WO2023249094A1 - Dispositif de mesure et résistance standard - Google Patents

Dispositif de mesure et résistance standard Download PDF

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Publication number
WO2023249094A1
WO2023249094A1 PCT/JP2023/023200 JP2023023200W WO2023249094A1 WO 2023249094 A1 WO2023249094 A1 WO 2023249094A1 JP 2023023200 W JP2023023200 W JP 2023023200W WO 2023249094 A1 WO2023249094 A1 WO 2023249094A1
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Prior art keywords
terminal
impedance
circuit
internal
value
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PCT/JP2023/023200
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English (en)
Japanese (ja)
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一暁 羽田
直也 北村
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日置電機株式会社
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Publication of WO2023249094A1 publication Critical patent/WO2023249094A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass

Definitions

  • the present invention relates to a measuring device and a standard resistor, and for example, to a measuring device that measures the electrical characteristics of an object to be measured.
  • Measuring devices such as LCR meters, resistance meters, and battery testers that measure electrical characteristics such as impedance of an object to be measured (hereinafter also referred to as "DUT: Device Under Test”) are known (see Patent Document 1). ).
  • the measurement device described above includes various internal circuits such as a generation circuit that generates a voltage or current to be applied to the DUT, a voltage detection circuit that detects the voltage generated in the DUT, and a current detection circuit that detects the current flowing through the DUT. It consists of The characteristics of these internal circuits are influenced by the characteristics of electronic components such as a reference voltage source, reference resistor, gain setting resistor, transistor, and capacitor that constitute the circuit.
  • the present invention has been made in view of the above-mentioned problems, and an object of the present invention is to make it possible to easily know errors in measurement by a measuring device.
  • a measuring device includes a first external terminal for connecting one terminal of a test object, and a second external terminal for connecting the other terminal of the test object.
  • a voltage detection circuit that detects a voltage between the first internal terminal and the second internal terminal based on the voltage detected by the voltage detection circuit and the current flowing between the first internal terminal and the second internal terminal. and the second internal terminal; a reference circuit having two terminals and having a predetermined impedance; and a reference circuit that connects the first internal terminal to the first external terminal.
  • the data processing control circuit under a first condition, one terminal of the reference circuit and the first internal terminal are connected by the switch section, and the other terminal of the reference circuit is connected to the second internal terminal.
  • the impedance of the reference circuit is measured under a second condition different from the first condition, in which one terminal of the reference circuit and the first internal terminal are connected by the switch unit, and the impedance of the reference circuit is Measure the impedance of the reference circuit when the other terminal of the circuit and the second internal terminal are connected, and compare the impedance measurement result of the reference circuit under the first condition and the reference circuit under the second condition.
  • the first external terminal and the first internal terminal are connected by the switch section, and the second external terminal and the second internal terminal are connected.
  • the method is characterized in that a measurement result of impedance between the first internal terminal and the second internal terminal when the terminals are connected is corrected.
  • the measuring device According to the measuring device according to the present invention, it is possible to easily know the error in measurement by the measuring device.
  • FIG. 1 is a diagram showing the configuration of a measuring device according to Embodiment 1.
  • FIG. FIG. 3 is a diagram illustrating a connection example of each switch configuring the switch section.
  • FIG. 3 is a diagram illustrating a connection example of each switch configuring the switch section.
  • 1 is a diagram showing the configuration of a data processing control circuit according to Embodiment 1.
  • FIG. 5 is a flowchart showing the flow of impedance measurement by the measuring device according to the first embodiment.
  • FIG. 3 is a diagram showing the configuration of a measuring device according to a second embodiment.
  • 7 is a diagram showing an example of a reference circuit according to Embodiment 2.
  • FIG. 3 is a diagram showing the configuration of a data processing control circuit according to a second embodiment.
  • FIG. 7 is a flowchart showing the flow of impedance measurement by the measuring device according to Embodiment 2.
  • FIG. 3 is a diagram showing the configuration of a measuring device according to Embodiment 3.
  • FIG. 7 is a diagram showing an example of a reference circuit according to Embodiment 3;
  • FIG. 7 is a diagram showing the configuration of a data processing control circuit according to a third embodiment.
  • 12 is a flowchart showing the flow of impedance measurement by the measuring device according to Embodiment 3.
  • 1 is a diagram showing the configuration of a measuring device capable of measuring impedance using a two-terminal method.
  • FIG. 7 is a diagram showing another example of a reference circuit.
  • the measuring device (100, 100A, 100B, 100C) has a first external terminal (HC, HP) for connecting one terminal of the test object (200). , H), and a second external terminal (LC, LP, L) for connecting the other terminal of the test object, a first internal terminal (hci, hpi, hi) and a second internal terminal (lci, lpi, li), a generating circuit (1) that applies a voltage or current between the first internal terminal and the second internal terminal, and a generating circuit (1) that applies a voltage or current between the first internal terminal and the second internal terminal.
  • a voltage detection circuit (3) that detects a voltage
  • a voltage detection circuit (3) that detects a voltage
  • a voltage detection circuit (3) that detects a voltage between the first internal terminal and the second internal terminal based on the voltage detected by the voltage detection circuit and the current flowing between the first internal terminal and the second internal terminal.
  • a data processing control circuit (4, 4A, 4B) that measures impedance with the second internal terminal
  • a reference circuit (8, 8A, 8B, 8C) having two terminals and a predetermined impedance; , the connection destination of the first internal terminal is switched between the first external terminal and one terminal of the reference circuit, and the connection destination of the second internal terminal is switched between the second external terminal and the other terminal of the reference circuit.
  • a switch unit (5, 5C) for switching between one terminal of the reference circuit and the first internal terminal by the switch unit under a first condition. and the measurement result of the impedance of the reference circuit when the other terminal of the reference circuit and the second internal terminal are connected (see FIG. 2A), and under a second condition different from the first condition. , when one terminal of the reference circuit and the first internal terminal are connected by the switch unit, and the other terminal of the reference circuit and the second internal terminal are connected (see FIG. 2A).
  • a correction coefficient is calculated based on the error with the impedance measurement result of the reference circuit, and under the second condition, the first external terminal and the first internal terminal are connected by the switch unit, and the second external
  • the measurement result of the impedance between the first internal terminal and the second internal terminal when the terminal and the second internal terminal are connected is corrected based on the correction coefficient. shall be.
  • the generation circuit transmits an AC signal based on a reference signal (Sb) having a constant frequency and a constant amplitude to the first internal terminal and the second internal terminal.
  • the data processing control circuit detects the amplitude (
  • the value of the resistance component (R
  • the data processing control circuit (4, 4A, 4B) is configured to perform the measurement under the first condition. 8A, 8B, 8C) and the value (Rr2) of the impedance of the reference circuit measured under the second condition. The value of the resistance component of the measured impedance of the test object may be corrected.
  • the data processing control circuit includes, as the correction coefficient, a value (Rr1) of the resistance component of the impedance of the reference circuit measured under the first condition;
  • a first correction coefficient (Gfix) is calculated based on the ratio of the impedance of the reference circuit measured under the two conditions to the value of the resistance component (Rr2), and using the first correction coefficient, the measurement is performed under the second condition.
  • the value of the resistance component of the impedance of the test object may be corrected.
  • the data processing control circuit (4A, 4B) is configured to perform the measurement under the first condition.
  • the test measured under the second condition based on the error between the value of the phase angle of the impedance of the reference circuit ( ⁇ r1) and the value of the phase angle of the impedance of the reference circuit ( ⁇ r2) measured under the second condition.
  • the value of the phase angle of the impedance of the object may be corrected.
  • the data processing control circuit includes, as the correction coefficient, a phase angle value ( ⁇ r1) of the impedance of the reference circuit measured under the first condition;
  • a second correction coefficient ( ⁇ fix) is calculated based on the difference between the phase angle value ( ⁇ r2) of the impedance of the reference circuit measured under the two conditions, and using the second correction coefficient, the impedance of the reference circuit measured under the second condition is calculated.
  • the value of the phase angle of the impedance of the test object may be corrected.
  • the data processing control circuit includes an instruction receiving unit that receives instructions to the measuring device. (40, 40B), the impedance value (Rr1, ⁇ r1) of the reference circuit measured under the first condition, and correction coefficient information (Gfix, ⁇ fix) including the correction coefficient ( 46, 46A, 46B), a switch control unit (41) that controls the switch unit, and an impedance calculation unit (43, 43A) that calculates the value of impedance between the first internal terminal and the second internal terminal.
  • a correction unit (44, 44A, 44B) that corrects the impedance value calculated by the impedance calculation unit based on the correction coefficient information
  • a correction unit (44, 44A, 44B) that corrects the impedance value corrected by the correction unit as a measurement result.
  • a correction coefficient updating unit (42, 42A, 42B) that updates the correction coefficient information, and when the instruction receiving unit receives a predetermined instruction,
  • the switch unit connects one terminal of the reference circuit to the first internal terminal, and connects the other terminal of the reference circuit to the second internal terminal, and the impedance calculation unit connects the first internal terminal to the second internal terminal.
  • the correction coefficient updating unit updates the impedance values (Rr1, ⁇ r1) of the reference circuit measured under the first condition, which are stored in the storage unit, and the impedance values (Rr1, ⁇ r1) of the reference circuit measured under the second condition.
  • the correction coefficient information (Gfix, ⁇ fix) may be updated based on the impedance value (Rr2, ⁇ r2).
  • the reference circuit (8, 8A, 8C) may include a resistor (Rref).
  • the first internal terminal is connected to a high side internal application terminal (hci) to which a voltage or current is applied from the generation circuit, and to the voltage detection circuit.
  • a high-side internal detection terminal (hpi) connected to the second internal terminal, and the second internal terminal is connected to a low-side internal application terminal (lci) to which a voltage or current is applied from the generation circuit and the voltage detection circuit.
  • the first external terminal includes a high side external application terminal (HC) and a high side external detection terminal (HP); the second external terminal includes a low side internal detection terminal (lpi);
  • the reference circuit (8B) includes a low side external application terminal (LC) and a low side external detection terminal (LP), and the reference circuit (8B) has a high side input terminal (hcr) as one terminal of the reference circuit and a high side output terminal. (hpr), a low side input terminal (lcr) and a low side output terminal (lpr) as the other terminal of the reference circuit, and a first resistor connected between the high side input terminal and the low side input terminal.
  • a selection circuit (81) that outputs an output between the high side internal application terminal (hci) and the high side external application terminal (HC) and the high side of the reference circuit.
  • the terminal may be switched between the low side external detection terminal (LP) and the low side output terminal (lpr) of the reference circuit.
  • the reference circuit further includes a third resistor (Rc) connected in parallel with at least one resistor among the plurality of second resistors. You can stay there.
