无锡研究院
Priority date: 2021-07-02
Filing date: 2022-03-28
Publication date: 2023-01-05
Also published as: CN113564564B; CN113564564A

Abstract

The present invention relates to an atomic layer deposition device, wherein a reaction chamber comprises a reaction chamber main body and a cavity door, a reaction cavity is formed inside the reaction chamber main body, an air inlet and an air extraction opening are provided in the reaction chamber main body, and the cavity door is detachably connected to the reaction chamber main body; a mounting frame is fixedly connected to the cavity door, and when the cavity door is connected to the reaction chamber main body, the mounting frame is located inside the reaction cavity; a first bearing member is configured to bear a block-shaped object to be coated, and the first bearing member is detachably connected to the mounting frame; a second bearing member is configured to bear a powdery object to be coated, and the second bearing member is detachably connected to the mounting frame; in a first use state, the first bearing member is fixedly connected to the mounting frame; and in a second use state, the second bearing member is connected to the mounting frame, a driving member is connected to the second bearing member, and the driving member is configured to drive the second bearing member to rotate relative to the mounting frame. The atomic layer deposition device can perform deposition on different types of objects to be coated, and has a wider application range.

Description

ALD

technical field

The invention relates to the technical field of atomic layer deposition, in particular to an atomic layer deposition device.

Background technique

Atomic layer deposition is a technology that coats substances layer by layer on the surface of a substrate in the form of a monoatomic film. It has the characteristics of nano-controllable film thickness and good uniformity, so it is widely used in micro-nano electronic devices, solar energy Batteries and other fields. The principle of atomic layer deposition is to introduce a precursor into a vacuum chamber to undergo chemical adsorption with the substrate to be coated. After cleaning the chamber with an inert gas, another precursor is introduced into the chamber to chemically react with the product of the previous stage. These two stages constitute an atomic layer deposition reaction cycle, that is, the growth of a single-layer film, and the desired thickness of the film is achieved by controlling the number of cycles. In the related art, there are many devices specialized for atomic layer deposition. However, these devices have a relatively single scope of application for the object to be coated, and can only be used for deposition of a single type of object to be coated.

Contents of the invention

Based on this, the present invention proposes an atomic layer deposition device, which can deposit different types of objects to be coated, and has a wider application range.

Atomic layer deposition equipment, including:

A reaction chamber, the reaction chamber includes a reaction chamber main body and a door, the interior of the reaction chamber main body forms a reaction chamber, the reaction chamber main body is provided with an air inlet and an air extraction port, the door and the reaction chamber The main body of the chamber is detachably connected;

a mounting frame, the mounting frame is fixedly connected to the chamber door, and when the chamber door is connected to the reaction chamber main body, the mounting frame is located inside the reaction chamber;

A first carrier, the first carrier is used to carry a block-shaped object to be covered, and the first carrier is detachably connected to the mounting frame;

A second carrier, the second carrier is used to carry the powdery object to be coated, and the second carrier is detachably connected to the installation frame;

driver;

In the first use state, the first carrier is fixedly connected to the installation frame;

In the second use state, the second carrier is connected to the installation frame, and the driving member is connected to the second carrier, and the driving member is used to drive the second carrier relative to the The mount turns.

In one of the embodiments, the first bearing member is provided with a plurality of grooves, and the grooves are used for accommodating the block-shaped object to be covered.

In one of the embodiments, in the first use state, the first carrier is connected to the installation frame by a threaded fastener; or, the first carrier is snap-connected to the installation frame; Alternatively, the first carrier and the installation frame are fixed by magnetic attraction.

In one of the embodiments, in the second use state, the second carrier is connected to the installation frame through a bearing, and the rotating shaft of the second carrier is connected to the driving member.

In one of the embodiments, the second carrier further includes an air extraction pipe, the air extraction pipe is connected to the air extraction port, the air extraction pipe is arranged coaxially with the rotating shaft, and the two are respectively located on the second The two ends of the bearing along the axial direction.

In one of the embodiments, the central area of the mounting frame is provided with a through receiving groove, the second carrier is located in the receiving groove, and along the axial direction, two ends of the receiving groove are respectively provided with An installation groove, the bearing is sleeved on both the rotating shaft and the exhaust pipe, and the bearing is interference fit with the corresponding installation groove.

