WO2023272492A1 - Vapor chamber having high heat absorption properties and preparation method therefor - Google Patents

Vapor chamber having high heat absorption properties and preparation method therefor Download PDF

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WO2023272492A1
WO2023272492A1 PCT/CN2021/103146 CN2021103146W WO2023272492A1 WO 2023272492 A1 WO2023272492 A1 WO 2023272492A1 CN 2021103146 W CN2021103146 W CN 2021103146W WO 2023272492 A1 WO2023272492 A1 WO 2023272492A1
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nickel
vapor chamber
layer
protective layer
chromium
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PCT/CN2021/103146
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French (fr)
Chinese (zh)
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沈伟
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沈伟
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    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/56Electroplating: Baths therefor from solutions of alloys
    • C25D3/562Electroplating: Baths therefor from solutions of alloys containing more than 50% by weight of iron or nickel or cobalt
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C22/00Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C22/05Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions
    • C23C22/60Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions using alkaline aqueous solutions with pH greater than 8
    • C23C22/63Treatment of copper or alloys based thereon
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23GCLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G1/00Cleaning or pickling metallic material with solutions or molten salts
    • C23G1/02Cleaning or pickling metallic material with solutions or molten salts with acid solutions
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/34Pretreatment of metallic surfaces to be electroplated
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/48After-treatment of electroplated surfaces
    • C25D5/50After-treatment of electroplated surfaces by heat-treatment
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00Electroplating characterised by the article coated

