WO2023204314A1 - Pigment dispersion, photosensitive resin composition, cured product, black matrix, and image display device - Google Patents

Pigment dispersion, photosensitive resin composition, cured product, black matrix, and image display device Download PDF

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WO2023204314A1
WO2023204314A1 PCT/JP2023/016006 JP2023016006W WO2023204314A1 WO 2023204314 A1 WO2023204314 A1 WO 2023204314A1 JP 2023016006 W JP2023016006 W JP 2023016006W WO 2023204314 A1 WO2023204314 A1 WO 2023204314A1
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group
ring
pigment
mass
acid
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PCT/JP2023/016006
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French (fr)
Japanese (ja)
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宏明 石井
謙一 入木
翔 藤本
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三菱ケミカル株式会社
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    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09BORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B67/00Influencing the physical, e.g. the dyeing or printing properties of dyestuffs without chemical reactions, e.g. by treating with solvents grinding or grinding assistants, coating of pigments or dyes; Process features in the making of dyestuff preparations; Dyestuff preparations of a special physical nature, e.g. tablets, films
    • C09B67/006Preparation of organic pigments
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09BORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B67/00Influencing the physical, e.g. the dyeing or printing properties of dyestuffs without chemical reactions, e.g. by treating with solvents grinding or grinding assistants, coating of pigments or dyes; Process features in the making of dyestuff preparations; Dyestuff preparations of a special physical nature, e.g. tablets, films
    • C09B67/0071Process features in the making of dyestuff preparations; Dehydrating agents; Dispersing agents; Dustfree compositions
    • C09B67/0084Dispersions of dyes
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D17/00Pigment pastes, e.g. for mixing in paints
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials

Definitions

  • the present invention relates to a pigment dispersion, a photosensitive resin composition, a cured product, a black matrix, and an image display device.
  • Color filters usually form a black matrix on the surface of a transparent substrate such as glass or plastic, and then sequentially form pixels of three or more different colors, such as red, green, and blue, in a grid pattern or stripes. It is formed in a pattern such as a shape or a mosaic shape.
  • the pattern size varies depending on the use of the color filter and each color, but is usually about 5 to 700 ⁇ m.
  • a photolithography method using a photosensitive resin composition is currently known as a typical manufacturing method for color filters.
  • a photosensitive resin composition containing an alkali-soluble resin is applied onto a transparent substrate, dried to form a photosensitive resin film, the photosensitive resin film is exposed in a predetermined pattern, and then developed with an alkali. After developing with a liquid, a pattern is formed by curing it by high-temperature treatment at 200° C. or higher.
  • the photosensitive resin composition contains a coloring material when used for forming pixels of color filters, black matrices, etc.
  • the coloring material pigments and dyes such as carbon black are used (Patent Document 1).
  • the application of the photosensitive resin composition may be repeated using the same application device.
  • foreign matter including aggregates of the pigment may be generated on the nozzle surface of the coating device during repeated coating. Such foreign matter may peel off from the nozzle and adhere to the photosensitive resin film or pattern, causing defects, which may adversely affect resolution and the like.
  • the present invention provides a pigment dispersion that provides a photosensitive resin composition with excellent viscosity stability and suppressed generation of pigment-derived foreign substances, and a photosensitive resin composition with excellent viscosity stability and suppressed generation of pigment-derived foreign substances.
  • the present invention aims to provide a synthetic resin composition, a cured product using the same, a black matrix, and an image display device.
  • the present inventors found that the above problem could be solved by preparing the pigment in advance as a pigment dispersion containing a specific amount of water. That is, the gist of the present invention is as follows.
  • the pigment (A) contains carbon black,
  • a pigment dispersion liquid having a moisture content of 0.15% by mass or more and 0.9% by mass or less.
  • the pigment dispersion according to [1] which has a moisture content of 0.2% by mass or more and 0.7% by mass or less.
  • An image display device comprising the cured product according to [9].
  • a pigment dispersion can be obtained that provides a photosensitive resin composition that has excellent viscosity stability and suppresses the generation of pigment-derived foreign substances, and a pigment dispersion that has excellent viscosity stability and suppresses the generation of pigment-derived foreign substances.
  • a photosensitive resin composition, a cured product using the same, a black matrix, and an image display device can be provided.
  • 1 is a schematic cross-sectional view showing an example of an organic EL element in the present invention.
  • 1 is a photograph showing the results of a peel test for the photosensitive resin compositions of Examples 1 to 4 and Comparative Examples 1 to 2.
  • total solid content means all components other than the organic solvent and water contained in the pigment dispersion or the photosensitive resin composition, and the components other than the organic solvent and water are liquid at room temperature. However, those components are not included in organic solvents and water, but are included in total solids.
  • the "moisture content” is calculated by the Karl Fischer measurement method described in JIS K0113 (2005).
  • various moisture meters can be used, such as MKA-610 manufactured by Kyoto Electronics Industry Co., Ltd.
  • the "average particle size" of the pigment (A) is determined by a method of directly measuring the size of the primary particles from an electron micrograph. Specifically, the minor axis diameter and major axis diameter of each primary particle are measured, and the average thereof is taken as the particle diameter of the particle. Next, for 100 or more particles, the volume (mass) of each particle is determined by approximating it to a rectangular parallelepiped of the determined particle size, and the volume average particle size is determined and used as the average particle size.
  • the same results can be obtained using either a transmission electron microscope (TEM) or a scanning electron microscope (SEM).
  • weight average molecular weight refers to the weight average molecular weight (Mw) in terms of polystyrene measured by GPC (gel permeation chromatography).
  • amine value refers to the amine value in terms of effective solid content, unless otherwise specified, and is a value expressed by the amount of base and the mass of KOH equivalent to 1 g of solid content of the dispersant. The measurement method will be described later.
  • the pigment dispersion of the present invention contains (A) a pigment, (B) a dispersant, an organic solvent, and water.
  • the moisture content of the pigment dispersion of the present invention is 0.15% by mass or more and 0.9% by mass or less based on the total mass of the pigment dispersion.
  • the water content of the pigment dispersion is 0.9% by mass or less, the viscosity stability is excellent, and thickening of the pigment dispersion and the accompanying decrease in filterability can be suppressed.
  • the moisture content is 0.15% by mass or more, it is possible to suppress the generation of pigment-derived foreign substances when forming a pattern using a photosensitive resin composition containing a pigment dispersion.
  • the water content of the pigment dispersion is preferably 0.7% by mass or less, more preferably 0.5% by mass or less, further preferably 0.2% by mass or more, and more preferably 0.3% by mass or more.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be 0.2% by mass or more and 0.7% by mass or less, and may be 0.3% by mass or more and 0.5% by mass or less.
  • the pigment contains carbon black. Containing carbon black tends to improve light shielding properties. On the other hand, foreign matter containing carbon black has a high light shielding rate and tends to have a negative effect on pattern resolution, for example. Therefore, the usefulness of the present invention is high when the pigment (A) contains carbon black.
  • Examples of carbon black include the following. Made by Mitsubishi Chemical: MA7, MA77, MA8, MA11, MA100, MA100R, MA220, MA230, MA600, #5, #10, #20, #25, #30, #32, #33, #40, #44, #45, #47, #50, #52, #55, #650, #750, #850, #950, #960, #970, #980, #990, #1000, #2200, #2300, #2350 , #2400, #2600, #3050, #3150, #3250, #3600, #3750, #3950, #4000, #4010, OIL7B, OIL9B, OIL11B, OIL30B, OIL31B.
  • Printex registered trademark. The same applies hereinafter
  • Printex3OP Printex30, Printex30OP, Printex40, Printex45, Printex55, Printex60, Printex75, Printex80, Printe x85, Printex90
  • Printex A Printex L, Printex G, Printex P, Printex U, Printex V, PrintexG, SpecialBlack550, SpecialBlack350, SpecialBlack250, SpecialBlack100, SpecialBlack6, SpecialBlack5, SpecialB rack4, Color Black FW1, Color Black FW2, Color Black FW2V, Color Black FW18, Color Black FW18, Color Black FW200, Color Black S160 , Color Black S170.
  • Monarch registered trademark 120, Monarch280, Monarch460, Monarch800, Monarch880, Monarch900, Monarch1000, Monarch1100, Monarch1300, Monarch h1400, Monarch4630, REGAL (registered trademark. The same applies hereinafter) 99, REGAL99R, REGAL415, REGAL415R, REGAL250, REGAL250R, REGAL330, REGAL400R, REGAL550R, REGAL660R, BLACK PEARLS480, PEARLS130, VULCAN (registered trademark) XC72R, ELFTEX (registered trademark) -8.
  • Monarch registered trademark 120, Monarch280, Monarch460, Monarch800, Monarch880, Monarch900, Monarch1000, Monarch1100, Monarch1300, Monarch h1400, Monarch4630, REGAL (registered trademark. The same applies hereinafter) 99, REGAL99R, REGAL415, REGAL415R
  • Carbon black coated with resin may be used.
  • Use of resin-coated carbon black has the effect of improving adhesion to glass substrates and volume resistivity.
  • the resin-coated carbon black for example, the carbon black described in Japanese Patent Application Laid-Open No. 09-71733 can be suitably used.
  • Resin-coated carbon black is preferably used in terms of volume resistivity and dielectric constant.
  • the total content of Na and Ca be 100 ppm or less in the carbon black to be subjected to the resin coating treatment.
  • Carbon black usually contains Na, Ca, K, Mg, Al, and Fe mixed in from raw material oil, combustion oil (or gas), reaction stop water, granulation water, and reactor materials during manufacturing.
  • the ash content is on the order of percent.
  • Na and Ca are generally contained in amounts of several hundred ppm or more each, but by reducing their content, it is possible to suppress penetration into transparent electrodes (ITO) and other electrodes, and to This tends to prevent short circuits.
  • a method for reducing the content of ash containing Na and Ca is to carefully select materials with as low a content as possible as raw material oil, fuel oil (or gas), and reaction termination water when producing carbon black. This can be achieved by minimizing the amount of alkaline substances added to adjust the structure.
  • Another method includes a method in which carbon black produced from a furnace is washed with water, hydrochloric acid, etc. to dissolve and remove Na and Ca.
  • the resin-coated carbon black is preferably so-called acidic carbon black with a pH of 6 or less. Since the dispersion diameter (agglomilate diameter) in water becomes small, it is possible to coat even minute units, which is preferable. Furthermore, it is preferable that the average particle diameter is 40 nm or less. Moreover, it is preferable that the amount of dibutyl phthalate (DBP) absorbed is 140 mL/100 g or less. When the average particle diameter and DBP absorption amount are within the above ranges, a coating film with good light-shielding properties tends to be obtained.
  • DBP dibutyl phthalate
  • the method for preparing resin-coated carbon black is not particularly limited. For example, after adjusting the blending amounts of carbon black and resin as appropriate, 1. After mixing and stirring a resin solution in which a resin and a solvent such as cyclohexanone, toluene, or xylene are mixed and dissolved by heating, and a suspension in which carbon black and water are mixed to separate the carbon black and water, A method in which a composition obtained by removing water and heating and kneading is formed into a sheet shape, pulverized, and then dried; 2.
  • a carboxylic acid such as maleic acid or fumaric acid is dissolved in the above-mentioned solvent, carbon black is added, mixed and dried, the solvent is removed to obtain carboxylic acid-impregnated carbon black, and a resin is added to this. How to dry blend; 4.
  • a suspension is prepared by stirring the reactive group-containing monomer component constituting the resin to be coated with water at high speed, and after polymerization, the reactive group-containing resin is obtained from the polymer suspension by cooling.
  • a method of adding and kneading carbon black, reacting the carbon black with a reactive group (grafting the carbon black), cooling and pulverizing; can be adopted.
  • the type of resin to be coated is not particularly limited, but synthetic resins are common, and resins with a benzene ring in their structure have a stronger action as an amphoteric surfactant, so they are difficult to disperse. preferred from the viewpoint of properties and dispersion stability.
  • thermosetting resins such as phenol resin, melamine resin, xylene resin, diallyl phthalate resin, glyptal resin, epoxy resin, and alkylbenzene resin
  • polystyrene polycarbonate, polyethylene terephthalate, polybutylene terephthalate, modified polyphenylene oxide
  • Thermoplastic resins such as polysulfone, polyparaphenylene terephthalamide, polyamideimide, polyimide, polyamino bismaleimide, polyethersulfopolyphenylenesulfone, polyarylate, and polyetheretherketone can be used.
  • the amount of resin coating carbon black is preferably 1 to 30% by mass based on the total amount of carbon black and resin, and coating tends to be sufficient when the amount is equal to or more than the lower limit. On the other hand, by setting it below the above upper limit, there is a tendency that adhesion between resins can be prevented and dispersibility can be improved.
  • Carbon black coated with a resin can be used as a light-shielding material for a colored spacer according to a conventional method, and a color filter having this colored spacer as a component can be produced using a conventional method.
  • a colored spacer with a high light shielding rate and a low surface reflectance tends to be achieved at low cost. It is also assumed that coating the carbon black surface with a resin has the effect of sealing Ca and Na into the carbon black.
  • pigments of various colors used as coloring materials for coloring photosensitive resin compositions can be used.
  • examples of such pigments include blue pigments, green pigments, red pigments, yellow pigments, purple pigments, orange pigments, brown pigments, and black pigments.
  • These pigments may be organic or inorganic pigments.
  • the structure of the organic pigment is not particularly limited, but examples include azo, phthalocyanine, quinacridone, benzimidazolone, isoindolinone, dioxazine, indanthrene, and perylene.
  • pigment (A) Specific examples of the pigment (A) are shown below using pigment numbers. Terms such as "C.I. Pigment Red 2" listed below mean color index (C.I.). Examples of red pigments include C.I. I. Pigment Red 1, 2, 3, 4, 5, 6, 7, 8, 9, 12, 14, 15, 16, 17, 21, 22, 23, 31, 32, 37, 38, 41, 47, 48, 48:1, 48:2, 48:3, 48:4, 49, 49:1, 49:2, 50:1, 52:1, 52:2, 53, 53:1, 53:2, 53: 3, 57, 57:1, 57:2, 58:4, 60, 63, 63:1, 63:2, 64, 64:1, 68, 69, 81, 81:1, 81:2, 81: 3, 81:4, 83, 88, 90:1, 101, 101:1, 104, 108, 108:1, 109, 112, 113, 114, 122, 123, 144, 146, 147, 149, 151, 166, 168, 169, 170,
  • blue pigments examples include C.I. I. Pigment Blue 1, 1:2, 9, 14, 15, 15:1, 15:2, 15:3, 15:4, 15:6, 16, 17, 19, 25, 27, 28, 29, 33, 35, 36, 56, 56:1, 60, 61, 61:1, 62, 63, 66, 67, 68, 71, 72, 73, 74, 75, 76, 78, 79.
  • C. I. Pigment Blue 15, 15:1, 15:2, 15:3, 15:4, 15:6, 60 more preferably C.I. I. Pigment Blue 15:6, 60.
  • green pigments examples include C.I. I. Pigment Green 1, 2, 4, 7, 8, 10, 13, 14, 15, 17, 18, 19, 26, 36, 45, 48, 50, 51, 54, 55, 58.
  • C. I. Pigment Green 7, 36, and 58 are mentioned.
  • yellow pigments examples include C.I. I. Pigment Yellow 1, 1:1, 2, 3, 4, 5, 6, 9, 10, 12, 13, 14, 16, 17, 24, 31, 32, 34, 35, 35: 1, 36, 36: 1, 37, 37:1, 40, 41, 42, 43, 48, 53, 55, 61, 62, 62: 1, 63, 65, 73, 74, 75, 81, 83, 87, 93, 94, 95, 97, 100, 101, 104, 105, 108, 109, 110, 111, 116, 117, 119, 120, 126, 127, 127:1, 128, 129, 133, 134, 136, 138, 139, 142, 147, 148, 150, 151, 153, 154, 155, 157, 158, 159, 160, 161, 162, 163, 164, 165, 166, 167, 168, 169, 170, 172, 173, 174, 175, 176, 180, 181, 182, 183, 184
  • orange pigments examples include C.I. I. Pigment Orange 1, 2, 5, 13, 16, 17, 19, 20, 21, 22, 23, 24, 34, 36, 38, 39, 43, 46, 48, 49, 61, 62, 64, 65, 67, 68, 69, 70, 71, 72, 73, 74, 75, 77, 78, 79.
  • C. I. Pigment Orange 38, 64, and 71 Preferably C. I. Pigment Orange 38, 64, and 71.
  • C.I. I. Pigment Violet 1 1:1, 2, 2:2, 3, 3:1, 3:3, 5, 5:1, 14, 15, 16, 19, 23, 25, 27, 29, 31, 32, 37, 39, 42, 44, 47, 49, and 50.
  • C. I. Pigment Violet 19, 23, 29, more preferably C.I. I. Pigment Violet 23 and 29 are mentioned.
  • the black pigment a pigment that exhibits a black color by mixing multiple colored pigments (for example, three colors of red, green, and blue) may be used, or a pigment that exhibits a black color may be used alone. May be used together.
  • Pigments that can be mixed to prepare black pigments include, for example, Victoria Pure Blue (42595), Auramine O (41000), Cathylone Brilliant Flavin (Basic 13), Rhodamine 6GCP (45160), Rhodamine B (45170). , Safranin OK70:100 (50240), Erioglaucine X (42080), No.
  • C. I. Yellow pigment 20 24, 86, 93, 109, 110, 117, 125, 137, 138, 147, 148, 153, 154, 166, C.I. I. Orange pigment 36, 43, 51, 55, 59, 61, 64, C.I. I. Red pigment 9, 97, 122, 123, 149, 168, 177, 180, 192, 215, 216, 217, 220, 223, 224, 226, 227, 228, 240, 254, C.I. I. Violet pigment 19, 23, 29, 30, 37, 40, 50, C.I. I. Blue pigment 15, 15:1, 15:4, 22, 60, 64, C.I. I. Green pigment 7, C. I. Brown pigments 23, 25, and 26 are mentioned.
  • black pigments examples include lamp black, bone black, graphite, iron oxide black pigments (iron black, etc.), aniline black, cyanine black, titanium black, perylene black, and lactam black.
  • pigment (A) for example, barium sulfate, lead sulfate, titanium oxide, yellow lead, red iron oxide, and chromium oxide can also be used.
  • pigments can also be used in combination.
  • a green pigment and a yellow pigment can be used together, or a blue pigment and a violet pigment can be used together.
  • the average particle size of the pigment is not particularly limited as long as it can produce the desired color when used as a colored layer of a color filter, and varies depending on the type of pigment used, but is 10 to 100 nm. It is preferably within the range of 10 to 70 nm, and more preferably within the range of 10 to 70 nm.
  • the color characteristics of a liquid crystal display device manufactured using a photosensitive resin composition containing the pigment dispersion of the present invention are of high quality.
  • the average particle size of carbon black is preferably 60 nm or less, more preferably 50 nm or less, and preferably 20 nm or more, for example, preferably 20 to 50 nm, more preferably 20 to 60 nm.
  • the average particle size is preferably 60 nm or less, more preferably 50 nm or less, and preferably 20 nm or more, for example, preferably 20 to 50 nm, more preferably 20 to 60 nm.
  • the content ratio of the pigment (A) to the total solid content in the pigment dispersion is preferably 60% by mass or more, more preferably 70% by mass or more, even more preferably 80% by mass or more, and preferably 99% by mass or less, It is more preferably 95% by mass or less, and even more preferably 90% by mass or less. If the content ratio of the pigment (A) is equal to or higher than the lower limit value, the obtained cured product tends to have better light-shielding properties, and if it is lower than the upper limit value, the dispersibility tends to be better.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be 60-99% by weight, 70-95% by weight, or 80-90% by weight.
  • the content ratio of carbon black to the total mass of the pigment (A) is preferably 90% by mass or more, more preferably 95% by mass or more, even more preferably 99% by mass or more, and may be 100% by mass.
  • the dispersant finely disperses the pigment (A) and stabilizes the dispersion state.
  • a polymer dispersant having a functional group is preferable, and from the viewpoint of dispersion stability, for example, a carboxy group; a phosphoric acid group; a sulfonic acid group; or a base thereof; Polymer dispersants having a class or tertiary amino group; a quaternary ammonium base; and a group derived from a nitrogen-containing heterocycle such as pyridine, pyrimidine, and pyrazine are preferred.
  • polymer dispersants having basic functional groups such as primary, secondary or tertiary amino groups; quaternary ammonium bases; groups derived from nitrogen-containing heterocycles such as pyridine, pyrimidine and pyrazine.
  • basic functional groups such as primary, secondary or tertiary amino groups; quaternary ammonium bases; groups derived from nitrogen-containing heterocycles such as pyridine, pyrimidine and pyrazine.
  • polymeric dispersants include urethane dispersants, acrylic dispersants, polyethyleneimine dispersants, polyallylamine dispersants, dispersants made of monomers and macromonomers having amino groups, and polyoxyethylene alkyl ether dispersants.
  • examples include polyoxyethylene diester dispersants, polyether phosphate dispersants, polyester phosphate dispersants, sorbitan aliphatic ester dispersants, and aliphatic modified polyester dispersants.
  • dispersants include, for example, the trade names of EFKA (registered trademark, manufactured by EFKA), DISPERBYK (registered trademark, manufactured by BYK Chemie Co., Ltd.), DISPARBYK (registered trademark, manufactured by Kusumoto Kasei Co., Ltd.), and SOLSPERSE (registered trademark, manufactured by Kusumoto Kasei Co., Ltd.). (registered trademark, manufactured by Lubrizol), KP (manufactured by Shin-Etsu Chemical Co., Ltd.), Polyflow or Florene (registered trademark, manufactured by Kyoeisha Chemical Co., Ltd.), and Ajisper (registered trademark, manufactured by Ajinomoto Fine Techno Co., Ltd.).
  • One type of polymer dispersant may be used alone, or two or more types may be used in combination.
  • the dispersant contains a urethane polymer dispersant and/or an acrylic polymer dispersant having a basic functional group. More preferable in terms of gender. Further, from the viewpoint of dispersibility and storage stability, a polymer dispersant having a basic functional group and a polyester and/or polyether bond is preferable.
  • the weight average molecular weight (Mw) of the polymer dispersant is preferably 700 or more, more preferably 1,000 or more, and preferably 100,000 or less, more preferably 50,000 or less, and even more preferably 30,000 or less.
  • Mw weight average molecular weight
  • the above upper and lower limits can be arbitrarily combined. For example, it may be between 700 and 100,000, between 700 and 50,000, and between 1,000 and 30,000.
  • urethane-based or acrylic-based polymer dispersants examples include DISPERBYK 160 to 167, 182 series (all urethane-based), DISPERBYK 2000, 2001 (all acrylic-based) (all manufactured by BYK Chemie).
  • DISPERBYK167 and DISPERBYK182 are particularly preferable polymeric dispersants having a basic functional group and a polyester and/or polyether bond and having a weight average molecular weight of 30,000 or less.
  • urethane-based polymer dispersants include polyisocyanate compounds, compounds with a number average molecular weight of 300 to 10,000 having one or two hydroxyl groups in the molecule, and active hydrogen and tertiary amino groups in the same molecule.
  • examples include dispersion resins having a weight average molecular weight of 1,000 to 200,000, which are obtained by reacting with a compound.
  • polyisocyanate compound examples include aromatic compounds such as paraphenylene diisocyanate, 2,4-tolylene diisocyanate, 2,6-tolylene diisocyanate, 4,4'-diphenylmethane diisocyanate, naphthalene-1,5-diisocyanate, and tolydine diisocyanate.
  • a trimer of organic diisocyanate is preferred, and a trimer of tolylene diisocyanate and a trimer of isophorone diisocyanate are more preferred.
  • One type of polyisocyanate may be used alone, or two or more types may be used in combination.
  • polyisocyanates are converted into isocyanate groups using a suitable trimerization catalyst such as tertiary amines, phosphines, alkoxides, metal oxides, carboxylic acid salts, etc.
  • trimerization catalyst such as tertiary amines, phosphines, alkoxides, metal oxides, carboxylic acid salts, etc.
  • the unreacted polyisocyanate is removed by solvent extraction and thin film distillation to obtain the desired isocyanurate group-containing polyisocyanate. It will be done.
  • Examples of compounds with a number average molecular weight of 300 to 10,000 having one or two hydroxyl groups in the same molecule include polyether glycol, polyester glycol, polycarbonate glycol, polyolefin glycol, and compounds in which one terminal hydroxyl group of these compounds has 1 carbon number. Examples include compounds alkoxylated with ⁇ 25 alkyl groups. Compounds having one or two hydroxyl groups in the same molecule and having a number average molecular weight of 300 to 10,000 may be used alone or in combination of two or more.
  • polyether glycol examples include polyether diol and polyether ester diol.
  • polyether diols examples include compounds obtained by copolymerizing alkylene oxides alone or by copolymerizing them, such as polyethylene glycol, polypropylene glycol, polyethylene-propylene glycol, polyoxytetramethylene glycol, polyoxyhexamethylene glycol, and polyoxyoctamethylene glycol. It will be done.
  • Polyether ester diols include compounds obtained by reacting ether group-containing diols or mixtures with other glycols with dicarboxylic acids or their anhydrides, or by reacting polyester glycols with alkylene oxides, such as poly( oxytetramethylene) adipate.
  • the polyether glycol is preferably polyethylene glycol, polypropylene glycol, polyoxytetramethylene glycol, or a compound in which one terminal hydroxyl group of these compounds is alkoxylated with an alkyl group having 1 to 25 carbon atoms.
  • polyester glycols examples include dicarboxylic acids (succinic acid, glutaric acid, adipic acid, sebacic acid, fumaric acid, maleic acid, phthalic acid, etc.) or their anhydrides and glycols (ethylene glycol, diethylene glycol, triethylene glycol, propylene glycol, etc.).
  • dicarboxylic acids succinic acid, glutaric acid, adipic acid, sebacic acid, fumaric acid, maleic acid, phthalic acid, etc.
  • glycols ethylene glycol, diethylene glycol, triethylene glycol, propylene glycol, etc.
  • Glycol dipropylene glycol, tripropylene glycol, 1,2-butanediol, 1,3-butanediol, 1,4-butanediol, 2,3-butanediol, 3-methyl-1,5-pentanediol, neo Pentyl glycol, 2-methyl-1,3-propanediol, 2-methyl-2-propyl-1,3-propanediol, 2-butyl-2-ethyl-1,3-propanediol, 1,5-pentanediol , 1,6-hexanediol, 2-methyl-2,4-pentanediol, 2,2,4-trimethyl-1,3-pentanediol, 2-ethyl-1,3-hexanediol, 2,5-dimethyl Aliphatic glycols such as -2,5-hexanediol, 1,8-octamethylene glyco
  • polycarbonate glycols include poly(1,6-hexylene) carbonate and poly(3-methyl-1,5-pentylene) carbonate
  • polyolefin glycols include polybutadiene glycol, hydrogenated polybutadiene glycol, and hydrogenated polyisoprene glycol. can be mentioned.
  • the number average molecular weight of the compound having one or two hydroxyl groups in the same molecule is preferably 300 to 10,000, more preferably 500 to 6,000, and even more preferably 1,000 to 4,000.
  • the active hydrogen that is, the hydrogen atom directly bonded to an oxygen atom, nitrogen atom, or sulfur atom
  • the active hydrogen includes, for example, a functional group such as a hydroxyl group, an amino group, or a thiol group.
  • Hydrogen atoms in groups are mentioned, hydrogen atoms in amino groups are preferred, and hydrogen atoms in primary amino groups are more preferred.
  • the tertiary amino group in a compound having an active hydrogen and a tertiary amino group in the same molecule is not particularly limited, but includes, for example, an amino group having an alkyl group having 1 to 4 carbon atoms, or a hetero group such as an imidazole ring or a triazole ring. Examples include ring structures. Examples of compounds having active hydrogen and a tertiary amino group in the same molecule include N,N-dimethyl-1,3-propanediamine, N,N-diethyl-1,3-propanediamine, and N,N-dipropyl.
  • N,N-dibutyl-1,3-propanediamine N,N-dibutyl-1,3-propanediamine, N,N-dimethylethylenediamine, N,N-diethylethylenediamine, N,N-dipropylethylenediamine, N,N-dibutylethylenediamine, N,N-dimethyl-1,4-butanediamine, N,N-diethyl-1,4-butanediamine, N,N-dipropyl-1,4-butanediamine, N,N-dibutyl-1,4-butane
  • Examples include diamines.
  • examples of the nitrogen-containing heterocycle include a pyrazole ring, an imidazole ring, a triazole ring, a tetrazole ring, an indole ring, a carbazole ring, an indazole ring, a benzimidazole ring, and a benzotriazole ring.
  • nitrogen-containing hetero rings such as benzoxazole ring, benzothiazole ring, benzothiadiazole ring, 6-membered nitrogen-containing hetero rings such as pyridine ring, pyridazine ring, pyrimidine ring, triazine ring, quinoline ring, acridine ring, isoquinoline ring, etc.
  • nitrogen-containing heterocycle an imidazole ring and a triazole ring are preferred.
  • Examples of compounds having an imidazole ring and an amino group include 1-(3-aminopropyl)imidazole, histidine, 2-aminoimidazole, and 1-(2-aminoethyl)imidazole.
  • Examples of compounds having a triazole ring and an amino group include 3-amino-1,2,4-triazole, 5-(2-amino-5-chlorophenyl)-3-phenyl-1H-1,2,4-triazole , 4-amino-4H-1,2,4-triazole-3,5-diol, 3-amino-5-phenyl-1H-1,3,4-triazole, 5-amino-1,4-diphenyl-1 , 2,3-triazole, and 3-amino-1-benzyl-1H-2,4-triazole.
  • Compounds having active hydrogen and a tertiary amino group in the same molecule include N,N-dimethyl-1,3-propanediamine, N,N-diethyl-1,3-propanediamine, 1-(3-aminopropyl ) Imidazole and 3-amino-1,2,4-triazole are preferred.
  • Compounds having active hydrogen and a tertiary amino group in the same molecule may be used singly or in combination of two or more.
  • the preferred blending ratio of raw materials when producing a urethane polymer dispersant is 10 to 200 parts of a compound with a number average molecular weight of 300 to 10,000 having one or two hydroxyl groups in the same molecule to 100 parts by mass of the polyisocyanate compound. parts by weight, preferably 20 to 190 parts by weight, more preferably 30 to 180 parts by weight, and 0.2 to 25 parts by weight, preferably 0.3 to 24 parts by weight of a compound having active hydrogen and a tertiary amino group in the same molecule. Part by mass.
  • the above blending ratios can be combined arbitrarily.
  • a polyisocyanate compound for 100 parts by mass of a polyisocyanate compound, 10 to 200 parts by mass of a compound with a number average molecular weight of 300 to 10,000 having one or two hydroxyl groups in the same molecule, and active hydrogen and a tertiary amino group in the same molecule.
  • the compound having one or two hydroxyl groups in the same molecule may be 0.2 to 25 parts by mass; 20 to 190 parts by mass of a compound having a number average molecular weight of 300 to 10,000 and having one or two hydroxyl groups in the same molecule.
  • the compound having active hydrogen and a tertiary amino group in the same molecule may be 0.2 to 25 parts by mass; the number having one or two hydroxyl groups in the same molecule per 100 parts by mass of the polyisocyanate compound.
  • the amount of the compound having an average molecular weight of 300 to 10,000 may be 30 to 180 parts by weight, and the amount of the compound having an active hydrogen and a tertiary amino group in the same molecule may be 0.3 to 24 parts by weight.
  • the urethane polymer dispersant is produced according to a known method for producing polyurethane resins.
  • solvents used during production include ketones such as acetone, methyl ethyl ketone, methyl isobutyl ketone, cyclopentanone, cyclohexanone, and isophorone, esters such as ethyl acetate, butyl acetate, and cellosolve acetate, benzene, toluene, xylene, Hydrocarbons such as hexane, some alcohols such as diacetone alcohol, isopropanol, sec-butanol and tertiary-butanol, chlorides such as methylene chloride and chloroform, ethers such as tetrahydrofuran and diethyl ether, dimethylformamide, N- Aprotic polar solvents such as methylpyrrolidone and dimethylsulfoxide are used. These may be used alone or in combination of two
  • a urethane reaction catalyst may be used in the production of the urethane-based polymer dispersant.
  • urethanization reaction catalysts include tin-based catalysts such as dibutyltin dilaurate, dioctyltin dilaurate, dibutyltin dioctoate, stannath octoate, iron-based catalysts such as iron acetylacetonate and ferric chloride, triethylamine, triethylenediamine, etc. Examples include tertiary amines. These may be used alone or in combination of two or more.
  • the amount of the compound having active hydrogen and a tertiary amino group introduced into the same molecule so that the amine value after the reaction is preferably in the range of 1 to 100 mgKOH/g, more preferably 5 to 95 mgKOH/g. preferable.
  • the amine value is equal to or higher than the lower limit value, the dispersibility tends to be improved. Furthermore, when the content is below the upper limit, developability tends to be improved.
  • the amine value is expressed by the amount of base per 1 g of solid content excluding the solvent in the sample and the mass of KOH equivalent to the amount of base, and can be measured by the following method. Accurately weigh 0.5 to 1.5 g of the sample into a 100 mL beaker and dissolve it in 50 mL of acetic acid. Using an automatic titrator equipped with a pH electrode, this solution is subjected to neutralization titration with a 0.1 mol/L HClO 4 (perchloric acid) acetic acid solution. The inflection point of the titration pH curve is taken as the titration end point, and the amine value is determined by the following formula.
  • Amine value [mgKOH/g] (561 ⁇ V)/(W ⁇ S) [However, W: weighed amount of dispersant sample [g], V: titration amount at titration end point [mL], S: solid content concentration of dispersant sample [mass %]. ]
  • the weight average molecular weight (Mw) of the urethane polymer dispersant is preferably 1,000 to 200,000, more preferably 2,000 to 100,000, and even more preferably 3,000 to 50,000. In particular, it is preferably 30,000 or less. If Mw is equal to or greater than the lower limit, the dispersibility and dispersion stability tend to be good, and if it is equal to or less than the upper limit, the solubility tends to be good.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be 1000 to 30000, 2000 to 30000, or 3000 to 30000. In particular, when Mw is 30,000 or less, alkali developability tends to be good even when the pigment concentration is particularly high. Examples of commercially available urethane dispersants include DISPERBYK167 and DISPERBYK182 (manufactured by BYK Chemie).
  • the content ratio of (A) pigment and (B) dispersant on a mass basis is preferably 1 or more, more preferably 3 or more, even more preferably 4 or more, and , is preferably 50 or less, more preferably 30 or less, and even more preferably 15 or less. If the (A) pigment/(B) dispersant is equal to or higher than the lower limit value, the development solubility tends to be better, and if it is lower than the upper limit value, it is easy to ensure sufficient dispersibility of the (A) pigment. Tend.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be 1 to 50, 3 to 30, or 4 to 15.
  • the content of the dispersant (B) relative to the total solids in the pigment dispersion is preferably 5% by mass or more, more preferably 10% by mass or more, even more preferably 15% by mass or more, and preferably 30% by mass or less. , more preferably 25% by mass or less, and even more preferably 20% by mass or less.
  • the content ratio of the dispersant is at least the above lower limit, it tends to ensure sufficient dispersibility of the (A) pigment, and if it is below the above upper limit, the proportion of other components can be reduced. There is a tendency that the film formability is better.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be 5-30% by weight, it may be 10-25% by weight, it may be 15-20% by weight.
  • Organic solvent from the viewpoint of viscosity stability of the pigment dispersion, an organic solvent having a boiling point of 100 to 300°C is preferable, and an organic solvent having a boiling point of 120 to 280°C is more preferable.
  • the boiling point is a value at a pressure of 1013.25 hPa.
  • all boiling points are the same.
  • organic solvents having a boiling point of 100 to 300°C include the following. Ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monopropyl ether, ethylene glycol monobutyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol mono-n-butyl ether, propylene glycol-t-butyl ether, diethylene glycol monomethyl Ether, diethylene glycol monoethyl ether, diethylene glycol mono-n-butyl ether, methoxymethylpentanol, dipropylene glycol monoethyl ether, dipropylene glycol monomethyl ether, 3-methyl-3-methoxybutanol, triethylene glycol monomethyl ether, triethylene glycol Glycol monoalkyl ethers such as monoethyl ether and tripropylene glycol methyl ether;
  • Glycol dialkyl ethers such as ethylene glycol dimethyl ether, ethylene glycol diethyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol dipropyl ether, diethylene glycol dibutyl ether, dipropylene glycol dimethyl ether; Ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, ethylene glycol mono-n-butyl ether acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, propylene glycol monopropyl ether acetate, propylene glycol monobutyl ether acetate, methoxybutyl Acetate, 3-methoxybutyl acetate, methoxypentyl acetate, diethylene glycol monomethyl ether acetate, diethylene glycol monoethyl ether acetate, diethylene glycol mono-n
  • Aromatic hydrocarbons such as benzene, toluene, xylene, and cumene; Amyl formate, ethyl formate, ethyl acetate, butyl acetate, propyl acetate, amyl acetate, methyl isobutyrate, ethylene glycol acetate, ethyl propionate, propyl propionate, butyl butyrate, isobutyl butyrate, methyl isobutyrate, ethyl Caprylate, butyl stearate, ethyl benzoate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, propyl 3-methoxypropionate, 3-methoxypropionate linear or cyclic esters such as butyl, ⁇ -butyrolactone; Alkoxycarboxylic acids such as 3-methoxyprop
  • organic solvents include, for example, Mineral Spirit, Valsol #2, Apco #18 Solvent, Apco Thinner, So Cal Solvent No. 1 and no. 2.
  • Solvesso #150 Shell TS28 Solvent, carbitol, ethyl carbitol, butyl carbitol, methyl cellosolve (“Cellosolve” is a registered trademark. The same applies hereinafter), ethyl cellosolve, ethyl cellosolve acetate, methyl cellosolve acetate, diglyme (all product name).
  • One type of organic solvent may be used alone, or two or more types may be used in combination.
  • an organic solvent with a boiling point of 100 to 250°C is preferable, and an organic solvent with a boiling point of 120 to 230°C is preferable. It is more preferable to use an organic solvent with
  • glycol alkyl ether acetate As an organic solvent, glycol alkyl ether acetate is recommended because it has a good balance in coating properties, surface tension, etc., has a relatively high solubility of constituent components in the photosensitive resin composition, and has a stable viscosity of the pigment dispersion.
  • One type of glycol alkyl ether acetate may be used alone, or two or more types may be used in combination.
  • Glycol alkyl ether acetates may be used in combination with other organic solvents.
  • glycol monoalkyl ethers are preferred.
  • Propylene glycol monomethyl ether is preferred from the viewpoint of solubility of the constituent components in the photosensitive resin composition.
  • glycol monoalkyl ethers have high polarity
  • the organic solvent contains glycol monoalkyl ethers from the viewpoint of storage stability related to pigment aggregation and viscosity of the photosensitive resin composition obtained later.
  • the content of the glycol monoalkyl ethers is preferably 5 to 30% by mass, more preferably 5 to 20% by mass, based on the total mass of the organic solvent.
  • Glycol alkyl ether acetates and an organic solvent having a boiling point of 200°C or higher may be used in combination.
  • a high boiling point solvent in combination, the photosensitive resin composition containing the pigment dispersion becomes difficult to dry, and the uniform dispersion state of the pigment (A) in the composition is prevented from being destroyed by rapid drying. effective. That is, there is an effect of preventing the occurrence of foreign matter defects due to precipitation or solidification of pigments, etc., at the tip of the slit nozzle, for example.
  • the upper limit of the boiling point of the high boiling point solvent is not particularly limited, but is, for example, 300° C. or lower.
  • examples of high boiling point solvents include dipropylene glycol methyl ether acetate, diethylene glycol mono-n-butyl ether acetate, diethylene glycol monoethyl ether acetate, 1,4-butanediol diacetate, 1, Examples include 3-butylene glycol diacetate, triacetin, and 1,6-hexanediol diacetate.
  • One type of high boiling point solvent may be used alone, or two or more types may be used in combination.
  • the content ratio of the high boiling point solvent is preferably 0 to 50% by mass, more preferably 0.5 to 40% by mass, and even more preferably 1 to 30% by mass, based on the total mass of the organic solvent. If the content ratio of the high boiling point solvent is below the above upper limit, the drying temperature of the composition will be slow, which tends to suppress the occurrence of problems such as poor tact in the vacuum drying process and pin marks in pre-baking in the color filter manufacturing process. There is. If the content of the high boiling point solvent is 0.5% by mass or more, it tends to be possible to suppress the occurrence of foreign matter defects due to precipitation or solidification of pigments, etc., at the tip of the slit nozzle, for example.
  • the content ratio of the organic solvent can be appropriately selected in consideration of the total solid content and water content in the pigment dispersion.
  • the total solid content in the pigment dispersion is preferably 10% by mass or more, more preferably 20% by mass or more, and even more preferably 30% by mass or more, based on the total mass of the pigment dispersion.
  • the content is preferably 60% by mass or less, more preferably 50% by mass or less, and even more preferably 40% by mass or less.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be 10 to 60% by weight, 20 to 50% by weight, or 30 to 40% by weight.
  • the pigment dispersion of the present invention contains glycol alkyl ether acetates as an organic solvent, and the total solid content in the pigment dispersion is 40% by mass or less. It is more preferable.
  • the content of glycol alkyl ether acetates in the total organic solvent is preferably 60% by mass or more, and 70% by mass from the viewpoint of viscosity stability. % or more, more preferably 80% by mass or more. Further, from the viewpoint of reducing unevenness during drying of the coating film, the content is preferably 100% by mass or less, more preferably 95% by mass or less, and even more preferably 90% by mass or less.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be 60 to 100% by weight, 70 to 100% by weight, or 80 to 100% by weight.
  • the pigment dispersion of the present invention preferably contains (C) a dispersion aid in order to improve the dispersion stability of (A) the pigment.
  • the dispersion aid include pigment derivatives.
  • pigment derivatives include azo, phthalocyanine, quinacridone, benzimidazolone, quinophthalone, isoindolinone, dioxazine, anthraquinone, indanthrene, perylene, perinone, and diketopyrrolopyrrole. , dioxazine derivatives, and phthalocyanine derivatives and quinophthalone derivatives are preferred.
  • substituents on pigment derivatives include sulfonic acid groups, sulfonamide groups and quaternary salts thereof, phthalimidomethyl groups, dialkylaminoalkyl groups, hydroxyl groups, carboxy groups, and amide groups directly on the pigment skeleton, or, for example, alkyl Examples include groups bonded via a group, an aryl group, and a heterocyclic group, and preferably a sulfonic acid group. A plurality of substituents may be substituted on one pigment skeleton.
  • pigment derivatives examples include sulfonic acid derivatives of phthalocyanine, sulfonic acid derivatives of quinophthalone, sulfonic acid derivatives of anthraquinone, sulfonic acid derivatives of quinacridone, sulfonic acid derivatives of diketopyrrolopyrrole, and sulfonic acid derivatives of dioxazine.
  • One type of dispersion aid may be used alone, or two or more types may be used in combination.
  • the content ratio of the (A) pigment and (C) dispersion aid on a mass basis is preferably 10 or more, more preferably 30 or more, even more preferably 50 or more, and is preferably 200 or less, more preferably 150 or less, and even more preferably 100 or less. If (A) pigment/(C) dispersion aid is equal to or higher than the above lower limit value, developability tends to be stable and substrate adhesion is more excellent, and if it is equal to or less than the above upper limit value, dispersion stability is better. Tend.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be 10-200, 30-150, or 50-100.
  • the content of the dispersion aid (C) based on the total solid content of the pigment dispersion is preferably 0.1% by mass or more, and 0.5% by mass. % or more, more preferably 1% by mass or more, further preferably 10% by mass or less, more preferably 5% by mass or less, even more preferably 3% by mass or less.
  • the content ratio of the dispersion aid is at least the above lower limit, the dispersion stability tends to be better, and when it is below the above upper limit, the developability is stable and the adhesion to the substrate tends to be better. be.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be 0.1 to 10% by weight, 0.5 to 5% by weight, or 1 to 3% by weight.
  • the pigment dispersion of the present invention may further contain components other than (A) pigment, (B) dispersant, (C) dispersion aid, organic solvent, and water, if necessary.
  • examples of other components include other components in the photosensitive resin composition described below.
  • the content ratio of other components to the total solid content of the pigment dispersion is preferably 5% by mass or less, more preferably 1% by mass or less, and may be 0% by mass.
  • the pigment dispersion of the present invention preferably has an absolute value of zeta potential of 50 mV or less, more preferably 48 mV or less, even more preferably 45 mV or less, particularly preferably 40 mV or less.
  • the lower limit is not particularly limited, but is usually 0 mV or more. If the absolute value of the zeta potential is below the upper limit value, the stability of the pigment dispersion is high and there is little pigment aggregation, so the generation of foreign matter is suppressed and the linearity of the pattern tends to improve.
  • the absolute value of the zeta potential of the pigment dispersion can be measured, for example, with a laser zeta potential meter ELSZ-2000ZS manufactured by Otsuka Electronics Co., Ltd. using a cell unit for low dielectric constant solvents.
  • the pigment dispersion of the present invention can be prepared, for example, by mixing optional components such as (A) pigment, (B) dispersant, organic solvent and water, and optionally (C) dispersion aid. Manufactured by a method of dispersion treatment. The amount of water to be mixed is set so that the final moisture content is within the above range.
  • the coating properties of the pigment dispersion and the photosensitive resin composition containing the same are improved.
  • the pigment contains a black pigment
  • the light blocking ability is also improved by the dispersion treatment.
  • a polymeric dispersant is used as the dispersant (B)
  • the resulting pigment dispersion and the photosensitive resin composition containing the same are inhibited from increasing in viscosity over time (excellent dispersion stability).
  • the dispersion treatment can be carried out using a known dispersion treatment device such as a paint conditioner, sand grinder, ball mill, roll mill, stone mill, jet mill, or homogenizer.
  • a known dispersion treatment device such as a paint conditioner, sand grinder, ball mill, roll mill, stone mill, jet mill, or homogenizer.
  • glass beads or zirconia beads having a diameter of about 0.1 to 8 mm are preferably used.
  • Dispersion treatment conditions are not particularly limited, but the temperature is, for example, in the range of 0°C to 100°C, preferably in the range of room temperature to 80°C.
  • the appropriate dispersion time varies depending on the composition of the liquid, the size of the dispersion processing apparatus, etc., and is therefore adjusted as appropriate.
  • a guideline for dispersion is to control the dispersion state of the pigment (A) so that the 20 degree specular gloss (JIS Z8741) of the coating film of the photosensitive resin composition is in the range of 100 to 200.
  • the dispersion treatment is often insufficient and rough pigment particles remain, which may result in insufficient developability, adhesion, resolution, etc. There is sex.
  • the dispersion treatment is performed until the gloss value exceeds the above range, the pigment will be crushed and a large number of ultrafine particles will be produced, which tends to impair the dispersion stability.
  • the obtained dispersion treated product can be filtered using a filter or the like, if necessary, for example, in order to separate the beads used in the dispersion treatment and the pigment dispersion liquid.
  • the photosensitive resin composition of the present invention contains the pigment dispersion of the present invention, (D) an alkali-soluble resin, (E) a photopolymerizable compound, and (F) a photopolymerization initiator.
  • the content ratio of the pigment dispersion liquid of the present invention is preferably 30% by mass or more, more preferably 40% by mass or more, in terms of the content ratio of the pigment (A) based on the total solid content of the photosensitive resin composition of the present invention. , more preferably 50% by mass or more, preferably 75% by mass or less, more preferably 70% by mass or less, even more preferably 65% by mass or less. If the content ratio of the pigment (A) is at least the above-mentioned lower limit, the resulting cured product tends to have better light blocking properties, and when it is below the above-mentioned upper limit, the cured product tends to have better formability.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be 30-75% by weight, it may be 40-70% by weight, it may be 50-65% by weight.
  • the solid content of the pigment dispersion of the present invention relative to the total solid content of the photosensitive resin composition of the present invention is preferably 40% by mass or more, more preferably 50% by mass or more, even more preferably 60% by mass or more, Further, it is preferably 90% by mass or less, more preferably 80% by mass or less, and even more preferably 70% by mass or less. If the solid content of the pigment dispersion is equal to or higher than the lower limit, the light-shielding property tends to be better, and if it is lower than the upper limit, the developing solubility tends to be better.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be 40 to 90% by weight, 50 to 80% by weight, or 60 to 70% by weight.
  • the alkali-soluble resin is not particularly limited as long as it exhibits alkali solubility, and includes, for example, resins containing carboxyl groups or hydroxyl groups. More specifically, examples thereof include epoxy (meth)acrylate resins, acrylic resins, carboxyl group-containing epoxy resins, carboxyl group-containing urethane resins, novolac resins, and polyvinylphenol resins. especially, (D1) Epoxy (meth)acrylate resin (D2) Acrylic copolymer resin is preferably used from the viewpoint of excellent plate-making properties.
  • One type of alkali-soluble resin can be used alone, or two or more types can be used in combination.
  • Epoxy (meth)acrylate resin is a combination of an epoxy compound (epoxy resin) and an ⁇ , ⁇ -unsaturated monocarboxylic acid and/or an ⁇ , ⁇ -unsaturated monocarboxylic acid ester having a carboxyl group in the ester moiety. It is a resin obtained by reacting the hydroxyl group generated by the reaction with a compound having two or more substituents capable of reacting with the hydroxyl group, such as a polybasic acid and/or its anhydride.
  • a compound having two or more substituents that can react with a hydroxyl group is reacted, and then the polybasic acid and/or its anhydride is reacted.
  • the resin obtained by is also included in (D1) epoxy (meth)acrylate resin.
  • a resin obtained by reacting a compound having a functional group that can further react with the carboxy group of the resin obtained by the above reaction is also included in the epoxy (meth)acrylate resin (D1).
  • Epoxy (meth)acrylate resin has a chemical structure that substantially does not have an epoxy group, and is not limited to “(meth)acrylate,” but it uses an epoxy compound (epoxy resin) as a raw material, and , "(meth)acrylate” is a typical example, so it is named this way according to common usage.
  • epoxy (meth)acrylate resin epoxy (meth)acrylate resin (D1-1) and/or epoxy (meth)acrylate resin (D1-2) (hereinafter referred to as "carboxy group-containing epoxy (meth) (sometimes referred to as "acrylate resin”) is preferably used from the viewpoint of developability and reliability.
  • epoxy (meth)acrylate resin one having an aromatic ring in the main chain can be more preferably used from the viewpoint of outgassing.
  • the epoxy resin includes a raw material compound before forming a resin by thermosetting, and the epoxy resin can be appropriately selected from known epoxy resins. Further, as the epoxy resin, a compound obtained by reacting a phenolic compound and epihalohydrin can be used.
  • the phenolic compound is preferably a compound having a divalent or divalent or higher phenolic hydroxyl group, and may be a monomer or a polymer. Examples of the types of epoxy resins used as raw materials include cresol novolak epoxy resin, phenol novolac epoxy resin, bisphenol A epoxy resin, bisphenol F epoxy resin, trisphenolmethane epoxy resin, biphenyl novolak epoxy resin, and naphthalene.
  • Novolak-type epoxy resins epoxy resins that are reaction products of polyaddition products of dicyclopentadiene and phenol or cresol, and epihalohydrin, adamantyl group-containing epoxy resins, and fluorene-type epoxy resins can be suitably used. Those having an aromatic ring can be more preferably used.
  • epoxy resins examples include bisphenol A type epoxy resins (for example, "jER (registered trademark, the same applies hereinafter) 828", “jER1001", “jER1002", “jER1004", etc. manufactured by Mitsubishi Chemical Corporation), bisphenol A type epoxy resins, etc. Epoxy resins obtained by the reaction of alcoholic hydroxyl groups of epoxy resins with epichlorohydrin (for example, "NER-1302” manufactured by Nippon Kayaku Co., Ltd. (epoxy equivalent: 323, softening point 76°C)), bisphenol F type resins (for example, manufactured by Mitsubishi Chemical Co., Ltd.) "JER807", “EP-4001”, “EP-4002", “EP-4004", etc.
  • bisphenol A type epoxy resins for example, "jER (registered trademark, the same applies hereinafter) 828", “jER1001", “jER1002", “jER1004", etc. manufactured by Mitsubishi Chemical Corporation
  • Resins for example, "EXA-7200” manufactured by DIC, "NC-7300” manufactured by Nippon Kayaku Co., Ltd.
  • epoxy resins represented by the following general formulas (B1) to (B4) can be suitably used.
  • B1 epoxy resin represented by the following general formula (B1)
  • B2 epoxy resin represented by the following general formula (B2)
  • B3 epoxy resin represented by Osaka Organic Chemical Industry Co., Ltd.
  • E-201 manufactured by Osaka Organic Chemical Industry Co., Ltd.
  • An example of this is the "ESF-300" manufactured by Manufacturer.
  • a is an average value and represents a number from 0 to 10
  • R 111 each independently represents a hydrogen atom, a halogen atom, an alkyl group having 1 to 8 carbon atoms, or a cycloalkyl group having 3 to 10 carbon atoms. group, phenyl group, naphthyl group, or biphenyl group. Note that the plurality of R 111s present in one molecule may be the same or different.
  • b1 and b2 are each independently an average value and represent a number from 0 to 10
  • R 121 is each independently a hydrogen atom, a halogen atom, an alkyl group having 1 to 8 carbon atoms, or 3 carbon atoms. ⁇ 10 cycloalkyl, phenyl, naphthyl, or biphenyl groups. Note that the plurality of R 121s present in one molecule may be the same or different.
  • X represents a linking group represented by the following general formula (B3-1) or (B3-2).
  • the molecular structure contains one or more adamantane structures.
  • c represents 2 or 3.
  • R 131 to R 134 and R 135 to R 137 each independently represent an adamantyl group that may have a substituent, a hydrogen atom, or an adamantyl group that has a substituent. represents an optionally substituted alkyl group having 1 to 12 carbon atoms, or a phenyl group optionally having a substituent, and * represents a bond.
  • R 141 and R 142 each independently represent an alkyl group having 1 to 4 carbon atoms or a halogen atom
  • R 143 and R 144 are Each independently represents an alkylene group having 1 to 4 carbon atoms
  • x and y each independently represents an integer of 0 or more.
  • epoxy resin it is preferable to use an epoxy resin represented by any of formulas (B1) to (B4).
  • Examples of the ⁇ , ⁇ -unsaturated monocarboxylic acid or the ⁇ , ⁇ -unsaturated monocarboxylic acid ester having a carboxy group include (meth)acrylic acid, crotonic acid, o-, m- or p-vinylbenzoic acid, Monocarboxylic acids such as ⁇ -position haloalkyl, alkoxyl, halogen, nitro, and cyano substituted products of (meth)acrylic acid; 2-(meth)acryloyloxyethylsuccinic acid, 2-(meth)acryloyloxyethyladipic acid, 2 -(meth)acryloyloxyethyl phthalic acid, 2-(meth)acryloyloxyethyl hexahydrophthalic acid, 2-(meth)acryloyloxyethylmaleic acid, 2-(meth)acryloyloxypropyl succinic acid, 2 -(meth)acryloyl
  • a method for adding an ⁇ , ⁇ -unsaturated monocarboxylic acid or an ⁇ , ⁇ -unsaturated monocarboxylic acid ester having a carboxyl group to an epoxy resin a known method can be used. For example, it is possible to react an ⁇ , ⁇ -unsaturated monocarboxylic acid or an ⁇ , ⁇ -unsaturated monocarboxylic acid ester having a carboxyl group with an epoxy resin at a temperature of 50 to 150°C in the presence of an esterification catalyst. can.
  • esterification catalyst used here for example, tertiary amines such as triethylamine, trimethylamine, benzyldimethylamine, and benzyldiethylamine, and quaternary ammonium salts such as tetramethylammonium chloride, tetraethylammonium chloride, and dodecyltrimethylammonium chloride can be used.
  • tertiary amines such as triethylamine, trimethylamine, benzyldimethylamine, and benzyldiethylamine
  • quaternary ammonium salts such as tetramethylammonium chloride, tetraethylammonium chloride, and dodecyltrimethylammonium chloride
  • Each component of the epoxy resin, ⁇ , ⁇ -unsaturated monocarboxylic acid or ⁇ , ⁇ -unsaturated monocarboxylic acid ester having a carboxyl group, and esterification catalyst may be selected one by one and used. , two or more types may be used in combination.
  • the amount of ⁇ , ⁇ -unsaturated monocarboxylic acid or ⁇ , ⁇ -unsaturated monocarboxylic acid ester having a carboxyl group is preferably 0.5 to 1.2 equivalents per equivalent of epoxy group in the epoxy resin, and Preferably it is 0.7 to 1.1 equivalent.
  • polybasic acids and/or anhydrides examples include maleic acid, succinic acid, itaconic acid, phthalic acid, tetrahydrophthalic acid, hexahydrophthalic acid, pyromellitic acid, trimellitic acid, benzophenonetetracarboxylic acid, and methylhexahydrophthalic acid.
  • examples include hydrophthalic acid, endomethylenetetrahydrophthalic acid, chlorendic acid, methyltetrahydrophthalic acid, biphenyltetracarboxylic acid, and anhydrides thereof.
  • maleic acid succinic acid, itaconic acid, phthalic acid, tetrahydrophthalic acid, hexahydrophthalic acid, pyromellitic acid, trimellitic acid, biphenyltetracarboxylic acid, or anhydrides thereof.
  • Particularly preferred are tetrahydrophthalic acid, biphenyltetracarboxylic acid, tetrahydrophthalic anhydride, or biphenyltetracarboxylic dianhydride.
  • the addition reaction of a polybasic acid and/or its anhydride can be carried out using a known method.
  • the desired product can be obtained by continuing the reaction under the same conditions as the addition reaction of carboxylic acid esters.
  • the amount of polybasic acid and/or its anhydride component added so that the acid value of the produced carboxyl group-containing epoxy (meth)acrylate resin is preferably 10 to 150 mgKOH/g, more preferably 20 to 140 mgKOH/g. It is preferable to control. When the amount is equal to or more than the lower limit, the alkali developability tends to be improved. There is a tendency for curing performance to be improved by setting the amount to be less than or equal to the upper limit value.
  • polyfunctional alcohols such as trimethylolpropane, ditrimethylolpropane, pentaerythritol, dipentaerythritol, trimethylolethane, 1,2,3-propanetriol, etc.
  • polyfunctional alcohols such as trimethylolpropane, ditrimethylolpropane, pentaerythritol, dipentaerythritol, trimethylolethane, 1,2,3-propanetriol, etc.
  • any hydroxyl group present in the mixture of the epoxy resin and the reaction product of ⁇ , ⁇ -unsaturated monocarboxylic acid or ⁇ , ⁇ -unsaturated monocarboxylic acid ester having a carboxyl group and polyfunctional alcohol is removed.
  • a polybasic acid and/or its anhydride undergoes an addition reaction.
  • carboxyl group-containing epoxy (meth)acrylate resin examples include, in addition to those mentioned above, the resin described in Korean Patent Publication No. 10-2013-0022955.
  • the weight average molecular weight (Mw) of the carboxyl group-containing epoxy (meth)acrylate resin in terms of polystyrene measured by gel permeation chromatography (GPC) is preferably 1000 or more, more preferably 1500 or more, even more preferably 2000 or more, It is even more preferably 3,000 or more, particularly preferably 4,000 or more, particularly preferably 5,000 or more. Further, it is preferably 30,000 or less, more preferably 20,000 or less, and still more preferably 15,000 or less.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be 1000 to 30000, 1500 to 20000, 1500 to 15000, or 2000 to 15000.
  • the acid value of the carboxyl group-containing epoxy (meth)acrylate resin is not particularly limited, but is preferably 20 mgKOH/g or more, more preferably 40 mgKOH/g or more, even more preferably 60 mgKOH/g or more, even more preferably 80 mgKOH/g or more. , 100 mgKOH/g or more is particularly preferred. Moreover, 200 mgKOH/g or less is preferable, 150 mgKOH/g or less is more preferable, 130 mgKOH/g or less is still more preferable, and 120 mgKOH/g or less is particularly preferable. When the amount is at least the lower limit, development solubility tends to improve and resolution tends to improve.
  • the residual film rate of the photosensitive coloring composition tends to be good.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be 20 mgKOH/g to 200 mgKOH/g, it may be 60 mgKOH/g to 150 mgKOH/g, it may be 80 mgKOH/g to 130 mgKOH/g, it may be 100 mgKOH/g to 130 mgKOH/g.
  • the chemical structure of the epoxy (meth)acrylate resin is not particularly limited, but from the viewpoint of developability and reliability, the epoxy (meth)acrylate resin (hereinafter referred to as , may be abbreviated as "(d1-I) epoxy (meth)acrylate resin") and/or epoxy (meth)acrylate resin having a partial structure represented by the following general formula (d1-II) ( Hereinafter, it may be abbreviated as "(d1-II) epoxy (meth)acrylate resin”).
  • R 11 represents a hydrogen atom or a methyl group
  • R 12 represents a divalent hydrocarbon group that may have a substituent
  • k represents 1 or 2
  • the benzene ring in formula (d1-I) may be further substituted with any substituent.
  • R 13 each independently represents a hydrogen atom or a methyl group
  • R 14 represents a divalent hydrocarbon group having a cyclic hydrocarbon group as a side chain
  • R 15 and R 16 each independently represents a divalent aliphatic group which may have a substituent
  • m and n each independently represent an integer of 0 to 2
  • * represents a bond.
  • R 11 represents a hydrogen atom or a methyl group
  • R 12 represents a divalent hydrocarbon group that may have a substituent
  • k represents 1 or 2
  • the benzene ring in formula (d1-I) may be further substituted with any substituent.
  • R 12 represents a divalent hydrocarbon group which may have a substituent.
  • divalent hydrocarbon groups include divalent aliphatic groups, divalent aromatic ring groups, and groups in which one or more divalent aliphatic groups and one or more divalent aromatic ring groups are connected. Can be mentioned.
  • divalent aliphatic groups examples include linear, branched, and cyclic aliphatic groups. From the viewpoint of development solubility, linear aliphatic groups are preferred. On the other hand, a cyclic aliphatic group is preferable from the viewpoint of reducing permeation of the developer into the exposed area.
  • the number of carbon atoms is preferably 1 or more, more preferably 3 or more, and even more preferably 6 or more. Further, it is preferably 20 or less, more preferably 15 or less, and even more preferably 10 or less. When the amount is at least the lower limit, a strong film is easily obtained, the surface roughness that occurs during development is less likely to occur, and the adhesion to the substrate tends to be good.
  • divalent linear aliphatic group examples include methylene group, ethylene group, n-propylene group, n-butylene group, n-pentylene group, n-hexylene group, and n-heptylene group. From the viewpoint of the rigidity of the skeleton, a methylene group is preferred.
  • the divalent branched aliphatic group includes, for example, a methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group as a side chain in addition to the above-mentioned divalent linear aliphatic group.
  • Examples include structures having a group, an isobutyl group, a sec-butyl group, and a tert-butyl group.
  • the number of rings that the divalent cyclic aliphatic group has is not particularly limited, but is preferably 1 or more, and more preferably 2 or more. Moreover, 12 or less is preferable, and 10 or less is more preferable.
  • the amount is equal to or more than the lower limit, the film tends to be strong and have good adhesion to the substrate.
  • By setting it below the above-mentioned upper limit deterioration of sensitivity and film thinning during development can be easily suppressed, and resolution tends to improve.
  • the above upper and lower limits can be arbitrarily combined.
  • the divalent cyclic aliphatic group include rings such as cyclohexane ring, cycloheptane ring, cyclodecane ring, cyclododecane ring, norbornane ring, isobornane ring, adamantane ring, cyclododecane ring, dicyclopentadiene, and dicyclopentane ring.
  • An example is a group obtained by removing two hydrogen atoms from . From the viewpoint of rigidity of the skeleton, a group obtained by removing two hydrogen atoms from a dicyclopentadiene ring, a dicyclopentane ring, or an adamantane ring is preferable.
  • Examples of the substituent that the divalent aliphatic group may have include an alkoxy group having 1 to 5 carbon atoms such as a methoxy group and an ethoxy group; a hydroxyl group; a nitro group; a cyano group; and a carboxy group. From the viewpoint of ease of synthesis, it is preferable that it is unsubstituted.
  • divalent aromatic ring group examples include a divalent aromatic hydrocarbon ring group and a divalent aromatic heterocyclic group.
  • the number of carbon atoms is not particularly limited, but is preferably 4 or more, more preferably 5 or more, and even more preferably 6 or more. Further, it is preferably 20 or less, more preferably 15 or less, and even more preferably 10 or less.
  • the amount is at least the lower limit, a strong film is easily obtained, the surface roughness that occurs during development is less likely to occur, and the adhesion to the substrate tends to be good.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be between 4 and 20, between 5 and 15, and between 6 and 10.
  • the aromatic hydrocarbon ring in the divalent aromatic hydrocarbon ring group may be a single ring or a fused ring.
