CN218860849U - Electrode device and coating equipment - Google Patents

Abstract

The utility model relates to an electrode assembly and coating equipment, coating equipment has vacuum cavity and connecting piece, the connecting piece is connected in vacuum cavity's outside, electrode assembly detachably installs in the connecting piece, electrode assembly includes the electrode pole, insulating part and at least one sealing member, the one end of electrode pole is used for being connected with the power, the other end stretches into inside vacuum cavity through the connecting piece, at least partial insulating part is located between electrode pole and the connecting piece, and the electrode pole passes through the insulating part and installs in the connecting piece, the sealing member is located between insulating part and the connecting piece, and/or, be located between insulating part and the electrode pole. The design is not only beneficial to improving the insulating property of the electrode rod, but also beneficial to improving the sealing property of the vacuum cavity and reducing the possibility that outside air enters the vacuum cavity, thereby being beneficial to improving the working stability of the coating equipment. And the electrode device is simple and convenient to maintain and replace and low in cost, and the service life of the electrode device is prolonged.

Description

Electrode device and coating equipment

Technical Field

The application relates to the technical field of vacuum coating equipment, in particular to an electrode device and coating equipment.

Background

With the development of the technology, bias potential is introduced into the vacuum chamber through the electrode in the coating equipment, however, the poor insulation performance and sealing performance of the existing electrode can affect the stability of the operation of the coating equipment.

SUMMERY OF THE UTILITY MODEL

The application provides an electrode device and coating equipment, which are used for solving the problem that the insulating property and the sealing property of an electrode are poor.

The embodiment of the application provides an electrode device for coating equipment, coating equipment has vacuum cavity and connecting piece, the connecting piece connect in vacuum cavity's outside, electrode device detachably install in the connecting piece, electrode device includes electrode rod, insulating portion and at least one sealing member, electrode rod's one end is used for being connected with the power, and the other end passes through the connecting piece stretches into inside the vacuum cavity, at least part the insulating portion is located electrode rod with between the connecting piece, just electrode rod passes through insulating portion install in the connecting piece, the sealing member is located insulating portion with between the connecting piece, and/or, be located insulating portion with between the electrode rod.

In a possible embodiment, the insulating part includes a first insulating member, the electrode rod includes an extending portion, the extending portion extends along a radial direction of the electrode rod, one end of the first insulating member abuts against the extending portion, the other end of the first insulating member abuts against the connecting member, and the first insulating member is provided with a first mounting groove along an axial direction thereof for mounting the sealing member.

In a possible embodiment, the electrode assembly includes two sealing members, the first insulating member has a first mounting groove formed at an end thereof close to the connecting member, the extending portion has a second mounting groove formed at an end thereof close to the first insulating member, the second mounting groove extends along an axial direction of the electrode rod, and the two sealing members are respectively located in the first mounting groove and the second mounting groove.

In a possible implementation manner, the first insulating member is provided with at least one avoiding groove along the radial direction of the first insulating member, the avoiding groove extends in the direction away from the electrode rod and is used for avoiding dust, and the size D of the avoiding groove along the axial direction of the first insulating member satisfies: d is more than or equal to 2mm and less than or equal to 6mm.

In a possible implementation manner, the first insulating member is provided with three avoidance grooves, the avoidance grooves are arranged along the circumferential direction of the first insulating member, and the avoidance grooves are arranged along the axial direction of the first insulating member.

In a possible embodiment, the insulating part includes a second insulating member, the second insulating member is connected to the connecting member, the second insulating member is located on one side of the electrode rod in the radial direction, the second insulating member includes a limiting part, the limiting part extends in the radial direction of the second insulating member, the electrode rod includes an extension part, and the extension part can cooperate with the limiting part to limit the position of the electrode rod.

In a possible embodiment, the second insulating member defines a mounting hole, the electrode device further includes a mounting member capable of being engaged with the mounting hole, and the second insulating member is connected to the connecting member through the mounting member.