Definitions

  • the invention relates to electronic devices, in particular to a cooling device for electronic devices, in particular to a vapor chamber with high heat absorption and a preparation method thereof.
  • Vapor chamber products have been widely used in the heat dissipation of consumer electronics products, and currently mainly copper alloy vapor chambers.
  • the appearance of copper alloy products is copper (including brass, red copper, etc.).
  • the vapor chamber it is directly or indirectly in contact with the hot end parts, and its surface temperature is relatively high (the temperature is generally greater than 40°C during operation). Due to the poor corrosion resistance of copper and copper alloys, the vapor chamber is used After a period of time, the surface will be oxidized and the color will become darker and flowery, resulting in poor appearance.
  • Nickel plating refers to the method of plating a layer of nickel on metal or some non-metals by electrolytic or chemical methods.
  • the traditional method is simply electroplating or electroless nickel plating on the surface of copper alloy.
  • the defect of this method is that the plating layer is extremely unstable and easy to cause shedding.
  • nickel plating can increase the corrosion resistance and oxidation resistance of copper alloy to a certain extent, the nickel layer The ease of falling off also makes it difficult to promote the use of large areas.
  • copper and copper alloys are generally soft and have low surface hardness, which can easily cause deformation on the soaking surface and affect performance. Copper alloy The low hardness of copper alloy also affects the overall thickness of the vapor chamber, which is difficult to continue to reduce. At present, all copper alloy vapor chamber products on the market are copper-colored, and there is no copper alloy vapor chamber product with a dark appearance that has high heat absorption and high corrosion resistance.
  • the purpose of the present invention is to provide a vapor chamber with extremely excellent corrosion resistance, good appearance (high surface hardness) and high heat absorption efficiency for the above-mentioned defects in the prior art. Improved proprietary preparation method for vapor chambers.
  • a vapor chamber with high heat absorption which includes a matrix layer, and the vapor chamber also includes a protective layer, the protective layer is adhered and cured to the outer surface of the matrix layer and is dark in color, and is used to strengthen the vapor chamber Oxidation resistance and thermal conductivity.
  • the color range of the dark protective layer is: L value ⁇ 5, a value -2-2, and b value -2-2.
  • the protective layer is a blackened nickel coating or a black nickel coating.
  • the blackening treatment adopts the mode of blackening after pickling earlier, and the pickling liquid selection concentration is the hydrochloric acid aqueous solution of 5%-20%, and the blackening liquid selection is calculated according to mass ratio (1- 3): (2-4): (1-3): (0-6) the mixed solution of sodium hydroxide, sodium nitrate, sodium nitrite and water;
  • the protective layer is a black nickel coating, and in the black nickel coating, the plating solution is selected according to the mass ratio (14-20): (8-10): (5-7): (5-7): ( 8-12): (144-160) mixed solution of nickel sulfate, zinc sulfate, boric acid, potassium thiocyanate, nickel ammonium sulfate and water.
  • the blackening treatment adopts the method of first pickling and then blackening, and the pickling solution is selected to be an aqueous hydrochloric acid solution with a concentration of 5%-20%, and the blackening solution Selection is calculated as (1-3):(2-4):(1-3):(0-6) the mixed solution of sodium hydroxide, sodium nitrate, sodium nitrite and water according to mass ratio; (Blackened nickel coating)
  • the color range is: L value ⁇ 3, a value -1.5 ⁇ 1.5, b value -1 ⁇ 1.
  • the thickness is preferably 0.2-2 ⁇ m, and can be selected as 0.5 ⁇ m, 1 ⁇ m, and 1.5 ⁇ m;
  • the pickling solution is preferably 10% hydrochloric acid aqueous solution, and the pH value of the pickling solution is 3. 3 minutes, 4 minutes;
  • the blackening liquid is preferably a mixture of sodium hydroxide, sodium nitrate, sodium nitrite and water in a mass ratio of 2:3:2:3, the pH of the blackening liquid is 12, and the blackening liquid is The black treatment time was 6 minutes, 7 minutes, 8 minutes or 9 minutes.
  • the protective layer is a black nickel coating
  • the plating solution is selected as (14-20):(8-10):(5-7):(5-7):(8- 12): (144-160) mixed solution of nickel sulfate, zinc sulfate, boric acid, potassium thiocyanate, nickel ammonium sulfate and water; at this time, the color range of the protective layer (black nickel coating) is: L value 1 ⁇ 5.
  • the value of a is -2 ⁇ 2, and the value of b is -2 ⁇ 2.
  • the plating solution is preferably a mixed solution of nickel sulfate, zinc sulfate, boric acid, potassium thiocyanate, nickel ammonium sulfate and water according to the mass ratio of 17:9:6:6:10:152
  • the nickel content of the black nickel coating is 70-90%, and the zinc content is 10-30%, preferably the nickel content is 85-90%, the zinc content is 10-15%, and the nickel content can be selected as 86%, 87%, 88%, 89%, zinc content is 11%, 12%, 13%, 14%.
  • L represents Luminosity
  • a represents the range from red to green
  • b represents the range from yellow to blue.
  • the value range of L is from 0 to 100, and the value ranges of a and b are both from +127 to -128, which can be tested with a spectrophotometer.
  • the vapor chamber also includes a transition layer, and the transition layer is adhered and cured between the base layer and the protective layer, and is separated from the base layer and the protective layer respectively. Interpenetration, used to enhance the cured connection between the base layer and the protective layer.
  • the components of the transition layer include nickel and chromium or nickel, chromium and tin to form a nickel-chromium coating or a nickel-chromium-tin coating;
  • the material of the base layer includes phosphor copper alloy, nickel copper alloy or chromium copper alloy.
  • the base layer is made of copper or copper alloy.
  • the material of the base layer can be selected from phosphor copper alloy, nickel copper alloy or chromium copper alloy, and the content of copper element in the copper alloy is greater than 90% by mass percentage.
  • the composition of the phosphor copper alloy is 5.5-7.0% tin, 0.03-0.35% phosphorus, and the balance is copper;
  • the composition of the nickel-copper alloy is 0.9-1.3% nickel, 0.15-0.35% phosphorus, other ⁇ 0.5%, and the balance is copper;
  • the composition of the chrome-copper alloy is 0.5-1.5% of chromium, 0.02-0.2% of zirconium, and the balance is copper.
  • the transition layer contains the following components in terms of mass percentage: 10%-28% of chromium, 72%-85% of nickel, and 0% of tin -5%.
  • the thickness of the transition layer is 0.1 ⁇ m-10 ⁇ m; the transition layer contains the following components in terms of mass percentage: chromium 10%-28%, nickel 72%-85%, tin 0%-5%, when the tin is 0%, the transition layer contains only nickel and chromium.
  • the thickness of the transition layer is preferably 0.5-4 ⁇ m; more preferably 1 ⁇ m, 1.5 ⁇ m, 2 ⁇ m, 2.5 ⁇ m, 3 ⁇ m, 3.5 ⁇ m.
  • the purpose of this thickness selection is to provide enough nickel and chromium for the surface of the vapor chamber copper alloy for subsequent Alloying operation, the thickness of the nickel layer is less than 0.1 ⁇ m, it is difficult to provide enough nickel and chromium for diffusion; the thickness of the nickel layer is greater than 10 ⁇ m, on the one hand, it will cause high internal stress during the alloying process and cause deformation of the vapor chamber , on the other hand, if the thickness is too thick, the overall thickness of the vapor chamber will be significantly increased;
  • the interpenetration thickness of the transition layer and the base layer is about 0.1-2 ⁇ m, and the interpenetration thickness of the transition layer and the protective layer is about 0.4-2 ⁇ m. It can be seen that during the alloying process, the transition layer and the base layer and the Metal interpenetration has occurred in the protective layer. The fixed connection effect that this kind of interpenetration can produce is far superior to the slight interpenetration produced by metal pressing in traditional technology, which greatly reduces the probability of the overall shedding of the protective layer.
  • the composition of the transition layer is preferably 14%-23% of chromium content, 75%-83.9% of nickel content and 0.1%-4% of tin content in terms of mass percentage; it can be selected as chromium content of 15%, 17%, 19%, 21 %, nickel content is 77%, 79%, 81%, 83%, tin content is 0.1%, 0.5%, 1.0%, 1.2%, 1.5%, 2%, 2.5%, 3%, 3.5%;
  • the nickel-chromium-tin plating method of the transition layer is electroless plating, electroplating or magnetron sputtering plating, preferably electroplating, and nickel-chromium plating and tin plating can be carried out by composite plating.
  • the main plating materials of the nickel-chromium-tin coating are nickel and chromium elements, and a small amount of tin is added.
  • tin can form a solid solution with copper and nickel, which can further improve the nickel-chromium layer.
  • the bonding strength after alloying with copper, under the same conditions, can effectively reduce the temperature of subsequent alloying heat treatment and increase the bonding between solid materials.
  • the transition layer interpenetrates with the outer surface of the base layer to form nickel-chromium-copper alloy or nickel-chromium-tin-copper alloy through alloying treatment; the alloying treatment adopts superalloy
  • the chemical treatment method or the low-temperature oscillation alloying heat treatment method is preferably a low-temperature oscillation alloying heat treatment method.
  • the above-mentioned vapor chamber with high heat absorption is treated by high-temperature alloying: the temperature is 700-950°C, and the holding time is greater than 30 minutes;
  • Low-temperature oscillation alloying heat treatment method the temperature is 550-750°C, and the oscillation frequency is 60-180 times/min.
  • the temperature of the high-temperature alloying treatment is 700-950°C, and the holding time is more than 30 minutes, preferably 750-880°C, and the holding time is 45 minutes; the temperature can be selected as 780°C, 810°C, 830°C, 850°C, and the holding time is optional.
  • the choice is 60min, 75min, 90min.
  • this temperature selection is that when the temperature is lower than 700°C, the diffusion between nickel, copper and chromium will hardly occur or the diffusion rate will be too slow; if the temperature is higher than 950°C, the copper alloy matrix will expand and deform, causing the upper and lower copper sheets on the vapor chamber Cracks at the weld;
  • this holding time is that the alloying treatment holding time is greater than 30 minutes, which can ensure sufficient diffusion between nickel, copper and chromium, and form a layer of nickel-chromium-copper alloy on the outer surface of the vapor chamber.
  • the temperature of low-temperature oscillation alloying heat treatment is 550-750°C
  • the oscillation frequency is 60-180 times/min, preferably 600-700°C
  • the oscillation frequency is 100-140 times/min.
  • the temperature can be selected as 620°C, 640°C, 660°C, 680°C; the oscillation frequency can be selected as 105 times/min, 110 times/min, 115 times/min, 120 times/min, 125 times/min , 130 times/per minute, 135 times/per minute.
  • the principle and purpose of adopting the low-temperature oscillation alloying heat treatment method in the present invention Since the conventional copper-nickel-chromium interdiffusion temperature needs to be higher than 700°C, the higher the temperature, the coarser the copper matrix grains and the lower the hardness will be. Based on the principle of energy conservation, the present invention applies an oscillating force synchronously while applying heat (place the workpiece on an oscillating table for oscillating processing), so that the energy required for material diffusion has mechanical energy in addition to thermal energy, which can reduce the temperature during processing.
  • the applicant has found through a lot of experiments that even if a sufficient oscillation frequency is applied, the diffusion is still difficult to proceed when the temperature is lower than 550°C. Therefore, material diffusion cannot be achieved at too low a temperature, and a suitable temperature is 550-750°C, preferably 650-700°C.
  • the purpose of forming nickel-chromium-copper alloy on the outer surface of the vapor chamber is, on the one hand, to increase the overall hardness of the vapor chamber surface through the addition of chromium, thereby effectively avoiding the deformation of the vapor chamber surface;
  • Nickel blackening or black nickel plating process provides a good transition, because there is an alloy layer as a transition, it ensures a good combination between the subsequent protective layer and the base layer, and avoids the peeling off and failure of the protective layer during use.
  • the second invention point of the present invention is to provide the above-mentioned preparation method of a vapor chamber with high heat absorption, comprising the following steps:
  • a transition layer is attached and solidified between the base layer and the protective layer, and the transition layer interpenetrates with the base layer and the protective layer respectively;
  • the outer surface of the base layer interpenetrates to form nickel-chromium-copper alloy or nickel-chromium-tin-copper alloy;
  • the alloying treatment adopts a high-temperature alloying treatment method or a low-temperature oscillation alloying heat treatment method.
  • the current vapor chamber products are mainly made of copper and copper alloy, and the appearance is copper-colored.
  • the present invention forms a layer of dark protective layer on the surface of the base layer of the vapor chamber product through the surface treatment method, which can effectively increase the corrosion resistance, oxidation resistance and thermal conductivity of the vapor chamber itself. It solves the problem that the existing products are not corrosion-resistant, and also solves the problem that the appearance of the vapor chamber deteriorates due to corrosion after long-term use.
  • the invention also includes a transition layer solidified between the base layer and the protective layer. The transition layer can co-infiltrate with the base layer and the protective layer respectively, which greatly improves the surface hardness of the soaking plate and solves the problem of the difficulty of copper and copper alloy soaking plates. The problem of surface deformation, and the base layer, transition layer and protective layer after co-infiltration are completely fused together, which can effectively solve the problem that the protective layer is easy to fall off.
  • the transition layer contains nickel, chromium, tin and other elements, which can interpenetrate well with the copper or copper alloy of the base layer.
  • the protective layer adopts blackened nickel plating layer or directly adopts black nickel plating layer, which presents a dark color and is harmful to consumer electronics chips.
  • the released heat has better absorption performance, which further improves the performance of the vapor chamber.
  • the operation steps of blackening after nickel coating or direct black nickel plating are added. Since there is a nickel-chromium-tin-copper alloy layer as a transition, a good combination between the subsequent protective layer and the substrate is ensured, and the use process is avoided. The protective layer falls off, fails, etc.
  • the vapor chamber manufactured by the method of the invention has extremely excellent corrosion resistance and appearance, and has high surface hardness. At the same time, nickel-copper alloy + nickel blackened layer has excellent corrosion resistance.
  • the alloying treatment process is improved, and the low-temperature oscillating alloying heat treatment method can overcome the defects of the harsh working environment of the traditional high-temperature alloying treatment and reduce the difficulty of alloying treatment;
  • nickel-chromium-copper alloy can effectively increase the hardness of vapor chamber products, improve service life and reduce accidental damage.
  • Figure 1 shows the flow chart of the existing vapor chamber manufacturing process.
  • Fig. 2 shows a flow chart of the preparation process of the vapor chamber with high heat absorption of the present invention.
  • Figure 3 shows the appearance of the existing copper-colored vapor chamber of Comparative Example 11.
  • Fig. 4 shows the appearance of the dark-colored high heat-absorbing vapor chambers of the present invention in Examples 5 and 8.
  • Fig. 5 is a graph showing the appearance change of the conventional conventional vapor chamber of Comparative Example 11 after 5% sodium chloride neutral salt spray environmental test 1 day.
  • Fig. 6 shows the appearance changes of the high heat absorption vapor chambers of the present invention in Examples 5 and 8 after 5% sodium chloride neutral salt spray environmental test for 30 days.
  • the corrosion resistance is tested by 5% sodium chloride neutral salt spray test
  • the hardness was compared and evaluated by Vickers hardness.
  • the vapor chamber includes a base layer and a protective layer.
  • the protective layer is attached and cured on the outer surface of the base layer to enhance the oxidation resistance of the base layer.
  • the protective layer is blackened nickel plating, or black nickel plating.
  • the thickness of the protective layer is 0.1 ⁇ m-10 ⁇ m;
  • the blackening treatment adopts the mode of first pickling and then blackening, and the pickling solution
  • the selected concentration is 5%-20% hydrochloric acid aqueous solution, and the blackening solution is selected as (1-
  • the color range of the protective layer is: L value ⁇ 3, a value -1.5 ⁇ 1.5, b value -1 ⁇ 1;
  • the plating solution is selected according to mass ratio as (14-20): (8-10): (5-7): (5-7): (8-12): (144-160)
  • the color range of the protective layer is: L value is 1 ⁇ 5, a value is -2 ⁇ 2, b value is -2 ⁇ 2.
  • the base layer is made of copper or copper alloy.
  • the base layer is made of phosphor copper alloy, nickel copper alloy or chrome copper alloy, and the content of copper element in the copper alloy is greater than 90% by mass percentage.
  • a method for preparing a vapor chamber with high heat absorption comprising the following steps:
  • steps S1-S3 and S5 are all conventional methods of the vapor chamber manufacturing process adopted in the art.
  • the vapor chamber includes a base layer and a protective layer.
  • the protective layer is attached and cured on the outer surface of the base layer to enhance the oxidation resistance of the base layer. It also includes a transition layer. The transition layer is adhered and cured between the base layer and the protective layer, and is used to strengthen the cured connection between the base layer and the protective layer.
  • the transition layer is a nickel-chromium-tin plating layer, and the transition layer forms a nickel-chromium-tin-copper alloy with the outer surface of the base layer through alloying treatment.
  • the thickness of the transition layer is 0.1 ⁇ m-10 ⁇ m; the composition of the transition layer is 10%-28% by mass percentage, the nickel content is 72%-85%, and the tin content is 0%-5%; the alloying treatment adopts high temperature alloying Treatment method or low temperature oscillation alloying heat treatment method.
  • the protective layer is blackened nickel plating, or black nickel plating.
  • the thickness of the protective layer is 0.1 ⁇ m-10 ⁇ m;
  • the blackening treatment adopts the mode of first pickling and then blackening, and the pickling solution
  • the selected concentration is 5%-20% hydrochloric acid aqueous solution, and the blackening solution is selected as (1-
  • the color range of the protective layer is: L value ⁇ 3, a value -1.5 ⁇ 1.5, b value -1 ⁇ 1;
  • the plating solution is selected according to mass ratio as (14-20): (8-10): (5-7): (5-7): (8-12): (144-160)
  • the color range of the protective layer is: L value is 1 ⁇ 5, a value is -2 ⁇ 2, b value is -2 ⁇ 2.
  • the base layer is made of copper or copper alloy.
  • the base layer is made of phosphor copper alloy, nickel copper alloy or chrome copper alloy, and the content of copper element in the copper alloy is greater than 90% by mass percentage.
  • the preparation method of the vapor chamber with high heat absorption comprises the following steps:
  • Alloying treatment forms a nickel-chromium-tin-copper alloy with the outer surface of the base layer; the alloying treatment adopts
  • steps S1-S3 and S6 are all conventional methods of vapor chamber manufacturing process adopted in this field.
  • the vapor chamber includes a base layer and a protective layer.
  • the protective layer is attached and cured on the outer surface of the base layer to enhance the oxidation resistance of the base layer.
  • the protective layer is blackened nickel plating with a thickness of 1 ⁇ m;
  • the blackening treatment adopts the mode of first pickling and then blackening, and the pickling solution
  • the color range of the protective layer is: the L value is 2, the a value is 0, and the b value is 0.5;
  • the base layer is phosphor-bronze alloy, and the content of copper element is greater than 90% by mass percentage, wherein tin is 5.5%, phosphorus is 0.35%, and the balance is copper.
  • a method for preparing a vapor chamber with high heat absorption comprising the following steps:
  • steps S1-S3 and S5 are all conventional methods of the vapor chamber manufacturing process adopted in the art.
  • the vapor chamber includes a base layer and a protective layer.
  • the protective layer is attached and cured on the outer surface of the base layer to enhance the oxidation resistance of the base layer.
  • the protective layer is a black nickel-plated layer with a thickness of 1.2 ⁇ m;
  • the plating solution is selected according to the mass ratio of 17:9:6:6:10:152
  • the color range of the protective layer is: the L value is 3, the a value is 0, and the b value is 0.5.
  • the base layer is a nickel-copper alloy, and the content of copper element is greater than 90% by mass percentage, wherein the composition is 0.9-1.3% by mass percentage of nickel, 0.15-0.35% of phosphorus, other ⁇ 0.5%, and the balance is copper.
  • a method for preparing a vapor chamber with high heat absorption comprising the following steps:
  • steps S1-S3 and S5 are all conventional methods of the vapor chamber manufacturing process adopted in the art.
  • the vapor chamber includes a base layer and a protective layer.
  • the protective layer is attached and cured on the outer surface of the base layer to enhance the oxidation resistance of the base layer.
  • the protective layer is blackened nickel plating with a thickness of 1.5 ⁇ m;
  • the blackening treatment adopts the mode of first pickling and then blackening, and the pickling solution
  • the color range of the protective layer is: L value 1, a value 1, b value 0.5;
  • the base layer is a chrome-copper alloy, and the content of copper element is greater than 90% by mass percentage, and its
  • the composition is 0.5-1.5% of chromium, 0.02-0.2% of zirconium, and the balance is copper.
  • a method for preparing a vapor chamber with high heat absorption comprising the following steps:
  • steps S1-S3 and S5 are all conventional methods of the vapor chamber manufacturing process adopted in the art.
  • Embodiment 6 is a diagrammatic representation of Embodiment 6
  • the basic implementation is the same as in Example 3, except that the vapor chamber also includes a transition layer, which is adhered and cured between the base layer and the protective layer to enhance the curing between the base layer and the protective layer connect.
  • the transition layer is a nickel-chromium-tin plating layer, and the transition layer forms a nickel-chromium-tin-copper alloy with the outer surface of the base layer through alloying treatment.
  • the thickness of the transition layer is 0.5 ⁇ m; the composition of the transition layer is 23% by mass percentage, 75% nickel content, and 2% tin content;
  • the nickel-chromium-tin plating method of the transition layer is electroplating.
  • Alloying treatment adopts high temperature alloying treatment
  • the temperature of the high-temperature alloying treatment is 800°C, and the holding time is 45 minutes;
  • the preparation method of the vapor chamber with high heat absorption comprises the following steps:
  • Alloying treatment forms a nickel-chromium-tin-copper alloy with the outer surface of the base layer; the alloying treatment adopts
  • steps S1-S3 and S6 are all conventional methods of vapor chamber manufacturing process adopted in this field.
  • Embodiment 7 is a diagrammatic representation of Embodiment 7:
  • the basic implementation method is the same as that of Example 4, except that the vapor chamber also includes a transition layer, and the transition layer is adhered and cured between the base layer and the protective layer to enhance the curing between the base layer and the protective layer connect.
  • the transition layer is a nickel-chromium-tin plating layer, and the transition layer forms a nickel-chromium-tin-copper alloy with the outer surface of the base layer through alloying treatment.
  • the thickness of the transition layer is 4 ⁇ m; the composition of the transition layer is 14% by mass percentage, 83.9% nickel content, and 2.1% tin content;
  • the nickel-chromium-tin plating method of the transition layer is electroplating.
  • the alloying treatment adopts low temperature oscillation alloying heat treatment.
  • the temperature of the low-temperature oscillation alloying heat treatment method is 660° C., and the oscillation frequency is 120 times/min.
  • the preparation method of the vapor chamber with high heat absorption comprises the following steps:
  • Alloying treatment forms a nickel-chromium-tin-copper alloy with the outer surface of the base layer; the alloying treatment adopts
  • steps S1-S3 and S6 are all conventional methods of vapor chamber manufacturing process adopted in this field.
  • Embodiment 8 is a diagrammatic representation of Embodiment 8
  • the basic implementation is the same as in Example 5, except that the vapor chamber also includes a transition layer, which is adhered and cured between the base layer and the protective layer to enhance the curing between the base layer and the protective layer. connect.
  • the transition layer is a nickel-chromium-tin plating layer, and the transition layer forms a nickel-chromium-tin-copper alloy with the outer surface of the base layer through alloying treatment.
  • the thickness of the transition layer is 2 ⁇ m; the composition of the transition layer is 18% by mass percentage, 80% nickel content, and 2% tin content;
  • the nickel-chromium-tin plating method of the transition layer is electroplating.
  • the alloying treatment adopts low temperature oscillation alloying heat treatment.
  • the temperature of the low-temperature oscillation alloying heat treatment method is 600° C., and the oscillation frequency is 140 times/min.
  • the preparation method of the vapor chamber with high heat absorption comprises the following steps:
  • Alloying treatment forms a nickel-chromium-tin-copper alloy with the outer surface of the base layer; the alloying treatment adopts
  • steps S1-S3 and S6 are all conventional methods of vapor chamber manufacturing process adopted in this field.
  • the vapor chamber is made of phosphor copper alloy.
  • Embodiments 3, 6 and Comparative Example 9 all adopt phosphor copper alloy as the base material, so comparative analysis is carried out for the product performance of the two, and the specific data are as follows:
  • Embodiments 3 and 6 Appearance color (original): L value 2, a value 0, b value 0.5, 5% sodium chloride neutral salt spray test for 30 days, the appearance color is consistent with the original, L value 2.2; a value 0.5 , b-value 0.5.
  • Comparative example 9 5% sodium chloride neutral salt spray test, corrosion products appear on the surface after 8 hours, the color changes, the color difference is large, and the appearance effect is poor.
  • Embodiment 3, 6 surface Vickers hardness HV205.
  • Comparative example 9 surface Vickers hardness HV120.
  • Examples 3 and 6 the initial heat transfer efficiency is 85%, and the heat transfer efficiency is 80% after 30 days.
  • Comparative Example 9 The initial heat transfer efficiency was 87%, and the heat transfer efficiency was 60% after 2 days.
  • Embodiments 3 and 6 the thickness is 0.3515 mm.
  • Comparative example 9 the thickness is 0.35 mm.
  • the average service life is 1113 days, and the average service life is 908 days in a highly corrosive environment.
  • Comparative Example 9 The average service life is 1126 days, and the average service life is 118 days in a highly corrosive environment.
  • the vapor chamber is made of nickel-copper alloy.
  • Embodiment 4, 7 and comparative example 10 all adopt nickel-copper alloy as matrix material, so comparative analysis is carried out at the product performance of the two, and concrete data is as follows:
  • Embodiments 4 and 7 Appearance color (original): L value 3, a value 0, b value 0.5, 5% sodium chloride neutral salt spray test for 30 days, the appearance color is consistent with the original, L value 2.6; a value 0.3 , b-value 0.1.
  • Comparative example 10 5% sodium chloride neutral salt spray test, corrosion products appear on the surface after 14 hours, the color changes, the color difference is large, and the appearance effect is poor.
  • Embodiment 4, 7 surface Vickers hardness HV265.
  • Comparative example 10 surface Vickers hardness HV162.
  • Examples 4 and 7 The initial heat transfer efficiency is 90%, and the heat transfer efficiency after 30 days is 88%.
  • Comparative Example 10 The initial heat transfer efficiency was 89%, and the heat transfer efficiency after 3 days was 76%.
  • Embodiment 4, 7 Thickness 0.3552mm.
  • Comparative example 10 the thickness is 0.35 mm.
  • Embodiments 4 and 7 The average service life is 1128 days, and the average service life is 1103 days in a highly corrosive environment.
  • Comparative example 10 The average service life is 1130 days, and the average service life is 150 days in a highly corrosive environment.
  • High-temperature alloying In the process of alloying, high-temperature alloying is usually used, but the present invention proposes an operation mode of low-temperature oscillation forging alloying.
  • High-temperature alloying needs to reach a high temperature of at least 700°C or even 900°C, which requires extremely high processing environment and equipment.
  • the present invention adopts a lower constant temperature oscillation forging method, and the ambient temperature can be reduced to 660°C.
  • the traditional high heat energy is replaced by low heat energy + mechanical energy.
  • Oscillatory forging can produce instantaneous ultra-high pressure mechanical energy impact, so only low heat energy is needed to destroy the molecular structure of the alloy layer surface, and the firmness of the final forged product can be completely guaranteed. Comparable to existing high-temperature alloyed products, but the required energy and equipment requirements are greatly reduced.
  • the vapor chamber is made of chrome-copper alloy.
  • Embodiment 5,8 and comparative example 11 all adopt chrome-copper alloy as matrix material, so comparative analysis is carried out at the product performance of the two, and specific data are as follows:
  • embodiment 5,8 appearance color (original): L value 1, a value 1, b value 0.5, 5% sodium chloride neutral salt spray test 30 days, appearance color is consistent with original, L The value is 1.1; the value of a is 1.3, and the value of b is 0.2.
  • comparative example 11 5% sodium chloride neutral salt spray test, corrosion products appear on the surface after 20 hours, the color changes, the color difference is large, and the appearance effect is poor.
  • Comparative example 11 Surface Vickers hardness HV186.
  • Examples 5 and 8 The initial heat transfer efficiency is 94%, and the heat transfer efficiency after 30 days is 90%.
  • Comparative Example 11 The initial heat transfer efficiency was 95%, and the heat transfer efficiency was 73% after 2 days.
  • Embodiments 5 and 8 the thickness is 0.3535 mm.
  • Comparative example 11 the thickness is 0.35 mm.
  • Examples 5 and 8 the average service life is 1135 days, and the average service life is 1132 days in a highly corrosive environment.
  • Comparative example 11 The average service life is 1130 days, and the average service life is 166 days in a highly corrosive environment.
  • High-temperature alloying In the process of alloying, high-temperature alloying is usually used, but the present invention proposes an operation mode of low-temperature oscillation forging alloying.
  • High-temperature alloying needs to reach a high temperature of at least 700°C or even 900°C, which requires extremely high processing environment and equipment.
  • the present invention adopts a lower constant temperature oscillation forging method, and the ambient temperature can be reduced to 600°C.
  • the traditional high heat energy is replaced by low heat energy + mechanical energy.
  • Oscillatory forging can produce instantaneous ultra-high pressure mechanical energy impact, so only low heat energy is needed to destroy the molecular structure of the alloy layer surface, and the firmness of the final forged product can be completely guaranteed. Comparable to existing high-temperature alloyed products, but the required energy and equipment requirements are greatly reduced.

