CN215896358U

CN215896358U - Thimble assembly and semiconductor process equipment

Info

Publication number: CN215896358U
Application number: CN202122324207.2U
Authority: CN
Inventors: 李岩; 鲁艳成; 茅兴飞
Original assignee: Beijing Naura Microelectronics Equipment Co Ltd
Current assignee: Beijing Naura Microelectronics Equipment Co Ltd
Priority date: 2021-09-24
Filing date: 2021-09-24
Publication date: 2022-02-22
Anticipated expiration: 2031-09-24

Abstract

The utility model discloses a thimble assembly and semiconductor process equipment, wherein the thimble assembly is applied to the semiconductor process equipment and used for moving a wafer, and comprises a guide connecting piece, an adjusting assembly and a lifting disc; the adjusting assembly comprises a threaded connecting piece and an adjusting bracket, the adjusting bracket is positioned below the lifting disc, and the threaded connecting piece is used for connecting the adjusting bracket and the lifting disc and also used for adjusting the distance between the adjusting bracket and the lifting disc; be provided with first screw hole on the lifting disk, be provided with the bar hole on the regulation support, the bar hole extends along the horizontal direction, threaded connection spare passes the bar hole with first screw hole threaded connection makes the regulation support can for the lifting disk moves along the horizontal direction, and then makes the regulation support with the direction connecting piece is connected or the phase separation. By means of the scheme, the problems that the ejector pin assembly is difficult to install and maintain and is easy to damage can be solved.

Description

Thimble assembly and semiconductor process equipment

Technical Field

The utility model relates to the technical field of semiconductor manufacturing, in particular to a thimble assembly and semiconductor process equipment.

Background

With the rapid development of science and technology, electronic products such as smart phones and tablet computers have become indispensable products in modern life. These electronic products include many semiconductor chips inside, and the main material for manufacturing the semiconductor chips is a wafer. The wafer needs to be etched with a circuit pattern, and the wafer is usually etched by using semiconductor processing equipment.

In the related art, the semiconductor cavity includes a thimble assembly and an electrostatic chuck, the electrostatic chuck is provided with a channel along a thickness direction of the electrostatic chuck, and a thimble in the thimble assembly moves in the channel, so that the lift is realized, and the wafer is driven to lift.

In the related art, the thimble assembly further includes a guide connecting member, an adjusting bracket, a lifting disc and a driving mechanism, the guide connecting member is connected with the adjusting bracket, the adjusting bracket is connected with the lifting disc through a bolt, the height of the adjusting bracket is adjusted through an adjusting bolt, and then the height of the thimble can be adjusted. The lifting disc is connected with the driving mechanism, the driving mechanism drives the lifting disc to move, and the lifting disc drives the adjusting support, the guide connecting piece and the ejector pin to move.

However, in the process of rotation of the guide connecting piece, each part of the guide connecting piece is easy to twist relatively, so that the guide connecting piece is easy to damage or the sealing property between each part is damaged, and the thimble assembly is difficult to install and maintain and easy to damage.

SUMMERY OF THE UTILITY MODEL

The utility model discloses a thimble assembly and semiconductor process equipment, and aims to solve the problem of poor safety of the semiconductor process equipment.

In order to solve the problems, the utility model adopts the following technical scheme:

a thimble assembly is applied to semiconductor process equipment and used for moving a wafer, and comprises a guide connecting piece, an adjusting assembly and a lifting disc;

the adjusting assembly comprises a threaded connecting piece and an adjusting bracket, the adjusting bracket is positioned below the lifting disc, and the threaded connecting piece is used for connecting the adjusting bracket and the lifting disc and also used for adjusting the distance between the adjusting bracket and the lifting disc;

be provided with first screw hole on the lifting disk, be provided with the bar hole on the regulation support, the bar hole extends along the horizontal direction, threaded connection spare passes the bar hole with first screw hole threaded connection makes the regulation support can for the lifting disk moves along the horizontal direction, and then makes the regulation support with the direction connecting piece is connected or the phase separation.

The semiconductor process equipment comprises the thimble assembly.

