WO2023185179A1 - Electronic device - Google Patents

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Publication number
WO2023185179A1
WO2023185179A1 PCT/CN2023/070076 CN2023070076W WO2023185179A1 WO 2023185179 A1 WO2023185179 A1 WO 2023185179A1 CN 2023070076 W CN2023070076 W CN 2023070076W WO 2023185179 A1 WO2023185179 A1 WO 2023185179A1
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Prior art keywords
glass
glass substrate
reflective
refractive index
micro
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PCT/CN2023/070076
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French (fr)
Chinese (zh)
Inventor
缪灯奎
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荣耀终端有限公司
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Publication of WO2023185179A1 publication Critical patent/WO2023185179A1/en

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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00Surface treatment of glass, not in the form of fibres or filaments, by etching
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11Anti-reflection coatings
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11Anti-reflection coatings
    • G02B1/113Anti-reflection coatings using inorganic layer materials only
    • G02B1/115Multilayers
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11Anti-reflection coatings
    • G02B1/118Anti-reflection coatings having sub-optical wavelength surface structures designed to provide an enhanced transmittance, e.g. moth-eye structures
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09FDISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements

Definitions

  • the present application relates to the technical field of electronic equipment, and in particular to an anti-reflective glass, its preparation method, a display screen of an electronic equipment, and an electronic equipment.
  • an AR film layer is formed on the glass substrate, which can reduce the reflectivity of the glass and increase the transmittance of the glass.
  • the AR film layer is generally thin and easily punctured, causing the glass to be easily scratched and visible scratches to the naked eye.
  • scratched will destroy the stress balance of the glass, resulting in a decrease in the impact resistance of the glass.
  • a dense high-hardness material coating can be plated on the surface of the glass substrate.
  • the dense high-hardness material coatings will generate repulsive forces and produce compressive stress, causing the glass substrate to The deformation of the material makes it unable to be used on larger-sized structures such as mobile phone covers, but can only be used on small-sized structures such as camera lenses and watch covers.
  • This application provides an anti-reflective glass, a preparation method thereof, a display screen of an electronic device, and an electronic device, which solves the problems of the anti-reflective glass being easily scratched, the impact resistance being reduced, and the glass substrate being easily deformed.
  • An anti-reflective glass including a glass substrate, the first surface of the glass substrate having a micro-nano structure; a first anti-reflective film layer superimposed on the first surface of the glass substrate, the first anti-reflective film is made of high The refractive index layer and the low refractive index layer are alternately superimposed.
  • a micro-nano structure is provided on the surface of the glass substrate.
  • the micro-nano structure is a surface structure of micron or nanometer size, which can ensure the dense accumulation of film atoms in short distances, improve the hardness of the film, thereby improving the scratch resistance of the coated glass surface.
  • the long-range undulating structure allows the film lamination stress to be released locally, reducing the stress deformation of the glass substrate. When stacking a thicker anti-reflection film layer, no large stress deformation will occur, so it can be used in electronics. In larger structures such as device displays. .
  • the micro-nano structure is composed of a plurality of micron-sized and/or nano-sized protrusions; or is composed of a plurality of micron-sized and/or nano-sized grooves or depressions.
  • the plurality of protrusions, grooves or depressions may be arranged irregularly or regularly, for example, in an array structure.
  • the height of the protrusions is 50-1000nm, the bottom size is 100-3000nm, and the spacing between adjacent protrusions is 100-1000nm.
  • the micro-nano structure is formed by multiple ravines or multiple depressions, the depth and length of the ravines and the distance between adjacent ravines also meet the above dimensions or relationships.
  • the thickness of the first anti-reflection film layer is 500-3000 nm.
  • a glass substrate with a micro-nano structure on the surface is superposed with an anti-reflection film layer with a thickness of more than 500 nm, it can reduce the stress of the film layer and the stress deformation of the glass substrate, making it applicable to large-size structures of more than 50 mm.
  • the material of the low refractive index layer is Al 2 O 3 ; and the material of the high refractive index layer is AlN or AlON.
  • Al 2 O 3 has a high hardness, with a Mohs hardness of about 9, which can further improve the scratch resistance of anti-reflective glass.
  • the Mohs hardness of the anti-reflective glass surface under a force of 500g is above 7.
  • the deformation amount is less than 0.20 mm when the thickness is 0.55 mm.
  • the Vickers hardness of the anti-reflective glass is above 1100HV.
  • the anti-reflection glass has a reflectivity of ⁇ 2% and a transmittance of >93% in the light wavelength region of 380 to 780 nm.
  • the embodiments of the present application also provide a method for preparing anti-reflective glass, which is characterized by including:
  • Step S1 forming a micro-nano structure on at least one surface of the glass substrate
  • Step S2 Superimpose a first anti-reflective film layer on the surface of the glass substrate with a micro-nano structure.
  • the first anti-reflective film is formed by alternately superposing a high refractive index layer and a low refractive index layer.
  • a micro-nano structure can be formed on at least one surface of the glass substrate through a metal mask method, a diamond flying knife, an acid etching method, etc., and a first anti-reflection layer can be superimposed on the surface of the glass substrate with a micro-nano structure using a vacuum deposition method. film layer.
  • Embodiments of the present application also provide an electronic device display screen and electronic device, including the anti-reflective glass described in the above technical solution or the anti-reflective glass prepared by the preparation method described in the above technical solution.
  • the above-mentioned anti-reflective glass has small stress deformation, low reflectivity, high transmittance, good scratch resistance and high hardness, and can be used as a display screen for electronic devices, such as small-sized displays such as watches or Large-size displays such as mobile phones.
  • the anti-reflective glass can be used as an outer screen of a display screen of an electronic device.
  • Electronic devices using the above-mentioned anti-reflective glass as a display screen will not cause glare under strong sunlight, making it easier for users to see the content displayed on the screen clearly and improving the product use experience.
  • electronic equipment display screens have good scratch resistance and are not prone to scratches visible to the naked eye. They do not affect the appearance of electronic equipment and do not reduce the impact resistance of glass.
  • Figure 1 is a schematic diagram of the stacked structure of AR coated glass
  • Figure 2 is a schematic diagram of the laminated structure of hard AR coated glass
  • Figure 3 is a schematic diagram of the laminated structure of the anti-reflective glass provided by the embodiment of the present application.
  • Figure 4 is a schematic diagram of the first micro-nano structure on the surface of the glass substrate provided by this application;
  • Figure 5 is a schematic diagram of the second micro-nano structure on the surface of the glass substrate provided by this application.
  • Figure 6 is a schematic diagram of the third micro-nano structure on the surface of the glass substrate provided by this application.
  • Figure 7 is a schematic diagram of the first alternating structure of the first anti-reflection film layer provided by this application.
  • Figure 8 is a schematic diagram of the second alternating structure of the first anti-reflection film layer provided by this application.
  • Figure 9 is a schematic diagram of the third alternating structure of the first anti-reflection film layer provided by this application.
  • Figure 10 is a schematic diagram of the preparation process of anti-reflective glass provided by the embodiment of the present application.
  • Figure 11 is a schematic flow chart of forming a surface micro-nano structure using a metal mask method according to an embodiment of the present application
  • Figure 12 is a scanning electron microscope photograph of the glass substrate prepared in Example 1 of the present invention.
  • Figure 13 is the CAV scanning result of the anti-reflective glass of Example 1 of the present application.
  • Figure 14 is a scanning electron microscope photograph of the glass substrate prepared in Example 2 of the present invention.
  • Figure 15 is the CAV scanning result of the anti-reflective glass of Example 2 of the present application.
  • Figure 16 is a schematic structural diagram of a mobile phone.
  • the cover is part of the display screen of the electronic device, and can also be called the outer screen of the display screen, and is used to protect the inner screen with the display function in the display screen.
  • high refractive index and low refractive index refer to the relative values of the refractive indexes to each other, for example, high refractive index > low refractive index.
  • high refractive index materials and low refractive index materials refer to the relative values of the refractive index of different materials.
  • the low refractive index is about 1.3 to 1.7 or 1.3 to 1.75
  • the low refractive index material includes a material with a refractive index of about 1.3 to 1.7 or 1.3 to 1.75
  • the high refractive index is about 1.7 to 2.5
  • High refractive index materials include materials with a refractive index of about 1.7 to 2.5.
  • the transmission of glass refers to the property of light passing through the glass, expressed as transmittance; the reflection of glass refers to the light blocked by the glass and reflected at a certain angle, expressed as reflectivity; the refractive index of glass It refers to the ratio of the propagation speed of light in vacuum to the propagation speed of light in glass.
  • the glass substrate refers to glass without anti-reflection treatment, including ordinary glass, tempered glass, etc., wherein tempered glass is chemically strengthened glass obtained by chemical strengthening treatment such as ion exchange of ordinary glass.
  • Glass is a light-dense medium with a refractive index of 1.54. In a strong light environment, about 4.2% of the reflected light from each surface is reflected into the human eye, causing glare and making it difficult for the eyes to see clearly the display content on the screen. Use of electronic products.
  • high refractive index materials high refractive index 1
  • low refractive index materials low refractive index 1
  • Figure 1 is a schematic diagram of the stacked structure of AR coated glass.
  • the reflectivity of the glass substrate is 8.4%, the reflectivity after double-sided coating is ⁇ 1%; when the transmittance of the glass substrate is 93%, the transmittance after double-sided coating is >98%; and the thickness of the film layer is generally less than 300nm, the deformation of the glass substrate caused by the stress of the film layer can be ignored, and it does not affect the application of glass in larger structures, such as being used as cover glass for mobile phones.
  • the film layer is thin and easily punctured, and the coated glass is more susceptible to scratches than the glass substrate.
  • a hard film layer can be inserted into the AR film layer to form a hard AR film layer. See Figure 2.
  • Figure 2 is a schematic diagram of the stacked structure of hard AR coated glass. Using high refractive index materials (high refractive index 1) and low refractive index materials (low refractive index 1), they are alternately stacked on the glass substrate (substrate) according to the optical film design, and a hard film layer is inserted as an anti-scratch layer to form Hard AR coated glass. On the one hand, the hard AR film layer can reduce the reflectivity of the glass.
  • the reflectance of the glass substrate is 8.4%
  • the reflectivity after double-sided coating is ⁇ 1%; on the other hand, it can increase the transmittance of the glass.
  • the transmittance of the glass substrate is 93%
  • the transmittance after double-sided coating is >98%; on the other hand, it can improve the scratch resistance of the glass.
  • the thickness of the hard film layer is generally 500-5000nm, making the thickness of the entire hard AR film layer greater than 800nm, and the glass substrate deformation caused by the stress of the film layer is large.
  • the 0.55mm thick tempered glass used as a mobile phone cover has a deformation ratio of 0.4mm, exceeding the standard tolerance of 0.2mm. This kind of glass cannot be used in larger-sized structures and can only be used in small-sized structures smaller than 50mm such as camera lenses and watch covers.
  • the anti-reflective glass includes: a glass substrate 1, the first surface of the glass substrate has a micro-nano structure 11; a first anti-reflective film layer 2 superimposed on the first surface of the glass substrate 1, the first anti-reflective film layer 2 is superimposed on the first surface of the glass substrate 1.
  • the reflective film layer is formed by alternately stacking high refractive index layers 21 and low refractive index layers 22 .
  • the glass substrate 1 only needs to have a high transmittance.
  • the transmittance of the glass substrate 1 is greater than or equal to 85% in a light wavelength region ranging from 380 to 780 nm. In other embodiments, the transmittance of the glass substrate 1 in the light wavelength range of 380 to 780 nm is greater than or equal to 90%, or even greater than or equal to 92%.
  • the reflectivity of the glass substrate 1 in the light wavelength region ranging from 380 to 780 nm is ⁇ 15%. In other embodiments, the reflectivity of the glass substrate 1 in the light wavelength region ranging from 380 to 780 nm is ⁇ 10%.
  • the glass substrate 1 may be ordinary glass, or may be tempered glass obtained by ion exchange treatment of ordinary glass.
  • a typical chemical composition of the glass substrate 1 includes SiO 2 , B 2 O 3 , Al 2 O 3 , alkali metal oxides and alkaline earth metal oxides.
  • the glass substrate 1 may also include other chemical compositions as needed. , such as rare earth oxides or other divalent metal oxides.
  • the tempered glass can be prepared according to the following method: preheat ordinary glass and then perform ion exchange treatment, and then sequentially pickle and alkali wash to obtain tempered glass.
  • the ion exchange treatment is specifically: treatment in an ion exchange treatment agent, the ion exchange agent includes KNO 3 , NaNO 3 , H 2 SiO 3 , La 2 O 3 and KOH, and the temperature of the ion exchange treatment is 435 to 445 °C, the time is 1.8 ⁇ 22h.
  • the ion exchanger includes 165-185 parts by mass of KNO 3 , 14-18 parts by mass of NaNO 3 , 3-5 parts by mass of H 2 SiO 3 , 0.05-0.15 parts by mass of La 2 O 3 and 4 to 8 parts by mass of KOH.
  • the tempered glass prepared by the above method has good strength and impact resistance and is not easily broken.
  • the thickness of the glass substrate 1 is 0.4mm ⁇ 0.7mm. In other embodiments, the thickness of the glass substrate 1 is 0.45mm ⁇ 0.65mm.
  • the surface of the glass substrate 1 has a micro-nano structure 11.
  • the micro-nano structure 11 is a surface structure of micron and/or nanometer size, which can ensure the dense accumulation of atoms in the short-range upper film layer, improve the hardness of the film layer, thereby improving the scratch resistance of the coated glass surface.
  • the long-range undulating structure allows the film lamination stress to be released locally, reducing the stress deformation of the glass substrate 1, and will not produce large stress deformation when stacking a thicker anti-reflection film layer, so it can be used In larger structures such as electronic device displays.
  • the surface of the glass substrate 1 has a plurality of micron and/or nanometer-sized protrusions, and the plurality of protrusions constitute a micro-nano structure on the surface of the glass substrate 1 .
  • Figure 4 is a schematic diagram of the first micro-nano structure on the surface of a glass substrate provided by this application.
  • the bottom size of the protrusion 41 is larger than the top size, and may be truncated cone-shaped, pyramid-shaped or steamed bun-shaped. In other embodiments, the bottom size of the protrusion is the same as the top size, and may be rectangular, cylindrical, etc.
  • the height of the protrusions is 50 to 1000 nm.
  • the protrusions are The height can be 100 ⁇ 800nm, or it can be 150 ⁇ 700nm, or it can be 200 ⁇ 600nm, or it can be 250 ⁇ 500nm, or it can be 300 ⁇ 400nm. In one embodiment, the bottom size of the protrusions is 100 to 3000 nm.
  • the protrusions are The bottom size can be 150 ⁇ 2000nm, or it can be 200 ⁇ 1500nm, or it can be 250 ⁇ 1000nm, or it can be 300 ⁇ 800nm, or it can be 350 ⁇ 500nm. In one embodiment, the spacing between adjacent protrusions is 100 to 1000 nm.
  • adjacent protrusions are The spacing between the protrusions may be 150-800 nm, or may be 200-600 nm, or may be 250-500 nm, or may be 300-400 nm.
  • the plurality of protrusions can be arranged irregularly and dispersed on the surface of the glass substrate.
  • the plurality of protrusions may be arranged in a regular manner, for example, in an array, that is, the plurality of protrusions are arranged in an array or a quasi-array arrangement.
  • Using multiple protrusions as micro-nano structures on the surface of the glass substrate makes it easier to form regular structures, such as array structures, which is beneficial to the release of stress in the film layer and reduces the stress deformation of the glass substrate.
  • the glass substrate 1 with a micro-nano structure on the surface has high gloss and transmittance.
  • the glass substrate 1 with a micro-nano structure on the surface has a transmittance of greater than or equal to 380 nm in the light wavelength range of 380 to 780 nm. 85% is even greater than or equal to 90%, or greater than or equal to 92%.
  • the glossiness of the glass substrate 1 with micro-nano structures on the surface is greater than 85, or even greater than 90.
  • the surface of the glass substrate 1 has a plurality of micron and/or nanometer-sized grooves, and the plurality of grooves constitute a micro-nano structure on the surface of the glass substrate 1 .
  • Figure 5 is a schematic diagram of the second micro-nano structure on the surface of the glass substrate provided by this application.
  • the bottom size of the gully 51 is smaller than the top size, that is, its cross-section may be inverted truncated cone shape, inverted pyramid shape or inverted steamed bun shape.
  • the bottom size of the gully is the same as the top size, and its cross-section is rectangular, cylindrical, etc.
  • the depth of the groove is 50-1000 nm.
  • the depth of the groove is It can be 100 ⁇ 800nm, or it can be 150 ⁇ 700nm, or it can be 200 ⁇ 600nm, or it can be 250 ⁇ 500nm, or it can be 300 ⁇ 400nm. In one embodiment, the length of the groove is 100-3000 nm.
  • the length of the groove is It can be 150-2000nm, or it can be 200-1500nm, or it can be 250-1000nm, or it can be 300-800nm, or it can be 350-500nm.
  • the width of the groove top is 100-3000 nm.
  • the width of the groove top is The width can be 150 ⁇ 2000nm, or it can be 200 ⁇ 1500nm, or it can be 250 ⁇ 1000nm, or it can be 300 ⁇ 800nm, or it can be 350 ⁇ 500nm. In one embodiment, the distance between adjacent grooves is 100 to 1000 nm.
  • the adjacent grooves are The spacing between them can be 150 ⁇ 800nm, or it can be 200 ⁇ 600nm, or it can be 250 ⁇ 500nm, or it can be 300 ⁇ 400nm.
  • the plurality of grooves can be arranged irregularly and dispersed on the surface of the glass substrate.
  • the plurality of ravines may be arranged in a regular manner, for example, in a staggered manner or in an array.
  • Using multiple grooves as the surface micro-nano structure of the glass substrate can be formed in more diverse ways, such as using acid treatment to obtain multiple irregular grooves, or using a diamond flying knife to obtain regular grooves, etc.
  • the surface of the glass substrate 1 has a plurality of micron and/or nanometer-sized depressions, and the plurality of depressions constitute a micro-nano structure on the surface of the glass substrate 1 .
  • Figure 6 is a schematic diagram of the third micro-nano structure on the surface of the glass substrate provided by the present application.