In one of the embodiments, the second carrier includes an inner support net and an outer support net arranged radially, and a first end cover and a second end cover connected to both ends of the two respectively, the inner support Both the net and the outer support net are hollowed out, the inner support net is covered with an inner filter net, the outer support net is covered with an outer filter net, and the inner filter net and the outer support net An accommodating cavity for accommodating the powdery object to be coated is formed between the nets, and a suction cavity communicating with the suction pipe is formed inside the inner support net.

In one of the embodiments, the outer support net includes a first end plate of the outer support net, the first end cover is detachably connected to the first end plate of the outer support net, and the rotating shaft is arranged on the first end plate of the outer support net. On the end cover, the rotating shaft is detachably connected to the inner support net.

In one of the embodiments, the outer support net further includes a second end plate of the outer support net, the second end cover is detachably connected to the second end plate of the outer support net, and the exhaust pipe is arranged on the second end plate of the outer support net. On the second end cover, a notch is provided on the second end plate of the outer support net, and the edge of the notch is projected along the axial direction on a side of the accommodating cavity close to the outer support net.

In one of the embodiments, the second carrier includes an inner filter net and an outer filter net arranged radially, and a first end cap and a second end cap respectively connected to both ends of the two, the inner filter net Both the outer filter and the outer filter are sintered filter, and an accommodating cavity for accommodating the powder to be coated is formed between the inner filter and the outer filter, and the inside of the inner filter is formed An air extraction cavity communicated with the air extraction pipe.

In one of the embodiments, quartz glass is installed on the main body of the reaction chamber, and an infrared heating lamp is arranged outside the main body of the reaction chamber, and the infrared heating lamp can heat the reaction chamber through the quartz glass. .

The above-mentioned atomic layer deposition device is provided with a first carrier and a second carrier. If the bulk object to be coated is to be deposited, the first carrier can be fixedly installed on the mounting frame; if the powder To deposit the coating, you can choose to install the second carrier on the mounting frame, and connect the second carrier to the driving part, and drive the second carrier to rotate through the driving part, and the powder to be coated scattered to avoid agglomeration. Therefore, the device can not only deposit the bulk object to be coated, but also deposit the powdery object to be coated, as long as the corresponding carrier is selected and installed according to the shape of the object to be coated, which makes the device The scope of application is wider.

Description of drawings

FIG. 1 is a schematic structural diagram of an atomic layer deposition apparatus in an embodiment of the present invention when the first carrier and the second carrier are not installed;

Fig. 2 is a structural schematic view of the second carrier installed on the mounting frame in an embodiment of the present invention;

Fig. 3 is a structural schematic diagram of the installation of the first carrier on the mounting frame in an embodiment of the present invention;

Fig. 4 is an exploded view of the second carrier in Fig. 2 (some parts are omitted);

Fig. 5 is an exploded view of another angle of the second carrier in Fig. 2 (some parts are omitted);

FIG. 6 is a top view of the second carrier in FIG. 2 (some components are omitted).

Reference signs:

Reaction chamber main body 110, air inlet 111, air extraction port 112, chamber door 120, through hole 121, reaction chamber body 130, quartz glass 140;

Mounting frame 200, receiving groove 210, mounting groove 220;

The first carrier 300, the first groove 310, the second groove 320;

Second carrier 400, outer support net 410, outer support net side plate 411, outer support net first end plate 412, outer support net second end plate 413, gap 4131, inner support net 420, outer filter net 430, inner Filter screen 440, first end cap 451, second end cap 452, rotating shaft 460, special-shaped groove 461, air extraction pipe 470, accommodating cavity 481, air extraction cavity 482, filter screen fixing clip 490;

Driving member 510, shaft coupling 520, first bearing 530, second bearing 540;

Bracket 610, slider 620, slide rail 630.

detailed description

In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. However, the present invention can be implemented in many other ways different from those described here, and those skilled in the art can make similar improvements without departing from the connotation of the present invention, so the present invention is not limited by the specific embodiments disclosed below.

