WO2023176549A1 - 圧電アクチュエータ、液体吐出ヘッドおよび記録装置 - Google Patents

圧電アクチュエータ、液体吐出ヘッドおよび記録装置 Download PDF

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Publication number
WO2023176549A1
WO2023176549A1 PCT/JP2023/008323 JP2023008323W WO2023176549A1 WO 2023176549 A1 WO2023176549 A1 WO 2023176549A1 JP 2023008323 W JP2023008323 W JP 2023008323W WO 2023176549 A1 WO2023176549 A1 WO 2023176549A1
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WO
WIPO (PCT)
Prior art keywords
electrode
groove portion
piezoelectric
piezoelectric actuator
piezoelectric element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2023/008323
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English (en)
French (fr)
Japanese (ja)
Inventor
諒太 加来
一宏 有木
渉 池内
大輔 穂積
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to EP23770505.8A priority Critical patent/EP4494880A4/en
Priority to US18/846,271 priority patent/US20250196498A1/en
Priority to JP2024507760A priority patent/JPWO2023176549A1/ja
Priority to CN202380026123.XA priority patent/CN118829544A/zh
Publication of WO2023176549A1 publication Critical patent/WO2023176549A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14258—Multi layer thin film type piezoelectric element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14419—Manifold
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14459—Matrix arrangement of the pressure chambers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14491—Electrical connection

Definitions

  • the disclosed embodiments relate to a piezoelectric actuator, a liquid ejection head, and a recording device.
  • an inkjet printer or an inkjet plotter using an inkjet recording method is known.
  • Such an inkjet printing apparatus is equipped with a liquid ejection head for ejecting liquid.
  • the liquid ejection head ejects liquid within the pressure chamber from the nozzle by driving a piezoelectric element located above the pressure chamber to change the pressure within the pressure chamber.
  • a piezoelectric element includes a piezoelectric body, an internal electrode located inside the piezoelectric body, and a surface electrode located on the surface of the piezoelectric body.
  • Patent Document 1 discloses a piezoelectric element in which a groove portion surrounding the surface electrode is formed around the surface electrode for the purpose of reducing the occurrence of crosstalk between the piezoelectric elements. In the thickness direction of the piezoelectric element, the groove reaches a position deeper than the internal electrode.
  • a piezoelectric actuator includes a piezoelectric element that deforms upon application of a voltage.
  • the piezoelectric element has a diaphragm, an internal electrode, a piezoelectric ceramic body, a surface electrode, a connection electrode, and a groove.
  • the internal electrode is located on the surface of the diaphragm.
  • a piezoceramic body is located on the surface of the internal electrode.
  • a surface electrode is located on the surface of the piezoelectric ceramic body.
  • the connection electrode is located on the surface of the piezoelectric ceramic body and connected to the surface electrode.
  • the groove portion is located around or inside the surface electrode in a plan view when the piezoelectric element is viewed from a direction perpendicular to the surface of the piezoelectric ceramic body, and extends in a shape corresponding to the outer shape of the surface electrode.
  • the groove has a deep groove and a shallow groove.
  • the deep groove has a depth that is greater than the depth that reaches the internal electrode.
  • the shallow groove portion is located closer to the connection electrode than the deep groove portion, and has a depth that is less than the depth that reaches the internal electrode.
  • FIG. 1 is a schematic front view of a printer according to an embodiment.
  • FIG. 2 is a schematic plan view of the printer according to the embodiment.
  • FIG. 3 is a schematic exploded perspective view of the liquid ejection head according to the embodiment.
  • FIG. 4 is a schematic plan view showing main parts of the head main body according to the embodiment.
  • FIG. 5 is a schematic enlarged view of region V shown in FIG.
  • FIG. 6 is a schematic cross-sectional view taken along the line VI-VI shown in FIG.
  • FIG. 7 is a schematic plan view of the piezoelectric element according to the embodiment.
  • FIG. 8 is a schematic cross-sectional view taken along arrow VIII-VIII shown in FIG.
  • FIG. 9 is a schematic diagram for explaining the position of the boundary between the deep groove and the shallow groove.
  • FIG. 9 is a schematic diagram for explaining the position of the boundary between the deep groove and the shallow groove.
  • FIG. 10 is a schematic diagram showing an example of the position of the groove portion according to the embodiment.
  • FIG. 11 is a schematic diagram showing an example of the position of the groove portion according to the embodiment.
  • FIG. 12 is a schematic cross-sectional view of a groove according to a first alternative embodiment.
  • FIG. 13 is a schematic plan view showing the configuration of a groove according to a second alternative embodiment.
  • FIG. 14 is a schematic cross-sectional view showing the configuration of a groove according to a second alternative embodiment.
  • FIG. 15 is a schematic cross-sectional view showing the configuration of a groove portion according to a third alternative embodiment.
  • FIG. 16 is a schematic plan view showing the configuration of a piezoelectric element according to a fourth alternative embodiment.
  • Ion migration is a phenomenon in which metal on the anode side is ionized by the application of voltage, the ionized metal moves to the cathode, and is generated again as metal at the cathode. If the metal generated at the cathode grows and reaches the anode, there is a risk that the anode and cathode will be electrically connected and a short circuit will occur.
  • FIG. 1 is a schematic front view of a printer 1 according to an embodiment.
  • FIG. 2 is a schematic plan view of the printer 1 according to the embodiment.
  • the printer 1 according to the embodiment is, for example, a color inkjet printer.
  • the printer 1 includes a paper feed roller 2, a guide roller 3, a coating machine 4, a head case 5, a plurality of transport rollers 6, a plurality of frames 7, and a plurality of liquid ejection heads. 8, a conveyance roller 9, a dryer 10, a conveyance roller 11, a sensor section 12, and a collection roller 13.
  • the conveyance roller 6 is an example of a conveyance section.
