WO2023206847A1 - 植物纤维基和改进摩擦电负性材料的摩擦纳米发电机、发电装置 - Google Patents

植物纤维基和改进摩擦电负性材料的摩擦纳米发电机、发电装置 Download PDF

Info

Publication number
WO2023206847A1
WO2023206847A1 PCT/CN2022/109945 CN2022109945W WO2023206847A1 WO 2023206847 A1 WO2023206847 A1 WO 2023206847A1 CN 2022109945 W CN2022109945 W CN 2022109945W WO 2023206847 A1 WO2023206847 A1 WO 2023206847A1
Authority
WO
WIPO (PCT)
Prior art keywords
plant fiber
triboelectric
nanogenerator
rotor
triboelectronegative
Prior art date
Application number
PCT/CN2022/109945
Other languages
English (en)
French (fr)
Inventor
应义斌
代淑芬
李逊甲
平建峰
Original Assignee
浙江大学
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CN202210449601.5A external-priority patent/CN114804016A/zh
Priority claimed from CN202210448298.7A external-priority patent/CN114884390A/zh
Priority claimed from CN202210449552.5A external-priority patent/CN114826014A/zh
Application filed by 浙江大学 filed Critical 浙江大学
Publication of WO2023206847A1 publication Critical patent/WO2023206847A1/zh

