WO2023218983A1 - 赤外線ガス分析計及び赤外線ガス分析方法 - Google Patents

赤外線ガス分析計及び赤外線ガス分析方法 Download PDF

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Publication number
WO2023218983A1
WO2023218983A1 PCT/JP2023/016587 JP2023016587W WO2023218983A1 WO 2023218983 A1 WO2023218983 A1 WO 2023218983A1 JP 2023016587 W JP2023016587 W JP 2023016587W WO 2023218983 A1 WO2023218983 A1 WO 2023218983A1
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Prior art keywords
infrared
gas
detector
component
measurement
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English (en)
French (fr)
Japanese (ja)
Inventor
誠司 阪倉
裕貴 今村
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Horiba Ltd
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Horiba Ltd
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Priority to US18/863,980 priority Critical patent/US20250321184A1/en
Priority to EP23803462.3A priority patent/EP4524549A1/en
Priority to JP2024520391A priority patent/JPWO2023218983A1/ja
Publication of WO2023218983A1 publication Critical patent/WO2023218983A1/ja
Anticipated expiration legal-status Critical
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G01N21/3518—Devices using gas filter correlation techniques; Devices using gas pressure modulation techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G01N21/3518—Devices using gas filter correlation techniques; Devices using gas pressure modulation techniques
    • G01N2021/3527—Devices using gas filter correlation techniques; Devices using gas pressure modulation techniques and using one filter cell as attenuator
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G01N2021/3545—Disposition for compensating effect of interfering gases

Definitions

  • the present invention relates to an infrared gas analyzer and an infrared gas analysis method.
  • N 2 O nitrous oxide
  • NDIR analyzer non-dispersive infrared absorption type device
  • the infrared absorption wavelength range is equal to the infrared absorption wavelength range of N 2 O, as shown in Figure 2.
  • the infrared absorption wavelength range of carbon oxide (CO) overlaps, and CO becomes an interference component with respect to N 2 O. For this reason, attempts have been made to reduce the interference effect of CO by oxidizing CO in the sample gas to carbon dioxide (CO 2 ) using an oxidation catalyst.
  • the oxidation catalyst that oxidizes CO to CO 2 is a consumable item and requires regular maintenance such as replacement, resulting in high running costs.
  • the present invention has been made to solve the above-mentioned problems, and its main objective is to reduce running costs by eliminating the need for a catalyst, which is a consumable item.
  • the infrared gas analyzer includes a measurement cell into which a sample gas is introduced, an infrared light source that irradiates the measurement cell with infrared rays, and an infrared detector that detects the infrared rays transmitted through the measurement cell. It is characterized by comprising a gas filter in which a plurality of interfering components that interfere with the measured components in the sample gas are sealed.
  • an infrared gas analyzer since it has a gas filter in which multiple interfering components that interfere with the measured components in the sample gas are sealed, there is no need for a catalyst that oxidizes or reduces at least one of the multiple interfering components. As a result, running costs can be reduced. Furthermore, since the gas filter includes a plurality of interference components, it is possible to reduce the interference influence of the plurality of interference components on the measurement component.
  • the gas filter is filled with a plurality of interfering components that do not react with each other or a plurality of interfering components that are stable in equilibrium with each other.
  • the component to be measured by the infrared gas analyzer of the present invention is preferably dinitrogen monoxide (N 2 O), which is a type of greenhouse gas that causes global warming.
  • N 2 O dinitrogen monoxide
  • the infrared gas analyzer of the present invention can be suitably used in industrial fields where reduction of environmental burden is required.
  • the infrared absorption wavelength range of N 2 O which is a component to be measured, overlaps the infrared absorption wavelength range of carbon dioxide (CO 2 ) and the infrared absorption wavelength range of carbon monoxide (CO). Therefore, CO 2 and CO become interference components with respect to N 2 O. In order to eliminate the interference effects caused by these interference components, it is desirable that the gas filter is filled with CO 2 gas and CO gas.