  • the printer 1 includes a control section 14 that controls each section of the printer 1.
  • the control unit 14 includes a paper feed roller 2, a guide roller 3, a coating machine 4, a head case 5, a plurality of transport rollers 6, a plurality of frames 7, a plurality of liquid ejection heads 8, a transport roller 9, a dryer 10, and a transport roller. 11. Controls the operation of the sensor section 12 and collection roller 13.
  • the printer 1 records images, characters, etc. on the printing paper P by causing droplets to land on the printing paper P.
  • Print paper P is an example of a recording medium.
  • the printing paper P is wound around the paper feed roller 2 before use.
  • the printer 1 transports printing paper P wound around a paper feed roller 2 into a head case 5 via a guide roller 3 and a coater 4.
  • the coating machine 4 uniformly applies the coating agent to the printing paper P. Thereby, since the printing paper P can be surface-treated, the printing quality of the printer 1 can be improved.
  • the head case 5 accommodates a plurality of transport rollers 6, a plurality of frames 7, and a plurality of liquid ejection heads 8. Inside the head case 5, a space is formed that is isolated from the outside except for a portion where the printing paper P enters and exits and is connected to the outside.
  • control unit 14 In the internal space of the head case 5, at least one of control factors such as temperature, humidity, and atmospheric pressure is controlled by the control unit 14 as necessary.
  • the conveyance roller 6 conveys the printing paper P to the vicinity of the liquid ejection head 8 inside the head case 5 .
  • the frame 7 is a rectangular flat plate, and is located close to above the printing paper P conveyed by the conveyance roller 6. Further, as shown in FIG. 2, the frame 7 is positioned such that its longitudinal direction is orthogonal to the conveyance direction of the printing paper P. Inside the head case 5, a plurality of (for example, four) frames 7 are positioned at predetermined intervals along the conveyance direction of the printing paper P.
  • a liquid for example, ink
  • the liquid ejection head 8 ejects liquid supplied from a liquid tank.
  • the control unit 14 controls the liquid ejection head 8 based on data such as images or characters, and causes the liquid to be ejected toward the printing paper P.
  • the distance between the liquid ejection head 8 and the printing paper P is, for example, about 0.5 to 20 mm.
  • the liquid ejection head 8 is fixed to the frame 7.
  • the liquid ejection head 8 is positioned such that its longitudinal direction is perpendicular to the conveyance direction of the printing paper P.
  • the printer 1 according to the embodiment is a so-called line printer in which the liquid ejection head 8 is fixed inside the printer 1.
  • the printer 1 according to the embodiment is not limited to a line printer, and may be a so-called serial printer.
  • a serial printer is a printer that alternately records by moving the liquid ejection head 8 back and forth in a direction intersecting the conveying direction of the printing paper P, for example, in a direction substantially perpendicular to the conveyance direction, and transporting the printing paper P. This is a printer that uses the same method.
  • a plurality of (for example, five) liquid ejection heads 8 are fixed to one frame 7.
  • FIG. 2 an example is shown in which three liquid ejection heads 8 are located in the front and two liquid ejection heads 8 are located in the rear in the transport direction of the printing paper P.
  • the liquid ejection heads 8 are positioned so that their centers do not overlap.
  • a plurality of liquid ejection heads 8 located on one frame 7 constitute a head group 8A.
  • the four head groups 8A are located along the conveyance direction of the printing paper P. Ink of the same color is supplied to the liquid ejection heads 8 belonging to the same head group 8A. Thereby, the printer 1 can perform printing with four color inks using the four head groups 8A.
  • the colors of ink ejected from each head group 8A are, for example, magenta (M), yellow (Y), cyan (C), and black (K).
  • the control unit 14 can print a color image on the printing paper P by controlling each head group 8A to eject ink of a plurality of colors onto the printing paper P.
  • a coating agent may be ejected onto the printing paper P from the liquid ejection head 8.
  • the number of liquid ejection heads 8 included in one head group 8A, the number of head groups 8A mounted on the printer 1, etc. can be changed as appropriate depending on the object to be printed, printing conditions, etc. For example, if the printing paper P is printed in a single color and the range that can be printed with one liquid ejection head 8 is printed, the number of liquid ejection heads 8 installed in the printer 1 may be one. good.
  • the printing paper P that has been printed inside the head case 5 is transported to the outside of the head case 5 by transport rollers 9 and passes through the inside of the dryer 10.
  • the dryer 10 dries the printed printing paper P.
  • the printing paper P dried in the dryer 10 is transported by a transport roller 11 and collected by a collection roller 13.
  • the printer 1 by drying the printing paper P in the dryer 10, it is possible to reduce the adhesion of the printing paper P wound up overlappingly to each other and the rubbing of undried liquid on the collection roller 13. can.
  • the sensor section 12 is composed of a position sensor, a speed sensor, a temperature sensor, or the like.
  • the control section 14 can determine the status of each section of the printer 1 based on information from the sensor section 12 and control each section of the printer 1 .
  • the printing target in the printer 1 is not limited to the printing paper P, and rolls of cloth etc. You can also use it as the printing paper P, and rolls of cloth etc.
  • the printer 1 may place it on a conveyor belt and convey it. By using the conveyor belt, the printer 1 can print on sheets of paper, cut cloth, wood, tiles, and the like.
  • the printer 1 may print a wiring pattern of an electronic device or the like by discharging a liquid containing conductive particles from the liquid discharging head 8. Further, the printer 1 may produce a chemical agent by ejecting a predetermined amount of a liquid chemical agent or a liquid containing a chemical agent or the like from the liquid ejecting head 8 toward a reaction container or the like.
  • FIG. 3 is a schematic exploded perspective view of the liquid ejection head 8 according to the embodiment.