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/04—Friction generators

Definitions

  • the invention relates to a friction nanogenerator in the field of new energy technology, and in particular to a soft contact low-damping friction nanogenerator with a plant fiber brush base and improved triboelectronegative material, and a low-flow water flow energy generator. Collected plant fiber-based soft-contact low-damping friction nanogenerator devices.
  • TENGs triboelectric nanogenerators
  • TENGs For traditional TENGs, sufficient friction between direct contact friction pairs is a necessary condition to generate more friction charges and higher output power density, but it may cause severe wear and reduce the equipment life cycle after long-term operation. So far, various efforts have been made to improve the durability of the device, such as the structural design of rolling charging, pendulum motion, brushes, and automatic mode switching. In previous work, the soft-contact operation mode of TENG has been proven to be an effective strategy to improve durability.
  • Soft contact TENG can avoid direct contact between friction pairs, improve the durability of the device, and reduce the damping during device operation.
  • the soft contact operation mode of TENG usually uses animal hair as the soft contact material and charge transfer medium.
  • Plant fibers have soft properties and can maintain close contact with less resistance when rubbing against another triboelectric layer.
  • PFB-TENG plant fiber-based soft contact friction nanogenerator
  • Soft cotton and other plant fiber brushes are a typical positive friction energy material
  • etched polyvinyl chloride (PVC) has strong triboelectivity due to its large surface roughness and the introduction of fluorine, so friction The vice can effectively convert weak mechanical energy into electrical energy.
  • PVC polyvinyl chloride
  • PFB-TENG exhibits more transferred charge, higher output performance and better durability at the same torque and speed, which means that the designed PFB-TENG can be used in Maximizing the utilization of weak discrete kinetic energy in low flow irrigation and river energy harvesting environments.
  • the purpose of the present invention is to introduce plant fiber as a new triboelectric material into the triboelectric generator, and innovatively use plant fiber brush-based soft contact low-damping friction nanometers
  • the generator is used to collect water flow energy, forming a plant fiber-based soft contact low-damping friction nano-power generation device for water flow energy collection.
  • the present invention also uses inductively coupled plasma dry etching technology to improve the triboelectric output performance of the polyvinyl chloride (PVC) film, and innovatively increases the surface roughness of the PVC through etching while covering a layer of fluorocarbon material on the film surface, improving the The triboelectric output performance of triboelectronegative materials also improves the triboelectric power generation performance.
  • PVC polyvinyl chloride
  • the invention sets soft contact fiber brushes between electrodes on the stator surface close to the rotor to realize soft contact between the copper electrodes and the polyvinyl chloride film to transfer charges.
  • a plant fiber brush-based soft contact low-damping friction nanogenerator 1. A plant fiber brush-based soft contact low-damping friction nanogenerator:
  • It includes a rotor, a stator, copper electrodes, triboelectronegative materials and plant fiber brushes; the rotor is located in the stator, the inner circumferential surface of the stator is covered with copper electrodes, and the outer circumferential surface of the rotor is provided with at least one triboelectronegative material.
  • the negative material does not contact the copper electrode and has an air gap; the inner circumferential surface of the stator is also provided with at least one plant fiber brush.
  • the electronegative material and the plant fiber brush scrape soft contact to transfer electric charge.
  • the low damping mentioned in the present invention means that the damping is lower than 0.06N ⁇ m.
  • the working damping of the device is less than 0.06N ⁇ m; among them, the cotton brush produces the smallest damping at different speeds. , are all less than 0.05N ⁇ m, and the minimum can reach 0.015N ⁇ m.
  • the plant fiber brush is made of natural plant fibers, including plants containing soft fiber materials such as cotton, reeds, pampas grass and foxtail grass.
  • the outer circumferential surface of the rotor is provided with multiple triboelectronegative materials along the circumferential direction.
  • the copper electrodes are composed of interdigital electrodes arranged at intervals along the axial direction.
  • the interdigital electrodes are arranged on a base, and the base is fixedly covered on the inner peripheral surface of the stator.
  • the triboelectronegative material is fixedly attached to the substrate and is not in contact with the copper electrode.
  • the soft-contact low-damping friction nanogenerator is used for irrigation energy collection.
  • the triboelectric nanogenerator of the present invention can work in an independent layer mode, specifically: the soft contact low-damping triboelectric nanogenerator includes an independent triboelectronegative material and a pair of fixed interdigitated copper electrodes.
  • the triboelectronegative layer moves between the two electrodes.
  • the friction layer moves between the two electrodes and induces periodic changes in electric potential to change. Then the change in electric potential drives electrons to flow at both ends of the two electrodes to complete the power generation process.
  • at least one plant fiber brush is provided on the inner circumferential surface of the stator to recharge the triboelectronegative material.
  • this working mode does not require electrodes to be plated on the moving parts of the device.
  • This design facilitates the production and operation of the device; it also provides higher energy conversion efficiency than the single-electrode mode because it does not It will be interfered by the single-electrode mode shielding effect, so it can provide higher output performance.
  • a plant fiber-based frictional nano-power generation device for collecting low-flow water flow energy is a plant fiber-based frictional nano-power generation device for collecting low-flow water flow energy
  • the device includes the two parts of the friction nanogenerator and the waterwheel driving mechanism; the rotor of the frictional nanogenerator and the drive shaft of the waterwheel driving mechanism are coaxially connected, and the waterwheel driving mechanism is driven to operate under the action of water flow to drive the frictional nanogenerator.
  • the generator When the generator is running, the water wheel drives the rotor in the TENG to rotate under the action of external irrigation water flow energy, and the irrigation energy is converted into electrical energy through the TENG.
  • the low flow rate mentioned in the present invention means that the flow rate is lower than 1m 3 /h.
  • the invention can realize the collection of water flow energy at different flow rates of 0.5, 0.6, 0.7, .0.8, 0.9 and 1m3 /h, and can realize the collection of low flow rate water flow energy of 0.5m3 /h at the minimum.
  • the waterwheel driving mechanism includes a waterwheel, a drive shaft and a bearing seat.
  • the waterwheel is set on the drive shaft, the drive shaft is supported and installed on the bearing seat, and the drive shaft and the rotor are coaxially connected.
  • the plant fiber-based frictional nano-power generation device collects energy for irrigation or low-flow water flow.
  • the triboelectronegative material is prepared in the following manner: etching the upper surface of the film with an inductively coupled plasma dry etching instrument to form a nano-textured structure on the upper surface of the film; and then using inductive coupling.
  • the plasma etching instrument performs a deposition process on the upper surface of the film, so that a fluorocarbon layer is deposited on the upper surface of the nano-textured structure.
  • the present invention utilizes inductively coupled plasma dry etching to improve the triboelectric output performance of triboelectronegative materials.
  • the film is a polyvinyl chloride film.
  • the preparation method of the triboelectronegative material includes the following steps:
  • the first stage pass in 15sccm of O 2 and 45sccm of CHF 3 , control the ICP power to 100W, and the etching time to 10min;
  • the second stage pass in 50sccm C 4 F 8 , control the ICP power to 100W, and the deposition time to 10s.
  • the tribonegative material of the present invention can be used in triboelectric nanogenerators.
  • the plant fiber material proposed by the present invention is a soft and good charge supplement material. It can supplement the charge loss of the device during the operation of the device. At the same time, it can reduce the wear and tear of the direct contact between the copper electrode and the polyvinyl chloride film, improving the durability of the TENG. performance and output power density, and reduce damping during TENG operation.
  • the present invention introduces soft natural plant fiber brushes into the preparation of friction nanogenerator TENG for the first time. Reduce the damping during TENG operation, thereby realizing the collection of low-flow water flow energy.
  • the introduction of plant fiber brushes improves the durability and output power density of the TENG, and reduces the damping during TENG operation. Therefore, the plant fiber-based TENG can work under smaller force driving.
  • the invention uses a soft plant fiber brush as a charge transfer medium to avoid direct contact between friction pairs, reduce the damping during the operation of the device, and improve the durability of the device.
  • Plant fibers have soft properties and can maintain close contact with less resistance when rubbed against another friction dielectric layer.
  • the present invention can not only inject more positive triboelectric charges into the dielectric surface, but also greatly reduce material wear and improve the output density of the triboelectric nanogenerator TENG. Increase the durability of the equipment and realize the collection of low-flow water flow energy.
  • the present invention also etches the upper surface of the PVC film for a period of time through plasma etching technology, so that a nano-textured structure is formed on the upper surface of the PVC film.
  • the roughness of the PVC film increases, the specific surface area becomes larger, and the surface charge The load-bearing capacity increases, and the triboelectric output performance becomes larger.
  • the upper surface of the PVC film is then deposited for a period of time through plasma etching, so that a fluorocarbon layer is deposited on the upper surface of the nano-textured structure of the PVC film. Covering the surface of the film with a fluorocarbon layer can improve the film's electron acquisition ability and increase the triboelectivity.
  • Figure 1 is a schematic structural diagram of a plant fiber brush-based triboelectric nanogenerator.
  • Figure 2 is an optical micrograph of four plant fiber brushes.
  • Figure 3 shows the output performance comparison of PFB-TENG prepared based on four types of plant fiber brushes.
  • Figure 3a is a schematic diagram of the dynamic torque system used to test the output performance of PFB-TENG; the output voltage ( Figure 3b), output current ( Figure 3c) and the amount of transferred charge ( Figure 3d). It can be seen from Figure 3b-d that the output electrical performance of PFB-TENG is maximum when cotton brush is used as the soft contact material.
  • Figure 4 shows SEM images of four plant fibers.
  • Figure 5 shows the SEM characterization picture of the triboelectronegative material PVC.
  • 5a is the SEM image of the original PVC film
  • 5b is the SEM image of the PVC and copper electrodes after 30,000 cycles of friction
  • 5c is the SEM image of the PVC film and the cotton fiber brush after 30,000 cycles of friction. It can be seen from the figure that the wear caused by the friction between the cotton brush and PVC is very small, indicating that using cotton brush as a supplementary charge material can improve the operational stability of the device.