  • Rc third resistor
  • a selection signal (Ss) specifying a measurement range is input to the selection circuit, and the selection circuit Among them, a voltage corresponding to the measurement range designated by the selection signal may be selected and output.
  • the plurality of second resistors may be network resistors.
  • the standard resistor (8B) has a high side input terminal (hcr) and a high side output terminal (hpr), and a low side input terminal (lcr) and a low side output terminal ( lpr), a first resistor (Rm) connected between the high-side input terminal and the low-side input terminal, and a plurality of resistors (Rm) connected in series between the high-side input terminal and the low-side input terminal.
  • a second resistor (Ra0 to Ran) a third resistor (Rc) connected in parallel with at least one resistor among the plurality of second resistors, and a third resistor (Rc) connected to the high side input terminal and the low side input terminal.
  • FIG. 1 is a diagram showing the configuration of a measuring device 100 according to the first embodiment.
  • a measuring device 100 shown in FIG. 1 is a device for measuring the electrical characteristics of a DUT.
  • Examples of the measuring device 100 include a resistance meter, an LCR meter, and a capacitance meter that can measure impedance using a two-terminal method or a four-terminal method, a battery tester for measuring battery characteristics, and the like.
  • the measuring device 100 may be any device that can measure electrical characteristics such as impedance of the DUT, and is not limited to the above-mentioned example.
  • the measuring device 100 has a function of correcting measurement errors caused by changes in circuit characteristics within the measuring device 100 due to temperature or aging.
  • the measuring device 100 includes, for example, external terminals, internal terminals, a generation circuit 1, a current detection circuit 2, a voltage detection circuit 3, a data processing control circuit 4, a switch section 5, It has an output section 6, an operation section 7, and a reference circuit (REF) 8.
  • REF reference circuit
  • the external terminal is a terminal for connecting the DUT.
  • the measuring device 100 has, as external terminals, a high side external application terminal HC, a high side external detection terminal HP, a low side external detection terminal LP, and a low side external application terminal LC.
  • a high side external application terminal HC a high side external detection terminal HP
  • a low side external detection terminal LP a low side external application terminal LC
  • one terminal of the DUT is connected to the high side external application terminal HC and the high side external detection terminal HP
  • the low side external detection terminal LP and the low side external application terminal LC are connected to one terminal of the DUT.
  • the other terminal of the DUT is connected to.
  • high-side external application terminal HC high-side external detection terminal HP
  • low-side external detection terminal LP low-side external application terminal LC
  • the internal terminal is a terminal connected to the circuits (generating circuit 1, current detecting circuit 2, and voltage detecting circuit 3) within the measuring device 100.
  • the measuring device 100 has, as internal terminals, a high-side internal application terminal hci, a high-side internal detection terminal hpi, a low-side internal application terminal lci, and a low-side internal detection terminal lpi.
  • the high-side internal application terminal hci is connected to the positive output terminal of the generation circuit 1, and the low-side internal application terminal lci is connected to the negative output terminal of the generation circuit 1 via the current detection circuit 2.
  • the high-side internal detection terminal hpi is connected to the positive input terminal of the voltage detection circuit 3, and the low-side internal detection terminal lpi is connected to the negative input terminal of the voltage detection circuit 3.
  • the high-side internal application terminal hci, high-side internal detection terminal hpi, low-side internal application terminal lci, and low-side internal detection terminal lpi are simply expressed as "internal terminals hci, hpi, lci, lpi.”
  • the internal terminals hci, lci, hpi, lpi are connectable to external terminals HC, LC, HP, LP or a terminal of the reference circuit 8 by the switch section 5.
  • the generating circuit 1 is a circuit that generates a voltage or current to be applied to an object to be measured in order to measure impedance.
  • Generation circuit 1 applies a voltage or current between internal terminal hci and internal terminal lci.
  • the generating circuit 1 is, for example, a constant current generating circuit that generates a constant current or a voltage generating circuit that generates a voltage. In the first embodiment, as an example, the generation circuit 1 will be described as a constant current generation circuit.
  • the generation circuit 1 generates a constant current signal in response to the signal Sb from the data processing control circuit 4, for example, and outputs it from the positive output terminal and the negative output terminal.
  • the output terminal on the positive side of the generating circuit 1 is connected to the internal terminal hci, and the output terminal on the negative side of the generating circuit 1 is connected via the current detection circuit 2 to the internal terminal lci.
  • the constant current signal output from the generating circuit 1 may be an alternating current signal or a direct current signal, and can be changed depending on the purpose of the measuring device 100, for example.
  • the current detection circuit 2 is a circuit that detects the current flowing between the internal terminal hci and the internal terminal lci.
  • the current detection circuit 2 is connected in series between the positive output terminal of the generating circuit 1 and the internal terminal hci, or between the negative output terminal of the generating circuit 1 and the internal terminal lci.
  • FIG. 1 shows, as an example, a case where the current detection circuit 2 is connected in series between the negative output terminal of the generation circuit 1 and the internal terminal lci.
  • the current detection circuit 2 includes, for example, a resistor connected in series between the negative output terminal of the generation circuit 1 and the internal terminal lci, and amplifies the voltage across the resistor and outputs it as a current signal. It is configured to include an operational amplifier.
  • the voltage detection circuit 3 is a circuit that has a positive input terminal and a negative input terminal, and detects the voltage between the positive input terminal and the negative input terminal.
  • the positive input terminal of the voltage detection circuit 3 is connected to the internal terminal hpi
  • the negative input terminal of the voltage detection circuit 3 is connected to the internal terminal lpi.
  • Voltage detection circuit 3 detects and outputs the voltage between internal terminals hpi and lpi.
  • the voltage detection circuit 3 includes, for example, an operational amplifier, and amplifies the detected voltage between the external terminal HP and the external terminal LP with the operational amplifier and outputs it as a voltage signal.
  • the operation unit 7 is an input interface for a user to operate the measuring device 100.
  • Examples of the operation unit 7 include various buttons, a touch panel, and the like.
  • the user can set various measurement conditions for measuring the DUT in the measurement device 100, and can instruct the measurement device 100 to execute and stop measurement.
  • the user can instruct the measuring device 100 to update the correction coefficients, which will be described later.
  • the operation unit 7 generates a signal Sd that instructs execution of processing according to various commands input by the user by operating the operation unit 7, and provides the signal Sd to each functional unit.
  • the output unit 6 is a device that outputs various information such as measurement conditions and measurement results in the measurement device 100.
  • the output unit 6 is, for example, a display device such as an LCD (Liquid Crystal Display) or an organic EL display.
  • a display device such as an LCD (Liquid Crystal Display) or an organic EL display.
  • the output unit 6 displays information such as the measurement result of the DUT impedance calculated by the data processing control circuit 4 on the screen. indicate.
  • the output unit 6 may be a display device equipped with a touch panel that implements some of the functions of the operation unit 7. Further, the output unit 6 may include a communication circuit or the like that outputs data such as measurement results to the outside by wire or wirelessly.
  • the communication circuit may have not only the function of transmitting data to the outside but also the function of receiving data etc. from the outside.
  • the communication circuit receives various commands output from an external device (for example, an information processing device such as a PC), such as execution and stop of measurement, update of correction coefficients, etc.
  • an external device for example, an information processing device such as a PC
  • a signal Sd for instructing execution of processing according to various received commands may be generated and given to each functional unit.
  • the output unit 6 may include a speaker or the like that notifies the start of measurement, the end of measurement, etc. by sound.
  • the data processing control circuit 4 is a circuit that centrally controls each functional section within the measuring device 100.
  • the data processing control circuit 4 is, for example, an MCU (Micro Controller Unit) having a processor such as a CPU, a storage device such as a ROM, RAM, or a flash memory, and various peripheral circuits such as a timer or an A/D conversion circuit, or A program processing device such as an FPGA (Field-Programmable Gate Array) can be exemplified.
  • MCU Micro Controller Unit
  • the data processing control circuit 4 controls each functional unit in the measuring device 100 in accordance with the signal Sd from the operation unit 7, thereby calculating, for example, the measured value of the impedance of the DUT 200 or the reference circuit 8, as will be described later.
  • the correction coefficients are updated and the measured values are corrected using the correction coefficients. Details of the data processing control circuit 4 will be described later.
  • the reference circuit 8 is a circuit whose impedance can be measured by connecting it to the generation circuit 1 and the voltage detection circuit 3 in the same way as the DUT.
  • the reference circuit 8 can be used to calculate and correct measurement errors by the measuring device 100.
  • the reference circuit 8 includes, for example, a high side terminal and a low side terminal.
  • the reference circuit 8 has a high-side input terminal hcr and a high-side output terminal hpr as high-side terminals, and a low-side input terminal lcr and a low-side output terminal lpr as low-side terminals.
  • the high-side input terminal hcr, high-side output terminal hpr, low-side input terminal lcr, and low-side output terminal lpr of the reference circuit 8 are simply expressed as "terminals hcr, hpr, lcr, lpr.” There are cases.
  • the reference circuit 8 includes, for example, a resistor.
  • the reference circuit 8 is realized by a resistor having a predetermined resistance value, and the resistor is referred to as a "reference resistor Rref.”
  • One terminal of the reference resistor Rref is connected to a high-side input terminal hcr and a high-side output terminal hpr, and the other terminal of the reference resistor Rref is connected to a low-side input terminal lcr and a low-side output terminal lpr.
  • the reference resistor Rref is preferably a resistor with high precision and high reliability.
  • a precision resistor as the reference resistor Rref, which has a temperature coefficient of resistance of ⁇ 5 ppm/° C. or less and a long-term stability (change over time) of resistance value of ⁇ 100 ppm/year or less.
  • the above numerical values are just an example, and can be changed as appropriate depending on the specifications required of the measuring device 100.
  • the resistance value of the reference resistor Rref may be appropriately set according to the measurable range of impedance by the measuring device 100.
  • the switch section 5 is a functional section that switches the connection destinations of the internal terminals hci, hpi, lci, and lpi.
  • Each of the switches 51 to 54 constituting the switch unit 5 is, for example, a double-throw switch element.
  • the switch element include components such as semiconductor switches (for example, transistors) and relays (for example, mechanical relays) whose connection destinations can be switched in response to electrical signals.
  • the switch unit 5 switches the connection destinations of the internal terminals hci, hpi between the external terminal HC and one terminal hcr, hpr of the reference circuit 8, and switches the connection destinations of the internal terminals lci, lpi between the external terminal LC and the reference circuit. 8 and the other terminals lcr and lpr.
  • the switch section 5 switches the connection destinations of the internal terminals hci, hpi, lci, and lpi according to the signal Sc from the data processing control circuit 4.
  • FIGS. 2A and 2B are diagrams showing connection examples of the switches 51 to 54 that make up the switch section 5.