In a possible embodiment, the electrode device comprises a plurality of said second insulating members and a plurality of said mounting members, said second insulating members being arranged along the circumference of the electrode rod, said second insulating members being connected to said connecting member by means of the corresponding mounting members.

In a possible embodiment, the electrode rod has a first mating end and a second mating end along the axial direction, the first mating end is used for being in threaded connection with the power source, the second mating end is provided with at least one mating hole, and the electrode rod is in threaded connection with the inside of the vacuum cavity through the mating hole.

The embodiment of the application also provides coating equipment which comprises a vacuum cavity and an electrode device, wherein a connecting piece is connected to the outer side of the vacuum cavity, the electrode device is any one of the electrode devices, and the electrode device is detachably arranged on the connecting piece.

The embodiment of the application provides an electrode assembly and coating equipment, coating equipment has vacuum cavity and connecting piece, the connecting piece is connected in vacuum cavity's outside, electrode assembly detachably installs in the connecting piece, electrode assembly includes the electrode pole, insulating part and at least one sealing member, the one end of electrode pole is used for being connected with the power, the other end stretches into inside vacuum cavity through the connecting piece, at least partial insulating part is located between electrode pole and the connecting piece, and the electrode pole passes through the insulating part and installs in the connecting piece, the sealing member is located between insulating part and the connecting piece, and/or, be located between insulating part and the electrode pole. The design is not only beneficial to improving the insulation effect between the electrode rod and the vacuum cavity, but also beneficial to prolonging the service life of the electrode device, simultaneously beneficial to improving the sealing property of the vacuum cavity, reducing the possibility that outside air enters the vacuum cavity, and further beneficial to improving the working stability of the coating equipment. In addition, the electrode device is detachably arranged on the connecting piece, and the electrode rod, the insulating part and the sealing piece are easy and convenient to maintain and replace, so that the maintenance cost of the electrode device is reduced, the service life of the electrode device is prolonged, and the electrode device can be conveniently reused.

It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the application.

Drawings

Fig. 1 is a schematic view of an electrode device according to an embodiment of the present disclosure;

fig. 2 is a schematic view of an electrode device in another view angle according to an embodiment of the present disclosure.

Reference numerals are as follows:

1-a connector;

2-an electrode rod;

21-an extension;

211-a second mounting groove;

22-a first mating end;

23-a second mating end;

231-mating holes;

3-an insulating part;

31-a first insulator;

311-a first mounting groove;

312-avoidance slot;

32-a second insulator;

321-a limiting part;

4-a seal;

5-mounting piece.

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the application and, together with the description, serve to explain the principles of the application.

Detailed Description

In order to better understand the technical solution of the present application, the following detailed description is made with reference to the accompanying drawings.

It should be understood that the embodiments described are only a few embodiments of the present application, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

The terminology used in the embodiments of the present application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. As used in the examples of this application and the appended claims, the singular forms "a", "an", and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.

It should be understood that the term "and/or" as used herein is merely a relationship that describes an associated object, meaning that three relationships may exist, e.g., a and/or B, may represent: a exists alone, A and B exist simultaneously, and B exists alone. In addition, the character "/" herein generally indicates that the former and latter related objects are in an "or" relationship.

It should be noted that the terms "upper", "lower", "left", "right", and the like used in the embodiments of the present application are described in terms of the angles shown in the drawings, and should not be construed as limiting the embodiments of the present application. In addition, in this context, it will also be understood that when an element is referred to as being "on" or "under" another element, it can be directly on "or" under "the other element or be indirectly on" or "under" the other element via an intermediate element.

As shown in fig. 1, the embodiment of the present application provides an electrode device, which is used for a coating apparatus, the coating apparatus has a vacuum chamber and a connecting member 1, the connecting member 1 is connected to the outside of the vacuum chamber, the electrode device is detachably mounted on the connecting member 1, the electrode device includes an electrode rod 2, an insulating portion 3 and at least one sealing member 4, one end of the electrode rod 2 is used for being connected to a power supply, the other end of the electrode rod extends into the vacuum chamber through the connecting member 1, at least a part of the insulating portion 3 is located between the electrode rod 2 and the connecting member 1, the electrode rod 2 is mounted on the connecting member 1 through the insulating portion 3, and the sealing member 4 is located between the insulating portion 3 and the connecting member 1, and/or located between the insulating portion 3 and the electrode rod 2.