  • Figure 6 shows the FT-IR characterization diagram of four plant fibers.
  • Figure 7 shows the working damping when four different plant fiber brushes are used as supplementary charge materials. It can be seen from the figure that the damping produced by the four plant fiber brushes from large to small is: dogtail grass brush, reed hair Brush, pampas grass brush, cotton brush. The damping of the four types of plant brushes are all less than 0.06N ⁇ m, among which cotton has the smallest damping at different rotation speeds, all less than 0.05N ⁇ m.
  • Figure 8 is a histogram of point integral values of the hydroxyl content of four cellulose brushes at 3412 cm -1 using a multifunctional infrared nanospectrometer.
  • Figure 9 shows the cycle stability test results of PFB-TENG using cotton fiber as soft contact material.
  • Figure 10 is the power density curve of PFB-TENG.
  • Figure 11 is a schematic structural diagram of a plant fiber-based triboelectric nanopower generation device.
  • Figure 12 is a confocal micrograph and SEM image of four kinds of plant fiber brushes. From left to right, they are cotton, pampas grass, reed and foxtail grass brushes.
  • Figure 13 shows the damping of four different plant fiber-based triboelectric nanopower generation devices when operating at different rotational speeds.
  • Figure 14 shows the transfer charge (Figure 14a) and short-circuit current (Figure 14b) of PFB-TENG under the action of water flow at different flows.
  • Figure 15 is an equivalent circuit diagram of the plant fiber-based soft-contact low-damping friction nano-power generation device used for collecting irrigation energy according to the present invention to supply power to a load resistor or capacitor.
  • Figure 16 is a graph of the voltage changes over time when the PFB-TENG is driven by water flow to charge different capacitors.
  • Figure 17 is a graph showing several working cycles of the voltage curve on the PFB-TENG powered soil sensor driven by water flow.
  • Figure 18 is a perspective view of a plant fiber-based triboelectric nanogenerator.
  • Figure 19 is an SEM image of PVC films prepared in six embodiments.
  • Figure 20 is a white light interferometer imaging diagram of PVC films prepared in 6 embodiments, characterizing the roughness of the film;
  • Figure 21 is a white light interferometer three-dimensional imaging diagram of PVC films prepared in six embodiments, characterizing the thickness of the film;
  • Figure 22 shows the roughness and thickness of PVC films prepared in six embodiments
  • Figure 23 is an XPS characterization diagram of PVC films prepared in six embodiments.
  • Figure 24 is an EDS characterization diagram of PVC films prepared in six embodiments.
  • Figure 25 is a carbon to fluorine ratio diagram of the PVC film prepared by plasma dry etching in Examples 1-5;
  • Figure 26 is a schematic diagram of a vertical-contact separation mode TENG constructed with the PVC membrane prepared in Examples 1-6;
  • Figure 27 is the voltage signal output by the vertical-contact separation mode TENG constructed with the PVC film prepared in Examples 1-6.
  • Figure 28 shows the transferred charge amount, output current and output voltage of TENGs prepared from untreated control (Figure 28a-c) and ICP-3 ( Figure 28d-e) etched PVC films at different rotational speeds.
  • Figure 29 is the output power density of TENG prepared from untreated PVC film (control) under different matching resistances.
  • Figure 30 shows the output power density of TENG prepared by ICP-3 etched PVC film under different matching resistances.
  • Table 1 shows the specific treatment processes of the six embodiments as well as the thickness and roughness statistics of the prepared films.
  • the specific implementation of the triboelectric nanogenerator includes a rotor 1, a stator 2, a copper electrode 3, a triboelectronegative material 4 and a plant fiber brush 5; the rotor 1 is located in the stator 2, and the inner circumferential surface of the stator 2 is covered A grid-shaped copper electrode 3 is provided, and a triboelectronegative material 4 is provided on at least one place on the outer circumferential surface of the rotor 1.
  • the triboelectronegative material 4 does not contact the copper electrode 3 and has an air gap 6, and the air gap is 0.5-1.5. mm, the inner peripheral surface of the stator 2 is also provided with at least one soft plant fiber brush 5.
  • the specific implementation of the triboelectric nanogenerator device includes two parts: the triboelectric nanogenerator device and the waterwheel drive mechanism; the rotor 1 of the triboelectric nanogenerator and the drive shaft 8 of the waterwheel drive mechanism are coaxially connected, and the rotor 1 and the waterwheel drive mechanism are coaxially connected.
  • the driving shaft 8 of the water wheel driving mechanism is coaxially connected, and under the action of water flow, the water wheel 7 in the water wheel driving mechanism is driven to rotate and drive the friction nano power generation device to operate.
  • the triboelectronegative material 4 and the plant fiber brush 5 scrape soft contact to transfer charges, which can improve the triboelectric nanopower generation performance.
  • the plant fiber brush 5 is made of natural plant fibers, including plants containing soft fiber materials such as cotton, reeds, pampas grass and foxtail grass, in which the brush is in contact with the triboelectronegative material on the stator.
  • the triboelectronegative material 4 is fixedly attached to the substrate and is not in contact with the copper electrode 3 .
  • polyimide tape is pasted on the outer circumferential surface of the rotor, and the triboelectronegative material 4 is pasted on the outer circumferential surface of the rotor.
  • the triboelectronegative material 4 and the plant fiber brush 5 scrape soft contact to transfer charges, which can improve the triboelectric nanopower generation performance.
  • the outer circumferential surface of the rotor 1 is provided with multiple triboelectronegative materials 4 along the circumferential direction, and the multiple triboelectronegative materials 4 are evenly spaced along the circumferential direction.
  • the triboelectronegative material 4 is fixedly attached to the substrate and is not in contact with the copper electrode 3 .
  • an installation groove is opened on the base, and the triboelectronegative material 4 is fixed in the installation groove.
  • the copper electrode 3 is composed of an interdigital electrode arrangement arranged at intervals along the axial direction.
  • the interdigital electrode is arranged on a base, and the base is fixedly covered on the inner peripheral surface of the stator 2 .
  • the spaced copper electrodes are connected in series, and the two adjacent copper electrodes are not connected, that is, the copper electrodes are divided into two groups that are not connected.
  • the inner wall of the casing is attached with a layer of grid-shaped copper electrodes made of flexible printed circuit board technology FPCB.
  • the grid width of the copper electrodes is consistent with the width of the rotor blades.
  • the rotor 1 and the stator 2 are both cylindrical, integrated with each other, and can be prepared by 3D printing.
  • the cylindrical stator is prepared by 3D printing, and four evenly distributed grooves are opened on the cylindrical wall for fixing the plant fiber brush 5.
  • the rotor is also prepared by 3D printing.
  • the rotor contains 4 or more fan blades.
  • the center of the rotor is a hollow structure. Based on this hollow structure, the rotor is fixed on the shaft.
  • the inner wall of the stator 2 shell is attached with a layer of grid-shaped copper electrodes made of flexible printed circuit board technology FPCB.
  • the grid width of the copper electrodes is consistent with the width of the rotor blades.
  • Control a control group
  • 5 experimental groups ICP-1, ICP-2, ICP-3, ICP-4 and ICP-5) were set up.
  • the first stage 15sccm O 2 , 45sccm CHF 3 , the ICP power is 100W, the RF power of ICP-1, ICP-2, ICP-3, ICP-4 and ICP-5 are 10W, 20W, 25W, respectively. 30W, 40W, etching time is 10min;
  • Second stage Pass in 50sccm C 4 F 8 , set the ICP power to 100W, and the RF power of ICP-1, ICP-2, ICP-3, ICP-4 and ICP-5 are 10W, 20W, 25W, 30W, respectively. 40W, etching time is 10s;
  • the control group (Control) was used as a control group without gas in both stages; the 5 experimental groups (ICP-1, ICP-2, ICP-3, ICP-4 and ICP-5) were divided into 2 treatment stages (reference Table 1), the difference between the 5 experimental groups is the RF processing power in the second stage.
  • the PVC membrane in the control group was not subjected to any treatment after being washed in the above step (1).
  • the described method for improving the triboelectric output performance of polyvinyl chloride (PVC) film based on inductively coupled plasma dry etching technology includes the following steps:
  • Step S1 Cleaning of PVC film: Take a PVC film cut into 4*4cm and place it in anhydrous ethanol for ultrasonic cleaning for 10 minutes, then use deionized water for ultrasonic cleaning for 10 minutes, and then dry it to obtain a clean PVC film;
  • Step S2 Place the cleaned PVC film in the carrier for plasma etching and send it into the cavity of the plasma dry etching equipment;
  • Step S3 Evacuate the equipment to maintain stable pressure.
  • the etching process is divided into two stages. The first stage: pass in 15sccm O2, 45sccm CHF 3 , the ICP power is 100W, the RF power is 10W, and the etching time is 10min; the second stage: pass in 50sccm C4F8, the ICP power is set to 100W, the RF power is 10W, and the etching time is 10min.
  • the eclipse time is 10s;
  • Step S4 After completing etching, bring the equipment to normal pressure
  • Step S5 Complete the etching process and take out the etched PVC film ICP-1.
  • Embodiment 2 The steps of Embodiment 2 are the same as those of Embodiment 1, the difference is:
  • step S3 the RF power is 20W;
  • step S5 take out the etched PVC film ICP-2;
  • Embodiment 2 The steps of Embodiment 2 are the same as those of Embodiment 1, the difference is:
  • step S3 the RF power is 25W;
  • step S5 take out the etched PVC film ICP-3;
  • Embodiment 2 The steps of Embodiment 2 are the same as those of Embodiment 1, the difference is:
  • step S3 the RF power is 30W;
  • step S5 take out the etched PVC film ICP-4;
  • Embodiment 2 The steps of Embodiment 2 are the same as those of Embodiment 1, the difference is:
  • step S3 the RF power is 40W;
  • step S5 take out the etched PVC film ICP-5;
  • control film A PVC film cut into 4*4cm was placed in anhydrous ethanol for ultrasonic cleaning for 10 minutes, then ultrasonically cleaned with deionized water for 10 minutes, and then dried to obtain a clean PVC film as a control group, named control film.
  • the scanning electron microscope (SEM) characterization diagrams of the six PVC films prepared in Examples 1-6 are shown in Figure 19.
  • the surface of the untreated control membrane has some randomly distributed microcracks, which are generated during transportation and cleaning. After ICP etching, these microcracks gradually disappear and uniformly distributed nano-bumps are formed on the film. As the RF power increases, the aspect ratio of the nano-bumps gradually increases, and obvious nanostructures gradually form. This is due to the different crystallization areas of the PVC material.
  • PVC includes crystalline areas and amorphous areas, and ICP has different etching rates in different areas.
  • Amorphous regions with low crystallinity preferentially dissociate at high levels of etching, while crystalline regions exhibit low levels of etching, resulting in the formation of nanomaterials on the surface.
  • the RF power increases, the surface roughness increases and the etching becomes more uniform.
  • the power exceeds 25W the etching power is too high, the nano-bumps are entangled and aggregated, and the uniformity becomes poor.
  • the results show that the surface morphology of the ICP-etched PVC film has changed, and ICP-3 presents a more uniform and dense nanotextured structure.