The technical scheme adopted by the utility model can achieve the following beneficial effects:

in the ejector pin assembly disclosed by the utility model, the adjusting bracket can move in the horizontal direction relative to the lifting disc. When the guide connecting piece is assembled with the adjusting support, the adjusting support can be moved to the position separated from the guide connecting piece, namely, the adjusting support is moved to the position where the interference with the guide connecting piece can not occur, so that the position of the guide connecting piece does not need to be adjusted during assembly. After the guide connecting piece is assembled in place, the adjusting bracket is moved so that the adjusting bracket is connected with the guide connecting piece. Compared with the scheme in the related art, the guide connecting piece does not need to rotate, so that the guide connecting piece is not easy to damage or cause the sealing damage among all the parts, and the installation and maintenance difficulty of the ejector pin assembly is greatly reduced.

Drawings

The accompanying drawings, which are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the utility model and not to limit the utility model. In the drawings:

fig. 1 to 4 are schematic structural views of parts of semiconductor processing equipment in the related art;

FIG. 5 is a schematic structural view of the ejector pin assembly according to the embodiment of the present invention when the guide connector is separated from the adjusting bracket;

FIG. 6 is a schematic structural view of a guiding connection member of the thimble assembly and an adjusting bracket according to an embodiment of the present disclosure;

FIG. 7 is a front view of a guide link and an adjustment bracket of the ejector pin assembly according to the present disclosure;

FIG. 8 is a side view of a guide link and an adjustment bracket of the spike assembly disclosed in the present embodiment of the utility model;

FIG. 9 is a front view of an adjustment bracket of the ejector pin assembly disclosed in accordance with an embodiment of the present invention;

FIG. 10 is a bottom view of an adjustment bracket of the ejector pin assembly in accordance with the disclosed embodiment of the present invention;

FIG. 11 is a schematic structural diagram of a portion of a guiding connector of a thimble assembly according to an embodiment of the present invention.

Description of reference numerals:

100-guide connecting piece, 101-groove, 110-insulating connecting piece, 111-first convex part, 112-second convex part, 120-guide rod, 210-adjusting bracket, 211-first connecting protrusion, 212 second connecting protrusion, 213-fixing section, 2131-second strip-shaped hole, 214-adjusting section, 2141-first strip-shaped hole, 2142-second threaded hole, 221-first threaded connecting piece, 222-second threaded connecting piece, 223-threaded adjusting piece,

300-lifting plate.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention will be clearly and completely described below with reference to the specific embodiments of the present invention and the accompanying drawings. It is to be understood that the described embodiments are merely exemplary of the utility model, and not restrictive of the full scope of the utility model. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

The technical solutions disclosed in the embodiments of the present invention are described in detail below with reference to the accompanying drawings.

In order to realize the connection between the guide connection member and the adjustment bracket, in the related art, a bar block 911 is disposed on a side of the guide connection member 910 away from the thimble, and the adjustment bracket 920 is disposed with a connection hole 921, at this time, when the guide connection member 910 is assembled with the adjustment bracket 920, the bar block 911 passes through the connection hole 921, and then the guide connection member 910 integrally rotates by 90 °, so that the bar block 911 and the connection hole 921 intersect with each other, so that the guide connection member 910 is clamped by the adjustment bracket 920, thereby realizing the connection between the guide connection member 910 and the adjustment bracket 920.

Fig. 1 is a schematic view illustrating that the bar-shaped block on the guide link is fitted into the coupling hole on the adjustment bracket, and at this time, the guide link 910 is not rotated yet, and the guide link 910 is not limited, and is easily separated from the adjustment bracket 920. It is therefore necessary to rotate the guide link as a whole by 90, i.e. to the position shown in fig. 2.

The guide connection 910 may include a flange, a bellows, a center shaft, a bellows housing, a guide sleeve, a guide rod, and an insulating connection. The part connected with the adjusting bracket 920 is an insulating connector, and the bar-shaped block 911 is disposed on the insulating connector. Fig. 3 is a schematic structural view of an insulated connector in the related art. Fig. 4 is a schematic structural view of an adjusting bracket in the related art. The structure of the guiding connecting member 910 is more, and in the rotating process of the guiding connecting member 910, each component is easily twisted, which easily causes the damage of the guiding connecting member or the damage of the sealing property between each component, and thus the safety of the semiconductor processing equipment is reduced.