  • Examples of the divalent aromatic hydrocarbon ring group include benzene ring, naphthalene ring, anthracene ring, phenanthrene ring, perylene ring, tetracene ring, pyrene ring, benzpyrene ring, chrysene ring, which have two free valences, Examples include triphenylene ring, acenaphthene ring, fluoranthene ring, and fluorene ring.
  • the aromatic heterocycle in the divalent aromatic heterocyclic group may be a single ring or a condensed ring.
  • divalent aromatic heterocyclic group examples include furan ring, benzofuran ring, thiophene ring, benzothiophene ring, pyrrole ring, pyrazole ring, imidazole ring, oxadiazole ring, and indole ring having two free valences.
  • benzene rings and naphthalene rings having two free valences are preferred, and
  • Examples of the substituents that the divalent aromatic ring group may have include a hydroxy group, a methyl group, a methoxy group, an ethyl group, an ethoxy group, a propyl group, and a propoxy group. From the viewpoint of development solubility, non-substitution is preferred.
  • the group linking one or more divalent aliphatic groups and one or more divalent aromatic ring groups includes one or more of the above-mentioned divalent aliphatic groups and the above-mentioned divalent aromatic ring group. Examples include groups in which one or more are linked.
  • the number of divalent aliphatic groups is not particularly limited, but is preferably 1 or more, more preferably 2 or more, preferably 10 or less, more preferably 5 or less, and even more preferably 3 or less. When the amount is at least the lower limit, a strong film is easily obtained, the surface roughness that occurs during development is less likely to occur, and the adhesion to the substrate tends to be good.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be from 1 to 10, it may be from 1 to 5, it may be from 1 to 3, it may be from 2 to 3.
  • the number of divalent aromatic ring groups is not particularly limited, but is preferably 1 or more, more preferably 2 or more, 10 or less, more preferably 5 or less, and even more preferably 3 or less.
  • the amount is at least the lower limit, a strong film is easily obtained, the surface roughness that occurs during development is less likely to occur, and the adhesion to the substrate tends to be good.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be from 1 to 10, it may be from 1 to 5, it may be from 1 to 3, it may be from 2 to 3.
  • Examples of groups connecting one or more divalent aliphatic groups and one or more divalent aromatic ring groups include those represented by the following formulas (d1-I-A) to (d1-IF). Examples include groups such as From the viewpoint of rigidity of the skeleton and hydrophobicization of the membrane, a group represented by the following formula (d1-IA) is preferable.
  • k represents 1 or 2. From the viewpoint of adhesion and patterning properties, k is preferably 1. From the viewpoint of NMP resistance, k is preferably 2. Furthermore, both a partial structure in which k is 1 and a partial structure in which k is 2 may be contained in the epoxy (meth)acrylate (d1-I).
  • the benzene ring in formula (d1-I) may be further substituted with any substituent.
  • substituents include a hydroxy group, a methyl group, a methoxy group, an ethyl group, an ethoxy group, a propyl group, and a propoxy group.
  • the number of substituents is not particularly limited either, and may be one or two or more. From the viewpoint of patterning properties, it is preferable that no substitution be made.
  • the partial structure represented by formula (d1-I) is preferably a partial structure represented by the following general formula (d1-I-1) from the viewpoint of ease of synthesis.
  • R 11 , R 12 and k have the same meanings as in formula (d1-I), R X represents a hydrogen atom or a polybasic acid residue, and * represents a bond. .
  • the benzene ring in formula (d1-I-1) may be further substituted with any substituent.
  • the polybasic acid residue means a monovalent group obtained by removing one OH group from a polybasic acid.
  • polybasic acids include maleic acid, succinic acid, itaconic acid, phthalic acid, tetrahydrophthalic acid, hexahydrophthalic acid, pyromellitic acid, trimellitic acid, benzophenonetetracarboxylic acid, methylhexahydrophthalic acid, and endomethylene.
  • examples include tetrahydrophthalic acid, chlorendic acid, methyltetrahydrophthalic acid, and biphenyltetracarboxylic acid.
  • maleic acid, succinic acid, itaconic acid, phthalic acid, tetrahydrophthalic acid, hexahydrophthalic acid, pyromellitic acid, trimellitic acid, biphenyltetracarboxylic acid are preferred, and tetrahydrophthalic acid is more preferred.
  • phthalic acid, biphenyltetracarboxylic acid, and biphenyltetracarboxylic acid are preferred.
  • the benzene ring in formula (d1-I-1) may be further substituted with any substituent.
  • substituent the groups listed for the benzene ring in formula (d1-I) can be preferably employed.
  • the partial structure represented by formula (d1-I-1) contained in one molecule of epoxy (meth)acrylate resin may be one type or two or more types, for example, when R A partial structure of atoms and a partial structure in which R X is a polybasic acid residue may coexist.
  • the number of partial structures represented by formula (d1-I) contained in one molecule of the epoxy (meth)acrylate resin is not particularly limited, but is preferably 1 or more, more preferably 3 or more. Moreover, 20 or less is preferable, and 15 or less is more preferable.
  • the amount is equal to or more than the lower limit, a strong film can be easily obtained, and surface roughness that occurs during development tends to be less likely to occur.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be 1 to 20, 1 to 15, or 3 to 15.
  • the weight average molecular weight (Mw) of the epoxy (meth)acrylate resin measured by gel permeation chromatography (GPC) in terms of polystyrene is not particularly limited, but is preferably 1000 or more, more preferably 1500 or more. , more preferably 2,000 or more, even more preferably 3,000 or more, particularly preferably 4,000 or more, most preferably 5,000 or more, preferably 30,000 or less, more preferably 20,000 or less, and even more preferably 15,000 or less.
  • the amount is equal to or more than the lower limit, the remaining film rate of the photosensitive coloring composition tends to be good.
  • the solubility in the developer tends to be improved.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be 1000-30000, 1500-2000, 1500-15000, or 2000-1500.
  • the acid value of the epoxy (meth)acrylate resin is not particularly limited, but is preferably 20 mgKOH/g or more, more preferably 40 mgKOH/g or more, even more preferably 60 mgKOH/g or more, and 80 mgKOH/g or more. It is even more preferable, and particularly preferably 100 mgKOH/g or more. Moreover, 200 mgKOH/g or less is preferable, 150 mgKOH/g or less is more preferable, 130 mgKOH/g or less is even more preferable, and 120 mgKOH/g or less is particularly preferable. When the amount is at least the lower limit, development solubility tends to improve and resolution tends to improve.
  • the residual film rate of the photosensitive coloring composition tends to be good.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be 20 mgKOH/g to 200 mgKOH/g, it may be 60 mgKOH/g to 150 mgKOH/g, it may be 80 mgKOH/g to 130 mgKOH/g, it may be 100 mgKOH/g to 130 mgKOH/g.
  • R 13 each independently represents a hydrogen atom or a methyl group
  • R 14 represents a divalent hydrocarbon group having a cyclic hydrocarbon group as a side chain
  • R 15 and R 16 each independently represents a divalent aliphatic group which may have a substituent
  • m and n each independently represent an integer of 0 to 2
  • * represents a bond.
  • R 14 represents a divalent hydrocarbon group having a cyclic hydrocarbon group as a side chain.
  • the cyclic hydrocarbon group include an aliphatic ring group and an aromatic ring group.
  • the number of rings that the aliphatic cyclic group has is not particularly limited, but is preferably one or more, and more preferably two or more. Further, it is preferably 10 or less, more preferably 5 or less, and even more preferably 3 or less.
  • the amount is at least the lower limit, a strong film can be easily obtained, and surface roughness that occurs during development tends to be less likely to occur.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be from 1 to 10, it may be from 1 to 5, it may be from 1 to 3, it may be from 2 to 3.
  • the number of carbon atoms in the aliphatic cyclic group is not particularly limited, but is preferably 4 or more, more preferably 6 or more, and even more preferably 8 or more. Further, it is preferably 40 or less, more preferably 30 or less, even more preferably 20 or less, and particularly preferably 15 or less.
  • the amount is at least the lower limit, a strong film can be easily obtained, and surface roughness that occurs during development tends to be less likely to occur.
  • By setting it below the above-mentioned upper limit deterioration of sensitivity and film thinning during development can be easily suppressed, and resolution tends to improve.
  • the above upper and lower limits can be arbitrarily combined.
  • aliphatic ring in the aliphatic ring group examples include a cyclohexane ring, a cycloheptane ring, a cyclodecane ring, a cyclododecane ring, a norbornane ring, an isobornane ring, an adamantane ring, and a cyclododecane ring. From the viewpoint of the residual film rate and resolution of the photosensitive coloring composition, an adamantane ring is preferred.
  • the number of rings that the aromatic ring group has is not particularly limited, but is preferably 1 or more, more preferably 2 or more, and even more preferably 3 or more. Further, it is preferably 10 or less, more preferably 5 or less, and even more preferably 4 or less.
  • the above upper and lower limits can be arbitrarily combined.
  • the number is preferably 1 to 10, more preferably 1 to 5, even more preferably 1 to 4, even more preferably 2 to 4, and particularly preferably 3 to 4.
  • the amount is equal to or more than the lower limit, a strong film can be easily obtained, and surface roughness that occurs during development tends to be less likely to occur.
  • the aromatic ring group examples include an aromatic hydrocarbon ring group and an aromatic heterocyclic group.
  • the number of carbon atoms in the aromatic ring group is not particularly limited, but is preferably 4 or more, more preferably 6 or more, even more preferably 8 or more, even more preferably 10 or more, and particularly preferably 12 or more. Further, it is preferably 40 or less, more preferably 30 or less, even more preferably 20 or less, and particularly preferably 15 or less.
  • the amount When the amount is equal to or more than the lower limit, a strong film can be easily obtained, and surface roughness that occurs during development tends to be less likely to occur.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be from 4 to 40, from 6 to 40, from 8 to 30, from 10 to 20, and from 12 to 15.
  • Examples of the aromatic ring in the aromatic ring group include a benzene ring, a naphthalene ring, an anthracene ring, a phenanthrene ring, a perylene ring, a tetracene ring, a pyrene ring, a benzpyrene ring, a chrysene ring, a triphenylene ring, an acenaphthene ring, a fluoranthene ring, and a fluorene ring.
  • Examples include rings. From the viewpoint of patterning properties, a fluorene ring is preferred.
  • the divalent hydrocarbon group in the divalent hydrocarbon group having a cyclic hydrocarbon group as a side chain is not particularly limited, but includes, for example, a divalent aliphatic group, a divalent aromatic ring group, and one or more divalent hydrocarbon groups. Examples include groups in which a valent aliphatic group and one or more divalent aromatic ring groups are connected.
  • divalent aliphatic groups examples include linear, branched, and cyclic aliphatic groups.
  • a linear aliphatic group is preferred from the viewpoint of development solubility, while a cyclic aliphatic group is preferred from the viewpoint of reducing permeation of the developer into the exposed area.
  • the number of carbon atoms is not particularly limited, but is preferably 1 or more, more preferably 3 or more, and even more preferably 6 or more. Further, it is preferably 25 or less, more preferably 20 or less, and even more preferably 15 or less. When the amount is at least the lower limit, a strong film is easily obtained, the surface roughness that occurs during development is less likely to occur, and the adhesion to the substrate tends to be good.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be between 1 and 25, between 3 and 20, and between 6 and 15.
  • Examples of the divalent linear aliphatic group include methylene group, ethylene group, n-propylene group, n-butylene group, n-pentylene group, n-hexylene group, and n-heptylene group. From the viewpoint of the rigidity of the skeleton, a methylene group is preferred.
  • Examples of the divalent branched aliphatic group include a methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group as a side chain in addition to the above-mentioned divalent linear aliphatic group. , an isobutyl group, a sec-butyl group, and a tert-butyl group.
  • the number of rings that the divalent cyclic aliphatic group has is not particularly limited, but is preferably 1 or more, and more preferably 2 or more. Further, it is preferably 10 or less, more preferably 5 or less, and even more preferably 3 or less.
  • the content is equal to or more than the lower limit, the film tends to be strong and have good adhesion to the substrate.
  • the amount to be below the upper limit deterioration of sensitivity and film thinning during development can be easily suppressed, and resolution tends to improve.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be from 1 to 10, it may be from 1 to 5, it may be from 1 to 3, it may be from 2 to 3.
  • divalent cyclic aliphatic groups include groups obtained by removing two hydrogen atoms from a cyclohexane ring, cycloheptane ring, cyclodecane ring, cyclododecane ring, norbornane ring, isobornane ring, adamantane ring, and cyclododecane ring. can be mentioned. From the viewpoint of skeleton rigidity, a group obtained by removing two hydrogen atoms from an adamantane ring is preferable.
  • Examples of the substituent that the divalent aliphatic group may have include an alkoxy group having 1 to 5 carbon atoms such as a methoxy group and an ethoxy group; a hydroxyl group; a nitro group; a cyano group; and a carboxy group. From the viewpoint of ease of synthesis, it is preferable that it is unsubstituted.
  • divalent aromatic ring group examples include a divalent aromatic hydrocarbon ring group and a divalent aromatic heterocyclic group.
  • the number of carbon atoms is not particularly limited, but is preferably 4 or more, more preferably 5 or more, and even more preferably 6 or more. Further, it is preferably 30 or less, more preferably 20 or less, and even more preferably 15 or less.
  • the amount is at least the lower limit, a strong film is easily obtained, the surface roughness that occurs during development is less likely to occur, and the adhesion to the substrate tends to be good.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be between 4 and 30, between 5 and 20, and between 6 and 15.
  • the aromatic hydrocarbon ring in the divalent aromatic hydrocarbon ring group may be a single ring or a fused ring.
  • Examples of the divalent aromatic hydrocarbon ring group include benzene ring, naphthalene ring, anthracene ring, phenanthrene ring, perylene ring, tetracene ring, pyrene ring, benzpyrene ring, chrysene ring, which have two free valences, Examples include triphenylene ring, acenaphthene ring, fluoranthene ring, and fluorene ring.
  • the aromatic heterocycle in the divalent aromatic heterocyclic group may be a single ring or a condensed ring.
  • divalent aromatic heterocyclic group examples include furan ring, benzofuran ring, thiophene ring, benzothiophene ring, pyrrole ring, pyrazole ring, imidazole ring, oxadiazole ring, and indole ring having two free valences.
  • benzene ring or a naphthalen
  • Examples of the substituents that the divalent aromatic ring group may have include a hydroxy group, a methyl group, a methoxy group, an ethyl group, an ethoxy group, a propyl group, and a propoxy group. From the viewpoint of development solubility, non-substitution is preferred.
  • the group linking one or more divalent aliphatic groups and one or more divalent aromatic ring groups includes one or more of the above-mentioned divalent aliphatic groups and the above-mentioned divalent aromatic ring group. Examples include groups in which one or more are linked.
  • the number of divalent aliphatic groups is not particularly limited, but is preferably 1 or more, more preferably 2 or more, preferably 10 or less, more preferably 5 or less, and even more preferably 3 or less. When the amount is at least the lower limit, a strong film is easily obtained, the surface roughness that occurs during development is less likely to occur, and the adhesion to the substrate tends to be good.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be from 1 to 10, it may be from 1 to 5, it may be from 1 to 3, it may be from 2 to 3.
  • the number of divalent aromatic ring groups is not particularly limited, but is preferably 1 or more, more preferably 2 or more, 10 or less, more preferably 5 or less, and even more preferably 3 or less.
  • the amount is at least the lower limit, a strong film is easily obtained, the surface roughness that occurs during development is less likely to occur, and the adhesion to the substrate tends to be good.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be from 1 to 10, it may be from 1 to 5, it may be from 1 to 3, it may be from 2 to 3.
  • Examples of groups linking one or more divalent aliphatic groups and one or more divalent aromatic ring groups include those represented by the above-mentioned formulas (d1-I-A) to (d1-IF). The following groups are mentioned. From the viewpoint of skeleton rigidity and membrane hydrophobization, a group represented by formula (d1-IC) is preferred.
  • the bonding mode of the cyclic hydrocarbon group as a side chain to these divalent hydrocarbon groups is not particularly limited, but for example, if one hydrogen atom of an aliphatic group or an aromatic ring group is Examples include an embodiment in which the aliphatic group is substituted with a hydrocarbon group, and an embodiment in which a cyclic hydrocarbon group that is a side chain includes one of the carbon atoms of the aliphatic group.
  • R 15 and R 16 each independently represent a divalent aliphatic group which may have a substituent.
  • divalent aliphatic groups examples include linear, branched, and cyclic aliphatic groups.
  • a linear aliphatic group is preferred from the viewpoint of development solubility, while a cyclic aliphatic group is preferred from the viewpoint of reducing permeation of the developer into the exposed area.
  • the number of carbon atoms is not particularly limited, but is preferably 1 or more, more preferably 3 or more, and even more preferably 6 or more. Further, it is preferably 20 or less, more preferably 15 or less, and even more preferably 10 or less. When the amount is at least the lower limit, a strong film is easily obtained, the surface roughness that occurs during development is less likely to occur, and the adhesion to the substrate tends to be good.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be between 1 and 20, between 3 and 15, and between 6 and 10.
  • divalent linear aliphatic group examples include methylene group, ethylene group, n-propylene group, n-butylene group, n-pentylene group, n-hexylene group, and n-heptylene group. From the viewpoint of the rigidity of the skeleton, a methylene group is preferred.
  • the divalent branched aliphatic group includes, for example, a methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group as a side chain in addition to the above-mentioned divalent linear aliphatic group.
  • Examples include structures having a group, an isobutyl group, a sec-butyl group, and a tert-butyl group.
  • the number of rings that the divalent cyclic aliphatic group has is not particularly limited, but is preferably 1 or more, and more preferably 2 or more. Moreover, 12 or less is preferable, and 10 or less is more preferable.
  • the amount is equal to or more than the lower limit, the film tends to be strong and have good adhesion to the substrate.
  • By setting it below the above-mentioned upper limit deterioration of sensitivity and film thinning during development can be easily suppressed, and resolution tends to improve.
  • the above upper and lower limits can be arbitrarily combined.
  • the divalent cyclic aliphatic group examples include two hydrogen atoms from a cyclohexane ring, cycloheptane ring, cyclodecane ring, cyclododecane ring, norbornane ring, isobornane ring, adamantane ring, cyclododecane ring, and dicyclopentadiene ring.
  • Examples include groups that have been removed. From the viewpoint of skeleton rigidity, a group obtained by removing two hydrogen atoms from a dicyclopentadiene ring or an adamantane ring is preferable.
  • Examples of the substituent that the divalent aliphatic group may have include an alkoxy group having 1 to 5 carbon atoms such as a methoxy group and an ethoxy group; a hydroxyl group; a nitro group; a cyano group; and a carboxy group. From the viewpoint of ease of synthesis, it is preferable that it is unsubstituted.
  • m and n each independently represent an integer of 0 to 2.
  • the amount is at least the lower limit, patterning becomes more appropriate and surface roughness that occurs during development tends to be less likely to occur, and when the amount is at most the upper limit, the developability tends to be good.
  • m and n are preferably 0.
  • m and n are preferably 1 or more.
  • the partial structure represented by formula (d1-II) is preferably a partial structure represented by the following general formula (d1-II-1) from the viewpoint of adhesion to the substrate.
  • R 13 , R 15 , R 16 , m and n have the same meanings as in formula (d1-II), and R ⁇ is a monovalent group that may have a substituent. It represents a cyclic hydrocarbon group, p represents an integer of 1 or more, and * represents a bond.
  • the benzene ring in formula (d1-II-1) may be further substituted with any substituent.
  • R ⁇ represents a monovalent cyclic hydrocarbon group which may have a substituent.
  • the cyclic hydrocarbon group include an aliphatic ring group and an aromatic ring group.
  • the number of rings that the aliphatic cyclic group has is not particularly limited, but is preferably one or more, and more preferably two or more. Further, it is preferably 6 or less, more preferably 4 or less, and even more preferably 3 or less.
  • the amount is equal to or more than the lower limit, a strong film can be easily obtained, and surface roughness that occurs during development tends to be less likely to occur.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be from 1 to 6, it may be from 1 to 4, it may be from 1 to 3, it may be from 2 to 3.
  • the number of carbon atoms in the aliphatic cyclic group is not particularly limited, but is preferably 4 or more, more preferably 6 or more, and even more preferably 8 or more. Further, it is preferably 40 or less, more preferably 30 or less, even more preferably 20 or less, and particularly preferably 15 or less.
  • the amount is equal to or more than the lower limit, a strong film can be easily obtained, and surface roughness that occurs during development tends to be less likely to occur. By setting it below the above-mentioned upper limit, patterning characteristics tend to be improved.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be between 4 and 40, between 4 and 30, between 6 and 20, and between 8 and 15.
  • Examples of the aliphatic ring in the aliphatic ring group include a cyclohexane ring, a cycloheptane ring, a cyclodecane ring, a cyclododecane ring, a norbornane ring, an isobornane ring, an adamantane ring, and a cyclododecane ring. From the viewpoint of strong film properties, an adamantane ring is preferred.
  • the number of rings that the aromatic ring group has is not particularly limited, but is preferably 1 or more, preferably 2 or more, and more preferably 3 or more. Moreover, 10 or less is preferable, and 5 or less is more preferable.
  • the amount is at least the lower limit, a strong film can be easily obtained, and surface roughness that occurs during development tends to be less likely to occur. By setting it below the above-mentioned upper limit, patterning characteristics tend to be improved.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be from 1 to 10, it may be from 1 to 5, it may be from 2 to 5, it may be from 3 to 5.
  • the aromatic ring group include an aromatic hydrocarbon ring group and an aromatic heterocyclic group.
  • the number of carbon atoms in the aromatic ring group is not particularly limited, but is preferably 4 or more, more preferably 5 or more, and even more preferably 6 or more. Further, it is preferably 30 or less, more preferably 20 or less, and even more preferably 15 or less.
  • the amount is at least the lower limit, a strong film can be easily obtained, and surface roughness that occurs during development tends to be less likely to occur.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be between 4 and 30, between 5 and 20, and between 6 and 15.
  • Examples of the aromatic ring in the aromatic ring group include a benzene ring, a naphthalene ring, an anthracene ring, a phenanthrene ring, and a fluorene ring. From the viewpoint of development solubility, a fluorene ring is preferred.
  • substituents that the cyclic hydrocarbon group may have include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, sec-butyl group, tert-butyl group, amyl group, Examples include alkyl groups having 1 to 5 carbon atoms such as isoamyl group; alkoxy groups having 1 to 5 carbon atoms such as methoxy group and ethoxy group; hydroxyl group; nitro group; cyano group; and carboxy group. From the viewpoint of ease of synthesis, no substitution is preferred.
  • p represents an integer of 1 or more, preferably 2 or more. Moreover, 3 or less is preferable. For example, 1 to 3 are preferable, and 2 to 3 are more preferable.
  • the amount is equal to or more than the lower limit, the degree of film curing and the remaining film rate tend to be good.
  • the amount is below the upper limit, developability tends to be improved.
  • R ⁇ is preferably a monovalent aliphatic cyclic group, and more preferably an adamantyl group.
  • the benzene ring in formula (d1-II-1) may be further substituted with any substituent.
  • substituents include a hydroxy group, a methyl group, a methoxy group, an ethyl group, an ethoxy group, a propyl group, and a propoxy group.
  • the number of substituents is not particularly limited either, and may be one or two or more. From the viewpoint of patterning properties, it is preferable that no substitution be made.
  • the partial structure represented by the formula (d1-II) is preferably a partial structure represented by the following general formula (d1-II-2) from the viewpoint of skeleton rigidity and membrane hydrophobization.
  • R 13 , R 15 , R 16 , m and n have the same meanings as in formula (d1-II), and R ⁇ is a divalent group which may have a substituent. represents a cyclic hydrocarbon group, and * represents a bond.
  • the benzene ring in formula (d1-II-2) may be further substituted with any substituent.
  • R ⁇ represents a divalent cyclic hydrocarbon group which may have a substituent.
  • the cyclic hydrocarbon group include an aliphatic ring group and an aromatic ring group.
  • the number of rings that the aliphatic cyclic group has is not particularly limited, but is preferably one or more, and more preferably two or more. Moreover, 10 or less is preferable, and 5 or less is more preferable.
  • the amount is at least the lower limit, a strong film can be easily obtained, and surface roughness that occurs during development tends to be less likely to occur.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be from 1 to 10, or from 2 to 5.
  • the number of carbon atoms in the aliphatic cyclic group is preferably 4 or more, more preferably 6 or more, and even more preferably 8 or more. Further, it is preferably 40 or less, more preferably 35 or less, and even more preferably 30 or less.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be 4-40, 6-35, or 8-30.
  • Examples of the aliphatic ring in the aliphatic ring group include a cyclohexane ring, a cycloheptane ring, a cyclodecane ring, a cyclododecane ring, a norbornane ring, an isobornane ring, an adamantane ring, and a cyclododecane ring. From the viewpoint of film loss during development and resolution, an adamantane ring is preferred.
  • the number of rings that the aromatic ring group has is not particularly limited, but is preferably 1 or more, more preferably 2 or more, and even more preferably 3 or more. Moreover, 10 or less is preferable, and 5 or less is more preferable.
  • the amount is equal to or more than the lower limit, a strong film can be easily obtained, and surface roughness that occurs during development tends to be less likely to occur.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be from 1 to 10, it may be from 1 to 5, it may be from 2 to 5, it may be from 3 to 5.
  • the aromatic ring group examples include an aromatic hydrocarbon ring group and an aromatic heterocyclic group.
  • the number of carbon atoms in the aromatic ring group is preferably 4 or more, more preferably 6 or more, even more preferably 8 or more, and even more preferably 10 or more. Further, it is preferably 40 or less, more preferably 30 or less, even more preferably 20 or less, and particularly preferably 15 or less.
  • the amount is equal to or more than the lower limit, a strong film can be easily obtained, and surface roughness that occurs during development tends to be less likely to occur. By setting it below the above-mentioned upper limit value, deterioration of sensitivity and film thinning can be easily suppressed, and resolution tends to improve.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be 4-40, 6-30, 8-20, or 10-15.
  • the aromatic ring in the aromatic ring group include a benzene ring, a naphthalene ring, an anthracene ring, a phenanthrene ring, and a fluorene ring. From the viewpoint of developability, a fluorene ring is preferred.
  • substituents that the cyclic hydrocarbon group may have include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, sec-butyl group, tert-butyl group, amyl group, Examples include alkyl groups having 1 to 5 carbon atoms such as isoamyl group; alkoxy groups having 1 to 5 carbon atoms such as methoxy group and ethoxy group; hydroxyl group; nitro group; cyano group; and carboxy group. From the viewpoint of ease of synthesis, no substitution is preferred.
  • R ⁇ is preferably a divalent aliphatic cyclic group, and more preferably a divalent adamantane cyclic group.
  • R ⁇ is preferably a divalent aromatic ring group, and more preferably a divalent fluorene ring group.
  • the benzene ring in formula (d1-II-2) may be further substituted with any substituent.
  • substituents include a hydroxy group, a methyl group, a methoxy group, an ethyl group, an ethoxy group, a propyl group, and a propoxy group.
  • the number of substituents is not particularly limited either, and may be one or two or more.
  • the two benzene rings in formula (d1-II-2) are connected via R ⁇ , and may be further connected via a substituent to form a tricyclic structure.
  • substituent in this case include divalent groups such as -O-, -S-, -NH-, and -CH 2 -.
  • a tricyclic structure by connecting via -O- means that the carbon atoms at the ortho position of the carbon atom bonded to R ⁇ on each benzene ring are connected via -O-, It means forming a xanthene skeleton. From the viewpoint of patterning properties, it is preferable that no substitution be made. Furthermore, from the viewpoint of making film thinning less likely to occur, methyl group substitution is preferable.
  • the partial structure represented by the formula (d1-II) is preferably a partial structure represented by the following general formula (d1-II-3) from the viewpoint of coating film remaining rate and patterning characteristics.
  • R 13 , R 14 , R 15 , R 16 , m and n have the same meanings as in formula (d1-II), and R Z represents a hydrogen atom or a polybasic acid residue. represent.
  • the polybasic acid residue means a monovalent group obtained by removing one OH group from a polybasic acid. Note that one more OH group may be removed and shared with R Z in another molecule represented by formula (d1-II-3). That is, a plurality of formulas (d1-II-3) may be connected via R Z.
  • polybasic acids include maleic acid, succinic acid, itaconic acid, phthalic acid, tetrahydrophthalic acid, hexahydrophthalic acid, pyromellitic acid, trimellitic acid, benzophenonetetracarboxylic acid, methylhexahydrophthalic acid, and endomethylene.
  • Examples include tetrahydrophthalic acid, chlorendic acid, methyltetrahydrophthalic acid, and biphenyltetracarboxylic acid.
  • maleic acid, succinic acid, itaconic acid, phthalic acid, tetrahydrophthalic acid, hexahydrophthalic acid, pyromellitic acid, trimellitic acid, biphenyltetracarboxylic acid are preferable, and tetrahydrophthalic acid is more preferable.
  • They are phthalic acid, biphenyltetracarboxylic acid, and biphenyltetracarboxylic acid.
  • the partial structure represented by formula (d1-II) contained in one molecule of epoxy (meth)acrylate resin may be one type or two or more types.
  • R Z is hydrogen
  • R Z is a mixture of atoms and those in which R Z is a polybasic acid residue.
  • the number of partial structures represented by formula (d1-II) contained in one molecule of the epoxy (meth)acrylate resin is not particularly limited, but is preferably 1 or more, more preferably 3 or more. Further, it is preferably 20 or less, more preferably 15 or less, and even more preferably 10 or less.
  • the amount is equal to or more than the lower limit, a strong film can be easily obtained, and surface roughness that occurs during development tends to be less likely to occur.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be from 1 to 20, it may be from 1 to 15, it may be from 3 to 10.
  • the weight average molecular weight (Mw) of the epoxy (meth)acrylate resin measured by gel permeation chromatography (GPC) in terms of polystyrene is not particularly limited, but is preferably 1000 or more, more preferably 1500 or more. , more preferably 2000 or more, even more preferably 3000 or more, even more preferably 4000 or more, particularly preferably 5000 or more. Further, it is preferably 10,000 or less, more preferably 8,000 or less, and even more preferably 7,000 or less. When the amount is equal to or more than the lower limit, the remaining film rate of the photosensitive coloring composition tends to be good. When the content is below the upper limit, the solubility in the developer tends to be improved.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be 1000-10000, 1500-10000, 1500-8000, 2000-8000, 2000-7000.
  • the acid value of the epoxy (meth)acrylate resin is not particularly limited, but is preferably 20 mgKOH/g or more, more preferably 40 mgKOH/g or more, even more preferably 60 mgKOH/g or more, and even more preferably 80 mgKOH/g or more. More preferably, 100 mgKOH/g or more is particularly preferable. Moreover, 200 mgKOH/g or less is preferable, 150 mgKOH/g or less is more preferable, 130 mgKOH/g or less is even more preferable, and 120 mgKOH/g or less is particularly preferable. When the amount is at least the lower limit, development solubility tends to improve and resolution tends to improve.
  • the residual film rate of the photosensitive coloring composition tends to be good.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be 20 mgKOH/g to 200 mgKOH/g, it may be 60 mgKOH/g to 150 mgKOH/g, it may be 80 mgKOH/g to 130 mgKOH/g, it may be 100 mgKOH/g to 130 mgKOH/g.
  • the carboxyl group-containing epoxy (meth)acrylate resin may be used alone or in combination of two or more. Further, a part of the above-mentioned carboxyl group-containing epoxy (meth)acrylate resin may be replaced with another binder resin. That is, a carboxyl group-containing epoxy (meth)acrylate resin and another binder resin may be used in combination.
  • the proportion of the carboxyl group-containing epoxy (meth)acrylate resin in the alkali-soluble resin (b) is preferably 50% by mass or more, more preferably 60% by mass or more, and 70% by mass or more. It is more preferable to set it as 80 mass % or more, and it is especially preferable to set it as 100 mass % or less.
  • (D2) Acrylic copolymer resin As the alkali-soluble resin, from the viewpoint of compatibility with pigments, dispersants, etc., it is preferable to use (D2) acrylic copolymer resin, and the resin described in Japanese Patent Application Publication No. 2014-137466 is preferably used. be able to.
  • (D2) As the acrylic copolymer resin, for example, an ethylenically unsaturated monomer having one or more carboxyl groups (hereinafter referred to as “unsaturated monomer (d2-1)”) and other copolymers Examples include copolymers with possible ethylenically unsaturated monomers (hereinafter referred to as “unsaturated monomers (d2-2)").
  • Examples of the unsaturated monomer (d2-1) include unsaturated monocarboxylic acids such as (meth)acrylic acid, crotonic acid, ⁇ -chloroacrylic acid, and cinnamic acid; maleic acid, maleic anhydride, and fumaric acid.
  • unsaturated monocarboxylic acids such as (meth)acrylic acid, crotonic acid, ⁇ -chloroacrylic acid, and cinnamic acid
  • maleic acid, maleic anhydride, and fumaric acid include unsaturated monocarboxylic acids such as (meth)acrylic acid, crotonic acid, ⁇ -chloroacrylic acid, and cinnamic acid.
  • These unsaturated monomers (d2-1) can be used alone or in combination of two or more.
  • Examples of the unsaturated monomer (d2-2) include: N-substituted maleimides such as N-phenylmaleimide and N-cyclohexylmaleimide; Aromatic vinyl compounds such as styrene, ⁇ -methylstyrene, p-hydroxystyrene, p-hydroxy- ⁇ -methylstyrene, p-vinylbenzyl glycidyl ether, acenaphthylene; Methyl (meth)acrylate, n-butyl (meth)acrylate, 2-ethylhexyl (meth)acrylate, 2-hydroxyethyl (meth)acrylate, allyl (meth)acrylate, benzyl (meth)acrylate, polyethylene glycol (polymerization degree 2 ⁇ 10) Methyl ether (meth)acrylate, polypropylene glycol (degree of polymerization 2-10) Methyl ether (meth)acrylate, polyethylene glycol
  • Examples include macromonomers having a mono(meth)acryloyl group at the end of a polymer molecular chain such as polystyrene, polymethyl(meth)acrylate, poly-n-butyl(meth)acrylate, and polysiloxane. These unsaturated monomers (d2-2) can be used alone or in combination of two or more.
  • the copolymerization ratio of unsaturated monomer (d2-1) is preferably 5 to 50% by mass. , more preferably 10 to 40% by mass.
  • Examples of the copolymer of unsaturated monomer (d2-1) and unsaturated monomer (d2-2) include Japanese Patent Application Publication No. 7-140654, Japanese Patent Application Publication No. 8-259876, Japanese Unexamined Patent Publication No. 10-31308, Japanese Unexamined Patent Publication No. 10-300922, Unexamined Japanese Patent Application No. 11-174224, Unexamined Japanese Patent Application No. 11-258415, Unexamined Japanese Patent Application No. 2000-56118, Copolymers disclosed in Japanese Patent Application Publication No. 2004-101728 can be mentioned.
  • the copolymer of the unsaturated monomer (d2-1) and the unsaturated monomer (d2-2) can be produced by a known method, for example, Japanese Patent Application Publication No. 2003-222717,
  • the structure, Mw, and Mw/Mn (Mn is the number average molecular weight) can also be controlled by the methods disclosed in Japanese Patent Application Publication No. 2006-259680 and International Publication No. 2007/029871.
  • the photosensitive resin composition of the present invention contains (E) a photopolymerizable compound from the viewpoint of sensitivity and the like.
  • the photopolymerizable compound include compounds having at least one ethylenically unsaturated group in the molecule (hereinafter sometimes referred to as "ethylenic monomers"). Specific examples include (meth)acrylic acid, (meth)acrylic acid alkyl esters, acrylonitrile, styrene, and esters of carboxylic acids having one ethylenically unsaturated bond and polyhydric or monohydric alcohols. .
  • a polyfunctional ethylenic monomer having two or more ethylenically unsaturated groups in one molecule.
  • the number of ethylenically unsaturated groups in the polyfunctional ethylenically monomer is preferably 3 or more, more preferably 4 or more, even more preferably 5 or more, particularly preferably 6 or more, and preferably 10. The number is more preferably 8 or less.
  • the photosensitive resin composition tends to have high sensitivity, and when it is equal to or less than the upper limit, curing shrinkage during polymerization tends to be reduced.
  • the above upper and lower limits can be arbitrarily combined.
  • the number may be 2 to 10, 3 to 10, 4 to 10, 5 to 8, or 6 to 8.
  • polyfunctional ethylenic monomers include, for example, esters of aliphatic polyhydroxy compounds and unsaturated carboxylic acids; esters of aromatic polyhydroxy compounds and unsaturated carboxylic acids; aliphatic polyhydroxy compounds, aromatic Examples include esters obtained by an esterification reaction between a polyhydric hydroxy compound such as a polyhydroxy compound, and an unsaturated carboxylic acid and a polybasic carboxylic acid.
  • esters of aliphatic polyhydroxy compounds and unsaturated carboxylic acids include ethylene glycol diacrylate, triethylene glycol diacrylate, trimethylolpropane triacrylate, trimethylolethane triacrylate, pentaerythritol diacrylate, and pentaerythritol triacrylate.
  • acrylic acid esters of aliphatic polyhydroxy compounds such as pentaerythritol tetraacrylate, dipentaerythritol tetraacrylate, dipentaerythritol pentaacrylate, dipentaerythritol hexaacrylate, glycerol acrylate, and methacrylic acid obtained by replacing the acrylate of these exemplary compounds with methacrylate.
  • esters such as itaconic esters in place of itaconate, crotonic esters in place of cronate or maleic esters in place of maleate.
  • esters of aromatic polyhydroxy compounds and unsaturated carboxylic acids include acrylic esters and methacrylates of aromatic polyhydroxy compounds such as hydroquinone diacrylate, hydroquinone dimethacrylate, resorcin diacrylate, resorcin dimethacrylate, and pyrogallol triacrylate.
  • esters of aromatic polyhydroxy compounds and unsaturated carboxylic acids include acrylic esters and methacrylates of aromatic polyhydroxy compounds such as hydroquinone diacrylate, hydroquinone dimethacrylate, resorcin diacrylate, resorcin dimethacrylate, and pyrogallol triacrylate.
  • acid esters include acid esters.
  • Esters obtained by the esterification reaction of polybasic carboxylic acids and unsaturated carboxylic acids with polyhydric hydroxy compounds are not necessarily single, but typical examples include acrylic acid, phthalic acid, and Examples include condensates of ethylene glycol, acrylic acid, maleic acid, and diethylene glycol, condensates of methacrylic acid, terephthalic acid, and pentaerythritol, and condensates of acrylic acid, adipic acid, butanediol, and glycerin.
  • polyfunctional ethylenic monomers used in the present invention include, for example, reacting a polyisocyanate compound with a hydroxyl group-containing (meth)acrylic ester or a polyisocyanate compound with a polyol and a hydroxyl group-containing (meth)acrylic ester.
  • urethane (meth)acrylates such as those obtained by oxidation
  • epoxy acrylates such as addition reaction products of polyvalent epoxy compounds and hydroxy (meth)acrylate or (meth)acrylic acid
  • acrylamides such as ethylene bisacrylamide
  • phthal Allyl esters such as acid diallyl
  • vinyl group-containing compounds such as divinyl phthalate are useful. These may be used alone or in combination of two or more.
  • the content ratio of the photopolymerizable compound is not particularly limited, but is preferably 90% by mass or less, more preferably 70% by mass or less, and 50% by mass or less based on the total solid content of the photosensitive resin composition. It is more preferably 30% by mass or less, even more preferably 20% by mass or less, most preferably 10% by mass or less, further preferably 1% by mass or more, and more preferably 5% by mass or more.
  • the content of the photopolymerizable compound is at most the above-mentioned upper limit, the permeability of the developer into the exposed area becomes appropriate, and a good image tends to be obtained.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be 1 to 90% by weight, 1 to 70% by weight, 1 to 50% by weight, 5 to 30% by weight, 5 to 20% by weight. It may well be between 5 and 10% by weight.
  • the photosensitive resin composition of the present invention contains (F) a photopolymerization initiator.
  • the photopolymerization initiator is a component that directly absorbs light, causes a decomposition reaction or a hydrogen abstraction reaction, and has the function of generating polymerization-active radicals. If necessary, an additive such as a sensitizing dye may be added.
  • Photopolymerization initiators include, for example, metallocene compounds containing titanocene compounds described in Japanese Patent Application Laid-open No. 59-152396 and Japanese Patent Application Publication No. 61-151197; Hexaarylbiimidazole derivatives described in Japanese Patent Publication No. 56118; N-aryl- ⁇ -amino acids such as halomethylated oxadiazole derivatives, halomethyl-s-triazine derivatives, and N-phenylglycine described in Japanese Patent Publication No.
  • radical activators such as N-aryl- ⁇ -amino acid salts, N-aryl- ⁇ -amino acid esters, ⁇ -aminoalkylphenone derivatives; Examples thereof include oxime ester derivatives described in Japanese Patent Publication No.
  • titanocene derivatives include dicyclopentadienyl titanium dichloride, dicyclopentadienyl titanium bisphenyl, dicyclopentadienyl titanium bis(2,3,4,5,6-pentafluorophenyl), and dicyclopentadienyl titanium bisphenyl.
  • biimidazole derivatives examples include 2-(2'-chlorophenyl)-4,5-diphenylimidazole dimer, 2-(2'-chlorophenyl)-4,5-bis(3'-methoxyphenyl)imidazole dimer, 2-(2'-fluorophenyl)-4,5-diphenylimidazole dimer, 2-(2'-methoxyphenyl)-4,5-diphenylimidazole dimer, (4'-methoxyphenyl) )-4,5-diphenylimidazole dimer.
  • halomethylated oxadiazole derivatives examples include 2-trichloromethyl-5-(2'-benzofuryl)-1,3,4-oxadiazole, 2-trichloromethyl-5-[ ⁇ -(2'- benzofuryl)vinyl]-1,3,4-oxadiazole, 2-trichloromethyl-5-[ ⁇ -(2'-(6''-benzofuryl)vinyl)]-1,3,4-oxadiazole, Examples include 2-trichloromethyl-5-furyl-1,3,4-oxadiazole.
  • halomethyl-s-triazine derivatives examples include 2-(4-methoxyphenyl)-4,6-bis(trichloromethyl)-s-triazine, 2-(4-methoxynaphthyl)-4,6-bis( trichloromethyl)-s-triazine, 2-(4-ethoxynaphthyl)-4,6-bis(trichloromethyl)-s-triazine, 2-(4-ethoxycarbonylnaphthyl)-4,6-bis(trichloromethyl) -s-triazine is mentioned.
  • ⁇ -aminoalkylphenone derivatives include 2-methyl-1[4-(methylthio)phenyl]-2-morpholinopropan-1-one, 2-benzyl-2-dimethylamino-1-(4- Morpholinophenyl)butan-1-one, 4-dimethylaminoethylbenzoate, 4-dimethylaminoisoamylbenzoate, 4-diethylaminoacetophenone, 4-dimethylaminopropiophenone, 2-ethylhexyl-1,4 -dimethylaminobenzoate, 2,5-bis(4-diethylaminobenzal)cyclohexanone, 7-diethylamino-3-(4-diethylaminobenzoyl)coumarin, and 4-(diethylamino)chalcone.
  • oxime derivatives (oxime ester compounds and ketooxime ester compounds) are preferable from the viewpoint of sensitivity.
  • oxime ester compounds are preferred from the viewpoint of adhesion to the substrate.
  • an alkali-soluble resin containing a phenolic hydroxyl group there may be a disadvantage in terms of sensitivity.
  • the oxime ester compound photopolymerization initiator has a structure that absorbs ultraviolet rays, a structure that transmits light energy, and a structure that generates radicals, so it is highly sensitive even in small amounts, and is highly sensitive to thermal reactions. It is stable against light, and it is possible to design a highly sensitive photosensitive resin composition in a small amount.
  • oxime ester compounds include compounds containing a structural moiety represented by the following general formula (22), and preferably oxime ester compounds represented by the following general formula (23).
  • R 22 is an alkanoyl group having 2 to 12 carbon atoms, a heteroarylalkanoyl group having 1 to 20 carbon atoms, an alkenoyl group having 3 to 25 carbon atoms, or an alkanoyl group having 3 to 25 carbon atoms, each of which may be substituted.
  • -8 cycloalkanoyl group, C3-20 alkoxycarbonylalkanoyl group, C8-20 phenoxycarbonylalkanoyl group, C3-20 heteroaryloxycarbonylalkanoyl group, C2-10 amino It represents an alkylcarbonyl group, an aryloyl group having 7 to 20 carbon atoms, a heteroaryloyl group having 1 to 20 carbon atoms, an alkoxycarbonyl group having 2 to 10 carbon atoms, or an aryloxycarbonyl group having 7 to 20 carbon atoms.
  • R 21a is hydrogen, or an alkyl group having 1 to 20 carbon atoms, an alkenyl group having 2 to 25 carbon atoms, a heteroarylalkyl group having 1 to 20 carbon atoms, each of which may be substituted; Alkoxycarbonylalkyl group having 3 to 20 carbon atoms, phenoxycarbonylalkyl group having 8 to 20 carbon atoms, heteroaryloxycarbonylalkyl group or heteroarylthioalkyl group having 1 to 20 carbon atoms, aminoalkyl group having 1 to 20 carbon atoms , alkanoyl group having 2 to 12 carbon atoms, alkenoyl group having 3 to 25 carbon atoms, cycloalkanoyl group having 3 to 8 carbon atoms, aryloyl group having 7 to 20 carbon atoms, heteroaryloyl group having 1 to 20 carbon atoms, carbon It represents an alkoxycarbonyl group having 2 to 10 carbon atoms, an aryloxycarbonyl group
  • R 22a represents the same group as R 22 in formula (22).
  • R 22 in formula (22) and R 22a in formula (23) are preferably an alkanoyl group having 2 to 12 carbon atoms, a heteroarylalkanoyl group having 1 to 20 carbon atoms, or a cycloalkanoyl group having 3 to 8 carbon atoms. can be mentioned.
  • R 21a in formula (23) is preferably an unsubstituted linear alkyl group such as a methyl group, ethyl group, or propyl group or a cycloalkylalkyl group, or propyl substituted with an N-acetyl-N-acetoxyamino group. Examples include groups.
  • R 21b in formula (23) includes an optionally substituted carbazolyl group, an optionally substituted thioxanthonyl group, and an optionally substituted phenyl sulfide group.
  • a compound in which R 21b in formula (23) is an optionally substituted carbazolyl group is more preferable for the reasons described above.
  • a carbazolyl group having at least one group selected from the group consisting of a benzoyl group, a toluoyl group, a naphthoyl group, a thienylcarbonyl group, and a nitro group. Further, these groups are desirably bonded to the 3-position of the carbazolyl group.
  • photopolymerization initiators of oxime ester compounds include, for example, OXE-02 manufactured by BASF, and TR-PBG-304 and TR-PBG-314 manufactured by Changzhou Powerful Electronics.
  • photopolymerization initiators for oxime ester compounds include the following.
  • ketooxime ester compounds include compounds containing a structural moiety represented by the following general formula (24), preferably ketoxime ester compounds represented by the following general formula (25).
  • R 24 has the same meaning as R 22 in formula (22).
  • R 23a is a phenyl group, an alkyl group having 1 to 20 carbon atoms, an alkenyl group having 2 to 25 carbon atoms, a heteroarylalkyl group having 1 to 20 carbon atoms, each of which may be substituted; Alkoxycarbonylalkyl group having 3 to 20 carbon atoms, phenoxycarbonylalkyl group having 8 to 20 carbon atoms, alkylthioalkyl group having 2 to 20 carbon atoms, heteroaryloxycarbonylalkyl group or heteroarylthioalkyl group having 1 to 20 carbon atoms , an aminoalkyl group having 1 to 20 carbon atoms, an alkanoyl group having 2 to 12 carbon atoms, an alkenoyl group having 3 to 25 carbon atoms, a cycloalkanoyl group having 3 to 8 carbon atoms, an aryloyl group having 7 to 20 carbon atoms, and an aryloyl group having 7 to
  • R 23b represents an arbitrary substituent containing an aromatic ring or a heteroaromatic ring.
  • R 24a is an alkanoyl group having 2 to 12 carbon atoms, an alkenoyl group having 3 to 25 carbon atoms, a cycloalkanoyl group having 4 to 8 carbon atoms, a benzoyl group having 7 to 20 carbon atoms, each of which may be substituted; Heteroaryloyl group having 3 to 20 carbon atoms, alkoxycarbonyl group having 2 to 10 carbon atoms, aryloxycarbonyl group having 7 to 20 carbon atoms, heteroaryl group having 2 to 20 carbon atoms, or alkylamino having 2 to 20 carbon atoms Represents a carbonyl group.
  • R 24 in formula (24) and R 24a in formula (25) are preferably an alkanoyl group having 2 to 12 carbon atoms, a heteroarylalkanoyl group having 1 to 20 carbon atoms, or a cycloalkanoyl group having 3 to 8 carbon atoms. , an aryloyl group having 7 to 20 carbon atoms.
  • R 23a in formula (25) includes an unsubstituted ethyl group, propyl group, butyl group, and an ethyl group or propyl group substituted with a methoxycarbonyl group.
  • R 23b in formula (25) preferably includes an optionally substituted carbazoyl group and an optionally substituted phenyl sulfide group. Examples of ketooxime ester compounds include the following.
  • photopolymerization initiators for ketoxime ester compounds include, for example, OXE-01 manufactured by BASF and TR-PBG-305 manufactured by Changzhou Powerful Electronics Co., Ltd.
  • the oxime ester compound and the ketooxime ester compound are compounds known per se, and are, for example, compounds described in Japanese Patent Application Publication No. 2000-80068 and Japanese Patent Application Publication No. 2006-36750.
  • One type of photopolymerization initiator may be used alone, or two or more types may be used in combination.
  • benzoin alkyl ethers such as benzoin methyl ether, benzoin phenyl ether, benzoin isobutyl ether, and benzoin isopropyl ether; 2-methylanthraquinone, 2-ethylanthraquinone, 2-t-butylanthraquinone, 1-chloroanthraquinone, Anthraquinone derivatives; benzophenone derivatives such as benzophenone, Michler's ketone, 2-methylbenzophenone, 3-methylbenzophenone, 4-methylbenzophenone, 2-chlorobenzophenone, 4-bromobenzophenone, 2-carboxybenzophenone; 2,2-dimethoxy-2 -Phenylacetophenone, 2,2-diethoxyacetophenone, 1-hydroxycyclohexylphenyl ketone, ⁇ -hydroxy-2-methylphenylpropanone, 1-hydroxy-1-methylethyl-(p-isopropyl
  • acetophenone derivatives thioxanthone derivatives such as thioxanthone, 2-ethylthioxanthone, 2-isopropylthioxanthone, 2-chlorothioxanthone, 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, 2,4-diisopropylthioxanthone; p- Benzoic acid ester derivatives such as ethyl dimethylaminobenzoate and ethyl p-diethylaminobenzoate; acridine derivatives such as 9-phenylacridine and 9-(p-methoxyphenyl)acridine; phenazine such as 9,10-dimethylbenzphenazine Derivatives: Anthrone derivatives such as benzanthrone are included. As the photopolymerization initiator, oxime ester derivatives are particularly preferred for the reasons mentioned above.
  • the content ratio of the photopolymerization initiator is not particularly limited, but is preferably 1% by mass or more, more preferably 2% by mass or more, and further preferably 3% by mass or more based on the total solid content of the photosensitive resin composition. It is preferably 4% by mass or more, particularly preferably 30% by mass or less, more preferably 20% by mass or less, even more preferably 15% by mass or less, particularly preferably 10% by mass or less, and most preferably 8% by mass or less. .
  • the content ratio of the photopolymerization initiator is equal to or higher than the lower limit value, the sensitivity tends to improve, and if the content ratio is lower than the upper limit value, the solubility of the unexposed area in the developer tends to improve.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be 1-30% by weight, it may be 1-20% by weight, it may be 2-15% by weight, it may be 3-10% by weight, it may be 4-8% by weight. good.
  • a sensitizing dye corresponding to the wavelength of the image exposure light source can be used in combination with the photopolymerization initiator (F), if necessary, for the purpose of increasing the sensitivity.
  • the sensitizing dye include xanthene dyes described in Japanese Patent Application Laid-Open No. 4-221958 and Japanese Patent Application Publication No. 4-219756, Japanese Patent Application Publication No. 3-239703, and Japanese Patent Application Publication No. 5-289335.
  • amino group-containing sensitizing dyes are preferred, and compounds having an amino group and a phenyl group in the same molecule are more preferred.
  • amino group-containing sensitizing dyes are preferred, and compounds having an amino group and a phenyl group in the same molecule are more preferred.
  • Benzophenone compounds such as benzophenone; 2-(p-dimethylaminophenyl)benzoxazole, 2-(p-diethylaminophenyl)benzoxazole, 2-(p-dimethylaminophenyl)benzo[4,5]benzoxazole, 2- (p-dimethylaminophenyl
  • the content ratio of the sensitizing dye is not particularly limited, but is preferably 0 to 20% by mass, more preferably 0 to 15% by mass, and further preferably 0 to 10% by mass, based on the total solid content of the photosensitive resin composition. preferable.
  • the photosensitive resin composition of the present invention may contain an organic solvent not derived from the pigment dispersion of the present invention in order to adjust the solid content and coatability.
  • examples of the organic solvent not derived from the pigment dispersion of the present invention include the same organic solvents as those in the pigment dispersion.
  • the content rate of the other organic solvent can be appropriately selected in consideration of the content rate of the total solid content in the photosensitive resin composition.
  • the total solid content in the photosensitive resin composition is preferably 5% by mass or more, more preferably 8% by mass or more, and 10% by mass with respect to the total mass of the photosensitive resin composition from the viewpoint of light shielding properties.
  • the above is more preferable, and from the viewpoint of development solubility and patterning properties, it is preferably 40% by mass or less, more preferably 30% by mass or less, and even more preferably 25% by mass or less.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be 5 to 40% by weight, 8 to 30% by weight, or 10 to 25% by weight.
  • the photosensitive resin composition of the present invention includes (A) coloring materials other than pigments, thiols, adhesion improvers, coating properties improvers, development improvers, ultraviolet absorbers, and antioxidants. Agents, etc. can be blended as appropriate.
  • coloring materials other than pigments include dyes.
  • the dye include azo dyes, anthraquinone dyes, phthalocyanine dyes, quinone imine dyes, quinoline dyes, nitro dyes, carbonyl dyes, and methine dyes.
  • azo dyes examples include C.I. I. Acid Yellow 11, C. I. Acid Orange 7, C. I. Acid Red 37, C. I. Acid Red 180, C. I. Acid Blue 29, C. I. Direct Red 28, C. I. Direct Red 83, C. I. Direct Yellow 12, C. I. Direct Orange 26, C. I. Direct Green 28, C. I. Direct Green 59, C. I. Reactive Yellow 2, C. I. Reactive Red 17, C. I. Reactive Red 120, C. I. Reactive Black 5, C. I. Disperse Orange 5, C. I. Dispersed Red 58, C. I. Disperse Blue 165, C. I. Basic Blue 41, C. I. Basic Red 18, C. I. Mordant Red 7, C. I. Mordant Yellow 5, C. I. Mordant Black 7 is mentioned.
  • anthraquinone dyes examples include C.I. I. Bat Blue 4, C. I. Acid Blue 40, C. I. Acid Green 25, C. I. Reactive Blue 19, C. I. Reactive Blue 49, C. I. Dispersed Red 60, C. I. Disperse Blue 56, C. I. An example is Disperse Blue 60.
  • phthalocyanine dyes examples include C.I. I. Pad Blue 5 is an example.
  • quinoneimine dyes include C.I. I. Basic Blue 3, C. I. Basic Blue 9 is an example.
  • quinoline dyes examples include C.I. I. Solvent Yellow 33, C. I. Acid Yellow 3, C. I. Disperse Yellow 64 is mentioned.
  • nitro dyes examples include C.I. I. Acid Yellow 1, C. I. Acid Orange 3, C. I. An example is Disperse Yellow 42.
  • the content of the other coloring materials is preferably 0 to 10% by mass based on the total solid content of the photosensitive resin composition of the present invention. , more preferably 0 to 5% by mass.
  • the photosensitive resin composition of the present invention may contain thiols in order to increase sensitivity and improve adhesion to a substrate.
  • thiols include hexanedithiol, decanedithiol, 1,4-dimethylmercaptobenzene, butanediol bisthiopropionate, butanediol bisthioglycolate, ethylene glycol bisthioglycolate, trimethylolpropane tristhioglycolate.
  • butanediol bisthiopropionate trimethylolpropane tristhiopropionate, trimethylolpropane tristhioglycolate, pentaerythritol tetrakisthiopropionate, pentaerythritol tetrakisthioglycolate, trishydroxyethyl tristhiopropionate, Ethylene glycol bis(3-mercaptobutyrate), propylene glycol bis(3-mercaptobutyrate) (PGMB), butanediol bis(3-mercaptobutyrate), 1,4-bis(3-mercaptobutyryloxy)butane (Product name: Karenz MT BD1, manufactured by Showa Denko K.K.), Butanedioltrimethylolpropane tris (3-mercaptobutyrate), Pentaerythritol tetrakis (3-mercaptobutyrate) (Product name:
  • thiols polyfunctional thiol compounds such as PGMB, TPMB, TPMIB, Karenz MT BD1, Karenz MT PE1, and Karenz MT NR1 are preferred, and among these, Karenz MT BD1, Karenz MT PE1, and Karenz MT NR1 are more preferred, and Karenz MT PE1 is particularly preferred.
  • One type of thiol may be used alone, or two or more types may be used in combination.
  • the content of thiols is preferably 0.1% by mass or more, and 0.3% by mass based on the total solid content of the photosensitive resin composition.
  • the content is more preferably 0.5% by mass or more, further preferably 10% by mass or less, and more preferably 5% by mass or less. If the content ratio of thiols is at least the above lower limit value, there is a tendency to suppress a decrease in sensitivity, and if it is below the above upper limit value, there is a tendency that storage stability tends to be good.
  • the above upper and lower limits can be arbitrarily combined. For example, it may be 0.1 to 10% by weight, 0.3 to 10% by weight, or 0.5 to 5% by weight.
  • the photosensitive resin composition of the present invention may contain an adhesion improver in order to improve the adhesion to the substrate.
  • the adhesion improver include silane coupling agents and titanium coupling agents, with silane coupling agents being particularly preferred.
  • the silane coupling agent include KBM-402, KBM-403, KBM-502, KBM-5103, KBE-9007, X-12-1048, X-12-1050 (manufactured by Shin-Etsu Silicone Co., Ltd.), and Z-6040. , Z-6043, and Z-6062 (manufactured by Dow Corning Toray Industries).
  • One type of silane coupling agent may be used alone, or two or more types may be used in combination.
  • the photosensitive resin composition of the present invention may contain adhesion improvers other than the silane coupling agent and the titanium coupling agent.
  • adhesion improvers other than silane coupling agents and titanium coupling agents include phosphoric acid-based adhesion improvers and other adhesion improvers.
  • phosphoric acid-based adhesion improver (meth)acryloyloxy group-containing phosphates are preferred, and phosphoric acid-based adhesion improvers represented by the following general formulas (g1), (g2), and (g3) are more preferred.
  • R 51 each independently represents a hydrogen atom or a methyl group
  • l and l' each independently represent an integer of 1 to 10
  • m each independently represents 1 or 2.
  • Other adhesion improvers include, for example, TEGO*Add Bond LTH (manufactured by Evonik).
  • One type of adhesion improver may be used alone, or two or more types may be used in combination.
  • the content ratio of the adhesion improver in the photosensitive resin composition is not particularly limited, but is 0.5% relative to the total solid content of the photosensitive resin composition. 01% by mass or more, more preferably 0.1% by mass or more, even more preferably 0.5% by mass or more, and preferably 5% by mass or less, more preferably 3% by mass or less, and even more preferably 2% by mass or less. It is preferably 1.5% by mass or less, particularly preferably 1.5% by mass or less. If the content of the adhesion improver is at least the lower limit, the adhesion will tend to improve, and if the content is at most the upper limit, the developability will tend to improve. The above upper and lower limits can be arbitrarily combined. For example, it may be 0.01 to 5% by weight, it may be 0.01 to 3% by weight, it may be 0.1 to 2% by weight, and it may be 0.5 to 1.5% by weight. good.
  • the photosensitive resin composition of the present invention may contain a coating properties improver to improve coating properties.
  • the coating property improver include surfactants.
  • the surfactant for example, anionic, cationic, nonionic, and amphoteric surfactants can be used. Among these, nonionic surfactants are preferred since they are less likely to adversely affect various properties, and fluorine surfactants and silicone surfactants are more preferred from the viewpoint of coatability.
  • surfactants examples include TSF4460 (manufactured by Momentive Performance Materials), DFX-18 (manufactured by Neos), BYK-300, BYK-325, BYK-330 (BYK-Chemie). ), KP340 (manufactured by Shin-Etsu Silicone), F-470, F-475, F-478, F-554, F-559 (manufactured by DIC), SH7PA (manufactured by Dow Corning Toray), DS-401 (manufactured by Daikin), L-77 (manufactured by Nippon Unicar), and FC4430 (manufactured by 3M Japan).
  • One type of coating property improver may be used alone, or two or more types may be used in combination.
  • the content ratio of the coating property improving agent in the photosensitive resin composition is not particularly limited, but is based on the total solid content of the photosensitive resin composition. It is preferably at least 0.01% by mass, more preferably at least 0.05% by mass, and preferably at most 1.0% by mass, more preferably at most 0.7% by mass, and even more preferably at most 0.5% by mass. Particularly preferred is 0.3% by mass or less. If the content ratio of the coating property improver is equal to or greater than the lower limit value, coating uniformity tends to improve, and if the content ratio is equal to or less than the upper limit value, resist sensitivity tends not to decrease. The above upper and lower limits can be arbitrarily combined. For example, it may be 0.01-1.0% by weight, it may be 0.01-0.7% by weight, it may be 0.05-0.5% by weight, it may be 0.05-0. It may be 3% by mass.
  • the photosensitive resin composition of the present invention can be suitably used for forming a black matrix, and from this point of view, it is preferable that the photosensitive resin composition exhibits a black color.
  • the optical density (OD) per 1 ⁇ m of film thickness of the coating film is preferably 1.0 or more, more preferably 2.0 or more, even more preferably 2.5 or more, even more preferably 3.0 or more, and 4 A value of .0 or more is particularly preferred, and a value of 4.5 or more is most preferred. If the OD is greater than or equal to the lower limit, sufficient light-shielding properties tend to be ensured.
  • the upper limit of OD is not particularly limited, but is, for example, 6.0.
  • the OD may be, for example, 1.0 to 6.0, 2.0 to 6.0, 2.5 to 6.0, 3.0 to 6.0. It may be between 4.0 and 6.0, and between 4.5 and 6.0.
  • the photosensitive resin composition of the present invention includes, for example, the pigment dispersion of the present invention, (D) an alkali-soluble resin, (E) a photopolymerizable compound, and (F) a photopolymerization initiator, an organic solvent as necessary, and others. It can be manufactured by mixing the following ingredients. The temperature during mixing is, for example, 20 to 30°C. After mixing, the resulting photosensitive resin composition may be filtered using a filter or the like, if necessary.
  • the photosensitive resin composition of the present invention can be used as a resist for members constituting color filters, such as pixels and black matrices.
  • the photosensitive resin composition of the present invention contains a black coloring material such as a black pigment.
  • the photosensitive resin composition of the present invention can also be used as a resist for colored spacers.
  • the photosensitive resin composition of the present invention can also be used to form partition walls, particularly partition walls for partitioning organic layers of an organic electroluminescent device. Examples of the organic layer of the organic electroluminescent device include a hole injection layer, a hole transport layer, or a hole transport layer on the hole injection layer, as described in Japanese Patent Application Publication No. 2016-165396. An example is an organic layer.
  • the cured product of the present invention is obtained by curing the photosensitive resin composition of the present invention.
  • the cured product of the present invention can be suitably used as a member constituting a color filter, such as a pixel or a black matrix.
  • the cured product of the present invention can also be used as a colored spacer.
  • the cured product of the present invention can also be used as a partition wall, particularly a partition wall for partitioning an organic layer of an organic electroluminescent device.
  • the black matrix made of the cured product of the present invention will be explained according to its manufacturing method.
  • the black matrix made of the cured product of the present invention can be obtained by, for example, applying the photosensitive resin composition of the present invention on a support on which the black matrix is to be provided, drying it, and applying a photomask on the dried coating film. It can be formed by a method of placing the film, exposing it to light through a photomask (image exposure), developing it, and carrying out a curing treatment if necessary.
  • the material of the support for forming the black matrix is not particularly limited as long as it has appropriate strength, and transparent substrates are mainly used.
  • the material for the transparent substrate include polyester resins such as polyethylene terephthalate, polyolefin resins such as polypropylene and polyethylene, thermoplastic resin sheets such as polycarbonate, polymethyl methacrylate, and polysulfone, epoxy resins, unsaturated polyester resins, Examples include thermosetting resin sheets such as poly(meth)acrylic resins and various types of glasses. Among these, glass and heat-resistant resin are preferred from the viewpoint of heat resistance. Further, a transparent electrode such as ITO or IZO may be formed on the surface of the transparent substrate.
