WO2023168951A1 - 一种长光程气体吸收池反射光学系统 - Google Patents

一种长光程气体吸收池反射光学系统 Download PDF

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WO2023168951A1
WO2023168951A1 PCT/CN2022/127415 CN2022127415W WO2023168951A1 WO 2023168951 A1 WO2023168951 A1 WO 2023168951A1 CN 2022127415 W CN2022127415 W CN 2022127415W WO 2023168951 A1 WO2023168951 A1 WO 2023168951A1
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reflector
reflected
mirror
circle
optical path
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PCT/CN2022/127415
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English (en)
French (fr)
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任红军
陈海永
杨清永
郑国锋
李志刚
武传伟
李冬
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汉威科技集团股份有限公司
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Priority claimed from CN202210216123.3A external-priority patent/CN114609044B/zh
Priority claimed from CN202221981020.8U external-priority patent/CN218896038U/zh
Application filed by 汉威科技集团股份有限公司 filed Critical 汉威科技集团股份有限公司
Publication of WO2023168951A1 publication Critical patent/WO2023168951A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/10—Mirrors with curved faces

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  • the invention relates to the technical field of optical gas sensor detection, and in particular to a long optical path gas absorption cell reflection optical system.
  • optical gas sensors are an important guarantee for gas safety. With the rapid development of my country's economy and the continuous optimization of industrial applications of the Internet of Things, industrial sensors have gradually developed in the direction of low power consumption, miniaturization, and portability in recent years.
  • Existing optical gas sensors have the advantages of long life, high accuracy, and resistance to poisoning, and are widely used in the field of gas detection.
  • the optical gas absorption cell is the core component of the sensor, which directly determines the performance and dimensions of the sensor.
  • the measurement sensitivity depends on the absorption optical path and gas absorption coefficient.
  • the sensitivity increases as the optical path increases.
  • the gas concentration that needs to be detected is at the ppm or even ppb level, which requires a longer absorption optical path to achieve.
  • the Herriot cell optical system consists of two mirrors with the same radius of curvature placed coaxially opposite each other. The two mirrors are separated by a certain distance. The light beam forms a circle of light spots on each of the two reflectors, and the number of reflections in the Herriot pool is smaller.
  • the optical pathlength of the optical gas absorption cell also needs to be further improved. It is required to achieve a longer optical path in a limited space and requires an absorption pool to achieve more reflections.
  • the traditional optical gas absorption cell has defects such as difficulty in achieving multiple reflections in a limited space and short optical path, which results in limitations in the detection environment and detection concentration, and cannot meet the needs of customers.
  • the present invention proposes a long optical path gas absorption pool reflection optical system to achieve collimated light beams in a limited space. It can achieve a longer optical path and complete more reflections.
  • a long optical path gas absorption cell reflection optical system including a reflecting mirror one and a reflecting mirror two, the reflecting mirror one and the reflecting mirror two being arranged oppositely and spaced apart.
  • the second reflector is provided with a light input port and a light output port.
  • the first reflector, the second reflector, the light input port, and the light output port together constitute a reflective optical system; the collimated beam is incident through the light input port and reflected on the first and second reflectors. The light is reflected between the two mirrors and emitted through the light output port.
  • the second reflector includes an inner concave surface and an outer annular surface, and the inner concave surface is provided within the outer annular surface; and both the light input port and the light output port are provided on the outer annular surface of the second reflector.
  • the radius of curvature R3 of the inner concave surface of the second reflector is equal to the radius of curvature R1 of the first reflector, and the outer annular surface of the second reflector has a planar structure.
  • the size of the corresponding central angle ⁇ between the light input port and the light output port is related to the radius of curvature R1 of reflector one, the radius of curvature R3 of the inner concave surface of reflector two, or the distance between reflector one and reflector two.
  • the separation distance d is related.
  • the axial angle formed between the incident collimated light beam and the axis of the second reflector is ⁇
  • the radial included angle of the collimated light beam projected on the second reflective mirror is ⁇
  • the axial included angle ⁇ and The size of the radial angle ⁇ is related to the radius of curvature R1 of reflector 1, the radius of curvature R3 of the inner concave surface of reflector 2, or the separation distance d between reflector 1 and reflector 2.
  • the number of reflected light spots formed on the first reflecting mirror is equal to the number of reflected light spots formed on the second reflecting mirror.
  • the radius of curvature R3 of the inner concave surface of the second reflector is equal to the radius of curvature R1 of the first reflector, and the outer annular surface of the second reflector has a planar structure.
  • the optical path of the collimated light beam reflected between the first reflector and the second reflector is: the collimated light beam is injected through the light input port and first reaches the reflector one, and is reflected by the reflector one to the interior of the reflector two. On the concave surface, it is then reflected by reflector two to reflector one, and finally reflected by reflector one to the outer ring surface of reflector two; the reflections are repeated regularly in order, and finally a circle of reflected light spots is formed on reflector one. A circle of reflected light spots is formed on the inner concave surface and the outer ring surface of the two.
  • the radius of curvature R3 of the inner concave surface of the second reflector is equal to the radius of curvature R1 of the second reflector, and the radius of curvature R2 of the outer annular surface of the second reflector ⁇ 2.1R1 ⁇ 2.2R1.
  • the input end and the output end are They are all arranged between the diameter D4 of the interface between the outer ring surface and the inner concave surface and the outer diameter D3 of the outer ring surface.