  • Imaging analysis of the PVC film of Example 1-6 through a white light interferometer ( Figure 20-22): the arithmetic mean roughness (Ra) and average thickness (T) of the plasma etched film (ICP1-5) increase with the increase of radio frequency power First decrease and then increase.
  • Ra is the smallest and T is the largest, indicating that the PVC film was successfully etched by plasma dry etching.
  • the roughness of the etched film increased, and the specific surface area becomes larger, the surface charge carrying capacity becomes larger.
  • the six PVC films of Examples 1-6 were characterized by X-ray photoelectron spectroscopy (XPS, Figure 23) and energy spectroscopy (EDS, Figure 24). It was found that plasma etching could not only obtain a rough nanostructure on the film surface.
  • the ICP-etching method also introduces F elements and corresponding functional groups.
  • the untreated film (control) is mainly composed of C, and a small amount of O may be introduced during resin synthesis or film processing. of.
  • the F content gradually increases, while the C content and C/F ratio are the lowest (ICP-3, 21.56%), indicating that the highest element F content is introduced in this process (Fig. 25).
  • the results show that the ICP-3 etched PVC film has the highest F element content and the largest triboelectivity.
  • the results show that the output voltage of PVC films treated by plasma etching is higher than that of TENGs prepared from untreated films, indicating that plasma etching can effectively improve the triboelectric properties of PVC films.
  • the TENG prepared with ICP-3 film has the highest output voltage, indicating that the PVC film etched under the etching parameters of ICP-3 has the best triboelectric performance.
  • the preparation process of the soft-contact low-damping friction nanogenerator (Fig. 1) of the present invention is as follows:
  • the specific triboelectronegative material can be polyvinyl chloride (PVC), polyethylene (PE), fluorinated ethylene propylene copolymer (FEP), polytetrafluoroethylene (Teflon), Imide (PI), etc., can be used as triboelectronegative layer materials of triboelectric nanogenerators.
  • PVC polyvinyl chloride
  • PE polyethylene
  • FEP fluorinated ethylene propylene copolymer
  • Teflon polytetrafluoroethylene
  • Imide PI
  • the TENG is prepared through 3D printing; the integrated rotor 1 is fixed by the shaft, and a layer of triboelectronegative material 4 is attached to the outside of the rotor 1. There is an air gap between the triboelectronegative material 4 and the copper electrode 3 of the stator 2. 6; Four evenly distributed rectangular through holes are arranged on the cylinder of the stator 2 for fixing the plant fiber brush 5, wherein the plant fiber brush 5 passes through the rectangular through hole radially inward and is then fixed in the rectangular through hole. , the length of the plant fiber brush 5 is greater than the air gap 6, so that the plant fiber brush 5 is in contact with the triboelectronegative material attached to the rotor 1.
  • Flexible printed circuit board technology is used to produce grid-shaped flexible copper electrodes.
  • the copper electrodes include two groups of electrodes arranged at intervals. Each group of copper electrodes is connected, and the two groups of copper electrodes are not connected. Lead out two wires respectively.
  • the invention prepares five independent layer soft-contact low-damping friction nanogenerators that do not contain fiber brushes and contain plant fiber brushes of cotton, pampas grass, reed and foxtail grass.
  • the dynamic torque system shown in 3a was used to test the output electrical signals of five triboelectric nanogenerators, and then compare the ability of different plant fiber brushes to supplement charge as soft contact materials.
  • a multimeter was used to measure the output voltage (Figure 3b), output current (Figure 3c) and transferred charge amount (Figure 3d) of the PFB-TENG under the conditions of brushless, foxtail grass, reed, pampas grass and cotton brushes.
  • Figure 4 is an SEM characterization picture of four plant fibers: cotton, pampas grass, reed and foxtail grass.
  • Figure 5 is the FT-IR characterization diagram of four plant fibers. The left picture shows that the four plant fiber brushes contain characteristic groups of cellulose, and their main components are cellulose. The right picture shows that green foxtail grass, reed, cattail There is a red shift in the group at 3412 cm -1 of reed and cotton fibers. It is worth noting that this red shift pattern is also consistent with the order of triboelectric positivity of the five plant fiber brushes.
  • Figure 5 is an SEM characterization picture of the triboelectronegative material PVC.
  • the PVC membrane was washed three times with ethanol and water, and dried at 40°C.
  • Figure 6a is an SEM image of the PVC film after cleaning. The scratches on the film may be caused by the production and transportation of the PVC film.
  • Figure 6b is an SEM image of cleaned PVC and copper electrodes after 30,000 cycles of friction. It can be seen from the image that many scratches have occurred on the film.
  • Figure 6c is an SEM image of the PVC film after 30,000 cycles of friction with a cotton fiber brush. There are almost no scratches on the film, which is similar to the surface condition of the PVC film after cleaning. The results show that using cotton fiber brushes as soft contact dielectric materials can effectively reduce the wear of the triboelectronegative material PVC and increase the durability of the TENG.
  • Figure 6 shows the FT-IR characterization diagram of four plant fibers. From the infrared characterization, it can be seen that the main component of the four plant fiber brushes is cellulose.
  • Figure 7 shows the working damping when four different plant fiber brushes are used as supplementary charge materials. It can be seen from the figure that the damping produced by the four plant fiber brushes from large to small is: dogtail grass brush, reed hair Brush, pampas grass brush, cotton brush. The damping of the four types of plant brushes are all less than 0.06N ⁇ m, among which cotton has the smallest damping at different rotation speeds, all less than 0.05N ⁇ m.
  • Figure 8 is a histogram of point integral values for the hydroxyl content of four types of cellulose brushes. Among them, cotton has the highest hydroxyl content, and hydroxyl is an electron-donating group, so cotton has the strongest electron-donating ability. The content of the four cellulose hydroxyl groups is positively correlated with the electron-donating ability of cellulose, that is, the more hydroxyl groups there are, the stronger the electron-donating ability.
  • Figure 9 shows the cyclic stability of the soft-contact low-damping friction nanogenerator prepared based on cotton fiber.
  • the experimental results show that the output charge of the friction nanogenerator has almost no decrease after 30,000 cycles, indicating that the designed plant fiber wool
  • the soft-contact low-damping friction nanogenerator with a brush base (taking cotton brush as an example) has good working stability.
  • Figure 10 shows the matching voltage and output power density of a soft-contact low-damping friction nanogenerator prepared based on cotton fiber under different external resistances.
  • the maximum power density can reach 0.32W/m 2 .
  • triboelectronegative materials can be polyvinyl chloride (PVC), polyethylene (PE), fluorinated ethylene propylene copolymer (FEP), polytetrafluoroethylene (Teflon), polyamide Imine (PI), etc., can be used as triboelectronegative layer materials of triboelectric nanogenerators.
  • PVC polyvinyl chloride
  • PE polyethylene
  • FEP fluorinated ethylene propylene copolymer
  • Teflon polytetrafluoroethylene
  • PI polyamide Imine
  • Flexible printed circuit board technology is used to produce grid-shaped flexible copper electrodes.
  • the copper electrodes include two groups of electrodes arranged at intervals. Each group of copper electrodes is connected, and the two groups of copper electrodes are not connected. Lead out two wires respectively, as shown in Figure 11.
  • the two lead wires are connected to the two pins of the AC end of the rectifier bridge.
  • the other two pins of the rectifier bridge are connected to the external power receiving equipment to form a complete plant cellulose brush-based friction nanogenerator (PFB). -TENG).
  • the PFB-TENG and the waterwheel are fixed on the same shaft.
  • the waterwheel drives the operation of the PFB-TENG through the shaft under the action of the water flow, realizing the collection of low-flow water flow energy.
  • Reference Example 1 Use a cotton brush to prepare a cellulose-based soft-contact low-damping triboelectric nanogenerator device.
  • Two wires are drawn from the copper electrode of the triboelectric nanogenerator device and connected to the two electrodes of a multimeter.
  • the frictional nanogenerator device is driven to move under the action of water flow at different flow rates (0.5, 0.6, 0.7, .0.8, 0.9 and 1m 3 /h), and a multimeter is used to measure the charge and current output on the TENG electrode.
  • Figure 14 shows the transfer charge (Figure 14a) and short-circuit current (Figure 14b) of PFB-TENG under the action of water flow at different flows.
  • Experimental results show that the PFB-TENG made of cotton can collect water flow energy at different flow rates of 0.5, 0.6, 0.7, .0.8, 0.9 and 1m 3 /h, and can achieve a minimum low flow rate of 0.5m 3 /h.
  • Experimental results show that plant fiber-based soft-contact low-damping friction nanopower generation devices can achieve low-damping water flow energy harvesting.
  • Reference Example 1 A cellulose-based soft-contact low-damping triboelectric nanogenerator device was prepared using a cotton brush. Two wires were drawn from the copper electrode of the triboelectric nanogenerator device and connected to both sides of the rectifier bridge. After rectification, the capacitor was charged.
  • Figure 15 is an equivalent circuit diagram of the plant fiber-based soft-contact low-damping friction nano-power generation device used for collecting irrigation energy according to the present invention to supply power to a load resistor or capacitor.
  • Figure 16 is a graph of the voltage changes over time when the PFB-TENG is driven by water flow to charge different capacitors.
  • Reference Example 1 Use cotton brushes to prepare a cellulose-based soft-contact low-damping triboelectric nanogenerator device.
  • the copper electrodes of the triboelectric nanogenerator device lead out two wires and connect them to both sides of the rectifier bridge. After rectification, the capacitor is charged, and the energy is stored through the capacitor. Soil sensor function.
  • Figure 17 is the voltage curve on the PFB-TENG powered soil sensor driven by water flow for several working cycles. Experimental results show that PFB-TENG can collect water flow energy and power agricultural sensors, and can be used as a power source for sensors in smart agriculture.
  • Preparation of cotton fiber brush-based triboelectric nanogenerator including rotor 1, stator 2, copper electrode 3, triboelectronegative material 4 and cotton fiber brush 5; rotor 1 is located in stator 2, and the inner circumferential surface of stator 2 is covered with There are copper electrodes 3 and at least one place on the outer circumferential surface of the rotor 1 with a triboelectronegative material 4.
  • the triboelectronegative material 4 does not contact the copper electrode 3 and has an air gap 6; the inner circumferential surface of the stator 2 is also provided with at least one plant.
  • Fiber brush 5 The triboelectronegative material is controlled with untreated PVC film.
  • Preparation of cotton fiber brush-based friction nanogenerator including rotor 1, stator 2, copper electrode 3, triboelectronegative material 4 and plant fiber brush 5; rotor 1 is located in stator 2, and the inner circumferential surface of stator 2 is covered with There are copper electrodes 3 and at least one place on the outer circumferential surface of the rotor 1 with a triboelectronegative material 4.
  • the triboelectronegative material 4 does not contact the copper electrode 3 and has an air gap 6; the inner circumferential surface of the stator 2 is also provided with at least one plant.
  • Fiber brush 5 uses ICP-etched PVC film.

