WO2023167459A1 - Structure d'attache anti-desserrage du type à fixation - Google Patents

Structure d'attache anti-desserrage du type à fixation Download PDF

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Publication number
WO2023167459A1
WO2023167459A1 PCT/KR2023/002502 KR2023002502W WO2023167459A1 WO 2023167459 A1 WO2023167459 A1 WO 2023167459A1 KR 2023002502 W KR2023002502 W KR 2023002502W WO 2023167459 A1 WO2023167459 A1 WO 2023167459A1
Authority
WO
WIPO (PCT)
Prior art keywords
fastening structure
nut
loosening fastening
loosening
fixed anti
Prior art date
Application number
PCT/KR2023/002502
Other languages
English (en)
Korean (ko)
Inventor
박진경
Original Assignee
주식회사 티이엠
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020220026703A external-priority patent/KR102659510B1/ko
Priority claimed from KR1020220125330A external-priority patent/KR20240045703A/ko
Application filed by 주식회사 티이엠 filed Critical 주식회사 티이엠
Publication of WO2023167459A1 publication Critical patent/WO2023167459A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
    • F16B37/00—Nuts or like thread-engaging members
    • F16B37/04—Devices for fastening nuts to surfaces, e.g. sheets, plates
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
    • F16B39/00—Locking of screws, bolts or nuts
    • F16B39/02—Locking of screws, bolts or nuts in which the locking takes place after screwing down
    • F16B39/10—Locking of screws, bolts or nuts in which the locking takes place after screwing down by a plate, spring, wire or ring immovable with regard to the bolt or object and mainly perpendicular to the axis of the bolt
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
    • F16B39/00—Locking of screws, bolts or nuts
    • F16B39/22—Locking of screws, bolts or nuts in which the locking takes place during screwing down or tightening
    • F16B39/24—Locking of screws, bolts or nuts in which the locking takes place during screwing down or tightening by means of washers, spring washers, or resilient plates that lock against the object
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere

Definitions

  • the present invention relates to a fixed anti-loosening fastening structure, and relates to a fastening structure capable of preventing a fastening force from being lowered due to loosening of fixing bolts coupling different first and second members during a working process.
  • it can be used in a semiconductor manufacturing apparatus to fix a shower head for plasma and a gas distribution plate.
  • a plasma device used for etching a semiconductor wafer is installed horizontally with a wafer mainly located on an anode inside a plasma chamber, injects a reaction gas through a plurality of holes formed therein, and applies a high-frequency voltage to etch the wafer.
  • a cathode is provided to generate plasma required for
  • the cathode is mainly coupled to the plate inside the plasma chamber through bolts.
  • the cathode and a plurality of threaded bolt insertion openings are formed inside the plate inside the chamber to match the bolt insertion openings up and down, and then the bolts It is configured to insert and combine.
  • a through hole is formed in the plasma, a bush fixedly inserted by a step inside the through hole, and an assembly ring inserted between the outside of the bush and the inside of the through hole are provided, and then the plasma chamber is formed.
  • the plate is inserted and the following assembly screws are screwed to the bush to prevent damage to the screw joint, and in case of damage, only the bush can be replaced and used.
  • a bush assembly for plasma electrodes of Patent Registration No. 10-2128596 (2020.06.24.) and an electrode assembly structure including the same have been proposed, and the proposed electrode assembly structure includes an assembly ring. Even if the bush is not used, it prevents rotation by itself when assembling the bush to simplify the structure and prevent the loosening of bolts.
  • the support force is lowered as the support member is released in reverse rotation from the fixing member due to other causes such as elongation or deformation due to high temperature.
  • the robustness is lowered due to this.
  • This invention relates to a fastening structure in which a locking cap is coupled to a fixing bolt in order to stably couple the same or different first and second members, so that the gas distribution unit is in close contact with the shower head used in the semiconductor manufacturing apparatus , By coupling the locking cap to the fixing bolt, loosening is prevented, and through this, the fastening force is prevented from being lowered so that a high-precision semiconductor manufacturing process can be performed.
  • the first member may be a showerhead used in a semiconductor plasma device
  • the second member may be a gas distribution unit used in a semiconductor plasma device.
  • the first member but provided with a nut insertion hole having a predetermined depth in the body, the nut insertion hole, the anti-rotation piece insertion groove provided on the bottom; and a guide nut portion provided on an inner periphery from the top of the anti-rotation piece insertion groove to the top of the body.
  • the rotation prevention piece insertion groove has a long groove shape
  • the guide nut portion preferably has a round female screw shape.
  • the nut may include an unlocking nut inserted into the nut insertion hole to prevent rotation; and a hollow guide coupled to the nut insertion hole to prevent the unlocking nut from moving upward.
  • the unlocking nut may include a nut body; anti-rotation pieces provided under the nut body, having a predetermined thickness, and protruding in a crescent shape toward both directions; and a female screw portion through which the nut body and the anti-rotation piece penetrate.
  • the hollow guide unit may include a hollow guide body having the same inner diameter as the outer diameter of the unlocking nut; and a male screw portion provided on an outer periphery of the hollow guide body.
  • the hollow guide unit may further include a tool insertion unit provided at an upper end of the hollow guide body.
  • the fixing bolt may include a polygonal bolt head having a polygonal groove on an upper portion of a bolt body having a bolt male screw portion.
  • an anti-loosening unit is coupled to the lower portion of the polygonal bolt head, and more preferably, the anti-loosening unit is provided as a two-layered plate ring washer.
  • the locking cap may include a cap body; and a bolt head locking portion provided such that locking grooves are repeated in a circular arrangement inside the cap body; or, the cap body; and a bolt head locking part having locking protrusions formed inside the cap body so as to repeat in a circular arrangement.
  • the cap body may have both end portions having a semicircular shape and extending outwardly to a predetermined length.
  • the locking groove may be provided with a mountain-shaped groove or mountain-shaped protrusion having a predetermined interval.
  • the locking cap may further include a tool locking groove provided on the outside of the cap body.
  • This invention can ensure sufficient clamping force when the first member and the second member are screwed together, and through this, it is possible to obtain a product or process with high precision by preventing vibration from occurring during the working process.
  • FIG. 1 is a perspective view showing the inside and outside of a fixed anti-loosening fastening structure of a plasma shower head and a gas distribution plate according to an embodiment of the present invention by partially cutting away.
  • FIG. 2 is a perspective view showing a fixed anti-loosening fastening structure between a shower head for plasma and a gas distribution plate according to an embodiment of the present invention.
  • FIG. 3 shows a state in which an unlocking nut, a hollow guide unit, a distribution plate fixing bolt, and a locking cap are separated and coupled in a fixed anti-loosening fastening structure between a plasma shower head and a gas distribution plate according to an embodiment of the present invention. It is a perspective view.
  • FIG. 4 is a longitudinal cross-sectional view showing a fixed anti-loosening fastening structure between a plasma shower head and a gas distribution plate according to an embodiment of the present invention in isolation.
  • FIG. 5 is a longitudinal cross-sectional view showing a fixed anti-loosening fastening structure between a shower head for plasma and a gas distribution plate according to an embodiment of the present invention.
  • FIG. 1 is a perspective view showing the inside and outside of a fixed anti-loosening fastening structure of a plasma shower head corresponding to a first member and a gas distribution plate corresponding to a second member according to the present invention by partially cutting away, and FIG. It is a perspective view separately showing the fixed anti-loosening fastening structure of the plasma shower head, which is one member, and the gas distribution plate, which is the second member.
  • Figure 3 is a separation (Fig. 3 (a)), coupled state (Fig. 3 (b)) of the unlocking nut, the hollow guide portion, the distribution plate fixing bolt and the locking cap constituting the fixed anti-loosening fastening structure according to the present invention
  • Figure 4 is a longitudinal cross-sectional view of the fixed anti-loosening fastening structure according to the present invention
  • Figure 5 is a longitudinal cross-sectional view showing the fixed anti-loosening fastening structure according to the present invention.
  • the fixed anti-loosening fastening structure according to the present invention can secure sufficient clamping force to prevent vibration during the work process, thereby producing a high-precision product or stably performing a high-precision process. In addition, it is possible to prevent or reduce the occurrence of a change in bonding force between the first member and the second member.
  • this is a fixed anti-loosening fastening structure according to an embodiment of the present invention, a first member 100, a nut 200, a second member 400, a fixing bolt 500 and a locking Includes cap 600.
  • the first member 100 may be a shower head of a plasma etching device, which is a semiconductor manufacturing device, and a plurality of nut insertion holes ( 110) may be provided in place.
  • the nut 200 may be composed of an unlocking nut 201 and a hollow guide part 300 .
  • the nut insertion hole 110 is provided to prevent the unlocking nut 201 constituting the nut 200 from being separated by the hollow guide part 300 in the inserted state.
  • the nut insertion hole 110 has an anti-rotation piece insertion groove 111 having a long groove shape at the bottom, and an inner circumference from the top of the anti-rotation piece insertion groove 111 to the top of the body 101.
  • a guide nut portion 112 having a round female screw shape is provided.
  • the unlocking nut 201 is inserted into the nut insertion hole 110, and the bolt male screw portion 511 provided in the bolt body 510 of the fixing bolt 500 to be described later is screwed into the second member by the fastening force in the process.
  • the bottom surface, which is the lower part of the 400, is provided so that a fixed state can be maintained by facing the upper surface, which is the upper part, of the first member 100 with a constant pressure.
  • the unlocking nut 201 is provided with anti-rotation pieces 220 protruding in a crescent shape in both directions and having a predetermined thickness at the bottom of the nut body 210 to insert grooves for the anti-rotation pieces of the body 101.
  • anti-rotation pieces 220 protruding in a crescent shape in both directions and having a predetermined thickness at the bottom of the nut body 210 to insert grooves for the anti-rotation pieces of the body 101.
  • the nut body 210 and the anti-rotation piece 220 are provided with a female screw portion 230 having a penetrating shape, so that the bolt male screw portion 511 provided in the bolt body 510 of the fixing bolt 500 is easily can be combined.
  • the hollow guide part 300 is provided to prevent the unlocking nut 201 from being pulled out (protruding) upward to provide sufficient fastening force to the fixing bolt 500, and the nut of the unlocking nut 201
  • a male screw portion 320 is provided at the outer periphery of the hollow guide body 310 having the same inner diameter as the outer diameter of the body 210, and a tool insertion portion 330 is provided at the upper end of the hollow guide body 320 to provide a separate It is provided so that it can be screwed into the guide nut portion 112 with sufficient tightening force using a tool.
  • the second member 400 is provided with a bolt body through hole 420 at the bottom of the bolt head locking groove 410 completely penetrating from the top to the bottom, so that the bolt body of the fixing bolt 500 510 penetrates the second member 400 and is provided so that it can be screwed into the female screw portion 230 of the unlocking nut 201 positioned downward.
  • the fixing bolt 500 is provided with a polygonal bolt head 520 having a polygonal groove 521 on top of a bolt body 510 having a bolt male thread portion 511, so that it can be tightened or loosened using a wrench or the like not shown.
  • the anti-loosening unit 530 is coupled to the lower portion of the polygonal bolt head 520 to prevent the polygonal bolt head 520 from being released in the opposite direction in the coupled state.
  • the anti-loosening part 530 is provided with two layers of plate ring washers, so that a constant elastic force always acts from the bottom of the bolt locking groove 410 toward the top, thereby preventing loosening.
  • the locking cap 600 is inserted into the cap body 610 having the same shape so as to be inserted into the bolt head engaging groove 410 of the second member 400 so that the corner portion of the polygonal bolt head 520 is caught.
  • a bolt head locking portion 620 in which grooves 621 are repeated in a circular arrangement is provided.
  • a tool locking groove 630 is provided on the outside of the cap body 610, and while a tool not shown is used to insert the bolt head into the bolt head locking groove 410, the edge of the polygonal bolt head 520 locks into the locking groove 621. can be inserted.
  • the cap body 610 has both ends of a semicircular shape as a way to be inserted into the bolt head locking groove 410 without interference, and is provided to have a form extending outward to a predetermined length, so that the cap body 610 has a bolt head locking groove. It is possible to prevent flow beyond a certain limit in a state inserted into 410.
  • the locking groove 621 may be provided with a mountain-shaped groove or protrusion having a predetermined interval, preferably about 15° interval.
  • the female screw portion 230 of the unlocking nut 201 has a shape that simply penetrates the nut body 210 and the anti-rotation piece 220, but in addition to this shape, a position having a certain distance from the center That is, it may be provided at an eccentric position at regular intervals.
  • the part provided with the female screw part 230 based on the center of the unlocking nut 201 is directed toward the lower part of the second member 400.
  • the corresponding part is pressed into the anti-rotation piece insertion groove 111 of the body 101, so that flow can be further prevented.
  • This invention relates to a fastening structure in which a locking cap is coupled to a fixing bolt in order to stably couple the same or different first and second members, the first member having a nut insertion hole; nut; a second member having a bolt head locking groove and a bolt body through-hole, the lower portion of which is provided to be seated on the upper portion of the first member; and a fixing bolt coupled to the nut through the through-hole of the bolt body; since the locking cap is coupled to the fixing bolt to prevent loosening, it prevents the fastening force from being lowered, resulting in a high-precision manufacturing process. Since it can be performed, industrial applicability exists.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