  • the optical path of the collimated beam reflected between reflector one and reflector two is: the collimated beam is injected through the light input port and first reaches reflector one, is reflected by reflector one to reflector two, and then is reflected Mirror two reflects to mirror one; the reflection is repeated according to this rule, and finally two circles of reflected light spots are formed on mirror one, two circles of light spots are formed on the inner concave surface of reflector two, and one circle of reflected light spots is formed on the outer ring surface, a total of three circles. light spots.
  • the collimated light beam is injected through the light input port and first reaches the reflection spot circle I of the reflector one, is reflected by the reflector one to the third circle of reflection spot of the reflector two, and then is reflected by the reflector two to On the reflected light spot circle I of reflector one, after being reflected by reflector one, it returns to the first circle of reflected light spot of reflector two, and after being reflected by reflector two, it reaches the reflected light spot circle II of reflector one, and then After being reflected by reflector one, it returns to the second circle of reflected light spots of reflector two, and then is reflected by reflector two to the reflected light spot circle I of reflector one, and then returns to reflector two after being reflected by reflector one. on the second circle of reflected light spots.
  • the reflected light spot circle I is located between the annular diameter D2 and the outer diameter D1 on the reflective surface of the mirror one, and the reflected light spot circle II is located within the annular diameter D2;
  • the first circle of reflected light spots is located in the annular area between the outer diameter D3 and the diameter D4 of the outer annulus
  • the second circle of reflected light spots is located in the annular area between the diameter D4 and the annular diameter D5 of the inner concave reflecting surface.
  • the third circle of reflected light spots is located within the range of the annular diameter D5; the input end and the output end are both set at the spot center of the first circle of reflected light spots.
  • the reflector structure in the present invention is easy to process and manufacture.
  • the processing technology of the reflector is simplified to a certain extent and the processing accuracy is ensured. It also ensures that the light spots formed on the second reflector when the collimated beam is reflected are evenly distributed.
  • Design reflector 2 to include an inner concave surface and an outer annulus, and set both the light input port and the light output port on the outer annulus of reflector 2.
  • the radius of curvature of the outer annulus of reflector 2 is infinite , the collimated beam is reflected multiple times between the two reflectors, and finally forms a circle of reflected light spots on the reflector one, and a circle of reflected light spots on the inner concave surface and the outer ring surface of the reflector two, and the reflector The reflected light spots on the second surface are evenly distributed;
  • the radius of curvature of the outer annulus of reflector 2 is 2.1 to 2.2 times that of reflector 1, the number of reflections in the same spatial size can reach 3 times the number of reflections in the Herriot pool and above; in the optical path Under certain circumstances, the overall size of the optical system can be made smaller.
  • the lenses of the first and second mirrors of the present invention are easy to process and manufacture and the accuracy is guaranteed.
  • the system structure is simple, the optical adjustment is relatively simple, easy to operate, and the performance is stable. They can be widely used in various detection environments.
  • Figure 1 is a schematic structural diagram of Embodiment 1 of the present invention.
  • Figure 2 is a schematic diagram of the axial angle formed when the collimated beam of the present invention is incident;
  • Figure 3 is a schematic diagram of the radial angle formed when the collimated beam of the present invention is incident;
  • Figure 4 is a schematic diagram of the optical path of the first reflection of the collimated beam in Embodiment 1 of the present invention.
  • Figure 5 is a schematic diagram of the optical path of the second reflection of the collimated beam in Embodiment 1 of the present invention.
  • Figure 6 is a distribution diagram of reflected light spots formed on reflector 1 in Embodiment 1 of the present invention.
  • Figure 7 is a distribution diagram of reflected light spots formed on the second reflector in Embodiment 1 of the present invention.
  • Figure 8 is an optical simulation diagram of Embodiment 1 of the present invention.
  • Figure 9 is a schematic structural diagram of Embodiment 2 of the present invention.
  • Figure 10 is a reflection diagram of the first set of reflected light beams in Embodiment 2 of the present invention.
  • Figure 11 is a schematic reflection diagram of the second set of reflected light beams in Embodiment 2 of the present invention.
  • Figure 12 is a light spot distribution diagram obtained in Embodiment 2 of the present invention, in which (a) is the first reflector and (b) is the second reflector.
  • Figure 13 is an optical simulation diagram 1 of Embodiment 2 of the present invention.
  • Figure 14 is the second optical simulation diagram of Embodiment 2 of the present invention.
  • Figure 15 is the third optical simulation diagram of Embodiment 2 of the present invention.
  • 1 is the first reflector
  • 2 is the second reflector
  • 3 is the input terminal
  • 4 is the output terminal.
  • the present invention provides a long optical path gas absorption cell reflection optical system, including a reflecting mirror 1 and a reflecting mirror 2 2.
  • the reflecting mirror 1 and the reflecting mirror 2 2 are opposite and arranged at intervals.
  • the reflecting mirror 1 1 and reflector 2 are coaxially arranged to ensure that light is reflected back and forth between reflector 1 and reflector 2.
  • the reflector one 1 is a concave reflector, and the reflector two 2 is provided with a light input port 3 and a light output port 4 respectively.
  • the reflector one 1, the reflector two 2, the light input port 3, and the light output port 4 together constitute a reflection.
  • Optical system Optical system.