  • the bottom size of the depression 61 is smaller than the top size, and may be in the shape of an inverted cone, an inverted pyramid or an inverted steamed bun. In other embodiments, the bottom size of the depression is the same as the top size, and may be rectangular, cylindrical, etc. In one embodiment, the depth of the recess is 50-1000 nm.
  • the depth of the recess is It can be 100 ⁇ 800nm, or it can be 150 ⁇ 700nm, or it can be 200 ⁇ 600nm, or it can be 250 ⁇ 500nm, or it can be 300 ⁇ 400nm.
  • the top size of the recess is 100 to 3000 nm. In other embodiments, in order to avoid affecting the optical performance of the anti-reflective glass, such as not increasing its reflectivity and not reducing its transmittance, the recessed top size is 100 to 3000 nm.
  • the top size can be 150-2000nm, or it can be 200-1500nm, or it can be 250-1000nm, or it can be 300-800nm, or it can be 350-500nm.
  • the spacing between adjacent recesses is 100 to 1000 nm.
  • the adjacent recesses are The spacing between them can be 150 ⁇ 800nm, or it can be 200 ⁇ 600nm, or it can be 250 ⁇ 500nm, or it can be 300 ⁇ 400nm.
  • the plurality of depressions can be arranged irregularly and dispersed on the surface of the glass substrate. In other embodiments, the plurality of depressions may be arranged regularly, for example, in an array. Using multiple depressions as the surface micro-nano structure of the glass substrate is beneficial to retaining the surface structure of the glass substrate, such as retaining the ion exchange layer on the surface of the tempered glass substrate, so that the glass substrate maintains good mechanical properties.
  • micro-nano structure on the surface of the glass substrate 1 can be obtained through surface processing methods well known to those skilled in the art such as metal masks, diamond flying knives, acid etching, etc. This application has no special restrictions on this.
  • a typical process of using a metal mask to obtain surface micro-nano structures is as follows: a metal film, such as an indium film, is coated on a glass substrate, and then heated to shrink the metal film, and the remaining metal film is deplated after plasma etching, i.e. Glass substrates with micro-nano structures on the surface can be obtained.
  • a metal film such as an indium film
  • a typical process of using a diamond flying knife to obtain surface micro-nano structures is: placing the glass substrate on the workbench, using a diamond tool to fly-cut it to form a micro-groove structure array, prism matrix, micro-structure linear layer and other surfaces. structure.
  • a typical process of using acid etching to obtain surface micro-nano structures is: soaking the glass substrate in a mixture of hydrofluoric acid and sulfuric acid for 5 to 30 minutes, cleaning and drying.
  • the anti-reflective glass also includes a first anti-reflective film layer 2 superimposed on the surface of the glass substrate 1.
  • the first anti-reflective film layer 2 is formed by alternately superposing a high refractive index layer 21 and a low refractive index layer 22, which can reduce the reflectivity of the glass. , increase the transmittance of glass.
  • the thickness of the first anti-reflection film layer 2 is 500-3000 nm. In other embodiments, the thickness of the first anti-reflection film layer 2 may be 600-2500 nm, or may be 700-2000 nm, or may be It is 800 ⁇ 1500nm, or it can be 900 ⁇ 1200nm.
  • the period of alternating superposition of the high refractive index layer 21 and the low refractive index layer 22 and the thickness of each layer can be designed according to the optical requirements through film layer design software, such as TFC, Macleod, etc.
  • film layer design software such as TFC, Macleod, etc.
  • the period in which the high refractive index layer 21 and the low refractive index layer 22 are alternately superposed may be an integer number of periods or a non-integer number of periods.
  • the stacked structure of the first anti-reflection film layer 2 can be: high refractive index layer 21/low refractive index layer 22/high refractive index layer 21/low refractive index layer 22.../high refractive index layer 21/low refractive index Index layer 22/high refractive index layer 21/low refractive index layer 22, as shown in Figure 7; it can also be: high refractive index layer 21/low refractive index layer 22/high refractive index layer 21/low refractive index layer 22...
  • the materials of each high refractive index layer in the first anti-reflection film layer 2 are the same, and the materials of each low refractive index layer are the same. In other embodiments, the materials of each high refractive index layer in the first anti-reflection film layer 2 are the same, and the materials of each low refractive index layer are different; or, the materials of each high refractive index layer in the first anti-reflection film layer 2 are different. , the materials of each low refractive index layer are the same; or, the materials of each high refractive index layer in the first anti-reflection film layer 2 are different, and the materials of each low refractive index layer are also different.
  • the refractive index of the high refractive index layer material is 1.9-2.3; the refractive index of the low refractive index layer material is 1.6-1.8.
  • the materials of the high refractive index layer include but are not limited to Nb 2 O 5 , TiO 2 , Ta 2 O 5 , Si 3 N 4 , ZrO 2 , AlN or AlON; the materials of the low refractive index layer include But it is not limited to SiO 2 , MgF 2 or Al 2 O 3 .
  • the material of the low refractive index layer is Al 2 O 3 ; the material of the high refractive index layer is AlN or AlON.
  • the hardness of Al 2 O 3 is relatively high, Mohs. The hardness is about 9, which can improve the scratch resistance of glass.
  • the first anti-reflection film layer 2 has Al 2 O 3 /AlN/Al 2 O 3 /AlN/Al 2 O 3 /AlN/ Al 2 O 3 /AlN/Al 2 O 3 or Al 2 O 3 /AlN/Al 2 O 3 /AlN/Al 2 O 3 /AlN/Al 2 O 3 /AlN/Al 2 O 3 /AlN/Al 2 O 3 /AlN/Al 2 O 3 /AlN/Al 2 O 3 stacked structure, which makes the obtained anti-reflection Glass has low reflectivity, high transmittance, good scratch resistance and high hardness.
  • the first anti-reflection film layer 2 has SiO 2 /Nb 2 O 5 /SiO 2 /Nb 2 O 5 /SiO 2 /Nb 2 O 5 /SiO 2 / Nb 2 O 5 /SiO 2 /Si 3 N 4 laminate structure, this structure makes the anti-reflection glass have lower reflectivity, higher hardness and good friction resistance.
  • the anti-reflective glass is single-sided coated glass, that is, the first surface of the glass substrate 1 is superimposed with the first anti-reflective film layer 2 .
  • the anti-reflective glass may be double-sided coated glass, that is, a first anti-reflective film layer is superimposed on the first surface of the glass substrate 1 and a second anti-reflective film layer is superimposed on the second surface corresponding to the first surface. Reflective coating layer, double-sided coated glass has lower reflectivity and higher transmittance.
  • the second anti-reflective film layer and the first anti-reflective film layer may be the same or different; when the second anti-reflective film layer is different from the first anti-reflective film layer, the second anti-reflective film layer
  • the arrangement of the layers refers to the arrangement of the first anti-reflection film layer above, which will not be described again in this application.
  • the anti-reflective glass is tested with a haze meter or gloss meter, and its glossiness is greater than 85. In some possible embodiments, the glossiness of the anti-reflective glass is greater than 88, which is more conducive to obtaining higher transmittance and lower reflectivity.
  • the anti-reflective glass is tested by Vickers indentation hardness, with an indentation depth less than or equal to about 100 nm measured on the surface and a hardness greater than or equal to about 1100 HV. In one embodiment, the anti-reflective glass has a Vickers hardness greater than 1150 HV.
  • the surface hardness of the anti-reflective glass is tested with a Mohs hardness pen. Under a force of 500g, a Mohs hardness pen with a Mohs hardness of 7 scratches the glass surface, and no scratches are visible to the naked eye under 800lux light.
  • the optical properties of the anti-reflection glass are tested with a spectrophotometer.
  • the reflectance of the single-sided coating in the light wavelength range of 380 to 780 nm is ⁇ 2%, and the transmittance of the single-sided coating is >93%; the light wavelength of 940nm is transparent. Rate>92%.
  • a colorimeter is used to test the anti-reflective glass, and its reflection color value a value is ⁇ 2 , b value ⁇ 2, transmitted color value a value ⁇ 1, b value ⁇ 1.
  • a 10Kg force is applied on a marble surface with a surface roughness of 5.6um and a 5*5cm anti-reflective glass with a stroke of 10cm and a back and forth cycle. After 40 cycles of friction, there are no visible scratches under 800lux light.
  • the glass deformation amount is less than 0.20 mm using a glass profile test (CAV scan) for anti-reflective glass. In some embodiments, the deformation of the anti-reflective glass is less than 0.1 mm.
  • the first anti-reflection film layer 2 can be sequentially coated on the glass substrate 1 by magnetron sputtering.
  • the coating parameters can be selected according to the film layer system. There are no special restrictions in this application.
  • the embodiments of the present application also provide a method for preparing the above-mentioned anti-reflective glass, the schematic flow diagram of which is shown in Figure 10, including the following steps:
  • Step S1 forming a micro-nano structure on at least one surface of the glass substrate
  • Step S2 Superimpose the first anti-reflection film layer on the surface of the glass substrate with micro-nano structure.
  • a micro-nano structure is formed on at least one surface of the glass substrate. Specifically, it can be obtained by surface processing methods well known to those skilled in the art such as metal mask, diamond flying knife, acid etching, etc., and micro grooves are formed on the surface of the glass substrate. Micro-nano structures such as groove structure arrays, prism matrices, microstructure linear layers, and protrusions distributed in arrays.
  • a metal mask can be used to obtain a micro-nano structure.
  • the flow diagram is shown in Figure 11, which includes the following steps:
  • Step S11 forming a metal film on at least one surface of the glass substrate
  • Step S12 Process the metal film to form metal nanoparticles
  • Step S13 Perform plasma etching on the glass obtained in step S12 to construct a nanoprotrusion array structure on the glass surface;
  • Step S14 Strip the metal on the glass surface obtained in step S13.
  • a metal indium film is first formed on at least one surface of the glass substrate by vacuum sputtering or other methods, and then is treated, such as heat treatment, to cause the metal indium film to heat shrink to form a similar shape.
  • the nanoparticles are arranged in an array, and then the glass substrate is plasma etched.
  • the surface of the glass substrate covered with indium nanoparticles will not be etched, and the surface of the glass substrate not covered with indium nanoparticles will be etched, thereby forming a convex surface.
  • Surface structure after deplating indium nanoparticles, a glass substrate with a micro-nano structure can be obtained, and the surface has protrusions arranged in a similar array.
  • the embodiments of the present application have no special restrictions on the parameters for forming the metal indium film by vacuum sputtering, and those skilled in the art can select them according to needs.
  • the thickness of the metal indium film is 3 to 8 nm.
  • the indium film After the indium film is formed, it is heat treated to form indium nanoparticles.
  • the embodiments of the present application have no special restrictions on the parameters of the heat treatment. Those skilled in the art can choose according to needs. For example, the heating rate of the heat treatment is 15-25°C/min, heating to 100-200°C, and keeping the temperature for 5-10 minutes. . In order not to affect the optical properties of the final product, the indium nanoparticles are evenly distributed and have a diameter of 50 to 70nm.
  • plasma etching is to etch the surface of the glass substrate that is not covered by the indium nanoparticles, so that the surface of the glass substrate covered by the indium nanoparticles forms protrusions.
  • the embodiments of the present application have no special restrictions on the parameters of the plasma etching. Those skilled in the art can set the parameters according to the expected size of the bumps, control the etching thickness, and obtain bumps that do not affect the optical performance of the final product.
  • the indium nanoparticles on the surface of the glass substrate are removed, for example, by deplating, and a glass substrate with a micro-nano structure on the surface can be obtained.
  • part of the metal indium film may not be thermally shrunk to form nanoparticles, but may exist in the form of a residual metal indium layer.
  • the surface of the glass substrate covered with the metallic indium layer and the surface of the glass substrate covered with indium nanoparticles will undergo the same changes, and finally a glass substrate with a micro-nano structure on the surface will be obtained.
  • an anti-reflective film is superimposed on the surface to obtain anti-reflective glass.
  • Embodiments of the present application can form an anti-reflective film on the surface of a glass substrate through deposition, such as vacuum deposition, including chemical vapor deposition, physical vapor deposition, thermal deposition, electron beam evaporation deposition or atomic layer deposition, etc., or through the use of liquid-based Methods such as spray coating, dip coating, spin coating or slit coating (for example, using sol-gel materials), etc.
  • the coating parameters of the AlN layer can be: sputtering power of the aluminum target: 7000 ⁇ 8000W, Ar flow: 100 ⁇ 150sccm, N2 flow: 100 ⁇ 120sccm, and RadicalSource power: 4000 ⁇ 5000W.
  • the coating parameters of the Al 2 O 3 layer can be: sputtering power of the aluminum target: 7500 ⁇ 8500W, Ar flow: 200 ⁇ 300sccm, O2 flow: 100 ⁇ 150sccm; RadicalSource power: 4000 ⁇ 5000W.
  • the anti-reflective glass provided by this application sets a micro-nano structure on the surface of the glass substrate and then superimposes the first anti-reflective film layer. On the one hand, it can ensure the dense accumulation of atoms in the short-range upper film layer and improve the scratch resistance of the coated glass surface. On the other hand, The long-range undulating structure allows the film lamination stress to be released locally and reduces the stress deformation of the glass substrate.
  • a thicker hard anti-reflection film layer such as a thickness of more than 500nm, can be superimposed on the glass substrate to reduce the reflectivity of the glass, increase the scratch resistance of the glass, and at the same time reduce the stress deformation of the glass substrate.
  • a thicker hard anti-reflection film layer such as a thickness of more than 500nm
  • It can be used in small-sized structures ⁇ 50mm such as camera lenses and watch covers, and can also be used in larger-sized structures such as electronic equipment covers.
  • the material of the low refractive index layer in the first anti-reflection film layer can be Al 2 O 3 with higher hardness, which further increases the hardness of the anti-reflection film layer, thereby improving the scratch resistance of the anti-reflection glass.
  • the anti-reflective glass provided by this application has low reflectivity, good scratch resistance and small stress deformation. It can not only be used in small-sized structures ⁇ 50mm such as camera lenses and watch covers, but can also be used in In larger structures such as electronic equipment covers.
  • the anti-reflective glass provided by this application can be used as a cover for electronic equipment. It will not cause glare under strong sunlight, making it easier for users to see the content displayed on the screen clearly, and improving the user experience of the product.
  • the electronic equipment cover has good scratch resistance and is not prone to visible scratches. It does not affect the appearance of the electronic equipment and does not reduce the impact resistance of the glass.
  • the electronic device mentioned in this application can be any device with communication and storage functions, such as smartphones, cellular phones, cordless phones, Session Initiation Protocol (Session Initiation Protocol, SIP) phones, tablet computers, personal digital assistants (Personal Digital Assistant) ,PAD), notebook computers, digital cameras, e-book readers, portable multimedia players, handheld devices with wireless communication capabilities, computing devices or other processing devices connected to wireless modems, vehicle-mounted devices, wearable devices, 5G terminal devices etc., the embodiments of the present application are not limited to this.
  • the anti-reflective glass provided by the present application its preparation method, the display screen of the electronic device and the electronic device will be described in detail below with reference to the examples.
  • the glass substrate is 0.55mm thick tempered glass; the glossiness is tested by a gloss meter; the Vickers hardness is tested by a Vickers indentation instrument; the Mohs hardness is tested by a Mohs hardness pen; and the optical properties are tested by spectroscopy. Photometer test; color value is tested by colorimeter.
  • Step 1 Vacuum sputter the metal indium film on the glass substrate.
  • the specific steps are as follows:
  • Radio frequency magnetron sputtering is used for pretreatment before coating.
  • Radical Source power 4500W
  • Ar flow 0sccm
  • O2 flow 120sccm
  • N2 flow 0sccm
  • Time 240s;
  • Indium film coating parameters Indium target sputtering power: 3000W; Ar flow rate: 120sccm.
  • Step 2 Heat the metal indium film layer to shrink it into a ball.
  • the specific steps are as follows:
  • Step 3 Perform plasma etching on the glass substrate template. The specific steps are as follows:
  • the background vacuum is 5.0 ⁇ 10 -3 Pa; the reactive ion etching power is 500W, the chamber pressure is 10Pa, the argon flow rate is 40sccm, the trifluoromethane flow rate is 5sccm, the etching time is 10min, and a nano-protrusion array structure is constructed on the glass surface;
  • Step 4 Clean and remove the residual metal indium on the surface of the glass substrate template. The specific steps are as follows:
  • the residual metal indium is deplated, and then the glass surface is cleaned with pure water to obtain a glass substrate with a micro-nano structure on the surface.
  • Figure 12 is a scanning electron microscope photo of the glass substrate prepared in Example 1 of the present invention.
  • the surface of the glass substrate has nano-sized protrusions in an array-like structure.
  • the nano-protrusions are similar to a truncated cone shape, and the bottom size is larger than the top size.
  • the nano-protrusions are 120 nm high and the bottom size is 200 nm.
  • the performance of the glass substrate was tested. Its transmittance to light with a wavelength of 550 nm was 90%, its reflectance was 3%, and its glossiness was 92.
  • Step 5 Perform hard AR coating on the glass substrate with micro-nano structure on the surface.
  • the specific steps are as follows:
  • the average single-sided transmittance from 380 to 780nm is required to be greater than 93%. Due to the high transmittance requirements in the visible light band, the film stack 2H is used, and L is selected with high hardness and relatively low refractive index. Al 2 O 3 , H is selected as AlN, and the initial film system HL is formed in the optical thin film software, thus forming a stacked film system of L and H, and then the band optimization conditions are entered in the continuous target to ensure that the transmittance meets the requirements; Then enter the LAB value requirements in the color target to ensure that the color is colorless.
  • Table 1 is the AR film system structure provided in Embodiment 1 of the present invention:
  • the coating parameters of the AlN layer are: sputtering power of the aluminum target: 7500W, Ar flow: 120sccm, N2 flow: 80sccm, RadicalSource power: 4500W;
  • Coating parameters of Al 2 O 3 layer Sputtering power of aluminum target: 8000W, Ar flow: 250sccm, O 2 flow: 120sccm; Power of RadicalSource: 4500W;
  • Coating is performed to obtain a structure of glass substrate (0.55mm)/Al 2 O 3 (133.19nm)/AlN (16.63nm)/Al 2 O 3 (40.05nm)/AlN (151.03nm)/Al 2 O 3 (45.25 nm)/AlN(33.62nm)/Al 2 O 3 (32.28nm)/AlN (70.6nm)/Al 2 O 3 (80.1nm) anti-reflective glass.