In addition, when the guide link 910 is assembled, the extension direction of the bar-shaped block 911 needs to be adjusted to be parallel to the extension direction of the connection hole 921, so that the bar-shaped block 911 can pass through the connection hole 921, and the guide link 910 can be assembled in place. If the extending direction of the bar block 911 is not parallel to the extending direction of the connection hole 921, the bar block 911 interferes with the adjusting bracket 920, and the guide link 910 cannot be installed. Therefore, with the solutions in the related art, the angle of the guiding connection member 910 needs to be adjusted before assembly, which makes assembly difficult.

As shown in fig. 5 to 11, the embodiment of the present invention discloses a thimble assembly, which includes a guide link 100, an adjusting assembly, and a lifting plate 300.

The adjusting assembly comprises a threaded connector and an adjusting bracket 210, the adjusting bracket 210 is positioned below the lifting disc 300, and the threaded connector is used for connecting the adjusting bracket 210 and the lifting disc 300 and also used for adjusting the distance between the adjusting bracket 210 and the lifting disc 300.

The thimble assembly may further include a driving mechanism and a thimble, the driving mechanism is connected to the lifting plate 300, the adjusting bracket 210 is used for being connected to the guiding connector 100, and one end of the guiding connector 100 departing from the adjusting bracket 210 is connected to the thimble. At this time, the driving mechanism drives the lifting disc 300 to lift, and the lifting disc 300 drives the adjusting bracket 210, the guiding connecting piece 100 and the ejector pin to lift, thereby lifting the wafer. Therefore, the moving direction of the lifting plate 300 is parallel to the moving direction of the guide link 100, and both move in the vertical direction. The height of the thimble can be adjusted by adjusting the distance between the adjusting bracket 210 and the lifting plate 300.

Be provided with the screw hole on the lifting disk 300, adjust and be provided with the bar hole on the support 210, the bar hole extends along the horizontal direction, and threaded connection spare passes bar hole and first screw hole threaded connection to make and adjust support 210 and can follow the horizontal direction motion for lifting disk 300, and then make and adjust support 210 and be connected or the phase separation with direction connecting piece 100.

At this moment, the threaded connection piece and the strip-shaped hole can move relatively, so that the adjusting bracket 210 can move relative to the lifting disc 300 under the condition that the threaded connection piece is connected with the lifting disc 300 and the adjusting bracket 210, and the relative movement of the adjusting bracket 210 and the lifting disc 300 can be realized only by unscrewing the threaded connection piece without detaching the threaded connection piece.

In the embodiment disclosed in the present application, when the guide link 100 and the adjusting bracket 210 are assembled, the adjusting bracket 210 may be moved to a position separated from the guide link 100, that is, the adjusting bracket 210 may be moved to a position where it does not interfere with the guide link 100, so that the position of the guide link 100 does not need to be adjusted when the guide link is assembled. After the guide link 100 is assembled in place, the adjustment bracket 210 is moved to couple the adjustment bracket 210 with the guide link 100. Compared with the technical scheme in the related art, the guide connecting piece 100 does not need to rotate, so that the guide connecting piece 100 is not easy to damage or the sealing property between each part of the guide connecting piece is not easy to damage, and the installation and maintenance difficulty of the ejector pin assembly is greatly reduced.

In addition, in the solution of the present application, compared to the solution of the related art, the adjusting bracket 210 in the lower position is removed when the guide link 100 is assembled, and thus it is not necessary to adjust the angle of the bar block as in the related art, thereby making the assembly of the guide link 100 less difficult.

The scheme in the application does not need to adjust the angle of the bar-shaped block as in the related art, thereby facilitating the disassembly of the guide connecting piece 100 and improving the maintenance efficiency of the semiconductor process equipment. Meanwhile, the fault tolerance of each component in the guide connecting piece 100 can be improved, and the risk that the guide connecting piece 100 is separated from the adjusting bracket 210 due to inaccurate angle does not need to be worried about.

