WO2023221366A1 - Dispositif de chemise refroidie à l'eau et four à monocristaux - Google Patents

Dispositif de chemise refroidie à l'eau et four à monocristaux Download PDF

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Publication number
WO2023221366A1
WO2023221366A1 PCT/CN2022/122978 CN2022122978W WO2023221366A1 WO 2023221366 A1 WO2023221366 A1 WO 2023221366A1 CN 2022122978 W CN2022122978 W CN 2022122978W WO 2023221366 A1 WO2023221366 A1 WO 2023221366A1
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WO
WIPO (PCT)
Prior art keywords
cooling jacket
water
lifting
outer cylinder
lifting rod
Prior art date
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PCT/CN2022/122978
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English (en)
Chinese (zh)
Inventor
杨文武
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西安奕斯伟材料科技有限公司
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Publication of WO2023221366A1 publication Critical patent/WO2023221366A1/fr

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    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B27/00—Single-crystal growth under a protective fluid
    • C30B27/02—Single-crystal growth under a protective fluid by pulling from a melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00—Energy generation of nuclear origin
    • Y02E30/30—Nuclear fission reactors

Definitions

  • the present application relates to the technical field of manufacturing single crystal silicon products, and in particular to a water cooling jacket device and a single crystal furnace.
  • the crystal pulling process has a great impact on the core quality of the wafers, such as oxygen content, bulk defects (Bulk Micro Defects (BMD), stacking faults, crystal origin particles (COPs), flow pattern defects (FPD), laser scattering tomography defects (LSTDs) and other qualities are all related to The crystal pulling process is closely related.
  • BMD Bulk Micro Defects
  • COPs crystal origin particles
  • FPD flow pattern defects
  • LSTDs laser scattering tomography defects
  • the thermal history experienced during the growth process of the crystal rod greatly affects the overall quality of the crystal rod, and the thermal history is mainly affected by the longitudinal and axial temperature gradient of the crystal rod.
  • the structural components of the crystal pulling furnace have a great influence on the temperature gradient. Large, a very important component of this is the water-cooling jacket, which greatly changes the longitudinal and transverse temperature gradients of the crystal rod, increases the cooling rate of the crystal rod, and thereby affects the drawing rate of the crystal rod.
  • the water-cooling jacket is cylindrical, which greatly limits its axial and longitudinal temperature adjustment of the crystal ingot.
  • the crystal defects of the crystal ingot cannot be well controlled.
  • the limited adjustment ability causes the heat in the center of the crystal ingot to not be very high. Not properly conducted, resulting in excessive accumulation of internal stress, which in turn leads to misalignment, which greatly affects the quality of the ingot.
  • stacking faults will cause uneven deposition during the epitaxial deposition process, and even cause Causes deposition failure.
  • this application provides a water-cooling jacket device and a single crystal furnace to solve the problem of limited temperature adjustment in the axial and longitudinal directions of the crystal ingot.
  • a water-cooling jacket device including a water-cooling jacket body and a lifting structure for controlling the lifting and lowering of the water-cooling jacket body;
  • the water cooling jacket body includes an inner cylinder and an outer cylinder located outside the inner cylinder;
  • the lifting structure includes two lifting parts arranged oppositely on both sides of the water-cooling jacket body.
  • Each lifting part includes a driving part and a transmission part.
  • the transmission part is connected to the outer cylinder through a connecting structure, so that The two lifting parts can move asynchronously to drive the water cooling jacket body to tilt at a preset angle.
  • the transmission component includes:
  • a lifting rod extends along the axial direction of the outer cylinder, and a rack structure is provided on the outer surface of the lifting rod;
  • a transmission gear which is drivingly connected to the lifting rod by meshing with the rack structure.
  • the outer surface of one of the two lifting rods has a first area disposed away from the other lifting rod, and the first area is concave to form a connecting surface, and the The rack structure is provided on the connecting surface.
  • the rack structure includes a plurality of parallel racks protruding from the connecting surface.
  • the plurality of racks are arranged side by side along the axial direction of the outer cylinder, and two adjacent racks are arranged side by side.
  • a tooth groove is formed between the racks.
  • a limiting platform is provided at one end of the lifting rod away from the outer cylinder.
  • the length of the first region is less than the length of the lifting rod, and the first region is located at an end of the lifting rod away from the outer cylinder.
  • the length of the first region is greater than half the length of the lifting rod in the axial direction of the outer cylinder.
