WO2023188724A1 - Printing device - Google Patents

Printing device Download PDF

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Publication number
WO2023188724A1
WO2023188724A1 PCT/JP2023/001795 JP2023001795W WO2023188724A1 WO 2023188724 A1 WO2023188724 A1 WO 2023188724A1 JP 2023001795 W JP2023001795 W JP 2023001795W WO 2023188724 A1 WO2023188724 A1 WO 2023188724A1
Authority
WO
WIPO (PCT)
Prior art keywords
mask
control unit
suction
printing
tension
Prior art date
Application number
PCT/JP2023/001795
Other languages
French (fr)
Japanese (ja)
Inventor
正幸 萬谷
亮 妹尾
Original Assignee
パナソニックIpマネジメント株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by パナソニックIpマネジメント株式会社 filed Critical パナソニックIpマネジメント株式会社
Priority to CN202380013195.0A priority Critical patent/CN117858806A/en
Publication of WO2023188724A1 publication Critical patent/WO2023188724A1/en

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41FPRINTING MACHINES OR PRESSES
    • B41F15/00Screen printers
    • B41F15/08Machines
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41FPRINTING MACHINES OR PRESSES
    • B41F15/00Screen printers
    • B41F15/14Details
    • B41F15/34Screens, Frames; Holders therefor
    • B41F15/36Screens, Frames; Holders therefor flat
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41FPRINTING MACHINES OR PRESSES
    • B41F15/00Screen printers
    • B41F15/14Details
    • B41F15/40Inking units
    • B41F15/42Inking units comprising squeegees or doctors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41FPRINTING MACHINES OR PRESSES
    • B41F15/00Screen printers
    • B41F15/14Details
    • B41F15/44Squeegees or doctors
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering

Definitions

  • the present disclosure relates to a printing device.
  • Patent Document 1 discloses a printing device that prints solder on a printed circuit board heavily mounted on the lower surface of the mask by supplying paste-like solder to the upper surface of the mask and then scratching the upper surface of the mask with a squeegee.
  • the printing device includes a substrate having a mask, a squeegee, a squeegee motor that displaces the squeegee in a direction away from and an approach toward the mask, and an elevating section that displaces a printed circuit board in a direction away from and an approach toward the mask.
  • a support device a detection unit that detects the amount of depression of the squeegee when the squeegee is lowered from a state in which it is in contact with the mask, and the current value of the squeegee motor reaches a predetermined set value, and the amount of depression detected by the detection unit.
  • a calculation unit calculates the amount of change in the amount of depression by comparing the amount with a reference value, and the amount of change in tension is specified from the amount of change in the amount of depression calculated by the calculation unit.
  • the printing device changes the plate separation control pattern based on the specified amount of change in tension, and executes a plate separation operation based on the changed plate separation control pattern.
  • the printing apparatus executes the plate separation operation by changing the amount of descent of the printed circuit board and the descending operation time (that is, the plate separation time) at the time of plate separation, based on the amount of change in the tension of the mask.
  • the plate separation operation executes the plate separation operation by changing the amount of descent of the printed circuit board and the descending operation time (that is, the plate separation time) at the time of plate separation, based on the amount of change in the tension of the mask.
  • the present disclosure was devised in view of the conventional situation described above, and an object of the present disclosure is to provide a printing device that performs plate separation control more suitable for changes in mask tension and suppresses deterioration in print quality of solder paste. do.
  • the present disclosure includes printing a solder paste on a first substrate using a first mask provided with a first printed pattern, and printing a solder paste on a second substrate using a second mask provided with a second printed pattern.
  • a printing device that prints the solder paste on a substrate, wherein the first mask and the second mask have a first region and a second region located on both sides of the first region.
  • the printing device includes a holding unit that holds the substrate, a measurement unit that measures the tension of the first mask and the second mask, and a suction unit that is capable of suctioning the first area of the second mask. a suction part, and after the first mask is replaced with the second mask, the tension of the second mask is measured by the measurement part, and the second mask is measured by the measurement part.
  • a control unit that determines whether suction of the second area by the suction unit is necessary during plate separation between the second substrate and the second mask, which is performed by the holding unit, based on the tension;
  • a printing device comprising: the control unit causing the suction unit to suction the second area when it is determined that suction of the second area is necessary.
  • An overall perspective view of a printing device according to Embodiment 1 A partially transparent perspective view of a printing device according to Embodiment 1
  • a transparent side view of the printing device according to Embodiment 1 Partial cross-sectional side view of the printing section Diagram explaining an example of a print head Partial plan view of printing department A partial plan view of the printing section included in the printing device.
  • FIG. 1 Plan view showing an example of a mask Bottom view showing how the mask is held by the mask holding section Front view showing how the mask is guided by the mask guide
  • FIG. 1 Plan view of the printing section in Embodiment 1 Diagram showing an example of a tension measuring device
  • FIG. 1 Flowchart illustrating an example of a plate separation operation procedure of the printing apparatus according to the first embodiment
  • Diagram illustrating an example of a tension measuring device Diagram explaining plate separation mode (normal mode) Diagram explaining plate separation mode (mask adsorption plate separation mode) Diagram comparing control examples of the table lifting mechanism for each plate separation mode
  • FIG. 2 illustrating an example of an operation procedure when changing a mask model of a printing apparatus according to Embodiment 2.
  • FIG. 1 is an overall perspective view of a printing apparatus 11 according to the first embodiment.
  • the printing device 11 includes a printing unit 13 that prints solder paste Pst (see FIG. 2) such as solder paste on the upper surface of a substrate KB (see FIG. 2) as a printing target, and
  • This device includes a mask changer 15 that stores masks 27 (see FIG. 2) supplied to the section 13.
  • the mask 27 includes a stencil SUS provided with an opening pattern for printing the solder paste Pst on the substrate KB, and a mask frame 271 (see FIG. 8) that holds the stencil SUS while applying tension.
  • the printing unit 13 has a substrate transport holding unit 21 on a base 19 (see FIG. 2) covered by a printing unit cover 17, and prints solder paste Pst on the board KB transported to a predetermined printing position. .
  • the mask changer 15 is provided adjacent to the rear of the printing section 13.
  • the housing 23 of the mask changer 15 has an internal space SP (see FIG. 2) in which the magazine 25 can be stored, and a mask 27 is stored in the lower part of the rear side of the housing 23 in the internal space SP.
  • An opening 29 is provided through which the magazine 25 can be taken in and taken out.
  • the mask changer 15 has a mask passing opening 71 (see FIG. 2) for supplying the mask 27 to the printing section 13, and is spatially connected to the inside of the printing section 13 through this mask passing opening 71.
  • the housing 23 of the mask changer 15 has a touch panel 31 capable of outputting an alarm sound or an alarm screen, or other illumination device (for example, LED, etc.) at the upper part of the rear side.
  • FIG. 2 is a partially transparent perspective view of the printing device 11 according to the first embodiment.
  • FIG. 3 is a perspective side view of the printing device 11 according to the first embodiment.
  • FIG. 4 is a partially sectional side view of the printing section 13.
  • a mask guide 33 is provided above the substrate transport/holding section 21 .
  • the mask guide 33 has an L-shaped cross section, and supports the mask 27 on the bottom surface (horizontal portion 95) while guiding the mask 27 to the mask holding position of the mask holding portion 35 on the side surface (vertical portion 97).
  • a print head 37 and a gas blowing section 43 are provided above the mask guide 33, respectively.
  • two left and right cylinders 45 and four front, rear, left and right cylinders 47 are provided above the mask holding position.
  • a camera moving mechanism 49, a camera 51, and a mask lower surface cleaner 53 are provided below the mask guide 33.
  • the substrate conveyance holding section 21 is provided on the intermediate conveyor 83.
  • the substrate conveyance/holding section 21 holds the substrate KB, which is lifted and lowered in the Z-axis direction by the table lifting mechanism 67 and carried onto the intermediate conveyor 83, by sandwiching it between the clampers 87. Thereby, the board transport holding section 21 can suppress the positional shift of the board KB during printing of the solder paste Pst.
  • the substrate transport and holding section 21 includes a suction section 20 that can suction the lower surface of the stencil SUS of the mask 27 while holding the substrate KB.
  • the suction unit 20 is connected via piping to a pneumatic circuit (not shown) provided in the printing device 11 .
  • a pneumatic pressure generating source is connected to the pneumatic circuit.
  • the pneumatic source includes a vacuum pump and an air supply source.
  • the suction unit 20 is connected to a pneumatic pressure source and a blow valve via a vacuum valve. The vacuum valve enables switching between the vacuum pressure and the blow pressure of the suction unit 20 by switching between an input port and an output port using a suction control unit 173, which will be described later.
  • the print head 37 includes two squeegees 121, a mask moving section 40, and a tension measuring device 183.
  • the print head 37 is driven by a control section 159A (see FIG. 14).
  • the gas blowing section 43 functions as a pre-use mask cleaner that blows off dust etc. attached to the top surface of the stencil SUS before it becomes contaminated with solder paste Pst (that is, before use or before the first solder paste Pst is supplied to the mask 27).
  • the gas blowing part 43 includes a tubular part 55 that extends above the movement path of the mask 27 in a horizontal direction intersecting the movement direction (X-axis direction) of the mask 27, and a valve part that is connected to one end side of the tubular part 55. It is equipped with 57 and.
  • the tubular portion 55 is provided on the rear end side of two later-described longitudinal guide portions so as to straddle each of the two longitudinal guide portions.
  • the mask lower surface cleaner 53 is provided so as to be movable in the Y-axis direction in the region below the mask guide 33 by a mask lower surface cleaner guide (not shown).
  • the mask lower surface cleaner 53 is connected to a movable base 59 of the camera moving mechanism 49 by a movable base connecting portion (not shown) provided on the mask lower surface cleaner 53, and is integrally moved with the movable base 59 in the Y-axis direction. Moving.
  • the mask lower surface cleaner 53 When the mask lower surface cleaner 53 is not moved in the Y-axis direction by the moving base 59, it waits at a cleaner standby position located in front of the printing position (see FIG. 2).
  • the mask lower surface cleaner 53 can be freely raised and lowered relative to the mask guide 33 (that is, relative to the mask 27 transported to the printing position) by a lower surface cleaner elevating section (not shown) provided in the mask lower surface cleaner guide. There is.
  • the mask moving unit 40 has a function of being able to move (transport) the mask 27 between a magazine 25 included in the mask changer 15, which will be described later, and a printing position in the printing unit 13.
  • the mask moving section 40 has a function of pulling out the mask 27 from the magazine 25, moving it to a printing position, and returning the mask 27 from the printing position in the printing section 13 to the magazine 25.
  • the mask moving unit 40 is connected to the print head 37 and is movable in the Y-axis direction together with the operation of the print head 37.
  • the mask moving section 40 includes a cylinder 110 and a rod 115. When moving the mask 27, the rod 115 is moved in the Z-axis direction using the cylinder 110, and the rod 115 is brought into contact with the mask frame 271.
  • the mask changer 15 is provided adjacent to the rear of the printing section 13 and includes a housing 23, a magazine 25, an elevator 65, a mask passage opening 71, and an elevator 73.
  • the elevator 65 includes a nut portion 75 provided at one end of the elevator body 73 having a shape that extends in a horizontal plane, a ball screw 77 that is threaded into the nut portion 75 and extends in the vertical direction, and a ball screw 77 that rotates. It is provided with an elevating body elevating motor 79 to be driven.
  • the ball screw 77 is rotated by the operation of the elevator motor 79, and the elevator 73 is raised and lowered via the nut portion 75 provided on the ball screw 77.
  • the elevator 65 moves the magazine 25 carried in through the opening 29 of the housing 23 to the opening of the housing 23 by raising and lowering the lifting body 73 that supports the magazine 25 between the work space SP1 and the supply space SP2. 29 and the work space SP1, which is a position away from the opening 29, functions as a storage body moving mechanism.
  • the substrate transport/holding section 21 includes an input conveyor 81, an intermediate conveyor 83, an output conveyor 85, a clamper 87, and a multi-stage table 89.
  • the carry-in conveyor 81, the intermediate conveyor 83, and the carry-out conveyor 85 are lined up in this order in the X-axis direction (referred to as the left-right direction), and the board KB is delivered and conveyed to the carry-in conveyor 81, the intermediate conveyor 83, and the carry-out conveyor 85 in this order. .
  • the board conveyance holding unit 21 moves the board KB carried into the intermediate conveyor 83 up and down in the Z-axis direction, and prints the solder paste Pst on the board KB and prints the space between the lower surface of the stencil SUS of the mask 27 and the board KB. Make version separation executable.
  • the clamper 87 has a plurality of support pins 219 arranged corresponding to the size, shape, etc. of the board KB.
  • the clamper 87 constitutes a unit together with the intermediate conveyor 83, and supports the substrate KB received by the intermediate conveyor 83 from the carry-in conveyor 81 in a state lifted from the intermediate conveyor 83 by each of the plurality of support pins 219, and Clamp and hold both sides of the board KB.
  • the multi-stage table 89 is provided on the base 19, and the entire unit composed of the intermediate conveyor 83 and the clamper 87 is placed on the XY plane and in the vertical direction (Z-axis direction) with respect to the base 19. move it.
  • FIG. 5 is a diagram illustrating an example of the print head 37.
  • illustration of the printing section cover 17 is omitted.
  • the drive of the print head 37 is controlled by a control unit 159A (see FIG. 13).
  • the control unit 159A controls the two squeegees 121, the mask moving unit 40, and the tension measuring device 183.
  • the print head 37 includes a squeegee base 119 that extends in the X-axis direction and is movable in the Y-axis direction, two squeegees 121 that are provided below the squeegee base 119, and an upper surface of the squeegee base 119.
  • the squeegee lifting drive unit 123 is provided. Each of the two squeegees 121 is arranged to face each other in the Y-axis direction.
  • the squeegee lift drive section 123 raises and lowers each of the two squeegees 121 independently below the squeegee base 119.
  • the printing section 13 includes two cylinders 45 as shown in FIG.
  • the cylinder 45 has a lifting rod 117, and the lifting rod 117 can be moved in the Z-axis direction.
  • the lower end of the lifting rod 117 provided in each of the two cylinders 45 can come into contact with the upper surface of the mask frame 271, and fixes the mask 27 placed at the printing position.
  • the printing unit 13 further includes four cylinders 47.
  • the cylinder 47 has a lifting rod that can be moved in the Z-axis direction.
  • the lower end of the rod 115 included in the cylinder 47 can come into contact with the upper surface of the mask frame 271, and fixes the mask 27 placed at the printing position together with the lifting rod 117 of the cylinder 45.
  • the cylinder 47 presses the four corners of the mask frame 271 downward. In this way, the mask 27 is pressed against the mask guide 33 by each of the cylinders 45 and 47, and is fixed at the printing position.
  • the mask moving unit 40 drives the rod 115 using the cylinder 110, lowers the rod 115 along the side surface of the mask frame 271, and then moves the mask changer 15 in the Y-axis direction together with the operation of the print head 37.
  • the mask 27 is stored in the mask changer 15, or the mask 27 is pulled out from the mask changer 15.
  • the print head 37 includes a squeegee base 119 that extends in the X-axis direction and is movable in the Y-axis direction, two squeegees 121 that are provided below the squeegee base 119, and an upper surface of the squeegee base 119.
  • the squeegee lifting drive unit 123 is provided.
  • the two squeegees 121 are arranged to face each other in the Y-axis direction.
  • the squeegee elevation drive section 123 individually raises and lowers each of the two squeegees 121 below the squeegee base 119.
  • the print head 37 has a scraper unit 39.
  • the scraper unit 39 functions as a paste collecting section that collects the solder paste Pst of the mask 27.
  • the scraper unit 39 includes a scraper base 133 extending in the X-axis direction, a scraper lifting cylinder 135 provided on the scraper base 133, and a scraper 137 that is lifted and lowered by the scraper lifting cylinder 135. There is. Similar to the squeegee base 119, the scraper base 133 is supported at both left and right ends by the two squeegee base guides 125, respectively.
  • the scraper base 133 is connected to the squeegee base 119 and moves together with the squeegee base 119 in the Y-axis direction.
  • the scraper unit 39 drives the scraper elevating cylinder 135 to move the scraper 137 up and down.
  • the print head 37 includes an arm portion 139 connected to the scraper base 133, a tension measuring device holding portion 141 connected to the arm portion 139, and a tension measuring device 183.
  • the arm portion 139 is connected to each of the two cylinders 47 provided on the mask changer 15 side and the tension measuring device holding portion 141.
  • the tension measuring device holding section 141 is connected to the arm section 139 and holds the tension measuring device 183.
  • the tension measuring device holding section 141 has an opening at the lower part of the tension measuring device holding section 141, and has a configuration in which the measuring element 187 can be placed on the upper surface (the surface on the Z direction side) of the stencil SUS through this opening.
  • the tension measuring device holder 141 moves up and down in the Z-axis direction together with the print head 37, and the tension measuring device holder 141 moves up and down in the Z-axis direction, and the measuring point 187 is at a standby height position at a predetermined distance from the top surface of the SUS stencil. It is raised and lowered between the mounting height position where it is mounted on the upper surface.
  • the tension measuring device holding section 141 is controlled by the control section 159A, measures the tension of the mask 27 after the measuring element 187 is placed on the upper surface of the stencil SUS, and outputs the measurement result to the control section 159A.
  • FIG. 6 is a partial plan view of the printing section 13.
  • the mask guide 33 includes a pair of guide parts 91 that extend in the Y-axis direction (referred to as the front-back direction) and are arranged in parallel to face each other in the X-axis direction, and a pair of guide parts 91 that extend in the X-axis direction at the front ends of the pair of guide parts 91. It has a left-right direction guide part 93 provided extending therefrom.
  • Each of the pair of guide parts 91 is formed to have an L-shaped cross section, and has a horizontal part 95 and a vertical part 97 formed outside the horizontal part 95.
  • the left-right guide portion 93 is configured to be connected to each horizontal portion 95 of the pair of guide portions 91 .
  • FIG. 7 is a partial plan view of the printing section included in the printing device 11.
  • the mask guide 33 guides the movement of the mask 27 from the printing position to the mask changer 15.
  • the mask 27 has a rectangular shape in plan view, and its left and right Y-axis sides are each guided in the Y-axis direction by a pair of guide portions 91 of the mask guide 33.
  • Mask 27 is fixed in the printing position by cylinder 45 and cylinder 47.
  • FIG. 8 is a plan view showing an example of the mask 27.
  • the mask 27 is composed of a substantially rectangular metal plate.
  • the mask 27 includes a stencil SUS in which a pattern opening 99 corresponding to an electrode pattern (not shown) formed on the surface of the substrate KB is formed.
  • the outer periphery of the mask 27 is supported by a mask frame 271.
  • the mask frame 271 is composed of a front frame body 103 on the front side in the Y direction, a rear frame body 105 on the rear side in the Y direction, a right frame body 107 on the right side in the X direction, and a left frame body 109 on the left side in the X direction, and is made of stencil SUS. and the mask frame 271 are connected by the connecting member 100.
  • each of the pair of guide parts 91 of the mask guide 33 is located near the mask changer 15 on the horizontal plane (XY plane) (that is, near the mask passage opening 71 where the mask 27 is pulled out and stored). It extends to The mask guide 33 serves as a transport path for the mask 27 to be transported between the printing position of the mask 27 and the magazine 25 of the mask changer 15.
  • FIG. 9 is a bottom view showing the mask 27 in the printing position.
  • the gas blowing part 43 is provided with a plurality of gas blowing holes 113 arranged in the X-axis direction on the lower surface side.
  • FIG. 10 is a front view showing how the mask 27 is guided by the mask guide 33.
  • Each of the two cylinders 45 and each of the four cylinders 47 is fixed to a vertical portion 97 of each of the left and right guide portions 91 of the mask guide 33.
  • the two left and right cylinders 45 are each provided above the intermediate portion of the two left and right linear portions of the mask holding portion 35 extending in the Y-axis direction.
  • Each of the four cylinders 47 is provided above the four corners of the mask holding section 35 or near the four corners.
  • FIG. 11 is a partial side view of the printing section 13 in the first embodiment.
  • the mask 27 is fixed at the printing position by the mask frame 271 being pressed by the lifting rod 117 of the cylinder 45 and the rod 115 of the cylinder 47.
  • FIG. 12 is a plan view of the printing section 13 in the first embodiment.
  • the squeegee base 119 has a shape extending in the Y-axis direction.
  • the left and right ends of the squeegee base 119 are supported by two squeegee base guides 125 that extend in the Y-axis direction and are arranged in parallel to face each other in the X-axis direction.
  • a squeegee base moving ball screw 127 extending in the Y-axis direction is provided on the outside (outside in the X-axis direction) of one of the two squeegee base guides 125 .
  • the squeegee base moving ball screw 127 is screwed into a squeegee base nut 129 provided on the squeegee base 119.
  • the squeegee base moving ball screw 127 is connected to the squeegee base drive motor 131, and when the squeegee base moving ball screw 127 is rotated by the drive of the squeegee base drive motor 131, the squeegee base 119 is moved in the Y-axis direction via the squeegee base nut 129. Moving.
  • the mask top surface cleaner 41 has a function of cleaning the top surface of the stencil SUS after the solder paste Pst is collected by the scraper unit 39, and is attached to the squeegee base 119 as shown in FIG. .
  • the mask upper surface cleaner 41 is integrated with the squeegee base 119 to move and clean the mask 27, which has been transported to the printing position together with the print head 37, in the Y-axis direction. Note that in FIG. 11, illustration of the mask upper surface cleaner 41 is omitted.
  • the gas blowing part 43 includes a tubular part 55 that extends above the movement path of the mask 27 in a horizontal direction intersecting the movement direction (X-axis direction) of the mask 27, and a valve part that is connected to one end side of the tubular part 55. It is equipped with 57 and.
  • the tubular portion 55 is provided at the rear end side of each of the two guide portions 91 so as to straddle each of the two guide portions 91 .
  • the tubular portion 55 supplies high-pressure gas GS via the valve portion 57 and injects the high-pressure gas GS from each of the plurality of gas jet holes 113 (see FIG. 12) toward the upper surface of the stencil SUS located below.
  • the mask top surface cleaner 41 is not limited to a device that sprays gas onto the top surface of the stencil SUS (that is, a device that blows); for example, a device that sucks the top surface of the stencil SUS, a device that brushes the top surface of the stencil SUS, or a device that wipes the top surface of the stencil SUS. It may also be something.
  • a camera housing 153 of the camera 51 is attached to a moving base 59.
  • the camera housing 153 is formed in a substantially hexahedral shape.
  • a lower imaging camera 155 is attached to the lower surface
  • an upper imaging camera 157 is attached to the upper surface thereof, with their optical axes extending along the Z-axis.
  • the camera moving mechanism 49 can move the suction section 63 in the Y-axis direction by moving the moving base 59 in the Y-axis direction.
  • the suction section 63 can further be moved by the YZ actuator 61 with respect to the movable base 59 in the direction along the Y axis and the direction along the Z axis.
  • the movement mechanism of this YZ actuator 61 may be a linear drive mechanism, a linear motor mechanism, or the like composed of a rack and a pinion.
  • the suction section 63 is moved by the camera moving mechanism 49 to just in front of the mask passage opening 71.
  • the suction unit 63 is moved to just before the mask passage opening 71, and then raised and lowered by the YZ actuator 61 to the storage height (in the Z-axis direction) of the mask 27 to be supplied, and then moved backward by the YZ actuator 61. Then, it enters the inside of the mask changer 15 and is moved to the position of the frame 101 (specifically, the front frame body 103) of the mask 27 stored in the magazine 25.
  • the suction section 63 is further moved in the Y-axis direction from this mask-facing position. This allows the suction unit 63 to finely adjust the suction position with respect to the frame 101.
  • the suction unit 63 which has been finely adjusted to the suction position, suctions the side surface of the frame 101 (specifically, the front frame body 103) of the mask 27 stored in the magazine 25 of the mask changer 15, and the inside of the magazine 25.
  • the mask 27 can be pulled out into the printing section 13 through the mask passage opening 71 from the mask passage opening 71 .
  • the operation of pulling out and storing the mask 27 is performed by the camera moving mechanism 49 and the print head 37.
  • the camera moving mechanism 49 pulls out the mask 27 from inside the magazine 25 to the middle of the printing position inside the printing section 13.
  • the print head 37 transports the mask 27 that has been pulled out halfway inside the printing section 13 to a printing position where printing processing is performed.
  • the suction unit 63 is connected to, for example, a pneumatic circuit (not shown) provided in the printing device 11 through piping.
  • a pneumatic pressure generating source is connected to the pneumatic circuit.
  • the pneumatic source includes a vacuum pump and an air supply source.
  • the suction unit 63 is connected to a pneumatic pressure source and a blow valve via a vacuum valve.
  • the vacuum valve makes it possible to switch between the vacuum pressure and the blow pressure of the adsorption section 63 by switching between an input port and an output port using a control section 159A, which will be described later.
  • the mask changer 15 and camera moving mechanism 49 pull out the mask 27 stored in the magazine 25 from the magazine 25 and transport it to the printing position.
  • FIG. 13 is a diagram illustrating an example of the tension measuring device 183.
  • FIG. 3 is a perspective view of an arm section 139 and a tension measuring device holding section 141.
  • the tension measuring device 183 is held by a tension measuring device holding section 141 provided on the arm section 139.
  • the arm portion 139 is provided on the print head 37, and the tension measuring device 183 is driven integrally with the print head 37.
  • the tension measuring device 183 measures the tension of the mask 27.
  • the tension measuring device 183 has an arm portion 139 in the print head 37 and a tension measuring device holding portion 141 connected to each other, and is moved integrally with the print head 37 in each of the X-axis direction, the Y-axis direction, and the Z-axis direction. Ru.
  • the tension measuring device 183 measures the tension of the mask 27 when replacing the mask 27 or every time a predetermined number of substrates KB are printed, and outputs the measurement result to the tension measurement control section 178.
  • the tension measuring device 183 has a configuration in which a measuring element 187 capable of measuring tension can be placed on the upper surface of the stencil SUS through an opening 185 formed in the tension measuring device holding portion 141.
  • a measuring element 187 capable of measuring tension can be placed on the upper surface of the stencil SUS through an opening 185 formed in the tension measuring device holding portion 141.
  • the tension measuring device 183 includes a housing 191, a tension measuring device holding section 141, and a tension gauge 193.
  • the tension measuring device holding section 141 is connected to the arm section 139, faces the mask 27, and has a substantially rectangular installation surface.
  • the tension measuring device holding section 141 supports the housing 191 and the tension gauge 193, and accommodates the measuring element 187 in an opening 185 formed at approximately the center of the installation surface.
  • the housing 191 is formed into a cylindrical shape, and accommodates the probe 187, the spindle shaft 189, and the measurement load 195, respectively.
  • a measurement load 195 is applied.
  • the tension of the mask 27 is measured.
  • the spindle shaft 189 is fixedly connected between the measuring head 187 and the connecting part 190, and is moved up and down in the Z-axis direction together with the measuring head 187 to which a measuring load 195 is applied when measuring tension.
  • Ru The connecting portion 190 is connected between the spindle shaft 189 and the tension gauge 193, respectively. In the connection part 190, the tension that pulls the tension gauge 193 or the height position of the connection part 190 changes based on the measurement load 195 applied in the -Z direction and the reaction in the Z direction received from the mask 27.