  • the support may be treated with corona discharge treatment, ozone treatment, atmospheric pressure plasma treatment, silane coupling agent, or thin film formation treatment of various resins such as urethane resins, as necessary. You may go.
  • the thickness of the transparent substrate is preferably in the range of 0.05 to 10 mm, more preferably 0.1 to 7 mm. Further, when performing a thin film formation treatment of various resins, the film thickness is preferably in the range of 0.01 to 10 ⁇ m, more preferably 0.05 to 5 ⁇ m.
  • the application of the photosensitive resin composition for the black matrix onto the support can be performed, for example, by spinner method, wire bar method, flow coating method, etc. This can be carried out by a die coating method, a roll coating method, or a spray coating method. According to the die coating method, the amount of coating liquid used is significantly reduced, there is no influence of mist etc. that adheres when using the spin coating method, and the generation of foreign matter is suppressed, which is preferable from a comprehensive viewpoint. .
  • the thickness of the coating film after drying is preferably 0.2 to 10 ⁇ m, more preferably 0.5 to 6 ⁇ m, and even more preferably 1 to 4 ⁇ m.
  • the thickness of the coating film after drying is preferably 0.2 to 10 ⁇ m, more preferably 0.5 to 6 ⁇ m, and even more preferably 1 to 4 ⁇ m.
  • the coating film after coating the photosensitive resin composition on the support is preferably dried by a drying method using a hot plate, an IR oven, or a convection oven. Drying conditions can be appropriately selected depending on the type of liquid medium (organic solvent, water) contained in the photosensitive resin composition, the performance of the dryer used, etc. For example, the time is selected in the range of 15 seconds to 5 minutes at a temperature of 40 to 200°C, preferably in the range of 30 seconds to 3 minutes at a temperature of 50 to 130°C.
  • the drying process of this coating film may be a reduced pressure drying method in which drying is performed within a reduced pressure chamber without increasing the temperature.
  • Exposure Image exposure is performed by overlaying a photomask on the coating film of the photosensitive resin composition and irradiating light with a wavelength ranging from the ultraviolet region to the visible region through this photomask.
  • a negative mask pattern is typically used as a photomask.
  • exposure may be performed after forming an oxygen barrier layer such as a polyvinyl alcohol layer on the coating film.
  • the light source used for image exposure is not particularly limited.
  • the light source examples include lamp light sources such as a xenon lamp, a halogen lamp, a tungsten lamp, a high-pressure mercury lamp, an ultra-high-pressure mercury lamp, a metal halide lamp, a medium-pressure mercury lamp, a low-pressure mercury lamp, and a carbon arc.
  • lamp light sources such as a xenon lamp, a halogen lamp, a tungsten lamp, a high-pressure mercury lamp, an ultra-high-pressure mercury lamp, a metal halide lamp, a medium-pressure mercury lamp, a low-pressure mercury lamp, and a carbon arc.
  • an optical filter can also be used.
  • This aqueous solution may further contain an organic solvent, a buffer, a complexing agent, a dye or a pigment.
  • alkaline compounds include sodium hydroxide, potassium hydroxide, lithium hydroxide, sodium carbonate, potassium carbonate, sodium hydrogen carbonate, potassium hydrogen carbonate, sodium silicate, potassium silicate, sodium metasilicate, sodium phosphate, and phosphorus.
  • Inorganic alkaline compounds such as acid potassium, sodium hydrogen phosphate, potassium hydrogen phosphate, sodium dihydrogen phosphate, potassium dihydrogen phosphate, ammonium hydroxide, mono-, di- or triethanolamine, mono-, di- or trimethylamine, mono-, di- or triethylamine, mono- or di-isopropylamine, n-butylamine, mono-, di- or triisopropanolamine, ethyleneimine, ethylenediimine, tetramethylammonium hydroxide (TMAH), choline, etc.
  • Examples include organic alkaline compounds.
  • the alkaline compounds may be used alone or in a mixture of two or more.
  • surfactant examples include nonionic surfactants such as polyoxyethylene alkyl ethers, polyoxyethylene alkylaryl ethers, polyoxyethylene alkyl esters, sorbitan alkyl esters, and monoglyceride alkyl esters, and alkylbenzene sulfonic acids.
  • nonionic surfactants such as polyoxyethylene alkyl ethers, polyoxyethylene alkylaryl ethers, polyoxyethylene alkyl esters, sorbitan alkyl esters, and monoglyceride alkyl esters, and alkylbenzene sulfonic acids.
  • anionic surfactants such as salts, alkylnaphthalene sulfonates, alkyl sulfates, alkyl sulfonates, and sulfosuccinic acid ester salts
  • amphoteric surfactants such as alkyl betaines and amino acids.
  • organic solvent examples include isopropyl alcohol, benzyl alcohol, ethyl cellosolve, butyl cellosolve, phenyl cellosolve, propylene glycol, and diacetone alcohol.
  • the organic solvent may be used alone or in combination with an aqueous solution.
  • the developing temperature is preferably 10 to 50°C, more preferably 15 to 45°C, even more preferably 20 to 40°C.
  • the developing method can be any method such as an immersion developing method, a spray developing method, a brush developing method, an ultrasonic developing method, or the like.
  • thermosetting treatment examples include thermosetting treatment and photocuring treatment, with thermosetting treatment being preferred.
  • the temperature is selected in the range of 100 to 280°C, preferably in the range of 150 to 250°C, and the time is selected in the range of 5 to 60 minutes.
  • the height of the black matrix formed as described above is preferably 0.5 to 5 ⁇ m, more preferably 0.8 to 4 ⁇ m.
  • the optical density (OD) per 1 ⁇ m of thickness is preferably 2.0 or more, more preferably 2.5 or more, even more preferably 3.0 or more, and particularly preferably 3.2 or more.
  • [Color filter] Containing a color material of one color among red (R), green (G), and blue (B) on a transparent substrate provided with a black matrix using the same process as in (2-1) to (2-5) above.
  • a photomask is placed on the coating film, and a pixel image is formed by image exposure and development through this photomask, and if necessary, thermal curing or photocuring, Create a colored layer.
  • a color filter can be formed.
  • the color filter can be used as a part of components of color displays, liquid crystal display devices, etc. by forming transparent electrodes such as ITO on the image as it is.
  • transparent electrodes such as ITO
  • a top coat layer of polyamide, polyimide, etc. can be provided on the image, if necessary.
  • IPS mode planar alignment drive system
  • a transparent electrode may not be formed.
  • the partition wall made of the cured product of the present invention will be explained according to its manufacturing method.
  • the partition wall made of the cured product of the present invention can be obtained, for example, by applying the photosensitive resin composition of the present invention onto a support on which the partition wall is to be provided, drying it, and placing a photomask on the dried coating film. It can be formed by exposing through a photomask (image exposure), developing, and, if necessary, curing.
  • the size, shape, etc. of the partition walls are appropriately adjusted depending on the specifications of the organic electroluminescent device to which they are applied, but the height of the partition walls formed from the photosensitive resin composition is preferably about 0.5 to 10 ⁇ m.
  • Organic electroluminescent device Various organic electroluminescent devices are manufactured using a support provided with partition walls manufactured by the method described above.
  • the method for forming an organic electroluminescent device is not particularly limited, but preferably, the organic electroluminescent device is manufactured by forming partition walls on a support by the method described above, and then forming an organic layer such as a pixel. be done.
  • Methods for forming the organic layer include vapor deposition, in which a functional material is sublimated in a vacuum, and deposited within an area surrounded by partition walls on a substrate, and wet methods, such as casting, spin coating, and inkjet printing.
  • wet methods such as casting, spin coating, and inkjet printing.
  • Types of organic electroluminescent devices include bottom emission type and top emission type.
  • partition walls are formed on a glass substrate laminated with transparent electrodes, and a hole transport layer, a light emitting layer, an electron transport layer, and a metal electrode layer are stacked in the opening surrounded by the partition walls. Ru.
  • the top emission type for example, partition walls are formed on a glass substrate laminated with a metal electrode layer, and an electron transport layer, a light emitting layer, a hole transport layer, and a transparent electrode layer are stacked in the opening surrounded by the partition walls.
  • the light-emitting layer include organic electroluminescent layers as described in Japanese Patent Application Publication No. 2009-146691 and Japanese Patent No. 5734681.
  • quantum dots such as those described in Japanese Patent No. 5653387 and Japanese Patent No. 5653101 may be used.
  • each layer of the hole transport layer and the electron transport layer may have a laminated structure consisting of two or more layers from the viewpoint of luminous efficiency.
  • the thickness of each layer is not particularly limited, but from the viewpoint of luminous efficiency and brightness, it is preferably 1 to 500 nm.
  • the organic electroluminescent element may be formed with RGB colors separated for each opening, or two or more colors may be stacked in one opening.
  • the organic electroluminescent device may include a sealing layer from the viewpoint of improving reliability.
  • the sealing layer has a function of preventing moisture in the air from adsorbing to the organic electroluminescent element and reducing luminous efficiency.
  • the organic electroluminescent device may include a low-reflection film at the interface with air from the viewpoint of improving light extraction efficiency. By arranging a low-reflection film at the interface between air and the element, it is expected that the gap in refractive index will be reduced and reflection at the interface will be suppressed. For example, a moth-eye structure or a super multilayer film technique can be applied to such a low reflection film.
  • an organic electroluminescent device When using an organic electroluminescent device as a pixel in an image display device, it is necessary to prevent light from the light-emitting layer of one pixel from leaking to other pixels, and to prevent the reflection of external light if the electrodes are made of metal. In order to prevent the image quality from deteriorating due to this, it is preferable to impart light-shielding properties to the partition walls constituting the organic electroluminescent device.
  • the partition walls since electrodes are provided on the upper and lower surfaces of the partition walls, from the viewpoint of insulation, the partition walls preferably have high resistance and low dielectric constant. Therefore, when using a coloring agent to impart light-shielding properties to the partition walls, it is preferable to use the organic pigment that has high resistance and low dielectric constant.
  • the image display device of the present invention includes the cured product of the present invention.
  • Examples of the image display device of the present invention include the image display device provided with the above-mentioned black matrix or partition wall.
  • the image display device is not particularly limited as long as it is a device that displays images or videos, and includes liquid crystal display devices and organic EL displays, which will be described later.
  • liquid crystal display device The liquid crystal display device according to the present invention can be manufactured using, for example, the color filter having the black matrix described above. Note that there are no particular restrictions on the formation order or formation position of color pixels and black matrices.
  • a liquid crystal display device forms an alignment film on a color filter, scatters spacers on this alignment film, and then attaches it to a counter substrate to form a liquid crystal cell. Liquid crystal is injected into the formed liquid crystal cell. Complete by connecting to the counter electrode.
  • a resin film such as polyimide is suitable. Gravure printing and/or flexographic printing are usually used to form the alignment film, and the thickness of the alignment film is several tens of nanometers. After the alignment film is hardened by thermal baking, the surface is treated by irradiation with ultraviolet rays or treatment with a rubbing cloth to obtain a surface condition that allows adjustment of the tilt of the liquid crystal.
  • the spacer used has a size that corresponds to the gap with the opposing substrate, and is preferably 2 to 8 ⁇ m. It is also possible to form a photospacer (PS) of a transparent resin film on the color filter substrate by photolithography and use this instead of the spacer.
  • PS photospacer
  • As the counter substrate an array substrate is usually used, and a TFT (thin film transistor) substrate is particularly suitable.
  • the bonding gap with the counter substrate varies depending on the use of the liquid crystal display device, but is preferably in the range of 2 to 8 ⁇ m.
  • parts other than the liquid crystal injection port are sealed with a sealing material such as epoxy resin.
  • the sealing material is cured by UV irradiation and/or heating, and the periphery of the liquid crystal cell is sealed.
  • the liquid crystal cell whose periphery is sealed is cut into panel units, the pressure is reduced in a vacuum chamber, the liquid crystal injection port is immersed in the liquid crystal, and the liquid crystal is injected into the liquid crystal cell by leaking the inside of the chamber. .
  • the degree of reduced pressure within the liquid crystal cell is preferably 1 ⁇ 10 ⁇ 7 to 1 ⁇ 10 ⁇ 2 Pa, more preferably 1 ⁇ 10 ⁇ 6 to 1 ⁇ 10 ⁇ 3 Pa. Further, it is preferable to heat the liquid crystal cell when the pressure is reduced, and the heating temperature is preferably 30 to 100°C, more preferably 50 to 90°C. It is preferable to keep the temperature under reduced pressure for 10 to 60 minutes. It is then immersed in liquid crystal. A liquid crystal display device (panel) is completed by curing the liquid crystal injection port of the liquid crystal cell into which the liquid crystal is injected and sealing it with a UV curing resin.
  • liquid crystal is not particularly limited, and it may be any conventionally known liquid crystal such as aromatic, aliphatic, polycyclic compounds, etc., such as lyotropic liquid crystal, thermotropic liquid crystal, etc.
  • liquid crystals such as aromatic, aliphatic, polycyclic compounds, etc.
  • lyotropic liquid crystal such as lyotropic liquid crystal, thermotropic liquid crystal, etc.
  • Nematic liquid crystals, smectic liquid crystals, cholesteric liquid crystals, etc. are known as thermotropic liquid crystals, but any of them may be used.
  • Organic EL display of the present invention can be produced using, for example, the color filter having the black matrix described above or the organic electroluminescent element having the partition walls described above.
  • a color filter is prepared in which a black matrix (not shown) is provided between pixels 20, and an organic light emitter 500 is formed on the color filter via an organic protective layer 30 and an inorganic oxide film 40.
  • the organic EL element 100 can be manufactured. Note that at least one of the pixels 20 and the black matrix was produced using the photosensitive resin composition of the present invention.
  • the organic light emitter 500 can be laminated by sequentially forming a transparent anode 50, a hole injection layer 51, a hole transport layer 52, a light emitting layer 53, an electron injection layer 54, and a cathode 55 on the top surface of the color filter.
  • color filter in the present invention is applicable to both passive drive type organic EL displays and active drive type organic EL displays.
  • ⁇ Pigment-1 "RAVEN1060” (carbon black) manufactured by BIRLA CARBON.
  • TMP trimethylolpropane
  • BPDA biphenyltetracarboxylic dianhydride
  • THPA tetrahydrophthalic anhydride
  • Pigment-1, dispersant-1, dispersion aid-1, PGMEA, and water listed in Table 1 were mixed to have the mass ratio and water content listed in Table 1 to obtain a mixed solution.
  • the blending ratio of the solvent in Table 1 also includes the amount of the solvent derived from the dispersant and the solvent derived from the dispersion aid.
  • Beads were added to this mixed solution and dispersed in a paint shaker at a temperature of 25 to 45° C. for 6 hours. Zirconia beads with a diameter of 0.5 mm were used as beads, and 2.5 times the mass of the dispersion was added. After the dispersion was completed, the beads and the dispersion liquid were separated using a filter to obtain dispersion liquids 1 to 8.
  • the absolute value of the zeta potential of Dispersion 1 was 37 mV.
  • the tip of the glass test piece (the part immersed in the photosensitive resin composition) was observed at four locations in total, including both widthwise ends (ridgeline areas) on the front and back sides, and no deposits were observed.
  • the following criteria were used to evaluate the number of ridgeline areas.
  • the results are shown in Table 2.
  • the ridgeline portion of the glass test piece of each example is shown in FIG. In FIG. 2, optical microscope images of two ridgeline sites are shown side by side for each of Examples 1 to 5 and Comparative Examples 1 to 2.
  • a line extending vertically near the center of each of the two side-by-side optical microscope images is a ridgeline portion, and the area inside each ridgeline portion (center side in the figure) is the tip of the glass test piece.
  • a photosensitive resin composition was applied onto a glass substrate using a spin coater so that the film thickness after heat curing was 1.2 ⁇ m, and after drying under reduced pressure at 100 Pa for 60 seconds, it was dried on a hot plate at 100° C. for 120 seconds. Dry.
  • the obtained coating film was exposed to ultraviolet light having an intensity of 60 mW/cm 2 at a wavelength of 365 nm using a photomask having openings with a line width of 1 ⁇ m to 30 ⁇ m in 1 ⁇ m increments. Exposure treatment was performed so that the amount of light was 40 mJ/cm 2 . Subsequently, shower development was performed at 23° C.

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Abstract

Provided is a pigment dispersion that has excellent viscosity stability and yields a photosensitive resin composition in which the generation of pigment-derived foreign substances is suppressed. This pigment dispersion contains (A) a pigment, (B) a dispersant, an organic solvent and water, wherein the pigment (A) contains carbon black and has a moisture content of 0.15-0.9 mass%.

Description

顔料分散液、感光性樹脂組成物、硬化物、ブラックマトリックス及び画像表示装置Pigment dispersion, photosensitive resin composition, cured product, black matrix, and image display device
 本発明は、顔料分散液、感光性樹脂組成物、硬化物、ブラックマトリックス及び画像表示装置に関する。
 本願は、2022年4月22日に日本国特許庁に出願された特願2022-070967号に基づき優先権を主張し、その内容をここに援用する。
The present invention relates to a pigment dispersion, a photosensitive resin composition, a cured product, a black matrix, and an image display device.
This application claims priority based on Japanese Patent Application No. 2022-070967 filed with the Japan Patent Office on April 22, 2022, the contents of which are incorporated herein.
 カラーフィルターは、通常、ガラス、プラスチック等の透明基板の表面に、黒色のブラックマトリックスを形成し、続いて、赤、緑、青等の3種以上の異なる色の画素を順次、格子状、ストライプ状又はモザイク状等のパターンで形成したものである。パターンサイズは、カラーフィルターの用途並びにそれぞれの色により異なるが、通常5~700μm程度である。 Color filters usually form a black matrix on the surface of a transparent substrate such as glass or plastic, and then sequentially form pixels of three or more different colors, such as red, green, and blue, in a grid pattern or stripes. It is formed in a pattern such as a shape or a mosaic shape. The pattern size varies depending on the use of the color filter and each color, but is usually about 5 to 700 μm.
 カラーフィルターの代表的な製造方法として、現在、感光性樹脂組成物を用いたフォトリソグラフィー法が知られている。フォトリソグラフィー法では、例えば、アルカリ可溶性樹脂を含む感光性樹脂組成物を透明基板上に塗布し、乾燥させて感光性樹脂膜を形成し、感光性樹脂膜を所定のパターンで露光し、アルカリ現像液を用いて現像した後、200℃以上の高温処理により硬化(キュア)させることでパターンを形成する。
 感光性樹脂組成物は、カラーフィルターの画素、ブラックマトリックス等の形成等に用いられる場合には、色材を含有する。色材としては、カーボンブラック等の顔料や染料が用いられる(特許文献1)。
A photolithography method using a photosensitive resin composition is currently known as a typical manufacturing method for color filters. In the photolithography method, for example, a photosensitive resin composition containing an alkali-soluble resin is applied onto a transparent substrate, dried to form a photosensitive resin film, the photosensitive resin film is exposed in a predetermined pattern, and then developed with an alkali. After developing with a liquid, a pattern is formed by curing it by high-temperature treatment at 200° C. or higher.
The photosensitive resin composition contains a coloring material when used for forming pixels of color filters, black matrices, etc. As the coloring material, pigments and dyes such as carbon black are used (Patent Document 1).
日本国特開2012-68613号公報Japanese Patent Application Publication No. 2012-68613
 カラーフィルターの製造においては、同じ塗布装置を用いて感光性樹脂組成物の塗布が繰り返されることがある。本発明者らの検討によれば、顔料を含む感光性樹脂組成物の場合、塗布が繰り返されるなかで、塗布装置のノズル表面に、顔料の凝集物を含む異物が発生することがある。このような異物は、ノズルから剥がれ、感光性樹脂膜やパターンに付着して欠陥となり、解像度等に悪影響を及ぼすおそれがある。 In the production of color filters, the application of the photosensitive resin composition may be repeated using the same application device. According to studies by the present inventors, in the case of a photosensitive resin composition containing a pigment, foreign matter including aggregates of the pigment may be generated on the nozzle surface of the coating device during repeated coating. Such foreign matter may peel off from the nozzle and adhere to the photosensitive resin film or pattern, causing defects, which may adversely affect resolution and the like.
 そこで本発明は、粘度安定性に優れ、顔料由来の異物の発生が抑制された感光性樹脂組成物が得られる顔料分散液、粘度安定性に優れ、顔料由来の異物の発生が抑制された感光性樹脂組成物、並びにこれを用いた硬化物、ブラックマトリックス及び画像表示装置を提供することを目的とする。 Therefore, the present invention provides a pigment dispersion that provides a photosensitive resin composition with excellent viscosity stability and suppressed generation of pigment-derived foreign substances, and a photosensitive resin composition with excellent viscosity stability and suppressed generation of pigment-derived foreign substances. The present invention aims to provide a synthetic resin composition, a cured product using the same, a black matrix, and an image display device.
 本発明者らは前記課題を解決すべく鋭意検討した結果、顔料を予め、特定量の水分を含有する顔料分散液とすることにより、前記課題を解決できることを見出した。即ち本発明の要旨は以下に存する。 As a result of intensive studies to solve the above problem, the present inventors found that the above problem could be solved by preparing the pigment in advance as a pigment dispersion containing a specific amount of water. That is, the gist of the present invention is as follows.
 [1](A)顔料、(B)分散剤、有機溶剤及び水を含有する顔料分散液であって、
 前記(A)顔料がカーボンブラックを含有し、
 含有水分率が0.15質量%以上0.9質量%以下である、顔料分散液。
 [2]含有水分率が0.2質量%以上0.7質量%以下である、[1]に記載の顔料分散液。
 [3]顔料分散液の全固形分に対する前記(A)顔料の含有割合が60質量%以上である、[1]又は[2]に記載の顔料分散液。
 [4]前記(A)顔料と前記(B)分散剤との、質量基準における含有比率((A)顔料/(B)分散剤)が4以上である、[1]~[3]のいずれかに記載の顔料分散液。
 [5]さらに(C)分散助剤を含有する、[1]~[4]のいずれかに記載の顔料分散液。
 [6]前記(A)顔料と前記(C)分散助剤との、質量基準における含有比率((A)顔料/(C)分散助剤)が10以上である、[5]に記載の顔料分散液。
 [7][1]~[6]のいずれかに記載の顔料分散液、(D)アルカリ可溶性樹脂、(E)光重合性化合物及び(F)光重合開始剤を含有する、感光性樹脂組成物。
 [8]感光性樹脂組成物の全固形分に対する前記(A)顔料の含有割合が30質量%以上である、[7]に記載の感光性樹脂組成物。
 [9][7]又は[8]に記載の感光性樹脂組成物が硬化された、硬化物。
 [10][9]に記載の硬化物からなる、ブラックマトリックス。
 [11][9]に記載の硬化物を有する、画像表示装置。
[1] A pigment dispersion containing (A) a pigment, (B) a dispersant, an organic solvent, and water,
The pigment (A) contains carbon black,
A pigment dispersion liquid having a moisture content of 0.15% by mass or more and 0.9% by mass or less.
[2] The pigment dispersion according to [1], which has a moisture content of 0.2% by mass or more and 0.7% by mass or less.
[3] The pigment dispersion according to [1] or [2], wherein the content ratio of the pigment (A) to the total solid content of the pigment dispersion is 60% by mass or more.
[4] Any of [1] to [3], wherein the content ratio of the (A) pigment and the (B) dispersant on a mass basis ((A) pigment/(B) dispersant) is 4 or more. Pigment dispersion liquid described in Crab.
[5] The pigment dispersion according to any one of [1] to [4], further containing (C) a dispersion aid.
[6] The pigment according to [5], wherein the content ratio ((A) pigment/(C) dispersion aid) of the (A) pigment and the (C) dispersion aid on a mass basis is 10 or more. dispersion liquid.
[7] A photosensitive resin composition containing the pigment dispersion according to any one of [1] to [6], (D) an alkali-soluble resin, (E) a photopolymerizable compound, and (F) a photopolymerization initiator. thing.
[8] The photosensitive resin composition according to [7], wherein the content of the pigment (A) is 30% by mass or more based on the total solid content of the photosensitive resin composition.
[9] A cured product obtained by curing the photosensitive resin composition according to [7] or [8].
[10] A black matrix consisting of the cured product according to [9].
[11] An image display device comprising the cured product according to [9].
 本発明によれば、粘度安定性に優れ、顔料由来の異物の発生が抑制された感光性樹脂組成物が得られる顔料分散液、粘度安定性に優れ、顔料由来の異物の発生が抑制された感光性樹脂組成物、並びにこれを用いた硬化物、ブラックマトリックス及び画像表示装置を提供できる。 According to the present invention, a pigment dispersion can be obtained that provides a photosensitive resin composition that has excellent viscosity stability and suppresses the generation of pigment-derived foreign substances, and a pigment dispersion that has excellent viscosity stability and suppresses the generation of pigment-derived foreign substances. A photosensitive resin composition, a cured product using the same, a black matrix, and an image display device can be provided.
本発明における有機EL素子の一例を示す断面概略図である。1 is a schematic cross-sectional view showing an example of an organic EL element in the present invention. 実施例1~4、比較例1~2の感光性樹脂組成物についての剥離試験の結果を示す写真である。1 is a photograph showing the results of a peel test for the photosensitive resin compositions of Examples 1 to 4 and Comparative Examples 1 to 2.
 以下、本発明の実施の形態を具体的に説明するが、本発明は、以下の実施の形態に限定されるものではなく、その要旨の範囲内で種々に変更して実施することができる。
 本発明において「(メタ)アクリル」とは「アクリル及び/又はメタクリル」を意味し、「(メタ)アクリレート」、「(メタ)アクリロイル」についても同様である。
 本発明において「全固形分」とは、顔料分散液又は感光性樹脂組成物中に含まれる、有機溶剤及び水以外の全成分を意味し、有機溶剤及び水以外の成分が常温で液体であっても、その成分は有機溶剤及び水には含めず、全固形分に含める。
Hereinafter, embodiments of the present invention will be specifically described, but the present invention is not limited to the following embodiments, and can be implemented with various modifications within the scope of the gist.
In the present invention, "(meth)acrylic" means "acrylic and/or methacryl", and the same applies to "(meth)acrylate" and "(meth)acryloyl".
In the present invention, "total solid content" means all components other than the organic solvent and water contained in the pigment dispersion or the photosensitive resin composition, and the components other than the organic solvent and water are liquid at room temperature. However, those components are not included in organic solvents and water, but are included in total solids.
 本発明において「含有水分率」は、JIS K0113(2005)記載のカールフィッシャー測定法で算出される。測定に際しては、各種の水分計を用いることができるが、例えば、京都電子工業社製、MKA-610が挙げられる。
 本発明において(A)顔料の「平均粒径」は、電子顕微鏡写真から一次粒子の大きさを直接計測する方法で求められる。具体的には、個々の一次粒子の短軸径と長軸径を計測し、その平均をその粒子の粒径とする。次に、100個以上の粒子について、それぞれの粒子の体積(質量)を、求めた粒径の直方体と近似して求め、体積平均粒径を求めそれを平均粒径とする。なお、透過型電子顕微鏡(TEM)、走査型電子顕微鏡(SEM)のいずれを用いても同じ結果を得ることができる。
 本発明において「重量平均分子量」とは、GPC(ゲルパーミエーションクロマトグラフィー)によるポリスチレン換算の重量平均分子量(Mw)を指す。
 本発明において「アミン価」とは、特に断りのない限り、有効固形分換算のアミン価を表し、分散剤の固形分1gあたりの塩基量と当量のKOHの質量で表される値である。測定方法については後述する。
In the present invention, the "moisture content" is calculated by the Karl Fischer measurement method described in JIS K0113 (2005). For the measurement, various moisture meters can be used, such as MKA-610 manufactured by Kyoto Electronics Industry Co., Ltd.
In the present invention, the "average particle size" of the pigment (A) is determined by a method of directly measuring the size of the primary particles from an electron micrograph. Specifically, the minor axis diameter and major axis diameter of each primary particle are measured, and the average thereof is taken as the particle diameter of the particle. Next, for 100 or more particles, the volume (mass) of each particle is determined by approximating it to a rectangular parallelepiped of the determined particle size, and the volume average particle size is determined and used as the average particle size. Note that the same results can be obtained using either a transmission electron microscope (TEM) or a scanning electron microscope (SEM).
In the present invention, the term "weight average molecular weight" refers to the weight average molecular weight (Mw) in terms of polystyrene measured by GPC (gel permeation chromatography).
In the present invention, the "amine value" refers to the amine value in terms of effective solid content, unless otherwise specified, and is a value expressed by the amount of base and the mass of KOH equivalent to 1 g of solid content of the dispersant. The measurement method will be described later.
[顔料分散液]
 本発明の顔料分散液は、(A)顔料、(B)分散剤、有機溶剤及び水を含有する。
[Pigment dispersion]
The pigment dispersion of the present invention contains (A) a pigment, (B) a dispersant, an organic solvent, and water.
 本発明の顔料分散液の含有水分率は、顔料分散液の総質量に対し、0.15質量%以上0.9質量%以下である。顔料分散液の含有水分率が0.9質量%以下であることで、粘度安定性に優れ、顔料分散液の増粘及びそれに伴う濾過性の低下を抑制できる。含有水分率が0.15質量%以上であることで、顔料分散液を含有する感光性樹脂組成物を用いてパターンを形成する際に顔料由来の異物が発生するのを抑制できる。
 顔料分散液の含有水分率は、0.7質量%以下が好ましく、0.5質量%以下がより好ましく、また、0.2質量%以上が好ましく、0.3質量%以上がより好ましい。
 上記の上限及び下限は任意に組み合わせることができる。例えば、0.2質量%以上0.7質量%以下であってよく、0.3質量%以上0.5質量%以下であってよい。
The moisture content of the pigment dispersion of the present invention is 0.15% by mass or more and 0.9% by mass or less based on the total mass of the pigment dispersion. When the water content of the pigment dispersion is 0.9% by mass or less, the viscosity stability is excellent, and thickening of the pigment dispersion and the accompanying decrease in filterability can be suppressed. When the moisture content is 0.15% by mass or more, it is possible to suppress the generation of pigment-derived foreign substances when forming a pattern using a photosensitive resin composition containing a pigment dispersion.
The water content of the pigment dispersion is preferably 0.7% by mass or less, more preferably 0.5% by mass or less, further preferably 0.2% by mass or more, and more preferably 0.3% by mass or more.
The above upper and lower limits can be arbitrarily combined. For example, it may be 0.2% by mass or more and 0.7% by mass or less, and may be 0.3% by mass or more and 0.5% by mass or less.
<(A)顔料>
 (A)顔料はカーボンブラックを含有する。
 カーボンブラックを含有することで遮光性が向上する傾向がある。一方で、カーボンブラックを含む異物は、遮光率が高く、例えば、パターンの解像度に悪影響を及ぼしやすい。したがって、(A)顔料がカーボンブラックを含有する場合に、本発明の有用性が高い。
<(A) Pigment>
(A) The pigment contains carbon black.
Containing carbon black tends to improve light shielding properties. On the other hand, foreign matter containing carbon black has a high light shielding rate and tends to have a negative effect on pattern resolution, for example. Therefore, the usefulness of the present invention is high when the pigment (A) contains carbon black.
 カーボンブラックとしては、例えば、以下が挙げられる。
 三菱ケミカル社製:MA7、MA77、MA8、MA11、MA100、MA100R、MA220、MA230、MA600、#5、#10、#20、#25、#30、#32、#33、#40、#44、#45、#47、#50、#52、#55、#650、#750、#850、#950、#960、#970、#980、#990、#1000、#2200、#2300、#2350、#2400、#2600、#3050、#3150、#3250、#3600、#3750、#3950、#4000、#4010、OIL7B、OIL9B、OIL11B、OIL30B、OIL31B。
 デグサ社製:Printex(登録商標。以下同じ。)3、Printex3OP、Printex30、Printex30OP、Printex40、Printex45、Printex55、Printex60、Printex75、Printex80、Printex85、Printex90、Printex A、Printex L、Printex G、Printex P、Printex U、Printex V、PrintexG、SpecialBlack550、SpecialBlack350、SpecialBlack250、SpecialBlack100、SpecialBlack6、SpecialBlack5、SpecialBlack4、Color Black FW1、Color Black FW2、Color Black FW2V、Color Black FW18、Color Black FW18、Color Black FW200、Color Black S160、Color Black S170。
 キャボット社製:Monarch(登録商標。以下同じ。)120、Monarch280、Monarch460、Monarch800、Monarch880、Monarch900、Monarch1000、Monarch1100、Monarch1300、Monarch1400、Monarch4630、REGAL(登録商標。以下同じ。)99、REGAL99R、REGAL415、REGAL415R、REGAL250、REGAL250R、REGAL330、REGAL400R、REGAL550R、REGAL660R、BLACK PEARLS480、PEARLS130、VULCAN(登録商標) XC72R、ELFTEX(登録商標)-8。
 ビルラー社製:RAVEN11、RAVEN14、RAVEN15、RAVEN16、RAVEN22、RAVEN30、RAVEN35、RAVEN40、RAVEN410、RAVEN420、RAVEN450、RAVEN500、RAVEN780、RAVEN850、RAVEN890H、RAVEN1000、RAVEN1020、RAVEN1040、RAVEN1060U、RAVEN1080U、RAVEN1170、RAVEN1190U、RAVEN1250、RAVEN1500、RAVEN2000、RAVEN2500U、RAVEN3500、RAVEN5000、RAVEN5250、RAVEN5750、RAVEN7000。
Examples of carbon black include the following.
Made by Mitsubishi Chemical: MA7, MA77, MA8, MA11, MA100, MA100R, MA220, MA230, MA600, #5, #10, #20, #25, #30, #32, #33, #40, #44, #45, #47, #50, #52, #55, #650, #750, #850, #950, #960, #970, #980, #990, #1000, #2200, #2300, #2350 , #2400, #2600, #3050, #3150, #3250, #3600, #3750, #3950, #4000, #4010, OIL7B, OIL9B, OIL11B, OIL30B, OIL31B.
Manufactured by Degussa: Printex (registered trademark. The same applies hereinafter) 3, Printex3OP, Printex30, Printex30OP, Printex40, Printex45, Printex55, Printex60, Printex75, Printex80, Printe x85, Printex90, Printex A, Printex L, Printex G, Printex P, Printex U, Printex V, PrintexG, SpecialBlack550, SpecialBlack350, SpecialBlack250, SpecialBlack100, SpecialBlack6, SpecialBlack5, SpecialB rack4, Color Black FW1, Color Black FW2, Color Black FW2V, Color Black FW18, Color Black FW18, Color Black FW200, Color Black S160 , Color Black S170.
Manufactured by Cabot: Monarch (registered trademark) 120, Monarch280, Monarch460, Monarch800, Monarch880, Monarch900, Monarch1000, Monarch1100, Monarch1300, Monarch h1400, Monarch4630, REGAL (registered trademark. The same applies hereinafter) 99, REGAL99R, REGAL415, REGAL415R, REGAL250, REGAL250R, REGAL330, REGAL400R, REGAL550R, REGAL660R, BLACK PEARLS480, PEARLS130, VULCAN (registered trademark) XC72R, ELFTEX (registered trademark) -8.
Made by Birler: RAVEN11, RAVEN14, RAVEN15, RAVEN16, RAVEN22, RAVEN30, RAVEN35, RAVEN40, RAVEN410, RAVEN420, RAVEN450, RAVEN500, RAVEN780, RAVEN85 0, RAVEN890H, RAVEN1000, RAVEN1020, RAVEN1040, RAVEN1060U, RAVEN1080U, RAVEN1170, RAVEN1190U, RAVEN1250, RAVEN1500, RAVEN2000, RAVEN2500U, RAVEN3500, RAVEN5000, RAVEN5250, RAVEN5750, RAVEN7000.
 カーボンブラックは、樹脂で被覆されたものを使用してもよい。樹脂で被覆されたカーボンブラックを使用すると、ガラス基板への密着性や体積抵抗値を向上させる効果がある。樹脂で被覆されたカーボンブラックとしては、例えば日本国特開平09-71733号公報に記載されているカーボンブラックが好適に使用できる。体積抵抗や誘電率の点で、樹脂被覆カーボンブラックが好適に用いられる。 Carbon black coated with resin may be used. Use of resin-coated carbon black has the effect of improving adhesion to glass substrates and volume resistivity. As the resin-coated carbon black, for example, the carbon black described in Japanese Patent Application Laid-Open No. 09-71733 can be suitably used. Resin-coated carbon black is preferably used in terms of volume resistivity and dielectric constant.
 樹脂による被覆処理に供するカーボンブラックとしては、NaとCaの合計含有量が100ppm以下であることが好ましい。カーボンブラックは、通常、製造時の原料油や燃焼油(又はガス)、反応停止水や造粒水、さらには反応炉の炉材等から混入したNaや、Ca,K,Mg,Al,Fe等を組成とする灰分がパーセントのオーダーで含有されている。このうち、NaやCaは、各々数百ppm以上含有されているのが一般的であるが、これらを少なくすることで、透明電極(ITO)やその他の電極への浸透を抑制して、電気的短絡を防止できる傾向がある。 It is preferable that the total content of Na and Ca be 100 ppm or less in the carbon black to be subjected to the resin coating treatment. Carbon black usually contains Na, Ca, K, Mg, Al, and Fe mixed in from raw material oil, combustion oil (or gas), reaction stop water, granulation water, and reactor materials during manufacturing. The ash content is on the order of percent. Among these, Na and Ca are generally contained in amounts of several hundred ppm or more each, but by reducing their content, it is possible to suppress penetration into transparent electrodes (ITO) and other electrodes, and to This tends to prevent short circuits.
 これらのNaやCaを含む灰分の含有量を低減する方法としては、カーボンブラックを製造する際の原料油や燃料油(又はガス)並びに反応停止水として、これらの含有量が極力少ない物を厳選すること及びストラクチャーを調整するアルカリ物質の添加量を極力少なくすることにより可能である。他の方法としては、炉から製出したカーボンブラックを水や塩酸等で洗いNaやCaを溶解し除去する方法が挙げられる。 A method for reducing the content of ash containing Na and Ca is to carefully select materials with as low a content as possible as raw material oil, fuel oil (or gas), and reaction termination water when producing carbon black. This can be achieved by minimizing the amount of alkaline substances added to adjust the structure. Another method includes a method in which carbon black produced from a furnace is washed with water, hydrochloric acid, etc. to dissolve and remove Na and Ca.
 具体的にはカーボンブラックを水、塩酸、又は過酸化水素水に混合分散させた後、水に難溶の溶媒を添加していくとカーボンブラックは溶媒側に移行し、水と完全に分離すると共にカーボンブラック中に存在した殆どのNaやCaは、水や酸に溶解、除去される。NaとCaの合計量を100ppm以下に低減するためには、原材料を厳選したカーボンブラック製造過程単独あるいは水や酸溶解方式単独でも可能な場合もあるが、この両方式を併用することにより、さらに容易にNaとCaの合計量を100ppm以下とすることができる。 Specifically, after carbon black is mixed and dispersed in water, hydrochloric acid, or hydrogen peroxide, and a poorly soluble solvent is added to the water, the carbon black migrates to the solvent side and completely separates from the water. At the same time, most of the Na and Ca present in the carbon black are dissolved and removed by water and acid. In order to reduce the total amount of Na and Ca to 100 ppm or less, it may be possible to use only the carbon black manufacturing process with carefully selected raw materials or the water or acid dissolution method alone, but it is possible to further reduce the total amount of Na and Ca by using both methods together. The total amount of Na and Ca can be easily reduced to 100 ppm or less.
 樹脂被覆カーボンブラックは、pH6以下のいわゆる酸性カーボンブラックであることが好ましい。水中での分散径(アグロミレート径)が小さくなるので、微細ユニットまでの被覆が可能となり好適である。さらに平均粒子径が40nm以下であることが好ましい。また、ジブチルフタレート(DBP)吸収量が140mL/100g以下であることが好ましい。平均粒子径やDBP吸収量を前記範囲内とすることで、遮光性の良好な塗膜が得られる傾向がある。 The resin-coated carbon black is preferably so-called acidic carbon black with a pH of 6 or less. Since the dispersion diameter (agglomilate diameter) in water becomes small, it is possible to coat even minute units, which is preferable. Furthermore, it is preferable that the average particle diameter is 40 nm or less. Moreover, it is preferable that the amount of dibutyl phthalate (DBP) absorbed is 140 mL/100 g or less. When the average particle diameter and DBP absorption amount are within the above ranges, a coating film with good light-shielding properties tends to be obtained.
 樹脂で被覆されたカーボンブラックを調製する方法は特に限定されない。例えば、カーボンブラック及び樹脂の配合量を適宜調整した後、
1.樹脂とシクロヘキサノン、トルエン、キシレン等の溶剤とを混合して加熱溶解させた樹脂溶液と、カーボンブラック及び水を混合した懸濁液とを混合撹拌し、カーボンブラックと水とを分離させた後、水を除去して加熱混練して得られた組成物をシート状に成形し、粉砕した後、乾燥させる方法;
2.前記と同様にして調製した樹脂溶液と懸濁液とを混合撹拌してカーボンブラック及び樹脂を粒状化した後、得られた粒状物を分離、加熱して残存する溶剤及び水を除去する方法;
3.前記例示した溶剤にマレイン酸、フマル酸等のカルボン酸を溶解させ、カーボンブラックを添加、混合して乾燥させ、溶剤を除去してカルボン酸添着カーボンブラックを得た後、これに樹脂を添加してドライブレンドする方法;
4.被覆させる樹脂を構成する反応性基含有モノマー成分と水とを高速撹拌して懸濁液を調製し、重合後冷却して重合体懸濁液から反応性基含有樹脂を得た後、これにカーボンブラックを添加して混練し、カーボンブラックと反応性基とを反応させ(カーボンブラックをグラフトさせ)、冷却及び粉砕する方法;
を採用することができる。
The method for preparing resin-coated carbon black is not particularly limited. For example, after adjusting the blending amounts of carbon black and resin as appropriate,
1. After mixing and stirring a resin solution in which a resin and a solvent such as cyclohexanone, toluene, or xylene are mixed and dissolved by heating, and a suspension in which carbon black and water are mixed to separate the carbon black and water, A method in which a composition obtained by removing water and heating and kneading is formed into a sheet shape, pulverized, and then dried;
2. A method of mixing and stirring a resin solution and a suspension prepared in the same manner as described above to granulate carbon black and resin, and then separating and heating the resulting granules to remove the remaining solvent and water;
3. A carboxylic acid such as maleic acid or fumaric acid is dissolved in the above-mentioned solvent, carbon black is added, mixed and dried, the solvent is removed to obtain carboxylic acid-impregnated carbon black, and a resin is added to this. How to dry blend;
4. A suspension is prepared by stirring the reactive group-containing monomer component constituting the resin to be coated with water at high speed, and after polymerization, the reactive group-containing resin is obtained from the polymer suspension by cooling. A method of adding and kneading carbon black, reacting the carbon black with a reactive group (grafting the carbon black), cooling and pulverizing;
can be adopted.
 被覆処理する樹脂の種類も特に限定されるものではないが、合成樹脂が一般的であり、さらに構造の中にベンゼン環を有する樹脂の方が両性系界面活性剤的な働きがより強いため分散性及び分散安定性の点から好ましい。
 合成樹脂としては、例えば、フェノール樹脂、メラミン樹脂、キシレン樹脂、ジアリルフタレート樹脂、グリプタル樹脂、エポキシ樹脂、アルキルベンゼン樹脂等の熱硬化性樹脂;ポリスチレン、ポリカーボネート、ポリエチレンテレフタレート、ポリブチレンテレフタレート、変性ポリフェニレンオキサイド、ポリスルフォン、ポリパラフェニレンテレフタルアミド、ポリアミドイミド、ポリイミド、ポリアミノビスマレイミド、ポリエーテルスルフォポリフェニレンスルフォン、ポリアリレート、ポリエーテルエーテルケトン等の熱可塑性樹脂が使用できる。カーボンブラックに対する樹脂の被覆量は、カーボンブラックと樹脂の合計量に対し1~30質量%が好ましく、前記下限値以上とすることで被覆を十分なものとすることができる傾向がある。一方、前記上限値以下とすることで、樹脂同士の粘着を防ぎ、分散性が良好なものとすることができる傾向がある。
The type of resin to be coated is not particularly limited, but synthetic resins are common, and resins with a benzene ring in their structure have a stronger action as an amphoteric surfactant, so they are difficult to disperse. preferred from the viewpoint of properties and dispersion stability.
Examples of synthetic resins include thermosetting resins such as phenol resin, melamine resin, xylene resin, diallyl phthalate resin, glyptal resin, epoxy resin, and alkylbenzene resin; polystyrene, polycarbonate, polyethylene terephthalate, polybutylene terephthalate, modified polyphenylene oxide, Thermoplastic resins such as polysulfone, polyparaphenylene terephthalamide, polyamideimide, polyimide, polyamino bismaleimide, polyethersulfopolyphenylenesulfone, polyarylate, and polyetheretherketone can be used. The amount of resin coating carbon black is preferably 1 to 30% by mass based on the total amount of carbon black and resin, and coating tends to be sufficient when the amount is equal to or more than the lower limit. On the other hand, by setting it below the above upper limit, there is a tendency that adhesion between resins can be prevented and dispersibility can be improved.
 樹脂で被覆処理してなるカーボンブラックは、常法に従い着色スペーサーの遮光材として用いることができ、この着色スペーサーを構成要素とするカラーフィルターを常法により作成することができる。このようなカーボンブラックを用いると、高遮光率でかつ表面反射率が低い着色スペーサーが低コストで達成できる傾向がある。また、カーボンブラック表面を樹脂で被覆したことにより、CaやNaをカーボンブラック中に封じ込める働きもあることも推測される。 Carbon black coated with a resin can be used as a light-shielding material for a colored spacer according to a conventional method, and a color filter having this colored spacer as a component can be produced using a conventional method. When such carbon black is used, a colored spacer with a high light shielding rate and a low surface reflectance tends to be achieved at low cost. It is also assumed that coating the carbon black surface with a resin has the effect of sealing Ca and Na into the carbon black.
 カーボンブラック以外の(A)顔料としては、例えば、感光性樹脂組成物を着色する色材として用いられる各種の色の顔料を使用することができる。
 かかる顔料としては、例えば、青色顔料、緑色顔料、赤色顔料、黄色顔料、紫色顔料、オレンジ顔料、ブラウン顔料、黒色顔料が挙げられる。これらの顔料は、有機顔料でも無機顔料でもよい。
 有機顔料の構造は特に限定されないが、例えば、アゾ系、フタロシアニン系、キナクリドン系、ベンズイミダゾロン系、イソインドリノン系、ジオキサジン系、インダンスレン系、ペリレン系が挙げられる。
As the pigment (A) other than carbon black, for example, pigments of various colors used as coloring materials for coloring photosensitive resin compositions can be used.
Examples of such pigments include blue pigments, green pigments, red pigments, yellow pigments, purple pigments, orange pigments, brown pigments, and black pigments. These pigments may be organic or inorganic pigments.
The structure of the organic pigment is not particularly limited, but examples include azo, phthalocyanine, quinacridone, benzimidazolone, isoindolinone, dioxazine, indanthrene, and perylene.
 以下に、(A)顔料の具体例をピグメントナンバーで示す。以下に挙げる「C.I.ピグメントレッド2」等の用語は、カラーインデックス(C.I.)を意味する。
 赤色顔料としては、例えば、C.I.ピグメントレッド1、2、3、4、5、6、7、8、9、12、14、15、16、17、21、22、23、31、32、37、38、41、47、48、48:1、48:2、48:3、48:4、49、49:1、49:2、50:1、52:1、52:2、53、53:1、53:2、53:3、57、57:1、57:2、58:4、60、63、63:1、63:2、64、64:1、68、69、81、81:1、81:2、81:3、81:4、83、88、90:1、101、101:1、104、108、108:1、109、112、113、114、122、123、144、146、147、149、151、166、168、169、170、172、173、174、175、176、177、178、179、181、184、185、187、188、190、193、194、200、202、206、207、208、209、210、214、216、220、221、224、230、231、232、233、235、236、237、238、239、242、243、245、247、249、250、251、253、254、255、256、257、258、259、260、262、263、264、265、266、267、268、269、270、271、272、273、274、275、276が挙げられる。好ましくはC.I.ピグメントレッド48:1、122、168、177、202、206、207、209、224、242、254、より好ましくはC.I.ピグメントレッド177、209、224、254が挙げられる。
Specific examples of the pigment (A) are shown below using pigment numbers. Terms such as "C.I. Pigment Red 2" listed below mean color index (C.I.).
Examples of red pigments include C.I. I. Pigment Red 1, 2, 3, 4, 5, 6, 7, 8, 9, 12, 14, 15, 16, 17, 21, 22, 23, 31, 32, 37, 38, 41, 47, 48, 48:1, 48:2, 48:3, 48:4, 49, 49:1, 49:2, 50:1, 52:1, 52:2, 53, 53:1, 53:2, 53: 3, 57, 57:1, 57:2, 58:4, 60, 63, 63:1, 63:2, 64, 64:1, 68, 69, 81, 81:1, 81:2, 81: 3, 81:4, 83, 88, 90:1, 101, 101:1, 104, 108, 108:1, 109, 112, 113, 114, 122, 123, 144, 146, 147, 149, 151, 166, 168, 169, 170, 172, 173, 174, 175, 176, 177, 178, 179, 181, 184, 185, 187, 188, 190, 193, 194, 200, 202, 206, 207, 208, 209, 210, 214, 216, 220, 221, 224, 230, 231, 232, 233, 235, 236, 237, 238, 239, 242, 243, 245, 247, 249, 250, 251, 253, 254, 255, 256, 257, 258, 259, 260, 262, 263, 264, 265, 266, 267, 268, 269, 270, 271, 272, 273, 274, 275, 276. Preferably C. I. Pigment Red 48:1, 122, 168, 177, 202, 206, 207, 209, 224, 242, 254, more preferably C.I. I. Pigment Red 177, 209, 224, and 254.
 青色顔料としては、例えば、C.I.ピグメントブルー1、1:2、9、14、15、15:1、15:2、15:3、15:4、15:6、16、17、19、25、27、28、29、33、35、36、56、56:1、60、61、61:1、62、63、66、67、68、71、72、73、74、75、76、78、79が挙げられる。好ましくはC.I.ピグメントブルー15、15:1、15:2、15:3、15:4、15:6、60、より好ましくはC.I.ピグメントブルー15:6、60が挙げられる。 Examples of blue pigments include C.I. I. Pigment Blue 1, 1:2, 9, 14, 15, 15:1, 15:2, 15:3, 15:4, 15:6, 16, 17, 19, 25, 27, 28, 29, 33, 35, 36, 56, 56:1, 60, 61, 61:1, 62, 63, 66, 67, 68, 71, 72, 73, 74, 75, 76, 78, 79. Preferably C. I. Pigment Blue 15, 15:1, 15:2, 15:3, 15:4, 15:6, 60, more preferably C.I. I. Pigment Blue 15:6, 60.
 緑色顔料としては、例えば、C.I.ピグメントグリーン1、2、4、7、8、10、13、14、15、17、18、19、26、36、45、48、50、51、54、55、58が挙げられる。好ましくはC.I.ピグメントグリーン7、36、58が挙げられる。 Examples of green pigments include C.I. I. Pigment Green 1, 2, 4, 7, 8, 10, 13, 14, 15, 17, 18, 19, 26, 36, 45, 48, 50, 51, 54, 55, 58. Preferably C. I. Pigment Green 7, 36, and 58 are mentioned.
 黄色顔料としては、例えば、C.I.ピグメントイエロー1、1:1、2、3、4、5、6、9、10、12、13、14、16、17、24、31、32、34、35、35:1、36、36:1、37、37:1、40、41、42、43、48、53、55、61、62、62:1、63、65、73、74、75、81、83、87、93、94、95、97、100、101、104、105、108、109、110、111、116、117、119、120、126、127、127:1、128、129、133、134、136、138、139、142、147、148、150、151、153、154、155、157、158、159、160、161、162、163、164、165、166、167、168、169、170、172、173、174、175、176、180、181、182、183、184、185、188、189、190、191、191:1、192、193、194、195、196、197、198、199、200、202、203、204、205、206、207、208が挙げられる。好ましくはC.I.ピグメントイエロー83、117、129、138、139、150、154、155、180、185、より好ましくはC.I.ピグメントイエロー83、138、139、150、180が挙げられる。 Examples of yellow pigments include C.I. I. Pigment Yellow 1, 1:1, 2, 3, 4, 5, 6, 9, 10, 12, 13, 14, 16, 17, 24, 31, 32, 34, 35, 35: 1, 36, 36: 1, 37, 37:1, 40, 41, 42, 43, 48, 53, 55, 61, 62, 62: 1, 63, 65, 73, 74, 75, 81, 83, 87, 93, 94, 95, 97, 100, 101, 104, 105, 108, 109, 110, 111, 116, 117, 119, 120, 126, 127, 127:1, 128, 129, 133, 134, 136, 138, 139, 142, 147, 148, 150, 151, 153, 154, 155, 157, 158, 159, 160, 161, 162, 163, 164, 165, 166, 167, 168, 169, 170, 172, 173, 174, 175, 176, 180, 181, 182, 183, 184, 185, 188, 189, 190, 191, 191:1, 192, 193, 194, 195, 196, 197, 198, 199, 200, 202, 203, 204, 205, 206, 207, and 208 are listed. Preferably C. I. Pigment Yellow 83, 117, 129, 138, 139, 150, 154, 155, 180, 185, more preferably C.I. I. Pigment Yellow 83, 138, 139, 150, and 180.
 オレンジ顔料としては、例えば、C.I.ピグメントオレンジ1、2、5、13、16、17、19、20、21、22、23、24、34、36、38、39、43、46、48、49、61、62、64、65、67、68、69、70、71、72、73、74、75、77、78、79が挙げられる。好ましくは、C.I.ピグメントオレンジ38、64、71が挙げられる。 Examples of orange pigments include C.I. I. Pigment Orange 1, 2, 5, 13, 16, 17, 19, 20, 21, 22, 23, 24, 34, 36, 38, 39, 43, 46, 48, 49, 61, 62, 64, 65, 67, 68, 69, 70, 71, 72, 73, 74, 75, 77, 78, 79. Preferably C. I. Pigment Orange 38, 64, and 71.
 紫色顔料としては、例えば、C.I.ピグメントバイオレット1、1:1、2、2:2、3、3:1、3:3、5、5:1、14、15、16、19、23、25、27、29、31、32、37、39、42、44、47、49、50が挙げられる。好ましくはC.I.ピグメントバイオレット19、23、29、より好ましくはC.I.ピグメントバイオレット23、29が挙げられる。 As the purple pigment, for example, C.I. I. Pigment Violet 1, 1:1, 2, 2:2, 3, 3:1, 3:3, 5, 5:1, 14, 15, 16, 19, 23, 25, 27, 29, 31, 32, 37, 39, 42, 44, 47, 49, and 50. Preferably C. I. Pigment Violet 19, 23, 29, more preferably C.I. I. Pigment Violet 23 and 29 are mentioned.
 黒色顔料としては、複数の有色顔料(例えば赤色、緑色、青色の三色)の混合によって黒色を呈する顔料を使用してもよく、単独で黒色を呈する顔料を単独使用してもよく、それらを併用してもよい。 As the black pigment, a pigment that exhibits a black color by mixing multiple colored pigments (for example, three colors of red, green, and blue) may be used, or a pigment that exhibits a black color may be used alone. May be used together.
 黒色顔料を調製するために混合使用可能な顔料としては、例えば、ビクトリアピュアブルー(42595)、オーラミンO(41000)、カチロンブリリアントフラビン(ベーシック13)、ローダミン6GCP(45160)、ローダミンB(45170)、サフラニンOK70:100(50240)、エリオグラウシンX(42080)、No.120/リオノールイエロー(21090)、リオノールイエローGRO(21090)、シムラーファーストイエロー8GF(21105)、ベンジジンイエロー4T-564D(21095)、シムラーファーストレッド4015(12355)、リオノールレッド7B4401(15850)、ファーストゲンブルーTGR-L(74160)、リオノールブルーSM(26150)、リオノールブルーES(ピグメントブルー15:6)、リオノーゲンレッドGD(ピグメントレッド168)、リオノールグリーン2YS(ピグメントグリーン36)が挙げられる。
 なお、上記の( )内の数字は、カラーインデックス(C.I.)を意味する。
Pigments that can be mixed to prepare black pigments include, for example, Victoria Pure Blue (42595), Auramine O (41000), Cathylone Brilliant Flavin (Basic 13), Rhodamine 6GCP (45160), Rhodamine B (45170). , Safranin OK70:100 (50240), Erioglaucine X (42080), No. 120/Lionor Yellow (21090), Lionor Yellow GRO (21090), Shimla Fast Yellow 8GF (21105), Benzidine Yellow 4T-564D (21095), Shimla Fast Red 4015 (12355), Lionor Red 7B4401 (15850), First Gen Blue TGR-L (74160), Lionor Blue SM (26150), Lionor Blue ES (Pigment Blue 15:6), Lionor Gen Red GD (Pigment Red 168), Lionor Green 2YS (Pigment Green 36) Can be mentioned.
Note that the numbers in parentheses above mean color index (C.I.).
 他の混合使用可能な顔料についてC.I.ナンバーにて示すと、例えば、C.I.黄色顔料20、24、86、93、109、110、117、125、137、138、147、148、153、154、166、C.I.オレンジ顔料36、43、51、55、59、61、64、C.I.赤色顔料9、97、122、123、149、168、177、180、192、215、216、217、220、223、224、226、227、228、240、254、C.I.バイオレット顔料19、23、29、30、37、40、50、C.I.青色顔料15、15:1、15:4、22、60、64、C.I.緑色顔料7、C.I.ブラウン顔料23、25、26が挙げられる。 About other pigments that can be mixed with C. I. Indicated by number, for example, C. I. Yellow pigment 20, 24, 86, 93, 109, 110, 117, 125, 137, 138, 147, 148, 153, 154, 166, C.I. I. Orange pigment 36, 43, 51, 55, 59, 61, 64, C.I. I. Red pigment 9, 97, 122, 123, 149, 168, 177, 180, 192, 215, 216, 217, 220, 223, 224, 226, 227, 228, 240, 254, C.I. I. Violet pigment 19, 23, 29, 30, 37, 40, 50, C.I. I. Blue pigment 15, 15:1, 15:4, 22, 60, 64, C.I. I. Green pigment 7, C. I. Brown pigments 23, 25, and 26 are mentioned.
 単独使用可能な黒色顔料としては、例えば、ランプブラック、ボーンブラック、黒鉛、酸化鉄系黒色顔料(鉄黒等)、アニリンブラック、シアニンブラック、チタンブラック、ペリレンブラック、ラクタムブラックが挙げられる。 Examples of black pigments that can be used alone include lamp black, bone black, graphite, iron oxide black pigments (iron black, etc.), aniline black, cyanine black, titanium black, perylene black, and lactam black.
 (A)顔料として、例えば、硫酸バリウム、硫酸鉛、酸化チタン、黄色鉛、ベンガラ、酸化クロムを用いることもできる。 As the pigment (A), for example, barium sulfate, lead sulfate, titanium oxide, yellow lead, red iron oxide, and chromium oxide can also be used.
 これら各種の顔料は、複数種を併用することもできる。例えば、色度の調整のために、緑色顔料と黄色顔料とを併用したり、青色顔料と紫色顔料とを併用したりすることができる。 These various pigments can also be used in combination. For example, in order to adjust the chromaticity, a green pigment and a yellow pigment can be used together, or a blue pigment and a violet pigment can be used together.
 (A)顔料の平均粒径としては、カラーフィルターの着色層とした場合に、所望の発色が可能なものであればよく、特に限定されず、用いる顔料の種類によっても異なるが、10~100nmの範囲内であることが好ましく、10~70nmの範囲内であることがより好ましい。(A)顔料の平均粒径が上記範囲であることにより、本発明の顔料分散液を含有する感光性樹脂組成物を用いて製造された液晶表示装置の色特性を高品質なものとすることができる傾向がある。
 カーボンブラックの平均粒径は、60nm以下が好ましく、50nm以下がさらに好ましく、また、20nm以上が好ましく、例えば、20~50nmが好ましく、20~60nmがより好ましい。平均粒径を前記上限値以下とすることで、散乱が小さくなり、遮光性やコントラスト等の色特性の低下を抑制できる傾向がある。また、平均粒径を前記下限値以上とすることで、(B)分散剤の量が過度に多くならずに済み、分散性が良好となる傾向がある。
(A) The average particle size of the pigment is not particularly limited as long as it can produce the desired color when used as a colored layer of a color filter, and varies depending on the type of pigment used, but is 10 to 100 nm. It is preferably within the range of 10 to 70 nm, and more preferably within the range of 10 to 70 nm. (A) By having the average particle size of the pigment within the above range, the color characteristics of a liquid crystal display device manufactured using a photosensitive resin composition containing the pigment dispersion of the present invention are of high quality. There is a tendency to
The average particle size of carbon black is preferably 60 nm or less, more preferably 50 nm or less, and preferably 20 nm or more, for example, preferably 20 to 50 nm, more preferably 20 to 60 nm. By setting the average particle size to be less than or equal to the upper limit value, scattering tends to be reduced and deterioration of color properties such as light shielding properties and contrast can be suppressed. Further, by setting the average particle size to the above lower limit or more, the amount of the dispersant (B) does not increase excessively, and the dispersibility tends to be good.
 顔料分散液中の全固形分に対する(A)顔料の含有割合は、60質量%以上が好ましく、70質量%以上がより好ましく、80質量%以上がさらに好ましく、また、99質量%以下が好ましく、95質量%以下がより好ましく、90質量%以下がさらに好ましい。(A)顔料の含有割合が前記下限値以上であれば、得られる硬化物の遮光性がより優れる傾向があり、前記上限値以下であれば、分散性がより優れる傾向がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、60~99質量%であってよく、70~95質量%であってよく、80~90質量%であってよい。
The content ratio of the pigment (A) to the total solid content in the pigment dispersion is preferably 60% by mass or more, more preferably 70% by mass or more, even more preferably 80% by mass or more, and preferably 99% by mass or less, It is more preferably 95% by mass or less, and even more preferably 90% by mass or less. If the content ratio of the pigment (A) is equal to or higher than the lower limit value, the obtained cured product tends to have better light-shielding properties, and if it is lower than the upper limit value, the dispersibility tends to be better.
The above upper and lower limits can be arbitrarily combined. For example, it may be 60-99% by weight, 70-95% by weight, or 80-90% by weight.
 (A)顔料の全質量に対するカーボンブラックの含有割合は、90質量%以上が好ましく、95質量%以上がより好ましく、99質量%以上がさらに好ましく、100質量%であってもよい。 The content ratio of carbon black to the total mass of the pigment (A) is preferably 90% by mass or more, more preferably 95% by mass or more, even more preferably 99% by mass or more, and may be 100% by mass.
<(B)分散剤>
 (B)分散剤は、(A)顔料を微細に分散させ、且つその分散状態を安定化させる。
 (B)分散剤としては、官能基を有する高分子分散剤が好ましく、さらには、分散安定性の面から、例えば、カルボキシ基;リン酸基;スルホン酸基;又はこれらの塩基;一級、二級又は三級アミノ基;四級アンモニウム塩基;ピリジン、ピリミジン、ピラジン等の含窒素ヘテロ環由来の基を有する高分子分散剤が好ましい。一級、二級又は三級アミノ基;四級アンモニウム塩基;ピリジン、ピリミジン、ピラジン等の含窒素ヘテロ環由来の基、等の塩基性官能基を有する高分子分散剤が特に好ましい。これら塩基性官能基を有する高分子分散剤を使用することにより、分散性を良好にできる傾向がある。
<(B) Dispersant>
(B) The dispersant finely disperses the pigment (A) and stabilizes the dispersion state.
(B) As the dispersant, a polymer dispersant having a functional group is preferable, and from the viewpoint of dispersion stability, for example, a carboxy group; a phosphoric acid group; a sulfonic acid group; or a base thereof; Polymer dispersants having a class or tertiary amino group; a quaternary ammonium base; and a group derived from a nitrogen-containing heterocycle such as pyridine, pyrimidine, and pyrazine are preferred. Particularly preferred are polymer dispersants having basic functional groups such as primary, secondary or tertiary amino groups; quaternary ammonium bases; groups derived from nitrogen-containing heterocycles such as pyridine, pyrimidine and pyrazine. By using a polymeric dispersant having these basic functional groups, there is a tendency for good dispersibility to be achieved.
 高分子分散剤としては、例えばウレタン系分散剤、アクリル系分散剤、ポリエチレンイミン系分散剤、ポリアリルアミン系分散剤、アミノ基を持つモノマーとマクロモノマーからなる分散剤、ポリオキシエチレンアルキルエーテル系分散剤、ポリオキシエチレンジエステル系分散剤、ポリエーテルリン酸系分散剤、ポリエステルリン酸系分散剤、ソルビタン脂肪族エステル系分散剤、脂肪族変性ポリエステル系分散剤が挙げられる。 Examples of polymeric dispersants include urethane dispersants, acrylic dispersants, polyethyleneimine dispersants, polyallylamine dispersants, dispersants made of monomers and macromonomers having amino groups, and polyoxyethylene alkyl ether dispersants. Examples include polyoxyethylene diester dispersants, polyether phosphate dispersants, polyester phosphate dispersants, sorbitan aliphatic ester dispersants, and aliphatic modified polyester dispersants.