  • the collimated beam emitted by the light source is injected into the absorption pool through the light input port 3, and is reflected more than once between the reflector 1 and the reflector 2, and is finally emitted through the light output port 4, achieving a higher resolution in a limited space. long optical path.
  • the second reflector 2 includes an inner concave surface and an outer annular surface, and the light input port 3 and the light output port 4 are both provided on the outer annular surface of the second reflector 2 .
  • the radius of curvature of reflector 1 is R1 and the outer diameter is D1
  • the outer diameter of reflector 2 is D3
  • the radius of curvature of the outer annular surface of reflector 2 is R2
  • the radius of curvature of the inner concave surface of reflector 2 is R3.
  • the outer diameter corresponding to the inner concave surface of reflector 2 is D4.
  • the outer annular surface of reflector 2 is a planar structure, and its radius of curvature R2 is infinite.
  • the curvature radius R3 of the inner concave surface of reflector 2 is the same as the curvature of reflector 1.
  • the radius R1 is equal.
  • the axial angle ⁇ is formed between the incident collimated beam and the axis of the reflector 2, and the radial angle between the collimated beam projected on the reflector 2 is
  • the angle is ⁇
  • the axial angle ⁇ and the radial angle ⁇ are both the same as the radius of curvature R1 of reflector 1, the radius of curvature R3 of the inner concave surface of reflector 2, or the difference between reflector 1 and reflector 2.
  • the separation distance d is related.
  • the reflection angle of the collimated beam can be changed, thereby changing the collimated beam.
  • the optical path of the collimated beam reflected between reflector one 1 and reflector two 2 is: the collimated beam is injected through the light input port 3 and first reaches the surface of reflector one 1 At P1, according to the law of reflection, it is reflected through reflector one 1 to the surface P2 of the inner concave surface of reflector two 2, reflected through reflector two 2 to the surface P3 of reflector one 1, and then reflected back to the surface P3 through reflector one 1.
  • the first set of reflected light beams is formed at the surface P4 of the outer ring surface of the reflector 2. Then the collimated beam is reflected by reflector 2 2 at P4 and reaches P5 on the surface of reflector 1 1.
  • the reflection rules of the first group it is sequentially reflected through reflection points P6 and P7 to reach P8 on the surface of reflector 2 2. , forming a second set of reflected beams.
  • the collimated beam is reflected multiple times between reflector one 1 and reflector two 2 in sequence, and finally forms a circle of reflected light spots on reflector one 1, and a circle of reflected light spots is formed on the inner concave surface and outer ring surface of reflector two 2.
  • the number of reflected light spots formed on reflector 1 is equal to the number of reflected light spots formed on reflector 2 2, as shown in Figure 6 and 7, that is, the number of reflected light spots on reflector 1 is two circles on reflector 2.
  • the spacing between adjacent reflection spots in the absorption cell also has size requirements.
  • the light input port 3 and the light output port 4 are respectively arranged on the reflected light spots at different positions on the outer ring surface of the reflector 2. Make requirements so that when the optical path is certain, the overall size of the optical system can be smaller.
  • the size of the corresponding central angle ⁇ between the light input port 3 and the light output port 4 is related to the curvature radius R1 of the reflector 1, the curvature radius R3 of the inner concave surface of the reflector 1, or the curvature radius R3 of the reflector 1. It is related to the separation distance d between the reflectors 2. That is, adjusting the values of parameters R1, R3, d or incident angles ⁇ and ⁇ can change the number of reflections of the collimated beam in the absorption cell and the aperture size of the reflection spot formed, thereby obtaining long optical path gases with different size requirements. Absorption pool.
  • the system of the present invention has a simple structure, relatively simple optical adjustment, easy operation, and stable performance, and can be widely used in various detection environments.
  • a long optical path gas absorption cell reflection optical system includes a reflector 1 and a reflector 2.
  • the reflector 1 and the reflector 2 are relatively coaxially arranged to ensure that the light passes through the reflector 1. Reflected back and forth between mirror two 2.
  • Reflector 1 is a concave reflector.
  • Reflector 2 2 is provided with an input terminal 3 and an output terminal 4.
  • Reflector 2 2 is a composite concave reflector.
  • Reflector 2 2 includes an outer ring surface and an inner concave surface. The inner concave surface is arranged in the outer ring surface. Reflector 1 1 and reflector 2 2 both reflect light.
  • the input end 3 and the output end 4 are both arranged between the diameter D4 of the interface between the outer ring surface and the inner concave surface and the outer diameter D3 of the outer ring surface.
  • the curvature radius R3 of the inner concave surface is equal to the curvature radius R1 of the reflector 1.
  • the radius of curvature R2 of the annulus is 2.1 to 2.2 times the radius of curvature R1 of the reflector 1.
  • the radius of curvature of reflector 1 is R1, the outer diameter is D1, and the annular diameter on the reflecting surface is D2.
  • the radius of curvature of Reflector 2 2 within the annular area of diameter D4 and outer diameter D3 is R2, the annular diameter on the inner concave reflecting surface is D5, and the radius of curvature of Reflector 2 2 within the annular diameter D5 is R3.
  • the axial angle ⁇ is formed between the incident collimated beam and the axis of the reflector 2, and the radial angle between the collimated beam projected on the reflector 2 is
  • the angle is ⁇
  • the axial angle ⁇ and radial angle ⁇ are related to the radius of curvature R1 of reflector 1, the radius of curvature R3 and R2 of reflector 2, and the distance between reflector 1 and 2. related to distance d. That is, by adjusting the curvature radius R1 of reflector 1 or the curvature radius R3 and R2 of reflector 2, or the separation distance d between reflector 1 and reflector 2, the collimated beam can be adjusted to reflect mirror 1 and reflector 2.