  • the gas filter further contains CH 4 gas in addition to CO 2 gas and CO gas.
  • a measurement cell into which a sample gas has been introduced is irradiated with infrared rays, and an infrared detector is used to detect the infrared rays that have passed through the measurement cell, thereby detecting the components to be measured in the sample gas.
  • An infrared gas analysis method for analyzing the measured component characterized in that a gas filter in which a plurality of interference components that interfere with the measurement component are sealed is used to reduce the interference influence that the plurality of interference components have on the measurement component. shall be.
  • the infrared gas analyzer of the present invention further includes an arithmetic device that calculates the concentration of the component to be measured in the sample gas using the output of the infrared detector, and the infrared detector is configured to calculate the concentration of the component to be measured using the output of the infrared detector. It has a measurement component detector and an interference component detector for measuring the concentration of an interference component that interferes with the measurement component, and the arithmetic unit calculates the concentration of the interference component detector from the output of the measurement component detector. The concentration of the measured component is calculated by subtracting the output multiplied by a predetermined weighting coefficient.
  • the predetermined weighting coefficient changes depending on the concentration of the interference component, a measurement error may occur if a fixed weighting coefficient is used. For this reason, it is desirable that the arithmetic device change or correct the weighting coefficient based on the concentration of the interference component.
  • the infrared gas analyzer of the present invention includes a measurement cell into which a sample gas is introduced, an infrared light source that irradiates the measurement cell with infrared rays, an infrared detector that detects the infrared rays transmitted through the measurement cell, and an arithmetic device that calculates the concentration of a measurement component in a sample gas using the output of an infrared detector;
  • the infrared detector includes a measurement component detector for measuring the concentration of the measurement component; and an interference component detector for measuring the concentration of an interference component that interferes with the interference component, and the calculation device multiplies the output of the interference component detector by a predetermined weighting coefficient from the output of the measured component detector.
  • the method is characterized in that the concentration of the measurement component is calculated by subtracting the amount of the interference component, and the weighting coefficient is changed or corrected based on the concentration of the interference component.
  • FIG. 1 is a schematic diagram showing an infrared gas analyzer according to an embodiment of the present invention.
  • FIG. 3 is a diagram showing infrared absorption spectra of each component.
  • FIG. 3 is a schematic diagram showing an infrared gas analyzer according to a modified embodiment.
  • FIG. 3 is a schematic diagram showing an infrared gas analyzer according to a modified embodiment.
  • the infrared gas analyzer 100 detects monoxide in a sample gas such as flue gas (flue gas) discharged from industrial equipment such as a sewage treatment facility, an incineration plant, an industrial waste treatment plant, or a chemical plant.
  • a sample gas such as flue gas (flue gas) discharged from industrial equipment such as a sewage treatment facility, an incineration plant, an industrial waste treatment plant, or a chemical plant.
  • Non-dispersive control of component concentrations such as dinitrogen ( N2O ), nitrogen oxides ( NOx ), sulfur dioxide ( SO2 ), carbon monoxide (CO), carbon dioxide ( CO2 ), and methane ( CH4 ). It is measured using an infrared absorption method (NDIR).
  • the infrared gas analyzer 100 measures the concentration of N 2 O in a sample gas, and as shown in FIG.
  • An infrared light source 3 is provided at the other end of the measurement cell 2 and detects the infrared rays that have passed through the measurement cell 2. It is equipped with a gas filter 5 in which an interference component that interferes with N 2 O) is sealed, and an arithmetic device 6 that obtains the output from the infrared detector 4 and calculates the concentration of the measurement component (N 2 O). .
  • the measurement cell 2 has a generally cylindrical shape, for example, and has both ends sealed by cell window members 2a and 2b made of an infrared transparent material, and has an introduction port P1 for introducing the sample gas into the cell, and an introduction port P1 for introducing the sample gas into the cell.
