WO2023182359A1 - Interféromètre et dispositif de mesure de quantité physique - Google Patents

Interféromètre et dispositif de mesure de quantité physique Download PDF

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Publication number
WO2023182359A1
WO2023182359A1 PCT/JP2023/011245 JP2023011245W WO2023182359A1 WO 2023182359 A1 WO2023182359 A1 WO 2023182359A1 JP 2023011245 W JP2023011245 W JP 2023011245W WO 2023182359 A1 WO2023182359 A1 WO 2023182359A1
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WO
WIPO (PCT)
Prior art keywords
glass plate
light
interferometer
glass
physical quantity
Prior art date
Application number
PCT/JP2023/011245
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English (en)
Japanese (ja)
Inventor
顕 小川
圭一 藤田
広樹 小林
勉 山手
Original Assignee
長野計器株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
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Application filed by 長野計器株式会社 filed Critical 長野計器株式会社
Publication of WO2023182359A1 publication Critical patent/WO2023182359A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02097—Self-interferometers
    • G01B9/02098—Shearing interferometers

Definitions

  • the present invention relates to an interferometer and a physical quantity measuring device.
  • an optical measurement system equipped with an interferometer having a wedge is known (for example, Patent Document 1, etc.).
  • an optical measurement system such as that disclosed in Patent Document 1
  • physical quantities such as pressure can be detected with high sensitivity by analyzing interference light output from an interferometer.
  • An object of the present invention is to provide an interferometer and a physical quantity measuring device that can suppress the influence of environmental factors such as temperature on the detection accuracy of physical quantities.
  • the interferometer of the present invention includes a wedge having a first glass plate portion made of a glass plate, and a second glass plate portion formed of a glass plate and arranged at an angle with respect to the first glass plate portion.
  • an inclination of the second glass plate part with respect to the first glass plate part is defined between the first glass plate part and the second glass plate part.
  • a support part is arranged to The support portion is formed using a member having a small coefficient of linear expansion.
  • the support part is formed using low melting point glass.
  • the support part is formed using low-melting glass with a small coefficient of linear expansion, even if environmental factors such as temperature and humidity change, changes in the inclination of the second glass plate part with respect to the first glass plate part can be avoided. It can be suppressed.
  • a first reflective film made of a dielectric reflective film is disposed on a surface of the first glass plate facing the second glass plate, and the first glass plate in the second glass plate It is preferable that a second reflective film made of a dielectric reflective film is disposed on the surface facing the second reflective film.
  • the first reflective film and the second reflective film made of dielectric reflective films are arranged on the first glass plate part and the second glass plate part, it is possible to increase the interference amplitude of the emitted light. can.
  • the physical quantity measuring device of the present invention includes the above-mentioned interferometer, a light source, a first optical path into which light emitted from the light source enters, and a physical quantity measurement device of a measured object by inputting the light outputted from the first optical path.
  • an optical sensor that outputs light according to the optical sensor
  • a second optical path that receives the light output from the optical sensor and outputs it to the interferometer, and detects an interference signal from the interference light output from the interferometer.
  • a photodetecting section The present invention can produce effects similar to those described above.
  • the first plate glass part and the light detection part are bonded together with an adhesive member.
  • the adhesive member since the first glass plate part and the photodetection part are directly bonded to each other by the adhesive member, it is possible to reduce the thermal influence acting between the first glass plate part and the photodetection part.
  • the light detection unit receives interference light caused by a first reflected light reflected by the first plate glass part and a second reflected light reflected by the second plate glass part.
  • the interfering signal is detected by detecting the interfering signal.
  • the photodetector is configured to receive interference light caused by the first reflected light reflected by the first plate glass part and the second reflected light reflected by the second plate glass part. Therefore, there is no need to bond the photodetector and the first glass plate, and the degree of freedom in arranging the photodetector can be increased.
  • the ratio of the light amount of the signal is theoretically higher than when measuring interference light through transmission, so the S/N ratio is Can be made larger.
  • FIG. 1 is a diagram showing a schematic configuration of a physical quantity measuring device according to a first embodiment of the present invention.
  • FIG. 3 is a cross-sectional view schematically showing the interferometer of the embodiment.
  • FIG. 3 is a cross-sectional view showing a schematic configuration of the wedge of the embodiment.
