WO2023185924A1

WO2023185924A1 - Cleaning device for vacuum hole of chip bonding head

Info

Publication number: WO2023185924A1
Application number: PCT/CN2023/084687
Authority: WO
Inventors: 陈秀龙
Original assignee: 颀中科技（苏州）有限公司; 合肥颀中科技股份有限公司
Priority date: 2022-04-01
Filing date: 2023-03-29
Publication date: 2023-10-05
Also published as: CN114733807A; CN114733807B

Abstract

A cleaning device (100) for a vacuum hole of a chip bonding head, comprising a support (10), a bearing assembly (20), and an ejector pin assembly (30); the ejector pin assembly (30) is slidably provided on the support (10); the ejector pin assembly (30) comprises an ejector pin mounting block (31), an ejector pin (301), a positioning block (33) and an ejector pin fine adjustment mechanism; the ejector pin fine adjustment mechanism comprises a fine adjustment member (321), an ejector pin supporting block (32) and a positioning assembly; the fine adjustment member (321) is threadedly connected to the ejector pin mounting block (31); the fine adjustment member (321) is mated with the ejector pin supporting block (32). The positioning of the ejector pin (301) is controlled by controlling the fine adjustment member (321), so that the adjustment precision of a protruding length of the ejector pin (301) is improved.

Description

Chip press joint vacuum hole cleaning device

Technical field

The invention relates to the technical field of semiconductor production, and in particular to a vacuum hole cleaning device for chip pressure joints.

Background technique

Bonding is a common process in the chip packaging production process. Chip crimping joints are mainly used to crimp the aligned products. Usually, the above-mentioned chip pressure joint is provided with a number of vacuum holes. The corresponding chip is adsorbed on the surface of the chip pressure joint through the negative pressure formed in the vacuum hole and moves toward the substrate as the chip pressure joint moves. The chip pressure joint is also used to attach the chip pressure joint to the substrate. The surface of the metal bumps of the chip is heated and melted, so that the metal bumps are fixedly connected to the corresponding pins on the surface of the substrate.

In the actual production process, because there is often residual glue on the back of the wafer, the residual glue easily enters the vacuum hole of the chip pressure joint under the action of negative pressure; on the other hand, grinding stones are regularly used on-site to clean the chip. The surface of the crimping joint should be cleaned to avoid glue residue, but the vacuum hole cannot be cleared and cleaned. Moreover, when the grindstone itself rubs against the chip crimping joint, some fine powder (aluminum oxide) will be produced and sucked into the vacuum hole. High temperature conditions (400 ℃) and residual adhesive material to form hard and difficult-to-remove blockages. The existing method is to first cool the chip crimping joint to normal temperature, disassemble the chip crimping joint, and then use an ejection needle to manually clean the vacuum hole. The operation is cumbersome, time-consuming and labor-intensive.

In view of this, it is necessary to provide a new vacuum hole cleaning device for chip press joints.

Contents of the invention

The object of the present invention is to provide a chip pressure joint vacuum hole cleaning device, which facilitates the adjustment of the ejector pin, improves the adjustment accuracy of the ejector pin protrusion length, and can be better applied to various applications. The same chip crimping joint avoids ejector pin damage caused by improper ejector pin setting.

The vacuum hole cleaning device of the chip pressure joint provided by the present invention includes a bracket, a bearing component for positioning the chip pressure joint, and an ejector pin assembly; the ejector pin assembly is slidably disposed on the bracket along the vertical direction and is located on the side of the bearing component. upper side;

The ejector pin assembly includes an ejector pin installation block, an ejector pin, a positioning block that presses and fixes the ejector pin on the ejector pin installation block, and an ejector pin fine-tuning mechanism;

The ejector pin fine-adjustment mechanism includes a micro-adjustment member, an ejector support block and a positioning component for positioning the ejector pin on the ejector support block; the micro-adjustment member extends along the vertical direction and is threadedly connected to the ejector pin. On the mounting block; the micro-adjustment member cooperates with the ejector pin support block so that the ejector pin support block can move in the vertical direction when the micro-adjustment member is screwed.

As a further improvement of the present invention, the ejector pin support block is installed on the micro-adjustment member along the circumferential rotation of the micro-adjustment member, and the ejector pin support block is configured to limit the axial direction of the micro-adjustment member. direction movement.

As a further improvement of the present invention, the micro-adjustment member is provided with a connecting portion for installing the ejector mounting block and axial limiting portions provided on both upper and lower sides of the connecting portion; the ejector support block is provided with a connecting portion corresponding to the ejector pin mounting block. The connection part is matched with a support block mounting hole; the ejector support block is sleeved outside the connection part and is vertically limited by the axial limiting parts on both sides.

As a further improvement of the present invention, the positioning assembly includes an ejector pin positioning groove and an ejector pin pressing member provided on the ejector pin support block. The ejector pin pressing member is threadedly connected to the ejector pin support block and connects the ejector pin The ejector pin is pressed and positioned in the pressing groove.

As a further improvement of the present invention, the ejector pin assembly also has a guide mechanism provided on the ejector pin mounting block, and the ejector pin mounting block is provided with a guide hole that matches the guide mechanism, and the The guide mechanism can move up and down along the guide hole; the guide mechanism has a columnar structure and extends along the vertical direction, and the guide mechanism is parallel to the micro-adjustment member.