In the embodiment disclosed in this application, adjust the below that support 210 is located the lifter plate 300, first screw hole is seted up on the lifter plate 300, and the bar hole is seted up on adjusting support 210. At this moment, threaded connection spare wears to establish from below to the top, therefore during operating personnel mediation, also direct from the position adjustment of below can, need not to wind to the top, consequently make the regulation degree of difficulty less, it is more convenient to adjust.

In addition, after the threaded connector is unscrewed, the threaded connector does not need to move, and the driving adjusting bracket 210 only needs to move, so that the threads of the threaded connector are not easy to damage.

As shown in fig. 5 and 6, in another alternative, the number of the threaded connections may be two, respectively a first threaded connection 221 and a second threaded connection 222. The number of the bar holes may also be two, which are respectively the first bar hole 2141 and the second bar hole 2131.

The number of the first screw holes may be two, corresponding to the first screw connector 221 and the second screw connector 222, respectively. The two first threaded holes are respectively arranged opposite to the first strip-shaped hole 2141 and the second strip-shaped hole 2131.

The first strip holes 2141 and the second strip holes 2131 may be distributed at intervals along the moving direction of the adjusting bracket 210, the first strip holes 2141 are disposed near the guiding connection member 100, and the first threaded connection member 221 may pass through the first strip holes 2141 to be in threaded connection with one first threaded hole. Since the first bar hole 2141 is close to the guide link 100, the first screw hole opposite thereto is also close to the guide link 100. The second threaded connector 222 passes through the second strip-shaped hole 2131 to be in threaded connection with the other first threaded hole.

The adjusting bracket 210 further has a second threaded hole 2142, and the second threaded hole 2142 may be disposed between the first strip hole 2141 and the second strip hole 2131. The adjustment assembly may further include a threaded adjustment member 223, the threaded adjustment member 223 is threadedly coupled with the second threaded hole 2142, and one end of the threaded adjustment member 223 abuts against the lifting plate 300.

In the above embodiment, the first threaded connector 221 and the threaded adjuster 223 are close to one side of the guide connector 100, so that the thimble can be finely adjusted by lifting or lowering one side of the adjusting bracket 210 close to the guide connector 100.

In a specific operation process, since the second threaded connector 222 is located on a side of the adjusting bracket 210 facing away from the guide connector 100, the second threaded connector 222 functions to fix the adjusting bracket 210. When the height of the thimble is adjusted, the first screw connector 221 and the screw adjuster 223 are first unscrewed, so that there is an adjustable gap between the lifting plate 300 and the adjusting bracket 210.

When the thimble is lifted, the first threaded connecting piece 221 is screwed, and the lifting disc 300 is fixed, so that the first threaded connecting piece 221 can pull the end part of the adjusting bracket 210 to be lifted, so that the thimble is lifted, and then the threaded adjusting piece 223 is abutted against the lifting disc 300, so that the supporting and fixing effects can be achieved.

When the thimble is lowered, the screw adjusting member 223 is screwed, and since the lifting plate 300 is fixed, the screw adjusting member 223 moves downward against one end of the adjusting bracket 210, so that the thimble is lowered, and then the first screw connecting member 221 is screwed into place.

In addition, when the guide link 100 is assembled or disassembled, the first screw 221, the second screw 222 and the screw adjustment member 223 are all unscrewed, so that the adjustment bracket 210 is hung on the first screw 221 and the second screw 222, and at this time, the operator can move the adjustment bracket 210, and the screw adjustment member 223 moves together with the adjustment bracket 210.

Specifically, as shown in fig. 5, when the operator moves the adjusting bracket 210 to the right, the guide link 100 is separated from the adjusting bracket 210, and at this time, the first threaded link 221 is located at the leftmost side of the first slotted hole 2141, and the second threaded link 222 is located at the leftmost side of the second slotted hole 2131. As shown in fig. 6, when the operator moves the adjusting bracket 210 to the left, the guide connector 100 is connected to the adjusting bracket 210, and at this time, the first threaded connector 221 is located at the rightmost side of the first slotted hole 2141, and the second threaded connector 222 is located at the rightmost side of the second slotted hole 2131.

In the above scheme, through the mutual cooperation between the threaded connection spare, can realize the height fine setting of thimble to make the adjustment mode of thimble simple, reliable. In addition, the thimble assembly has fewer parts, so that the thimble assembly is simpler in structure.