  • FIG. 2 is a cross-sectional view showing a schematic configuration of a wedge according to a second embodiment.
  • FIG. 1 is a diagram showing a schematic configuration of a physical quantity measuring device 1 according to the first embodiment.
  • the physical quantity measuring device 1 is configured to be able to measure physical quantities such as pressure, acceleration, displacement, inclination, and temperature.
  • the physical quantity measuring device 1 includes a light source 10, an optical cable 20, an optical coupler 30, an optical sensor 40, and a light receiver 50.
  • the light source 10 is a light source that emits first light L1 having a broadband wavelength.
  • the light source 10 is, for example, an SC (Super Continuum) light source, and is configured to be able to emit the first light L1 in the wavelength range of 1200 nm to 1600 nm.
  • the light source 10 is not limited to the above configuration, and may be a combination of an LED (Light Emitting Diode) light source, an ASE (Amplified Spontaneous Emission) light source, an SLD (Super Luminescent Diode) light source, an incandescent light bulb, etc.
  • it may be a narrow band light source that sweeps a wide band, such as a tunable laser.
  • the light source 10 may be configured to be able to emit the first light L1 in a wider wavelength range than the illustrated wavelength range, or may be configured to be able to emit the first light L1 in a wavelength range narrower than the illustrated wavelength range. It may be configured as follows.
  • the optical cable 20 includes a so-called multimode optical fiber, a protection member, and the like.
  • the optical cable 20 includes a first cable 21, a second cable 22, and a third cable 23.
  • the first cable 21 transmits the first light L1 emitted from the light source 10 to the optical coupler 30.
  • the second cable 22 transmits the first light L1 incident through the optical coupler 30 to the optical sensor 40, and also transmits the measurement light M1 and the first light L1 output from the optical sensor 40 to the optical coupler 30.
  • the third cable 23 transmits the measurement light M1 and the first light L1 incident through the optical coupler 30 to the light receiver 50. That is, the first cable 21 and the second cable 22 constitute the first optical path of the present invention, and the second cable 22 and the third cable 23 constitute the second optical path of the present invention. Note that the first cable 21, second cable 22, and third cable 23 that constitute the optical cable 20 are not limited to those that include multimode optical fibers, but for example, they may include single mode optical fibers. It may be configured in advance.
  • the optical coupler 30 is a so-called 2 ⁇ 2 coupler.
  • the optical coupler 30 is provided on the optical cable 20.
  • the optical coupler 30 is provided to optically connect the first cable 21, the second cable 22, and the third cable 23.
  • the optical coupler 30 transmits the first light L1 emitted from the light source 10 to the optical sensor 40, and transmits the measurement light M1 and the first light L1 output from the optical sensor 40 to the light receiver 50.
  • the optical sensor 40 is placed on an object to be measured (not shown), and is configured to be able to emit measurement light M1 according to a physical quantity acting on the object.
  • the optical sensor 40 includes a measurement sensor element 41 that receives the first light L1 transmitted through the optical coupler 30 and outputs the reflected light to the optical coupler 30.
  • the measurement sensor element 41 is composed of a pair of reflective elements arranged close to each other, and constitutes a Fabry-Perot interferometer. Specifically, a pair of reflective elements constituting the measurement sensor element 41 are formed apart from each other by a predetermined distance, and each functions as a mirror. The pair of reflecting elements reflects light in a predetermined wavelength range. Thereby, the pair of reflective elements constitute a Fabry-Perot interferometer. That is, the optical sensor 40 is configured as a Fabry-Perot interference type sensor. Therefore, the optical sensor 40 is configured to be able to output the measurement light M1 depending on the physical quantity acting on the object to be measured.
  • the measurement sensor element 41 outputs the measurement light M1, which is reflected light, to the optical coupler 30.
  • the measurement sensor element 41 reflects a portion of the first light L1 as is, along with the measurement light M1. That is, the optical sensor 40 outputs the measurement light M1 and the first light L1 to the optical coupler 30, as described above.
  • the light receiver 50 receives the measurement light M1 and the first light L1 output from the optical sensor 40 and calculates a physical quantity acting on the object to be measured.
  • the light receiver 50 includes an interferometer 60 and an MPU 70.
  • FIG. 2 is a cross-sectional view schematically showing the interferometer 60
  • FIG. 3 is a cross-sectional view schematically showing the wedge 62.
  • the interferometer 60 is configured to interfere with the measurement light M1 output from the optical sensor 40 to emit a first interference light, and to detect the first interference light.
  • the interferometer 60 includes a Fresnel cylindrical lens 61, a wedge 62, a photodetector 63, and a case 64.
  • the Fresnel cylindrical lens 61 is an optical lens in which concentric grooves with different angles are formed in a resin sheet, and each groove acts as a curved surface, so that the incident measurement light M1 and the first The light L1 is focused toward the wedge 62.