In particular, the electrode arrangement may be a biased electrode arrangement. In the coating equipment, a bias potential can be introduced into the vacuum cavity through the electrode device, the outer side of the vacuum cavity is connected with the connecting piece 1, specifically, the connecting piece 1 can be a flange, and the connecting piece 1 can be made of stainless steel, aluminum alloy or copper. The connecting piece 1 can be welded on the outer side of the vacuum cavity, and the electrode device is detachably arranged on the connecting piece 1. Offer the hole with 1 butt joint of connecting piece on the outer wall of vacuum cavity, and the one end of electrode rod 2 can stretch into the hole through connecting piece 1 to enter into vacuum cavity's inside, electrode rod 2's the other end and external power source line are connected, thereby can realize introducing vacuum cavity's inside with the electric potential. Specifically, the electrode rod 2 may be made of copper or stainless steel. The electrode device is further provided with an insulating part 3 and a sealing part 4, the insulating part 3 and the sealing part 4 are both located on one side, far away from the vacuum cavity, of the connecting piece 1, the insulating part 3 can play an installation role in the electrode rod 2, and the electrode rod 2 can be detachably installed on the connecting piece 1 through the insulating part 3. Wherein, a part of the insulating part 3 can be positioned between the electrode rod 2 and the connecting piece 1, thereby being beneficial to realizing the insulation between the electrode rod 2 and the outer wall of the vacuum cavity. The sealing element 4 may be an O-ring, specifically, the number of the sealing elements 4 may be one or two, and the material of the sealing element 4 may be silicon rubber or fluorine rubber. In the axial direction of the electrode rod 2, a seal 4 can be arranged between the electrode rod 2 and the insulation 3 and/or between the insulation 3 and the connection piece 1. The seal 4 may act as a seal between the electrode rod 2 and the vacuum chamber, reducing the possibility of air entering the vacuum chamber.

In the prior art, an electrode in a coating device is generally a copper-ceramic brazing vacuum electrode, the cost of the electrode is high, the ceramic part of the electrode is easy to break in use, air leakage is caused, the service life of the electrode is short, the sealing performance and the insulating performance of the electrode are influenced, and therefore the use stability of the whole coating device is adversely affected. Meanwhile, the copper column and the ceramic part of the electrode are of an integrated structure, so that the electrode is inconvenient to separate for maintenance and repair, and the maintenance cost is high. On the other hand, the strength of the copper column in the prior art is not high, and the copper column is easy to bend and deform under the action of external force, which also causes the reduction of the service life of the electrode.

Compared with the prior art, the electrode device in the embodiment of the application is favorable for improving the insulation effect between the electrode rod 2 and the vacuum cavity by arranging the insulating part 3 and the sealing part 4, reducing the possibility of short circuit of the electrode device, and improving the stability of the electrode device. In addition, the electrode device is detachably arranged on the connecting piece 1, the maintenance and replacement operations of the electrode rod 2, the insulating part 3 and the sealing piece 4 are simple and convenient, and the electrode rod 2, the insulating part 3 and the sealing piece 4 can be operated in a targeted manner according to actual conditions, so that the maintenance cost of the electrode device is reduced, the service life of the electrode device is prolonged, and the electrode device can be reused conveniently. On the other hand, compare in the electrode copper post among the prior art, in this application embodiment, electrode rod 2's whole size can design great, and can adopt stainless steel's material to be favorable to improving electrode rod 2's structural strength, reduce electrode rod 2 bending deformation's possibility, further improved electrode device's life.