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Health & Medical Sciences (AREA)
  • Composite Materials (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Materials Engineering (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)

Abstract

一种植物纤维基和改进摩擦电负性材料的摩擦纳米发电机、发电装置。转子（1）位于定子（2）内，定子（2）内周有铜电极（3），转子（1）外周有摩擦电负性材料（4），摩擦电负性材料（4）和铜电极（3）不接触、具有空气间隙（6）；定子（2）内周还设有植物纤维毛刷（5）；转子（1）在旋转过程中摩擦电负性材料（4）和植物纤维毛刷（5）刮擦软接触传递电荷；转子（1）和水车驱动机构的驱动轴（8）同轴连接，水流作用下摩擦纳米发电机运转；摩擦电负性材料（4）通过对膜刻蚀成纳米纹理化结构再沉积氟碳层的方式获得。

Description

植物纤维基和改进摩擦电负性材料的摩擦纳米发电机、发电装置 技术领域
本发明涉及了新能源技术领域的一种摩擦纳米发电机，尤其涉及一种植物纤维毛刷基和改进摩擦电负性材料的软接触低阻尼摩擦纳米发电机、一种用于低流速水流能收集的植物纤维基软接触低阻尼摩擦纳米发电装置。
背景技术
水流能是农业环境中最普遍、最可持续、最易获取的清洁可再生能源之一，其数量巨大，有望实现大规模开发和应用。由于摩擦纳米发电机(TENG)具有功率密度高、重量轻、成本低、材料和结构多样等优点，因此TENG被用于有效地收集水能。目前，TENG主要收集海洋能源，但对农业环境中的低速和低频流动能源(如河流能源和灌溉能源)的研究较少。自然界中的河流水流流速以及农业灌溉用水的水流流速比较慢，传统的TENG运行阻尼比较大，一般无法收集低流速的水流能。
对于传统的TENG，直接接触摩擦副之间的充分摩擦是产生更多摩擦电荷和更高输出功率密度的必要条件，但长期运行后可能会导致严重磨损，降低设备寿命周期。到目前为止，已经做出了各种努力来提高设备的耐用性，例如滚动充电、摆锤运动、电刷和自动模式切换的结构设计。在之前的工作中，TENG的软接触操作模式已被证实是提高耐久性的有效策略。
软接触TENG可以避免摩擦副之间的直接接触，提高器件的耐用性，减小器件运行过程的阻尼。在之前的工作中，TENG的软接触操作模式通常采用的是动物毛发作为软接触材料和电荷传递介质。植物纤维具有柔软的特性，当与另一摩擦电层摩擦时，可以保持紧密接触，阻力较小。通过在TENG中引入柔性植物纤维作为摩擦电材料，不仅可以向电介质表面注入更多的正摩擦电荷，而且可以大大减少材料的磨损，提高TENG的输出密度的增加和设备的耐用性。随着输出密度的增加和设备耐用性的提高，外部驱动力可以显著降低。
目前还没有基于植物纤维软接触材料制备的TENG，因此本文设计并制造了一种基于植物纤维的软接触式摩擦纳米发电机(PFB-TENG)用于低流速河流和灌溉能收集。柔软的棉花等植物纤维毛刷是一种典型的正摩擦能材料，而蚀刻聚氯乙烯(PVC)由于其较大的表面粗糙度和氟的引入，具有很强的摩擦电负性，因此摩擦副可以有效地将微弱的机械能转化为电能。与各种硬接触竞争对手相比，PFB-TENG在相同的扭矩和速度下表现出更多的转移电荷、更高的输出性能和更好的耐用性，这意味着设计的PFB-TENG可以在低流量灌溉和河流能量收集环境中最大限度地利用弱离散动能。
发明内容
为了解决背景技术中存在的问题和填补空白，本发明的目的在于将植物纤维作为一种新的摩擦电材料引入摩擦发电机中，并且创新地将植物纤维毛刷基的软接触低阻尼摩擦纳米发电机用于水流能的收集，形成一种用于水流能收集的植物纤维基软接触 低阻尼摩擦纳米发电装置。本发明还利用基于感应耦合等离子干法刻蚀技术提高聚氯乙烯(PVC)膜摩擦电输出性能，创新地通过刻蚀增大PVC的表面粗糙度同时覆盖一层氟碳材料在膜表面，提高摩擦电负性材料的摩擦电输出性能，进而也提高摩擦发电性能。
本发明在靠近转子的定子表面上的电极之间设置软接触的纤维毛刷，用于实现铜电极和聚氯乙烯膜的软接触以传递电荷。
本发明的技术方案：
一、一种植物纤维毛刷基的软接触低阻尼摩擦纳米发电机：
包含转子、定子、铜电极、摩擦电负性材料和植物纤维毛刷；转子位于定子内，定子内周面覆盖设有铜电极，转子外周面至少一处设置有摩擦电负性材料，摩擦电负性材料和铜电极不接触、具有空气间隙；定子内周面还设有至少一处植物纤维毛刷。
所述的转子在旋转过程中摩擦电负性材料和植物纤维毛刷刮擦软接触以传递电荷。
本发明所述的低阻尼是指阻尼低于0.06N·m。实例中采用狗尾巴草毛刷、芦苇毛刷、蒲苇毛刷以及棉花毛刷作为补充电荷材料时，装置的工作阻尼均小于0.06N·m；其中棉花毛刷在不同转速下产生的阻尼最小，均小于0.05N·m，最小可以达到0.015N·m。
所述的植物纤维毛刷用天然的植物纤维制备，包括棉花、芦苇、蒲苇和狗尾巴草等含有柔软纤维材料的植物。
所述的转子外周面沿周向设置有多处摩擦电负性材料。
所述的铜电极是由沿轴向方向穿叉间隔布置的叉指电极布置构成，叉指电极布置在基底上，基底固定覆盖在定子内周面。
所述的摩擦电负性材料固定贴附在基底上，且和铜电极不接触。
所述的软接触低阻尼摩擦纳米发电机用于灌溉能的收集。
本发明的摩擦纳米发电机可以工作在独立层模式下，具体为：所述软接触低阻尼摩擦纳米发电机包含独立的摩擦电负性材料和一对固定的插指铜电极。摩擦电负性层在两电极间移动摩擦层在两电极间移动通过感应电荷周期性的变化使电势发生变化，然后电势的变化驱动电子在两电极两端流动完成发电过程。其中，定子内周面还设有至少一处植物纤维毛刷用于为摩擦电负性材料补充电荷。与单电极模式类似，这种工作模式不要求将电极镀在器件移动的部分，这种设计方便了器件的制作与工作；同时还可提供比单电极模式更高的能量转化效率，因其不会受单电极模式屏蔽效应的干扰，所以可以提供更高的输出性能。
二、一种用于低流速水流能收集的植物纤维基摩擦纳米发电装置：
所述装置包括上述摩擦纳米发电机和水车驱动机构的两部分；摩擦纳米发电机的转子和水车驱动机构的驱动轴同轴连接，在水流的作用下驱动水车驱动机构运行带动摩擦纳米发电机运转，水车在外界灌溉水流能的作用下带动TENG中的转子转动，通过TENG实现灌溉能向电能的转化。
本发明所述的低流速是指流速低于1m 3/h。本发明可以实现0.5，0.6，0.7，.0.8，0.9和1m 3/h不同流速水流能的收集，最小可以实现0.5m 3/h的低流速水流能收集。
所述的水车驱动机构包括水车、驱动轴和轴承座，水车套装在驱动轴上，驱动轴支撑安装于轴承座，驱动轴和转子同轴连接。
所述植物纤维基摩擦纳米发电装置的用于灌溉能或者低流速的水流能收集。
所述的摩擦电负性材料采用以下方式制备获得：用感应耦合等离子体干法刻蚀仪对膜的上表面进行刻蚀处理，使得在膜的上表面形成纳米纹理化结构；再用感应耦合等离子体刻蚀仪对膜的上表面进行沉积处理，使得在纳米纹理化结构上表面沉积一层氟碳层。
本发明利用感应耦合等离子干法刻蚀提高摩擦电负性材料的摩擦电输出性能。
所述的膜为聚氯乙烯膜。
所述的摩擦电负性材料的制备方法安装以下步骤：
聚氯乙烯膜的清洗：取聚氯乙烯膜置于无水乙醇中超声清洗5-10min，然后用去离子水超声清洗5-10min，再经过干燥得到干净的聚氯乙烯膜；
将清洗干净的聚氯乙烯膜放置于用于等离子刻蚀承载载具里，送入等离子干法刻蚀设备腔体；
对等离子干法刻蚀设备进行抽真空，维持压力稳定，过程分为刻蚀和沉积两个阶段；
完成后控制等离子干法刻蚀设备达到常压状态，取出聚氯乙烯膜。
所述刻蚀和沉积两个阶段具体为：
第一阶段：通入15sccm的O 2，45sccm的CHF 3，控制ICP功率均为100W，刻蚀时间为10min；
第二阶段：通入50sccm C 4F 8，控制ICP功率设为100W，沉积时间为10s。
本发明的摩擦负电性材料可在摩擦纳米发电机中的应用。
本发明提出的植物纤维材料是一种柔软的良好的电荷补充材料，在器件运行的过程可以补充器件的电荷损耗，同时可以减少铜电极和聚氯乙烯膜直接接触的磨损，提高了TENG的耐久性和输出功率密度，降低TENG运行过程中的阻尼。
本发明的有益效果是：
与之前报道的独立层式软接触低阻尼摩擦纳米发电机相比，本发明首次将柔软的天然植物纤维毛刷引入摩擦纳米发电机TENG的制备。降低TENG运转过程中的阻尼，从而实现低流速水流能的收集。植物纤维毛刷的引入提高了TENG的耐久性和输出功率密度，降低TENG运行过程中的阻尼，因此植物纤维基TENG可以在较小的力驱动下工作。
本发明以柔软的植物纤维毛刷作为电荷传递介质，避免摩擦副之间的直接接触，降低器件运转过程的阻尼，提高器件的耐用性。植物纤维具有柔软的特性，当与另一摩擦介电层摩擦时，可以保持紧密接触，阻力较小。
本发明通过在摩擦纳米发电机TENG中引入柔性植物纤维作为摩擦电材料，不仅可以向电介质表面注入更多的正摩擦电荷，而且可以大大减少材料的磨损，提高摩擦纳米发电机TENG的输出密度的增加和设备的耐用性，实现对低流速水流能的收集。
本发明还通过等离子刻蚀技术对PVC膜的上表面进行刻蚀处理一段时间，使得在PVC膜上表面形成纳米纹理化结构，刻蚀之后的PVC膜粗糙度增加，比表面积变大，表面电荷承载能力增大，进而摩擦电输出性能变大；后通过等离子刻蚀对PVC膜的上表面进行沉积处理一段时间，使得在PVC膜纳米纹理化结构上表面沉积一层氟碳层。在薄膜表面覆盖一层氟碳层，能够提高膜的得电子能力，摩擦电负性增加。
附图说明
图1为植物纤维毛刷基的摩擦纳米发电机的结构示意图。
图2为四种植物纤维毛刷的光学显微图。
图3为利用基于四种植物纤维毛刷制备的PFB-TENG的输出性能比较。图3a为用于测试PFB-TENG输出性能的动态扭矩系统示意图；采用无毛刷、狗尾巴草、芦苇、蒲苇和棉花毛刷情况下PFB-TENG的输出电压(图3b)、输出电流(图3c)和转移电荷量(图3d)。从图3b-d可以看出采用棉花毛刷作为软接触材料时PFB-TENG的输出电性能最大。