  • the obtained anti-reflective glass was tested for performance and the results are as follows:
  • Vickers hardness is 1170HV
  • a Mohs hardness pen with a Mohs hardness of 7 scratches the glass surface, and there is no scratch visible to the naked eye under 800lux light; on a marble surface with a surface roughness of 5.6 ⁇ m, a 10Kg force is applied to the 5*5cm glass, the stroke is 10cm, and the round trip is After one cycle and 40 cycles of rubbing, there are no visible scratches under 800lux light.
  • the reflectance of the single-sided coating is 0.46%
  • the transmittance of the single-sided coating is 94.34%
  • the transmittance of 940nm light is 92.6%
  • the reflected color value a value is ⁇ 2
  • the b value is ⁇ 2
  • the transmitted color value a value is ⁇ 1
  • the b value is ⁇ 1.
  • the stress deformation of the glass substrate is measured using a glass profile test (CAV scan).
  • the glass deformation amount is less than 0.20 mm, as shown in Figure 13.
  • Figure 13 is the CAV scan result of the anti-reflective glass in Example 1 of the present application.
  • Step 1 Vacuum sputter the metal indium film on the glass substrate.
  • the specific steps are as follows:
  • RadicalSource power 4500W Ar flow: 0sccm; O2 flow: 120sccm; N2 flow: 0sccm; Time: 240s;
  • Indium film coating parameters Indium target sputtering power: 3000W, Ar flow rate: 120sccm.
  • Step 2 Heat the metal indium film layer to shrink it.
  • the specific steps are as follows:
  • Step 3 Perform plasma etching on the glass substrate template. The specific steps are as follows:
  • the background vacuum is 5.0 ⁇ 10 -3 Pa; the reactive ion etching power is 500W, the chamber pressure is 10Pa, the argon flow rate is 40sccm, the trifluoromethane flow rate is 10sccm, the etching time is 8min, and a nano-protrusion array structure is constructed on the glass surface;
  • Step 4 Clean and remove the residual metal indium film on the surface of the glass substrate template. The specific steps are as follows:
  • the residual metal indium film layer is deplated, and then the glass surface is cleaned with pure water to obtain a glass substrate with a micro-nano structure on the surface.
  • Figure 14 is a scanning electron microscope photo of the glass substrate prepared in Example 2 of the present invention.
  • the surface of the glass substrate has nano-sized protrusions in an array-like structure.
  • the nano-protrusions are similar to a truncated cone shape, and the bottom size is larger than the top size.
  • the nano-protrusions are 100 nm high and the bottom size is 400 nm.
  • the performance of the glass substrate was tested. Its transmittance to light with a wavelength of 550 nm was 90%, its reflectance was 1%, and its glossiness was 85.
  • Step 5 Perform hard AR coating on the glass substrate with micro-nano structure on the surface.
  • the specific steps are as follows:
  • the average single-sided transmittance from 380 to 780nm is required to be greater than 93%. Due to the high transmittance requirements in the visible light band, the film stack 2H is used, and L is selected with high hardness and relatively low refractive index. Al 2 O 3 , H is selected as AlN, and the initial film system HL is formed in the optical thin film software, thus forming a stacked film system of L and H, and then the band optimization conditions are entered in the continuous target to ensure that the transmittance meets the requirements; Then enter the LAB value requirements in the color target to ensure that the color is colorless.
  • Table 2 is the AR film system structure provided in Embodiment 2 of the present invention:
  • Coating parameters of AlN layer Sputtering power of aluminum target: 7500W; Ar flow rate: 120sccm, N2 flow rate: 80sccm; RadicalSource power: 4500W;
  • Coating parameters of Al 2 O 3 layer sputtering power of aluminum target: 8000W; Ar flow rate: 250 sccm, O 2 flow rate: 120 sccm; RadicalSource power: 4500W.
  • Coating is carried out to obtain a structure of glass substrate (0.55mm)/Al 2 O 3 (78nm)/AlN (125nm)/Al 2 O 3 (151nm)/AlN (272nm)/Al 2 O 3 (150nm)/AlN ( 131nm)/Al 2 O 3 (180nm)/AlN (21nm)/Al 2 O 3 (188nm)/AlN (47nm)/Al 2 O 3 (83nm) anti-reflective glass.
  • the obtained anti-reflective glass was tested for performance and the results are as follows:
  • Vickers hardness is 1138HV; under 500g force, a Mohs hardness pen with a Mohs hardness of 7 scratches the glass surface, and no scratches are visible to the naked eye under 800lux light; on a marble surface with a surface roughness of 5.6um, a 10Kg force is applied to 5*5cm glass , the stroke is 10cm, and the back and forth is one cycle. After 40 cycles of friction, there are no visible scratches under 800lux light.
  • the reflectance of the single-sided coating is 0.2%
  • the transmittance of the single-sided coating is 91.8%
  • the transmittance of 940nm light is 91.5%
  • the reflected color value a value is ⁇ 2
  • the b value is ⁇ 2
  • the transmitted color value a value is ⁇ 1
  • the b value is ⁇ 1.
  • the stress deformation of the glass substrate is measured using a glass profile test (CAV scan).
  • the glass deformation amount is less than 0.10 mm, as shown in Figure 15.
  • Figure 15 is the CAV scan result of the anti-reflective glass of Example 2 of the present application.
  • FIG. 16 is a schematic structural diagram of a mobile phone.
  • the mobile phone 100 includes a screen 10.
  • the outer screen (i.e. cover) of the screen 10 is composed of the above-mentioned Made of anti-reflective glass.
  • the surface of the external screen is flat and basically non-deformed; when the user uses the phone, it will not cause glare under strong sunlight, and the user can clearly see the content displayed on the screen, and the product usage experience is good.
  • the outer screen of the phone has good scratch resistance, and it is not prone to visible scratches without a film. The phone looks better after long-term use.

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Abstract

An anti-reflection glass, comprising: a glass substrate (1), a first surface of the glass substrate (1) having a micro-nano structure (11); and a first anti-reflection film layer (2) stacked on the first surface of the glass substrate (1), the first anti-reflection film layer (2) being formed by alternately superposing high-refractive-index layers (21) and low-refractive-index layers (22). Further disclosed are an electronic device display screen and an electronic device. The micro-nano structure (11) of a micron- or nano-sized surface structure is arranged on the surface of the glass substrate (1) to ensure the dense accumulation of atoms in a film layer at a short range and increase the hardness of the film layer, such that the scratch resistance of the surface of a film-coated glass. Meanwhile, an undulating structure at a long range enables the film layer stress to be released locally at a long range, reduces the stress deformation of the glass substrate, such that the glass substrate (1) is not subjected to large stress deformation when a thick anti-reflection film layer is stacked, and can be used in large-sized structures such as electronic device display screens.

Description

电子设备Electronic equipment
本申请要求于2022年3月31日提交中国国家知识产权局、申请号为202210343622.9、发明名称为“减反射玻璃、其制备方法、电子设备的显示屏及电子设备”的中国专利申请的优先权,其全部内容通过引用结合在本申请中。This application requests the priority of the Chinese patent application submitted to the State Intellectual Property Office of China on March 31, 2022, with the application number 202210343622.9 and the invention title "anti-reflective glass, preparation method thereof, display screen of electronic equipment and electronic equipment" , the entire contents of which are incorporated herein by reference.
技术领域Technical field
本申请涉及电子设备技术领域,尤其涉及一种减反射玻璃、其制备方法、电子设备的显示屏及电子设备。The present application relates to the technical field of electronic equipment, and in particular to an anti-reflective glass, its preparation method, a display screen of an electronic equipment, and an electronic equipment.
背景技术Background technique
随着触摸电子产品的普及,消费者对触摸电子产品的要求越来越高。触摸电子产品的屏幕上方具有盖板玻璃,玻璃是光密介质,折射率为1.54的玻璃,每个表面有4.2%左右的反射光。在光线强烈的环境下,例如,户外强烈的阳光下,强烈的反射进入人眼,造成炫光,导致眼睛看不清屏幕上的显示内容,无法正常阅读,影响产品的使用。With the popularity of touch electronic products, consumers have higher and higher requirements for touch electronic products. There is a cover glass above the screen of touch electronic products. Glass is a light-dense medium. Glass with a refractive index of 1.54 has about 4.2% of reflected light on each surface. In an environment with strong light, for example, under strong sunlight outdoors, strong reflection enters the human eyes, causing glare, causing the eyes to see clearly the displayed content on the screen, making it impossible to read normally, and affecting the use of the product.
采用高折射率材料和低折射率材料,按照光学薄膜设计交替叠加,在玻璃基板上形成AR(减反射,Anti-Reflection)膜层,能够降低玻璃的反射率,增加玻璃的透过率,但是该AR膜层一般比较薄,容易被刺穿,导致玻璃易被划伤,出现肉眼可见的划痕,随着触摸电子产品使用的延续,划痕越来越多,影响触摸电子产品的外观。同时,划痕会破坏玻璃的应力平衡,导致玻璃的抗冲击能力下降。Using high refractive index materials and low refractive index materials, alternately superimposed according to the optical film design, an AR (Anti-Reflection) film layer is formed on the glass substrate, which can reduce the reflectivity of the glass and increase the transmittance of the glass. However, The AR film layer is generally thin and easily punctured, causing the glass to be easily scratched and visible scratches to the naked eye. As the use of touch electronic products continues, there will be more and more scratches, affecting the appearance of the touch electronic products. At the same time, scratches will destroy the stress balance of the glass, resulting in a decrease in the impact resistance of the glass.
为了提高玻璃基材的抗划伤能力,可以在玻璃基材表面镀制致密的高硬度材料涂层,但是,致密的高硬度材料涂层之间会产生排斥力,产生压应力,导致玻璃基材变形,使得其无法在尺寸较大的结构,例如手机盖板上使用,而只能用于摄像头镜片、手表盖板等小尺寸结构上。In order to improve the scratch resistance of the glass substrate, a dense high-hardness material coating can be plated on the surface of the glass substrate. However, the dense high-hardness material coatings will generate repulsive forces and produce compressive stress, causing the glass substrate to The deformation of the material makes it unable to be used on larger-sized structures such as mobile phone covers, but can only be used on small-sized structures such as camera lenses and watch covers.
发明内容Contents of the invention
本申请提供了一种减反射玻璃、其制备方法、电子设备的显示屏及电子设备,解决了减反射玻璃易被划伤、抗冲击能力下降以及玻璃基材容易变形的问题。This application provides an anti-reflective glass, a preparation method thereof, a display screen of an electronic device, and an electronic device, which solves the problems of the anti-reflective glass being easily scratched, the impact resistance being reduced, and the glass substrate being easily deformed.
为了实现上述目的,本申请提供了以下技术方案:In order to achieve the above objectives, this application provides the following technical solutions:
一种减反射玻璃,包括玻璃基板,所述玻璃基板的第一表面具有微纳结构;叠加在所述玻璃基板的第一表面的第一减反射膜层,所述第一减反射膜由高折射率层和低折射率层交替叠加形成。An anti-reflective glass, including a glass substrate, the first surface of the glass substrate having a micro-nano structure; a first anti-reflective film layer superimposed on the first surface of the glass substrate, the first anti-reflective film is made of high The refractive index layer and the low refractive index layer are alternately superimposed.
本申请实施例在玻璃基板表面设置微纳结构,微纳结构为微米或纳米尺寸的表面结构,能够保证短程上膜层原子致密堆积,提高膜层硬度,从而提高镀膜玻璃表面的抗划伤能力,同时在长程上高低起伏的结构使膜层压应力在局部得到释放,减少玻璃基板的应力变形,叠加厚度较厚的减反射膜层时也不会产生较大应力变形,从而可以用于电子设备显示屏等尺寸较大的结构中。。In the embodiment of the present application, a micro-nano structure is provided on the surface of the glass substrate. The micro-nano structure is a surface structure of micron or nanometer size, which can ensure the dense accumulation of film atoms in short distances, improve the hardness of the film, thereby improving the scratch resistance of the coated glass surface. At the same time, the long-range undulating structure allows the film lamination stress to be released locally, reducing the stress deformation of the glass substrate. When stacking a thicker anti-reflection film layer, no large stress deformation will occur, so it can be used in electronics. In larger structures such as device displays. .
在一些可能的实现方式中,所述微纳结构由多个微米尺寸和/纳米尺寸的凸起构成;或者由多个微米尺寸和/纳米尺寸的沟壑或者凹陷构成。上述多个凸起、沟壑或凹陷可以不规则排列,也可以规则排列,例如,以阵列结构的方式排列。In some possible implementations, the micro-nano structure is composed of a plurality of micron-sized and/or nano-sized protrusions; or is composed of a plurality of micron-sized and/or nano-sized grooves or depressions. The plurality of protrusions, grooves or depressions may be arranged irregularly or regularly, for example, in an array structure.
为了不影响减反射玻璃的光学性能,所述凸起的高度为50~1000nm,底部尺寸为100~3000nm,相邻凸起之间的间距为100~1000nm。同样的,微纳结构由多个沟壑或者多个凹陷形成时,沟壑的深度、长度和相邻沟壑之间的距离也满足上述尺寸或关系。In order not to affect the optical performance of the anti-reflective glass, the height of the protrusions is 50-1000nm, the bottom size is 100-3000nm, and the spacing between adjacent protrusions is 100-1000nm. Similarly, when the micro-nano structure is formed by multiple ravines or multiple depressions, the depth and length of the ravines and the distance between adjacent ravines also meet the above dimensions or relationships.
在一些可能的实施例中,所述第一减反射膜层的厚度为500~3000nm。表面具有微纳结构的玻璃基板在叠加厚度为500nm以上的减反射膜层时,能够减少膜层应力,减少玻璃基板的应力变形,使其能够应用于50mm以上的大尺寸结构中。In some possible embodiments, the thickness of the first anti-reflection film layer is 500-3000 nm. When a glass substrate with a micro-nano structure on the surface is superposed with an anti-reflection film layer with a thickness of more than 500 nm, it can reduce the stress of the film layer and the stress deformation of the glass substrate, making it applicable to large-size structures of more than 50 mm.
在一些可能的实施例中,所述第一减反射膜层中,所述低折射率层的材料为Al 2O 3;所述高折射率层的材料为AlN或AlON。Al 2O 3的硬度较高,莫氏硬度为9左右,能够进一步提高减反射玻璃的抗划伤能力。 In some possible embodiments, in the first anti-reflection film layer, the material of the low refractive index layer is Al 2 O 3 ; and the material of the high refractive index layer is AlN or AlON. Al 2 O 3 has a high hardness, with a Mohs hardness of about 9, which can further improve the scratch resistance of anti-reflective glass.
在一些可能的实现方式中,所述减反射玻璃表面在500g力下的莫氏硬度为7以上。In some possible implementations, the Mohs hardness of the anti-reflective glass surface under a force of 500g is above 7.
在一些可能的实现方式中,所述减反射玻璃采用玻璃轮廓测试时,厚度为0.55mm时,其变形量小于0.20mm。In some possible implementations, when the anti-reflective glass is tested using a glass profile, the deformation amount is less than 0.20 mm when the thickness is 0.55 mm.
在一些可能的实现方式中,所述减反射玻璃的维氏硬度为1100HV以上。In some possible implementations, the Vickers hardness of the anti-reflective glass is above 1100HV.
在一些可能的实现方式中,所述减反射玻璃在380~780nm范围的光波长区域上,反射率<2%,透过率>93%。In some possible implementations, the anti-reflection glass has a reflectivity of <2% and a transmittance of >93% in the light wavelength region of 380 to 780 nm.
本申请实施例还提供了减反射玻璃的制备方法,其特征在于,包括:The embodiments of the present application also provide a method for preparing anti-reflective glass, which is characterized by including:
步骤S1:在玻璃基板的至少一个表面形成微纳结构;Step S1: forming a micro-nano structure on at least one surface of the glass substrate;
步骤S2:在具有微纳结构的玻璃基板表面叠加第一减反射膜层,所述第一减反射膜由高折射率层和低折射率层交替叠加形成。Step S2: Superimpose a first anti-reflective film layer on the surface of the glass substrate with a micro-nano structure. The first anti-reflective film is formed by alternately superposing a high refractive index layer and a low refractive index layer.
具体而言,可以通过金属掩膜法、金刚石飞刀、酸腐蚀法等在玻璃基板的至少一个表面形成微纳结构,可以采用真空沉积法在具有微纳结构的玻璃基板表面叠加第一减反射膜层。Specifically, a micro-nano structure can be formed on at least one surface of the glass substrate through a metal mask method, a diamond flying knife, an acid etching method, etc., and a first anti-reflection layer can be superimposed on the surface of the glass substrate with a micro-nano structure using a vacuum deposition method. film layer.
本申请实施例还提供了一种电子设备显示屏及电子设备,包括上述技术方案所述的减反射玻璃或上述技术方案所述的制备方法制备得到的减反射玻璃。上述减反射玻璃具有较小的应力形变、较低的反射率、较高的透射率、良好的抗划伤性能和高硬度,可以用作电子设备的显示屏,例如手表等小尺寸显示屏或者手机等大尺寸显示屏。具体而言,所述减反射玻璃可用作电子设备显示屏的外屏。以上述减反射玻璃作为显示屏的电子设备在强烈的阳光下也不会造成炫光,方便使用者看清屏幕上的显示内容,提高产品的使用体验。另外,电子设备显示屏的抗划伤能力较好,不容易出现肉眼可见的划痕,不影响电子设备的外观,不会降低玻璃的抗冲击能力。Embodiments of the present application also provide an electronic device display screen and electronic device, including the anti-reflective glass described in the above technical solution or the anti-reflective glass prepared by the preparation method described in the above technical solution. The above-mentioned anti-reflective glass has small stress deformation, low reflectivity, high transmittance, good scratch resistance and high hardness, and can be used as a display screen for electronic devices, such as small-sized displays such as watches or Large-size displays such as mobile phones. Specifically, the anti-reflective glass can be used as an outer screen of a display screen of an electronic device. Electronic devices using the above-mentioned anti-reflective glass as a display screen will not cause glare under strong sunlight, making it easier for users to see the content displayed on the screen clearly and improving the product use experience. In addition, electronic equipment display screens have good scratch resistance and are not prone to scratches visible to the naked eye. They do not affect the appearance of electronic equipment and do not reduce the impact resistance of glass.