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Abstract

A vapor chamber having high heat absorption properties, comprising a substrate layer. The vapor chamber further comprises a protective layer; the protective layer is adhered and solidified on the outer surface of the substrate layer, is dark in color, and is used for enhancing the oxidation resistance and heat conductivity of the vapor chamber. Further disclosed is a preparation method for the vapor chamber. The characteristics and advantages are that: a deep color protective layer is formed on the surface of the substrate layer of the vapor chamber by means of surface treatment, and thus the corrosion resistance, oxidation resistance, and heat conduction property of the vapor chamber can be effectively improved. The problems that existing products are not resistant to corrosion, and the appearance becomes poor due to corrosion after long-term use are solved. The vapor chamber further comprises a transition layer solidified between the substrate layer and the protective layer, the transition layer can be separately subjected to co-permeation with the substrate layer and the protective layer, the surface hardness of the vapor chamber is improved, the problem that copper and copper alloy vapor chambers are prone to deformation is solved, the substrate layer, the transition layer, and the protective layer which are subjected to co-permeation are completely fused into a whole, and the problem that the protective layer is easy to fall off is effectively solved.

Description

一种具有高吸热性的均热板及其制备方法A vapor chamber with high heat absorption and its preparation method 技术领域technical field

本发明涉及电子器件,特别涉及电子器件的散热装置,具体涉及一种具有高吸热性的均热板及其制备方法。The invention relates to electronic devices, in particular to a cooling device for electronic devices, in particular to a vapor chamber with high heat absorption and a preparation method thereof.

背景技术Background technique

均热板产品已经广泛应用于消费电子产品的散热中,目前主要为铜合金材料均热板。铜合金产品外观为铜色(包括黄铜色、红铜色等)。均热板在使用过程中,直接或间接与热端部件接触,其表面温度相对较高(工作时温度一般大于40℃),由于铜及铜合金自身耐腐蚀性能较差,均热板在使用一段时间后表面发生氧化会发生颜色变暗、变花等,导致外观效果变差。同时,长期使用后,由于表面氧化易导致均热板铜片发生腐蚀加剧,最终导致均热板发生泄漏失效,这也是现有使用均热板的电子产品,如手机等,在使用两三年之后,由于均热板不良品率明显上升从而导致手机明显变慢的重要原因之一,现有均热板制作工艺流程如图1所示。Vapor chamber products have been widely used in the heat dissipation of consumer electronics products, and currently mainly copper alloy vapor chambers. The appearance of copper alloy products is copper (including brass, red copper, etc.). During the use of the vapor chamber, it is directly or indirectly in contact with the hot end parts, and its surface temperature is relatively high (the temperature is generally greater than 40°C during operation). Due to the poor corrosion resistance of copper and copper alloys, the vapor chamber is used After a period of time, the surface will be oxidized and the color will become darker and flowery, resulting in poor appearance. At the same time, after long-term use, due to the oxidation of the surface, the copper sheet of the vapor chamber will be corroded and intensified, which will eventually lead to leakage and failure of the vapor chamber. Afterwards, one of the important reasons for the obvious slowdown of the mobile phone due to the obvious increase in the defective rate of the vapor chamber, the existing manufacturing process of the vapor chamber is shown in Figure 1.

镀镍是指通过电解或化学方法在金属或某些非金属上镀上一层镍的方法,现有技术中也存在在铜合金表面镀镍以增强其耐腐蚀耐氧化性的相关技术,但传统方式只是简单在铜合金表面电镀或化学镀镍,此方式的缺陷在于,镀层极不稳定,容易造成脱落,虽然镀镍后可一定程度上增加铜合金的耐腐蚀耐氧化性,但镍层的易脱落性也使其难以大面积推广使用。Nickel plating refers to the method of plating a layer of nickel on metal or some non-metals by electrolytic or chemical methods. In the prior art, there is also a related technology of nickel plating on the surface of copper alloys to enhance its corrosion resistance and oxidation resistance, but The traditional method is simply electroplating or electroless nickel plating on the surface of copper alloy. The defect of this method is that the plating layer is extremely unstable and easy to cause shedding. Although nickel plating can increase the corrosion resistance and oxidation resistance of copper alloy to a certain extent, the nickel layer The ease of falling off also makes it difficult to promote the use of large areas.

另外,铜及铜合金普遍较软,表面硬度低,极易导致均热表面发生变 形,影响性能。铜合金铜合金低硬度的特点也影响了均热板的整体厚度很难继续下调。目前市面上所有的铜合金均热板产品均为铜色,没有一款深色外观同时具有高吸热性、高耐蚀性的铜合金均热板产品。In addition, copper and copper alloys are generally soft and have low surface hardness, which can easily cause deformation on the soaking surface and affect performance. Copper alloy The low hardness of copper alloy also affects the overall thickness of the vapor chamber, which is difficult to continue to reduce. At present, all copper alloy vapor chamber products on the market are copper-colored, and there is no copper alloy vapor chamber product with a dark appearance that has high heat absorption and high corrosion resistance.

发明内容Contents of the invention

本发明的目的是提供针对上述现有技术中的缺陷,提供了一种具有极为优异耐腐蚀性能、外观性能好(表面硬度高)且吸热效率高的均热板,同时还提供了此种均热板的经过改进的专用制备方法。The purpose of the present invention is to provide a vapor chamber with extremely excellent corrosion resistance, good appearance (high surface hardness) and high heat absorption efficiency for the above-mentioned defects in the prior art. Improved proprietary preparation method for vapor chambers.

本发明的上述目的可采用下列技术方案来实现:Above-mentioned purpose of the present invention can adopt following technical scheme to realize:

一种具有高吸热性的均热板,其包括有基体层,所述均热板还包括保护层,所述保护层附着固化于基体层外表面并为深色,用于增强均热板的耐氧化性和导热性。A vapor chamber with high heat absorption, which includes a matrix layer, and the vapor chamber also includes a protective layer, the protective layer is adhered and cured to the outer surface of the matrix layer and is dark in color, and is used to strengthen the vapor chamber Oxidation resistance and thermal conductivity.

进一步的,上述的一种具有高吸热性的均热板,深色的所述保护层的颜色范围为:L值≤5,a值为-2~2,b值为-2~2。Further, in the above-mentioned vapor chamber with high heat absorption, the color range of the dark protective layer is: L value ≤ 5, a value -2-2, and b value -2-2.

进一步的,上述的一种具有高吸热性的均热板,所述保护层为发黑处理镍镀层或黑镍镀层。Further, in the above vapor chamber with high heat absorption, the protective layer is a blackened nickel coating or a black nickel coating.

进一步的,上述的一种具有高吸热性的均热板,Further, the above-mentioned vapor chamber with high heat absorption,

在所述发黑处理镍镀层中,发黑处理采用先酸洗后发黑的方式,酸洗液选择浓度为5%-20%的盐酸水溶液,发黑液选择按照质量比计为(1-3):(2-4):(1-3):(0-6)的氢氧化钠、硝酸钠、亚硝酸钠和水的混合液;In the described blackening treatment nickel coating, the blackening treatment adopts the mode of blackening after pickling earlier, and the pickling liquid selection concentration is the hydrochloric acid aqueous solution of 5%-20%, and the blackening liquid selection is calculated according to mass ratio (1- 3): (2-4): (1-3): (0-6) the mixed solution of sodium hydroxide, sodium nitrate, sodium nitrite and water;

在所述保护层为黑镍镀层,所述黑镍镀层中,镀液选择按照质量比计为(14-20):(8-10):(5-7):(5-7):(8-12):(144-160)的硫酸镍、硫酸锌、硼酸、硫氰酸钾、硫酸镍铵与水的混合液。The protective layer is a black nickel coating, and in the black nickel coating, the plating solution is selected according to the mass ratio (14-20): (8-10): (5-7): (5-7): ( 8-12): (144-160) mixed solution of nickel sulfate, zinc sulfate, boric acid, potassium thiocyanate, nickel ammonium sulfate and water.

保护层为发黑处理镍镀层时,所述发黑处理镍镀层中,发黑处理采用先酸洗后发黑的方式,酸洗液选择浓度为5%-20%的盐酸水溶液,发黑液 选择按照质量比计为(1-3):(2-4):(1-3):(0-6)的氢氧化钠、硝酸钠、亚硝酸钠和水的混合液;此时保护层(发黑处理镍镀层)的颜色范围为:L值≤3,a值为-1.5~1.5,b值为-1~1。When the protective layer is a blackened nickel coating, in the blackened nickel coating, the blackening treatment adopts the method of first pickling and then blackening, and the pickling solution is selected to be an aqueous hydrochloric acid solution with a concentration of 5%-20%, and the blackening solution Selection is calculated as (1-3):(2-4):(1-3):(0-6) the mixed solution of sodium hydroxide, sodium nitrate, sodium nitrite and water according to mass ratio; (Blackened nickel coating) The color range is: L value ≤ 3, a value -1.5 ~ 1.5, b value -1 ~ 1.