In another alternative embodiment, the adjusting bracket 210 may include a fixing section 213 and an adjusting section 214 connected to each other, the second strip hole 2131 may be opened on the fixing section 213, and the first strip hole 2141 and the second threaded hole 2142 may both be opened on the adjusting section 214. The fixing segment 213 may abut against the lifting plate 300, and the adjusting segment 214 may have an adjusting gap with the lifting plate 300. An end of the adjusting section 214 facing away from the fixing section 213 can be connected to the guide link 100. The thickness of the fixing segment 213 may be greater than that of the adjusting segment 214. In this embodiment, the thickness of the fixing segment 213 is greater than that of the adjusting segment 214, that is, the thickness of the adjusting segment 214 is small, and the thickness of the fixing segment 213 is large, so that the adjusting segment 214 is more easily deformed, and the strength of the fixing segment 213 is better. Therefore, the connection strength between the fixing section 213 and the lifting plate 300 is better, the fixing section is not easy to break, and the adjusting section 214 is easier to deform, so that the height adjustment of the thimble is easier.

The present application discloses a specific structure of the adjusting bracket 210, but other structures are also possible, and the present application is not limited thereto. Specifically, the adjusting bracket 210 may be a bar-shaped structural member, and the extending direction of the bar-shaped structural member and the moving direction of the adjusting bracket 210 may be the same. This arrangement makes the structure of the adjusting bracket 210 more compact, and the adjusting bracket 210 extends only in the direction of its movement, and the dimensions in other directions can be set smaller, so that the structure of the adjusting bracket 210 is more compact.

Alternatively, the adjusting bracket 210 may have a rectangular parallelepiped structure, or may have other shapes, which is not limited herein.

In another alternative embodiment, the strip-shaped hole may be a counter bore structure, so that the threaded connector is not easily exposed and is not easily scratched or interfered with other components.

In the above embodiment, the thread adjusting member 223 can include a butterfly nut and a screw, the butterfly nut can be sleeved on the screw, one end of the screw abuts against the lifting disc 300, when the thread adjusting member 223 is unscrewed, the butterfly nut only needs to be unscrewed, and the butterfly nut is convenient for an operator to operate.

In the above embodiment, the adjusting bracket 210 and the guiding connecting piece 100 can be connected by a bolt, and at this time, when the adjusting bracket is assembled with the guiding connecting piece 100, the bolt needs to be screwed in place to connect the adjusting bracket 210 with the guiding connecting piece 100, so that the assembly of the guiding connecting piece 100 and the adjusting bracket 210 is complicated.

Based on this, in another alternative embodiment, the adjusting bracket 210 may have a coupling protrusion extending toward one end of the guide link 100, and the guide link 100 may be provided with a groove 101.

When the adjusting bracket 210 is connected with the guide link 100, at least a portion of the connecting protrusion may be located in the groove 101, so that the adjusting bracket 210 is in a limit fit with the guide link 100. Specifically, the adjustment bracket 210 and the guide link 100 may be in a limit fit in the vertical direction. The coupling protrusion may be located outside the groove 101 when the adjusting bracket 210 is separated from the guide link 100.

In this embodiment, when the adjusting bracket 210 is coupled to the guide link 100, the coupling protrusion is simply inserted into the groove 101. When the connection protrusion is separated, the connection protrusion is simply pulled out of the groove 101. Thus making the assembly of the guide link 100 with the adjusting bracket 210 simpler.

Further, the number of the connecting protrusions may be two, which are the first connecting protrusion 211 and the second connecting protrusion 212, respectively, and the first connecting protrusion 211 and the second connecting protrusion 212 may be opposite to each other and spaced apart from each other.

The side wall of the guide link 100 may be provided with first and

second protrusions

111 and 112 disposed along a circumferential direction thereof, and the first and

second protrusions

111 and 112 may be spaced apart and disposed opposite to each other. The first protrusion 111, the second protrusion 112, and the guide link 100 may cooperate to form the groove 101.

When the adjusting bracket 210 is coupled to the guide link 100, at least portions of the first coupling protrusion 211 and the second coupling protrusion 212 are located in the groove 101, and portions of the guide link 100 may be interposed between the first coupling protrusion 211 and the second coupling protrusion 212.