As a further improvement of the present invention, the front side of the ejector pin mounting block is provided with a positioning groove that opens toward the front side; the positioning block is detachably installed and fixed on the ejector pin mounting block. After the positioning block is locked and fixed, the positioning block presses and positions the ejector pin in the positioning groove.

As a further improvement of the present invention, the depth of the positioning groove is smaller than the diameter of the ejector pin. After the ejector pin is positioned in the positioning groove, some of the ejector pins protrude out of the positioning groove in the opening direction of the positioning groove. A contact portion is provided that is opposite to and abuts against the positioning groove.

As a further improvement of the present invention, the ejector pin mounting block also has a rotation limiting portion protruding in the forward direction, the rotation limiting portion is provided on the ejector pin mounting block, and the rotation limiting portion is provided On the side of the positioning block, and used to abut with the positioning block to limit the rotation of the positioning block.

As a further improvement of the present invention, the ejection pin mounting block includes a body part and a mounting part disposed on the front side of the body part and close to the bottom, the mounting part protrudes from the body part to the front side; the positioning part The block is provided on the mounting part.

As a further improvement of the present invention, the bottom end of the positioning block is flush with the bottom end of the mounting part, and the size of the positioning block is adapted to the size of the mounting part.

Beneficial effects of the present invention: The embodiment of the present invention can conveniently adjust the position of the ejector pin through the setting of the fine-tuning mechanism. The fine-tuning mechanism adopts a threaded micro-adjusting member for adjustment, and the ejector pin is controlled by controlling the depth of the screw-in of the micro-adjusting member. Position the position, and use the positioning block to position the bottom of the ejector pin after the ejector pin is adjusted, which facilitates the adjustment of the ejector pin, improves the adjustment accuracy of the ejector pin protrusion length, and can better apply to different chip crimping joints, avoiding Damage to the ejector pin caused by improper ejector pin setting.

Description of drawings

Figure 1 is a schematic diagram of the overall working state of the vacuum hole cleaning device of the chip pressure joint of the present application;

Figure 2 is a schematic plan view of the vacuum hole cleaning device of the chip pressure joint in Figure 1;

Figure 3 is a schematic plan view of the vacuum hole cleaning device of the chip pressure joint in Figure 2 from another angle;

Figure 4 is a partial structural cross-section of the vacuum hole cleaning device of the chip pressure joint in Figure 2 along the AA direction. view;

Figure 5 is a partial structural schematic diagram of the vacuum hole cleaning device of the chip pressure joint of the present application;

Figure 6 is a structural schematic diagram from another angle of the partial structure of the vacuum hole cleaning device of the chip pressure joint in Figure 5;

Figure 7 is an exploded structural schematic diagram of part of the structure of the vacuum hole cleaning device of the chip pressure joint in Figure 5;

Figure 8 is a schematic structural diagram of the ejector pin in the vacuum hole cleaning device of the chip pressure joint applied for after being positioned by the micro-adjustment mechanism;

Figure 9 is an exploded view of Figure 8;

Figure 10 is a schematic diagram of the disassembled structure of the drive shaft and operating rod in the vacuum hole cleaning device of the chip pressure joint;

Figure 11 is a schematic structural diagram of the installation box in the vacuum hole cleaning device of the chip pressure joint;

100-Chip pressure joint vacuum hole cleaning device; 10-bracket; 11-bottom plate; 12-back plate; 121-first slide rail; 122-connection hole; 123-auxiliary stroke limiter; 13-side plate; 131- The second slide rail; 14-installation box; 141-drive positioning groove; 142-extension arm avoidance groove; 20-carrying component; 21-first adjustment mechanism; 211-first base plate; 212-first adjustment plate; 22- Second adjustment mechanism; 221-second base plate; 222-second adjustment plate; 223-adjustment piece; 224-limiting plate; 225-locking piece; 23-carrying plate; 24-pressure joint positioning block; 25-stroke Limit block; 30-ejector pin assembly; 301-ejector pin; 31-ejector pin installation block; 311-body part; 312-installation part; 313-rotation limit part; 32-ejector pin support block; 321-micro-adjustment piece; 3211- Threaded section; 3212-connection part; 3213-axial limit part; 3214-rotation control part; 322-guide mechanism; 323-support block mounting hole; 325-ejector pin positioning groove; 326-ejector pin pressing piece; 33- Positioning block; 34-first fixed plate; 35-driving block; 350-extension arm perforation; 351-drive bearing part; 352-extension arm perforation; 36-first slide block; 361-first guide groove; 37-th Two fixed plates; 38-second slide block; 381-second guide groove; 41-driving shaft; 411-extension arm; 412-cam structure; 413-operating rod mounting part; 42-operating rod; 421-operating rod positioning hole; 43-return spring; 44-spring positioning plate; 441-second spring positioning hole; 45-operating rod locking mechanism; 200-chip crimping joint; 201-base; 202-crimping part.

Detailed ways

The present invention will be described in detail below with reference to the embodiments shown in the drawings. However, this embodiment does not limit the present invention. Structural, method, or functional changes made by those of ordinary skill in the art based on this embodiment are all included in the protection scope of the present invention.

Referring to Figures 1-11, the chip pressure joint vacuum hole cleaning device 100 provided by the present invention is mainly used to clear and clean the vacuum holes of the chip pressure joint 200. The chip pressure joint vacuum hole cleaning device 100 includes a bracket 10, installed on The bearing assembly 20, the ejector assembly 30 and the driving assembly are on the bracket. The carrying component 20 is used to position the chip crimping joint 200 and adjust the position of the chip crimping joint 200 so that the chip crimping joint 200 is positioned relative to the ejection pin assembly 30; the ejection pin assembly 30 includes a movable extension to The ejector pin 301 is inserted into the vacuum hole of the chip pressing joint 200 to complete the cleaning work; the driving component is used to drive the ejector pin component 30 to move toward or away from the carrying component 20 .

