WO2023167459A1 - Fixing-type anti-loosening fastening structure - Google Patents
Fixing-type anti-loosening fastening structure Download PDFInfo
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- WO2023167459A1 WO2023167459A1 PCT/KR2023/002502 KR2023002502W WO2023167459A1 WO 2023167459 A1 WO2023167459 A1 WO 2023167459A1 KR 2023002502 W KR2023002502 W KR 2023002502W WO 2023167459 A1 WO2023167459 A1 WO 2023167459A1
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- Prior art keywords
- fastening structure
- nut
- loosening fastening
- loosening
- fixed anti
- Prior art date
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- 238000009826 distribution Methods 0.000 claims abstract description 24
- 239000004065 semiconductor Substances 0.000 claims abstract description 11
- 230000008878 coupling Effects 0.000 claims abstract description 7
- 238000010168 coupling process Methods 0.000 claims abstract description 7
- 238000005859 coupling reaction Methods 0.000 claims abstract description 7
- 238000003780 insertion Methods 0.000 claims description 29
- 230000037431 insertion Effects 0.000 claims description 29
- 238000000034 method Methods 0.000 claims description 11
- 230000002265 prevention Effects 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 239000007789 gas Substances 0.000 description 12
- 230000000694 effects Effects 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
- F16B37/00—Nuts or like thread-engaging members
- F16B37/04—Devices for fastening nuts to surfaces, e.g. sheets, plates
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
- F16B39/00—Locking of screws, bolts or nuts
- F16B39/02—Locking of screws, bolts or nuts in which the locking takes place after screwing down
- F16B39/10—Locking of screws, bolts or nuts in which the locking takes place after screwing down by a plate, spring, wire or ring immovable with regard to the bolt or object and mainly perpendicular to the axis of the bolt
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
- F16B39/00—Locking of screws, bolts or nuts
- F16B39/22—Locking of screws, bolts or nuts in which the locking takes place during screwing down or tightening
- F16B39/24—Locking of screws, bolts or nuts in which the locking takes place during screwing down or tightening by means of washers, spring washers, or resilient plates that lock against the object
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
Definitions
- the present invention relates to a fixed anti-loosening fastening structure, and relates to a fastening structure capable of preventing a fastening force from being lowered due to loosening of fixing bolts coupling different first and second members during a working process.
- it can be used in a semiconductor manufacturing apparatus to fix a shower head for plasma and a gas distribution plate.
- a plasma device used for etching a semiconductor wafer is installed horizontally with a wafer mainly located on an anode inside a plasma chamber, injects a reaction gas through a plurality of holes formed therein, and applies a high-frequency voltage to etch the wafer.
- a cathode is provided to generate plasma required for
- the cathode is mainly coupled to the plate inside the plasma chamber through bolts.
- the cathode and a plurality of threaded bolt insertion openings are formed inside the plate inside the chamber to match the bolt insertion openings up and down, and then the bolts It is configured to insert and combine.
- a through hole is formed in the plasma, a bush fixedly inserted by a step inside the through hole, and an assembly ring inserted between the outside of the bush and the inside of the through hole are provided, and then the plasma chamber is formed.
- the plate is inserted and the following assembly screws are screwed to the bush to prevent damage to the screw joint, and in case of damage, only the bush can be replaced and used.
- a bush assembly for plasma electrodes of Patent Registration No. 10-2128596 (2020.06.24.) and an electrode assembly structure including the same have been proposed, and the proposed electrode assembly structure includes an assembly ring. Even if the bush is not used, it prevents rotation by itself when assembling the bush to simplify the structure and prevent the loosening of bolts.
- the support force is lowered as the support member is released in reverse rotation from the fixing member due to other causes such as elongation or deformation due to high temperature.
- the robustness is lowered due to this.
- This invention relates to a fastening structure in which a locking cap is coupled to a fixing bolt in order to stably couple the same or different first and second members, so that the gas distribution unit is in close contact with the shower head used in the semiconductor manufacturing apparatus , By coupling the locking cap to the fixing bolt, loosening is prevented, and through this, the fastening force is prevented from being lowered so that a high-precision semiconductor manufacturing process can be performed.
- the first member may be a showerhead used in a semiconductor plasma device
- the second member may be a gas distribution unit used in a semiconductor plasma device.