附图说明Description of drawings
图1为AR镀膜玻璃的叠层结构示意图;Figure 1 is a schematic diagram of the stacked structure of AR coated glass;
图2为硬质AR镀膜玻璃的叠层结构示意图;Figure 2 is a schematic diagram of the laminated structure of hard AR coated glass;
图3为本申请实施例提供的减反射玻璃的叠层结构示意图;Figure 3 is a schematic diagram of the laminated structure of the anti-reflective glass provided by the embodiment of the present application;
图4为本申请提供的玻璃基板表面的第一种微纳结构示意图;Figure 4 is a schematic diagram of the first micro-nano structure on the surface of the glass substrate provided by this application;
图5为本申请提供的玻璃基板表面的第二种微纳结构示意图;Figure 5 is a schematic diagram of the second micro-nano structure on the surface of the glass substrate provided by this application;
图6为本申请提供的玻璃基板表面的第三种微纳结构示意图;Figure 6 is a schematic diagram of the third micro-nano structure on the surface of the glass substrate provided by this application;
图7为本申请提供的第一减反射膜层的第一种交替结构示意图;Figure 7 is a schematic diagram of the first alternating structure of the first anti-reflection film layer provided by this application;
图8为本申请提供的第一减反射膜层的第二种交替结构示意图;Figure 8 is a schematic diagram of the second alternating structure of the first anti-reflection film layer provided by this application;
图9为本申请提供的第一减反射膜层的第三种交替结构示意图;Figure 9 is a schematic diagram of the third alternating structure of the first anti-reflection film layer provided by this application;
图10为本申请实施例提供的减反射玻璃的制备流程示意图;Figure 10 is a schematic diagram of the preparation process of anti-reflective glass provided by the embodiment of the present application;
图11为本申请实施例采用金属掩膜法形成表面微纳结构的流程示意图;Figure 11 is a schematic flow chart of forming a surface micro-nano structure using a metal mask method according to an embodiment of the present application;
图12为本发明实施例1制备的玻璃基材的扫描电镜照片;Figure 12 is a scanning electron microscope photograph of the glass substrate prepared in Example 1 of the present invention;
图13为本申请实施例1减反射玻璃的CAV扫描结果;Figure 13 is the CAV scanning result of the anti-reflective glass of Example 1 of the present application;
图14为本发明实施例2制备的玻璃基材的扫描电镜照片;Figure 14 is a scanning electron microscope photograph of the glass substrate prepared in Example 2 of the present invention;
图15为本申请实施例2减反射玻璃的CAV扫描结果;Figure 15 is the CAV scanning result of the anti-reflective glass of Example 2 of the present application;
图16为手机的结构示意图。Figure 16 is a schematic structural diagram of a mobile phone.
具体实施方式Detailed ways
下面将结合本申请实施例中的附图,对本申请实施例中的技术方案进行清楚、完整地描述。以下实施例中所使用的术语只是为了描述特定实施例的目的,而并非旨在作为对本申请的限制。如在本申请的说明书和所附权利要求书中所使用的那样,单数表达形式“一个”、“一种”、“所述”、“上述”、“该”和“这一”旨在也包括例如“一个或多个”这种表达形式,除非其上下文中明确地有相反指示。还应当理解,在本申请实施例中,“一个或多个”是指一个、两个或两个以上。本申请实施例中使用的“第一”“第二”以及类似的词语并不表示任何顺序、数量或者重要性,而只是用来区分不同的组成部分。The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. The terminology used in the following examples is for the purpose of describing specific embodiments only and is not intended to limit the application. As used in the specification and appended claims of this application, the singular expressions "a", "an", "said", "above", "the" and "the" are intended to also Expressions such as "one or more" are included unless the context clearly indicates otherwise. It should also be understood that in the embodiments of this application, "one or more" refers to one, two or more than two. The "first", "second" and similar words used in the embodiments of this application do not indicate any order, quantity or importance, but are only used to distinguish different components.
在本说明书中描述的参考“一个实施例”或“一些实施例”等意味着在本申请的一个或多个实施例中包括结合该实施例描述的特定特征、结构或特点。由此,在本说明书中的不同之处出现的语句“在一个实施例中”、“在一些实施例中”、“在其他一些实施例中”、“在另外一些实施例中”等不是必然都参考相同的实施例,而是意味着“一个或多个但不是所有的实施例”,除非是以其他方式另外特别强调。术语“包括”、“包含”、“具有”及它们的变形都意味着“包括但不限于”,除非是以其他方式另外特别强调。Reference in this specification to "one embodiment" or "some embodiments" or the like means that a particular feature, structure or characteristic described in connection with the embodiment is included in one or more embodiments of the application. Therefore, the phrases "in one embodiment", "in some embodiments", "in other embodiments", "in other embodiments", etc. appearing in different places in this specification are not necessarily References are made to the same embodiment, but rather to "one or more but not all embodiments" unless specifically stated otherwise. The terms “including,” “includes,” “having,” and variations thereof all mean “including but not limited to,” unless otherwise specifically emphasized.
在本申请实施例中,“示例性的”或者“例如”等词用于表示作例子、例证或说明。本申请实施例中被描述为“示例性的”或者“例如”的任何实施例或设计方案不应被解释为比其它实施例或设计方案更优选或更具优势。确切而言,使用“示例性的”或者“例如”等词旨在以具体方式呈现相关概念。In the embodiments of this application, words such as "exemplary" or "for example" are used to represent examples, illustrations or explanations. Any embodiment or design described as "exemplary" or "such as" in the embodiments of the present application is not to be construed as preferred or advantageous over other embodiments or designs. Rather, use of the words "exemplary" or "such as" is intended to present the concept in a concrete manner.
在本申请实施例中,盖板属于电子设备显示屏的一部分,也可称为显示屏的外屏,用于保护显示屏中具有显示功能的内屏。In the embodiment of the present application, the cover is part of the display screen of the electronic device, and can also be called the outer screen of the display screen, and is used to protect the inner screen with the display function in the display screen.
在本申请实施例中,高折射率和低折射率指的是折射率相互之间的相对值,例如,高折射率>低折射率。相应的,高折射率材料和低折射率材料指的是不同材料的折射率的相对值。在一个或多个实施例中,低折射率约为1.3~1.7或1.3~1.75,低折射率材料包括折射率约为1.3~1.7或1.3~1.75的材料;高折射率约为1.7~2.5,高折射率材料包括折射率约为 1.7~2.5的材料。In the embodiments of this application, high refractive index and low refractive index refer to the relative values of the refractive indexes to each other, for example, high refractive index > low refractive index. Correspondingly, high refractive index materials and low refractive index materials refer to the relative values of the refractive index of different materials. In one or more embodiments, the low refractive index is about 1.3 to 1.7 or 1.3 to 1.75, and the low refractive index material includes a material with a refractive index of about 1.3 to 1.7 or 1.3 to 1.75; the high refractive index is about 1.7 to 2.5, High refractive index materials include materials with a refractive index of about 1.7 to 2.5.
在本申请实施例中,玻璃的透射是指光线透过玻璃的性质,以透光率表示;玻璃的反射是指光线被玻璃阻挡,按一定角度反射出来,以反射率表示;玻璃的折射率是指光在真空中的传播速度与光在玻璃中的传播速度之比。In the embodiment of this application, the transmission of glass refers to the property of light passing through the glass, expressed as transmittance; the reflection of glass refers to the light blocked by the glass and reflected at a certain angle, expressed as reflectivity; the refractive index of glass It refers to the ratio of the propagation speed of light in vacuum to the propagation speed of light in glass.
在本申请实施例中,玻璃基板是指未经减反射处理的玻璃,包括普通玻璃、钢化玻璃等,其中,钢化玻璃是普通玻璃经过离子交换等化学强化处理得到的化学强化玻璃。In the embodiment of this application, the glass substrate refers to glass without anti-reflection treatment, including ordinary glass, tempered glass, etc., wherein tempered glass is chemically strengthened glass obtained by chemical strengthening treatment such as ion exchange of ordinary glass.
玻璃是光密介质,折射率为1.54的玻璃,在光线强烈的环境下,每个表面有4.2%左右的反射光线反射进入人眼,造成炫光导致眼睛看不清屏幕上的显示内容,影响电子产品的使用。为了减小玻璃的反射率,提高玻璃的透射率,一般采用高折射率材料(高折1)和低折射率材料(低折1),按照光学薄膜设计交替叠加在玻璃基板(基板)上形成AR镀膜玻璃,如图1所示,图1为AR镀膜玻璃的叠层结构示意图。玻璃基材反射率为8.4%时,双面镀膜后反射率<1%;玻璃基材透过率为93%时,双面镀膜后透过率>98%;而且该膜层的厚度一般小于300nm,膜层应力造成的玻璃基板变形可以忽略,不影响玻璃在较大尺寸结构上的应用,例如用作手机盖板玻璃等。但是,该膜层较薄,容易被刺穿,镀膜后的玻璃相对玻璃基材更容易被划伤。Glass is a light-dense medium with a refractive index of 1.54. In a strong light environment, about 4.2% of the reflected light from each surface is reflected into the human eye, causing glare and making it difficult for the eyes to see clearly the display content on the screen. Use of electronic products. In order to reduce the reflectivity of glass and increase the transmittance of glass, high refractive index materials (high refractive index 1) and low refractive index materials (low refractive index 1) are generally used, which are alternately superimposed on the glass substrate (substrate) according to the optical film design to form a AR coated glass is shown in Figure 1. Figure 1 is a schematic diagram of the stacked structure of AR coated glass. When the reflectivity of the glass substrate is 8.4%, the reflectivity after double-sided coating is <1%; when the transmittance of the glass substrate is 93%, the transmittance after double-sided coating is >98%; and the thickness of the film layer is generally less than 300nm, the deformation of the glass substrate caused by the stress of the film layer can be ignored, and it does not affect the application of glass in larger structures, such as being used as cover glass for mobile phones. However, the film layer is thin and easily punctured, and the coated glass is more susceptible to scratches than the glass substrate.
为了提高AR镀膜玻璃的抗划伤能力,可以在AR膜层中插入一层硬质膜层,形成硬质AR膜层,参见图2,图2为硬质AR镀膜玻璃的叠层结构示意图,采用高折射率材料(高折1)和低折射率材料(低折1),按照光学薄膜设计交替叠加在玻璃基板(基板)上,同时插入一层硬质膜层作为抗划伤层,形成硬质AR镀膜玻璃。该硬质AR膜层一方面能够减少玻璃反射率,玻璃基材反射率为8.4%时,双面镀膜后反射率<1%;增加玻璃透过率,玻璃基材透过率为93%时,双面镀膜后透过率>98%;另一方面能够提高玻璃的抗划伤能力。但是,该硬质膜层的厚度一般为500~5000nm,使得整个硬质AR膜层的厚度大于800nm,膜层应力造成的玻璃基板变形较大,例如,硬质AR膜层为800nm厚时,用作手机盖板的0.55mm厚的钢化玻璃变形比例为0.4mm,超出标准要求公差0.2mm。这种玻璃无法在较大尺寸结构上应用,只能用在摄像头镜片、手表盖板等小于50mm的小尺寸结构中。In order to improve the scratch resistance of AR coated glass, a hard film layer can be inserted into the AR film layer to form a hard AR film layer. See Figure 2. Figure 2 is a schematic diagram of the stacked structure of hard AR coated glass. Using high refractive index materials (high refractive index 1) and low refractive index materials (low refractive index 1), they are alternately stacked on the glass substrate (substrate) according to the optical film design, and a hard film layer is inserted as an anti-scratch layer to form Hard AR coated glass. On the one hand, the hard AR film layer can reduce the reflectivity of the glass. When the reflectance of the glass substrate is 8.4%, the reflectivity after double-sided coating is <1%; on the other hand, it can increase the transmittance of the glass. When the transmittance of the glass substrate is 93% , the transmittance after double-sided coating is >98%; on the other hand, it can improve the scratch resistance of the glass. However, the thickness of the hard film layer is generally 500-5000nm, making the thickness of the entire hard AR film layer greater than 800nm, and the glass substrate deformation caused by the stress of the film layer is large. For example, when the hard AR film layer is 800nm thick, The 0.55mm thick tempered glass used as a mobile phone cover has a deformation ratio of 0.4mm, exceeding the standard tolerance of 0.2mm. This kind of glass cannot be used in larger-sized structures and can only be used in small-sized structures smaller than 50mm such as camera lenses and watch covers.
参见图3,图3为本申请实施例提供的减反射玻璃的叠层结构示意图。所述减反射玻璃包括:玻璃基板1,所述玻璃基板的第一表面具有微纳结构11;叠加在所述玻璃基板1的第一表面的第一减反射膜层2,所述第一减反射膜层由高折射率层21和低折射率层22交替叠加形成。Refer to Figure 3, which is a schematic diagram of the laminated structure of the anti-reflective glass provided by the embodiment of the present application. The anti-reflective glass includes: a glass substrate 1, the first surface of the glass substrate has a micro-nano structure 11; a first anti-reflective film layer 2 superimposed on the first surface of the glass substrate 1, the first anti-reflective film layer 2 is superimposed on the first surface of the glass substrate 1. The reflective film layer is formed by alternately stacking high refractive index layers 21 and low refractive index layers 22 .
玻璃基板1作为主体材料,具有较高的透过率即可。在一个实施例中,玻璃基板1在380~780nm范围的光波长区域上透过率大于等于85%。在其他实施例中,玻璃基板1在380~780nm范围的光波长区域上透过率大于等于90%,甚至大于等于92%。在一个实施例中,玻璃基板1在380~780nm范围的光波长区域上的反射率≤15%。在其他实施例中,玻璃基板1在380~780nm范围的光波长区域上的反射率≤10%。As the main material, the glass substrate 1 only needs to have a high transmittance. In one embodiment, the transmittance of the glass substrate 1 is greater than or equal to 85% in a light wavelength region ranging from 380 to 780 nm. In other embodiments, the transmittance of the glass substrate 1 in the light wavelength range of 380 to 780 nm is greater than or equal to 90%, or even greater than or equal to 92%. In one embodiment, the reflectivity of the glass substrate 1 in the light wavelength region ranging from 380 to 780 nm is ≤15%. In other embodiments, the reflectivity of the glass substrate 1 in the light wavelength region ranging from 380 to 780 nm is ≤10%.
玻璃基板1可以为普通玻璃,也可以为普通玻璃经过离子交换处理得到的钢化玻璃。玻璃基板1的一个典型的化学组成包括SiO 2、B 2O 3、Al 2O 3、碱金属氧化物和碱土金属氧化物,在其他实施例中,玻璃基板1还可以根据需要包括其他化学成分,例如稀土氧化物或其他二价金属氧化物。 The glass substrate 1 may be ordinary glass, or may be tempered glass obtained by ion exchange treatment of ordinary glass. A typical chemical composition of the glass substrate 1 includes SiO 2 , B 2 O 3 , Al 2 O 3 , alkali metal oxides and alkaline earth metal oxides. In other embodiments, the glass substrate 1 may also include other chemical compositions as needed. , such as rare earth oxides or other divalent metal oxides.
玻璃基板1为钢化玻璃时,所述钢化玻璃可以按照以下方法制备:将普通玻璃预热后进行离子交换处理,依次酸洗、碱洗后得到钢化玻璃。其中,离子交换处理具体为:在离子交换处理剂中进行处理,所述离子交换剂包括KNO 3、NaNO 3、H 2SiO 3、La 2O 3和KOH,离子交换处理的温度为435~445℃,时间为1.8~22h。具体而言,所述离子交换剂包括165~185质量份的KNO 3、14~18质量份的NaNO 3、3~5质量份的H 2SiO 3、0.05~0.15质量份的La 2O 3和4~8质量份的KOH。采用上述方法制备的钢化玻璃具有良好的强度和抗冲击性能,不易破碎。 When the glass substrate 1 is tempered glass, the tempered glass can be prepared according to the following method: preheat ordinary glass and then perform ion exchange treatment, and then sequentially pickle and alkali wash to obtain tempered glass. Wherein, the ion exchange treatment is specifically: treatment in an ion exchange treatment agent, the ion exchange agent includes KNO 3 , NaNO 3 , H 2 SiO 3 , La 2 O 3 and KOH, and the temperature of the ion exchange treatment is 435 to 445 ℃, the time is 1.8~22h. Specifically, the ion exchanger includes 165-185 parts by mass of KNO 3 , 14-18 parts by mass of NaNO 3 , 3-5 parts by mass of H 2 SiO 3 , 0.05-0.15 parts by mass of La 2 O 3 and 4 to 8 parts by mass of KOH. The tempered glass prepared by the above method has good strength and impact resistance and is not easily broken.
在一个实施例中,玻璃基板1的厚度为0.4mm~0.7mm。在其他实施例中,玻璃基板1的厚度为0.45mm~0.65mm。In one embodiment, the thickness of the glass substrate 1 is 0.4mm˜0.7mm. In other embodiments, the thickness of the glass substrate 1 is 0.45mm˜0.65mm.
玻璃基板1表面具有微纳结构11,微纳结构11为微米和/或纳米尺寸的表面结构,能够保证短程上膜层原子致密堆积,提高膜层硬度,从而提高镀膜玻璃表面的抗划伤能力,同时在长程上高低起伏的结构使膜层压应力在局部得到释放,减少玻璃基板1的应力变形,叠加厚度较厚的减反射膜层时也不会产生较大应力变形,从而可以用于电子设备显示屏等尺寸较大的结构中。The surface of the glass substrate 1 has a micro-nano structure 11. The micro-nano structure 11 is a surface structure of micron and/or nanometer size, which can ensure the dense accumulation of atoms in the short-range upper film layer, improve the hardness of the film layer, thereby improving the scratch resistance of the coated glass surface. , at the same time, the long-range undulating structure allows the film lamination stress to be released locally, reducing the stress deformation of the glass substrate 1, and will not produce large stress deformation when stacking a thicker anti-reflection film layer, so it can be used In larger structures such as electronic device displays.