By adjusting the carrier assembly 20, the vacuum hole of the chip pressing head 200 positioned on the carrier assembly 20 is opposite to the position of the ejection pin 301. After the adjustment is completed, the driving assembly is used to control the ejection pin assembly 30 to move closer to or away from the carrier assembly 20, so that The ejector pin 301 moves in and out of the vacuum hole, thereby clearing the vacuum hole.

In order to improve the stability of the ejector pin assembly 30 during its movement, in this embodiment, the ejector pin assembly 30 is slidably disposed on the bracket 10 in the vertical direction, and the ejector pin assembly 30 is disposed on the bearing in the vertical direction. Above the assembly 20, the driving assembly drives the ejector assembly 30 to slide on the bracket 10 in the vertical direction, and approach or move away from the load-bearing assembly 20 during the sliding process to clean the ejector pin assembly 30 positioned on the load-bearing assembly 20. Vacuum hole of die press head 200.

The ejector assembly 30 is arranged in the vertical direction of the bearing assembly 20, and the driving assembly only needs to pass By applying a downward force, the ejector pin assembly 30 can be controlled to move toward the load-bearing assembly 20 located on the lower side, making manipulation more convenient.

In actual use, it generally requires more than 30 reciprocating movements of the ejector pin assembly to clear the blockage in the vacuum hole. After the ejector pin assembly 30 falls, the ejector pin assembly 30 needs to be lifted up to facilitate next cleaning use. In order to conveniently realize the automatic lifting and reset of the ejector pin assembly 30, the driving assembly includes a reset mechanism;

When an external force acts on the ejector pin assembly 30 through the driving assembly, the external force is converted into a force that drives the ejector pin assembly 30 to move downward in the vertical direction, and during the downward movement of the ejector pin assembly 30, the reset mechanism accumulates and resets. Elasticity;

When the external pressing force acting on the ejector pin assembly 30 is removed, the ejector pin assembly 30 will reset and move upward under the action of the reset resilience of the reset mechanism.

In this embodiment, the ejector pin assembly 30 includes an ejector pin frame, the ejector pin 301 is positioned on the ejector pin frame, the ejector pin frame is slidably disposed on the bracket 10 in the vertical direction, and the driving mechanism drives the The ejector pin holder slides along the bracket 10 .

In this embodiment, as shown in FIGS. 2 to 5 , the bracket 10 includes a bottom plate 11 , a back plate 12 and a side plate 13 . The bottom plate 11 is arranged horizontally, and the load-bearing component 20 is fixedly installed on the bottom plate 11; the back plate 12 is arranged in a vertical direction, and the load-bearing component 20 and the ejector assembly 30 are located on the back plate 12 Front side; the side plate 13 is also arranged in the vertical direction, and the load-bearing assembly 20 and the ejector assembly 30 are located on the same side of the side plate 13 . It should be noted here that the aforementioned "horizontal", "vertical" and "front side" are only for convenience of understanding, and are described based on the accompanying drawings when the chip pressure head vacuum hole cleaning device 100 is in a predetermined placement state.

In this embodiment, the ejector pin rack is slidably disposed on the back plate 12 in the vertical direction, and the ejector pin rack is also slidably disposed on the side plate 13 in the vertical direction.

On the premise of enhancing the stability of the bracket 10, the side plate 13 can make the up and down sliding of the ejector pin frame more stable. Since the ejector pin needs to penetrate the vacuum hole during its up and down movement, the gap between the two is relatively small. The stable sliding of the ejector pin holder can effectively avoid the deviation of the ejector pin holder position due to errors during the sliding process, thereby causing The position of the ejector pin 301 is shifted, so that the ejector pin 301 and the vacuum hole are not properly connected, which effectively avoids the problem of the ejector pin 301 being damaged after not being inserted into the vacuum hole.

The side plates 13 are arranged perpendicularly to the back plate 12 , and both the side plates 13 and the back plate 12 are perpendicularly arranged on the bottom plate 11 . In this embodiment, the side plate 13 is provided only on one side of the back plate 12 , thereby forming a working space opening toward the front side and opening toward the side on the bracket 10 .

The side plate 13 is provided only on one side so that the other side opposite to the side plate 13 is open to the outside. The arrangement of the above structure can more conveniently realize the adjustment of the position of the load-bearing assembly 20 . Since the carrier assembly 20 needs to be adjusted in the horizontal direction along the front, rear, left and right directions to realize the docking of the vacuum hole on the chip crimping joint 200 positioned on the carrier assembly 20 with the ejection pin 301, it is necessary to leave a large enough space for the adjustment of the carrier assembly 20. room for adjustment. The arrangement of the above structure not only facilitates the adjustment of the carrier component 20 but also facilitates the installation and positioning of the chip pressure joint 200 on the carrier component 20 .

The side plate 13 provided on one side of the bracket 10 ensures the support strength of the bracket 10 while providing stable sliding support for the ejector pin frame, and also provides the bracket 10 with a wider operating space.