  • the wedge 62 interferes with the measurement light M1 incident through the Fresnel cylindrical lens 61 and emits interference light. Note that the first light L1 is emitted as is without interference.
  • the wedge 62 includes a first glass plate portion 621 , a second glass plate portion 622 , a first support portion 623 , and a second support portion 624 .
  • the first glass plate portion 621 is made of a flat glass plate, and a first reflective film 625 is disposed on the surface facing the second glass plate portion 622 .
  • the second glass plate portion 622 is made of a flat glass plate, and a second reflective film 626 is disposed on the surface facing the first glass plate portion 621 .
  • the second glass plate portion 622 is arranged to be inclined with respect to the first glass plate portion 621. Therefore, the measurement light M1 incident through the Fresnel cylindrical lens 61 is transmitted and reflected by the first reflective film 625 of the first plate glass part 621 and the second reflective film 626 of the second plate glass part 622, and is transmitted and reflected. The measured measurement lights M1 interfere with each other, and interference light is emitted.
  • the first plate glass section 621 is bonded to the photodetector section 63 using an adhesive member 627.
  • the first reflective film 625 and the second reflective film 626 are composed of dielectric reflective films.
  • the first plate glass portion 621 and the first glass plate part 621 and the first plate glass part 621 transmit and reflect the measurement light M1 that has entered through the Fresnel cylindrical lens 61, while transmitting the first light L1 that has entered through the Fresnel cylindrical lens 61.
  • the two-pane glass portion 622 can be easily configured. That is, since the first reflective film 625 and the second reflective film 626 are arranged on the first glass plate portion 621 and the second glass plate portion 622, the interference amplitude of the emitted light can be increased.
  • the first support portion 623 and the second support portion 624 are arranged between the first glass plate portion 621 and the second glass plate portion 622, and define the inclination of the second glass plate portion 622 with respect to the first glass plate portion 621.
  • the first support part 623 is arranged on one end side of the first glass plate part 621 and the second glass plate part 622
  • the second support part 624 is arranged on the side of one end of the first glass plate part 621 and the second glass plate part 622. It is arranged on the other end side of the second plate glass section 622.
  • the first support portion 623 is configured to have a longer length in the direction orthogonal to the first glass plate portion 621 than the second support portion 624 .
  • the first glass plate portion 621, the second glass plate portion 622, the first support portion 623, and the second support portion 624 form a trapezoid.
  • the first support portion 623 and the second support portion 624 are formed by, for example, screen printing technology. Thereby, the sizes of the first support portion 623 and the second support portion 624 can be easily controlled.
  • the first support part 623 and the second support part 624 are formed using low melting point glass with a small coefficient of linear expansion.
  • the sizes of the first support part 623 and the second support part 624, which are formed using low-melting glass do not easily change, so the first support part
  • the inclination of the second glass plate portion 622 with respect to the first glass plate portion 621 defined by the second support portion 623 and the second support portion 624 also becomes difficult to change. Therefore, even if environmental factors such as temperature and humidity change, the intensity of the interference light that is transmitted and reflected by the first reflective film 625 of the first glass plate part 621 and the second reflective film 626 of the second glass plate part 622 is strong. Since the change can be made small, the influence of environmental factors on the interference light can be suppressed.
  • the light detection unit 63 is configured to be able to detect interference light emitted from the wedge 62 and output a first signal corresponding to the interference light. Further, the light detection unit 63 is configured to be able to detect the first light L1 emitted from the wedge 62 and output a second signal corresponding to the first light L1. Note that the first signal is an example of an interference signal of the present invention.
  • the photodetection section 63 is configured as a so-called line sensor that includes a plurality of photodetection elements arranged in an array on the back side of the first plate glass section 621.
  • the photodetecting section 63 is a photodetecting element made of Si and detecting interference light in a short wavelength range, or a photodetecting element made of InGaAs and detecting interference light in a long wavelength range, or the like. A plurality of both are arranged in an array.
  • the photodetecting section 63 is bonded to the first glass plate section 621 using an adhesive member 627.
  • the first glass plate part 621 and the photodetector part 63 are directly bonded together by the adhesive member 627, so that the influence of heat acting between the first glass plate part 621 and the photodetector part 63 can be reduced. .