  • the tension gauge 193 is connected to the connection part 190 and measures the tension of the mask 27 based on the tension in the -Z direction transmitted by the connection part 190 or the amount of descent of the connection part 190 in the -Z direction. measure.
  • the tension gauge 193 is electrically connected to the tension measurement control section 178 and outputs a measurement result to the tension measurement control section 178.
  • FIG. 14 is a block diagram showing a control system of the printing apparatus 11 according to the first embodiment.
  • the control unit 159A in the printing device 11 is a so-called processor, and is configured using, for example, a CPU (Central Processing Unit) or an FPGA (Field Programmable Gate Array), and performs various processing and control in cooperation with the memory 159B. conduct.
  • the control unit 159A refers to programs and data held in the memory 159B, and executes the programs to implement the functions of each unit.
  • each section referred to here includes a substrate transport/holding control section 165, a mask transport/installation control section 167, a printing operation control section 169, an imaging control section 171, an adsorption control section 173, a scraper control section 174, an elevator control section 175, and a viscometer. They include a control section 177, a tension measurement control section 178, and the like.
  • the memory 159B includes, for example, a RAM (Random Access Memory) as a work memory used when executing each process of the control unit 159A, and a ROM (Read Only Memory) that stores programs and data that define the operation of the control unit 159A. and has. Data or information generated or acquired by the control unit 159A is temporarily stored in the RAM. A program that defines the operation of the control unit 159A is written in the ROM.
  • a RAM Random Access Memory
  • ROM Read Only Memory
  • the memory 159B stores, based on the tension of the mask 27 measured by the tension measuring device 183, a first threshold value and a second threshold value for determining the plate separation mode of the substrate KB.
  • the first threshold is a threshold for determining whether the measured tension of the mask 27 is a value that allows normal plate separation control to be performed.
  • the second threshold value is a value smaller than the first threshold value, and is a threshold value for determining whether the measured tension of the mask 27 is a value that allows execution of the mask suction plate separation mode. Note that the first threshold value and the second threshold value may be set to different values for each type of mask 27.
  • the memory 159B stores production data for each mask 27 to be printed and information regarding the masks stored in the magazine 25 of the mask changer 15.
  • the production data includes at least information on the size of each mask and identification information on each mask.
  • the information regarding the masks includes identification information of each mask, information on the storage position in the magazine 25, information on whether the mask has been used for solder printing, and the like.
  • the substrate transport/holding control unit 165 controls the transport of the substrate KB by the substrate transport/holding unit 21 (specifically, carry-in control, carry-out control) and holding control. Further, the substrate transport/holding control unit 165 executes positioning control of the substrate KB with respect to the mask 27 based on a captured image of the substrate KB captured by the camera 51 when the substrate KB is carried in.
  • the board transport holding control unit 165 moves the plurality of feed screws 69 of the table lifting mechanism 67 based on the currently set plate separation mode. are rotated by a motor (not shown) to lower the substrate conveying and holding section 21 in the -Z direction to perform a plate separation operation.
  • the substrate transport/holding control unit 165 carries out the substrate KB which has finished the plate separation operation and is now in the plate separation state.
  • the table elevating mechanism 67 may include a cylinder capable of elevating the substrate KB in the Z-axis direction instead of the feed screw 69.
  • the mask conveyance and installation control unit 167 controls each of the print head 37 and camera movement mechanism 49, and controls the withdrawal and storage of the mask 27 into the mask changer 15. Specifically, the mask transport and installation control unit 167 controls the movement of the moving base 59 in the Y-axis direction by the moving base drive motor 151 and the movement control of the suction unit 63 in the Y-axis direction and the Z-axis direction by the YZ actuator 61. and suction control by the suction unit 63 to the side surface of the frame 101, respectively. After transporting the mask 27 to a predetermined printing position, the mask transport and installation control unit 167 drives each of the cylinders 45 and 47 to hold the mask 27.
  • the printing operation control unit 169 controls printing by driving the print head 37 in the X-axis direction, Y-axis direction, and Z-axis direction. Specifically, the printing operation control unit 169 controls the movement of the squeegee base 119 in the Y-axis direction by the squeegee base drive motor 131, and controls the elevation of the squeegee 121 in the Z-axis direction by the squeegee elevation drive unit 123, respectively. do.
  • the printing operation control unit 169 controls each of the two squeegees 121 based on the parameters of the solder connection operation output from the viscometer control unit 177, and controls each of the two squeegees 121 to transfer the stencil SUS onto the upper surface of the new mask 27.
  • the solder paste Pst is kneaded and adjusted to a predetermined viscosity (target value).
  • the imaging control unit 171 controls the camera 51 to image the lower surface of the board KB held by the board transport holding unit 21 at a predetermined board transport position and the upper surface of the stencil SUS transported to the printing position. . Specifically, the imaging control unit 171 controls the movement of the moving base 59 in the Y-axis direction by the moving base drive motor 151, controls the movement of the camera 51 along the moving base 59 in the X-axis direction, and controls the movement of the camera 51 in the X-axis direction. Imaging control of the upper surface of the board KB by the lower imaging camera 155 provided, and imaging control of the lower surface of the mask 27 by the upper imaging camera 157 included in the camera 51 are respectively executed.
  • the suction control unit 173 connects a port to a vacuum valve provided in the pneumatic circuit based on a control command to start mask suction transmitted from the control unit 159A.
  • a switching signal is transmitted, and the inside of the suction unit 63 included in the camera moving mechanism 49 is made negative pressure by a vacuum pump, and the side surface of the frame 101 (specifically, the front frame body 103 of the frame 101) is suctioned by the suction unit 63.
  • the suction control unit 173 sends a port switching signal to the vacuum valve provided in the pneumatic circuit based on the control command to end mask suction transmitted from the control unit 159A, and changes the port of the vacuum valve to the blow valve. The switch is made to release the suction state of the suction section 63.
  • the suction control unit 173 sends a port switching signal to the vacuum valve provided in the pneumatic circuit based on the control command transmitted from the tension measurement control unit 178. is transmitted, and the inside of the adsorption part 20 of the substrate transfer holding part 21 is made negative pressure by a vacuum pump, and the lower surface of the stencil SUS (an example of the first region) of the mask 27 (specifically, the substrate KB) is applied to the adsorption part 20. (the side that comes into contact with the surface).
  • the suction control unit 173 after the table lifting mechanism 67 has been lowered by a predetermined height (for example, 5 mm, etc.), based on the control command to end the mask suction transmitted from the tension measurement control unit 178, A port switching signal is sent to the vacuum valve provided in the pneumatic circuit, the port of the vacuum valve is switched to the blow valve, and the suction state of the suction section 20 is released.
  • a predetermined height for example, 5 mm, etc.
  • the scraper control unit 174 drives the scraper unit 39 and collects the solder paste Pst from the top surface of the currently installed stencil SUS before the mask conveyance and installation control unit 167 starts replacing the mask 27. Furthermore, when the mask conveyance and installation control section 167 finishes replacing the mask 27, the scraper control section 174 transfers the collected solder paste Pst onto the top surface of the newly brought in stencil SUS.
  • the elevator control unit 175 executes drive control of the elevator motor 79 in the elevator 65 to raise and lower the position (height) of the magazine 25 in the mask changer 15. Further, the elevator control section 175 is configured to include a safety control section 179.
  • the viscometer control unit 177 moves the print head 37 up and down to place the solder paste Pst at the position of the solder paste Pst on the XY plane.
  • the viscometer lifting cylinder 198 is driven to lower the viscometer 197 from the standby height position to the contact height position.
  • the viscometer control unit 177 brings the lower end of the viscometer 197 into contact with the solder paste Pst transferred onto the mask 27, and measures the viscosity of the contacted solder paste Pst.
  • the viscometer control unit 177 obtains the measurement result of the viscosity of the solder paste Pst output from the viscometer 197. Based on the obtained measurement results, the viscometer control unit 177 determines solder connection operation parameters (for example, angle of squeegee 121, printing pressure, connection time, etc.) for adjusting the current viscosity of the solder paste Pst to a predetermined viscosity. Determine. The viscometer control unit 177 outputs the determined solder connection operation parameters to the printing operation control unit 169. When the soldering operation by the printing operation control section 169 is completed, the viscometer control section 177 causes the viscometer 197 to measure the viscosity of the solder paste Pst again.
  • solder connection operation parameters for example, angle of squeegee 121, printing pressure, connection time, etc.
  • the viscometer control unit 177 may determine any one of the plurality of printing conditions recorded in advance in the memory 159B.
  • the printing conditions here include the printing angle of the squeegee 121 with respect to each mask 27, the printing speed of the squeegee 121 (that is, the moving speed during printing), and the like.
  • the tension measurement control unit 178 controls the measurement head of the tension measurement device 183 included in the print head 37 based on the size of the mask 27 stored in the memory 159B.
  • the print head 37 is moved so that the print head 187 is located at the center position Pt of the mask 27 (see FIG. 22) and at the mounting height position.
  • the tension measuring device 183 measures the tension of the mask 27 when the measuring element 187 is placed on the mask 27 .
  • the tension measurement control unit 178 acquires the tension measured by the tension measurement device 183, and determines the plate separation mode based on the acquired tension.
  • the tension measurement control unit 178 changes (sets) the currently set plate separation mode to the determined plate separation mode.
  • the safety control unit 179 executes various controls provided in the internal space SP of the mask changer 15 and controls power supply to the elevator 65. Specifically, the safety control unit 179 executes the above-described control by switching between the first operation mode and the second operation mode.
  • the first operation mode referred to here is a control executed while the operator is replacing the magazine 25 and supplying the mask 27 to the magazine 25, and is a control executed while the operator is replacing the magazine 25 and supplying the mask 27 to the magazine 25, and is a control that is executed while the operator is replacing the magazine 25 and supplying the mask 27 to the magazine 25. This is a control to stop the supply.
  • the safety control unit 179 may generate an alarm sound through the touch panel 31 to alert the operator.
  • the second operation mode is a control that is executed while the mask 27 is being pulled out or stored between the magazine 25 and the printing unit 13, and is a control that is executed while the mask 27 is being pulled out or stored between the magazine 25 and the printing unit 13. This is a control that performs supply.
  • the control unit 159A causes the viscometer control unit 177 to repeatedly perform the viscosity measurement operation of the solder paste Pst and the printing operation control unit 169 to perform the soldering connection operation until the viscosity of the solder paste Pst reaches a predetermined viscosity.
  • FIG. 15 is a flowchart illustrating an example of a plate separation operation procedure of the printing apparatus 11 according to the first embodiment.
  • the processing from step St11 to step St16 in the operation procedure shown in FIG. 15 is a plate separation mode setting process for setting the plate separation mode.
  • the processing from step St17 to step St22 in the operation procedure shown in FIG. 15 is a plate separation operation process for executing plate separation of the printed board KB based on the set plate separation mode.
  • the printing unit 13 executes the operation procedure shown in FIG. 15 at the timing when the type of the board KB to be produced is changed. It should be noted that each of the processes from step St12 to step St16 in the operation procedure shown in FIG. Alternatively, it may be executed at the timing when the power of the printing device 11 is turned on.
  • the mask conveyance and installation control unit 167 determines that there is a change in the type of the board KB based on the production data stored in the memory 159B, the mask conveyance and installation control unit 167 causes the scraper control unit 174 to remove the solder paste Pst placed on the top surface of the stencil SUS. to carry out collection.
  • the mask conveyance and installation control unit 167 transfers the mask 27 currently being used for printing to the board KB, which is a new production target, based on the notification of completion of the solder paste Pst recovery process output from the scraper control unit 174.
  • a mask replacement operation (specifically, a storage operation and a withdrawal operation of the mask 27) for replacing the mask 27 with a corresponding mask 27 is performed (St11).
  • each mechanism of the print head 37 related to the storing or pulling out operation of the mask 27 will be explained.
  • the print head 37 is controlled by the mask transport and installation control section 167 (see FIG. 14) in the control section 159A, and is driven in the X-axis direction, Y-axis direction, and Z-axis direction.
  • the rod 115 is connected to the cylinder 110 and driven integrally with the cylinder 110 in the direction along the Y axis.
  • the rod 115 is moved up and down in the Z-axis direction and comes into contact with the side surface of the frame 101 of the mask 27 pulled out from the magazine 25 in the mask changer 15 by the suction part 63, and is driven in the direction along the Y-axis to move the mask 27. Convey in the direction along the Y axis.
  • the cylinder 110 is provided in the print head 37 that prints the solder paste Pst on the board KB, and is driven integrally with the print head 37.
  • the print head 37 has a squeegee base 119 extending in the direction along the X axis.
  • the mask transport and installation control unit 167 drives the squeegee base drive motor 131, and the rod 115 of the cylinder 110, which is integrally formed with the squeegee base 119, is moved in the direction along the Y axis.
  • the mask conveyance and installation control unit 167 can convey the mask 27 to the printing position along the mask guide 33 by moving the rod 115 in the direction along the Y axis with the rod 115 in contact with the frame 101. .
  • the print head 37 individually raises and lowers each of the two squeegees 121 below the squeegee base 119 by each of the two Z-axis motors 163 provided in the squeegee lift drive section 123. This allows the squeegee 121 to move to the retracted position above the mask 27. In other words, the squeegee 121 can avoid interference with the frame 101 of the mask 27 when moving to the retracted position.
  • the suction unit 63 is provided in a camera moving mechanism 49 that includes a camera 51 that images the upper surface of the substrate KB and the lower surface of the mask 27.
  • the camera moving mechanism 49 has a moving base 59 extending in the direction along the X-axis.
  • the camera moving mechanism 49 is provided movably with respect to the moving base 59 in the extending direction of the moving base 59 (direction along the X-axis).
  • a moving base nut 149 is fixed to this moving base 59.
  • the moving base nut 149 is screwed into a moving base moving ball screw 147 extending in the direction along the Y-axis.
  • the moving base moving ball screw 147 is driven by the moving base drive motor 151.
  • the suction part 63 provided on the moving base 59 moves in the direction along the Y axis together with the camera 51. be done. Thereby, the mask 27 with the frame 101 attracted to the suction part 63 is conveyed by the mask guide 33 in the direction along the Y-axis.
  • the mask conveyance and installation control section 167 (see FIG. 14) in the control section 159A drives the squeegee base drive motor 131 to move the mask 27 while the rod 115 is in contact with the side surface of the frame 101 of the mask 27.
  • the mask 27 can be transported to the printing position, or the mask 27 at the printing position can be transported toward the mask changer 15 side.
  • the mask transport and installation control section 167 (see FIG. 14) in the control section 159A drives the moving base drive motor 151 and the YZ actuator 61 with the suction section 63 in contact with the side surface of the frame 101. , the mask 27 is pulled out from the magazine 25 through the mask passage opening 71, and the mask 27 conveyed to the rear of the printing position by the rod 115 is stored in the magazine 25 through the mask passage opening 71.
  • FIG. 16 is a diagram illustrating an example of the storage operation of the printing device 11.
  • FIG. 17 is a diagram illustrating an example of the storage operation of the printing device 11.
  • the operation procedure regarding the viscosity adjustment of the solder paste Pst is omitted.
  • the mask conveyance and installation control unit 167 in the printing device 11 lowers the rod 115 using the cylinder 110, and moves the rod 115 of the cylinder 110 to the front side of the rear frame 105. (St11-1). Note that the mask conveyance and installation control unit 167 moves the rod 115 until it is located in front of the rear frame 105, lowers the rod 115, and then moves the print head 37 in the direction along the Y axis and in the direction of the mask. The rod 115 may be brought into contact with the front side surface of the rear frame body 105 by moving in a direction approaching the changer 15 . Note that at this time, the camera moving mechanism 49 is on standby at the retracted position.
  • the mask conveyance and installation control unit 167 moves the squeegee base 119 in the direction along the Y axis with the rod 115 in contact with the front side of the rear frame 105, and The print head 37 is moved in a direction approaching the mask changer 15.
  • the mask conveyance and installation control unit 167 moves the mask 27 that the rod 115 has contacted to the limit of movement of the squeegee base 119 (St11-2).
  • the mask transport and installation control unit 167 raises the rod 115 using the cylinder 110, as shown in step St11-3 in FIG. , the print head 37 is moved (evacuated) in a direction away from the mask changer 15.
  • the mask transport and installation control unit 167 moves the camera moving mechanism 49 from the retracted position after the print head 37 is retracted by the mask transport and installation control unit 167.
  • the mask transport and installation control section 167 moves the camera moving mechanism 49 to a position where the suction section 63 comes into contact with the side surface (front surface) of the front frame body 103 (St11-3).
  • the mask conveyance and installation control section 167 moves the camera movement mechanism 49 in the direction along the Y axis and in the direction approaching the mask changer 15 to move the mask 27 that is in contact with the suction section 63 through the mask passage opening 71. It is moved to a predetermined storage position within the magazine 25 (St11-4). At this time, the suction section 63 may store the mask 27 without suctioning the frame 101, or may store the mask 27 while suctioning the frame 101.
  • FIGS. 18 and 19 a procedure for pulling out the mask 27 of the printing apparatus 11 according to the first embodiment will be described.
  • FIG. 18 is a diagram illustrating an example of an operation procedure for pulling out the mask 27 of the printing apparatus 11 according to the first embodiment.
  • FIG. 19 is a diagram illustrating an example of an operation procedure for pulling out the mask 27 of the printing apparatus 11 according to the first embodiment.
  • the mask transport and installation control unit 167 in the printing device 11 moves the camera movement mechanism 49 in the direction along the Y-axis and in the direction closer to the mask changer 15.
  • the suction portion 63 stops at a position immediately in front of the mask passage opening 71.
  • the YZ actuator 61 is controlled by the mask conveyance and installation control section 167 to raise the position (height) of the suction section 63 in the direction along the Z-axis to a position (height) at which the mask 27 can be pulled out from the mask passage opening 71.
  • step St11-5 in FIG. 18 when the suction unit 63 comes into contact with the side surface of the frame 101 of the mask 27 to be pulled out, the suction control unit 173 drives the vacuum valve to remove the frame 101 by the suction unit 63. Adsorption of the side surface is performed (St11-5).
  • the mask conveyance and installation control unit 167 moves the camera movement mechanism 49 in the direction along the Y axis and in the direction away from the mask changer 15, and pulls the mask 27 sucked by the suction unit 63 (St11- 6).
  • the mask conveyance and installation control unit 167 pulls the mask 27 attracted by the attraction unit 63 to the movement limit of the moving base 59, as shown in step St11-6 in FIG.
  • the mask transport and installation control unit 167 moves the camera movement mechanism 49 to avoid interference (collision) between the mask 27 and print head 37 and the camera movement mechanism 49. Evacuate.
  • the mask transport and installation control unit 167 drives the YZ actuator 61 to lower the position (height) of the suction unit 63 in the Z-axis direction, and moves the camera movement mechanism from the transport path of the mask 27 to the printing position.
  • Evacuate 49 Note that the evacuation method is not limited to this.
  • the mask transport and installation control unit 167 may evacuate the camera movement mechanism 49 from the transport trajectory of the mask 27 to the printing position, for example, by lowering the camera movement mechanism 49 itself in the Z-axis direction.
  • the mask transport and installation control unit 167 moves the squeegee base 119 in the direction along the Y axis and in the direction approaching the mask changer 15.
  • the print head 37 is moved to .
  • the mask conveyance and installation control unit 167 moves the rod 115 of the cylinder 110 until it is positioned behind the frame 101 of the mask 27 (specifically, the rear frame body 105), and then lowers the rod 115 using the cylinder 110. Then, the rod 115 is brought into contact with the rear side surface of the rear frame body 105 (that is, the rod 115 is hooked on the rear side surface of the rear frame body 105) (St11-7).
  • the mask conveyance and installation control unit 167 moves the rod 115 until it is located behind the rear frame body 105 and lowers the print head 37, and then moves the print head 37 in the direction along the Y axis, and The rod 115 may be brought into contact with the rear side surface of the rear frame body 105 by moving in a direction away from the mask changer 15 .
  • the mask conveyance and installation control unit 167 moves the print head 37 in the direction along the Y axis and in the direction away from the mask changer 15 with the rod 115 in contact with the rear side surface of the rear frame 105 to perform printing.
  • the mask 27 is transported to the position (St11-8). After moving the mask 27 to the printing position, the mask conveyance and installation control unit 167 raises the print head 37 and separates the rod 115 from the rear frame 105, thereby ending the operation of pulling out the mask 27.
  • the mask conveyance and installation control unit 167 drives the print head 37, and prints each of the two cylinders 45 and each of the four cylinders 47 at the four corners of the mask holding unit 35. Press the frame 101 (see FIG. 8) downward.
  • the mask transport and installation control unit 167 generates a control command indicating that the replacement operation of the mask 27 has been completed, and outputs the generated control command to the tension measurement control unit 178.
  • the tension measurement control unit 178 starts measuring the tension of the new mask 27 based on the control command output from the mask transport and installation control unit 167.
  • the tension measurement control unit 178 drives the print head 37, places the probe 187 of the tension measurement control unit 178 on the upper surface of the stencil SUS, and measures the tension of the mask 27.
  • the measuring element 187 is placed on the upper surface of the stencil SUS through the opening 185, and the tension is measured (St12).
  • FIG. 20 is a diagram illustrating an example of the tension measuring device 183 for the mask 27.
  • FIG. 21 is a diagram illustrating an example of the tension measuring device 183.
  • illustration of the arm portion 139 is omitted, and the tension measuring device holding portion 141 is partially illustrated.
  • the stencil SUS as an example of the first region and the frame 101 are connected by a connecting member 100 such as polyester cloth.
  • the connecting member 100 which is an example of the second region, is attached with a predetermined tension so as to connect the stencil SUS and the frame 101, and determines the relative position of the stencil SUS and the frame 101.
  • the tension measurement device 183 is placed on the top surface of the stencil SUS by the tension measurement control unit 178 and measures the tension of the mask 27. Specifically, the tension measuring device 183 applies a measurement load 195 to the measuring tip 187 in the ⁇ Z direction when the measuring tip 187 is placed at the center position Pt of the stencil SUS. Note that the center position Pt is the intersection of the diagonal lines at the four corners of the frame 101.
  • the tension measuring device 183 measures tension based on the height position of the connecting portion 190 or the tension of the connecting portion 190 based on the measurement load 195 applied in the -Z direction and the reaction in the Z direction received from the mask 27. do.
  • Tension measurement device 183 outputs the measurement result to tension measurement control section 178.
  • the tension measurement control unit 178 determines whether the measured tension of the mask 27 is sufficient to execute the normal plate separation mode based on the first threshold value and the second threshold value stored in the memory 159B. It is determined whether there is one (St13).
  • the tension measurement control unit 178 determines in the process of step St13 that the measured tension of the mask 27 is equal to or higher than the first threshold value, the tension measurement control unit 178 determines that the tension is sufficient to execute the normal plate separation mode. (St13, YES), and the plate separation mode is set to normal mode (St14).
  • the tension measurement control unit 178 determines in the process of step St13 that the measured tension of the mask 27 is less than the first threshold value and greater than or equal to the second threshold value, the tension measurement control unit 178 executes the normal plate separation mode. It is determined that the tension is not sufficient to release the mask (St13, Warning), and the plate separation mode is set to the mask suction plate separation mode (St15).
  • step St13 if the tension measurement control unit 178 determines that the measured tension of the mask 27 is less than the second threshold, the tension measurement control unit 178 determines that the tension is not necessary for executing the plate separation operation (St13 , NO), a warning to the effect that the tension is insufficient is generated and output to the touch panel 31, and the operation of the printing device 11 (that is, the equipment) is stopped (St16).
  • FIG. 22 is a diagram illustrating the plate separation mode (normal mode).
  • the printing operation control unit 169 slides the squeegee 121 on the upper surface of the stencil SUS on which the solder paste Pst is placed, and prints the substrate KB through the electrode pattern formed in the first region AR1 (see FIG. 23) of the stencil SUS.
  • the solder paste Pst is printed (St17).
  • the printing operation control unit 169 lowers the table lifting mechanism 67 to perform a plate separation operation to separate the substrate KB from the lower surface of the mask 27 (specifically, the stencil SUS). Execute (St18).
  • FIG. 23 is a diagram illustrating the plate separation mode (mask suction plate separation mode).
  • the printing operation control unit 169 vacuum-suctions the second region AR2 on the lower surface of the stencil SUS using the suction unit 20 included in the substrate transport and holding unit 21 (St19).
  • the printing operation control unit 169 slides the squeegee 121 on the top surface of the stencil SUS on which the solder paste Pst is placed, while maintaining the vacuum suction of the stencil SUS by the suction unit 20, to remove the electrode pattern formed on the stencil SUS.
  • the solder paste Pst is printed on the board KB through the solder paste (St20).
  • the printing apparatus 11 can perform the printing operation in which the squeegee 121 slides on the upper surface of the stencil SUS. , stencil SUS) can be more effectively suppressed.
  • the printing operation control unit 169 maintains the vacuum suction of the second area AR2 on the lower surface of the stencil SUS by the substrate conveying and holding unit 21, and applies a specified amount H1 (for example, 2 mm, 5 mm). etc.), the table lifting mechanism 67 is lowered (St21).
  • the specified amount H1 may be determined or calculated based on the tension of the mask 27. For example, when the printing operation control unit 169 determines that the tension of the mask 27 is less than the first threshold value and greater than or equal to the second threshold value, the print operation control unit 169 further executes a determination process for determining the specified amount H1. , a specified amount H1 more suitable for the measured tension may be determined or calculated.
  • the printing operation control unit 169 After lowering the table lifting mechanism 67 by a specified amount H1, the printing operation control unit 169 turns off the vacuum suction of the second area AR2 on the lower surface of the stencil SUS by the suction control unit 173, and lowers the table lifting mechanism 67. Then, a plate separation operation is performed to separate the substrate KB from the lower surface of the stencil SUS (specifically, the first region AR1) (St22).
  • the printing apparatus 11 can move the lower surface of the stencil SUS (first region AR1) and the substrate KB by vacuum suction by the substrate transport holding section 21.
  • the table lifting mechanism 67 is lowered by a specified amount H1 while maintaining contact with the upper surface of the table.
  • the printing device 11 can increase the tension of the connection member 100, and can reproduce the contact state between the lower surface of the stencil SUS and the upper surface of the substrate KB when the tension is sufficiently high.
  • the printing device 11 turns off the vacuum suction by the substrate conveying and holding unit 21 and starts the table lifting mechanism 67 from a state that reproduces the contact state between the lower surface of the stencil SUS and the upper surface of the substrate KB when the tension is sufficiently high. By lowering it, the plate separation operation in normal mode can be reproduced. Therefore, even if the tension is not sufficient, the printing device 11 can uniformly separate the top surface of the board KB from the bottom surface of the stencil SUS (plate separation), so that the solder paste printed on the top surface of the board KB can be evenly separated from the bottom surface of the stencil SUS. It is possible to suppress deterioration of print quality by suppressing changes in the shape of the print.
  • FIG. 24 is a diagram comparing control examples of the table lifting mechanism 67 for each plate separation mode.
  • a speed graph CON1 is a graph showing the descending speed of the table lifting mechanism 67 (that is, the substrate KB) when the plate separation mode is set to the normal mode.
  • the printing operation control unit 169 executes the lowering control of the table lifting mechanism 67 shown in the speed graph CON1. Specifically, the printing operation control unit 169 in the normal mode lowers the table lifting mechanism 67 while turning off the vacuum suction of the substrate KB by the substrate transport holding unit 21, so that the bottom surface of the stencil SUS and the top surface of the substrate KB are aligned. spaced apart.