- the first member but provided with a nut insertion hole having a predetermined depth in the body, the nut insertion hole, the anti-rotation piece insertion groove provided on the bottom; and a guide nut portion provided on an inner periphery from the top of the anti-rotation piece insertion groove to the top of the body.
- the rotation prevention piece insertion groove has a long groove shape
- the guide nut portion preferably has a round female screw shape.
- the nut may include an unlocking nut inserted into the nut insertion hole to prevent rotation; and a hollow guide coupled to the nut insertion hole to prevent the unlocking nut from moving upward.
- the unlocking nut may include a nut body; anti-rotation pieces provided under the nut body, having a predetermined thickness, and protruding in a crescent shape toward both directions; and a female screw portion through which the nut body and the anti-rotation piece penetrate.
- the hollow guide unit may include a hollow guide body having the same inner diameter as the outer diameter of the unlocking nut; and a male screw portion provided on an outer periphery of the hollow guide body.
- the hollow guide unit may further include a tool insertion unit provided at an upper end of the hollow guide body.
- the fixing bolt may include a polygonal bolt head having a polygonal groove on an upper portion of a bolt body having a bolt male screw portion.
- an anti-loosening unit is coupled to the lower portion of the polygonal bolt head, and more preferably, the anti-loosening unit is provided as a two-layered plate ring washer.
- the locking cap may include a cap body; and a bolt head locking portion provided such that locking grooves are repeated in a circular arrangement inside the cap body; or, the cap body; and a bolt head locking part having locking protrusions formed inside the cap body so as to repeat in a circular arrangement.
- the cap body may have both end portions having a semicircular shape and extending outwardly to a predetermined length.
- the locking groove may be provided with a mountain-shaped groove or mountain-shaped protrusion having a predetermined interval.
- the locking cap may further include a tool locking groove provided on the outside of the cap body.
- This invention can ensure sufficient clamping force when the first member and the second member are screwed together, and through this, it is possible to obtain a product or process with high precision by preventing vibration from occurring during the working process.
- FIG. 1 is a perspective view showing the inside and outside of a fixed anti-loosening fastening structure of a plasma shower head and a gas distribution plate according to an embodiment of the present invention by partially cutting away.
- FIG. 2 is a perspective view showing a fixed anti-loosening fastening structure between a shower head for plasma and a gas distribution plate according to an embodiment of the present invention.
- FIG. 3 shows a state in which an unlocking nut, a hollow guide unit, a distribution plate fixing bolt, and a locking cap are separated and coupled in a fixed anti-loosening fastening structure between a plasma shower head and a gas distribution plate according to an embodiment of the present invention. It is a perspective view.
- FIG. 4 is a longitudinal cross-sectional view showing a fixed anti-loosening fastening structure between a plasma shower head and a gas distribution plate according to an embodiment of the present invention in isolation.
- FIG. 5 is a longitudinal cross-sectional view showing a fixed anti-loosening fastening structure between a shower head for plasma and a gas distribution plate according to an embodiment of the present invention.
- FIG. 1 is a perspective view showing the inside and outside of a fixed anti-loosening fastening structure of a plasma shower head corresponding to a first member and a gas distribution plate corresponding to a second member according to the present invention by partially cutting away, and FIG. It is a perspective view separately showing the fixed anti-loosening fastening structure of the plasma shower head, which is one member, and the gas distribution plate, which is the second member.
- Figure 3 is a separation (Fig. 3 (a)), coupled state (Fig. 3 (b)) of the unlocking nut, the hollow guide portion, the distribution plate fixing bolt and the locking cap constituting the fixed anti-loosening fastening structure according to the present invention
- Figure 4 is a longitudinal cross-sectional view of the fixed anti-loosening fastening structure according to the present invention
- Figure 5 is a longitudinal cross-sectional view showing the fixed anti-loosening fastening structure according to the present invention.
- the fixed anti-loosening fastening structure according to the present invention can secure sufficient clamping force to prevent vibration during the work process, thereby producing a high-precision product or stably performing a high-precision process. In addition, it is possible to prevent or reduce the occurrence of a change in bonding force between the first member and the second member.
- this is a fixed anti-loosening fastening structure according to an embodiment of the present invention, a first member 100, a nut 200, a second member 400, a fixing bolt 500 and a locking Includes cap 600.