图4为四种植物纤维的SEM图。
图5为摩擦电负性材料PVC的SEM表征图。其中5a是原始的PVC膜的SEM图；5b是PVC与铜电极循环摩擦3万次后的SEM图；5c是PVC膜与棉花纤维毛刷循环摩擦3万次后的SEM图。从图种可以看出棉花毛刷与PVC摩擦和后产生的磨损很小，说明采用棉花毛刷作为补充电荷材料可以提高器件的运行稳定性。
图6为四种植物纤维的FT-IR表征图。
图7为采用四种不同的植物纤维毛刷作为补充电荷材料时的工作阻尼，从图种可以看出四种植物毛刷产生的阻尼从大到小依次为：狗尾巴草毛刷、芦苇毛刷、蒲苇毛刷、棉花毛刷。四种植物毛刷的阻尼均小于0.06N·m，其中棉花在不同转速下产生的阻尼最小，均小于0.05N·m。
图8为用多功能红外纳米光谱仪对四种纤维素毛刷在3412cm -1羟基含量的点数积分值柱状图。
图9为采用棉花纤维作为软接触材料的PFB-TENG的循环稳定性测试结果图。
图10为PFB-TENG的功率密度曲线图。
图11是植物纤维基摩擦纳米发电装置的结构示意图。
图12是四种植物纤维毛刷的共聚焦显微图和SEM图，从左至右依次是棉花、蒲苇、芦苇和狗尾巴草毛刷。
图13是四种不同的植物纤维基摩擦纳米发电装置的在不同转速下运转时的阻尼。
图14是在不同流量的水流作用下PFB-TENG的转移电荷(图14a)和短路电流(图14b)。
图15是本发明所涉及的用于灌溉能收集的植物纤维基软接触低阻尼摩擦纳米发电装置为负载电阻或者电容器供电的等效电路图。
图16是在水流驱动下的PFB-TENG给不同电容充电的电压随时间变化图。
图17是在水流驱动下的PFB-TENG供电的土壤传感器上的电压曲线有几个工作周期图。
图18是植物纤维基摩擦纳米发电机的立体图。
图19是6种实施例制备的PVC膜的SEM图；
图20是6种实施例制备的PVC膜白光干涉仪成像图，表征膜的粗糙度；
图21是6种实施例制备的PVC膜白光干涉仪三维成像图，表征膜的厚度；
图22是6种实施例制备的PVC膜的粗糙度和厚度；
图23是6种实施例制备的PVC膜的XPS表征图；
图24是6种实施例制备的PVC膜的EDS表征图；
图25是实施例1-5通过等离子干法刻蚀制备的PVC膜的碳氟比图；
图26是用实施例1-6制备的PVC膜构建的垂直-接触分离模式TENG的示意图；
图27是用实施例1-6制备的PVC膜构建的垂直-接触分离模式TENG输出的电压信号。
图28是未处理的control(图28a-c)和ICP-3(图28d-e)刻蚀的PVC膜制备的TENG在不同转速下的转移电荷量,输出电流和输出电压。
图29是未处理的PVC膜(control)制备的TENG在不同匹配电阻下的输出功率密度。
图30是ICP-3刻蚀处理的PVC膜制备的TENG在不同匹配电阻下的输出功率密度。
表1是6种实施例的具体处理工艺以及制备膜的厚度和粗糙度统计。
图中：转子1、定子2、铜电极3、摩擦电负性材料4、植物纤维毛刷5、空气间隙6、水车7、驱动轴8、轴承座9。
具体实施方式
下面结合附图及具体实施例对本发明作进一步详细说明。
如图1所示，具体实施的摩擦纳米发电机包含转子1、定子2、铜电极3、摩擦电负性材料4和植物纤维毛刷5；转子1位于定子2内，定子2内周面覆盖设有栅格状的铜电极3，转子1外周面至少一处设置有摩擦电负性材料4，摩擦电负性材料4和铜电极3不接触、具有空气间隙6，空气间隙为0.5-1.5mm，定子2内周面还设有至少一处柔软的植物纤维毛刷5。
如图18所示，具体实施的摩擦纳米发电装置包括摩擦纳米发电装置和水车驱动机构的两部分；摩擦纳米发电机的转子1和水车驱动机构的驱动轴8同轴连接，转子1和水车驱动机构的驱动轴8同轴连接，在水流的作用下驱动水车驱动机构中的水车7转动运行带动摩擦纳米发电装置运转。转子1在旋转过程中摩擦电负性材料4和植物纤维毛刷5刮擦软接触以传递电荷，能够提高摩擦纳米发电性能。
植物纤维毛刷5用天然的植物纤维制备，包括棉花、芦苇、蒲苇和狗尾巴草等含有柔软纤维材料的植物，其中毛刷与定子上的摩擦电负性材料接触。
摩擦电负性材料4固定贴附在基底上，且和铜电极3不接触。具体实施中是在转子的外周面上粘贴聚酰亚胺胶带，将摩擦电负性材料4粘贴在转子的外周面上。
转子1在旋转过程中摩擦电负性材料4和植物纤维毛刷5刮擦软接触以传递电荷，能够提高摩擦纳米发电性能。
转子1外周面沿周向设置有多处摩擦电负性材料4，多处摩擦电负性材料4沿周向间隔均匀布置。摩擦电负性材料4固定贴附在基底上，且和铜电极3不接触。具体实施中是在基底上开设安装槽，将摩擦电负性材料4固定在安装槽中。
铜电极3是由沿轴向方向穿叉间隔布置的叉指电极布置构成，叉指电极布置在基底上，基底固定覆盖在定子2内周面。间隔的铜电极串联在一起，相邻的两个铜电极之间是不连通的，即铜电极分为不连通的两组。壳体的内壁贴附有一层柔性印刷电路板技术FPCB制备的栅格状的铜电极，铜电极的栅格宽度与的转子的扇叶宽度一致。
具体实施中，转子1和定子2均为圆筒状，相互套装，可以由3D打印制备而成。圆筒状定子采用3D打印制备，在圆筒壁上开了四个均匀分布的槽，用于固定植物纤维毛刷5。转子也采用3D打印制备，其中转子包含4个或者4个以上扇叶，转子的中心是空心结构，基于该空心结构将转子固定在轴上。
定子2壳体的内壁贴附有一层柔性印刷电路板技术FPCB制备的栅格状的铜电极，铜电极的栅格宽度与的转子的扇叶宽度一致。
A)摩擦电负性材料4材料的改进实施和测试：
具体实施中，设置一个对照组(Control)和5个实验组(ICP-1，ICP-2，ICP-3，ICP-4和ICP-5)。
实验组的处理制备过程如下：
(1)PVC膜的清洗：取PVC薄膜置于无水乙醇中超声清洗5-10min，然后用去离子水超声清洗5-10min，再经过干燥得到干净的PVC薄膜；
(2)将清洗干净的PVC膜放置于用于等离子刻蚀承载载具里，送入等离子干法刻蚀设备腔体；
(3)对设备进行抽真空，维持压力稳定，过程分为两个阶段：
实验组的PVC膜刻蚀分为两个阶段，详见表1：
表1
Figure PCTCN2022109945-appb-000001
其中
第一阶段：通入15sccm O 2，45sccm CHF 3，ICP功率均为100W，ICP-1，ICP-2，ICP-3，ICP-4和ICP-5的RF功率分别为10W、20W、25W、30W、40W，刻蚀时间为10min；
第二阶段：通入50sccm C 4F 8，ICP功率设为100W，ICP-1，ICP-2，ICP-3，ICP-4和ICP-5的RF功率分别为10W、20W、25W、30W、40W，刻蚀时间为10s；
对照组(Control)在两个阶段都不通气体作为对照组；5个实验组(ICP-1，ICP-2，ICP-3，ICP-4和ICP-5)分别分为2个处理阶段(参考表1)，5个实验组的区别是第二阶段的RF处理功率不同。
(4)完成刻蚀后，使设备达到常压状态；
(5)完成刻蚀工艺，取出PVC膜。
对照组的PVC膜在经过上述步骤(1)的洗净后不做任何处理。
实施例1：
所述的一种基于感应耦合等离子干法刻蚀技术提高聚氯乙烯(PVC)膜摩擦电输出性能的方法包括如下步骤：
步骤S1：PVC膜的清洗：取裁剪成4*4cm的PVC薄膜置于无水乙醇中超声清洗10min，然后用去离子水超声清洗10min，再经过干燥得到干净的PVC薄膜；
步骤S2：将清洗干净的PVC膜放置于用于等离子刻蚀承载载具里，送入等离子干法刻蚀设备腔体；
步骤S3：对设备进行抽真空，维持压力稳定，刻蚀过程分为两个阶段。第一阶段：通入15sccm O2，45sccm CHF 3，ICP功率为100W，RF功率为10W，刻蚀时间为10min；第二阶段：通入50sccm C4F8，ICP功率设为100W，RF功率为10W，刻蚀时间为10s；
步骤S4：完成刻蚀后，使设备达到常压状态；
步骤S5：完成刻蚀工艺，取出刻蚀后的PVC膜ICP-1。
实施例2：
实施例2的步骤与实施例1的步骤相同，其区别在于：
步骤S3中，RF功率为20W；
步骤S5中，取出刻蚀后的PVC膜ICP-2；
实施例3：
实施例2的步骤与实施例1的步骤相同，其区别在于：
步骤S3中，RF功率为25W；
步骤S5中，取出刻蚀后的PVC膜ICP-3；
实施例4：
实施例2的步骤与实施例1的步骤相同，其区别在于：
步骤S3中，RF功率为30W；
步骤S5中，取出刻蚀后的PVC膜ICP-4；
实施例5：
实施例2的步骤与实施例1的步骤相同，其区别在于：
步骤S3中，RF功率为40W；
步骤S5中，取出刻蚀后的PVC膜ICP-5；
实施例6：
取裁剪成4*4cm的PVC薄膜置于无水乙醇中超声清洗10min，然后用去离子水超声清洗10min，再经过干燥得到干净的PVC膜作为对照组，命名为control膜。
实施例1-6制备的6种PVC膜的扫描式电子显微镜(SEM)表征图如图19所示。未经处理的control膜表面有一些随机分布的微裂纹，这些微裂纹是在运输和清洗过程中产生的。经过ICP刻蚀后，这些微裂纹逐渐消失，在薄膜上形成了分布均匀的纳米凸点。随着RF功率的增大，纳米凸点的长径比逐渐增大，逐渐形成明显的纳米结构，这是由于PVC材料结晶区域的不同造成的。PVC包括结晶区和非晶区，ICP在不同的区域有不同的刻蚀速率。低结晶度的非晶区在高水平的刻蚀时优先解离，而晶区表现出低水平的刻蚀，导致在表面形成纳米材料。随着射频功率的增加，表面粗糙度增加，刻蚀更加均匀。当功率超过25W时，刻蚀功率过大，纳米凸点发生纠缠和聚集、均匀性变差。结果表明，ICP刻蚀PVC薄膜的表面形貌发生了变化，ICP-3呈现出更均匀致密的纳米织构结构。
通过白光干涉仪对实例1-6的PVC膜进行成像分析(图20-22)：等离子刻蚀薄膜(ICP1-5)的算术平均粗糙度(Ra)和平均厚度(T)随射频功率的增加先减小后增大。对于未经处理的薄膜(control)，Ra最小，T最大，表明用等离子干法刻蚀方法成功地刻蚀了PVC薄膜，刻蚀后的膜相较于未处理的膜粗糙度增加，比表面积变大，表面电荷承载能力变大。