  • a speed graph CON2 is a graph showing the descending speed of the table lifting mechanism 67 (that is, the substrate KB) when the plate separation mode is set to the mask suction plate separation mode.
  • the printing operation control unit 169 executes the lowering control of the table lifting mechanism 67 shown in the speed graph CON2.
  • the printing operation control unit 169 in the normal mode lowers the table lifting mechanism 67 by a specified amount H1 while turning on the vacuum suction of the substrate KB by the substrate transport holding unit 21, and then lowers the table lifting mechanism 67 by a specified amount H1.
  • the lowering control is stopped and the vacuum suction of the substrate KB is turned off.
  • the printing operation control unit 169 restarts the lowering control of the table lifting mechanism 67 to separate the lower surface of the stencil SUS from the upper surface of the substrate KB.
  • the printing unit 13 in the first embodiment can uniformly separate the top surface of the substrate KB from the bottom surface of the stencil SUS by changing the plate separation mode based on the tension measurement result.
  • the printing device 11 is provided with a predetermined pattern opening 99 (an example of a printing pattern), and has a first region AR1 that can contact the substrate KB, and a first region AR1 on both sides of the first region AR1.
  • the solder paste Pst is printed on the substrate KB using the mask 27 having the second region AR2 located thereon.
  • the printing device 11 includes a substrate transport holding section 21 (an example of a holding section) that holds a substrate KB and raises and lowers the held substrate KB, and a tension measuring device 183 (an example of a measuring section) that measures the tension of the mask 27.
  • a suction unit 20 (an example of a suction unit) capable of suctioning the second region AR2 of the mask 27, and the substrate transport holding unit 21 performs the substrate transfer based on the tension of the mask 27 measured by the tension measuring device 183.
  • a control unit 159A is provided that determines whether suction of the second area AR2 by the suction unit 20 is necessary when the KB and the mask 27 are separated from each other. When the control section 159A determines that suction of the lower surface of the stencil SUS is necessary, the control section 159A causes the suction section 20 to suction the lower surface of the stencil SUS.
  • the printing apparatus 11 can perform a plate separation operation more suitable for the tension of the mask 27. Therefore, the printing device 11 can uniformly separate the lower surface of the mask 27 (first region AR1) from the upper surface of the substrate KB by executing a mask plate separation mode that is more suitable for the new tension of the mask 27. This makes it possible to suppress deterioration in print quality caused by tension.
  • the control unit 159A in the printing apparatus 11 according to the first embodiment determines that suction of the second area AR2 is necessary, the control unit 159A moves the substrate while the suction unit 20 is suctioning the second area AR2. After lowering the transport holding section 21 by a predetermined height (for example, 5 mm, etc.), the suction of the second area AR2 by the suction section 20 is stopped, and the substrate transport holding section 21 is lowered to perform plate separation. Thereby, the printing apparatus 11 according to the first embodiment can perform a plate separation operation more suitable for the tension of the mask 27.
  • a predetermined height for example, 5 mm, etc.
  • the printing device 11 executes the mask suction plate separation mode in which the suction unit 20 suctions the second region AR2 on the bottom surface of the stencil SUS, so that the bottom surface of the mask 27 ( The first region AR1) and the upper surface of the substrate KB can be uniformly separated from each other, and deterioration of printing quality due to tension can be suppressed.
  • the control unit 159A in the printing apparatus 11 according to the first embodiment determines that the tension of the mask 27 is equal to or higher than the first threshold based on the measured tension of the mask 27, the suction unit The suction of the second region AR2 by 20 is omitted.
  • the printing apparatus 11 determines that the tension of the mask 27 is sufficient for the plate separation operation, the printing apparatus 11 sets the plate separation mode to the normal mode and executes the plate separation operation.
  • the control unit 159A in the printing apparatus 11 according to the first embodiment determines, based on the tension of the mask 27, that the tension of the mask 27 is less than the first threshold and that the second If it is determined that the second area AR2 is greater than or equal to the threshold value, the suction unit 20 is caused to suction the second area AR2.
  • the printing apparatus 11 sets the plate separation mode to the mask suction plate separation mode and executes the plate separation operation.
  • control unit 159A in the printing apparatus 11 according to the first embodiment determines that the tension of the mask 27 is less than the second threshold
  • the control unit 159A stops plate separation, generates and outputs warning information. do.
  • the printing apparatus 11 determines that the tension of the mask 27 is not the tension necessary for the plate separation operation
  • the printing apparatus 11 sets the plate separation mode to the mask suction plate separation mode and executes the plate separation operation. do.
  • the substrate transport and holding section 21 in the printing apparatus 11 according to the first embodiment includes a pair of clampers 87 (an example of a contact section) that abuts both side surfaces of the substrate KB and holds the substrate KB.
  • the adsorption section 20 is provided in the substrate transport and holding section 21 .
  • the printing apparatus 11 according to the first embodiment described above has an example in which the tension of the mask 27 is measured at a predetermined timing such as when the mask 27 is replaced, and the plate separation mode is determined based on the measured tension.
  • the printing device 11 according to the second embodiment not only measures the tension and determines the plate separation mode, but also collects and transfers the solder paste Pst, changes the arrangement of the support pins 219 that support the board KB, and measures the viscosity of the solder paste Pst.
  • An example of automatically executing each process such as measurement and viscosity adjustment will be described. Note that since the configuration of the printing device 11 according to the second embodiment has substantially the same configuration as the printing device 11 according to the first embodiment, the same components are given the same reference numerals and the explanation will be omitted.
  • FIG. 25 is a diagram illustrating an example of an operation procedure when changing the mask model of the printing apparatus according to the second embodiment.
  • control unit 159A in the printing device 11 determines that the production (printing) of the board KB of “model A” has been completed based on the production data, it starts the operation of replacing the mask 27.
  • the control unit 159A reads the production data of the "model B" board KB that is stored in the memory 159B and will be produced next (St31).
  • the scraper control unit 174 controls the scraper 137 to collect the solder paste Pst on the upper surface of the mask 27 (that is, the currently used mask 27) corresponding to the board KB of "model A" (St32).
  • the mask transport and installation control unit 167 and the imaging control unit 171 respectively drive the print head 37 and camera movement mechanism 49 to store the mask 27 corresponding to the board KB of “model A” in the magazine 25 of the mask changer 15. (St33).
  • the control unit 159A changes and rearranges the support pins 219 of the board KB based on the production data of the "model B" board KB stored in the memory 159B (St34).
  • the mask conveyance and installation control unit 167 and the imaging control unit 171 drive the print head 37 and camera movement mechanism 49, respectively, to pull out the mask 27 corresponding to the “model B” substrate KB from the magazine 25 of the mask changer 15. , and carry it to the printing position (St35).
  • the tension measurement control unit 178 drives the print head 37 and places the measuring tip 187 of the tension measurement device 183 approximately in the center of the upper surface of the stencil SUS corresponding to the substrate KB of "model B" located at the printing position, The tension of the mask 27 is measured (St36).
  • the tension measurement control unit 178 determines and sets the plate separation mode of the mask 27 corresponding to "model B" (St37).
  • the substrate transport and holding control unit 165 changes (adjusts) the distance between the pair of clampers 87 that hold the substrate KB to a width corresponding to the substrate KB of "model B" (St38).
  • the scraper control unit 174 controls the scraper 137 and transfers the collected solder paste Pst onto the upper surface of the stencil SUS corresponding to the board KB of "model B" (St39).
  • the viscometer control unit 177 drives the print head 37 and uses the viscometer 197 to measure the viscosity of the solder paste Pst transferred to the top surface of the stencil SUS (St40).
  • the viscometer control unit 177 determines a soldering connection operation to bring the viscosity of the solder paste Pst to a preset target value (that is, a predetermined viscosity) based on the viscosity measured by the viscometer 197, and performs printing. It is output to the operation control section 169.
  • the printing operation control unit 169 drives the squeegee 121 of the print head 37 based on the control command output from the viscometer control unit 177, and performs a soldering operation on the solder paste Pst (St41).
  • the control unit 159A controls a temperature controller (not shown) included in the printing unit 13, and changes the temperature setting of the atmosphere inside the printing unit 13 (St42).
  • the control unit 159A starts production (printing) of the "model B" board KB based on the production data.
  • the printing apparatus 11 when there is a mask 27 replacement operation, automatically replaces the mask 27 with the mask 27 corresponding to the new substrate KB, sets the plate separation mode, and sets the support pin 219.
  • the arrangement of the solder paste Pst, adjusting the viscosity of the solder paste Pst, etc. production of the board KB using a new mask 27 can be started more efficiently.
  • the printing apparatus 11 prints the solder paste Pst on the first substrate using the first mask provided with the first pattern opening (an example of the first printed pattern).
  • the solder paste Pst is printed on the second substrate using a second mask provided with a second pattern opening (an example of a second printed pattern).
  • the first mask and the second mask have a first region AR1 that can contact the substrate KB, and a second region AR2 located on both sides of the first region AR1.
  • the printing apparatus 11 includes a substrate transport holding section 21 (an example of a holding section) that holds a first substrate or a second substrate, and a viscometer 197 (measuring section) that measures the tension of the first mask and the second mask.
  • a suction unit 20 capable of suctioning the second region AR2 of the second mask in contact with the second substrate, and a viscometer 197 after the first mask is replaced with the second mask.
  • the tension of the second mask is measured, and based on the tension of the second mask measured by the viscometer 197, the plate separation between the second substrate and the second mask is performed by the substrate transport holding unit 21.
  • It includes a control unit 159A that determines whether or not suction of the second region AR2 by the suction unit 20 is necessary. When the control unit 159A determines that suction of the second area AR2 is necessary, the control unit 159A causes the suction unit 20 to suction the second area AR2.
  • the first board here corresponds to "model A” in the operation procedure of FIG. 25, for example.
  • the first mask is, for example, the mask 27 corresponding to "model A” in the operation procedure of FIG. 25.
  • the second board corresponds to "model B” in the operating procedure of FIG. 25, for example.
  • the second mask is, for example, the mask 27 corresponding to "model B” in the operation procedure of FIG. 25.
  • the first pattern opening referred to here is an opening provided in the stencil SUS with an arrangement corresponding to the arrangement of an electrode pattern (not shown) formed on the surface of the first substrate.
  • the second pattern opening is an opening provided in the stencil SUS with a layout corresponding to the layout of an electrode pattern (not shown) formed on the surface of the second substrate.
  • the printing apparatus 11 can set a plate separation mode more suitable for the new mask 27 when the mask 27 is replaced. Therefore, the printing apparatus 11 can uniformly separate the first region AR1 on the lower surface of the mask 27 from the upper surface of the substrate KB by executing a mask plate separation mode that is more suitable for the new tension of the mask 27. This makes it possible to suppress deterioration in print quality due to tension.
  • the printing apparatus 11 according to the second embodiment further includes a print head 37 and a camera movement mechanism 49 (an example of a mask pulling section) for exchanging the first mask and the second mask.
  • the print head 37 and the camera movement mechanism 49 abut against a frame 101 included in the first mask and store the first mask in the magazine 25 that can store each of the plurality of masks 27, and the first mask is stored in the magazine 25.
  • the side surface of the frame 101 provided with the second mask is pulled out from the magazine 25 and pulled to the printing position of the solder paste Pst.
  • the printing apparatus 11 according to the second embodiment automatically replaces the first mask and the second mask, and creates a new mask 27 that is more suitable for the new mask based on the tension of the second mask after the replacement. You can set remote mode.
  • the printing apparatus 11 has the scraper 137 (transfer unit) that collects the solder paste Pst from the upper surface of the first mask and transfers the solder paste Pst onto the upper surface of the second mask. (an example of) and.
  • the control unit 159A causes the scraper 137 to collect the solder paste Pst on the upper surface of the first mask, and causes the print head 37 and camera movement mechanism 49 to move the solder paste Pst to the second printing position.
  • the solder paste Pst collected by the scraper 137 is transferred onto the upper surface of the second mask.
  • the printing apparatus 11 according to the second embodiment automatically replaces the first mask and the second mask, and creates a new mask 27 that is more suitable for the new mask based on the tension of the second mask after the replacement. You can set remote mode.
  • the printing apparatus 11 includes a viscometer 197 (an example of a viscosity measurement unit) that measures the viscosity of the solder paste Pst, and a solder paste Pst transferred onto the upper surface of the second mask.
  • the apparatus further includes a squeegee 121 for kneading.
  • the control unit 159A causes the viscometer 197 to measure the viscosity of the solder paste Pst, and controls the squeegee 121 based on the measured viscosity of the solder paste Pst. Knead the solder paste Pst.
  • the printing apparatus 11 can measure the viscosity using the viscosity meter 197. Based on the determined viscosity, solder kneading can be performed. Therefore, the printing device 11 can more efficiently start producing the second substrate using the second mask.
  • the printing apparatus 11 changes the positions of the plurality of support pins 219 (an example of lower support pins) that support the lower surface of the first substrate and the plurality of support pins 219.
  • a suction head 233 and a suction nozzle 235 are provided.
  • the control unit 159A sucks each of the plurality of support pins 219 by the suction head 233 and the suction nozzle 235, and Transport and install the board to a position where the bottom surface can be supported.
  • the printing apparatus 11 adjusts the arrangement of each of the plurality of support pins 219 so as to correspond to the second substrate while automatically exchanging the first mask and the second mask. Can be changed. Therefore, the printing device 11 can more efficiently start producing the second substrate using the second mask.
  • the substrate transport and holding section 21 in the printing apparatus 11 according to the second embodiment includes a pair of clampers 87 (an example of a contact section) that abuts both side surfaces of the substrate KB and holds the substrate KB.
  • the adsorption section 20 is provided in the substrate transport and holding section 21 .
  • the present disclosure is useful as a printing device that performs plate separation control more suitable for changes in mask tension and suppresses deterioration in print quality of solder paste.
  • Printing device 15 Mask changer 20 Adsorption section 21 Substrate transport holding section 27 Mask 37 Print head 49 Camera movement mechanism 87 Clamper 99 Pattern opening 100 Connection member 101 Frame 131 Squeegee base drive motor 115 Rod 159A Control section 183 Tension measuring device 197 Viscometer 219 Support pin 233 Suction head 235 Suction nozzle KB Substrate SUS Stencil Pst Solder paste

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Screen Printers (AREA)

Abstract

This printing device: prints a solder paste onto a first board using a first mask; prints the solder paste onto a second board using a second mask; after replacement with the second mask, measures a tension of the second mask; and if it is determined, on the basis of the measured tension of the second mask, that suction of second regions positioned on both sides of a first region capable of coming into contact with the first or second board is required for plate release between the second board and the second mask, sucks the second regions.

Description

印刷装置printing device
 本開示は、印刷装置に関する。 The present disclosure relates to a printing device.
 特許文献1には、マスクの上面にペースト状の半田を供給後、マスクの上面をスキージで掻くことにより、マスクの下面に重装したプリント基板に半田を印刷する印刷装置が開示されている。印刷装置は、マスクと、スキージと、マスクに対してスキージを離れる方向および接近する方向に変位させるスキージモータと、マスクに対してプリント基板を離れる方向および接近する方向に変位させる昇降部を有する基板支持装置と、スキージをマスクに接触させた状態から下降させ、スキージモータの電流値が所定の設定値になった時の、スキージの押し下げ量を検出する検出部と、検出部の検出する押し下げ量を基準値と比較して、押し下げ量の変化量を算出する算出部と、算出部の算出する押し下げ量の変化量より、テンションの変化量を特定する。印刷装置は、特定されたテンションの変化量に基づいて、版離れ制御パターンを変更し、変更後の版離れ制御パターンに基づく版離れ動作を実行する。 Patent Document 1 discloses a printing device that prints solder on a printed circuit board heavily mounted on the lower surface of the mask by supplying paste-like solder to the upper surface of the mask and then scratching the upper surface of the mask with a squeegee. The printing device includes a substrate having a mask, a squeegee, a squeegee motor that displaces the squeegee in a direction away from and an approach toward the mask, and an elevating section that displaces a printed circuit board in a direction away from and an approach toward the mask. A support device, a detection unit that detects the amount of depression of the squeegee when the squeegee is lowered from a state in which it is in contact with the mask, and the current value of the squeegee motor reaches a predetermined set value, and the amount of depression detected by the detection unit. A calculation unit calculates the amount of change in the amount of depression by comparing the amount with a reference value, and the amount of change in tension is specified from the amount of change in the amount of depression calculated by the calculation unit. The printing device changes the plate separation control pattern based on the specified amount of change in tension, and executes a plate separation operation based on the changed plate separation control pattern.
日本国特開2014-33645号公報Japanese Patent Application Publication No. 2014-33645
 半田が印刷されたプリント基板の製造において、印刷装置は、版離れ動作による半田の印刷位置がずれたり、印刷された半田の形状が崩れたりする印刷品質の劣化を抑制するために、マスクからプリント基板を均一に版離れさせることが望ましい。しかし、印刷装置は、マスクのテンションの変化量に基づいて、版離れ時のプリント基板の下降量と下降動作時間(つまり、版離れ時間)とを変更し、版離れ動作を実行する。このような版離れ動作が実行された場合、プリント基板は、まず、プリント基板の周縁部から版離れが始まり、その後、プリント基板の周縁部から中心部に向かって版離れが完了する。つまり、印刷装置は、プリント基板の周縁部と中心部とでマスクから離れる時刻に変化が生じることで、印刷された半田の形状が崩れ、印刷品質が劣化する可能性があった。 In the production of printed circuit boards with solder printed on them, printing equipment removes the print from the mask in order to prevent deterioration in print quality, such as misalignment of the printed solder position due to plate separation and deterioration of the shape of the printed solder. It is desirable to release the substrate uniformly. However, the printing apparatus executes the plate separation operation by changing the amount of descent of the printed circuit board and the descending operation time (that is, the plate separation time) at the time of plate separation, based on the amount of change in the tension of the mask. When such a plate separation operation is performed, the printed circuit board first begins to separate from the periphery of the printed circuit board, and then completes separation from the periphery toward the center of the printed circuit board. In other words, in the printing apparatus, there is a possibility that the shape of the printed solder may be distorted and the printing quality may be deteriorated due to a change in the time at which the printed circuit board is separated from the mask at the periphery and the center thereof.
 本開示は、上述した従来の状況に鑑みて案出され、マスクのテンションの変化により適した版離れ制御を実行し、半田ペーストの印刷品質の低下を抑制する印刷装置を提供することを目的とする。 The present disclosure was devised in view of the conventional situation described above, and an object of the present disclosure is to provide a printing device that performs plate separation control more suitable for changes in mask tension and suppresses deterioration in print quality of solder paste. do.
 本開示は、第1の印刷パターンが設けられた第1のマスクを用いて第1の基板に半田ペーストを印刷し、第2の印刷パターンが設けられた第2のマスクを用いて第2の基板に前記半田ペーストを印刷する印刷装置であって、前記第1のマスクおよび前記第2のマスクは、第1の領域と、前記第1の領域の両側に位置する第2の領域とを有し、前記印刷装置は、前記基板を保持する保持部と、前記第1のマスクおよび前記第2のマスクのテンションを計測する計測部と、前記第2のマスクの前記第1の領域を吸引可能な吸引部と、前記第1のマスクから前記第2のマスクに交換された後、前記計測部により前記第2のマスクの前記テンションを計測させ、前記計測部により計測された前記第2のマスクの前記テンションに基づいて、前記保持部により実行される前記第2の基板と前記第2のマスクとの版離れにおいて前記吸引部による前記第2の領域の吸引の要否を判定する制御部と、を備え、前記制御部は、前記第2の領域の吸引が必要であると判定した場合、前記吸引部に前記第2の領域を吸引させる、印刷装置を提供する。 The present disclosure includes printing a solder paste on a first substrate using a first mask provided with a first printed pattern, and printing a solder paste on a second substrate using a second mask provided with a second printed pattern. A printing device that prints the solder paste on a substrate, wherein the first mask and the second mask have a first region and a second region located on both sides of the first region. The printing device includes a holding unit that holds the substrate, a measurement unit that measures the tension of the first mask and the second mask, and a suction unit that is capable of suctioning the first area of the second mask. a suction part, and after the first mask is replaced with the second mask, the tension of the second mask is measured by the measurement part, and the second mask is measured by the measurement part. a control unit that determines whether suction of the second area by the suction unit is necessary during plate separation between the second substrate and the second mask, which is performed by the holding unit, based on the tension; Provided is a printing device comprising: the control unit causing the suction unit to suction the second area when it is determined that suction of the second area is necessary.
 本開示によれば、マスクのテンションの変化により適した版離れ制御を実行し、半田ペーストの印刷品質の低下を抑制できる。 According to the present disclosure, it is possible to perform plate separation control more suitable for changes in mask tension and suppress deterioration in print quality of solder paste.
実施の形態1に係る印刷装置の全体斜視図An overall perspective view of a printing device according to Embodiment 1 実施の形態1に係る印刷装置の部分透視斜視図A partially transparent perspective view of a printing device according to Embodiment 1 実施の形態1に係る印刷装置の透視側面図A transparent side view of the printing device according to Embodiment 1 印刷部の部分断面側面図Partial cross-sectional side view of the printing section 印刷ヘッドの一例を説明する図Diagram explaining an example of a print head 印刷部の部分平面図Partial plan view of printing department 印刷装置が備える印刷部の部分平面図A partial plan view of the printing section included in the printing device. マスクの一例を示す平面図Plan view showing an example of a mask マスク保持部によるマスクの保持状態を示す下面図Bottom view showing how the mask is held by the mask holding section マスクガイドによりガイドされるマスクの様子を示す正面図Front view showing how the mask is guided by the mask guide 実施の形態1における印刷部の部分平面図Partial plan view of the printing section in Embodiment 1 実施の形態1における印刷部の平面図Plan view of the printing section in Embodiment 1 テンション計測装置の一例を示す図Diagram showing an example of a tension measuring device 実施の形態1に係る印刷装置の制御系統を示すブロック図A block diagram showing a control system of a printing apparatus according to Embodiment 1 実施の形態1に係る印刷装置の版離れ動作手順例を説明するフローチャートFlowchart illustrating an example of a plate separation operation procedure of the printing apparatus according to the first embodiment 印刷装置の収納動作例を説明する図Diagram illustrating an example of storage operation of the printing device 印刷装置の収納動作例を説明する図Diagram illustrating an example of storage operation of the printing device 印刷装置の引き出し動作例を説明する図Diagram illustrating an example of the pulling operation of the printing device 印刷装置の引き出し動作例を説明する図Diagram illustrating an example of the pulling operation of the printing device マスクのテンション計測例を説明する図Diagram explaining an example of mask tension measurement テンション計測装置の一例を説明する図Diagram illustrating an example of a tension measuring device 版離れモード(通常モード)を説明する図Diagram explaining plate separation mode (normal mode) 版離れモード(マスク吸着版離れモード)を説明する図Diagram explaining plate separation mode (mask adsorption plate separation mode) 版離れモードごとのテーブル昇降機構の制御例を比較する図Diagram comparing control examples of the table lifting mechanism for each plate separation mode 実施の形態2に係る印刷装置のマスク機種変更時の動作手順例を説明する図A diagram illustrating an example of an operation procedure when changing a mask model of a printing apparatus according to Embodiment 2.
 以下、適宜図面を参照しながら、本開示に係る印刷装置、マスク印刷方法および半田基板製造方法の構成および作用を具体的に開示した実施の形態を詳細に説明する。但し、必要以上に詳細な説明は省略する場合がある。例えば、既によく知られた事項の詳細説明や実質的に同一の構成に対する重複説明を省略する場合がある。これは、以下の説明が不必要に冗長になるのを避け、当業者の理解を容易にするためである。なお、添付図面および以下の説明は、当業者が本開示を十分に理解するために提供されるのであって、これらにより特許請求の範囲に記載の主題を限定することは意図されていない。 Hereinafter, embodiments specifically disclosing the configuration and operation of a printing apparatus, a mask printing method, and a solder substrate manufacturing method according to the present disclosure will be described in detail with reference to the drawings as appropriate. However, more detailed explanation than necessary may be omitted. For example, detailed explanations of well-known matters or redundant explanations of substantially the same configurations may be omitted. This is to avoid unnecessary redundancy in the following description and to facilitate understanding by those skilled in the art. The accompanying drawings and the following description are provided to enable those skilled in the art to fully understand the present disclosure, and are not intended to limit the subject matter recited in the claims.
(実施の形態1)
 まず、図1を参照して、実施の形態1における印刷装置11について説明する。図1は、実施の形態1に係る印刷装置11の全体斜視図である。
(Embodiment 1)
First, with reference to FIG. 1, the printing apparatus 11 in the first embodiment will be described. FIG. 1 is an overall perspective view of a printing apparatus 11 according to the first embodiment.
 本実施の形態1に係る印刷装置11は、印刷対象物としての基板KB(図2参照)の上面に、半田ペースト等の半田ペーストPst(図2参照)を印刷する印刷部13と、この印刷部13に供給されるマスク27(図2参照)を格納するマスクチェンジャ15を含む装置である。マスク27は、基板KBに半田ペーストPstを印刷するための開口パターンが設けられたステンシルSUSと、テンションを与えながらステンシルSUSを保持するマスク枠271(図8参照)を有する。 The printing device 11 according to the first embodiment includes a printing unit 13 that prints solder paste Pst (see FIG. 2) such as solder paste on the upper surface of a substrate KB (see FIG. 2) as a printing target, and This device includes a mask changer 15 that stores masks 27 (see FIG. 2) supplied to the section 13. The mask 27 includes a stencil SUS provided with an opening pattern for printing the solder paste Pst on the substrate KB, and a mask frame 271 (see FIG. 8) that holds the stencil SUS while applying tension.
 印刷部13は、印刷部カバー17によって覆われた基台19(図2参照)の上に基板搬送保持部21を有し、所定の印刷位置に搬送された基板KBに半田ペーストPstを印刷する。 The printing unit 13 has a substrate transport holding unit 21 on a base 19 (see FIG. 2) covered by a printing unit cover 17, and prints solder paste Pst on the board KB transported to a predetermined printing position. .
 マスクチェンジャ15は、印刷部13の後部に隣接して設けられる。マスクチェンジャ15の筐体23はマガジン25を収納可能な内部空間SP(図2参照)を有しており、筐体23の後面側の下部には、内部空間SPに対してマスク27を収納したマガジン25を出し入れ可能な開口部29が設けられる。マスクチェンジャ15は、印刷部13にマスク27を供給するためのマスク通過開口71(図2参照)を有し、このマスク通過開口71を通じて印刷部13の内部と空間的に繋がる。マスクチェンジャ15の筐体23は、警報音または警報画面を出力可能なタッチパネル31、あるいは他の照明装置(例えば、LED等)を後面側の上部に有する。 The mask changer 15 is provided adjacent to the rear of the printing section 13. The housing 23 of the mask changer 15 has an internal space SP (see FIG. 2) in which the magazine 25 can be stored, and a mask 27 is stored in the lower part of the rear side of the housing 23 in the internal space SP. An opening 29 is provided through which the magazine 25 can be taken in and taken out. The mask changer 15 has a mask passing opening 71 (see FIG. 2) for supplying the mask 27 to the printing section 13, and is spatially connected to the inside of the printing section 13 through this mask passing opening 71. The housing 23 of the mask changer 15 has a touch panel 31 capable of outputting an alarm sound or an alarm screen, or other illumination device (for example, LED, etc.) at the upper part of the rear side.