  • connection structure includes a snap ring that is sleeved on the outside of the outer cylinder, and two protrusions are formed on opposite sides of the snap ring, and each protrusion is provided with a corresponding The connecting through hole for connecting the lifting rod.
  • a first flange is provided on the top of the outer cylinder, and the snap ring is provided on a side of the first flange close to the bottom of the outer cylinder.
  • An embodiment of the present application also provides a single crystal furnace, including the above-mentioned water cooling jacket device.
  • the beneficial effects of this application are: through the arrangement of the lifting structure, the lifting of the water-cooling jacket body is controlled, and the two lifting parts are independently driven, so that the two lifting parts can move asynchronously, so that the water-cooling jacket
  • the body can be tilted within a preset angle range to form an asymmetric water cooling effect, thereby achieving gradient temperature gradient changes in the radial and axial directions, greatly improving the axial and radial heat dissipation of the crystal ingot, reducing internal heat accumulation, and changing
  • the thermal history of the crystal ingot reduces the occurrence of misalignment and other crystal defects and improves the quality of the crystal ingot.
  • Figure 1 shows a schematic structural diagram of the water cooling jacket device in the embodiment of the present application
  • Figure 2 shows a schematic structural diagram of the lifting rod in the embodiment of the present application
  • Figure 3 shows the second structural schematic diagram of the lifting rod in the embodiment of the present application
  • Figure 4 shows a schematic structural diagram of the connection part in the embodiment of the present application.
  • Figure 5 shows a schematic structural diagram of the inner cylinder in the embodiment of the present application.
  • Figure 6 shows a schematic structural diagram of the outer cylinder in the embodiment of the present application.
  • Figure 7 shows a schematic structural diagram of the adjusting sleeve in the embodiment of the present application.
  • this embodiment provides a water-cooling jacket device, including a water-cooling jacket body and a lifting structure for controlling the lifting and lowering of the water-cooling jacket body;
  • the water-cooling jacket body includes an inner cylinder 2 and an outer cylinder 1 located outside the inner cylinder 2;
  • the lifting structure includes two lifting parts 4 arranged oppositely on both sides of the water-cooling jacket body.
  • Each lifting part 4 includes a driving part and a transmission part.
  • the transmission part is connected to the outer cylinder through a connecting structure 5. 1 connection, so that the two lifting parts 4 can move asynchronously to drive the water cooling jacket body to tilt at a preset angle.
  • the lifting of the water-cooling jacket body is controlled, and the two lifting parts 4 are driven independently, so that the two lifting parts 4 can move asynchronously, so that the water-cooling jacket body can move in the preset position. Inclination within the angle range creates an asymmetric water cooling effect. Large gradient changes can accelerate the transfer of heat from the crystal ingot to the water cooling jacket, improve heat transfer efficiency, and accelerate axial and radial heat dissipation of the crystal ingot. And according to the needs of the drawing process, the longitudinal and radial temperature gradients of the crystal rod can be adjusted to a large extent, the reaction rate of defects in the crystal rod can be controlled, and the defect distribution can be adjusted. It has a good cooling rate and can draw different defect types. Crystal rods (such as stacking fault-free crystal rods, BMD crystal rods).
  • Crystal ingots with different process parameter requirements need to be matched with different water cooling effects.
  • the asynchronously moving water cooling jacket device can be adjusted accordingly to obtain appropriate cooling effects according to needs.
  • the purpose of the asynchronous movement is to create a radial asymmetry effect and improve the water cooling effect.
  • the role of the lifting mechanism when drawing the epitaxial crystal rod, a large drawing speed is required, and the water cooling jacket moves toward the liquid surface to increase the cooling effect. This will increase the drawing speed; when drawing defect-free polished crystal ingots, the water-cooling jacket can be moved upward to inhibit the formation of COP; when drawing BMD crystal ingots, it will promote the nucleation and growth of BMD, and the water-cooling jacket can Through movement adjustment, BMD nucleates at a low temperature of 650°C-700°C. At the same time, for high temperature areas, through asynchronous movement adjustment, the ingot range is expanded within the temperature range of 750°C-1100°C. This is used to promote the high-temperature nucleation of BMD.
  • the cooperation of the two opposite lifting parts 4 can make the water cooling jacket body tilt and rise, that is, the two lifting parts 4 move asynchronously to tilt preset After adjusting the angle, the two lifting parts 4 are controlled to move synchronously to control the water-cooling jacket body to perform lifting movement in an inclined state.