- the first member 100 may be a shower head of a plasma etching device, which is a semiconductor manufacturing device, and a plurality of nut insertion holes ( 110) may be provided in place.
- the nut 200 may be composed of an unlocking nut 201 and a hollow guide part 300 .
- the nut insertion hole 110 is provided to prevent the unlocking nut 201 constituting the nut 200 from being separated by the hollow guide part 300 in the inserted state.
- the nut insertion hole 110 has an anti-rotation piece insertion groove 111 having a long groove shape at the bottom, and an inner circumference from the top of the anti-rotation piece insertion groove 111 to the top of the body 101.
- a guide nut portion 112 having a round female screw shape is provided.
- the unlocking nut 201 is inserted into the nut insertion hole 110, and the bolt male screw portion 511 provided in the bolt body 510 of the fixing bolt 500 to be described later is screwed into the second member by the fastening force in the process.
- the bottom surface, which is the lower part of the 400, is provided so that a fixed state can be maintained by facing the upper surface, which is the upper part, of the first member 100 with a constant pressure.
- the unlocking nut 201 is provided with anti-rotation pieces 220 protruding in a crescent shape in both directions and having a predetermined thickness at the bottom of the nut body 210 to insert grooves for the anti-rotation pieces of the body 101.
- anti-rotation pieces 220 protruding in a crescent shape in both directions and having a predetermined thickness at the bottom of the nut body 210 to insert grooves for the anti-rotation pieces of the body 101.
- the nut body 210 and the anti-rotation piece 220 are provided with a female screw portion 230 having a penetrating shape, so that the bolt male screw portion 511 provided in the bolt body 510 of the fixing bolt 500 is easily can be combined.
- the hollow guide part 300 is provided to prevent the unlocking nut 201 from being pulled out (protruding) upward to provide sufficient fastening force to the fixing bolt 500, and the nut of the unlocking nut 201
- a male screw portion 320 is provided at the outer periphery of the hollow guide body 310 having the same inner diameter as the outer diameter of the body 210, and a tool insertion portion 330 is provided at the upper end of the hollow guide body 320 to provide a separate It is provided so that it can be screwed into the guide nut portion 112 with sufficient tightening force using a tool.
- the second member 400 is provided with a bolt body through hole 420 at the bottom of the bolt head locking groove 410 completely penetrating from the top to the bottom, so that the bolt body of the fixing bolt 500 510 penetrates the second member 400 and is provided so that it can be screwed into the female screw portion 230 of the unlocking nut 201 positioned downward.
- the fixing bolt 500 is provided with a polygonal bolt head 520 having a polygonal groove 521 on top of a bolt body 510 having a bolt male thread portion 511, so that it can be tightened or loosened using a wrench or the like not shown.
- the anti-loosening unit 530 is coupled to the lower portion of the polygonal bolt head 520 to prevent the polygonal bolt head 520 from being released in the opposite direction in the coupled state.
- the anti-loosening part 530 is provided with two layers of plate ring washers, so that a constant elastic force always acts from the bottom of the bolt locking groove 410 toward the top, thereby preventing loosening.
- the locking cap 600 is inserted into the cap body 610 having the same shape so as to be inserted into the bolt head engaging groove 410 of the second member 400 so that the corner portion of the polygonal bolt head 520 is caught.
- a bolt head locking portion 620 in which grooves 621 are repeated in a circular arrangement is provided.
- a tool locking groove 630 is provided on the outside of the cap body 610, and while a tool not shown is used to insert the bolt head into the bolt head locking groove 410, the edge of the polygonal bolt head 520 locks into the locking groove 621. can be inserted.
- the cap body 610 has both ends of a semicircular shape as a way to be inserted into the bolt head locking groove 410 without interference, and is provided to have a form extending outward to a predetermined length, so that the cap body 610 has a bolt head locking groove. It is possible to prevent flow beyond a certain limit in a state inserted into 410.
- the locking groove 621 may be provided with a mountain-shaped groove or protrusion having a predetermined interval, preferably about 15° interval.
- the female screw portion 230 of the unlocking nut 201 has a shape that simply penetrates the nut body 210 and the anti-rotation piece 220, but in addition to this shape, a position having a certain distance from the center That is, it may be provided at an eccentric position at regular intervals.
- the part provided with the female screw part 230 based on the center of the unlocking nut 201 is directed toward the lower part of the second member 400.