It can be understood that the ejector rack is provided with a first slider 36 that is slidably disposed along the back plate 12 and a second slider 38 that is slidably disposed along the side plate 13 . A first slide rail 121 is adapted to the slide block 36. The side plate 13 is provided with a second slide rail 131 that is adapted to the second slide block 38. The first slide rail 121 and the second slide rail 121 are provided on the side plate 13. The slide rails 131 are arranged to extend vertically.

The first slide block 36 is formed with a first guide groove 361 that matches the first slide rail 121 . It can be understood that the first slide rail 121 and the first guide groove 361 are only exemplary structural descriptions of the present application. In other embodiments of the present application, guide rails may be provided on the first slide block 36 and in the The back plate 12 is provided with guide grooves, which will not be described again here. Similarly, the second slide block 38 is formed with a second guide groove 381 that matches the second slide rail 131 .

The ejector pin frame includes a first fixing plate 34, a second fixing plate 37 arranged perpendicularly to each other, and an ejector mounting block 31 provided on the first fixing plate 34 and the second fixing plate 37. The first sliding The block 36 is fixed on the first fixing plate 34 , the first fixing plate 34 extends in a direction parallel to the back plate 12 , and the second fixing plate 37 extends in a direction parallel to the side plate 13 Extended, the second slider 38 is fixed on the second fixing plate 37 . The ejector pin mounting block 31 is fixed on the first fixing plate 34 and the second fixing plate 37 at the same time. The driving assembly drives the first fixing plate 34 to move up and down in the vertical direction.

The front side of the ejector pin mounting block 31 is provided with a positioning groove that opens toward the front side. The ejector pin 301 is positioned in the positioning groove. After the ejector pin 301 is positioned in the positioning groove, one end of the ejector pin 301 The bottom surface of the ejection pin mounting block 31 protrudes downward, and the protruding part of the ejection pin 301 is used to be inserted into the vacuum adsorption hole on the chip pressure connector 200 and used to clean the vacuum adsorption hole.

As shown in Figures 5-9, in order to conveniently position the ejector pin 301, the ejector pin assembly also has a positioning block 33 provided on the ejector pin installation block 31. The positioning block 33 is detachably installed and fixed on the ejector pin installation block 31. The ejector pin 301 is pressed and positioned in the locating groove after the positioning block 33 is locked and positioned on the ejector pin mounting block 31 .

It can be understood that the depth of the positioning groove is smaller than the diameter of the ejector pin 301, so that after the ejector pin 301 is positioned in the positioning groove, part of the ejector pin 301 protrudes from the positioning groove in the opening direction of the positioning groove, that is, the positioning groove is positioned. The slot cannot completely accommodate the ejector pin 301; the positioning block 33 is provided with a contact portion opposite to the position of the positioning groove and relatively abutting. After the positioning block 33 is installed and positioned, the contact portion and the protruding positioning Some of the ejector pins 301 in the grooves are in contact with each other to realize the installation and fixation of the ejector pins 301 .

In this embodiment, the positioning block 33 can be fixed on the ejector pin installation block 31 by bolts. After the bolts are threadedly connected to the ejector pin installation block 31, the positioning block 33 is pressed and fixed on the ejector pin installation block 31. After the positioning block 33 is pressed and fixed on the ejector pin mounting block 31, the positioning block 33 presses and fixes the ejector pin 301.

The setting of the above structure can adjust the positioning of the ejector pin 301 by adjusting the tightening of the bolt. When the bolt is tightened, the ejector pin 301 is locked and positioned in the positioning groove. When the bolt is loosened, the positioning block 33 resists the ejector pin 301. When the contact force weakens, the ejector pin 301 can move in the vertical direction in the positioning groove, thereby adjusting the length of the ejector pin 301 protruding downward from the ejector pin mounting block 31 to be suitable for various chip crimping joints 200 .

It can be understood that the positioning block 33 is provided with bolt holes that are adapted to the bolts. The bolts pass through the bolt holes and are threadedly connected to the thimble mounting block 31 , and the nuts of the bolts are pressed against the bolt holes. The outer surface of the positioning block 33.

In order to conveniently install and fix the ejector pin 301, the ejector pin mounting block 31 includes a body part 311 and a mounting part 312 disposed on the front side of the body part 311 and close to the bottom. The mounting part 312 extends from the body part 311. 311 protrudes from the front side, and the body portion 311 is fixed on the side plate 13 and the back plate 12 . The positioning groove is provided on the mounting part 312 and penetrates the mounting part 312 in the vertical direction. The positioning block 33 is installed on the mounting part 312 . The size of the mounting portion 312 in the vertical direction is smaller than the size of the body portion 311 in the vertical direction. The installation and fixation of the ejector pin can be conveniently achieved by the arrangement of the mounting portion 312 .

In order to better protect and cover the ejector pin 301, the bottom end of the positioning block 33 is flush with the bottom end of the mounting part 312, and the size of the positioning block 33 is consistent with the size of the mounting part 312. Adaptation, the arrangement of such a structure enables the positioning block 33 to realize the pressing and positioning of the positioning ejector pin 301 in the vertical direction of the entire mounting part 312 when positioning the ejector pin 301.

As shown in Figure 7, in order to prevent the positioning block 33 from rotating when the ejector pin 301 is in the adjustment state, the ejector pin mounting block 31 also has a rotation limiter 313 protruding in the forward direction. The rotation limiter The rotation limiting portion 313 is provided on the body portion 131 and the rotation limiting portion 313 is provided on the side of the positioning block 33 and is used to abut the positioning block 33 to limit the positioning block 33 in the circumferential direction of the bolt. of rotation.