  • FIG. 2A shows a case where internal terminals hci, hpi, lci, lpi are connected to the reference circuit 8 when measuring the impedance of the reference circuit 8
  • FIG. 2B shows a case where the internal terminals hci, hpi, lci, lpi are connected to the reference circuit 8 when measuring the impedance of the DUT 200.
  • the case where internal terminals hci, hpi, lci, lpi are connected to external terminals HC, HP, LC, LP is shown.
  • the switch unit 5 sets the switches 51 to 54 to the state shown in FIG. 2A in response to the signal Sc from the data processing control circuit 4. That is, the switch 51 connects the internal terminal hci to the terminal hcr of the reference circuit 8, the switch 52 connects the internal terminal hpi to the terminal hpr of the reference circuit 8, and the switch 53 connects the internal terminal lci to the terminal lcr of the reference circuit 8.
  • the switch 54 connects the internal terminal lpi to the terminal lpr of the reference circuit 8. Thereby, the internal terminals hci, hpi, lci, and lpi are connected to the reference resistor Rref as the reference circuit 8.
  • the switch unit 5 sets the switches 51 to 54 to the state shown in FIG. 2B in response to the signal Sc from the data processing control circuit 4. That is, the switch 51 connects the internal terminal hci to the external terminal HC, the switch 52 connects the internal terminal hpi to the external terminal HP, the switch 53 connects the internal terminal lci to the external terminal LC, and the switch 54 connects the internal terminal hpi to the external terminal HP. Connect lpi to external terminal LP. As a result, the internal terminals hci, hpi, lci, and lpi are connected to the DUT 200.
  • the data processing control circuit 4 measures the value of impedance between the internal terminal hpi and the internal terminal lpi based on the voltage detected by the voltage detection circuit 3 and the current detected by the current detection circuit 2.
  • the data processing control circuit 4 connects one terminal hcr, hpr of the reference circuit 8 to the internal terminals hci, hpi by the switch unit 5, and connects the other terminal lcr of the reference circuit 8 to the internal terminals hci, hpi. , lpr and the internal terminals lci, lpi are connected (see FIG. 2A), the impedance measurement result of the reference circuit 8 is obtained. Further, in the data processing control circuit 4, under a second condition different from the first condition, one terminal hcr, hpr of the reference circuit is connected to the internal terminal hci, hpi by the switch section 5, and the other terminal of the reference circuit 8 is connected.
  • the impedance measurement result of the reference circuit 8 when the terminals lcr, lpr and the internal terminals lci, lpi are connected is obtained. Further, in the data processing control circuit 4, under the second condition, the external terminals HC and HP are connected to the internal terminals hci and hpi, and the external terminals LC and LP are connected to the internal terminals lci and lpi. The impedance measurement results between the internal terminals hci, hpi and the internal terminals lci, lpi at the time (see FIG. 2B) are obtained.
  • the data processing control circuit 4 uses the switch unit 5 to connect an external terminal under the second condition based on the error between the impedance measurement result of the reference circuit 8 under the first condition and the impedance measurement result of the reference circuit 8 under the second condition.
  • the impedance between internal terminals hci, hpi and internal terminals lci, lpi when HC, HP and internal terminals hci, hpi are connected, and external terminals LC, LP are connected to internal terminals lci, lpi. Correct the measurement results.
  • the data processing control circuit 4 determines the value Rr1 of the resistance component of the impedance of the reference circuit 8 measured under the first condition, and the value Rr2 of the resistance component of the impedance of the reference circuit 8 measured under the second condition.
  • the value of the resistance component of the impedance of the DUT 200 measured under the second condition is corrected based on the error.
  • the data processing control circuit 4 calculates a correction coefficient for correcting the measured (calculated) impedance value of the DUT 200. Specifically, the data processing control circuit 4 determines the ratio between the value Rr1 of the resistance component of the impedance of the reference circuit 8 measured under the first condition and the resistance component Rr2 of the impedance of the reference circuit 8 measured under the second condition. A first correction coefficient Gfix based on the first correction coefficient Gfix is calculated.
  • the data processing control circuit 4 uses the calculated first correction coefficient Gfix to correct the measurement result of the resistance component of the impedance of the DUT 200 measured under the second condition. For example, the data processing control circuit 4 multiplies the value R of the resistance component of the impedance of the DUT 200 measured under the second condition by the first correction coefficient Gfix. Correct R.
  • FIG. 3 is a diagram showing the configuration of the data processing control circuit 4 according to the first embodiment.
  • the data processing control circuit 4 includes, as functional blocks for realizing the above-mentioned functions, an instruction receiving section 40, a switch control section 41, a correction coefficient updating section 42, an impedance calculation section 43, a correction It has a measurement result output section 44, a measurement result output section 45, and a storage section 46.
  • These functional blocks are realized, for example, in a program processing unit (MCU) as the data processing control circuit 4, by a processor executing various arithmetic operations according to programs stored in a storage device and controlling peripheral circuits. Ru. Note that some or all of the above functional blocks may be realized by a dedicated logic circuit.
  • MCU program processing unit
  • the instruction receiving unit 40 is a functional unit that receives instructions to the measuring device 100.
  • the instruction receiving unit 40 receives a signal Sd from the operation unit 7 and instructs other functional unit locks and the like to execute processing according to the signal Sd.
  • the instruction receiving unit 40 sends the switch control unit 41, the correction The coefficient updating unit 42, the impedance calculating unit 43, and the like are instructed to execute processing for measuring the impedance of the DUT 200.
  • the user may operate the operation unit 7 to instruct the update of the correction coefficient.
  • the instruction receiving unit 40 instructs the switch control unit 41, the correction coefficient updating unit 42, the impedance calculation unit 43, etc. to execute processing for updating the correction coefficient.
  • the user may operate the operation unit 7 to instruct measurement of the impedance of the reference circuit 8 (reference resistor Rref).
  • the instruction receiving unit 40 instructs the switch control unit 41, the correction coefficient updating unit 42, the impedance calculation unit 43, etc. instructs execution of processing to measure.
  • information on the impedance measurement result of the reference circuit 8 may be displayed on the screen by the output unit 6, or may be output as measurement data to an external device.
  • the output unit 6 also outputs not only information on the latest impedance measurement results of the reference circuit 8 but also information on previously measured impedance measurement results of the reference circuit 8 under the first condition described below. The measurement results) may also be output (displayed).
  • the storage unit 46 is a functional unit that stores arithmetic expressions, various parameters, measurement results, correction coefficients, etc. necessary for measuring electrical characteristics of the DUT, calculating correction coefficients, etc.
  • the storage unit 46 stores a reference measurement result (first condition) 401 including the value Rr1 of the reference resistance Rref measured under the first condition, and a value Rr2 of the reference resistance Rref measured under the second condition, which will be described later.
  • a corrected DUT 200 measurement result 405 including a value Rf obtained by correcting the value R of the resistance component of the DUT 200 measured under the second condition is stored.
  • the storage unit 46 also stores various calculation formulas necessary for impedance measurement, such as calculation formulas for calculating impedance values, calculation formulas for calculating correction coefficients, and calculation formulas for correcting measurement results. remembered.
  • the switch control section 41 is a functional section for controlling the switch section 5.
  • the switch control unit 41 switches the connection destinations of the internal terminals hci, hpi, lci, and lpi by controlling the switch unit 5 according to an instruction from the instruction receiving unit 40, for example.
  • the impedance calculation unit 43 is a functional unit that calculates the value of impedance between the internal terminal hpi and the internal terminal lpi.
  • the impedance calculation unit 43 calculates an impedance value between the internal terminal hpi and the internal terminal lpi based on the voltage value V detected by the voltage detection circuit 3 and the current value I detected by the current detection circuit 2. Calculate.
  • the calculation formula for calculating the value of the resistance component of impedance is stored in the storage unit 46, and the impedance calculation unit 43 uses the calculation formula stored in the storage unit 46. is used to calculate the value of the resistance component of impedance.
  • the arithmetic expression for calculating impedance is not limited to the above example, and can be changed as appropriate depending on the specifications required for the measuring device 100.
  • a correction coefficient etc. obtained by the initial adjustment may be included in the above equation.
  • the correction coefficient update unit 42 is a functional unit that calculates a correction coefficient and updates the correction coefficient stored in the storage unit 46.
  • the correction coefficient updating unit 42 calculates a first value based on the ratio of the value Rr1 of the resistance component of the impedance of the reference circuit 8 measured under the first condition and the value Rr2 of the resistance component of the impedance of the reference circuit 8 measured under the second condition.
  • a correction coefficient Gfix is calculated and stored in the storage unit 46 as correction coefficient information 403. For example, every time the first correction coefficient Gfix is calculated, the correction coefficient updating unit 42 updates the correction coefficient information 403 (first correction coefficient Gfix) stored in the storage unit 46 to the latest value.
  • the method for calculating the first correction coefficient Gfix will be described in detail below.
  • the measuring device 100 switches the connection destinations of the internal terminals hci, hpi, lci, and lpi to the reference resistor Rref using the switch section 5, and the impedance calculating section 43 switches the connection destinations of the internal terminals hci, hpi, lci, and lpi to the reference resistor Rref. Measure the value Rr1.
  • first conditions the conditions after the initial adjustment (for example, temperature, humidity, elapsed time from the time of production of the measuring device 100, operating time, etc.) will be referred to as "first conditions.”
  • the measuring device 100 stores the value Rr1 of the reference resistance Rref measured under the first condition in the storage unit 46 as the reference measurement result (first condition) 401. After that, the measuring device 100 is shipped.
  • second conditions the conditions under which the user performs the measurement (for example, conditions different from the first conditions, such as temperature, humidity, elapsed time since production of the measuring device 100, and operating time) will be referred to as "second conditions.”
  • the measuring device 100 first uses the switch unit 5 to connect the internal terminals hci, hpi, lci, lpi to the reference resistor Rref. , the value Rr2 of the reference resistance Rref is measured by the impedance calculation unit 43, and is stored in the storage unit 46 as a reference measurement result (second condition) 402.
  • the value Rr2 of the reference resistance Rref measured under the second condition is the value obtained by multiplying the value Rr1 of the reference resistance Rref measured under the first condition by the error component "Er". Become. Therefore, by setting the reciprocal of the error Er as the first correction coefficient Gfix and multiplying the resistance component value Rr2 of the impedance of the DUT 200 measured under the second condition by the first correction coefficient Gfix, the impedance of the DUT 200 measured under the second condition is It becomes possible to remove the error component included in the value Rr2 of the resistance component.
  • the correction coefficient updating unit 42 uses the value Rr1 of the reference resistance Rref measured under the first condition, the value Rr2 of the reference resistance Rref measured under the second condition, and the following values stored in the storage unit 46.
  • the first correction coefficient Gfix is calculated based on equation (2).