 分散剤としては、例えば、商品名で、EFKA(登録商標。エフカーケミカルズビーブイ(EFKA)社製)、DISPERBYK(登録商標。ビックケミー社製)、ディスパロン(登録商標。楠本化成社製)、SOLSPERSE(登録商標。ルーブリゾール社製)、KP(信越化学工業社製)、ポリフロー又はフローレン(登録商標。共栄社化学社製)、アジスパー(登録商標。味の素ファインテクノ社製)が挙げられる。
 高分子分散剤は1種を単独で使用してもよく、2種以上を併用してもよい。
Examples of dispersants include, for example, the trade names of EFKA (registered trademark, manufactured by EFKA), DISPERBYK (registered trademark, manufactured by BYK Chemie Co., Ltd.), DISPARBYK (registered trademark, manufactured by Kusumoto Kasei Co., Ltd.), and SOLSPERSE (registered trademark, manufactured by Kusumoto Kasei Co., Ltd.). (registered trademark, manufactured by Lubrizol), KP (manufactured by Shin-Etsu Chemical Co., Ltd.), Polyflow or Florene (registered trademark, manufactured by Kyoeisha Chemical Co., Ltd.), and Ajisper (registered trademark, manufactured by Ajinomoto Fine Techno Co., Ltd.).
One type of polymer dispersant may be used alone, or two or more types may be used in combination.
 密着性及び直線性の面から、分散剤は塩基性官能基を有するウレタン系高分子分散剤及び/又はアクリル系高分子分散剤を含むことが好ましく、ウレタン系高分子分散剤を含むことが密着性の面でより好ましい。また、分散性、保存性の面から、塩基性官能基を有し、ポリエステル及び/又はポリエーテル結合を有する高分子分散剤が好ましい。 From the viewpoint of adhesion and linearity, it is preferable that the dispersant contains a urethane polymer dispersant and/or an acrylic polymer dispersant having a basic functional group. More preferable in terms of gender. Further, from the viewpoint of dispersibility and storage stability, a polymer dispersant having a basic functional group and a polyester and/or polyether bond is preferable.
 高分子分散剤の重量平均分子量(Mw)は、700以上が好ましく、1000以上がより好ましく、また、100000以下が好ましく、50000以下がより好ましく、30000以下がさらに好ましい。前記上限値以下とすることで、顔料濃度が高い時でもアルカリ現像性が良好となる傾向がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、700~100000であってよく、700~50000であってよく、1000~30000であってよい。
The weight average molecular weight (Mw) of the polymer dispersant is preferably 700 or more, more preferably 1,000 or more, and preferably 100,000 or less, more preferably 50,000 or less, and even more preferably 30,000 or less. By setting it below the above-mentioned upper limit, alkali developability tends to be good even when the pigment concentration is high.
The above upper and lower limits can be arbitrarily combined. For example, it may be between 700 and 100,000, between 700 and 50,000, and between 1,000 and 30,000.
 ウレタン系又はアクリル系高分子分散剤としては、例えば、DISPERBYK160~167、182シリーズ(いずれもウレタン系)、DISPERBYK2000、2001(いずれもアクリル系)(以上すべてビックケミー社製)が挙げられる。塩基性官能基を有し、ポリエステル及び/又はポリエーテル結合を有するウレタン系高分子分散剤で重量平均分子量30000以下の特に好ましい高分子分散剤としてDISPERBYK167、182が挙げられる。 Examples of urethane-based or acrylic-based polymer dispersants include DISPERBYK 160 to 167, 182 series (all urethane-based), DISPERBYK 2000, 2001 (all acrylic-based) (all manufactured by BYK Chemie). DISPERBYK167 and DISPERBYK182 are particularly preferable polymeric dispersants having a basic functional group and a polyester and/or polyether bond and having a weight average molecular weight of 30,000 or less.
 ウレタン系高分子分散剤としては、例えば、ポリイソシアネート化合物と、分子内に水酸基を1個又は2個有する数平均分子量300~10000の化合物と、同一分子内に活性水素と3級アミノ基を有する化合物とを反応させることによって得られる、重量平均分子量1000~200000の分散樹脂が挙げられる。 Examples of urethane-based polymer dispersants include polyisocyanate compounds, compounds with a number average molecular weight of 300 to 10,000 having one or two hydroxyl groups in the molecule, and active hydrogen and tertiary amino groups in the same molecule. Examples include dispersion resins having a weight average molecular weight of 1,000 to 200,000, which are obtained by reacting with a compound.
 ポリイソシアネート化合物としては、例えば、パラフェニレンジイソシアネート、2,4-トリレンジイソシアネート、2,6-トリレンジイソシアネート、4,4’-ジフェニルメタンジイソシアネート、ナフタレン-1,5-ジイソシアネート、トリジンジイソシアネート等の芳香族ジイソシアネート、ヘキサメチレンジイソシアネート、リジンメチルエステルジイソシアネート、2,4,4-トリメチルヘキサメチレンジイソシアネート、ダイマー酸ジイソシアネート等の脂肪族ジイソシアネート、イソホロンジイソシアネート、4,4’-メチレンビス(シクロヘキシルイソシアネート)、ω,ω’-ジイソシアネートジメチルシクロヘキサン等の脂環族ジイソシアネート、キシリレンジイソシアネート、α,α,α’,α’-テトラメチルキシリレンジイソシアネート等の芳香環を有する脂肪族ジイソシアネート、リジンエステルトリイソシアネート、1,6,11-ウンデカントリイソシアネート、1,8-ジイソシアネート-4-イソシアネートメチルオクタン、1,3,6-ヘキサメチレントリイソシアネート、ビシクロヘプタントリイソシアネート、トリス(イソシアネートフェニルメタン)、トリス(イソシアネートフェニル)チオホスフェート等のトリイソシアネート、及びこれらの3量体、水付加物、及びこれらのポリオール付加物が挙げられる。有機ジイソシアネートの三量体が好ましく、トリレンジイソシアネートの三量体、イソホロンジイソシアネートの三量体がより好ましい。
 ポリイソシアネートは1種を単独で用いてもよく、2種以上を併用してもよい。
Examples of the polyisocyanate compound include aromatic compounds such as paraphenylene diisocyanate, 2,4-tolylene diisocyanate, 2,6-tolylene diisocyanate, 4,4'-diphenylmethane diisocyanate, naphthalene-1,5-diisocyanate, and tolydine diisocyanate. Diisocyanate, hexamethylene diisocyanate, lysine methyl ester diisocyanate, 2,4,4-trimethylhexamethylene diisocyanate, aliphatic diisocyanate such as dimer acid diisocyanate, isophorone diisocyanate, 4,4'-methylenebis(cyclohexyl isocyanate), ω, ω'- Alicyclic diisocyanates such as diisocyanate dimethylcyclohexane, xylylene diisocyanate, aliphatic diisocyanates with aromatic rings such as α, α, α', α'-tetramethylxylylene diisocyanate, lysine ester triisocyanate, 1,6,11- Triisocyanates such as undecane triisocyanate, 1,8-diisocyanate-4-isocyanate methyloctane, 1,3,6-hexamethylene triisocyanate, bicycloheptane triisocyanate, tris(isocyanate phenylmethane), tris(isocyanate phenyl) thiophosphate , trimers thereof, water adducts, and polyol adducts thereof. A trimer of organic diisocyanate is preferred, and a trimer of tolylene diisocyanate and a trimer of isophorone diisocyanate are more preferred.
One type of polyisocyanate may be used alone, or two or more types may be used in combination.
 イソシアネートの三量体の製造方法としては、例えば、ポリイソシアネート類を適当な三量化触媒、例えば、第3級アミン類、ホスフィン類、アルコキシド類、金属酸化物、カルボン酸塩類等を用いてイソシアネート基の部分的な三量化を行い、触媒毒の添加により三量化を停止させた後、未反応のポリイソシアネートを溶剤抽出、薄膜蒸留により除去して目的のイソシアヌレート基含有ポリイソシアネートを得る方法が挙げられる。 As a method for producing isocyanate trimers, for example, polyisocyanates are converted into isocyanate groups using a suitable trimerization catalyst such as tertiary amines, phosphines, alkoxides, metal oxides, carboxylic acid salts, etc. After partially trimerizing the polyisocyanate and stopping the trimerization by adding a catalyst poison, the unreacted polyisocyanate is removed by solvent extraction and thin film distillation to obtain the desired isocyanurate group-containing polyisocyanate. It will be done.
 同一分子内に水酸基を1個又は2個有する数平均分子量300~10000の化合物としては、例えば、ポリエーテルグリコール、ポリエステルグリコール、ポリカーボネートグリコール、ポリオレフィングリコール、及びこれらの化合物の片末端水酸基が炭素数1~25のアルキル基でアルコキシ化された化合物が挙げられる。
 同一分子内に水酸基を1個又は2個有する数平均分子量300~10000の化合物は1種を単独で用いてもよく、2種以上を併用してもよい。
Examples of compounds with a number average molecular weight of 300 to 10,000 having one or two hydroxyl groups in the same molecule include polyether glycol, polyester glycol, polycarbonate glycol, polyolefin glycol, and compounds in which one terminal hydroxyl group of these compounds has 1 carbon number. Examples include compounds alkoxylated with ~25 alkyl groups.
Compounds having one or two hydroxyl groups in the same molecule and having a number average molecular weight of 300 to 10,000 may be used alone or in combination of two or more.
 ポリエーテルグリコールとしては、ポリエーテルジオール、ポリエーテルエステルジオールが挙げられる。 Examples of polyether glycol include polyether diol and polyether ester diol.
 ポリエーテルジオールとしては、アルキレンオキシドを単独又は共重合させて得られる化合物、例えばポリエチレングリコール、ポリプロピレングリコール、ポリエチレン-プロピレングリコール、ポリオキシテトラメチレングリコール、ポリオキシヘキサメチレングリコール、ポリオキシオクタメチレングリコールが挙げられる。
 ポリエーテルエステルジオールとしては、エーテル基含有ジオールもしくは他のグリコールとの混合物をジカルボン酸又はそれらの無水物と反応させるか、又はポリエステルグリコールにアルキレンオキシドを反応させることによって得られる化合物、例えばポリ(ポリオキシテトラメチレン)アジペートが挙げられる。
Examples of polyether diols include compounds obtained by copolymerizing alkylene oxides alone or by copolymerizing them, such as polyethylene glycol, polypropylene glycol, polyethylene-propylene glycol, polyoxytetramethylene glycol, polyoxyhexamethylene glycol, and polyoxyoctamethylene glycol. It will be done.
Polyether ester diols include compounds obtained by reacting ether group-containing diols or mixtures with other glycols with dicarboxylic acids or their anhydrides, or by reacting polyester glycols with alkylene oxides, such as poly( oxytetramethylene) adipate.
 ポリエーテルグリコールとしてはポリエチレングリコール、ポリプロピレングリコール、ポリオキシテトラメチレングリコール又はこれらの化合物の片末端水酸基が炭素数1~25のアルキル基でアルコキシ化された化合物が好ましい。 The polyether glycol is preferably polyethylene glycol, polypropylene glycol, polyoxytetramethylene glycol, or a compound in which one terminal hydroxyl group of these compounds is alkoxylated with an alkyl group having 1 to 25 carbon atoms.
 ポリエステルグリコールとしては、例えば、ジカルボン酸(コハク酸、グルタル酸、アジピン酸、セバシン酸、フマル酸、マレイン酸、フタル酸等)又はそれらの無水物とグリコール(エチレングリコール、ジエチレングリコール、トリエチレングリコール、プロピレングリコール、ジプロピレングリコール、トリプロピレングリコール、1,2-ブタンジオール、1,3-ブタンジオール、1,4-ブタンジオール、2,3-ブタンジオール、3-メチル-1,5-ペンタンジオール、ネオペンチルグリコール、2-メチル-1,3-プロパンジオール、2-メチル-2-プロピル-1,3-プロパンジオール、2-ブチル-2-エチル-1,3-プロパンジオール、1,5-ペンタンジオール、1,6-ヘキサンジオール、2-メチル-2,4-ペンタンジオール、2,2,4-トリメチル-1,3-ペンタンジオール、2-エチル-1,3-ヘキサンジオール、2,5-ジメチル-2,5-ヘキサンジオール、1,8-オクタメチレングリコール、2-メチル-1,8-オクタメチレングリコール、1,9-ノナンジオール等の脂肪族グリコール、ビスヒドロキシメチルシクロヘキサン等の脂環族グリコール、キシリレングリコール、ビスヒドロキシエトキシベンゼン等の芳香族グリコール、N-メチルジエタノールアミン等のN-アルキルジアルカノールアミン等)とを重縮合させて得られた化合物、例えばポリエチレンアジペート、ポリブチレンアジペート、ポリヘキサメチレンアジペート、ポリエチレン/プロピレンアジペート等、又は前記ジオール類又は炭素数1~25の1価アルコールを開始剤として用いて得られるポリラクトンジオール又はポリラクトンモノオール、例えばポリカプロラクトングリコール、ポリメチルバレロラクトンが挙げられる。
 ポリエステルグリコールとしてはポリカプロラクトングリコール又は炭素数1~25のアルコールを開始剤としたポリカプロラクトンが好ましい。
Examples of polyester glycols include dicarboxylic acids (succinic acid, glutaric acid, adipic acid, sebacic acid, fumaric acid, maleic acid, phthalic acid, etc.) or their anhydrides and glycols (ethylene glycol, diethylene glycol, triethylene glycol, propylene glycol, etc.). Glycol, dipropylene glycol, tripropylene glycol, 1,2-butanediol, 1,3-butanediol, 1,4-butanediol, 2,3-butanediol, 3-methyl-1,5-pentanediol, neo Pentyl glycol, 2-methyl-1,3-propanediol, 2-methyl-2-propyl-1,3-propanediol, 2-butyl-2-ethyl-1,3-propanediol, 1,5-pentanediol , 1,6-hexanediol, 2-methyl-2,4-pentanediol, 2,2,4-trimethyl-1,3-pentanediol, 2-ethyl-1,3-hexanediol, 2,5-dimethyl Aliphatic glycols such as -2,5-hexanediol, 1,8-octamethylene glycol, 2-methyl-1,8-octamethylene glycol, and 1,9-nonanediol, alicyclic glycols such as bishydroxymethylcyclohexane , xylylene glycol, aromatic glycols such as bishydroxyethoxybenzene, N-alkyl dialkanolamines such as N-methyldiethanolamine, etc.), such as polyethylene adipate, polybutylene adipate, polyhexa Methylene adipate, polyethylene/propylene adipate, etc., or polylactone diols or polylactone monools obtained using the above diols or monohydric alcohols having 1 to 25 carbon atoms as initiators, such as polycaprolactone glycol and polymethylvalerolactone. Can be mentioned.
As the polyester glycol, polycaprolactone glycol or polycaprolactone using an alcohol having 1 to 25 carbon atoms as an initiator is preferable.
 ポリカーボネートグリコールとしては、例えば、ポリ(1,6-ヘキシレン)カーボネート、ポリ(3-メチル-1,5-ペンチレン)カーボネート、ポリオレフィングリコールとしてはポリブタジエングリコール、水素添加型ポリブタジエングリコール、水素添加型ポリイソプレングリコールが挙げられる。 Examples of polycarbonate glycols include poly(1,6-hexylene) carbonate and poly(3-methyl-1,5-pentylene) carbonate, and examples of polyolefin glycols include polybutadiene glycol, hydrogenated polybutadiene glycol, and hydrogenated polyisoprene glycol. can be mentioned.
 同一分子内に水酸基を1個又は2個有する化合物の数平均分子量は、300~10000が好ましく、500~6000がより好ましく、1000~4000がさらに好ましい。 The number average molecular weight of the compound having one or two hydroxyl groups in the same molecule is preferably 300 to 10,000, more preferably 500 to 6,000, and even more preferably 1,000 to 4,000.
 同一分子内に活性水素と3級アミノ基を有する化合物における活性水素、即ち、酸素原子、窒素原子又はイオウ原子に直接結合している水素原子としては、例えば、水酸基、アミノ基、チオール基の官能基中の水素原子が挙げられ、アミノ基の水素原子が好ましく、1級のアミノ基の水素原子がより好ましい。 In a compound having active hydrogen and a tertiary amino group in the same molecule, the active hydrogen, that is, the hydrogen atom directly bonded to an oxygen atom, nitrogen atom, or sulfur atom, includes, for example, a functional group such as a hydroxyl group, an amino group, or a thiol group. Hydrogen atoms in groups are mentioned, hydrogen atoms in amino groups are preferred, and hydrogen atoms in primary amino groups are more preferred.
 同一分子内に活性水素と3級アミノ基を有する化合物における3級アミノ基は、特に限定されないが、例えば、炭素数1~4のアルキル基を有するアミノ基、又はイミダゾール環、トリアゾール環等のヘテロ環構造が挙げられる。
 同一分子内に活性水素と3級アミノ基を有する化合物としては、例えば、N,N-ジメチル-1,3-プロパンジアミン、N,N-ジエチル-1,3-プロパンジアミン、N,N-ジプロピル-1,3-プロパンジアミン、N,N-ジブチル-1,3-プロパンジアミン、N,N-ジメチルエチレンジアミン、N,N-ジエチルエチレンジアミン、N,N-ジプロピルエチレンジアミン、N,N-ジブチルエチレンジアミン、N,N-ジメチル-1,4-ブタンジアミン、N,N-ジエチル-1,4-ブタンジアミン、N,N-ジプロピル-1,4-ブタンジアミン、N,N-ジブチル-1,4-ブタンジアミンが挙げられる。
The tertiary amino group in a compound having an active hydrogen and a tertiary amino group in the same molecule is not particularly limited, but includes, for example, an amino group having an alkyl group having 1 to 4 carbon atoms, or a hetero group such as an imidazole ring or a triazole ring. Examples include ring structures.
Examples of compounds having active hydrogen and a tertiary amino group in the same molecule include N,N-dimethyl-1,3-propanediamine, N,N-diethyl-1,3-propanediamine, and N,N-dipropyl. -1,3-propanediamine, N,N-dibutyl-1,3-propanediamine, N,N-dimethylethylenediamine, N,N-diethylethylenediamine, N,N-dipropylethylenediamine, N,N-dibutylethylenediamine, N,N-dimethyl-1,4-butanediamine, N,N-diethyl-1,4-butanediamine, N,N-dipropyl-1,4-butanediamine, N,N-dibutyl-1,4-butane Examples include diamines.
 3級アミノ基が含窒素ヘテロ環構造である場合の含窒素ヘテロ環としては、例えば、ピラゾール環、イミダゾール環、トリアゾール環、テトラゾール環、インドール環、カルバゾール環、インダゾール環、ベンズイミダゾール環、ベンゾトリアゾール環、ベンゾオキサゾール環、ベンゾチアゾール環、ベンゾチアジアゾール環等の含窒素ヘテロ5員環、ピリジン環、ピリダジン環、ピリミジン環、トリアジン環、キノリン環、アクリジン環、イソキノリン環等の含窒素ヘテロ6員環が挙げられる。含窒素ヘテロ環としては、イミダゾール環、トリアゾール環が好ましい。 When the tertiary amino group is a nitrogen-containing heterocyclic structure, examples of the nitrogen-containing heterocycle include a pyrazole ring, an imidazole ring, a triazole ring, a tetrazole ring, an indole ring, a carbazole ring, an indazole ring, a benzimidazole ring, and a benzotriazole ring. ring, 5-membered nitrogen-containing hetero rings such as benzoxazole ring, benzothiazole ring, benzothiadiazole ring, 6-membered nitrogen-containing hetero rings such as pyridine ring, pyridazine ring, pyrimidine ring, triazine ring, quinoline ring, acridine ring, isoquinoline ring, etc. can be mentioned. As the nitrogen-containing heterocycle, an imidazole ring and a triazole ring are preferred.
 イミダゾール環とアミノ基を有する化合物としては、例えば、1-(3-アミノプロピル)イミダゾール、ヒスチジン、2-アミノイミダゾール、1-(2-アミノエチル)イミダゾールが挙げられる。
 トリアゾール環とアミノ基を有する化合物としては、例えば、3-アミノ-1,2,4-トリアゾール、5-(2-アミノ-5-クロロフェニル)-3-フェニル-1H-1,2,4-トリアゾール、4-アミノ-4H-1,2,4-トリアゾール-3,5-ジオール、3-アミノ-5-フェニル-1H-1,3,4-トリアゾール、5-アミノ-1,4-ジフェニル-1,2,3-トリアゾール、3-アミノ-1-ベンジル-1H-2,4-トリアゾールが挙げられる。
Examples of compounds having an imidazole ring and an amino group include 1-(3-aminopropyl)imidazole, histidine, 2-aminoimidazole, and 1-(2-aminoethyl)imidazole.
Examples of compounds having a triazole ring and an amino group include 3-amino-1,2,4-triazole, 5-(2-amino-5-chlorophenyl)-3-phenyl-1H-1,2,4-triazole , 4-amino-4H-1,2,4-triazole-3,5-diol, 3-amino-5-phenyl-1H-1,3,4-triazole, 5-amino-1,4-diphenyl-1 , 2,3-triazole, and 3-amino-1-benzyl-1H-2,4-triazole.
 同一分子内に活性水素と3級アミノ基を有する化合物としては、N,N-ジメチル-1,3-プロパンジアミン、N,N-ジエチル-1,3-プロパンジアミン、1-(3-アミノプロピル)イミダゾール、3-アミノ-1,2,4-トリアゾールが好ましい。
 同一分子内に活性水素と3級アミノ基を有する化合物は1種を単独で用いてもよく、2種以上を併用してもよい。
Compounds having active hydrogen and a tertiary amino group in the same molecule include N,N-dimethyl-1,3-propanediamine, N,N-diethyl-1,3-propanediamine, 1-(3-aminopropyl ) Imidazole and 3-amino-1,2,4-triazole are preferred.
Compounds having active hydrogen and a tertiary amino group in the same molecule may be used singly or in combination of two or more.
 ウレタン系高分子分散剤を製造する際の原料の好ましい配合比率はポリイソシアネート化合物100質量部に対し、同一分子内に水酸基を1個又は2個有する数平均分子量300~10000の化合物が10~200質量部、好ましくは20~190質量部、さらに好ましくは30~180質量部、同一分子内に活性水素と3級アミノ基を有する化合物が0.2~25質量部、好ましくは0.3~24質量部である。上記の配合比率は任意に組み合わせることができる。例えば、ポリイソシアネート化合物100質量部に対し、同一分子内に水酸基を1個又は2個有する数平均分子量300~10000の化合物が10~200質量部、同一分子内に活性水素と3級アミノ基を有する化合物が0.2~25質量部であってよく;ポリイソシアネート化合物100質量部に対し、同一分子内に水酸基を1個又は2個有する数平均分子量300~10000の化合物が20~190質量部、同一分子内に活性水素と3級アミノ基を有する化合物が0.2~25質量部であってよく;ポリイソシアネート化合物100質量部に対し、同一分子内に水酸基を1個又は2個有する数平均分子量300~10000の化合物が30~180質量部、同一分子内に活性水素と3級アミノ基を有する化合物が0.3~24質量部であってよい。 The preferred blending ratio of raw materials when producing a urethane polymer dispersant is 10 to 200 parts of a compound with a number average molecular weight of 300 to 10,000 having one or two hydroxyl groups in the same molecule to 100 parts by mass of the polyisocyanate compound. parts by weight, preferably 20 to 190 parts by weight, more preferably 30 to 180 parts by weight, and 0.2 to 25 parts by weight, preferably 0.3 to 24 parts by weight of a compound having active hydrogen and a tertiary amino group in the same molecule. Part by mass. The above blending ratios can be combined arbitrarily. For example, for 100 parts by mass of a polyisocyanate compound, 10 to 200 parts by mass of a compound with a number average molecular weight of 300 to 10,000 having one or two hydroxyl groups in the same molecule, and active hydrogen and a tertiary amino group in the same molecule. The compound having one or two hydroxyl groups in the same molecule may be 0.2 to 25 parts by mass; 20 to 190 parts by mass of a compound having a number average molecular weight of 300 to 10,000 and having one or two hydroxyl groups in the same molecule. , the compound having active hydrogen and a tertiary amino group in the same molecule may be 0.2 to 25 parts by mass; the number having one or two hydroxyl groups in the same molecule per 100 parts by mass of the polyisocyanate compound. The amount of the compound having an average molecular weight of 300 to 10,000 may be 30 to 180 parts by weight, and the amount of the compound having an active hydrogen and a tertiary amino group in the same molecule may be 0.3 to 24 parts by weight.
 ウレタン系高分子分散剤の製造はポリウレタン樹脂製造に係る公知の方法に従って行われる。製造する際に用いる溶媒としては、例えば、アセトン、メチルエチルケトン、メチルイソブチルケトン、シクロペンタノン、シクロヘキサノン、イソホロン等のケトン類、酢酸エチル、酢酸ブチル、酢酸セロソルブ等のエステル類、ベンゼン、トルエン、キシレン、ヘキサン等の炭化水素類、ダイアセトンアルコール、イソプロパノール、第二ブタノール、第三ブタノール等一部のアルコール類、塩化メチレン、クロロホルム等の塩化物、テトラヒドロフラン、ジエチルエーテル等のエーテル類、ジメチルホルムアミド、N-メチルピロリドン、ジメチルスルホキサイド等の非プロトン性極性溶媒が用いられる。これらは1種を単独で用いてもよく、2種以上を併用してもよい。 The urethane polymer dispersant is produced according to a known method for producing polyurethane resins. Examples of solvents used during production include ketones such as acetone, methyl ethyl ketone, methyl isobutyl ketone, cyclopentanone, cyclohexanone, and isophorone, esters such as ethyl acetate, butyl acetate, and cellosolve acetate, benzene, toluene, xylene, Hydrocarbons such as hexane, some alcohols such as diacetone alcohol, isopropanol, sec-butanol and tertiary-butanol, chlorides such as methylene chloride and chloroform, ethers such as tetrahydrofuran and diethyl ether, dimethylformamide, N- Aprotic polar solvents such as methylpyrrolidone and dimethylsulfoxide are used. These may be used alone or in combination of two or more.
 ウレタン系高分子分散剤の製造に際して、ウレタン化反応触媒を用いてもよい。ウレタン化反応触媒としては、例えば、ジブチルチンジラウレート、ジオクチルチンジラウレート、ジブチルチンジオクトエート、スタナスオクトエート等の錫系、鉄アセチルアセトナート、塩化第二鉄等の鉄系、トリエチルアミン、トリエチレンジアミン等の3級アミン系が挙げられる。これらは1種を単独で用いてもよく、2種以上を併用してもよい。 A urethane reaction catalyst may be used in the production of the urethane-based polymer dispersant. Examples of urethanization reaction catalysts include tin-based catalysts such as dibutyltin dilaurate, dioctyltin dilaurate, dibutyltin dioctoate, stannath octoate, iron-based catalysts such as iron acetylacetonate and ferric chloride, triethylamine, triethylenediamine, etc. Examples include tertiary amines. These may be used alone or in combination of two or more.
 反応後のアミン価で好ましくは1~100mgKOH/g、より好ましくは5~95mgKOH/gの範囲となるように同一分子内に活性水素と3級アミノ基を有する化合物の導入量を制御することが好ましい。アミン価を前記下限値以上とすることで分散性が良好となる傾向がある。また、前記上限値以下とすることで現像性が良好となる傾向がある。 It is possible to control the amount of the compound having active hydrogen and a tertiary amino group introduced into the same molecule so that the amine value after the reaction is preferably in the range of 1 to 100 mgKOH/g, more preferably 5 to 95 mgKOH/g. preferable. When the amine value is equal to or higher than the lower limit value, the dispersibility tends to be improved. Furthermore, when the content is below the upper limit, developability tends to be improved.
 アミン価は、試料中の溶媒を除いた固形分1gあたりの塩基量と当量のKOHの質量で表し、次の方法により測定することができる。
 100mLのビーカーに試料の0.5~1.5gを精秤し、50mLの酢酸で溶解する。pH電極を備えた自動滴定装置を使って、この溶液を0.1mol/LのHClO(過塩素酸)酢酸溶液にて中和滴定する。滴定pH曲線の変曲点を滴定終点とし次式によりアミン価を求める。
 アミン価[mgKOH/g]=(561×V)/(W×S)
〔但し、W:分散剤試料秤取量[g]、V:滴定終点での滴定量[mL]、S:分散剤試料の固形分濃度[質量%]を表す。〕
The amine value is expressed by the amount of base per 1 g of solid content excluding the solvent in the sample and the mass of KOH equivalent to the amount of base, and can be measured by the following method.
Accurately weigh 0.5 to 1.5 g of the sample into a 100 mL beaker and dissolve it in 50 mL of acetic acid. Using an automatic titrator equipped with a pH electrode, this solution is subjected to neutralization titration with a 0.1 mol/L HClO 4 (perchloric acid) acetic acid solution. The inflection point of the titration pH curve is taken as the titration end point, and the amine value is determined by the following formula.
Amine value [mgKOH/g]=(561×V)/(W×S)
[However, W: weighed amount of dispersant sample [g], V: titration amount at titration end point [mL], S: solid content concentration of dispersant sample [mass %]. ]
 以上の反応で高分子分散剤にイソシアネート基が残存する場合にはさらに、アルコールやアミノ化合物でイソシアネート基を消費すると、生成物の経時安定性が高くなるので好ましい。 When isocyanate groups remain in the polymeric dispersant in the above reaction, it is preferable to consume the isocyanate groups with an alcohol or an amino compound because this will increase the stability of the product over time.
 ウレタン系高分子分散剤の重量平均分子量(Mw)は、1000~200000が好ましく、2000~100000がより好ましく、3000~50000がさらに好ましい。特に30000以下が好ましい。Mwが前記下限値以上であれば、分散性及び分散安定性が良好となる傾向があり、前記上限値以下であれば、溶解性が良好となる傾向がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、1000~30000であってよく、2000~30000であってよく、3000~30000であってよい。
 特にMwが30000以下であると、特に顔料濃度の高い場合でも、アルカリ現像性が良好となる傾向がある。市販のウレタン分散剤としては、例えば、DISPERBYK167、182(ビックケミー社)が挙げられる。
The weight average molecular weight (Mw) of the urethane polymer dispersant is preferably 1,000 to 200,000, more preferably 2,000 to 100,000, and even more preferably 3,000 to 50,000. In particular, it is preferably 30,000 or less. If Mw is equal to or greater than the lower limit, the dispersibility and dispersion stability tend to be good, and if it is equal to or less than the upper limit, the solubility tends to be good.
The above upper and lower limits can be arbitrarily combined. For example, it may be 1000 to 30000, 2000 to 30000, or 3000 to 30000.
In particular, when Mw is 30,000 or less, alkali developability tends to be good even when the pigment concentration is particularly high. Examples of commercially available urethane dispersants include DISPERBYK167 and DISPERBYK182 (manufactured by BYK Chemie).
 (A)顔料と(B)分散剤との、質量基準における含有比率((A)顔料/(B)分散剤)は、1以上が好ましく、3以上がより好ましく、4以上がさらに好ましく、また、50以下が好ましく、30以下がより好ましく、15以下がさらに好ましい。(A)顔料/(B)分散剤が前記下限値以上であれば、現像溶解性がより優れる傾向があり、前記上限値以下であれば、(A)顔料の十分な分散性を確保しやすい傾向がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、1~50であってよく、3~30であってよく、4~15であってよい。
The content ratio of (A) pigment and (B) dispersant on a mass basis ((A) pigment/(B) dispersant) is preferably 1 or more, more preferably 3 or more, even more preferably 4 or more, and , is preferably 50 or less, more preferably 30 or less, and even more preferably 15 or less. If the (A) pigment/(B) dispersant is equal to or higher than the lower limit value, the development solubility tends to be better, and if it is lower than the upper limit value, it is easy to ensure sufficient dispersibility of the (A) pigment. Tend.
The above upper and lower limits can be arbitrarily combined. For example, it may be 1 to 50, 3 to 30, or 4 to 15.
 顔料分散液中の全固形分に対する(B)分散剤の含有割合は、5質量%以上が好ましく、10質量%以上がより好ましく、15質量%以上がさらに好ましく、また、30質量%以下が好ましく、25質量%以下がより好ましく、20質量%以下がさらに好ましい。(B)分散剤の含有割合が前記下限値以上であれば、(A)顔料の十分な分散性を確保しやすい傾向があり、前記上限値以下であれば、他の成分の割合を減らすことなく、成膜性がより優れる傾向がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、5~30質量%であってよく、10~25質量%であってよく、15~20質量%であってよい。
The content of the dispersant (B) relative to the total solids in the pigment dispersion is preferably 5% by mass or more, more preferably 10% by mass or more, even more preferably 15% by mass or more, and preferably 30% by mass or less. , more preferably 25% by mass or less, and even more preferably 20% by mass or less. (B) If the content ratio of the dispersant is at least the above lower limit, it tends to ensure sufficient dispersibility of the (A) pigment, and if it is below the above upper limit, the proportion of other components can be reduced. There is a tendency that the film formability is better.
The above upper and lower limits can be arbitrarily combined. For example, it may be 5-30% by weight, it may be 10-25% by weight, it may be 15-20% by weight.
<有機溶剤>
 有機溶剤としては、顔料分散液の粘度安定性の観点から100~300℃の沸点を持つ有機溶剤が好ましく、120~280℃の沸点を持つ有機溶剤がより好ましい。ここで、沸点は、圧力1013.25hPaにおける値である。以下、沸点に関しては全て同様である。
<Organic solvent>
As the organic solvent, from the viewpoint of viscosity stability of the pigment dispersion, an organic solvent having a boiling point of 100 to 300°C is preferable, and an organic solvent having a boiling point of 120 to 280°C is more preferable. Here, the boiling point is a value at a pressure of 1013.25 hPa. Hereinafter, all boiling points are the same.
 100~300℃の沸点を持つ有機溶剤としては、例えば、以下が挙げられる。
 エチレングリコールモノメチルエーテル、エチレングリコールモノエチルエーテル、エチレングリコールモノプロピルエーテル、エチレングリコールモノブチルエーテル、プロピレングリコールモノメチルエーテル、プロピレングリコールモノエチルエーテル、プロピレングリコールモノ-n-ブチルエーテル、プロピレングリコール-t-ブチルエーテル、ジエチレングリコールモノメチルエーテル、ジエチレングリコールモノエチルエーテル、ジエチレングリコールモノ-n-ブチルエーテル、メトキシメチルペンタノール、ジプロピレングリコールモノエチルエーテル、ジプロピレングリコールモノメチルエーテル、3-メチル-3-メトキシブタノール、トリエチレングリコールモノメチルエーテル、トリエチレングリコールモノエチルエーテル、トリプロピレングリコールメチルエーテルのようなグリコールモノアルキルエーテル類;
Examples of organic solvents having a boiling point of 100 to 300°C include the following.
Ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monopropyl ether, ethylene glycol monobutyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol mono-n-butyl ether, propylene glycol-t-butyl ether, diethylene glycol monomethyl Ether, diethylene glycol monoethyl ether, diethylene glycol mono-n-butyl ether, methoxymethylpentanol, dipropylene glycol monoethyl ether, dipropylene glycol monomethyl ether, 3-methyl-3-methoxybutanol, triethylene glycol monomethyl ether, triethylene glycol Glycol monoalkyl ethers such as monoethyl ether and tripropylene glycol methyl ether;
 エチレングリコールジメチルエーテル、エチレングリコールジエチルエーテル、ジエチレングリコールジメチルエーテル、ジエチレングリコールジエチルエーテル、ジエチレングリコールジプロピルエーテル、ジエチレングリコールジブチルエーテル、ジプロピレングリコールジメチルエーテルのようなグリコールジアルキルエーテル類;
 エチレングリコールモノメチルエーテルアセテート、エチレングリコールモノエチルエーテルアセテート、エチレングリコールモノ-n-ブチルエーテルアセテート、プロピレングリコールモノメチルエーテルアセテート、プロピレングリコールモノエチルエーテルアセテート、プロピレングリコールモノプロピルエーテルアセテート、プロピレングリコールモノブチルエーテルアセテート、メトキシブチルアセテート、3-メトキシブチルアセテート、メトキシペンチルアセテート、ジエチレングリコールモノメチルエーテルアセテート、ジエチレングリコールモノエチルエーテルアセテート、ジエチレングリコールモノ-n-ブチルエーテルアセテート、ジプロピレングリコールモノメチルエーテルアセテート、トリエチレングリコールモノメチルエーテルアセテート、トリエチレングリコールモノエチルエーテルアセテート、3-メチル-3-メトキシブチルアセテートのようなグリコールアルキルエーテルアセテート類;
Glycol dialkyl ethers such as ethylene glycol dimethyl ether, ethylene glycol diethyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol dipropyl ether, diethylene glycol dibutyl ether, dipropylene glycol dimethyl ether;
Ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, ethylene glycol mono-n-butyl ether acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, propylene glycol monopropyl ether acetate, propylene glycol monobutyl ether acetate, methoxybutyl Acetate, 3-methoxybutyl acetate, methoxypentyl acetate, diethylene glycol monomethyl ether acetate, diethylene glycol monoethyl ether acetate, diethylene glycol mono-n-butyl ether acetate, dipropylene glycol monomethyl ether acetate, triethylene glycol monomethyl ether acetate, triethylene glycol monoethyl Glycol alkyl ether acetates such as ether acetate, 3-methyl-3-methoxybutyl acetate;
 エチレングリコールジアセテート、1,3-ブチレングリコールジアセテート、1,6-ヘキサノールジアセテート等のグリコールジアセテート類;
 シクロヘキサノールアセテート等のアルキルアセテート類;
 アミルエーテル、ジエチルエーテル、ジプロピルエーテル、ジイソプロピルエーテル、ジブチルエーテル、ジアミルエーテル、エチルイソブチルエーテル、ジヘキシルエーテルのようなエーテル類;
 アセトン、メチルエチルケトン、メチルアミルケトン、メチルイソプロピルケトン、メチルイソアミルケトン、ジイソプロピルケトン、ジイソブチルケトン、メチルイソブチルケトン、シクロヘキサノン、エチルアミルケトン、メチルブチルケトン、メチルヘキシルケトン、メチルノニルケトン、メトキシメチルペンタノンのようなケトン類;
 エタノール、プロパノール、ブタノール、ヘキサノール、シクロヘキサノール、エチレングリコール、プロピレングリコール、ブタンジオール、ジエチレングリコール、ジプロピレングリコール、トリエチレングリコール、メトキシメチルペンタノール、グリセリン、ベンジルアルコールのような1価又は多価アルコール類;
 n-ペンタン、n-オクタン、ジイソブチレン、n-ヘキサン、ヘキセン、イソプレン、ジペンテン、ドデカンのような脂肪族炭化水素類;
 シクロヘキサン、メチルシクロヘキサン、メチルシクロヘキセン、ビシクロヘキシルのような脂環式炭化水素類;
Glycol diacetates such as ethylene glycol diacetate, 1,3-butylene glycol diacetate, 1,6-hexanol diacetate;
Alkyl acetates such as cyclohexanol acetate;
Ethers such as amyl ether, diethyl ether, dipropyl ether, diisopropyl ether, dibutyl ether, diamyl ether, ethyl isobutyl ether, dihexyl ether;
Such as acetone, methyl ethyl ketone, methyl amyl ketone, methyl isopropyl ketone, methyl isoamyl ketone, diisopropyl ketone, diisobutyl ketone, methyl isobutyl ketone, cyclohexanone, ethyl amyl ketone, methyl butyl ketone, methyl hexyl ketone, methyl nonyl ketone, methoxy methyl pentanone Ketones;
Monohydric or polyhydric alcohols such as ethanol, propanol, butanol, hexanol, cyclohexanol, ethylene glycol, propylene glycol, butanediol, diethylene glycol, dipropylene glycol, triethylene glycol, methoxymethylpentanol, glycerin, benzyl alcohol;
Aliphatic hydrocarbons such as n-pentane, n-octane, diisobutylene, n-hexane, hexene, isoprene, dipentene, dodecane;
Alicyclic hydrocarbons such as cyclohexane, methylcyclohexane, methylcyclohexene, bicyclohexyl;
 ベンゼン、トルエン、キシレン、クメンのような芳香族炭化水素類;
 アミルホルメート、エチルホルメート、酢酸エチル、酢酸ブチル、酢酸プロピル、酢酸アミル、メチルイソブチレート、エチレングリコールアセテート、エチルプロピオネート、プロピルプロピオネート、酪酸ブチル、酪酸イソブチル、イソ酪酸メチル、エチルカプリレート、ブチルステアレート、エチルベンゾエート、3-エトキシプロピオン酸メチル、3-エトキシプロピオン酸エチル、3-メトキシプロピオン酸メチル、3-メトキシプロピオン酸エチル、3-メトキシプロピオン酸プロピル、3-メトキシプロピオン酸ブチル、γ-ブチロラクトンのような鎖状又は環状エステル類;
 3-メトキシプロピオン酸、3-エトキシプロピオン酸のようなアルコキシカルボン酸類;
 ブチルクロライド、アミルクロライドのようなハロゲン化炭化水素類;
 メトキシメチルペンタノンのようなエーテルケトン類;
 アセトニトリル、ベンゾニトリルのようなニトリル類。
Aromatic hydrocarbons such as benzene, toluene, xylene, and cumene;
Amyl formate, ethyl formate, ethyl acetate, butyl acetate, propyl acetate, amyl acetate, methyl isobutyrate, ethylene glycol acetate, ethyl propionate, propyl propionate, butyl butyrate, isobutyl butyrate, methyl isobutyrate, ethyl Caprylate, butyl stearate, ethyl benzoate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, propyl 3-methoxypropionate, 3-methoxypropionate linear or cyclic esters such as butyl, γ-butyrolactone;
Alkoxycarboxylic acids such as 3-methoxypropionic acid and 3-ethoxypropionic acid;
Halogenated hydrocarbons such as butyl chloride and amyl chloride;
Etherketones such as methoxymethylpentanone;
Nitriles such as acetonitrile and benzonitrile.
 市販の有機溶剤としては、例えば、ミネラルスピリット、バルソル#2、アプコ#18ソルベント、アプコシンナー、ソーカルソルベントNo.1及びNo.2、ソルベッソ#150、シェルTS28 ソルベント、カルビトール、エチルカルビトール、ブチルカルビトール、メチルセロソルブ(「セロソルブ」は登録商標。以下同じ。)、エチルセロソルブ、エチルセロソルブアセテート、メチルセロソルブアセテート、ジグライム(いずれも商品名)が挙げられる。
 有機溶剤は、1種を単独で用いてもよく、2種以上を併用してもよい。
Commercially available organic solvents include, for example, Mineral Spirit, Valsol #2, Apco #18 Solvent, Apco Thinner, So Cal Solvent No. 1 and no. 2. Solvesso #150, Shell TS28 Solvent, carbitol, ethyl carbitol, butyl carbitol, methyl cellosolve (“Cellosolve” is a registered trademark. The same applies hereinafter), ethyl cellosolve, ethyl cellosolve acetate, methyl cellosolve acetate, diglyme (all product name).
One type of organic solvent may be used alone, or two or more types may be used in combination.
 顔料分散液を含有する感光性樹脂組成物によって、フォトリソグラフィー法にてカラーフィルターの画素又はブラックマトリックスを形成する場合、100~250℃の沸点を持つ有機溶剤が好ましく、120~230℃の沸点を持つ有機溶剤がより好ましい。 When forming color filter pixels or black matrices by photolithography using a photosensitive resin composition containing a pigment dispersion, an organic solvent with a boiling point of 100 to 250°C is preferable, and an organic solvent with a boiling point of 120 to 230°C is preferable. It is more preferable to use an organic solvent with
 有機溶剤としては、塗布性、表面張力等のバランスが良く、感光性樹脂組成物中の構成成分の溶解度が比較的高い点、また、顔料分散液の粘度安定性の観点から、グリコールアルキルエーテルアセテート類が好ましい。グリコールアルキルエーテルアセテート類は、1種を単独で用いてもよく、2種以上を併用してもよい。 As an organic solvent, glycol alkyl ether acetate is recommended because it has a good balance in coating properties, surface tension, etc., has a relatively high solubility of constituent components in the photosensitive resin composition, and has a stable viscosity of the pigment dispersion. Preferably. One type of glycol alkyl ether acetate may be used alone, or two or more types may be used in combination.
 グリコールアルキルエーテルアセテート類は、他の有機溶剤と併用してもよい。
 他の有機溶剤としては、グリコールモノアルキルエーテル類が好ましい。感光性樹脂組成物中の構成成分の溶解性から、プロピレングリコールモノメチルエーテルが好ましい。
 グリコールモノアルキルエーテル類は極性が高いため、(A)顔料の凝集、及び後に得られる感光性樹脂組成物の粘度に関連する保存安定性の観点から、有機溶剤がグリコールモノアルキルエーテル類を含有する場合、グリコールモノアルキルエーテル類の含有割合は、有機溶剤の総質量に対し、5~30質量%が好ましく、5~20質量%がより好ましい。
Glycol alkyl ether acetates may be used in combination with other organic solvents.
As other organic solvents, glycol monoalkyl ethers are preferred. Propylene glycol monomethyl ether is preferred from the viewpoint of solubility of the constituent components in the photosensitive resin composition.
Since glycol monoalkyl ethers have high polarity, (A) the organic solvent contains glycol monoalkyl ethers from the viewpoint of storage stability related to pigment aggregation and viscosity of the photosensitive resin composition obtained later. In this case, the content of the glycol monoalkyl ethers is preferably 5 to 30% by mass, more preferably 5 to 20% by mass, based on the total mass of the organic solvent.
 グリコールアルキルエーテルアセテート類と、200℃以上の沸点を持つ有機溶剤(以下「高沸点溶剤」と称す場合がある。)を併用してもよい。高沸点溶剤を併用することにより、顔料分散液を含む感光性樹脂組成物は乾きにくくなり、組成物中における(A)顔料の均一な分散状態が、急激な乾燥により破壊されることを防止する効果がある。すなわち、例えばスリットノズル先端における、顔料等の析出や固化による異物欠陥の発生を防止する効果がある。高沸点溶剤の沸点の上限は特に限定されないが、例えば300℃以下である。
 上記のような効果が高い点から、高沸点溶剤としては、例えば、ジプロピレングリコールメチルエーテルアセテート、ジエチレングリコールモノ-n-ブチルエーテルアセテート、ジエチレングリコールモノエチルエーテルアセテート、1,4-ブタンジオールジアセテート、1,3-ブチレングリコールジアセテート、トリアセチン、1,6-ヘキサンジオールジアセテートが挙げられる。
 高沸点溶剤は、1種を単独で用いてもよく、2種以上を併用してもよい。
Glycol alkyl ether acetates and an organic solvent having a boiling point of 200°C or higher (hereinafter sometimes referred to as "high boiling point solvent") may be used in combination. By using a high boiling point solvent in combination, the photosensitive resin composition containing the pigment dispersion becomes difficult to dry, and the uniform dispersion state of the pigment (A) in the composition is prevented from being destroyed by rapid drying. effective. That is, there is an effect of preventing the occurrence of foreign matter defects due to precipitation or solidification of pigments, etc., at the tip of the slit nozzle, for example. The upper limit of the boiling point of the high boiling point solvent is not particularly limited, but is, for example, 300° C. or lower.
In view of the above-mentioned high effects, examples of high boiling point solvents include dipropylene glycol methyl ether acetate, diethylene glycol mono-n-butyl ether acetate, diethylene glycol monoethyl ether acetate, 1,4-butanediol diacetate, 1, Examples include 3-butylene glycol diacetate, triacetin, and 1,6-hexanediol diacetate.
One type of high boiling point solvent may be used alone, or two or more types may be used in combination.
 高沸点溶剤の含有割合は、有機溶剤の総質量に対し、0~50質量%が好ましく、0.5~40質量%がより好ましく、1~30質量%がさらに好ましい。高沸点溶剤の含有割合が前記上限値以下であれば、組成物の乾燥温度が遅くなり、カラーフィルター製造工程における、減圧乾燥プロセスのタクト不良や、プリベークのピン跡といった問題の発生を抑制できる傾向がある。高沸点溶剤の含有割合が0.5質量%以上であれば、例えばスリットノズル先端で顔料等が析出や固化することにより異物欠陥を惹き起こすことを抑制できる傾向がある。 The content ratio of the high boiling point solvent is preferably 0 to 50% by mass, more preferably 0.5 to 40% by mass, and even more preferably 1 to 30% by mass, based on the total mass of the organic solvent. If the content ratio of the high boiling point solvent is below the above upper limit, the drying temperature of the composition will be slow, which tends to suppress the occurrence of problems such as poor tact in the vacuum drying process and pin marks in pre-baking in the color filter manufacturing process. There is. If the content of the high boiling point solvent is 0.5% by mass or more, it tends to be possible to suppress the occurrence of foreign matter defects due to precipitation or solidification of pigments, etc., at the tip of the slit nozzle, for example.
 本発明の顔料分散液において、有機溶剤の含有割合は、顔料分散液中の全固形分の含有割合及び含有水分率を考慮して適宜選定できる。
 顔料分散液中の全固形分の含有割合は、遮光性の観点から、顔料分散液の総質量に対し、10質量%以上が好ましく、20質量%以上がより好ましく、30質量%以上がさらに好ましく、また、粘度安定性及び経時粘度安定性の観点から、60質量%以下が好ましく、50質量%以下がより好ましく、40質量%以下がさらに好ましい。
 上記の上限及び下限は任意に組み合わせることができる。例えば、10~60質量%であってよく、20~50質量%であってよく、30~40質量%であってよい。
In the pigment dispersion of the present invention, the content ratio of the organic solvent can be appropriately selected in consideration of the total solid content and water content in the pigment dispersion.
From the viewpoint of light-shielding properties, the total solid content in the pigment dispersion is preferably 10% by mass or more, more preferably 20% by mass or more, and even more preferably 30% by mass or more, based on the total mass of the pigment dispersion. Also, from the viewpoint of viscosity stability and viscosity stability over time, the content is preferably 60% by mass or less, more preferably 50% by mass or less, and even more preferably 40% by mass or less.
The above upper and lower limits can be arbitrarily combined. For example, it may be 10 to 60% by weight, 20 to 50% by weight, or 30 to 40% by weight.
 本発明の顔料分散液は、粘度安定性及び経時粘度安定性の観点から、有機溶剤としてグリコールアルキルエーテルアセテート類を含有し、顔料分散液中の全固形分の含有割合が40質量%以下であることがより好ましい。 From the viewpoint of viscosity stability and viscosity stability over time, the pigment dispersion of the present invention contains glycol alkyl ether acetates as an organic solvent, and the total solid content in the pigment dispersion is 40% by mass or less. It is more preferable.
 本発明の顔料分散液が有機溶剤としてグリコールアルキルエーテルアセテート類を含有する場合、全有機溶剤におけるグリコールアルキルエーテルアセテート類の含有割合は、粘度安定性の観点から、60質量%以上が好ましく、70質量%以上がより好ましく、80質量%以上がさらに好ましい。また、塗膜乾燥時のムラ軽減の観点から、100質量%以下が好ましく、95質量%以下がより好ましく、90質量%以下がさらに好ましい。
 上記の上限及び下限は任意に組み合わせることができる。例えば、60~100質量%であってよく、70~100質量%であってよく、80~100質量%であってよい。
When the pigment dispersion of the present invention contains glycol alkyl ether acetates as an organic solvent, the content of glycol alkyl ether acetates in the total organic solvent is preferably 60% by mass or more, and 70% by mass from the viewpoint of viscosity stability. % or more, more preferably 80% by mass or more. Further, from the viewpoint of reducing unevenness during drying of the coating film, the content is preferably 100% by mass or less, more preferably 95% by mass or less, and even more preferably 90% by mass or less.
The above upper and lower limits can be arbitrarily combined. For example, it may be 60 to 100% by weight, 70 to 100% by weight, or 80 to 100% by weight.
<(C)分散助剤>
 本発明の顔料分散液は、(A)顔料の分散安定性の向上のため、(C)分散助剤を含有することが好ましい。
 (C)分散助剤としては、例えば、顔料誘導体が挙げられる。顔料誘導体としては例えば、アゾ系、フタロシアニン系、キナクリドン系、ベンズイミダゾロン系、キノフタロン系、イソインドリノン系、ジオキサジン系、アントラキノン系、インダンスレン系、ペリレン系、ペリノン系、ジケトピロロピロール系、ジオキサジン系の誘導体が挙げられ、フタロシアニン系、キノフタロン系が好ましい。
<(C) Dispersion aid>
The pigment dispersion of the present invention preferably contains (C) a dispersion aid in order to improve the dispersion stability of (A) the pigment.
(C) Examples of the dispersion aid include pigment derivatives. Examples of pigment derivatives include azo, phthalocyanine, quinacridone, benzimidazolone, quinophthalone, isoindolinone, dioxazine, anthraquinone, indanthrene, perylene, perinone, and diketopyrrolopyrrole. , dioxazine derivatives, and phthalocyanine derivatives and quinophthalone derivatives are preferred.
 顔料誘導体の置換基としては、例えば、スルホン酸基、スルホンアミド基及びその4級塩、フタルイミドメチル基、ジアルキルアミノアルキル基、水酸基、カルボキシ基、アミド基が顔料骨格に直接、又は、例えば、アルキル基、アリール基、複素環基を介して結合した基が挙げられ、好ましくはスルホン酸基である。置換基は一つの顔料骨格に複数置換していてもよい。
 顔料誘導体としては、例えば、フタロシアニンのスルホン酸誘導体、キノフタロンのスルホン酸誘導体、アントラキノンのスルホン酸誘導体、キナクリドンのスルホン酸誘導体、ジケトピロロピロールのスルホン酸誘導体、ジオキサジンのスルホン酸誘導体が挙げられる。
 分散助剤は1種を単独で用いてもよく、2種以上を併用してもよい。
Examples of substituents on pigment derivatives include sulfonic acid groups, sulfonamide groups and quaternary salts thereof, phthalimidomethyl groups, dialkylaminoalkyl groups, hydroxyl groups, carboxy groups, and amide groups directly on the pigment skeleton, or, for example, alkyl Examples include groups bonded via a group, an aryl group, and a heterocyclic group, and preferably a sulfonic acid group. A plurality of substituents may be substituted on one pigment skeleton.
Examples of pigment derivatives include sulfonic acid derivatives of phthalocyanine, sulfonic acid derivatives of quinophthalone, sulfonic acid derivatives of anthraquinone, sulfonic acid derivatives of quinacridone, sulfonic acid derivatives of diketopyrrolopyrrole, and sulfonic acid derivatives of dioxazine.
One type of dispersion aid may be used alone, or two or more types may be used in combination.
 本発明の顔料分散液が(C)分散助剤を含有する場合、(A)顔料と(C)分散助剤との、質量基準における含有比率((A)顔料/(C)分散助剤)は、10以上が好ましく、30以上がより好ましく、50以上がさらに好ましく、また、200以下が好ましく、150以下がより好ましく、100以下がさらに好ましい。(A)顔料/(C)分散助剤が前記下限値以上であれば、現像性が安定し、基板密着性がより優れる傾向があり、前記上限値以下であれば、分散安定性がより優れる傾向がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、10~200であってよく、30~150であってよく、50~100であってよい。
When the pigment dispersion of the present invention contains (C) a dispersion aid, the content ratio of the (A) pigment and (C) dispersion aid on a mass basis ((A) pigment/(C) dispersion aid) is preferably 10 or more, more preferably 30 or more, even more preferably 50 or more, and is preferably 200 or less, more preferably 150 or less, and even more preferably 100 or less. If (A) pigment/(C) dispersion aid is equal to or higher than the above lower limit value, developability tends to be stable and substrate adhesion is more excellent, and if it is equal to or less than the above upper limit value, dispersion stability is better. Tend.
The above upper and lower limits can be arbitrarily combined. For example, it may be 10-200, 30-150, or 50-100.
 本発明の顔料分散液が(C)分散助剤を含有する場合、顔料分散液の全固形分に対する(C)分散助剤の含有割合は、0.1質量%以上が好ましく、0.5質量%以上がより好ましく、1質量%以上がさらに好ましく、また、10質量%以下が好ましく、5質量%以下がより好ましく、3質量%以下がさらに好ましい。(C)分散助剤の含有割合が前記下限値以上であれば、分散安定性がより優れる傾向があり、前記上限値以下であれば、現像性が安定し、基板密着性がより優れる傾向がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、0.1~10質量%であってよく、0.5~5質量%であってよく、1~3質量%であってよい。
When the pigment dispersion of the present invention contains the dispersion aid (C), the content of the dispersion aid (C) based on the total solid content of the pigment dispersion is preferably 0.1% by mass or more, and 0.5% by mass. % or more, more preferably 1% by mass or more, further preferably 10% by mass or less, more preferably 5% by mass or less, even more preferably 3% by mass or less. (C) If the content ratio of the dispersion aid is at least the above lower limit, the dispersion stability tends to be better, and when it is below the above upper limit, the developability is stable and the adhesion to the substrate tends to be better. be.
The above upper and lower limits can be arbitrarily combined. For example, it may be 0.1 to 10% by weight, 0.5 to 5% by weight, or 1 to 3% by weight.
 本発明の顔料分散液は、必要に応じて、(A)顔料、(B)分散剤、(C)分散助剤、有機溶剤及び水以外の他の成分をさらに含有していてもよい。他の成分としては、例えば、後述する感光性樹脂組成物における他の配合成分が挙げられる。
 顔料分散液の全固形分に対する他の成分の含有割合は、5質量%以下が好ましく、1質量%以下がより好ましく、0質量%であってもよい。
The pigment dispersion of the present invention may further contain components other than (A) pigment, (B) dispersant, (C) dispersion aid, organic solvent, and water, if necessary. Examples of other components include other components in the photosensitive resin composition described below.
The content ratio of other components to the total solid content of the pigment dispersion is preferably 5% by mass or less, more preferably 1% by mass or less, and may be 0% by mass.
 本発明の顔料分散液は、ゼータ電位の絶対値が50mV以下であることが好ましく、48mV以下がより好ましく、45mV以下がさらに好ましく、40mV以下が特に好ましい。下限値は特に限定されないが、通常は0mV以上である。ゼータ電位の絶対値が前記上限値以下であれば、顔料分散液の安定性が高く、顔料の凝集が少ないことから、異物の発生が抑制され、パターンの直線性が向上する傾向がある。
 顔料分散液のゼータ電位の絶対値は、例えば、大塚電子社製レーザーゼータ電位計ELSZ-2000ZSで、低誘電率溶剤用セルユニットを用いて測定することができる。
The pigment dispersion of the present invention preferably has an absolute value of zeta potential of 50 mV or less, more preferably 48 mV or less, even more preferably 45 mV or less, particularly preferably 40 mV or less. The lower limit is not particularly limited, but is usually 0 mV or more. If the absolute value of the zeta potential is below the upper limit value, the stability of the pigment dispersion is high and there is little pigment aggregation, so the generation of foreign matter is suppressed and the linearity of the pattern tends to improve.
The absolute value of the zeta potential of the pigment dispersion can be measured, for example, with a laser zeta potential meter ELSZ-2000ZS manufactured by Otsuka Electronics Co., Ltd. using a cell unit for low dielectric constant solvents.
<顔料分散液の製造方法>
 本発明の顔料分散液は、例えば、(A)顔料、(B)分散剤、有機溶剤及び水、必要に応じて(C)分散助剤等の任意成分を混合し、得られた混合液に分散処理を施す方法により製造される。
 混合する水の量は、最終的な含有水分率が前記範囲内となるように設定される。
<Method for producing pigment dispersion>
The pigment dispersion of the present invention can be prepared, for example, by mixing optional components such as (A) pigment, (B) dispersant, organic solvent and water, and optionally (C) dispersion aid. Manufactured by a method of dispersion treatment.
The amount of water to be mixed is set so that the final moisture content is within the above range.
 分散処理により(A)顔料が微粒子化されるため、顔料分散液及びこれを含有する感光性樹脂組成物の塗布特性が向上する。(A)顔料が黒色顔料を含有する場合は、分散処理により遮光能力も向上する。特に(B)分散剤として高分子分散剤を用いると、得られる顔料分散液及びこれを含有する感光性樹脂組成物の経時の増粘が抑制される(分散安定性に優れる)。 Because the pigment (A) is made into fine particles by the dispersion treatment, the coating properties of the pigment dispersion and the photosensitive resin composition containing the same are improved. (A) When the pigment contains a black pigment, the light blocking ability is also improved by the dispersion treatment. In particular, when a polymeric dispersant is used as the dispersant (B), the resulting pigment dispersion and the photosensitive resin composition containing the same are inhibited from increasing in viscosity over time (excellent dispersion stability).
 分散処理は、ペイントコンディショナー、サンドグラインダー、ボールミル、ロールミル、ストーンミル、ジェットミル、ホモジナイザー等の公知の分散処理装置を用いて実施できる。サンドグラインダーで分散処理を行う場合には、0.1~8mm程度の径のガラスビーズ又はジルコニアビーズが好ましく用いられる。
 分散処理条件は特に限定されないが、温度は例えば0℃から100℃の範囲であり、好ましくは室温から80℃の範囲である。分散時間は、液の組成及び分散処理装置のサイズ等により適正時間が異なるため適宜調節する。感光性樹脂組成物の塗膜の20度鏡面光沢度(JIS Z8741)が100~200の範囲となるように(A)顔料の分散状態を制御するのが分散の目安である。感光性樹脂組成物の塗膜の光沢度が低い場合には、分散処理が十分でなく荒い顔料粒子が残っていることが多く、現像性、密着性、解像性等が不十分となる可能性がある。また、光沢値が上記範囲を超えるまで分散処理を行うと、顔料が破砕して超微粒子が多数生じるため、却って分散安定性が損なわれる傾向がある。
 分散処理後、必要に応じて、例えば分散処理に用いられたビーズと顔料分散液の分離のために、フィルター等により、得られた分散処理物の濾過処理を行うことができる。
The dispersion treatment can be carried out using a known dispersion treatment device such as a paint conditioner, sand grinder, ball mill, roll mill, stone mill, jet mill, or homogenizer. When performing the dispersion treatment with a sand grinder, glass beads or zirconia beads having a diameter of about 0.1 to 8 mm are preferably used.
Dispersion treatment conditions are not particularly limited, but the temperature is, for example, in the range of 0°C to 100°C, preferably in the range of room temperature to 80°C. The appropriate dispersion time varies depending on the composition of the liquid, the size of the dispersion processing apparatus, etc., and is therefore adjusted as appropriate. A guideline for dispersion is to control the dispersion state of the pigment (A) so that the 20 degree specular gloss (JIS Z8741) of the coating film of the photosensitive resin composition is in the range of 100 to 200. When the gloss of the photosensitive resin composition coating is low, the dispersion treatment is often insufficient and rough pigment particles remain, which may result in insufficient developability, adhesion, resolution, etc. There is sex. Furthermore, if the dispersion treatment is performed until the gloss value exceeds the above range, the pigment will be crushed and a large number of ultrafine particles will be produced, which tends to impair the dispersion stability.
After the dispersion treatment, the obtained dispersion treated product can be filtered using a filter or the like, if necessary, for example, in order to separate the beads used in the dispersion treatment and the pigment dispersion liquid.
[感光性樹脂組成物]
 本発明の感光性樹脂組成物は、本発明の顔料分散液、(D)アルカリ可溶性樹脂、(E)光重合性化合物及び(F)光重合開始剤を含有する。
[Photosensitive resin composition]
The photosensitive resin composition of the present invention contains the pigment dispersion of the present invention, (D) an alkali-soluble resin, (E) a photopolymerizable compound, and (F) a photopolymerization initiator.
 本発明の顔料分散液の含有割合は、本発明の感光性樹脂組成物の全固形分に対する(A)顔料の含有割合に換算して、30質量%以上が好ましく、40質量%以上がより好ましく、50質量%以上がさらに好ましく、また、75質量%以下が好ましく、70質量%以下がより好ましく、65質量%以下がさらに好ましい。(A)顔料の含有割合が前記下限値以上であれば、得られる硬化物の遮光性がより優れる傾向があり、前記上限値以下であれば、硬化物の形成性がより優れる傾向がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、30~75質量%であってよく、40~70質量%であってよく、50~65質量%であってよい。
The content ratio of the pigment dispersion liquid of the present invention is preferably 30% by mass or more, more preferably 40% by mass or more, in terms of the content ratio of the pigment (A) based on the total solid content of the photosensitive resin composition of the present invention. , more preferably 50% by mass or more, preferably 75% by mass or less, more preferably 70% by mass or less, even more preferably 65% by mass or less. If the content ratio of the pigment (A) is at least the above-mentioned lower limit, the resulting cured product tends to have better light blocking properties, and when it is below the above-mentioned upper limit, the cured product tends to have better formability.