  • the liquid ejection head 8 includes a head main body 20, a wiring section 30, a housing 40, and a pair of heat sinks 45.
  • the head main body 20 includes a flow path member 21, a piezoelectric actuator 22 (see FIG. 4), and a reservoir 23.
  • the direction in which the head body 20 is provided in the liquid ejection head 8 will be referred to as "bottom", and the direction in which the housing 40 is provided with respect to the head body 20 will be referred to as "upper”. There is.
  • the flow path member 21 of the head body 20 has a substantially flat plate shape, and has one main surface, a first surface 21a, and a second surface 21b (see FIG. 6) located on the opposite side of the first surface 21a. have.
  • the first surface 21a has an opening (not shown), and liquid is supplied from the reservoir 23 into the channel member 21 through the opening.
  • a plurality of ejection holes 163 for ejecting liquid onto the printing paper P are located on the second surface 21b.
  • the channel member 21 has a channel therein that allows liquid to flow from the first surface 21a to the second surface 21b.
  • the piezoelectric actuator 22 is located on the first surface 21a of the flow path member 21.
  • the piezoelectric actuator 22 has a plurality of piezoelectric elements 170 (see FIG. 6). Further, the piezoelectric actuator 22 is electrically connected to the flexible substrate 31 of the wiring section 30 .
  • a reservoir 23 is located on the piezoelectric actuator 22.
  • the reservoir 23 is provided with openings 23a at both ends in the main scanning direction, which is perpendicular to the sub-scanning direction, which is the conveyance direction of the printing paper P, and parallel to the printing paper P.
  • the reservoir 23 has a flow path inside, and liquid is supplied from the outside through an opening 23a.
  • the reservoir 23 supplies liquid to the channel member 21 . Further, the reservoir 23 stores the liquid supplied to the flow path member 21 .
  • the wiring section 30 includes a flexible board 31, a wiring board 32, a plurality of driver ICs 33, a pressing member 34, and an elastic member 35.
  • the flexible substrate 31 transmits a predetermined signal sent from the outside to the head main body 20. Note that, as shown in FIG. 3, the liquid ejection head 8 according to the embodiment may include two flexible substrates 31.
  • One end of the flexible substrate 31 is electrically connected to the piezoelectric actuator 22 of the head main body 20.
  • the other end of the flexible substrate 31 is drawn out upward so as to be inserted through the slit portion 23b of the reservoir 23, and is electrically connected to the wiring board 32.
  • the piezoelectric actuator 22 of the head main body 20 and the outside can be electrically connected.
  • the wiring board 32 is located above the head main body 20.
  • the wiring board 32 distributes signals to the plurality of driver ICs 33.
  • the plurality of driver ICs 33 are located on one main surface of the flexible substrate 31. As shown in FIG. 3, in the liquid ejection head 8 according to the embodiment, two driver ICs 33 are provided on each flexible substrate 31; The number is not limited to two.
  • the driver IC 33 drives the piezoelectric actuator 22 of the head body 20 based on the drive signal sent from the control unit 14 (see FIG. 1). Thereby, the driver IC 33 drives the liquid ejection head 8.
  • the pressing member 34 has a substantially U-shape in cross-sectional view, and presses the driver IC 33 on the flexible substrate 31 toward the heat sink 45 from inside. Thereby, in the embodiment, the heat generated when the driver IC 33 is driven can be efficiently radiated to the outer heat sink 45.
  • the elastic member 35 is provided so as to be in contact with an outer wall of a pressing portion (not shown) of the pressing member 34. By providing such an elastic member 35, it is possible to reduce the possibility that the pressing member 34 will damage the flexible substrate 31 when the pressing member 34 presses the driver IC 33.
  • the elastic member 35 is made of, for example, double-sided foam tape. Further, by using a non-silicon thermally conductive sheet as the elastic member 35, for example, the heat dissipation of the driver IC 33 can be improved. Note that the elastic member 35 does not necessarily need to be provided.
  • the housing 40 is arranged on the head main body 20 so as to cover the wiring section 30. Thereby, the housing 40 can seal the wiring section 30.
  • the housing 40 is made of, for example, resin or metal.
  • the housing 40 has a box shape that extends in the main scanning direction, and has a first opening 40a and a second opening 40b on a pair of opposing sides along the main scanning direction. Further, the housing 40 has a third opening 40c on the bottom surface and a fourth opening 40d on the top surface.
  • One side of the heat sink 45 is arranged in the first opening 40a so as to close the first opening 40a, and the other side of the heat sink 45 is arranged in the second opening 40b so as to close the second opening 40b. There is.
  • the heat sink 45 is provided to extend in the main scanning direction, and is made of metal, alloy, or the like with high heat dissipation.
  • the heat sink 45 is provided so as to be in contact with the driver IC 33, and radiates heat generated by the driver IC 33.
  • the pair of heat sinks 45 are each fixed to the housing 40 with screws (not shown). Therefore, the housing 40 to which the heat sink 45 is fixed has a box shape in which the first opening 40a and the second opening 40b are closed and the third opening 40c and the fourth opening 40d are open.
  • the third opening 40c is located to face the reservoir 23.
  • the flexible substrate 31 and the pressing member 34 are inserted through the third opening 40c.
  • the fourth opening 40d is provided for inserting a connector (not shown) provided on the wiring board 32. If the space between the connector and the fourth opening 40d is sealed with resin or the like, it becomes difficult for liquid or dirt to enter the inside of the housing 40.
  • the housing 40 has a heat insulating section 40e.
  • the heat insulating portion 40e is arranged adjacent to the first opening 40a and the second opening 40b, and is provided so as to protrude outward from the side surface of the housing 40 along the main scanning direction.
  • the heat insulating portion 40e is formed to extend in the main scanning direction. That is, the heat insulating portion 40e is located between the heat sink 45 and the head body 20. By providing the heat insulating portion 40e in the housing 40 in this manner, the heat generated by the driver IC 33 is less likely to be transmitted to the head body 20 via the heat sink 45.