In the process of adjusting the positioning ejector pin 301 in the above structure, the bolts need to be loosened first to slow down the pressing force of the positioning block 33 on the positioning ejector pin 301. At this time, the positioning ejector pin 301 can move in the vertical direction in the positioning groove, but In actual use, the adjustment of the downward protruding length of the positioning ejector pin 301 is mostly controlled by human hands, which has poor accuracy and may easily cause inaccurate control of the protruding length of the positioning ejector pin 301 .

In order to realize the adjustment of the position of the positioning ejector pin 301 conveniently and accurately, as shown in Figure 8-9, this The embodiment also has an ejector fine-tuning mechanism, which includes a fine-adjusting member 321 and an ejector support block 32 that cooperates with the fine-adjusting member 321. Part of the ejector support block 32 is extended on the mounting part 312. side, and has a positioning component for positioning the ejector pin 301, and the ejector pin 301 is positioned on the ejector pin support block 32 through the positioning component.

The ejector pin support block 32 is installed on the micro-adjustment member 321 along the circumferential rotation of the micro-adjustment member 321, and the ejector pin support block 32 is configured to limit movement in the axial direction of the micro-adjustment member 321;

The ejector pin mounting block 31 is provided with a threaded hole that opens upward. The micro-adjusting member 321 is provided with a threaded section 3211 that matches the threaded hole. The ejector pin is driven by screwing the micro-adjusting member 321. The support block 32 moves in the vertical direction to adjust the height of the ejector pin 301 in the vertical direction. In a specific embodiment, the micro-adjusting member 321 is threadedly installed on the rotation limiting portion 313. Since the rotation limiting portion 313 is formed by protruding outward from the body portion 311, connection and fixation can be achieved more conveniently.

As shown in FIG. 9 , the micro-adjustment member 321 is provided with a connecting portion 3212 for installing the ejector pin mounting block 31 and axial limiting portions 3213 provided on the upper and lower sides of the connecting portion 3212 . The ejector pin support block 32 It is sleeved outside the connecting part 3212 and is vertically limited by the axial limiting parts 3213 on both sides.

The connecting portion 3212 and the axial limiting portions 3213 on both sides form a trough, and the ejector support block 32 is positioned in the trough. It can be understood that the ejector support block 32 is provided with a support block mounting hole 323 that is adapted to the connecting portion 3212 .

In order to facilitate the assembly of the ejector pin support block 32, the ejector pin support block 32 is provided with a notch that communicates with the support block installation hole 323. The notch is connected to the support block installation hole 323. The arrangement is actually to form a support block positioning groove on the ejector support block 32 that matches the connection part 3212, and the support block positioning groove is locked on the connection part 3212.

The positioning assembly includes an ejector pin positioning groove 325 provided on the ejector pin support block 32 and an ejector pin pressing member 326. The ejector pin pressing member 326 is threadedly connected to the ejector pin support block 32 and has a function to offset the ejector pin 301. Connected to the pressing part, the ejector pin pressing member 326 presses and positions the ejector pin 301 in the pressing groove 326. The ejector pin pressing member 326 is a bolt threadedly connected to the ejector pin support block 32 .

In order to conveniently realize the rotation adjustment of the micro-adjustment member 321, the micro-adjustment member 321 is also provided with a rotation control part 3214. The rotation control part 3214 is coaxially arranged with the thread segment 3211, and the rotation control part 3214 is coaxial with the threaded section 3211. The threaded segments 3211 are disposed oppositely at both ends of the fine adjustment member 321 , and the connecting portion 3212 is disposed between the rotation control portion 3214 and the threaded segments 3211 . The cross-section of the rotary control part 3214 is circular, and the cross-sectional size of the rotary control part 3214 is larger than the cross-sectional size of the threaded section 3211, so that the rotation of the threaded section 3211 can be controlled conveniently.

Furthermore, in order to improve the stability of the ejector pin support block 32 during movement in the vertical direction, in this embodiment, the ejector pin assembly also has a guide mechanism 322 provided on the ejector pin installation block 31, so The ejector pin mounting block 31 is provided with a guide hole that is adapted to the guide mechanism 322. The guide hole has a clearance fit with the guide mechanism 322, and the guide mechanism 322 can move along the guide mechanism 322. The guide hole moves up and down. The guide mechanism 322 has a columnar structure and extends along the vertical direction. The micro-adjusting member 321 also has a columnar structure and extends along the vertical direction. The guide mechanism 322 and the micro-adjustment member 322 are connected with each other. The adjusting members 321 are arranged side by side and their extending directions are parallel to each other.

The cross-section shape of the guide mechanism 322 may be circular or rectangular. In this embodiment, the cross-section of the guide mechanism 322 is square.

The guide hole is a blind hole provided on the ejector pin mounting block 31 .

Furthermore, the ejector pin assembly 30 also has an auxiliary support block provided on the ejector pin installation block 31. The auxiliary support block is installed and fixed with the ejector pin installation block 31 in the vertical direction, and the auxiliary support block The front side of the ejector pin support block 32 is adjacent to the ejector pin support block 32. The arrangement of the auxiliary support block can also effectively prevent the ejector pin support block 32 from rotating with the micro-adjustment member 321 during the adjustment process of the micro-adjustment member 321. In this embodiment, the reset mechanism includes a compression spring 43 and a spring positioning plate 44. The spring positioning plate 44 is provided on the bracket 10. One end of the compression spring 43 is positioned on the spring positioning plate 44. The compression spring The other end of 43 is located on the lower side of the ejector pin assembly 30 and is used to offset the ejector pin assembly 30 .