  • a lead-out port P2 for leading out to the outside of the cell is provided on the side wall.
  • the infrared light source 3 is provided at one end of the measurement cell 2 facing the cell window member 2a, and irradiates the inside of the measurement cell 2 with infrared rays.
  • An optical chopper (not shown) is provided between the infrared light source 3 and the measurement cell 2, and is rotated by, for example, a motor to chop the infrared rays generated by the infrared light source 3 at regular intervals. ).
  • the infrared detector 4 is provided facing the cell window member 2b at the other end of the measurement cell 2, and includes a measurement component detector 41 which is a main detector for measuring the concentration of the measurement component (N 2 O). and an interference component detector 42 which is a compensation detector for measuring the concentration of an interference component (in this case, CO 2 ).
  • the measurement component detector 41 and the interference component detector 42 are optically arranged in series in this order from the other end side of the measurement cell 2. Note that the detection signal obtained by the measurement component detector 41 and the detection signal obtained by the interference component detector 42 are output to the arithmetic device 6.
  • the measured component detector 41 is, for example, a condenser microphone type pneumatic detector.
  • This measured component detector 41 has a main body block made of a corrosion-resistant metal, both ends of which are sealed by window members made of an infrared transparent material, and a condenser microphone 41x is disposed inside the main body block.
  • the measuring component detector 41 is filled with a measuring component (N 2 O) or a measuring gas that exhibits infrared absorption characteristics equivalent to it, and is filled with infrared rays in a wavelength range matching the infrared absorption spectrum of the measuring component. It detects intensity.
  • the measured component detector 41 of this embodiment has sensitivity to both measured components and interference components.
  • the component detector 41 since the component to be measured is N 2 O, the component detector 41 is filled with N 2 O gas at a predetermined concentration. Thereby, the measurement component detector 41 detects infrared intensity in a wavelength range matching the infrared absorption spectrum of N 2 O (see FIG. 2).
  • the interference component detector 42 is, like the measured component detector 41, a pneumatic detector of the condenser microphone type, for example.
  • this interference component detector 42 both ends of a main body block made of a corrosion-resistant metal are sealed with window members made of an infrared transparent material, and a condenser microphone 42x is disposed inside the window member.
  • the interference component detector 42 is filled with an interference component (CO 2 ) or an interference gas that exhibits infrared absorption characteristics equivalent to the interference component (CO 2 ). This is to detect.
  • This interference component detector 42 is provided after the measured component detector 41, and since most of N 2 O is absorbed by the measured component detector 41, it is sensitive to interference components.
  • the interference component detector 42 in order to correct the interference effect of CO 2 on N 2 O, the interference component detector 42 is filled with N 2 O gas having a higher concentration than the N 2 O gas in the measurement component detector 41. ing. Thereby, the interference component detector 42 detects infrared intensity in a wavelength range matching the infrared absorption spectrum of CO 2 (see FIG. 2).
  • the gas filter 5 is provided between the measurement cell 2 and the infrared detector 4, and is used to reduce or eliminate the absorption spectrum of CO 2 and CO that interferes with the absorption spectrum of the measurement component (N 2 O). .
  • the gas filter 5 is configured by sealing a mixed gas of CO 2 gas and CO gas in one chamber.
  • both ends of the chamber of the gas filter 5 are sealed by window members made of an infrared transparent material.
  • the gas filter 5 of this embodiment is filled with a mixed gas of 60 vol% CO 2 gas and 40 vol% CO gas. In this way, the gas filter 5 is filled with a mixed gas of a plurality of interfering components that do not react with each other, or a mixed gas of a plurality of interfering components that are stable in equilibrium with each other.
  • the interference effect of CO 2 does not change (increase) much when the amount of CO 2 gas sealed in the gas filter 5 is 50 vol % or more, so it is desirable that the amount of CO 2 gas is 50 vol % or more.