As shown in fig. 1, in a possible embodiment, the insulating part 3 includes a first insulating member 31, the electrode rod 2 includes an extending part 21, the extending part 21 extends along a radial direction of the electrode rod 2, one end of the first insulating member 31 abuts against the extending part 21, the other end abuts against the connecting member 1, and the first insulating member 31 is opened with a first mounting groove 311 along an axial direction thereof for mounting the sealing member 4.

The insulating portion 3 includes a first insulating member 31, specifically, the first insulating member 31 may be an insulating flange, and the material of the first insulating member 31 may be polytetrafluoroethylene (ptfe) or Polyetheretherketone (PEEK). The extension part 21 may be provided in the circumferential direction of the electrode rod 2, and the extension part 21 extends in the radial direction of the electrode rod 2. The first insulator 31 is located between the extension 21 and the connector 1, and abuts against the extension 21 and the connector 1. The first insulating member 31 is provided with a first mounting groove 311, specifically, the first mounting groove 311 may be an annular groove, that is, the first mounting groove 311 may be provided along the circumferential direction of the first insulating member 31. The number of the first mounting grooves 311 may be one or two, specifically, the first mounting groove 311 may be formed at one end of the first insulating member 31 close to the connecting member 1, or the first mounting grooves 311 may be formed at both sides of the first insulating member 31 in the axial direction thereof, and the number of the sealing members 4 may be set to correspond to the number of the first mounting grooves 311.

First insulating part 31 can play insulating effect between electrode rod 2 and connecting piece 1 to be favorable to improving the insulating effect between electrode rod 2 and the vacuum cavity outer wall, and then be favorable to improving the stability that electrode assembly used, reduce electrode assembly and take place the possibility of short circuit. Meanwhile, the first mounting groove 311 is formed, so that the mounting stability of the sealing element 4 is improved, and the possibility of falling off of the sealing element 4 is reduced. The sealing element 4 is favorable for improving the sealing property of the vacuum cavity and reducing the possibility of communication between the vacuum cavity and the outside, thereby being favorable for improving the working stability of the coating equipment.

As shown in fig. 1, in one possible embodiment, the electrode assembly includes two sealing members 4, a first mounting groove 311 is formed at one end of the first insulating member 31 close to the connecting member 1, a second mounting groove 211 is formed at one end of the extending portion 21 close to the first insulating member 31, the second mounting groove 211 extends along the axial direction of the electrode rod 2, and the two sealing members 4 are respectively disposed in the first mounting groove 311 and the second mounting groove 211.

The number of the sealing members 4 may be two, and two sealing members 4 are respectively disposed in the first and second mounting grooves 311 and 211, that is, two sealing members are respectively disposed at both sides of the first insulating member 31. The arrangement is favorable for further improving the sealing property between the electrode device and the vacuum cavity and reducing the possibility that outside air enters the vacuum cavity.

As shown in fig. 1, in a possible embodiment, the first insulating member 31 is provided with at least one avoiding groove 312 along a radial direction thereof, the avoiding groove 312 extends in a direction away from the electrode rod 2 for avoiding dust, and a dimension D of the avoiding groove 312 along an axial direction of the first insulating member 31 satisfies: d is more than or equal to 2mm and less than or equal to 6mm.

There will be certain clearance between first insulator 31 and the electrode rod 2, and can have some dusts in the environment of electrode device work, if the dust when piling up to a certain extent in the clearance, the dust can play the effect of conducting the circuit between first insulator 31 and electrode rod 2 to can reduce the stability of the insulating properties of first insulator 31, and then probably lead to the insulating effect between first insulator 31 and the electrode rod 2 to lose efficacy. The avoiding groove 312 can avoid dust, specifically, the width D of the avoiding groove 312 can be set to be 2mm or more and D or less than 6mm, and the number of the avoiding grooves 312 can be one, two or three. Because the avoiding groove 312 extends to the side far away from the electrode rod 2 along the radial direction of the first insulating part 31, the dust can enter the inside of the avoiding groove 312 in a difficult progress manner, that is, the avoiding groove 312 can perform an avoiding function on the dust.