- the corresponding part is pressed into the anti-rotation piece insertion groove 111 of the body 101, so that flow can be further prevented.
- This invention relates to a fastening structure in which a locking cap is coupled to a fixing bolt in order to stably couple the same or different first and second members, the first member having a nut insertion hole; nut; a second member having a bolt head locking groove and a bolt body through-hole, the lower portion of which is provided to be seated on the upper portion of the first member; and a fixing bolt coupled to the nut through the through-hole of the bolt body; since the locking cap is coupled to the fixing bolt to prevent loosening, it prevents the fastening force from being lowered, resulting in a high-precision manufacturing process. Since it can be performed, industrial applicability exists.
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
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Abstract
The present invention relates to a fixing-type anti-loosening fastening structure capable of fixing a first member and a second member that are same as or different from each other, and in order to prevent the coupling force from being reduced because a fixing bolt coupling the members is loosened during operation, a locking cap is coupled to the fixing bolt. In particular, a fixing-type anti-loosening fastening structure of a shower head for plasma and a gas distribution plate can be provided, the fixing-type anti-loosening fastening structure being capable of being applied to a fastening structure of a shower head for plasma and a gas distribution plate, included in a semiconductor manufacturing apparatus, so as to prevent a decrease in fastening force because a distribution plate fixing bolt coupling together a shower head portion and a gas distribution portion is loosened during operation.
Description
이건 발명은 고정식 풀림 방지 체결 구조체에 관한 것으로, 서로 다른 제1 부재와 제2 부재를 결합시키는 고정볼트가 작업 과정에서 풀려 체결력이 낮아지는 것을 막을 수 있는 체결 구조체에 관한 것이다. 특히 반도체 제조 장치에 사용되어 플라즈마용 샤워 헤드와 가스분배판을 고정하기 위해 사용될 수 있다. The present invention relates to a fixed anti-loosening fastening structure, and relates to a fastening structure capable of preventing a fastening force from being lowered due to loosening of fixing bolts coupling different first and second members during a working process. In particular, it can be used in a semiconductor manufacturing apparatus to fix a shower head for plasma and a gas distribution plate.
반도체 웨이퍼의 식각 처리를 위해 사용되는 플라즈마 장치는 플라즈마 챔버 내부의 애노드 상에 주로 위치되는 웨이퍼와 수평하게 설치되어 자체에 형성된 다수의 홀을 통해 반응 가스를 주입하고, 고주파 전압을 인가하여 웨이퍼의 식각에 필요한 플라즈마를 발생시키는 캐소드가 구비되어 있다.A plasma device used for etching a semiconductor wafer is installed horizontally with a wafer mainly located on an anode inside a plasma chamber, injects a reaction gas through a plurality of holes formed therein, and applies a high-frequency voltage to etch the wafer. A cathode is provided to generate plasma required for
캐소드는 플라즈마 챔버 내부의 플레이트 상에 주로 볼트를 통해 결합되고 있는 바, 이러한 볼트 체결에서는 캐소드와, 챔버 내부의 플레이트 내측에 나사산이 형성된 다수의 볼트삽입구를 형성하여, 볼트삽입구를 상하 일치시킨 후 볼트를 삽입하여 결합시키도록 구성되어 있다.The cathode is mainly coupled to the plate inside the plasma chamber through bolts. In such bolt fastening, the cathode and a plurality of threaded bolt insertion openings are formed inside the plate inside the chamber to match the bolt insertion openings up and down, and then the bolts It is configured to insert and combine.
이러한 볼트 체결 구조에서는 고압의 플라즈마 환경에서 발생되는 볼트의 유동에 의해 볼트체결구의 나사산에 손상이 발생되어 캐소드가 소모되는 문제점이 있을 뿐만 아니라, 나사의 풀림에 의해 캐소드와 플레이트 간에 간격이 발생하여 웨이퍼 식각 공정의 성능을 저하시키는 문제점이 있었다.In such a bolt fastening structure, there is a problem of consumption of the cathode due to damage to the thread of the bolt fastening hole due to the flow of the bolt generated in the high-pressure plasma environment, and also a gap between the cathode and the plate due to loosening of the screw, resulting in a wafer There was a problem of deteriorating the performance of the etching process.