  • the reflection angle on the surface changes the number of reflections of the collimated beam in the absorption cell and the aperture size of the reflected light spot formed.
  • the input terminal 3 emits a collimated beam at a certain angle at P0 and reaches the surface P1 of the reflector 1.
  • P1 is located between the outer diameter D1 and the annular diameter D2 of the reflector 1.
  • P2 is located within the annular diameter D5 of reflector 2 2.
  • P3 is located between the outer diameter D1 and annular diameter D2 of reflector one 1, and then returns to reflector two 2 after being reflected by reflector one 1.
  • the light beams between P0 and P4 form the first group of reflected light beams
  • P4 is located between the outer diameter D3 and the diameter D4 of the reflector 2 2 .
  • P5 is located in the annular diameter D2 area of the surface of reflector 1, continuing the same rules as the first group It is sequentially reflected through the surface P6 of reflector 2 2 and the surface P7 of reflector 1 1 to reach P8 on the surface of reflector 2 2.
  • the beam between P4-P8 forms the second set of reflected beams.
  • P6 is located at reflector 2 2.
  • P7 is located between the outer diameter D1 of the reflector 1 and the annular diameter D2
  • P8 is located between the diameter D4 of the reflector 2 2 and the annular diameter D5.
  • P0-P8 are set according to the law of reflection.
  • the light beams continue to reciprocate between reflector one 1 and reflector two 2, and finally form two circles of reflected light spots on reflector one 1 , at the same time, a circle of reflected light spots is formed in the annular area with outer diameter D3 and diameter D4 on reflector 2, and a second circle of reflected light spot is formed in the annular area with diameter D4 and annular diameter D5 on reflector 2.
  • a third circle of reflected light spots is formed within the range of the annular diameter D5 on the mirror 2 2 .
  • the number of two circles of reflected light spots on the surface of reflector 1 is equal to the number of three circles of reflected light spots on the surface of reflector 22.
  • the distance between the input end and the output end of the absorption cell and the adjacent light spot also has size requirements.
  • the outer diameter of an ordinary detector is generally not less than 5mm, and the light source The size is generally not less than 3mm.