  • Calculation (updating) of the correction coefficient (first correction coefficient Gfix) by the correction coefficient updating unit 42 may be performed, for example, when the instruction receiving unit 40 receives an instruction to perform measurement of the DUT 200, or when the instruction receiving unit The process may be executed when 40 receives an instruction to update the correction coefficient or an instruction to measure the reference circuit 8 .
  • the correction unit 44 is a functional unit that corrects the impedance value calculated by the impedance calculation unit 43 based on correction coefficient information.
  • the correction unit 44 uses the first correction coefficient Gfix stored in the storage unit 46 to correct the value R of the resistance component of the impedance of the DUT 200 calculated by the impedance calculation unit 43, and calculates the corrected DUT measurement result ( The second condition) is stored in the storage unit 46 as 404.
  • the correction unit 44 corrects the value R of the resistance component of the impedance by performing calculation based on the following equation (3).
  • the measurement result output unit 45 is a functional unit that outputs measurement results. For example, when the impedance of the DUT 200 is measured, the measurement result output section 45 outputs the impedance measurement result (corrected resistance component value Rf) So corrected by the correction section 44 to the output section 6. do.
  • the output unit 6 displays information corresponding to the received measurement result So on the screen, or transmits it to an external device as measurement data, for example.
  • FIG. 4 is a flowchart showing the flow of impedance measurement by the measuring device 100 according to the first embodiment.
  • the reference measurement result (Rr1) 401 under the first condition is stored in the storage unit 46 of the data processing control circuit 4 in advance. Further, it is assumed that the DUT 200 is connected between the external terminals HC, HP and the external terminals LC, LP, as shown in FIG. 2B.
  • the data processing control circuit 4 first controls the switch unit 5 to refer to the internal terminals hci, hpi, lci, lpi. Connect to the circuit 8 (step S1).
  • the instruction receiving unit 40 when the instruction receiving unit 40 receives a signal Sd from the operation unit 7 that instructs to measure the impedance of the DUT 200, the instruction receiving unit 40 instructs the switch control unit 41 to output the internal terminals hci, hpi, Instructs to connect lci and lpi to reference resistor Rref.
  • the switch control section 41 controls the switch section 5 to connect the internal terminal hci to the terminal hcr of the reference circuit, connect the internal terminal hpi to the terminal hpr of the reference circuit, and connect the internal terminal lci to the terminal hpr of the reference circuit. It is connected to the terminal lcr of the reference circuit, and the internal terminal lpi is connected to the terminal lpr of the reference circuit.
  • the data processing control circuit 4 measures the resistance component Rr2 of the impedance of the reference circuit 8 (reference resistor Rref) (step S2).
  • the instruction receiving section 40 instructs the generating circuit 1 to output voltage or current, and instructs the impedance calculating section 43 to measure impedance.
  • the impedance calculation unit 43 acquires the value of the voltage detected by the voltage detection circuit 3 and the value of the current detected by the current detection circuit 2, calculates the resistance component Rr2 of the reference resistance Rref by the method described above, and calculates the resistance component Rr2 of the reference resistor Rref. It is stored in the storage unit 46 as a reference measurement result 402 under the conditions.
  • the data processing control circuit 4 calculates (updates) the first correction coefficient Gfix (step S3).
  • the correction coefficient updating unit 42 uses the resistance component value Rr1 as the reference measurement result 401 under the first condition, which is stored in the storage unit 46, and the resistance component as the reference measurement result 402 under the second condition. Based on the value Rr2, the first correction coefficient Gfix is calculated by the method described above and stored in the storage unit 46. Note that when the correction coefficient Gfix is already stored in the storage unit 46, the correction coefficient updating unit 42 updates the first correction coefficient Gfix stored in the storage unit 46 using the newly calculated first correction coefficient Gfix. Rewrite.
  • the data processing control circuit 4 controls the switch section 5 to connect the internal terminals hci, hpi, lci, lpi to the external terminals HC, HP, LC, LP (step S4).
  • the instruction receiving unit 40 instructs the switch control unit 41 to connect the internal terminals hci, hpi, lci, lpi to the external terminals HC, HP, LC, LP.
  • the switch control section 41 controls the switch section 5 to connect the internal terminal hci to the external terminal HC, connect the internal terminal hpi to the external terminal HP, and connect the internal terminal lci to the external terminal LC.
  • the internal terminal lpi is connected to the external terminal LP.
  • the internal terminals hci, hpi, lci, and lpi are connected to the DUT 200.
  • the data processing control circuit 4 measures the resistance component of the DUT 200 (step S5). Specifically, similarly to step S2, the instruction receiving section 40 instructs the generating circuit 1 to output voltage or current, and instructs the impedance calculating section 43 to measure impedance.
  • the impedance calculation unit 43 acquires the voltage value detected by the voltage detection circuit 3 and the current value detected by the current detection circuit 2, calculates the value R of the resistance component of the DUT 200 using the method described above, and performs the DUT measurement. It is stored in the storage unit 46 as a result 405.
  • the data processing control circuit 4 corrects the value R of the resistance component of the DUT 200 measured in step S5 (step S6).
  • the correction unit 44 uses the method described above based on the value R of the resistance component of the DUT 200 stored in the storage unit 46 and the first correction coefficient Gfix stored in the storage unit 46.
  • the value Rf of the resistance component of the DUT 200 after the correction is calculated and stored in the storage unit 46 as the DUT measurement result 405 after the correction.
  • the data processing control circuit 4 outputs the corrected DUT measurement result 405 (Rf) to the output unit 6 as the measurement result of the resistance component of the impedance of the DUT 200 (step S7).
  • the output unit 6 displays information on the impedance measurement results (Rf, etc.) of the DUT 200 on the screen.
  • the measuring device 100 has a built-in reference circuit 8 having a predetermined impedance that can be connected to the internal terminals hci, hpi, lci, and lpi. According to this, the user can easily know the error in the measurement by the measuring device 100 by measuring the impedance of the reference circuit 8 with the measuring device 100 under various conditions and comparing the measurement results.
  • the measuring device 100 also measures the impedance of the reference circuit 8 under the second condition based on the error between the impedance measurement result of the reference circuit 8 under the first condition and the impedance measurement result of the reference circuit 8 under a second condition different from the first condition.
  • the impedance measurement result of the measurement target (DUT) 200 is corrected.
  • the measuring device 100 even if an error occurs in measurement by the measuring device 100 due to changes in the characteristics of the internal circuit of the measuring device 100 due to temperature and aging, the measuring device 100 itself corrects the error. , it becomes possible to measure impedance with higher precision. For example, if the user performs the initial adjustment at a room temperature of 18°C as the first condition, and the user measures the DUT 200 at a room temperature of 28°C as the second condition, a conventional measurement device would take into account the effect of a temperature difference of 10°C. Must.
  • the measuring device 100 for example, when updating the first correction coefficient Gfix at a room temperature of 27°C, the user can , it is sufficient to consider the influence of a temperature difference of 1° C., and more accurate measurement becomes possible.
  • the data processing control circuit 4 of the measuring device 100 uses the value Rr1 of the resistance component of the impedance of the reference circuit 8 (reference resistor Rref) measured under the first condition and the value Rr1 of the resistance component of the impedance of the reference circuit 8 (reference resistor Rref) measured under the second condition.
  • the value R of the resistance component of the impedance of the DUT 200 measured under the second condition is corrected based on the error from the value Rr2 of the resistance component of the impedance of the reference resistor Rref). According to this, even if an error occurs in the measurement of the resistance component of impedance by the measuring device 100 due to temperature and age, it is possible to measure the resistance component of impedance with higher accuracy.
  • the data processing control circuit 4 of the measuring device 100 calculates the value Rr1 of the resistance component of the impedance of the reference circuit 8 measured under the first condition and the resistance component of the impedance of the reference circuit 8 measured under the second condition.
  • the switch unit 5 connects one terminal hcr, hpr of the reference circuit 8 to the internal terminals hci, hpi, and The other terminal lcr, lpr of the reference circuit 8 is connected to the internal terminal lci, lpi, and the impedance calculation unit 43 calculates the resistance component value Rr2 of the impedance of the reference circuit 8 under the second condition and stores it in the storage unit 46. do.
  • the correction coefficient updating unit 42 then updates the value Rr1 of the resistance component of the impedance of the reference circuit 8 under the first condition and the value Rr2 of the resistance component of the impedance of the reference circuit 8 under the second condition, which are stored in the storage unit 46.
  • the first correction coefficient Gfix may be updated based on the above.
  • the predetermined instruction may be, for example, an instruction to perform measurement of the DUT 200, an instruction to update the correction coefficient, or an instruction to perform measurement of the impedance of the reference circuit 8. You can.
  • the first correction coefficient Gfix can be updated at the timing desired by the user, so it is possible to realize a measuring device that is easy to use for the user.
  • some conventional measurement devices such as LCR meters, resistance meters, and battery testers have a so-called self-calibration function.
  • errors in some circuits such as a voltage detection circuit and a current detection circuit are to be corrected, and only a limited correction effect can be obtained.
  • a reference signal output circuit consisting of a regulator IC that generates a voltage as a reference, an attenuator, a D/A conversion circuit, etc. is required depending on the circuit to be corrected. It is necessary to provide it separately, which increases the complexity of the circuit and the cost.
  • the reference circuit 8 itself has impedance and functions as a measurement target like the DUT. Therefore, by using the measurement error of the impedance of the reference circuit 8, it is possible to calibrate the entire measuring device without having to individually measure errors in the current detection circuit, errors in the voltage detection circuit, etc., and perform self-calibration for each circuit. It becomes possible to comprehensively correct measurement errors. Furthermore, by adopting a simple circuit configuration as the reference circuit 8 as described above (see FIG. 2A), circuit complexity and cost increases due to adding a measurement error correction function to the measuring device 100 can be minimized. can be kept to a limit.
  • FIG. 5 is a diagram showing the configuration of a measuring device 100A according to the second embodiment.
  • the measuring device 100A according to the second embodiment shown in FIG. is similar to the measuring device 100 according to the first embodiment.
  • circuits such as voltage detection circuits and current detection circuits that constitute measurement devices such as the LCR meters described above each have unique phase characteristics. That is, when a signal is input to a circuit, a phase shift occurs between the signal input to the circuit and the signal output from the circuit. The amount of this phase shift is also called "phase characteristic.”
  • phase characteristics of a circuit depend on the characteristics of electronic components such as operational amplifier circuits and capacitors that make up the circuit. Therefore, when the characteristics of electronic components change due to temperature and age, the phase characteristics of the internal circuits that make up the measuring device also change.
  • the measuring device 100A has a function of reducing not only the measurement error of the resistance component of impedance but also the influence of the phase measurement error due to temperature and aging. Specifically, the measuring device 100A calculates a correction coefficient based on a reference circuit 8A having a predetermined impedance and the measurement result of the phase angle of the impedance of the reference circuit 8A, and measures the phase angle of the impedance of the object to be measured. The data processing control circuit 4A corrects the results.