保护层为发黑处理镍镀层时,厚度优选为0.2-2μm,可选择为0.5μm,1μm,1.5μm;酸洗液优选为10%的盐酸水溶液,酸洗液pH值为3,酸洗时间为3分钟,4分钟;发黑液优选为按照质量比计为2:3:2:3的氢氧化钠、硝酸钠、亚硝酸钠和水的混合液,发黑液pH值为12,发黑处理时间为6分钟、7分钟、8分钟或9分钟。When the protective layer is a blackened nickel coating, the thickness is preferably 0.2-2 μm, and can be selected as 0.5 μm, 1 μm, and 1.5 μm; the pickling solution is preferably 10% hydrochloric acid aqueous solution, and the pH value of the pickling solution is 3. 3 minutes, 4 minutes; the blackening liquid is preferably a mixture of sodium hydroxide, sodium nitrate, sodium nitrite and water in a mass ratio of 2:3:2:3, the pH of the blackening liquid is 12, and the blackening liquid is The black treatment time was 6 minutes, 7 minutes, 8 minutes or 9 minutes.

保护层为黑镍镀层时,所述黑镍镀层中,镀液选择按照质量比计为(14-20):(8-10):(5-7):(5-7):(8-12):(144-160)的硫酸镍、硫酸锌、硼酸、硫氰酸钾、硫酸镍铵与水的混合液;此时保护层(黑镍镀层)的颜色范围为:L值为1~5,a值为-2~2,b值为-2~2。When the protective layer is a black nickel coating, in the described black nickel coating, the plating solution is selected as (14-20):(8-10):(5-7):(5-7):(8- 12): (144-160) mixed solution of nickel sulfate, zinc sulfate, boric acid, potassium thiocyanate, nickel ammonium sulfate and water; at this time, the color range of the protective layer (black nickel coating) is: L value 1~ 5. The value of a is -2~2, and the value of b is -2~2.

保护层为黑镍镀层时,镀液优选为按照质量比计为17:9:6:6:10:152的硫酸镍、硫酸锌、硼酸、硫氰酸钾、硫酸镍铵与水的混合液;黑镍镀层的镍含量为70-90%、锌含量为10-30%,优选为镍含量为85-90%、锌含量为10-15%,镍含量可选择为86%、87%、88%、89%,锌含量为11%、12%、13%、14%。When the protective layer is a black nickel coating, the plating solution is preferably a mixed solution of nickel sulfate, zinc sulfate, boric acid, potassium thiocyanate, nickel ammonium sulfate and water according to the mass ratio of 17:9:6:6:10:152 The nickel content of the black nickel coating is 70-90%, and the zinc content is 10-30%, preferably the nickel content is 85-90%, the zinc content is 10-15%, and the nickel content can be selected as 86%, 87%, 88%, 89%, zinc content is 11%, 12%, 13%, 14%.

其中,L表示明度(Luminosity),a表示从红色至绿色的范围,b表示从黄色至蓝色的范围。L的值域从0到100,a和b的值域均从+127至-128,可用分光测色计测试。Among them, L represents Luminosity, a represents the range from red to green, and b represents the range from yellow to blue. The value range of L is from 0 to 100, and the value ranges of a and b are both from +127 to -128, which can be tested with a spectrophotometer.

进一步的,上述的一种具有高吸热性的均热板,所述均热板还包括有过渡层,所述过渡层附着固化于基体层和保护层中间并分别与基体层和保护层发生互渗,用于增强基体层与保护层之间的固化连接。Further, in the above-mentioned vapor chamber with high heat absorption, the vapor chamber also includes a transition layer, and the transition layer is adhered and cured between the base layer and the protective layer, and is separated from the base layer and the protective layer respectively. Interpenetration, used to enhance the cured connection between the base layer and the protective layer.

进一步的,上述的一种具有高吸热性的均热板,所述过渡层的组分包括镍和铬或者镍、铬和锡,形成镍铬镀层或镍铬锡镀层;Further, in the above vapor chamber with high heat absorption, the components of the transition layer include nickel and chromium or nickel, chromium and tin to form a nickel-chromium coating or a nickel-chromium-tin coating;

优选地,所述基体层的材质包括磷铜合金、镍铜合金或铬铜合金。Preferably, the material of the base layer includes phosphor copper alloy, nickel copper alloy or chromium copper alloy.

具有高吸热性的均热板,通常情况下,基体层为铜或铜合金材质。Vapor chambers with high heat absorption, usually, the base layer is made of copper or copper alloy.

基体层的材质可选择为磷铜合金、镍铜合金或铬铜合金,铜合金中铜元素的含量按照质量百分比计大于90%。The material of the base layer can be selected from phosphor copper alloy, nickel copper alloy or chromium copper alloy, and the content of copper element in the copper alloy is greater than 90% by mass percentage.

优选的,磷铜合金的组成按照质量百分比计为锡5.5-7.0%,磷0.03-0.35%,余量为铜;Preferably, the composition of the phosphor copper alloy is 5.5-7.0% tin, 0.03-0.35% phosphorus, and the balance is copper;

优选的,镍铜合金的组成按照质量百分比计为镍0.9-1.3%,磷0.15-0.35%,其它≤0.5%,余量为铜;Preferably, the composition of the nickel-copper alloy is 0.9-1.3% nickel, 0.15-0.35% phosphorus, other ≤ 0.5%, and the balance is copper;

优选的,铬铜合金的组成按照质量百分比计为铬0.5-1.5%,锆0.02-0.2%,余量为铜。Preferably, the composition of the chrome-copper alloy is 0.5-1.5% of chromium, 0.02-0.2% of zirconium, and the balance is copper.

进一步的,上述的一种具有高吸热性的均热板,所述过渡层中,含有按照质量百分比计的以下组分:铬10%-28%,镍72%-85%,锡0%-5%。Further, in the above-mentioned vapor chamber with high heat absorption, the transition layer contains the following components in terms of mass percentage: 10%-28% of chromium, 72%-85% of nickel, and 0% of tin -5%.

过渡层厚度为0.1μm-10μm;过渡层含有按照质量百分比计的以下组分:铬10%-28%,镍72%-85%,锡0%-5%,当锡为0%时,过渡层仅含有镍和铬。The thickness of the transition layer is 0.1 μm-10 μm; the transition layer contains the following components in terms of mass percentage: chromium 10%-28%, nickel 72%-85%, tin 0%-5%, when the tin is 0%, the transition layer contains only nickel and chromium.

过渡层厚度优选为0.5-4μm;更优选为1μm,1.5μm,2μm,2.5μm,3μm,3.5μm,此厚度的选择,目的在于,为均热板铜合金表面提供足够的镍、铬进行后续合金化操作,镍层厚度小于0.1μm,很难提供用于扩散的足够的镍、铬;镍层厚度大于10μm,一方面会导致合金化过程中产生较高的内应力导致均温板发生变形,另一方面厚度过厚会明显增加均热板的整体厚度;The thickness of the transition layer is preferably 0.5-4 μm; more preferably 1 μm, 1.5 μm, 2 μm, 2.5 μm, 3 μm, 3.5 μm. The purpose of this thickness selection is to provide enough nickel and chromium for the surface of the vapor chamber copper alloy for subsequent Alloying operation, the thickness of the nickel layer is less than 0.1 μm, it is difficult to provide enough nickel and chromium for diffusion; the thickness of the nickel layer is greater than 10 μm, on the one hand, it will cause high internal stress during the alloying process and cause deformation of the vapor chamber , on the other hand, if the thickness is too thick, the overall thickness of the vapor chamber will be significantly increased;

过渡层与基体层的互渗厚度约为0.1-2μm,过渡层与保护层的互渗厚度约为0.4-2μm,由此可以看出,在合金化处理过程中,过渡层分别与基体层和保护层发生了金属互渗,此种互渗能够产生的固定连接效果,要远远优于传统技术中金属压片所产生的微量互渗,大大降低了保护层 整体的脱落概率。The interpenetration thickness of the transition layer and the base layer is about 0.1-2 μm, and the interpenetration thickness of the transition layer and the protective layer is about 0.4-2 μm. It can be seen that during the alloying process, the transition layer and the base layer and the Metal interpenetration has occurred in the protective layer. The fixed connection effect that this kind of interpenetration can produce is far superior to the slight interpenetration produced by metal pressing in traditional technology, which greatly reduces the probability of the overall shedding of the protective layer.

过渡层组成优选为按照质量百分比计优选为铬含量14%-23%,镍含量75%-83.9%,锡含量0.1%-4%;可选择为铬含量15%,17%,19%,21%,镍含量为77%,79%,81%,83%,锡含量为0.1%,0.5%,1.0%,1.2%,1.5%,2%,2.5%,3%,3.5%;The composition of the transition layer is preferably 14%-23% of chromium content, 75%-83.9% of nickel content and 0.1%-4% of tin content in terms of mass percentage; it can be selected as chromium content of 15%, 17%, 19%, 21 %, nickel content is 77%, 79%, 81%, 83%, tin content is 0.1%, 0.5%, 1.0%, 1.2%, 1.5%, 2%, 2.5%, 3%, 3.5%;

过渡层的镀镍铬锡方式为化学镀、电镀或磁控溅射镀,优选为电镀,镀镍铬和镀锡可采用复合镀的方式进行。The nickel-chromium-tin plating method of the transition layer is electroless plating, electroplating or magnetron sputtering plating, preferably electroplating, and nickel-chromium plating and tin plating can be carried out by composite plating.

镍铬锡镀层的主要镀料为镍、铬元素,微量加入锡,在后续的合金化处理过程中,由于锡的熔点较低,锡可与铜和镍发生固溶,能够进一步提高镍铬层与铜合金化后的结合强度,同样条件下,可有效降低后续合金化热处理的温度,增加固体物料之间的结合性。The main plating materials of the nickel-chromium-tin coating are nickel and chromium elements, and a small amount of tin is added. In the subsequent alloying process, due to the low melting point of tin, tin can form a solid solution with copper and nickel, which can further improve the nickel-chromium layer. The bonding strength after alloying with copper, under the same conditions, can effectively reduce the temperature of subsequent alloying heat treatment and increase the bonding between solid materials.

进一步的,上述的一种具有高吸热性的均热板,过渡层通过合金化处理与基体层外表面互渗形成镍铬铜合金或镍铬锡铜合金;所述合金化处理采用高温合金化处理方式或低温振荡合金化热处理方式,优选为低温振荡合金化热处理方式。Further, in the above-mentioned vapor chamber with high heat absorption, the transition layer interpenetrates with the outer surface of the base layer to form nickel-chromium-copper alloy or nickel-chromium-tin-copper alloy through alloying treatment; the alloying treatment adopts superalloy The chemical treatment method or the low-temperature oscillation alloying heat treatment method is preferably a low-temperature oscillation alloying heat treatment method.

进一步的,上述的一种具有高吸热性的均热板,高温合金化处理方式:温度为700-950℃,保温时间大于30min;Further, the above-mentioned vapor chamber with high heat absorption is treated by high-temperature alloying: the temperature is 700-950°C, and the holding time is greater than 30 minutes;

低温振荡合金化热处理方式:温度为550-750℃,振荡频率为60-180次/每分钟。Low-temperature oscillation alloying heat treatment method: the temperature is 550-750°C, and the oscillation frequency is 60-180 times/min.

高温合金化处理方式的温度为700-950℃,保温时间大于30min,优选为750-880℃,保温时间为45min;可选择为温度780℃,810℃,830℃,850℃,保温时间还可选择为60min,75min,90min。The temperature of the high-temperature alloying treatment is 700-950°C, and the holding time is more than 30 minutes, preferably 750-880°C, and the holding time is 45 minutes; the temperature can be selected as 780°C, 810°C, 830°C, 850°C, and the holding time is optional. The choice is 60min, 75min, 90min.

此温度的选择,其目的在于,低于700℃时,镍铜铬之间几乎不会发生扩散或者扩散速度过慢;温度大于950℃会导致铜合金基体发生膨胀变形引起均温板上下铜片焊接处发生开裂;The purpose of this temperature selection is that when the temperature is lower than 700°C, the diffusion between nickel, copper and chromium will hardly occur or the diffusion rate will be too slow; if the temperature is higher than 950°C, the copper alloy matrix will expand and deform, causing the upper and lower copper sheets on the vapor chamber Cracks at the weld;

此保温时间的选择,其目的在于,合金化处理保温时间大于30分钟,可以保证镍铜铬之间发生充分的扩散,在均热板外表面形成一层镍铬铜合金。The purpose of the selection of this holding time is that the alloying treatment holding time is greater than 30 minutes, which can ensure sufficient diffusion between nickel, copper and chromium, and form a layer of nickel-chromium-copper alloy on the outer surface of the vapor chamber.

低温振荡合金化热处理方式的温度为550-750℃,振荡频率为60-180次/每分钟,优选为600-700℃,振荡频率为100-140次/每分钟。温度可选择为620℃,640℃,660℃,680℃;振荡频率可选择为105次/每分钟,110次/每分钟,115次/每分钟,120次/每分钟,125次/每分钟,130次/每分钟,135次/每分钟。The temperature of low-temperature oscillation alloying heat treatment is 550-750°C, the oscillation frequency is 60-180 times/min, preferably 600-700°C, and the oscillation frequency is 100-140 times/min. The temperature can be selected as 620°C, 640°C, 660°C, 680°C; the oscillation frequency can be selected as 105 times/min, 110 times/min, 115 times/min, 120 times/min, 125 times/min , 130 times/per minute, 135 times/per minute.