  • the CO concentration in the sample gas is roughly estimated to be 1000 ppm, it is possible to fill the gas filter 5 with 20 vol% CO gas in order to remove the interference influence of CO. desirable.
  • the amount of CO gas sealed in the gas filter 5 is 50 vol % or less.
  • an optical filter 9 is provided to narrow the wavelength of infrared rays detected by the infrared detector 4 in order to reduce the interference influence of components such as SO 2 and CH 4 in the sample gas. There is.
  • This optical filter 9 transmits infrared rays in the absorption wavelength range of N 2 O. Specifically, the optical filter 9 transmits infrared rays in the wavelength range of 4 ⁇ m to 5 ⁇ m, for example.
  • the optical filter 9 of this embodiment is provided between the measurement cell 2 and the infrared detector 4, specifically, between the gas filter 5 and the infrared detector 4.
  • the calculation device 6 calculates the concentration of N 2 O based on the difference between the output signal of the measurement component detector 41 and the output signal of the interference component detector 42 . Note that the calculation device 6 can display the measurement results such as the calculated N 2 O concentration on the display unit 60 such as a display.
  • the arithmetic unit 6 includes a measurement preamplifier 61 that amplifies and outputs the output signal of the measurement component detector 41, and an interference preamplifier 62 that amplifies and outputs the output signal of the interference component detector 42. , an amplifier 63 that amplifies the output from the interference preamplifier 62 by multiplying it by a predetermined weighting coefficient k, and a subtracter 64 that subtracts the output signal of the amplifier 63 from the output signal from the measurement preamplifier 61. It is equipped with
  • the predetermined weighting coefficient k is the ratio (M2/M1) of the output signal (M2) of the measurement component detector 41 to the output signal (M1) of the interference component detector 42 when measuring the interference component (CO 2 ). ).
  • This weighting coefficient k is adjusted to be close to 1, that is, so that the output signal of the measurement component detector 41 and the output signal of the interference component detector 42 are approximately the same. Specifically, it is possible to bring the coefficient k closer to 1 by adjusting the resistance value built into the interference preamplifier 62. In addition, it is possible to bring the coefficient k closer to 1 by adjusting the concentration of the measurement filler gas or the interference filler gas.
  • the infrared gas analyzer 100 of the present embodiment further includes a CO 2 measurement section 7 that measures the concentration of CO 2 in the sample gas, and uses the CO 2 concentration obtained by the CO 2 measurement section 7.
  • the weighting coefficient k is changed or corrected.
  • the CO 2 measurement section 7 includes a CO 2 measurement cell 71 into which sample gas is introduced, an infrared irradiation section 72 that irradiates the CO 2 measurement cell 71 with infrared rays, and a CO 2 measurement cell 71 that detects the infrared rays transmitted through the CO 2 measurement cell 71. 2 detectors 73.
  • the sample gas that has passed through the CO 2 measurement cell 71 of this embodiment is configured to be introduced into the measurement cell 2, the reverse may be possible.
  • the CO 2 measurement cell 71 has the same configuration as the measurement cell 2 described above, but its cell length is shorter than the cell length of the measurement cell 2 in accordance with the CO 2 concentration.
  • the CO 2 detector 73 is, for example, a condenser microphone type pneumatic detector, like the measurement component detector 41 described above.
  • the infrared irradiation unit 72 is configured using the above-mentioned infrared light source 3 and the condensing member 8 provided between the infrared light source 3 and the measurement cell 2.
  • the condensing member 8 has a first optical path 8a formed of a tapered inner wall surface that condenses infrared rays. By passing through this first optical path 8a, the infrared rays from the infrared light source 3 are focused and irradiated onto the measurement cell 2.
  • a second optical path 8b for irradiating the CO 2 measurement cell 71 with infrared rays is connected to the inner wall surface forming the first optical path 8a. The infrared rays reflected by the tapered inner wall surface pass through the second optical path 8b, and the CO 2 measurement cell 71 is irradiated with the infrared rays that have passed through the second optical path 8b.