The above upper and lower limits can be arbitrarily combined. For example, it may be 30-75% by weight, it may be 40-70% by weight, it may be 50-65% by weight.
 本発明の感光性樹脂組成物の全固形分に対する本発明の顔料分散液の固形分の含有割合は、40質量%以上が好ましく、50質量%以上がより好ましく、60質量%以上がさらに好ましく、また、90質量%以下が好ましく、80質量%以下がより好ましく、70質量%以下がさらに好ましい。顔料分散液の固形分の含有割合が前記下限値以上であれば、遮光性がより優れる傾向があり、前記上限値以下であれば、現像溶解性がより優れる傾向がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、40~90質量%であってよく、50~80質量%であってよく、60~70質量%であってよい。
The solid content of the pigment dispersion of the present invention relative to the total solid content of the photosensitive resin composition of the present invention is preferably 40% by mass or more, more preferably 50% by mass or more, even more preferably 60% by mass or more, Further, it is preferably 90% by mass or less, more preferably 80% by mass or less, and even more preferably 70% by mass or less. If the solid content of the pigment dispersion is equal to or higher than the lower limit, the light-shielding property tends to be better, and if it is lower than the upper limit, the developing solubility tends to be better.
The above upper and lower limits can be arbitrarily combined. For example, it may be 40 to 90% by weight, 50 to 80% by weight, or 60 to 70% by weight.
<(D)アルカリ可溶性樹脂>
 (D)アルカリ可溶性樹脂としては、アルカリ可溶性を示す樹脂であれば特に限定はなく、例えば、カルボキシ基又は水酸基を含む樹脂が挙げられる。より具体的には、例えば、エポキシ(メタ)アクリレート系樹脂、アクリル系樹脂、カルボキシ基含有エポキシ樹脂、カルボキシ基含有ウレタン樹脂、ノボラック系樹脂、ポリビニルフェノール系樹脂が挙げられる。特に、
(D1)エポキシ(メタ)アクリレート系樹脂
(D2)アクリル共重合樹脂
が優れた製版性の観点から好適に用いられる。
 アルカリ可溶性樹脂は1種を単独で、あるいは2種以上を併用することができる。
<(D) Alkali-soluble resin>
(D) The alkali-soluble resin is not particularly limited as long as it exhibits alkali solubility, and includes, for example, resins containing carboxyl groups or hydroxyl groups. More specifically, examples thereof include epoxy (meth)acrylate resins, acrylic resins, carboxyl group-containing epoxy resins, carboxyl group-containing urethane resins, novolac resins, and polyvinylphenol resins. especially,
(D1) Epoxy (meth)acrylate resin (D2) Acrylic copolymer resin is preferably used from the viewpoint of excellent plate-making properties.
One type of alkali-soluble resin can be used alone, or two or more types can be used in combination.
 <(D1)エポキシ(メタ)アクリレート系樹脂>
 (D1)エポキシ(メタ)アクリレート系樹脂は、エポキシ化合物(エポキシ樹脂)とα,β-不飽和モノカルボン酸及び/又はエステル部分にカルボキシ基を有するα,β-不飽和モノカルボン酸エステルとの反応により生成した水酸基を、さらに多塩基酸及び/又はその無水物等の水酸基と反応し得る置換基を2個以上有する化合物と反応させて得られる樹脂である。
 上記、多塩基酸及び/又はその無水物を水酸基と反応させる前に、水酸基と反応し得る置換基を2個以上有する化合物を反応させた後、多塩基酸及び/又はその無水物を反応させて得られる樹脂も、(D1)エポキシ(メタ)アクリレート系樹脂に含まれる。
 上記反応で得られた樹脂のカルボキシ基に、さらに反応し得る官能基を有する化合物を反応させて得られる樹脂も、(D1)エポキシ(メタ)アクリレート系樹脂に含まれる。
 エポキシ(メタ)アクリレート系樹脂は化学構造上、実質的にエポキシ基を有さず、かつ「(メタ)アクリレート」に限定されるものではないが、エポキシ化合物(エポキシ樹脂)が原料であり、かつ、「(メタ)アクリレート」が代表例であるので慣用に従いこのように命名されている。
<(D1) Epoxy (meth)acrylate resin>
(D1) Epoxy (meth)acrylate resin is a combination of an epoxy compound (epoxy resin) and an α,β-unsaturated monocarboxylic acid and/or an α,β-unsaturated monocarboxylic acid ester having a carboxyl group in the ester moiety. It is a resin obtained by reacting the hydroxyl group generated by the reaction with a compound having two or more substituents capable of reacting with the hydroxyl group, such as a polybasic acid and/or its anhydride.
Before reacting the polybasic acid and/or its anhydride with a hydroxyl group, a compound having two or more substituents that can react with a hydroxyl group is reacted, and then the polybasic acid and/or its anhydride is reacted. The resin obtained by is also included in (D1) epoxy (meth)acrylate resin.
A resin obtained by reacting a compound having a functional group that can further react with the carboxy group of the resin obtained by the above reaction is also included in the epoxy (meth)acrylate resin (D1).
Epoxy (meth)acrylate resin has a chemical structure that substantially does not have an epoxy group, and is not limited to "(meth)acrylate," but it uses an epoxy compound (epoxy resin) as a raw material, and , "(meth)acrylate" is a typical example, so it is named this way according to common usage.
 (D1)エポキシ(メタ)アクリレート系樹脂としては、エポキシ(メタ)アクリレート系樹脂(D1-1)及び/又はエポキシ(メタ)アクリレート系樹脂(D1-2)(以下「カルボキシ基含有エポキシ(メタ)アクリレート系樹脂」と称す場合がある。)が現像性、信頼性の観点から好適に用いられる。
 (D1)エポキシ(メタ)アクリレート系樹脂としては、アウトガスの観点から、主鎖に芳香族環を有するものをより好適に用いることができる。
(D1) As the epoxy (meth)acrylate resin, epoxy (meth)acrylate resin (D1-1) and/or epoxy (meth)acrylate resin (D1-2) (hereinafter referred to as "carboxy group-containing epoxy (meth) (sometimes referred to as "acrylate resin") is preferably used from the viewpoint of developability and reliability.
(D1) As the epoxy (meth)acrylate resin, one having an aromatic ring in the main chain can be more preferably used from the viewpoint of outgassing.
 <エポキシ(メタ)アクリレート系樹脂(D1-1)>
 エポキシ樹脂にα,β-不飽和モノカルボン酸又はカルボキシ基を有するα,β-不飽和モノカルボン酸エステルを付加させ、さらに、多塩基酸及び/又はその無水物を反応させることによって得られたアルカリ可溶性樹脂。
 <エポキシ(メタ)アクリレート系樹脂(D1-2)>
 エポキシ樹脂にα,β-不飽和モノカルボン酸又はカルボキシ基を有するα,β-不飽和モノカルボン酸エステルを付加させ、さらに、多価アルコール、及び多塩基酸及び/又はその無水物と反応させることによって得られたアルカリ可溶性樹脂。
<Epoxy (meth)acrylate resin (D1-1)>
Obtained by adding an α,β-unsaturated monocarboxylic acid or an α,β-unsaturated monocarboxylic acid ester having a carboxyl group to an epoxy resin, and further reacting with a polybasic acid and/or its anhydride. Alkali soluble resin.
<Epoxy (meth)acrylate resin (D1-2)>
Adding α,β-unsaturated monocarboxylic acid or α,β-unsaturated monocarboxylic acid ester having a carboxyl group to an epoxy resin, and further reacting with polyhydric alcohol, polybasic acid and/or its anhydride Alkali-soluble resin obtained by.
 ここで、エポキシ樹脂とは、熱硬化により樹脂を形成する以前の原料化合物をも含めて言うこととし、そのエポキシ樹脂としては、公知のエポキシ樹脂の中から適宜選択して用いることができる。また、エポキシ樹脂は、フェノール性化合物とエピハロヒドリンとを反応させて得られる化合物を用いることができる。フェノール性化合物としては、2価もしくは2価以上のフェノール性水酸基を有する化合物が好ましく、単量体でも重合体でもよい。
 原料となるエポキシ樹脂の種類としては、例えば、クレゾールノボラック型エポキシ樹脂、フェノールノボラック型エポキシ樹脂、ビスフェノールA型エポキシ樹脂、ビスフェノールF型エポキシ樹脂、トリスフェノールメタン型エポキシ樹脂、ビフェニルノボラック型エポキシ樹脂、ナフタレンノボラック型エポキシ樹脂、ジシクロペンタジエンとフェノール又はクレゾールとの重付加反応物とエピハロヒドリンとの反応生成物であるエポキシ樹脂、アダマンチル基含有エポキシ樹脂、フルオレン型エポキシ樹脂を好適に用いることができ、主鎖に芳香族環を有するものをより好適に用いることができる。
Here, the epoxy resin includes a raw material compound before forming a resin by thermosetting, and the epoxy resin can be appropriately selected from known epoxy resins. Further, as the epoxy resin, a compound obtained by reacting a phenolic compound and epihalohydrin can be used. The phenolic compound is preferably a compound having a divalent or divalent or higher phenolic hydroxyl group, and may be a monomer or a polymer.
Examples of the types of epoxy resins used as raw materials include cresol novolak epoxy resin, phenol novolac epoxy resin, bisphenol A epoxy resin, bisphenol F epoxy resin, trisphenolmethane epoxy resin, biphenyl novolak epoxy resin, and naphthalene. Novolak-type epoxy resins, epoxy resins that are reaction products of polyaddition products of dicyclopentadiene and phenol or cresol, and epihalohydrin, adamantyl group-containing epoxy resins, and fluorene-type epoxy resins can be suitably used. Those having an aromatic ring can be more preferably used.
 エポキシ樹脂としては、例えば、ビスフェノールA型エポキシ樹脂(例えば、三菱ケミカル社製の「jER(登録商標、以下同じ。)828」、「jER1001」、「jER1002」、「jER1004」等)、ビスフェノールA型エポキシ樹脂のアルコール性水酸基とエピクロルヒドリンの反応により得られるエポキシ樹脂(例えば、日本化薬社製の「NER-1302」(エポキシ当量323,軟化点76℃))、ビスフェノールF型樹脂(例えば、三菱ケミカル社製の「jER807」、「EP-4001」、「EP-4002」、「EP-4004」等)、ビスフェノールF型エポキシ樹脂のアルコール性水酸基とエピクロルヒドリンの反応により得られるエポキシ樹脂(例えば、日本化薬社製の「NER-7406」(エポキシ当量350,軟化点66℃))、ビスフェノールS型エポキシ樹脂、ビフェニルグリシジルエーテル(例えば、三菱ケミカル社製の「YX-4000」)、フェノールノボラック型エポキシ樹脂(例えば、日本化薬社製の「EPPN-201」、三菱ケミカル社製の「EP-152」、「EP-154」、ダウケミカル社製の「DEN-438」)、(o,m,p-)クレゾールノボラック型エポキシ樹脂(例えば、日本化薬社製の「EOCN(登録商標、以下同じ。)-102S」、「EOCN-1020」、「EOCN-104S」)、トリグリシジルイソシアヌレート(例えば、日産化学社製の「TEPIC(登録商標)」)、トリスフェノールメタン型エポキシ樹脂(例えば、日本化薬社製の「EPPN(登録商標、以下同じ。)-501」、「EPPN-502」、「EPPN-503」)、脂環式エポキシ樹脂(ダイセル社製の「セロキサイド(登録商標、以下同じ。)2021P」、「セロキサイドEHPE」)、ジシクロペンタジエンとフェノールの反応によるフェノール樹脂をグリシジル化したエポキシ樹脂(例えば、DIC社製の「EXA-7200」、日本化薬社製の「NC-7300」)、下記一般式(B1)~(B4)で表されるエポキシ樹脂、を好適に用いることができる。具体的には、例えば、下記一般式(B1)で表されるエポキシ樹脂として日本化薬社製の「XD-1000」、下記一般式(B2)で表されるエポキシ樹脂として日本化薬社製の「NC-3000」、下記一般式(B3)で表されるエポキシ樹脂として大阪有機化学工業社製の「E-201」、下記一般式(B4)で表されるエポキシ樹脂として新日鉄住金化学社製の「ESF-300」が挙げられる。 Examples of epoxy resins include bisphenol A type epoxy resins (for example, "jER (registered trademark, the same applies hereinafter) 828", "jER1001", "jER1002", "jER1004", etc. manufactured by Mitsubishi Chemical Corporation), bisphenol A type epoxy resins, etc. Epoxy resins obtained by the reaction of alcoholic hydroxyl groups of epoxy resins with epichlorohydrin (for example, "NER-1302" manufactured by Nippon Kayaku Co., Ltd. (epoxy equivalent: 323, softening point 76°C)), bisphenol F type resins (for example, manufactured by Mitsubishi Chemical Co., Ltd.) "JER807", "EP-4001", "EP-4002", "EP-4004", etc. manufactured by Nippon Chemical Co., Ltd.), epoxy resins obtained by the reaction of the alcoholic hydroxyl group of bisphenol F type epoxy resin with epichlorohydrin (for example, Nippon Chemical Co., Ltd.) "NER-7406" manufactured by Yakusha (epoxy equivalent: 350, softening point 66°C)), bisphenol S type epoxy resin, biphenyl glycidyl ether (for example, "YX-4000" manufactured by Mitsubishi Chemical Corporation), phenol novolac type epoxy resin (For example, "EPPN-201" manufactured by Nippon Kayaku Co., Ltd., "EP-152", "EP-154" manufactured by Mitsubishi Chemical Company, "DEN-438" manufactured by Dow Chemical Company), (o, m, p -) Cresol novolak type epoxy resin (for example, "EOCN (registered trademark, hereinafter the same)-102S", "EOCN-1020", "EOCN-104S" manufactured by Nippon Kayaku Co., Ltd.), triglycidyl isocyanurate (for example, "TEPIC (registered trademark)" manufactured by Nissan Chemical Co., Ltd.), trisphenolmethane type epoxy resin (for example, "EPPN (registered trademark, hereinafter the same applies)-501", "EPPN-502", manufactured by Nippon Kayaku Co., Ltd.), EPPN-503''), alicyclic epoxy resin (Daicel's ``Celoxide (registered trademark, hereinafter the same applies) 2021P'', ``Celoxide EHPE''), epoxy made by glycidylating phenolic resin by reaction of dicyclopentadiene and phenol. Resins (for example, "EXA-7200" manufactured by DIC, "NC-7300" manufactured by Nippon Kayaku Co., Ltd.), epoxy resins represented by the following general formulas (B1) to (B4) can be suitably used. can. Specifically, for example, "XD-1000" manufactured by Nippon Kayaku Co., Ltd. is used as an epoxy resin represented by the following general formula (B1), and "XD-1000" manufactured by Nippon Kayaku Co., Ltd. is used as an epoxy resin represented by the following general formula (B2). "NC-3000" by Osaka Organic Chemical Industry Co., Ltd. as an epoxy resin represented by the following general formula (B3), "E-201" manufactured by Osaka Organic Chemical Industry Co., Ltd. as an epoxy resin represented by the following general formula (B4), and manufactured by Nippon Steel & Sumikin Chemical Co., Ltd. as an epoxy resin represented by the following general formula (B4) An example of this is the "ESF-300" manufactured by Manufacturer.
Figure JPOXMLDOC01-appb-C000001
Figure JPOXMLDOC01-appb-C000001
 式(B1)において、aは平均値であり、0~10の数を表し、R111は各々独立に水素原子、ハロゲン原子、炭素数1~8のアルキル基、炭素数3~10のシクロアルキル基、フェニル基、ナフチル基、又はビフェニル基を表す。なお、1分子中に存在する複数のR111は、それぞれ同じであっても異なっていてもよい。 In formula (B1), a is an average value and represents a number from 0 to 10, and R 111 each independently represents a hydrogen atom, a halogen atom, an alkyl group having 1 to 8 carbon atoms, or a cycloalkyl group having 3 to 10 carbon atoms. group, phenyl group, naphthyl group, or biphenyl group. Note that the plurality of R 111s present in one molecule may be the same or different.
Figure JPOXMLDOC01-appb-C000002
Figure JPOXMLDOC01-appb-C000002
 式(B2)において、b1及びb2は各々独立に平均値であり、0~10の数を表し、R121は各々独立に水素原子、ハロゲン原子、炭素数1~8のアルキル基、炭素数3~10のシクロアルキル基、フェニル基、ナフチル基、又はビフェニル基を表す。なお、1分子中に存在する複数のR121は、それぞれ同じであっても異なっていてもよい。 In formula (B2), b1 and b2 are each independently an average value and represent a number from 0 to 10, and R 121 is each independently a hydrogen atom, a halogen atom, an alkyl group having 1 to 8 carbon atoms, or 3 carbon atoms. ~10 cycloalkyl, phenyl, naphthyl, or biphenyl groups. Note that the plurality of R 121s present in one molecule may be the same or different.
Figure JPOXMLDOC01-appb-C000003
Figure JPOXMLDOC01-appb-C000003
 式(B3)において、Xは下記一般式(B3-1)又は(B3-2)で表される連結基を表す。但し、分子構造中に1つ以上のアダマンタン構造を含む。cは2又は3を表す。 In formula (B3), X represents a linking group represented by the following general formula (B3-1) or (B3-2). However, the molecular structure contains one or more adamantane structures. c represents 2 or 3.
Figure JPOXMLDOC01-appb-C000004
Figure JPOXMLDOC01-appb-C000004
 式(B3-1)及び(B3-2)において、R131~R134及びR135~R137は、各々独立に、置換基を有していてもよいアダマンチル基、水素原子、置換基を有していてもよい炭素数1~12のアルキル基、又は置換基を有していてもよいフェニル基を表し、*は結合手を表す。 In formulas (B3-1) and (B3-2), R 131 to R 134 and R 135 to R 137 each independently represent an adamantyl group that may have a substituent, a hydrogen atom, or an adamantyl group that has a substituent. represents an optionally substituted alkyl group having 1 to 12 carbon atoms, or a phenyl group optionally having a substituent, and * represents a bond.
Figure JPOXMLDOC01-appb-C000005
Figure JPOXMLDOC01-appb-C000005
 式(B4)において、p及びqは各々独立に0~4の整数を表し、R141及びR142は各々独立に炭素数1~4のアルキル基又はハロゲン原子を表し、R143及びR144は各々独立に炭素数1~4のアルキレン基を表し、x及びyは各々独立に0以上の整数を表す。 In formula (B4), p and q each independently represent an integer of 0 to 4, R 141 and R 142 each independently represent an alkyl group having 1 to 4 carbon atoms or a halogen atom, and R 143 and R 144 are Each independently represents an alkylene group having 1 to 4 carbon atoms, and x and y each independently represents an integer of 0 or more.
 エポキシ樹脂としては、式(B1)~(B4)のいずれかで表されるエポキシ樹脂を用いることが好ましい。 As the epoxy resin, it is preferable to use an epoxy resin represented by any of formulas (B1) to (B4).
 α,β-不飽和モノカルボン酸又はカルボキシ基を有するα,β-不飽和モノカルボン酸エステルとしては、例えば、(メタ)アクリル酸、クロトン酸、o-、m-又はp-ビニル安息香酸、(メタ)アクリル酸のα位ハロアルキル、アルコキシル、ハロゲン、ニトロ、シアノ置換体等のモノカルボン酸;2-(メタ)アクリロイロキシエチルコハク酸、2-(メタ)アクリロイロキシエチルアジピン酸、2-(メタ)アクリロイロキシエチルフタル酸、2-(メタ)アクリロイロキシエチルヘキサヒドロフタル酸、2-(メタ)アクリロイロキシエチルマレイン酸、2-(メタ)アクリロイロキシプロピルコハク酸、2-(メタ)アクリロイロキシプロピルアジピン酸、2-(メタ)アクリロイロキシプロピルテトラヒドロフタル酸、2-(メタ)アクリロイロキシプロピルフタル酸、2-(メタ)アクリロイロキシプロピルマレイン酸、2-(メタ)アクリロイロキシブチルコハク酸、2-(メタ)アクリロイロキシブチルアジピン酸、2-(メタ)アクリロイロキシブチルヒドロフタル酸、2-(メタ)アクリロイロキシブチルフタル酸、2-(メタ)アクリロイロキシブチルマレイン酸(メタ)、アクリル酸にε-カプロラクトン、β-プロピオラクトン、γ-ブチロラクトン、δ-バレロラクトン等のラクトン類を付加させたものである単量体;あるいはヒドロキシアルキル(メタ)アクリレート、ペンタエリスリトールトリ(メタ)アクリレートに(無水)コハク酸、(無水)フタル酸、(無水)マレイン酸等の酸(無水物)を付加させた単量体;(メタ)アクリル酸ダイマー;が挙げられる。
 これらの内、感度の点から、(メタ)アクリル酸が好ましい。
Examples of the α,β-unsaturated monocarboxylic acid or the α,β-unsaturated monocarboxylic acid ester having a carboxy group include (meth)acrylic acid, crotonic acid, o-, m- or p-vinylbenzoic acid, Monocarboxylic acids such as α-position haloalkyl, alkoxyl, halogen, nitro, and cyano substituted products of (meth)acrylic acid; 2-(meth)acryloyloxyethylsuccinic acid, 2-(meth)acryloyloxyethyladipic acid, 2 -(meth)acryloyloxyethyl phthalic acid, 2-(meth)acryloyloxyethyl hexahydrophthalic acid, 2-(meth)acryloyloxyethylmaleic acid, 2-(meth)acryloyloxypropyl succinic acid, 2 -(meth)acryloyloxypropyl adipic acid, 2-(meth)acryloyloxypropyltetrahydrophthalic acid, 2-(meth)acryloyloxypropyl phthalic acid, 2-(meth)acryloyloxypropylmaleic acid, 2- (meth)acryloyloxybutylsuccinic acid, 2-(meth)acryloyloxybutyladipate, 2-(meth)acryloyloxybutylhydrophthalic acid, 2-(meth)acryloyloxybutyl phthalic acid, 2-( meth) Acryloyloxybutyl maleic acid (meth), a monomer obtained by adding lactones such as ε-caprolactone, β-propiolactone, γ-butyrolactone, δ-valerolactone to acrylic acid; or hydroxy A monomer in which an acid (anhydride) such as succinic acid (anhydride), phthalic acid (anhydride), or maleic acid (anhydride) is added to alkyl (meth)acrylate, pentaerythritol tri(meth)acrylate; (meth)acrylic Examples include acid dimer.
Among these, (meth)acrylic acid is preferred from the viewpoint of sensitivity.
 エポキシ樹脂にα,β-不飽和モノカルボン酸又はカルボキシ基を有するα,β-不飽和モノカルボン酸エステルを付加させる方法としては、公知の手法を用いることができる。例えば、エステル化触媒の存在下、50~150℃の温度で、α,β-不飽和モノカルボン酸又はカルボキシ基を有するα,β-不飽和モノカルボン酸エステルとエポキシ樹脂とを反応させることができる。ここで用いるエステル化触媒としては、例えば、トリエチルアミン、トリメチルアミン、ベンジルジメチルアミン、ベンジルジエチルアミン等の3級アミン、テトラメチルアンモニウムクロリド、テトラエチルアンモニウムクロリド、ドデシルトリメチルアンモニウムクロリド等の4級アンモニウム塩を用いることができる。 As a method for adding an α,β-unsaturated monocarboxylic acid or an α,β-unsaturated monocarboxylic acid ester having a carboxyl group to an epoxy resin, a known method can be used. For example, it is possible to react an α,β-unsaturated monocarboxylic acid or an α,β-unsaturated monocarboxylic acid ester having a carboxyl group with an epoxy resin at a temperature of 50 to 150°C in the presence of an esterification catalyst. can. As the esterification catalyst used here, for example, tertiary amines such as triethylamine, trimethylamine, benzyldimethylamine, and benzyldiethylamine, and quaternary ammonium salts such as tetramethylammonium chloride, tetraethylammonium chloride, and dodecyltrimethylammonium chloride can be used. can.
 エポキシ樹脂、α,β-不飽和モノカルボン酸又はカルボキシ基を有するα,β-不飽和モノカルボン酸エステル、及びエステル化触媒の各成分は、各成分を1種ずつ選択して用いてもよく、2種以上を併用してもよい。
 α,β-不飽和モノカルボン酸又はカルボキシ基を有するα,β-不飽和モノカルボン酸エステルの使用量は、エポキシ樹脂のエポキシ基1当量に対し0.5~1.2当量が好ましく、さらに好ましくは0.7~1.1当量である。α,β-不飽和モノカルボン酸又はカルボキシ基を有するα,β-不飽和モノカルボン酸エステルの使用量を前記下限値以上とすることで不飽和基の導入量の不足が抑制でき、引き続く多塩基酸及び/又はその無水物との反応も十分なものとしやすい傾向がある。前記上限値以下とすることでα,β-不飽和モノカルボン酸又はカルボキシ基を有するα,β-不飽和モノカルボン酸エステルの未反応物の残存を抑制でき、硬化特性を良好なものとしやすい傾向が認められる。
Each component of the epoxy resin, α,β-unsaturated monocarboxylic acid or α,β-unsaturated monocarboxylic acid ester having a carboxyl group, and esterification catalyst may be selected one by one and used. , two or more types may be used in combination.
The amount of α,β-unsaturated monocarboxylic acid or α,β-unsaturated monocarboxylic acid ester having a carboxyl group is preferably 0.5 to 1.2 equivalents per equivalent of epoxy group in the epoxy resin, and Preferably it is 0.7 to 1.1 equivalent. By setting the amount of α,β-unsaturated monocarboxylic acid or α,β-unsaturated monocarboxylic acid ester having a carboxyl group to the above lower limit value or more, it is possible to suppress the shortage of the amount of unsaturated groups introduced, and the subsequent The reaction with basic acids and/or their anhydrides also tends to be sufficient. By setting it below the above upper limit, it is possible to suppress the residual of unreacted substances of α,β-unsaturated monocarboxylic acid or α,β-unsaturated monocarboxylic acid ester having a carboxy group, and it is easy to obtain good curing characteristics. A trend is observed.
 多塩基酸及び/又はその無水物としては、例えば、マレイン酸、コハク酸、イタコン酸、フタル酸、テトラヒドロフタル酸、ヘキサヒドロフタル酸、ピロメリット酸、トリメリット酸、ベンゾフェノンテトラカルボン酸、メチルヘキサヒドロフタル酸、エンドメチレンテトラヒドロフタル酸、クロレンド酸、メチルテトラヒドロフタル酸、ビフェニルテトラカルボン酸、及びこれらの無水物が挙げられる。
 好ましくは、マレイン酸、コハク酸、イタコン酸、フタル酸、テトラヒドロフタル酸、ヘキサヒドロフタル酸、ピロメリット酸、トリメリット酸、ビフェニルテトラカルボン酸、又はこれらの無水物である。特に好ましくは、テトラヒドロフタル酸、ビフェニルテトラカルボン酸、無水テトラヒドロフタル酸、又はビフェニルテトラカルボン酸二無水物である。
Examples of polybasic acids and/or anhydrides include maleic acid, succinic acid, itaconic acid, phthalic acid, tetrahydrophthalic acid, hexahydrophthalic acid, pyromellitic acid, trimellitic acid, benzophenonetetracarboxylic acid, and methylhexahydrophthalic acid. Examples include hydrophthalic acid, endomethylenetetrahydrophthalic acid, chlorendic acid, methyltetrahydrophthalic acid, biphenyltetracarboxylic acid, and anhydrides thereof.
Preferred are maleic acid, succinic acid, itaconic acid, phthalic acid, tetrahydrophthalic acid, hexahydrophthalic acid, pyromellitic acid, trimellitic acid, biphenyltetracarboxylic acid, or anhydrides thereof. Particularly preferred are tetrahydrophthalic acid, biphenyltetracarboxylic acid, tetrahydrophthalic anhydride, or biphenyltetracarboxylic dianhydride.
 多塩基酸及び/又はその無水物の付加反応は、公知の手法を用いて行うことができ、エポキシ樹脂へのα,β-不飽和モノカルボン酸又はカルボキシ基を有するα,β-不飽和モノカルボン酸エステルの付加反応と同様な条件下で、継続反応させて目的物を得ることができる。生成するカルボキシ基含有エポキシ(メタ)アクリレート系樹脂の酸価が、好ましくは10~150mgKOH/g、より好ましくは20~140mgKOH/gとなるように多塩基酸及び/又はその無水物成分の付加量を制御することが好ましい。前記下限値以上とすることでアルカリ現像性が良好となる傾向がある。前記上限値以下とすることで硬化性能が良好となる傾向がある。 The addition reaction of a polybasic acid and/or its anhydride can be carried out using a known method. The desired product can be obtained by continuing the reaction under the same conditions as the addition reaction of carboxylic acid esters. The amount of polybasic acid and/or its anhydride component added so that the acid value of the produced carboxyl group-containing epoxy (meth)acrylate resin is preferably 10 to 150 mgKOH/g, more preferably 20 to 140 mgKOH/g. It is preferable to control. When the amount is equal to or more than the lower limit, the alkali developability tends to be improved. There is a tendency for curing performance to be improved by setting the amount to be less than or equal to the upper limit value.
 多塩基酸及び/又はその無水物の付加反応時に、トリメチロールプロパン、ジトリメチロールプロパン、ペンタエリスリトール、ジペンタエリスリトール、トリメチロールエタン、1,2,3-プロパントリオール等の多官能アルコール(多価アルコール)を添加し、多分岐構造を導入したものとしてもよい。この場合、多塩基酸及び/又はその無水物と多官能アルコールの混合順序に、特に制限はない。加温により、エポキシ樹脂とα,β-不飽和モノカルボン酸又はカルボキシ基を有するα,β-不飽和モノカルボン酸エステルとの反応物と多官能アルコールとの混合物中に存在するいずれかの水酸基に対して多塩基酸及び/又はその無水物が付加反応する。 During the addition reaction of polybasic acids and/or their anhydrides, polyfunctional alcohols (polyhydric alcohols) such as trimethylolpropane, ditrimethylolpropane, pentaerythritol, dipentaerythritol, trimethylolethane, 1,2,3-propanetriol, etc. ) may be added to introduce a multi-branched structure. In this case, there is no particular restriction on the order of mixing the polybasic acid and/or its anhydride and the polyfunctional alcohol. By heating, any hydroxyl group present in the mixture of the epoxy resin and the reaction product of α,β-unsaturated monocarboxylic acid or α,β-unsaturated monocarboxylic acid ester having a carboxyl group and polyfunctional alcohol is removed. A polybasic acid and/or its anhydride undergoes an addition reaction.
 多価アルコールを用いることで、(D1)エポキシ(メタ)アクリレート樹脂の分子量を増大させ、分子中に分岐を導入することが出来、分子量と粘度のバランスをとることができる傾向がある。また、分子中への酸基の導入率を増やすことができ、感度や密着性等のバランスがとれやすい傾向がある。 By using a polyhydric alcohol, it is possible to increase the molecular weight of the epoxy (meth)acrylate resin (D1) and introduce branches into the molecule, which tends to balance the molecular weight and viscosity. Furthermore, the rate of introduction of acid groups into the molecule can be increased, and sensitivity, adhesion, etc. tend to be more balanced.
 カルボキシ基含有エポキシ(メタ)アクリレート系樹脂としては、前述のもの以外に、例えば、大韓民国公開特許第10-2013-0022955号公報に記載の樹脂が挙げられる。 Examples of the carboxyl group-containing epoxy (meth)acrylate resin include, in addition to those mentioned above, the resin described in Korean Patent Publication No. 10-2013-0022955.
 カルボキシ基含有エポキシ(メタ)アクリレート系樹脂の、ゲルパーミエーションクロマトグラフィー(GPC)で測定したポリスチレン換算の重量平均分子量(Mw)は好ましくは1000以上、より好ましくは1500以上、さらに好ましくは2000以上、よりさらに好ましくは3000以上、ことさらに好ましくは4000以上、特に好ましくは5000以上である。また、好ましくは30000以下、より好ましくは20000以下、さらに好ましくは15000以下である。前記下限値以上とすることで現像液に対する溶解性が高くなりすぎるのを抑制できる傾向がある。前記上限値以下とすることで現像液に対する溶解性が良好なものとしやすい傾向がある。上記の上限及び下限は任意に組み合わせることができる。例えば、1000~30000であってよく、1500~20000であってよく、1500~15000であってよく、2000~15000であってよい。 The weight average molecular weight (Mw) of the carboxyl group-containing epoxy (meth)acrylate resin in terms of polystyrene measured by gel permeation chromatography (GPC) is preferably 1000 or more, more preferably 1500 or more, even more preferably 2000 or more, It is even more preferably 3,000 or more, particularly preferably 4,000 or more, particularly preferably 5,000 or more. Further, it is preferably 30,000 or less, more preferably 20,000 or less, and still more preferably 15,000 or less. By setting the amount to be at least the lower limit, it tends to be possible to prevent the solubility in the developer from becoming too high. By setting it below the above-mentioned upper limit, there is a tendency that the solubility in the developer tends to be good. The above upper and lower limits can be arbitrarily combined. For example, it may be 1000 to 30000, 1500 to 20000, 1500 to 15000, or 2000 to 15000.
 カルボキシ基含有エポキシ(メタ)アクリレート系樹脂の酸価は特に限定されないが、20mgKOH/g以上が好ましく、40mgKOH/g以上がより好ましく、60mgKOH/g以上がさらに好ましく、80mgKOH/g以上がよりさらに好ましく、100mgKOH/g以上が特に好ましい。また、200mgKOH/g以下が好ましく、150mgKOH/g以下がより好ましく、130mgKOH/g以下がさらに好ましく、120mgKOH/g以下が特に好ましい。前記下限値以上とすることで現像溶解性が向上し、解像性が良好となる傾向がある。前記上限値以下とすることで感光性着色組成物の残膜率が良好となる傾向がある。上記の上限及び下限は任意に組み合わせることができる。例えば、20mgKOH/g~200mgKOH/gであってよく、60mgKOH/g~150mgKOH/gであってよく、80mgKOH/g~130mgKOH/gであってよく、100mgKOH/g~130mgKOH/gであってよい。 The acid value of the carboxyl group-containing epoxy (meth)acrylate resin is not particularly limited, but is preferably 20 mgKOH/g or more, more preferably 40 mgKOH/g or more, even more preferably 60 mgKOH/g or more, even more preferably 80 mgKOH/g or more. , 100 mgKOH/g or more is particularly preferred. Moreover, 200 mgKOH/g or less is preferable, 150 mgKOH/g or less is more preferable, 130 mgKOH/g or less is still more preferable, and 120 mgKOH/g or less is particularly preferable. When the amount is at least the lower limit, development solubility tends to improve and resolution tends to improve. By setting it below the above upper limit, the residual film rate of the photosensitive coloring composition tends to be good. The above upper and lower limits can be arbitrarily combined. For example, it may be 20 mgKOH/g to 200 mgKOH/g, it may be 60 mgKOH/g to 150 mgKOH/g, it may be 80 mgKOH/g to 130 mgKOH/g, it may be 100 mgKOH/g to 130 mgKOH/g.
 エポキシ(メタ)アクリレート系樹脂の化学構造は特に限定されないが、現像性、信頼性の観点から、下記一般式(d1-I)で表される部分構造を有するエポキシ(メタ)アクリレート系樹脂(以下、「(d1-I)エポキシ(メタ)アクリレート系樹脂」と略記する場合がある。)及び/又は下記一般式(d1-II)で表される部分構造を有するエポキシ(メタ)アクリレート系樹脂(以下、「(d1-II)エポキシ(メタ)アクリレート系樹脂」と略記する場合がある。)を含有することが好ましい。 The chemical structure of the epoxy (meth)acrylate resin is not particularly limited, but from the viewpoint of developability and reliability, the epoxy (meth)acrylate resin (hereinafter referred to as , may be abbreviated as "(d1-I) epoxy (meth)acrylate resin") and/or epoxy (meth)acrylate resin having a partial structure represented by the following general formula (d1-II) ( Hereinafter, it may be abbreviated as "(d1-II) epoxy (meth)acrylate resin").
Figure JPOXMLDOC01-appb-C000006
Figure JPOXMLDOC01-appb-C000006
 式(d1-I)中、R11は水素原子又はメチル基を表し、R12は置換基を有していてもよい2価の炭化水素基を表し、kは1又は2を表し、*は結合手を表す。
 式(d1-I)中のベンゼン環は、さらに任意の置換基により置換されていてもよい。
In formula (d1-I), R 11 represents a hydrogen atom or a methyl group, R 12 represents a divalent hydrocarbon group that may have a substituent, k represents 1 or 2, and * Represents a bond.
The benzene ring in formula (d1-I) may be further substituted with any substituent.
Figure JPOXMLDOC01-appb-C000007
Figure JPOXMLDOC01-appb-C000007
 式(d1-II)中、R13は各々独立に、水素原子又はメチル基を表し、R14は、環状炭化水素基を側鎖として有する2価の炭化水素基を表し、R15及びR16は各々独立に、置換基を有していてもよい2価の脂肪族基を表し、m及びnは各々独立に0~2の整数を表し、*は結合手を表す。 In formula (d1-II), R 13 each independently represents a hydrogen atom or a methyl group, R 14 represents a divalent hydrocarbon group having a cyclic hydrocarbon group as a side chain, R 15 and R 16 each independently represents a divalent aliphatic group which may have a substituent, m and n each independently represent an integer of 0 to 2, and * represents a bond.
<(d1-I)エポキシ(メタ)アクリレート系樹脂> <(d1-I) Epoxy (meth)acrylate resin>
Figure JPOXMLDOC01-appb-C000008
Figure JPOXMLDOC01-appb-C000008
 式(d1-I)中、R11は水素原子又はメチル基を表し、R12は置換基を有していてもよい2価の炭化水素基を表し、kは1又は2を表し、*は結合手を表す。
 式(d1-I)中のベンゼン環は、さらに任意の置換基により置換されていてもよい。
In formula (d1-I), R 11 represents a hydrogen atom or a methyl group, R 12 represents a divalent hydrocarbon group that may have a substituent, k represents 1 or 2, and * Represents a bond.
The benzene ring in formula (d1-I) may be further substituted with any substituent.
(R12
 式(d1-I)において、R12は置換基を有していてもよい2価の炭化水素基を表す。
 2価の炭化水素基としては、2価の脂肪族基、2価の芳香族環基、1以上の2価の脂肪族基と1以上の2価の芳香族環基とを連結した基が挙げられる。
( R12 )
In formula (d1-I), R 12 represents a divalent hydrocarbon group which may have a substituent.
Examples of divalent hydrocarbon groups include divalent aliphatic groups, divalent aromatic ring groups, and groups in which one or more divalent aliphatic groups and one or more divalent aromatic ring groups are connected. Can be mentioned.
 2価の脂肪族基は、直鎖状、分岐鎖状、環状の脂肪族基が挙げられる。現像溶解性の観点からは直鎖状の脂肪族基が好ましい。一方で露光部への現像液の浸透低減の観点からは環状の脂肪族基が好ましい。その炭素数は1以上が好ましく、3以上がより好ましく、6以上がさらに好ましい。また、20以下が好ましく、15以下がより好ましく、10以下がさらに好ましい。前記下限値以上とすることで強固な膜が得られやすく、現像時に生じる表面荒れが生じにくく、基板への密着性が良好となる傾向がある。前記上限値以下とすることで感度の悪化や現像時の膜減りを抑制しやすく、解像性が向上する傾向がある。上記の上限及び下限は任意に組み合わせることができる。例えば、1~20であってよく、1~15であってよく、1~10であってよい。 Examples of divalent aliphatic groups include linear, branched, and cyclic aliphatic groups. From the viewpoint of development solubility, linear aliphatic groups are preferred. On the other hand, a cyclic aliphatic group is preferable from the viewpoint of reducing permeation of the developer into the exposed area. The number of carbon atoms is preferably 1 or more, more preferably 3 or more, and even more preferably 6 or more. Further, it is preferably 20 or less, more preferably 15 or less, and even more preferably 10 or less. When the amount is at least the lower limit, a strong film is easily obtained, the surface roughness that occurs during development is less likely to occur, and the adhesion to the substrate tends to be good. By setting it below the above-mentioned upper limit, deterioration of sensitivity and film thinning during development can be easily suppressed, and resolution tends to improve. The above upper and lower limits can be arbitrarily combined. For example, it may be from 1 to 20, it may be from 1 to 15, it may be from 1 to 10.
 2価の直鎖状の脂肪族基としては、例えば、メチレン基、エチレン基、n-プロピレン基、n-ブチレン基、n-ペンチレン基、n-ヘキシレン基、n-ヘプチレン基が挙げられる。骨格の剛直性の観点から、メチレン基が好ましい。
 2価の分岐鎖状の脂肪族基としては、前述の2価の直鎖状の脂肪族基に、側鎖として、例えば、メチル基、エチル基、n-プロピル基、イソプロピル基、n-ブチル基、イソブチル基、sec-ブチル基、tert-ブチル基を有する構造が挙げられる。
 2価の環状の脂肪族基が有する環の数は特に限定されないが、1以上が好ましく、2以上がより好ましい。また、12以下が好ましく、10以下がより好ましい。前記下限値以上とすることで強固な膜となり、基板密着性が良好となる傾向がある。前記上限値以下とすることで感度の悪化や現像時の膜減りを抑制しやすく、解像性が向上する傾向がある。上記の上限及び下限は任意に組み合わせることができる。例えば、1~12であってよく、1~10であってよく、2~10であってよい。
 2価の環状の脂肪族基としては、例えば、シクロヘキサン環、シクロヘプタン環、シクロデカン環、シクロドデカン環、ノルボルナン環、イソボルナン環、アダマンタン環、シクロドデカン環、ジシクロペンタジエン、ジシクロペンタン等の環から水素原子を2つ除した基が挙げられる。骨格の剛直性の観点から、ジシクロペンタジエン環、ジシクロペンタン環、アダマンタン環から水素原子を2つ除した基が好ましい。
Examples of the divalent linear aliphatic group include methylene group, ethylene group, n-propylene group, n-butylene group, n-pentylene group, n-hexylene group, and n-heptylene group. From the viewpoint of the rigidity of the skeleton, a methylene group is preferred.
The divalent branched aliphatic group includes, for example, a methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group as a side chain in addition to the above-mentioned divalent linear aliphatic group. Examples include structures having a group, an isobutyl group, a sec-butyl group, and a tert-butyl group.
The number of rings that the divalent cyclic aliphatic group has is not particularly limited, but is preferably 1 or more, and more preferably 2 or more. Moreover, 12 or less is preferable, and 10 or less is more preferable. When the amount is equal to or more than the lower limit, the film tends to be strong and have good adhesion to the substrate. By setting it below the above-mentioned upper limit, deterioration of sensitivity and film thinning during development can be easily suppressed, and resolution tends to improve. The above upper and lower limits can be arbitrarily combined. For example, it may be from 1 to 12, it may be from 1 to 10, it may be from 2 to 10.
Examples of the divalent cyclic aliphatic group include rings such as cyclohexane ring, cycloheptane ring, cyclodecane ring, cyclododecane ring, norbornane ring, isobornane ring, adamantane ring, cyclododecane ring, dicyclopentadiene, and dicyclopentane ring. An example is a group obtained by removing two hydrogen atoms from . From the viewpoint of rigidity of the skeleton, a group obtained by removing two hydrogen atoms from a dicyclopentadiene ring, a dicyclopentane ring, or an adamantane ring is preferable.
 2価の脂肪族基が有していてもよい置換基としては、例えば、メトキシ基、エトキシ基等の炭素数1~5のアルコキシ基;水酸基;ニトロ基;シアノ基;カルボキシ基が挙げられる。合成容易性の観点から、無置換であることが好ましい。 Examples of the substituent that the divalent aliphatic group may have include an alkoxy group having 1 to 5 carbon atoms such as a methoxy group and an ethoxy group; a hydroxyl group; a nitro group; a cyano group; and a carboxy group. From the viewpoint of ease of synthesis, it is preferable that it is unsubstituted.
 2価の芳香族環基としては、2価の芳香族炭化水素環基及び2価の芳香族複素環基が挙げられる。その炭素数は特に限定されないが、4以上が好ましく、5以上がより好ましく、6以上がさらに好ましい。また、20以下が好ましく、15以下がより好ましく、10以下がさらに好ましい。前記下限値以上とすることで強固な膜が得られやすく、現像時に生じる表面荒れが生じにくく、基板への密着性が良好となる傾向がある。前記上限値以下とすることで感度の悪化や現像時の膜減りを抑制しやすく、解像性が向上する傾向がある。上記の上限及び下限は任意に組み合わせることができる。例えば、4~20であってよく、5~15であってよく、6~10であってよい。 Examples of the divalent aromatic ring group include a divalent aromatic hydrocarbon ring group and a divalent aromatic heterocyclic group. The number of carbon atoms is not particularly limited, but is preferably 4 or more, more preferably 5 or more, and even more preferably 6 or more. Further, it is preferably 20 or less, more preferably 15 or less, and even more preferably 10 or less. When the amount is at least the lower limit, a strong film is easily obtained, the surface roughness that occurs during development is less likely to occur, and the adhesion to the substrate tends to be good. By setting it below the above-mentioned upper limit, deterioration of sensitivity and film thinning during development can be easily suppressed, and resolution tends to improve. The above upper and lower limits can be arbitrarily combined. For example, it may be between 4 and 20, between 5 and 15, and between 6 and 10.
 2価の芳香族炭化水素環基における芳香族炭化水素環としては、単環であっても縮合環であってもよい。2価の芳香族炭化水素環基としては、例えば、2個の遊離原子価を有する、ベンゼン環、ナフタレン環、アントラセン環、フェナントレン環、ペリレン環、テトラセン環、ピレン環、ベンズピレン環、クリセン環、トリフェニレン環、アセナフテン環、フルオランテン環、フルオレン環が挙げられる。
 2価の芳香族複素環基における芳香族複素環としては、単環であっても縮合環であってもよい。2価の芳香族複素環基としては、例えば、2個の遊離原子価を有する、フラン環、ベンゾフラン環、チオフェン環、ベンゾチオフェン環、ピロール環、ピラゾール環、イミダゾール環、オキサジアゾール環、インドール環、カルバゾール環、ピロロイミダゾール環、ピロロピラゾール環、ピロロピロール環、チエノピロール環、チエノチオフェン環、フロピロール環、フロフラン環、チエノフラン環、ベンゾイソオキサゾール環、ベンゾイソチアゾール環、ベンゾイミダゾール環、ピリジン環、ピラジン環、ピリダジン環、ピリミジン環、トリアジン環、キノリン環、イソキノリン環、シノリン環、キノキサリン環、フェナントリジン環、ペリミジン環、キナゾリン環、キナゾリノン環、アズレン環が挙げられる。
 パターニング特性の観点から、2個の遊離原子価を有するベンゼン環、ナフタレン環が好ましく、2個の遊離原子価を有するベンゼン環がより好ましい。
The aromatic hydrocarbon ring in the divalent aromatic hydrocarbon ring group may be a single ring or a fused ring. Examples of the divalent aromatic hydrocarbon ring group include benzene ring, naphthalene ring, anthracene ring, phenanthrene ring, perylene ring, tetracene ring, pyrene ring, benzpyrene ring, chrysene ring, which have two free valences, Examples include triphenylene ring, acenaphthene ring, fluoranthene ring, and fluorene ring.
The aromatic heterocycle in the divalent aromatic heterocyclic group may be a single ring or a condensed ring. Examples of the divalent aromatic heterocyclic group include furan ring, benzofuran ring, thiophene ring, benzothiophene ring, pyrrole ring, pyrazole ring, imidazole ring, oxadiazole ring, and indole ring having two free valences. ring, carbazole ring, pyrroloimidazole ring, pyrolopyrazole ring, pyrrolopyrrole ring, thienopyrrole ring, thienothiophene ring, furopyrrole ring, furofuran ring, thienofuran ring, benzisoxazole ring, benzisothiazole ring, benzimidazole ring, pyridine ring, Examples include pyrazine ring, pyridazine ring, pyrimidine ring, triazine ring, quinoline ring, isoquinoline ring, shinoline ring, quinoxaline ring, phenanthridine ring, perimidine ring, quinazoline ring, quinazolinone ring, and azulene ring.
From the viewpoint of patterning properties, benzene rings and naphthalene rings having two free valences are preferred, and benzene rings having two free valences are more preferred.
 2価の芳香族環基が有していてもよい置換基としては、例えば、ヒドロキシ基、メチル基、メトキシ基、エチル基、エトキシ基、プロピル基、プロポキシ基が挙げられる。現像溶解性の観点から、無置換が好ましい。 Examples of the substituents that the divalent aromatic ring group may have include a hydroxy group, a methyl group, a methoxy group, an ethyl group, an ethoxy group, a propyl group, and a propoxy group. From the viewpoint of development solubility, non-substitution is preferred.
 1以上の2価の脂肪族基と1以上の2価の芳香族環基とを連結した基としては、前述の2価の脂肪族基を1以上と、前述の2価の芳香族環基を1以上とを連結した基が挙げられる。
 2価の脂肪族基の数は特に限定されないが、1以上が好ましく、2以上がより好ましく、10以下が好ましく、5以下がより好ましく、3以下がさらに好ましい。前記下限値以上とすることで強固な膜が得られやすく、現像時に生じる表面荒れが生じにくく、基板への密着性が良好となる傾向がある。前記上限値以下とすることで感度の悪化や現像時の膜減りを抑制しやすく、解像性が向上する傾向がある。上記の上限及び下限は任意に組み合わせることができる。例えば、1~10であってよく、1~5であってよく、1~3であってよく、2~3であってよい。
 2価の芳香族環基の数は特に限定されないが、1以上が好ましく、2以上がより好ましく、10以下が好ましく、5以下がより好ましく、3以下がさらに好ましい。前記下限値以上とすることで強固な膜が得られやすく、現像時に生じる表面荒れが生じにくく、基板への密着性が良好となる傾向がある。前記上限値以下とすることで感度の悪化や現像時の膜減りを抑制しやすく、解像性が向上する傾向がある。上記の上限及び下限は任意に組み合わせることができる。例えば、1~10であってよく、1~5であってよく、1~3であってよく、2~3であってよい。
The group linking one or more divalent aliphatic groups and one or more divalent aromatic ring groups includes one or more of the above-mentioned divalent aliphatic groups and the above-mentioned divalent aromatic ring group. Examples include groups in which one or more are linked.
The number of divalent aliphatic groups is not particularly limited, but is preferably 1 or more, more preferably 2 or more, preferably 10 or less, more preferably 5 or less, and even more preferably 3 or less. When the amount is at least the lower limit, a strong film is easily obtained, the surface roughness that occurs during development is less likely to occur, and the adhesion to the substrate tends to be good. By setting it below the above-mentioned upper limit, deterioration of sensitivity and film thinning during development can be easily suppressed, and resolution tends to improve. The above upper and lower limits can be arbitrarily combined. For example, it may be from 1 to 10, it may be from 1 to 5, it may be from 1 to 3, it may be from 2 to 3.
The number of divalent aromatic ring groups is not particularly limited, but is preferably 1 or more, more preferably 2 or more, 10 or less, more preferably 5 or less, and even more preferably 3 or less. When the amount is at least the lower limit, a strong film is easily obtained, the surface roughness that occurs during development is less likely to occur, and the adhesion to the substrate tends to be good. By setting it below the above-mentioned upper limit, deterioration of sensitivity and film thinning during development can be easily suppressed, and resolution tends to improve. The above upper and lower limits can be arbitrarily combined. For example, it may be from 1 to 10, it may be from 1 to 5, it may be from 1 to 3, it may be from 2 to 3.
 1以上の2価の脂肪族基と1以上の2価の芳香族環基とを連結した基としては、例えば、下記式(d1-I-A)~(d1-I-F)で表される基が挙げられる。骨格の剛直性と膜の疎水化の観点から、下記式(d1-I-A)で表される基が好ましい。 Examples of groups connecting one or more divalent aliphatic groups and one or more divalent aromatic ring groups include those represented by the following formulas (d1-I-A) to (d1-IF). Examples include groups such as From the viewpoint of rigidity of the skeleton and hydrophobicization of the membrane, a group represented by the following formula (d1-IA) is preferable.
Figure JPOXMLDOC01-appb-C000009
Figure JPOXMLDOC01-appb-C000009
 式(d1-I)において、kは1又は2を表す。密着性、パターニング性の観点からkは1が好ましい。NMP耐性の観点からkは2が好ましい。また、(d1-I)エポキシ(メタ)アクリレート中にkが1の部分構造と、kが2の部分構造の両方が含有されていてもよい。 In formula (d1-I), k represents 1 or 2. From the viewpoint of adhesion and patterning properties, k is preferably 1. From the viewpoint of NMP resistance, k is preferably 2. Furthermore, both a partial structure in which k is 1 and a partial structure in which k is 2 may be contained in the epoxy (meth)acrylate (d1-I).
 式(d1-I)中のベンゼン環は、さらに任意の置換基により置換されていてもよい。
 置換基としては、例えば、ヒドロキシ基、メチル基、メトキシ基、エチル基、エトキシ基、プロピル基、プロポキシ基が挙げられる。置換基の数も特に限定されず、1つでもよいし、2つ以上でもよい。パターニング特性の観点から、無置換であることが好ましい。
The benzene ring in formula (d1-I) may be further substituted with any substituent.
Examples of the substituent include a hydroxy group, a methyl group, a methoxy group, an ethyl group, an ethoxy group, a propyl group, and a propoxy group. The number of substituents is not particularly limited either, and may be one or two or more. From the viewpoint of patterning properties, it is preferable that no substitution be made.
 式(d1-I)で表される部分構造は、合成の簡易性の観点から、下記一般式(d1-I-1)で表される部分構造であることが好ましい。 The partial structure represented by formula (d1-I) is preferably a partial structure represented by the following general formula (d1-I-1) from the viewpoint of ease of synthesis.
Figure JPOXMLDOC01-appb-C000010
Figure JPOXMLDOC01-appb-C000010
 式(d1-I-1)中、R11、R12及びkは、式(d1-I)と同義であり、Rは水素原子又は多塩基酸残基を表し、*は結合手を表す。
 式(d1-I-1)中のベンゼン環は、さらに任意の置換基により置換されていてもよい。
In formula (d1-I-1), R 11 , R 12 and k have the same meanings as in formula (d1-I), R X represents a hydrogen atom or a polybasic acid residue, and * represents a bond. .
The benzene ring in formula (d1-I-1) may be further substituted with any substituent.
 多塩基酸残基とは、多塩基酸からOH基を1つ除した1価の基を意味する。多塩基酸としては、例えば、マレイン酸、コハク酸、イタコン酸、フタル酸、テトラヒドロフタル酸、ヘキサヒドロフタル酸、ピロメリット酸、トリメリット酸、ベンゾフェノンテトラカルボン酸、メチルヘキサヒドロフタル酸、エンドメチレンテトラヒドロフタル酸、クロレンド酸、メチルテトラヒドロフタル酸、ビフェニルテトラカルボン酸が挙げられる。
 パターニング特性の観点から、好ましくは、マレイン酸、コハク酸、イタコン酸、フタル酸、テトラヒドロフタル酸、ヘキサヒドロフタル酸、ピロメリット酸、トリメリット酸、ビフェニルテトラカルボン酸であり、より好ましくは、テトラヒドロフタル酸、ビフェニルテトラカルボン酸、ビフェニルテトラカルボン酸である。
The polybasic acid residue means a monovalent group obtained by removing one OH group from a polybasic acid. Examples of polybasic acids include maleic acid, succinic acid, itaconic acid, phthalic acid, tetrahydrophthalic acid, hexahydrophthalic acid, pyromellitic acid, trimellitic acid, benzophenonetetracarboxylic acid, methylhexahydrophthalic acid, and endomethylene. Examples include tetrahydrophthalic acid, chlorendic acid, methyltetrahydrophthalic acid, and biphenyltetracarboxylic acid.
From the viewpoint of patterning properties, maleic acid, succinic acid, itaconic acid, phthalic acid, tetrahydrophthalic acid, hexahydrophthalic acid, pyromellitic acid, trimellitic acid, biphenyltetracarboxylic acid are preferred, and tetrahydrophthalic acid is more preferred. They are phthalic acid, biphenyltetracarboxylic acid, and biphenyltetracarboxylic acid.
 式(d1-I-1)中のベンゼン環は、さらに任意の置換基により置換されていてもよい。置換基としては、式(d1-I)中のベンゼン環について挙げた基を好ましく採用することができる。 The benzene ring in formula (d1-I-1) may be further substituted with any substituent. As the substituent, the groups listed for the benzene ring in formula (d1-I) can be preferably employed.
 (d1-I)エポキシ(メタ)アクリレート系樹脂1分子中に含まれる、式(d1-I-1)で表される部分構造は、1種でも2種以上でもよく、例えば、Rが水素原子の部分構造と、Rが多塩基酸残基の部分構造が混在していてもよい。 (d1-I) The partial structure represented by formula (d1-I-1) contained in one molecule of epoxy (meth)acrylate resin may be one type or two or more types, for example, when R A partial structure of atoms and a partial structure in which R X is a polybasic acid residue may coexist.
 (d1-I)エポキシ(メタ)アクリレート系樹脂1分子中に含まれる、式(d1-I)で表される部分構造の数は特に限定されないが、1以上が好ましく、3以上がより好ましい。また、20以下が好ましく、15以下がさらに好ましい。前記下限値以上とすることで強固な膜が得られやすく、現像時に生じる表面荒れが生じにくくなる傾向がある。前記上限値以下とすることで感度の悪化や現像時の膜減りを抑制しやすく、解像性が向上する傾向がある。上記の上限及び下限は任意に組み合わせることができる。例えば、1~20であってよく、1~15であってよく、3~15であってよい。 (d1-I) The number of partial structures represented by formula (d1-I) contained in one molecule of the epoxy (meth)acrylate resin is not particularly limited, but is preferably 1 or more, more preferably 3 or more. Moreover, 20 or less is preferable, and 15 or less is more preferable. When the amount is equal to or more than the lower limit, a strong film can be easily obtained, and surface roughness that occurs during development tends to be less likely to occur. By setting it below the above-mentioned upper limit, deterioration of sensitivity and film thinning during development can be easily suppressed, and resolution tends to improve. The above upper and lower limits can be arbitrarily combined. For example, it may be 1 to 20, 1 to 15, or 3 to 15.
 (d1-I)エポキシ(メタ)アクリレート系樹脂の、ゲルパーミエーションクロマトグラフィー(GPC)で測定したポリスチレン換算の重量平均分子量(Mw)は特に限定されないが、1000以上が好ましく、1500以上がより好ましく、2000以上がさらに好ましく、3000以上がよりさらに好ましく、4000以上が特に好ましく、5000以上が最も好ましく、30000以下が好ましく、20000以下がより好ましく、15000以下がさらに好ましい。前記下限値以上とすることで感光性着色組成物の残膜率が良好となる傾向がある。前記上限値以下とすることで現像液に対する溶解性が良好となる傾向がある。上記の上限及び下限は任意に組み合わせることができる。例えば、1000~30000であってよく、1500~2000であってよく、1500~15000であってよく、2000~1500であってよい。 (d1-I) The weight average molecular weight (Mw) of the epoxy (meth)acrylate resin measured by gel permeation chromatography (GPC) in terms of polystyrene is not particularly limited, but is preferably 1000 or more, more preferably 1500 or more. , more preferably 2,000 or more, even more preferably 3,000 or more, particularly preferably 4,000 or more, most preferably 5,000 or more, preferably 30,000 or less, more preferably 20,000 or less, and even more preferably 15,000 or less. When the amount is equal to or more than the lower limit, the remaining film rate of the photosensitive coloring composition tends to be good. When the content is below the upper limit, the solubility in the developer tends to be improved. The above upper and lower limits can be arbitrarily combined. For example, it may be 1000-30000, 1500-2000, 1500-15000, or 2000-1500.
 (d1-I)エポキシ(メタ)アクリレート系樹脂の、酸価は特に限定されないが、20mgKOH/g以上が好ましく、40mgKOH/g以上がより好ましく、60mgKOH/g以上がさらに好ましく、80mgKOH/g以上がよりさらに好ましく、100mgKOH/g以上が特に好ましい。また、200mgKOH/g以下が好ましく、150mgKOH/g以下がより好ましく、130mgKOH/g以下がよりさらに好ましく、120mgKOH/g以下が特に好ましい。前記下限値以上とすることで現像溶解性が向上し、解像性が良好となる傾向がある。前記上限値以下とすることで感光性着色組成物の残膜率が良好となる傾向がある。上記の上限及び下限は任意に組み合わせることができる。例えば、20mgKOH/g~200mgKOH/gであってよく、60mgKOH/g~150mgKOH/gであってよく、80mgKOH/g~130mgKOH/gであってよく、100mgKOH/g~130mgKOH/gであってよい。 (d1-I) The acid value of the epoxy (meth)acrylate resin is not particularly limited, but is preferably 20 mgKOH/g or more, more preferably 40 mgKOH/g or more, even more preferably 60 mgKOH/g or more, and 80 mgKOH/g or more. It is even more preferable, and particularly preferably 100 mgKOH/g or more. Moreover, 200 mgKOH/g or less is preferable, 150 mgKOH/g or less is more preferable, 130 mgKOH/g or less is even more preferable, and 120 mgKOH/g or less is particularly preferable. When the amount is at least the lower limit, development solubility tends to improve and resolution tends to improve. By setting it below the above upper limit, the residual film rate of the photosensitive coloring composition tends to be good. The above upper and lower limits can be arbitrarily combined. For example, it may be 20 mgKOH/g to 200 mgKOH/g, it may be 60 mgKOH/g to 150 mgKOH/g, it may be 80 mgKOH/g to 130 mgKOH/g, it may be 100 mgKOH/g to 130 mgKOH/g.
 以下に(d1-I)エポキシ(メタ)アクリレート系樹脂の具体例を挙げる。なお、例中の*は結合手を示す。 Specific examples of the (d1-I) epoxy (meth)acrylate resin are listed below. Note that * in the examples indicates a bond.
Figure JPOXMLDOC01-appb-C000011
Figure JPOXMLDOC01-appb-C000011
Figure JPOXMLDOC01-appb-C000012
Figure JPOXMLDOC01-appb-C000012
Figure JPOXMLDOC01-appb-C000013
Figure JPOXMLDOC01-appb-C000013
Figure JPOXMLDOC01-appb-C000014
Figure JPOXMLDOC01-appb-C000014
<(d1-II)エポキシ(メタ)アクリレート系樹脂> <(d1-II) Epoxy (meth)acrylate resin>
Figure JPOXMLDOC01-appb-C000015
Figure JPOXMLDOC01-appb-C000015
 式(d1-II)中、R13は各々独立に、水素原子又はメチル基を表し、R14は、環状炭化水素基を側鎖として有する2価の炭化水素基を表し、R15及びR16は各々独立に、置換基を有していてもよい2価の脂肪族基を表し、m及びnは各々独立に0~2の整数を表し、*は結合手を表す。 In formula (d1-II), R 13 each independently represents a hydrogen atom or a methyl group, R 14 represents a divalent hydrocarbon group having a cyclic hydrocarbon group as a side chain, R 15 and R 16 each independently represents a divalent aliphatic group which may have a substituent, m and n each independently represent an integer of 0 to 2, and * represents a bond.
(R14
 式(d1-II)において、R14は、環状炭化水素基を側鎖として有する2価の炭化水素基を表す。
 環状炭化水素基としては、脂肪族環基又は芳香族環基が挙げられる。
( R14 )
In formula (d1-II), R 14 represents a divalent hydrocarbon group having a cyclic hydrocarbon group as a side chain.
Examples of the cyclic hydrocarbon group include an aliphatic ring group and an aromatic ring group.
 脂肪族環基が有する環の数は特に限定されないが、1以上が好ましく、2以上がより好ましい。また、10以下が好ましく、5以下がより好ましく、3以下がさらに好ましい。前記下限値以上とすることで強固な膜が得られやすく、現像時に生じる表面荒れが生じにくくなる傾向がある。前記上限値以下とすることで感度の悪化や現像時の膜減りを抑制しやすく、解像性が向上する傾向がある。上記の上限及び下限は任意に組み合わせることができる。例えば、1~10であってよく、1~5であってよく、1~3であってよく、2~3であってよい。
 脂肪族環基の炭素数は特に限定されないが、4以上が好ましく、6以上がより好ましく、8以上がさらに好ましい。また、40以下が好ましく、30以下がより好ましく、20以下がさらに好ましく、15以下が特に好ましい。前記下限値以上とすることで強固な膜が得られやすく、現像時に生じる表面荒れが生じにくくなる傾向がある。前記上限値以下とすることで感度の悪化や現像時の膜減りを抑制しやすく、解像性が向上する傾向がある。上記の上限及び下限は任意に組み合わせることができる。例えば、4~40であってよく、4~30であってよく、6~20であってよく、8~15であってよい。
 脂肪族環基における脂肪族環としては、例えば、シクロヘキサン環、シクロヘプタン環、シクロデカン環、シクロドデカン環、ノルボルナン環、イソボルナン環、アダマンタン環、シクロドデカン環が挙げられる。感光性着色組成物の残膜率と解像性の観点から、アダマンタン環が好ましい。
The number of rings that the aliphatic cyclic group has is not particularly limited, but is preferably one or more, and more preferably two or more. Further, it is preferably 10 or less, more preferably 5 or less, and even more preferably 3 or less. When the amount is at least the lower limit, a strong film can be easily obtained, and surface roughness that occurs during development tends to be less likely to occur. By setting it below the above-mentioned upper limit, deterioration of sensitivity and film thinning during development can be easily suppressed, and resolution tends to improve. The above upper and lower limits can be arbitrarily combined. For example, it may be from 1 to 10, it may be from 1 to 5, it may be from 1 to 3, it may be from 2 to 3.