  • FIG. 3 shows an example of the configuration of the liquid ejection head 8, and may further include members other than those shown in FIG. 3.
  • FIG. 4 is a schematic plan view showing main parts of the head main body 20 according to the embodiment.
  • the head main body 20 includes the flow path member 21 and the piezoelectric actuator 22.
  • the flow path member 21 and the piezoelectric actuator 22 have a flat plate shape, and the piezoelectric actuator 22 is located approximately at the center of the flow path member 21.
  • the piezoelectric actuator 22 has a discharge area 24.
  • a plurality of piezoelectric elements 170 are located in the discharge region 24 .
  • FIG. 5 is a schematic enlarged view of region V shown in FIG. 4. Note that FIG. 5 is a plan view of the piezoelectric element 170 viewed from a direction perpendicular to the surface of the piezoelectric ceramic body 171. Note that in FIG. 5, the groove portion 100, which will be described later, is omitted.
  • the plurality of piezoelectric elements 170 are arranged at positions corresponding to the plurality of pressure chambers 162 that the flow path member 21 has. Specifically, the plurality of piezoelectric elements 170 are arranged such that an electrode body 174a of a surface electrode 174, which will be described later, is located above the pressure chamber 162.
  • FIG. 6 is a schematic cross-sectional view taken along the line VI-VI shown in FIG.
  • the VI-VI line shown in FIG. 5 is a straight line passing through a center point P1 of an electrode body 174a of a surface electrode 174, which will be described later, and a center point P2 of a connection electrode 175, which will be described later.
  • the channel member 21 has a laminated structure in which a plurality of plates are laminated.
  • the channel member 21 includes a cavity plate 21A, a base plate 21B, an aperture plate 21C, a supply plate 21D, manifold plates 21E, 21F, and 21G, a cover plate 21H, and a nozzle plate 21I. These plates are located in this order from the first surface 21a side of the flow path member 21.
  • These plates are made of metal such as stainless steel (SUS).
  • a large number of holes are formed in the plate that constitutes the flow path member 21.
  • the thickness of each plate is approximately 10 ⁇ m to 300 ⁇ m. Thereby, the accuracy of hole formation can be increased.
  • the plates are aligned and stacked such that the holes communicate with each other to define individual channels 164 and supply manifolds 161.
  • the supply manifold 161 and the discharge hole 163 are connected through an individual flow path 164.
  • the supply manifold 161 is located inside the flow path member 21 on the second surface 21b side, and the discharge hole 163 is located on the second surface 21b of the flow path member 21.
  • the individual flow path 164 has a pressure chamber 162 and an individual supply flow path 165.
  • the pressure chamber 162 is located on the first surface 21a of the flow path member 21, and the individual supply flow path 165 is a flow path that connects the supply manifold 161 and the pressure chamber 162.
  • the individual supply channel 165 includes a throttle 166 that is narrower than other parts. Since the throttle 166 is narrower than the other portions of the individual supply channel 165, the flow channel resistance is high. In this way, when the flow path resistance of the throttle 166 is high, the pressure generated in the pressure chamber 162 is difficult to escape to the supply manifold 161.
  • the piezoelectric element 170 includes a piezoelectric ceramic body 171, a reinforcing plate 172, an internal electrode 173, a surface electrode 174, and a connection electrode 175.
  • the piezoelectric ceramic body 171 has a flat plate shape.
  • the piezoelectric ceramic body 171 is located on the first surface 21a of the flow path member 21 via the reinforcing plate 172.
  • the piezoelectric ceramic body 171 includes, for example, a plurality of piezoelectric ceramic layers 171a and 171b.
  • the piezoelectric ceramic layers 171a and 171b each have a thickness of, for example, about 20 ⁇ m. Both piezoelectric ceramic layers 171a and 171b extend across the plurality of pressure chambers 162.
  • a plurality of piezoelectric elements 170 share one piezoelectric ceramic body 171.
  • a lead zirconate titanate (PZT) ceramic material having ferroelectric properties can be used as the piezoelectric ceramic layers 171a and 171b.
  • the piezoelectric ceramic body 171 includes two piezoelectric ceramic layers 171a and 171b, but the piezoelectric ceramic body 171 may include three or more piezoelectric ceramic layers.
  • the piezoelectric ceramic layer 171b is an example of a diaphragm. Note that the diaphragm does not necessarily need to be a piezoelectric ceramic body such as PZT.
  • the reinforcing plate 172 has a flat plate shape.
  • the reinforcing plate 172 is located between the first surface 21a of the flow path member 21 and the back surface of the piezoelectric ceramic body 171 opposite to the surface on which the surface electrode 174 is located.
  • the reinforcing plate 172 extends across the plurality of pressure chambers 162 and constitutes a ceiling portion of the plurality of pressure chambers 162.
  • the plurality of piezoelectric elements 170 share one reinforcing plate 172.
  • the reinforcing plate 172 is made of a material harder than the piezoelectric ceramic body 171.
  • the reinforcing plate 172 is made of metal such as stainless steel (SUS). Further, in this case, the piezoelectric ceramic layer 171b does not necessarily need to be provided.
  • the piezoelectric element 170 does not necessarily need to have the reinforcing plate 172.
  • the piezoelectric ceramic body 171 constitutes the ceiling portion of the plurality of pressure chambers 162.
  • the internal electrode 173 is located inside the piezoelectric ceramic body 171. Specifically, internal electrode 173 is located between two piezoelectric ceramic layers 171a, 171b. The internal electrode 173 is formed over substantially the entire surface in the area between the piezoelectric ceramic layer 171a and the piezoelectric ceramic layer 171b. That is, the internal electrode 173 overlaps all the pressure chambers 162 in the region facing the piezoelectric actuator 22. The internal electrode 173 functions as a common electrode shared by the plurality of piezoelectric elements 170.