  • the light detection unit 63 is not limited to the above configuration, and detects the interference light and the first light L1 emitted from the wedge 62, and generates a first signal and a signal corresponding to the first interference light and the first light L1. It suffices if it is configured to be able to output the second signal.
  • the interferometer 60 is configured as a wedge shearing interferometer including the wedge 62.
  • the interferometer 60 is not limited to the above configuration, and may, for example, include a cylindrical lens instead of the Fresnel cylindrical lens 61, or may not include a lens such as a Fresnel cylindrical lens or a cylindrical lens. Good too.
  • the case 64 is a storage container that houses the Fresnel cylindrical lens 61, the wedge 62, and the photodetector 63.
  • a ferrule 65 for connecting the case 64 and the third cable 23 is arranged outside the case 64.
  • the measurement light M1 and the first light L1 emitted via the third cable 23 enter the inside of the case 64 via the ferrule 65.
  • the configuration is not limited to the above configuration; for example, the third cable 23 and the case 64 may be connected via an optical connector, or the tip of the third cable 23 may be directly connected to the case 64. May be connected.
  • the Fresnel cylindrical lens 61, the wedge 62, and the photodetector 63 are housed in the case 64, so that the influence of environmental factors on the Fresnel cylindrical lens 61, the wedge 62, and the photodetector 63 can be reduced. can be made smaller.
  • the MPU 70 is a so-called Micro Processing Unit, receives the first signal and the second signal output from the photodetector 63, and calculates a physical quantity acting on the object to be measured.
  • the MPU 70 obtains interference fringes according to the interference light included in the first signal, and calculates a phase change from periodic intensity changes of the interference fringes. Then, the MPU 70 calculates the physical quantity according to the phase change by calculating the correlation between this phase change and the physical quantity in advance. Furthermore, in this embodiment, the MPU 70 corrects the physical quantity calculated based on the first signal based on the second signal. Thereby, for example, even if the measurement light M1 changes due to deterioration of the light source 10, the change in the measurement light M1 can be corrected based on the second signal corresponding to the first light L1.
  • the first glass plate part A first support portion 623 and a second support portion 624 that define the inclination of the second plate glass portion 622 with respect to the second glass plate portion 621 are arranged.
  • the first support portion 623 and the second support portion 624 are formed using low melting point glass with a small coefficient of linear expansion.
  • the first support part 623 and the second support part 624 which are formed using low-melting point glass, can support the second plate glass part 622 relative to the first glass plate part 621. Since the inclination is defined, a change in the inclination of the second glass plate portion 622 with respect to the first glass plate portion 621 can be suppressed. Therefore, the influence of environmental factors on interference light can be suppressed.
  • the first glass plate portion 621 and the light detection portion 63 are directly bonded to each other by the adhesive member 627, so that the influence of heat acting between the first glass plate portion 621 and the light detection portion 63 is reduced. Can be made smaller.
  • the photodetector 63A receives interference light caused by the first reflected light R1 reflected by the first glass plate 621A and the second reflected light R2 reflected by the second glass plate 622A.
  • This embodiment differs from the first embodiment in that it is configured to detect an interference signal.
  • the same components as those in the first embodiment are given the same reference numerals and the description thereof will be omitted.
  • FIG. 4 is a cross-sectional view schematically showing the wedge 62A.
  • the wedge 62A similarly to the first embodiment described above, the wedge 62A includes a first glass plate portion 621A, a second glass plate portion 622A, a first support portion 623A, and a second support portion 624A.
  • a first reflective film 625A made of a dielectric reflective film is arranged on the first glass plate part 621A, and a second reflective film 626A made of a dielectric reflective film is arranged on the second glass plate part 622A. has been done.
  • the wedge 62A is capable of outputting interference light formed by the first reflected light R1 reflected by the first glass plate portion 621A and the second reflected light R2 reflected by the second glass plate portion 622A. It is composed of
  • the photodetecting section 63A is arranged at a position facing the second plate glass section 622A, and is configured as a so-called line sensor including a plurality of photodetecting elements arranged in an array. In this case, it is desirable that the photodetector 63A be at an appropriate position where it can receive the reflected light without interfering with the optical path of the incident light. Further, the photodetecting section 63A may be arranged parallel to the second glass plate section 622A, or may be arranged at a predetermined angle with respect to the second glass plate section 622A.