The number of carbon atoms in the aliphatic cyclic group is not particularly limited, but is preferably 4 or more, more preferably 6 or more, and even more preferably 8 or more. Further, it is preferably 40 or less, more preferably 30 or less, even more preferably 20 or less, and particularly preferably 15 or less. When the amount is at least the lower limit, a strong film can be easily obtained, and surface roughness that occurs during development tends to be less likely to occur. By setting it below the above-mentioned upper limit, deterioration of sensitivity and film thinning during development can be easily suppressed, and resolution tends to improve. The above upper and lower limits can be arbitrarily combined. For example, it may be between 4 and 40, between 4 and 30, between 6 and 20, and between 8 and 15.
Examples of the aliphatic ring in the aliphatic ring group include a cyclohexane ring, a cycloheptane ring, a cyclodecane ring, a cyclododecane ring, a norbornane ring, an isobornane ring, an adamantane ring, and a cyclododecane ring. From the viewpoint of the residual film rate and resolution of the photosensitive coloring composition, an adamantane ring is preferred.
 芳香族環基が有する環の数は特に限定されないが、1以上が好ましく、2以上がより好ましく、3以上がさらに好ましい。また、10以下が好ましく、5以下がより好ましく、4以下がさらに好ましい。上記の上限及び下限は任意に組み合わせることができる。例えば、1~10が好ましく、1~5がより好ましく、1~4がさらに好ましく、2~4がよりさらに好ましく、3~4が特に好ましい。前記下限値以上とすることで強固な膜が得られやすく、現像時に生じる表面荒れが生じにくくなる傾向がある。前記上限値以下とすることで感度の悪化や現像時の膜減りを抑制しやすく、解像性が向上する傾向がある。
 芳香族環基としては、芳香族炭化水素環基、芳香族複素環基が挙げられる。芳香族環基の炭素数は特に限定されないが、4以上が好ましく、6以上がより好ましく、8以上がさらに好ましく、10以上がよりさらに好ましく、12以上が特に好ましい。また、40以下が好ましく、30以下がより好ましく、20以下がさらに好ましく、15以下が特に好ましい。前記下限値以上とすることで強固な膜が得られやすく、現像時に生じる表面荒れが生じにくくなる傾向がある。前記上限値以下とすることでパターニング特性が良好となる傾向がある。上記の上限及び下限は任意に組み合わせることができる。例えば、4~40であってよく、6~40であってよく、8~30であってよく、10~20であってよく、12~15であってよい。
 芳香族環基における芳香族環としては、例えば、ベンゼン環、ナフタレン環、アントラセン環、フェナントレン環、ペリレン環、テトラセン環、ピレン環、ベンズピレン環、クリセン環、トリフェニレン環、アセナフテン環、フルオランテン環、フルオレン環が挙げられる。パターニング特性の観点から、フルオレン環が好ましい。
The number of rings that the aromatic ring group has is not particularly limited, but is preferably 1 or more, more preferably 2 or more, and even more preferably 3 or more. Further, it is preferably 10 or less, more preferably 5 or less, and even more preferably 4 or less. The above upper and lower limits can be arbitrarily combined. For example, the number is preferably 1 to 10, more preferably 1 to 5, even more preferably 1 to 4, even more preferably 2 to 4, and particularly preferably 3 to 4. When the amount is equal to or more than the lower limit, a strong film can be easily obtained, and surface roughness that occurs during development tends to be less likely to occur. By setting it below the above-mentioned upper limit, deterioration of sensitivity and film thinning during development can be easily suppressed, and resolution tends to improve.
Examples of the aromatic ring group include an aromatic hydrocarbon ring group and an aromatic heterocyclic group. The number of carbon atoms in the aromatic ring group is not particularly limited, but is preferably 4 or more, more preferably 6 or more, even more preferably 8 or more, even more preferably 10 or more, and particularly preferably 12 or more. Further, it is preferably 40 or less, more preferably 30 or less, even more preferably 20 or less, and particularly preferably 15 or less. When the amount is equal to or more than the lower limit, a strong film can be easily obtained, and surface roughness that occurs during development tends to be less likely to occur. By setting it below the above-mentioned upper limit, patterning characteristics tend to be improved. The above upper and lower limits can be arbitrarily combined. For example, it may be from 4 to 40, from 6 to 40, from 8 to 30, from 10 to 20, and from 12 to 15.
Examples of the aromatic ring in the aromatic ring group include a benzene ring, a naphthalene ring, an anthracene ring, a phenanthrene ring, a perylene ring, a tetracene ring, a pyrene ring, a benzpyrene ring, a chrysene ring, a triphenylene ring, an acenaphthene ring, a fluoranthene ring, and a fluorene ring. Examples include rings. From the viewpoint of patterning properties, a fluorene ring is preferred.
 環状炭化水素基を側鎖として有する2価の炭化水素基における、2価の炭化水素基は特に限定されないが、例えば、2価の脂肪族基、2価の芳香族環基、1以上の2価の脂肪族基と1以上の2価の芳香族環基とを連結した基が挙げられる。 The divalent hydrocarbon group in the divalent hydrocarbon group having a cyclic hydrocarbon group as a side chain is not particularly limited, but includes, for example, a divalent aliphatic group, a divalent aromatic ring group, and one or more divalent hydrocarbon groups. Examples include groups in which a valent aliphatic group and one or more divalent aromatic ring groups are connected.
 2価の脂肪族基は、直鎖状、分岐鎖状、環状の脂肪族基が挙げられる。現像溶解性の観点からは直鎖状の脂肪族基が好ましく、一方で露光部への現像液の浸透低減の観点からは環状の脂肪族基が好ましい。その炭素数は特に限定されないが、1以上が好ましく、3以上がより好ましく、6以上がさらに好ましい。また、25以下が好ましく、20以下がより好ましく、15以下がさらに好ましい。前記下限値以上とすることで強固な膜が得られやすく、現像時に生じる表面荒れが生じにくく、基板への密着性が良好となる傾向がある。前記上限値以下とすることで感度の悪化や現像時の膜減りを抑制しやすく、解像性が向上する傾向がある。上記の上限及び下限は任意に組み合わせることができる。例えば、1~25であってよく、3~20であってよく、6~15であってよい。 Examples of divalent aliphatic groups include linear, branched, and cyclic aliphatic groups. A linear aliphatic group is preferred from the viewpoint of development solubility, while a cyclic aliphatic group is preferred from the viewpoint of reducing permeation of the developer into the exposed area. The number of carbon atoms is not particularly limited, but is preferably 1 or more, more preferably 3 or more, and even more preferably 6 or more. Further, it is preferably 25 or less, more preferably 20 or less, and even more preferably 15 or less. When the amount is at least the lower limit, a strong film is easily obtained, the surface roughness that occurs during development is less likely to occur, and the adhesion to the substrate tends to be good. By setting it below the above-mentioned upper limit, deterioration of sensitivity and film thinning during development can be easily suppressed, and resolution tends to improve. The above upper and lower limits can be arbitrarily combined. For example, it may be between 1 and 25, between 3 and 20, and between 6 and 15.
 2価の直鎖状の脂肪族基としては、例えば、メチレン基、エチレン基、n-プロピレン基、n-ブチレン基、n-ペンチレン基、n-ヘキシレン基、n-ヘプチレン基が挙げられる。骨格の剛直性の観点から、メチレン基が好ましい。
 2価の分岐鎖状の脂肪族基としては、例えば、前述の2価の直鎖状の脂肪族基に、側鎖としてメチル基、エチル基、n-プロピル基、イソプロピル基、n-ブチル基、イソブチル基、sec-ブチル基、tert-ブチル基を有する構造が挙げられる。
 2価の環状の脂肪族基が有する環の数は特に限定されないが、1以上が好ましく、2以上がより好ましい。また、10以下が好ましく、5以下がより好ましく、3以下がさらに好ましい。前記下限値以上とすることで強固な膜となり、基板密着性と良好となる傾向がある。また、前記上限値以下とすることで感度の悪化や現像時の膜減りを抑制しやすく、解像性が向上する傾向がある。上記の上限及び下限は任意に組み合わせることができる。例えば、1~10であってよく、1~5であってよく、1~3であってよく、2~3であってよい。
 2価の環状の脂肪族基としては、例えば、シクロヘキサン環、シクロヘプタン環、シクロデカン環、シクロドデカン環、ノルボルナン環、イソボルナン環、アダマンタン環、シクロドデカン環の環から水素原子を2つ除した基が挙げられる。骨格の剛直性の観点から、アダマンタン環から水素原子を2つ除した基が好ましい。
Examples of the divalent linear aliphatic group include methylene group, ethylene group, n-propylene group, n-butylene group, n-pentylene group, n-hexylene group, and n-heptylene group. From the viewpoint of the rigidity of the skeleton, a methylene group is preferred.
Examples of the divalent branched aliphatic group include a methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group as a side chain in addition to the above-mentioned divalent linear aliphatic group. , an isobutyl group, a sec-butyl group, and a tert-butyl group.
The number of rings that the divalent cyclic aliphatic group has is not particularly limited, but is preferably 1 or more, and more preferably 2 or more. Further, it is preferably 10 or less, more preferably 5 or less, and even more preferably 3 or less. When the content is equal to or more than the lower limit, the film tends to be strong and have good adhesion to the substrate. In addition, by setting the amount to be below the upper limit, deterioration of sensitivity and film thinning during development can be easily suppressed, and resolution tends to improve. The above upper and lower limits can be arbitrarily combined. For example, it may be from 1 to 10, it may be from 1 to 5, it may be from 1 to 3, it may be from 2 to 3.
Examples of divalent cyclic aliphatic groups include groups obtained by removing two hydrogen atoms from a cyclohexane ring, cycloheptane ring, cyclodecane ring, cyclododecane ring, norbornane ring, isobornane ring, adamantane ring, and cyclododecane ring. can be mentioned. From the viewpoint of skeleton rigidity, a group obtained by removing two hydrogen atoms from an adamantane ring is preferable.
 2価の脂肪族基が有していてもよい置換基としては、例えば、メトキシ基、エトキシ基等の炭素数1~5のアルコキシ基;水酸基;ニトロ基;シアノ基;カルボキシ基が挙げられる。合成容易性の観点から、無置換であることが好ましい。 Examples of the substituent that the divalent aliphatic group may have include an alkoxy group having 1 to 5 carbon atoms such as a methoxy group and an ethoxy group; a hydroxyl group; a nitro group; a cyano group; and a carboxy group. From the viewpoint of ease of synthesis, it is preferable that it is unsubstituted.
 2価の芳香族環基としては、2価の芳香族炭化水素環基及び2価の芳香族複素環基が挙げられる。その炭素数は特に限定されないが、4以上が好ましく、5以上がより好ましく、6以上がさらに好ましい。また、30以下が好ましく、20以下がより好ましく、15以下がさらに好ましい。前記下限値以上とすることで強固な膜が得られやすく、現像時に生じる表面荒れが生じにくく、基板への密着性が良好となる傾向がある。前記上限値以下とすることで感度の悪化や現像時の膜減りを抑制しやすく、解像性が向上する傾向がある。上記の上限及び下限は任意に組み合わせることができる。例えば、4~30であってよく、5~20であってよく、6~15であってよい。 Examples of the divalent aromatic ring group include a divalent aromatic hydrocarbon ring group and a divalent aromatic heterocyclic group. The number of carbon atoms is not particularly limited, but is preferably 4 or more, more preferably 5 or more, and even more preferably 6 or more. Further, it is preferably 30 or less, more preferably 20 or less, and even more preferably 15 or less. When the amount is at least the lower limit, a strong film is easily obtained, the surface roughness that occurs during development is less likely to occur, and the adhesion to the substrate tends to be good. By setting it below the above-mentioned upper limit, deterioration of sensitivity and film thinning during development can be easily suppressed, and resolution tends to improve. The above upper and lower limits can be arbitrarily combined. For example, it may be between 4 and 30, between 5 and 20, and between 6 and 15.
 2価の芳香族炭化水素環基における芳香族炭化水素環としては、単環であっても縮合環であってもよい。2価の芳香族炭化水素環基としては、例えば、2個の遊離原子価を有する、ベンゼン環、ナフタレン環、アントラセン環、フェナントレン環、ペリレン環、テトラセン環、ピレン環、ベンズピレン環、クリセン環、トリフェニレン環、アセナフテン環、フルオランテン環、フルオレン環が挙げられる。
 2価の芳香族複素環基における芳香族複素環としては、単環であっても縮合環であってもよい。2価の芳香族複素環基としては、例えば、2個の遊離原子価を有する、フラン環、ベンゾフラン環、チオフェン環、ベンゾチオフェン環、ピロール環、ピラゾール環、イミダゾール環、オキサジアゾール環、インドール環、カルバゾール環、ピロロイミダゾール環、ピロロピラゾール環、ピロロピロール環、チエノピロール環、チエノチオフェン環、フロピロール環、フロフラン環、チエノフラン環、ベンゾイソオキサゾール環、ベンゾイソチアゾール環、ベンゾイミダゾール環、ピリジン環、ピラジン環、ピリダジン環、ピリミジン環、トリアジン環、キノリン環、イソキノリン環、シノリン環、キノキサリン環、フェナントリジン環、ベンゾイミダゾール環、ペリミジン環、キナゾリン環、キナゾリノン環、アズレン環が挙げられる。パターニング特性の観点から、2個の遊離原子価を有するベンゼン環又はナフタレン環が好ましく、2個の遊離原子価を有するベンゼン環がより好ましい。
The aromatic hydrocarbon ring in the divalent aromatic hydrocarbon ring group may be a single ring or a fused ring. Examples of the divalent aromatic hydrocarbon ring group include benzene ring, naphthalene ring, anthracene ring, phenanthrene ring, perylene ring, tetracene ring, pyrene ring, benzpyrene ring, chrysene ring, which have two free valences, Examples include triphenylene ring, acenaphthene ring, fluoranthene ring, and fluorene ring.
The aromatic heterocycle in the divalent aromatic heterocyclic group may be a single ring or a condensed ring. Examples of the divalent aromatic heterocyclic group include furan ring, benzofuran ring, thiophene ring, benzothiophene ring, pyrrole ring, pyrazole ring, imidazole ring, oxadiazole ring, and indole ring having two free valences. ring, carbazole ring, pyrroloimidazole ring, pyrolopyrazole ring, pyrrolopyrrole ring, thienopyrrole ring, thienothiophene ring, furopyrrole ring, furofuran ring, thienofuran ring, benzisoxazole ring, benzisothiazole ring, benzimidazole ring, pyridine ring, Examples include pyrazine ring, pyridazine ring, pyrimidine ring, triazine ring, quinoline ring, isoquinoline ring, shinoline ring, quinoxaline ring, phenanthridine ring, benzimidazole ring, perimidine ring, quinazoline ring, quinazolinone ring, and azulene ring. From the viewpoint of patterning properties, a benzene ring or a naphthalene ring having two free valences is preferred, and a benzene ring having two free valences is more preferred.
 2価の芳香族環基が有していてもよい置換基としては、例えば、ヒドロキシ基、メチル基、メトキシ基、エチル基、エトキシ基、プロピル基、プロポキシ基が挙げられる。現像溶解性の観点から、無置換が好ましい。 Examples of the substituents that the divalent aromatic ring group may have include a hydroxy group, a methyl group, a methoxy group, an ethyl group, an ethoxy group, a propyl group, and a propoxy group. From the viewpoint of development solubility, non-substitution is preferred.
 1以上の2価の脂肪族基と1以上の2価の芳香族環基とを連結した基としては、前述の2価の脂肪族基を1以上と、前述の2価の芳香族環基を1以上とを連結した基が挙げられる。
 2価の脂肪族基の数は特に限定されないが、1以上が好ましく、2以上がより好ましく、10以下が好ましく、5以下がより好ましく、3以下がさらに好ましい。前記下限値以上とすることで強固な膜が得られやすく、現像時に生じる表面荒れが生じにくく、基板への密着性が良好となる傾向がある。前記上限値以下とすることで感度の悪化や現像時の膜減りを抑制しやすく、解像性が向上する傾向がある。上記の上限及び下限は任意に組み合わせることができる。例えば、1~10であってよく、1~5であってよく、1~3であってよく、2~3であってよい。
 2価の芳香族環基の数は特に限定されないが、1以上が好ましく、2以上がより好ましく、10以下が好ましく、5以下がより好ましく、3以下がさらに好ましい。前記下限値以上とすることで強固な膜が得られやすく、現像時に生じる表面荒れが生じにくく、基板への密着性が良好となる傾向がある。前記上限値以下とすることで感度の悪化や現像時の膜減りを抑制しやすく、解像性が向上する傾向がある。上記の上限及び下限は任意に組み合わせることができる。例えば、1~10であってよく、1~5であってよく、1~3であってよく、2~3であってよい。
The group linking one or more divalent aliphatic groups and one or more divalent aromatic ring groups includes one or more of the above-mentioned divalent aliphatic groups and the above-mentioned divalent aromatic ring group. Examples include groups in which one or more are linked.
The number of divalent aliphatic groups is not particularly limited, but is preferably 1 or more, more preferably 2 or more, preferably 10 or less, more preferably 5 or less, and even more preferably 3 or less. When the amount is at least the lower limit, a strong film is easily obtained, the surface roughness that occurs during development is less likely to occur, and the adhesion to the substrate tends to be good. By setting it below the above-mentioned upper limit, deterioration of sensitivity and film thinning during development can be easily suppressed, and resolution tends to improve. The above upper and lower limits can be arbitrarily combined. For example, it may be from 1 to 10, it may be from 1 to 5, it may be from 1 to 3, it may be from 2 to 3.
The number of divalent aromatic ring groups is not particularly limited, but is preferably 1 or more, more preferably 2 or more, 10 or less, more preferably 5 or less, and even more preferably 3 or less. When the amount is at least the lower limit, a strong film is easily obtained, the surface roughness that occurs during development is less likely to occur, and the adhesion to the substrate tends to be good. By setting it below the above-mentioned upper limit, deterioration of sensitivity and film thinning during development can be easily suppressed, and resolution tends to improve. The above upper and lower limits can be arbitrarily combined. For example, it may be from 1 to 10, it may be from 1 to 5, it may be from 1 to 3, it may be from 2 to 3.
 1以上の2価の脂肪族基と1以上の2価の芳香族環基とを連結した基としては、例えば、前述した式(d1-I-A)~(d1-I-F)で表される基が挙げられる。骨格の剛直性と膜の疎水化の観点から、式(d1-I-C)で表される基が好ましい。 Examples of groups linking one or more divalent aliphatic groups and one or more divalent aromatic ring groups include those represented by the above-mentioned formulas (d1-I-A) to (d1-IF). The following groups are mentioned. From the viewpoint of skeleton rigidity and membrane hydrophobization, a group represented by formula (d1-IC) is preferred.
 これらの2価の炭化水素基に対して、側鎖である環状炭化水素基の結合態様は特に限定されないが、例えば、脂肪族基や芳香族環基の水素原子1つを側鎖である環状炭化水素基で置換した態様や、脂肪族基の炭素原子の1つを含めて側鎖である環状炭化水素基を構成した態様が挙げられる。 The bonding mode of the cyclic hydrocarbon group as a side chain to these divalent hydrocarbon groups is not particularly limited, but for example, if one hydrogen atom of an aliphatic group or an aromatic ring group is Examples include an embodiment in which the aliphatic group is substituted with a hydrocarbon group, and an embodiment in which a cyclic hydrocarbon group that is a side chain includes one of the carbon atoms of the aliphatic group.
(R15、R16
 式(d1-II)において、R15及びR16は各々独立に、置換基を有していてもよい2価の脂肪族基を表す。
(R 15 , R 16 )
In formula (d1-II), R 15 and R 16 each independently represent a divalent aliphatic group which may have a substituent.
 2価の脂肪族基は、直鎖状、分岐鎖状、環状の脂肪族基が挙げられる。現像溶解性の観点からは直鎖状の脂肪族基が好ましく、一方で露光部への現像液の浸透低減の観点からは環状の脂肪族基が好ましい。その炭素数は特に限定されないが、1以上が好ましく、3以上がより好ましく、6以上がさらに好ましい。また、20以下が好ましく、15以下がより好ましく、10以下がさらに好ましい。前記下限値以上とすることで強固な膜が得られやすく、現像時に生じる表面荒れが生じにくく、基板への密着性が良好となる傾向がある。前記上限値以下とすることで感度の悪化や現像時の膜減りを抑制しやすく、解像性が向上する傾向がある。上記の上限及び下限は任意に組み合わせることができる。例えば、1~20であってよく、3~15であってよく、6~10であってよい。 Examples of divalent aliphatic groups include linear, branched, and cyclic aliphatic groups. A linear aliphatic group is preferred from the viewpoint of development solubility, while a cyclic aliphatic group is preferred from the viewpoint of reducing permeation of the developer into the exposed area. The number of carbon atoms is not particularly limited, but is preferably 1 or more, more preferably 3 or more, and even more preferably 6 or more. Further, it is preferably 20 or less, more preferably 15 or less, and even more preferably 10 or less. When the amount is at least the lower limit, a strong film is easily obtained, the surface roughness that occurs during development is less likely to occur, and the adhesion to the substrate tends to be good. By setting it below the above-mentioned upper limit, deterioration of sensitivity and film thinning during development can be easily suppressed, and resolution tends to improve. The above upper and lower limits can be arbitrarily combined. For example, it may be between 1 and 20, between 3 and 15, and between 6 and 10.
 2価の直鎖状の脂肪族基としては、例えば、メチレン基、エチレン基、n-プロピレン基、n-ブチレン基、n-ペンチレン基、n-ヘキシレン基、n-ヘプチレン基が挙げられる。骨格の剛直性の観点から、メチレン基が好ましい。
 2価の分岐鎖状の脂肪族基としては、前述の2価の直鎖状の脂肪族基に、側鎖として、例えば、メチル基、エチル基、n-プロピル基、イソプロピル基、n-ブチル基、イソブチル基、sec-ブチル基、tert-ブチル基を有する構造が挙げられる。
 2価の環状の脂肪族基が有する環の数は特に限定されないが、1以上が好ましく、2以上がより好ましい。また、12以下が好ましく、10以下がより好ましい。前記下限値以上とすることで強固な膜となり、基板密着性が良好となる傾向がある。前記上限値以下とすることで感度の悪化や現像時の膜減りを抑制しやすく、解像性が向上する傾向がある。
上記の上限及び下限は任意に組み合わせることができる。例えば、1~12であってよく、2~10であってよい。
 2価の環状の脂肪族基としては、例えば、シクロヘキサン環、シクロヘプタン環、シクロデカン環、シクロドデカン環、ノルボルナン環、イソボルナン環、アダマンタン環、シクロドデカン環、ジシクロペンタジエン環から水素原子を2つ除した基が挙げられる。骨格の剛直性の観点から、ジシクロペンタジエン環、アダマンタン環から水素原子を2つ除した基が好ましい。
Examples of the divalent linear aliphatic group include methylene group, ethylene group, n-propylene group, n-butylene group, n-pentylene group, n-hexylene group, and n-heptylene group. From the viewpoint of the rigidity of the skeleton, a methylene group is preferred.
The divalent branched aliphatic group includes, for example, a methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group as a side chain in addition to the above-mentioned divalent linear aliphatic group. Examples include structures having a group, an isobutyl group, a sec-butyl group, and a tert-butyl group.
The number of rings that the divalent cyclic aliphatic group has is not particularly limited, but is preferably 1 or more, and more preferably 2 or more. Moreover, 12 or less is preferable, and 10 or less is more preferable. When the amount is equal to or more than the lower limit, the film tends to be strong and have good adhesion to the substrate. By setting it below the above-mentioned upper limit, deterioration of sensitivity and film thinning during development can be easily suppressed, and resolution tends to improve.
The above upper and lower limits can be arbitrarily combined. For example, it may be from 1 to 12, or from 2 to 10.
Examples of the divalent cyclic aliphatic group include two hydrogen atoms from a cyclohexane ring, cycloheptane ring, cyclodecane ring, cyclododecane ring, norbornane ring, isobornane ring, adamantane ring, cyclododecane ring, and dicyclopentadiene ring. Examples include groups that have been removed. From the viewpoint of skeleton rigidity, a group obtained by removing two hydrogen atoms from a dicyclopentadiene ring or an adamantane ring is preferable.
 2価の脂肪族基が有していてもよい置換基としては、例えば、メトキシ基、エトキシ基等の炭素数1~5のアルコキシ基;水酸基;ニトロ基;シアノ基;カルボキシ基が挙げられる。合成容易性の観点から、無置換であることが好ましい。 Examples of the substituent that the divalent aliphatic group may have include an alkoxy group having 1 to 5 carbon atoms such as a methoxy group and an ethoxy group; a hydroxyl group; a nitro group; a cyano group; and a carboxy group. From the viewpoint of ease of synthesis, it is preferable that it is unsubstituted.
(m、n)
 式(d1-II)において、m及びnは各々独立に0~2の整数を表す。前記下限値以上とすることでパターニング適正が良好となり、現像時に生じる表面荒れが生じにくくなる傾向があり、また、前記上限値以下とすることで現像性が良好となる傾向がある。現像性の観点からm及びnが0であることが好ましい。パターニング適正、現像時に生じる表面荒れを抑制する観点からm及びnが1以上であることが好ましい。
(m, n)
In formula (d1-II), m and n each independently represent an integer of 0 to 2. When the amount is at least the lower limit, patterning becomes more appropriate and surface roughness that occurs during development tends to be less likely to occur, and when the amount is at most the upper limit, the developability tends to be good. From the viewpoint of developability, m and n are preferably 0. From the viewpoint of appropriate patterning and suppressing surface roughness that occurs during development, m and n are preferably 1 or more.
 式(d1-II)で表される部分構造は、基板への密着性の観点から、下記一般式(d1-II-1)で表される部分構造であることが好ましい。 The partial structure represented by formula (d1-II) is preferably a partial structure represented by the following general formula (d1-II-1) from the viewpoint of adhesion to the substrate.
Figure JPOXMLDOC01-appb-C000016
Figure JPOXMLDOC01-appb-C000016
 式(d1-II-1)中、R13、R15、R16、m及びnは式(d1-II)と同義であり、Rαは、置換基を有していてもよい1価の環状炭化水素基を表し、pは1以上の整数を表し、*は結合手を表す。式(d1-II-1)中のベンゼン環は、さらに任意の置換基により置換されていてもよい。 In formula (d1-II-1), R 13 , R 15 , R 16 , m and n have the same meanings as in formula (d1-II), and R α is a monovalent group that may have a substituent. It represents a cyclic hydrocarbon group, p represents an integer of 1 or more, and * represents a bond. The benzene ring in formula (d1-II-1) may be further substituted with any substituent.
(Rα
 式(d1-II-1)において、Rαは、置換基を有していてもよい1価の環状炭化水素基を表す。
 環状炭化水素基としては、脂肪族環基又は芳香族環基が挙げられる。
( )
In formula (d1-II-1), R α represents a monovalent cyclic hydrocarbon group which may have a substituent.
Examples of the cyclic hydrocarbon group include an aliphatic ring group and an aromatic ring group.
 脂肪族環基が有する環の数は特に限定されないが、1以上が好ましく、2以上がより好ましい。また、6以下が好ましく、4以下がより好ましく、3以下がさらに好ましい。前記下限値以上とすることで強固な膜が得られやすく、現像時に生じる表面荒れが生じにくくなる傾向がある。前記上限値以下とすることでパターニング特性が良好となる傾向がある。上記の上限及び下限は任意に組み合わせることができる。例えば、1~6であってよく、1~4であってよく、1~3であってよく、2~3であってよい。
 脂肪族環基の炭素数は特に限定されないが、4以上が好ましく、6以上がより好ましく、8以上がさらに好ましい。また、40以下が好ましく、30以下がより好ましく、20以下がさらに好ましく、15以下が特に好ましい。前記下限値以上とすることで強固な膜が得られやすく、現像時に生じる表面荒れが生じにくくなる傾向がある。前記上限値以下とすることでパターニング特性が良好となる傾向がある。上記の上限及び下限は任意に組み合わせることができる。例えば、4~40であってよく、4~30であってよく、6~20であってよく、8~15であってよい。
 脂肪族環基における脂肪族環としては、例えば、シクロヘキサン環、シクロヘプタン環、シクロデカン環、シクロドデカン環、ノルボルナン環、イソボルナン環、アダマンタン環、シクロドデカン環が挙げられる。強固な膜特性の観点から、アダマンタン環が好ましい。
The number of rings that the aliphatic cyclic group has is not particularly limited, but is preferably one or more, and more preferably two or more. Further, it is preferably 6 or less, more preferably 4 or less, and even more preferably 3 or less. When the amount is equal to or more than the lower limit, a strong film can be easily obtained, and surface roughness that occurs during development tends to be less likely to occur. By setting it below the above-mentioned upper limit, patterning characteristics tend to be improved. The above upper and lower limits can be arbitrarily combined. For example, it may be from 1 to 6, it may be from 1 to 4, it may be from 1 to 3, it may be from 2 to 3.
The number of carbon atoms in the aliphatic cyclic group is not particularly limited, but is preferably 4 or more, more preferably 6 or more, and even more preferably 8 or more. Further, it is preferably 40 or less, more preferably 30 or less, even more preferably 20 or less, and particularly preferably 15 or less. When the amount is equal to or more than the lower limit, a strong film can be easily obtained, and surface roughness that occurs during development tends to be less likely to occur. By setting it below the above-mentioned upper limit, patterning characteristics tend to be improved. The above upper and lower limits can be arbitrarily combined. For example, it may be between 4 and 40, between 4 and 30, between 6 and 20, and between 8 and 15.
Examples of the aliphatic ring in the aliphatic ring group include a cyclohexane ring, a cycloheptane ring, a cyclodecane ring, a cyclododecane ring, a norbornane ring, an isobornane ring, an adamantane ring, and a cyclododecane ring. From the viewpoint of strong film properties, an adamantane ring is preferred.
 芳香族環基が有する環の数は特に限定されないが、1以上が好ましく、2以上が好ましく、3以上がより好ましい。また、10以下が好ましく、5以下がより好ましい。前記下限値以上とすることで強固な膜が得られやすく、現像時に生じる表面荒れが生じにくくなる傾向がある。前記上限値以下とすることでパターニング特性が良好となる傾向がある。上記の上限及び下限は任意に組み合わせることができる。例えば、1~10であってよく、1~5であってよく、2~5であってよく、3~5であってよい。
 芳香族環基としては、芳香族炭化水素環基、芳香族複素環基が挙げられる。また、芳香族環基の炭素数は特に限定されないが、4以上が好ましく、5以上がより好ましく、6以上がさらに好ましい。また、30以下が好ましく、20以下がより好ましく、15以下がさらに好ましい。前記下限値以上とすることで強固な膜が得られやすく、現像時に生じる表面荒れが生じにくくなる傾向がある。前記上限値以下とすることでパターニング特性が良好となる傾向がある。上記の上限及び下限は任意に組み合わせることができる。例えば、4~30であってよく、5~20であってよく、6~15であってよい。
 芳香族環基における芳香族環としては、ベンゼン環、ナフタレン環、アントラセン環、フェナントレン環、フルオレン環が挙げられる。現像溶解性の観点から、フルオレン環が好ましい。
The number of rings that the aromatic ring group has is not particularly limited, but is preferably 1 or more, preferably 2 or more, and more preferably 3 or more. Moreover, 10 or less is preferable, and 5 or less is more preferable. When the amount is at least the lower limit, a strong film can be easily obtained, and surface roughness that occurs during development tends to be less likely to occur. By setting it below the above-mentioned upper limit, patterning characteristics tend to be improved. The above upper and lower limits can be arbitrarily combined. For example, it may be from 1 to 10, it may be from 1 to 5, it may be from 2 to 5, it may be from 3 to 5.
Examples of the aromatic ring group include an aromatic hydrocarbon ring group and an aromatic heterocyclic group. Further, the number of carbon atoms in the aromatic ring group is not particularly limited, but is preferably 4 or more, more preferably 5 or more, and even more preferably 6 or more. Further, it is preferably 30 or less, more preferably 20 or less, and even more preferably 15 or less. When the amount is at least the lower limit, a strong film can be easily obtained, and surface roughness that occurs during development tends to be less likely to occur. By setting it below the above-mentioned upper limit, patterning characteristics tend to be improved. The above upper and lower limits can be arbitrarily combined. For example, it may be between 4 and 30, between 5 and 20, and between 6 and 15.
Examples of the aromatic ring in the aromatic ring group include a benzene ring, a naphthalene ring, an anthracene ring, a phenanthrene ring, and a fluorene ring. From the viewpoint of development solubility, a fluorene ring is preferred.
 環状炭化水素基が有していてもよい置換基としては、例えば、メチル基、エチル基、n-プロピル基、イソプロピル基、n-ブチル基、sec-ブチル基、tert-ブチル基、アミル基、イソアミル基等の炭素数1~5のアルキル基;メトキシ基、エトキシ基等の炭素数1~5のアルコキシ基;水酸基;ニトロ基;シアノ基;カルボキシ基が挙げられる。合成の容易性の観点から、無置換が好ましい。 Examples of substituents that the cyclic hydrocarbon group may have include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, sec-butyl group, tert-butyl group, amyl group, Examples include alkyl groups having 1 to 5 carbon atoms such as isoamyl group; alkoxy groups having 1 to 5 carbon atoms such as methoxy group and ethoxy group; hydroxyl group; nitro group; cyano group; and carboxy group. From the viewpoint of ease of synthesis, no substitution is preferred.
 pは1以上の整数を表し、2以上が好ましい。また、3以下が好ましい。例えば、1~3が好ましく、2~3がより好ましい。前記下限値以上とすることで膜硬化度と残膜率が良好となる傾向がある。前記上限値以下とすることで現像性が良好となる傾向がある。 p represents an integer of 1 or more, preferably 2 or more. Moreover, 3 or less is preferable. For example, 1 to 3 are preferable, and 2 to 3 are more preferable. When the amount is equal to or more than the lower limit, the degree of film curing and the remaining film rate tend to be good. When the amount is below the upper limit, developability tends to be improved.
 強固な膜硬化度の観点から、Rαが1価の脂肪族環基であることが好ましく、アダマンチル基であることがより好ましい。 From the viewpoint of strong film hardening, R α is preferably a monovalent aliphatic cyclic group, and more preferably an adamantyl group.
 式(d1-II-1)中のベンゼン環は、さらに任意の置換基により置換されていてもよい。置換基としては、例えば、ヒドロキシ基、メチル基、メトキシ基、エチル基、エトキシ基、プロピル基、プロポキシ基が挙げられる。置換基の数も特に限定されず、1つでもよいし、2つ以上でもよい。
 パターニング特性の観点から、無置換であることが好ましい。
The benzene ring in formula (d1-II-1) may be further substituted with any substituent. Examples of the substituent include a hydroxy group, a methyl group, a methoxy group, an ethyl group, an ethoxy group, a propyl group, and a propoxy group. The number of substituents is not particularly limited either, and may be one or two or more.
From the viewpoint of patterning properties, it is preferable that no substitution be made.
 以下に、式(d1-II-1)で表される部分構造の具体例を挙げる。 Specific examples of the partial structure represented by formula (d1-II-1) are listed below.
Figure JPOXMLDOC01-appb-C000017
Figure JPOXMLDOC01-appb-C000017
Figure JPOXMLDOC01-appb-C000018
Figure JPOXMLDOC01-appb-C000018
Figure JPOXMLDOC01-appb-C000019
Figure JPOXMLDOC01-appb-C000019
Figure JPOXMLDOC01-appb-C000020
Figure JPOXMLDOC01-appb-C000020
Figure JPOXMLDOC01-appb-C000021
Figure JPOXMLDOC01-appb-C000021
 式(d1-II)で表される部分構造は、骨格の剛直性、及び膜疎水化の観点から、下記一般式(d1-II-2)で表される部分構造であることが好ましい。 The partial structure represented by the formula (d1-II) is preferably a partial structure represented by the following general formula (d1-II-2) from the viewpoint of skeleton rigidity and membrane hydrophobization.
Figure JPOXMLDOC01-appb-C000022
Figure JPOXMLDOC01-appb-C000022
 式(d1-II-2)中、R13、R15、R16、m及びnは、式(d1-II)と同義であり、Rβは、置換基を有していてもよい2価の環状炭化水素基を表し、*は結合手を表す。
 式(d1-II-2)中のベンゼン環は、さらに任意の置換基により置換されていてもよい。
In formula (d1-II-2), R 13 , R 15 , R 16 , m and n have the same meanings as in formula (d1-II), and R β is a divalent group which may have a substituent. represents a cyclic hydrocarbon group, and * represents a bond.
The benzene ring in formula (d1-II-2) may be further substituted with any substituent.
 (Rβ
 式(d1-II-2)において、Rβは、置換基を有していてもよい2価の環状炭化水素基を表す。
 環状炭化水素基としては、脂肪族環基又は芳香族環基が挙げられる。
( )
In formula (d1-II-2), R β represents a divalent cyclic hydrocarbon group which may have a substituent.
Examples of the cyclic hydrocarbon group include an aliphatic ring group and an aromatic ring group.
 脂肪族環基が有する環の数は特に限定されないが、1以上が好ましく、2以上がより好ましい。また、10以下が好ましく、5以下がより好ましい。前記下限値以上とすることで強固な膜が得られやすく、現像時に生じる表面荒れが生じにくくなる傾向がある。前記上限値以下とすることで感度の悪化や現像時の膜減りを抑制しやすく、解像性が向上する傾向がある。上記の上限及び下限は任意に組み合わせることができる。例えば、1~10であってよく、2~5であってよい。
 脂肪族環基の炭素数は4以上が好ましく、6以上がより好ましく、8以上がさらに好ましい。また、40以下が好ましく、35以下がより好ましく、30以下がさらに好ましい。前記下限値以上とすることで現像時の膜表面の荒れを抑制する傾向がある。前記上限値以下とすることで感度の悪化や現像時の膜減りを抑制しやすく、解像性が向上する傾向がある。上記の上限及び下限は任意に組み合わせることができる。例えば、4~40であってよく、6~35であってよく、8~30であってよい。
 脂肪族環基における脂肪族環としては、例えば、シクロヘキサン環、シクロヘプタン環、シクロデカン環、シクロドデカン環、ノルボルナン環、イソボルナン環、アダマンタン環、シクロドデカン環が挙げられる。現像時の膜減り、解像性の観点から、アダマンタン環が好ましい。
The number of rings that the aliphatic cyclic group has is not particularly limited, but is preferably one or more, and more preferably two or more. Moreover, 10 or less is preferable, and 5 or less is more preferable. When the amount is at least the lower limit, a strong film can be easily obtained, and surface roughness that occurs during development tends to be less likely to occur. By setting it below the above-mentioned upper limit, deterioration of sensitivity and film thinning during development can be easily suppressed, and resolution tends to improve. The above upper and lower limits can be arbitrarily combined. For example, it may be from 1 to 10, or from 2 to 5.
The number of carbon atoms in the aliphatic cyclic group is preferably 4 or more, more preferably 6 or more, and even more preferably 8 or more. Further, it is preferably 40 or less, more preferably 35 or less, and even more preferably 30 or less. By setting it above the lower limit value, there is a tendency to suppress roughness of the film surface during development. By setting it below the above-mentioned upper limit, deterioration of sensitivity and film thinning during development can be easily suppressed, and resolution tends to improve. The above upper and lower limits can be arbitrarily combined. For example, it may be 4-40, 6-35, or 8-30.
Examples of the aliphatic ring in the aliphatic ring group include a cyclohexane ring, a cycloheptane ring, a cyclodecane ring, a cyclododecane ring, a norbornane ring, an isobornane ring, an adamantane ring, and a cyclododecane ring. From the viewpoint of film loss during development and resolution, an adamantane ring is preferred.
 芳香族環基が有する環の数は特に限定されないが、1以上が好ましく、2以上がより好ましく、3以上がさらに好ましい。また、10以下が好ましく、5以下がより好ましい。前記下限値以上とすることで強固な膜が得られやすく、現像時に生じる表面荒れが生じにくくなる傾向がある。前記上限値以下とすることで感度の悪化や膜減りを抑制しやすく、解像性が向上する傾向がある。上記の上限及び下限は任意に組み合わせることができる。例えば、1~10であってよく、1~5であってよく、2~5であってよく、3~5であってよい。
 芳香族環基としては、芳香族炭化水素環基、芳香族複素環基が挙げられる。
 芳香族環基の炭素数は4以上が好ましく、6以上がより好ましく、8以上がさらに好ましく、10以上がよりさらに好ましい。また、40以下が好ましく、30以下がより好ましく、20以下がさらに好ましく、15以下が特に好ましい。前記下限値以上とすることで強固な膜が得られやすく、現像時に生じる表面荒れが生じにくくなる傾向がある。前記上限値以下とすることで感度の悪化や膜減りを抑制しやすく、解像性が向上する傾向がある。上記の上限及び下限は任意に組み合わせることができる。例えば、4~40であってよく、6~30であってよく、8~20であってよく、10~15であってよい。
 芳香族環基における芳香族環としては、例えば、ベンゼン環、ナフタレン環、アントラセン環、フェナントレン環、フルオレン環が挙げられる。現像性の観点から、フルオレン環が好ましい。
The number of rings that the aromatic ring group has is not particularly limited, but is preferably 1 or more, more preferably 2 or more, and even more preferably 3 or more. Moreover, 10 or less is preferable, and 5 or less is more preferable. When the amount is equal to or more than the lower limit, a strong film can be easily obtained, and surface roughness that occurs during development tends to be less likely to occur. By setting it below the above-mentioned upper limit value, deterioration of sensitivity and film thinning can be easily suppressed, and resolution tends to improve. The above upper and lower limits can be arbitrarily combined. For example, it may be from 1 to 10, it may be from 1 to 5, it may be from 2 to 5, it may be from 3 to 5.
Examples of the aromatic ring group include an aromatic hydrocarbon ring group and an aromatic heterocyclic group.
The number of carbon atoms in the aromatic ring group is preferably 4 or more, more preferably 6 or more, even more preferably 8 or more, and even more preferably 10 or more. Further, it is preferably 40 or less, more preferably 30 or less, even more preferably 20 or less, and particularly preferably 15 or less. When the amount is equal to or more than the lower limit, a strong film can be easily obtained, and surface roughness that occurs during development tends to be less likely to occur. By setting it below the above-mentioned upper limit value, deterioration of sensitivity and film thinning can be easily suppressed, and resolution tends to improve. The above upper and lower limits can be arbitrarily combined. For example, it may be 4-40, 6-30, 8-20, or 10-15.
Examples of the aromatic ring in the aromatic ring group include a benzene ring, a naphthalene ring, an anthracene ring, a phenanthrene ring, and a fluorene ring. From the viewpoint of developability, a fluorene ring is preferred.
 環状炭化水素基が有していてもよい置換基としては、例えば、メチル基、エチル基、n-プロピル基、イソプロピル基、n-ブチル基、sec-ブチル基、tert-ブチル基、アミル基、イソアミル基等の炭素数1~5のアルキル基;メトキシ基、エトキシ基等の炭素数1~5のアルコキシ基;水酸基;ニトロ基;シアノ基;カルボキシ基が挙げられる。合成の簡易性の観点から、無置換が好ましい。 Examples of substituents that the cyclic hydrocarbon group may have include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, sec-butyl group, tert-butyl group, amyl group, Examples include alkyl groups having 1 to 5 carbon atoms such as isoamyl group; alkoxy groups having 1 to 5 carbon atoms such as methoxy group and ethoxy group; hydroxyl group; nitro group; cyano group; and carboxy group. From the viewpoint of ease of synthesis, no substitution is preferred.
 膜減りの抑制、解像性の観点から、Rβが2価の脂肪族環基であることが好ましく、2価のアダマンタン環基であることがより好ましい。一方で、パターニング特性の観点から、Rβが2価の芳香族環基であることが好ましく、2価のフルオレン環基であることがより好ましい。 From the viewpoints of suppressing film thinning and resolution, R β is preferably a divalent aliphatic cyclic group, and more preferably a divalent adamantane cyclic group. On the other hand, from the viewpoint of patterning properties, R β is preferably a divalent aromatic ring group, and more preferably a divalent fluorene ring group.
 式(d1-II-2)中のベンゼン環は、さらに任意の置換基により置換されていてもよい。置換基としては、例えば、ヒドロキシ基、メチル基、メトキシ基、エチル基、エトキシ基、プロピル基、プロポキシ基が挙げられる。置換基の数も特に限定されず、1つでもよいし、2つ以上でもよい。
 また、式(d1-II-2)中の2つのベンゼン環はRβを介して連結しているところ、さらに、置換基を介して連結して三環構造を形成していてもよい。この場合の置換基としては、-O-、-S-、-NH-、-CH-等の2価の基が挙げられる。例えば、-O-を介して連結して三環構造を形成するとは、それぞれのベンゼン環上でRβに結合する炭素原子のオルト位の炭素原子同士が-O-を介して連結して、キサンテン骨格を形成することを意味する。
 パターニング特性の観点から、無置換であることが好ましい。また、膜減り等を生じにくくする観点から、メチル基置換であることが好ましい。
The benzene ring in formula (d1-II-2) may be further substituted with any substituent. Examples of the substituent include a hydroxy group, a methyl group, a methoxy group, an ethyl group, an ethoxy group, a propyl group, and a propoxy group. The number of substituents is not particularly limited either, and may be one or two or more.
Further, the two benzene rings in formula (d1-II-2) are connected via R β , and may be further connected via a substituent to form a tricyclic structure. Examples of the substituent in this case include divalent groups such as -O-, -S-, -NH-, and -CH 2 -. For example, to form a tricyclic structure by connecting via -O- means that the carbon atoms at the ortho position of the carbon atom bonded to R β on each benzene ring are connected via -O-, It means forming a xanthene skeleton.
From the viewpoint of patterning properties, it is preferable that no substitution be made. Furthermore, from the viewpoint of making film thinning less likely to occur, methyl group substitution is preferable.
 以下に式(d1-II-2)で表される部分構造の具体例を挙げる。なお、例中の*は結合手を示す。 Specific examples of the partial structure represented by formula (d1-II-2) are listed below. Note that * in the examples indicates a bond.
Figure JPOXMLDOC01-appb-C000023
Figure JPOXMLDOC01-appb-C000023
Figure JPOXMLDOC01-appb-C000024
Figure JPOXMLDOC01-appb-C000024
Figure JPOXMLDOC01-appb-C000025
Figure JPOXMLDOC01-appb-C000025
Figure JPOXMLDOC01-appb-C000026
Figure JPOXMLDOC01-appb-C000026
 式(d1-II)で表される部分構造は、塗膜残膜率とパターニング特性の観点から、下記一般式(d1-II-3)で表される部分構造であることが好ましい。 The partial structure represented by the formula (d1-II) is preferably a partial structure represented by the following general formula (d1-II-3) from the viewpoint of coating film remaining rate and patterning characteristics.
Figure JPOXMLDOC01-appb-C000027
Figure JPOXMLDOC01-appb-C000027
 式(d1-II-3)中、R13、R14、R15、R16、m及びnは、式(d1-II)と同義であり、Rは水素原子又は多塩基酸残基を表す。 In formula (d1-II-3), R 13 , R 14 , R 15 , R 16 , m and n have the same meanings as in formula (d1-II), and R Z represents a hydrogen atom or a polybasic acid residue. represent.
 多塩基酸残基とは、多塩基酸からOH基を1つ除した1価の基を意味する。なお、さらにもう1つのOH基が除され、式(d1-II-3)で表される他の分子におけるRと共用されていてもよい。つまり、Rを介して複数の式(d1-II-3)が連結していてもよい。
 多塩基酸としては、例えば、マレイン酸、コハク酸、イタコン酸、フタル酸、テトラヒドロフタル酸、ヘキサヒドロフタル酸、ピロメリット酸、トリメリット酸、ベンゾフェノンテトラカルボン酸、メチルヘキサヒドロフタル酸、エンドメチレンテトラヒドロフタル酸、クロレンド酸、メチルテトラヒドロフタル酸、ビフェニルテトラカルボン酸が挙げられる。
 パターニング特性の観点から、好ましくは、マレイン酸、コハク酸、イタコン酸、フタル酸、テトラヒドロフタル酸、ヘキサヒドロフタル酸、ピロメリット酸、トリメリット酸、ビフェニルテトラカルボン酸であり、より好ましくは、テトラヒドロフタル酸、ビフェニルテトラカルボン酸、ビフェニルテトラカルボン酸である。
The polybasic acid residue means a monovalent group obtained by removing one OH group from a polybasic acid. Note that one more OH group may be removed and shared with R Z in another molecule represented by formula (d1-II-3). That is, a plurality of formulas (d1-II-3) may be connected via R Z.
Examples of polybasic acids include maleic acid, succinic acid, itaconic acid, phthalic acid, tetrahydrophthalic acid, hexahydrophthalic acid, pyromellitic acid, trimellitic acid, benzophenonetetracarboxylic acid, methylhexahydrophthalic acid, and endomethylene. Examples include tetrahydrophthalic acid, chlorendic acid, methyltetrahydrophthalic acid, and biphenyltetracarboxylic acid.
From the viewpoint of patterning properties, maleic acid, succinic acid, itaconic acid, phthalic acid, tetrahydrophthalic acid, hexahydrophthalic acid, pyromellitic acid, trimellitic acid, biphenyltetracarboxylic acid are preferable, and tetrahydrophthalic acid is more preferable. They are phthalic acid, biphenyltetracarboxylic acid, and biphenyltetracarboxylic acid.
 (d1-II)エポキシ(メタ)アクリレート系樹脂1分子中に含まれる、式(d1-II-3)で表される部分構造は、1種でも2種以上でもよく、例えば、Rが水素原子のものと、Rが多塩基酸残基のものが混在していてもよい。 (d1-II) The partial structure represented by formula (d1-II-3) contained in one molecule of epoxy (meth)acrylate resin may be one type or two or more types. For example, when R Z is hydrogen There may be a mixture of atoms and those in which R Z is a polybasic acid residue.
 (d1-II)エポキシ(メタ)アクリレート系樹脂1分子中に含まれる、式(d1-II)で表される部分構造の数は特に限定されないが、1以上が好ましく、3以上がより好ましい。また、20以下が好ましく、15以下がより好ましく、10以下がさらに好ましい。前記下限値以上とすることで強固な膜が得られやすく、現像時に生じる表面荒れが生じにくくなる傾向がある。前記上限値以下とすることで感度の悪化や膜減りを抑制しやすく、解像性が向上する傾向がある。上記の上限及び下限は任意に組み合わせることができる。例えば、1~20であってよく、1~15であってよく、3~10であってよい。 (d1-II) The number of partial structures represented by formula (d1-II) contained in one molecule of the epoxy (meth)acrylate resin is not particularly limited, but is preferably 1 or more, more preferably 3 or more. Further, it is preferably 20 or less, more preferably 15 or less, and even more preferably 10 or less. When the amount is equal to or more than the lower limit, a strong film can be easily obtained, and surface roughness that occurs during development tends to be less likely to occur. By setting it below the above-mentioned upper limit value, deterioration of sensitivity and film thinning can be easily suppressed, and resolution tends to improve. The above upper and lower limits can be arbitrarily combined. For example, it may be from 1 to 20, it may be from 1 to 15, it may be from 3 to 10.
 (d1-II)エポキシ(メタ)アクリレート系樹脂の、ゲルパーミエーションクロマトグラフィー(GPC)で測定したポリスチレン換算の重量平均分子量(Mw)は特に限定されないが、1000以上が好ましく、1500以上がより好ましく、2000以上がさらに好ましく、3000以上がよりさらに好ましく、4000以上がことさらに好ましく、5000以上が特に好ましい。また10000以下が好ましく、8000以下がより好ましく、7000以下がさらに好ましい。前記下限値以上とすることで感光性着色組成物の残膜率が良好となる傾向がある。前記上限値以下とすることで現像液に対する溶解性が良好となる傾向がある。上記の上限及び下限は任意に組み合わせることができる。例えば、1000~10000であってよく、1500~10000であってよく、1500~8000であってよく、2000~8000であってよく、2000~7000であってよい。 (d1-II) The weight average molecular weight (Mw) of the epoxy (meth)acrylate resin measured by gel permeation chromatography (GPC) in terms of polystyrene is not particularly limited, but is preferably 1000 or more, more preferably 1500 or more. , more preferably 2000 or more, even more preferably 3000 or more, even more preferably 4000 or more, particularly preferably 5000 or more. Further, it is preferably 10,000 or less, more preferably 8,000 or less, and even more preferably 7,000 or less. When the amount is equal to or more than the lower limit, the remaining film rate of the photosensitive coloring composition tends to be good. When the content is below the upper limit, the solubility in the developer tends to be improved. The above upper and lower limits can be arbitrarily combined. For example, it may be 1000-10000, 1500-10000, 1500-8000, 2000-8000, 2000-7000.
 (d1-II)エポキシ(メタ)アクリレート系樹脂の酸価は特に限定されないが、20mgKOH/g以上が好ましく、40mgKOH/g以上がより好ましく、60mgKOH/g以上がさらに好ましく、80mgKOH/g以上がよりさらに好ましく、100mgKOH/g以上が特に好ましい。また、200mgKOH/g以下が好ましく、150mgKOH/g以下がより好ましく、130mgKOH/g以下がよりさらに好ましく、120mgKOH/g以下が特に好ましい。前記下限値以上とすることで現像溶解性が向上し、解像性が良好となる傾向がある。前記上限値以下とすることで感光性着色組成物の残膜率が良好となる傾向がある。上記の上限及び下限は任意に組み合わせることができる。例えば、20mgKOH/g~200mgKOH/gであってよく、60mgKOH/g~150mgKOH/gであってよく、80mgKOH/g~130mgKOH/gであってよく、100mgKOH/g~130mgKOH/gであってよい。 (d1-II) The acid value of the epoxy (meth)acrylate resin is not particularly limited, but is preferably 20 mgKOH/g or more, more preferably 40 mgKOH/g or more, even more preferably 60 mgKOH/g or more, and even more preferably 80 mgKOH/g or more. More preferably, 100 mgKOH/g or more is particularly preferable. Moreover, 200 mgKOH/g or less is preferable, 150 mgKOH/g or less is more preferable, 130 mgKOH/g or less is even more preferable, and 120 mgKOH/g or less is particularly preferable. When the amount is at least the lower limit, development solubility tends to improve and resolution tends to improve. By setting it below the above upper limit, the residual film rate of the photosensitive coloring composition tends to be good. The above upper and lower limits can be arbitrarily combined. For example, it may be 20 mgKOH/g to 200 mgKOH/g, it may be 60 mgKOH/g to 150 mgKOH/g, it may be 80 mgKOH/g to 130 mgKOH/g, it may be 100 mgKOH/g to 130 mgKOH/g.
 カルボキシ基含有エポキシ(メタ)アクリレート系樹脂は、1種を単独で用いても、2種以上の樹脂を併用してもよい。
 また、前述のカルボキシ基含有エポキシ(メタ)アクリレート系樹脂の一部を、他のバインダー樹脂に置き換えて用いてもよい。即ち、カルボキシ基含有エポキシ(メタ)アクリレート系樹脂と他のバインダー樹脂を併用してもよい。この場合において、(b)アルカリ可溶性樹脂におけるカルボキシ基含有エポキシ(メタ)アクリレート系樹脂の割合を、50質量%以上とすることが好ましく、60質量%以上とすることがより好ましく、70質量%以上とすることがさらに好ましく、80質量%以上とすることが特に好ましく、100質量%以下であってよい。
The carboxyl group-containing epoxy (meth)acrylate resin may be used alone or in combination of two or more.
Further, a part of the above-mentioned carboxyl group-containing epoxy (meth)acrylate resin may be replaced with another binder resin. That is, a carboxyl group-containing epoxy (meth)acrylate resin and another binder resin may be used in combination. In this case, the proportion of the carboxyl group-containing epoxy (meth)acrylate resin in the alkali-soluble resin (b) is preferably 50% by mass or more, more preferably 60% by mass or more, and 70% by mass or more. It is more preferable to set it as 80 mass % or more, and it is especially preferable to set it as 100 mass % or less.
 <(D2)アクリル共重合樹脂>
 (D)アルカリ可溶性樹脂として、顔料や分散剤等との相溶性の観点から、(D2)アクリル共重合樹脂を用いることが好ましく、日本国特開2014-137466号公報に記載の樹脂を好ましく用いることができる。
<(D2) Acrylic copolymer resin>
(D) As the alkali-soluble resin, from the viewpoint of compatibility with pigments, dispersants, etc., it is preferable to use (D2) acrylic copolymer resin, and the resin described in Japanese Patent Application Publication No. 2014-137466 is preferably used. be able to.
 (D2)アクリル共重合樹脂としては、例えば、1個以上のカルボキシ基を有するエチレン性不飽和単量体(以下、「不飽和単量体(d2-1)」という。)と他の共重合可能なエチレン性不飽和単量体(以下、「不飽和単量体(d2-2)」という。)との共重合体を挙げることができる。 (D2) As the acrylic copolymer resin, for example, an ethylenically unsaturated monomer having one or more carboxyl groups (hereinafter referred to as "unsaturated monomer (d2-1)") and other copolymers Examples include copolymers with possible ethylenically unsaturated monomers (hereinafter referred to as "unsaturated monomers (d2-2)").
 不飽和単量体(d2-1)としては、例えば、(メタ)アクリル酸、クロトン酸、α-クロルアクリル酸、けい皮酸等の不飽和モノカルボン酸;マレイン酸、無水マレイン酸、フマル酸、シトラコン酸、無水シトラコン酸、メサコン酸等の不飽和ジカルボン酸又はその無水物;こはく酸モノ〔2-(メタ)アクリロイロキシエチル〕、フタル酸モノ〔2-(メタ)アクリロイロキシエチル〕等の2価以上の多価カルボン酸のモノ〔(メタ)アクリロイロキシアルキル〕エステル;ω-カルボキシポリカプロラクトンモノ(メタ)アクリレート等の両末端にカルボキシ基と水酸基とを有するポリマーのモノ(メタ)アクリレート;p-ビニル安息香酸を挙げることができる。
 これらの不飽和単量体(d2-1)は、単独で又は2種以上を併用することができる。
Examples of the unsaturated monomer (d2-1) include unsaturated monocarboxylic acids such as (meth)acrylic acid, crotonic acid, α-chloroacrylic acid, and cinnamic acid; maleic acid, maleic anhydride, and fumaric acid. , citraconic acid, citraconic anhydride, mesaconic acid, and other unsaturated dicarboxylic acids or their anhydrides; succinic acid mono[2-(meth)acryloyloxyethyl], phthalate mono[2-(meth)acryloyloxyethyl] mono(meth)acryloyloxyalkyl]esters of divalent or higher polycarboxylic acids such as mono(meth)acryloyloxyalkyl esters of polyvalent carboxylic acids having a carboxylic acid group and a hydroxyl group at both ends such as ω-carboxypolycaprolactone ) Acrylate; p-vinylbenzoic acid can be mentioned.
These unsaturated monomers (d2-1) can be used alone or in combination of two or more.
 不飽和単量体(d2-2)としては、例えば、
N-フェニルマレイミド、N-シクロヘキシルマレイミド等のN-置換マレイミド;
 スチレン、α-メチルスチレン、p-ヒドロキシスチレン、p-ヒドロキシ-α-メチルスチレン、p-ビニルベンジルグリシジルエーテル、アセナフチレン等の芳香族ビニル化合物;
 メチル(メタ)アクリレート、n-ブチル(メタ)アクリレート、2-エチルヘキシル(メタ)アクリレート、2-ヒドロキシエチル(メタ)アクリレート、アリル(メタ)アクリレート、ベンジル(メタ)アクリレート、ポリエチレングルコール(重合度2~10)メチルエーテル(メタ)アクリレート、ポリプロピレングルコール(重合度2~10)メチルエーテル(メタ)アクリレート、ポリエチレングリコール(重合度2~10)モノ(メタ)アクリレート、ポリプロピレングリコール(重合度2~10)モノ(メタ)アクリレート、シクロヘキシル(メタ)アクリレート、イソボルニル(メタ)アクリレート、トリシクロ[5.2.1.02,6]デカン-8-イル(メタ)アクリレート、ジシクロペンテニル(メタ)アクリレート、グリセロールモノ(メタ)アクリレート、4-ヒドロキシフェニル(メタ)アクリレート、パラクミルフェノールのエチレンオキサイド変性(メタ)アクリレート、グリシジル(メタ)アクリレート、3,4-エポキシシクロヘキシルメチル(メタ)アクリレート、3-〔(メタ)アクリロイルオキシメチル〕オキセタン、3-〔(メタ)アクリロイルオキシメチル〕-3-エチルオキセタン等の(メタ)アクリル酸エステル;
 シクロヘキシルビニルエーテル、イソボルニルビニルエーテル、トリシクロ[5.2.1.02,6]デカン-8-イルビニルエーテル、ペンタシクロペンタデカニルビニルエーテル、3-(ビニルオキシメチル)-3-エチルオキセタン等のビニルエーテル;
 ポリスチレン、ポリメチル(メタ)アクリレート、ポリ-n-ブチル(メタ)アクリレート、ポリシロキサン等の重合体分子鎖の末端にモノ(メタ)アクリロイル基を有するマクロモノマーを挙げることができる。
 これらの不飽和単量体(d2-2)は、単独で又は2種以上を併用することができる。
Examples of the unsaturated monomer (d2-2) include:
N-substituted maleimides such as N-phenylmaleimide and N-cyclohexylmaleimide;
Aromatic vinyl compounds such as styrene, α-methylstyrene, p-hydroxystyrene, p-hydroxy-α-methylstyrene, p-vinylbenzyl glycidyl ether, acenaphthylene;
Methyl (meth)acrylate, n-butyl (meth)acrylate, 2-ethylhexyl (meth)acrylate, 2-hydroxyethyl (meth)acrylate, allyl (meth)acrylate, benzyl (meth)acrylate, polyethylene glycol (polymerization degree 2 ~10) Methyl ether (meth)acrylate, polypropylene glycol (degree of polymerization 2-10) Methyl ether (meth)acrylate, polyethylene glycol (degree of polymerization 2-10) mono(meth)acrylate, polypropylene glycol (degree of polymerization 2-10) ) Mono(meth)acrylate, cyclohexyl(meth)acrylate, isobornyl(meth)acrylate, tricyclo[5.2.1.0 2,6 ]decane-8-yl(meth)acrylate, dicyclopentenyl(meth)acrylate, Glycerol mono(meth)acrylate, 4-hydroxyphenyl(meth)acrylate, ethylene oxide-modified (meth)acrylate of paracumylphenol, glycidyl(meth)acrylate, 3,4-epoxycyclohexylmethyl(meth)acrylate, 3-[( (meth)acrylic acid esters such as meth)acryloyloxymethyl]oxetane, 3-[(meth)acryloyloxymethyl]-3-ethyloxetane;
Vinyl ethers such as cyclohexyl vinyl ether, isobornyl vinyl ether, tricyclo[5.2.1.0 2,6 ]decane-8-yl vinyl ether, pentacyclopentadecanyl vinyl ether, 3-(vinyloxymethyl)-3-ethyloxetane, etc. ;
Examples include macromonomers having a mono(meth)acryloyl group at the end of a polymer molecular chain such as polystyrene, polymethyl(meth)acrylate, poly-n-butyl(meth)acrylate, and polysiloxane.
These unsaturated monomers (d2-2) can be used alone or in combination of two or more.
 不飽和単量体(d2-1)と不飽和単量体(d2-2)の共重合体において、不飽和単量体(d2-1)の共重合割合は、好ましくは5~50質量%、さらに好ましくは10~40質量%である。このような範囲で不飽和単量体(d2-1)を共重合させることにより、アルカリ現像性及び保存安定性に優れた感光性着色組成物を得ることができる傾向がある。 In the copolymer of unsaturated monomer (d2-1) and unsaturated monomer (d2-2), the copolymerization ratio of unsaturated monomer (d2-1) is preferably 5 to 50% by mass. , more preferably 10 to 40% by mass. By copolymerizing the unsaturated monomer (d2-1) within such a range, a photosensitive coloring composition with excellent alkali developability and storage stability tends to be obtained.