Through setting up and dodging groove 312, be favorable to reducing the dust and pile up the possibility that leads to the insulating inefficacy of first insulating part 31 to be favorable to improving the stability of insulating properties of first insulating part 31, and be favorable to prolonging the life of first insulating part 31, reduce the possibility that first insulating part 31 damaged.

As shown in fig. 1, in one possible embodiment, the first insulating member 31 is opened with three avoiding grooves 312, the avoiding grooves 312 are arranged along the circumferential direction of the first insulating member 31, and the three avoiding grooves 312 are arranged along the axial direction of the first insulating member 31.

The avoidance groove 312 may be an annular groove, that is, the avoidance groove 312 is provided along the circumferential direction of the first insulating member 31. The first insulating member 31 may be formed with three avoiding grooves 312, and the three avoiding grooves 312 may be continuously formed along the axial direction of the first insulating member 31.

By forming the avoidance grooves 312, the possibility of the failure of the insulation performance of the first insulation member 31 caused by dust accumulation is further reduced, and the service life of the first insulation member 31 and the stability of the insulation performance are further improved.

As shown in fig. 1, in one possible embodiment, the insulating part 3 comprises a second insulating member 32, the second insulating member 32 is connected to the connecting member 1, the second insulating member 32 is located at one side of the electrode rod 2 in the radial direction, the second insulating member 32 comprises a limiting part 321, the limiting part 321 extends in the radial direction of the second insulating member 32, the electrode rod 2 comprises an extending part 21, and the extending part 21 can be matched with the limiting part 321 to limit the position of the electrode rod 2.

The insulating part 3 further includes a second insulating member 32, and specifically, the material of the second insulating member 32 may be teflon or polyetheretherketone. The second insulator 32 is located on one side of the electrode rod 2 in the radial direction, i.e. the second insulator 32 and the first insulator 31 have an included angle therebetween, and the second insulator 32 abuts against the extending portion 21 of the electrode rod 2. The second insulating member 32 includes a limiting portion 321, and the limiting portion 321 can be engaged with the extending portion 21, specifically, the limiting portion 321 can abut against the extending portion 21, thereby limiting the position of the electrode rod 2. When the electrode device is installed, the second insulating member 32 is connected to the connecting member 1, the extending portion 21 of the electrode rod 2 is located on one side of the limiting portion 321 close to the connecting member 1, and the first insulating member 31 is located between the extending portion 21 and the connecting member 1. Under the action of the limiting part 321, the electrode rod 2 can be limited and fastened, and the first insulating part 31 can be stabilized between the connecting part 1 and the extending part 21, that is, the second insulating part 32 also has a stabilizing effect on the first insulating part 31.

The second insulating member 32 may serve to insulate and mount the electrode rod 2. Wherein, second insulating part 32 includes spacing portion 321, through the cooperation between spacing portion 321 and the extension 21, is favorable to playing limiting displacement to electrode rod 2 to be favorable to improving electrode rod 2 installation stability, reduce the possibility that electrode rod 2 drops, simultaneously, because first insulating part 31 is located between extension 21 and the connecting piece 1, consequently, through the effect of spacing portion 321, also be favorable to improving the stability of first insulating part 31 installation.

In a possible embodiment, as shown in fig. 1, the second insulating member 32 is provided with a mounting hole, the electrode device further comprises a mounting member 5, the mounting member 5 can be matched with the mounting hole, and the second insulating member 32 is connected with the connecting member 1 through the mounting member 5.