  • the internal electrode 173 for example, a metal material such as Ag--Pd can be used.
  • the thickness of the internal electrode 173 is, for example, about 2 ⁇ m.
  • the internal electrode 173 is electrically connected to a connection electrode (not shown) located on the surface of the piezoelectric ceramic body 171 via a via hole formed in the piezoelectric ceramic layer 171a.
  • the connection electrode for the internal electrode 173 is grounded and held at ground potential.
  • the surface electrode 174 has an electrode main body 174a and an extraction electrode 174b.
  • the electrode body 174a is located in a region facing the pressure chamber 162.
  • the electrode main body 174a is one size smaller than the pressure chamber 162 and has a shape substantially similar to the pressure chamber 162.
  • the embodiment shows an example in which the pressure chamber 162 and the electrode body 174a are circular in plan view.
  • the shapes of the pressure chamber 162 and the electrode body 174a are not limited to this example. This point will be discussed later using FIG. 16.
  • the extraction electrode 174b is extracted from the electrode body 174a.
  • the extraction electrode 174b extends linearly toward a connection electrode 175, which will be described later. That is, the connection electrode 175 is located in a portion of one end of the extraction electrode 174b that is extracted outside the area facing the pressure chamber 162.
  • the electrode main body 174a and the extraction electrode 174b of the surface electrode 174 can be made of, for example, a metal material such as an Au-based material.
  • connection electrode 175 has a convex shape with a thickness of about 15 ⁇ m, for example.
  • Connection electrode 175 is located on the surface of piezoelectric ceramic body 171 and connected to surface electrode 174 . Specifically, the connection electrode 175 is located on the extraction electrode 174b, and is electrically connected to the electrode body 174a via the extraction electrode 174b.
  • the connection electrode 175 is electrically connected to an electrode provided on the flexible substrate 31 (see FIG. 3).
  • connection electrode 175 includes a metal that causes ion migration more easily than the metal (for example, Au) contained in the surface electrode 174.
  • the connection electrode 175 includes Ag, Cu, Sn, Pb, and Ni.
  • silver-palladium containing glass frit is used as the connection electrode 175.
  • the plurality of surface electrodes 174 are each individually electrically connected to the control unit 14 (see FIG. 1) via the connection electrode 175, the flexible substrate 31, and wiring in order to individually control the potential. Then, when the surface electrode 174 and the internal electrode 173 are set at different potentials and an electric field is applied in the polarization direction of the piezoelectric ceramic layer 171a, the portion of the piezoelectric ceramic layer 171a to which the electric field is applied becomes active, deforming due to the piezoelectric effect. operate as a division.
  • the piezoelectric element 170 is constituted by the surface electrode 174 of the piezoelectric actuator 22, and the portions of the piezoelectric ceramic layer 171a, the reinforcing plate 172, and the internal electrode 173 that face the pressure chamber 162. Then, as the piezoelectric element 170 undergoes unimorph deformation, the pressure chamber 162 is pressed, and liquid is discharged from the discharge hole 163.
  • the discharge hole 163 is an example of a nozzle that penetrates the nozzle plate 21I.
  • FIG. 7 is a schematic plan view of the piezoelectric element 170 according to the embodiment. Further, FIG. 8 is a schematic cross-sectional view taken along arrow VIII-VIII shown in FIG. Note that in FIG. 7, the size of the groove portion 100 is exaggerated for ease of understanding.
  • the piezoelectric element 170 has a groove 100.
  • the groove portion 100 is located near the surface electrode 174 in a plan view shown in FIG.
  • the electrode body 174a extends in a shape corresponding to the outer shape of the electrode body 174a.
  • the groove portion 100 extends in an arc shape along the outer shape of the electrode body 174a so as to surround the circular electrode body 174a. Both ends of the groove portion 100 in the longitudinal direction extend to the vicinity of the extraction electrode 174b. Specifically, one end of the groove 100 in the longitudinal direction faces one side surface of the extraction electrode 174b, and the other end faces the other side surface of the extraction electrode 174b. That is, in the example shown in FIG. 7, the groove portion 100 surrounds substantially the entire circumference of the electrode body 174a, specifically, the entire circumference of the electrode body 174a except for the area where the extraction electrode 174b is extracted.
  • the groove portion 100 does not necessarily need to strictly follow the outer shape of the electrode body 174a.
  • the groove portion 100 may meander with respect to the outer shape of the electrode body 174a, or may be partially interrupted.
  • the groove portion 100 is located around (outside) the electrode body 174a of the surface electrode 174, but is not limited thereto, and may be located inside the electrode body 174a. This point will be described later using FIG. 11.
  • the rigidity of the piezoelectric ceramic body 171 can be lowered, so that the driving displacement of the piezoelectric element 170 can be increased compared to the case where the groove portion 100 is not provided. be able to.
  • the depth of the groove portion 100 is set to a relatively shallow depth that does not reach the internal electrode 173, the driving displacement of the piezoelectric element 170 cannot be made sufficiently large. Therefore, from the viewpoint of increasing the drive displacement of the piezoelectric element 170, the depth of the groove portion 100 is preferably greater than the depth that reaches the internal electrode 173. Note that "depth” means a distance in the thickness direction of the piezoelectric ceramic body 171.
  • the internal electrode will be exposed on the wall surface of the groove 100. Thereby, there is a risk that ion migration will occur between the connection electrode 175 and the internal electrode 173. It is known that ion migration tends to occur in Ag, Pb, Cu, and the like. As described above, the connection electrode 175 and the internal electrode 173 are configured to contain Ag. Therefore, ion migration tends to occur between the connection electrode 175 and the internal electrode 173. Note that ion migration is known to be difficult to occur in Au, Fe, Pt, and the like.