In describing the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " Back", "Left", "Right", "Vertical", "Horizontal", "Top", "Bottom", "Inner", "Outer", "Clockwise", "Counterclockwise", "Axial" , "radial", "circumferential" and other indicated orientations or positional relationships are based on the orientations or positional relationships shown in the drawings, which are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying the referred device or Elements must have certain orientations, be constructed and operate in certain orientations, and therefore should not be construed as limitations on the invention.

In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be interpreted as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, the features defined as "first" and "second" may explicitly or implicitly include at least one of these features. In the description of the present invention, "plurality" means at least two, such as two, three, etc., unless specifically defined otherwise.

In the present invention, unless otherwise clearly specified and limited, terms such as "installation", "connection", "connection" and "fixation" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection , or integrated; it may be mechanically connected or electrically connected; it may be directly connected or indirectly connected through an intermediary, and it may be the internal communication of two components or the interaction relationship between two components, unless otherwise specified limit. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention according to specific situations.

In the present invention, unless otherwise clearly specified and limited, the first feature may be in direct contact with the first feature or the first and second feature may be in direct contact with the second feature through an intermediary. touch. Moreover, "above", "above" and "above" the first feature on the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. "Below", "beneath" and "beneath" the first feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is less horizontally than the second feature.

It should be noted that when an element is referred to as being “fixed on” or “disposed on” another element, it may be directly on the other element or there may be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or intervening elements may also be present. As used herein, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions are for the purpose of illustration only and are not intended to represent the only embodiment.

Referring to Fig. 1 to Fig. 3, Fig. 1 is a structural diagram of the atomic layer deposition apparatus in an embodiment of the present invention when the first carrier and the second carrier are not installed, and Fig. 2 is the second carrier in an embodiment of the present invention A schematic diagram of the structure installed on the installation frame. FIG. 3 is a schematic diagram of the structure of the first bearing member installed on the installation frame in an embodiment of the present invention. An atomic layer deposition apparatus provided by an embodiment of the present invention includes components such as a reaction chamber, a mounting frame 200, a first carrier 300, a second carrier 400, and a driving member 510. The reaction chamber includes a reaction chamber main body 110 and a chamber door 120. The interior of the chamber body 110 is hollow to form a reaction chamber 130 , and one side is open. The chamber door 120 is detachably connected to the reaction chamber body 110. When the chamber door 120 is connected to the reaction chamber body 110, the chamber door 120 seals the opening of the reaction chamber body 110, and the reaction chamber body 130 forms a closed chamber. The main body of the reaction chamber 110 is provided with an air inlet 111 and an air extraction port 112 , the gas can enter the reaction chamber 130 through the air inlet 111 and be drawn out of the reaction chamber 130 through the air extraction port 112 . The mounting frame 200 is fixedly connected to the chamber door 120, and the mounting frame 200 is located inside the chamber door 120. Specifically, the mounting frame 200 is fixedly connected to the inner side wall of the chamber door 120. Therefore, when the chamber door 120 is connected to the reaction chamber main body 110, The installation frame 200 is located in the reaction chamber 130 . The first carrier 300 is used to carry block-shaped objects to be coated, and the second carrier 400 is used to carry powdery objects to be coated. Both the first carrier 300 and the second carrier 400 are detachable from the mounting frame 200 To connect, when performing atomic layer deposition, one of the first carrier 300 and the second carrier 400 is installed on the mounting frame 200 . Specifically, in the first use state, the first carrier 300 is installed on the installation frame 200 and the two are fixedly connected, at this time, atomic layer deposition can be performed on the bulk object to be coated. In the second use state, the second carrier 400 is installed on the mounting frame 200, at this time, atomic layer deposition can be performed on the powdery object to be coated, and the driving member 510 is also connected to the second carrier 400, and the driving member 510 can The second carrier 400 is driven to rotate relative to the mounting frame 200 .

In the above-mentioned embodiment, the first carrier 300 and the second carrier 400 are provided. If the bulk object to be coated is to be deposited, the first carrier 300 can be fixedly installed on the mounting frame 200; To deposit the powdery object to be coated, you can choose to install the second carrier 400 on the mounting frame 200, and connect the second carrier 400 to the driving member 510, and drive the second carrier 400 to rotate through the driving member 510 , break up the powder to be coated to avoid powder agglomeration. Therefore, the device can not only deposit bulk objects to be coated, but also deposit powdery objects to be coated, and can disperse powdery objects to be coated, which meets the requirements of powdery objects to be coated. It is required that before deposition, it is only necessary to select and install the corresponding carrier according to the shape of the object to be coated, which makes the device more applicable.