In this scheme, the first coupling protrusion 211 and the second coupling protrusion 212 are distributed at both ends, so that the applied force is more balanced, and thus the guide link 100 is not easily tilted. The nested connection structure in the above scheme makes the connection between the guiding connection piece 100 and the adjusting bracket 210 more stable and the detachment more convenient.

Further, when the adjusting bracket 210 is coupled to the guide link 100, the second protrusion 112 may be positioned below the first coupling protrusion 211 and the second coupling protrusion 212, and the second protrusion 112 may be a cylindrical structural member. Compared with the bar-shaped block in fig. 3, the second convex part 112 in the present application is easy to collide or interfere with other parts of the semiconductor processing equipment, while the second convex part 112 in the present application is a cylindrical structure, and the convex volume is small, so that the second convex part is not easy to interfere or collide with other parts of the semiconductor processing equipment, and the reliability of assembling the semiconductor processing equipment is higher.

When the semiconductor processing equipment is used for processing, the inside of the semiconductor processing equipment has a higher radio frequency voltage, so that the radio frequency voltage is easily transmitted to the base of the lower electrode of the semiconductor processing equipment through the guide connecting piece 100 and the adjusting bracket 210, and the lower electrode is broken down.

Based on this, in another alternative embodiment, the guide connector 100 may include a guide rod 120 and an insulating connector 110, one end of the guide rod 120 may be connected to the thimble, and the other end of the guide rod 120 may be connected to the insulating connector 110.

The adjusting bracket 210 is connected to or separated from the insulating connection member 110. At this time, the insulating connector 110 can isolate the guide rod 120 from the adjusting bracket 210, thereby isolating the transmission of radio frequency, and further improving the safety of the semiconductor process equipment.

The first protrusion 111 and the second protrusion 112 are disposed on the insulating connector 110.

Of course, the guide connector 100 is not limited to the guide rod 120 and the insulating connector 110, but may also include a flange, a bellows, a center shaft, a bellows housing, a guide sleeve, and the like. The specific connection of these components of the guide link 100 is well known in the art and is not limited herein.

Based on the thimble assembly of any one of the embodiments of the present invention, an embodiment of the present invention further discloses a semiconductor process equipment, and the disclosed semiconductor process equipment has the thimble assembly of any one of the embodiments.

The disclosed semiconductor processing apparatus also includes a chamber body, an electrostatic chuck, and an interface disk. The electrostatic chuck, the interface disc and the ejector pin assembly can be arranged in the cavity body, and the ejector pin of the ejector pin assembly moves in a channel formed by the electrostatic chuck and the interface disc. The flange of the pilot connector 100 is connected to the interface disk.

In the above embodiments of the present invention, the difference between the embodiments is mainly described, and different optimization features between the embodiments can be combined to form a better embodiment as long as they are not contradictory, and further description is omitted here in view of brevity of the text.

The above description is only an example of the present invention, and is not intended to limit the present invention. Various modifications and alterations to this invention will become apparent to those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the scope of the claims of the present invention.

Claims

1. A thimble assembly is applied to semiconductor process equipment and used for moving a wafer, and is characterized by comprising a guide connecting piece (100), an adjusting assembly and a lifting disc (300);

the adjusting assembly comprises a threaded connector and an adjusting bracket (210), the adjusting bracket (210) is positioned below the lifting disc (300), the threaded connector is used for connecting the adjusting bracket (210) and the lifting disc (300) and is also used for adjusting the distance between the adjusting bracket (210) and the lifting disc (300);

be provided with first screw hole on lifting disk (300), be provided with the bar hole on adjusting support (210), the bar hole extends along the horizontal direction, threaded connection spare passes the bar hole with first screw hole threaded connection makes adjust support (210) can for lifting disk (300) moves along the horizontal direction, and then makes adjust support (210) with direction connecting piece (100) are connected or the phase separation.