The ejector pin assembly 30 moves downward under the action of external force. After moving to the position of the compression spring 43, it offsets the compression spring 43 and compresses the compression spring 43. At this time, the compression spring 43 accumulates rebound force. After the external force is removed, the rebound force of the compression spring 43 The elastic force drives the ejector pin assembly 30 to move upward.

The setting of the reset mechanism facilitates the reset movement of the ejector pin assembly 30, thereby facilitating the reuse of the device.

In order to better install and fix the compression spring 43, the ejector pin assembly 30 is provided with a first spring positioning hole for positioning the compression spring 43, and the spring positioning plate 44 is provided with a first spring positioning hole for positioning the compression spring 43. The second spring positioning hole 441 has two ends of the compression spring 43 positioned in the first spring positioning hole and the second spring positioning hole 441 respectively.

Connecting and fixing the two ends of the compression spring 43 with the ejector pin assembly 30 and the spring positioning plate 44 respectively can better realize the use of the compression spring 43, making the compression spring 43 more efficient during use. of stability.

As shown in FIGS. 1-3 , the load-bearing assembly 20 includes a first adjustment mechanism 21 , a second adjustment mechanism 22 and a load-bearing plate 23 that are stacked in sequence. The first adjustment mechanism 21 includes a first base plate 211 fixed on the bottom plate 11 of the bracket 10 and a first adjustment plate 212 slidably disposed on the first base plate along the first direction X; the second adjustment mechanism 22 includes a second base plate 221 fixed on the first adjustment plate 212 and a second adjustment plate 222 slidably disposed along a second direction Y perpendicular to the first direction X; the carrier plate 23 is fixed on the first adjustment plate 212 . The two adjustment plates 222 are used to position the chip pressing head 200 . The first direction X and the second direction Y are the front-to-back and left-right directions respectively. The first adjustment mechanism 21 and the second adjustment mechanism 22 jointly realize the position adjustment of the carrier plate 23 and the chip pressure joint 200 in the horizontal direction. .

In order to conveniently adjust the position of the carrying plate 23, the first adjustment plate 212 has a dovetail groove with an opening facing the first base plate 211, and the first base plate 211 is provided with a dovetail groove that is suitable for the dovetail groove. The first base plate 211 is also provided with a locking mechanism for locking and fixing the relative positional relationship between the first base plate 211 and the first adjustment plate 212 .

Similarly, the second adjustment plate 222 has a dovetail groove that opens toward the second base plate 221, and the second base plate 221 is provided with a dovetail tenon that matches the dovetail groove; the second base plate 221 is also provided with a locking mechanism for locking and fixing the relative positional relationship between the second base plate 221 and the second adjustment plate 222 .

Taking the second adjustment mechanism 22 shown in FIG. 2 as an example, the locking mechanism includes an adjustment member 223, a limiting plate 224 fixed on the second base plate 221, and a locking member 225. In actual operation, the position of the second adjusting plate 222 in the second direction Y is first adjusted through the adjusting member 223, and then the position of the second adjusting plate 222 is adjusted through the locking member 223. The fastener 225 locks the second adjustment plate 222 and the second base plate 221 . Wherein, the limiting plate 224 is also formed with a strip hole extending along the second direction Y, and the locking member 225 is inserted through the strip hole. The structural designs of the first adjustment mechanism 21 and the second adjustment mechanism 22 are similar and will not be described again.

The bearing plate 23 is provided with a crimping head positioning groove and a crimping head positioning block 24 arranged next to the crimping head positioning groove. The crimping head positioning block 24 is detachably installed and fixed on the bearing plate 23 and has an extension. The crimping positioning part is provided on the upper side of the crimping joint positioning groove.

The chip crimping joint 200 generally includes a base 201 and a crimping part 202 fixed on the base 201 ; the crimping joint positioning groove is provided on the upper surface of the carrier plate 23 . The press joint positioning block 24 is generally configured as a pressure plate and securely mounts the base 201 of the chip press joint 200 on the carrier plate 23 through fixing bolts.

In order to prevent the ejector pin assembly 30 from colliding with the chip crimping joint 200 during the downward movement and causing abnormal damage, the load-bearing assembly 20 also includes a ejector pin assembly 30 fixed on the load-carrying plate 23 and matching with the ejector pin assembly 30 . Travel limit block 25. The stroke limiting block 25 is disposed on the lower side of the ejector pin assembly 30 and is used to limit the maximum descending stroke of the ejector pin assembly 30 .

The travel limiter 25 can be directly provided on the bracket 10 or on the load-bearing assembly 20 . In this embodiment, the limiting block 25 is disposed on the bearing plate 23 of the bearing assembly 20 .

Through the design of the stroke limiter 25 and the adjustment of the height position of the ejector pin 301, during actual operation, only the ejector pin will be inserted downward into the vacuum hole of the chip pressure joint 200 to a preset depth. Other components of the assembly 30 will not come into contact with the die press head 200 .