  • the number of the lifting parts 4 included in the lifting structure is not limited. Two lifting parts 4 are provided on opposite sides of the water-cooling jacket body. The two opposite lifting parts 4 are One group, the lifting structure may include multiple groups of the lifting parts 4, each group of the lifting parts 4 can realize the inclination of the water cooling jacket body in one direction, so that multiple groups of the lifting parts 4 can be provided according to actual needs.
  • the lifting part 4 can flexibly control the tilt direction of the water cooling jacket body, so that the water cooling effect can be better controlled.
  • the tilt angle can be set according to actual needs, for example, it can be 0 degrees to 17 degrees, but it does not range from 0 to 17 degrees. This is the limit.
  • the transmission parts include:
  • the lifting rod 41 extends along the axial direction of the outer cylinder 1, and a rack 411 structure is provided on the outer surface of the lifting rod 41;
  • the transmission gear 42 is transmission connected to the lifting rod 41 by meshing with the rack 411 structure.
  • the transmission gear 42 and the lifting rod 41 are matched.
  • the transmission gear 42 rotates, and under the driving action of the lifting rod 41, the water cooling jacket body is raised and lowered.
  • each lifting part 4 may be a driving motor.
  • the outer surface of one of the lifting rods 41 has a first area located away from the other lifting rod 41.
  • the first area is concave to form a connecting surface, and the connecting surface is provided with the Rack 411 structure.
  • the connecting surface is a plane parallel to the axial direction of the outer cylinder 1 , and the rack 411 structure is provided on the connecting surface, which facilitates the cooperation between the rack 411 structure and the transmission gear 42 .
  • the rack 411 structure includes a plurality of parallel racks 411 protruding from the connection surface, and the plurality of racks 411 are arranged side by side along the axial direction of the outer cylinder 1.
  • a tooth gap is formed between two adjacent racks 411 .
  • the extension direction of the rack 411 is perpendicular to the axial direction of the outer cylinder 1 , the axial direction of the transmission gear 42 is parallel to the extension direction of the rack 411 , and the teeth of the transmission gear 42 correspond to in the tooth slot, so that the transmission gear 42 rotates, driving the lifting rod 41 to perform lifting movement, thereby driving the water cooling jacket body to perform lifting movement.
  • the rack 411 is a threaded rack, and the threaded rack has the characteristics of high precision and large load.
  • a limiting platform 43 is provided at one end of the lifting rod 41 away from the outer cylinder 1 .
  • the setting of the limiting platform 43 prevents the transmission gear 42 from being separated from the lifting rod 41.
  • the limiting platform 43 can be a circular structure, and the limiting platform 43 is located on the diameter of the lifting rod 41. The area in the direction is larger than the cross-sectional area of the end surface of the lifting rod 41 .
  • the limiting platform 43 may be an integral structure with the lifting rod 41, may be connected through welding or other processes, or may be formed simultaneously when the connection surface is formed, and the first area may be located on the In the middle of the lifting rod 41, a groove is formed in the first area, and the bottom surface of the groove is the connecting surface, so that in the axial direction of the lifting rod 41, the groove is farther away from the
  • the first side wall of one end of the outer cylinder 1 forms the limiting platform 43
  • the second side wall of the groove opposite to the first side wall forms a limit for limiting the movement stroke of the transmission gear 42 . retaining wall.
  • the length of the first region is less than the length of the lifting rod 41 , and the first region is located away from the lifting rod 41 and away from the outer cylinder 1 one end.
  • the length of the first region is greater than half of the length of the lifting rod 41 .
  • connection structure 5 includes a snap ring 51 that is sleeved on the outside of the outer cylinder 1 .
  • Two protrusions 52 are formed on opposite sides of the snap ring 51 , and each of the protrusions 52 There is a connection through hole 521 for connecting with the corresponding lifting rod 41.
  • a connecting ring 44 is provided at one end of the lifting rod 41 close to the outer tube 1.
  • the connecting ring 44 is threadedly connected to the lifting rod 41.
  • the lifting rod 41 and the protrusion 52 are connected by a thread.
  • the gap is loosely matched, which facilitates the tilting of the water-cooling jacket when the two lifting rods 41 move asynchronously.
  • a first flange 11 is provided on the top of the outer cylinder 1
  • the snap ring 51 is provided on a side of the first flange 11 close to the bottom of the outer cylinder 1 .
  • the snap ring 51 can be bonded to the first flange 11 through an adhesive layer to enhance the connection strength between the connection structure 5 and the outer cylinder 1 .
  • the inner cylinder 2 has an inverted conical structure.