本发明采用低温振荡合金化热处理方式的原理及目的:由于常规铜镍铬互扩散温度需要大于700℃,温度越高会导致铜基体晶粒粗化、硬度明显降低。本发明基于能量守恒原理,在施加热度的同时同步施加振荡力(将工件放在振荡台上进行振荡处理),这样材料扩散所需要的能量除了热能又有了机械能,可以降低处理时的温度,但申请人经过大量实验发现,即使施加足够的振荡频率,当温度低于550℃时,扩散仍难以进行。因此过低的温度也是无法实现材料扩散的,合适的温度为550-750℃,优选650-700℃。The principle and purpose of adopting the low-temperature oscillation alloying heat treatment method in the present invention: Since the conventional copper-nickel-chromium interdiffusion temperature needs to be higher than 700°C, the higher the temperature, the coarser the copper matrix grains and the lower the hardness will be. Based on the principle of energy conservation, the present invention applies an oscillating force synchronously while applying heat (place the workpiece on an oscillating table for oscillating processing), so that the energy required for material diffusion has mechanical energy in addition to thermal energy, which can reduce the temperature during processing. However, the applicant has found through a lot of experiments that even if a sufficient oscillation frequency is applied, the diffusion is still difficult to proceed when the temperature is lower than 550°C. Therefore, material diffusion cannot be achieved at too low a temperature, and a suitable temperature is 550-750°C, preferably 650-700°C.

在均热板外表面形成镍铬铜合金的目的,一方面是通过铬的添加,使得均热板表面整体硬度增加,从而有效避免均热板表面变形问题;另一方面,是为了后续进行覆镍发黑或者镀黑镍工艺提供良好的过渡,由于有合金层为过渡,保证了后续保护层与基体层之间的良好结合,避免了使用过程中发生保护层脱落、失效等情况。The purpose of forming nickel-chromium-copper alloy on the outer surface of the vapor chamber is, on the one hand, to increase the overall hardness of the vapor chamber surface through the addition of chromium, thereby effectively avoiding the deformation of the vapor chamber surface; Nickel blackening or black nickel plating process provides a good transition, because there is an alloy layer as a transition, it ensures a good combination between the subsequent protective layer and the base layer, and avoids the peeling off and failure of the protective layer during use.

本发明的第二个发明点是提供了上述一种具有高吸热性的均热板的制备方法,包括以下步骤:The second invention point of the present invention is to provide the above-mentioned preparation method of a vapor chamber with high heat absorption, comprising the following steps:

S1.采用常规方法蚀刻基体层;S1. Etching the base layer by a conventional method;

S2.采用常规方法制备毛细组织;S2. Prepare capillary tissue by conventional methods;

S3.采用常规方法对内侧蚀刻后的具有毛细组织的两片基体层焊接;S3. Weld the two base layers with capillary structure after etching on the inner side by conventional methods;

S4.于两片基体层外表面附着固化保护层;S4. Attaching a cured protective layer to the outer surfaces of the two substrate layers;

S5.采用常规方法在两片基体层之间注液,或抽真空,或封装。S5. Use conventional methods to inject liquid between the two substrate layers, or vacuumize, or encapsulate.

优选地,所述基体层和保护层中间还附着固化有过渡层,过渡层分别与基体层和保护层发生互渗;过渡层为镍铬镀层或镍铬锡镀层,过渡层通过合金化处理与基体层外表面互渗形成镍铬铜合金或镍铬锡铜合金;所述合金化处理采用高温合金化处理方式或低温振荡合金化热处理方式。Preferably, a transition layer is attached and solidified between the base layer and the protective layer, and the transition layer interpenetrates with the base layer and the protective layer respectively; The outer surface of the base layer interpenetrates to form nickel-chromium-copper alloy or nickel-chromium-tin-copper alloy; the alloying treatment adopts a high-temperature alloying treatment method or a low-temperature oscillation alloying heat treatment method.

本发明的的特点及优点是:Features and advantages of the present invention are:

目前的均热板产品主要为铜及铜合金材质,外观呈现铜色。本发明通过表面处理的方法,在均热板产品基体层表面形成一层的深色保护层,能够有效增加均热板本身的耐腐蚀性能、耐氧化性能及导热性能。解决了现有产品不耐腐蚀的问题,同时也解决了均热板长期使用后因腐蚀导致外观变差的问题。本发明还包括有固化于基体层和保护层中间的过渡层,过渡层可以分别与基体层和保护层发生共渗,大大提高了均热板表面硬度,解决了铜及铜合金均热板容易表面变形的问题,而且共渗后的基体层、过渡层和保护层,完全熔融为一体,能够有效解决保护层易脱落的问题。The current vapor chamber products are mainly made of copper and copper alloy, and the appearance is copper-colored. The present invention forms a layer of dark protective layer on the surface of the base layer of the vapor chamber product through the surface treatment method, which can effectively increase the corrosion resistance, oxidation resistance and thermal conductivity of the vapor chamber itself. It solves the problem that the existing products are not corrosion-resistant, and also solves the problem that the appearance of the vapor chamber deteriorates due to corrosion after long-term use. The invention also includes a transition layer solidified between the base layer and the protective layer. The transition layer can co-infiltrate with the base layer and the protective layer respectively, which greatly improves the surface hardness of the soaking plate and solves the problem of the difficulty of copper and copper alloy soaking plates. The problem of surface deformation, and the base layer, transition layer and protective layer after co-infiltration are completely fused together, which can effectively solve the problem that the protective layer is easy to fall off.

过渡层含有镍、铬、锡等元素,能够与基体层铜或铜合金良好互渗,同时,保护层采用发黑处理镀镍层或直接采用黑镍镀层,呈现深色,对消费电子芯片辐射出来的热量具有较好的吸收性能,进一步提升了均热板的使用性能。The transition layer contains nickel, chromium, tin and other elements, which can interpenetrate well with the copper or copper alloy of the base layer. At the same time, the protective layer adopts blackened nickel plating layer or directly adopts black nickel plating layer, which presents a dark color and is harmful to consumer electronics chips. The released heat has better absorption performance, which further improves the performance of the vapor chamber.

本发明制备工艺中,加入了覆镍后发黑或者直接镀黑镍的操作步骤,由于有镍铬锡铜合金层为过渡,保证了后续保护层与基体之间的良好结合,避免了使用过程中发生保护层脱落、失效等。采用本发明方法制造的均热板具有极为优异的耐腐蚀性能和外观性能,表面硬度高。同时镍铜合金+镍黑化层,具有极为优异的耐腐蚀性能。In the preparation process of the present invention, the operation steps of blackening after nickel coating or direct black nickel plating are added. Since there is a nickel-chromium-tin-copper alloy layer as a transition, a good combination between the subsequent protective layer and the substrate is ensured, and the use process is avoided. The protective layer falls off, fails, etc. The vapor chamber manufactured by the method of the invention has extremely excellent corrosion resistance and appearance, and has high surface hardness. At the same time, nickel-copper alloy + nickel blackened layer has excellent corrosion resistance.

综合而言,本发明的有益效果,主要体现在以下几个方面:In general, the beneficial effects of the present invention are mainly reflected in the following aspects:

1、产品耐腐蚀性能提高,长期使用外观无变化;1. The corrosion resistance of the product is improved, and the appearance does not change after long-term use;

2、深色能够提高热吸收效率,提升了均热性能;2. Dark color can improve heat absorption efficiency and improve heat uniformity performance;

3、合金化处理过程改进,采用低温振荡合金化热处理方法,能够克服传统高温合金化处理作业环境苛刻的缺陷,降低合金化处理难度;3. The alloying treatment process is improved, and the low-temperature oscillating alloying heat treatment method can overcome the defects of the harsh working environment of the traditional high-temperature alloying treatment and reduce the difficulty of alloying treatment;

4、表面合金化后能够使有效增加基体层和过渡层之间的牢固性;4. After surface alloying, it can effectively increase the firmness between the base layer and the transition layer;

5、镍铬铜合金的使用,能够有效增加均热板产品的硬度,提高使用寿命,降低意外损伤。5. The use of nickel-chromium-copper alloy can effectively increase the hardness of vapor chamber products, improve service life and reduce accidental damage.

附图说明Description of drawings

为了更清楚地说明本发明实施例中的技术方案,下面将对实施例描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings that need to be used in the description of the embodiments will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present invention. For those skilled in the art, other drawings can also be obtained based on these drawings without creative effort.

图1显示为现有均热板制造工艺流程图。Figure 1 shows the flow chart of the existing vapor chamber manufacturing process.

图2显示为本发明具有高吸热性的均热板的制备工艺流程图。Fig. 2 shows a flow chart of the preparation process of the vapor chamber with high heat absorption of the present invention.

图3显示为对比例11的现有铜色均热板外观图。Figure 3 shows the appearance of the existing copper-colored vapor chamber of Comparative Example 11.

图4显示为实施例5、8的本发明深色高吸热性均热板外观图。Fig. 4 shows the appearance of the dark-colored high heat-absorbing vapor chambers of the present invention in Examples 5 and 8.

图5显示为对比例11的现有常规均热板在5%氯化钠中性盐雾环境试验后1天的外观变化图。Fig. 5 is a graph showing the appearance change of the conventional conventional vapor chamber of Comparative Example 11 after 5% sodium chloride neutral salt spray environmental test 1 day.

图6显示为实施例5、8的本发明高吸热性均热板在5%氯化钠中性盐雾环境试验后30天的外观变化图。Fig. 6 shows the appearance changes of the high heat absorption vapor chambers of the present invention in Examples 5 and 8 after 5% sodium chloride neutral salt spray environmental test for 30 days.

具体实施方式detailed description

下面将结合本发明实施例中的附图,对本发明实施例中的技术方案 进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

本实施方式,针对现有均热板产品和本发明所提供的均热板产品,以其耐腐蚀性、传热效率、硬度、使用寿命以及合金化处理的操作难易程度几个方面,进行了对比。In this embodiment, aiming at the existing vapor chamber products and the vapor chamber products provided by the present invention, the corrosion resistance, heat transfer efficiency, hardness, service life and the ease of operation of alloying treatment are studied. contrasted.

其中,耐腐蚀性是采用5%氯化钠中性盐雾试验的方式;Among them, the corrosion resistance is tested by 5% sodium chloride neutral salt spray test;

传热效率ε定义为实际传热量Q与理论上的最大传热量Qmax之比:ε=Q/Qmax,用以评价换热器(均热板)传热性能的高低;The heat transfer efficiency ε is defined as the ratio of the actual heat transfer Q to the theoretical maximum heat transfer Qmax: ε=Q/Qmax, which is used to evaluate the heat transfer performance of the heat exchanger (chamber);

硬度以维氏硬度进行对比评价。The hardness was compared and evaluated by Vickers hardness.

实施例1:Example 1:

一种具有高吸热性的均热板,均热板包括有基体层和保护层,保护层附着固化于基体层外表面,用于增强基体层的耐氧化性。A vapor chamber with high heat absorption. The vapor chamber includes a base layer and a protective layer. The protective layer is attached and cured on the outer surface of the base layer to enhance the oxidation resistance of the base layer.

保护层为发黑处理镍镀层,或黑镍镀层。The protective layer is blackened nickel plating, or black nickel plating.

保护层厚度为0.1μm-10μm;The thickness of the protective layer is 0.1μm-10μm;

所述发黑处理镍镀层中,发黑处理采用先酸洗后发黑的方式,酸洗液In the described blackening treatment nickel coating, the blackening treatment adopts the mode of first pickling and then blackening, and the pickling solution

选择浓度为5%-20%的盐酸水溶液,发黑液选择按照质量比计为(1-The selected concentration is 5%-20% hydrochloric acid aqueous solution, and the blackening solution is selected as (1-

3):(2-4):(1-3):(0-6)的氢氧化钠、硝酸钠、亚硝酸钠和水的混3): (2-4): (1-3): (0-6) the mixture of sodium hydroxide, sodium nitrate, sodium nitrite and water

合液;combined liquid;

所述保护层的颜色范围为:L值≤3,a值为-1.5~1.5,b值为-1~1;The color range of the protective layer is: L value ≤ 3, a value -1.5 ~ 1.5, b value -1 ~ 1;

所述黑镍镀层中,镀液选择按照质量比计为(14-20):(8-10):(5-7):(5-7):(8-12):(144-160)的硫酸镍、硫酸锌、硼酸、硫氰酸钾、硫酸镍铵与水的混合液;所述保护层的颜色范围为:L值为1~5,a值为-2~ 2,b值为-2~2。In the described black nickel coating, the plating solution is selected according to mass ratio as (14-20): (8-10): (5-7): (5-7): (8-12): (144-160) The mixed solution of nickel sulfate, zinc sulfate, boric acid, potassium thiocyanate, nickel ammonium sulfate and water; the color range of the protective layer is: L value is 1~5, a value is -2~2, b value is -2~2.

基体层为铜或铜合金材质。The base layer is made of copper or copper alloy.

基体层的材质为磷铜合金、镍铜合金或铬铜合金,铜合金中铜元素的含量按照质量百分比计大于90%。The base layer is made of phosphor copper alloy, nickel copper alloy or chrome copper alloy, and the content of copper element in the copper alloy is greater than 90% by mass percentage.