 不飽和単量体(d2-1)と不飽和単量体(d2-2)の共重合体としては、例えば、日本国特開平7-140654号公報、日本国特開平8-259876号公報、日本国特開平10-31308号公報、日本国特開平10-300922号公報、日本国特開平11-174224号公報、日本国特開平11-258415号公報、日本国特開2000-56118号公報、日本国特開2004-101728号公報に開示されている共重合体を挙げることができる。
 不飽和単量体(d2-1)と不飽和単量体(d2-2)の共重合体は、公知の方法により製造することができるが、例えば、日本国特開2003-222717号公報、日本国特開2006-259680号公報、国際公開第2007/029871号公報に開示されている方法により、その構造やMw、Mw/Mn(Mnは数平均分子量である。)を制御することもできる。
Examples of the copolymer of unsaturated monomer (d2-1) and unsaturated monomer (d2-2) include Japanese Patent Application Publication No. 7-140654, Japanese Patent Application Publication No. 8-259876, Japanese Unexamined Patent Publication No. 10-31308, Japanese Unexamined Patent Publication No. 10-300922, Unexamined Japanese Patent Application No. 11-174224, Unexamined Japanese Patent Application No. 11-258415, Unexamined Japanese Patent Application No. 2000-56118, Copolymers disclosed in Japanese Patent Application Publication No. 2004-101728 can be mentioned.
The copolymer of the unsaturated monomer (d2-1) and the unsaturated monomer (d2-2) can be produced by a known method, for example, Japanese Patent Application Publication No. 2003-222717, The structure, Mw, and Mw/Mn (Mn is the number average molecular weight) can also be controlled by the methods disclosed in Japanese Patent Application Publication No. 2006-259680 and International Publication No. 2007/029871. .
 国際公開第2016/194619号、国際公開第2017/154439号に記載の樹脂を用いてもよい。 The resins described in International Publication No. 2016/194619 and International Publication No. 2017/154439 may be used.
<(E)光重合性化合物>
 本発明の感光性樹脂組成物は、感度等の点から(E)光重合性化合物を含有する。
 (E)光重合性化合物としては、分子内にエチレン性不飽和基を少なくとも1個有する化合物(以下、「エチレン性単量体」と称することがある。)が挙げられる。具体的には、例えば、(メタ)アクリル酸、(メタ)アクリル酸アルキルエステル、アクリロニトリル、スチレン、及びエチレン性不飽和結合を1個有するカルボン酸と、多価又は1価アルコールのエステルが挙げられる。
<(E) Photopolymerizable compound>
The photosensitive resin composition of the present invention contains (E) a photopolymerizable compound from the viewpoint of sensitivity and the like.
(E) Examples of the photopolymerizable compound include compounds having at least one ethylenically unsaturated group in the molecule (hereinafter sometimes referred to as "ethylenic monomers"). Specific examples include (meth)acrylic acid, (meth)acrylic acid alkyl esters, acrylonitrile, styrene, and esters of carboxylic acids having one ethylenically unsaturated bond and polyhydric or monohydric alcohols. .
 (E)光重合性化合物としては、特に、1分子中にエチレン性不飽和基を2個以上有する多官能エチレン性単量体を使用することが好ましい。多官能エチレン性単量体におけるエチレン性不飽和基の数は、好ましくは3個以上、より好ましくは4個以上、さらに好ましくは5個以上、特に好ましくは6個以上、また、好ましくは10個以下、より好ましくは8個以下である。前記下限値以上とすることで感光性樹脂組成物が高感度となる傾向があり、また、前記上限値以下とすることで重合時の硬化収縮が小さくなる傾向がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、2~10個であってよく、3~10個であってよく、4~10個であってよく、5~8個であってよく、6~8個であってよい。
 多官能エチレン性単量体の例としては、例えば、脂肪族ポリヒドロキシ化合物と不飽和カルボン酸とのエステル;芳香族ポリヒドロキシ化合物と不飽和カルボン酸とのエステル;脂肪族ポリヒドロキシ化合物、芳香族ポリヒドロキシ化合物等の多価ヒドロキシ化合物と、不飽和カルボン酸及び多塩基性カルボン酸とのエステル化反応により得られるエステルが挙げられる。
(E) As the photopolymerizable compound, it is particularly preferable to use a polyfunctional ethylenic monomer having two or more ethylenically unsaturated groups in one molecule. The number of ethylenically unsaturated groups in the polyfunctional ethylenically monomer is preferably 3 or more, more preferably 4 or more, even more preferably 5 or more, particularly preferably 6 or more, and preferably 10. The number is more preferably 8 or less. When the amount is equal to or more than the lower limit, the photosensitive resin composition tends to have high sensitivity, and when it is equal to or less than the upper limit, curing shrinkage during polymerization tends to be reduced.
The above upper and lower limits can be arbitrarily combined. For example, the number may be 2 to 10, 3 to 10, 4 to 10, 5 to 8, or 6 to 8.
Examples of polyfunctional ethylenic monomers include, for example, esters of aliphatic polyhydroxy compounds and unsaturated carboxylic acids; esters of aromatic polyhydroxy compounds and unsaturated carboxylic acids; aliphatic polyhydroxy compounds, aromatic Examples include esters obtained by an esterification reaction between a polyhydric hydroxy compound such as a polyhydroxy compound, and an unsaturated carboxylic acid and a polybasic carboxylic acid.
 脂肪族ポリヒドロキシ化合物と不飽和カルボン酸とのエステルとしては、例えば、エチレングリコールジアクリレート、トリエチレングリコールジアクリレート、トリメチロールプロパントリアクリレート、トリメチロールエタントリアクリレート、ペンタエリスリトールジアクリレート、ペンタエリスリトールトリアクリレート、ペンタエリスリトールテトラアクリレート、ジペンタエリスリトールテトラアクリレート、ジペンタエリスリトールペンタアクリレート、ジペンタエリスリトールヘキサアクリレート、グリセロールアクリレート等の脂肪族ポリヒドロキシ化合物のアクリル酸エステル、これら例示化合物のアクリレートをメタクリレートに代えたメタクリル酸エステル、同様にイタコネートに代えたイタコン酸エステル、クロネートに代えたクロトン酸エステルもしくはマレエートに代えたマレイン酸エステルが挙げられる。 Examples of esters of aliphatic polyhydroxy compounds and unsaturated carboxylic acids include ethylene glycol diacrylate, triethylene glycol diacrylate, trimethylolpropane triacrylate, trimethylolethane triacrylate, pentaerythritol diacrylate, and pentaerythritol triacrylate. , acrylic acid esters of aliphatic polyhydroxy compounds such as pentaerythritol tetraacrylate, dipentaerythritol tetraacrylate, dipentaerythritol pentaacrylate, dipentaerythritol hexaacrylate, glycerol acrylate, and methacrylic acid obtained by replacing the acrylate of these exemplary compounds with methacrylate. Mention may also be made of esters, such as itaconic esters in place of itaconate, crotonic esters in place of cronate or maleic esters in place of maleate.
 芳香族ポリヒドロキシ化合物と不飽和カルボン酸とのエステルとしては、例えば、ハイドロキノンジアクリレート、ハイドロキノンジメタクリレート、レゾルシンジアクリレート、レゾルシンジメタクリレート、ピロガロールトリアクリレート等の芳香族ポリヒドロキシ化合物のアクリル酸エステル及びメタクリル酸エステルが挙げられる。
 多塩基性カルボン酸及び不飽和カルボン酸と、多価ヒドロキシ化合物のエステル化反応により得られるエステルとしては必ずしも単一物ではないが、代表的な具体例を挙げれば、アクリル酸、フタル酸、及びエチレングリコールの縮合物、アクリル酸、マレイン酸、及びジエチレングリコールの縮合物、メタクリル酸、テレフタル酸及びペンタエリスリトールの縮合物、アクリル酸、アジピン酸、ブタンジオール及びグリセリンの縮合物が挙げられる。
Examples of esters of aromatic polyhydroxy compounds and unsaturated carboxylic acids include acrylic esters and methacrylates of aromatic polyhydroxy compounds such as hydroquinone diacrylate, hydroquinone dimethacrylate, resorcin diacrylate, resorcin dimethacrylate, and pyrogallol triacrylate. Examples include acid esters.
Esters obtained by the esterification reaction of polybasic carboxylic acids and unsaturated carboxylic acids with polyhydric hydroxy compounds are not necessarily single, but typical examples include acrylic acid, phthalic acid, and Examples include condensates of ethylene glycol, acrylic acid, maleic acid, and diethylene glycol, condensates of methacrylic acid, terephthalic acid, and pentaerythritol, and condensates of acrylic acid, adipic acid, butanediol, and glycerin.
 その他、本発明に用いられる多官能エチレン性単量体の例としては、例えば、ポリイソシアネート化合物と水酸基含有(メタ)アクリル酸エステル又はポリイソシアネート化合物とポリオール及び水酸基含有(メタ)アクリル酸エステルを反応させて得られるようなウレタン(メタ)アクリレート類;多価エポキシ化合物とヒドロキシ(メタ)アクリレート又は(メタ)アクリル酸との付加反応物のようなエポキシアクリレート類;エチレンビスアクリルアミド等のアクリルアミド類;フタル酸ジアリル等のアリルエステル類;ジビニルフタレート等のビニル基含有化合物が有用である。
 これらは1種を単独で用いてもよく、2種以上を併用してもよい。
Other examples of polyfunctional ethylenic monomers used in the present invention include, for example, reacting a polyisocyanate compound with a hydroxyl group-containing (meth)acrylic ester or a polyisocyanate compound with a polyol and a hydroxyl group-containing (meth)acrylic ester. urethane (meth)acrylates such as those obtained by oxidation; epoxy acrylates such as addition reaction products of polyvalent epoxy compounds and hydroxy (meth)acrylate or (meth)acrylic acid; acrylamides such as ethylene bisacrylamide; phthal Allyl esters such as acid diallyl; vinyl group-containing compounds such as divinyl phthalate are useful.
These may be used alone or in combination of two or more.
 (E)光重合性化合物の含有割合は、特に限定されないが、感光性樹脂組成物の全固形分に対して、90質量%以下が好ましく、70質量%以下がより好ましく、50質量%以下がさらに好ましく、30質量%以下がよりさらに好ましく、20質量%以下が特に好ましく、10質量%以下が最も好ましく、また、1質量%以上が好ましく、5質量%以上がより好ましい。(E)光重合性化合物の含有割合が上記上限値以下であることで、露光部への現像液の浸透性が適度となり、良好な画像を得ることができる傾向にある。上記下限値以上であることで、紫外線照射による光硬化を向上させるとともにアルカリ現像性も良好となる傾向にある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、1~90質量%であってよく、1~70質量%であってよく、1~50質量%であってよく、5~30質量%であってよく、5~20質量%であってよく、5~10質量%であってよい。
(E) The content ratio of the photopolymerizable compound is not particularly limited, but is preferably 90% by mass or less, more preferably 70% by mass or less, and 50% by mass or less based on the total solid content of the photosensitive resin composition. It is more preferably 30% by mass or less, even more preferably 20% by mass or less, most preferably 10% by mass or less, further preferably 1% by mass or more, and more preferably 5% by mass or more. (E) When the content of the photopolymerizable compound is at most the above-mentioned upper limit, the permeability of the developer into the exposed area becomes appropriate, and a good image tends to be obtained. By being at least the above lower limit, photocuring by ultraviolet irradiation tends to be improved and alkali developability also tends to be good.
The above upper and lower limits can be arbitrarily combined. For example, it may be 1 to 90% by weight, 1 to 70% by weight, 1 to 50% by weight, 5 to 30% by weight, 5 to 20% by weight. It may well be between 5 and 10% by weight.
<(F)光重合開始剤>
 本発明の感光性樹脂組成物は(F)光重合開始剤を含有する。(F)光重合開始剤は光を直接吸収し、分解反応又は水素引き抜き反応を起こし、重合活性ラジカルを発生する機能を有する成分である。必要に応じて、増感色素等の付加剤を添加して使用してもよい。
<(F) Photopolymerization initiator>
The photosensitive resin composition of the present invention contains (F) a photopolymerization initiator. (F) The photopolymerization initiator is a component that directly absorbs light, causes a decomposition reaction or a hydrogen abstraction reaction, and has the function of generating polymerization-active radicals. If necessary, an additive such as a sensitizing dye may be added.
 (F)光重合開始剤としては、例えば、日本国特開昭59-152396号公報、日本国特開昭61-151197号各公報に記載のチタノセン化合物を含むメタロセン化合物;日本国特開2000-56118号公報に記載のヘキサアリールビイミダゾール誘導体;日本国特開平10-39503号公報記載のハロメチル化オキサジアゾール誘導体、ハロメチル-s-トリアジン誘導体、N-フェニルグリシン等のN-アリール-α-アミノ酸類、N-アリール-α-アミノ酸塩類、N-アリール-α-アミノ酸エステル類等のラジカル活性剤、α-アミノアルキルフェノン誘導体;日本国特開2000-80068号公報、日本国特開2006-36750号公報等に記載されているオキシムエステル誘導体が挙げられる。 (F) Photopolymerization initiators include, for example, metallocene compounds containing titanocene compounds described in Japanese Patent Application Laid-open No. 59-152396 and Japanese Patent Application Publication No. 61-151197; Hexaarylbiimidazole derivatives described in Japanese Patent Publication No. 56118; N-aryl-α-amino acids such as halomethylated oxadiazole derivatives, halomethyl-s-triazine derivatives, and N-phenylglycine described in Japanese Patent Publication No. 10-39503; radical activators such as N-aryl-α-amino acid salts, N-aryl-α-amino acid esters, α-aminoalkylphenone derivatives; Examples thereof include oxime ester derivatives described in Japanese Patent Publication No.
 チタノセン誘導体類としては、例えば、ジシクロペンタジエニルチタニウムジクロライド、ジシクロペンタジエニルチタニウムビスフェニル、ジシクロペンタジエニルチタニウムビス(2,3,4,5,6-ペンタフルオロフェニル)、ジシクロペンタジエニルチタニウムビス(2,3,5,6-テトラフルオロフェニル)、ジシクロペンタジエニルチタニウムビス(2,4,6-トリフルオロフェニル)、ジシクロペンタジエニルチタニウムジ(2,6-ジフルオロフェニル)、ジシクロペンタジエニルチタニウムジ(2,4-ジフルオロフェニル)、ジ(メチルシクロペンタジエニル)チタニウムビス(2,3,4,5,6-ペンタフルオロフェニル)、ジ(メチルシクロペンタジエニル)チタニウムビス(2,6-ジフルオロフェニル)、ジシクロペンタジエニルチタニウム〔2,6-ジ-フルオロ-3-(ピロ-1-イル)-フェニル〕が挙げられる。 Examples of titanocene derivatives include dicyclopentadienyl titanium dichloride, dicyclopentadienyl titanium bisphenyl, dicyclopentadienyl titanium bis(2,3,4,5,6-pentafluorophenyl), and dicyclopentadienyl titanium bisphenyl. Pentadienyl titanium bis(2,3,5,6-tetrafluorophenyl), dicyclopentadienyl titanium bis(2,4,6-trifluorophenyl), dicyclopentadienyl titanium di(2,6- difluorophenyl), dicyclopentadienyl titanium di(2,4-difluorophenyl), di(methylcyclopentadienyl)titanium bis(2,3,4,5,6-pentafluorophenyl), di(methylcyclo pentadienyl) titanium bis(2,6-difluorophenyl) and dicyclopentadienyl titanium [2,6-di-fluoro-3-(pyrro-1-yl)-phenyl].
 ビイミダゾール誘導体類としては、例えば、2-(2’-クロロフェニル)-4,5-ジフェニルイミダゾール2量体、2-(2’-クロロフェニル)-4,5-ビス(3’-メトキシフェニル)イミダゾール2量体、2-(2’-フルオロフェニル)-4,5-ジフェニルイミダゾール2量体、2-(2’-メトキシフェニル)-4,5-ジフェニルイミダゾール2量体、(4’-メトキシフェニル)-4,5-ジフェニルイミダゾール2量体が挙げられる。 Examples of biimidazole derivatives include 2-(2'-chlorophenyl)-4,5-diphenylimidazole dimer, 2-(2'-chlorophenyl)-4,5-bis(3'-methoxyphenyl)imidazole dimer, 2-(2'-fluorophenyl)-4,5-diphenylimidazole dimer, 2-(2'-methoxyphenyl)-4,5-diphenylimidazole dimer, (4'-methoxyphenyl) )-4,5-diphenylimidazole dimer.
 ハロメチル化オキサジアゾール誘導体類としては、例えば、2-トリクロロメチル-5-(2’-ベンゾフリル)-1,3,4-オキサジアゾール、2-トリクロロメチル-5-〔β-(2’-ベンゾフリル)ビニル〕-1,3,4-オキサジアゾール、2-トリクロロメチル-5-〔β-(2’-(6’’-ベンゾフリル)ビニル)〕-1,3,4-オキサジアゾール、2-トリクロロメチル-5-フリル-1,3,4-オキサジアゾールが挙げられる。 Examples of halomethylated oxadiazole derivatives include 2-trichloromethyl-5-(2'-benzofuryl)-1,3,4-oxadiazole, 2-trichloromethyl-5-[β-(2'- benzofuryl)vinyl]-1,3,4-oxadiazole, 2-trichloromethyl-5-[β-(2'-(6''-benzofuryl)vinyl)]-1,3,4-oxadiazole, Examples include 2-trichloromethyl-5-furyl-1,3,4-oxadiazole.
 ハロメチル-s-トリアジン誘導体類としては、例えば、2-(4-メトキシフェニル)-4,6-ビス(トリクロロメチル)-s-トリアジン、2-(4-メトキシナフチル)-4,6-ビス(トリクロロメチル)-s-トリアジン、2-(4-エトキシナフチル)-4,6-ビス(トリクロロメチル)-s-トリアジン、2-(4-エトキシカルボニルナフチル)-4,6-ビス(トリクロロメチル)-s-トリアジンが挙げられる。 Examples of halomethyl-s-triazine derivatives include 2-(4-methoxyphenyl)-4,6-bis(trichloromethyl)-s-triazine, 2-(4-methoxynaphthyl)-4,6-bis( trichloromethyl)-s-triazine, 2-(4-ethoxynaphthyl)-4,6-bis(trichloromethyl)-s-triazine, 2-(4-ethoxycarbonylnaphthyl)-4,6-bis(trichloromethyl) -s-triazine is mentioned.
 α-アミノアルキルフェノン誘導体類としては、例えば、2-メチル-1〔4-(メチルチオ)フェニル〕-2-モルフォリノプロパン-1-オン、2-ベンジル-2-ジメチルアミノ-1-(4-モルフォリノフェニル)ブタン-1-オン、4-ジメチルアミノエチルベンゾエ-ト、4-ジメチルアミノイソアミルベンゾエ-ト、4-ジエチルアミノアセトフェノン、4-ジメチルアミノプロピオフェノン、2-エチルヘキシル-1,4-ジメチルアミノベンゾエート、2,5-ビス(4-ジエチルアミノベンザル)シクロヘキサノン、7-ジエチルアミノ-3-(4-ジエチルアミノベンゾイル)クマリン、4-(ジエチルアミノ)カルコンが挙げられる。 Examples of α-aminoalkylphenone derivatives include 2-methyl-1[4-(methylthio)phenyl]-2-morpholinopropan-1-one, 2-benzyl-2-dimethylamino-1-(4- Morpholinophenyl)butan-1-one, 4-dimethylaminoethylbenzoate, 4-dimethylaminoisoamylbenzoate, 4-diethylaminoacetophenone, 4-dimethylaminopropiophenone, 2-ethylhexyl-1,4 -dimethylaminobenzoate, 2,5-bis(4-diethylaminobenzal)cyclohexanone, 7-diethylamino-3-(4-diethylaminobenzoyl)coumarin, and 4-(diethylamino)chalcone.
 (F)光重合開始剤としては、感度の点で、オキシム誘導体類(オキシムエステル系化合物及びケトオキシムエステル系化合物)が好ましい。オキシム誘導体類の中でも、基板との密着性の観点から、オキシムエステル系化合物が好ましい。フェノール性水酸基を含むアルカリ可溶性樹脂を用いる場合は、感度の点で不利になる場合がある。
 オキシムエステル系化合物の光重合開始剤は、その構造の中に紫外線を吸収する構造と光エネルギーを伝達する構造とラジカルを発生する構造を併せ持っているために、少量で感度が高く、かつ熱反応に対しては安定であり、少量で高感度な感光性樹脂組成物の設計が可能である。特に、露光光源のi線(365nm)に対する光吸収性の観点から、置換されていてもよいカルバゾリル基(置換されていてもよいカルバゾール環を有する基)を含有するオキシムエステル系化合物の場合に、この構造特性が良好に発現され、より好ましい。現在、市場では、遮光度が高く、薄膜なブラックマトリックスが要求されており、顔料濃度も、ますます大きくなっている。このような状況においては、特に有効である。
(F) As the photopolymerization initiator, oxime derivatives (oxime ester compounds and ketooxime ester compounds) are preferable from the viewpoint of sensitivity. Among the oxime derivatives, oxime ester compounds are preferred from the viewpoint of adhesion to the substrate. When using an alkali-soluble resin containing a phenolic hydroxyl group, there may be a disadvantage in terms of sensitivity.
The oxime ester compound photopolymerization initiator has a structure that absorbs ultraviolet rays, a structure that transmits light energy, and a structure that generates radicals, so it is highly sensitive even in small amounts, and is highly sensitive to thermal reactions. It is stable against light, and it is possible to design a highly sensitive photosensitive resin composition in a small amount. In particular, in the case of an oxime ester compound containing an optionally substituted carbazolyl group (a group having an optionally substituted carbazole ring) from the viewpoint of light absorption to the i-line (365 nm) of the exposure light source, This structural characteristic is well expressed and is more preferable. Currently, the market demands a thin black matrix with a high degree of light shielding, and the pigment concentration is also increasing. This is particularly effective in such situations.
 オキシムエステル系化合物としては、下記一般式(22)で示される構造部分を含む化合物が挙げられ、好ましくは、下記一般式(23)で示されるオキシムエステル系化合物が挙げられる。 Examples of oxime ester compounds include compounds containing a structural moiety represented by the following general formula (22), and preferably oxime ester compounds represented by the following general formula (23).
Figure JPOXMLDOC01-appb-C000028
Figure JPOXMLDOC01-appb-C000028
 式(22)中、R22は、それぞれ置換されていてもよい、炭素数2~12のアルカノイル基、炭素数1~20のヘテロアリールアルカノイル基、炭素数3~25のアルケノイル基、炭素数3~8のシクロアルカノイル基、炭素数3~20のアルコキシカルボニルアルカノイル基、炭素数8~20のフェノキシカルボニルアルカノイル基、炭素数3~20のヘテロアリ-ルオキシカルボニルアルカノイル基、炭素数2~10のアミノアルキルカルボニル基、炭素数7~20のアリーロイル基、炭素数1~20のヘテロアリーロイル基、炭素数2~10のアルコキシカルボニル基、又は炭素数7~20のアリールオキシカルボニル基を示す。 In formula (22), R 22 is an alkanoyl group having 2 to 12 carbon atoms, a heteroarylalkanoyl group having 1 to 20 carbon atoms, an alkenoyl group having 3 to 25 carbon atoms, or an alkanoyl group having 3 to 25 carbon atoms, each of which may be substituted. -8 cycloalkanoyl group, C3-20 alkoxycarbonylalkanoyl group, C8-20 phenoxycarbonylalkanoyl group, C3-20 heteroaryloxycarbonylalkanoyl group, C2-10 amino It represents an alkylcarbonyl group, an aryloyl group having 7 to 20 carbon atoms, a heteroaryloyl group having 1 to 20 carbon atoms, an alkoxycarbonyl group having 2 to 10 carbon atoms, or an aryloxycarbonyl group having 7 to 20 carbon atoms.
Figure JPOXMLDOC01-appb-C000029
Figure JPOXMLDOC01-appb-C000029
 式(23)中、R21aは、水素、又はそれぞれ置換されていてもよい、炭素数1~20のアルキル基、炭素数2~25のアルケニル基、炭素数1~20のヘテロアリールアルキル基、炭素数3~20のアルコキシカルボニルアルキル基、炭素数8~20のフェノキシカルボニルアルキル基、炭素数1~20のヘテロアリールオキシカルボニルアルキル基もしくはヘテロアリールチオアルキル基、炭素数1~20のアミノアルキル基、炭素数2~12のアルカノイル基、炭素数3~25のアルケノイル基、炭素数3~8のシクロアルカノイル基、炭素数7~20のアリーロイル基、炭素数1~20のヘテロアリーロイル基、炭素数2~10のアルコキシカルボニル基、炭素数7~20のアリールオキシカルボニル基、又は炭素数1~10のシクロアルキルアルキル基を示す。
 R21bは芳香環あるいはヘテロ芳香環を含む任意の置換基を示す。
In formula (23), R 21a is hydrogen, or an alkyl group having 1 to 20 carbon atoms, an alkenyl group having 2 to 25 carbon atoms, a heteroarylalkyl group having 1 to 20 carbon atoms, each of which may be substituted; Alkoxycarbonylalkyl group having 3 to 20 carbon atoms, phenoxycarbonylalkyl group having 8 to 20 carbon atoms, heteroaryloxycarbonylalkyl group or heteroarylthioalkyl group having 1 to 20 carbon atoms, aminoalkyl group having 1 to 20 carbon atoms , alkanoyl group having 2 to 12 carbon atoms, alkenoyl group having 3 to 25 carbon atoms, cycloalkanoyl group having 3 to 8 carbon atoms, aryloyl group having 7 to 20 carbon atoms, heteroaryloyl group having 1 to 20 carbon atoms, carbon It represents an alkoxycarbonyl group having 2 to 10 carbon atoms, an aryloxycarbonyl group having 7 to 20 carbon atoms, or a cycloalkylalkyl group having 1 to 10 carbon atoms.
R 21b represents any substituent containing an aromatic ring or a heteroaromatic ring.
 なお、R21aはR21bと共に環を形成してもよく、その連結基は、それぞれ置換基を有していてもよい炭素数1~10のアルキレン基、ポリエチレン基(-(CH=CH)-)、ポリエチニレン基(-(C≡C)-)あるいはこれらを組み合わせてなる基が挙げられる(なお、rは0~3の整数である。)。
 R22aは、式(22)におけるR22と同様の基を示す。
 式(22)におけるR22及び式(23)におけるR22aとしては、好ましくは、炭素数2~12のアルカノイル基、炭素数1~20のヘテロアリールアルカノイル基、炭素数3~8のシクロアルカノイル基が挙げられる。
Note that R 21a may form a ring with R 21b , and the linking group thereof is an alkylene group having 1 to 10 carbon atoms which may have a substituent, a polyethylene group (-(CH=CH) r -), a polyethynylene group (-(C≡C) r -), or a combination thereof (r is an integer from 0 to 3).
R 22a represents the same group as R 22 in formula (22).
R 22 in formula (22) and R 22a in formula (23) are preferably an alkanoyl group having 2 to 12 carbon atoms, a heteroarylalkanoyl group having 1 to 20 carbon atoms, or a cycloalkanoyl group having 3 to 8 carbon atoms. can be mentioned.
 式(23)におけるR21aとしては、好ましくは無置換のメチル基、エチル基、プロピル基等の直鎖アルキル基又はシクロアルキルアルキル基や、N-アセチル-N-アセトキシアミノ基で置換されたプロピル基が挙げられる。
 式(23)におけるR21bとしては、好ましくは置換されていてもよいカルバゾリル基、置換されていてもよいチオキサントニル基、置換されていてもよいフェニルスルフィド基が挙げられる。
R 21a in formula (23) is preferably an unsubstituted linear alkyl group such as a methyl group, ethyl group, or propyl group or a cycloalkylalkyl group, or propyl substituted with an N-acetyl-N-acetoxyamino group. Examples include groups.
Preferably, R 21b in formula (23) includes an optionally substituted carbazolyl group, an optionally substituted thioxanthonyl group, and an optionally substituted phenyl sulfide group.
 オキシムエステル系化合物の光重合開始剤としては、式(23)におけるR21bが、置換されていてもよいカルバゾリル基である化合物が、前述の理由からより好ましい。さらに、置換されていてもよい炭素数6~25のアリール基、置換されていてもよい炭素数7~25のアリールカルボニル基、置換されていてもよい炭素数5~25のヘテロアリール基、置換されていてもよい炭素数6~25のヘテロアリールカルボニル基、及びニトロ基からなる群から選ばれる少なくとも1種の基を有するカルバゾール基が好ましい。特に、ベンゾイル基、トルオイル基、ナフトイル基、チエニルカルボニル基、及びニトロ基からなる群から選ばれる少なくとも1種の基を有するカルバゾリル基が好ましい。また、これらの基はカルバゾリル基の3位に結合していることが望ましい。 As a photopolymerization initiator for an oxime ester compound, a compound in which R 21b in formula (23) is an optionally substituted carbazolyl group is more preferable for the reasons described above. Furthermore, an optionally substituted aryl group having 6 to 25 carbon atoms, an optionally substituted arylcarbonyl group having 7 to 25 carbon atoms, an optionally substituted heteroaryl group having 5 to 25 carbon atoms, a substituted A carbazole group having at least one group selected from the group consisting of a heteroarylcarbonyl group having 6 to 25 carbon atoms, which may optionally be a nitro group, is preferred. Particularly preferred is a carbazolyl group having at least one group selected from the group consisting of a benzoyl group, a toluoyl group, a naphthoyl group, a thienylcarbonyl group, and a nitro group. Further, these groups are desirably bonded to the 3-position of the carbazolyl group.
 オキシムエステル系化合物の光重合開始剤の市販品として、例えば、BASF社製のOXE-02、常州強力電子社製のTR-PBG-304やTR-PBG-314が挙げられる。 Commercially available photopolymerization initiators of oxime ester compounds include, for example, OXE-02 manufactured by BASF, and TR-PBG-304 and TR-PBG-314 manufactured by Changzhou Powerful Electronics.
 オキシムエステル系化合物の光重合開始剤としては、以下が挙げられる。 Examples of photopolymerization initiators for oxime ester compounds include the following.
Figure JPOXMLDOC01-appb-C000030
Figure JPOXMLDOC01-appb-C000030
Figure JPOXMLDOC01-appb-C000031
Figure JPOXMLDOC01-appb-C000031
Figure JPOXMLDOC01-appb-C000032
Figure JPOXMLDOC01-appb-C000032
 ケトオキシムエステル系化合物としては、下記一般式(24)で示される構造部分を含む化合物が挙げられ、好ましくは、下記一般式(25)で示されるケトオキシムエステル系化合物が挙げられる。 Examples of ketooxime ester compounds include compounds containing a structural moiety represented by the following general formula (24), preferably ketoxime ester compounds represented by the following general formula (25).
Figure JPOXMLDOC01-appb-C000033
Figure JPOXMLDOC01-appb-C000033
 式(24)において、R24は、式(22)におけるR22と同義である。 In formula (24), R 24 has the same meaning as R 22 in formula (22).
Figure JPOXMLDOC01-appb-C000034
Figure JPOXMLDOC01-appb-C000034
 式(25)において、R23aは、それぞれ置換されていてもよい、フェニル基、炭素数1~20のアルキル基、炭素数2~25のアルケニル基、炭素数1~20のヘテロアリールアルキル基、炭素数3~20のアルコキシカルボニルアルキル基、炭素数8~20のフェノキシカルボニルアルキル基、炭素数2~20のアルキルチオアルキル基、炭素数1~20のヘテロアリールオキシカルボニルアルキル基もしくはヘテロアリールチオアルキル基、炭素数1~20のアミノアルキル基、炭素数2~12のアルカノイル基、炭素数3~25のアルケノイル基、炭素数3~8のシクロアルカノイル基、炭素数7~20のアリーロイル基、炭素数1~20のヘテロアリーロイル基、炭素数2~10のアルコキシカルボニル基、炭素数7~20のアリールオキシカルボニル基、又は炭素数1~10のシクロアルキルアルキル基を示す。 In formula (25), R 23a is a phenyl group, an alkyl group having 1 to 20 carbon atoms, an alkenyl group having 2 to 25 carbon atoms, a heteroarylalkyl group having 1 to 20 carbon atoms, each of which may be substituted; Alkoxycarbonylalkyl group having 3 to 20 carbon atoms, phenoxycarbonylalkyl group having 8 to 20 carbon atoms, alkylthioalkyl group having 2 to 20 carbon atoms, heteroaryloxycarbonylalkyl group or heteroarylthioalkyl group having 1 to 20 carbon atoms , an aminoalkyl group having 1 to 20 carbon atoms, an alkanoyl group having 2 to 12 carbon atoms, an alkenoyl group having 3 to 25 carbon atoms, a cycloalkanoyl group having 3 to 8 carbon atoms, an aryloyl group having 7 to 20 carbon atoms, and an aryloyl group having 7 to 20 carbon atoms. It represents a heteroaryloyl group having 1 to 20 carbon atoms, an alkoxycarbonyl group having 2 to 10 carbon atoms, an aryloxycarbonyl group having 7 to 20 carbon atoms, or a cycloalkylalkyl group having 1 to 10 carbon atoms.
 R23bは芳香環あるいはヘテロ芳香環を含む任意の置換基を示す。
 R23aはR23bと共に環を形成してもよく、その連結基は、それぞれ置換基を有していてもよい炭素数1~10のアルキレン基、ポリエチレン基(-(CH=CH)-)、ポリエチニレン基(-(C≡C)-)あるいはこれらを組み合わせてなる基が挙げられる(rは0~3の整数である。)。
R 23b represents an arbitrary substituent containing an aromatic ring or a heteroaromatic ring.
R 23a may form a ring together with R 23b , and the linking group thereof is an alkylene group having 1 to 10 carbon atoms, each of which may have a substituent, or a polyethylene group (-(CH=CH) r -) , a polyethynylene group (-(C≡C) r -), or a group formed by combining these (r is an integer from 0 to 3).
 R24aは、それぞれ置換されていてもよい、炭素数2~12のアルカノイル基、炭素数3~25のアルケノイル基、炭素数4~8のシクロアルカノイル基、炭素数7~20のベンゾイル基、炭素数3~20のヘテロアリーロイル基、炭素数2~10のアルコキシカルボニル基、炭素数7~20のアリールオキシカルボニル基、炭素数2~20のヘテロアリール基、又は炭素数2~20のアルキルアミノカルボニル基を表す。
 式(24)におけるR24及び式(25)におけるR24aとしては、好ましくは、炭素数2~12のアルカノイル基、炭素数1~20のヘテロアリールアルカノイル基、炭素数3~8のシクロアルカノイル基、炭素数7~20のアリーロイル基が挙げられる。
R 24a is an alkanoyl group having 2 to 12 carbon atoms, an alkenoyl group having 3 to 25 carbon atoms, a cycloalkanoyl group having 4 to 8 carbon atoms, a benzoyl group having 7 to 20 carbon atoms, each of which may be substituted; Heteroaryloyl group having 3 to 20 carbon atoms, alkoxycarbonyl group having 2 to 10 carbon atoms, aryloxycarbonyl group having 7 to 20 carbon atoms, heteroaryl group having 2 to 20 carbon atoms, or alkylamino having 2 to 20 carbon atoms Represents a carbonyl group.
R 24 in formula (24) and R 24a in formula (25) are preferably an alkanoyl group having 2 to 12 carbon atoms, a heteroarylalkanoyl group having 1 to 20 carbon atoms, or a cycloalkanoyl group having 3 to 8 carbon atoms. , an aryloyl group having 7 to 20 carbon atoms.
 式(25)におけるR23aとしては、好ましくは無置換のエチル基、プロピル基、ブチル基や、メトキシカルボニル基で置換されたエチル基又はプロピル基が挙げられる。
 式(25)におけるR23bとしては、好ましくは置換されていてもよいカルバゾイル基、置換されていてもよいフェニルスルフィド基が挙げられる。
 ケトオキシムエステル系化合物として、以下が挙げられる。
Preferably, R 23a in formula (25) includes an unsubstituted ethyl group, propyl group, butyl group, and an ethyl group or propyl group substituted with a methoxycarbonyl group.
R 23b in formula (25) preferably includes an optionally substituted carbazoyl group and an optionally substituted phenyl sulfide group.
Examples of ketooxime ester compounds include the following.
Figure JPOXMLDOC01-appb-C000035
Figure JPOXMLDOC01-appb-C000035
Figure JPOXMLDOC01-appb-C000036
Figure JPOXMLDOC01-appb-C000036
Figure JPOXMLDOC01-appb-C000037
Figure JPOXMLDOC01-appb-C000037
 ケトオキシムエステル系化合物の光重合開始剤の市販品として、例えば、BASF社製のOXE-01、常州強力電子社製のTR-PBG-305が挙げられる。 Commercially available photopolymerization initiators for ketoxime ester compounds include, for example, OXE-01 manufactured by BASF and TR-PBG-305 manufactured by Changzhou Powerful Electronics Co., Ltd.
 オキシムエステル系化合物及びケトオキシムエステル系化合物は、それ自体公知の化合物であり、例えば、日本国特開2000-80068号公報や、日本国特開2006-36750号公報に記載の化合物である。
 光重合開始剤は1種を単独で用いてもよく、2種以上を併用してもよい。
The oxime ester compound and the ketooxime ester compound are compounds known per se, and are, for example, compounds described in Japanese Patent Application Publication No. 2000-80068 and Japanese Patent Application Publication No. 2006-36750.
One type of photopolymerization initiator may be used alone, or two or more types may be used in combination.
 その他に、例えば、ベンゾインメチルエーテル、ベンゾインフェニルエーテル、ベンゾインイソブチルエーテル、ベンゾインイソプロピルエーテル等のベンゾインアルキルエーテル類;2-メチルアントラキノン、2-エチルアントラキノン、2-t-ブチルアントラキノン、1-クロロアントラキノン等のアントラキノン誘導体類;ベンゾフェノン、ミヒラーズケトン、2-メチルベンゾフェノン、3-メチルベンゾフェノン、4-メチルベンゾフェノン、2-クロロベンゾフェノン、4-ブロモベンゾフェノン、2-カルボキシベンゾフェノン等のベンゾフェノン誘導体類;2,2-ジメトキシ-2-フェニルアセトフェノン、2,2-ジエトキシアセトフェノン、1-ヒドロキシシクロへキシルフェニルケトン、α-ヒドロキシ-2-メチルフェニルプロパノン、1-ヒドロキシ-1-メチルエチル-(p-イソプロピルフェニル)ケトン、1-ヒドロキシ-1-(p-ドデシルフェニル)ケトン、2-メチル-(4’-メチルチオフェニル)-2-モルホリノ-1-プロパノン、1,1,1-トリクロロメチル-(p-ブチルフェニル)ケトン等のアセトフェノン誘導体類;チオキサントン、2-エチルチオキサントン、2-イソプロピルチオキサントン、2-クロロチオキサントン、2,4-ジメチルチオキサントン、2,4-ジエチルチオキサントン、2,4-ジイソプロピルチオキサントン等のチオキサントン誘導体類;p-ジメチルアミノ安息香酸エチル、p-ジエチルアミノ安息香酸エチル等の安息香酸エステル誘導体類;9-フェニルアクリジン、9-(p-メトキシフェニル)アクリジン等のアクリジン誘導体類;9,10-ジメチルベンズフェナジン等のフェナジン誘導体類;ベンズアンスロン等のアンスロン誘導体類が挙げられる。
 光重合開始剤としては、前述の理由からオキシムエステル誘導体が特に好ましい。
In addition, benzoin alkyl ethers such as benzoin methyl ether, benzoin phenyl ether, benzoin isobutyl ether, and benzoin isopropyl ether; 2-methylanthraquinone, 2-ethylanthraquinone, 2-t-butylanthraquinone, 1-chloroanthraquinone, Anthraquinone derivatives; benzophenone derivatives such as benzophenone, Michler's ketone, 2-methylbenzophenone, 3-methylbenzophenone, 4-methylbenzophenone, 2-chlorobenzophenone, 4-bromobenzophenone, 2-carboxybenzophenone; 2,2-dimethoxy-2 -Phenylacetophenone, 2,2-diethoxyacetophenone, 1-hydroxycyclohexylphenyl ketone, α-hydroxy-2-methylphenylpropanone, 1-hydroxy-1-methylethyl-(p-isopropylphenyl)ketone, 1 -Hydroxy-1-(p-dodecylphenyl)ketone, 2-methyl-(4'-methylthiophenyl)-2-morpholino-1-propanone, 1,1,1-trichloromethyl-(p-butylphenyl)ketone, etc. acetophenone derivatives; thioxanthone derivatives such as thioxanthone, 2-ethylthioxanthone, 2-isopropylthioxanthone, 2-chlorothioxanthone, 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, 2,4-diisopropylthioxanthone; p- Benzoic acid ester derivatives such as ethyl dimethylaminobenzoate and ethyl p-diethylaminobenzoate; acridine derivatives such as 9-phenylacridine and 9-(p-methoxyphenyl)acridine; phenazine such as 9,10-dimethylbenzphenazine Derivatives: Anthrone derivatives such as benzanthrone are included.
As the photopolymerization initiator, oxime ester derivatives are particularly preferred for the reasons mentioned above.
 (F)光重合開始剤の含有割合は、特に限定されないが、感光性樹脂組成物の全固形分に対して、1質量%以上が好ましく、2質量%以上がより好ましく、3質量以上がさらに好ましく、4質量%以上が特に好ましく、また、30質量%以下が好ましく、20質量%以下がより好ましく、15質量%以下がさらに好ましく、10質量%以下が特に好ましく、8質量%以下が最も好ましい。(F)光重合開始剤の含有割合が前記下限値以上であれば、感度が向上する傾向があり、前記上限値以下であれば、未露光部分の現像液に対する溶解性が向上する傾向がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、1~30質量%であってよく、1~20質量%であってよく、2~15質量%であってよく、3~10質量%であってよく、4~8質量%であってよい。
(F) The content ratio of the photopolymerization initiator is not particularly limited, but is preferably 1% by mass or more, more preferably 2% by mass or more, and further preferably 3% by mass or more based on the total solid content of the photosensitive resin composition. It is preferably 4% by mass or more, particularly preferably 30% by mass or less, more preferably 20% by mass or less, even more preferably 15% by mass or less, particularly preferably 10% by mass or less, and most preferably 8% by mass or less. . (F) If the content ratio of the photopolymerization initiator is equal to or higher than the lower limit value, the sensitivity tends to improve, and if the content ratio is lower than the upper limit value, the solubility of the unexposed area in the developer tends to improve. .
The above upper and lower limits can be arbitrarily combined. For example, it may be 1-30% by weight, it may be 1-20% by weight, it may be 2-15% by weight, it may be 3-10% by weight, it may be 4-8% by weight. good.
<増感色素>
 (F)光重合開始剤には、必要に応じて、感応感度を高める目的で、画像露光光源の波長に応じた増感色素を併用させることができる。増感色素としては、例えば、日本国特開平4-221958号公報、日本国特開平4-219756号公報に記載のキサンテン色素、日本国特開平3-239703号公報、日本国特開平5-289335号公報に記載の複素環を有するクマリン色素、日本国特開平3-239703号公報、日本国特開平5-289335号公報に記載の3-ケトクマリン化合物、日本国特開平6-19240号公報に記載のピロメテン色素、その他、日本国特開昭47-2528号公報、日本国特開昭54-155292号公報、日本国特公昭45-37377号公報、日本国特開昭48-84183号公報、日本国特開昭52-112681号公報、日本国特開昭58-15503号公報、日本国特開昭60-88005号公報、日本国特開昭59-56403号公報、日本国特開平2-69号公報、日本国特開昭57-168088号公報、日本国特開平5-107761号公報、日本国特開平5-210240号公報、日本国特開平4-288818号公報に記載のジアルキルアミノベンゼン骨格を有する色素が挙げられる。
<Sensitizing dye>
(F) A sensitizing dye corresponding to the wavelength of the image exposure light source can be used in combination with the photopolymerization initiator (F), if necessary, for the purpose of increasing the sensitivity. Examples of the sensitizing dye include xanthene dyes described in Japanese Patent Application Laid-Open No. 4-221958 and Japanese Patent Application Publication No. 4-219756, Japanese Patent Application Publication No. 3-239703, and Japanese Patent Application Publication No. 5-289335. Coumarin dyes having a heterocycle as described in Japanese Patent Publication No. 3-239703, 3-ketocoumarin compounds described in Japanese Patent Application Publication No. 5-289335, as described in Japanese Patent Application Publication No. 6-19240 Pyrromethene dyes, and others, Japanese Patent Publication No. 47-2528, Japanese Patent Application Publication No. 54-155292, Japanese Patent Application Publication No. 45-37377, Japanese Patent Application Publication No. 1984-84183, Japan Japanese Patent Publication No. 52-112681, Japanese Patent Application Publication No. 58-15503, Japanese Patent Application Publication No. 60-88005, Japanese Patent Application Publication No. 59-56403, Japanese Patent Application Publication No. 2-69 dialkylaminobenzene skeletons described in Japanese Patent Application Laid-open No. 57-168088, Japanese Patent Application Publication No. 5-107761, Japanese Patent Application Publication No. 5-210240, and Japanese Patent Application Publication No. 4-288818. Examples include dyes having the following.
 これらの増感色素のうち、アミノ基含有増感色素が好ましく、アミノ基及びフェニル基を同一分子内に有する化合物がより好ましい。例えば、4,4’-ジメチルアミノベンゾフェノン、4,4’-ジエチルアミノベンゾフェノン、2-アミノベンゾフェノン、4-アミノベンゾフェノン、4,4’-ジアミノベンゾフェノン、3,3’-ジアミノベンゾフェノン、3,4-ジアミノベンゾフェノン等のベンゾフェノン系化合物;2-(p-ジメチルアミノフェニル)ベンゾオキサゾール、2-(p-ジエチルアミノフェニル)ベンゾオキサゾール、2-(p-ジメチルアミノフェニル)ベンゾ[4,5]ベンゾオキサゾール、2-(p-ジメチルアミノフェニル)ベンゾ[6,7]ベンゾオキサゾール、2,5-ビス(p-ジエチルアミノフェニル)1,3,4-オキサゾール、2-(p-ジメチルアミノフェニル)ベンゾチアゾール、2-(p-ジエチルアミノフェニル)ベンゾチアゾール、2-(p-ジメチルアミノフェニル)ベンズイミダゾール、2-(p-ジエチルアミノフェニル)ベンズイミダゾール、2,5-ビス(p-ジエチルアミノフェニル)1,3,4-チアジアゾール、(p-ジメチルアミノフェニル)ピリジン、(p-ジエチルアミノフェニル)ピリジン、(p-ジメチルアミノフェニル)キノリン、(p-ジエチルアミノフェニル)キノリン、(p-ジメチルアミノフェニル)ピリミジン、(p-ジエチルアミノフェニル)ピリミジン等のp-ジアルキルアミノフェニル基含有化合物がさらに好ましく、4,4’-ジアルキルアミノベンゾフェノンが特に好ましい。
 増感色素は1種を単独で用いてもよく、2種以上を併用してもよい。
Among these sensitizing dyes, amino group-containing sensitizing dyes are preferred, and compounds having an amino group and a phenyl group in the same molecule are more preferred. For example, 4,4'-dimethylaminobenzophenone, 4,4'-diethylaminobenzophenone, 2-aminobenzophenone, 4-aminobenzophenone, 4,4'-diaminobenzophenone, 3,3'-diaminobenzophenone, 3,4-diaminobenzophenone Benzophenone compounds such as benzophenone; 2-(p-dimethylaminophenyl)benzoxazole, 2-(p-diethylaminophenyl)benzoxazole, 2-(p-dimethylaminophenyl)benzo[4,5]benzoxazole, 2- (p-dimethylaminophenyl)benzo[6,7]benzoxazole, 2,5-bis(p-diethylaminophenyl)1,3,4-oxazole, 2-(p-dimethylaminophenyl)benzothiazole, 2-( p-diethylaminophenyl)benzothiazole, 2-(p-dimethylaminophenyl)benzimidazole, 2-(p-diethylaminophenyl)benzimidazole, 2,5-bis(p-diethylaminophenyl)1,3,4-thiadiazole, (p-dimethylaminophenyl)pyridine, (p-diethylaminophenyl)pyridine, (p-dimethylaminophenyl)quinoline, (p-diethylaminophenyl)quinoline, (p-dimethylaminophenyl)pyrimidine, (p-diethylaminophenyl)pyrimidine More preferred are p-dialkylaminophenyl group-containing compounds such as 4,4'-dialkylaminobenzophenone.
One type of sensitizing dye may be used alone, or two or more types may be used in combination.
 増感色素の含有割合は、特に限定されないが、感光性樹脂組成物の全固形分に対して、0~20質量%が好ましく、0~15質量%がより好ましく、0~10質量%がさらに好ましい。 The content ratio of the sensitizing dye is not particularly limited, but is preferably 0 to 20% by mass, more preferably 0 to 15% by mass, and further preferably 0 to 10% by mass, based on the total solid content of the photosensitive resin composition. preferable.
<有機溶剤>
 本発明の感光性樹脂組成物に、固形分の含有割合の調整、塗布性の調整のために、本発明の顔料分散液に由来しない有機溶剤を含有させてもよい。本発明の顔料分散液に由来しない有機溶剤としては、顔料分散液における有機溶剤と同様の有機溶剤が挙げられる。
 本発明の感光性樹脂組成物において、他の有機溶剤の含有割合は、感光性樹脂組成物中の全固形分の含有割合を考慮して適宜選定できる。
<Organic solvent>
The photosensitive resin composition of the present invention may contain an organic solvent not derived from the pigment dispersion of the present invention in order to adjust the solid content and coatability. Examples of the organic solvent not derived from the pigment dispersion of the present invention include the same organic solvents as those in the pigment dispersion.
In the photosensitive resin composition of the present invention, the content rate of the other organic solvent can be appropriately selected in consideration of the content rate of the total solid content in the photosensitive resin composition.
 感光性樹脂組成物中の全固形分の含有割合は、遮光性の観点から、感光性樹脂組成物の総質量に対し、5質量%以上が好ましく、8質量%以上がより好ましく、10質量%以上がさらに好ましく、また、現像溶解性、パターニング特性の観点から、40質量%以下が好ましく、30質量%以下がより好ましく、25質量%以下がさらに好ましい。
 上記の上限及び下限は任意に組み合わせることができる。例えば、5~40質量%であってよく、8~30質量%であってよく、10~25質量%であってよい。
The total solid content in the photosensitive resin composition is preferably 5% by mass or more, more preferably 8% by mass or more, and 10% by mass with respect to the total mass of the photosensitive resin composition from the viewpoint of light shielding properties. The above is more preferable, and from the viewpoint of development solubility and patterning properties, it is preferably 40% by mass or less, more preferably 30% by mass or less, and even more preferably 25% by mass or less.
The above upper and lower limits can be arbitrarily combined. For example, it may be 5 to 40% by weight, 8 to 30% by weight, or 10 to 25% by weight.
<感光性樹脂組成物における他の配合成分>
 本発明の感光性樹脂組成物には、上述の成分の他、(A)顔料以外の他の色材、チオール類、密着向上剤、塗布性向上剤、現像改良剤、紫外線吸収剤、酸化防止剤等を適宜配合することができる。
<Other ingredients in the photosensitive resin composition>
In addition to the above-mentioned components, the photosensitive resin composition of the present invention includes (A) coloring materials other than pigments, thiols, adhesion improvers, coating properties improvers, development improvers, ultraviolet absorbers, and antioxidants. Agents, etc. can be blended as appropriate.
 (他の色材)
 (A)顔料以外の色材としては、例えば染料が挙げられる。
 染料としては、例えば、アゾ系染料、アントラキノン系染料、フタロシアニン系染料、キノンイミン系染料、キノリン系染料、ニトロ系染料、カルボニル系染料、メチン系染料が挙げられる。
(Other color materials)
(A) Examples of coloring materials other than pigments include dyes.
Examples of the dye include azo dyes, anthraquinone dyes, phthalocyanine dyes, quinone imine dyes, quinoline dyes, nitro dyes, carbonyl dyes, and methine dyes.
 アゾ系染料としては、例えば、C.I.アシッドイエロー11、C.I.アシッドオレンジ7、C.I.アシッドレッド37、C.I.アシッドレッド180、C.I.アシッドブルー29、C.I.ダイレクトレッド28、C.I.ダイレクトレッド83、C.I.ダイレクトイエロー12、C.I.ダイレクトオレンジ26、C.I.ダイレクトグリーン28、C.I.ダイレクトグリーン59、C.I.リアクティブイエロー2、C.I.リアクティブレッド17、C.I.リアクティブレッド120、C.I.リアクティブブラック5、C.I.ディスパースオレンジ5、C.I.ディスパースレッド58、C.I.ディスパースブルー165、C.I.ベーシックブルー41、C.I.ベーシックレッド18、C.I.モルダントレッド7、C.I.モルダントイエロー5、C.I.モルダントブラック7が挙げられる。 Examples of azo dyes include C.I. I. Acid Yellow 11, C. I. Acid Orange 7, C. I. Acid Red 37, C. I. Acid Red 180, C. I. Acid Blue 29, C. I. Direct Red 28, C. I. Direct Red 83, C. I. Direct Yellow 12, C. I. Direct Orange 26, C. I. Direct Green 28, C. I. Direct Green 59, C. I. Reactive Yellow 2, C. I. Reactive Red 17, C. I. Reactive Red 120, C. I. Reactive Black 5, C. I. Disperse Orange 5, C. I. Dispersed Red 58, C. I. Disperse Blue 165, C. I. Basic Blue 41, C. I. Basic Red 18, C. I. Mordant Red 7, C. I. Mordant Yellow 5, C. I. Mordant Black 7 is mentioned.
 アントラキノン系染料としては、例えば、C.I.バットブルー4、C.I.アシッドブルー40、C.I.アシッドグリーン25、C.I.リアクティブブルー19、C.I.リアクティブブルー49、C.I.ディスパースレッド60、C.I.ディスパースブルー56、C.I.ディスパースブルー60が挙げられる。
 フタロシアニン系染料としては、例えば、C.I.パッドブルー5が挙げられる。キノンイミン系染料としては、例えば、C.I.ベーシックブルー3、C.I.ベーシックブルー9が挙げられる。キノリン系染料としては、例えば、C.I.ソルベントイエロー33、C.I.アシッドイエロー3、C.I.ディスパースイエロー64が挙げられる。ニトロ系染料としては、例えば、C.I.アシッドイエロー1、C.I.アシッドオレンジ3、C.I.ディスパースイエロー42が挙げられる。
Examples of anthraquinone dyes include C.I. I. Bat Blue 4, C. I. Acid Blue 40, C. I. Acid Green 25, C. I. Reactive Blue 19, C. I. Reactive Blue 49, C. I. Dispersed Red 60, C. I. Disperse Blue 56, C. I. An example is Disperse Blue 60.
Examples of phthalocyanine dyes include C.I. I. Pad Blue 5 is an example. Examples of quinoneimine dyes include C.I. I. Basic Blue 3, C. I. Basic Blue 9 is an example. Examples of quinoline dyes include C.I. I. Solvent Yellow 33, C. I. Acid Yellow 3, C. I. Disperse Yellow 64 is mentioned. Examples of nitro dyes include C.I. I. Acid Yellow 1, C. I. Acid Orange 3, C. I. An example is Disperse Yellow 42.
 本発明の感光性樹脂組成物が他の色材を含有する場合、他の色材の含有割合は、本発明の感光性樹脂組成物の全固形分に対して、0~10質量%が好ましく、0~5質量%がより好ましい。 When the photosensitive resin composition of the present invention contains other coloring materials, the content of the other coloring materials is preferably 0 to 10% by mass based on the total solid content of the photosensitive resin composition of the present invention. , more preferably 0 to 5% by mass.
 (チオール類)
 本発明の感光性樹脂組成物に、高感度化、基板への密着性の向上のため、チオール類を含有させてもよい。
 チオール類としては、例えば、ヘキサンジチオール、デカンジチオール、1,4-ジメチルメルカプトベンゼン、ブタンジオールビスチオプロピオネート、ブタンジオールビスチオグリコレート、エチレングリコールビスチオグリコレート、トリメチロールプロパントリスチオグリコレート、ブタンジオールビスチオプロピオネート、トリメチロールプロパントリスチオプロピオネート、トリメチロールプロパントリスチオグリコレート、ペンタエリスリトールテトラキスチオプロピオネート、ペンタエリスリトールテトラキスチオグリコレート、トリスヒドロキシエチルトリスチオプロピオネート、エチレングリコールビス(3-メルカプトブチレート)、プロピレングリコールビス(3-メルカプトブチレート)(PGMB),ブタンジオールビス(3-メルカプトブチレート)、1,4-ビス(3-メルカプトブチリルオキシ)ブタン(商品名;カレンズMT BD1、昭和電工(株)製)、ブタンジオールトリメチロールプロパントリス(3-メルカプトブチレート)、ペンタエリスリトールテトラキス(3-メルカプトブチレート)(商品名;カレンズMT PE1、昭和電工(株)製)、ペンタエリスリトールトリス(3-メルカプトブチレート)、エチレングリコールビス(3-メルカプトイソブチレート)、ブタンジオールビス(3-メルカプトイソブチレート)、トリメチロールプロパントリス(3-メルカプトイソブチレート)、トリメチロールプロパントリス(3-メルカプトブチレート)(TPMB)、トリメチロールプロパントリス(2-メルカプトイソブチレート)(TPMIB)、1,3,5-トリス(3-メルカプトブチルオキシエチル)-1,3,5-トリアジン-2,4,6(1H,3H,5H)-トリオン(商品名:カレンズMT NR1、昭和電工(株)製)が挙げられる。これらは1種を単独で、あるいは2種以上を混合して使用できる。
 チオール類としては、PGMB、TPMB、TPMIB、カレンズMT BD1、カレンズMT PE1、カレンズMT NR1等の多官能チオール化合物が好ましく、その中でもカレンズMT BD1、カレンズMT PE1、カレンズMT NR1がさらに好ましく、カレンズMT PE1が特に好ましい。
 チオール類は、1種を単独で用いてもよく、2種以上を併用してもよい。
(thiols)
The photosensitive resin composition of the present invention may contain thiols in order to increase sensitivity and improve adhesion to a substrate.
Examples of thiols include hexanedithiol, decanedithiol, 1,4-dimethylmercaptobenzene, butanediol bisthiopropionate, butanediol bisthioglycolate, ethylene glycol bisthioglycolate, trimethylolpropane tristhioglycolate. , butanediol bisthiopropionate, trimethylolpropane tristhiopropionate, trimethylolpropane tristhioglycolate, pentaerythritol tetrakisthiopropionate, pentaerythritol tetrakisthioglycolate, trishydroxyethyl tristhiopropionate, Ethylene glycol bis(3-mercaptobutyrate), propylene glycol bis(3-mercaptobutyrate) (PGMB), butanediol bis(3-mercaptobutyrate), 1,4-bis(3-mercaptobutyryloxy)butane (Product name: Karenz MT BD1, manufactured by Showa Denko K.K.), Butanedioltrimethylolpropane tris (3-mercaptobutyrate), Pentaerythritol tetrakis (3-mercaptobutyrate) (Product name: Karenz MT PE1, Showa Denko K.K.) Co., Ltd.), pentaerythritol tris (3-mercaptobutyrate), ethylene glycol bis (3-mercaptoisobutyrate), butanediol bis (3-mercaptoisobutyrate), trimethylolpropane tris (3-mercaptoisobutyrate), butyrate), trimethylolpropane tris(3-mercaptobutyrate) (TPMB), trimethylolpropane tris(2-mercaptoisobutyrate) (TPMIB), 1,3,5-tris(3-mercaptobutyloxyethyl) -1,3,5-triazine-2,4,6(1H,3H,5H)-trione (trade name: Karenz MT NR1, manufactured by Showa Denko KK). These can be used alone or in combination of two or more.
As the thiols, polyfunctional thiol compounds such as PGMB, TPMB, TPMIB, Karenz MT BD1, Karenz MT PE1, and Karenz MT NR1 are preferred, and among these, Karenz MT BD1, Karenz MT PE1, and Karenz MT NR1 are more preferred, and Karenz MT PE1 is particularly preferred.
One type of thiol may be used alone, or two or more types may be used in combination.
 本発明の感光性樹脂組成物がチオール類を含有する場合、チオール類の含有割合は、感光性樹脂組成物の全固形分に対して、0.1質量%以上が好ましく、0.3質量%以上がより好ましく、0.5質量%以上がさらに好ましく、また、10質量%以下が好ましく、5質量%以下がより好ましい。チオール類の含有割合が前記下限値以上であれば、感度低下を抑制できる傾向があり、前記上限値以下であれば、保存安定性を良好なものとしやすい傾向がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、0.1~10質量%であってよく、0.3~10質量%であってよく、0.5~5質量%であってよい。
When the photosensitive resin composition of the present invention contains thiols, the content of thiols is preferably 0.1% by mass or more, and 0.3% by mass based on the total solid content of the photosensitive resin composition. The content is more preferably 0.5% by mass or more, further preferably 10% by mass or less, and more preferably 5% by mass or less. If the content ratio of thiols is at least the above lower limit value, there is a tendency to suppress a decrease in sensitivity, and if it is below the above upper limit value, there is a tendency that storage stability tends to be good.
The above upper and lower limits can be arbitrarily combined. For example, it may be 0.1 to 10% by weight, 0.3 to 10% by weight, or 0.5 to 5% by weight.
 (密着向上剤)
 本発明の感光性樹脂組成物に、基板との密着性を改善するため、密着向上剤を含有させてもよい。
 密着向上剤としては、例えば、シランカップリング剤、チタンカップリング剤が挙げられ、特にシランカップリング剤が好ましい。
 シランカップリング剤としては、例えば、KBM-402、KBM-403、KBM-502、KBM-5103、KBE-9007、X-12-1048、X-12-1050(信越シリコーン社製)、Z-6040、Z-6043、Z-6062(東レ・ダウコーニング社製)が挙げられる。
 シランカップリング剤は、1種を単独で用いてもよく、2種以上を併用してもよい。
(Adhesion improver)
The photosensitive resin composition of the present invention may contain an adhesion improver in order to improve the adhesion to the substrate.
Examples of the adhesion improver include silane coupling agents and titanium coupling agents, with silane coupling agents being particularly preferred.
Examples of the silane coupling agent include KBM-402, KBM-403, KBM-502, KBM-5103, KBE-9007, X-12-1048, X-12-1050 (manufactured by Shin-Etsu Silicone Co., Ltd.), and Z-6040. , Z-6043, and Z-6062 (manufactured by Dow Corning Toray Industries).
One type of silane coupling agent may be used alone, or two or more types may be used in combination.
 シランカップリング剤及びチタンカップリング剤以外の密着向上剤を本発明の感光性樹脂組成物に含有させてもよい。シランカップリング剤及びチタンカップリング剤以外の密着向上剤としては、例えば、リン酸系密着向上剤、その他の密着向上剤が挙げられる。
 リン酸系密着向上剤としては、(メタ)アクリロイルオキシ基含有ホスフェート類が好ましく、下記一般式(g1)、(g2)、(g3)で表されるリン酸系密着向上剤がより好ましい。
The photosensitive resin composition of the present invention may contain adhesion improvers other than the silane coupling agent and the titanium coupling agent. Examples of adhesion improvers other than silane coupling agents and titanium coupling agents include phosphoric acid-based adhesion improvers and other adhesion improvers.
As the phosphoric acid-based adhesion improver, (meth)acryloyloxy group-containing phosphates are preferred, and phosphoric acid-based adhesion improvers represented by the following general formulas (g1), (g2), and (g3) are more preferred.
Figure JPOXMLDOC01-appb-C000038
Figure JPOXMLDOC01-appb-C000038
 式(g1)、(g2)、(g3)において、R51は各々独立に水素原子又はメチル基を示し、l及びl’は各々独立に1~10の整数、mは各々独立に1、2又は3である。
 その他の密着向上剤としては、例えば、TEGO*Add Bond LTH(Evonik社製)が挙げられる。
 密着向上剤は1種を単独で用いても、2種以上を併用してもよい。
In formulas (g1), (g2), and (g3), R 51 each independently represents a hydrogen atom or a methyl group, l and l' each independently represent an integer of 1 to 10, and m each independently represents 1 or 2. Or 3.
Other adhesion improvers include, for example, TEGO*Add Bond LTH (manufactured by Evonik).
One type of adhesion improver may be used alone, or two or more types may be used in combination.
 本発明の感光性樹脂組成物が密着向上剤を含有する場合、感光性樹脂組成物中の密着向上剤の含有割合は特に限定されないが、感光性樹脂組成物の全固形分に対して0.01質量%以上が好ましく、0.1質量%以上がより好ましく、0.5質量%以上がさらに好ましく、また、5質量%以下が好ましく、3質量%以下がより好ましく、2質量%以下がさらに好ましく、1.5質量%以下が特に好ましい。密着向上剤の含有割合が前記下限値以上であれば、密着力が向上する傾向があり、前記上限値以下であれば、現像性が良好となる傾向がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、0.01~5質量%であってよく、0.01~3質量%であってよく、0.1~2質量%であってよく、0.5~1.5質量%であってよい。
When the photosensitive resin composition of the present invention contains an adhesion improver, the content ratio of the adhesion improver in the photosensitive resin composition is not particularly limited, but is 0.5% relative to the total solid content of the photosensitive resin composition. 01% by mass or more, more preferably 0.1% by mass or more, even more preferably 0.5% by mass or more, and preferably 5% by mass or less, more preferably 3% by mass or less, and even more preferably 2% by mass or less. It is preferably 1.5% by mass or less, particularly preferably 1.5% by mass or less. If the content of the adhesion improver is at least the lower limit, the adhesion will tend to improve, and if the content is at most the upper limit, the developability will tend to improve.