Referring to FIG. 3 , in some embodiments, the first carrier 300 is provided with a plurality of grooves, and the grooves are used to accommodate block-shaped objects to be covered. Specifically, the first carrier 300 is provided with a first groove 310 and a second groove 320, the size of the first groove 310 is slightly larger than the size of the second groove 320, and the appropriate size can be selected according to the size of the block to be covered. and place it in the selected groove. The positions of the first groove 310 and the second groove 320 are not limited to those shown in the drawings, and the number is not limited to two. It should be noted that the shape of the block to be coated is not limited, and may be plate-like, columnar, spherical or other shapes. Preferably, one of the length and width of the groove is approximately equal to the size of the block to be covered in one direction, so that the block to be covered can be limited to a certain extent to prevent the gas from blowing through the block to be covered. When wrapping, the air pressure is too high to push the block to be wrapped to shift its position and break away from the groove.

Referring to FIG. 3 , in some embodiments, in the first use state, when the first carrier 300 is fixedly installed on the mounting frame 200 , the first carrier 300 and the mounting frame 200 can be connected by threaded fasteners. Specifically, the first carrier 300 is placed on the top of the installation frame 200, and the two are fixed by screws. Alternatively, in some embodiments, the installation between the first bearing member 300 and the installation frame 200 may also be realized through snap connection. Alternatively, in some embodiments, the first bearing member 300 and the installation frame 200 may also be fixed by magnetic attraction, for example, magnetic members are provided on both of them for adsorption and fixation.

Referring to Fig. 2, Fig. 4 to Fig. 6, Fig. 4 is an exploded view of the second carrier in Fig. 2 (some parts are omitted), and Fig. 5 is an exploded view of the second carrier in Fig. 2 from another angle (some parts are omitted ), and FIG. 6 is a top view of the second carrier in FIG. 2 (some components are omitted). In some embodiments, in the second use state, when the second carrier 400 is fixedly installed on the mounting frame 200, the second carrier 400 and the mounting frame 200 are connected by a bearing, and the rotating shaft 460 of the second carrier 400 Connect with the driver 510. During the deposition process, the driving part 510 can drive the second carrier 400 to rotate relative to the mounting frame 200. During the rotation, the powdery object to be coated is continuously rolled up and down in the second carrier 400, which can prevent the powder from agglomerating , it can also increase the contact probability between the powder and the precursor gas, so that the contact reaction between the powder and the precursor gas is more sufficient, and the deposition effect is better. Specifically, the driving member 510 can be a rotating motor or a rotating cylinder, and the rotating shaft 460 of the second carrier 400 passes through the through hole 121 provided on the chamber door 120, and is connected with the output shaft of the driving member 510 through a coupling 520 . In some embodiments, a transmission assembly can also be provided between the driving member 510 and the second carrier 400 , for example, a gear set or a timing belt and other components are provided between the two, and the deceleration or speed-up can be realized through the transmission assembly.

In some embodiments, the second carrier 400 further includes an exhaust pipe 470, which communicates with the air outlet 112 provided on the reaction chamber main body 110, and can connect components such as a vacuum pump to the air outlet 112. The gas flowing through the powder in the second carrier 400 is sucked away. The air extraction pipe 470 is arranged coaxially with the rotating shaft 460 . Along the axial direction of the second carrier 400 , the rotating shaft 460 is located at one end of the second carrier 400 , and the air extraction pipe 470 is located at the other end of the second carrier 400 . When the driving member 510 is working, it is usually necessary to cool down the torque input end, that is, the area where the rotating shaft 460 is located, so as to prevent components from becoming overheated and malfunctioning. In this embodiment, the exhaust pipe 470 and the rotating shaft 460 are arranged at both ends respectively, and the distance between the two is far away. When cooling the area of the rotating shaft 460, the temperature in the exhaust pipe 470 is not easily affected by the cooling, and the precursor is pumped through the exhaust pipe 470. When walking, it is not easy to condense because the temperature is too low, so that it is not easy to block the exhaust pipe 470 . Secondly, compared with the air extraction pipe 470 and the rotating shaft 460 being arranged at the same end, the two ends are separately arranged to reduce the sealing requirements at the air extraction pipe 470, and there is no need to set a magnetic fluid sealing structure with a relatively complicated structure, which can simplify the structure and reduce Cost and difficulty of assembly. Furthermore, the magnetic fluid sealing structure will fail when it exceeds 120 ° C. In this embodiment, there is no need to set a magnetic fluid sealing structure, so the upper limit of the deposition temperature can be increased, so that the device can be used for high-temperature atomic layer deposition, and the application range of the device is wider. wide.