  • the input end and the output end of the utility model are both set at the outer spot of the reflector 2. Since the light source device and the detector device are not set here, the light spot interval of the reflector 1 and the inner spot of the reflector 2 are affected. There is no requirement for the circle spot spacing, so that the overall size of the optical system can be smaller when the optical path is constant.
  • the lens of the optical system of this utility model is easy to process and manufacture and the accuracy is guaranteed.
  • the formed gas absorption pool is not only relatively simple to adjust and easy to operate, but also has stable performance and can be widely used in various detection environments. This application increases the number of reflections of the optical system. As the core component of the detection product, the gas absorption cell further improves the optical path size ratio. In the case of the same structural space, the longer the optical path.
  • the simulation performed by the optical software resulted in the optical simulation diagrams shown in Figure 13 and Figure 14.
  • the air chamber structure of the optical cavity can be designed to be cylindrical.
  • the results of the optical simulation in Figure 1 can be obtained by reducing the number of reflections and changing the position of the output end, as shown in Figure 15.
  • the gas chamber structure of the optical cavity can be Designed to be flat.

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Abstract

一种长光程气体吸收池反射光学系统，包括反射镜一(1)和反射镜二(2)，反射镜一(1)和反射镜二(2)相对且间隔设置，反射镜二(2)上设有光输入端口(3)和光输出端口(4)，反射镜一(1)、反射镜二(2)、光输入端口(3)、光输出端口(4)共同构成多次反射光学系统；准直光束通过光输入端口(3)射入并在反射镜一(1)和反射镜二(2)之间进行反射，最后通过光输出端口(4)射出。实现准直光束在有限空间内达到更长的光程，完成更多次的反射；系统结构简单，光学调校相对简单，易于操作，而且性能稳定，可广泛用于各类检测环境。

Description

一种长光程气体吸收池反射光学系统 技术领域
本发明涉及光学气体传感器检测的技术领域，尤其涉及一种长光程气体吸收池反射光学系统。
背景技术
工业气体传感器是气体安全的重要保障，随着我国经济的高速发展和物联网工业应用的不断深入优化，工业传感器近年来逐步向低功耗、微型化、便携式方向发展。现有的光学气体传感器具有寿命长、精度高、抗中毒等优点，在气体检测领域广泛应用；光学气体吸收池为传感器的核心部件，直接决定传感器的性能和外形尺寸。
随着红外和激光技术的快速发展，基于气体吸收的光谱检测技术已经成为环境及工业过程的痕量气体有效检测手段。根据比尔-郎伯公式，测量灵敏度取决于吸收光程和气体吸收系数，光程增加灵敏度也随之提高。现阶段对痕量气体的检测灵敏度要求越来越高，需要检测的气体浓度在ppm甚至ppb级别，这就需要更长的吸收光程来实现。
目前，市场上常用的典型光学系统为怀特池和赫里奥特池两种，赫里奥特池光学系统由两个曲率半径相同的反射镜同轴相对放置，两个反射镜间隔一定距离，光束在两个反射镜上面各形成一圈光斑，赫里奥特池的反射次数较少。
随着在气体检测领域对精度的要求提升，光学气体吸收池的光程也需要进一步提高。要求在有限空间内的实现更长的光程，需要吸收池实现更多次的反射。而传统的光学气体吸收池存在在有限空间内难以实现多次反射、光程短等缺陷，导致检测环境以及检测浓度受到限制，无法满足客户的使用需求。
发明内容
针对现有的光学气体吸收池在有限空间内多次反射次数有限，光程体积比较低的技术问题，本发明提出一种长光程气体吸收池反射光学系统，实现准直光束在有限空间内能够达到更长的光程，完成更多次的反射。
为了达到上述目的，本发明的技术方案是这样实现的：一种长光程气体吸收池反射光学系统，包括反射镜一和反射镜二，反射镜一和反射镜二相对且间隔设置，所述反射镜二上设有光输入端口和光输出端口，反射镜一、反射镜二、光输入端口、光输出端口共同构成反射光学系统；准直光束通过光输入端口射入并在反射镜一和反射镜二之间进行反射、并通过光输出端口射出。