  • this embodiment adopts a double-layer structure of an inner cylinder and an outer cylinder.
  • the outer cylinder adopts a straight-cylinder structure.
  • the outer cylinder plays a role in blocking heat.
  • the inner cylinder The barrel adopts an inverted conical structure, which can form a longitudinal gradient water cooling effect, because the temperature in the longitudinal direction of the crystal rod (that is, the axial direction of the crystal rod) changes in a gradient (the lower end is hot and the upper end is cold, the end close to the silicon melt is the lower end, and the end far away from the silicon One end of the melt is the upper end).
  • the heat of the crystal rod is mainly transmitted to the surrounding low-temperature objects by radiation.
  • the intensity of radiation heat transfer is inversely proportional to the cube of the distance. That is, the closer the distance, the stronger the radiation heat transfer.
  • the inner cylinder is inverted cone shape, along the longitudinal direction, the distance between the inner wall of the inner cylinder and the crystal rod in the radial direction of the crystal rod changes in a gradient, which can achieve the effect of gradient water cooling.
  • the longitudinal asymmetric effect thereby achieving gradient temperature gradient changes in the radial and axial directions, greatly improving the axial and radial heat dissipation of the crystal rod, reducing internal heat accumulation, changing the thermal history of the crystal rod, reducing misalignment and other
  • the generation of crystal defects improves the quality of crystal ingots.
  • the inclination angle of the inner wall of the inner cylinder can be adjusted to greatly adjust the longitudinal (ie axial) and radial temperature gradient of the crystal rod, control the reaction rate of defects in the crystal rod, and adjust the defects distributed.
  • the two lifting parts 4 are driven independently, so that the two lifting parts 4 can move asynchronously, so that the water cooling jacket body can tilt within a preset angle range to form asymmetry in the radial direction.
  • the inner cylinder adopts the longitudinal (i.e. axial) asymmetry effect formed by the inverted cone structure, so that the two can cooperate to achieve double asymmetry in the radial and axial directions of the crystal rod, thereby improving the axial and axial asymmetry of the crystal rod. Radial heat dissipation efficiency.
  • the inner diameter of the top of the inner cylinder is 450 mm, and the inner diameter of the bottom of the inner cylinder is 390 mm, but this is not a limitation.
  • the top of the inner cylinder is provided with a second flange 22, the top of the outer cylinder is provided with a first flange 11, and the first flange 11 is provided with a stepped groove 13 on one side close to the inner cylinder. , the second flange 22 overlaps in the stepped groove 13 .
  • the first surface of the second flange 22 away from the bottom of the inner cylinder and the second surface of the first flange 11 away from the bottom of the inner cylinder are located on the same plane.
  • the bottom of the inner cylinder has a first through hole
  • the bottom of the outer cylinder has a second through hole 12.
  • the orthogonal projection of the center of the first through hole on the bottom of the outer cylinder 1 is the same as the second through hole.
  • the center points of the through holes 12 coincide with each other.
  • annular protrusion 14 protrudes from the edge of the second through hole 12 toward the top of the outer cylinder 1 .
  • the annular protrusion 14 functions as a retaining wall for blocking the inner cylinder 2 . Limit the position.
  • a toothed corrugated structure 21 is provided on the inner wall of the inner cylinder 2 .
  • the arrangement of the toothed corrugated structure 21 can increase the surface area of the inner wall of the inner cylinder, that is, increase the heat absorption area of the water cooling jacket. Compared with a smooth surface, such a surface has a better heat absorption effect and has a good cooling effect of the crystal ingot. .
  • the toothed corrugated structure 21 includes a plurality of annular teeth extending along the circumferential direction of the inner cylinder 2.
  • the plurality of annular teeth are arranged along the axial direction of the inner cylinder 2.
  • the cross-sectional shape of a single annular tooth can be Triangle, trapezoid, arc, etc.
  • the thickness of the toothed corrugated structure 21 in the radial direction of the inner cylinder 2 gradually increases.
  • the inner side wall of the inner cylinder 2 is provided with a heat-absorbing coating.
  • the heat-absorbing coating is disposed on the side of the toothed corrugated structure 21 away from the outer cylinder 1 , and the shape of the heat-absorbing coating matches the shape of the toothed corrugated structure 21 , that is, the heat-absorbing coating
  • the connection surface between the coating and the inner cylinder 2 and the inner surface opposite to the connection surface are both toothed corrugated structures 21 .