通过X射线光电子能谱(XPS，图23)和能谱(EDS，图24)对实施例1-6的6种PVC膜进行表征，结果发现等离子刻蚀除了在薄膜表面获得粗糙的纳米织构结构外，ICP-刻蚀方法还引入了F元素和相应的官能团，如图23所示，未经处理的薄膜(对照)主要由C组成，少量O可能是在树脂合成或薄膜加工过程中引入的。对于ICP刻蚀薄膜，随着射频功率的增加，F含量逐渐增加，而C含量和C/F比最低(ICP-3，21.56％)，表明在此过程中引入了最高的元素F含量(图25)。结果表明，ICP-3刻蚀PVC薄膜的F元素含量最高，摩擦电负性最大。
在实施例1-6制备的6种PVC膜背后贴上铜电极，并与铜箔组成垂直接触-分离模式的TENG(图26)，从上下两个铜箔上引出两根导线分别连接万用表的两端，控制在TENG上施加相同的力，用万用表记录TENG输出的电信号(图27)。结果表明等离子刻蚀处理后的PVC膜均比未处理的膜制备的TENG输出电压高，说明等离子刻蚀可以有效提升PVC膜的摩擦电性能。其中ICP-3膜制备的TENG输出电压最高，说明ICP-3的刻蚀参数下刻蚀的PVC膜摩擦电性能最好。
B)摩擦纳米发电机的具体实施：
本发明软接触低阻尼摩擦纳米发电机(图1)的制备过程如下：
首先，制备植物纤维毛刷：将天然的植物纤维自然风干，将纤维用胶水固定在两条亚克力长条中，制备成植物纤维毛刷(图2)。
接着，制备摩擦电负材料：具体实施的摩擦电负材料可以采用聚氯乙烯(PVC)、聚乙烯(PE)、氟化乙烯丙烯共聚物(FEP)、聚四氟乙烯(Teflon)、、聚酰亚胺(PI)等，均可作为摩擦纳米发电机的摩擦电负层材料。
最后，通过3D打印制备TENG；一体式的转子1通过轴固定，转子1的外侧贴附有一层摩擦电负性材料4，摩擦电负性材料4和定子2的铜电极3之间具有空气间隙6；定子2的圆筒上布置有四个均匀分布的矩形通孔用于固定植物纤维毛刷5，其中植物纤维毛刷5径向向内穿设过矩形通孔后固定在矩形通孔中，植物纤维毛刷5长度大于空气间隙6，使得植物纤维毛刷5与转子1上贴附的摩擦电负性材料接触。采用 柔性印刷电路板技术(FPCB)制作栅格状的柔性铜电极，铜电极包括间隔布置的两组电极，每组铜电极连通，两组铜电极之间是不连通的，两组铜电极上分别引出两根导线。
本发明制备了不含有纤维毛刷以及含有棉花、蒲苇、芦苇和狗尾巴草植物纤维毛刷的五种独立层式软接触低阻尼摩擦纳米发电机。用如3a所示的动态扭矩系统测试五种摩擦纳米发电机的输出电信号，进而比较不同植物纤维毛刷作为软接触材料补充电荷的能力。采用万用表测量无毛刷、狗尾巴草、芦苇、蒲苇和棉花毛刷情况下PFB-TENG的输出电压(图3b)、输出电流(图3c)和转移电荷量(图3d)。从图3b-d可以看出采用棉花毛刷作为软接触材料时PFB-TENG的输出电性能最大，实验结果：(1)表明采用植物纤维毛刷作为软接触材料相较于无毛刷的情况，可以显著提高TENG的输出电信号；(2)棉花纤维毛刷补充电荷的能力高于其它三种植物纤维毛刷。
图4是棉花、蒲苇、芦苇和狗尾巴草四种植物纤维的SEM表征图。图5是四种植物纤维的FT-IR表征图，左图表明四种植物纤维毛刷含有纤维素的特征基团，它们的主要成分都是纤维素，右图表明狗尾巴草、芦苇、蒲苇和棉花纤维的在3412cm -1处的基团存在红移。值得注意的是这种红移规律也符合五种植物纤维毛刷的摩擦电正性的顺序。
图5是摩擦电负性材料PVC的SEM表征图。将PVC膜用乙醇和清水分别清洗三次，在40℃下烘干。图6a是清洗干净后PVC膜的SEM图，膜上面划痕可能是PVC膜在生产和运输过程产生的。图6b是清洗干净的PVC与铜电极循环摩擦3万次后的SEM图，从图种可以看出膜上产生了很多划痕。图6c是PVC膜与棉花纤维毛刷循环摩擦3万次后的SEM图，膜上几乎没有产生划痕，与清洗后的PVC膜表面情况类似。结果表明采用棉花纤维毛刷作为软接触介电材料可以有效减少摩擦电负性材料PVC的磨损，增加TENG的耐久性。
图6为四种植物纤维的FT-IR表征图，从红外表征可以看出四种植物纤维毛刷的主要成分是纤维素。
图7为采用四种不同的植物纤维毛刷作为补充电荷材料时的工作阻尼，从图种可以看出四种植物毛刷产生的阻尼从大到小依次为：狗尾巴草毛刷、芦苇毛刷、蒲苇毛刷、棉花毛刷。四种植物毛刷的阻尼均小于0.06N·m，其中棉花在不同转速下产生的阻尼最小，均小于0.05N·m。
图8为对四种纤维素毛刷羟基含量的点数积分值柱状图。其中棉花的羟基含量最多，羟基是一种给电子基团，因此棉花的给电子能力最强。四种纤维素羟基的含量与纤维素给电子能力顺序正相关，即羟基含量越多，给电子能力越强。
图9是基于棉花纤维制备的软接触低阻尼摩擦纳米发电机的循环稳定性，实验结果表明在循环工作三万次后摩擦纳米发电机的输出电荷量几乎没有下降，说明所设计的植物纤维毛刷基(以棉花毛刷为例)的软接触低阻尼摩擦纳米发电机的工作稳定性好。
图10是基于棉花纤维制备的软接触低阻尼摩擦纳米发电机的在不同外接电阻下的匹配电压和输出功率密度，最大功率密度可达0.32W/m 2。
C)摩擦纳米发电装置的具体实施：
本实施例的制备过程如下：
S1、制备植物纤维毛刷：将天然的植物纤维自然风干，将纤维用胶水固定在两条亚克力长条中，制备成植物纤维毛刷(图12)。
S2、制备摩擦电负材料：具体实施的摩擦电负材料可以采用聚氯乙烯(PVC)、聚乙烯(PE)、氟化乙烯丙烯共聚物(FEP)、聚四氟乙烯(Teflon)、聚酰亚胺(PI)等，均可作为摩擦纳米发电机的摩擦电负层材料。
S3、通过3D打印制备TENG；一体式的转子1通过轴固定，转子1的外侧贴附有一层摩擦电负性材料4，摩擦电负性材料4和定子2的铜电极3之间具有空气间隙6；定子2的圆筒上布置有四个均匀分布的矩形通孔用于固定植物纤维毛刷5，其中植物纤维毛刷5径向向内穿设过矩形通孔后固定在矩形通孔中，植物纤维毛刷5长度大于空气间隙6，使得植物纤维毛刷5与转子1上贴附的摩擦电负性材料接触。采用柔性印刷电路板技术(FPCB)制作栅格状的柔性铜电极，铜电极包括间隔布置的两组电极，每组铜电极连通，两组铜电极之间是不连通的，两组铜电极上分别引出两根导线，如图11。
S4、引出的两根导线接到整流桥交流端的两个引脚上，整流桥另一两个引脚与外部接收电能设备连接，组成一个完整的植物纤维素毛刷基摩擦纳米发电机(PFB-TENG)。
S5、PFB-TENG与水车固定在同一根轴上，水车在水流的作用下通过轴带动PFB-TENG的运行，实现低流速水流能的收集。
具体实施测试
接下来比较了四种不同植物纤维毛刷：棉花、蒲苇、芦苇和狗尾巴草植物纤维毛刷制备的独立层式软接触摩擦纳米发电装置在不同转速下的阻尼(图12)。扭矩测试系统比较不同植物纤维毛刷制备的摩擦纳米发电装置在不同转速下运行时的阻尼，进筛选阻尼小的PFB-TENG用于低流速水流能的收集。实验结果(图13)表明，采用狗尾巴草毛刷、芦苇毛刷、蒲苇毛刷以及棉花毛刷作为补充电荷材料时，装置的工作阻尼均小于0.06N·m；其中棉花毛刷在不同转速下产生的阻尼最小，均小于0.05N·m，最小可以达到0.015N·m。在相同的转速下，棉花纤维毛刷制备的PFB-TENG运行时产生的阻尼最小，因此棉花纤维更适合作为软接触材料用于制备低阻尼摩擦纳米发电装置。
参考实例1用棉花毛刷制备纤维素基软接触低阻尼摩擦纳米发电装置，摩擦纳米发电装置的铜电极引出两根导线接到万用表的两个电极上。在不同流速(0.5，0.6，0.7，.0.8，0.9和1m 3/h)的水流作用下驱动摩擦纳米发电装置运动，用万用表测量TENG电极上输出的电荷量和电流。图14是在不同流量的水流作用下PFB-TENG的转移电荷(图14a)和短路电流(图14b)。实验结果表明棉花制备的PFB-TENG可以实现0.5，0.6，0.7，.0.8，0.9和1m 3/h不同流速水流能的收集，最小可以实现0.5m 3/h的低流速水流能收集。实验结果表明植物纤维基软接触低阻尼摩擦纳米发电装置可以实现低阻尼水流能收集。
参考实例1用棉花毛刷制备纤维素基软接触低阻尼摩擦纳米发电装置，摩擦纳米发电装置的铜电极引出两根导线接到整流桥的两侧，整流之后为电容器充电。图15是本发明所涉及的用于灌溉能收集的植物纤维基软接触低阻尼摩擦纳米发电装置为负载电阻或者电容器供电的等效电路图。图16是在水流驱动下的PFB-TENG给不同电 容充电的电压随时间变化图。
参考实例1用棉花毛刷制备纤维素基软接触低阻尼摩擦纳米发电装置，摩擦纳米发电装置的铜电极引出两根导线接到整流桥的两侧，整流之后为电容器充电，通过电容器储能为土壤传感器功能。图17是在水流驱动下的PFB-TENG供电的土壤传感器上的电压曲线有几个工作周期。实验结果表明PFB-TENG可以实现水流能的收集并为农业传感器供电，可以作为智慧农业中传感器的电源。
实施例1：
制备棉花纤维毛刷基摩擦纳米发电机：包含转子1、定子2、铜电极3、摩擦电负性材料4和棉花纤维毛刷5；转子1位于定子2内，定子2内周面覆盖设有铜电极3，转子1外周面至少一处设置有摩擦电负性材料4，摩擦电负性材料4和铜电极3不接触、具有空气间隙6；定子2内周面还设有至少一处植物纤维毛刷5。其中摩擦电负性材料用未处理的PVC膜control。
用静电计测试未处理的PVC膜制备的TENG在不同转速下的转移电荷量，输出电流和电压如图11a-c所示。在不同匹配电阻下的输出功率密度如图11所示,其中ICP-3刻蚀PVC膜的最大功率密度为0.33W/m 2。
实施例2：
制备棉花纤维毛刷基摩擦纳米发电机：包含转子1、定子2、铜电极3、摩擦电负性材料4和植物纤维毛刷5；转子1位于定子2内，定子2内周面覆盖设有铜电极3，转子1外周面至少一处设置有摩擦电负性材料4，摩擦电负性材料4和铜电极3不接触、具有空气间隙6；定子2内周面还设有至少一处植物纤维毛刷5。其中摩擦电负性材料用ICP-刻蚀的PVC膜。
用静电计测试control膜制备的TENG在不同转速下的转移电荷量，输出电流和电压如图11d-e所示。在不同匹配电阻下的输出功率密度如图12所示，其中ICP-3刻蚀PVC膜的最大功率密度为1.14W/m 2，相较于未处理的PVC膜，TENG的输出功率密度提升了4倍左右。因此，通过刻蚀处理的PVC膜可以有效提升膜的摩擦电负性，提升TENG的输出功率密度。