优选地，所述反射镜二包括内凹面和外环面，内凹面设置在外环面内；所述光输入端口和光输出端口均设于反射镜二的外环面上。
优选地，所述反射镜二的内凹面的曲率半径R3与反射镜一的曲率半径R1相等，反射镜二的外环面为平面结构。
优选地，所述光输入端口和光输出端口之间所对应的圆心角γ的大小与反射镜一的曲率半径R1、反射镜二的内凹面的曲率半径R3或反射镜一和反射镜二之间的间隔距离d相关。
优选地，所射入的准直光束与反射镜二的轴线之间形成轴向夹角为α，准直光束投影在反射镜二上的径向夹角为β，且轴向夹角α和径向夹角β的大小均与反射镜一的曲率半径R1、反射镜二内凹面的曲率半径R3或反射镜一和反射镜二之间的间隔距离d相关。
优选地，所述反射镜一上形成反射光斑的数量与反射镜二上形成反射光斑的数量相等。
优选地，所述反射镜二的内凹面的曲率半径R3与反射镜一的曲率半径R1相等，反射镜二的外环面为平面结构。
优选地，所述准直光束在反射镜一和反射镜二之间反射的光路为：准直光束通过光输入端口射入并先到达反射镜一，经反射镜一反射至反射镜二的内凹面上，再经反射镜二反射至反射镜一，最后由反射镜一反射至反射镜二的外环面上；依次规律重复反射，最终在反射镜一上形成一圈反射光斑，在反射镜二的内凹面和外环面上各形成一圈反射光斑。
优选地，所述反射镜二内凹面的曲率半径R3与反射镜一的曲率半径R1相等，且反射镜二的外环面的曲率半径R2≈2.1R1～2.2R1，所述输入端和输出端均设置在外环面和内凹面交接面的直径D4与外环面的外径D3之间。
所述准直光束在反射镜一和反射镜二之间反射的光路为：准直光束通过光输入端口射入并先到达反射镜一，经反射镜一反射至反射镜二上，再经反射镜二反射至反射镜一；依此规律重复反射，最终在反射镜一上形成两圈反射光斑，在反射镜二的内凹面形成两圈光斑和外环面上形成一圈反射光斑共三圈光斑。
优选地，所述准直光束通过光输入端口射入并先到达反射镜一的反射光斑圈I，经反射镜一反射至反射镜二的第三圈反射光斑上，再经反射镜二反射至反射镜一的反射光斑圈I上，再经过反射镜一的反射后回到反射镜二的第一圈反射光斑上，经过反射镜二的反射后到达反射镜一的反射光斑圈II上，再经过反射镜一的反射后回到反射镜二的第二圈反射光斑上，再经反射镜二反射至反射镜一的反射光斑圈I上，再经过反射镜一的反射后回到反射镜二的第二圈反射光斑上。
优选地，所述反射光斑圈I位于反射镜一的反射面上环形直径D2与外径D1之间，反射光斑圈II位于环形直径D2内；
所述第一圈反射光斑位于外环面的外径D3与直径D4之间的环状区域内，第二圈反射光斑位于直径D4与内凹面反射面上环形直径D5之间的环状区域内，第三圈反射光斑位于环形直径D5范围内；所述输入端和输出端均设置在第一圈反射光斑的光斑中心。
与现有技术相比，本发明的有益效果为：
1.本发明中的反射镜结构易于加工制造，通过将反射镜一的曲率半径与反射镜二内凹面的曲率半径设计为相等，一定程度上简化了反射镜的加工工艺，保证加工精度，同时也保证准直光束反射时在反射镜二上所形成的光斑分布均匀。
2.将反射镜二设计为包含内凹面和外环面，并将光输入端口和光输出端口均设置在反射镜二的外环面上，当反射镜二的外环面的曲率半径为无穷大时，准直光束在两个反射镜之间多次反射，并最终在反射镜一上形成一圈反射光斑，在反射镜二的内凹面和外环面上各形成一圈反射光斑，且反射镜二上反射光斑分布均匀；
当反射镜二的外环面的曲率半径为反射镜一的曲率半径的2.1～2.2倍时，在相同空间尺寸的反射次数可以达到3倍的赫里奥特池反射次数及以上；在光程一定的情况下，光学系统的外形尺寸可以做到更小。
3.通过调整两个反射镜的曲率半径以及其之间的间隔距离，可以改变准直光束在吸收池内的反射次数以及所形成反射光斑的光圈大小，从而得到各种不同尺寸需求的长光程气体吸收池。
4.本发明反射镜一和反射镜二的镜片易于加工制造和精度保证，且系统结构简单，光学调校相对简单，易于操作，而且性能稳定，可广泛用于各类检测环境。
附图说明
为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1为本发明实施例1的结构示意图；
图2为本发明准直光束射入时形成轴向夹角的示意图；
图3为本发明准直光束射入时形成径向夹角的示意图；
图4为本发明实施例1准直光束第一次反射的光路示意图；
图5为本发明实施例1准直光束第二次反射的光路示意图；
图6为本发明实施例1反射镜一上所形成的反射光斑分布图；
图7为本发明实施例1反射镜二上所形成的反射光斑分布图；
图8为本发明实施例1的光学模拟图。
图9为本发明实施例2的结构示意图。
图10为本发明实施例2第一组反射光束的反射示意图。
图11为本本发明实施例2第二组反射光束的反射示意图。
图12为本本发明实施例2得到的光斑分布图，其中，(a)为反射镜一，(b)为反射镜二。
图13为本发明实施例2的光学模拟图一。
图14为本发明实施例2的光学模拟图二。
图15为本发明实施例2的光学模拟图三。
图中，1为反射镜一，2为反射镜二，3为输入端，4为输出端。
具体实施方式
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有付出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
实施例1
如图1所示，本发明提供了一种长光程气体吸收池反射光学系统，包括反射镜一1和反射镜二2，反射镜一1和反射镜二2相对且间隔设置，反射镜一1和反射镜二2同轴设置，保证光线在反射镜一1和反射镜二2之间来回反射。所述反射镜一1为凹面反射镜，反射镜二2上分别设有光输入端口3和光输出端口4，反射镜一1、反射镜二2、光输入端口3、光输出端口4共同构成反射光学系统。光源发出的准直光束通过光输入端口3射入吸收池内，并在反射镜一1和反射镜二2之间进行一次以上反射，最后通过光输出端口4射出，实现在有限空间内能够达到更长的光程。