具有高吸热性的均热板的制备方法,包括以下步骤:A method for preparing a vapor chamber with high heat absorption, comprising the following steps:

S1.采用常规方法蚀刻基体层;S1. Etching the base layer by a conventional method;

S2.采用常规方法制备毛细组织;S2. Prepare capillary tissue by conventional methods;

S3.采用常规方法对内侧蚀刻后的具有毛细组织的两片基体层焊接;S3. Weld the two base layers with capillary structure after etching on the inner side by conventional methods;

S4.于两片基体层外表面附着固化保护层;S4. Attaching a cured protective layer to the outer surfaces of the two substrate layers;

S5.采用常规方法在两片基体层之间注液,或抽真空,或封装。S5. Use conventional methods to inject liquid between the two substrate layers, or vacuumize, or encapsulate.

其中,步骤S1-S3、S5,均是采用的本领域内均热板制造工艺的常规方法。Wherein, the steps S1-S3 and S5 are all conventional methods of the vapor chamber manufacturing process adopted in the art.

实施例2:Example 2:

一种具有高吸热性的均热板,均热板包括有基体层和保护层,保护层附着固化于基体层外表面,用于增强基体层的耐氧化性,还包括有过渡层,所述过渡层附着固化于基体层和保护层中间,用于增强基体层与保护层之间的固化连接。A vapor chamber with high heat absorption. The vapor chamber includes a base layer and a protective layer. The protective layer is attached and cured on the outer surface of the base layer to enhance the oxidation resistance of the base layer. It also includes a transition layer. The transition layer is adhered and cured between the base layer and the protective layer, and is used to strengthen the cured connection between the base layer and the protective layer.

过渡层为镍铬锡镀层,过渡层通过合金化处理与基体层外表面形成镍铬锡铜合金。The transition layer is a nickel-chromium-tin plating layer, and the transition layer forms a nickel-chromium-tin-copper alloy with the outer surface of the base layer through alloying treatment.

过渡层厚度为0.1μm-10μm;所述过渡层组成按照质量百分比计为10%-28%,镍含量72%-85%,锡含量0%-5%;所述合金化处理采用高温合金化处理方式或低温振荡合金化热处理方式。The thickness of the transition layer is 0.1 μm-10 μm; the composition of the transition layer is 10%-28% by mass percentage, the nickel content is 72%-85%, and the tin content is 0%-5%; the alloying treatment adopts high temperature alloying Treatment method or low temperature oscillation alloying heat treatment method.

保护层为发黑处理镍镀层,或黑镍镀层。The protective layer is blackened nickel plating, or black nickel plating.

保护层厚度为0.1μm-10μm;The thickness of the protective layer is 0.1μm-10μm;

所述发黑处理镍镀层中,发黑处理采用先酸洗后发黑的方式,酸洗液In the described blackening treatment nickel coating, the blackening treatment adopts the mode of first pickling and then blackening, and the pickling solution

选择浓度为5%-20%的盐酸水溶液,发黑液选择按照质量比计为(1-The selected concentration is 5%-20% hydrochloric acid aqueous solution, and the blackening solution is selected as (1-

3):(2-4):(1-3):(0-6)的氢氧化钠、硝酸钠、亚硝酸钠和水的混3): (2-4): (1-3): (0-6) the mixture of sodium hydroxide, sodium nitrate, sodium nitrite and water

合液;combined liquid;

所述保护层的颜色范围为:L值≤3,a值为-1.5~1.5,b值为-1~1;The color range of the protective layer is: L value ≤ 3, a value -1.5 ~ 1.5, b value -1 ~ 1;

所述黑镍镀层中,镀液选择按照质量比计为(14-20):(8-10):(5-7):(5-7):(8-12):(144-160)的硫酸镍、硫酸锌、硼酸、硫氰酸钾、硫酸镍铵与水的混合液;所述保护层的颜色范围为:L值为1~5,a值为-2~2,b值为-2~2。In the described black nickel coating, the plating solution is selected according to mass ratio as (14-20): (8-10): (5-7): (5-7): (8-12): (144-160) The mixed solution of nickel sulfate, zinc sulfate, boric acid, potassium thiocyanate, nickel ammonium sulfate and water; the color range of the protective layer is: L value is 1~5, a value is -2~2, b value is -2~2.

基体层为铜或铜合金材质。The base layer is made of copper or copper alloy.

基体层的材质为磷铜合金、镍铜合金或铬铜合金,铜合金中铜元素的含量按照质量百分比计大于90%。The base layer is made of phosphor copper alloy, nickel copper alloy or chrome copper alloy, and the content of copper element in the copper alloy is greater than 90% by mass percentage.

如图2所示,具有高吸热性的均热板的制备方法,包括以下步骤:As shown in Figure 2, the preparation method of the vapor chamber with high heat absorption comprises the following steps:

S1.采用常规方法蚀刻基体层;S1. Etching the base layer by a conventional method;

S2.采用常规方法制备毛细组织;S2. Prepare capillary tissue by conventional methods;

S3.采用常规方法对内侧蚀刻后的具有毛细组织的两片基体层焊接;S3. Weld the two base layers with capillary structure after etching on the inner side by conventional methods;

S4.在基体层上附着固化过渡层,过渡层为镍铬锡镀层,过渡层通过S4. Attach a cured transition layer on the base layer, the transition layer is a nickel-chromium-tin coating, and the transition layer passes through

合金化处理与基体层外表面形成镍铬锡铜合金;所述合金化处理采Alloying treatment forms a nickel-chromium-tin-copper alloy with the outer surface of the base layer; the alloying treatment adopts

用高温合金化处理方式或低温振荡合金化热处理方式;Use high temperature alloying treatment or low temperature oscillation alloying heat treatment;

S5.于两片基体层外表面的过渡层上附着固化保护层;S5. Attach a cured protective layer on the transition layer on the outer surface of the two base layers;

S6.采用常规方法在两片基体层之间注液,或抽真空,或封装。S6. Use conventional methods to inject liquid between the two substrate layers, or vacuumize, or encapsulate.

其中,步骤S1-S3、S6,均是采用的本领域内均热板制造工艺的常规方法。Wherein, steps S1-S3 and S6 are all conventional methods of vapor chamber manufacturing process adopted in this field.

实施例3:Example 3:

一种具有高吸热性的均热板,均热板包括有基体层和保护层,保护层附着固化于基体层外表面,用于增强基体层的耐氧化性。A vapor chamber with high heat absorption. The vapor chamber includes a base layer and a protective layer. The protective layer is attached and cured on the outer surface of the base layer to enhance the oxidation resistance of the base layer.

保护层为发黑处理镍镀层,厚度为1μm;The protective layer is blackened nickel plating with a thickness of 1 μm;

所述发黑处理镍镀层中,发黑处理采用先酸洗后发黑的方式,酸洗液In the described blackening treatment nickel coating, the blackening treatment adopts the mode of first pickling and then blackening, and the pickling solution

选择浓度为5%的盐酸水溶液,发黑液选择按照质量比计为1:2:1:Choose a hydrochloric acid aqueous solution with a concentration of 5%, and the blackening solution is selected according to the mass ratio of 1:2:1:

6的氢氧化钠、硝酸钠、亚硝酸钠和水的混合液;6 mixed solution of sodium hydroxide, sodium nitrate, sodium nitrite and water;

所述保护层的颜色范围为:L值为2,a值为0,b值为0.5;The color range of the protective layer is: the L value is 2, the a value is 0, and the b value is 0.5;

基体层为磷铜合金,铜元素的含量按照质量百分比计大于90%,其中,锡5.5%,磷0.35%,余量为铜。The base layer is phosphor-bronze alloy, and the content of copper element is greater than 90% by mass percentage, wherein tin is 5.5%, phosphorus is 0.35%, and the balance is copper.

具有高吸热性的均热板的制备方法,包括以下步骤:A method for preparing a vapor chamber with high heat absorption, comprising the following steps:

S1.采用常规方法蚀刻基体层;S1. Etching the base layer by a conventional method;

S2.采用常规方法制备毛细组织;S2. Prepare capillary tissue by conventional methods;

S3.采用常规方法对内侧蚀刻后的具有毛细组织的两片基体层焊接;S3. Weld the two base layers with capillary structure after etching on the inner side by conventional methods;

S4.于两片基体层外表面附着固化保护层;S4. Attaching a cured protective layer to the outer surfaces of the two substrate layers;

S5.采用常规方法在两片基体层之间注液,或抽真空,或封装。S5. Use conventional methods to inject liquid between the two substrate layers, or vacuumize, or encapsulate.

其中,步骤S1-S3、S5,均是采用的本领域内均热板制造工艺的常规方法。Wherein, the steps S1-S3 and S5 are all conventional methods of the vapor chamber manufacturing process adopted in the art.

实施例4:Example 4:

一种具有高吸热性的均热板,均热板包括有基体层和保护层,保护层附着固化于基体层外表面,用于增强基体层的耐氧化性。A vapor chamber with high heat absorption. The vapor chamber includes a base layer and a protective layer. The protective layer is attached and cured on the outer surface of the base layer to enhance the oxidation resistance of the base layer.

保护层为镀黑镍层,厚度为1.2μm;The protective layer is a black nickel-plated layer with a thickness of 1.2 μm;

所述黑镍镀层中,镀液选择按照质量比计为17:9:6:6:10:152In the black nickel coating, the plating solution is selected according to the mass ratio of 17:9:6:6:10:152

的硫酸镍、硫酸锌、硼酸、硫氰酸钾、硫酸镍铵与水的混合液;所述The mixed solution of nickel sulfate, zinc sulfate, boric acid, potassium thiocyanate, nickel ammonium sulfate and water;

保护层的颜色范围为:L值为3,a值为0,b值为0.5。The color range of the protective layer is: the L value is 3, the a value is 0, and the b value is 0.5.

基体层为镍铜合金,铜元素的含量按照质量百分比计大于90%,其中,组成按照质量百分比计为镍0.9-1.3%,磷0.15-0.35%,其它≤0.5%,余量为铜。The base layer is a nickel-copper alloy, and the content of copper element is greater than 90% by mass percentage, wherein the composition is 0.9-1.3% by mass percentage of nickel, 0.15-0.35% of phosphorus, other ≤ 0.5%, and the balance is copper.

具有高吸热性的均热板的制备方法,包括以下步骤:A method for preparing a vapor chamber with high heat absorption, comprising the following steps:

S1.采用常规方法蚀刻基体层;S1. Etching the base layer by a conventional method;

S2.采用常规方法制备毛细组织;S2. Prepare capillary tissue by conventional methods;

S3.采用常规方法对内侧蚀刻后的具有毛细组织的两片基体层焊接;S3. Weld the two base layers with capillary structure after etching on the inner side by conventional methods;

S4.于两片基体层外表面附着固化保护层;S4. Attaching a cured protective layer to the outer surfaces of the two substrate layers;

S5.采用常规方法在两片基体层之间注液,或抽真空,或封装。S5. Use conventional methods to inject liquid between the two substrate layers, or vacuumize, or encapsulate.

其中,步骤S1-S3、S5,均是采用的本领域内均热板制造工艺的常规方法。Wherein, the steps S1-S3 and S5 are all conventional methods of the vapor chamber manufacturing process adopted in the art.

实施例5:Example 5:

一种具有高吸热性的均热板,均热板包括有基体层和保护层,保护层附着固化于基体层外表面,用于增强基体层的耐氧化性。A vapor chamber with high heat absorption. The vapor chamber includes a base layer and a protective layer. The protective layer is attached and cured on the outer surface of the base layer to enhance the oxidation resistance of the base layer.

保护层为发黑处理镍镀层,厚度为1.5μm;The protective layer is blackened nickel plating with a thickness of 1.5μm;

所述发黑处理镍镀层中,发黑处理采用先酸洗后发黑的方式,酸洗液In the described blackening treatment nickel coating, the blackening treatment adopts the mode of first pickling and then blackening, and the pickling solution

选择浓度为15%的盐酸水溶液,发黑液选择按照质量比计为2:3:Select the hydrochloric acid aqueous solution with a concentration of 15%, and the blackening solution is selected as 2:3 according to the mass ratio:

2:3的氢氧化钠、硝酸钠、亚硝酸钠和水的混合液;2:3 mixture of sodium hydroxide, sodium nitrate, sodium nitrite and water;

如图4所示,所述保护层的颜色范围为:L值1,a值为1,b值为0.5;As shown in Figure 4, the color range of the protective layer is: L value 1, a value 1, b value 0.5;

基体层为铬铜合金,铜元素的含量按照质量百分比计大于90%,其The base layer is a chrome-copper alloy, and the content of copper element is greater than 90% by mass percentage, and its

中,组成按照质量百分比计为铬0.5-1.5%,锆0.02-0.2%,余量为铜。Among them, the composition is 0.5-1.5% of chromium, 0.02-0.2% of zirconium, and the balance is copper.

具有高吸热性的均热板的制备方法,包括以下步骤:A method for preparing a vapor chamber with high heat absorption, comprising the following steps:

S1.采用常规方法蚀刻基体层;S1. Etching the base layer by a conventional method;

S2.采用常规方法制备毛细组织;S2. Prepare capillary tissue by conventional methods;

S3.采用常规方法对内侧蚀刻后的具有毛细组织的两片基体层焊接;S3. Weld the two base layers with capillary structure after etching on the inner side by conventional methods;

S4.于两片基体层外表面附着固化保护层;S4. Attaching a cured protective layer to the outer surfaces of the two substrate layers;

S5.采用常规方法在两片基体层之间注液,或抽真空,或封装。S5. Use conventional methods to inject liquid between the two substrate layers, or vacuumize, or encapsulate.