  • phase angle of impedance is the difference between the phase of the current flowing through the object to be measured (DUT, reference circuit 8A, etc.) and the phase of the voltage of the object to be measured.
  • the resistance component of the impedance is R and the reactance component of the impedance is X
  • FIG. 6 is a diagram showing an example of a reference circuit 8A according to the second embodiment.
  • the reference circuit 8A is configured to include electronic components having a predetermined impedance.
  • the reference circuit 8A is configured to include a reference resistor Rref, similarly to the reference circuit 8 according to the first embodiment. That is, as shown in FIG. 6, one terminal of the reference resistor Rref is connected to the terminals hcr and hpr of the reference circuit 8A, and the other terminal of the reference resistor Rref is connected to the terminals lcr and lpr of the reference circuit 8A. .
  • the reference circuit 8A is not limited to the reference resistor Rref described above, and may include a capacitor, an inductor, etc. having a highly accurate reactance component.
  • the data processing control circuit 4A has a function of reducing the influence of errors in phase measurement in addition to the functions of the data processing control circuit 4 according to the first embodiment.
  • the data processing control circuit 4A calculates the value of the phase angle of the impedance of the reference circuit 8 (reference resistor Rref) measured under the first condition and the reference circuit measured under the second condition.
  • the measurement result of the phase angle of the impedance of the DUT 200 measured under the second condition is corrected based on the error with the value of the phase angle of the impedance of No. 8.
  • the data processing control circuit 4A determines the value ⁇ r1 of the phase angle of the impedance of the reference circuit 8A (reference resistor Rref) measured under the first condition and the phase angle of the impedance of the reference circuit 8A measured under the second condition.
  • a second correction coefficient ⁇ fix is calculated based on the difference from the value ⁇ r2, and the value of the phase angle of the impedance of the DUT 200 measured under the second condition is corrected based on the second correction coefficient ⁇ fix.
  • FIG. 7 is a diagram showing the configuration of the data processing control circuit 4A according to the second embodiment.
  • the data processing control circuit 4A is, for example, a program processing device like the data processing control circuit 4 according to the first embodiment.
  • the data processing control circuit 4A includes, as functional blocks for realizing the above-mentioned functions, an instruction reception section 40, a switch control section 41, a correction coefficient update section 42A, an impedance calculation section 43A, a correction section 44A, a measurement result output section 45, and a storage section 46A.
  • These functional blocks are realized, for example, in a program processing unit (MCU) as the data processing control circuit 4A, by a processor executing various arithmetic operations according to programs stored in a storage device and controlling peripheral circuits. Ru. Note that some or all of the above functional blocks may be realized by a dedicated logic circuit.
  • the storage unit 46A stores calculation formulas, various parameters, measurement results, correction coefficients, etc. necessary for measuring electrical characteristics of the DUT, calculating correction coefficients, etc. This is a functional unit that stores information.
  • the storage unit 46A stores a reference measurement result (first condition) 401A including the value (Rr1, ⁇ r1) of the reference resistance Rref measured under the first condition, which will be described later, and a reference resistance Rref measured under the second condition.
  • a DUT measurement result (second condition) 404A including (R, ⁇ ) and a corrected DUT measurement result (second condition) 405A including the corrected impedance value (Rf, ⁇ f) of the DUT 200 are stored.
  • the impedance calculation unit 43A is a functional unit that calculates the value of impedance between the internal terminal hpi and the internal terminal lpi.
  • the impedance calculation unit 43A calculates the impedance value between the internal terminal hpi and the internal terminal lpi based on the voltage value detected by the voltage detection circuit 3 and the current value detected by the current detection circuit 2. do.
  • the impedance calculation unit 43A has a function of calculating the value of the phase angle of impedance between the internal terminal hpi and the internal terminal lpi.
  • the instruction receiving unit 40 instructs to measure the phase angle of the impedance of the DUT 200, update the correction coefficient, or measure the reference circuit 8A
  • the generating circuit 1 generates an AC signal (for example, a constant current signal). is applied between the internal terminals hci and lci, and the current detection circuit 2 detects the current flowing between the internal terminals hci and lci at this time, and the voltage detection circuit 3 detects the voltage between the internal terminals hcp and lcp.
  • the instruction reception unit 40 of the data processing control circuit 4A provides the generation circuit 1 with a reference signal (for example, a sine wave signal) that is a signal having a constant frequency and a constant amplitude as the signal Sb.
  • a reference signal for example, a sine wave signal
  • a generating circuit 1 generates an AC signal based on a reference signal.
  • the generation circuit 1 generates an alternating current signal (constant current) having a frequency and a constant amplitude according to the reference signal, and supplies it between internal terminals hci and lci.
  • the impedance calculation unit 43A calculates the value of the phase angle of the impedance between the internal terminal hpi and the internal terminal lpi based on the current detected by the current detection circuit 2 and the voltage detected by the voltage detection circuit 3 using a known method. and the value R of the resistance component of the impedance is calculated.
  • the impedance calculation unit 43A calculates the amplitude
  • ⁇ cos ⁇ r1) of the impedance of the reference circuit 8A measured by the above-described method under the first condition and the phase angle value ⁇ r1 ( ⁇ v1 ⁇ i1). ) is stored in the storage unit 46.
  • ⁇ cos ⁇ r2) and phase angle ⁇ r2 ( ⁇ v2 ⁇ i2) of the impedance of the reference circuit 8A measured by the above-described method under the second condition. The information is stored in the storage unit 46.
  • the correction coefficient etc. obtained by the initial adjustment are calculated using the above formula (
  • , ⁇ ⁇ v - ⁇ i).
  • the impedance calculation method based on the synchronous detection described above is just one example, and the impedance calculation unit 43A may calculate the impedance using other known calculation methods.
  • the correction coefficient update unit 42A is a functional unit that updates the correction coefficient.
  • the method for calculating the first correction coefficient Gfix is the same as the method according to the first embodiment. Further, the correction coefficient updating unit 42A calculates and updates the second correction coefficient ⁇ fix.
  • the second correction coefficient ⁇ fix is a coefficient for correcting the measured value of the phase angle of the impedance of the object to be measured.
  • the correction coefficient updating unit 42A updates the impedance phase angle value ⁇ r1 of the reference circuit 8A (reference resistor Rref) measured under the first condition, which is stored in the storage unit 46, and the value ⁇ r1 of the impedance phase angle of the reference circuit 8A measured under the second condition.
  • a second correction coefficient ⁇ fix is calculated based on the difference between the impedance and the phase angle value ⁇ r2, and is stored in the storage unit 46A. The method for calculating the second correction coefficient ⁇ fix will be described in detail below.
  • a standard resistor with a highly accurate phase angle or an ideal reactance element with a highly accurate phase angle is connected to the measuring device 100A as a DUT, and the measuring device 100A Measure the phase angle of impedance.
  • the impedance calculation unit 43 is configured so that the difference (phase difference) between the theoretical phase angle of the DUT (or the calibrated (known) phase angle) and the measured phase angle of the DUT becomes "zero".
  • the measuring device 100A may also adjust the arithmetic expression for calculating the resistance component, as in the first embodiment.
  • the measuring device 100A switches the connection destination of the internal terminals hci, hpi, lci, lpi to the reference circuit 8 (reference resistance Rref) by the switch unit 5, and the impedance calculation unit 43A Accordingly, the phase value ⁇ r1 of the reference resistor Rref is measured using the method described above.
  • first conditions the conditions after the initial adjustment will be referred to as "first conditions.”
  • the measuring device 100A stores the phase value ⁇ r1 of the reference resistance Rref measured under the first condition in the storage unit 46 as the reference measurement result (first condition) 401A.
  • the phase value ⁇ r1 of the reference resistor Rref measured under the first condition is expressed by the following equation (4).
  • ⁇ v is a voltage phase difference
  • ⁇ i is a current phase difference.
  • the measuring device 100A uses the amplitude
  • of the current signal i, and the phase angle ⁇ r1 ( ⁇ v1 ⁇ i1) to determine the reference resistance Rref.
  • second conditions the conditions under which the user performs measurement will be referred to as "second conditions.”
  • the measuring device 100A first uses the switch unit 5 to connect the internal terminals hci, hpi, lci, lpi to the reference resistor Rref. , the impedance calculation unit 43A measures the phase value ⁇ r2 of the reference resistor Rref, and stores it in the storage unit 46A as a reference measurement result (second condition) 402A.
  • the measuring device 100A uses the amplitude
  • phase characteristics of the current detection circuit 2 and the voltage detection circuit 3 change due to temperature changes and changes over time from the time of initial adjustment (first condition), and the output signal of the current detection circuit 2 and voltage detection under the second condition change.
  • a phase error ⁇ e occurs between the output signal of the circuit 3 and the output signal of the circuit 3.
  • the phase value ⁇ r2 of the reference resistor Rref measured under the second condition can be expressed by the following equation (5).
  • the phase value ⁇ r2 of the reference resistance Rref measured under the second condition is the sum of the phase error ⁇ e from the phase value ⁇ r1 of the reference resistance Rref measured under the first condition. value.
  • the phase error ⁇ e between the output signal of the current detection circuit 2 and the output signal of the voltage detection circuit 3 is the difference between the phase value ⁇ r1 of the reference resistor Rref measured under the first condition and the reference resistor Rref measured under the second condition. This appears as an error between the phase value ⁇ r2 of the resistor Rref and the phase value ⁇ r2. Therefore, the phase error ⁇ e is expressed by the following equation (6) from the above equation (5).
  • the phase error ⁇ e can be calculated.
  • Calculation (updating) of the correction coefficients (first correction coefficient Gfix and second correction coefficient ⁇ fix) by the correction coefficient updating unit 42A may be performed, for example, when the instruction receiving unit 40 receives an instruction to perform measurement of the DUT 200. Alternatively, the process may be executed when the instruction receiving unit 40 receives an instruction to update the correction coefficient or an instruction to measure the reference circuit 8 .
  • the correction unit 44A is a functional unit that corrects the impedance value calculated by the impedance calculation unit 43A based on the correction coefficient information 403A.
  • the correction unit 44A uses the first correction coefficient Gfix included in the correction coefficient information 403A to calculate the resistance component of the impedance of the DUT 200 calculated by the impedance calculation unit 43A using the same method as the correction unit 44. Correct the value R.
  • the value ⁇ is corrected and stored in the storage unit 46 as a corrected DUT measurement result (second condition) 405A.
  • the correction unit 44A corrects the value ⁇ of the phase angle of the impedance of the DUT 200 by performing calculation based on the following equation (7).