在一个实施例中,玻璃基板1表面具有多个微米和/或纳米尺寸的凸起,该多个凸起构成了玻璃基板1表面的微纳结构。参见图4,图4为本申请提供的玻璃基板表面的第一种微纳结构示意图。凸起41的底部尺寸大于顶部尺寸,可以为圆台形、金字塔形或馒头形。在其他实施例中,所述凸起的底部尺寸与顶部尺寸相同,可以为矩形、圆柱形等。在一个实施例中,所述凸起的高度为50~1000nm,在其他实施例中,为了避免影响减反射玻璃的光学性能,例如不增加其反射率、不减少其透射率,所述凸起的高度可以为100~800nm,或者可以为150~700nm,或者可以为200~600nm,或者可以为250~500nm,或者可以为300~400nm。在一个实施例中,所述凸起的底部尺寸为100~3000nm,在其他实施例中,为了避免影响减反射玻璃的光学性能,例如不增加其反射率、不减少其透射率,所述凸起的底部尺寸可以为150~2000nm,或者可以为200~1500nm,或者可以为250~1000nm,或者可以为300~800nm,或者可以为350~500nm。在一个实施例中,相邻凸起之间的间距为100~1000nm,在其他实施例中,为了避免影响减反射玻璃的光学性能,例如不增加其反射率、不减少其透射率,相邻凸起之间的间距可以为150~800nm,或者可以为200~600nm,或者可以为250~500nm,或者可以为300~400nm。In one embodiment, the surface of the glass substrate 1 has a plurality of micron and/or nanometer-sized protrusions, and the plurality of protrusions constitute a micro-nano structure on the surface of the glass substrate 1 . Referring to Figure 4, Figure 4 is a schematic diagram of the first micro-nano structure on the surface of a glass substrate provided by this application. The bottom size of the protrusion 41 is larger than the top size, and may be truncated cone-shaped, pyramid-shaped or steamed bun-shaped. In other embodiments, the bottom size of the protrusion is the same as the top size, and may be rectangular, cylindrical, etc. In one embodiment, the height of the protrusions is 50 to 1000 nm. In other embodiments, in order to avoid affecting the optical properties of the anti-reflective glass, such as not increasing its reflectivity and not reducing its transmittance, the protrusions are The height can be 100~800nm, or it can be 150~700nm, or it can be 200~600nm, or it can be 250~500nm, or it can be 300~400nm. In one embodiment, the bottom size of the protrusions is 100 to 3000 nm. In other embodiments, in order to avoid affecting the optical properties of the anti-reflective glass, such as not increasing its reflectivity and not reducing its transmittance, the protrusions are The bottom size can be 150~2000nm, or it can be 200~1500nm, or it can be 250~1000nm, or it can be 300~800nm, or it can be 350~500nm. In one embodiment, the spacing between adjacent protrusions is 100 to 1000 nm. In other embodiments, in order to avoid affecting the optical properties of the anti-reflective glass, for example, without increasing its reflectivity or reducing its transmittance, adjacent protrusions are The spacing between the protrusions may be 150-800 nm, or may be 200-600 nm, or may be 250-500 nm, or may be 300-400 nm.
在一个实施例中,所述多个凸起可以不规则排布,分散在玻璃基板表面即可。在其他实施例中,所述多个凸起可以按照规律排布,例如以阵列的方式排布,即多个凸起呈阵列排布或者类阵列排布。以多个凸起作为玻璃基板表面的微纳结构更容易形成规则结构,例如阵列结构,从而有利于膜层应力的释放,减少玻璃基板的应力变形。In one embodiment, the plurality of protrusions can be arranged irregularly and dispersed on the surface of the glass substrate. In other embodiments, the plurality of protrusions may be arranged in a regular manner, for example, in an array, that is, the plurality of protrusions are arranged in an array or a quasi-array arrangement. Using multiple protrusions as micro-nano structures on the surface of the glass substrate makes it easier to form regular structures, such as array structures, which is beneficial to the release of stress in the film layer and reduces the stress deformation of the glass substrate.
表面具有微纳结构的玻璃基板1具有较高的光泽度和透过率,在一个实施例中,表面具有微纳结构的玻璃基板1在380~780nm范围的光波长区域上透过率大于等于85%甚至大于等于90%,或者大于等于92%。在一个实施例中,表面具有微纳结构的玻璃基板1的光泽度大于85,甚至大于90。The glass substrate 1 with a micro-nano structure on the surface has high gloss and transmittance. In one embodiment, the glass substrate 1 with a micro-nano structure on the surface has a transmittance of greater than or equal to 380 nm in the light wavelength range of 380 to 780 nm. 85% is even greater than or equal to 90%, or greater than or equal to 92%. In one embodiment, the glossiness of the glass substrate 1 with micro-nano structures on the surface is greater than 85, or even greater than 90.
在另外的实施例中,玻璃基板1表面具有多个微米和/或纳米尺寸的沟壑,该多个沟壑构成了玻璃基板1表面的微纳结构。参见图5,图5为本申请提供的玻璃基板表面的第二 种微纳结构示意图。沟壑51的底部尺寸小于顶部尺寸,即其横截面可以为倒圆台形、倒金字塔形或倒馒头形。在其他实施例中,所述沟壑的底部尺寸与顶部尺寸相同,其横截面为矩形、圆柱形等。在一个实施例中,所述沟壑的深度为50~1000nm,在其他实施例中,为了避免影响减反射玻璃的光学性能,例如不增加其反射率、不减少其透射率,所述沟壑的深度可以为100~800nm,或者可以为150~700nm,或者可以为200~600nm,或者可以为250~500nm,或者可以为300~400nm。在一个实施例中,所述沟壑的长度为100~3000nm,在其他实施例中,为了避免影响减反射玻璃的光学性能,例如不增加其反射率、不减少其透射率,所述沟壑的长度可以为150~2000nm,或者可以为200~1500nm,或者可以为250~1000nm,或者可以为300~800nm,或者可以为350~500nm。在一个实施例中,所述沟壑顶部的宽度为100~3000nm,在其他实施例中,为了避免影响减反射玻璃的光学性能,例如不增加其反射率、不减少其透射率,所述沟壑顶部的宽度可以为150~2000nm,或者可以为200~1500nm,或者可以为250~1000nm,或者可以为300~800nm,或者可以为350~500nm。在一个实施例中,相邻沟壑之间的间距为100~1000nm,在其他实施例中,为了避免影响减反射玻璃的光学性能,例如不增加其反射率、不减少其透射率,相邻沟壑之间的间距可以为150~800nm,或者可以为200~600nm,或者可以为250~500nm,或者可以为300~400nm。In other embodiments, the surface of the glass substrate 1 has a plurality of micron and/or nanometer-sized grooves, and the plurality of grooves constitute a micro-nano structure on the surface of the glass substrate 1 . Referring to Figure 5, Figure 5 is a schematic diagram of the second micro-nano structure on the surface of the glass substrate provided by this application. The bottom size of the gully 51 is smaller than the top size, that is, its cross-section may be inverted truncated cone shape, inverted pyramid shape or inverted steamed bun shape. In other embodiments, the bottom size of the gully is the same as the top size, and its cross-section is rectangular, cylindrical, etc. In one embodiment, the depth of the groove is 50-1000 nm. In other embodiments, in order to avoid affecting the optical properties of the anti-reflective glass, such as not increasing its reflectivity and not reducing its transmittance, the depth of the groove is It can be 100~800nm, or it can be 150~700nm, or it can be 200~600nm, or it can be 250~500nm, or it can be 300~400nm. In one embodiment, the length of the groove is 100-3000 nm. In other embodiments, in order to avoid affecting the optical properties of the anti-reflective glass, such as not increasing its reflectivity and not reducing its transmittance, the length of the groove is It can be 150-2000nm, or it can be 200-1500nm, or it can be 250-1000nm, or it can be 300-800nm, or it can be 350-500nm. In one embodiment, the width of the groove top is 100-3000 nm. In other embodiments, in order to avoid affecting the optical properties of the anti-reflective glass, such as not increasing its reflectivity and not reducing its transmittance, the width of the groove top is The width can be 150~2000nm, or it can be 200~1500nm, or it can be 250~1000nm, or it can be 300~800nm, or it can be 350~500nm. In one embodiment, the distance between adjacent grooves is 100 to 1000 nm. In other embodiments, in order to avoid affecting the optical performance of the anti-reflective glass, such as not increasing its reflectivity and not reducing its transmittance, the adjacent grooves are The spacing between them can be 150~800nm, or it can be 200~600nm, or it can be 250~500nm, or it can be 300~400nm.
在一个实施例中,所述多个沟壑可以不规则排布,分散在玻璃基板表面即可。在其他实施例中,所述多个沟壑可以按照规律排布,例如以经纬交错的方式排布或者呈阵列方式排布。以多个沟壑作为玻璃基板的表面微纳结构,形成方式更为多样,例如以酸处理的方式获得不规则的多个沟壑,或者以金刚石飞刀的方式获得规则的沟壑等。In one embodiment, the plurality of grooves can be arranged irregularly and dispersed on the surface of the glass substrate. In other embodiments, the plurality of ravines may be arranged in a regular manner, for example, in a staggered manner or in an array. Using multiple grooves as the surface micro-nano structure of the glass substrate can be formed in more diverse ways, such as using acid treatment to obtain multiple irregular grooves, or using a diamond flying knife to obtain regular grooves, etc.
在另外的实施例中,玻璃基板1表面具有多个微米和/或纳米尺寸的凹陷,该多个凹陷构成了玻璃基板1表面的微纳结构。参见图6,图6为本申请提供的玻璃基板表面的第三种微纳结构示意图。凹陷61的底部尺寸小于顶部尺寸,可以为倒圆台形、倒金字塔形或倒馒头形。在其他实施例中,所述凹陷的底部尺寸与顶部尺寸相同,可以为矩形、圆柱形等。在一个实施例中,所述凹陷的深度为50~1000nm,在其他实施例中,为了避免影响减反射玻璃的光学性能,例如不增加其反射率、不减少其透射率,所述凹陷的深度可以为100~800nm,或者可以为150~700nm,或者可以为200~600nm,或者可以为250~500nm,或者可以为300~400nm。在一个实施例中,所述凹陷的顶部尺寸为100~3000nm,在其他实施例中,为了避免影响减反射玻璃的光学性能,例如不增加其反射率、不减少其透射率,所述凹陷的顶部尺寸可以为150~2000nm,或者可以为200~1500nm,或者可以为250~1000nm,或者可以为300~800nm,或者可以为350~500nm。在一个实施例中,相邻凹陷之间的间距为100~1000nm,在其他实施例中,为了避免影响减反射玻璃的光学性能,例如不增加其反射率、不减少其透射率,相邻凹陷之间的间距可以为150~800nm,或者可以为200~600nm,或者可以为250~500nm,或者可以为300~400nm。In other embodiments, the surface of the glass substrate 1 has a plurality of micron and/or nanometer-sized depressions, and the plurality of depressions constitute a micro-nano structure on the surface of the glass substrate 1 . Referring to Figure 6, Figure 6 is a schematic diagram of the third micro-nano structure on the surface of the glass substrate provided by the present application. The bottom size of the depression 61 is smaller than the top size, and may be in the shape of an inverted cone, an inverted pyramid or an inverted steamed bun. In other embodiments, the bottom size of the depression is the same as the top size, and may be rectangular, cylindrical, etc. In one embodiment, the depth of the recess is 50-1000 nm. In other embodiments, in order to avoid affecting the optical properties of the anti-reflective glass, such as not increasing its reflectivity and not reducing its transmittance, the depth of the recess is It can be 100~800nm, or it can be 150~700nm, or it can be 200~600nm, or it can be 250~500nm, or it can be 300~400nm. In one embodiment, the top size of the recess is 100 to 3000 nm. In other embodiments, in order to avoid affecting the optical performance of the anti-reflective glass, such as not increasing its reflectivity and not reducing its transmittance, the recessed top size is 100 to 3000 nm. The top size can be 150-2000nm, or it can be 200-1500nm, or it can be 250-1000nm, or it can be 300-800nm, or it can be 350-500nm. In one embodiment, the spacing between adjacent recesses is 100 to 1000 nm. In other embodiments, in order to avoid affecting the optical properties of the anti-reflective glass, such as not increasing its reflectivity and not reducing its transmittance, the adjacent recesses are The spacing between them can be 150~800nm, or it can be 200~600nm, or it can be 250~500nm, or it can be 300~400nm.
在一个实施例中,所述多个凹陷可以不规则排布,分散在玻璃基板表面即可。在其他实施例中,所述多个凹陷可以按照规律排布,例如以阵列的方式排布。以多个凹陷作为玻璃基板的表面微纳结构,有利于保留玻璃基板的表面结构,例如保留钢化玻璃基板表面的离子交换层,使玻璃基板保持较好的机械性能。In one embodiment, the plurality of depressions can be arranged irregularly and dispersed on the surface of the glass substrate. In other embodiments, the plurality of depressions may be arranged regularly, for example, in an array. Using multiple depressions as the surface micro-nano structure of the glass substrate is beneficial to retaining the surface structure of the glass substrate, such as retaining the ion exchange layer on the surface of the tempered glass substrate, so that the glass substrate maintains good mechanical properties.
玻璃基板1表面的微纳结构可以通过金属掩膜、金刚石飞刀、酸腐蚀等本领域技术人 员熟知的表面加工方法获得,本申请对此并无特殊限制。The micro-nano structure on the surface of the glass substrate 1 can be obtained through surface processing methods well known to those skilled in the art such as metal masks, diamond flying knives, acid etching, etc. This application has no special restrictions on this.
例如,采用金属掩膜获得表面微纳结构的一个典型过程如下:在玻璃基板上镀金属膜,例如铟膜,然后加热使所述金属膜收缩,等离子刻蚀后将残余金属膜退镀,即可获得表面具有微纳结构的玻璃基板。For example, a typical process of using a metal mask to obtain surface micro-nano structures is as follows: a metal film, such as an indium film, is coated on a glass substrate, and then heated to shrink the metal film, and the remaining metal film is deplated after plasma etching, i.e. Glass substrates with micro-nano structures on the surface can be obtained.
采用金刚石飞刀获得表面微纳结构的一个典型过程为:将玻璃基板置于工作台上,采用金刚石刀具对其进行飞刀切削,形成微沟槽结构阵列、棱柱矩阵、微结构线性层等表面结构。A typical process of using a diamond flying knife to obtain surface micro-nano structures is: placing the glass substrate on the workbench, using a diamond tool to fly-cut it to form a micro-groove structure array, prism matrix, micro-structure linear layer and other surfaces. structure.
采用酸腐蚀获得表面微纳结构的一个典型过程为:将玻璃基板在氢氟酸和硫酸混合液中浸泡处理5~30min,清洗后干燥。A typical process of using acid etching to obtain surface micro-nano structures is: soaking the glass substrate in a mixture of hydrofluoric acid and sulfuric acid for 5 to 30 minutes, cleaning and drying.
所述减反射玻璃还包括叠加在玻璃基板1表面的第一减反射膜层2,第一减反射膜层2由高折射率层21和低折射率层22交替叠加形成,能够降低玻璃反射率,增加玻璃的透过率。在一个实施例中,第一减反射膜层2的厚度为500~3000nm,在其他实施例中,第一减反射膜层2的厚度可以为600~2500nm,或者可以为700~2000nm,或者可以为800~1500nm,或者可以为900~1200nm。The anti-reflective glass also includes a first anti-reflective film layer 2 superimposed on the surface of the glass substrate 1. The first anti-reflective film layer 2 is formed by alternately superposing a high refractive index layer 21 and a low refractive index layer 22, which can reduce the reflectivity of the glass. , increase the transmittance of glass. In one embodiment, the thickness of the first anti-reflection film layer 2 is 500-3000 nm. In other embodiments, the thickness of the first anti-reflection film layer 2 may be 600-2500 nm, or may be 700-2000 nm, or may be It is 800~1500nm, or it can be 900~1200nm.
第一减反射膜层2中,高折射率层21和低折射率层22交替叠加的周期以及各层的厚度可以按照光学要求通过膜层设计软件,如TFC,Macleod等设计,本申请对此并无特殊限制。具体而言,高折射率层21和低折射率层22交替叠加的周期可以为整数个周期,也可以为非整数个周期。例如,第一减反射膜层2的叠层结构可以为:高折射率层21/低折射率层22/高折射率层21/低折射率层22……/高折射率层21/低折射率层22/高折射率层21/低折射率层22,如图7所示;也可以为:高折射率层21/低折射率层22/高折射率层21/低折射率层22……/高折射率层21/低折射率层22/高折射率层21/低折射率层22/高折射率层21,如图8所示,或者可以为:低折射率层22/高折射率层21/低折射率层22/高折射率层21/低折射率层22……/高折射率层21/低折射率层22/高折射率层21/低折射率层22,如图9所示。In the first anti-reflection film layer 2, the period of alternating superposition of the high refractive index layer 21 and the low refractive index layer 22 and the thickness of each layer can be designed according to the optical requirements through film layer design software, such as TFC, Macleod, etc. This application is There are no special restrictions. Specifically, the period in which the high refractive index layer 21 and the low refractive index layer 22 are alternately superposed may be an integer number of periods or a non-integer number of periods. For example, the stacked structure of the first anti-reflection film layer 2 can be: high refractive index layer 21/low refractive index layer 22/high refractive index layer 21/low refractive index layer 22.../high refractive index layer 21/low refractive index Index layer 22/high refractive index layer 21/low refractive index layer 22, as shown in Figure 7; it can also be: high refractive index layer 21/low refractive index layer 22/high refractive index layer 21/low refractive index layer 22... .../high refractive index layer 21/low refractive index layer 22/high refractive index layer 21/low refractive index layer 22/high refractive index layer 21, as shown in Figure 8, or it can be: low refractive index layer 22/high refractive index Index layer 21/low refractive index layer 22/high refractive index layer 21/low refractive index layer 22.../high refractive index layer 21/low refractive index layer 22/high refractive index layer 21/low refractive index layer 22, as shown in the figure 9 shown.