 次に、図2~図4を参照して、印刷部13およびマスクチェンジャ15の概要について説明する。図2は、実施の形態1に係る印刷装置11の部分透視斜視図である。図3は、実施の形態1に係る印刷装置11の透視側面図である。図4は、印刷部13の部分断面側面図である。 Next, an overview of the printing section 13 and mask changer 15 will be explained with reference to FIGS. 2 to 4. FIG. 2 is a partially transparent perspective view of the printing device 11 according to the first embodiment. FIG. 3 is a perspective side view of the printing device 11 according to the first embodiment. FIG. 4 is a partially sectional side view of the printing section 13.
 基板搬送保持部21の上方には、マスクガイド33が設けられている。マスクガイド33の断面はL字状になっており、底面(水平部95)でマスク27を下支えしつつ、側面(垂直部97)にてマスク27をマスク保持部35のマスク保持位置まで案内する。マスクガイド33の上方には、印刷ヘッド37、および気体吹付け部43がそれぞれ設けられている。また、マスク保持位置の上方には、左右の2つのシリンダ45のそれぞれと、前後左右の4つのシリンダ47のそれぞれと、が設けられている。マスクガイド33の下方には、カメラ移動機構49およびカメラ51と、マスク下面クリーナ53が設けられている。 A mask guide 33 is provided above the substrate transport/holding section 21 . The mask guide 33 has an L-shaped cross section, and supports the mask 27 on the bottom surface (horizontal portion 95) while guiding the mask 27 to the mask holding position of the mask holding portion 35 on the side surface (vertical portion 97). . A print head 37 and a gas blowing section 43 are provided above the mask guide 33, respectively. Furthermore, two left and right cylinders 45 and four front, rear, left and right cylinders 47 are provided above the mask holding position. Below the mask guide 33, a camera moving mechanism 49, a camera 51, and a mask lower surface cleaner 53 are provided.
 基板搬送保持部21は、中間コンベア83に設けられる。基板搬送保持部21は、テーブル昇降機構67によりZ軸方向に昇降され、中間コンベア83上に搬入された基板KBを、クランパ87の間に挟んで保持する。これにより、基板搬送保持部21は、半田ペーストPstの印刷時の基板KBの位置ずれを抑制できる。 The substrate conveyance holding section 21 is provided on the intermediate conveyor 83. The substrate conveyance/holding section 21 holds the substrate KB, which is lifted and lowered in the Z-axis direction by the table lifting mechanism 67 and carried onto the intermediate conveyor 83, by sandwiching it between the clampers 87. Thereby, the board transport holding section 21 can suppress the positional shift of the board KB during printing of the solder paste Pst.
 また、基板搬送保持部21は、基板KBを保持した状態でマスク27のステンシルSUSの下面を吸着可能な吸着部20を備える。吸着部20は、印刷装置11に設けられる空気圧回路(不図示)に配管接続される。空気圧回路は、空圧発生源が接続される。空圧発生源は、真空ポンプと、エア供給源とを含む。吸着部20は、真空バルブを介して空圧発生源とブローバルブに接続される。真空バルブは、後述する吸着制御部173により入力ポートと出力ポートとを切り替えることにより、吸着部20の真空圧とブロー圧とを切り替え可能にする。 Further, the substrate transport and holding section 21 includes a suction section 20 that can suction the lower surface of the stencil SUS of the mask 27 while holding the substrate KB. The suction unit 20 is connected via piping to a pneumatic circuit (not shown) provided in the printing device 11 . A pneumatic pressure generating source is connected to the pneumatic circuit. The pneumatic source includes a vacuum pump and an air supply source. The suction unit 20 is connected to a pneumatic pressure source and a blow valve via a vacuum valve. The vacuum valve enables switching between the vacuum pressure and the blow pressure of the suction unit 20 by switching between an input port and an output port using a suction control unit 173, which will be described later.
 印刷ヘッド37は、2つのスキージ121と、マスク移動部40と、テンション計測装置183を備える。印刷ヘッド37は、制御部159A(図14参照)によって駆動される。 The print head 37 includes two squeegees 121, a mask moving section 40, and a tension measuring device 183. The print head 37 is driven by a control section 159A (see FIG. 14).
 気体吹付け部43は、半田ペーストPstで汚れる前(すなわち使用前、あるいはマスク27に最初の半田ペーストPstが供給される前)のステンシルSUSの上面に付着した埃などを吹き飛ばす使用前マスククリーナとして機能する。気体吹付け部43は、マスク27の移動経路の上方をマスク27の移動方向(X軸方向)に対して交差する横方向に延びた管状部55と、管状部55の一端側に繋がるバルブ部57と、を備えている。管状部55は、2つの後述する前後方向ガイド部の後端側に、2つの前後方向ガイド部のそれぞれを跨ぐようにして設けられている。 The gas blowing section 43 functions as a pre-use mask cleaner that blows off dust etc. attached to the top surface of the stencil SUS before it becomes contaminated with solder paste Pst (that is, before use or before the first solder paste Pst is supplied to the mask 27). Function. The gas blowing part 43 includes a tubular part 55 that extends above the movement path of the mask 27 in a horizontal direction intersecting the movement direction (X-axis direction) of the mask 27, and a valve part that is connected to one end side of the tubular part 55. It is equipped with 57 and. The tubular portion 55 is provided on the rear end side of two later-described longitudinal guide portions so as to straddle each of the two longitudinal guide portions.
 マスク下面クリーナ53は、マスク下面クリーナガイド(不図示)によって、マスクガイド33の下方の領域を、Y軸方向に移動自在に設けられている。マスク下面クリーナ53は、マスク下面クリーナ53に設けられた移動ベース連結部(不図示)によってカメラ移動機構49の移動ベース59との間で連結され、移動ベース59と一体となってY軸方向に移動する。 The mask lower surface cleaner 53 is provided so as to be movable in the Y-axis direction in the region below the mask guide 33 by a mask lower surface cleaner guide (not shown). The mask lower surface cleaner 53 is connected to a movable base 59 of the camera moving mechanism 49 by a movable base connecting portion (not shown) provided on the mask lower surface cleaner 53, and is integrally moved with the movable base 59 in the Y-axis direction. Moving.
 マスク下面クリーナ53は、移動ベース59によってY軸方向に移動されないときは、印刷位置の前方に位置するクリーナ待機位置で待機する(図2参照)。マスク下面クリーナ53は、マスク下面クリーナガイドに設けられた下面クリーナ昇降部(不図示)によって、マスクガイド33に対して(つまり、印刷位置に搬送されたマスク27に対して)昇降自在となっている。 When the mask lower surface cleaner 53 is not moved in the Y-axis direction by the moving base 59, it waits at a cleaner standby position located in front of the printing position (see FIG. 2). The mask lower surface cleaner 53 can be freely raised and lowered relative to the mask guide 33 (that is, relative to the mask 27 transported to the printing position) by a lower surface cleaner elevating section (not shown) provided in the mask lower surface cleaner guide. There is.
 マスク移動部40は、マスクチェンジャ15が備える後述のマガジン25と印刷部13内の印刷位置との間でマスク27を移動(搬送)可能な機能を有する。詳細には、マスク移動部40は、マガジン25からマスク27を引き出して印刷位置まで移動させ、印刷部13内の印刷位置からマスク27をマガジン25に戻す機能を有する。マスク移動部40は、印刷ヘッド37に接続されており、印刷ヘッド37の動作とともにY軸方向に移動可能である。また、マスク移動部40は、シリンダ110とロッド115を有している。マスク27を移動させる際は、シリンダ110を用いてロッド115をZ軸方向に移動させ、マスク枠271にロッド115を当接させる。 The mask moving unit 40 has a function of being able to move (transport) the mask 27 between a magazine 25 included in the mask changer 15, which will be described later, and a printing position in the printing unit 13. Specifically, the mask moving section 40 has a function of pulling out the mask 27 from the magazine 25, moving it to a printing position, and returning the mask 27 from the printing position in the printing section 13 to the magazine 25. The mask moving unit 40 is connected to the print head 37 and is movable in the Y-axis direction together with the operation of the print head 37. Further, the mask moving section 40 includes a cylinder 110 and a rod 115. When moving the mask 27, the rod 115 is moved in the Z-axis direction using the cylinder 110, and the rod 115 is brought into contact with the mask frame 271.
 マスクチェンジャ15は、印刷部13の後部に隣接して設けられており、筐体23、マガジン25、昇降機65、マスク通過開口71および昇降体73を備える。昇降機65は、水平面内に拡がった形状を有する昇降体73の一端側に設けられたナット部75と、ナット部75に螺合して上下方向に延びたボール螺子77と、ボール螺子77を回転駆動する昇降体昇降モータ79と、を備えている。 The mask changer 15 is provided adjacent to the rear of the printing section 13 and includes a housing 23, a magazine 25, an elevator 65, a mask passage opening 71, and an elevator 73. The elevator 65 includes a nut portion 75 provided at one end of the elevator body 73 having a shape that extends in a horizontal plane, a ball screw 77 that is threaded into the nut portion 75 and extends in the vertical direction, and a ball screw 77 that rotates. It is provided with an elevating body elevating motor 79 to be driven.
 昇降機65は、昇降体昇降モータ79が作動によりボール螺子77が回転し、ボール螺子77に設けられたナット部75を介して昇降体73が昇降する。昇降機65は、マガジン25を支持する昇降体73を作業空間SP1と供給空間SP2との間で昇降させることにより、筐体23の開口部29から搬入されたマガジン25を、筐体23の開口部29とその開口部29から離れた位置である作業空間SP1との間で移動させる収納体移動機構として機能する。 In the elevator 65, the ball screw 77 is rotated by the operation of the elevator motor 79, and the elevator 73 is raised and lowered via the nut portion 75 provided on the ball screw 77. The elevator 65 moves the magazine 25 carried in through the opening 29 of the housing 23 to the opening of the housing 23 by raising and lowering the lifting body 73 that supports the magazine 25 between the work space SP1 and the supply space SP2. 29 and the work space SP1, which is a position away from the opening 29, functions as a storage body moving mechanism.
 基板搬送保持部21は、搬入コンベア81、中間コンベア83、搬出コンベア85、クランパ87および多段テーブル89のそれぞれを備える。搬入コンベア81、中間コンベア83および搬出コンベア85は、この順でX軸方向(左右方向とする)に並んでおり、搬入コンベア81、中間コンベア83、搬出コンベア85の順に基板KBを受け渡して搬送する。基板搬送保持部21は、中間コンベア83に搬入された基板KBをZ軸方向に昇降させて、基板KBへの半田ペーストPstの印刷と、マスク27のステンシルSUSの下面と基板KBとの間の版離れとを実行可能にする。 The substrate transport/holding section 21 includes an input conveyor 81, an intermediate conveyor 83, an output conveyor 85, a clamper 87, and a multi-stage table 89. The carry-in conveyor 81, the intermediate conveyor 83, and the carry-out conveyor 85 are lined up in this order in the X-axis direction (referred to as the left-right direction), and the board KB is delivered and conveyed to the carry-in conveyor 81, the intermediate conveyor 83, and the carry-out conveyor 85 in this order. . The board conveyance holding unit 21 moves the board KB carried into the intermediate conveyor 83 up and down in the Z-axis direction, and prints the solder paste Pst on the board KB and prints the space between the lower surface of the stencil SUS of the mask 27 and the board KB. Make version separation executable.
 クランパ87は、基板KBの大きさ、形状等に対応して配置された複数のサポートピン219を有する。クランパ87は、中間コンベア83とともにユニットを構成しており、中間コンベア83が搬入コンベア81から受け取った基板KBを、複数のサポートピン219のそれぞれにより中間コンベア83から持ち上げた状態に支持するとともに、その基板KBの両側をクランプして保持する。多段テーブル89は、基台19上に設けられており、中間コンベア83とクランパ87とにより構成されるユニットの全体を、基台19に対してXY平面上と上下方向(Z軸方向)とに移動させる。 The clamper 87 has a plurality of support pins 219 arranged corresponding to the size, shape, etc. of the board KB. The clamper 87 constitutes a unit together with the intermediate conveyor 83, and supports the substrate KB received by the intermediate conveyor 83 from the carry-in conveyor 81 in a state lifted from the intermediate conveyor 83 by each of the plurality of support pins 219, and Clamp and hold both sides of the board KB. The multi-stage table 89 is provided on the base 19, and the entire unit composed of the intermediate conveyor 83 and the clamper 87 is placed on the XY plane and in the vertical direction (Z-axis direction) with respect to the base 19. move it.
 次に、図5を参照して、実施の形態1における印刷ヘッド37について説明する。図5は、印刷ヘッド37の一例を説明する図である。なお、図5に示す印刷部13は、印刷部カバー17の図示を省略している。 Next, the print head 37 in the first embodiment will be described with reference to FIG. 5. FIG. 5 is a diagram illustrating an example of the print head 37. In addition, in the printing section 13 shown in FIG. 5, illustration of the printing section cover 17 is omitted.
 印刷ヘッド37は、制御部159A(図13参照)によって駆動を制御される。制御部159Aは、2つのスキージ121、マスク移動部40、およびテンション計測装置183の制御を実行する。 The drive of the print head 37 is controlled by a control unit 159A (see FIG. 13). The control unit 159A controls the two squeegees 121, the mask moving unit 40, and the tension measuring device 183.
 印刷ヘッド37は、X軸方向に延びてY軸方向に移動自在に設けられたスキージベース119と、スキージベース119の下方に設けられた2つのスキージ121と、スキージベース119の上面側に設けられたスキージ昇降駆動部123と、を備えている。2つのスキージ121のそれぞれは、Y軸方向に対向して配置される。スキージ昇降駆動部123は、2つのスキージ121のそれぞれをスキージベース119の下方で独立に昇降させる。 The print head 37 includes a squeegee base 119 that extends in the X-axis direction and is movable in the Y-axis direction, two squeegees 121 that are provided below the squeegee base 119, and an upper surface of the squeegee base 119. The squeegee lifting drive unit 123 is provided. Each of the two squeegees 121 is arranged to face each other in the Y-axis direction. The squeegee lift drive section 123 raises and lowers each of the two squeegees 121 independently below the squeegee base 119.
 印刷部13は、図7に示すように2つのシリンダ45を備える。シリンダ45は昇降ロッド117を有しており、昇降ロッド117をZ軸方向に動かすことができる。2つのシリンダ45のそれぞれが備える昇降ロッド117の下端はマスク枠271の上面に当接可能であり、印刷位置に配置されたマスク27を固定する。 The printing section 13 includes two cylinders 45 as shown in FIG. The cylinder 45 has a lifting rod 117, and the lifting rod 117 can be moved in the Z-axis direction. The lower end of the lifting rod 117 provided in each of the two cylinders 45 can come into contact with the upper surface of the mask frame 271, and fixes the mask 27 placed at the printing position.
 印刷部13は、4つのシリンダ47をさらに備える。シリンダ47は昇降ロッドを有しており、昇降ロッドをZ軸方向に動かすことができる。シリンダ47が備えるロッド115の下端は、マスク枠271の上面に当接可能であり、印刷位置に配置されたマスク27をシリンダ45の昇降ロッド117と共に固定する。シリンダ47は、マスク枠271の四隅を下方に押圧する。このように、マスク27は、シリンダ45、シリンダ47のそれぞれによってマスクガイド33に押圧され、印刷位置に固定される。 The printing unit 13 further includes four cylinders 47. The cylinder 47 has a lifting rod that can be moved in the Z-axis direction. The lower end of the rod 115 included in the cylinder 47 can come into contact with the upper surface of the mask frame 271, and fixes the mask 27 placed at the printing position together with the lifting rod 117 of the cylinder 45. The cylinder 47 presses the four corners of the mask frame 271 downward. In this way, the mask 27 is pressed against the mask guide 33 by each of the cylinders 45 and 47, and is fixed at the printing position.
 マスク移動部40は、シリンダ110を用いてロッド115を駆動させ、マスク枠271の側面に沿ってロッド115を下降させた後、印刷ヘッド37の動作と共にY軸方向に移動することでマスクチェンジャ15へのマスク27の収納動作、あるいはマスクチェンジャ15からのマスク27の引き出し動作を実行する。 The mask moving unit 40 drives the rod 115 using the cylinder 110, lowers the rod 115 along the side surface of the mask frame 271, and then moves the mask changer 15 in the Y-axis direction together with the operation of the print head 37. The mask 27 is stored in the mask changer 15, or the mask 27 is pulled out from the mask changer 15.
 印刷ヘッド37は、X軸方向に延びてY軸方向に移動自在に設けられたスキージベース119と、スキージベース119の下方に設けられた2つのスキージ121と、スキージベース119の上面側に設けられたスキージ昇降駆動部123と、を備えている。2つのスキージ121のそれぞれは、Y軸方向に対向して配置されている。スキージ昇降駆動部123は、2つのスキージ121のそれぞれをスキージベース119の下方に個別に昇降させる。 The print head 37 includes a squeegee base 119 that extends in the X-axis direction and is movable in the Y-axis direction, two squeegees 121 that are provided below the squeegee base 119, and an upper surface of the squeegee base 119. The squeegee lifting drive unit 123 is provided. The two squeegees 121 are arranged to face each other in the Y-axis direction. The squeegee elevation drive section 123 individually raises and lowers each of the two squeegees 121 below the squeegee base 119.
 印刷ヘッド37は、スクレイパユニット39を有する。スクレイパユニット39は、マスク27の半田ペーストPstを回収するペースト回収部として機能する。スクレイパユニット39は、X軸方向に延びたスクレイパベース133と、スクレイパベース133に設けられたスクレイパ昇降シリンダ135と、スクレイパ昇降シリンダ135によって昇降されるスクレイパ137と、を備えている。スクレイパベース133は、スキージベース119と同様に、2つのスキージベースガイド125のそれぞれによって左右の両端部が支持される。スクレイパベース133は、スキージベース119に連結されて、スキージベース119と一体となってY軸方向に移動する。スクレイパユニット39は、スクレイパ昇降シリンダ135を駆動させてスクレイパ137を昇降する。 The print head 37 has a scraper unit 39. The scraper unit 39 functions as a paste collecting section that collects the solder paste Pst of the mask 27. The scraper unit 39 includes a scraper base 133 extending in the X-axis direction, a scraper lifting cylinder 135 provided on the scraper base 133, and a scraper 137 that is lifted and lowered by the scraper lifting cylinder 135. There is. Similar to the squeegee base 119, the scraper base 133 is supported at both left and right ends by the two squeegee base guides 125, respectively. The scraper base 133 is connected to the squeegee base 119 and moves together with the squeegee base 119 in the Y-axis direction. The scraper unit 39 drives the scraper elevating cylinder 135 to move the scraper 137 up and down.
 印刷ヘッド37は、スクレイパベース133に連結されたアーム部139と、アーム部139に連結されたテンション計測装置保持部141と、テンション計測装置183と、を備える。 The print head 37 includes an arm portion 139 connected to the scraper base 133, a tension measuring device holding portion 141 connected to the arm portion 139, and a tension measuring device 183.
 アーム部139は、マスクチェンジャ15側に設けられた2つのシリンダ47のそれぞれと、テンション計測装置保持部141とが連結される。テンション計測装置保持部141は、アーム部139に連結され、テンション計測装置183を保持する。 The arm portion 139 is connected to each of the two cylinders 47 provided on the mask changer 15 side and the tension measuring device holding portion 141. The tension measuring device holding section 141 is connected to the arm section 139 and holds the tension measuring device 183.
 テンション計測装置保持部141は、テンション計測装置保持部141の下部に開口を有し、この開口を通じて、測定子187がステンシルSUSの上面(Z方向側の面)に載置可能な構成を有する。テンション計測装置保持部141は、印刷ヘッド37と一体となってZ軸方向に昇降し、測定子187がステンシルSUSの上面から所定距離だけ離間した待機高さ位置と、測定子187がステンシルSUSの上面に載置される載置高さ位置との間で昇降される。テンション計測装置保持部141は、制御部159Aにより制御され、測定子187がステンシルSUSの上面に載置された後にマスク27のテンションを計測し、計測結果を制御部159Aに出力する。 The tension measuring device holding section 141 has an opening at the lower part of the tension measuring device holding section 141, and has a configuration in which the measuring element 187 can be placed on the upper surface (the surface on the Z direction side) of the stencil SUS through this opening. The tension measuring device holder 141 moves up and down in the Z-axis direction together with the print head 37, and the tension measuring device holder 141 moves up and down in the Z-axis direction, and the measuring point 187 is at a standby height position at a predetermined distance from the top surface of the SUS stencil. It is raised and lowered between the mounting height position where it is mounted on the upper surface. The tension measuring device holding section 141 is controlled by the control section 159A, measures the tension of the mask 27 after the measuring element 187 is placed on the upper surface of the stencil SUS, and outputs the measurement result to the control section 159A.
 図6は、印刷部13の部分平面図である。基板搬送保持部21(図3,図4参照)の上方にはマスクガイド33が設けられている。マスクガイド33は、Y軸方向(前後方向とする)に延びてX軸方向に対向するように平行に配置された一対のガイド部91と、一対のガイド部91の前方端部にX軸方向に延びて設けられた左右方向ガイド部93と、を有している。一対のガイド部91のそれぞれは、断面がL字状となるように形成され、水平部95と水平部95の外側に形成された垂直部97とを有する。一方、左右方向ガイド部93は、一対のガイド部91のそれぞれの水平部95と連接されて構成される。 FIG. 6 is a partial plan view of the printing section 13. A mask guide 33 is provided above the substrate transport holding section 21 (see FIGS. 3 and 4). The mask guide 33 includes a pair of guide parts 91 that extend in the Y-axis direction (referred to as the front-back direction) and are arranged in parallel to face each other in the X-axis direction, and a pair of guide parts 91 that extend in the X-axis direction at the front ends of the pair of guide parts 91. It has a left-right direction guide part 93 provided extending therefrom. Each of the pair of guide parts 91 is formed to have an L-shaped cross section, and has a horizontal part 95 and a vertical part 97 formed outside the horizontal part 95. On the other hand, the left-right guide portion 93 is configured to be connected to each horizontal portion 95 of the pair of guide portions 91 .
 図7は、印刷装置11が備える印刷部の部分平面図である。マスクガイド33は、印刷位置からマスクチェンジャ15までのマスク27の移動をガイドする。マスク27は平面視において矩形形状を有しており、その左右のY軸辺のそれぞれがマスクガイド33の一対のガイド部91によってY軸方向に案内される。マスク27は、シリンダ45およびシリンダ47によって印刷位置に固定される。 FIG. 7 is a partial plan view of the printing section included in the printing device 11. The mask guide 33 guides the movement of the mask 27 from the printing position to the mask changer 15. The mask 27 has a rectangular shape in plan view, and its left and right Y-axis sides are each guided in the Y-axis direction by a pair of guide portions 91 of the mask guide 33. Mask 27 is fixed in the printing position by cylinder 45 and cylinder 47.
 図8は、マスク27の一例を示す平面図である。マスク27は、略矩形状の金属板により構成される。マスク27は、基板KBの表面に形成された電極パターン(不図示)に対応するパターン開口99が形成されたステンシルSUSを備える。マスク27は、外周がマスク枠271によって支持される。マスク枠271は、Y方向の前側が前枠体103、Y方向の後側が後枠体105、X方向の右側が右枠体107、X方向の左側が左枠体109により構成され、ステンシルSUSとマスク枠271との間を接続部材100により接続する。 FIG. 8 is a plan view showing an example of the mask 27. The mask 27 is composed of a substantially rectangular metal plate. The mask 27 includes a stencil SUS in which a pattern opening 99 corresponding to an electrode pattern (not shown) formed on the surface of the substrate KB is formed. The outer periphery of the mask 27 is supported by a mask frame 271. The mask frame 271 is composed of a front frame body 103 on the front side in the Y direction, a rear frame body 105 on the rear side in the Y direction, a right frame body 107 on the right side in the X direction, and a left frame body 109 on the left side in the X direction, and is made of stencil SUS. and the mask frame 271 are connected by the connecting member 100.
 マスクガイド33が有する一対のガイド部91のそれぞれの後端側は、水平面(XY平面)上においてマスクチェンジャ15の近傍位置(つまり、マスク27の引き出し、および収納が行われるマスク通過開口71付近)まで延びている。マスクガイド33は、マスク27の印刷位置とマスクチェンジャ15のマガジン25との間で搬送されるマスク27の搬送経路となる。 The rear end side of each of the pair of guide parts 91 of the mask guide 33 is located near the mask changer 15 on the horizontal plane (XY plane) (that is, near the mask passage opening 71 where the mask 27 is pulled out and stored). It extends to The mask guide 33 serves as a transport path for the mask 27 to be transported between the printing position of the mask 27 and the magazine 25 of the mask changer 15.
 図9は、印刷位置におけるマスク27を示す下面図である。気体吹付け部43は、下面側にX軸方向に並んで設けられた複数の気体噴出孔113のそれぞれが設けられている。 FIG. 9 is a bottom view showing the mask 27 in the printing position. The gas blowing part 43 is provided with a plurality of gas blowing holes 113 arranged in the X-axis direction on the lower surface side.
 図10は、マスクガイド33によりガイドされるマスク27の様子を示す正面図である。2つのシリンダ45のそれぞれと、4つのシリンダ47のそれぞれとは、マスクガイド33の左右のガイド部91のそれぞれが有する垂直部97に固定して設けられる。 FIG. 10 is a front view showing how the mask 27 is guided by the mask guide 33. Each of the two cylinders 45 and each of the four cylinders 47 is fixed to a vertical portion 97 of each of the left and right guide portions 91 of the mask guide 33.
 左右の2つのシリンダ45のそれぞれは、マスク保持部35のY軸方向に延びる左右の2つの直線部分のそれぞれの中間部の上方に設けられている。4つのシリンダ47のそれぞれは、マスク保持部35の四隅もしくはその近傍の上方に設けられている。 The two left and right cylinders 45 are each provided above the intermediate portion of the two left and right linear portions of the mask holding portion 35 extending in the Y-axis direction. Each of the four cylinders 47 is provided above the four corners of the mask holding section 35 or near the four corners.
 図11は、実施の形態1における印刷部13の部分側面図である。マスク27は、シリンダ45の昇降ロッド117およびシリンダ47のロッド115によりマスク枠271が押さえられることによって、印刷位置に固定される。 FIG. 11 is a partial side view of the printing section 13 in the first embodiment. The mask 27 is fixed at the printing position by the mask frame 271 being pressed by the lifting rod 117 of the cylinder 45 and the rod 115 of the cylinder 47.
 図12は、実施の形態1における印刷部13の平面図である。スキージベース119は、Y軸方向に延びた形状を有している。 FIG. 12 is a plan view of the printing section 13 in the first embodiment. The squeegee base 119 has a shape extending in the Y-axis direction.
 スキージベース119は、Y軸方向に延びてX軸方向に対向するように平行に配置された2つのスキージベースガイド125のそれぞれによって左右の両端部が支持されている。2つのスキージベースガイド125のうち一方のスキージベースガイド125の外側(X軸方向の外側)には、Y軸方向に延びたスキージベース移動ボール螺子127が設けられている。 The left and right ends of the squeegee base 119 are supported by two squeegee base guides 125 that extend in the Y-axis direction and are arranged in parallel to face each other in the X-axis direction. A squeegee base moving ball screw 127 extending in the Y-axis direction is provided on the outside (outside in the X-axis direction) of one of the two squeegee base guides 125 .