Specifically, in some embodiments, a central area of the installation frame 200 is provided with a through receiving groove 210 , and along the axial direction, two ends of the receiving groove 210 are respectively provided with an installation groove 220 . The second supporting member 400 is located in the receiving groove 210 , and the rotating shaft 460 and the exhaust pipe 470 are respectively installed in the corresponding installing groove 220 . The rotating shaft 460 is connected to the corresponding installation groove 220 through the first bearing 530 , and the first bearing 530 is in interference fit with the installation groove 220 . The air suction pipe 470 is connected with the corresponding mounting groove 220 through the second bearing 540, and the interference fit between the second bearing 540 and the mounting groove 220. Therefore, if the powdery object to be coated is to be deposited, the first bearing 530 and the second bearing 540 should be snapped into the corresponding installation groove 220; if the bulky object to be coated is to be deposited, the first The bearing 530 and the second bearing 540 are removed from the corresponding installation slots 220, and then the first bearing member 300 is installed, which is very convenient to operate.

Specifically, in some embodiments, the second carrier 400 includes components such as an inner support net 420 , an outer support net 410 , an inner filter net 440 , an outer filter net 430 , a first end cover 451 and a second end cover 452 . Both the inner support net 420 and the outer support net 410 are in the shape of a hollow cylinder with two ends open, and the outer support net 410 is arranged radially outside the inner support net 420 with a gap between them. The inner filter 440 is sleeved on the outside of the inner support net 420 , and the two are attached and fixedly connected. The outer filter 430 is sleeved on the outside of the outer support net 410 , and the two are attached and fixedly connected. The inner support net 420 can support and fix the inner filter net 440 to avoid its deformation. Similarly, the outer support net 410 can support and fix the outer filter net 430 . Both the inner support net 420 and the outer support net 410 are hollowed out, and the side walls of both are provided with radially penetrating holes. The first end cover 451 is fixed on one end of the inner support net 420 and the outer support net 410 , and the second end cover 452 is fixed on the other end. An accommodating cavity 481 is formed between the inner filter net 440 and the outer support net 410 , and an air extraction cavity 482 is formed inside the inner support net 420 , and the air extraction cavity 482 communicates with the air extraction pipe 470 . The powdery object to be coated is placed in the housing cavity 481, and the inner filter 440 and the outer filter 430 are both made of high-mesh filters, which can block the powdery object to be coated and prevent it from leaking inward into the pump. The air cavity 482 is drawn away, and it is prevented from leaking outward to the outside of the second carrier 400 .

When performing atomic layer deposition, the powdery object to be coated is placed in the containing cavity 481, the vacuum pump is connected to the gas extraction port 112 provided on the reaction chamber main body 110, and different precursors are alternately fed from the air inlet provided on the reaction chamber main body 110. Port 111 enters the reaction chamber 130, passes through the outer filter 430 and the outer support 410 in turn, and then enters the accommodating chamber 481, contacts with the powder and performs coating deposition, and the excess precursor passes through the inner filter 440 and the inner support in turn. The net 420 then enters the suction cavity 482 and is sucked away through the suction pipe 470 .

In some embodiments, the inner filter 440 is fixed to the outside of the inner support net 420 through a filter fixing clip 490 . Specifically, the inner filter 440 matches the shape and size of the outer wall of the inner support 420, the inner filter 440 is sleeved on the outer wall of the inner support 420, and then the filter fixing clamp 490 is fixed to the outside of the inner filter 440, Just lock it tight. Similarly, the outer filter screen 430 is also fixed on the outside of the outer support net 410 by the filter screen fixing clip 490.