  • the photodetector 63A detects interference light caused by the first reflected light R1 reflected by the first plate glass part 621A and the second reflected light R2 reflected by the second plate glass part 622A. is configured so that it can be input. Furthermore, the photodetector 63A is configured to be able to output a first signal according to the interference light.
  • the light detection section 63A is arranged at a position facing the second plate glass section 622A. There is no need to glue and place it. Therefore, in this embodiment, the degree of freedom in arranging the photodetector 63A can be increased, and an adhesive can be made unnecessary.
  • the ratio of the light amount of the signal is theoretically higher than when measuring interference light by transmission, so the S/N The ratio can be increased.
  • the photodetector 63A detects interference light caused by the first reflected light R1 reflected by the first plate glass part 621A and the second reflected light R2 reflected by the second plate glass part 622A. Since the light detecting section 63A and the first plate glass section 621A are configured to be incident, there is no need to adhere the photo detecting section 63A and the first plate glass section 621A, and the degree of freedom in the arrangement of the photo detecting section 63A can be increased. In addition, when the photodetector section 63A is arranged to face the second glass plate section 622A, the ratio of the light amount of the signal is theoretically higher than when measuring interference light by transmission, so the S/N The ratio can be increased.
  • the present invention is not limited to the above-described embodiments, and the present invention includes modifications, improvements, etc. within a range that can achieve the object of the present invention.
  • the optical coupler 30 is used to combine and demultiplex optical paths, but the invention is not limited to this.
  • a beam splitter may be used to combine and demultiplex optical paths.
  • the physical quantity measuring device 1 was provided with one light source 10, but the present invention is not limited to this.
  • the physical quantity measuring device may be provided with a light source for reference light in addition to a light source for measurement light.
  • the optical sensor 40 is configured to include the measurement sensor element 41 that constitutes a Fabry-Perot etalon from a pair of reflective elements arranged close to each other, but the optical sensor 40 is not limited to this.
  • the optical sensor may include a Fizeau interference type measurement sensor element.
  • the physical quantity measuring device 1 is provided with one optical sensor 40, but the present invention is not limited to this.
  • the physical quantity measuring device may be provided with a plurality of optical sensors each having a different wavelength peak center.
  • the plurality of optical sensors may be provided at the same location on the object to be measured. With this configuration, it is possible to accurately measure changes in different physical quantities, such as pressure and temperature, at the same location on the object to be measured.
  • the plurality of optical sensors may be provided at different locations on the object to be measured. With this configuration, changes in physical quantities at different positions of the object to be measured can be accurately measured.
  • the wedges 62 and 62A were configured to include the first support portions 623 and 623A and the second support portions 624 and 624A, but the wedges are not limited thereto.
  • it may be configured to include only a support portion disposed on one end side of the first glass plate portion and the second glass plate portion.
  • the first glass plate part, the second glass plate part, and the support part may form a right triangle.
  • the first reflective films 625, 625A and the second reflective films 626, 626A are composed of dielectric reflective films, but are not limited thereto.
  • the first reflective film and the second reflective film may be formed of a metal film or the like, and may be configured to increase the interference amplitude between the measurement light and the first light.
  • the first support portions 623, 623A and the second support portions 624, 624A are formed using low melting point glass, but are not limited to this.
  • it may be formed using a resin adhesive or ceramic having a small coefficient of linear expansion.
  • the first glass plate portion 621 and the light detection portion 63 are directly bonded to each other by the adhesive member 627, but the present invention is not limited thereto.
  • the light detection section may be arranged to face the first plate glass section, or may be in direct contact with the first plate glass section without using any member.
  • the photodetecting section 63A was arranged at a position facing the second plate glass section 622A, but the present invention is not limited thereto.
  • the photodetecting section 63A may be arranged so as to be in contact with the second plate glass section 622A.
  • SYMBOLS 1 Physical quantity measuring device, 10... Light source, 20... Optical cable, 21... First cable, 22... Second cable, 23... Third cable, 30... Optical coupler, 40... Optical sensor, 41... Sensor element for measurement, 50 ... Light receiver, 60... Interferometer, 61... Fresnel cylindrical lens, 62, 62A... Wedge, 63, 63A... Photodetector, 64... Case, 65... Ferrule, 70... MPU, 621, 621A... First plate glass section, 622, 622A... Second plate glass part, 623, 623A... First support part, 624, 624A... Second support part, 625, 625A... First reflective film, 626, 626A... Second reflective film, 627... Adhesive member.