  • the arithmetic device 6 includes a CO 2 detection amplifier 65 that amplifies and outputs the output signal of the CO 2 detector 73, and the CO 2 concentration is calculated from the output signal of the CO 2 detection amplifier 65. .
  • the output signal of the CO 2 detection amplifier 65 or the CO 2 concentration determined therefrom is input to the amplifier 63 of the arithmetic unit 6 .
  • the amplifier 63 changes or corrects the weighting coefficient k by which the output signal of the interference component detector 42 is multiplied, depending on the output signal of the CO 2 detection amplifier 65 or the CO 2 concentration determined therefrom.
  • the weighting coefficient k is determined in advance using a plurality of CO 2 gases whose concentrations are known, and is stored in the arithmetic unit 6. Then, during measurement, the weighting coefficient k is changed or corrected according to the output signal of the CO 2 detection amplifier 65 or the CO 2 concentration determined therefrom.
  • the gas filter 5 removes the interference influence of CO and reduces the interference influence of CO2 .
  • the measured component detector 41 that detects N 2 O and CO 2 and the interference component detector 42 that detects CO 2 are used to detect the output of the measured component detector 41. ” ⁇ “output of interference component detector 42 ⁇ k”, the interference influence of CO 2 added to the output signal of measurement component detector 41 is removed.
  • the gas filter 5 is filled with a plurality of interfering components (CO 2 and CO) that interfere with the measurement component (N 2 O) in the sample gas. Therefore, it is possible to eliminate the need for an oxidation catalyst that oxidizes at least one of the plurality of interfering components (in this case, CO), and as a result, running costs can be reduced. Furthermore, since the gas filter 5 includes a plurality of interference components, the interference influence of the plurality of interference components on the measurement component can be reduced.
  • the weighting coefficient k used for calculating the N 2 O concentration is changed or corrected using the CO 2 concentration obtained by the CO 2 measurement unit 7, so that regardless of the CO 2 concentration , the N 2 O concentration can be determined with high accuracy.
  • the gas filter 5 of the embodiment described above is provided between the measurement cell 2 and the infrared detector 4, but as shown in FIG. If there is, it may be provided between the light condensing member 8 and the measurement cell 2).
  • the optical filter 9 is placed between the infrared light source 3 and the measurement cell 2 (if there is a condensing member 8, between the condensing member 8 and the measurement cell 2, or between the infrared light source 3 and the measurement cell 2). 3 and the light condensing member 8).
  • the gas filter 5 may be built into the infrared light source 3 or the measurement cell 2.
  • an optical filter 9 is used to narrow the wavelength of infrared rays detected by the infrared detector 4 in order to reduce the interference influence of components such as SO 2 and CH 4 . It is not necessary to use the filter 9.
  • the infrared gas analyzer of the above embodiment was of an optical chopping type in which the infrared rays of the infrared light source 3 were chopped at a constant cycle using an optical chopper, but the sample gas and reference gas were chopped at a constant cycle.
  • a fluid modulation method may also be used in which the fluid is alternately introduced into the measurement cell 2.
  • the infrared gas analyzer of the above embodiment measures the concentration of N2O , but it may also measure the concentration of other components such as NOx , SO2 , CO, CO2 , CH4 , etc. Alternatively, the concentration of two or more of these components may be measured.
  • FIG. 4 shows a configuration example of an infrared gas analyzer 100 that measures the concentrations of four components.
  • the infrared gas analyzer 100 shown in FIG. 4 measures the concentration of each of the four components, for example, N 2 O, SO 2 , CO 2 , and NO .
  • the apparatus includes a section 10 and an NO measuring section 11.
  • the SO 2 measurement unit 10 includes an SO 2 detector 101 that detects infrared rays that have passed through the measurement cell 2 . Further, the NO measurement section 11 includes an NO detector 111 that detects infrared rays transmitted through the measurement cell 2.