其中,步骤S1-S3、S5,均是采用的本领域内均热板制造工艺的常规方法。Wherein, the steps S1-S3 and S5 are all conventional methods of the vapor chamber manufacturing process adopted in the art.

实施例6:Embodiment 6:

基本实施方式与实施例3相同,所不同之处在于,均热板还包括有过渡层,所述过渡层附着固化于基体层和保护层中间,用于增强基体层与保护层之间的固化连接。The basic implementation is the same as in Example 3, except that the vapor chamber also includes a transition layer, which is adhered and cured between the base layer and the protective layer to enhance the curing between the base layer and the protective layer connect.

过渡层为镍铬锡镀层,过渡层通过合金化处理与基体层外表面形成镍铬锡铜合金。The transition layer is a nickel-chromium-tin plating layer, and the transition layer forms a nickel-chromium-tin-copper alloy with the outer surface of the base layer through alloying treatment.

过渡层厚度为0.5μm;所述过渡层组成按照质量百分比计为含量23%,镍含量75%,锡含量2%;The thickness of the transition layer is 0.5 μm; the composition of the transition layer is 23% by mass percentage, 75% nickel content, and 2% tin content;

过渡层的镀镍铬锡方式为电镀。The nickel-chromium-tin plating method of the transition layer is electroplating.

合金化处理采用高温合金化处理方式Alloying treatment adopts high temperature alloying treatment

高温合金化处理方式的温度为800℃,保温时间为45min;The temperature of the high-temperature alloying treatment is 800°C, and the holding time is 45 minutes;

此种具有高吸热性的均热板的制备方法,包括以下步骤:The preparation method of the vapor chamber with high heat absorption comprises the following steps:

S1.采用常规方法蚀刻基体层;S1. Etching the base layer by a conventional method;

S2.采用常规方法制备毛细组织;S2. Prepare capillary tissue by conventional methods;

S3.采用常规方法对内侧蚀刻后的具有毛细组织的两片基体层焊接;S3. Weld the two base layers with capillary structure after etching on the inner side by conventional methods;

S4.在基体层上附着固化过渡层,过渡层为镍铬锡镀层,过渡层通过S4. Attach a cured transition layer on the base layer, the transition layer is a nickel-chromium-tin coating, and the transition layer passes through

合金化处理与基体层外表面形成镍铬锡铜合金;所述合金化处理采Alloying treatment forms a nickel-chromium-tin-copper alloy with the outer surface of the base layer; the alloying treatment adopts

用高温合金化处理方式或低温振荡合金化热处理方式;Use high temperature alloying treatment or low temperature oscillation alloying heat treatment;

S5.于两片基体层外表面的过渡层上附着固化保护层;S5. Attach a cured protective layer on the transition layer on the outer surface of the two base layers;

S6.采用常规方法在两片基体层之间注液,或抽真空,或封装。S6. Use conventional methods to inject liquid between the two substrate layers, or vacuumize, or encapsulate.

其中,步骤S1-S3、S6,均是采用的本领域内均热板制造工艺的常规方法。Wherein, steps S1-S3 and S6 are all conventional methods of vapor chamber manufacturing process adopted in this field.

实施例7:Embodiment 7:

基本实施方式与实施例4相同,所不同之处在于,均热板还包括有过渡层,所述过渡层附着固化于基体层和保护层中间,用于增强基体层与保护层之间的固化连接。The basic implementation method is the same as that of Example 4, except that the vapor chamber also includes a transition layer, and the transition layer is adhered and cured between the base layer and the protective layer to enhance the curing between the base layer and the protective layer connect.

过渡层为镍铬锡镀层,过渡层通过合金化处理与基体层外表面形成镍铬锡铜合金。The transition layer is a nickel-chromium-tin plating layer, and the transition layer forms a nickel-chromium-tin-copper alloy with the outer surface of the base layer through alloying treatment.

过渡层厚度为4μm;所述过渡层组成按照质量百分比计为含量14%,镍含量83.9%,锡含量2.1%;The thickness of the transition layer is 4 μm; the composition of the transition layer is 14% by mass percentage, 83.9% nickel content, and 2.1% tin content;

过渡层的镀镍铬锡方式为电镀。The nickel-chromium-tin plating method of the transition layer is electroplating.

合金化处理采用低温振荡合金化热处理方式。The alloying treatment adopts low temperature oscillation alloying heat treatment.

低温振荡合金化热处理方式的温度为660℃,振荡频率为120次/每分钟。The temperature of the low-temperature oscillation alloying heat treatment method is 660° C., and the oscillation frequency is 120 times/min.

此种具有高吸热性的均热板的制备方法,包括以下步骤:The preparation method of the vapor chamber with high heat absorption comprises the following steps:

S1.采用常规方法蚀刻基体层;S1. Etching the base layer by a conventional method;

S2.采用常规方法制备毛细组织;S2. Prepare capillary tissue by conventional methods;

S3.采用常规方法对内侧蚀刻后的具有毛细组织的两片基体层焊接;S3. Weld the two base layers with capillary structure after etching on the inner side by conventional methods;

S4.在基体层上附着固化过渡层,过渡层为镍铬锡镀层,过渡层通过S4. Attach a cured transition layer on the base layer, the transition layer is a nickel-chromium-tin coating, and the transition layer passes through

合金化处理与基体层外表面形成镍铬锡铜合金;所述合金化处理采Alloying treatment forms a nickel-chromium-tin-copper alloy with the outer surface of the base layer; the alloying treatment adopts

用高温合金化处理方式或低温振荡合金化热处理方式;Use high temperature alloying treatment or low temperature oscillation alloying heat treatment;

S5.于两片基体层外表面的过渡层上附着固化保护层;S5. Attach a cured protective layer on the transition layer on the outer surface of the two base layers;

S6.采用常规方法在两片基体层之间注液,或抽真空,或封装。S6. Use conventional methods to inject liquid between the two substrate layers, or vacuumize, or encapsulate.

其中,步骤S1-S3、S6,均是采用的本领域内均热板制造工艺的常规方法。Wherein, steps S1-S3 and S6 are all conventional methods of vapor chamber manufacturing process adopted in this field.

实施例8:Embodiment 8:

基本实施方式与实施例5相同,所不同之处在于,均热板还包括有过渡层,所述过渡层附着固化于基体层和保护层中间,用于增强基体层与保护层之间的固化连接。The basic implementation is the same as in Example 5, except that the vapor chamber also includes a transition layer, which is adhered and cured between the base layer and the protective layer to enhance the curing between the base layer and the protective layer. connect.

过渡层为镍铬锡镀层,过渡层通过合金化处理与基体层外表面形成镍铬锡铜合金。The transition layer is a nickel-chromium-tin plating layer, and the transition layer forms a nickel-chromium-tin-copper alloy with the outer surface of the base layer through alloying treatment.

过渡层厚度为2μm;所述过渡层组成按照质量百分比计为含量18%,镍含量80%,锡含量2%;The thickness of the transition layer is 2 μm; the composition of the transition layer is 18% by mass percentage, 80% nickel content, and 2% tin content;

过渡层的镀镍铬锡方式为电镀。The nickel-chromium-tin plating method of the transition layer is electroplating.

合金化处理采用低温振荡合金化热处理方式。The alloying treatment adopts low temperature oscillation alloying heat treatment.

低温振荡合金化热处理方式的温度为600℃,振荡频率为140次/每分钟。The temperature of the low-temperature oscillation alloying heat treatment method is 600° C., and the oscillation frequency is 140 times/min.

此种具有高吸热性的均热板的制备方法,包括以下步骤:The preparation method of the vapor chamber with high heat absorption comprises the following steps:

S1.采用常规方法蚀刻基体层;S1. Etching the base layer by a conventional method;

S2.采用常规方法制备毛细组织;S2. Prepare capillary tissue by conventional methods;

S3.采用常规方法对内侧蚀刻后的具有毛细组织的两片基体层焊接;S3. Weld the two base layers with capillary structure after etching on the inner side by conventional methods;

S4.在基体层上附着固化过渡层,过渡层为镍铬锡镀层,过渡层通过S4. Attach a cured transition layer on the base layer, the transition layer is a nickel-chromium-tin coating, and the transition layer passes through

合金化处理与基体层外表面形成镍铬锡铜合金;所述合金化处理采Alloying treatment forms a nickel-chromium-tin-copper alloy with the outer surface of the base layer; the alloying treatment adopts

用高温合金化处理方式或低温振荡合金化热处理方式;Use high temperature alloying treatment or low temperature oscillation alloying heat treatment;

S5.于两片基体层外表面的过渡层上附着固化保护层;S5. Attach a cured protective layer on the transition layer on the outer surface of the two base layers;

S6.采用常规方法在两片基体层之间注液,或抽真空,或封装。S6. Use conventional methods to inject liquid between the two substrate layers, or vacuumize, or encapsulate.

其中,步骤S1-S3、S6,均是采用的本领域内均热板制造工艺的常规方法。Wherein, steps S1-S3 and S6 are all conventional methods of vapor chamber manufacturing process adopted in this field.

对比例9:Comparative example 9:

均热板材质为磷铜合金。The vapor chamber is made of phosphor copper alloy.

实施例3、6和对比例9均采用磷铜合金为基体材质,故针对二者的产品性能进行对比分析,具体数据如下:Embodiments 3, 6 and Comparative Example 9 all adopt phosphor copper alloy as the base material, so comparative analysis is carried out for the product performance of the two, and the specific data are as follows:

1)耐腐蚀性对比:1) Corrosion resistance comparison:

实施例3、6:外观颜色(原始):L值2,a值0,b值0.5,5%氯化钠中性盐雾试验30天,外观颜色与原始一致,L值2.2;a值0.5,b值0.5。Embodiments 3 and 6: Appearance color (original): L value 2, a value 0, b value 0.5, 5% sodium chloride neutral salt spray test for 30 days, the appearance color is consistent with the original, L value 2.2; a value 0.5 , b-value 0.5.

对比例9:5%氯化钠中性盐雾试验,8小时表面有腐蚀产物出现,颜色变花,色泽差异大,外观效果差。Comparative example 9: 5% sodium chloride neutral salt spray test, corrosion products appear on the surface after 8 hours, the color changes, the color difference is large, and the appearance effect is poor.

2)硬度对比:2) Hardness comparison:

实施例3、6:表面维氏硬度HV205。Embodiment 3, 6: surface Vickers hardness HV205.

对比例9:表面维氏硬度HV120。Comparative example 9: surface Vickers hardness HV120.

3)传热效率对比:3) Heat transfer efficiency comparison:

实施例3、6:初始传热效率为85%,30天后传热效率为80%。Examples 3 and 6: the initial heat transfer efficiency is 85%, and the heat transfer efficiency is 80% after 30 days.

对比例9:初始传热效率为87%,2天后传热效率为60%。Comparative Example 9: The initial heat transfer efficiency was 87%, and the heat transfer efficiency was 60% after 2 days.

4)厚度对比:4) Thickness comparison:

实施例3、6:厚度0.3515mm。Embodiments 3 and 6: the thickness is 0.3515 mm.

对比例9:厚度0.35mm。Comparative example 9: the thickness is 0.35 mm.

5)使用寿命对比:5) Service life comparison:

实施例3、6:平均使用寿命1113天,高腐蚀环境下平均使用寿命为908天。Examples 3 and 6: The average service life is 1113 days, and the average service life is 908 days in a highly corrosive environment.

对比例9:平均使用寿命1126天,高腐蚀环境下平均使用寿命为118天。Comparative Example 9: The average service life is 1126 days, and the average service life is 118 days in a highly corrosive environment.

对比例10:Comparative example 10:

均热板材质为镍铜合金。The vapor chamber is made of nickel-copper alloy.

实施例4、7和对比例10均采用镍铜合金为基体材质,故针对二者的产品性能进行对比分析,具体数据如下:Embodiment 4, 7 and comparative example 10 all adopt nickel-copper alloy as matrix material, so comparative analysis is carried out at the product performance of the two, and concrete data is as follows:

1)耐腐蚀性对比:1) Corrosion resistance comparison:

实施例4、7:外观颜色(原始):L值3,a值0,b值0.5,5%氯化钠中性盐雾试验30天,外观颜色与原始一致,L值2.6;a值0.3,b值0.1。Embodiments 4 and 7: Appearance color (original): L value 3, a value 0, b value 0.5, 5% sodium chloride neutral salt spray test for 30 days, the appearance color is consistent with the original, L value 2.6; a value 0.3 , b-value 0.1.

对比例10:5%氯化钠中性盐雾试验,14小时表面有腐蚀产物出现,颜色变花,色泽差异大,外观效果差。Comparative example 10: 5% sodium chloride neutral salt spray test, corrosion products appear on the surface after 14 hours, the color changes, the color difference is large, and the appearance effect is poor.

2)硬度对比:2) Hardness comparison:

实施例4、7:表面维氏硬度HV265。Embodiment 4, 7: surface Vickers hardness HV265.

对比例10:表面维氏硬度HV162。Comparative example 10: surface Vickers hardness HV162.

3)传热效率对比:3) Heat transfer efficiency comparison:

实施例4、7:初始传热效率为90%,30天后传热效率为88%。Examples 4 and 7: The initial heat transfer efficiency is 90%, and the heat transfer efficiency after 30 days is 88%.

对比例10:初始传热效率为89%,3天后传热效率为76%。Comparative Example 10: The initial heat transfer efficiency was 89%, and the heat transfer efficiency after 3 days was 76%.