한편, 이러한 문제점을 해결하기 위한 방안으로 플라즈마에 통공을 형성하고, 통공의 내부에서 단턱에 의해 고정 삽입되는 부시와, 부시의 외측과 통공 내측의 사이에 삽입되는 조립링을 구비한 후 플라즈마 챔버의 플레이트를 삽입하여 이어지는 조립스크류를 부시에 나사식으로 상호 결합시키도록 구비하여 나사 결합부의 손상의 발생을 억제하고, 손상 발생시에 부시만을 교체하여 사용할 수 있도록 하였다.On the other hand, as a way to solve this problem, a through hole is formed in the plasma, a bush fixedly inserted by a step inside the through hole, and an assembly ring inserted between the outside of the bush and the inside of the through hole are provided, and then the plasma chamber is formed. The plate is inserted and the following assembly screws are screwed to the bush to prevent damage to the screw joint, and in case of damage, only the bush can be replaced and used.
그러나, 캐소드의 통공에 삽입되는 부시가 유동하여 통공의 측부에 접촉되어 손상이 발생되는 문제점이 있었고, 볼트 결합 구조와 마찬가지로 웨이퍼 식각 공정에서 부시가 유동될 경우, 조립 스크류와의 나사 결합이 와해되어 캐소드와 플레이트 간의 간격을 발생시켜 식각 성능을 저하시키는 문제점이 있었다.However, there was a problem that the bush inserted into the through hole of the cathode flows and comes into contact with the side of the through hole, resulting in damage. Like the bolted structure, when the bush moves in the wafer etching process, the screw coupling with the assembly screw is broken. There was a problem in that etching performance was deteriorated by generating a gap between the cathode and the plate.
한편, 이러한 문제점을 해소하기 위한 방안으로 등록특허공보 제10-2128596호(2020.06.24.)의 플라즈마 전극용 부시 조립체 및 이를 포함하는 전극 조립구조가 제안되었고, 제안된 전극 조립구조는 조립링을 사용하지 않아도 부시 조립시 자체적으로 회전을 방지하게 되어 구조의 간단화 및 볼트 풀림 현상을 방지할 수 있도록 하였으나, 플라즈마 전극판에 전극판이 고정부재에 나사결합된 지지부재에 의하여 지지된 후 작업 과정에서 고온으로 인한 연신율이나 변형 등 기타의 원인으로 인하여 지지부재가 고정부재에서 역회전으로 풀리게 됨에 따라 지지력이 낮아지는 문제점이 있었다. 또한 이로 인하여 견고성이 낮아지는 또 다른 문제점이 있었다.On the other hand, as a way to solve these problems, a bush assembly for plasma electrodes of Patent Registration No. 10-2128596 (2020.06.24.) and an electrode assembly structure including the same have been proposed, and the proposed electrode assembly structure includes an assembly ring. Even if the bush is not used, it prevents rotation by itself when assembling the bush to simplify the structure and prevent the loosening of bolts. However, after the electrode plate is supported by the support member screwed to the fixing member, There is a problem in that the support force is lowered as the support member is released in reverse rotation from the fixing member due to other causes such as elongation or deformation due to high temperature. In addition, there was another problem that the robustness is lowered due to this.
이건 발명은 동일하거나 서로 다른 제1 부재와 제2 부재를 안정적으로 결합하기 위하여 고정볼트에 록킹 캡이 결합되는 체결 구조체에 관한 것으로, 반도체 제조 장치에 사용되는 샤워 헤드부에 가스 분배부가 밀착되도록 하고, 고정볼트에 록킹 캡이 결합되도록 함으로써 풀림이 방지되도록 하고, 이를 통해 체결력이 낮아지는 것을 방지하여 정밀도가 높은 반도체 제조 공정이 수행될 수 있도록 한 것이다.This invention relates to a fastening structure in which a locking cap is coupled to a fixing bolt in order to stably couple the same or different first and second members, so that the gas distribution unit is in close contact with the shower head used in the semiconductor manufacturing apparatus , By coupling the locking cap to the fixing bolt, loosening is prevented, and through this, the fastening force is prevented from being lowered so that a high-precision semiconductor manufacturing process can be performed.