 スキージベース移動ボール螺子127は、スキージベース119に設けられたスキージベースナット129に螺合している。スキージベース移動ボール螺子127は、スキージベース駆動モータ131と連結され、スキージベース駆動モータ131の駆動によってスキージベース移動ボール螺子127が回転すると、スキージベースナット129を介してスキージベース119がY軸方向に移動する。 The squeegee base moving ball screw 127 is screwed into a squeegee base nut 129 provided on the squeegee base 119. The squeegee base moving ball screw 127 is connected to the squeegee base drive motor 131, and when the squeegee base moving ball screw 127 is rotated by the drive of the squeegee base drive motor 131, the squeegee base 119 is moved in the Y-axis direction via the squeegee base nut 129. Moving.
 マスク上面クリーナ41は、スクレイパユニット39によって半田ペーストPstが回収された後のステンシルSUSの上面をクリーニングする機能を有するものであり、図12に示すように、スキージベース119に取り付けられている。これにより、マスク上面クリーナ41は、スキージベース119と一体となって、印刷ヘッド37とともに印刷位置に搬送されたマスク27上をY軸方向に移動してクリーニングする。なお、図11では、マスク上面クリーナ41の図示を省略している。 The mask top surface cleaner 41 has a function of cleaning the top surface of the stencil SUS after the solder paste Pst is collected by the scraper unit 39, and is attached to the squeegee base 119 as shown in FIG. . As a result, the mask upper surface cleaner 41 is integrated with the squeegee base 119 to move and clean the mask 27, which has been transported to the printing position together with the print head 37, in the Y-axis direction. Note that in FIG. 11, illustration of the mask upper surface cleaner 41 is omitted.
 気体吹付け部43は、マスク27の移動経路の上方をマスク27の移動方向(X軸方向)に対して交差する横方向に延びた管状部55と、管状部55の一端側に繋がるバルブ部57と、を備えている。管状部55は、2つのガイド部91のそれぞれの後端側に、2つのガイド部91のそれぞれを跨ぐようにして設けられている。 The gas blowing part 43 includes a tubular part 55 that extends above the movement path of the mask 27 in a horizontal direction intersecting the movement direction (X-axis direction) of the mask 27, and a valve part that is connected to one end side of the tubular part 55. It is equipped with 57 and. The tubular portion 55 is provided at the rear end side of each of the two guide portions 91 so as to straddle each of the two guide portions 91 .
 管状部55は、バルブ部57を介して高圧気体GSを供給して複数の気体噴出孔113(図12参照)のそれぞれから下方に位置するステンシルSUSの上面に向かって高圧気体GSを噴射する。なお、マスク上面クリーナ41は、ステンシルSUSの上面に気体を吹き付けるもの(つまり、ブローするもの)に限定されず、例えばステンシルSUSの上面を吸引するもの、ブラッシングするもの、またはステンシルSUSの上面を拭き取るもの等であってもよい。 The tubular portion 55 supplies high-pressure gas GS via the valve portion 57 and injects the high-pressure gas GS from each of the plurality of gas jet holes 113 (see FIG. 12) toward the upper surface of the stencil SUS located below. Note that the mask top surface cleaner 41 is not limited to a device that sprays gas onto the top surface of the stencil SUS (that is, a device that blows); for example, a device that sucks the top surface of the stencil SUS, a device that brushes the top surface of the stencil SUS, or a device that wipes the top surface of the stencil SUS. It may also be something.
 カメラ移動機構49は、移動ベース59にカメラ51のカメラ筐体153が取り付けられている。カメラ筐体153は、略六面体形状で形成される。カメラ筐体153は、下面に下方撮像カメラ155、上面に上方撮像カメラ157のそれぞれの鏡筒が光軸をZ軸に沿う方向で取り付けられている。 In the camera moving mechanism 49, a camera housing 153 of the camera 51 is attached to a moving base 59. The camera housing 153 is formed in a substantially hexahedral shape. In the camera housing 153, a lower imaging camera 155 is attached to the lower surface, and an upper imaging camera 157 is attached to the upper surface thereof, with their optical axes extending along the Z-axis.
 カメラ移動機構49は、移動ベース59のY軸方向への移動によって吸着部63をY軸方向に移動させることができる。吸着部63は、さらにYZアクチュエータ61によって、移動ベース59に対してY軸に沿う方向とZ軸に沿う方向とに移動することができる。このYZアクチュエータ61の移動機構は、ラックとピニオンとにより構成される直線駆動機構、リニアモータ機構等であってよい。 The camera moving mechanism 49 can move the suction section 63 in the Y-axis direction by moving the moving base 59 in the Y-axis direction. The suction section 63 can further be moved by the YZ actuator 61 with respect to the movable base 59 in the direction along the Y axis and the direction along the Z axis. The movement mechanism of this YZ actuator 61 may be a linear drive mechanism, a linear motor mechanism, or the like composed of a rack and a pinion.
 吸着部63は、カメラ移動機構49により、マスク通過開口71の直前まで移動される。吸着部63は、マスク通過開口71の直前まで移動された状態で、YZアクチュエータ61により供給対象となるマスク27の格納高さ(Z軸方向)まで昇降された後、YZアクチュエータ61により後方に移動されて、マスクチェンジャ15の内部に進入し、マガジン25内に格納されたマスク27の枠101(具体的には、前枠体103)の位置まで移動される。 The suction section 63 is moved by the camera moving mechanism 49 to just in front of the mask passage opening 71. The suction unit 63 is moved to just before the mask passage opening 71, and then raised and lowered by the YZ actuator 61 to the storage height (in the Z-axis direction) of the mask 27 to be supplied, and then moved backward by the YZ actuator 61. Then, it enters the inside of the mask changer 15 and is moved to the position of the frame 101 (specifically, the front frame body 103) of the mask 27 stored in the magazine 25.
 また、吸着部63は、このマスク対向位置からさらにY軸方向に移動される。これにより、吸着部63は、枠101に対する吸着位置の微調整が可能となる。吸着位置に微調整された吸着部63は、マスクチェンジャ15のマガジン25に格納されたマスク27が備える枠101(具体的には、前枠体103)の側面を吸着して、マガジン25の内部からマスク通過開口71を通じて、印刷部13内へマスク27を引き出すことができる。 Furthermore, the suction section 63 is further moved in the Y-axis direction from this mask-facing position. This allows the suction unit 63 to finely adjust the suction position with respect to the frame 101. The suction unit 63, which has been finely adjusted to the suction position, suctions the side surface of the frame 101 (specifically, the front frame body 103) of the mask 27 stored in the magazine 25 of the mask changer 15, and the inside of the magazine 25. The mask 27 can be pulled out into the printing section 13 through the mask passage opening 71 from the mask passage opening 71 .
 マスク27の引き出し動作および収納動作は、カメラ移動機構49と、印刷ヘッド37と、により実行される。カメラ移動機構49は、マガジン25内から印刷部13内の印刷位置の途中までマスク27を引き出す。印刷ヘッド37は、印刷部13内の途中まで引き出された状態のマスク27を、印刷処理が行われる印刷位置まで搬送する。 The operation of pulling out and storing the mask 27 is performed by the camera moving mechanism 49 and the print head 37. The camera moving mechanism 49 pulls out the mask 27 from inside the magazine 25 to the middle of the printing position inside the printing section 13. The print head 37 transports the mask 27 that has been pulled out halfway inside the printing section 13 to a printing position where printing processing is performed.
 吸着部63は、例えば印刷装置11に設けられる空気圧回路(不図示)に配管接続される。空気圧回路は、空圧発生源が接続される。空圧発生源は、真空ポンプと、エア供給源とを含む。吸着部63は、真空バルブを介して空圧発生源とブローバルブに接続される。真空バルブは、後述する制御部159Aにより入力ポートと出力ポートとを切り替えることにより、吸着部63の真空圧とブロー圧とを切り替え可能にする。 The suction unit 63 is connected to, for example, a pneumatic circuit (not shown) provided in the printing device 11 through piping. A pneumatic pressure generating source is connected to the pneumatic circuit. The pneumatic source includes a vacuum pump and an air supply source. The suction unit 63 is connected to a pneumatic pressure source and a blow valve via a vacuum valve. The vacuum valve makes it possible to switch between the vacuum pressure and the blow pressure of the adsorption section 63 by switching between an input port and an output port using a control section 159A, which will be described later.
 マスクチェンジャ15およびカメラ移動機構49は、マガジン25に収納されたマスク27をマガジン25から引き出して印刷位置まで搬送する。 The mask changer 15 and camera moving mechanism 49 pull out the mask 27 stored in the magazine 25 from the magazine 25 and transport it to the printing position.
 ここで、図13を参照して、テンション計測装置183について説明する。図13は、テンション計測装置183の一例を説明する図である。アーム部139およびテンション計測装置保持部141の斜視図である。テンション計測装置183は、アーム部139に設けられたテンション計測装置保持部141により保持される。アーム部139は印刷ヘッド37に設けられおり、テンション計測装置183は印刷ヘッド37と一体的に駆動される。 Here, the tension measuring device 183 will be explained with reference to FIG. 13. FIG. 13 is a diagram illustrating an example of the tension measuring device 183. FIG. 3 is a perspective view of an arm section 139 and a tension measuring device holding section 141. The tension measuring device 183 is held by a tension measuring device holding section 141 provided on the arm section 139. The arm portion 139 is provided on the print head 37, and the tension measuring device 183 is driven integrally with the print head 37.
 テンション計測装置183は、マスク27のテンションを計測する。テンション計測装置183は、印刷ヘッド37におけるアーム部139と、テンション計測装置保持部141とが連結され、X軸方向、Y軸方向、およびZ軸方向のそれぞれに印刷ヘッド37と一体的に移動される。テンション計測装置183は、マスク27の入れ替え時、あるいは基板KBが所定枚数印刷されるごとにマスク27のテンションの計測を実行し、計測結果をテンション計測制御部178に出力する。 The tension measuring device 183 measures the tension of the mask 27. The tension measuring device 183 has an arm portion 139 in the print head 37 and a tension measuring device holding portion 141 connected to each other, and is moved integrally with the print head 37 in each of the X-axis direction, the Y-axis direction, and the Z-axis direction. Ru. The tension measuring device 183 measures the tension of the mask 27 when replacing the mask 27 or every time a predetermined number of substrates KB are printed, and outputs the measurement result to the tension measurement control section 178.
 具体的に、テンション計測装置183は、テンションを計測可能な測定子187がテンション計測装置保持部141に形成された開口185を通じてステンシルSUSの上面に載置可能な構成を有する。テンション計測装置183は、テンション計測制御部178によりステンシルSUSの上面に載置されると、開口185を通じて測定子187がステンシルSUSの上面に載置され、テンションを計測する。 Specifically, the tension measuring device 183 has a configuration in which a measuring element 187 capable of measuring tension can be placed on the upper surface of the stencil SUS through an opening 185 formed in the tension measuring device holding portion 141. When the tension measurement device 183 is placed on the top surface of the stencil SUS by the tension measurement control unit 178, the measuring element 187 is placed on the top surface of the stencil SUS through the opening 185, and the tension is measured.
 テンション計測装置183は、筐体191と、テンション計測装置保持部141と、テンションゲージ193と、を含んで構成される。テンション計測装置保持部141は、アーム部139に連結され、マスク27に対向し、略矩形状に形成された設置面を有する。テンション計測装置保持部141は、筐体191およびテンションゲージ193を支持し、設置面の略中央位置に形成された開口185に測定子187を収容する。 The tension measuring device 183 includes a housing 191, a tension measuring device holding section 141, and a tension gauge 193. The tension measuring device holding section 141 is connected to the arm section 139, faces the mask 27, and has a substantially rectangular installation surface. The tension measuring device holding section 141 supports the housing 191 and the tension gauge 193, and accommodates the measuring element 187 in an opening 185 formed at approximately the center of the installation surface.
 筐体191は、円筒状に形成され、測定子187、スピンドル軸189、および計測用荷重195のそれぞれを収容する。測定子187は、ステンシルSUSの上面に載置されると、計測用荷重195が印加される。マスク27のテンションを計測する。スピンドル軸189は、測定子187と接続部190との間でそれぞれ固定的に接続されて、テンションの計測時に、計測用荷重195が印加された測定子187と一体的にZ軸方向に昇降される。接続部190は、スピンドル軸189およびテンションゲージ193との間でそれぞれ接続される。接続部190は、-Z方向に印加された計測用荷重195と、マスク27から受けるZ方向の反作用とに基づいて、テンションゲージ193を引っ張る張力あるいは接続部190の高さ位置が変化する。 The housing 191 is formed into a cylindrical shape, and accommodates the probe 187, the spindle shaft 189, and the measurement load 195, respectively. When the measuring element 187 is placed on the upper surface of the stencil SUS, a measurement load 195 is applied. The tension of the mask 27 is measured. The spindle shaft 189 is fixedly connected between the measuring head 187 and the connecting part 190, and is moved up and down in the Z-axis direction together with the measuring head 187 to which a measuring load 195 is applied when measuring tension. Ru. The connecting portion 190 is connected between the spindle shaft 189 and the tension gauge 193, respectively. In the connection part 190, the tension that pulls the tension gauge 193 or the height position of the connection part 190 changes based on the measurement load 195 applied in the -Z direction and the reaction in the Z direction received from the mask 27.
 テンションゲージ193は、接続部190との間で接続され、接続部190により伝達される-Z方向への張力、または接続部190の-Z方向への降下量に基づいて、マスク27のテンションを計測する。テンションゲージ193は、テンション計測制御部178との間で電気的に接続され、テンション計測制御部178に計測結果を出力する。 The tension gauge 193 is connected to the connection part 190 and measures the tension of the mask 27 based on the tension in the -Z direction transmitted by the connection part 190 or the amount of descent of the connection part 190 in the -Z direction. measure. The tension gauge 193 is electrically connected to the tension measurement control section 178 and outputs a measurement result to the tension measurement control section 178.
 次に、図14を参照して、実施の形態1に係る印刷装置11の制御系統について説明する。図14は、実施の形態1に係る印刷装置11の制御系統を示すブロック図である。 Next, with reference to FIG. 14, a control system of the printing apparatus 11 according to the first embodiment will be described. FIG. 14 is a block diagram showing a control system of the printing apparatus 11 according to the first embodiment.
 印刷装置11における制御部159Aは、所謂プロセッサであり、例えばCPU(Central Processing Unit)またはFPGA(Field Programmable Gate Array)を用いて構成されて、メモリ159Bと協働して、各種の処理および制御を行う。具体的には、制御部159Aは、メモリ159Bに保持されたプログラムおよびデータを参照し、そのプログラムを実行することにより、各部の機能を実現する。なお、ここでいう各部は、基板搬送保持制御部165、マスク搬送設置制御部167、印刷動作制御部169、撮像制御部171、吸着制御部173、スクレイパ制御部174、昇降機制御部175、粘度計制御部177、およびテンション計測制御部178等である。 The control unit 159A in the printing device 11 is a so-called processor, and is configured using, for example, a CPU (Central Processing Unit) or an FPGA (Field Programmable Gate Array), and performs various processing and control in cooperation with the memory 159B. conduct. Specifically, the control unit 159A refers to programs and data held in the memory 159B, and executes the programs to implement the functions of each unit. Note that each section referred to here includes a substrate transport/holding control section 165, a mask transport/installation control section 167, a printing operation control section 169, an imaging control section 171, an adsorption control section 173, a scraper control section 174, an elevator control section 175, and a viscometer. They include a control section 177, a tension measurement control section 178, and the like.
 メモリ159Bは、例えば制御部159Aの各処理を実行する際に用いられるワークメモリとしてのRAM(Random Access Memory)と、制御部159Aの動作を規定したプログラムおよびデータを格納するROM(Read Only Memory)とを有する。RAMには、制御部159Aにより生成あるいは取得されたデータもしくは情報が一時的に保存される。ROMには、制御部159Aの動作を規定するプログラムが書き込まれている。 The memory 159B includes, for example, a RAM (Random Access Memory) as a work memory used when executing each process of the control unit 159A, and a ROM (Read Only Memory) that stores programs and data that define the operation of the control unit 159A. and has. Data or information generated or acquired by the control unit 159A is temporarily stored in the RAM. A program that defines the operation of the control unit 159A is written in the ROM.
 メモリ159Bは、テンション計測装置183により計測されたマスク27のテンションに基づいて、基板KBの版離れモードの判定するための第1閾値および第2閾値のそれぞれを記憶する。第1閾値は、計測されたマスク27のテンションが通常の版離れ制御を実行可能な値であるか否かを判定するための閾値である。第2閾値は、第1閾値よりも小さい値であって、計測されたマスク27のテンションがマスク吸着版離れモードを実行可能な値であるか否かを判定するための閾値である。なお、第1閾値および第2閾値のそれぞれは、マスク27の種類ごとに異なる値が設定されてよい。 The memory 159B stores, based on the tension of the mask 27 measured by the tension measuring device 183, a first threshold value and a second threshold value for determining the plate separation mode of the substrate KB. The first threshold is a threshold for determining whether the measured tension of the mask 27 is a value that allows normal plate separation control to be performed. The second threshold value is a value smaller than the first threshold value, and is a threshold value for determining whether the measured tension of the mask 27 is a value that allows execution of the mask suction plate separation mode. Note that the first threshold value and the second threshold value may be set to different values for each type of mask 27.
 また、メモリ159Bは、印刷対象であるマスク27ごとの生産データと、マスクチェンジャ15のマガジン25内に収納されたマスクに関する情報とを記憶する。なお、生産データは、各マスクの大きさの情報と、各マスクの識別情報とを少なくとも含む。また、マスクに関する情報は、各マスクの識別情報、マガジン25内における収納位置の情報、半田印刷で使用済みであるか否かの情報等を含む。 Furthermore, the memory 159B stores production data for each mask 27 to be printed and information regarding the masks stored in the magazine 25 of the mask changer 15. Note that the production data includes at least information on the size of each mask and identification information on each mask. Further, the information regarding the masks includes identification information of each mask, information on the storage position in the magazine 25, information on whether the mask has been used for solder printing, and the like.
 基板搬送保持制御部165は、基板搬送保持部21による基板KBの搬送制御(具体的には、搬入制御、搬出制御)、および保持制御を実行する。また、基板搬送保持制御部165は、基板KBの搬入時にカメラ51により撮像された基板KBの撮像画像に基づいて、マスク27に対する基板KBの位置合わせ制御を実行する。印刷動作制御部169から出力された半田印刷動作の完了報告を取得した場合、基板搬送保持制御部165は、現在設定されている版離れモードに基づいて、テーブル昇降機構67の複数の送りねじ69のそれぞれをモータ(不図示)で回転させて、基板搬送保持部21を-Z方向に下降し、版離れ動作を実行する。基板搬送保持制御部165は、版離れ動作が終了して版離れ状態となった基板KBを搬出する。なお、テーブル昇降機構67は、送りネジ69の代わりに基板KBをZ軸方向に昇降可能なシリンダを備えてもよい。 The substrate transport/holding control unit 165 controls the transport of the substrate KB by the substrate transport/holding unit 21 (specifically, carry-in control, carry-out control) and holding control. Further, the substrate transport/holding control unit 165 executes positioning control of the substrate KB with respect to the mask 27 based on a captured image of the substrate KB captured by the camera 51 when the substrate KB is carried in. When acquiring the completion report of the solder printing operation outputted from the printing operation control unit 169, the board transport holding control unit 165 moves the plurality of feed screws 69 of the table lifting mechanism 67 based on the currently set plate separation mode. are rotated by a motor (not shown) to lower the substrate conveying and holding section 21 in the -Z direction to perform a plate separation operation. The substrate transport/holding control unit 165 carries out the substrate KB which has finished the plate separation operation and is now in the plate separation state. Note that the table elevating mechanism 67 may include a cylinder capable of elevating the substrate KB in the Z-axis direction instead of the feed screw 69.
 マスク搬送設置制御部167は、印刷ヘッド37およびカメラ移動機構49のそれぞれを制御し、マスクチェンジャ15へのマスク27の引き出し制御および収納制御を行う。具体的に、マスク搬送設置制御部167は、移動ベース駆動モータ151による移動ベース59のY軸方向への移動制御と、YZアクチュエータ61による吸着部63のY軸方向およびZ軸方向への移動制御と、吸着部63による枠101の側面への吸着制御と、をそれぞれ実行する。マスク搬送設置制御部167は、所定の印刷位置にマスク27を搬送した後、シリンダ45,47のそれぞれを駆動させて、マスク27を保持する。 The mask conveyance and installation control unit 167 controls each of the print head 37 and camera movement mechanism 49, and controls the withdrawal and storage of the mask 27 into the mask changer 15. Specifically, the mask transport and installation control unit 167 controls the movement of the moving base 59 in the Y-axis direction by the moving base drive motor 151 and the movement control of the suction unit 63 in the Y-axis direction and the Z-axis direction by the YZ actuator 61. and suction control by the suction unit 63 to the side surface of the frame 101, respectively. After transporting the mask 27 to a predetermined printing position, the mask transport and installation control unit 167 drives each of the cylinders 45 and 47 to hold the mask 27.
 印刷動作制御部169は、X軸方向、Y軸方向およびZ軸方向に印刷ヘッド37を駆動させて、印刷制御を行う。具体的に、印刷動作制御部169は、スキージベース駆動モータ131によるスキージベース119のY軸方向への移動制御と、スキージ昇降駆動部123によるスキージ121のZ軸方向の昇降制御と、をそれぞれ実行する。 The printing operation control unit 169 controls printing by driving the print head 37 in the X-axis direction, Y-axis direction, and Z-axis direction. Specifically, the printing operation control unit 169 controls the movement of the squeegee base 119 in the Y-axis direction by the squeegee base drive motor 131, and controls the elevation of the squeegee 121 in the Z-axis direction by the squeegee elevation drive unit 123, respectively. do.
 印刷動作制御部169は、粘度計制御部177から出力された半田コネ動作のパラメータに基づいて、2本のスキージ121のそれぞれを制御し、新たなマスク27のステンシルSUSの上面に移載された半田ペーストPstをこねて、所定の粘度(狙い値)になるように調整する。 The printing operation control unit 169 controls each of the two squeegees 121 based on the parameters of the solder connection operation output from the viscometer control unit 177, and controls each of the two squeegees 121 to transfer the stencil SUS onto the upper surface of the new mask 27. The solder paste Pst is kneaded and adjusted to a predetermined viscosity (target value).
 撮像制御部171は、所定の基板搬送位置で基板搬送保持部21によって保持された基板KBの下面と、印刷位置に搬送されたステンシルSUSの上面とを、カメラ51の制御を実行して撮像させる。具体的に、撮像制御部171は、移動ベース駆動モータ151による移動ベース59のY軸方向への移動制御と、移動ベース59に沿ったカメラ51のX軸方向への移動制御と、カメラ51が備える下方撮像カメラ155による基板KBの上面の撮像制御と、カメラ51が備える上方撮像カメラ157によるマスク27の下面の撮像制御と、をそれぞれ実行する。 The imaging control unit 171 controls the camera 51 to image the lower surface of the board KB held by the board transport holding unit 21 at a predetermined board transport position and the upper surface of the stencil SUS transported to the printing position. . Specifically, the imaging control unit 171 controls the movement of the moving base 59 in the Y-axis direction by the moving base drive motor 151, controls the movement of the camera 51 along the moving base 59 in the X-axis direction, and controls the movement of the camera 51 in the X-axis direction. Imaging control of the upper surface of the board KB by the lower imaging camera 155 provided, and imaging control of the lower surface of the mask 27 by the upper imaging camera 157 included in the camera 51 are respectively executed.
 吸着制御部173は、マガジン25内に格納されたマスク27の引き出し動作時に、制御部159Aから送信されたマスク吸着を開始する旨の制御指令に基づいて、空気圧回路に設けられた真空バルブにポート切替信号を送信し、真空ポンプによりカメラ移動機構49が備える吸着部63内部を負圧にして、吸着部63に枠101(具体的には、枠101の前枠体103)の側面を吸着させる。また、吸着制御部173は、制御部159Aから送信されたマスク吸着を終了する旨の制御指令に基づいて、空気圧回路に設けられる真空バルブにポート切替信号を送り、真空バルブのポートをブローバルブに切り替えさせて、吸着部63の吸着状態を解除させる。 When the mask 27 stored in the magazine 25 is pulled out, the suction control unit 173 connects a port to a vacuum valve provided in the pneumatic circuit based on a control command to start mask suction transmitted from the control unit 159A. A switching signal is transmitted, and the inside of the suction unit 63 included in the camera moving mechanism 49 is made negative pressure by a vacuum pump, and the side surface of the frame 101 (specifically, the front frame body 103 of the frame 101) is suctioned by the suction unit 63. . In addition, the suction control unit 173 sends a port switching signal to the vacuum valve provided in the pneumatic circuit based on the control command to end mask suction transmitted from the control unit 159A, and changes the port of the vacuum valve to the blow valve. The switch is made to release the suction state of the suction section 63.
 また、吸着制御部173は、版離れモードがマスク吸着版離れモードに設定された場合、テンション計測制御部178から送信された制御指令に基づいて、空気圧回路に設けられた真空バルブにポート切替信号を送信し、真空ポンプにより基板搬送保持部21の吸着部20内部を負圧にして、吸着部20にマスク27のステンシルSUS(第1の領域の一例)の下面(具体的には、基板KBと接触する側の面)を吸着させる。また、吸着制御部173は、テーブル昇降機構67が所定高さ(例えば、5mm等)だけ下降された後、テンション計測制御部178から送信されたマスク吸着を終了する旨の制御指令に基づいて、空気圧回路に設けられる真空バルブにポート切替信号を送り、真空バルブのポートをブローバルブに切り替えさせて、吸着部20の吸着状態を解除させる。 In addition, when the plate separation mode is set to the mask suction plate separation mode, the suction control unit 173 sends a port switching signal to the vacuum valve provided in the pneumatic circuit based on the control command transmitted from the tension measurement control unit 178. is transmitted, and the inside of the adsorption part 20 of the substrate transfer holding part 21 is made negative pressure by a vacuum pump, and the lower surface of the stencil SUS (an example of the first region) of the mask 27 (specifically, the substrate KB) is applied to the adsorption part 20. (the side that comes into contact with the surface). Further, the suction control unit 173, after the table lifting mechanism 67 has been lowered by a predetermined height (for example, 5 mm, etc.), based on the control command to end the mask suction transmitted from the tension measurement control unit 178, A port switching signal is sent to the vacuum valve provided in the pneumatic circuit, the port of the vacuum valve is switched to the blow valve, and the suction state of the suction section 20 is released.
 スクレイパ制御部174は、マスク搬送設置制御部167によりマスク27の入れ替えが開始される前に、スクレイパユニット39を駆動させ、現在設置されているステンシルSUSの上面から半田ペーストPstを回収する。また、スクレイパ制御部174は、マスク搬送設置制御部167によりマスク27の入れ替えが終了すると、新たに搬入されたステンシルSUSの上面に回収された半田ペーストPstを移載する。 The scraper control unit 174 drives the scraper unit 39 and collects the solder paste Pst from the top surface of the currently installed stencil SUS before the mask conveyance and installation control unit 167 starts replacing the mask 27. Furthermore, when the mask conveyance and installation control section 167 finishes replacing the mask 27, the scraper control section 174 transfers the collected solder paste Pst onto the top surface of the newly brought in stencil SUS.