  • the measurement result output unit 45 outputs the impedance measurement result (corrected resistance component value Rf, phase angle ⁇ f, etc.) So corrected by the correction unit 44A. Output for 6.
  • the output unit 6 displays information corresponding to the received measurement result So on the screen, or transmits it to an external device as measurement data, for example.
  • FIG. 8 is a flowchart showing the flow of impedance measurement by the measuring device 100A according to the second embodiment.
  • the flow of measuring the phase of the DUT 200 will be explained, and the flow of measuring the resistance component of the DUT 200 will be omitted. Note that the flow of measuring the resistance component is the same as that in FIG. 4 described above.
  • the reference measurement result ( ⁇ r1) 401A under the first condition is stored in advance in the storage unit 46A of the data processing control circuit 4A. Further, it is assumed that the DUT 200 is connected between external terminals HC and HP and external terminals LC and LP.
  • the data processing control circuit 4A controls the switch unit 5 as in step S1 according to the first embodiment described above. Then, the internal terminals hci, hpi, lci, and lpi are connected to the reference circuit 8 (step S1A).
  • the data processing control circuit 4A measures the phase angle ⁇ r2 of the impedance of the reference circuit 8A (reference resistor Rref) (step S2A).
  • the instruction receiving section 40 instructs the generating circuit 1 to output voltage or current, and instructs the impedance calculating section 43A to measure impedance.
  • the impedance calculation unit 43A calculates the phase angle ⁇ r2 of the reference resistor Rref based on the voltage signal output from the voltage detection circuit 3 and the current signal output from the current detection circuit 2 by the method described above, and It is stored in the storage unit 46A as a reference measurement result 402A of the conditions.
  • the data processing control circuit 4A calculates (updates) the second correction coefficient ⁇ fix (step S3A). Specifically, the correction coefficient updating unit 42A updates the phase value ⁇ r1 as the reference measurement result 401A under the first condition and the phase value ⁇ r1 as the reference measurement result 402A under the second condition, which are stored in the storage unit 46A. Based on ⁇ r2, the second correction coefficient ⁇ fix is calculated by the method described above and is stored in the storage unit 46A. Note that if the second correction coefficient ⁇ fix is already stored in the storage unit 46A, the correction coefficient update unit 42A updates the second correction coefficient ⁇ fix stored in the storage unit 46A using the newly calculated second correction coefficient ⁇ fix. Rewrite the correction coefficient ⁇ fix.
  • the data processing control circuit 4A controls the switch unit 5 to connect the internal terminals hci, hpi, lci, lpi to the external terminals HC, HP, LC, LP (step S4A).
  • the internal terminals hci, hpi, lci, and lpi are connected to the DUT 200.
  • the data processing control circuit 4A measures the phase of the DUT 200 (step S5A). Specifically, similarly to step S2A, the instruction receiving section 40 instructs the generating circuit 1 to output voltage or current, and instructs the impedance calculating section 43A to measure impedance.
  • the impedance calculation unit 43A calculates the phase value ⁇ of the DUT 200 by the method described above based on the voltage signal output from the voltage detection circuit 3 and the current signal output from the current detection circuit 2, and calculates the DUT measurement result. It is stored in the storage unit 46A as 404A.
  • the data processing control circuit 4 outputs the corrected DUT measurement result 405A ( ⁇ f) to the output unit 6 as the measurement result of the phase angle of the impedance of the DUT 200 (step S7A).
  • the output unit 6 displays information on the impedance measurement results (phase angle ⁇ f, etc.) of the DUT 200 on the screen, for example.
  • the data processing control circuit 4A calculates the value ⁇ r1 of the phase angle of the impedance of the reference circuit 8A measured under the first condition and the impedance of the reference circuit 8A measured under the second condition.
  • the measurement result ( ⁇ ) of the phase angle of the impedance of the DUT 200 measured under the second condition is corrected based on the difference (phase error ⁇ e) from the phase angle value ⁇ r2. According to this, even if an error occurs in the measurement of the impedance phase angle by the measuring device 100A due to temperature and age, it is possible to measure the impedance phase angle with higher accuracy.
  • the data processing control circuit 4A of the measuring device 100A determines the value ⁇ r1 of the phase angle of the impedance of the reference circuit 8A measured under the first condition and the phase angle of the impedance of the reference circuit 8A measured under the second condition.
  • the switch unit 5 connects one terminal hcr, hpr of the reference circuit 8A to the internal terminals hci, hpi, and The other terminals lcr and lpr of the reference circuit 8A are connected to the internal terminals lci and lpi, and the impedance calculation unit 43A stores this in the storage unit 46 as the phase angle value ( ⁇ r2) of the impedance of the reference circuit 8A under the second condition. .
  • the correction coefficient updating unit 42A updates the value ( ⁇ r1) of the impedance phase angle of the reference circuit 8A under the first condition, which is stored in the storage unit 46A, and the value ( ⁇ r1) of the impedance phase angle of the reference circuit 8A under the second condition.
  • the second correction coefficient ⁇ fix ( ⁇ r1 ⁇ r2) may be updated based on the value ( ⁇ r2).
  • the predetermined instruction may be an instruction to measure the DUT 200, an instruction to update a correction coefficient, or an instruction to measure the impedance of the reference circuit 8A. According to this, the second correction coefficient ⁇ fix can be updated at a timing desired by the user, so that it is possible to realize a measuring device that is easy to use for the user.
  • FIG. 9 is a diagram showing the configuration of a measuring device 100B according to the third embodiment.
  • a measuring device 100B according to Embodiment 3 shown in FIG. 9 differs from measuring devices 100 and 100A according to Embodiments 1 and 2 in that impedance measurement can be corrected according to the measurement range. In this respect, it is the same as the measuring devices 100 and 100A according to the first and second embodiments.
  • a measuring device such as the above-mentioned LCR meter has a plurality of measurement ranges. For example, when measuring a resistor with a resistance value of several m ⁇ , the user can select a measurement range that corresponds to “m ⁇ ” and measure the resistance value in that measurement range. becomes possible.
  • the embodiments are implemented using a resistor with a resistance value in "m ⁇ " units as a reference circuit. It is preferable to correct the measurement error using a method similar to 1 and 2. However, it is not easy to obtain a "m ⁇ " resistor with sufficiently excellent temperature characteristics and long-term stability as a reference circuit. Even if such a resistor were available, it would increase component cost. Therefore, the reference circuit 8B according to the third embodiment can achieve a pseudo-desired resistance value without using a highly stable resistor having a low resistance value of several m ⁇ , and can achieve a low resistance measurement range. It is possible to correct measurement errors in
  • FIG. 10 is a diagram showing an example of the reference circuit 8B according to the third embodiment.
  • the reference circuit 8B includes a high-side input terminal hcr, a high-side output terminal hpr, a low-side input terminal lcr, a low-side output terminal lpr, a voltage dividing circuit 80, a selection circuit (MUX) 81, It has a buffer 82.
  • terminals hcr, hpr, lcr, and lpr are shown outside the dotted line indicating the reference circuit 8B.
  • the high side input terminal hcr can be connected to the internal terminal hci by a switch 51.
  • the high side output terminal hpr can be connected to the internal terminal hpi by a switch 52.
  • the low-side input terminal lcr can be connected to the internal terminal lci by a switch 53.
  • the low-side output terminal lpr can be connected to the internal terminal lpi by a switch 54.
  • the voltage dividing circuit 80 is a circuit that divides (attenuates) the voltage between the high side input terminal hcr and the low side input terminal lcr and outputs the divided voltage.
  • many measurement devices that measure the resistance value of a DUT using the four-terminal method such as an LCR meter, generate a voltage across the DUT by applying a constant current signal or voltage signal to the DUT, as described above.
  • the resistance value calculated based on Ohm's law becomes a value proportional to the detected voltage.
  • the reference circuit 8B is realized using a voltage dividing circuit 80 composed of a plurality of resistors, and the voltage generated in the reference circuit 8B is transferred to the voltage dividing circuit 80.
  • the voltage is divided by 80 and input to the voltage detection circuit 3.
  • the measuring device 100B calculates the resistance value
  • the reference circuit 8B behaves like a resistor having a predetermined resistance value.
  • the voltage dividing circuit 80 includes a first resistor Rm and a plurality of second resistors Ra1 to Ran (n is an integer of 2 or more) connected in parallel with the first resistor Rm. It has .
  • the first resistor Rm is connected between the high-side input terminal hcr and the low-side input terminal lcr. It is preferable that the first resistor Rm is a precision resistor having high accuracy and high reliability, similar to the reference resistor Rref according to the first and second embodiments.
  • the plurality of second resistors Ra1 to Ran are connected in series between the high side input terminal hcr and the low side input terminal lcr.
  • the number of second resistors Ra1 to Ran connected in series may be determined according to the number n of resistance measurement ranges of the measuring device 100A.
  • the following explanation assumes that the two are connected in series.
  • the second resistors Ra1 to Ran are, for example, so-called network resistors that include a plurality of resistors connected in series and are sealed in one package.
  • some of the second resistors Ra1 to Ran may be connected in parallel. That is, the network resistor may have a configuration in which not only a series circuit of resistors but also a resistor is connected in parallel to a series circuit.
  • the second resistors Ra1 to Ran may be collectively referred to as "network resistor Ratt.”
  • the second resistors Ra1 to Ran are highly accurate and highly reliable resistors like the first resistor Rm.
  • each of the second resistors Ra1 to Ran has the same degree of precision and reliability as the first resistor Rm, and at least the second resistors Ra1 to Ran are As long as it is highly accurate and reliable, it is sufficient.
  • the second resistors Ra1, Ra2, and Ra3 have a relative temperature coefficient of resistance value of ⁇ 5 ppm/°C or less between each resistor, and a relative long-term stability of the resistance value between each resistor.
  • it is a precision network resistor with a value of ⁇ 100 ppm/year or less.
  • the series resistance value of the network resistor Ratt that is, the series resistance value from the second resistor Ra1 to the second resistor Ran is sufficiently larger than the resistance value of the first resistor Rm (Rm ⁇ Ratt).
  • the series resistance value of the network resistor Ratt is 100 times or more the resistance value of the first resistor Rm.
  • the resistance value of the voltage divider circuit 80 that is, the resistance value of the first resistor Rm and the network resistor Ratt is The combined resistance value Rcomb is expressed by the following formula (8).
  • the resistance value Rref of the reference circuit 8B can be set to a desired value by adjusting the combined resistance value Rcomb and the voltage division coefficient Xatt.
  • the network resistor Ratt a precision network resistor with relatively high resistance value between each second resistor Ra1 to Ran and high reliability (high stability) is adopted. By doing so, the partial pressure coefficient Xatt also exhibits high precision and high reliability.
  • a reference resistor having a desired resistance value, high accuracy, and high reliability can be realized in a pseudo manner.