Specifically, the mounting hole may be a threaded hole, the mounting member 5 may also be a bolt, and the material of the mounting member 5 may be copper or stainless steel. The mounting member 5 may be fitted with the mounting hole to mount the second insulator 32 to the connector 1. Can provide fastening force to electrode rod 2, first insulating part 31 after installed part 5 screws up, be favorable to improving spacing portion 321 and extension 21 complex stability to be favorable to improving the stability of electrode rod 2, the installation of first insulating part 31, reduce the possibility that the two drops, and then be favorable to improving the stability that electrode device used. Meanwhile, the second insulating member 32 serves as an insulation between the mounting member 5 and the electrode rod 2, thereby contributing to improvement of the working stability of the electrode assembly. On the other hand, the arrangement is also favorable for improving the mounting stability of the sealing element 4, thereby being favorable for improving the sealing effect of the electrode device and reducing the possibility that air enters the vacuum cavity.

As shown in fig. 1 and 2, in one possible embodiment, the electrode device comprises a plurality of second insulating members 32 and a plurality of mounting members 5, the second insulating members 32 being arranged along the circumference of the electrode rod 2, the second insulating members 32 being connected to the connecting member 1 by means of the corresponding mounting members 5.

Specifically, four second insulators 32 may be uniformly provided along the circumferential direction of the electrode rod 2, and the number of the mounting pieces 5 may correspond to the number of the second insulators 32. Through setting up a plurality of second insulating members 32 and installed part 5, can carry on spacingly to a plurality of positions of electrode pole 2 to be favorable to further improving the stability of electrode pole 2, sealing member 4 and the installation of first insulating member 31.

In a possible embodiment, as shown in figure 1, the electrode rod 2 has a first mating end 22 and a second mating end 23 in the axial direction, the first mating end 22 being adapted to be screwed to a power source, the second mating end 23 being provided with at least one mating hole 231, the electrode rod 2 being screwed to the inside of the vacuum chamber via the mating hole 231.

The first mating end 22 may be threadably connected with an external power cord. The vacuum cavity is internally provided with a corresponding connecting structure, the connecting structure can be matched with the matching hole 231, the matching hole 231 can also be a threaded hole, and the electrode rod 2 is in threaded connection with the connecting structure in the vacuum cavity through the matching hole 231. Specifically, the number of the fitting holes 231 may be one, two, or more.

The connection through the thread mode is beneficial to improving the connection stability between the electrode rod 2 and the power supply and between the electrode rod 2 and the vacuum cavity, thereby being beneficial to improving the use stability of the electrode device.

The embodiment of the application further provides coating equipment which comprises a vacuum cavity and an electrode device, wherein the connecting piece 1 is connected to the outer side of the vacuum cavity, the electrode device is the electrode device in any one of the vacuum cavity and the electrode device is detachably mounted on the connecting piece 1.

Specifically, the coating apparatus may be a continuous vacuum coating apparatus, such as a perovskite solar cell continuous line coating apparatus, a liquid crystal display continuous line coating apparatus, a CIGS continuous line coating apparatus, or the like.

The embodiment of the application provides an electrode device and coating equipment, coating equipment has vacuum cavity and connecting piece 1, connecting piece 1 is connected in vacuum cavity's outside, electrode device detachably installs in connecting piece 1, electrode device includes electrode rod 2, insulating part 3 and at least one sealing member 4, the one end of electrode rod 2 is used for being connected with the power, the other end stretches into inside vacuum cavity through connecting piece 1, at least partial insulating part 3 is located between electrode rod 2 and connecting piece 1, and electrode rod 2 installs in connecting piece 1 through insulating part 3, sealing member 4 is located between insulating part 3 and connecting piece 1, and/or, be located between insulating part 3 and electrode rod 2. The design is not only beneficial to improving the insulation effect between the electrode rod 2 and the vacuum cavity, and the stability of the electrode device in use, but also beneficial to improving the sealing performance between the electrode device and the vacuum cavity, reducing the possibility that outside air enters the vacuum cavity, and further beneficial to improving the working stability of the coating equipment. In addition, the electrode device is detachably arranged on the connecting piece 1, and the electrode rod 2, the insulating part 3 and the sealing piece 4 are easy and convenient to maintain and replace, so that the maintenance cost of the electrode device is reduced, the service life of the electrode device is prolonged, and the electrode device can be reused conveniently.