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  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)

Abstract

Un interféromètre est caractérisé en ce qu'il comprend un coin (62) comportant une première partie verre laminé (621) constituée d'une plaque de verre, et une seconde partie verre laminé (622) agencée de façon à être inclinée par rapport à la première partie verre laminé (621) et formée à partir d'une plaque de verre, une première partie support (623) et une seconde partie support (624) qui sont formées à l'aide d'éléments présentant un faible coefficient de dilatation linéaire et qui prescrivent l'inclinaison de la première partie verre laminé (621) et de la seconde partie verre laminé (622), disposées entre la première partie verre laminé (621) et la seconde partie verre laminé (622).
PCT/JP2023/011245 2022-03-24 2023-03-22 Interféromètre et dispositif de mesure de quantité physique WO2023182359A1 (fr)

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JP2022-047944 2022-03-24
JP2022047944 2022-03-24

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0315727A (ja) * 1989-01-18 1991-01-24 Photonetics Sa 光電測定装置
JPH07239208A (ja) * 1993-12-04 1995-09-12 Renishaw Plc 干渉応用測定装置
US7046374B1 (en) * 2002-03-14 2006-05-16 Avanex Corporation Interferometers for optical communications utilizing photo-sensitive materials
US20080187011A1 (en) * 2007-02-05 2008-08-07 Palo Alto Research Center Incorporated Tuning optical cavities
JP2022003682A (ja) * 2020-05-29 2022-01-11 Ａｇｃ株式会社 封着パッケージ及び有機エレクトロルミネセンス素子
WO2022191201A1 (fr) * 2021-03-10 2022-09-15 長野計器株式会社 Dispositif de mesure de grandeur physique

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0315727A (ja) * 1989-01-18 1991-01-24 Photonetics Sa 光電測定装置
JPH07239208A (ja) * 1993-12-04 1995-09-12 Renishaw Plc 干渉応用測定装置
US7046374B1 (en) * 2002-03-14 2006-05-16 Avanex Corporation Interferometers for optical communications utilizing photo-sensitive materials
US20080187011A1 (en) * 2007-02-05 2008-08-07 Palo Alto Research Center Incorporated Tuning optical cavities
JP2022003682A (ja) * 2020-05-29 2022-01-11 Ａｇｃ株式会社 封着パッケージ及び有機エレクトロルミネセンス素子
WO2022191201A1 (fr) * 2021-03-10 2022-09-15 長野計器株式会社 Dispositif de mesure de grandeur physique

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