在一个实施例中,第一减反射膜层2中各个高折射率层的材料相同,各个低折射率层的材料相同。在其他实施例中,第一减反射膜层2中各个高折射率层的材料相同,各个低折射率层的材料不同;或者,第一减反射膜层2中各个高折射率层的材料不同,各个低折射率层的材料相同;或者,第一减反射膜层2中各个高折射率层的材料不同,各个低折射率层的材料也不同。In one embodiment, the materials of each high refractive index layer in the first anti-reflection film layer 2 are the same, and the materials of each low refractive index layer are the same. In other embodiments, the materials of each high refractive index layer in the first anti-reflection film layer 2 are the same, and the materials of each low refractive index layer are different; or, the materials of each high refractive index layer in the first anti-reflection film layer 2 are different. , the materials of each low refractive index layer are the same; or, the materials of each high refractive index layer in the first anti-reflection film layer 2 are different, and the materials of each low refractive index layer are also different.
在一个实施例中,第一减反射膜层2中,所述高折射率层材料的折射率为1.9~2.3;所述低折射率层材料的折射率为1.6~1.8。具体而言,所述高折射率层的材料包括但不限于Nb 2O 5、TiO 2、Ta 2O 5、Si 3N 4、ZrO 2、AlN或AlON;所述低折射率层的材料包括但不限于SiO 2、MgF 2或Al 2O 3。进一步的,第一减反射膜层2中,所述低折射率层的材料为Al 2O 3;所述高折射率层的材料为AlN或AlON,Al 2O 3的硬度较高,莫氏硬度为9左右,能够提高玻璃的抗划伤能力。 In one embodiment, in the first anti-reflection film layer 2, the refractive index of the high refractive index layer material is 1.9-2.3; the refractive index of the low refractive index layer material is 1.6-1.8. Specifically, the materials of the high refractive index layer include but are not limited to Nb 2 O 5 , TiO 2 , Ta 2 O 5 , Si 3 N 4 , ZrO 2 , AlN or AlON; the materials of the low refractive index layer include But it is not limited to SiO 2 , MgF 2 or Al 2 O 3 . Further, in the first anti-reflection film layer 2, the material of the low refractive index layer is Al 2 O 3 ; the material of the high refractive index layer is AlN or AlON. The hardness of Al 2 O 3 is relatively high, Mohs. The hardness is about 9, which can improve the scratch resistance of glass.
在一个典型的实施例中,第一减反射膜层2具有Al 2O 3/AlN/Al 2O 3/AlN/Al 2O 3/AlN/Al 2O 3/AlN/Al 2O 3或Al 2O 3/AlN/Al 2O 3/AlN/Al 2O 3/AlN/Al 2O 3/AlN/Al 2O 3/AlN/Al 2O 3的叠层结构,该结构使得到的减反射玻璃具有较低的反射率、较高的透射率、良好的抗划伤性能和较高的硬度。 In a typical embodiment, the first anti-reflection film layer 2 has Al 2 O 3 /AlN/Al 2 O 3 /AlN/Al 2 O 3 /AlN/ Al 2 O 3 /AlN/Al 2 O 3 or Al 2 O 3 /AlN/Al 2 O 3 /AlN/Al 2 O 3 /AlN/Al 2 O 3 /AlN/Al 2 O 3 /AlN/Al 2 O 3 stacked structure, which makes the obtained anti-reflection Glass has low reflectivity, high transmittance, good scratch resistance and high hardness.
在一个典型的实施例中,第一减反射膜层2具有SiO 2/Nb 2O 5/SiO 2/Nb 2O 5/SiO 2/Nb 2O 5/SiO 2/Nb 2O 5/SiO 2/Si 3N 4的叠层结构,该结构使得到的减反射玻璃具有较低的反射率、较高的硬度和良好的耐摩擦性。 In a typical embodiment, the first anti-reflection film layer 2 has SiO 2 /Nb 2 O 5 /SiO 2 /Nb 2 O 5 /SiO 2 /Nb 2 O 5 /SiO 2 / Nb 2 O 5 /SiO 2 /Si 3 N 4 laminate structure, this structure makes the anti-reflection glass have lower reflectivity, higher hardness and good friction resistance.
在一个实施例中,所述减反射玻璃为单面镀膜玻璃,即玻璃基板1的第一表面叠加第一减反射膜层2。在其他实施例中,所述减反射玻璃可以为双面镀膜玻璃,即在玻璃基板1的第一表面叠加第一减反射膜层,在与第一表面相对应的第二表面叠加第二减反射膜层,双面镀膜玻璃具有更低的反射率和更高的透射率。本领域技术人员可以理解的是,第二减反射膜层与第一减反射膜层可以相同,也可以不同;第二减反射膜层与第一减反射膜层不同时,第二减反射膜层的设置参考上文第一减反射膜层的设置,本申请在此不再赘述。In one embodiment, the anti-reflective glass is single-sided coated glass, that is, the first surface of the glass substrate 1 is superimposed with the first anti-reflective film layer 2 . In other embodiments, the anti-reflective glass may be double-sided coated glass, that is, a first anti-reflective film layer is superimposed on the first surface of the glass substrate 1 and a second anti-reflective film layer is superimposed on the second surface corresponding to the first surface. Reflective coating layer, double-sided coated glass has lower reflectivity and higher transmittance. Those skilled in the art can understand that the second anti-reflective film layer and the first anti-reflective film layer may be the same or different; when the second anti-reflective film layer is different from the first anti-reflective film layer, the second anti-reflective film layer The arrangement of the layers refers to the arrangement of the first anti-reflection film layer above, which will not be described again in this application.
在一些可能的实现方式中,通过雾度仪或者光泽度仪对减反射玻璃进行测试,其光泽度大于85。在一些可能的实施例中,所述减反射玻璃的光泽度大于88,更有利于获得较高的透射率和较低的反射率。In some possible implementations, the anti-reflective glass is tested with a haze meter or gloss meter, and its glossiness is greater than 85. In some possible embodiments, the glossiness of the anti-reflective glass is greater than 88, which is more conducive to obtaining higher transmittance and lower reflectivity.
在一个可能的实现方式中,通过维氏压痕仪硬度对减反射玻璃进行测试,其表面上测得小于或等于约100nm的压痕深度,硬度大于或等于约1100HV。在一个实施例中,减反射玻璃的维氏硬度大于1150HV。In one possible implementation, the anti-reflective glass is tested by Vickers indentation hardness, with an indentation depth less than or equal to about 100 nm measured on the surface and a hardness greater than or equal to about 1100 HV. In one embodiment, the anti-reflective glass has a Vickers hardness greater than 1150 HV.
在一个可能的实现方式中,通过莫氏硬度笔测试减反射玻璃表面硬度,500g力下,莫氏硬度7的莫氏硬度笔划过玻璃表面,800lux光线下无肉眼可见划伤。In one possible implementation, the surface hardness of the anti-reflective glass is tested with a Mohs hardness pen. Under a force of 500g, a Mohs hardness pen with a Mohs hardness of 7 scratches the glass surface, and no scratches are visible to the naked eye under 800lux light.
在一些实施例中,通过分光光度计测试减反射玻璃的光学性能,380~780nm范围的光波长区域上单面镀膜反射率<2%,单面透过率>93%;940nm光波长透光率>92%。In some embodiments, the optical properties of the anti-reflection glass are tested with a spectrophotometer. The reflectance of the single-sided coating in the light wavelength range of 380 to 780 nm is <2%, and the transmittance of the single-sided coating is >93%; the light wavelength of 940nm is transparent. Rate>92%.
在一些实施例中,根据国际照明委员会,在法向入射条件下,在(L*,a*,b*)色度体系中,采用色差仪测试减反射玻璃,其反射颜色值a值±2,b值±2,透过颜色值a值±1,b值±1。In some embodiments, according to the International Commission on Illumination, under normal incidence conditions, in the (L*, a*, b*) chromaticity system, a colorimeter is used to test the anti-reflective glass, and its reflection color value a value is ±2 , b value ±2, transmitted color value a value ±1, b value ±1.
在一些实施例中,在表面粗糙度为5.6um的大理石表面,5*5cm减反射玻璃上施加10Kg力,行程10cm,来回为一个周期,40周期摩擦后,800lux光线下无肉眼可见划伤。In some embodiments, a 10Kg force is applied on a marble surface with a surface roughness of 5.6um and a 5*5cm anti-reflective glass with a stroke of 10cm and a back and forth cycle. After 40 cycles of friction, there are no visible scratches under 800lux light.
在一些实施例中,采用玻璃轮廓测试(CAV扫描)减反射玻璃,其玻璃变形量小于0.20mm。在一些实施例中,减反射玻璃的变形量小于0.1mm。In some embodiments, the glass deformation amount is less than 0.20 mm using a glass profile test (CAV scan) for anti-reflective glass. In some embodiments, the deformation of the anti-reflective glass is less than 0.1 mm.
在本申请中,第一减反射膜层2通过磁控溅射的方法依次在玻璃基板1上镀膜形成即可,镀膜参数根据膜层体系进行选择即可,本申请没有特殊限制。In this application, the first anti-reflection film layer 2 can be sequentially coated on the glass substrate 1 by magnetron sputtering. The coating parameters can be selected according to the film layer system. There are no special restrictions in this application.
本申请实施例还提供了上述减反射玻璃的制备方法,其流程示意图如图10所示,包括以下步骤:The embodiments of the present application also provide a method for preparing the above-mentioned anti-reflective glass, the schematic flow diagram of which is shown in Figure 10, including the following steps:
步骤S1:在玻璃基板的至少一个表面形成微纳结构;Step S1: forming a micro-nano structure on at least one surface of the glass substrate;
步骤S2:在具有微纳结构的玻璃基板表面叠加第一减反射膜层。Step S2: Superimpose the first anti-reflection film layer on the surface of the glass substrate with micro-nano structure.
首先,在玻璃基板的至少一个表面形成微纳结构,具体而言,可以采用金属掩膜、金刚石飞刀、酸腐蚀等本领域技术人员熟知的表面加工方法获得,在玻璃基板的表明形成微沟槽结构阵列、棱柱矩阵、微结构线性层、呈阵列分布的凸起等微纳结构。First, a micro-nano structure is formed on at least one surface of the glass substrate. Specifically, it can be obtained by surface processing methods well known to those skilled in the art such as metal mask, diamond flying knife, acid etching, etc., and micro grooves are formed on the surface of the glass substrate. Micro-nano structures such as groove structure arrays, prism matrices, microstructure linear layers, and protrusions distributed in arrays.
在一个具体的实现方式中,可以采用金属掩膜的方式获得微纳结构,其流程示意图如图11所示,包括以下步骤:In a specific implementation, a metal mask can be used to obtain a micro-nano structure. The flow diagram is shown in Figure 11, which includes the following steps:
步骤S11、在玻璃基板的至少一个表面形成金属膜;Step S11, forming a metal film on at least one surface of the glass substrate;
步骤S12、对所述金属膜进行处理使其形成金属纳米颗粒;Step S12: Process the metal film to form metal nanoparticles;
步骤S13、对所述步骤S12得到的玻璃进行等离子刻蚀,在玻璃表面构建纳米凸起阵列结构;Step S13: Perform plasma etching on the glass obtained in step S12 to construct a nanoprotrusion array structure on the glass surface;
步骤S14、退镀所述步骤S13得到的玻璃表面的金属。Step S14: Strip the metal on the glass surface obtained in step S13.
在一个实施例中,以金属铟为例,首先通过真空溅射等方法在玻璃基板的至少一个表面上形成金属铟膜,然后对其进行处理,例如热处理,使金属铟膜热收缩形成呈类阵列排布的纳米颗粒,然后对玻璃基板进行等离子刻蚀,铟纳米颗粒覆盖的玻璃基板表面不会被刻蚀,未被铟纳米颗粒覆盖的玻璃基板表面被刻蚀,从而形成具有凸起的表面结构,退镀铟纳米颗粒后即可得到具有微纳结构的玻璃基板,其表面具有呈类阵列排布的凸起。In one embodiment, taking metal indium as an example, a metal indium film is first formed on at least one surface of the glass substrate by vacuum sputtering or other methods, and then is treated, such as heat treatment, to cause the metal indium film to heat shrink to form a similar shape. The nanoparticles are arranged in an array, and then the glass substrate is plasma etched. The surface of the glass substrate covered with indium nanoparticles will not be etched, and the surface of the glass substrate not covered with indium nanoparticles will be etched, thereby forming a convex surface. Surface structure: after deplating indium nanoparticles, a glass substrate with a micro-nano structure can be obtained, and the surface has protrusions arranged in a similar array.
本申请实施例对所述真空溅射形成金属铟膜的参数没有特殊限制,本领域技术人员根据需要进行选择即可。为了后续形成金属纳米颗粒,在一个实施例中,所述金属铟膜的厚度为3~8nm。The embodiments of the present application have no special restrictions on the parameters for forming the metal indium film by vacuum sputtering, and those skilled in the art can select them according to needs. In order to subsequently form metal nanoparticles, in one embodiment, the thickness of the metal indium film is 3 to 8 nm.
形成铟膜后,对其进行热处理,形成铟纳米颗粒。本申请实施例对所述热处理的参数没有特殊限制,本领域技术人员根据需要进行选择即可,例如,热处理的升温速度为15~25℃/min,加热至100~200℃,保温5~10min。为了不影响最终产品的光学性能,铟纳米颗粒分布均匀,其直径为50~70nm。After the indium film is formed, it is heat treated to form indium nanoparticles. The embodiments of the present application have no special restrictions on the parameters of the heat treatment. Those skilled in the art can choose according to needs. For example, the heating rate of the heat treatment is 15-25°C/min, heating to 100-200°C, and keeping the temperature for 5-10 minutes. . In order not to affect the optical properties of the final product, the indium nanoparticles are evenly distributed and have a diameter of 50 to 70nm.
等离子刻蚀的目的在于刻蚀未被铟纳米颗粒覆盖的玻璃基板表面,使铟纳米颗粒覆盖的玻璃基板表面形成凸起。本申请实施例对所述等离子刻蚀的参数没有特殊限制,本领域技术人员可以根据预期的凸起的尺寸进行设定,控制刻蚀厚度,得到不影响最终产品的光学性能的凸起。The purpose of plasma etching is to etch the surface of the glass substrate that is not covered by the indium nanoparticles, so that the surface of the glass substrate covered by the indium nanoparticles forms protrusions. The embodiments of the present application have no special restrictions on the parameters of the plasma etching. Those skilled in the art can set the parameters according to the expected size of the bumps, control the etching thickness, and obtain bumps that do not affect the optical performance of the final product.
最后去除玻璃基板表面的铟纳米颗粒,例如对其进行退镀,即可得到表面具有微纳结构的玻璃基板。Finally, the indium nanoparticles on the surface of the glass substrate are removed, for example, by deplating, and a glass substrate with a micro-nano structure on the surface can be obtained.
可以理解的是,在对金属铟膜进行热处理,使其形成铟纳米颗粒的过程中,可能有部分金属铟膜未热收缩形成纳米颗粒,而是以残余金属铟层的形式存在,在后续等离子处理和退镀过程中,金属铟层覆盖的玻璃基板表面与铟纳米颗粒覆盖的玻璃基板表面会发生相同的变化,最终得到表面具有微纳结构的玻璃基板。It is understandable that during the heat treatment of the metal indium film to form indium nanoparticles, part of the metal indium film may not be thermally shrunk to form nanoparticles, but may exist in the form of a residual metal indium layer. In the subsequent plasma During the processing and deplating process, the surface of the glass substrate covered with the metallic indium layer and the surface of the glass substrate covered with indium nanoparticles will undergo the same changes, and finally a glass substrate with a micro-nano structure on the surface will be obtained.
得到表面具有微纳结构的玻璃基板后,在其表面叠加减反射膜,即可得到减反射玻璃。本申请实施例可以通过沉积的方式在玻璃基板表面形成减反射膜,例如真空沉积,包括化学气相沉积、物理气相沉积、热沉积、电子束蒸发沉积或原子层沉积等,也可以通过使用基于液体的方法,例如喷涂、浸涂、旋涂或狭缝涂覆(例如,使用溶胶凝胶材料)等。After obtaining a glass substrate with a micro-nano structure on the surface, an anti-reflective film is superimposed on the surface to obtain anti-reflective glass. Embodiments of the present application can form an anti-reflective film on the surface of a glass substrate through deposition, such as vacuum deposition, including chemical vapor deposition, physical vapor deposition, thermal deposition, electron beam evaporation deposition or atomic layer deposition, etc., or through the use of liquid-based Methods such as spray coating, dip coating, spin coating or slit coating (for example, using sol-gel materials), etc.
具体而言,本申请实施例可以采用TFCALC、Macleod等软件按照光学要求进行膜系设计,然后按照设计得到的膜系结构进行沉积。在一个实施例中,可以采用真空溅射镀膜机进行镀膜,镀膜参数可以根据膜系结构各层的材料进行选择,本申请对此并无特殊限制。例如,AlN层的镀膜参数可以为:铝靶的溅射功率:7000~8000W,Ar流量:100~150sccm,N 2流量:100~120sccm,RadicalSource的功率:4000~5000W。Al 2O 3层的镀膜参数可以为:铝靶的溅射功率:7500~8500W,Ar流量:200~300sccm,O 2流量:100~150sccm;RadicalSource的功率:4000~5000W。本申请提供的减反射玻璃通过在玻璃基板表面设置微纳结构再叠加第一减反射膜层,一方面能够保证短程上膜层原子致密堆积,提高镀膜玻璃表面的抗划伤 能力,另一方面在长程上高低起伏的结构使膜层压应力在局部得到释放,减少玻璃基板的应力变形。在此基础上,可以在玻璃基板上叠加较厚的,例如500nm以上厚度的硬质减反射膜层,降低玻璃反射率、增加玻璃的抗划伤性能,同时减少了玻璃基板的应力变形,不仅可以用于摄像头镜片和手表盖板等<50mm的小尺寸结构中,也可以应用于电子设备盖板等尺寸较大的结构中。 Specifically, in embodiments of the present application, software such as TFCALC and Macleod can be used to design the film system according to optical requirements, and then deposit the film system according to the designed film structure. In one embodiment, a vacuum sputtering coating machine can be used for coating, and the coating parameters can be selected according to the materials of each layer of the film structure. This application has no special restrictions on this. For example, the coating parameters of the AlN layer can be: sputtering power of the aluminum target: 7000~8000W, Ar flow: 100~150sccm, N2 flow: 100~120sccm, and RadicalSource power: 4000~5000W. The coating parameters of the Al 2 O 3 layer can be: sputtering power of the aluminum target: 7500~8500W, Ar flow: 200~300sccm, O2 flow: 100~150sccm; RadicalSource power: 4000~5000W. The anti-reflective glass provided by this application sets a micro-nano structure on the surface of the glass substrate and then superimposes the first anti-reflective film layer. On the one hand, it can ensure the dense accumulation of atoms in the short-range upper film layer and improve the scratch resistance of the coated glass surface. On the other hand, The long-range undulating structure allows the film lamination stress to be released locally and reduces the stress deformation of the glass substrate. On this basis, a thicker hard anti-reflection film layer, such as a thickness of more than 500nm, can be superimposed on the glass substrate to reduce the reflectivity of the glass, increase the scratch resistance of the glass, and at the same time reduce the stress deformation of the glass substrate. Not only It can be used in small-sized structures <50mm such as camera lenses and watch covers, and can also be used in larger-sized structures such as electronic equipment covers.