Claims (12)

  1. 一种植物纤维毛刷基的软接触低阻尼摩擦纳米发电机，其特征在于：
    包含转子(1)、定子(2)、铜电极(3)、摩擦电负性材料(4)和植物纤维毛刷(5)；转子(1)位于定子(2)内，定子(2)内周面覆盖设有铜电极(3)，转子(1)外周面至少一处设置有摩擦电负性材料(4)，摩擦电负性材料(4)和铜电极(3)不接触、具有空气间隙(6)；定子(2)内周面还设有至少一处植物纤维毛刷(5)。
  2. 根据权利要求1所述的一种植物纤维毛刷基的软接触低阻尼摩擦纳米发电机，其特征在于：所述的植物纤维毛刷(5)用天然的植物纤维制备，包括棉花、芦苇、蒲苇和狗尾巴草等含有柔软纤维材料的植物。
  3. 根据权利要求1所述的一种植物纤维毛刷基的软接触低阻尼摩擦纳米发电机，其特征在于：所述的转子(1)外周面沿周向设置有多处摩擦电负性材料(4)。
  4. 根据权利要求1所述的一种植物纤维毛刷基的软接触低阻尼摩擦纳米发电机，其特征在于：所述的铜电极(3)是由沿轴向方向穿叉间隔布置的叉指电极布置构成，叉指电极布置在基底上，基底固定覆盖在定子(2)内周面。
  5. 根据权利要求1所述的一种植物纤维毛刷基的软接触低阻尼摩擦纳米发电机，其特征在于：所述的摩擦电负性材料(4)固定贴附在基底上，且和铜电极(3)不接触。
  6. 权利要求1-5任一所述软接触低阻尼摩擦纳米发电机的应用，其特征在于：用于灌溉能的收集。
  7. 一种用于低流速水流能收集的植物纤维基摩擦纳米发电装置，其特征在于：所述装置包括权利要求1-5任一所述摩擦纳米发电机和水车驱动机构的两部分；摩擦纳米发电机的转子(1)和水车驱动机构的驱动轴(8)同轴连接，在水流的作用下驱动水车驱动机构运行带动摩擦纳米发电机运转。
  8. 根据权利要求7所述的一种用于低流速水流能收集的植物纤维基摩擦纳米发电装置，其特征在于：所述的水车驱动机构包括水车(7)、驱动轴(8)和轴承座(9)，水车(7)套装在驱动轴(8)上，驱动轴(8)支撑安装于轴承座(9)，驱动轴(8)和转子(1)同轴连接。
  9. 权利要求7-8任一所述植物纤维基摩擦纳米发电装置的应用，其特征在于：用于灌溉能或者水流能收集。
  10. 权利要求1-5任一所述的摩擦纳米发电机或者权利要求7-8任一所述的 摩擦纳米发电装置，其特征在于：所述的摩擦电负性材料(4)采用以下方式制备获得：用感应耦合等离子体干法刻蚀仪对膜的上表面进行刻蚀处理，使得在膜的上表面形成纳米纹理化结构；再用感应耦合等离子体刻蚀仪对膜的上表面进行沉积处理，使得在纳米纹理化结构上表面沉积一层氟碳层。
  11. 根据权利要求10所述的摩擦纳米发电机或者摩擦纳米发电装置，其特征在于：制备方法安装以下步骤：
    (1)聚氯乙烯膜的清洗：取聚氯乙烯膜置于无水乙醇中超声清洗5-10min，然后用去离子水超声清洗5-10min，再经过干燥得到干净的聚氯乙烯膜；
    (2)将清洗干净的聚氯乙烯膜放置于用于等离子刻蚀承载载具里，送入等离子干法刻蚀设备腔体；
    (3)对等离子干法刻蚀设备进行抽真空，维持压力稳定，过程分为刻蚀和沉积两个阶段；
    (4)完成后控制等离子干法刻蚀设备达到常压状态，取出聚氯乙烯膜。
  12. 根据权利要求11所述的摩擦纳米发电机或者摩擦纳米发电装置，其特征在于：所述(3)中的两个阶段具体为：
    第一阶段：通入15sccm的O 2，45sccm的CHF 3，控制ICP功率均为100W，刻蚀时间为10min；
    第二阶段：通入50sccm C 4F 8，控制ICP功率设为100W，沉积时间为10s。
PCT/CN2022/109945 2022-04-26 2022-08-03 植物纤维基和改进摩擦电负性材料的摩擦纳米发电机、发电装置 WO2023206847A1 (zh)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
CN202210449552.5 2022-04-26
CN202210449601.5 2022-04-26
CN202210448298.7 2022-04-26
CN202210449601.5A CN114804016A (zh) 2022-04-26 2022-04-26 利用感应耦合等离子干法刻蚀提高摩擦电输出性能的方法
CN202210448298.7A CN114884390A (zh) 2022-04-26 2022-04-26 一种用于低流速水流能收集的植物纤维基摩擦纳米发电装置
CN202210449552.5A CN114826014A (zh) 2022-04-26 2022-04-26 一种基于植物纤维毛刷的软接触低阻尼摩擦纳米发电机

Publications (1)

Publication Number Publication Date
WO2023206847A1 true WO2023206847A1 (zh) 2023-11-02

Family

ID=88517120

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2022/109945 WO2023206847A1 (zh) 2022-04-26 2022-08-03 植物纤维基和改进摩擦电负性材料的摩擦纳米发电机、发电装置

Country Status (1)

Country Link
WO (1) WO2023206847A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117439439A (zh) * 2023-12-06 2024-01-23 兰州城市学院 一种具有低波峰因子和直流输出的多相位转盘式摩擦纳米发电机

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160218640A1 (en) * 2015-01-26 2016-07-28 Georgia Tech Research Corporation Triboelectric nanogenerator for harvesting energy from water
CN112615559A (zh) * 2020-12-25 2021-04-06 厦门烨映电子科技有限公司 基于摩擦发电的超低速水流能量采集装置及采集方法
CN112953293A (zh) * 2021-04-01 2021-06-11 重庆大学 采用多元介电材料实现软接触的摩擦纳米发电机和应用
CN113054865A (zh) * 2021-03-23 2021-06-29 浙江大学 用于雨滴能收集的温室薄膜基摩擦纳米发电机及制备方法
CN113073291A (zh) * 2021-03-23 2021-07-06 浙江大学 一种用于温室薄膜的超疏水改性方法
CN113482839A (zh) * 2021-06-08 2021-10-08 齐鲁工业大学 一种摩擦电纳米发电装置
CN114804016A (zh) * 2022-04-26 2022-07-29 浙江大学 利用感应耦合等离子干法刻蚀提高摩擦电输出性能的方法
CN114826014A (zh) * 2022-04-26 2022-07-29 浙江大学 一种基于植物纤维毛刷的软接触低阻尼摩擦纳米发电机

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160218640A1 (en) * 2015-01-26 2016-07-28 Georgia Tech Research Corporation Triboelectric nanogenerator for harvesting energy from water
CN112615559A (zh) * 2020-12-25 2021-04-06 厦门烨映电子科技有限公司 基于摩擦发电的超低速水流能量采集装置及采集方法
CN113054865A (zh) * 2021-03-23 2021-06-29 浙江大学 用于雨滴能收集的温室薄膜基摩擦纳米发电机及制备方法
CN113073291A (zh) * 2021-03-23 2021-07-06 浙江大学 一种用于温室薄膜的超疏水改性方法
CN112953293A (zh) * 2021-04-01 2021-06-11 重庆大学 采用多元介电材料实现软接触的摩擦纳米发电机和应用
CN113482839A (zh) * 2021-06-08 2021-10-08 齐鲁工业大学 一种摩擦电纳米发电装置
CN114804016A (zh) * 2022-04-26 2022-07-29 浙江大学 利用感应耦合等离子干法刻蚀提高摩擦电输出性能的方法
CN114826014A (zh) * 2022-04-26 2022-07-29 浙江大学 一种基于植物纤维毛刷的软接触低阻尼摩擦纳米发电机

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117439439A (zh) * 2023-12-06 2024-01-23 兰州城市学院 一种具有低波峰因子和直流输出的多相位转盘式摩擦纳米发电机

Similar Documents

Publication Publication Date Title
CN108616225B (zh) 一种纤维基多层结构摩擦纳米发电机及其制备方法
Wang et al. Integrating a triboelectric nanogenerator and a zinc‐ion battery on a designed flexible 3D spacer fabric
Sun et al. Electrochemical capacitors with high output voltages that mimic electric eels
CN106787931B (zh) 一种可拉伸同轴纤维状摩擦发电和传感器件及其制备方法
CN108322083A (zh) 基于摩擦纳米发电机的波浪能高效发电装置
CN105489814B (zh) 一种锂硫电池用改性隔膜的制备方法、改性隔膜以及具有多层该改性隔膜的锂硫电池
WO2023206847A1 (zh) 植物纤维基和改进摩擦电负性材料的摩擦纳米发电机、发电装置
CN208063066U (zh) 一种基于摩擦纳米发电机的波浪能高效发电装置
US20130162192A1 (en) Apparatus for generating and storing electric energy
Kınas et al. High-performance triboelectric nanogenerator based on carbon nanomaterials functionalized polyacrylonitrile nanofibers
CN107316752A (zh) 一种二氧化锰/碳纳米管修饰石墨烯纸电容器电极的制备方法
CN107994803A (zh) 一种压电摩擦电混合可穿戴纳米发电机及制备方法
CN110165935B (zh) 多层可穿戴压电能量收集器及其制备方法
US20200185159A1 (en) High frequency supercapacitors and methods of making same
Bayramol et al. Energy harvesting smart textiles
CN111525831B (zh) 一种自储能可编织纳米发电机装置及制备方法
CN107393724A (zh) 一种基于石墨烯/碳纳米管气凝胶的微型超级电容器制作方法
CN111641347A (zh) 一种捕获风能和声能的摩擦纳米发电机
CN113675004A (zh) MnO2包覆的MXene/C纳米纤维材料制备方法
CN114530287B (zh) 一种基于二硫化钼的织物湿发电材料、制备方法及其应用
CN108364799A (zh) 一种柔性超级电容器及其制备方法
Zhao et al. Hybridized nanogenerators for effectively scavenging mechanical and solar energies
Tian et al. Flexible in-plane zinc-ion hybrid capacitors with synergistic electrochemical behaviors for self-powered energy systems
CN113066674B (zh) 一种具有多级纳米结构的镍钴锌三元过渡金属氢氧化物电极材料及其制备方法和应用
Pu et al. Nanogenerators for smart textiles

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 22939673

Country of ref document: EP

Kind code of ref document: A1