La présente invention concerne une structure d'attache anti-desserrage du type à fixation permettant de fixer un premier élément et un second élément qui sont identiques ou différents l'un de l'autre et, afin d'empêcher la réduction de la force d'accouplement en raison du desserrage d'un boulon de fixation accouplant les éléments pendant le fonctionnement, un capuchon de verrouillage est accouplé au boulon de fixation. En particulier, une structure d'attache anti-desserrage du type à fixation d'une pomme de douche pour plasma et une plaque de distribution de gaz peuvent être fournies, la structure d'attache anti-desserrage du type à fixation pouvant être appliquée à une structure d'attache d'une pomme de douche pour plasma et d'une plaque de distribution de gaz, incluses dans un appareil de fabrication de semi-conducteur, de sorte à empêcher une diminution de la force d'attache en raison du desserrage d'un boulon de fixation de plaque de distribution accouplant ensemble une partie de pomme de douche et une partie de distribution de gaz pendant le fonctionnement.
PCT/KR2023/002502 2022-03-02 2023-02-22 Structure d'attache anti-desserrage du type à fixation WO2023167459A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR1020220026703A KR102659510B1 (ko) 2022-03-02 2022-03-02 플라즈마용 샤워 헤드와 가스분배판의 고정식 풀림방지 체결구조
KR10-2022-0026703 2022-03-02
KR10-2022-0125330 2022-09-30
KR1020220125330A KR20240045703A (ko) 2022-09-30 2022-09-30 고정식 풀림 방지 체결 구조체