  • SO 2 detector 101 and NO detector 111 are, for example, pneumatic detectors of a condenser microphone type, like the above-mentioned measured component detector 41.
  • the infrared rays transmitted through the measurement cell 2 are transmitted to the infrared detector 4 (N 2 O detector), the SO 2 detector 101 and the NO
  • the infrared rays are divided into a detector 111.
  • a gas filter 5 similar to that of the embodiment described above is provided between the beam splitter 12 and the infrared detector 4 (N 2 O detector).
  • an optical filter 9 is also provided between the beam splitter 12 and the infrared detector 4 (N 2 O detector).
  • optical filters 13 and 14 are also provided between the beam splitter 12 and the SO 2 detector 101 and the NO detector 111.
  • a gas filter may be provided between the beam splitter 12 and the SO 2 detector 101 and the NO detector 111 in order to remove the interference effects of interference components on these measurement components.
  • FIG. 4 shows an example of a configuration for measuring the concentration of four components, for example, by changing the configuration of the beam splitter, a configuration for measuring the concentration of three components can be created. It can also be configured to measure the concentration of components.
  • exhaust gas emitted from an external combustion engine is analyzed, but exhaust gas emitted from an internal combustion engine of a vehicle, a ship, etc. may be analyzed.
  • running costs can be reduced by eliminating the need for a catalyst, which is a consumable item.

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PCT/JP2023/016587 2022-05-09 2023-04-27 赤外線ガス分析計及び赤外線ガス分析方法 Ceased WO2023218983A1 (ja)

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US18/863,980 US20250321184A1 (en) 2022-05-09 2023-04-27 Infrared gas analyzer, and infrared gas analysis method
EP23803462.3A EP4524549A1 (en) 2022-05-09 2023-04-27 Infrared gas analyzer, and infrared gas analysis method
JP2024520391A JPWO2023218983A1 (enExample) 2022-05-09 2023-04-27

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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07218434A (ja) * 1994-01-31 1995-08-18 Shimadzu Corp 赤外線ガス分析計
JPH09178655A (ja) * 1995-12-26 1997-07-11 Shimadzu Corp 赤外線ガス分析計
JPH09273991A (ja) * 1996-04-06 1997-10-21 Horiba Ltd 赤外線ガス分析計
JPH1082740A (ja) * 1996-09-06 1998-03-31 Shimadzu Corp 赤外線式ガス分析計
JP2001208685A (ja) * 2000-01-28 2001-08-03 Horiba Ltd Ｆｔｉｒガス分析計
JP2013096889A (ja) 2011-11-02 2013-05-20 Fuji Electric Co Ltd 赤外線ガス分析計
JP2016057320A (ja) * 2016-01-29 2016-04-21 株式会社島津製作所 赤外線ガス分析装置
JP2018091827A (ja) * 2016-11-29 2018-06-14 株式会社堀場製作所 ガス分析装置及びガス分析方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07218434A (ja) * 1994-01-31 1995-08-18 Shimadzu Corp 赤外線ガス分析計
JPH09178655A (ja) * 1995-12-26 1997-07-11 Shimadzu Corp 赤外線ガス分析計
JPH09273991A (ja) * 1996-04-06 1997-10-21 Horiba Ltd 赤外線ガス分析計
JPH1082740A (ja) * 1996-09-06 1998-03-31 Shimadzu Corp 赤外線式ガス分析計
JP2001208685A (ja) * 2000-01-28 2001-08-03 Horiba Ltd Ｆｔｉｒガス分析計
JP2013096889A (ja) 2011-11-02 2013-05-20 Fuji Electric Co Ltd 赤外線ガス分析計
JP2016057320A (ja) * 2016-01-29 2016-04-21 株式会社島津製作所 赤外線ガス分析装置
JP2018091827A (ja) * 2016-11-29 2018-06-14 株式会社堀場製作所 ガス分析装置及びガス分析方法

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