  • the heat-absorbing coating has a heat-absorbing effect, and the bonding strength between the heat-absorbing coating and the inner cylinder 2 is high, which can effectively alleviate the interface between the heat-absorbing coating and the inner cylinder 2.
  • the thermal stress of the connecting surface) and the thermodynamic properties are stable.
  • the inner cylinder 2 can take away the heat transmitted by the crystal rod in real time, greatly improve the cooling rate of the crystal rod, increase the pulling speed, and increase the crystal pulling efficiency.
  • the outer wall of the inner cylinder 2 is provided with a heat-insulating coating, and the heat-absorbing coating is formed on the inner cylinder in the direction from the top of the inner cylinder 2 to the bottom of the inner cylinder 2 2
  • the thickness in the radial direction gradually increases.
  • the heat-absorbing coating is made of ceramic, but is not limited thereto.
  • the thickness of the heat-absorbing coating is 200 ⁇ 50 microns.
  • the outer side wall of the inner cylinder 2 and/or the inner side wall of the outer cylinder 1 is provided with a heat-insulating coating.
  • the heat-insulating coating has the function of reflecting and shielding heat, preventing external heat from being transmitted from the outer cylinder 1 to the inside of the water-cooling jacket (ie, the inside of the inner cylinder 2), and maintaining a constant temperature inside the water-cooling jacket.
  • the thickness of the heat-insulating coating in the radial direction of the inner cylinder 2 gradually increases from the top of the inner cylinder 2 to the bottom of the inner cylinder 2 .
  • the heat-insulating coating is made of high-temperature-resistant and heat-insulating zirconia ceramics.
  • the thickness of the thermal insulation coating is 100 ⁇ 25 microns, but is not limited thereto.
  • the water-cooling pipes 3 are spirally distributed around the outer wall of the inner cylinder 2 .
  • the water-cooling pipe 3 can be provided on the outer side wall of the inner cylinder 2 or on the inner side wall of the outer cylinder 1 .
  • the specific structural form of the water-cooling pipe 3 is not limited to this.
  • the water-cooling pipe 3 can be in a serpentine shape and is distributed on the outer wall of the inner cylinder 2.
  • the water-cooling pipe 3 can be in a serpentine shape, including along all directions.
  • the inner cylinder 2 has a plurality of axially extending linear pipes and a bent pipe arranged between two adjacent linear pipes.
  • the diameter of the water-cooling pipe 3 gradually increases in the direction from the top of the inner cylinder 2 to the bottom of the inner cylinder 2 .
  • the water cooling effect of the water cooling pipe 3 changes in a gradient along the axial direction of the inner cylinder 2, which is conducive to the adjustment of the radial and axial gradient temperatures.
  • the diameter of the water-cooling pipe is 5mm-10mm, but it is not limited to this.
  • the circumferential spacing of the water-cooling pipes in the direction from the top of the inner cylinder 2 to the bottom of the inner cylinder 2 is 48 mm.
  • the bottom of the water-cooling jacket body is provided with an adjustment sleeve 6 that communicates with the inside of the water-cooling jacket body.
  • the adjustment sleeve 6 includes a first element connected to the water-cooling jacket body. end, and a second end opposite to the first end. From the first end to the second end, the cross-sectional area of the adjustment sleeve 6 in the radial direction of the water-cooling jacket body gradually decreases. Small.
  • the heat underneath the water-cooling jacket body is blocked from being transmitted to the internal space of the water-cooling jacket, effectively blocking the bottom-up dissipation of heat.
  • the cross-sectional area of the adjusting sleeve 6 gradually decreases in the radial direction of the water-cooling jacket body.
  • the inner surface of the adjustment sleeve 6 is a curved surface.
  • the shape of the cross section of the adjustment sleeve 6 in the axial direction of the water cooling jacket body is a parabolic shape.
  • the adjustment sleeve 6 in the axial direction of the water-cooling jacket body, includes a first part close to the water-cooling jacket body and a second part adjacent to the first part, and the second part The outer surface is concave to form a recess 61.
  • the water-cooling jacket is located above the crucible, and the concave portion 61 is provided to directionally reflect the heat below to the graphite component or silicon melt liquid surface below the water-cooling jacket, thereby maintaining the stability of the temperature field below.
  • the inner surface of the adjustment sleeve 6 is provided with a heat absorption layer.
  • the heat-absorbing layer has a heat-absorbing effect, and the bonding strength between the heat-absorbing layer and the adjusting sleeve 6 is high, which can effectively alleviate the heat-absorbing layer interface (the connection surface between the heat-absorbing layer and the adjusting sleeve 6 ) thermal stress and stable thermodynamic properties.