The above upper and lower limits can be arbitrarily combined. For example, it may be 0.01 to 5% by weight, it may be 0.01 to 3% by weight, it may be 0.1 to 2% by weight, and it may be 0.5 to 1.5% by weight. good.
 (塗布性向上剤)
 本発明の感光性樹脂組成物に、塗布性向上のため、塗布性向上剤を含有させてもよい。
 塗布性向上剤としては、例えば、界面活性剤が挙げられる。界面活性剤としては、例えば、アニオン系、カチオン系、非イオン系及び両性界面活性剤を用いることができる。中でも、諸特性に悪影響を及ぼす可能性が低い点で、非イオン系界面活性剤が好ましく、フッ素系界面活性剤、シリコーン系界面活性剤が塗布性の面でより好ましい。
(Applicability improver)
The photosensitive resin composition of the present invention may contain a coating properties improver to improve coating properties.
Examples of the coating property improver include surfactants. As the surfactant, for example, anionic, cationic, nonionic, and amphoteric surfactants can be used. Among these, nonionic surfactants are preferred since they are less likely to adversely affect various properties, and fluorine surfactants and silicone surfactants are more preferred from the viewpoint of coatability.
 塗布性向上剤として使用可能な界面活性剤としては、例えば、TSF4460(モメンティブ・パフォーマンス・マテリアルズ社製)、DFX-18(ネオス社製)、BYK-300、BYK-325、BYK-330(ビックケミー社製)、KP340(信越シリコーン社製)、F-470、F-475、F-478、F-554、F-559(DIC社製)、SH7PA(東レ・ダウコーニング社製)、DS-401(ダイキン社製)、L-77(日本ユニカー社製)及びFC4430(3Mジャパン社製)が挙げられる。
 塗布性向上剤は、1種を単独で用いてもよく、2種以上を併用してもよい。
Examples of surfactants that can be used as coating properties improvers include TSF4460 (manufactured by Momentive Performance Materials), DFX-18 (manufactured by Neos), BYK-300, BYK-325, BYK-330 (BYK-Chemie). ), KP340 (manufactured by Shin-Etsu Silicone), F-470, F-475, F-478, F-554, F-559 (manufactured by DIC), SH7PA (manufactured by Dow Corning Toray), DS-401 (manufactured by Daikin), L-77 (manufactured by Nippon Unicar), and FC4430 (manufactured by 3M Japan).
One type of coating property improver may be used alone, or two or more types may be used in combination.
 本発明の感光性樹脂組成物が塗布性向上剤を含有する場合、感光性樹脂組成物中の塗布性向上剤の含有割合は特に限定されないが、感光性樹脂組成物の全固形分に対して0.01質量%以上が好ましく、0.05質量%以上がより好ましく、また、1.0質量%以下が好ましく、0.7質量%以下がより好ましく、0.5質量%以下がさらに好ましく、0.3質量%以下が特に好ましい。塗布性向上剤の含有割合が前記下限値以上であれば、塗布均一性が向上する傾向があり、前記上限値以下であれば、レジスト感度が下がらない傾向がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、0.01~1.0質量%であってよく、0.01~0.7質量%であってよく、0.05~0.5質量%であってよく、0.05~0.3質量%であってよい。
When the photosensitive resin composition of the present invention contains a coating property improver, the content ratio of the coating property improving agent in the photosensitive resin composition is not particularly limited, but is based on the total solid content of the photosensitive resin composition. It is preferably at least 0.01% by mass, more preferably at least 0.05% by mass, and preferably at most 1.0% by mass, more preferably at most 0.7% by mass, and even more preferably at most 0.5% by mass. Particularly preferred is 0.3% by mass or less. If the content ratio of the coating property improver is equal to or greater than the lower limit value, coating uniformity tends to improve, and if the content ratio is equal to or less than the upper limit value, resist sensitivity tends not to decrease.
The above upper and lower limits can be arbitrarily combined. For example, it may be 0.01-1.0% by weight, it may be 0.01-0.7% by weight, it may be 0.05-0.5% by weight, it may be 0.05-0. It may be 3% by mass.
<感光性樹脂組成物の物性>
 本発明の感光性樹脂組成物は、ブラックマトリックス形成に好適に使用することができ、係る観点からは黒色を呈していることが好ましい。また、その塗膜の膜厚1μm当たりの光学濃度(OD)は1.0以上が好ましく、2.0以上がより好ましく、2.5以上がさらに好ましく、3.0以上がよりさらに好ましく、4.0以上が特に好ましく、4.5以上が最も好ましい。ODが前記下限値以上であれば、十分な遮光性が確保できる傾向がある。ODの上限は特に限定されないが、例えば6.0である。ODは、例えば、1.0~6.0であってよく、2.0~6.0であってよく、2.5~6.0であってよく、3.0~6.0であってよく、4.0~6.0であってよく、4.5~6.0であってよい。
<Physical properties of photosensitive resin composition>
The photosensitive resin composition of the present invention can be suitably used for forming a black matrix, and from this point of view, it is preferable that the photosensitive resin composition exhibits a black color. Further, the optical density (OD) per 1 μm of film thickness of the coating film is preferably 1.0 or more, more preferably 2.0 or more, even more preferably 2.5 or more, even more preferably 3.0 or more, and 4 A value of .0 or more is particularly preferred, and a value of 4.5 or more is most preferred. If the OD is greater than or equal to the lower limit, sufficient light-shielding properties tend to be ensured. The upper limit of OD is not particularly limited, but is, for example, 6.0. The OD may be, for example, 1.0 to 6.0, 2.0 to 6.0, 2.5 to 6.0, 3.0 to 6.0. It may be between 4.0 and 6.0, and between 4.5 and 6.0.
<感光性樹脂組成物の製造方法>
 本発明の感光性樹脂組成物は、例えば、本発明の顔料分散液、(D)アルカリ可溶性樹脂、(E)光重合性化合物及び(F)光重合開始剤、必要に応じて有機溶剤、他の配合成分を混合する方法により製造できる。
 混合時の温度は、例えば20~30℃である。
 混合後、必要に応じて、得られた感光性樹脂組成物を、フィルター等により濾過処理してもよい。
<Method for manufacturing photosensitive resin composition>
The photosensitive resin composition of the present invention includes, for example, the pigment dispersion of the present invention, (D) an alkali-soluble resin, (E) a photopolymerizable compound, and (F) a photopolymerization initiator, an organic solvent as necessary, and others. It can be manufactured by mixing the following ingredients.
The temperature during mixing is, for example, 20 to 30°C.
After mixing, the resulting photosensitive resin composition may be filtered using a filter or the like, if necessary.
 本発明の感光性樹脂組成物は、画素、ブラックマトリックス等の、カラーフィルターを構成する部材用のレジストとして使用することが可能である。本発明の感光性樹脂組成物は、ブラックマトリックス用である場合は、黒色顔料等の黒色色材を含有する。
 本発明の感光性樹脂組成物は、着色スペーサー用のレジストとして使用することも可能である。
 本発明の感光性樹脂組成物は、隔壁、特に有機電界発光素子の有機層を区画するための隔壁を形成するために用いることも可能である。有機電界発光素子の有機層としては、例えば日本国特開2016-165396号公報に記載されているような、正孔注入層、正孔輸送層あるいは正孔注入層上の正孔輸送層に用いる有機層が挙げられる。
The photosensitive resin composition of the present invention can be used as a resist for members constituting color filters, such as pixels and black matrices. When the photosensitive resin composition of the present invention is used for a black matrix, it contains a black coloring material such as a black pigment.
The photosensitive resin composition of the present invention can also be used as a resist for colored spacers.
The photosensitive resin composition of the present invention can also be used to form partition walls, particularly partition walls for partitioning organic layers of an organic electroluminescent device. Examples of the organic layer of the organic electroluminescent device include a hole injection layer, a hole transport layer, or a hole transport layer on the hole injection layer, as described in Japanese Patent Application Publication No. 2016-165396. An example is an organic layer.
[硬化物]
 本発明の硬化物は、本発明の感光性樹脂組成物が硬化されたものである。
 本発明の硬化物は、画素、ブラックマトリックス等の、カラーフィルターを構成する部材として好適に用いることができる。
 本発明の硬化物は、着色スペーサーとしても用いることができる。
 本発明の硬化物は、隔壁、特に有機電界発光素子の有機層を区画するための隔壁としても用いることができる。
[Cured product]
The cured product of the present invention is obtained by curing the photosensitive resin composition of the present invention.
The cured product of the present invention can be suitably used as a member constituting a color filter, such as a pixel or a black matrix.
The cured product of the present invention can also be used as a colored spacer.
The cured product of the present invention can also be used as a partition wall, particularly a partition wall for partitioning an organic layer of an organic electroluminescent device.
[ブラックマトリックス]
 本発明の硬化物からなるブラックマトリックスについて、その製造方法に従って説明する。
 本発明の硬化物からなるブラックマトリックスは、例えば、ブラックマトリックスが設けられるべき支持体上に、本発明の感光性樹脂組成物を塗布し、乾燥し、乾燥後の塗膜の上にフォトマスクを置き、フォトマスクを介して露光(画像露光)し、現像し、必要に応じて硬化処理する方法により形成できる。
[Black Matrix]
The black matrix made of the cured product of the present invention will be explained according to its manufacturing method.
The black matrix made of the cured product of the present invention can be obtained by, for example, applying the photosensitive resin composition of the present invention on a support on which the black matrix is to be provided, drying it, and applying a photomask on the dried coating film. It can be formed by a method of placing the film, exposing it to light through a photomask (image exposure), developing it, and carrying out a curing treatment if necessary.
(1)支持体
 ブラックマトリックスを形成するための支持体としては、適度の強度があれば、その材質は特に限定されるものではなく、おもに透明基板が使用される。透明基板の材質としては、例えば、ポリエチレンテレフタレート等のポリエステル系樹脂、ポリプロピレン、ポリエチレン等のポリオレフィン系樹脂、ポリカーボネート、ポリメチルメタクリレート、ポリスルフォン等の熱可塑性樹脂製シート、エポキシ樹脂、不飽和ポリエステル樹脂、ポリ(メタ)アクリル系樹脂等の熱硬化性樹脂シート、各種のガラスが挙げられる。この中でも、耐熱性の観点からガラス、耐熱性樹脂が好ましい。また、透明基板の表面にITO、IZO等の透明電極が成膜されていてもよい。透明基板以外の支持体、例えば、TFTアレイ上に形成することも可能である。
 支持体には、接着性等の表面物性の改良のため、必要に応じ、コロナ放電処理、オゾン処理、大気圧プラズマ処理、シランカップリング剤や、ウレタン系樹脂等の各種樹脂の薄膜形成処理を行ってもよい。
 透明基板の厚さは、好ましくは0.05~10mm、より好ましくは0.1~7mmの範囲とされる。また各種樹脂の薄膜形成処理を行う場合、その膜厚は、好ましくは0.01~10μm、より好ましくは0.05~5μmの範囲である。
(1) Support The material of the support for forming the black matrix is not particularly limited as long as it has appropriate strength, and transparent substrates are mainly used. Examples of the material for the transparent substrate include polyester resins such as polyethylene terephthalate, polyolefin resins such as polypropylene and polyethylene, thermoplastic resin sheets such as polycarbonate, polymethyl methacrylate, and polysulfone, epoxy resins, unsaturated polyester resins, Examples include thermosetting resin sheets such as poly(meth)acrylic resins and various types of glasses. Among these, glass and heat-resistant resin are preferred from the viewpoint of heat resistance. Further, a transparent electrode such as ITO or IZO may be formed on the surface of the transparent substrate. It is also possible to form on a support other than a transparent substrate, for example, a TFT array.
To improve surface properties such as adhesion, the support may be treated with corona discharge treatment, ozone treatment, atmospheric pressure plasma treatment, silane coupling agent, or thin film formation treatment of various resins such as urethane resins, as necessary. You may go.
The thickness of the transparent substrate is preferably in the range of 0.05 to 10 mm, more preferably 0.1 to 7 mm. Further, when performing a thin film formation treatment of various resins, the film thickness is preferably in the range of 0.01 to 10 μm, more preferably 0.05 to 5 μm.
(2)ブラックマトリックスの形成
(2-1)感光性樹脂組成物の塗布
 ブラックマトリックス用の感光性樹脂組成物の支持体上への塗布は、例えば、スピナー法、ワイヤーバー法、フローコート法、ダイコート法、ロールコート法、又はスプレーコート法によって行うことができる。ダイコート法によれば、塗布液使用量が大幅に削減され、かつ、スピンコート法によった際に付着するミスト等の影響が全くなく、異物発生が抑制される等、総合的な観点から好ましい。
(2) Formation of black matrix (2-1) Application of photosensitive resin composition The application of the photosensitive resin composition for the black matrix onto the support can be performed, for example, by spinner method, wire bar method, flow coating method, etc. This can be carried out by a die coating method, a roll coating method, or a spray coating method. According to the die coating method, the amount of coating liquid used is significantly reduced, there is no influence of mist etc. that adheres when using the spin coating method, and the generation of foreign matter is suppressed, which is preferable from a comprehensive viewpoint. .
 塗膜の厚さは、乾燥後の膜厚として、0.2~10μmが好ましく、0.5~6μmがより好ましく、1~4μmがさらに好ましい。前記上限値以下とすることで、パターン現像が容易となり、液晶セル化工程でのギャップ調整も容易となる傾向がある。前記下限値以上とすることで、所望の色発現が容易となる傾向がある。 The thickness of the coating film after drying is preferably 0.2 to 10 μm, more preferably 0.5 to 6 μm, and even more preferably 1 to 4 μm. By setting it below the above-mentioned upper limit, pattern development tends to be facilitated, and gap adjustment in the liquid crystal cell formation process also tends to be facilitated. When the amount is equal to or more than the lower limit value, it tends to be easier to express a desired color.
(2-2)塗膜の乾燥
 支持体上に感光性樹脂組成物を塗布した後の塗膜の乾燥は、ホットプレート、IRオーブン、又はコンベクションオーブンを使用した乾燥法によるのが好ましい。乾燥の条件は、感光性樹脂組成物に含まれる液状媒体(有機溶剤、水)の種類、使用する乾燥機の性能等に応じて適宜選択することができる。例えば、40~200℃の温度で15秒~5分間の範囲で選ばれ、好ましくは50~130℃の温度で30秒~3分間の範囲で選ばれる。
 乾燥温度は、高いほど透明基板に対する塗膜の接着性が向上するが、高すぎるとアルカリ可溶性樹脂が分解し、熱重合を誘発して現像不良を生ずる場合がある。なお、この塗膜の乾燥工程は、温度を高めず、減圧チャンバー内で乾燥を行う、減圧乾燥法であってもよい。
(2-2) Drying of coating film The coating film after coating the photosensitive resin composition on the support is preferably dried by a drying method using a hot plate, an IR oven, or a convection oven. Drying conditions can be appropriately selected depending on the type of liquid medium (organic solvent, water) contained in the photosensitive resin composition, the performance of the dryer used, etc. For example, the time is selected in the range of 15 seconds to 5 minutes at a temperature of 40 to 200°C, preferably in the range of 30 seconds to 3 minutes at a temperature of 50 to 130°C.
The higher the drying temperature, the better the adhesion of the coating film to the transparent substrate; however, if the drying temperature is too high, the alkali-soluble resin may decompose, inducing thermal polymerization and causing poor development. In addition, the drying process of this coating film may be a reduced pressure drying method in which drying is performed within a reduced pressure chamber without increasing the temperature.
(2-3)露光
 画像露光は、感光性樹脂組成物の塗膜上に、フォトマスクを重ね、このフォトマスクを介し、紫外域から可視域に至る波長の光を照射して行う。フォトマスクとしては、典型的には、ネガのマスクパターンが使用される。この際、必要に応じ、酸素による塗膜の感度の低下を防ぐため、塗膜上にポリビニルアルコール層等の酸素遮断層を形成した後に露光を行ってもよい。画像露光に使用される光源は、特に限定されるものではない。光源としては、例えば、キセノンランプ、ハロゲンランプ、タングステンランプ、高圧水銀灯、超高圧水銀灯、メタルハライドランプ、中圧水銀灯、低圧水銀灯、カーボンアーク等のランプ光源等が挙げられる。特定の波長の光を照射して使用する場合には、光学フィルターを利用することもできる。
(2-3) Exposure Image exposure is performed by overlaying a photomask on the coating film of the photosensitive resin composition and irradiating light with a wavelength ranging from the ultraviolet region to the visible region through this photomask. A negative mask pattern is typically used as a photomask. At this time, if necessary, in order to prevent a decrease in sensitivity of the coating film due to oxygen, exposure may be performed after forming an oxygen barrier layer such as a polyvinyl alcohol layer on the coating film. The light source used for image exposure is not particularly limited. Examples of the light source include lamp light sources such as a xenon lamp, a halogen lamp, a tungsten lamp, a high-pressure mercury lamp, an ultra-high-pressure mercury lamp, a metal halide lamp, a medium-pressure mercury lamp, a low-pressure mercury lamp, and a carbon arc. When using irradiation with light of a specific wavelength, an optical filter can also be used.
(2-4)現像
 現像は、有機溶剤、又は、アルカリ性化合物と界面活性剤とを含む水溶液を用いて行われる。この水溶液には、さらに有機溶剤、緩衝剤、錯化剤、染料又は顔料を含ませることができる。
(2-4) Development Development is performed using an organic solvent or an aqueous solution containing an alkaline compound and a surfactant. This aqueous solution may further contain an organic solvent, a buffer, a complexing agent, a dye or a pigment.
 アルカリ性化合物としては、例えば、水酸化ナトリウム、水酸化カリウム、水酸化リチウム、炭酸ナトリウム、炭酸カリウム、炭酸水素ナトリウム、炭酸水素カリウム、ケイ酸ナトリウム、ケイ酸カリウム、メタケイ酸ナトリウム、リン酸ナトリウム、リン酸カリウム、リン酸水素ナトリウム、リン酸水素カリウム、リン酸二水素ナトリウム、リン酸二水素カリウム、水酸化アンモニウム等の無機アルカリ性化合物や、モノ-、ジ-又はトリエタノールアミン、モノ-、ジ-又はトリメチルアミン、モノ-、ジ-又はトリエチルアミン、モノ-又はジイソプロピルアミン、n-ブチルアミン、モノ-、ジ-又はトリイソプロパノールアミン、エチレンイミン、エチレンジイミン、テトラメチルアンモニウムヒドロキシド(TMAH)、コリン等の有機アルカリ性化合物が挙げられる。
 アルカリ性化合物は、1種単独で用いてもよく、2種以上の混合物であってもよい。
Examples of alkaline compounds include sodium hydroxide, potassium hydroxide, lithium hydroxide, sodium carbonate, potassium carbonate, sodium hydrogen carbonate, potassium hydrogen carbonate, sodium silicate, potassium silicate, sodium metasilicate, sodium phosphate, and phosphorus. Inorganic alkaline compounds such as acid potassium, sodium hydrogen phosphate, potassium hydrogen phosphate, sodium dihydrogen phosphate, potassium dihydrogen phosphate, ammonium hydroxide, mono-, di- or triethanolamine, mono-, di- or trimethylamine, mono-, di- or triethylamine, mono- or di-isopropylamine, n-butylamine, mono-, di- or triisopropanolamine, ethyleneimine, ethylenediimine, tetramethylammonium hydroxide (TMAH), choline, etc. Examples include organic alkaline compounds.
The alkaline compounds may be used alone or in a mixture of two or more.
 界面活性剤としては、例えば、ポリオキシエチレンアルキルエーテル類、ポリオキシエチレンアルキルアリールエーテル類、ポリオキシエチレンアルキルエステル類、ソルビタンアルキルエステル類、モノグリセリドアルキルエステル類等のノニオン系界面活性剤、アルキルベンゼンスルホン酸塩類、アルキルナフタレンスルホン酸塩類、アルキル硫酸塩類、アルキルスルホン酸塩類、スルホコハク酸エステル塩類等のアニオン性界面活性剤、アルキルベタイン類、アミノ酸類等の両性界面活性剤が挙げられる。 Examples of the surfactant include nonionic surfactants such as polyoxyethylene alkyl ethers, polyoxyethylene alkylaryl ethers, polyoxyethylene alkyl esters, sorbitan alkyl esters, and monoglyceride alkyl esters, and alkylbenzene sulfonic acids. Examples include anionic surfactants such as salts, alkylnaphthalene sulfonates, alkyl sulfates, alkyl sulfonates, and sulfosuccinic acid ester salts, and amphoteric surfactants such as alkyl betaines and amino acids.
 有機溶剤としては、例えば、イソプロピルアルコール、ベンジルアルコール、エチルセロソルブ、ブチルセロソルブ、フェニルセロソルブ、プロピレングリコール、ジアセトンアルコールが挙げられる。
 有機溶剤は、単独で用いてもよく、また、水溶液と併用してもよい。
Examples of the organic solvent include isopropyl alcohol, benzyl alcohol, ethyl cellosolve, butyl cellosolve, phenyl cellosolve, propylene glycol, and diacetone alcohol.
The organic solvent may be used alone or in combination with an aqueous solution.
 現像処理の条件に特に制限はない。現像温度は10~50℃が好ましく、15~45℃がより好ましく、20~40℃がさらに好ましい。現像方法は、浸漬現像法、スプレー現像法、ブラシ現像法、超音波現像法等のいずれかの方法によることができる。 There are no particular restrictions on the conditions for development processing. The developing temperature is preferably 10 to 50°C, more preferably 15 to 45°C, even more preferably 20 to 40°C. The developing method can be any method such as an immersion developing method, a spray developing method, a brush developing method, an ultrasonic developing method, or the like.
(2-5)硬化処理
 硬化処理としては、熱硬化処理、光硬化処理等が挙げられ、熱硬化処理が好ましい。
 熱硬化処理条件は、温度は100~280℃の範囲、好ましくは150~250℃の範囲で選ばれ、時間は5~60分間の範囲で選ばれる。
(2-5) Curing Treatment Examples of the curing treatment include thermosetting treatment and photocuring treatment, with thermosetting treatment being preferred.
As for the heat curing treatment conditions, the temperature is selected in the range of 100 to 280°C, preferably in the range of 150 to 250°C, and the time is selected in the range of 5 to 60 minutes.
 以上のようにして形成させたブラックマトリックスの高さは、0.5~5μmが好ましく、0.8~4μmがより好ましい。さらに、厚さ1μm当たりの光学濃度(OD)は、2.0以上が好ましく、2.5以上がより好ましく、3.0以上がさらに好ましく、3.2以上が特に好ましい。 The height of the black matrix formed as described above is preferably 0.5 to 5 μm, more preferably 0.8 to 4 μm. Furthermore, the optical density (OD) per 1 μm of thickness is preferably 2.0 or more, more preferably 2.5 or more, even more preferably 3.0 or more, and particularly preferably 3.2 or more.
[カラーフィルター]
 ブラックマトリックスを設けた透明基板上に、上記(2-1)~(2-5)と同じプロセスで、赤色(R)、緑色(G)、青色(B)のうち一色の色材を含有する感光性樹脂組成物を塗布し、乾燥した後、塗膜の上にフォトマスクを重ね、このフォトマスクを介して画像露光、現像、必要に応じて熱硬化又は光硬化により画素画像を形成させ、着色層を作成する。この操作を、R、G、Bの三色の感光性樹脂組成物についてそれぞれ行うことによって、カラーフィルターを形成することができる。これらの順番は上記に限定されるものではない。
[Color filter]
Containing a color material of one color among red (R), green (G), and blue (B) on a transparent substrate provided with a black matrix using the same process as in (2-1) to (2-5) above. After applying the photosensitive resin composition and drying, a photomask is placed on the coating film, and a pixel image is formed by image exposure and development through this photomask, and if necessary, thermal curing or photocuring, Create a colored layer. By performing this operation for each of the three color photosensitive resin compositions of R, G, and B, a color filter can be formed. These orders are not limited to the above order.
(2-6)透明電極の形成
 カラーフィルターは、このままの状態で画像上にITO等の透明電極を形成して、カラーディスプレー、液晶表示装置等の部品の一部として使用することができる。
 表面平滑性や耐久性を高めるため、必要に応じ、画像上にポリアミド、ポリイミド等のトップコート層を設けることもできる。一部の用途、例えば平面配向型駆動方式(IPSモード)の用途においては、透明電極を形成しないこともある。
(2-6) Formation of transparent electrodes The color filter can be used as a part of components of color displays, liquid crystal display devices, etc. by forming transparent electrodes such as ITO on the image as it is.
In order to improve surface smoothness and durability, a top coat layer of polyamide, polyimide, etc. can be provided on the image, if necessary. In some applications, for example, in applications using a planar alignment drive system (IPS mode), a transparent electrode may not be formed.
[着色スペーサー]
 スペーサーをTFT型LCDに使用する場合、TFTに入射する光によりスイッチング素子としてTFTが誤作動を起こすことがあり、着色スペーサーはこれを防止するために用いられる。例えば、日本国特開平8-234212号公報にスペーサーを遮光性とすることが記載されている。
 本発明の硬化物からなる着色スペーサーは、着色スペーサー用のマスクを用いる以外は前述のブラックマトリックスと同様の方法で形成することができる。
[Colored spacer]
When a spacer is used in a TFT type LCD, the TFT as a switching element may malfunction due to light incident on the TFT, and the colored spacer is used to prevent this. For example, Japanese Patent Application Laid-Open No. 8-234212 describes that the spacer has a light-shielding property.
Colored spacers made of the cured product of the present invention can be formed in the same manner as the black matrix described above, except for using a mask for colored spacers.
[隔壁]
 本発明の硬化物からなる隔壁について、その製造方法に従って説明する。
 本発明の硬化物からなる隔壁は、例えば、隔壁が設けられるべき支持体上に、本発明の感光性樹脂組成物を塗布し、乾燥し、乾燥後の塗膜の上にフォトマスクを置き、フォトマスクを介して露光(画像露光)し、現像し、必要に応じて硬化処理する方法により形成できる。
[Bulkhead]
The partition wall made of the cured product of the present invention will be explained according to its manufacturing method.
The partition wall made of the cured product of the present invention can be obtained, for example, by applying the photosensitive resin composition of the present invention onto a support on which the partition wall is to be provided, drying it, and placing a photomask on the dried coating film. It can be formed by exposing through a photomask (image exposure), developing, and, if necessary, curing.
(3-1)支持体
 隔壁を形成するための支持体としては、上述した、ブラックマトリックスを形成するための支持体と同様のものを用いることができる。
(3-1) Support As the support for forming the partition walls, the same support as the above-mentioned support for forming the black matrix can be used.
(3-2)隔壁の形成
 隔壁の形成方法における、支持体への感光性樹脂組成物の塗布方法、乾燥方法、露光方法、現像方法及び硬化処理の具体的方法は、上述したブラックマトリックスの形成と同様の方法を採用することができる。
(3-2) Formation of partition walls In the method of forming partition walls, the specific methods of coating the photosensitive resin composition on the support, drying method, exposure method, development method, and curing treatment are as follows: Formation of the black matrix described above A similar method can be adopted.
 隔壁の大きさや形状等は、これを適用する有機電界発光素子の仕様等によって適宜調整されるが、感光性樹脂組成物より形成される隔壁の高さは、0.5~10μm程度が好ましい。 The size, shape, etc. of the partition walls are appropriately adjusted depending on the specifications of the organic electroluminescent device to which they are applied, but the height of the partition walls formed from the photosensitive resin composition is preferably about 0.5 to 10 μm.
[有機電界発光素子]
 上述した方法により製造された隔壁を備える支持体を用いて、種々の有機電界発光素子が製造される。
 例えば、有機電界発光素子を形成する方法は特に限定されないが、好ましくは、上述した方法により支持体上に隔壁を形成した後に、画素等の有機層を形成することによって、有機電界発光素子が製造される。
 有機層の形成方法としては、機能材料を真空状態で昇華させ、基板上の隔壁により囲まれた領域内に付着させて成膜する蒸着法や、キャスト法、スピンコート法、インクジェット印刷法といったウェットプロセスが挙げられる。
[Organic electroluminescent device]
Various organic electroluminescent devices are manufactured using a support provided with partition walls manufactured by the method described above.
For example, the method for forming an organic electroluminescent device is not particularly limited, but preferably, the organic electroluminescent device is manufactured by forming partition walls on a support by the method described above, and then forming an organic layer such as a pixel. be done.
Methods for forming the organic layer include vapor deposition, in which a functional material is sublimated in a vacuum, and deposited within an area surrounded by partition walls on a substrate, and wet methods, such as casting, spin coating, and inkjet printing. One example is the process.
 有機電界発光素子のタイプとしては、ボトムエミッション型やトップエミッション型が挙げられる。
 ボトムエミッション型では、例えば、透明電極を積層したガラス基板上に隔壁を形成し、隔壁で囲まれた開口部に正孔輸送層、発光層、電子輸送層、金属電極層を積層して作成される。一方でトップエミッション型では、例えば、金属電極層を積層したガラス基板上に隔壁を形成し、隔壁で囲まれた開口部に電子輸送層、発光層、正孔輸送層、透明電極層を積層して作成される。
 発光層としては、日本国特開2009-146691号公報や日本国特許第5734681号公報に記載されているような有機電界発光層が挙げられる。また、日本国特許第5653387号公報や日本国特許第5653101号公報に記載されているような量子ドットを用いてもよい。
Types of organic electroluminescent devices include bottom emission type and top emission type.
In the bottom emission type, for example, partition walls are formed on a glass substrate laminated with transparent electrodes, and a hole transport layer, a light emitting layer, an electron transport layer, and a metal electrode layer are stacked in the opening surrounded by the partition walls. Ru. On the other hand, in the top emission type, for example, partition walls are formed on a glass substrate laminated with a metal electrode layer, and an electron transport layer, a light emitting layer, a hole transport layer, and a transparent electrode layer are stacked in the opening surrounded by the partition walls. Created by
Examples of the light-emitting layer include organic electroluminescent layers as described in Japanese Patent Application Publication No. 2009-146691 and Japanese Patent No. 5734681. Alternatively, quantum dots such as those described in Japanese Patent No. 5653387 and Japanese Patent No. 5653101 may be used.
 層構成はこれに限定されず、例えば、正孔輸送層、電子輸送層の各層は発光効率の観点から二層以上からなる積層構成でもよい。各層の厚みは特に限定されないが、発光効率や輝度の観点から、1~500nmが好ましい。 The layer structure is not limited to this, and for example, each layer of the hole transport layer and the electron transport layer may have a laminated structure consisting of two or more layers from the viewpoint of luminous efficiency. The thickness of each layer is not particularly limited, but from the viewpoint of luminous efficiency and brightness, it is preferably 1 to 500 nm.
 有機電界発光素子は、開口部ごとにRGB各色を分けて形成してもよく、1つの開口部に二色以上を積層してもよい。有機電界発光素子は信頼性向上の観点から、封止層を備えていてもよい。封止層は空気中の水分が有機電界発光素子に吸着し、発光効率を低下することを防ぐ機能を有する。有機電界発光素子は、光取り出し効率向上の観点から、空気との界面に低反射膜を備えていてもよい。低反射膜を空気と素子との界面に配置することで屈折率のギャップを小さくし、界面での反射を抑制することが期待できる。このような低反射膜には、例えば、モスアイ構造、超多層膜の技術が適用されうる。 The organic electroluminescent element may be formed with RGB colors separated for each opening, or two or more colors may be stacked in one opening. The organic electroluminescent device may include a sealing layer from the viewpoint of improving reliability. The sealing layer has a function of preventing moisture in the air from adsorbing to the organic electroluminescent element and reducing luminous efficiency. The organic electroluminescent device may include a low-reflection film at the interface with air from the viewpoint of improving light extraction efficiency. By arranging a low-reflection film at the interface between air and the element, it is expected that the gap in refractive index will be reduced and reflection at the interface will be suppressed. For example, a moth-eye structure or a super multilayer film technique can be applied to such a low reflection film.
 有機電界発光素子を画像表示装置の画素として使用する場合には、ある画素の発光層の光が他の画素に漏れることを防止し、さらに、電極等が金属である場合には外光の反射に伴う画像品質の低下を防止するために、有機電界発光素子を構成する隔壁に遮光性を付与することが好ましい。
 有機電界発光素子においては、隔壁の上面及び下面に電極を付与するため、絶縁性の観点から、隔壁は高抵抗、低誘電率であることが好ましい。そのため、隔壁に遮光性を付与するために着色剤を使用する場合には、高抵抗かつ低誘電率である前記有機顔料を用いることが好ましい。
When using an organic electroluminescent device as a pixel in an image display device, it is necessary to prevent light from the light-emitting layer of one pixel from leaking to other pixels, and to prevent the reflection of external light if the electrodes are made of metal. In order to prevent the image quality from deteriorating due to this, it is preferable to impart light-shielding properties to the partition walls constituting the organic electroluminescent device.
In an organic electroluminescent device, since electrodes are provided on the upper and lower surfaces of the partition walls, from the viewpoint of insulation, the partition walls preferably have high resistance and low dielectric constant. Therefore, when using a coloring agent to impart light-shielding properties to the partition walls, it is preferable to use the organic pigment that has high resistance and low dielectric constant.
[画像表示装置]
 本発明の画像表示装置は、本発明の硬化物を備える。
 本発明の画像表示装置としては、例えば、前記したブラックマトリックスや隔壁を備える画像表示装置が挙げられる。
 画像表示装置としては、画像や映像を表示する装置であれば特に限定は受けないが、後述する液晶表示装置や有機ELディスプレイが挙げられる。
[Image display device]
The image display device of the present invention includes the cured product of the present invention.
Examples of the image display device of the present invention include the image display device provided with the above-mentioned black matrix or partition wall.
The image display device is not particularly limited as long as it is a device that displays images or videos, and includes liquid crystal display devices and organic EL displays, which will be described later.
[液晶表示装置]
 本発明における液晶表示装置は、例えば、前記したブラックマトリックスを有するカラーフィルターを用いて作製できる。なお、カラー画素やブラックマトリックスの形成順序や形成位置等、特に制限を受けるものではない。
[Liquid crystal display device]
The liquid crystal display device according to the present invention can be manufactured using, for example, the color filter having the black matrix described above. Note that there are no particular restrictions on the formation order or formation position of color pixels and black matrices.
 液晶表示装置は、通常、カラーフィルター上に配向膜を形成し、この配向膜上にスペーサーを散布した後、対向基板と貼り合わせて液晶セルを形成し、形成した液晶セルに液晶を注入し、対向電極に結線して完成する。配向膜としては、ポリイミド等の樹脂膜が好適である。配向膜の形成には、通常、グラビア印刷法及び/又はフレキソ印刷法が採用され、配向膜の厚さは数10nmとされる。熱焼成によって配向膜の硬化処理を行った後、紫外線の照射やラビング布による処理によって表面処理し、液晶の傾きを調整しうる表面状態に加工される。 Generally, a liquid crystal display device forms an alignment film on a color filter, scatters spacers on this alignment film, and then attaches it to a counter substrate to form a liquid crystal cell. Liquid crystal is injected into the formed liquid crystal cell. Complete by connecting to the counter electrode. As the alignment film, a resin film such as polyimide is suitable. Gravure printing and/or flexographic printing are usually used to form the alignment film, and the thickness of the alignment film is several tens of nanometers. After the alignment film is hardened by thermal baking, the surface is treated by irradiation with ultraviolet rays or treatment with a rubbing cloth to obtain a surface condition that allows adjustment of the tilt of the liquid crystal.
 スペーサーとしては、対向基板とのギャップ(隙間)に応じた大きさのものが用いられ、2~8μmのものが好適である。カラーフィルター基板上に、フォトリソグラフィー法によって透明樹脂膜のフォトスペーサー(PS)を形成し、これをスペーサーの代わりに活用することもできる。対向基板としては、通常、アレイ基板が用いられ、特にTFT(薄膜トランジスタ)基板が好適である。 The spacer used has a size that corresponds to the gap with the opposing substrate, and is preferably 2 to 8 μm. It is also possible to form a photospacer (PS) of a transparent resin film on the color filter substrate by photolithography and use this instead of the spacer. As the counter substrate, an array substrate is usually used, and a TFT (thin film transistor) substrate is particularly suitable.
 対向基板との貼り合わせのギャップは、液晶表示装置の用途によって異なるが、2~8μmの範囲が好ましい。対向基板と貼り合わせた後、液晶注入口以外の部分は、エポキシ樹脂等のシール材によって封止する。シール材は、UV照射及び/又は加熱することによって硬化させ、液晶セル周辺がシールされる。
 周辺をシールされた液晶セルは、パネル単位に切断した後、真空チャンバー内で減圧とし、上記液晶注入口を液晶に浸漬した後、チャンバー内をリークすることによって、液晶を液晶セル内に注入する。液晶セル内の減圧度は、1×10-7~1×10-2Paが好ましく、1×10-6~1×10-3Paがより好ましい。また、減圧時に液晶セルを加温することが好ましく、加温温度は30~100℃が好ましく、50~90℃がより好ましい。減圧時の加温保持は、10~60分間が好ましい。その後液晶中に浸漬される。液晶を注入した液晶セルは、液晶注入口を、UV硬化樹脂を硬化させて封止することによって、液晶表示装置(パネル)が完成する。
The bonding gap with the counter substrate varies depending on the use of the liquid crystal display device, but is preferably in the range of 2 to 8 μm. After bonding to the counter substrate, parts other than the liquid crystal injection port are sealed with a sealing material such as epoxy resin. The sealing material is cured by UV irradiation and/or heating, and the periphery of the liquid crystal cell is sealed.
The liquid crystal cell whose periphery is sealed is cut into panel units, the pressure is reduced in a vacuum chamber, the liquid crystal injection port is immersed in the liquid crystal, and the liquid crystal is injected into the liquid crystal cell by leaking the inside of the chamber. . The degree of reduced pressure within the liquid crystal cell is preferably 1×10 −7 to 1×10 −2 Pa, more preferably 1×10 −6 to 1×10 −3 Pa. Further, it is preferable to heat the liquid crystal cell when the pressure is reduced, and the heating temperature is preferably 30 to 100°C, more preferably 50 to 90°C. It is preferable to keep the temperature under reduced pressure for 10 to 60 minutes. It is then immersed in liquid crystal. A liquid crystal display device (panel) is completed by curing the liquid crystal injection port of the liquid crystal cell into which the liquid crystal is injected and sealing it with a UV curing resin.
 液晶の種類には特に制限がなく、芳香族系、脂肪族系、多環状化合物等、従来から知られている液晶であって、リオトロピック液晶、サーモトロピック液晶等のいずれでもよい。サーモトロピック液晶には、ネマティック液晶、スメスティック液晶及びコレステリック液晶等が知られているが、いずれであってもよい。 The type of liquid crystal is not particularly limited, and it may be any conventionally known liquid crystal such as aromatic, aliphatic, polycyclic compounds, etc., such as lyotropic liquid crystal, thermotropic liquid crystal, etc. Nematic liquid crystals, smectic liquid crystals, cholesteric liquid crystals, etc. are known as thermotropic liquid crystals, but any of them may be used.
[有機ELディスプレイ]
 本発明における有機ELディスプレイは、例えば、前記したブラックマトリックスを有するカラーフィルターや前記した隔壁を有する有機電界発光素子を用いて作製できる。
[Organic EL display]
The organic EL display of the present invention can be produced using, for example, the color filter having the black matrix described above or the organic electroluminescent element having the partition walls described above.
 本発明におけるカラーフィルターを用いて有機ELディスプレイを作製する場合、例えば図1に示すように、まず透明支持基板10上に、感光性樹脂組成物により形成されたパターン(すなわち、画素20、及び隣接する画素20の間に設けられたブラックマトリックス(図示せず))が形成されてなるカラーフィルターを作製し、該カラーフィルター上に有機保護層30及び無機酸化膜40を介して有機発光体500を積層することによって、有機EL素子100を作製することができる。なお、画素20及びブラックマトリックスの内、少なくとも一つは本発明の感光性樹脂組成物を用いて作製されたものである。有機発光体500の積層方法としては、カラーフィルター上面へ透明陽極50、正孔注入層51、正孔輸送層52、発光層53、電子注入層54、及び陰極55を逐次形成していく方法や、別基板上へ形成した有機発光体500を無機酸化膜40上に貼り合わせる方法等が挙げられる。このようにして作製された有機EL素子100を用い、例えば「有機ELディスプレイ」(オーム社、2004年8月20日発行、時任静士、安達千波矢、村田英幸著)に記載された方法等にて、有機ELディスプレイを作製することができる。 When producing an organic EL display using the color filter of the present invention, for example, as shown in FIG. A color filter is prepared in which a black matrix (not shown) is provided between pixels 20, and an organic light emitter 500 is formed on the color filter via an organic protective layer 30 and an inorganic oxide film 40. By stacking, the organic EL element 100 can be manufactured. Note that at least one of the pixels 20 and the black matrix was produced using the photosensitive resin composition of the present invention. The organic light emitter 500 can be laminated by sequentially forming a transparent anode 50, a hole injection layer 51, a hole transport layer 52, a light emitting layer 53, an electron injection layer 54, and a cathode 55 on the top surface of the color filter. , a method of bonding the organic light emitter 500 formed on a separate substrate onto the inorganic oxide film 40, and the like. Using the organic EL element 100 produced in this way, for example, the method described in "Organic EL Display" (Ohmsha, published August 20, 2004, written by Shizushi Tokito, Chinaya Adachi, and Hideyuki Murata), etc. An organic EL display can be manufactured using this method.
 なお、本発明におけるカラーフィルターは、パッシブ駆動方式の有機ELディスプレイにもアクティブ駆動方式の有機ELディスプレイにも適用可能である。 Note that the color filter in the present invention is applicable to both passive drive type organic EL displays and active drive type organic EL displays.
 以下、実施例を挙げて本発明をより具体的に説明するが、本発明はその要旨を超えない限り以下の実施例に限定されるものではない。
 以下の実施例及び比較例で用いた顔料分散液、感光性樹脂組成物の構成成分は、次の通りである。
EXAMPLES Hereinafter, the present invention will be described in more detail with reference to Examples, but the present invention is not limited to the following Examples unless it exceeds the gist thereof.
The components of the pigment dispersion liquid and photosensitive resin composition used in the following Examples and Comparative Examples are as follows.
<顔料-1>
 BIRLA CARBON社製「RAVEN1060」(カーボンブラック)。
<分散剤-1>
 ビックケミー社製「DISPERBYK-167」(ウレタン系高分子分散剤)。
<分散助剤-1>
 ルーブリゾール社製「S12000-S」(銅フタロシアニンスルホネート誘導体)。
<有機溶剤>
 プロピレングリコールモノメチルエーテルアセテート(PGMEA)。
<Pigment-1>
"RAVEN1060" (carbon black) manufactured by BIRLA CARBON.
<Dispersant-1>
"DISPERBYK-167" (urethane polymer dispersant) manufactured by BYK Chemie.
<Dispersion aid-1>
"S12000-S" (copper phthalocyanine sulfonate derivative) manufactured by Lubrizol.
<Organic solvent>
Propylene glycol monomethyl ether acetate (PGMEA).
<アルカリ可溶性樹脂-1>
 後述する合成例で得た樹脂を用いた。
<光重合性化合物-1>
 日本化薬社製「KAYARAD DPHA」(多官能アクリレート)。
<光重合開始剤-1>
 常州強力電子新材料社製「TR-PBG-304」(カルバゾール骨格を有するオキシムエステル系化合物)。
<界面活性剤-1>
 DIC社製「メガファックF554」(フッ素系界面活性剤)。
<添加剤-1>
 信越化学工業社製「X-12-1048」(多官能アクリルシラン)。
<Alkali-soluble resin-1>
A resin obtained in a synthesis example described later was used.
<Photopolymerizable compound-1>
"KAYARAD DPHA" (multifunctional acrylate) manufactured by Nippon Kayaku Co., Ltd.
<Photopolymerization initiator-1>
"TR-PBG-304" manufactured by Changzhou Strong Electronics New Materials Co., Ltd. (oxime ester compound having a carbazole skeleton).
<Surfactant-1>
"Megafac F554" (fluorine surfactant) manufactured by DIC.
<Additive-1>
"X-12-1048" (polyfunctional acrylic silane) manufactured by Shin-Etsu Chemical Co., Ltd.
<合成例:アルカリ可溶性樹脂の合成> <Synthesis example: Synthesis of alkali-soluble resin>
Figure JPOXMLDOC01-appb-C000039
Figure JPOXMLDOC01-appb-C000039
 上記構造のエポキシ化合物(エポキシ当量264)240質量部、メタクリル酸81.6質量部、メトキシブチルアセテート263.1質量部、トリフェニルホスフィン6.4質量部、及びパラメトキシフェノール0.16質量部を、温度計、攪拌機、冷却管を取り付けたフラスコに入れ、攪拌しながら90℃で酸価が5mgKOH/g以下になるまで12時間反応させた。
 次いで、上記反応により得られた反応液にトリメチロールプロパン(TMP)8.3質量部、ビフェニルテトラカルボン酸2無水物(BPDA)80.7質量部、テトラヒドロフタル酸無水物(THPA)51.6質量部を、温度計、攪拌機、冷却管を取り付けたフラスコに入れ、攪拌しながら105℃までゆっくり昇温し反応させ、固形分酸価112mgKOH/g、GPCで測定したポリスチレン換算の重量平均分子量(Mw)2500であるアルカリ可溶性樹脂を得た。
240 parts by mass of the epoxy compound having the above structure (epoxy equivalent: 264), 81.6 parts by mass of methacrylic acid, 263.1 parts by mass of methoxybutyl acetate, 6.4 parts by mass of triphenylphosphine, and 0.16 parts by mass of paramethoxyphenol. The mixture was placed in a flask equipped with a thermometer, a stirrer, and a cooling tube, and the mixture was reacted at 90° C. with stirring for 12 hours until the acid value became 5 mgKOH/g or less.
Next, 8.3 parts by mass of trimethylolpropane (TMP), 80.7 parts by mass of biphenyltetracarboxylic dianhydride (BPDA), and 51.6 parts of tetrahydrophthalic anhydride (THPA) were added to the reaction solution obtained by the above reaction. The mass part was placed in a flask equipped with a thermometer, a stirrer, and a cooling tube, and the temperature was slowly raised to 105°C while stirring to react. An alkali-soluble resin having a Mw) of 2500 was obtained.
<顔料分散液の調製>
 表1に記載の顔料-1、分散剤-1、分散助剤-1、PGMEA及び水を、表1に記載の質量比及び含有水分率となるように混合して混合液を得た。なお、表1中の溶剤の配合割合には、分散剤由来の溶剤及び分散助剤由来の溶剤の量も含まれる。
 この混合液にビーズを加え、ペイントシェーカーにより25~45℃の範囲で6時間分散処理を行った。ビーズとしては、0.5mmφのジルコニアビーズを用い、分散液の2.5倍の質量を加えた。分散終了後、フィルターによりビーズと分散液を分離して、分散液1~8を得た。
<Preparation of pigment dispersion>
Pigment-1, dispersant-1, dispersion aid-1, PGMEA, and water listed in Table 1 were mixed to have the mass ratio and water content listed in Table 1 to obtain a mixed solution. Note that the blending ratio of the solvent in Table 1 also includes the amount of the solvent derived from the dispersant and the solvent derived from the dispersion aid.
Beads were added to this mixed solution and dispersed in a paint shaker at a temperature of 25 to 45° C. for 6 hours. Zirconia beads with a diameter of 0.5 mm were used as beads, and 2.5 times the mass of the dispersion was added. After the dispersion was completed, the beads and the dispersion liquid were separated using a filter to obtain dispersion liquids 1 to 8.
<顔料分散液の評価>
 得られた分散液1~8について以下の評価を行った。
<Evaluation of pigment dispersion>
The following evaluations were performed on the obtained dispersions 1 to 8.
 [粘度]
 分散液1~8それぞれの23℃における粘度をE型粘度計(東機産業社製、RE-80L)で測定した。結果を表1に示す。
[viscosity]
The viscosity of each of Dispersions 1 to 8 at 23°C was measured using an E-type viscometer (manufactured by Toki Sangyo Co., Ltd., RE-80L). The results are shown in Table 1.
 [濾過性]
 分散液1~8それぞれ5mLについて、フィルター(Millipore 1.2μm、メルク社製)を装着したテフロンチューブを用い、常温下で0.004MPaから0.006MPaの圧力を加え、濾過を行い、濾過開始から完了までの時間(秒)を計測した。その値を濾過性とした。結果を表1に示す。
 分散液7は、高粘度で、濾過性が測定できなかったため、以降の評価は行わなかった。
[Filterability]
5 mL of each of dispersions 1 to 8 was filtered using a Teflon tube equipped with a filter (Millipore 1.2 μm, manufactured by Merck & Co., Ltd.) at room temperature by applying a pressure of 0.004 MPa to 0.006 MPa, and from the start of filtration. The time (seconds) until completion was measured. The value was defined as filterability. The results are shown in Table 1.
Dispersion 7 had a high viscosity and the filterability could not be measured, so further evaluation was not performed.
 [粘度安定性]
 得られた分散液1~8を35℃で30日間保管した後、各分散液の23℃における粘度をE型粘度計(東機産業社製、RE-80L)で測定した。結果を表1に示す。
[Viscosity stability]
After storing the obtained dispersions 1 to 8 at 35° C. for 30 days, the viscosity of each dispersion at 23° C. was measured using an E-type viscometer (manufactured by Toki Sangyo Co., Ltd., RE-80L). The results are shown in Table 1.
 [ゼータ電位測定]
 大塚電子社製レーザーゼータ電位計ELSZ-2000ZSを用いて、分散液1をPGMEAで1500倍希釈したのち低誘電率溶剤用セルへ注入し、印加電圧300Vにてゼータ電位を測定した。
[Zeta potential measurement]
Using a laser zeta electrometer ELSZ-2000ZS manufactured by Otsuka Electronics Co., Ltd., Dispersion 1 was diluted 1,500 times with PGMEA and then injected into a cell for a low dielectric constant solvent, and the zeta potential was measured at an applied voltage of 300V.
 分散液1のゼータ電位の絶対値は37mVであった。 The absolute value of the zeta potential of Dispersion 1 was 37 mV.
Figure JPOXMLDOC01-appb-T000040
Figure JPOXMLDOC01-appb-T000040
<感光性樹脂組成物の調製>
 上記調製した分散液1~6、8に、表2に示す各成分を、感光性樹脂組成物の全固形分における各成分の固形分比率が表2の配合割合となるように加え、さらにプロピレングリコールモノメチルエーテルアセテート(PGMEA)、3-メトキシブチルアセテート(MBA)及びジエチレングリコールモノエチルエーテルアセテート(EDGAC)を、感光性樹脂組成物の全固形分の含有割合が14質量%となり、さらには溶剤中のPGMEA/MBA/EDGACの質量比が68/30/2となるように加え、攪拌、溶解させて、実施例1~5、比較例1~2の感光性樹脂組成物を得た。
<Preparation of photosensitive resin composition>
Each component shown in Table 2 was added to the dispersions 1 to 6 and 8 prepared above so that the solid content ratio of each component in the total solid content of the photosensitive resin composition was as shown in Table 2, and propylene Glycol monomethyl ether acetate (PGMEA), 3-methoxybutyl acetate (MBA) and diethylene glycol monoethyl ether acetate (EDGAC) were added to the photosensitive resin composition so that the total solid content was 14% by mass, and furthermore, in the solvent. PGMEA/MBA/EDGAC was added so that the mass ratio was 68/30/2, and the mixture was stirred and dissolved to obtain photosensitive resin compositions of Examples 1 to 5 and Comparative Examples 1 to 2.
<感光性樹脂組成物の評価>
 得られた各感光性樹脂組成物について、以下の評価を行った。
<Evaluation of photosensitive resin composition>
The following evaluations were performed for each of the obtained photosensitive resin compositions.
 [剥離試験]
 雰囲気温度23℃、湿度50%で、長さ100mm×幅5mm×厚み0.7mmのガラス試験片の縦方向の先端部分20mmを、12.5mm/秒の速度で感光性樹脂組成物中に浸漬した後、その位置で4秒間維持し、12.5mm/秒の速度で感光性樹脂組成物から取り出し、該ガラス試験片の先端を下にして垂直に保持した状態で、雰囲気温度23℃、湿度55%、風速0.5±0.2秒の条件下で乾燥させる工程を250回繰り返した。
 その後、該ガラス試験片の先端部(感光性樹脂組成物中に浸漬した部分)について、表裏それぞれの幅方向の両端(稜線部位)、計4カ所を光学顕微鏡で観察し、付着物が見られた稜線部位の数から以下の基準で評価した。結果を表2に示す。
 A:稜線部位に付着物が観察されない。
 B:1稜線部位に付着物が観察される。
 C:2稜線部位以上に付着物が観察される。
 また、各例のガラス試験片の稜線部位を図2に示す。図2においては、実施例1~5、比較例1~2それぞれについて、稜線部位2箇所の光学顕微鏡像を左右に並べて示した。並べた2枚の光学顕微鏡像それぞれの中央付近において上下方向に延びる線が稜線部位であり、各稜線部位よりも内側(図中の中央側)がガラス試験片の先端部である。
[Peeling test]
At an ambient temperature of 23°C and a humidity of 50%, 20 mm of the vertical tip of a glass test piece measuring 100 mm in length x 5 mm in width x 0.7 mm in thickness was immersed in the photosensitive resin composition at a speed of 12.5 mm/sec. After that, the glass test piece was held in that position for 4 seconds, taken out from the photosensitive resin composition at a speed of 12.5 mm/s, and held vertically with the tip of the glass test piece facing down, at an ambient temperature of 23°C and humidity. The drying process was repeated 250 times under conditions of 55% and wind speed of 0.5±0.2 seconds.
Thereafter, the tip of the glass test piece (the part immersed in the photosensitive resin composition) was observed at four locations in total, including both widthwise ends (ridgeline areas) on the front and back sides, and no deposits were observed. The following criteria were used to evaluate the number of ridgeline areas. The results are shown in Table 2.
A: No deposits are observed on the ridge line.
B: Deposits are observed at one ridgeline site.
C: Deposits are observed on two or more ridgeline areas.
Moreover, the ridgeline portion of the glass test piece of each example is shown in FIG. In FIG. 2, optical microscope images of two ridgeline sites are shown side by side for each of Examples 1 to 5 and Comparative Examples 1 to 2. A line extending vertically near the center of each of the two side-by-side optical microscope images is a ridgeline portion, and the area inside each ridgeline portion (center side in the figure) is the tip of the glass test piece.
 [溶解時間]
 ガラス基板上に感光性樹脂組成物を、加熱硬化後の膜厚が1.2μmとなるようにスピンコーターにて塗布し、100Paで60秒間減圧乾燥した後に、ホットプレートで100℃にて120秒間乾燥した。得られた塗膜に、フォトマスクとして、1μm刻みで1μm~30μmの線幅の開口部を有するフォトマスクを使用して、波長365nmでの強度が60mW/cmである紫外線を用いて、露光量が40mJ/cmとなるよう露光処理を施した。
 続いて、0.04質量%のKOH(水酸化カリウム)水溶液よりなる現像液を用い、23℃において水圧0.05MPaのシャワー現像を施したのち、純水にて現像を停止し、水洗スプレーにて洗浄した。シャワー現像時にパターニングが目視できた時間を溶解時間として測定した。結果を表2に示す。
[Dissolution time]
A photosensitive resin composition was applied onto a glass substrate using a spin coater so that the film thickness after heat curing was 1.2 μm, and after drying under reduced pressure at 100 Pa for 60 seconds, it was dried on a hot plate at 100° C. for 120 seconds. Dry. The obtained coating film was exposed to ultraviolet light having an intensity of 60 mW/cm 2 at a wavelength of 365 nm using a photomask having openings with a line width of 1 μm to 30 μm in 1 μm increments. Exposure treatment was performed so that the amount of light was 40 mJ/cm 2 .
Subsequently, shower development was performed at 23° C. and a water pressure of 0.05 MPa using a developer consisting of a 0.04% by mass KOH (potassium hydroxide) aqueous solution, and then the development was stopped with pure water and washed with a washing spray. I washed it. The time when patterning was visible during shower development was measured as the dissolution time. The results are shown in Table 2.
 [最小密着]
 溶解時間の評価でのシャワー現像後のガラス基板を光学顕微鏡で観察し、ガラス基板上にカケ無く良好な直線性で残っているパターン(ラインパターン)のうち、幅が最小のものに対応するフォトマスク開口部の線幅(μm)の値を最小密着とした。この値が小さいほど、基板密着性に優れるといえる。結果を表2に示す。
[Minimum contact]
In evaluating the dissolution time, the glass substrate after shower development is observed with an optical microscope, and among the patterns (line patterns) remaining on the glass substrate with no chipping and good linearity, a photo corresponding to the one with the smallest width is taken. The value of the line width (μm) of the mask opening was defined as the minimum adhesion. It can be said that the smaller this value is, the better the substrate adhesion is. The results are shown in Table 2.
 [線幅]
 溶解時間の評価でのシャワー現像後のガラス基板を光学顕微鏡で観察し、フォトマスクの線幅30μmの開口部に対応するパターンの幅を測定した。結果を表2に示す。
[Line width]
The glass substrate after shower development for evaluation of dissolution time was observed with an optical microscope, and the width of the pattern corresponding to the opening of the photomask with a line width of 30 μm was measured. The results are shown in Table 2.
Figure JPOXMLDOC01-appb-T000041
Figure JPOXMLDOC01-appb-T000041
 表1の結果から、顔料分散液の含有水分率が1.2質量%未満の場合は、顔料分散液を調製した直後の粘度及び濾過性が良好であることが示された。一方、含有水分率が1.2質量%以上になると、急激な増粘が見られ、粘度安定性が悪化することが示された。この理由としては、含有水分率が多くなることで有機溶剤との油液分離が生じたこと、及び分散剤の有機溶剤への溶解性が低下して顔料への均一な吸着が出来なくなったことが考えられる。
 また、顔料分散液の含有水分率が0.95質量%未満の場合は、30日保管後の粘度安定性も良好であることが示された。この理由としては、含有水分率が多くなることで保管期間中に有機溶剤との油液分離が徐々に進行したこと、及び分散剤の有機溶剤への溶解性が低下して顔料への均一な吸着が出来なくなったことが考えられる。
 表2の結果から、顔料分散液の含有水分率が0.14質量%以下になると、剥離試験の結果が悪化することが示された。また、含有水分率が0.14質量%を超える場合は、剥離試験の結果が良好であり、溶解性、最小密着、線幅への影響はないことが分かった。この理由としては、最適な含有水分率であれば、顔料の経時での分散安定性が良好となり凝集体が生じなかったこと、加えて、水分が感光性樹脂組成物の急激な乾燥を抑えることで顔料凝集が抑えられたことが考えられる。
From the results in Table 1, it was shown that when the water content of the pigment dispersion was less than 1.2% by mass, the viscosity and filterability immediately after the pigment dispersion was prepared were good. On the other hand, when the water content was 1.2% by mass or more, rapid thickening was observed and viscosity stability was shown to deteriorate. The reasons for this are that oil-liquid separation from the organic solvent occurred due to the increased moisture content, and that the solubility of the dispersant in the organic solvent decreased, making it impossible to uniformly adsorb it onto the pigment. is possible.
It was also shown that when the water content of the pigment dispersion was less than 0.95% by mass, the viscosity stability after 30 days of storage was also good. The reasons for this are that oil-liquid separation from organic solvents gradually progressed during the storage period as the water content increased, and that the solubility of the dispersant in organic solvents decreased, resulting in uniform dispersion of pigments. It is possible that adsorption is no longer possible.
From the results in Table 2, it was shown that when the water content of the pigment dispersion liquid was 0.14% by mass or less, the peel test results deteriorated. Furthermore, it was found that when the moisture content exceeds 0.14% by mass, the peel test results were good and there was no influence on solubility, minimum adhesion, and line width. The reason for this is that if the moisture content is optimal, the dispersion stability of the pigment over time is good and no aggregates are formed, and in addition, moisture suppresses rapid drying of the photosensitive resin composition. This is thought to be due to the fact that pigment aggregation was suppressed.
 10 透明支持基板
 20 画素
 30 有機保護層
 40 無機酸化膜
 50 透明陽極
 51 正孔注入層
 52 正孔輸送層
 53 発光層
 54 電子注入層
 55 陰極
 100 有機EL素子
 500 有機発光体
10 Transparent support substrate 20 Pixel 30 Organic protective layer 40 Inorganic oxide film 50 Transparent anode 51 Hole injection layer 52 Hole transport layer 53 Light emitting layer 54 Electron injection layer 55 Cathode 100 Organic EL element 500 Organic light emitter

Claims (11)

  1.  (A)顔料、(B)分散剤、有機溶剤及び水を含有する顔料分散液であって、
     前記(A)顔料がカーボンブラックを含有し、
     含有水分率が0.15質量%以上0.9質量%以下である、顔料分散液。
    A pigment dispersion containing (A) a pigment, (B) a dispersant, an organic solvent, and water,
    The pigment (A) contains carbon black,
    A pigment dispersion liquid having a moisture content of 0.15% by mass or more and 0.9% by mass or less.
  2.  含有水分率が0.2質量%以上0.7質量%以下である、請求項1に記載の顔料分散液。 The pigment dispersion according to claim 1, having a moisture content of 0.2% by mass or more and 0.7% by mass or less.
  3.  顔料分散液の全固形分に対する前記(A)顔料の含有割合が60質量%以上である、請求項1に記載の顔料分散液。 The pigment dispersion according to claim 1, wherein the content ratio of the pigment (A) to the total solid content of the pigment dispersion is 60% by mass or more.
  4.  前記(A)顔料と前記(B)分散剤との、質量基準における含有比率((A)顔料/(B)分散剤)が4以上である、請求項1に記載の顔料分散液。 The pigment dispersion according to claim 1, wherein the content ratio ((A) pigment/(B) dispersant) of the (A) pigment and the (B) dispersant on a mass basis is 4 or more.
  5.  さらに(C)分散助剤を含有する、請求項1に記載の顔料分散液。 The pigment dispersion according to claim 1, further comprising (C) a dispersion aid.
  6.  前記(A)顔料と前記(C)分散助剤との、質量基準における含有比率((A)顔料/(C)分散助剤)が10以上である、請求項5に記載の顔料分散液。 The pigment dispersion according to claim 5, wherein the content ratio ((A) pigment/(C) dispersion aid) of the (A) pigment and the (C) dispersion aid on a mass basis is 10 or more.
  7.  請求項1~6のいずれか1項に記載の顔料分散液、(D)アルカリ可溶性樹脂、(E)光重合性化合物及び(F)光重合開始剤を含有する、感光性樹脂組成物。 A photosensitive resin composition containing the pigment dispersion according to any one of claims 1 to 6, (D) an alkali-soluble resin, (E) a photopolymerizable compound, and (F) a photopolymerization initiator.
  8.  感光性樹脂組成物の全固形分に対する前記(A)顔料の含有割合が30質量%以上である、請求項7に記載の感光性樹脂組成物。 The photosensitive resin composition according to claim 7, wherein the content ratio of the pigment (A) to the total solid content of the photosensitive resin composition is 30% by mass or more.
  9.  請求項7に記載の感光性樹脂組成物が硬化された、硬化物。 A cured product obtained by curing the photosensitive resin composition according to claim 7.
  10.  請求項9に記載の硬化物からなる、ブラックマトリックス。 A black matrix consisting of the cured product according to claim 9.
  11.  請求項9に記載の硬化物を有する、画像表示装置。 An image display device comprising the cured product according to claim 9.
PCT/JP2023/016006 2022-04-22 2023-04-21 Pigment dispersion, photosensitive resin composition, cured product, black matrix, and image display device WO2023204314A1 (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007217544A (en) * 2006-02-16 2007-08-30 Nakajima Sangyo Kk Black pigment and method for producing the same
JP2007302798A (en) * 2006-05-12 2007-11-22 Mitsui Mining & Smelting Co Ltd Cobalt-containing black pigment
JP2010031158A (en) * 2008-07-29 2010-02-12 Mitsubishi Materials Corp Black pigment dispersion, production method and application thereof
JP2012026577A (en) * 2011-09-22 2012-02-09 Fujikin Inc Valve stroke adjusting method of direct touch type metal diaphragm valve

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007217544A (en) * 2006-02-16 2007-08-30 Nakajima Sangyo Kk Black pigment and method for producing the same
JP2007302798A (en) * 2006-05-12 2007-11-22 Mitsui Mining & Smelting Co Ltd Cobalt-containing black pigment
JP2010031158A (en) * 2008-07-29 2010-02-12 Mitsubishi Materials Corp Black pigment dispersion, production method and application thereof
JP2012026577A (en) * 2011-09-22 2012-02-09 Fujikin Inc Valve stroke adjusting method of direct touch type metal diaphragm valve

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