Referring to Fig. 2, Fig. 4 to Fig. 6, specifically, in some embodiments, the outer support net 410 includes a first end plate 412 of the outer support net, and the first end plate 412 of the outer support net is integrally connected to the side plate 411 of the outer support net one end. The rotating shaft 460 is disposed on the first end cover 451 , and the first end cover 451 is detachably connected to the first end plate 412 of the outer support net. The rotating shaft 460 is detachably connected to the inner supporting net 420, specifically, the rotating shaft 460 passes through the first end plate 412 of the outer supporting net, and the part of the rotating shaft 460 located inside the first end plate 412 of the outer supporting net is inserted into the inner supporting net 420, and Interference fit, a sealing ring is arranged between the two. At the same time, the first end plate 412 of the outer support net is connected to the first end cover 451 through threaded fasteners. Preferably, the part of the rotating shaft 460 located inside the first end plate 412 of the outer support net is inserted into the inner support net 420. The diameter gradually decreases, that is, this part is provided with a slope, so that the support net 420 can be easily moved from The first end plate 412 of the outer support net is removed.

Further, in some embodiments, the outer support net 410 also includes a second end plate 413 of the outer support net, and the second end plate 413 of the outer support net and the first end plate 412 of the outer support net are respectively connected to the side plates 411 of the outer support net. both ends. The second end cover 452 is detachably connected with the second end plate 413 of the outer support network, the air extraction pipe 470 is arranged on the second end cover 452, and the end of the air extraction pipe 470 is fixedly connected with the inner support network 420, for example, the end of the air extraction pipe 470 There is an interference fit between the end and the inner support net 420, or the two are fixed by bonding. Specifically, in some embodiments, the suction pipe 470 is hollow inside, and passes through the second end plate 413 of the outer support net, and the part of the suction pipe 470 located inside the second end plate 413 of the outer support net is inserted into the inner support net 420, And interference fit, a sealing ring is arranged between the two. At the same time, the second end plate 413 of the outer support net is connected to the second end cover 452 through threaded fasteners. The second end plate 413 of the outer support net is provided with a notch 4131, the notch 4131 is circular, and the projection of the edge of the notch 4131 along the axial direction is located in the housing cavity 481 on the side close to the outer support net 410, that is, the radius of the notch 4131 is set larger. In this way, it is more convenient to put the powder into the accommodating cavity 481 and take out the powder from the accommodating cavity 481 after the deposition is completed. Specifically, when putting in the powder, the powder is put into the accommodating cavity 481 from the notch 4131 first, and then the second end cover 452 is installed on the second end plate 413 of the outer support net. When taking out the powder, the second end cover 452 is removed from the second end plate 413 of the outer support net, and at the same time, the inner support net 420 and the inner filter net 440 are taken out together, and then the powder is poured out. As mentioned above, the portion of the rotating shaft 460 that is located inside the first end plate 412 of the outer support net is provided with a slope, so when the second end cover 452 is removed, the inner support net 420 is more easily connected to the first end plate of the outer support net. 412 Separation.

Preferably, the rotating shaft 460 is provided with a special-shaped groove 461, and the special-shaped groove 461 is a blind hole with a stepped surface, which can limit the position when connected with the coupling 520.

In some embodiments, the second carrier 400 includes components such as an inner filter 440 , an outer filter 430 , a first end cover 451 and a second end cover 452 . Both the inner filter 440 and the outer filter 430 are hollow cylinders with two ends open, and the outer filter 430 is arranged radially outside the inner filter 440 with a gap between them. The first end cover 451 is fixed on one end of the inner filter 440 and the outer filter 430 , and the second end cover 452 is fixed on the other end. An accommodating cavity 481 is formed between the inner filter 440 and the outer filter 430 , and an air extraction cavity 482 is formed inside the inner filter 440 , and the air extraction cavity 482 communicates with the air extraction pipe 470 . The powdery object to be coated is placed in the housing cavity 481, and the inner filter 440 and the outer filter 430 are both made of high-mesh filters, which can block the powdery object to be coated and prevent it from leaking inward into the pump. The air cavity 482 is drawn away, and it is prevented from leaking outward to the outside of the second carrier 400 . Both the inner filter 440 and the outer filter 430 are made of sintered filter, which has high strength and is not easily deformed.