本实施例中，所述反射镜二2包括内凹面和外环面，光输入端口3和光输出端口4均设于反射镜二2的外环面上。设反射镜一1的曲率半径为R1、外径为D1，反射镜二2的外径为D3，反射镜二2外环面的曲率半径为R2，反射镜二2内凹面的曲率半径为R3，反射镜二2内凹面所对应的外径为D4，其中反射镜二的外环面为平面结构，其曲率半径R2为无穷大，反射镜二内凹面的曲率半径R3与反射镜一1的曲率半径R1相等。这样设计的好处是更易于反射镜一和反射镜二的加工制造，简化了反射镜的加工工艺，保证加工精度；同时也保证准直光束反射时在两个反射镜上所形成的光斑分布均匀。
进一步地，如图2、图3所示，所射入的准直光束与反射镜二2的轴线之间形成轴向夹角为α，准直光束投影在反射镜二2上的径向夹角为β，且轴向夹角α和径向夹角β的大小 均与反射镜一1的曲率半径R1、反射镜二内凹面的曲率半径R3或反射镜一1和反射镜二2之间的间隔距离d相关。即通过调整反射镜一1的曲率半径R1或反射镜二内凹面的曲率半径R3或者反射镜一1和反射镜二2之间的间隔距离d，可改变准直光束的反射角度，进而改变准直光束在吸收池内的反射次数以及所形成的反射光斑的光圈大小。
如图4、图5所示，所述准直光束在反射镜一1和反射镜二2之间反射的光路为：准直光束通过光输入端口3射入并先到达反射镜一1的表面P1处，依反射定律经过反射镜一1反射至反射镜二2的内凹面的表面P2处，经反射镜二2反射至反射镜一1的表面P3处，再经过反射镜一1回反射至反射镜二2的外环面的表面P4处，形成第一组反射光束。然后准直光束在P4处经过反射镜二2的反射后到达反射镜一1的表面P5处，后续按照第一组的反射规则，依次反射经过反射点P6、P7到达反射镜二2表面的P8处，形成第二组反射光束。准直光束依次规律在反射镜一1和反射镜二2之间多次反射，最终在反射镜一1上形成一圈反射光斑，在反射镜二2的内凹面和外环面上各形成一圈反射光斑。且反射镜一1上形成反射光斑的数量与反射镜二2上形成反射光斑的数量相等，具体如图6、7所示，即反射镜一上面的反射光斑数量为反射镜二上面的两圈反射光斑数量之和。调整反射镜一和反射镜二之间的间隔距离d及准直光束入射角α和β，可以改变反射镜二的外圈光斑的位置，使光束最终到达光输出端口4处并射出。本发明的光学模拟图如图8所示。
由于光输入端口的光源器件和光输出端口的探测器器件都有一定的尺寸要求，所以吸收池的相邻反射光斑的间隔也有尺寸要求。本实施例中，光输入端口3和光输出端口4分别设置在反射镜二2外环面的不同位置的反射光斑上，对反射镜一的反射光斑间隔和反射镜二的内圈反射光斑间隔不做要求，这样在光程一定的情况下，光学系统的外形尺寸可以做到更小。
如图7所示，所述光输入端口3和光输出端口4之间所对应的圆心角γ的大小与反射镜一1的曲率半径R1、反射镜二内凹面的曲率半径R3或反射镜一1和反射镜二2之间的间隔距离d相关。即调整参数R1、R3、d或入射角度α、β的数值，可以改变准直光束在吸收池内的反射次数以及所形成的反射光斑的光圈大小，从而得到各种不同尺寸需求的长光程气体吸收池。本发明系统结构简单，光学调校相对简单，易于操作，而且性能稳定，可广泛用于各类检测环境。
实施例2
如图9所示，一种长光程气体吸收池反射光学系统，包括反射镜一1和反射镜二2，反射镜一1和反射镜二2相对同轴设置，保证光线在反射镜一1和反射镜二2之间来回反射。反射镜一1为凹面反射镜。反射镜二2上设有输入端3和输出端4，反射镜二2是复合凹面反射镜，反射镜二2包括外环面和内凹面，内凹面设置在外环面内，反射镜一1和反射镜二 2均进行光线的反射。输入端3和输出端4均设置在外环面和内凹面交接面的直径D4与外环面的外径D3之间，内凹面的曲率半径R3与反射镜一1的曲率半径R1相等，外环面的曲率半径R2为反射镜一1的曲率半径R1的2.1～2.2倍。
反射镜一1的曲率半径为R1、外径为D1，反射面上环形直径为D2。反射镜二2在直径D4和外径D3的环状区域内曲率半径为R2，内凹面反射面上的环形直径为D5，反射镜二2在环形直径D5范围内曲率半径为R3。曲率半径R1和曲率半径R3。进一步地，如图2和图3所示，所射入的准直光束与反射镜二2的轴线之间形成轴向夹角为α，准直光束投影在反射镜二2上的径向夹角为β，且轴向夹角α和径向夹角β的大小与反射镜一1的曲率半径R1、反射镜二曲率半径R3、R2及反射镜一1和反射镜二2之间的间隔距离d相关。即通过调整反射镜一1的曲率半径R1或反射镜二曲率半径R3、R2或者反射镜一1和反射镜二2之间的间隔距离d，可调整准直光束在反射镜一及反射镜二表面上的反射角度，进而改变准直光束在吸收池内的反射次数以及所形成的反射光斑的光圈大小。
如图10所示，输入端3在P0处准直光束以一定夹角发出一准直光束到达反射镜一1的表面P1处，P1位于反射镜一1的外径D1和环形直径D2之间，依反射定律经过反射镜一1的反射后到达反射镜二2的表面P2处，P2位于反射镜二2的环形直径D5范围内。经过反射镜二2的反射后到达反射镜一1的表面P3处，P3位于反射镜一1的外径D1和环形直径D2之间，再经过反射镜一1的反射后回到反射镜二2表面P4处，P0-P4之间的光束形成第一组反射光束，P4位于反射镜二2的外径D3和直径D4之间。
如图11所示，当光束在P4处经过反射镜二2的反射后到达反射镜一1的表面P5处，P5位于反射镜一1表面的环形直径D2区域内，续同第一组的规则依次反射经过反射镜二2的表面P6处、反射镜一1的表面P7处到达反射镜二2表面的P8处，P4-P8之间的光束形成第二组反射光束，P6位于反射镜二2的直径D4和环形直径D5之间，P7位于反射镜一1的外径D1和环形直径D2之间，P8位于反射镜二2的直径D4和环形直径D5之间。P0-P8依据反射定律进行设置。
如图12所示，同理如第一组反射光束和第二组反射光束，光束继续在反射镜一1和反射镜二2间继续进行往复反射，最终在反射镜一1形成两圈反射光斑，同时在反射镜二2上面外径D3和直径D4的环状区域内形成一圈反射光斑，在反射镜二2上直径D4和环形直径D5环状区域内形成第二圈反射光斑，在反射镜二2上环形直径D5范围内形成第三圈反射光斑。反射镜一1表面上的两圈反射光斑数与反射镜二2表面上三圈反射光斑数相等。调整反射镜一1和反射镜二2的距离d，可以改变反射镜二2的外圈光斑的位置，使光束最终到达输出端位置出射。