The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made to the present application by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims (10)

1. An electrode device for a coating apparatus having a vacuum chamber and a connecting member (1), the connecting member (1) being connected to the outside of the vacuum chamber, the electrode device being detachably mounted to the connecting member (1), the electrode device comprising:

one end of the electrode rod (2) is used for being connected with a power supply, and the other end of the electrode rod (2) extends into the vacuum cavity through the connecting piece (1);

the insulation part (3) is at least partially positioned between the electrode rod (2) and the connecting piece (1), and the electrode rod (2) is arranged on the connecting piece (1) through the insulation part (3);

at least one seal (4), the seal (4) being located between the insulation (3) and the connector (1) and/or between the insulation (3) and the electrode rod (2).

2. An electrode arrangement according to claim 1, characterized in that the insulation part (3) comprises a first insulation member (31), the electrode rod (2) comprises an extension part (21), the extension part (21) extends in the radial direction of the electrode rod (2), and the first insulation member (31) abuts with the extension part (21) at one end and with the connection member (1) at the other end;

the first insulating piece (31) is provided with a first mounting groove (311) along the axial direction of the first insulating piece, and the first mounting groove is used for mounting the sealing piece (4).

3. The electrode device according to claim 2, characterized in that the electrode device comprises two sealing elements (4), one end of the first insulating element (31) close to the connecting element (1) is provided with the first mounting groove (311), one end of the extension part (21) close to the first insulating element (31) is provided with the second mounting groove (211), and the second mounting groove (211) extends along the axial direction of the electrode rod (2);

the two sealing elements (4) are respectively positioned in the first mounting groove (311) and the second mounting groove (211).

4. The electrode device according to claim 2, wherein the first insulating member (31) is provided with at least one avoiding groove (312) along a radial direction thereof, and the avoiding groove (312) extends in a direction away from the electrode rod (2) and is used for avoiding dust;

a dimension D of the avoidance groove (312) in an axial direction of the first insulating member (31) satisfies: d is more than or equal to 2mm and less than or equal to 6mm.

5. The electrode device according to claim 4, wherein the first insulating member (31) is provided with three avoiding grooves (312), the avoiding grooves (312) are arranged along a circumferential direction of the first insulating member (31), and the three avoiding grooves (312) are arranged along an axial direction of the first insulating member (31).

6. The electrode device according to any one of claims 1 to 5, characterized in that the insulating part (3) comprises a second insulating member (32), the second insulating member (32) being connected to the connecting member (1), the second insulating member (32) being located on one side of the electrode rod (2) in the radial direction;

the second insulator (32) includes spacing portion (321), spacing portion (321) are followed the radial direction of second insulator (32) extends, electrode rod (2) include extension (21), extension (21) can with spacing portion (321) cooperation is in order to restrict the position of electrode rod (2).

7. The electrode device according to claim 6, characterized in that the second insulating member (32) is provided with a mounting hole, the electrode device further comprises a mounting member (5), the mounting member (5) can be matched with the mounting hole, and the second insulating member (32) is connected with the connecting member (1) through the mounting member (5).

8. An electrode arrangement according to claim 7, characterized in that the electrode arrangement comprises a plurality of said second insulating members (32) and a plurality of said mounting members (5), said second insulating members (32) being arranged along the circumference of the electrode rod (2), said second insulating members (32) being connected to the connecting member (1) by means of the corresponding mounting members (5).

9. An electrode device according to any one of claims 1 to 5, wherein the electrode rod (2) has a first mating end (22) and a second mating end (23) in the axial direction, the first mating end (22) being adapted to be screwed to the power source, the second mating end (23) being provided with at least one mating hole (231), the electrode rod (2) being screwed to the interior of the vacuum chamber through the mating hole (231).

10. A plating apparatus, characterized by comprising:

the vacuum cavity is connected with a connecting piece (1) at the outer side;

an electrode device as claimed in any one of claims 1 to 9, which is removably mounted to the connector (1).

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