2. A spike assembly according to claim 1 wherein said threaded connectors are two in number, being a first threaded connector (221) and a second threaded connector (222) respectively,

the number of the strip-shaped holes is two, and the two strip-shaped holes are respectively a first strip-shaped hole (2141) and a second strip-shaped hole (2131);

the number of the first threaded holes is two, and the first threaded holes correspond to the first threaded connecting piece (221) and the second threaded connecting piece (222) respectively; the two first threaded holes are respectively arranged opposite to the first strip-shaped hole (2141) and the second strip-shaped hole;

the first strip-shaped hole (2141) and the second strip-shaped hole (2131) are distributed at intervals along the movement direction of the adjusting bracket (210), the first strip-shaped hole (2141) is arranged close to the guide connecting piece (100), the first threaded connecting piece (221) penetrates through the first strip-shaped hole (2141) to be in threaded connection with one first threaded hole, and the second threaded connecting piece (222) penetrates through the second strip-shaped hole (2131) to be in threaded connection with the other first threaded hole;

the adjusting bracket (210) is further provided with a second threaded hole (2142), the second threaded hole (2142) is formed between the first strip-shaped hole (2141) and the second strip-shaped hole (2131), the adjusting assembly further comprises a threaded adjusting piece (223), the threaded adjusting piece (223) is in threaded connection with the second threaded hole (2142), and one end of the threaded adjusting piece (223) abuts against the lifting disc (300).

3. The ejector pin assembly according to claim 2, wherein the adjusting bracket (210) comprises a fixing section (213) and an adjusting section (214) which are connected with each other, the second strip-shaped hole (2131) is provided in the fixing section (213), the first strip-shaped hole (2141) and the second threaded hole (2142) are both provided in the adjusting section (214), the fixing section (213) abuts against the lifting disc (300), an adjusting gap is provided between the adjusting section (214) and the lifting disc (300), one end of the adjusting section (214) departing from the fixing section (213) can be connected with the guide connecting member (100), and the thickness of the fixing section (213) is greater than that of the adjusting section (214).

4. The ejector pin assembly according to claim 1, wherein the adjusting bracket (210) is a bar-shaped structure, and the bar-shaped structure extends in the same direction as the moving direction of the adjusting bracket (210).

5. The ejector pin assembly of claim 1, wherein the strip-shaped hole is of a counter-sunk structure.

6. A thimble assembly according to claim 1, wherein said adjusting bracket (210) has a connecting protrusion extending towards an end of said guiding connector (100), said guiding connector (100) being provided with a groove (101);

when the adjusting bracket (210) is connected with the guide connecting piece (100), at least part of the connecting protrusion is positioned in the groove (101) so that the adjusting bracket (210) is in limit fit with the guide connecting piece (100);

when the adjusting bracket (210) is separated from the guide link (100), the coupling protrusion is located outside the groove (101).

7. A thimble assembly according to claim 6, wherein said connecting protrusions are two in number, and respectively comprise a first connecting protrusion (211) and a second connecting protrusion (212), said first connecting protrusion (211) and said second connecting protrusion (212) are opposite and spaced apart from each other;

the side wall of the guide connecting piece (100) is provided with a first convex part (111) and a second convex part (112) which are arranged along the circumferential direction of the guide connecting piece, the first convex part (111) and the second convex part (112) are arranged at intervals and oppositely, and the first convex part (111), the second convex part (112) and the guide connecting piece (100) are matched to form the groove (101);

when the adjusting bracket (210) is connected with the guide connecting piece (100), at least parts of the first connecting protrusion (211) and the second connecting protrusion (212) are positioned in the groove (101), and part of the guide connecting piece (100) is clamped between the first connecting protrusion (211) and the second connecting protrusion (212).

8. The needle assembly of claim 7, wherein when said adjusting bracket (210) is connected to said guide connector (100), said second protrusion (112) is located below said first connecting protrusion (211) and said second connecting protrusion (212), and said second protrusion (112) is a cylindrical structure.

9. The ejector pin assembly according to claim 1, wherein the guide connector (100) comprises a guide rod (120) and an insulating connector (110), one end of the guide rod (120) is connected with the ejector pin, and the other end of the guide rod (120) is connected with the insulating connector (110);

the adjusting bracket (210) is connected with or separated from the insulating connecting piece (110).

10. Semiconductor processing equipment comprising a lift pin assembly of any one of claims 1 to 9.