As shown in Figures 6-10, the driving assembly includes a driving shaft 41 rotatably installed on the bracket 10 and an extension arm 411 provided on the side wall of the driving shaft 41. The ejector pin assembly 30 is provided with a driving Block 35, the driving block 35 is provided with a driving bearing portion 351; the driving block 35 is fixed between the ejection pin mounting block 31 and the back plate 12, and the driving block 35 is installed and fixed on the ejection pin. On the mounting block 31; the drive shaft 41 has an initial state and a pressed state:

In the initial state, the extension arm 411 extends above the drive bearing part 351; in the initial state, the position of the drive shaft rear 41 prevents the extension arm 411 from pressing down on the drive bearing part 351. ;

In the depressed state, the driving shaft 41 rotates and drives the extension arm 411 to swing. The end of the extension arm 411 away from the driving shaft 41 is against the driving bearing part 351 and presses down the driving bearing part 351. The driving bearing The portion 351 is pressed down and moves and drives the ejector pin assembly 30 to move downward.

The rotation of the drive shaft 41 realizes the swing of the extension arm 411 and controls the movement of the drive bearing part 351 when the extension arm 411 swings. The arrangement of the above structure facilitates the movement control of the ejector pin assembly 30 .

Further, in order to better control the ejector assembly 30, the extension arm 411 has a fixed end fixed on the drive shaft 41 and a free end opposite to the fixed end; There is a cam structure 412 protruding toward the drive bearing portion 351 .

In addition, the arrangement of the cam structure 412 makes the free end of the extension arm 411 tend to move toward the driving block bearing portion 351 , and the movement control of the driving block 35 can be easily realized during the swing of the driving shaft 41 . A cam structure is provided at the end of the extension arm 411 so that the The extension arm 411 will not cause damage to the surface of the driving bearing portion 351 during the pressing fit with the driving bearing portion 351 .

The driving block 35 is provided with an extension arm through hole 350. The drive bearing portion 351 is a bearing surface provided on the bottom wall of the extension arm through hole 350. The extension arm 411 extends within the extension arm through hole 350. , and the size of the extending arm through hole 350 in the vertical direction is consistent with the size of the cam structure 412 in the vertical direction.

The extension arm perforation 350 is provided to position the extension arm 411 perforation, so that the swing of the extension arm 411 and the driving block 35 can be synchronized conveniently, thereby realizing the synchronous movement of the extension arm 411 and the ejection pin assembly 30, and conveniently realizing the ejection pin assembly according to the The position of the ejection pin assembly 30 is determined by the position of the extension arm 411, thereby better controlling the ejection pin assembly 30 by the extension arm 411.

In this embodiment, the ejector pin assembly 30 is slidably installed on the back plate 12 along the vertical direction; in order to facilitate the installation of the drive shaft 41, the drive shaft 41 is rotatably installed on the back plate 12 away from the back plate 12. On one side of the ejector assembly 30, a connection hole 122 matching the extension arm 411 is formed on the back plate 12. After the drive shaft 41 is installed and positioned, the extension arm 411 passes through the connection hole 122. , and the driving shaft 41 is disposed at the middle position of the connecting hole 122 in the vertical direction.

The driving shaft 41 is disposed in the middle of the connecting hole 122 , and a space for swinging the extension arm 411 is formed between the driving shaft 41 and the bottom wall of the connecting hole 122 . Arranging the drive shaft 41 on the side of the back plate 12 away from the ejector assembly 30 can better realize the installation and fixation of the drive shaft 41 , facilitate the disassembly and maintenance of the drive shaft 41 , and effectively prevent the drive shaft 41 from being arranged on the ejector pin. Mutual interference occurs when components 30 are on the same side.

The bottom wall of the connecting hole 122 is formed with a hole for abutting the extension arm 411 to limit the The auxiliary stroke limiter 123 restricts the downward movement of the extension arm 411. The arrangement of the auxiliary stroke limiter 123 can limit the downward movement stroke of the entire ejector pin mechanism 30 by limiting the movement stroke of the extension arm 411, thereby effectively preventing the problem of ejector pin damage caused by excessive descent of the ejector pin mechanism 30.

As shown in Figure 11, the bracket 10 also has a mounting box 14 that is detachably mounted and fixed on the side of the back plate 12 away from the ejector assembly 30. The mounting box 14 is provided with a mounting box facing the back plate. A drive shaft positioning groove 141 with an opening of 12 and an extension arm relief groove 142 with an opening toward the back plate 12 are provided on the lower side of the drive shaft positioning groove 141 and connected with the drive shaft. The positioning grooves 141 are connected, the driving shaft 41 is set and positioned in the driving shaft positioning groove 141 by the cover, and the driving shaft 41 can rotate in the circumferential direction in the driving shaft positioning groove 141 .

The installation box 14 is provided and detachably installed and fixed on the back plate 12 to facilitate the maintenance and disassembly of the drive shaft 41 .

The driving assembly also has an operating rod 42 fixedly connected to the driving shaft 41 , and the operating rod 42 extends along the radial direction of the driving shaft 41 .

One end of the driving shaft 41 extends outside the bracket 10 and is formed with an operating lever mounting portion 413 . The operating lever 42 is detachably mounted and fixed on the operating lever mounting portion 413 .

The operating lever mounting portion 413 has a rectangular cross-section, and the operating lever 42 is provided with an operating lever positioning hole 421 that matches the operating lever mounting portion 413. The driving mechanism also has an operating lever locking mechanism 45, so The operating rod locking mechanism 45 is threadedly installed on the operating rod mounting portion 413 and locks the operating rod 42 on the operating rod mounting portion 413 .

The extension arm 411 extends along the radial direction of the drive shaft 41, and the extension The extending direction of the arm 411 intersects the extending direction of the operating lever 42. When the extending arm 411 extends in the horizontal direction, the extending direction of the operating lever 42 extends obliquely upward relative to the horizontal direction.