  • the adjusting sleeve 6 can take away the heat transmitted by the crystal rod in real time, greatly improve the cooling rate of the crystal rod, increase the pulling speed, and increase the crystal pulling efficiency.
  • the heat-absorbing layer includes a first layer close to the adjustment sleeve 6 and a second layer far away from the adjustment sleeve.
  • the first layer is made of graphite and the inner wall of the adjustment sleeve 6 A transition layer formed by a chemical reaction.
  • the adjusting sleeve is made of carbon fiber composite material, the first layer is a -C+SiC composite transition coating (thickness is 80 ⁇ 10 microns), and the second layer is a -SiC coating (the thickness is 50 ⁇ 10 microns) 5 microns).
  • a coating structure (the combination of the above-mentioned heat absorption layer and the adjustment sleeve) has the characteristics of high bonding strength and high density. It can protect the substrate very well and extend its service life.
  • the thickness of the heat absorption layer is 130 ⁇ 15 microns.
  • the outer surface of the adjustment sleeve 6 is provided with a heat insulation layer.
  • the heat insulation layer has the function of reflecting and shielding heat, preventing external heat from being transmitted from the adjusting sleeve 6 to the inside of the water-cooling jacket, and maintaining a constant temperature inside the water-cooling jacket.
  • the heat insulation layer includes a third layer close to the adjustment sleeve 6 and a fourth layer far away from the adjustment sleeve.
  • the third layer is made of graphite and is in contact with the outer wall of the adjustment sleeve.
  • the adjusting sleeve is made of carbon fiber composite material, the third layer is a C+SiC composite transition coating (thickness is 80 ⁇ 10 microns), and the fourth layer is a SiC coating (the thickness is 50 ⁇ 10 microns). 5 microns).
  • Such a coating structure (the combination of the above-mentioned heat insulation layer and the adjustment sleeve) has the characteristics of high bonding strength and high density. It can protect the substrate very well and extend its service life.
  • the thickness of the thermal insulation layer is 160 ⁇ 15 microns.
  • the water-cooling jacket body includes an inner cylinder 2 and an outer cylinder 1 located outside the inner cylinder 2.
  • the bottom of the outer cylinder 1 includes a first area for carrying the inner cylinder and a first area connected to the inner cylinder.
  • the first area is adjacent to the second area.
  • the first area is located close to the side wall of the outer cylinder 1.
  • a flange (third flange 62) is provided on the top of the adjustment sleeve 6. The flange Connected to the second zone.
  • An embodiment of the present application also provides a single crystal furnace, including a furnace body, a crucible located in the furnace body, and the water-cooling jacket body is fixed above the crucible due to the lifting function of the lifting structure.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

L'invention concerne un dispositif de chemise refroidie à l'eau, comprenant un corps de chemise refroidie à l'eau et une structure de levage/abaissement utilisée pour commander le levage/abaissement du corps de chemise refroidie à l'eau ; le corps de chemise refroidie à l'eau comprend un cylindre interne et un cylindre externe situé à l'extérieur du cylindre interne ; la structure de levage/abaissement comprend deux parties de levage/abaissement disposées en regard sur deux côtés du corps de chemise refroidie à l'eau ; chaque partie de levage/abaissement comprend une partie d'entraînement et une partie de transmission, et la partie de transmission est reliée au cylindre externe au moyen d'une structure de liaison, de sorte que les deux parties de levage/abaissement peuvent se déplacer de manière asynchrone pour amener le corps de chemise refroidie à l'eau à s'incliner selon un angle prédéfini.
PCT/CN2022/122978 2022-05-18 2022-09-30 Dispositif de chemise refroidie à l'eau et four à monocristaux WO2023221366A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN202210544309.1 2022-05-18
CN202210544309.1A CN114892268A (zh) 2022-05-18 2022-05-18 水冷套装置和单晶炉

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WO2023221366A1 true WO2023221366A1 (fr) 2023-11-23

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CN (1) CN114892268A (fr)
TW (1) TWI827250B (fr)
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CN117646273A (zh) * 2024-01-29 2024-03-05 中国科学院沈阳科学仪器股份有限公司 一种应用于超高真空环境一体式水冷套

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114892268A (zh) * 2022-05-18 2022-08-12 西安奕斯伟材料科技有限公司 水冷套装置和单晶炉
CN114790575A (zh) * 2022-05-18 2022-07-26 西安奕斯伟材料科技有限公司 水冷套和单晶炉
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