由于输入端的光源器件和输出端的探测器器件都有一定的尺寸要求，所以吸收池的输入端和输出端与相邻光斑的间隔也有尺寸要求，普通的探测器外径一般不小于5mm，光源的尺寸一般不小于3mm。本实用新型的输入端和输出端都设置在反射镜二2的外圈光斑处，由于光源器件和探测器器件没有设置到此处，对反射镜一1的光斑间隔和反射镜二2的内圈光斑间隔不做要求，这样在光程一定的情况下，光学系统的外形尺寸可以做到更小。
调整参数R1、R2、R3、d及入射角α的数值，可以实现不同反射次数和大小光斑光圈直径，从而得到各种不同尺寸需求的长光程气体吸收池。本实用新型光学系统的镜片易于加工制造和精度保证，形成的气体吸收池不仅光学调校相对简单易于操作，而且性能稳定可广泛用于各类检测环境。本申请提高光学系统的反射次数，作为检测产品的核心部件气体吸收池进一步提高了光程尺寸比，相同结构空间的情况下光程越长。
光学软件进行的模拟，得到如图13和图14的光学模拟图，依据光学模拟图一、光学模拟图二所示的光学系统，其光学腔体的气室结构可以设计为圆筒状。光学模拟图一的结果，在只减少反射次数的情况下及改变输出端位置，可以得到如图15的光学模拟图，依据光学模拟图三所示光学系统，其光学腔体的气室结构可以设计为扁平状。
以上所述仅为本发明的较佳实施例而已，并不用以限制本发明，凡在本发明的精神和原则之内，所作的任何修改、等同替换、改进等，均应包含在本发明的保护范围之内。

Claims (11)

  1. 一种长光程气体吸收池反射光学系统，其特征在于，包括反射镜一(1)和反射镜二(2)，反射镜一(1)和反射镜二(2)相对且间隔设置，所述反射镜二(2)上设有光输入端口(3)和光输出端口(4)，反射镜一(1)、反射镜二(2)、光输入端口(3)、光输出端口(4)共同构成反射光学系统；准直光束通过光输入端口(3)射入并在反射镜一(1)和反射镜二(2)之间进行反射、并通过光输出端口(4)射出。
  2. 根据权利要求1所述的长光程气体吸收池反射光学系统，其特征在于，所述反射镜二(2)包括内凹面和外环面，内凹面设置在外环面内；所述光输入端口(3)和光输出端口(4)均设于反射镜二(2)的外环面上。
  3. 根据权利要求2所述的长光程气体吸收池反射光学系统，其特征在于，所述光输入端口(3)和光输出端口(4)之间所对应的圆心角γ的大小与反射镜一(1)的曲率半径R1、反射镜二(2)的内凹面的曲率半径R3或反射镜一(1)和反射镜二(2)之间的间隔距离d相关。
  4. 根据权利要求3所述的长光程气体吸收池反射光学系统，其特征在于，所射入的准直光束与反射镜二(2)的轴线之间形成轴向夹角为α，准直光束投影在反射镜二(2)上的径向夹角为β，且轴向夹角α和径向夹角β的大小均与反射镜一(1)的曲率半径R1、反射镜二内凹面的曲率半径R3或反射镜一(1)和反射镜二(2)之间的间隔距离d相关。
  5. 根据权利要求4所述的长光程气体吸收池反射光学系统，其特征在于，所述反射镜一(1)上形成反射光斑的数量与反射镜二(2)上形成反射光斑的数量相等。
  6. 根据权利要2-5中任意一项所述的长光程气体吸收池反射光学系统，其特征在于，所述反射镜二(2)的内凹面的曲率半径R3与反射镜一(1)的曲率半径R1相等，反射镜二(2)的外环面为平面结构。
  7. 根据权利要求6所述的长光程气体吸收池反射光学系统，其特征在于，所述准直光束在反射镜一(1)和反射镜二(2)之间反射的光路为：准直光束通过光输入端口(3)射入并先到达反射镜一(1)，经反射镜一(1)反射至反射镜二(2)的内凹面上，再经反射镜二(2)反射至反射镜一(1)，最后由反射镜一(1)反射至反射镜二(2)的外环面上；依次规律重复反射，最终在反射镜一(1)上形成一圈反射光斑，在反射镜二(2)的内凹面和外环面上各形成一圈反射光斑。
  8. 根据权利要求2-5中任意一项所述的长光程气体吸收池反射光学系统，其特征在于，所述反射镜二内凹面的曲率半径R3与反射镜一(1)的曲率半径R1相等，且反射镜二(2)的外环面的曲率半径R2≈2.1R1～2.2R1，所述输入端(3)和输出端(4)均设置 在外环面和内凹面交接面的直径D4与外环面的外径D3之间。
  9. 根据权利要求8所述的长光程气体吸收池反射光学系统，其特征在于，所述准直光束在反射镜一(1)和反射镜二(2)之间反射的光路为：准直光束通过光输入端口(3)射入并先到达反射镜一(1)，经反射镜一(1)反射至反射镜二(2)上，再经反射镜二(2)反射至反射镜一(1)；依此规律重复反射，最终在反射镜一(1)上形成两圈反射光斑，在反射镜二(2)的内凹面形成两圈光斑和外环面上形成一圈反射光斑共三圈光斑。
  10. 根据权利要求9所述的长光程气体吸收池反射光学系统，其特征在于，所述准直光束通过光输入端口(3)射入并先到达反射镜一(1)的反射光斑圈I，经反射镜一(1)反射至反射镜二(2)的第三圈反射光斑上，再经反射镜二(2)反射至反射镜一(1)的反射光斑圈I上，再经过反射镜一(1)的反射后回到反射镜二(2)的第一圈反射光斑上，经过反射镜二(2)的反射后到达反射镜一(1)的反射光斑圈II上，再经过反射镜一(1)的反射后回到反射镜二(2)的第二圈反射光斑上，再经反射镜二(2)反射至反射镜一(1)的反射光斑圈I上，再经过反射镜一(1)的反射后回到反射镜二(2)的第二圈反射光斑上。
  11. 根据权利要求10所述的长光程气体吸收池反射光学系统，其特征在于，所述反射光斑圈I位于反射镜一(1)的反射面上环形直径D2与外径D1之间，反射光斑圈II位于环形直径D2内；
    所述第一圈反射光斑位于外环面的外径D3与直径D4之间的环状区域内，第二圈反射光斑位于直径D4与内凹面反射面上环形直径D5之间的环状区域内，第三圈反射光斑位于环形直径D5范围内；所述输入端(3)和输出端(4)均设置在第一圈反射光斑的光斑中心。
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