  • the surface electrode 174 includes a metal other than Ag, specifically, includes Au. Therefore, ion migration is relatively unlikely to occur between the surface electrode 174 and the internal electrode 173.
  • the groove portion 100 has a deep groove portion 101 and two shallow groove portions 102.
  • One of the two shallow grooves 102 is connected to one of both ends of the deep groove 101
  • the other of the two shallow grooves 102 is connected to the other of both ends of the deep groove 101 . It is connected.
  • a continuous groove portion 100 is formed by the deep groove portion 101 and the two shallow groove portions 102 .
  • the deep groove portion 101 has a depth equal to or greater than the depth that reaches the internal electrode 173.
  • the shallow groove portion 102 has a depth that is less than the depth that reaches the internal electrode 173. Furthermore, the shallow groove portion 102 is located closer to the connection electrode 175 than the deep groove portion 101 is.
  • the depth of the shallow groove portion 102 near the connection electrode 175 in the groove portion 100 is made shallower than the internal electrode 173.
  • the distance between the exposed position of the internal electrode 173 and the connection electrode 175 is increased compared to the case where a groove portion having a depth greater than the depth reaching the internal electrode 173 is provided over the entire longitudinal direction. be able to.
  • the drive displacement of the piezoelectric element 170 can be increased while suppressing the risk of ion migration.
  • the depth of the shallow groove portion 102 may be 15 ⁇ m or more and 20 ⁇ m or less, and the width of the shallow groove portion 102 may be 25 ⁇ m or more and 150 ⁇ m or less. Further, as an example, the depth of the deep groove portion 101 may be 25 ⁇ m or more and 45 ⁇ m or less, and the width of the deep groove portion 101 may be 25 ⁇ m or more and 150 ⁇ m or less. Further, as an example, when the depth of the shallow groove portion 102 is D1 and the depth of the deep groove portion 101 is D2, D1/D2 may be 0.33 or more and 0.80 or less.
  • the depth of the shallow groove portion 102 is set to 50% or more and less than 80% of the thickness of the upper layer (piezoelectric ceramic layer 171a), and the depth of the deep groove portion 101 is set to the thickness of the upper layer. It is preferable to make it larger than the total thickness (the total thickness of the piezoelectric ceramic layer 171a, internal electrode 173, and piezoelectric ceramic layer 171b). In this range, the drive displacement of the piezoelectric element 170 can be suitably increased while suitably suppressing the risk of ion migration.
  • the liquid ejection head 8 having the piezoelectric actuator 22 since the drive displacement of the piezoelectric element 170 is large, a liquid with higher viscosity can be ejected, and the risk of ion migration is less likely to occur. Therefore, it is highly reliable.
  • the groove portion 100 having the deep groove portion 101 and the shallow groove portion 102 can be formed by, for example, laser processing.
  • the groove portion 100 can be formed by changing the laser processing conditions for the deep groove portion 101 and the shallow groove portion 102.
  • the groove portion 100 may be formed by making the laser output or pulse frequency different between the deep groove portion 101 and the shallow groove portion 102.
  • the groove portion 100 may be formed by varying the moving speed of the laser irradiation position or the laser irradiation time between the deep groove portion 101 and the shallow groove portion 102 while keeping the laser output or pulse frequency constant. good.
  • the deep groove portion 101 may penetrate the internal electrode 173.
  • the rigidity of the piezoelectric ceramic body 171 can be lowered compared to the case where the deep groove portion 101 does not penetrate the internal electrode 173, so that the drive displacement of the piezoelectric element 170 can be further increased.
  • the deep groove portion 101 only needs to reach at least the internal electrode 173, and does not necessarily need to penetrate the internal electrode 173.
  • the deep groove portion 101 may have a depth that reaches the reinforcing plate 172.
  • the reinforcing plate 172 is made of a metal such as SUS that is harder than the piezoelectric ceramic body 171, and is less likely to be scraped by a laser than the piezoelectric ceramic body 171.
  • the reinforcing plate 172 may be formed of a material that has lower laser processing efficiency than the piezoelectric ceramic body 171 for the selected laser light source. Therefore, compared to the case where the depth of the deep groove part 101 is set to a depth that does not reach the reinforcing plate 172, variations in the depth of the deep groove part 101 among the plurality of piezoelectric elements 170 can be reduced.
  • the deep groove portion 101 is not limited to the example shown in FIG. 8, and may have a depth that is greater than or equal to the depth that reaches the reinforcing plate 172.
  • the boundary portion 103 between the deep groove portion 101 and the shallow groove portion 102 may have a stepped shape. That is, the end faces of the deep groove portion 101 in the longitudinal direction may be substantially perpendicular. With such a configuration, it is possible to reduce variations in exposed positions of the internal electrodes 173 among the plurality of piezoelectric elements 170, compared to, for example, a case where the shallow groove portion 102 has a slope shape. Thereby, the risk due to ion migration can be reduced more reliably.
  • the outer shapes of the surface electrode 174 and the connection electrode 175 are line symmetrical in plan view. Specifically, the outer shapes of the surface electrode 174 and the connection electrode 175 are line symmetrical with respect to a straight line L1 passing through the center point P1 of the electrode body 174a and the center point P2 of the connection electrode 175 in the surface electrode 174. Note that "the external shape formed by the surface electrode 174 and the connection electrode 175" means one silhouette formed by the surface electrode 174 and the connection electrode 175.
  • the groove portion 100 may be axisymmetric with respect to the center of gravity of the surface electrode 174, specifically, a straight line passing through the center of gravity of the electrode body 174a in the surface electrode 174 in plan view.
  • the center of gravity of the electrode body 174a is assumed to coincide with the center point P1 of the electrode body 174a.