Publications (1)

Publication Number Publication Date
WO2023167459A1 true WO2023167459A1 (fr) 2023-09-07

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PCT/KR2023/002502 WO2023167459A1 (fr) 2022-03-02 2023-02-22 Structure d'attache anti-desserrage du type à fixation

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WO (1) WO2023167459A1 (fr)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06330925A (ja) * 1993-05-20 1994-11-29 Sanyu Sekkei:Kk ボルト、ナットのゆるみ止めキャップ
US20090116930A1 (en) * 2007-11-06 2009-05-07 Reimler James L Fastener system, fastener system article, and method
KR20120104112A (ko) * 2011-03-11 2012-09-20 가부시키가이샤 후지킨 볼트 풀림 방지 장치, 그 부착 방법과 부착 지그, 유체 제어 장치 및 기판 처리 장치
KR20150115411A (ko) * 2014-04-04 2015-10-14 심광현 볼트 풀림 방지구조
KR101980255B1 (ko) * 2018-12-27 2019-05-21 주식회사 테크놀로지메이컬스 캐소드 전극판용 부시 조립구조 및 이를 포함하는 상부전극 조립체
KR102167800B1 (ko) * 2019-09-06 2020-10-19 (주)원세미콘 캐소드 전극판 조립체 및 그 체결방법

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06330925A (ja) * 1993-05-20 1994-11-29 Sanyu Sekkei:Kk ボルト、ナットのゆるみ止めキャップ
US20090116930A1 (en) * 2007-11-06 2009-05-07 Reimler James L Fastener system, fastener system article, and method
KR20120104112A (ko) * 2011-03-11 2012-09-20 가부시키가이샤 후지킨 볼트 풀림 방지 장치, 그 부착 방법과 부착 지그, 유체 제어 장치 및 기판 처리 장치
KR20150115411A (ko) * 2014-04-04 2015-10-14 심광현 볼트 풀림 방지구조
KR101980255B1 (ko) * 2018-12-27 2019-05-21 주식회사 테크놀로지메이컬스 캐소드 전극판용 부시 조립구조 및 이를 포함하는 상부전극 조립체
KR102167800B1 (ko) * 2019-09-06 2020-10-19 (주)원세미콘 캐소드 전극판 조립체 및 그 체결방법

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