 昇降機制御部175は、昇降機65における昇降体昇降モータ79の駆動制御を実行し、マスクチェンジャ15内のマガジン25の位置(高さ)を昇降させる。また、昇降機制御部175は、安全制御部179を含んで構成される。 The elevator control unit 175 executes drive control of the elevator motor 79 in the elevator 65 to raise and lower the position (height) of the magazine 25 in the mask changer 15. Further, the elevator control section 175 is configured to include a safety control section 179.
 粘度計制御部177は、スクレイパ制御部174により新たに搬入されたステンシルSUSの上面への半田ペーストPstの移載が完了すると、印刷ヘッド37を昇降させて、XY平面上における半田ペーストPst位置で粘度計昇降シリンダ198を駆動させて、待機高さ位置から当接高さ位置まで粘度計197を下降させる。粘度計制御部177は、マスク27上に移載された半田ペーストPstに粘度計197の下端部を接触させ、接触された半田ペーストPstの粘度を測定させる。粘度計制御部177は、粘度計197から出力された半田ペーストPstの粘度の測定結果を取得する。粘度計制御部177は、取得された測定結果に基づいて、半田ペーストPstの現在の粘度を所定粘度にするための半田コネ動作のパラメータ(例えば、スキージ121の角度、印圧、コネ時間等)を決定する。粘度計制御部177は、決定された半田コネ動作のパラメータを印刷動作制御部169に出力する。粘度計制御部177は、印刷動作制御部169による半田コネ動作が終了すると、粘度計197により半田ペーストPstの粘度を再度測定させる。 When the scraper control unit 174 completes transferring the solder paste Pst to the upper surface of the newly brought in stencil SUS, the viscometer control unit 177 moves the print head 37 up and down to place the solder paste Pst at the position of the solder paste Pst on the XY plane. The viscometer lifting cylinder 198 is driven to lower the viscometer 197 from the standby height position to the contact height position. The viscometer control unit 177 brings the lower end of the viscometer 197 into contact with the solder paste Pst transferred onto the mask 27, and measures the viscosity of the contacted solder paste Pst. The viscometer control unit 177 obtains the measurement result of the viscosity of the solder paste Pst output from the viscometer 197. Based on the obtained measurement results, the viscometer control unit 177 determines solder connection operation parameters (for example, angle of squeegee 121, printing pressure, connection time, etc.) for adjusting the current viscosity of the solder paste Pst to a predetermined viscosity. Determine. The viscometer control unit 177 outputs the determined solder connection operation parameters to the printing operation control unit 169. When the soldering operation by the printing operation control section 169 is completed, the viscometer control section 177 causes the viscometer 197 to measure the viscosity of the solder paste Pst again.
 なお、粘度計制御部177は、事前にメモリ159Bに記録された複数の印刷条件のそれぞれのうちいずれかの印刷条件を決定してよい。ここでいう印刷条件は、スキージ121のそれぞれのマスク27に対する印刷角度、スキージ121の印刷速度(つまり、印刷時の移動速度)等である。 Note that the viscometer control unit 177 may determine any one of the plurality of printing conditions recorded in advance in the memory 159B. The printing conditions here include the printing angle of the squeegee 121 with respect to each mask 27, the printing speed of the squeegee 121 (that is, the moving speed during printing), and the like.
 テンション計測制御部178は、マスク搬送設置制御部167により新しいマスク27が搬入された場合、メモリ159Bに記憶されたマスク27の大きさに基づいて、印刷ヘッド37が備えるテンション計測装置183の測定子187がマスク27の中心位置Pt(図22参照)、かつ、載置高さ位置に位置するように印刷ヘッド37を移動させる。テンション計測装置183は、測定子187がマスク27上に載置されると、マスク27のテンションの計測を実行する。テンション計測制御部178は、テンション計測装置183により計測されたテンションを取得し、取得されたテンションに基づいて、版離れモードを決定する。テンション計測制御部178は、現在設定されている版離れモードを、決定された版離れモードに変更(設定)する。 When a new mask 27 is carried in by the mask conveyance and installation control unit 167, the tension measurement control unit 178 controls the measurement head of the tension measurement device 183 included in the print head 37 based on the size of the mask 27 stored in the memory 159B. The print head 37 is moved so that the print head 187 is located at the center position Pt of the mask 27 (see FIG. 22) and at the mounting height position. The tension measuring device 183 measures the tension of the mask 27 when the measuring element 187 is placed on the mask 27 . The tension measurement control unit 178 acquires the tension measured by the tension measurement device 183, and determines the plate separation mode based on the acquired tension. The tension measurement control unit 178 changes (sets) the currently set plate separation mode to the determined plate separation mode.
 安全制御部179は、マスクチェンジャ15の内部空間SPに設けられた各制御、および昇降機65への電力供給制御と、を実行する。具体的に、安全制御部179は、第1の運用モードと第2の運用モードとを切り替えることで、上述した制御を実行する。 The safety control unit 179 executes various controls provided in the internal space SP of the mask changer 15 and controls power supply to the elevator 65. Specifically, the safety control unit 179 executes the above-described control by switching between the first operation mode and the second operation mode.
 ここでいう第1の運用モードは、作業者によりマガジン25の交換、マガジン25へのマスク27の供給作業が行われている間に実行される制御であって、昇降機65への動力用電力の供給を停止させる制御である。なお、第1の運用モードにおいて、安全制御部179は、タッチパネル31を通じて警報音を発生させて、作業者に注意を喚起してもよい。 The first operation mode referred to here is a control executed while the operator is replacing the magazine 25 and supplying the mask 27 to the magazine 25, and is a control executed while the operator is replacing the magazine 25 and supplying the mask 27 to the magazine 25, and is a control that is executed while the operator is replacing the magazine 25 and supplying the mask 27 to the magazine 25. This is a control to stop the supply. Note that in the first operation mode, the safety control unit 179 may generate an alarm sound through the touch panel 31 to alert the operator.
 また、第2の運用モードは、マガジン25と印刷部13との間でマスク27の引き出し処理または収納処理が実行されている間に実行される制御であって、昇降機65への動力用電力の供給を行う制御である。 Further, the second operation mode is a control that is executed while the mask 27 is being pulled out or stored between the magazine 25 and the printing unit 13, and is a control that is executed while the mask 27 is being pulled out or stored between the magazine 25 and the printing unit 13. This is a control that performs supply.
 制御部159Aは、半田ペーストPstの粘度が所定粘度になるまで、粘度計制御部177による半田ペーストPstの粘度の計測動作と、印刷動作制御部169による半田コネ動作とを繰り返し実行させる。 The control unit 159A causes the viscometer control unit 177 to repeatedly perform the viscosity measurement operation of the solder paste Pst and the printing operation control unit 169 to perform the soldering connection operation until the viscosity of the solder paste Pst reaches a predetermined viscosity.
 次に、図15を参照して、版離れモードの設定手順および版離れ動作手順のそれぞれを説明する。図15は、実施の形態1に係る印刷装置11の版離れ動作手順例を説明するフローチャートである。なお、図15に示す動作手順におけるステップSt11~ステップSt16の処理は、版離れモードを設定するための版離れモードの設定処理である。また、図15に示す動作手順におけるステップSt17~ステップSt22の処理は、設定された版離れモードに基づいて、印刷済みの基板KBの版離れを実行するための版離れ動作処理である。 Next, with reference to FIG. 15, the setting procedure of the plate separation mode and the procedure of the plate separation operation will be described. FIG. 15 is a flowchart illustrating an example of a plate separation operation procedure of the printing apparatus 11 according to the first embodiment. Note that the processing from step St11 to step St16 in the operation procedure shown in FIG. 15 is a plate separation mode setting process for setting the plate separation mode. Further, the processing from step St17 to step St22 in the operation procedure shown in FIG. 15 is a plate separation operation process for executing plate separation of the printed board KB based on the set plate separation mode.
 印刷部13は、生産対象である基板KBの種類が変更されるタイミングで、図15に示す動作手順を実行する。なお、図15に示す動作手順のうちステップSt12~ステップSt16のそれぞれの処理は、印刷部13が基板KBの印刷枚数が事前に設定された所定枚数以上であると判定したタイミングで実行されてもよいし、印刷装置11の電源がONとなったタイミングに実行されてもよい。 The printing unit 13 executes the operation procedure shown in FIG. 15 at the timing when the type of the board KB to be produced is changed. It should be noted that each of the processes from step St12 to step St16 in the operation procedure shown in FIG. Alternatively, it may be executed at the timing when the power of the printing device 11 is turned on.
 マスク搬送設置制御部167は、メモリ159Bに記憶された生産データに基づいて、基板KBの種類の変更があると判定した場合、スクレイパ制御部174にステンシルSUSの上面に載置された半田ペーストPstの回収を実行させる。マスク搬送設置制御部167は、スクレイパ制御部174から出力された半田ペーストPstの回収処理の終了通知に基づいて、現在、印刷に使用されているマスク27を、新たな生産対象である基板KBに対応するマスク27に入れ替えるマスク入れ替え動作(具体的には、マスク27の収納動作および引き出し動作)を実行する(St11)。ここで、マスク27の収納動作または引き出し動作に関連する印刷ヘッド37の各機構について説明する。 When the mask conveyance and installation control unit 167 determines that there is a change in the type of the board KB based on the production data stored in the memory 159B, the mask conveyance and installation control unit 167 causes the scraper control unit 174 to remove the solder paste Pst placed on the top surface of the stencil SUS. to carry out collection. The mask conveyance and installation control unit 167 transfers the mask 27 currently being used for printing to the board KB, which is a new production target, based on the notification of completion of the solder paste Pst recovery process output from the scraper control unit 174. A mask replacement operation (specifically, a storage operation and a withdrawal operation of the mask 27) for replacing the mask 27 with a corresponding mask 27 is performed (St11). Here, each mechanism of the print head 37 related to the storing or pulling out operation of the mask 27 will be explained.
 印刷ヘッド37は、制御部159Aにおけるマスク搬送設置制御部167(図14参照)により制御されて、X軸方向、Y軸方向およびZ軸方向にそれぞれ駆動される。ロッド115は、シリンダ110に連結されて、シリンダ110と一体となってY軸に沿う方向に駆動される。ロッド115は、Z軸方向に昇降されて吸着部63によってマスクチェンジャ15内のマガジン25から引き出されたマスク27の枠101の側面に当接し、Y軸に沿う方向に駆動されて、マスク27をY軸に沿う方向に搬送する。 The print head 37 is controlled by the mask transport and installation control section 167 (see FIG. 14) in the control section 159A, and is driven in the X-axis direction, Y-axis direction, and Z-axis direction. The rod 115 is connected to the cylinder 110 and driven integrally with the cylinder 110 in the direction along the Y axis. The rod 115 is moved up and down in the Z-axis direction and comes into contact with the side surface of the frame 101 of the mask 27 pulled out from the magazine 25 in the mask changer 15 by the suction part 63, and is driven in the direction along the Y-axis to move the mask 27. Convey in the direction along the Y axis.
 シリンダ110は、基板KBに半田ペーストPstを印刷する印刷ヘッド37に設けられ、印刷ヘッド37と一体となって駆動される。印刷ヘッド37は、X軸に沿う方向に延在するスキージベース119を有する。マスク搬送設置制御部167は、スキージベース駆動モータ131を駆動させ、スキージベース119と一体的に構成されたシリンダ110のロッド115がY軸に沿う方向に移動される。つまり、マスク搬送設置制御部167は、ロッド115を枠101に当接させた状態でY軸に沿う方向に移動させることで、マスクガイド33に沿ってマスク27を印刷位置まで搬送することができる。 The cylinder 110 is provided in the print head 37 that prints the solder paste Pst on the board KB, and is driven integrally with the print head 37. The print head 37 has a squeegee base 119 extending in the direction along the X axis. The mask transport and installation control unit 167 drives the squeegee base drive motor 131, and the rod 115 of the cylinder 110, which is integrally formed with the squeegee base 119, is moved in the direction along the Y axis. In other words, the mask conveyance and installation control unit 167 can convey the mask 27 to the printing position along the mask guide 33 by moving the rod 115 in the direction along the Y axis with the rod 115 in contact with the frame 101. .
 印刷ヘッド37は、スキージ昇降駆動部123に設けられた2つのZ軸モータ163のそれぞれにより、スキージベース119の下方に2つのスキージ121のそれぞれを個別に昇降させる。これにより、スキージ121は、マスク27より上方の退避位置への移動が可能となる。つまり、スキージ121は、退避位置に移動する際に、マスク27の枠101に対する干渉が回避可能となる。 The print head 37 individually raises and lowers each of the two squeegees 121 below the squeegee base 119 by each of the two Z-axis motors 163 provided in the squeegee lift drive section 123. This allows the squeegee 121 to move to the retracted position above the mask 27. In other words, the squeegee 121 can avoid interference with the frame 101 of the mask 27 when moving to the retracted position.
 吸着部63は、基板KBの上面およびマスク27の下面を撮像するカメラ51を備えたカメラ移動機構49に設けられる。カメラ移動機構49は、X軸に沿う方向に延在する移動ベース59を有する。カメラ移動機構49は、移動ベース59に対して、移動ベース59の延在方向(X軸に沿う方向)に移動自在に設けられる。この移動ベース59には、移動ベースナット149が固定される。移動ベースナット149は、Y軸に沿う方向に延在する移動ベース移動ボール螺子147と螺合される。移動ベース移動ボール螺子147は、移動ベース駆動モータ151により駆動される。移動ベース駆動モータ151が駆動され、移動ベース移動ボール螺子147を介して移動ベースナット149が移動することにより、移動ベース59に設けられた吸着部63は、カメラ51とともにY軸に沿う方向に移動される。これにより、吸着部63に枠101が吸着されたマスク27は、マスクガイド33によりY軸に沿う方向に搬送される。 The suction unit 63 is provided in a camera moving mechanism 49 that includes a camera 51 that images the upper surface of the substrate KB and the lower surface of the mask 27. The camera moving mechanism 49 has a moving base 59 extending in the direction along the X-axis. The camera moving mechanism 49 is provided movably with respect to the moving base 59 in the extending direction of the moving base 59 (direction along the X-axis). A moving base nut 149 is fixed to this moving base 59. The moving base nut 149 is screwed into a moving base moving ball screw 147 extending in the direction along the Y-axis. The moving base moving ball screw 147 is driven by the moving base drive motor 151. When the moving base drive motor 151 is driven and the moving base nut 149 moves via the moving base moving ball screw 147, the suction part 63 provided on the moving base 59 moves in the direction along the Y axis together with the camera 51. be done. Thereby, the mask 27 with the frame 101 attracted to the suction part 63 is conveyed by the mask guide 33 in the direction along the Y-axis.
 また、制御部159Aにおけるマスク搬送設置制御部167(図14参照)は、マスク27の枠101の側面にロッド115が当接した状態で、スキージベース駆動モータ131を駆動することにより、マスク27を印刷位置に搬送したり、印刷位置にあるマスク27をマスクチェンジャ15側に向かって搬送したりすることができる。 Further, the mask conveyance and installation control section 167 (see FIG. 14) in the control section 159A drives the squeegee base drive motor 131 to move the mask 27 while the rod 115 is in contact with the side surface of the frame 101 of the mask 27. The mask 27 can be transported to the printing position, or the mask 27 at the printing position can be transported toward the mask changer 15 side.
 また、制御部159Aにおけるマスク搬送設置制御部167(図14参照)は、枠101の側面に吸着部63が当接した状態で、移動ベース駆動モータ151およびYZアクチュエータ61のそれぞれを駆動することにより、マスク通過開口71を通じてマガジン25からマスク27を引き出したり、ロッド115により印刷位置よりも後方に搬送されたマスク27を、マスク通過開口71を通じてマガジン25に収納したりする。 In addition, the mask transport and installation control section 167 (see FIG. 14) in the control section 159A drives the moving base drive motor 151 and the YZ actuator 61 with the suction section 63 in contact with the side surface of the frame 101. , the mask 27 is pulled out from the magazine 25 through the mask passage opening 71, and the mask 27 conveyed to the rear of the printing position by the rod 115 is stored in the magazine 25 through the mask passage opening 71.
(マスクの収納動作)
 次に、図16および図17のそれぞれを参照して、印刷位置に位置するマスク27をマガジン25に収納する収納動作について詳細に説明する。図16は、印刷装置11の収納動作例を説明する図である。図17は、印刷装置11の収納動作例を説明する図である。なお、図15に示す動作手順例では、半田ペーストPstの粘度調整に関する動作手順を省略している。
(Mask storage operation)
Next, with reference to FIGS. 16 and 17, a storing operation for storing the mask 27 located at the printing position in the magazine 25 will be described in detail. FIG. 16 is a diagram illustrating an example of the storage operation of the printing device 11. FIG. 17 is a diagram illustrating an example of the storage operation of the printing device 11. In addition, in the example of the operation procedure shown in FIG. 15, the operation procedure regarding the viscosity adjustment of the solder paste Pst is omitted.
 マスクチェンジャ15のマガジン25内にマスク27を収納する場合、印刷装置11におけるマスク搬送設置制御部167は、シリンダ110によってロッド115を下降させて、シリンダ110のロッド115を後枠体105の前側面に当接させる(St11-1)。なお、マスク搬送設置制御部167は、ロッド115の位置が後枠体105の前方に位置するまで移動させ、ロッド115を下降させた後に、印刷ヘッド37をY軸に沿った方向、かつ、マスクチェンジャ15に接近する方向に移動させて、後枠体105の前側面にロッド115を当接させてよい。なお、この時、カメラ移動機構49は、退避位置で待機している。 When storing the mask 27 in the magazine 25 of the mask changer 15, the mask conveyance and installation control unit 167 in the printing device 11 lowers the rod 115 using the cylinder 110, and moves the rod 115 of the cylinder 110 to the front side of the rear frame 105. (St11-1). Note that the mask conveyance and installation control unit 167 moves the rod 115 until it is located in front of the rear frame 105, lowers the rod 115, and then moves the print head 37 in the direction along the Y axis and in the direction of the mask. The rod 115 may be brought into contact with the front side surface of the rear frame body 105 by moving in a direction approaching the changer 15 . Note that at this time, the camera moving mechanism 49 is on standby at the retracted position.
 マスク搬送設置制御部167は、図16のステップSt11-2に示すように、後枠体105の前側面にロッド115を当接させた状態で、スキージベース119がY軸に沿う方向、かつ、マスクチェンジャ15に接近する方向に印刷ヘッド37を移動させる。マスク搬送設置制御部167は、ロッド115が当接したマスク27を、スキージベース119の移動限界まで移動させる(St11-2)。 As shown in step St11-2 in FIG. 16, the mask conveyance and installation control unit 167 moves the squeegee base 119 in the direction along the Y axis with the rod 115 in contact with the front side of the rear frame 105, and The print head 37 is moved in a direction approaching the mask changer 15. The mask conveyance and installation control unit 167 moves the mask 27 that the rod 115 has contacted to the limit of movement of the squeegee base 119 (St11-2).
 マスク搬送設置制御部167は、スキージベース119の移動限界までマスク27を搬送した後、図17のステップSt11-3に示すように、シリンダ110によってロッド115を上昇させ、Y軸に沿う方向、かつ、マスクチェンジャ15から離間する方向へ印刷ヘッド37を移動(退避)させる。 After transporting the mask 27 to the movement limit of the squeegee base 119, the mask transport and installation control unit 167 raises the rod 115 using the cylinder 110, as shown in step St11-3 in FIG. , the print head 37 is moved (evacuated) in a direction away from the mask changer 15.
 マスク搬送設置制御部167は、マスク搬送設置制御部167による印刷ヘッド37の退避が行われた後、カメラ移動機構49を退避位置から移動させる。マスク搬送設置制御部167は、吸着部63が前枠体103の側面(前面)に当接する位置までカメラ移動機構49を移動させる(St11-3)。 The mask transport and installation control unit 167 moves the camera moving mechanism 49 from the retracted position after the print head 37 is retracted by the mask transport and installation control unit 167. The mask transport and installation control section 167 moves the camera moving mechanism 49 to a position where the suction section 63 comes into contact with the side surface (front surface) of the front frame body 103 (St11-3).
 マスク搬送設置制御部167は、カメラ移動機構49をY軸に沿う方向、かつ、マスクチェンジャ15に接近する方向に移動させて、吸着部63に当接されたマスク27を、マスク通過開口71を通じてマガジン25内の所定の格納位置まで移動させる(St11-4)。なお、この時、吸着部63は、枠101を吸着せずにマスク27を収納してもよいし、吸着した状態でマスク27を収納してもよい。 The mask conveyance and installation control section 167 moves the camera movement mechanism 49 in the direction along the Y axis and in the direction approaching the mask changer 15 to move the mask 27 that is in contact with the suction section 63 through the mask passage opening 71. It is moved to a predetermined storage position within the magazine 25 (St11-4). At this time, the suction section 63 may store the mask 27 without suctioning the frame 101, or may store the mask 27 while suctioning the frame 101.
(マスクの引き出し動作)
 図18および図19を参照して、実施の形態1に係る印刷装置11のマスク27の引き出し動作手順について説明する。図18は、実施の形態1に係る印刷装置11のマスク27の引き出し動作手順例を説明する図である。図19は、実施の形態1に係る印刷装置11のマスク27の引き出し動作手順例を説明する図である。
(Mask pull-out operation)
Referring to FIGS. 18 and 19, a procedure for pulling out the mask 27 of the printing apparatus 11 according to the first embodiment will be described. FIG. 18 is a diagram illustrating an example of an operation procedure for pulling out the mask 27 of the printing apparatus 11 according to the first embodiment. FIG. 19 is a diagram illustrating an example of an operation procedure for pulling out the mask 27 of the printing apparatus 11 according to the first embodiment.
 マスクチェンジャ15からマスク27を引き出す場合、印刷装置11におけるマスク搬送設置制御部167は、Y軸に沿う方向、かつ、マスクチェンジャ15に接近する方向にカメラ移動機構49を移動する。カメラ移動機構49は、吸着部63がマスク通過開口71の直前の位置で停止する。YZアクチュエータ61は、マスク搬送設置制御部167により制御されて、マスク通過開口71からマスク27を引き出し可能な位置(高さ)まで吸着部63の位置(高さ)をZ軸に沿う方向に上昇させ、マガジン25内に格納されたマスク27の枠101に当接する位置まで吸着部63の位置をY軸に沿う方向に移動させる。吸着制御部173は、図18のステップSt11-5に示すように、吸着部63が引き出したいマスク27における枠101の側面に当接すると、真空バルブを駆動させて、吸着部63による枠101の側面の吸着を実行させる(St11-5)。 When pulling out the mask 27 from the mask changer 15, the mask transport and installation control unit 167 in the printing device 11 moves the camera movement mechanism 49 in the direction along the Y-axis and in the direction closer to the mask changer 15. In the camera moving mechanism 49, the suction portion 63 stops at a position immediately in front of the mask passage opening 71. The YZ actuator 61 is controlled by the mask conveyance and installation control section 167 to raise the position (height) of the suction section 63 in the direction along the Z-axis to a position (height) at which the mask 27 can be pulled out from the mask passage opening 71. Then, the position of the suction part 63 is moved in the direction along the Y-axis to a position where it comes into contact with the frame 101 of the mask 27 stored in the magazine 25. As shown in step St11-5 in FIG. 18, when the suction unit 63 comes into contact with the side surface of the frame 101 of the mask 27 to be pulled out, the suction control unit 173 drives the vacuum valve to remove the frame 101 by the suction unit 63. Adsorption of the side surface is performed (St11-5).
 マスク搬送設置制御部167は、Y軸に沿う方向、かつ、マスクチェンジャ15から離間する方向にカメラ移動機構49を移動させて、吸着部63により吸着された状態のマスク27を牽引する(St11-6)。マスク搬送設置制御部167は、図18のステップSt11-6に示すように、吸着部63が吸着したマスク27を、移動ベース59の移動限界まで牽引する。マスク搬送設置制御部167は、移動限界までの牽引制御を実行した後、マスク27および印刷ヘッド37と、カメラ移動機構49との間の干渉(衝突)を回避させるために、カメラ移動機構49を退避させる。具体的に、マスク搬送設置制御部167は、YZアクチュエータ61を駆動させ、吸着部63の位置(高さ)をZ軸方向に下降させて印刷位置へのマスク27の搬送軌跡上からカメラ移動機構49を退避させる。なお、退避方法は、これに限定されなくてよい。マスク搬送設置制御部167は、例えば、カメラ移動機構49そのものをZ軸方向に下降させることで、印刷位置へのマスク27の搬送軌跡上からカメラ移動機構49を退避させてもよい。 The mask conveyance and installation control unit 167 moves the camera movement mechanism 49 in the direction along the Y axis and in the direction away from the mask changer 15, and pulls the mask 27 sucked by the suction unit 63 (St11- 6). The mask conveyance and installation control unit 167 pulls the mask 27 attracted by the attraction unit 63 to the movement limit of the moving base 59, as shown in step St11-6 in FIG. After executing the traction control to the movement limit, the mask transport and installation control unit 167 moves the camera movement mechanism 49 to avoid interference (collision) between the mask 27 and print head 37 and the camera movement mechanism 49. Evacuate. Specifically, the mask transport and installation control unit 167 drives the YZ actuator 61 to lower the position (height) of the suction unit 63 in the Z-axis direction, and moves the camera movement mechanism from the transport path of the mask 27 to the printing position. Evacuate 49. Note that the evacuation method is not limited to this. The mask transport and installation control unit 167 may evacuate the camera movement mechanism 49 from the transport trajectory of the mask 27 to the printing position, for example, by lowering the camera movement mechanism 49 itself in the Z-axis direction.
 マスク搬送設置制御部167によるカメラ移動機構49の退避が行われた後、マスク搬送設置制御部167は、スキージベース119を移動させて、Y軸に沿う方向、かつ、マスクチェンジャ15に接近する方向へ印刷ヘッド37を移動させる。マスク搬送設置制御部167は、シリンダ110のロッド115の位置がマスク27の枠101(具体的には、後枠体105)の後方に位置するまで移動させた後、シリンダ110によってロッド115を下降させて、後枠体105の後側面にロッド115を当接させる(つまり、後枠体105の後側面にロッド115を引っ掛ける)(St11-7)。なお、マスク搬送設置制御部167は、ロッド115の位置が後枠体105の後方に位置するまで移動させ、印刷ヘッド37を下降させた後に、印刷ヘッド37をY軸に沿った方向、かつ、マスクチェンジャ15から離間する方向に移動させて、後枠体105の後側面にロッド115を当接させてよい。 After the camera movement mechanism 49 is evacuated by the mask transport and installation control unit 167, the mask transport and installation control unit 167 moves the squeegee base 119 in the direction along the Y axis and in the direction approaching the mask changer 15. The print head 37 is moved to . The mask conveyance and installation control unit 167 moves the rod 115 of the cylinder 110 until it is positioned behind the frame 101 of the mask 27 (specifically, the rear frame body 105), and then lowers the rod 115 using the cylinder 110. Then, the rod 115 is brought into contact with the rear side surface of the rear frame body 105 (that is, the rod 115 is hooked on the rear side surface of the rear frame body 105) (St11-7). Note that the mask conveyance and installation control unit 167 moves the rod 115 until it is located behind the rear frame body 105 and lowers the print head 37, and then moves the print head 37 in the direction along the Y axis, and The rod 115 may be brought into contact with the rear side surface of the rear frame body 105 by moving in a direction away from the mask changer 15 .