이건 발명의 일 실시 형태에 따른 고정식 풀림 방지 체결 구조체는, 너트 삽입구를 갖는 제1 부재; 너트; 볼트 머리 걸림홈과 볼트 몸체 관통홀을 가지며, 하부가 상기 제1부재의 상부에 안착되도록 구비되는 제2 부재; 및 상기 볼트 몸체 관통홀을 관통하여 상기 너트에 결합되는 고정볼트;를 포함하고, 상기 고정볼트에 록킹 캡이 결합됨으로써 풀림이 방지되도록 체결되는 것을 특징으로 한다.This is a fixed anti-loosening fastening structure according to an embodiment of the present invention, a first member having a nut insertion hole; nut; a second member having a bolt head locking groove and a bolt body through-hole, the lower portion of which is provided to be seated on the upper portion of the first member; and a fixing bolt coupled to the nut through the through-hole of the bolt body, wherein a locking cap is coupled to the fixing bolt to prevent loosening.
상기 제1 부재는, 반도체 플라즈마 장치에 사용되는 샤워헤드부일 수 있고, 상기 제2 부재는, 반도체 플라즈마 장치에 사용되는 가스 분배부일 수 있다.The first member may be a showerhead used in a semiconductor plasma device, and the second member may be a gas distribution unit used in a semiconductor plasma device.
상기 제1 부재는, 몸체에 소정 깊이를 갖는 너트 삽입구를 구비하되, 상기 너트 삽입구는, 바닥에 구비된 회전 방지편 삽입홈; 및 상기 회전 방지편 삽입홈의 상부에서 몸체의 상부까지 내주연부에 구비된 가이드 너트부;를 포함할 수 있다.The first member, but provided with a nut insertion hole having a predetermined depth in the body, the nut insertion hole, the anti-rotation piece insertion groove provided on the bottom; and a guide nut portion provided on an inner periphery from the top of the anti-rotation piece insertion groove to the top of the body.
상기 회전 방지편 삽입홈은 장홈의 형태를 갖도록 구비되는 것이 바람직하고, 상기 가이드 너트부는 둥근 암나사의 형태를 갖는 것이 바람직하다.Preferably, the rotation prevention piece insertion groove has a long groove shape, and the guide nut portion preferably has a round female screw shape.
상기 너트는, 상기 너트 삽입구에 회전되는 것이 방지되도록 삽입되는 언록킹 너트; 및 상기 언록킹 너트가 상부로 이동되는 것을 방지하도록 너트 삽입구에 결합되는 중공 가이드부;를 포함할 수 있다.The nut may include an unlocking nut inserted into the nut insertion hole to prevent rotation; and a hollow guide coupled to the nut insertion hole to prevent the unlocking nut from moving upward.
상기 언록킹 너트는, 너트 몸체; 상기 너트 몸체의 하부에 구비되고, 소정 두께를 가지며 양측방향을 향하여 초승달형태로 돌출된 회전 방지편; 및 상기 너트 몸체 및 회전 방지편이 관통되도록 구비되는 암나사부;를 포함할 수 있다.The unlocking nut may include a nut body; anti-rotation pieces provided under the nut body, having a predetermined thickness, and protruding in a crescent shape toward both directions; and a female screw portion through which the nut body and the anti-rotation piece penetrate.
상기 중공 가이드부는, 언록킹 너트의 외경과 동일한 내경을 갖는 중공 가이드 몸체; 및 상기 중공 가이드 몸체의 외주연부에 구비된 숫나사부;를 포함할 수 있다.The hollow guide unit may include a hollow guide body having the same inner diameter as the outer diameter of the unlocking nut; and a male screw portion provided on an outer periphery of the hollow guide body.
상기 중공 가이드부는, 상기 중공 가이드 몸체의 상단에 구비된 공구 삽입부;를 더 포함할 수 있다.The hollow guide unit may further include a tool insertion unit provided at an upper end of the hollow guide body.
상기 고정볼트는, 볼트 숫나사부를 갖는 볼트 몸체의 상부에 다각홈을 갖는 다각 볼트 헤드가 구비될 수 있다.The fixing bolt may include a polygonal bolt head having a polygonal groove on an upper portion of a bolt body having a bolt male screw portion.
상기 다각 볼트 헤드의 하부에 풀림방지부가 결합되는 것이 바람직하고, 이러한 풀림방지부는, 2겹의 플레이트링 와셔로 구비되는 것이 더욱 바람직하다.Preferably, an anti-loosening unit is coupled to the lower portion of the polygonal bolt head, and more preferably, the anti-loosening unit is provided as a two-layered plate ring washer.