In practical applications, the predetermined chip pressure joint 200 is first fixed on the carrier component 20, and the first adjustment mechanism 21 and the second adjustment mechanism 22 are used to achieve precise positioning of the chip pressure joint 200, so that the predetermined vacuum hole is exactly Located at the lower end of the ejector pin 301; and then use the operating rod 42 to drive the ejector pin assembly 30 downward to complete the cleaning operation. The position of the ejector pin 301 can also be fine-tuned on site; repeat the operation, and the above steps can be completed one after another. Dredge and clean the vacuum hole of the chip crimping joint 200 .

The chip pressure joint vacuum hole cleaning device 100 can conveniently drive the ejector pin 301 of the ejector pin assembly 30 to move through the driving assembly to clean the vacuum hole of the chip pressure joint 200. The on-site operation is more convenient, is conducive to improving production efficiency, and effectively reduces the cost of the chip pressure joint. The risk of abnormal damage during the cleaning process of the chip press head 200 is eliminated to better meet production needs.

It should be understood that although this specification is described in terms of implementations, not each implementation only contains an independent technical solution. This description of the specification is only for the sake of clarity. Persons skilled in the art should take the specification as a whole and understand each individual solution. The technical solutions in the embodiments can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

The series of detailed descriptions listed above are only specific descriptions of feasible implementations of the present invention. They are not intended to limit the protection scope of the present invention. Any equivalent implementations or implementations that do not deviate from the technical spirit of the present invention are not intended to limit the protection scope of the present invention. All changes should be included in the protection scope of the present invention.

Claims

A vacuum hole cleaning device for chip crimping joints, characterized by: comprising a bracket, a bearing component for positioning the chip crimping joint, and an ejector pin assembly; the ejector pin assembly is slidably disposed on the bracket along the vertical direction and is located on the bearing the upper side of the component;

The ejector pin assembly includes an ejector pin installation block, an ejector pin, a positioning block that presses and fixes the ejector pin on the ejector pin installation block, and an ejector pin fine-tuning mechanism;

The ejector pin fine-adjustment mechanism includes a micro-adjustment member, an ejector support block and a positioning component for positioning the ejector pin on the ejector support block; the micro-adjustment member extends along the vertical direction and is threadedly connected to the ejector pin. On the mounting block; the micro-adjustment member cooperates with the ejector pin support block so that the ejector pin support block can move in the vertical direction when the micro-adjustment member is screwed.
The chip pressure joint vacuum hole cleaning device according to claim 1, characterized in that: the ejector pin support block is mounted on the micro-adjustment member to rotate along the circumferential direction of the micro-adjustment member, and the ejector pin support block is mounted on the micro-adjustment member. Set to limit movement along the axial direction of the fine adjustment member.
The chip pressure joint vacuum hole cleaning device according to claim 2, characterized in that: the micro-adjustment member is provided with a connection part for installing the ejector mounting block and axial limits provided on both upper and lower sides of the connection part. part; the ejector support block is provided with a support block mounting hole that matches the connection part; the ejector support block is sleeved outside the connection part and is vertically protected by axial limiting parts on both sides Limit.
The chip pressure joint vacuum hole cleaning device according to claim 1, characterized in that: the positioning assembly includes an ejector pin positioning groove and an ejector pin pressing member provided on the ejector pin support block, and the ejector pin pressing member is threadedly connected On the ejector pin support block, press and position the ejector pin in the pressing groove.
The chip pressure joint vacuum hole cleaning device according to claim 1, characterized in that: the ejector pin assembly also has a guide mechanism provided on the ejector pin mounting block, and the ejector pin mounting block is provided with a guide mechanism that is connected to the guide mechanism. The guide mechanism has a guide hole that matches the guide hole, and the guide mechanism can move up and down along the guide hole; the guide mechanism has a columnar structure and extends along the vertical direction, and the guide mechanism is connected to the guide hole. The fine adjustment components are arranged in parallel.
The chip pressure joint vacuum hole cleaning device according to claim 1, characterized in that: the front side of the ejection pin mounting block is provided with a positioning groove that opens toward the front side; the positioning block is detachably installed and fixed on the The ejector pin is installed on the block, and after the positioning block is locked and fixed, The positioning block presses and positions the ejector pin in the positioning groove.
The chip pressure joint vacuum hole cleaning device according to claim 6, characterized in that: the depth of the positioning groove is smaller than the diameter of the ejector pin, and after the ejector pin is positioned in the positioning groove, part of the ejector pin moves toward the opening of the positioning groove. A positioning groove protrudes in a direction, and the positioning block is provided with a contact portion that is opposite to and abuts against the positioning groove.
The chip pressure joint vacuum hole cleaning device according to claim 7, characterized in that: the ejection pin mounting block also has a rotation limiter protruding in the forward direction, and the rotation limiter is provided on the The ejector pin is mounted on the block and the rotation limiting portion is provided on the side of the positioning block and is used to abut with the positioning block to limit the rotation of the positioning block.
The chip pressure joint vacuum hole cleaning device according to claim 6, wherein the ejection pin mounting block includes a body part and a mounting part disposed on the front side of the body part and close to the bottom, and the mounting part extends from the The body part protrudes forward and forms; the positioning block is provided on the mounting part.
The chip pressure joint vacuum hole cleaning device according to claim 9, characterized in that: the bottom end of the positioning block is flush with the bottom end of the mounting part, and the size of the positioning block is the same as the size of the mounting part. suitable.