4)厚度对比:4) Thickness comparison:

实施例4、7:厚度0.3552mm。Embodiment 4, 7: Thickness 0.3552mm.

对比例10:厚度0.35mm。Comparative example 10: the thickness is 0.35 mm.

5)使用寿命对比:5) Service life comparison:

实施例4、7:平均使用寿命1128天,高腐蚀环境下平均使用寿命为1103天。Embodiments 4 and 7: The average service life is 1128 days, and the average service life is 1103 days in a highly corrosive environment.

对比例10:平均使用寿命1130天,高腐蚀环境下平均使用寿命为150天。Comparative example 10: The average service life is 1130 days, and the average service life is 150 days in a highly corrosive environment.

6)制备方法中的合金化操作复杂程度对比:6) Comparison of the complexity of the alloying operation in the preparation method:

合金化处理过程中,通常是采用高温合金化的方式,而本发明提出了低温振荡锻压合金化的操作方式。高温合金化需要达到至少700℃以上,甚至900℃以上的高温,对处理环境及设备要求极高,而本发明则是采用了较低恒温的振荡锻压方式,环境温度可降低至660℃,其实际上是将传统的高热能替换为了低热能+机械能,振荡锻压能够产生瞬时超高压力的机械能冲击,故而只需要低热能破坏合金层表面分子结构即可,其最终锻造产品的牢固性完全可以媲美现有高温合金化的产品,但所需能量及设备要求则大大降低。In the process of alloying, high-temperature alloying is usually used, but the present invention proposes an operation mode of low-temperature oscillation forging alloying. High-temperature alloying needs to reach a high temperature of at least 700°C or even 900°C, which requires extremely high processing environment and equipment. However, the present invention adopts a lower constant temperature oscillation forging method, and the ambient temperature can be reduced to 660°C. In fact, the traditional high heat energy is replaced by low heat energy + mechanical energy. Oscillatory forging can produce instantaneous ultra-high pressure mechanical energy impact, so only low heat energy is needed to destroy the molecular structure of the alloy layer surface, and the firmness of the final forged product can be completely guaranteed. Comparable to existing high-temperature alloyed products, but the required energy and equipment requirements are greatly reduced.

对比例11:Comparative example 11:

如图3所示,均热板材质为铬铜合金。As shown in Figure 3, the vapor chamber is made of chrome-copper alloy.

实施例5、8和对比例11均采用铬铜合金为基体材质,故针对二者的产品性能进行对比分析,具体数据如下:Embodiment 5,8 and comparative example 11 all adopt chrome-copper alloy as matrix material, so comparative analysis is carried out at the product performance of the two, and specific data are as follows:

1)耐腐蚀性对比:1) Corrosion resistance comparison:

如图6所示,实施例5、8:外观颜色(原始):L值1,a值1,b值0.5,5%氯化钠中性盐雾试验30天,外观颜色与原始一致,L值1.1;a值1.3,b值0.2。As shown in Figure 6, embodiment 5,8: appearance color (original): L value 1, a value 1, b value 0.5, 5% sodium chloride neutral salt spray test 30 days, appearance color is consistent with original, L The value is 1.1; the value of a is 1.3, and the value of b is 0.2.

如图5所示,对比例11:5%氯化钠中性盐雾试验,20小时表面有腐蚀产物出现,颜色变花,色泽差异大,外观效果差。As shown in Figure 5, comparative example 11: 5% sodium chloride neutral salt spray test, corrosion products appear on the surface after 20 hours, the color changes, the color difference is large, and the appearance effect is poor.

2)硬度对比:2) Hardness comparison:

实施例5、8:表面维氏硬度HV292。Examples 5 and 8: Surface Vickers hardness HV292.

对比例11:表面维氏硬度HV186。Comparative example 11: Surface Vickers hardness HV186.

3)传热效率对比:3) Heat transfer efficiency comparison:

实施例5、8:初始传热效率为94%,30天后传热效率为90%。Examples 5 and 8: The initial heat transfer efficiency is 94%, and the heat transfer efficiency after 30 days is 90%.

对比例11:初始传热效率为95%,2天后传热效率为73%。Comparative Example 11: The initial heat transfer efficiency was 95%, and the heat transfer efficiency was 73% after 2 days.

4)厚度对比:4) Thickness comparison:

实施例5、8:厚度0.3535mm。Embodiments 5 and 8: the thickness is 0.3535 mm.

对比例11:厚度0.35mm。Comparative example 11: the thickness is 0.35 mm.

5)使用寿命对比:5) Service life comparison:

实施例5、8:平均使用寿命1135天,高腐蚀环境下平均使用寿命为1132天。Examples 5 and 8: the average service life is 1135 days, and the average service life is 1132 days in a highly corrosive environment.

对比例11:平均使用寿命1130天,高腐蚀环境下平均使用寿命为166天。Comparative example 11: The average service life is 1130 days, and the average service life is 166 days in a highly corrosive environment.

6)制备方法中的合金化操作复杂程度对比:6) Comparison of the complexity of the alloying operation in the preparation method:

合金化处理过程中,通常是采用高温合金化的方式,而本发明提出了低温振荡锻压合金化的操作方式。高温合金化需要达到至少700℃以上,甚至900℃以上的高温,对处理环境及设备要求极高,而本发明则是采用了较低恒温的振荡锻压方式,环境温度可降低至600℃,其实际上是将传统的高热能替换为了低热能+机械能,振荡锻压能够产生瞬时超高压力的机械能冲击,故而只需要低热能破坏合金层表面分子结构即可,其最终锻造产品的牢固性完全可以媲美现有高温合金化的产品,但所需能量及设备要求则大大降低。In the process of alloying, high-temperature alloying is usually used, but the present invention proposes an operation mode of low-temperature oscillation forging alloying. High-temperature alloying needs to reach a high temperature of at least 700°C or even 900°C, which requires extremely high processing environment and equipment. However, the present invention adopts a lower constant temperature oscillation forging method, and the ambient temperature can be reduced to 600°C. In fact, the traditional high heat energy is replaced by low heat energy + mechanical energy. Oscillatory forging can produce instantaneous ultra-high pressure mechanical energy impact, so only low heat energy is needed to destroy the molecular structure of the alloy layer surface, and the firmness of the final forged product can be completely guaranteed. Comparable to existing high-temperature alloyed products, but the required energy and equipment requirements are greatly reduced.

最后应说明的是:以上各实施例仅用以说明本发明的技术方案,而非对其限制;尽管参照前述各实施例对本发明进行了详细的说明,本领域的普通技术人员应当理解:其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分或者全部技术特征进行等同替换;而这些修改 或者替换,并不使相应技术方案的本质脱离本发明各实施例技术方案的范围。Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present invention, rather than limiting them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: It is still possible to modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the technical solutions of the various embodiments of the present invention. scope.

Claims (10)

一种具有高吸热性的均热板,其包括有基体层,其特征在于,所述均热板还包括保护层,所述保护层附着固化于基体层外表面并为深色,用于增强均热板的耐氧化性和导热性。A vapor chamber with high heat absorption, which includes a base layer, characterized in that the vapor chamber also includes a protective layer, the protective layer is adhered and cured to the outer surface of the base layer and is dark in color, and is used for Enhances the oxidation resistance and thermal conductivity of the vapor chamber. 根据权利要求1所述的一种具有高吸热性的均热板,其特征在于,深色的所述保护层的颜色范围为:L值≤5,a值为-2~2,b值为-2~2。A vapor chamber with high heat absorption according to claim 1, characterized in that the color range of the dark protective layer is: L value ≤ 5, a value -2 ~ 2, b value It is -2~2. 根据权利要求1所述的一种具有高吸热性的均热板,其特征在于,所述保护层为发黑处理镍镀层或黑镍镀层。The vapor chamber with high heat absorption according to claim 1, characterized in that the protective layer is a blackened nickel coating or a black nickel coating. 根据权利要求3所述的一种具有高吸热性的均热板,其特征在于,在所述发黑处理镍镀层中,发黑处理采用先酸洗后发黑的方式,酸洗液选择浓度为5%-20%的盐酸水溶液,发黑液选择按照质量比计为(1-3):(2-4):(1-3):(0-6)的氢氧化钠、硝酸钠、亚硝酸钠和水的混合液;A vapor chamber with high heat absorption according to claim 3, characterized in that, in the blackening treatment nickel coating, the blackening treatment adopts the method of pickling first and then blackening, and the pickling solution is selected Concentration is 5%-20% hydrochloric acid aqueous solution, and the blackening solution is selected as (1-3):(2-4):(1-3):(0-6) sodium hydroxide and sodium nitrate according to the mass ratio , a mixture of sodium nitrite and water; 在所述保护层为黑镍镀层,所述黑镍镀层中,镀液选择按照质量比计为(14-20):(8-10):(5-7):(5-7):(8-12):(144-160)的硫酸镍、硫酸锌、硼酸、硫氰酸钾、硫酸镍铵与水的混合液。The protective layer is a black nickel coating, and in the black nickel coating, the plating solution is selected according to the mass ratio (14-20): (8-10): (5-7): (5-7): ( 8-12): (144-160) mixed solution of nickel sulfate, zinc sulfate, boric acid, potassium thiocyanate, nickel ammonium sulfate and water. 根据权利要求1所述的一种具有高吸热性的均热板,其特征在于,所述均热板还包括有过渡层,所述过渡层附着固化于基体层和保护层中间并分别与基体层和保护层发生互渗,用于增强基体层与保护层之间的固化连接。The vapor chamber with high heat absorption according to claim 1, characterized in that, the vapor chamber also includes a transition layer, and the transition layer is adhered and cured between the base layer and the protective layer and respectively The interpenetration of the base layer and the cover layer is used to enhance the cured connection between the base layer and the cover layer. 根据权利要求5所述的一种具有高吸热性的均热板,其特征在于,所述过渡层的组分包括镍和铬或者镍、铬和锡,形成镍铬镀层或镍铬锡镀层;A vapor chamber with high heat absorption according to claim 5, wherein the components of the transition layer include nickel and chromium or nickel, chromium and tin to form a nickel-chromium coating or a nickel-chromium-tin coating ; 优选地,所述基体层的材质包括磷铜合金、镍铜合金或铬铜合金。Preferably, the material of the base layer includes phosphor copper alloy, nickel copper alloy or chromium copper alloy. 根据权利要求6所述的一种具有高吸热性的均热板,其特征在于,所述过渡层中,含有按照质量百分比计的以下组分:铬10%-28%,镍72%-85%,锡0%-5%。A vapor chamber with high heat absorption according to claim 6, characterized in that, the transition layer contains the following components in terms of mass percentage: chromium 10%-28%, nickel 72%- 85%, tin 0%-5%. 根据权利要求6所述的一种具有高吸热性的均热板,其特征在于,过渡层通过合金化处理与基体层外表面互渗形成镍铬铜合金或镍铬锡铜合金;所述合金化处理采用高温合金化处理方式或低温振荡合金化热处理方式。A vapor chamber with high heat absorption according to claim 6, characterized in that the transition layer interpenetrates with the outer surface of the base layer to form a nickel-chromium-copper alloy or a nickel-chromium-tin-copper alloy through alloying treatment; The alloying treatment adopts a high temperature alloying treatment method or a low temperature oscillation alloying heat treatment method. 根据权利要求8所述的一种具有高吸热性的均热板,其特征在于,高温合金化处理方式:温度为700-950℃,保温时间大于30min;A vapor chamber with high heat absorption according to claim 8, characterized in that the high-temperature alloying treatment method: the temperature is 700-950°C, and the holding time is greater than 30 minutes; 低温振荡合金化热处理方式:温度为550-750℃,振荡频率为60-180次/每分钟。Low-temperature oscillation alloying heat treatment method: the temperature is 550-750°C, and the oscillation frequency is 60-180 times/min. 权利要求1-9中任意一项所述的一种具有高吸热性的均热板的制备方法,其特征在于,包括以下步骤:A method for preparing a vapor chamber with high heat absorption according to any one of claims 1-9, characterized in that it comprises the following steps: S1.采用常规方法蚀刻基体层;S1. Etching the base layer by a conventional method; S2.采用常规方法制备毛细组织;S2. Prepare capillary tissue by conventional methods; S3.采用常规方法对内侧蚀刻后的具有毛细组织的两片基体层焊接;S3. Weld the two base layers with capillary structure after etching on the inner side by conventional methods; S4.于两片基体层外表面附着固化保护层;S4. Attaching a cured protective layer to the outer surfaces of the two substrate layers; S5.采用常规方法在两片基体层之间注液,或抽真空,或封装。S5. Use conventional methods to inject liquid between the two substrate layers, or vacuumize, or encapsulate. 优选地,所述基体层和保护层中间还附着固化有过渡层,过渡层分别与基体层和保护层发生互渗;过渡层为镍铬镀层或镍铬锡镀层,过渡层通过合金化处理与基体层外表面互渗形成镍铬铜合金或镍铬锡铜合金;所述合金化处理采用高温合金化处理方式或低温振荡合金化热处理方式。Preferably, a transition layer is attached and solidified between the base layer and the protective layer, and the transition layer interpenetrates with the base layer and the protective layer respectively; The outer surface of the base layer interpenetrates to form nickel-chromium-copper alloy or nickel-chromium-tin-copper alloy; the alloying treatment adopts a high-temperature alloying treatment method or a low-temperature oscillation alloying heat treatment method.
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