 マスク搬送設置制御部167は、ロッド115が後枠体105の後側面に当接した状態で、Y軸に沿う方向、かつ、マスクチェンジャ15から離間する方向へ印刷ヘッド37を移動させて、印刷位置までマスク27を搬送させる(St11-8)。マスク搬送設置制御部167は、印刷位置までマスク27を移動させた後、印刷ヘッド37を上昇させて、後枠体105からロッド115を離間させることで、マスク27の引き出し動作を終了する。 The mask conveyance and installation control unit 167 moves the print head 37 in the direction along the Y axis and in the direction away from the mask changer 15 with the rod 115 in contact with the rear side surface of the rear frame 105 to perform printing. The mask 27 is transported to the position (St11-8). After moving the mask 27 to the printing position, the mask conveyance and installation control unit 167 raises the print head 37 and separates the rod 115 from the rear frame 105, thereby ending the operation of pulling out the mask 27.
 マスク搬送設置制御部167は、マスク27の引き出し動作を終了した後、印刷ヘッド37を駆動させ、2つのシリンダ45のそれぞれと、4つのシリンダ47のそれぞれとで、マスク保持部35の四隅である枠101(図8参照)を下方に押圧する。マスク搬送設置制御部167は、マスク27の入れ替え動作が完了した旨の制御指令を生成し、生成された制御指令をテンション計測制御部178に出力する。 After finishing the drawing operation of the mask 27, the mask conveyance and installation control unit 167 drives the print head 37, and prints each of the two cylinders 45 and each of the four cylinders 47 at the four corners of the mask holding unit 35. Press the frame 101 (see FIG. 8) downward. The mask transport and installation control unit 167 generates a control command indicating that the replacement operation of the mask 27 has been completed, and outputs the generated control command to the tension measurement control unit 178.
 テンション計測制御部178は、マスク搬送設置制御部167から出力された制御指令に基づいて、新たなマスク27のテンションの計測を開始する。テンション計測制御部178は、印刷ヘッド37を駆動させて、テンション計測制御部178の測定子187をステンシルSUSの上面に載置して、マスク27のテンションの計測を実行する。テンション計測制御部178は、開口185を通じて測定子187がステンシルSUSの上面に載置され、テンションを計測する(St12)。 The tension measurement control unit 178 starts measuring the tension of the new mask 27 based on the control command output from the mask transport and installation control unit 167. The tension measurement control unit 178 drives the print head 37, places the probe 187 of the tension measurement control unit 178 on the upper surface of the stencil SUS, and measures the tension of the mask 27. In the tension measurement control unit 178, the measuring element 187 is placed on the upper surface of the stencil SUS through the opening 185, and the tension is measured (St12).
 ここで、図20および図21のそれぞれを参照して、マスク27のテンション計測について説明する。図20は、マスク27のテンション計測装置183の一例を説明する図である。図21は、テンション計測装置183の一例を説明する図である。なお、図20では説明を分かり易くするために、アーム部139の図示を省略するとともに、テンション計測装置保持部141を部分的に図示している。 Here, measurement of the tension of the mask 27 will be described with reference to FIGS. 20 and 21, respectively. FIG. 20 is a diagram illustrating an example of the tension measuring device 183 for the mask 27. FIG. 21 is a diagram illustrating an example of the tension measuring device 183. In addition, in FIG. 20, in order to make the explanation easy to understand, illustration of the arm portion 139 is omitted, and the tension measuring device holding portion 141 is partially illustrated.
 マスク27は、第1の領域の一例としてのステンシルSUSと枠101との間がポリエステル製布等の接続部材100により接続される。第2の領域の一例としての接続部材100は、所定のテンションを有した状態でステンシルSUSと枠101との間を接続するように張り付けられ、ステンシルSUSと枠101との相対位置を位置決めする。 In the mask 27, the stencil SUS as an example of the first region and the frame 101 are connected by a connecting member 100 such as polyester cloth. The connecting member 100, which is an example of the second region, is attached with a predetermined tension so as to connect the stencil SUS and the frame 101, and determines the relative position of the stencil SUS and the frame 101.
 テンション計測装置183は、テンション計測制御部178により、ステンシルSUSの上面に載置されて、マスク27のテンションを計測する。具体的に、テンション計測装置183は、測定子187がステンシルSUSの中心位置Ptに載置されると、測定子187に-Z方向に計測用荷重195を印加する。なお、中心位置Ptは、枠101の四隅の対角線のそれぞれの交点である。テンション計測装置183は、-Z方向に印加された計測用荷重195と、マスク27から受けるZ方向の反作用とに基づく接続部190の高さ位置あるいは接続部190の張力に基づいて、テンションを計測する。テンション計測装置183は、計測結果をテンション計測制御部178に出力する。 The tension measurement device 183 is placed on the top surface of the stencil SUS by the tension measurement control unit 178 and measures the tension of the mask 27. Specifically, the tension measuring device 183 applies a measurement load 195 to the measuring tip 187 in the −Z direction when the measuring tip 187 is placed at the center position Pt of the stencil SUS. Note that the center position Pt is the intersection of the diagonal lines at the four corners of the frame 101. The tension measuring device 183 measures tension based on the height position of the connecting portion 190 or the tension of the connecting portion 190 based on the measurement load 195 applied in the -Z direction and the reaction in the Z direction received from the mask 27. do. Tension measurement device 183 outputs the measurement result to tension measurement control section 178.
 テンション計測制御部178は、メモリ159Bに記憶された第1の閾値および第2の閾値のそれぞれに基づいて、計測されたマスク27のテンションが通常の版離れモードを実行するのに十分なテンションであるか否かを判定する(St13)。 The tension measurement control unit 178 determines whether the measured tension of the mask 27 is sufficient to execute the normal plate separation mode based on the first threshold value and the second threshold value stored in the memory 159B. It is determined whether there is one (St13).
 テンション計測制御部178は、ステップSt13の処理において、計測されたマスク27のテンションが第1の閾値以上であると判定した場合、通常の版離れモードを実行するのに十分なテンションであると判定し(St13,YES)、版離れモードを通常モードに設定する(St14)。 If the tension measurement control unit 178 determines in the process of step St13 that the measured tension of the mask 27 is equal to or higher than the first threshold value, the tension measurement control unit 178 determines that the tension is sufficient to execute the normal plate separation mode. (St13, YES), and the plate separation mode is set to normal mode (St14).
 また、テンション計測制御部178は、ステップSt13の処理において、計測されたマスク27のテンションが第1の閾値未満、かつ、第2の閾値以上であると判定した場合、通常の版離れモードを実行するのに十分なテンションでないと判定し(St13,Warning)、版離れモードをマスク吸着版離れモードに設定する(St15)。 Further, if the tension measurement control unit 178 determines in the process of step St13 that the measured tension of the mask 27 is less than the first threshold value and greater than or equal to the second threshold value, the tension measurement control unit 178 executes the normal plate separation mode. It is determined that the tension is not sufficient to release the mask (St13, Warning), and the plate separation mode is set to the mask suction plate separation mode (St15).
 また、テンション計測制御部178は、ステップSt13の処理において、計測されたマスク27のテンションが第2の閾値未満であると判定した場合、版離れ動作の実行に必要なテンションでないと判定し(St13,NO)、テンションが不足している旨の警告を生成してタッチパネル31に出力し、印刷装置11(つまり、設備)の動作を停止する(St16)。 Further, in the process of step St13, if the tension measurement control unit 178 determines that the measured tension of the mask 27 is less than the second threshold, the tension measurement control unit 178 determines that the tension is not necessary for executing the plate separation operation (St13 , NO), a warning to the effect that the tension is insufficient is generated and output to the touch panel 31, and the operation of the printing device 11 (that is, the equipment) is stopped (St16).
 ここで、図22を参照して、ステップSt17~ステップSt18の処理で実行される通常モードにおける版離れ動作について説明する。図22は、版離れモード(通常モード)を説明する図である。 Here, with reference to FIG. 22, the plate separation operation in the normal mode executed in the processing of steps St17 to St18 will be described. FIG. 22 is a diagram illustrating the plate separation mode (normal mode).
 印刷動作制御部169は、半田ペーストPstが載置されたステンシルSUSの上面でスキージ121を摺動させて、ステンシルSUSの第1の領域AR1(図23参照)に形成された電極パターンを通じて基板KBへ半田ペーストPstを印刷する(St17)。印刷動作制御部169は、現在設定されている通常モードに基づいて、テーブル昇降機構67を下降させて、マスク27(具体的には、ステンシルSUS)の下面から基板KBを離間させる版離れ動作を実行する(St18)。 The printing operation control unit 169 slides the squeegee 121 on the upper surface of the stencil SUS on which the solder paste Pst is placed, and prints the substrate KB through the electrode pattern formed in the first region AR1 (see FIG. 23) of the stencil SUS. The solder paste Pst is printed (St17). Based on the currently set normal mode, the printing operation control unit 169 lowers the table lifting mechanism 67 to perform a plate separation operation to separate the substrate KB from the lower surface of the mask 27 (specifically, the stencil SUS). Execute (St18).
 ここで、図23を参照して、ステップSt19~ステップSt22の処理で実行されるマスク吸着版離れモードにおける版離れ動作について説明する。図23は、版離れモード(マスク吸着版離れモード)を説明する図である。 Here, with reference to FIG. 23, a description will be given of the plate separation operation in the mask suction plate separation mode executed in the processes of steps St19 to St22. FIG. 23 is a diagram illustrating the plate separation mode (mask suction plate separation mode).
 また、印刷動作制御部169は、ステップSt15の処理の後、基板搬送保持部21が備える吸着部20によりステンシルSUSの下面の第2の領域AR2を真空吸引する(St19)。印刷動作制御部169は、吸着部20によるステンシルSUSの真空吸引を維持したまま、半田ペーストPstが載置されたステンシルSUSの上面でスキージ121を摺動させて、ステンシルSUSに形成された電極パターンを通じて基板KBへ半田ペーストPstを印刷する(St20)。これにより、実施の形態1に係る印刷装置11は、マスク27のテンションが十分でない場合であっても、スキージ121がステンシルSUSの上面を摺動する印刷動作に伴ってマスク27(具体的には、ステンシルSUS)の位置が変化する位置ずれをより効果的に抑制できる。 Further, after the process in step St15, the printing operation control unit 169 vacuum-suctions the second region AR2 on the lower surface of the stencil SUS using the suction unit 20 included in the substrate transport and holding unit 21 (St19). The printing operation control unit 169 slides the squeegee 121 on the top surface of the stencil SUS on which the solder paste Pst is placed, while maintaining the vacuum suction of the stencil SUS by the suction unit 20, to remove the electrode pattern formed on the stencil SUS. The solder paste Pst is printed on the board KB through the solder paste (St20). As a result, even if the tension of the mask 27 is not sufficient, the printing apparatus 11 according to the first embodiment can perform the printing operation in which the squeegee 121 slides on the upper surface of the stencil SUS. , stencil SUS) can be more effectively suppressed.
 印刷動作制御部169は、半田ペーストPstの印刷が終了した後、基板搬送保持部21によるステンシルSUSの下面の第2の領域AR2の真空吸引を維持したまま、指定量H1(例えば、2mm、5mm等)だけテーブル昇降機構67を下降させる(St21)。なお、指定量H1は、マスク27のテンションに基づいて、決定あるいは算出されてよい。例えば、印刷動作制御部169は、マスク27のテンションが第1の閾値未満、かつ、第2の閾値以上であると判定した場合、指定量H1を決定するための判定処理をさらに実行することにより、計測されたテンションにより適した指定量H1を決定あるいは算出してよい。 After the printing of the solder paste Pst is completed, the printing operation control unit 169 maintains the vacuum suction of the second area AR2 on the lower surface of the stencil SUS by the substrate conveying and holding unit 21, and applies a specified amount H1 (for example, 2 mm, 5 mm). etc.), the table lifting mechanism 67 is lowered (St21). Note that the specified amount H1 may be determined or calculated based on the tension of the mask 27. For example, when the printing operation control unit 169 determines that the tension of the mask 27 is less than the first threshold value and greater than or equal to the second threshold value, the print operation control unit 169 further executes a determination process for determining the specified amount H1. , a specified amount H1 more suitable for the measured tension may be determined or calculated.
 印刷動作制御部169は、指定量H1だけテーブル昇降機構67を下降させた後に、吸着制御部173によるステンシルSUSの下面の第2の領域AR2の真空吸引をOFFさせて、テーブル昇降機構67を下降させてステンシルSUSの下面(具体的には、第1の領域AR1)から基板KBを離間させる版離れ動作を実行する(St22)。 After lowering the table lifting mechanism 67 by a specified amount H1, the printing operation control unit 169 turns off the vacuum suction of the second area AR2 on the lower surface of the stencil SUS by the suction control unit 173, and lowers the table lifting mechanism 67. Then, a plate separation operation is performed to separate the substrate KB from the lower surface of the stencil SUS (specifically, the first region AR1) (St22).
 以上により、実施の形態1に係る印刷装置11は、マスク27のテンションが十分でない場合であっても、基板搬送保持部21による真空吸引によりステンシルSUSの下面(第1の領域AR1)と基板KBの上面とが接触した状態を維持したまま、テーブル昇降機構67を指定量H1だけ下降させる。これにより、印刷装置11は、接続部材100の張力を高めることができ、テンションが十分高い場合のステンシルSUSの下面と基板KBの上面との接触状態を再現することができる。 As described above, even if the tension of the mask 27 is not sufficient, the printing apparatus 11 according to the first embodiment can move the lower surface of the stencil SUS (first region AR1) and the substrate KB by vacuum suction by the substrate transport holding section 21. The table lifting mechanism 67 is lowered by a specified amount H1 while maintaining contact with the upper surface of the table. Thereby, the printing device 11 can increase the tension of the connection member 100, and can reproduce the contact state between the lower surface of the stencil SUS and the upper surface of the substrate KB when the tension is sufficiently high.
 また、印刷装置11は、テンションが十分高い場合のステンシルSUSの下面と基板KBの上面との接触状態を再現した状態から、基板搬送保持部21による真空吸引をOFFにして、テーブル昇降機構67を下降させることで、通常モードにおける版離れ動作を再現できる。したがって、印刷装置11は、テンションが十分でない場合であっても、ステンシルSUSの下面から基板KBの上面を均一に離間(版離れ)させることができるため、基板KBの上面に印刷された半田ペーストの形状変化を抑制して印刷品質の劣化を抑制できる。 In addition, the printing device 11 turns off the vacuum suction by the substrate conveying and holding unit 21 and starts the table lifting mechanism 67 from a state that reproduces the contact state between the lower surface of the stencil SUS and the upper surface of the substrate KB when the tension is sufficiently high. By lowering it, the plate separation operation in normal mode can be reproduced. Therefore, even if the tension is not sufficient, the printing device 11 can uniformly separate the top surface of the board KB from the bottom surface of the stencil SUS (plate separation), so that the solder paste printed on the top surface of the board KB can be evenly separated from the bottom surface of the stencil SUS. It is possible to suppress deterioration of print quality by suppressing changes in the shape of the print.
 図24を参照して、通常モードにおけるテーブル昇降機構67の下降制御と、マスク吸着版離れモードにおけるテーブル昇降機構67の下降制御とをそれぞれ説明する。図24は、版離れモードごとのテーブル昇降機構67の制御例を比較する図である。 Referring to FIG. 24, the lowering control of the table lifting mechanism 67 in the normal mode and the lowering control of the table lifting mechanism 67 in the mask suction plate separation mode will be described. FIG. 24 is a diagram comparing control examples of the table lifting mechanism 67 for each plate separation mode.
 速度グラフCON1は、版離れモードが通常モードに設定された時のテーブル昇降機構67(つまり、基板KB)の下降速度を示すグラフである。印刷動作制御部169は、版離れモードが通常モードに設定されている場合、速度グラフCON1に示すテーブル昇降機構67の下降制御を実行する。具体的に、通常モードにおける印刷動作制御部169は、基板搬送保持部21による基板KBの真空吸引をOFFにした状態でテーブル昇降機構67を下降させて、ステンシルSUSの下面と基板KBの上面とを離間させる。 A speed graph CON1 is a graph showing the descending speed of the table lifting mechanism 67 (that is, the substrate KB) when the plate separation mode is set to the normal mode. When the plate separation mode is set to the normal mode, the printing operation control unit 169 executes the lowering control of the table lifting mechanism 67 shown in the speed graph CON1. Specifically, the printing operation control unit 169 in the normal mode lowers the table lifting mechanism 67 while turning off the vacuum suction of the substrate KB by the substrate transport holding unit 21, so that the bottom surface of the stencil SUS and the top surface of the substrate KB are aligned. spaced apart.
 速度グラフCON2は、版離れモードがマスク吸着版離れモードに設定された時のテーブル昇降機構67(つまり、基板KB)の下降速度を示すグラフである。印刷動作制御部169は、版離れモードがマスク吸着版離れモードに設定されている場合、速度グラフCON2に示すテーブル昇降機構67の下降制御を実行する。 A speed graph CON2 is a graph showing the descending speed of the table lifting mechanism 67 (that is, the substrate KB) when the plate separation mode is set to the mask suction plate separation mode. When the plate separation mode is set to the mask suction plate separation mode, the printing operation control unit 169 executes the lowering control of the table lifting mechanism 67 shown in the speed graph CON2.
 具体的に、通常モードにおける印刷動作制御部169は、基板搬送保持部21による基板KBの真空吸引をONにした状態でテーブル昇降機構67を指定量H1だけ下降させた後、テーブル昇降機構67の下降制御を停止して、基板KBの真空吸引をOFF状態にする。印刷動作制御部169は、基板KBの真空吸引をOFF状態にした後、テーブル昇降機構67の下降制御を再開してステンシルSUSの下面と基板KBの上面とを離間させる。 Specifically, the printing operation control unit 169 in the normal mode lowers the table lifting mechanism 67 by a specified amount H1 while turning on the vacuum suction of the substrate KB by the substrate transport holding unit 21, and then lowers the table lifting mechanism 67 by a specified amount H1. The lowering control is stopped and the vacuum suction of the substrate KB is turned off. After turning off the vacuum suction of the substrate KB, the printing operation control unit 169 restarts the lowering control of the table lifting mechanism 67 to separate the lower surface of the stencil SUS from the upper surface of the substrate KB.
 以上により、実施の形態1における印刷部13は、テンションの計測結果に基づいて、版離れモードを変更することにより、ステンシルSUSの下面から基板KBの上面を均一に離間させることができる。 As described above, the printing unit 13 in the first embodiment can uniformly separate the top surface of the substrate KB from the bottom surface of the stencil SUS by changing the plate separation mode based on the tension measurement result.
 以上により、実施の形態1に係る印刷装置11は、所定のパターン開口99(印刷パターンの一例)が設けられ、基板KBと接触可能な第1の領域AR1と、第1の領域AR1の両側に位置する第2の領域AR2とを有するマスク27を用いて、基板KBに半田ペーストPstを印刷する。印刷装置11は、基板KBを保持し、保持された基板KBを昇降させる基板搬送保持部21(保持部の一例)と、マスク27のテンションを計測するテンション計測装置183(計測部の一例)と、マスク27の第2の領域AR2を吸引可能な吸着部20(吸引部の一例)と、テンション計測装置183により計測されたマスク27のテンションに基づいて、基板搬送保持部21により実行される基板KBとマスク27との版離れにおいて吸着部20による第2の領域AR2の吸引の要否を判定する制御部159Aと、を備える。制御部159Aは、ステンシルSUSの下面の吸引が必要であると判定した場合、吸着部20にステンシルSUSの下面を吸引させる。 As described above, the printing device 11 according to the first embodiment is provided with a predetermined pattern opening 99 (an example of a printing pattern), and has a first region AR1 that can contact the substrate KB, and a first region AR1 on both sides of the first region AR1. The solder paste Pst is printed on the substrate KB using the mask 27 having the second region AR2 located thereon. The printing device 11 includes a substrate transport holding section 21 (an example of a holding section) that holds a substrate KB and raises and lowers the held substrate KB, and a tension measuring device 183 (an example of a measuring section) that measures the tension of the mask 27. , a suction unit 20 (an example of a suction unit) capable of suctioning the second region AR2 of the mask 27, and the substrate transport holding unit 21 performs the substrate transfer based on the tension of the mask 27 measured by the tension measuring device 183. A control unit 159A is provided that determines whether suction of the second area AR2 by the suction unit 20 is necessary when the KB and the mask 27 are separated from each other. When the control section 159A determines that suction of the lower surface of the stencil SUS is necessary, the control section 159A causes the suction section 20 to suction the lower surface of the stencil SUS.
 これにより、実施の形態1に係る印刷装置11は、マスク27のテンションにより適した版離れ動作を実行できる。したがって、印刷装置11は、新たなマスク27のテンションにより適したマスク版離れモードを実行することで、マスク27の下面(第1の領域AR1)と基板KBの上面とを均一に版離れさせることができ、テンションに起因する印刷品質の劣化を抑制することができる。 Thereby, the printing apparatus 11 according to the first embodiment can perform a plate separation operation more suitable for the tension of the mask 27. Therefore, the printing device 11 can uniformly separate the lower surface of the mask 27 (first region AR1) from the upper surface of the substrate KB by executing a mask plate separation mode that is more suitable for the new tension of the mask 27. This makes it possible to suppress deterioration in print quality caused by tension.
 また、以上により、実施の形態1に係る印刷装置11における制御部159Aは、第2の領域AR2の吸引が必要であると判定した場合、吸着部20により第2の領域AR2を吸引したまま基板搬送保持部21を所定高さ(例えば、5mm等)だけ下降させた後、吸着部20による第2の領域AR2の吸引を停止するとともに、基板搬送保持部21を下降させて版離れを行う。これにより、実施の形態1に係る印刷装置11は、マスク27のテンションにより適した版離れ動作を実行できる。したがって、印刷装置11は、テンションが低いマスク27であっても、吸着部20によるステンシルSUSの下面の第2の領域AR2を吸引させるマスク吸着版離れモードを実行することで、マスク27の下面(第1の領域AR1)と基板KBの上面とを均一に版離れさせることができ、テンションに起因する印刷品質の劣化を抑制することができる。 Further, as described above, when the control unit 159A in the printing apparatus 11 according to the first embodiment determines that suction of the second area AR2 is necessary, the control unit 159A moves the substrate while the suction unit 20 is suctioning the second area AR2. After lowering the transport holding section 21 by a predetermined height (for example, 5 mm, etc.), the suction of the second area AR2 by the suction section 20 is stopped, and the substrate transport holding section 21 is lowered to perform plate separation. Thereby, the printing apparatus 11 according to the first embodiment can perform a plate separation operation more suitable for the tension of the mask 27. Therefore, even if the tension of the mask 27 is low, the printing device 11 executes the mask suction plate separation mode in which the suction unit 20 suctions the second region AR2 on the bottom surface of the stencil SUS, so that the bottom surface of the mask 27 ( The first region AR1) and the upper surface of the substrate KB can be uniformly separated from each other, and deterioration of printing quality due to tension can be suppressed.
 また、以上により、実施の形態1に係る印刷装置11における制御部159Aは、計測されたマスク27のテンションに基づいて、マスク27のテンションが第1の閾値以上であると判定した場合、吸着部20による第2の領域AR2の吸引を省略する。これにより、実施の形態1に係る印刷装置11は、マスク27のテンションが版離れ動作において十分なテンションであると判定した場合、版離れモードを通常モードに設定して版離れ動作を実行する。 Further, as described above, when the control unit 159A in the printing apparatus 11 according to the first embodiment determines that the tension of the mask 27 is equal to or higher than the first threshold based on the measured tension of the mask 27, the suction unit The suction of the second region AR2 by 20 is omitted. Thereby, when the printing apparatus 11 according to the first embodiment determines that the tension of the mask 27 is sufficient for the plate separation operation, the printing apparatus 11 sets the plate separation mode to the normal mode and executes the plate separation operation.
 また、以上により、実施の形態1に係る印刷装置11における制御部159Aは、マスク27のテンションに基づいて、マスク27のテンションが第1の閾値未満、かつ、第1の閾値よりも小さい第2の閾値以上であると判定した場合、吸着部20による第2の領域AR2の吸引を実行させる。これにより、実施の形態1に係る印刷装置11は、マスク27のテンションが版離れ動作においてテンションでないと判定した場合、版離れモードをマスク吸着版離れモードに設定して版離れ動作を実行する。 Further, as described above, the control unit 159A in the printing apparatus 11 according to the first embodiment determines, based on the tension of the mask 27, that the tension of the mask 27 is less than the first threshold and that the second If it is determined that the second area AR2 is greater than or equal to the threshold value, the suction unit 20 is caused to suction the second area AR2. Thereby, when the printing apparatus 11 according to the first embodiment determines that the tension of the mask 27 is not the tension during the plate separation operation, the printing apparatus 11 sets the plate separation mode to the mask suction plate separation mode and executes the plate separation operation.
 また、以上により、実施の形態1に係る印刷装置11における制御部159Aは、マスク27のテンションが第2の閾値未満であると判定した場合、版離れを中止し、警告情報を生成して出力する。これにより、実施の形態1に係る印刷装置11は、マスク27のテンションが版離れ動作において必要なテンションでないと判定した場合、版離れモードをマスク吸着版離れモードに設定して版離れ動作を実行する。 Further, as described above, when the control unit 159A in the printing apparatus 11 according to the first embodiment determines that the tension of the mask 27 is less than the second threshold, the control unit 159A stops plate separation, generates and outputs warning information. do. As a result, when the printing apparatus 11 according to the first embodiment determines that the tension of the mask 27 is not the tension necessary for the plate separation operation, the printing apparatus 11 sets the plate separation mode to the mask suction plate separation mode and executes the plate separation operation. do.
 また、以上により、実施の形態1に係る印刷装置11における基板搬送保持部21は、基板KBの両側面に当接して基板KBを保持する一対のクランパ87(当接部の一例)を有する。吸着部20は、基板搬送保持部21に設けられる。これにより、実施の形態1に係る印刷装置11は、基板KBの両側面に当接して基板KBを保持することにより、半田ペーストPstの印刷において、基板KBの位置ずれを抑制することができる。 Furthermore, as described above, the substrate transport and holding section 21 in the printing apparatus 11 according to the first embodiment includes a pair of clampers 87 (an example of a contact section) that abuts both side surfaces of the substrate KB and holds the substrate KB. The adsorption section 20 is provided in the substrate transport and holding section 21 . Thereby, the printing apparatus 11 according to the first embodiment can suppress misalignment of the board KB in printing the solder paste Pst by holding the board KB in contact with both side surfaces of the board KB.