Referring to FIG. 1 , in some embodiments, quartz glass 140 is installed on the reaction chamber body 110 , and an infrared heating lamp is arranged outside the reaction chamber body 110 , and the infrared heating lamp can heat the reaction chamber 130 through the quartz glass 140 . Compared with resistance heating and other methods, the heating speed of infrared heating is faster, and there is no need to customize the heating jacket according to the size of the reaction chamber like resistance heating, and there is no need to set a special fixed structure, which can simplify the structure.

In some embodiments, there is also a bracket 610 fixedly connected to the chamber door 120 and the driving member 510 , a slider 620 is fixedly connected to the bottom of the bracket 610 , and the slider 620 is slidably connected to the slide rail 630 . When the chamber door 120 is pushed to approach or move away from the reaction chamber body 110 , the slider 620 will slide along the slide rail 630 for guidance.

When using the atomic layer deposition apparatus in the above-mentioned embodiment for atomic layer deposition, first connect the chamber door 120 to the reaction chamber main body 110 to check whether the apparatus is operating normally, and then vacuumize the reaction chamber 130 through the pumping port 112 . Then the chamber door 120 is separated from the reaction chamber main body 110, and the corresponding carrier is selected according to the shape of the object to be coated. If it is a block object to be coated, the first carrier 300 is fixed on the mounting frame 200; if it is For the powdery object to be coated, install the second carrier 400 on the mounting frame 200 . Next, the powdery object to be coated will be described as an example. Connect the chamber door 120 to the reaction chamber main body 110 again, use an infrared heating lamp to heat the reaction chamber body 130, and turn on the driver 510 to drive the second carrier 400 to rotate (if it is the first carrier 300, the driver 510 not open). Pass the carrier gas into the reaction chamber 130 through the gas inlet 111, and after the carrier gas flows into the accommodating chamber 481 and contacts the powdery object to be coated, it flows into the suction pipe 470 through the pumping cavity 482, and is drawn out from the gas pumping port 112 . The carrier gas can be nitrogen or inert gas, and the carrier gas can be passed through first to clean the interior and remove impurities. Then the first precursor is mixed into the carrier gas and passed into the air inlet 111 together. The first precursor is adsorbed on the surface of the powdery object to be coated for deposition, and the excess first precursor flows from the pumping cavity 482 into the pumping pipe 470 and was drawn out. As the second carrier 400 continues to rotate, the first precursor can fully contact and absorb the powdery object to be coated. After a period of time, the first precursor is stopped, and the carrier gas is still fed in, and the interior is purged and cleaned by the carrier gas. After purging for a period of time, the second precursor is mixed into the carrier gas and passed into the air inlet 111 together. The second precursor and the first precursor undergo a chemical reaction on the surface of the powder to be coated, and the reaction product is the coating material. The excess second precursor flows from the pumping chamber 482 into the pumping tube 470 and is pumped out. After a period of time, the second precursor is stopped, and the carrier gas is still fed in, and the interior is purged and cleaned by the carrier gas. This is an atomic layer deposition cycle, that is, a thin film with an atomic layer thickness is deposited on the surface of the object to be coated. In the experiment, the number of deposited layers was controlled by controlling the number of cycles to achieve the expected coating thickness. After the deposition is completed and the carrier gas is purged for a period of time, turn off the vacuum pump, stop pumping out the gas from the pumping port 112, and continue to pass the carrier gas in for return gas, so that the internal pressure is gradually equal to the atmospheric pressure, and then the chamber door 120 and the reaction chamber main body 110 are connected. Separate, cool down to normal temperature, remove the second carrier 400, open the second end cover 452, and pour the product out from the gap 4131 on the second end plate 413 of the outer support net.

The technical features of the above-mentioned embodiments can be combined arbitrarily. To make the description concise, all possible combinations of the technical features in the above-mentioned embodiments are not described. However, as long as there is no contradiction in the combination of these technical features, should be considered as within the scope of this specification.

The above-mentioned embodiments only express several implementation modes of the present invention, and the descriptions thereof are relatively specific and detailed, but should not be construed as limiting the patent scope of the invention. It should be pointed out that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent for the present invention should be based on the appended claims.