  • the groove portion 100 may be line symmetrical with respect to the straight line L1, which is the axis of symmetry of the outer shape of the surface electrode 174 and the connection electrode 175.
  • the deep groove portion 101 may be line symmetrical with respect to the straight line L1
  • the two shallow groove portions 102 may also be line symmetrical with respect to the straight line L1.
  • the point at which the displacement is maximum in the electrode body 174a can be located on or near a straight line passing through the center of gravity of the electrode body 174a.
  • FIG. 9 is a schematic diagram for explaining the position of the boundary between the deep groove and the shallow groove.
  • FIG. 9 shows three piezoelectric elements 170_1, 170_2, and 170_3 that are adjacent to each other among the plurality of piezoelectric elements 170 included in the piezoelectric actuator 22. Note that in FIG. 9, the groove portion 100 is omitted.
  • the position of the boundary part 103 between the deep groove part 101 and the shallow groove part 102 in the groove part 100 may be defined by, for example, the circle C1 and the straight line L2 shown in FIG.
  • the surface electrode 174 of the piezoelectric element 170_1 is the first surface electrode 174_1
  • the surface electrode 174 of the other piezoelectric element 170_2 closest to the connection electrode 175 of the piezoelectric element 170_1 is the first surface electrode 174.
  • the circle C1 is a virtual circle centered on the center point P2 of the connection electrode 175 of the piezoelectric element 170_1 and in contact with the second surface electrode 174_2 in plan view.
  • the boundary portion 103 between the deep groove portion 101 and the shallow groove portion 102 in the groove portion 100 of the piezoelectric element 170_1 may be located outside the circle C1.
  • the distance between the exposed position of the internal electrode 173 and the connection electrode 175 can be sufficiently increased. Therefore, the risk of ion migration between the connection electrode 175 and the internal electrode 173 can be sufficiently reduced.
  • the circle C1 is a virtual circle that contacts the second surface electrode 174_2, but more specifically, it may be a virtual circle that contacts the outer edge of the groove 100 that the piezoelectric element 170_2 has. With this configuration, the risk of ion migration between the connection electrode 175 and the internal electrode 173 can be reduced more reliably.
  • the straight line L2 is a straight line passing through the center point P1 of the electrode body 174a in the first surface electrode 174_1
  • the straight line L2 is a straight line passing through the center point P1 of the electrode body 174a and the center point P2 of the connection electrode 175. It is a straight line perpendicular to the
  • the boundary portion 103 between the deep groove portion 101 and the shallow groove portion 102 in the groove portion 100 of the piezoelectric element 170_1 may be located closer to the connection electrode 175 than the intersection P3 between the straight line L2 and the electrode body 174a.
  • the boundary 103 between the deep groove 101 and the shallow groove 102 is closer to the connection electrode 175 than the intersection P3 between the straight line L2 and the electrode body 174a, and is closer to the connection electrode 175 than the intersection P4 between the circle C1 and the electrode body 174a. It is preferable to provide it at a position far from the connection electrode 175.
  • boundary portion 103 between the deep groove portion 101 and the shallow groove portion 102 can be rephrased as a position where the internal electrode 173 is exposed. Further, the boundary portion 103 between the deep groove portion 101 and the shallow groove portion 102 can also be referred to as both ends of the deep groove portion 101 in the longitudinal direction.
  • FIGS. 10 and 11 are schematic diagrams showing an example of the position of the groove portion 100 according to the embodiment. Note that FIGS. 10 and 11 show cross-sectional views of the piezoelectric element 170 taken along the straight line L2 shown in FIG. 9, for example.
  • the groove portion 100 may be located inside the pressure chamber 162 and outside the surface electrode 174 (electrode body 174a) in cross-sectional view.
  • the groove portion 100 may be located inside the pressure chamber 162 and inside the surface electrode 174 (electrode body 174a) in cross-sectional view.
  • FIG. 12 is a schematic cross-sectional view of a groove 100 according to a first alternative embodiment.
  • the shallow groove portion 102 may have a slope shape that becomes deeper toward the deep groove portion 101. This slope may continue to the deep groove portion 101. That is, the groove portion 100 may have a slope (slanted surface) that becomes deeper from the end of the shallow groove portion 102 on the connection electrode 175 side toward the bottom surface of the deep groove portion 101.
  • the portion of the slope where the internal electrode 173 is exposed is the boundary portion 103 between the deep groove portion 101 and the shallow groove portion 102 .
  • FIG. 13 is a schematic plan view showing the configuration of a groove portion 100 according to a second alternative embodiment.
  • FIG. 14 is a schematic cross-sectional view showing the configuration of a groove portion 100 according to a second alternative embodiment.
  • the deep groove portion 101 and the shallow groove portion 102 may be separated.
  • the deep groove portion 101 and the shallow groove portion 102 are separated by the piezoelectric ceramic body 171.
  • the wall of the piezoelectric ceramic body 171 is located at the boundary 103 between the deep groove 101 and the shallow groove 102 .
  • FIG. 15 is a schematic cross-sectional view showing the configuration of a groove portion 100 according to a third alternative embodiment.
  • the shallow groove portion 102 may have a plurality of convex portions 121.
  • Each convex portion 121 includes a portion 121 a that becomes shallower in depth from the deep groove portion 101 toward the connection electrode 175 and a portion 121 b that becomes deeper.
  • the height of the convex portion 121 may be, for example, at least 1/3 or more of the depth of the shallow groove portion 102. Preferably, the height of the convex portion 121 may be at least half the depth of the shallow groove portion 102.
  • FIG. 16 is a schematic plan view showing the configuration of a piezoelectric element 170 according to a fourth alternative embodiment.
  • the shape of the piezoelectric element 170 is not limited to the shape shown in FIG. 5.
  • the piezoelectric element 170 may have a bowling pin shape.