另外,所述第一减反射膜层中低折射率层的材料可以为硬度较高的Al 2O 3,进一步提高减反射膜层的硬度,从而提高减反射玻璃的抗划伤能力。 In addition, the material of the low refractive index layer in the first anti-reflection film layer can be Al 2 O 3 with higher hardness, which further increases the hardness of the anti-reflection film layer, thereby improving the scratch resistance of the anti-reflection glass.
本申请提供的减反射玻璃具有较低的反射率、良好的抗划伤性能和较小的应力变形,不仅可以用于摄像头镜片和手表盖板等<50mm的小尺寸结构中,也可以应用于电子设备盖板等尺寸较大的结构中。The anti-reflective glass provided by this application has low reflectivity, good scratch resistance and small stress deformation. It can not only be used in small-sized structures <50mm such as camera lenses and watch covers, but can also be used in In larger structures such as electronic equipment covers.
具体而言,本申请提供的减反射玻璃可以用作电子设备盖板,在强烈的阳光下也不会造成炫光,方便使用者看清屏幕上的显示内容,提高产品的使用体验。另外,电子设备盖板的抗划伤能力较好,不容易出现肉眼可见的划痕,不影响电子设备的外观,不会降低玻璃的抗冲击能力。Specifically, the anti-reflective glass provided by this application can be used as a cover for electronic equipment. It will not cause glare under strong sunlight, making it easier for users to see the content displayed on the screen clearly, and improving the user experience of the product. In addition, the electronic equipment cover has good scratch resistance and is not prone to visible scratches. It does not affect the appearance of the electronic equipment and does not reduce the impact resistance of the glass.
本申请提及的电子设备可以是任何具备通信和存储功能的设备,例如智能手机、蜂窝电话、无绳电话、会话启动协议(Session Initiation Protocol,SIP)电话、平板电脑、个人数字处理(Personal Digital Assistant,PAD)、笔记本电脑、数码相机、电子书籍阅读器、便携多媒体播放器、具有无线通信功能的手持设备、计算设备或连接到无线调制解调器的其他处理设备、车载设备、可穿戴设备、5G终端设备等,本申请实施例对此并不限定。The electronic device mentioned in this application can be any device with communication and storage functions, such as smartphones, cellular phones, cordless phones, Session Initiation Protocol (Session Initiation Protocol, SIP) phones, tablet computers, personal digital assistants (Personal Digital Assistant) ,PAD), notebook computers, digital cameras, e-book readers, portable multimedia players, handheld devices with wireless communication capabilities, computing devices or other processing devices connected to wireless modems, vehicle-mounted devices, wearable devices, 5G terminal devices etc., the embodiments of the present application are not limited to this.
以下结合实施例对本申请提供的减反射玻璃、其制备方法、电子设备的显示屏及电子设备进行详细说明。The anti-reflective glass provided by the present application, its preparation method, the display screen of the electronic device and the electronic device will be described in detail below with reference to the examples.
以下各实施例中,玻璃基材为0.55mm厚的钢化玻璃;光泽度通过光泽度仪测试;维氏硬度通过维氏压痕仪测试;莫氏硬度通过莫氏硬度笔测试;光学性能通过分光光度计测试;颜色值通过色差仪测试。In the following examples, the glass substrate is 0.55mm thick tempered glass; the glossiness is tested by a gloss meter; the Vickers hardness is tested by a Vickers indentation instrument; the Mohs hardness is tested by a Mohs hardness pen; and the optical properties are tested by spectroscopy. Photometer test; color value is tested by colorimeter.
实施例1Example 1
步骤1:在玻璃基材上真空溅射金属铟膜,具体步骤如下:Step 1: Vacuum sputter the metal indium film on the glass substrate. The specific steps are as follows:
设定5nm金属铟的膜厚输入到镀膜机,设置工艺参数:本底真空5.0×10 -4Pa;温度设置为:80℃; Set the film thickness of 5nm metal indium and input it into the coating machine, set the process parameters: background vacuum 5.0×10 -4 Pa; set the temperature to: 80°C;
镀膜之前用射频磁控溅射(RF)进行前处理,具体参数:Radical Source功率:4500W;Ar流量:0sccm;O 2流量:120sccm;N 2流量:0sccm;时间(Time):240s; Radio frequency magnetron sputtering (RF) is used for pretreatment before coating. Specific parameters: Radical Source power: 4500W; Ar flow: 0sccm; O2 flow: 120sccm; N2 flow: 0sccm; Time: 240s;
铟膜镀膜参数:铟靶的溅射功率:3000W;Ar流量:120sccm。Indium film coating parameters: Indium target sputtering power: 3000W; Ar flow rate: 120sccm.
将待镀膜的玻璃基材装载到基片架上,放入上述镀膜设备,关门抽真空,输入镀膜程序,点击成膜开始,完成镀膜;Load the glass substrate to be coated onto the substrate holder, put it into the above-mentioned coating equipment, close the door and evacuate, enter the coating program, click film formation to start, and complete the coating;
步骤2:加热金属铟膜层使其收缩成球,具体步骤如下:Step 2: Heat the metal indium film layer to shrink it into a ball. The specific steps are as follows:
1)镀膜完成后,关闭铟靶和气体,待真空抽到5.0×10 -3Pa,加热金属铟膜,升温速度20℃/min,加热至120℃并保温7min,获得玻璃基材模板,所述模板表面具有金属铟纳米颗粒,该纳米颗粒分布均匀,直径为50~70nm; 1) After the coating is completed, turn off the indium target and gas, wait until the vacuum reaches 5.0×10 -3 Pa, heat the metal indium film at a heating rate of 20°C/min, heat to 120°C and keep it warm for 7 minutes to obtain the glass substrate template. There are metal indium nanoparticles on the surface of the template, the nanoparticles are evenly distributed and have a diameter of 50-70nm;
2)入气,冷却时间5min,入气时间:3min;2) Air intake, cooling time: 5 minutes, air intake time: 3 minutes;
3)取片,转入等离子刻蚀设备内;3) Take the slices and transfer them to plasma etching equipment;
步骤3:对玻璃基材模板进行等离子刻蚀,具体步骤如下:Step 3: Perform plasma etching on the glass substrate template. The specific steps are as follows:
1)等离子刻蚀的参数为:1) The parameters of plasma etching are:
本底真空5.0×10 -3Pa;反应离子刻蚀功率500W,腔体气压为10Pa,氩气流量40sccm,三氟甲烷流量5sccm,刻蚀时间10min,在玻璃表面构建纳米凸起阵列结构; The background vacuum is 5.0×10 -3 Pa; the reactive ion etching power is 500W, the chamber pressure is 10Pa, the argon flow rate is 40sccm, the trifluoromethane flow rate is 5sccm, the etching time is 10min, and a nano-protrusion array structure is constructed on the glass surface;
2)入气,冷却时间5min,入气时间:3min;2) Air intake, cooling time: 5 minutes, air intake time: 3 minutes;
3)取片。3) Take the film.
步骤4:清洗去除玻璃基材模板表面的残余金属铟,具体步骤如下:Step 4: Clean and remove the residual metal indium on the surface of the glass substrate template. The specific steps are as follows:
常温下,对残余金属铟进行退镀处理,然后纯净水清洗玻璃表面,得到表面具有微纳结构的玻璃基材。At normal temperature, the residual metal indium is deplated, and then the glass surface is cleaned with pure water to obtain a glass substrate with a micro-nano structure on the surface.
对所述玻璃基材表面进行扫描电镜观察,结果参见图12,图12为本发明实施例1制备的玻璃基材的扫描电镜照片。由图12可知,玻璃基材表面具有呈类似阵列结构的纳米尺寸的凸起,该纳米凸起类似于圆台形,底部尺寸大于顶部尺寸,该纳米凸起高120nm,底部尺寸为200nm。The surface of the glass substrate was observed with a scanning electron microscope, and the results are shown in Figure 12. Figure 12 is a scanning electron microscope photo of the glass substrate prepared in Example 1 of the present invention. As can be seen from Figure 12, the surface of the glass substrate has nano-sized protrusions in an array-like structure. The nano-protrusions are similar to a truncated cone shape, and the bottom size is larger than the top size. The nano-protrusions are 120 nm high and the bottom size is 200 nm.
测试所述玻璃基材的性能,其对550nm波长的光的透过率为90%,其反射率为3%,光泽度为92。The performance of the glass substrate was tested. Its transmittance to light with a wavelength of 550 nm was 90%, its reflectance was 3%, and its glossiness was 92.
步骤5:对表面具有微纳结构的玻璃基材进行硬质AR镀膜,具体步骤如下:Step 5: Perform hard AR coating on the glass substrate with micro-nano structure on the surface. The specific steps are as follows:
1)基于TFCALC进行膜系的设计,380~780nm单面透过率平均值要求大于93%,由于可见光波段透过率要求较高,故使用膜堆2H,L选用硬度高、折射率相对低的Al 2O 3,H选用AlN,在光学薄膜软件形成初始膜系HL,于是形成了由L和H的堆叠的膜系,然后在连续目标中输入波段优化条件,确保透过率达到要求;然后在颜色目标中输入LAB值要求,确保颜色为无色,经过一系列的优化设计后得到的膜系结构如表1所示,表1为本发明实施例1提供的AR膜系结构: 1) Based on the design of the film system based on TFCALC, the average single-sided transmittance from 380 to 780nm is required to be greater than 93%. Due to the high transmittance requirements in the visible light band, the film stack 2H is used, and L is selected with high hardness and relatively low refractive index. Al 2 O 3 , H is selected as AlN, and the initial film system HL is formed in the optical thin film software, thus forming a stacked film system of L and H, and then the band optimization conditions are entered in the continuous target to ensure that the transmittance meets the requirements; Then enter the LAB value requirements in the color target to ensure that the color is colorless. The film system structure obtained after a series of optimized designs is shown in Table 1. Table 1 is the AR film system structure provided in Embodiment 1 of the present invention:
表1本发明实施例1提供的AR膜系结构Table 1 AR film system structure provided in Embodiment 1 of the present invention
膜层材料Film material Al 2O 3 Al 2 O 3 AlNAlN Al 2O 3 Al 2 O 3 AlNAlN Al 2O 3 Al 2 O 3 AlNAlN Al 2O 3 Al 2 O 3 AlNAlN Al 2O 3 Al 2 O 3
膜厚nmFilm thickness nm 133.19133.19 16.6316.63 40.0540.05 151.03151.03 45.2545.25 33.6233.62 32.2832.28 70.670.6 80.180.1
2)将步骤4制备的表面具有微纳结构的玻璃转入镀膜机,将设计的膜厚输入到镀膜机,然后设置工艺参数:本底真空5.0×10 -4Pa;温度设置为:80℃;镀膜之前用RF进行前处理,具体参数:RadicalSource功率:4500W;Ar流量:0sccm;O 2流量:120sccm;N 2流量:0sccm;Time:240s; 2) Transfer the glass with micro-nano structure on the surface prepared in step 4 to the coating machine, input the designed film thickness into the coating machine, and then set the process parameters: background vacuum 5.0×10 -4 Pa; temperature setting: 80°C ; Use RF for pre-treatment before coating. Specific parameters: RadicalSource power: 4500W; Ar flow: 0sccm; O 2 flow: 120sccm; N 2 flow: 0sccm; Time: 240s;
AlN层的镀膜参数为:铝靶的溅射功率:7500W,Ar流量:120sccm,N 2流量:80sccm,RadicalSource的功率:4500W; The coating parameters of the AlN layer are: sputtering power of the aluminum target: 7500W, Ar flow: 120sccm, N2 flow: 80sccm, RadicalSource power: 4500W;
Al 2O 3层的镀膜参数:铝靶的溅射功率:8000W,Ar流量:250sccm,O 2流量:120sccm;RadicalSource的功率:4500W; Coating parameters of Al 2 O 3 layer: Sputtering power of aluminum target: 8000W, Ar flow: 250sccm, O 2 flow: 120sccm; Power of RadicalSource: 4500W;
进行镀膜,得到结构为玻璃基材(0.55mm)/Al 2O 3(133.19nm)/AlN(16.63nm)/Al 2O 3(40.05nm)/AlN(151.03nm)/Al 2O 3(45.25nm)/AlN(33.62nm)/Al 2O 3(32.28nm)/AlN(70.6nm)/Al 2O 3(80.1nm)的减反射玻璃。 Coating is performed to obtain a structure of glass substrate (0.55mm)/Al 2 O 3 (133.19nm)/AlN (16.63nm)/Al 2 O 3 (40.05nm)/AlN (151.03nm)/Al 2 O 3 (45.25 nm)/AlN(33.62nm)/Al 2 O 3 (32.28nm)/AlN (70.6nm)/Al 2 O 3 (80.1nm) anti-reflective glass.
对得到的减反射玻璃进行性能测试,结果如下:The obtained anti-reflective glass was tested for performance and the results are as follows:
其光泽度为95;Its glossiness is 95;
维氏硬度为1170HV;Vickers hardness is 1170HV;
500g力下,莫氏硬度7的莫氏硬度笔划过玻璃表面,800lux光线下无肉眼可见划伤;表面粗糙度为5.6μm的大理石表面,5*5cm玻璃上施加10Kg力,行程10cm,来回为一个周期,40周期摩擦后,800lux光线下无肉眼可见划伤。Under 500g force, a Mohs hardness pen with a Mohs hardness of 7 scratches the glass surface, and there is no scratch visible to the naked eye under 800lux light; on a marble surface with a surface roughness of 5.6μm, a 10Kg force is applied to the 5*5cm glass, the stroke is 10cm, and the round trip is After one cycle and 40 cycles of rubbing, there are no visible scratches under 800lux light.
380~780nm范围的光波长区域上单面镀膜反射率为0.46%,单面透过率为94.34%,940nm光的透过率为92.6%;In the light wavelength range of 380 to 780nm, the reflectance of the single-sided coating is 0.46%, the transmittance of the single-sided coating is 94.34%, and the transmittance of 940nm light is 92.6%;
在法向入射条件下,在(L*,a*,b*)色度体系中,反射颜色值a值±2,b值±2,透过颜色值a值±1,b值±1。Under normal incidence conditions, in the (L*, a*, b*) chromaticity system, the reflected color value a value is ±2, the b value is ±2, and the transmitted color value a value is ±1, and the b value is ±1.
玻璃基板应力变形采用玻璃轮廓测试(CAV扫描)玻璃变形量小于0.20mm,如图13所示,图13为本申请实施例1减反射玻璃的CAV扫描结果。The stress deformation of the glass substrate is measured using a glass profile test (CAV scan). The glass deformation amount is less than 0.20 mm, as shown in Figure 13. Figure 13 is the CAV scan result of the anti-reflective glass in Example 1 of the present application.
实施例2Example 2
步骤1:在玻璃基材上真空溅射金属铟膜,具体步骤如下:Step 1: Vacuum sputter the metal indium film on the glass substrate. The specific steps are as follows:
设定10nm金属铟的膜厚输入到镀膜机,然后设置工艺参数:本底真空5.0×10 -4Pa;温度设置为:80℃; Set the film thickness of 10nm metal indium and input it into the coating machine, and then set the process parameters: background vacuum 5.0×10 -4 Pa; temperature setting: 80°C;
镀膜之前用RF进行前处理,具体参数:RadicalSource功率:4500W Ar流量:0sccm;O 2流量:120sccm;N 2流量:0sccm;Time:240s; RF is used for pre-treatment before coating. Specific parameters: RadicalSource power: 4500W Ar flow: 0sccm; O2 flow: 120sccm; N2 flow: 0sccm; Time: 240s;
铟膜镀膜参数:铟靶的溅射功率:3000W,Ar流量:120sccm。Indium film coating parameters: Indium target sputtering power: 3000W, Ar flow rate: 120sccm.
将待镀膜的玻璃基材装载到基片架上,放入上述镀膜设备,关门抽真空,输入镀膜程序,点击成膜开始,完成镀膜;Load the glass substrate to be coated onto the substrate holder, put it into the above-mentioned coating equipment, close the door and evacuate, enter the coating program, click film formation to start, and complete the coating;
步骤2:加热金属铟膜层使其收缩,具体步骤如下:Step 2: Heat the metal indium film layer to shrink it. The specific steps are as follows:
1)镀膜完成后,关闭铟靶和气体,待真空抽到5.0×10 -3Pa,加热金属铟膜,升温速度20℃/min,加热至120℃并保温7min,获得玻璃基材模板,所述模板表面具有金属铟纳米颗粒,该纳米颗粒分布均匀,直径为120~150nm; 1) After the coating is completed, turn off the indium target and gas, wait until the vacuum reaches 5.0×10 -3 Pa, heat the metal indium film at a heating rate of 20°C/min, heat to 120°C and keep it warm for 7 minutes to obtain the glass substrate template. There are metal indium nanoparticles on the surface of the template, the nanoparticles are evenly distributed and have a diameter of 120-150nm;
2)入气,冷却时间5min,入气时间:3min;2) Air intake, cooling time: 5 minutes, air intake time: 3 minutes;
3)取片,转入等离子刻蚀设备内;3) Take the slices and transfer them to plasma etching equipment;
步骤3:对玻璃基材模板进行等离子刻蚀,具体步骤如下:Step 3: Perform plasma etching on the glass substrate template. The specific steps are as follows:
1)等离子刻蚀的参数为:1) The parameters of plasma etching are:
本底真空5.0×10 -3Pa;反应离子刻蚀功率500W,腔体气压为10Pa,氩气流量40sccm,三氟甲烷流量10sccm,刻蚀时间8min,在玻璃表面构建纳米凸起阵列结构; The background vacuum is 5.0×10 -3 Pa; the reactive ion etching power is 500W, the chamber pressure is 10Pa, the argon flow rate is 40sccm, the trifluoromethane flow rate is 10sccm, the etching time is 8min, and a nano-protrusion array structure is constructed on the glass surface;
3)入气,冷却时间5min,入气时间:3min;3) Air intake, cooling time 5min, air intake time: 3min;
4)取片。4) Take the film.