Claims

The atomic layer deposition device is characterized in that it comprises:

A reaction chamber, the reaction chamber includes a reaction chamber main body and a door, the interior of the reaction chamber main body forms a reaction chamber, the reaction chamber main body is provided with an air inlet and an air extraction port, the door and the reaction chamber The main body of the chamber is detachably connected;

a mounting frame, the mounting frame is fixedly connected to the chamber door, and when the chamber door is connected to the main body of the reaction chamber, the mounting frame is located inside the reaction chamber;

A first carrier, the first carrier is used to carry a block-shaped object to be covered, and the first carrier is detachably connected to the mounting frame;

A second carrier, the second carrier is used to carry the powdery object to be coated, and the second carrier is detachably connected to the installation frame;

driver;

In the first use state, the first carrier is fixedly connected to the installation frame;

In the second use state, the second carrier is connected to the installation frame, and the driving member is connected to the second carrier, and the driving member is used to drive the second carrier relative to the The mount turns.
The atomic layer deposition apparatus according to claim 1, wherein a plurality of grooves are provided on the first carrier, and the grooves are used to accommodate the block-shaped object to be coated.
The atomic layer deposition apparatus according to claim 1, characterized in that, in the first use state, the first carrier is connected to the mounting frame by a threaded fastener; or, the first carrier It is snap-connected with the installation frame; or, the first carrier is fixed with the installation frame through magnetic attraction.
The atomic layer deposition apparatus according to claim 1, characterized in that, in the second use state, the second carrier is connected to the mounting bracket through a bearing, and the rotating shaft of the second carrier is connected to the The driver is connected.
The atomic layer deposition apparatus according to claim 4, wherein the second carrier further comprises an air extraction pipe, the air extraction pipe is connected to the air extraction port, and the air extraction pipe is arranged coaxially with the rotating shaft, And the two are respectively located at two ends of the second bearing member along the axial direction.
The atomic layer deposition apparatus according to claim 5, characterized in that, the central area of the installation frame is provided with a through accommodation groove, the second carrier is located in the accommodation groove, along the axial direction, the Two ends of the receiving groove are respectively provided with a mounting groove, and the bearings are sheathed on the rotating shaft and the exhaust pipe, and the bearings are interference-fitted with the corresponding mounting grooves.
The atomic layer deposition apparatus according to claim 5, wherein the second carrier comprises an inner support net and an outer support net radially arranged, and a first end cap and an outer support net respectively connected to both ends of the two. The second end cap, the inner support net and the outer support net are both hollowed out, the inner support net is covered with an inner filter net, and the outer support net is covered with an outer filter net, so An accommodating cavity for accommodating the powdery object to be coated is formed between the inner filter net and the outer support net, and an air extraction cavity communicated with the air extraction pipe is formed inside the inner support net.
The atomic layer deposition apparatus according to claim 7, wherein the outer support net comprises a first end plate of the outer support net, and the first end cover is detachably connected to the first end plate of the outer support net, The rotating shaft is arranged on the first end cover, and the rotating shaft is detachably connected with the inner supporting net.
The atomic layer deposition apparatus according to claim 8, wherein the outer support net further comprises a second end plate of the outer support net, and the second end cover is detachably connected to the second end plate of the outer support net , the exhaust pipe is arranged on the second end cover, a notch is provided on the second end plate of the outer support net, and the edge of the notch along the axial projection is located in the accommodating cavity close to the outer support side of the net.
The atomic layer deposition apparatus according to claim 5, wherein the second carrier includes an inner filter and an outer filter arranged radially, and a first end cap and a second end cap respectively connected to both ends of the two. Two end caps, the inner filter and the outer filter are sintered filters, and an accommodating cavity for accommodating the powder to be coated is formed between the inner filter and the outer filter , the inside of the inner filter screen forms a suction cavity communicated with the suction pipe.
The atomic layer deposition device according to claim 1, wherein quartz glass is installed on the main body of the reaction chamber, and an infrared heating lamp is arranged on the outside of the main body of the reaction chamber, and the infrared heating lamp can pass through the Quartz glass heats the reaction chamber.