(実施の形態2)
 上述した実施の形態1に係る印刷装置11は、マスク27の入れ替え等の所定のタイミングでマスク27のテンションを計測し、計測されたテンションに基づいて、版離れモードを決定する例を示した。実施の形態2に係る印刷装置11は、テンションの計測および版離れモードの決定だけでなく、半田ペーストPstの回収および移載、基板KBを支持するサポートピン219の配置変更、半田ペーストPstの粘度計測および粘度調整等の各処理を自動で実行する例について説明する。なお、実施の形態2に係る印刷装置11の構成は、実施の形態1に係る印刷装置11と略同様の構成を有するため、同様の構成に同一の符号を付与して説明を省略する。
(Embodiment 2)
The printing apparatus 11 according to the first embodiment described above has an example in which the tension of the mask 27 is measured at a predetermined timing such as when the mask 27 is replaced, and the plate separation mode is determined based on the measured tension. The printing device 11 according to the second embodiment not only measures the tension and determines the plate separation mode, but also collects and transfers the solder paste Pst, changes the arrangement of the support pins 219 that support the board KB, and measures the viscosity of the solder paste Pst. An example of automatically executing each process such as measurement and viscosity adjustment will be described. Note that since the configuration of the printing device 11 according to the second embodiment has substantially the same configuration as the printing device 11 according to the first embodiment, the same components are given the same reference numerals and the explanation will be omitted.
 次に、図25を参照して、実施の形態2に係る印刷装置11の動作手順について説明する。図25は、実施の形態2に係る印刷装置のマスク機種変更時の動作手順例を説明する図である。 Next, with reference to FIG. 25, the operation procedure of the printing apparatus 11 according to the second embodiment will be described. FIG. 25 is a diagram illustrating an example of an operation procedure when changing the mask model of the printing apparatus according to the second embodiment.
 印刷装置11における制御部159Aは、生産データに基づいて、「機種A」の基板KBの生産(印刷)が終了したと判定した場合、マスク27の入れ替え動作を開始する。制御部159Aは、メモリ159Bに記憶され、次に生産される「機種B」基板KBの生産データを読み込む(St31)。 When the control unit 159A in the printing device 11 determines that the production (printing) of the board KB of “model A” has been completed based on the production data, it starts the operation of replacing the mask 27. The control unit 159A reads the production data of the "model B" board KB that is stored in the memory 159B and will be produced next (St31).
 スクレイパ制御部174は、スクレイパ137を制御し、「機種A」の基板KBに対応するマスク27(つまり、現在使用されているマスク27)の上面の半田ペーストPstを回収する(St32)。 The scraper control unit 174 controls the scraper 137 to collect the solder paste Pst on the upper surface of the mask 27 (that is, the currently used mask 27) corresponding to the board KB of "model A" (St32).
 マスク搬送設置制御部167および撮像制御部171は、それぞれ印刷ヘッド37とカメラ移動機構49とを駆動させて、「機種A」の基板KBに対応するマスク27をマスクチェンジャ15のマガジン25内に収納する(St33)。 The mask transport and installation control unit 167 and the imaging control unit 171 respectively drive the print head 37 and camera movement mechanism 49 to store the mask 27 corresponding to the board KB of “model A” in the magazine 25 of the mask changer 15. (St33).
 制御部159Aは、メモリ159Bに記憶された「機種B」の基板KBの生産データに基づいて、基板KBのサポートピン219の配置を変更して、再配置する(St34)。 The control unit 159A changes and rearranges the support pins 219 of the board KB based on the production data of the "model B" board KB stored in the memory 159B (St34).
 マスク搬送設置制御部167および撮像制御部171は、それぞれ印刷ヘッド37とカメラ移動機構49とを駆動させて、マスクチェンジャ15のマガジン25内から「機種B」の基板KBに対応するマスク27を引き出し、印刷位置まで搬入する(St35)。 The mask conveyance and installation control unit 167 and the imaging control unit 171 drive the print head 37 and camera movement mechanism 49, respectively, to pull out the mask 27 corresponding to the “model B” substrate KB from the magazine 25 of the mask changer 15. , and carry it to the printing position (St35).
 テンション計測制御部178は、印刷ヘッド37を駆動させ、印刷位置に位置する「機種B」の基板KBに対応するステンシルSUSの上面における略中央にテンション計測装置183の測定子187を載置し、マスク27のテンションを計測する(St36)。 The tension measurement control unit 178 drives the print head 37 and places the measuring tip 187 of the tension measurement device 183 approximately in the center of the upper surface of the stencil SUS corresponding to the substrate KB of "model B" located at the printing position, The tension of the mask 27 is measured (St36).
 テンション計測制御部178は、計測されたマスク27のテンションに基づいて、「機種B」に対応するマスク27の版離れモードを決定し、設定する(St37)。 Based on the measured tension of the mask 27, the tension measurement control unit 178 determines and sets the plate separation mode of the mask 27 corresponding to "model B" (St37).
 基板搬送保持制御部165は、基板KBを保持する一対のクランパ87の間の距離を、「機種B」の基板KBに対応する幅に変更(調整)する(St38)。 The substrate transport and holding control unit 165 changes (adjusts) the distance between the pair of clampers 87 that hold the substrate KB to a width corresponding to the substrate KB of "model B" (St38).
 スクレイパ制御部174は、スクレイパ137を制御し、回収された半田ペーストPstを、「機種B」の基板KBに対応するステンシルSUSの上面に移載する(St39)。 The scraper control unit 174 controls the scraper 137 and transfers the collected solder paste Pst onto the upper surface of the stencil SUS corresponding to the board KB of "model B" (St39).
 粘度計制御部177は、印刷ヘッド37を駆動させ、粘度計197を用いて、ステンシルSUSの上面に移載された半田ペーストPstの粘度を計測する(St40)。粘度計制御部177は、粘度計197により計測された粘度に基づいて、半田ペーストPstの粘度が事前に設定された狙い値(つまり、所定粘度)にするための半田コネ動作を決定し、印刷動作制御部169に出力する。 The viscometer control unit 177 drives the print head 37 and uses the viscometer 197 to measure the viscosity of the solder paste Pst transferred to the top surface of the stencil SUS (St40). The viscometer control unit 177 determines a soldering connection operation to bring the viscosity of the solder paste Pst to a preset target value (that is, a predetermined viscosity) based on the viscosity measured by the viscometer 197, and performs printing. It is output to the operation control section 169.
 印刷動作制御部169は、粘度計制御部177から出力された制御指令に基づいて、印刷ヘッド37のスキージ121を駆動させ、半田ペーストPstに半田コネ動作を実行する(St41)。 The printing operation control unit 169 drives the squeegee 121 of the print head 37 based on the control command output from the viscometer control unit 177, and performs a soldering operation on the solder paste Pst (St41).
 制御部159Aは、印刷部13が備える温調機(不図示)を制御し、印刷部13内の雰囲気の温度設定を変更する(St42)。制御部159Aは、生産データに基づいて、「機種B」の基板KBの生産(印刷)を開始する。 The control unit 159A controls a temperature controller (not shown) included in the printing unit 13, and changes the temperature setting of the atmosphere inside the printing unit 13 (St42). The control unit 159A starts production (printing) of the "model B" board KB based on the production data.
 以上により、実施の形態2に係る印刷装置11は、マスク27の入れ替え動作がある場合に、新たな基板KBに対応するマスク27に自動で入れ替えを行うとともに、版離れモードの設定、サポートピン219の配置変更、半田ペーストPstの粘度調整等を行うことにより、新たなマスク27を用いた基板KBの生産をより効率的に開始できる。 As described above, when there is a mask 27 replacement operation, the printing apparatus 11 according to the second embodiment automatically replaces the mask 27 with the mask 27 corresponding to the new substrate KB, sets the plate separation mode, and sets the support pin 219. By changing the arrangement of the solder paste Pst, adjusting the viscosity of the solder paste Pst, etc., production of the board KB using a new mask 27 can be started more efficiently.
 以上により、実施の形態2に係る印刷装置11は、第1のパターン開口(第1の印刷パターンの一例)が設けられた第1のマスクを用いて第1の基板に半田ペーストPstを印刷し、第2のパターン開口(第2の印刷パターンの一例)が設けられた第2のマスクを用いて第2の基板に半田ペーストPstを印刷する。第1のマスクおよび第2のマスクは、基板KBと接触可能な第1の領域AR1と、第1の領域AR1の両側に位置する第2の領域AR2とを有する。印刷装置11は、第1の基板または第2の基板を保持する基板搬送保持部21(保持部の一例)と、第1のマスクおよび第2のマスクのテンションを計測する粘度計197(計測部の一例)と、第2の基板と接触する第2のマスクの第2の領域AR2を吸引可能な吸着部20と、第1のマスクから第2のマスクに交換された後、粘度計197により第2のマスクのテンションを計測させ、粘度計197により計測された第2のマスクのテンションに基づいて、基板搬送保持部21により実行される第2の基板と第2のマスクとの版離れにおいて吸着部20による第2の領域AR2の吸引の要否を判定する制御部159Aと、を備える。制御部159Aは、第2の領域AR2の吸引が必要であると判定した場合、吸着部20に第2の領域AR2を吸引させる。 As described above, the printing apparatus 11 according to the second embodiment prints the solder paste Pst on the first substrate using the first mask provided with the first pattern opening (an example of the first printed pattern). , the solder paste Pst is printed on the second substrate using a second mask provided with a second pattern opening (an example of a second printed pattern). The first mask and the second mask have a first region AR1 that can contact the substrate KB, and a second region AR2 located on both sides of the first region AR1. The printing apparatus 11 includes a substrate transport holding section 21 (an example of a holding section) that holds a first substrate or a second substrate, and a viscometer 197 (measuring section) that measures the tension of the first mask and the second mask. example), a suction unit 20 capable of suctioning the second region AR2 of the second mask in contact with the second substrate, and a viscometer 197 after the first mask is replaced with the second mask. The tension of the second mask is measured, and based on the tension of the second mask measured by the viscometer 197, the plate separation between the second substrate and the second mask is performed by the substrate transport holding unit 21. It includes a control unit 159A that determines whether or not suction of the second region AR2 by the suction unit 20 is necessary. When the control unit 159A determines that suction of the second area AR2 is necessary, the control unit 159A causes the suction unit 20 to suction the second area AR2.
 なお、ここでいう第1の基板は、例えば、図25の動作手順における「機種A」に対応する。第1のマスクは、例えば、図25の動作手順における「機種A」に対応するマスク27である。同様に、第2の基板は、例えば、図25の動作手順における「機種B」に対応する。第2のマスクは、例えば、図25の動作手順における「機種B」に対応するマスク27である。 Note that the first board here corresponds to "model A" in the operation procedure of FIG. 25, for example. The first mask is, for example, the mask 27 corresponding to "model A" in the operation procedure of FIG. 25. Similarly, the second board corresponds to "model B" in the operating procedure of FIG. 25, for example. The second mask is, for example, the mask 27 corresponding to "model B" in the operation procedure of FIG. 25.
 なお、ここでいう第1のパターン開口は、第1の基板の表面に形成された電極パターン(不図示)の配置に対応する配置で、ステンシルSUSに設けられた開口である。第2のパターン開口は、第2の基板の表面に形成された電極パターン(不図示)の配置に対応する配置で、ステンシルSUSに設けられた開口である。 Note that the first pattern opening referred to here is an opening provided in the stencil SUS with an arrangement corresponding to the arrangement of an electrode pattern (not shown) formed on the surface of the first substrate. The second pattern opening is an opening provided in the stencil SUS with a layout corresponding to the layout of an electrode pattern (not shown) formed on the surface of the second substrate.
 これにより、実施の形態2に係る印刷装置11は、マスク27の入れ替え動作がある場合に、新たなマスク27により適した版離れモードを設定できる。したがって、印刷装置11は、新たなマスク27のテンションにより適したマスク版離れモードを実行することで、マスク27の下面の第1の領域AR1と基板KBの上面とを均一に版離れさせることができ、テンションに起因する印刷品質の劣化を抑制することができる。 Thereby, the printing apparatus 11 according to the second embodiment can set a plate separation mode more suitable for the new mask 27 when the mask 27 is replaced. Therefore, the printing apparatus 11 can uniformly separate the first region AR1 on the lower surface of the mask 27 from the upper surface of the substrate KB by executing a mask plate separation mode that is more suitable for the new tension of the mask 27. This makes it possible to suppress deterioration in print quality due to tension.
 また、以上により、実施の形態2に係る印刷装置11は、第1のマスクと第2のマスクとを交換する印刷ヘッド37およびカメラ移動機構49(マスク牽引部の一例)と、をさらに備える。印刷ヘッド37およびカメラ移動機構49は、第1のマスクが備える枠101に当接して、複数のマスク27のそれぞれを格納可能なマガジン25内へ第1のマスクを格納し、マガジン25に格納された第2のマスクが備える枠101の側面を吸着し、マガジン25から第2のマスクを引き出して半田ペーストPstの印刷位置まで牽引する。これにより、実施の形態2に係る印刷装置11は、第1のマスクと第2のマスクとを自動で入れ替え、入れ替え後の第2のマスクのテンションに基づいて、新たなマスク27により適した版離れモードを設定できる。 Furthermore, as described above, the printing apparatus 11 according to the second embodiment further includes a print head 37 and a camera movement mechanism 49 (an example of a mask pulling section) for exchanging the first mask and the second mask. The print head 37 and the camera movement mechanism 49 abut against a frame 101 included in the first mask and store the first mask in the magazine 25 that can store each of the plurality of masks 27, and the first mask is stored in the magazine 25. The side surface of the frame 101 provided with the second mask is pulled out from the magazine 25 and pulled to the printing position of the solder paste Pst. Thereby, the printing apparatus 11 according to the second embodiment automatically replaces the first mask and the second mask, and creates a new mask 27 that is more suitable for the new mask based on the tension of the second mask after the replacement. You can set remote mode.
 また、以上により、実施の形態2に係る印刷装置11は、第1のマスクの上面から半田ペーストPstを回収し、第2のマスクの上面に半田ペーストPstを移載するスクレイパ137(移載部の一例)と、をさらに備える。制御部159Aは、第1のマスクと第2のマスクとの交換時に、スクレイパ137に第1のマスクの上面の半田ペーストPstを回収させ、印刷ヘッド37およびカメラ移動機構49により印刷位置に第2のマスクが牽引された後に、スクレイパ137により回収された半田ペーストPstを第2のマスクの上面に移載させる。これにより、実施の形態2に係る印刷装置11は、第1のマスクと第2のマスクとを自動で入れ替え、入れ替え後の第2のマスクのテンションに基づいて、新たなマスク27により適した版離れモードを設定できる。 Further, as described above, the printing apparatus 11 according to the second embodiment has the scraper 137 (transfer unit) that collects the solder paste Pst from the upper surface of the first mask and transfers the solder paste Pst onto the upper surface of the second mask. (an example of) and. When exchanging the first mask and the second mask, the control unit 159A causes the scraper 137 to collect the solder paste Pst on the upper surface of the first mask, and causes the print head 37 and camera movement mechanism 49 to move the solder paste Pst to the second printing position. After the second mask is pulled, the solder paste Pst collected by the scraper 137 is transferred onto the upper surface of the second mask. Thereby, the printing apparatus 11 according to the second embodiment automatically replaces the first mask and the second mask, and creates a new mask 27 that is more suitable for the new mask based on the tension of the second mask after the replacement. You can set remote mode.
 また、以上により、実施の形態2に係る印刷装置11は、半田ペーストPstの粘度を計測する粘度計197(粘度計測部の一例)と、第2のマスクの上面に移載された半田ペーストPstをこねるスキージ121と、さらに備える。制御部159Aは、半田ペーストPstが第2のマスクの上面に移載された後、粘度計197に半田ペーストPstの粘度を計測させ、計測された半田ペーストPstの粘度に基づいて、スキージ121に半田ペーストPstをこねさせる。これにより、実施の形態2に係る印刷装置11は、第1のマスクと第2のマスクとを自動で入れ替える間に、半田ペーストPstの粘度が変化した場合であっても、粘度計197により計測された粘度に基づいて、半田こねを実行できる。したがって、印刷装置11は、第2のマスクを用いた第2の基板の生産をより効率的に開始できる。 Further, as described above, the printing apparatus 11 according to the second embodiment includes a viscometer 197 (an example of a viscosity measurement unit) that measures the viscosity of the solder paste Pst, and a solder paste Pst transferred onto the upper surface of the second mask. The apparatus further includes a squeegee 121 for kneading. After the solder paste Pst is transferred onto the upper surface of the second mask, the control unit 159A causes the viscometer 197 to measure the viscosity of the solder paste Pst, and controls the squeegee 121 based on the measured viscosity of the solder paste Pst. Knead the solder paste Pst. As a result, even if the viscosity of the solder paste Pst changes while automatically replacing the first mask and the second mask, the printing apparatus 11 according to the second embodiment can measure the viscosity using the viscosity meter 197. Based on the determined viscosity, solder kneading can be performed. Therefore, the printing device 11 can more efficiently start producing the second substrate using the second mask.
 また、以上により、実施の形態2に係る印刷装置11は、第1の基板の下面を支持する複数のサポートピン219(下受けピンの一例)と、複数のサポートピン219のそれぞれの位置を変更可能な吸着ヘッド233および吸着ノズル235(吸着部の一例)と、を備える。制御部159Aは、印刷ヘッド37およびカメラ移動機構49により第1のマスクがマガジン25内に格納された後、吸着ヘッド233および吸着ノズル235により複数のサポートピン219のそれぞれを吸着し、第2の基板の下面を支持可能な位置に搬送して設置する。これにより、実施の形態2に係る印刷装置11は、第1のマスクと第2のマスクとを自動で入れ替える間に、第2の基板に対応するように複数のサポートピン219のそれぞれの配置を変更できる。したがって、印刷装置11は、第2のマスクを用いた第2の基板の生産をより効率的に開始できる。 Further, as described above, the printing apparatus 11 according to the second embodiment changes the positions of the plurality of support pins 219 (an example of lower support pins) that support the lower surface of the first substrate and the plurality of support pins 219. A suction head 233 and a suction nozzle 235 (an example of a suction unit) are provided. After the first mask is stored in the magazine 25 by the print head 37 and the camera moving mechanism 49, the control unit 159A sucks each of the plurality of support pins 219 by the suction head 233 and the suction nozzle 235, and Transport and install the board to a position where the bottom surface can be supported. Thereby, the printing apparatus 11 according to the second embodiment adjusts the arrangement of each of the plurality of support pins 219 so as to correspond to the second substrate while automatically exchanging the first mask and the second mask. Can be changed. Therefore, the printing device 11 can more efficiently start producing the second substrate using the second mask.
 また、以上により、実施の形態2に係る印刷装置11における基板搬送保持部21は、基板KBの両側面に当接して基板KBを保持する一対のクランパ87(当接部の一例)を有する。吸着部20は、基板搬送保持部21に設けられる。これにより、実施の形態2に係る印刷装置11は、基板KBの両側面に当接して基板KBを保持することにより、半田ペーストPstの印刷において、基板KBの位置ずれを抑制することができる。 Furthermore, as described above, the substrate transport and holding section 21 in the printing apparatus 11 according to the second embodiment includes a pair of clampers 87 (an example of a contact section) that abuts both side surfaces of the substrate KB and holds the substrate KB. The adsorption section 20 is provided in the substrate transport and holding section 21 . Thereby, the printing device 11 according to the second embodiment can suppress misalignment of the substrate KB in printing the solder paste Pst by holding the substrate KB in contact with both side surfaces of the substrate KB.
 以上、図面を参照しながら各種の実施の形態について説明したが、本開示はかかる例に限定されないことは言うまでもない。当業者であれば、特許請求の範囲に記載された範疇内において、各種の変更例、修正例、置換例、付加例、削除例、均等例に想到し得ることは明らかであり、それらについても当然に本開示の技術的範囲に属するものと了解される。また、発明の趣旨を逸脱しない範囲において、上述した各種の実施の形態における各構成要素を任意に組み合わせてもよい。 Although various embodiments have been described above with reference to the drawings, it goes without saying that the present disclosure is not limited to such examples. It is clear that those skilled in the art can come up with various changes, modifications, substitutions, additions, deletions, and equivalents within the scope of the claims, and It is understood that it naturally falls within the technical scope of the present disclosure. Further, each of the constituent elements in the various embodiments described above may be arbitrarily combined without departing from the spirit of the invention.
 なお、本出願は、2022年3月31日出願の日本特許出願(特願2022-059452)に基づくものであり、その内容は本出願の中に参照として援用される。 Note that this application is based on a Japanese patent application (Japanese Patent Application No. 2022-059452) filed on March 31, 2022, and the contents thereof are incorporated as a reference in this application.
 本開示は、マスクのテンションの変化により適した版離れ制御を実行し、半田ペーストの印刷品質の低下を抑制する印刷装置として有用である。 The present disclosure is useful as a printing device that performs plate separation control more suitable for changes in mask tension and suppresses deterioration in print quality of solder paste.
11 印刷装置
15 マスクチェンジャ
20 吸着部
21 基板搬送保持部
27 マスク
37 印刷ヘッド
49 カメラ移動機構
87 クランパ
99 パターン開口
100 接続部材
101 枠
131 スキージベース駆動モータ
115 ロッド
159A 制御部
183 テンション計測装置
197 粘度計
219 サポートピン
233 吸着ヘッド
235 吸着ノズル
KB 基板
SUS ステンシル
Pst 半田ペースト
11 Printing device 15 Mask changer 20 Adsorption section 21 Substrate transport holding section 27 Mask 37 Print head 49 Camera movement mechanism 87 Clamper 99 Pattern opening 100 Connection member 101 Frame 131 Squeegee base drive motor 115 Rod 159A Control section 183 Tension measuring device 197 Viscometer 219 Support pin 233 Suction head 235 Suction nozzle KB Substrate SUS Stencil Pst Solder paste

Claims (6)

  1.  第1の印刷パターンが設けられた第1のマスクを用いて第1の基板に半田ペーストを印刷し、第2の印刷パターンが設けられた第2のマスクを用いて第2の基板に前記半田ペーストを印刷する印刷装置であって、
     前記第1のマスクおよび前記第2のマスクは、
     前記第1の基板または前記第2の基板と接触可能な第1の領域と、前記第1の領域の両側に位置する第2の領域とを有し、
     前記印刷装置は、
     前記第1の基板または前記第2の基板を保持する保持部と、
     前記第1のマスクおよび前記第2のマスクのテンションを計測する計測部と、
     前記第2のマスクの前記第2の領域を吸引可能な吸引部と、
     前記第1のマスクから前記第2のマスクに交換された後、前記計測部により前記第2のマスクの前記テンションを計測させ、前記計測部により計測された前記第2のマスクの前記テンションに基づいて、前記保持部により実行される前記第2の基板と前記第2のマスクとの版離れにおいて前記吸引部による前記第2の領域の吸引の要否を判定する制御部と、を備え、
     前記制御部は、前記第2の領域の吸引が必要であると判定した場合、前記吸引部に前記第2の領域を吸引させる、
     印刷装置。
    A first mask provided with a first printed pattern is used to print solder paste on a first substrate, and a second mask provided with a second printed pattern is used to print the solder paste on a second substrate. A printing device that prints paste,
    The first mask and the second mask are
    comprising a first region that can be contacted with the first substrate or the second substrate, and second regions located on both sides of the first region,
    The printing device includes:
    a holding part that holds the first substrate or the second substrate;
    a measurement unit that measures the tension of the first mask and the second mask;
    a suction unit capable of suctioning the second region of the second mask;
    After the first mask is replaced with the second mask, the tension of the second mask is measured by the measurement unit, and based on the tension of the second mask measured by the measurement unit. a control unit that determines whether or not suction of the second area by the suction unit is necessary during plate separation between the second substrate and the second mask performed by the holding unit;
    When the control unit determines that suction of the second area is necessary, the control unit causes the suction unit to suction the second area.
    Printing device.
  2.  前記第1のマスクと前記第2のマスクとを交換するマスク牽引部と、をさらに備え、
     前記マスク牽引部は、前記第1のマスクが備える枠に当接して、複数のマスクのそれぞれを格納可能なマガジン内へ前記第1のマスクを格納し、前記マガジンに格納された前記第2のマスクが備える枠の側面を吸着し、前記マガジンから前記第2のマスクを引き出して前記半田ペーストの印刷位置まで牽引する、
     請求項1に記載の印刷装置。
    further comprising a mask pulling part for exchanging the first mask and the second mask,
    The mask pulling section contacts a frame included in the first mask to store the first mask into a magazine that can store each of the plurality of masks, and to store the first mask in a magazine that can store each of the plurality of masks, and to store the second mask stored in the magazine. suctioning the side surface of a frame provided by the mask, pulling out the second mask from the magazine and pulling it to the printing position of the solder paste;
    The printing device according to claim 1.
  3.  前記第1のマスクの上面から前記半田ペーストを回収し、前記第2のマスクの上面に前記半田ペーストを移載する移載部と、をさらに備え、
     前記制御部は、
      前記第1のマスクと前記第2のマスクとの交換時に、前記移載部に前記第1のマスクの前記上面の前記半田ペーストを回収させ、
      前記マスク牽引部により前記印刷位置に前記第2のマスクが牽引された後に、前記移載部により回収された前記半田ペーストを前記第2のマスクの前記上面に移載させる、
     請求項2に記載の印刷装置。
    further comprising a transfer unit that collects the solder paste from the top surface of the first mask and transfers the solder paste to the top surface of the second mask,
    The control unit includes:
    When exchanging the first mask and the second mask, causing the transfer unit to collect the solder paste on the upper surface of the first mask;
    After the second mask is pulled to the printing position by the mask pulling unit, the collected solder paste is transferred to the upper surface of the second mask by the transfer unit.
    The printing device according to claim 2.
  4.  前記半田ペーストの粘度を計測する粘度計測部と、
     前記第2のマスクの前記上面に移載された前記半田ペーストをこねるスキージと、さらに備え、
     前記制御部は、前記半田ペーストが前記第2のマスクの前記上面に移載された後、前記粘度計測部に前記半田ペーストの粘度を計測させ、計測された前記半田ペーストの前記粘度に基づいて、前記スキージに前記半田ペーストをこねさせる、
     請求項3に記載の印刷装置。
    a viscosity measurement unit that measures the viscosity of the solder paste;
    further comprising: a squeegee for kneading the solder paste transferred to the upper surface of the second mask;
    The control unit causes the viscosity measurement unit to measure the viscosity of the solder paste after the solder paste is transferred to the upper surface of the second mask, and based on the measured viscosity of the solder paste. , causing the squeegee to knead the solder paste;
    The printing device according to claim 3.
  5.  前記第1の基板の下面を支持する複数の下受けピンと、
     前記複数の下受けピンのそれぞれの位置を変更可能な吸着部と、を備え、
     前記制御部は、前記マスク牽引部により前記第1のマスクが前記マガジン内に格納された後、前記吸着部により前記複数の下受けピンのそれぞれを吸着し、前記第2の基板の下面を支持可能な位置に搬送して設置する、
     請求項2に記載の印刷装置。
    a plurality of lower support pins supporting the lower surface of the first substrate;
    a suction part that can change the position of each of the plurality of lower receiving pins,
    After the first mask is stored in the magazine by the mask pulling unit, the control unit causes the suction unit to suction each of the plurality of lower receiving pins to support the lower surface of the second substrate. Transport and install it in a possible location,
    The printing device according to claim 2.
  6.  前記保持部は、前記第2の基板の両側面に当接して前記第2の基板を保持する一対の当接部を有し、
     前記吸引部は、前記保持部に設けられる、
     請求項1に記載の印刷装置。
    The holding part has a pair of contact parts that come into contact with both side surfaces of the second board and hold the second board,
    The suction part is provided in the holding part,
    The printing device according to claim 1.
PCT/JP2023/001795 2022-03-31 2023-01-20 Printing device WO2023188724A1 (en)

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