  • the pressure chamber 162 may have a diamond shape with rounded corners.
  • the electrode body 174a of the surface electrode 174 also has a rhombic shape with rounded corners in plan view, matching the shape of the pressure chamber 162.
  • the extraction electrode 174b extends linearly toward the connection electrode 175 from an acute corner among the plurality of corners of the electrode main body 174a.
  • the connection electrode 175 has a circular shape in plan view.
  • the piezoelectric element 170 has a groove 100 (not shown here) located around or inside the electrode body 174a in the surface electrode 174 and extending in a shape according to the outer shape of the electrode body 174a. It's okay.
  • the boundary part 103 between the deep groove part 101 and the shallow groove part 102 in the groove part 100 is closer to the connection electrode 175 than the intersection P3 between the straight line L2 and the electrode body 174a, and is closer to the circle C1 and the electrode. It is preferable to provide it at a position farther from the connection electrode 175 than the intersection P4 with the main body 174a.
  • the piezoelectric actuator according to the embodiment has a piezoelectric element (for example, the piezoelectric element 170) that deforms by application of a voltage.
  • the piezoelectric element includes a diaphragm (for example, the piezoelectric ceramic layer 171b), an internal electrode (for example, the internal electrode 173), a piezoelectric ceramic body (for example, the piezoelectric ceramic layer 171a), and a surface electrode (for example, the surface electrode 174), a connection electrode (for example, connection electrode 175), and a groove (for example, groove 100).
  • the internal electrode is located on the surface of the diaphragm.
  • a piezoceramic body is located on the surface of the internal electrode.
  • a surface electrode is located on the surface of the piezoelectric ceramic body.
  • the connection electrode is located on the surface of the piezoelectric ceramic body and connected to the surface electrode.
  • the groove portion is located around or inside the surface electrode in a plan view when the piezoelectric element is viewed from a direction perpendicular to the surface of the piezoelectric ceramic body, and extends in a shape corresponding to the outer shape of the surface electrode.
  • the groove includes a deep groove (for example, deep groove 101) and a shallow groove (for example, shallow groove 102).
  • the deep groove has a depth that is greater than the depth that reaches the internal electrode.
  • the shallow groove portion is located closer to the connection electrode than the deep groove portion, and has a depth that is less than the depth that reaches the internal electrode.
  • the piezoelectric actuator according to the embodiment it is possible to increase the drive displacement of the piezoelectric element while suppressing the risk due to ion migration.
  • the present disclosure is not limited to the above embodiments, and various changes can be made without departing from the spirit thereof.
  • the channel member 21 is composed of a plurality of stacked plates, but the channel member 21 is not limited to a case where the channel member 21 is composed of a plurality of stacked plates. .
  • the flow path member 21 may be configured by forming the supply manifold 161 or the individual flow paths 164 by etching.
  • the recording device may be a car body painting device.
  • the recording device in this case may include a liquid ejection head having a nozzle surface for ejecting coating material, an arm that holds the liquid ejection head, and a control unit that controls movement of the head via the arm.
  • the arm is, for example, an articulated robot driven by multiple motors.

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  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
PCT/JP2023/008323 2022-03-14 2023-03-06 圧電アクチュエータ、液体吐出ヘッドおよび記録装置 Ceased WO2023176549A1 (ja)

Priority Applications (4)

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EP23770505.8A EP4494880A4 (en) 2022-03-14 2023-03-06 PIEZOELECTRIC ACTUATOR, LIQUID EMPTY HEAD AND RECORDING DEVICE
US18/846,271 US20250196498A1 (en) 2022-03-14 2023-03-06 Piezoelectric actuator, liquid discharge head and recording device
JP2024507760A JPWO2023176549A1 (https=) 2022-03-14 2023-03-06
CN202380026123.XA CN118829544A (zh) 2022-03-14 2023-03-06 压电致动器、液体喷出头以及记录装置

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JP2022039088 2022-03-14

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003311954A (ja) 2002-02-19 2003-11-06 Brother Ind Ltd インクジェットヘッド及びこれを有するインクジェットプリンタ
JP2007090871A (ja) * 2005-08-31 2007-04-12 Brother Ind Ltd 液体吐出ヘッド及びその製造方法
JP2008173959A (ja) * 2006-12-21 2008-07-31 Seiko Epson Corp 液滴吐出ヘッド、エネルギー変換素子、圧電デバイス、ｍｅｍｓ構造、カンチレバー型アクチュエータ、圧電センサー及び圧電リニアモータ
JP2018034372A (ja) * 2016-08-30 2018-03-08 京セラ株式会社 液体吐出ヘッド、およびそれを用いた記録装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008049569A (ja) * 2006-08-24 2008-03-06 Brother Ind Ltd 液体移送装置及び液体移送装置の製造方法
JP2009252757A (ja) * 2008-04-01 2009-10-29 Seiko Epson Corp 圧電素子およびその製造方法、圧電アクチュエータ、並びに、液体噴射ヘッド

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003311954A (ja) 2002-02-19 2003-11-06 Brother Ind Ltd インクジェットヘッド及びこれを有するインクジェットプリンタ
JP2007090871A (ja) * 2005-08-31 2007-04-12 Brother Ind Ltd 液体吐出ヘッド及びその製造方法
JP2008173959A (ja) * 2006-12-21 2008-07-31 Seiko Epson Corp 液滴吐出ヘッド、エネルギー変換素子、圧電デバイス、ｍｅｍｓ構造、カンチレバー型アクチュエータ、圧電センサー及び圧電リニアモータ
JP2018034372A (ja) * 2016-08-30 2018-03-08 京セラ株式会社 液体吐出ヘッド、およびそれを用いた記録装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP4494880A4

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US20250196498A1 (en) 2025-06-19
EP4494880A4 (en) 2026-03-04

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