  • the first resistor Rm is set to 1 ⁇ .
  • the second resistor Ra1 is 9 k ⁇
  • the second resistor Ra2 is 900 ⁇
  • the second resistor Ra3 is 100 ⁇ .
  • the selection circuit 81 is a circuit that selects and outputs one voltage from among a plurality of input voltages.
  • the selection circuit 81 is, for example, a multiplexer.
  • the selection circuit 81 is configured by, for example, an IC including a plurality of transistors, a mechanical relay, or the like.
  • the selection circuit 81 selects the voltage between the high-side input terminal hcr and the low-side input terminal lcr (the voltage at the terminal Pa1) and the plurality of voltages divided by the voltage dividing circuit 80 (the voltages at the terminals Pa2 and Pa3). One of the input voltages is selected and output between the high-side output terminal hpr and the low-side output terminal lpr.
  • a selection signal Ss specifying the measurement range of the measurement device 100 is input to the selection circuit 81.
  • the selection circuit 81 selects and outputs a voltage corresponding to the measurement range designated by the selection signal Ss from among the plurality of input voltages.
  • the selection circuit 81 selects and outputs the voltage (equivalent to 1 ohm) at the terminal Pa1 of the network resistor Ratt.
  • the selection circuit 81 selects and outputs the voltage (equivalent to 100 m ⁇ ) at the terminal Pa2 of the network resistor Ratt.
  • the selection circuit 81 selects and outputs the voltage (equivalent to 10 m ⁇ ) at the terminal Pa3 of the network resistor Ratt.
  • the buffer 82 is a circuit that receives a signal with high input impedance and outputs a signal with low output impedance.
  • an operational amplifier can be used as the buffer 82.
  • the buffer 82 outputs the voltage output from the selection circuit 81 between the high-side output terminal hpr and the low-side output terminal lpr. As a result, the voltage output from the reference circuit 8B (voltage dividing circuit 80) is input to the voltage detection circuit 3.
  • the reference circuit 8B does not need to include the buffer 82. That is, the voltage output from the selection circuit 81 may be directly input between the high-side output terminal hpr and the low-side output terminal lpr (between the input terminals of the voltage detection circuit 3).
  • FIG. 11 is a diagram showing the configuration of the data processing control circuit 4B according to the third embodiment.
  • the data processing control circuit 4B calculates (updates) a correction coefficient and corrects impedance measurement results for each specified measurement range. It has the function to perform
  • the data processing control circuit 4B is, for example, a program processing device like the data processing control circuits 4 and 4A according to the first and second embodiments. As shown in FIG. 11, the data processing control circuit 4B includes, as functional blocks for realizing the above-mentioned functions, an instruction reception section 40B, a switch control section 41, a correction coefficient update section 42B, an impedance calculation section 43A, a correction It has a section 44B, a measurement result output section 45, and a storage section 46B. These functional blocks are realized, for example, in a program processing unit (MCU) as the data processing control circuit 4B, by a processor executing various arithmetic processes according to programs stored in a storage device and controlling peripheral circuits. Ru. Note that some or all of the above functional blocks may be realized by a dedicated logic circuit.
  • MCU program processing unit
  • the instruction receiving unit 40B receives a signal Sd from the operation unit 7 and transmits a signal instructing execution of processing according to the signal Sd to other functional units. Output for.
  • the instruction receiving unit 40 in response to the signal Sd output from the operation unit 7, Provides a selection signal Ss specifying a measurement range to the reference circuit 8B, and instructs the switch control unit 41, correction coefficient update unit 42B, impedance calculation unit 43B, etc. to execute processing for measuring the impedance of the DUT 200. do.
  • the instruction reception unit 40 provides the generation circuit 1 with a reference signal (for example, a sine wave signal) having a constant frequency and a constant amplitude as the signal Sb. generates an alternating current signal based on the reference signal.
  • the generation circuit 1 supplies an alternating current signal (constant current) having a frequency synchronized with a reference signal and a constant amplitude between internal terminals hci and lci.
  • the impedance calculation unit 43B is based on the voltage value detected by the voltage detection circuit 3 and the current value detected by the current detection circuit 2, similarly to the impedance calculation units 43 and 43A according to the first and second embodiments. Then, the value of the impedance between the internal terminal hpi and the internal terminal lpi is calculated.
  • the instruction receiving section 40B when measuring the impedance of the reference circuit 8B using the measurement range k (1 ⁇ k ⁇ n), the instruction receiving section 40B outputs the selection signal Ss specifying the measurement range k, and the reference circuit 8B A voltage corresponding to the measurement range k specified by the selection signal Ss is input to the voltage detection circuit 3.
  • the impedance calculation section 43B uses the same method as the impedance calculation sections 43 and 43A according to the first embodiment or the second embodiment, based on the current detected by the current detection circuit 2 and the voltage detected by the voltage detection circuit 3.
  • the impedance values (Rr1_k, ⁇ r1_k) of the reference circuit 8B are calculated and stored in the storage unit 46B as the reference measurement result 401_k (first condition) of the measurement range k.
  • the impedance calculation section 43B uses the same method as the impedance calculation sections 43 and 43A according to the first embodiment or the second embodiment.
  • the impedance value (Rr2_k, ⁇ r2_k) of the reference circuit 8B according to the measurement range k under the second condition is calculated and stored in the storage unit 46B as the reference measurement result 402_k (second condition) of the measurement range k.
  • the impedance calculation unit 43B measures the impedance of the reference circuit 8B for each measurement range 1 to n, and generates reference measurement results (first conditions) 401B_1 to 401B_n and reference measurement results (second conditions) 402B_1 to 402B_n. is stored in the storage unit 46B.
  • the correction coefficient update unit 42B calculates the first correction coefficient Gfix and the second correction coefficient ⁇ fix for each measurement range 1 to n using the same method as the correction coefficient update units 42 and 42 according to the first and second embodiments, It is stored in the storage unit 46 as correction coefficient information 403_1 to 403_n, and the values of correction coefficient information 403_1 to 403_n are updated.
  • the correction coefficient update unit 42B uses the reference measurement result 401B_k (Rr1_k, ⁇ r1_k) under the first condition in the measurement range k stored in the storage unit 46B.
  • the first correction coefficient Gfix_k and the second correction coefficient ⁇ fix_k are determined by the same method as in the first and second embodiments based on the difference from the reference measurement result 402B_k (Rr2_k, ⁇ r2_k) under the second condition in the measurement range k. It is calculated and stored in the storage unit 46B as correction coefficient information 403_k.
  • the correction unit 44B is a functional unit that corrects the impedance value calculated by the impedance calculation unit 43B using the correction coefficient information 403B_1 to 403B_n.
  • the correction unit 44B corrects the measured value (R, ⁇ ) of the impedance of the DUT 200 calculated by the impedance calculation unit 43B based on the correction coefficient information 403_1 to 403_n stored in the storage unit 46B, and the corrected DUT
  • the measurement result (second condition) is stored in the storage unit 46B as a measurement result (second condition) 405B.
  • correction unit 44B uses correction coefficient information 403_k (Gfix_k, ⁇ fix_k) corresponding to measurement range k to correct correction unit 44, 44A according to Embodiments 1 and 2.
  • the impedance measurement value (R_k, ⁇ _k) of the DUT 200 in the measurement range k is corrected using the same method as that of the DUT 200 impedance measurement value (Rf_k, ⁇ f_k) after the correction.
  • Condition) 405B is stored in the storage unit 46B.
  • the storage unit 46B stores calculation formulas, various parameters, measurement results, etc. necessary for measuring electrical characteristics of the DUT, calculating correction coefficients, etc. This is a functional unit that stores correction coefficients and the like.
  • the storage unit 46B stores reference measurement results (first conditions) 401B_1 to 401B_n and reference measurement results (second conditions) 402B_1 to 402B_n for each measurement range. Further, the storage unit 46B stores correction coefficient information 403B_1 to 403B_n including a first correction coefficient Gfix and a second correction coefficient ⁇ fix for each measurement range. Furthermore, the storage unit 46B stores the DUT measurement results (second condition) 404B including the impedance measurement values (R, ⁇ ) of the DUT 200 under the second condition, and the corrected impedance measurement values (Rf, ⁇ f) of the DUT 200. ) The corrected DUT measurement result (second condition) 405B is stored.
  • FIG. 12 is a flowchart showing the flow of impedance measurement by the measuring device 100B according to the third embodiment.
  • a reference measurement result 401B_k (Rr1_k, ⁇ r1_k) based on a predetermined measurement range k is stored in advance in the storage unit 46B of the data processing control circuit 4B under the first condition (for example, initial adjustment). Further, it is assumed that the DUT 200 is connected between external terminals HC and HP and external terminals LC and LP.
  • step S1 when the user operates the operation unit 7 to specify the measurement range k and instructs to measure the impedance of the DUT 200, first, as in step S1 according to the first embodiment described above, the data processing control circuit 4B controls the switch section 5 to connect the internal terminals hci, hpi, lci, and lpi to the reference circuit 8 (step S1B).
  • the data processing control circuit 4B controls the reference circuit 8B so that the voltage corresponding to the specified measurement range k is output from the reference circuit 8B (step S10B).
  • the instruction receiving unit 40 outputs a selection signal Ss instructing the measurement range k specified by the user
  • the data processing control circuit 4B measures the impedance (R, ⁇ ) of the reference circuit 8B (step S2B). Specifically, the instruction receiving section 40B instructs the generating circuit 1 to output voltage or current, and instructs the impedance calculating section 43B to measure impedance in the measurement range k. As a result, a voltage corresponding to the measurement range k is output from the reference circuit 8B and input to the voltage detection circuit 3.
  • the impedance calculation unit 43B calculates the resistance component Rr2_k and phase angle ⁇ r2_k of the reference circuit 8B based on the voltage signal output from the voltage detection circuit 3 and the current signal output from the current detection circuit 2 using the method described above. Then, it is stored in the storage unit 46B as a reference measurement result 402B_k (second condition) in the measurement range k.
  • the data processing control circuit 4B calculates correction coefficient information 403_k corresponding to measurement range k (step S3B).
  • the correction coefficient updating unit 42B uses the reference measurement result 401B_k (Rr1_k, ⁇ r1_k) of the measurement range k under the first condition, which is stored in the storage unit 46B, and the measurement under the second condition measured in step S2B.
  • the reference measurement result 402B_k (Rr2_k, ⁇ r2_k) of range k Based on the reference measurement result 402B_k (Rr2_k, ⁇ r2_k) of range k, the first correction coefficient Gfix_k and second correction coefficient ⁇ fix_k of measurement range k are calculated by the method described above, and stored in the storage unit 46B as correction coefficient information 403_k.
  • the correction coefficient update unit 42B stores the newly calculated first correction coefficient Gfix_k and second correction coefficient ⁇ fix_k in the storage unit 46B.