步骤4:清洗去除玻璃基材模板表面的残余金属铟膜层,具体步骤如下:Step 4: Clean and remove the residual metal indium film on the surface of the glass substrate template. The specific steps are as follows:
常温下,对残余金属铟膜层进行退镀处理,然后纯净水清洗玻璃表面,得到表面具有微纳结构的玻璃基材。At normal temperature, the residual metal indium film layer is deplated, and then the glass surface is cleaned with pure water to obtain a glass substrate with a micro-nano structure on the surface.
对所述玻璃基材表面进行扫描电镜观察,结果参见图14,图14为本发明实施例2制备的玻璃基材的扫描电镜照片。由图14可知,玻璃基材表面具有呈类似阵列结构的纳米尺寸的凸起,该纳米凸起类似于圆台形,底部尺寸大于顶部尺寸,该纳米凸起高100nm,底 部尺寸400nm。The surface of the glass substrate was observed with a scanning electron microscope, and the results are shown in Figure 14. Figure 14 is a scanning electron microscope photo of the glass substrate prepared in Example 2 of the present invention. As can be seen from Figure 14, the surface of the glass substrate has nano-sized protrusions in an array-like structure. The nano-protrusions are similar to a truncated cone shape, and the bottom size is larger than the top size. The nano-protrusions are 100 nm high and the bottom size is 400 nm.
测试所述玻璃基材的性能,其对550nm波长的光的透过率为90%,反射率为1%,光泽度为85。The performance of the glass substrate was tested. Its transmittance to light with a wavelength of 550 nm was 90%, its reflectance was 1%, and its glossiness was 85.
步骤5:对表面具有微纳结构的玻璃基材进行硬质AR镀膜,具体步骤如下:Step 5: Perform hard AR coating on the glass substrate with micro-nano structure on the surface. The specific steps are as follows:
1)基于TFCALC进行膜系的设计,380~780nm单面透过率平均值要求大于93%,由于可见光波段透过率要求较高,故使用膜堆2H,L选用硬度高、折射率相对低的Al 2O 3,H选用AlN,在光学薄膜软件形成初始膜系HL,于是形成了由L和H的堆叠的膜系,然后在连续目标中输入波段优化条件,确保透过率达到要求;然后在颜色目标中输入LAB值要求,确保颜色为无色,经过一系列的优化设计后得到的膜系结构如表2所示,表2为本发明实施例2提供的AR膜系结构: 1) Based on the design of the film system based on TFCALC, the average single-sided transmittance from 380 to 780nm is required to be greater than 93%. Due to the high transmittance requirements in the visible light band, the film stack 2H is used, and L is selected with high hardness and relatively low refractive index. Al 2 O 3 , H is selected as AlN, and the initial film system HL is formed in the optical thin film software, thus forming a stacked film system of L and H, and then the band optimization conditions are entered in the continuous target to ensure that the transmittance meets the requirements; Then enter the LAB value requirements in the color target to ensure that the color is colorless. The film system structure obtained after a series of optimized designs is shown in Table 2. Table 2 is the AR film system structure provided in Embodiment 2 of the present invention:
表2本发明实施例2提供的AR膜系结构Table 2 AR film system structure provided in Embodiment 2 of the present invention
膜层材料Film material Al 2O 3 Al 2 O 3 AlNAlN Al 2O 3 Al 2 O 3 AlNAlN Al 2O 3 Al 2 O 3 AlNAlN Al 2O 3 Al 2 O 3 AlNAlN Al 2O 3 Al 2 O 3 AlNAlN Al 2O 3 Al 2 O 3
膜厚nmFilm thickness nm 7878 125125 151151 272272 150150 131131 180180 21twenty one 188188 4747 8383
2)将步骤4制备的表面具有微纳结构的玻璃转入镀膜机,将设计的膜厚输入到镀膜机,然后设置工艺参数:本底真空5.0×10 -4Pa;温度设置为:80℃;镀膜之前用RF进行前处理,具体参数:RadicalSource功率:4500W;Ar流量:0sccm;O 2流量:120sccm;N 2流量:0sccm;Time:240s; 2) Transfer the glass with micro-nano structure on the surface prepared in step 4 to the coating machine, input the designed film thickness into the coating machine, and then set the process parameters: background vacuum 5.0×10 -4 Pa; temperature setting: 80°C ; Use RF for pre-treatment before coating. Specific parameters: RadicalSource power: 4500W; Ar flow: 0sccm; O 2 flow: 120sccm; N 2 flow: 0sccm; Time: 240s;
AlN层的镀膜参数:铝靶的溅射功率:7500W;Ar流量:120sccm,N 2流量:80sccm;RadicalSource功率:4500W; Coating parameters of AlN layer: Sputtering power of aluminum target: 7500W; Ar flow rate: 120sccm, N2 flow rate: 80sccm; RadicalSource power: 4500W;
Al 2O 3层的镀膜参数:铝靶的溅射功率:8000W;Ar流量:250sccm,O 2流量:120sccm;RadicalSource功率:4500W。 Coating parameters of Al 2 O 3 layer: sputtering power of aluminum target: 8000W; Ar flow rate: 250 sccm, O 2 flow rate: 120 sccm; RadicalSource power: 4500W.
进行镀膜,得到结构为玻璃基材(0.55mm)/Al 2O 3(78nm)/AlN(125nm)/Al 2O 3(151nm)/AlN(272nm)/Al 2O 3(150nm)/AlN(131nm)/Al 2O 3(180nm)/AlN(21nm)/Al 2O 3(188nm)/AlN(47nm)/Al 2O 3(83nm)的减反射玻璃。 Coating is carried out to obtain a structure of glass substrate (0.55mm)/Al 2 O 3 (78nm)/AlN (125nm)/Al 2 O 3 (151nm)/AlN (272nm)/Al 2 O 3 (150nm)/AlN ( 131nm)/Al 2 O 3 (180nm)/AlN (21nm)/Al 2 O 3 (188nm)/AlN (47nm)/Al 2 O 3 (83nm) anti-reflective glass.
对得到的减反射玻璃进行性能测试,结果如下:The obtained anti-reflective glass was tested for performance and the results are as follows:
其光泽度为89;Its glossiness is 89;
维氏硬度为1138HV;500g力下,莫氏硬度7的莫氏硬度笔划过玻璃表面,800lux光线下无肉眼可见划伤;表面粗糙度为5.6um的大理石表面,5*5cm玻璃上施加10Kg力,行程10cm,来回为一个周期,40周期摩擦后,800lux光线下无肉眼可见划伤。Vickers hardness is 1138HV; under 500g force, a Mohs hardness pen with a Mohs hardness of 7 scratches the glass surface, and no scratches are visible to the naked eye under 800lux light; on a marble surface with a surface roughness of 5.6um, a 10Kg force is applied to 5*5cm glass , the stroke is 10cm, and the back and forth is one cycle. After 40 cycles of friction, there are no visible scratches under 800lux light.
380~780nm范围的光波长区域上单面镀膜反射率为0.2%,单面透过率为91.8%,940nm光的透过率为91.5%;In the light wavelength range of 380 to 780nm, the reflectance of the single-sided coating is 0.2%, the transmittance of the single-sided coating is 91.8%, and the transmittance of 940nm light is 91.5%;
在法向入射条件下,在(L*,a*,b*)色度体系中,反射颜色值a值±2,b值±2,透过颜色值a值±1,b值±1。Under normal incidence conditions, in the (L*, a*, b*) chromaticity system, the reflected color value a value is ±2, the b value is ±2, and the transmitted color value a value is ±1, and the b value is ±1.
玻璃基板应力变形采用玻璃轮廓测试(CAV扫描)玻璃变形量小于0.10mm,如图15所示,图15为本申请实施例2减反射玻璃的CAV扫描结果。The stress deformation of the glass substrate is measured using a glass profile test (CAV scan). The glass deformation amount is less than 0.10 mm, as shown in Figure 15. Figure 15 is the CAV scan result of the anti-reflective glass of Example 2 of the present application.
上文所述的减反射玻璃用于手机等电子设备的盖板,参见图16,图16为手机的结构示意图,手机100包括屏幕10,屏幕10的外屏(即盖板)由上文所述的减反射玻璃制成。该外屏表面平整,基本无变形;用户使用该手机时,在强烈的阳光下也不会造成炫光,能 够看清屏幕上的显示内容,产品使用体验较好。同时,该手机外屏的抗划伤能力较好,不贴膜也不容易出现肉眼可见的划痕,长时间使用后手机外观较好。The above-mentioned anti-reflective glass is used for the cover of electronic equipment such as mobile phones. See Figure 16. Figure 16 is a schematic structural diagram of a mobile phone. The mobile phone 100 includes a screen 10. The outer screen (i.e. cover) of the screen 10 is composed of the above-mentioned Made of anti-reflective glass. The surface of the external screen is flat and basically non-deformed; when the user uses the phone, it will not cause glare under strong sunlight, and the user can clearly see the content displayed on the screen, and the product usage experience is good. At the same time, the outer screen of the phone has good scratch resistance, and it is not prone to visible scratches without a film. The phone looks better after long-term use.
以上所述,仅为本申请的具体实施方式,但本申请的保护范围并不局限于此,任何在本申请揭露的技术范围内的变化或替换,都应涵盖在本申请的保护范围之内。因此,本申请的保护范围应以所述权利要求的保护范围为准。The above are only specific implementations of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions within the technical scope disclosed in the present application shall be covered by the protection scope of the present application. . Therefore, the protection scope of this application should be subject to the protection scope of the claims.

Claims (23)

  1. 一种减反射玻璃,包括玻璃基板,所述玻璃基板的第一表面具有微纳结构;叠加在所述玻璃基板的第一表面的第一减反射膜层,所述第一减反射膜由高折射率层和低折射率层交替叠加形成。An anti-reflective glass, including a glass substrate, the first surface of the glass substrate having a micro-nano structure; a first anti-reflective film layer superimposed on the first surface of the glass substrate, the first anti-reflective film is made of high The refractive index layer and the low refractive index layer are alternately superimposed.
  2. 根据权利要求1所述的减反射玻璃,其特征在于,所述微纳结构由多个微米尺寸和/或纳米尺寸的凸起构成。The anti-reflective glass according to claim 1, wherein the micro-nano structure is composed of a plurality of micron-sized and/or nano-sized protrusions.
  3. 根据权利要求2所述的减反射玻璃,其特征在于,所述多个凸起呈阵列分布。The anti-reflective glass according to claim 2, wherein the plurality of protrusions are distributed in an array.
  4. 根据权利要求3所述的减反射玻璃,其特征在于,所述凸起的高度为50~1000nm;所述凸起的底部尺寸为100~3000nm;相邻凸起的间距为100~1000nm。The anti-reflective glass according to claim 3, wherein the height of the protrusions is 50-1000 nm; the bottom size of the protrusions is 100-3000 nm; and the spacing between adjacent protrusions is 100-1000 nm.
  5. 根据权利要求1所述的减反射玻璃,其特征在于,所述微纳结构由多个微米尺寸和/或纳米尺寸的沟壑构成。The anti-reflective glass according to claim 1, wherein the micro-nano structure is composed of a plurality of micron-sized and/or nano-sized trenches.
  6. 根据权利要求5所述的减反射玻璃,其特征在于,所述沟壑的深度为50~1000nm;所述沟壑的长度为100~3000nm;所述沟壑顶部的宽度为150~2000;相邻沟壑的间距为100~1000nm。The anti-reflective glass according to claim 5, characterized in that the depth of the gully is 50-1000nm; the length of the gully is 100-3000nm; the width of the top of the gully is 150-2000; the width of the adjacent ravines is The spacing is 100~1000nm.
  7. 根据权利要求1所述的减反射玻璃,其特征在于,所述微纳结构由多个微米尺寸和/或纳米尺寸的凹陷构成。The anti-reflective glass according to claim 1, wherein the micro-nano structure is composed of a plurality of micron-sized and/or nano-sized depressions.
  8. 根据权利要求7所述的减反射玻璃,其特征在于,所述多个凹陷呈阵列分布。The anti-reflective glass according to claim 7, wherein the plurality of depressions are distributed in an array.
  9. 根据权利要求8所述的减反射玻璃,其特征在于,所述凹陷的深度为50~1000nm;所述凹陷顶部的尺寸为100~3000nm;相邻凹陷的间距为100~1000nm。The anti-reflective glass according to claim 8, wherein the depth of the depression is 50-1000 nm; the size of the top of the depression is 100-3000 nm; and the spacing between adjacent depressions is 100-1000 nm.
  10. 根据权利要求1~9任意一项所述的减反射玻璃,其特征在于,所述玻璃基板为钢化玻璃。The anti-reflective glass according to any one of claims 1 to 9, characterized in that the glass substrate is tempered glass.
  11. 根据权利要求1~9任意一项所述的减反射玻璃,其特征在于,所述第一减反射膜层的厚度为500~3000nm。The anti-reflective glass according to any one of claims 1 to 9, wherein the thickness of the first anti-reflective film layer is 500 to 3000 nm.
  12. 根据权利要求1~9任意一项所述的减反射玻璃,其特征在于,所述第一减反射膜层中,高折射率层材料的折射率为1.9~2.3;低折射率层材料的折射率为1.6~1.8。The anti-reflective glass according to any one of claims 1 to 9, characterized in that in the first anti-reflective film layer, the refractive index of the high refractive index layer material is 1.9-2.3; the refractive index of the low refractive index layer material is The rate is 1.6~1.8.
  13. 根据权利要求12所述的减反射玻璃,其特征在于,所述高折射率层的材料为Nb 2O 5、TiO 2、Ta 2O 5、Si 3N 4、ZrO 2、AlN或AlON;所述低折射率层的材料为SiO 2、MgF 2或Al 2O 3The anti-reflective glass according to claim 12, wherein the material of the high refractive index layer is Nb 2 O 5 , TiO 2 , Ta 2 O 5 , Si 3 N 4 , ZrO 2 , AlN or AlON; The material of the low refractive index layer is SiO 2 , MgF 2 or Al 2 O 3 .
  14. 根据权利要求13所述的减反射玻璃,其特征在于,所述低折射率层的材料为Al 2O 3;所述高折射率层的材料为AlN或AlON。 The anti-reflective glass according to claim 13, wherein the material of the low refractive index layer is Al 2 O 3 and the material of the high refractive index layer is AlN or AlON.
  15. 根据权利要求1~9任意一项所述的减反射玻璃,其特征在于,所述玻璃基板与其第一表面相对应的第二表面上叠加有第二减反射膜层。The anti-reflective glass according to any one of claims 1 to 9, characterized in that a second anti-reflective film layer is superimposed on the second surface of the glass substrate corresponding to the first surface.
  16. 一种减反射玻璃,包括玻璃基板,所述玻璃基板的第一表面具有微纳结构;叠加在所述玻璃基板的第一表面的减反射膜层;An anti-reflective glass, including a glass substrate, the first surface of the glass substrate having a micro-nano structure; an anti-reflective film layer superimposed on the first surface of the glass substrate;
    所述减反射玻璃表面在500g力下的莫氏硬度为7以上。The anti-reflective glass surface has a Mohs hardness of 7 or more under a force of 500g.
  17. 根据权利要求16所述的减反射玻璃,其特征在于,所述减反射玻璃采用玻璃轮廓测试时,厚度为0.55mm时其变形量小于0.20mm。The anti-reflective glass according to claim 16, wherein when the anti-reflective glass is tested using a glass profile, the deformation amount is less than 0.20 mm when the thickness is 0.55 mm.
  18. 根据权利要求17所述的减反射玻璃,其特征在于,所述减反射玻璃的维氏硬度为 1100HV以上。The anti-reflection glass according to claim 17, wherein the Vickers hardness of the anti-reflection glass is 1100HV or more.
  19. 根据权利要求18所述的减反射玻璃,其特征在于,所述减反射玻璃在380~780nm范围的光波长区域上,反射率<2%,透过率>93%。The anti-reflection glass according to claim 18, wherein the anti-reflection glass has a reflectance of <2% and a transmittance of >93% in the light wavelength region of 380 to 780 nm.
  20. 一种减反射玻璃的制备方法,其特征在于,包括:A method for preparing anti-reflective glass, which is characterized by including:
    在玻璃基板的至少一个表面形成微纳结构;Form micro-nano structures on at least one surface of the glass substrate;
    在具有微纳结构的玻璃基板表面叠加第一减反射膜层,所述第一减反射膜由高折射率层和低折射率层交替叠加形成。A first anti-reflective film layer is superimposed on the surface of a glass substrate with a micro-nano structure. The first anti-reflective film is formed by alternately superposing a high refractive index layer and a low refractive index layer.
  21. 根据权利要求20所述的制备方法,其特征在于,在玻璃基板的至少一个表面形成微纳结构为通过金属掩膜法在玻璃基板的至少一个表面形成微纳结构;或者采用金刚石飞刀在玻璃基板的至少一个表面形成微纳结构;或者通过酸腐蚀玻璃基板的至少一个表面形成微纳结构。The preparation method according to claim 20, characterized in that forming the micro-nano structure on at least one surface of the glass substrate is to form the micro-nano structure on at least one surface of the glass substrate through a metal mask method; or using a diamond flying knife to form the micro-nano structure on the glass substrate. At least one surface of the substrate forms a micro-nano structure; or at least one surface of the glass substrate is etched with acid to form a micro-nano structure.
  22. 一种电子设备显示屏,包括权利要求1~19任意一项所述的减反射玻璃或权利要求20或21所述的制备方法制备得到的减反射玻璃。An electronic device display screen, including the anti-reflective glass described in any one of claims 1 to 19 or the anti-reflective glass prepared by the preparation method described in claims 20 or 21.
  23. 一种电子设备,包括权利要求22所述的显示屏。An electronic device, comprising the display screen of claim 22.
PCT/CN2023/070076 2022-03-31 2023-01-03 Electronic device WO2023185179A1 (en)

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