  • the first correction coefficient Gfix_k and the second correction coefficient ⁇ fix_k that have been set are rewritten.
  • the data processing control circuit 4B controls the switch section 5 to connect the internal terminals hci, hpi, lci, lpi to the external terminals HC, HP, LC, LP (step S4B).
  • the internal terminals hci, hpi, lci, and lpi are connected to the DUT 200.
  • the data processing control circuit 4B measures the phase value ⁇ of the DUT 200 in the measurement range k (step S5B). Specifically, similarly to step S2B, the instruction receiving unit 40B instructs the generating circuit 1 to output voltage or current, and instructs the impedance calculating unit 43A to measure impedance in the measurement range k. .
  • the impedance calculation unit 43B calculates the resistance component value R_k and the phase value ⁇ _k of the DUT 200 based on the voltage signal output from the voltage detection circuit 3 and the current signal output from the current detection circuit 2 using the method described above. It is calculated and stored in the storage unit 46B, for example, as a DUT measurement result 404B (second condition).
  • the correction unit 44B stores the calculated corrected resistance component value Rf_k and phase value ⁇ f_k in the storage unit 46B as a corrected DUT measurement result 405B_k.
  • the data processing control circuit 4B outputs the corrected DUT measurement result 405B_k (Rf_k, ⁇ f_k) to the output unit 6 as the measurement result of the phase angle of the impedance of the DUT 200 (step S7A).
  • the output unit 6 displays, for example, information on the impedance measurement result (resistance component value Rf_k, phase angle ⁇ f_k, etc.) of the DUT 200 in the measurement range k on the screen.
  • the reference circuit 8B includes the first resistor Rm and the plurality of second resistors Ra1 to Ran (network resistor Ratt) connected in parallel with the first resistor Rm. ), and a selection circuit 81 that selects and outputs one voltage from a plurality of voltages output from the voltage divider circuit 80.
  • the resistance value of the first resistor Rm and each resistance value (voltage division coefficient Xatt) of the plurality of second resistors Ra1 to Ran constituting the network resistor Ratt are appropriately set.
  • a reference circuit (resistance) having a desired resistance value can be virtually realized without using a highly stable resistor having a low resistance value of several m ⁇ .
  • the selection circuit 81 selects and outputs the voltage corresponding to the selection signal Ss that specifies the measurement range from among the plurality of voltages output from the voltage dividing circuit 80. It becomes possible to correct measurement errors using the correction coefficient, and it becomes possible to measure impedance with higher precision in each measurement range.
  • the measurement apparatuses 100 and 100A measure the impedance of the DUT 200 using the four-terminal method, but the present invention is not limited to this. Good too.
  • FIG. 13 is a diagram showing the configuration of a measuring device 100C capable of measuring impedance using a two-terminal method.
  • the measuring device 100C has, for example, an external terminal H as a first external terminal, an external terminal L as a second external terminal, an internal terminal hi as a first internal terminal, and a second internal terminal. It has an internal terminal li as a terminal.
  • the reference circuit 8C has, for example, a terminal hr as a high-side terminal and a terminal lr as a low-side terminal. Note that the reference circuit 8C may have the same internal configuration as the reference circuits 8 and 8A, for example.
  • the generating circuit 1 applies a voltage or current between the internal terminal hi and the internal terminal li.
  • Current detection circuit 2 detects a current flowing between internal terminal hi and internal terminal li.
  • the current detection circuit 2 is connected in series between the positive output terminal of the generating circuit 1 and the internal terminal hi, or between the negative output terminal of the generating circuit 1 and the internal terminal li.
  • FIG. 13 shows, as an example, a case where the current detection circuit 2 is connected in series between the negative output terminal of the generation circuit 1 and the internal terminal li.
  • the positive input terminal of the voltage detection circuit 3 is connected to the internal terminal hi, and the negative input terminal of the voltage detection circuit 3 is connected to the internal terminal li.
  • Voltage detection circuit 3 detects and outputs the voltage between internal terminals hi and li.
  • the switch section 5C switches the connection destination of the internal terminals hi, hi between the external terminal H and one terminal hr of the reference circuit 8C in accordance with the signal Sc from the data processing control circuit 4, and also switches the connection destination of the internal terminal li between the external terminal H and one terminal hr of the reference circuit 8C.
  • the connection destination is switched between the external terminal L and the other terminal lr of the reference circuit 8C.
  • Each of the switches 51C and 53C constituting the switch section 5C is configured, for example, by a double-throw switch element, similar to the switch 51 and the like described above.
  • the data processing control circuit 4, output section 6, and operation section 7 are the same as those in the first and second embodiments.
  • the user can measure the impedance of the reference circuit 8C with the measurement device 100C under various conditions and compare the measurement results. By doing so, it is possible to easily know the error in measurement by the measuring device 100C, and it is also possible to measure impedance with higher accuracy.
  • the data processing control circuit 4A corrects the measured value of impedance using the first correction coefficient Gfix and the second correction coefficient ⁇ fix, but the present invention is not limited to this.
  • the data processing control circuit 4A may only correct the measured value of the phase angle of impedance using the second correction coefficient ⁇ fix.
  • the data processing control circuit 4B according to the third embodiment may correct the measured value of impedance using only one of the first correction coefficient Gfix and the second correction coefficient ⁇ fix.
  • the measurement device 100B includes the reference circuit 8B, but the reference circuit 8B is not limited to this, and the reference circuit 8B may be implemented as a “standard resistor” separate from the measurement device 100B. good.
  • the reference circuit 8B as a standard resistor includes a high-side input terminal hcr, a high-side output terminal hpr, a low-side input terminal lcr, a low-side output terminal lpr, a voltage dividing circuit 80, and a selection circuit 81. It is one device.
  • the reference circuit 8B standard resistor
  • the present invention is not limited to this.
  • the arithmetic circuits 4, 4A, 4B may calculate the impedance using the method described above using current values stored in advance in the storage units 46, 46A, etc.
  • the above-mentioned flowchart shows an example for explaining the operation, and is not limited thereto. That is, the steps shown in each figure of the flowchart are specific examples, and the flowchart is not limited to this flow. For example, the order of some processes may be changed, other processes may be inserted between each process, or some processes may be performed in parallel.
  • the voltage dividing circuit 80 includes a first resistor Rm and a plurality of second resistors Ra1 to Ran (n is 2) connected in parallel with the first resistor Rm. (the above integer), but the present invention is not limited to this, and various circuit configurations that can realize the function as a voltage dividing circuit can be adopted.
  • FIG. 14 shows another example of the reference circuit.
  • the reference circuit 8B shown in FIG. 14 includes a first resistor Rm, a plurality of second resistors Ra0 to Ra3 connected in parallel with the first resistor Rm, and a third resistor Rc.
  • the first resistor Rm is 1 ⁇
  • the second resistor Ra0 is 2k ⁇
  • the second resistor Ra1 is 900 ⁇
  • the second resistor Ra2 is 900 ⁇
  • the second resistor Ra3 is 100 ⁇
  • the third resistor Rc is 100 ⁇ .
  • the third resistor Rc is connected in parallel with at least one resistor among the second resistors Ra0 to Ra3 connected in series.
  • the third resistor Rc is connected in parallel with at least two resistors connected in series among the second resistors Ra0 to Ra3.
  • one end of the third resistor Rc is connected to a node Nc to which the low-side input terminal lcr and the low-side output terminal lpr are commonly connected, and the other end of the third resistor Rc is It is connected to one of the connected nodes.
  • FIG. 14 shows a case where one end of the third resistor Rc is connected to the node Nc, and the other end of the third resistor Rc is connected to the terminal Pa2.
  • connection destination of the resistor Rc is not limited to the example shown in FIG. 14, and can be variously changed depending on the desired resistance value.
  • SYMBOLS 1... Generation circuit 2... Current detection circuit, 3... Voltage detection circuit, 4... Data processing control circuit, 5... Switch section, 6... Output section, 7... Operation section, 8, 8A, 8B... Reference circuit, 40, 40B...Instruction reception unit, 41...Switch control unit, 42, 42A, 42B...Correction coefficient update unit, 43, 43A, 43B...Impedance calculation unit, 44, 44A, 44B...Correction unit, 45...Measurement result output unit, 51 ⁇ 54... Switch, 80... Voltage divider circuit, 81... Selection circuit, 82... Buffer, 401, 401A, 401B_1 to 401B_n...

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  • General Physics & Mathematics (AREA)
  • Measurement Of Resistance Or Impedance (AREA)

Abstract

La présente invention permet d'identifier facilement une erreur de mesure par ce dispositif de mesure.　Un dispositif de mesure (100) est caractérisé en ce qu'il comprend : un circuit de commande de traitement de données (4) qui mesure l'impédance entre des premières bornes internes (hci, hpi) et des secondes bornes internes (lci, lpi) sur la base de la tension et du courant entre les premières bornes internes (hci, hpi) et les secondes bornes internes (lci, lpi) lors de l'application de la tension ou du courant entre les premières bornes internes (hci, hpi) et les secondes bornes internes (lci, lpi) ; un circuit de référence (8) qui a une impédance prescrite ; et un commutateur (5) qui commute la destination de connexion des premières bornes internes (hci, hpi) entre des premières bornes externes (HC, HP) et une borne du circuit de référence (8), et commute la destination de connexion des secondes bornes internes (lci, lpi) entre des secondes bornes externes (LC, LP) et l'autre borne du circuit de référence (8).
PCT/JP2023/023200 2022-06-24 2023-06-22 Dispositif de mesure et résistance standard WO2023249094A1 (fr)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008157911A (ja) * 2006-11-28 2008-07-10 Hioki Ee Corp インピーダンス測定装置
JP2012173182A (ja) * 2011-02-23 2012-09-10 Hioki Ee Corp 検査装置および検査方法
WO2017061036A1 (fr) * 2015-10-09 2017-04-13 日産自動車株式会社 Dispositif de mesure d'impédance et procédé de traitement associé
JP2019060767A (ja) * 2017-09-27 2019-04-18 日本電産リード株式会社 抵抗測定装置の校正方法、抵抗測定装置、基板検査装置、及び基準抵抗器

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008157911A (ja) * 2006-11-28 2008-07-10 Hioki Ee Corp インピーダンス測定装置
JP2012173182A (ja) * 2011-02-23 2012-09-10 Hioki Ee Corp 検査装置および検査方法
WO2017061036A1 (fr) * 2015-10-09 2017-04-13 日産自動車株式会社 Dispositif de mesure d'impédance et procédé de traitement associé
JP2019060767A (ja) * 2017-09-27 2019-04-18 日本電産リード株式会社 抵抗測定装置の校正方法、抵抗測定装置、基板検査装置、及び基準抵抗器

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