상기 록킹 캡은, 캡 몸체; 및 상기 캡 몸체의 내부에 록킹홈이 원형배열로 반복되도록 구비되는 볼트 헤드 록킹부;를 포함하거나, 캡 몸체; 및 상기 캡 몸체의 내부에 록킹 돌기가 원형배열로 반복되도록 구비되는 볼트 헤드 록킹부;를 포함할 수 있다.The locking cap may include a cap body; and a bolt head locking portion provided such that locking grooves are repeated in a circular arrangement inside the cap body; or, the cap body; and a bolt head locking part having locking protrusions formed inside the cap body so as to repeat in a circular arrangement.
또한, 상기 캡 몸체는, 양측단부가 반원형태를 가지며, 외측으로 소정 길이로 연장된 형태를 갖도록 구비될 수 있다.In addition, the cap body may have both end portions having a semicircular shape and extending outwardly to a predetermined length.
상기 록킹홈은, 소정의 간격을 갖는 산형태의 홈 또는 산형태의 돌기로 구비될 수 있다.The locking groove may be provided with a mountain-shaped groove or mountain-shaped protrusion having a predetermined interval.
아울러 상기 록킹 캡은, 상기 캡 몸체의 외측에 구비되는 공구 걸림홈;을 추가로 더 포함할 수 있다.In addition, the locking cap may further include a tool locking groove provided on the outside of the cap body.
이건 발명은 제1 부재와 제2 부재가 나사 결합될 때 충분한 조임력을 확보할 수 있으며, 이를 통해 작업 과정에서 진동이 발생되는 것을 방지하여 정밀도가 높은 제품 또는 공정을 얻을 수 있다.This invention can ensure sufficient clamping force when the first member and the second member are screwed together, and through this, it is possible to obtain a product or process with high precision by preventing vibration from occurring during the working process.
또한, 고정볼트의 다각 볼트 헤드 모서리가 록킹 캡의 록킹홈에 끼워진 상태가 유지됨으로써, 역방향으로 회전되는 것을 방지할 수 있는 효과를 얻을 수 있다.In addition, by maintaining a state in which the edge of the polygonal bolt head of the fixing bolt is inserted into the locking groove of the locking cap, it is possible to obtain an effect of preventing reverse rotation.
반도체 제조 장치의 샤워 헤드부와 가스 분배부에 적용되어, 샤워 헤드부에 구비된 언록킹 너트에 가스 분배부를 관통한 분배판 고정볼트의 볼트 숫나사부가 나사결합되도록 함으로써, 충분한 조임력이 확보 될 수 있는 효과를 얻을 수 있다.Applied to the shower head and gas distribution unit of the semiconductor manufacturing device, sufficient tightening force can be secured by screwing the male bolt screw of the distribution plate fixing bolt passing through the gas distribution unit to the unlocking nut provided in the shower head unit effect can be obtained.
또한, 분배판 고정볼트의 다각 볼트 헤드 모서리가 록킹 캡의 록킹홈에 끼워진 상태가 유지됨으로써, 역방향으로 회전되는 것을 방지할 수 있는 효과를 얻을 수 있다.In addition, by keeping the edge of the polygonal bolt head of the distribution plate fixing bolt inserted into the locking groove of the locking cap, it is possible to obtain an effect of preventing reverse rotation.
이를 통해 분배판 고정볼트의 조임력에 변화가 발생되는 것을 막을 수 있는 효과를 얻을 수 있다.Through this, it is possible to obtain an effect of preventing a change in the clamping force of the distribution plate fixing bolt from occurring.
도 1은 이건 발명의 일 실시 형태에 따른 플라즈마용 샤워 헤드와 가스분배판의 고정식 풀림방지 체결구조의 내,외부를 일부 절개하여 도시한 사시도이다.1 is a perspective view showing the inside and outside of a fixed anti-loosening fastening structure of a plasma shower head and a gas distribution plate according to an embodiment of the present invention by partially cutting away.
도 2는 이건 발명의 일 실시 형태에 따른 플라즈마용 샤워 헤드와 가스분배판의 고정식 풀림방지 체결구조를 분리 도시한 사시도이다.2 is a perspective view showing a fixed anti-loosening fastening structure between a shower head for plasma and a gas distribution plate according to an embodiment of the present invention.
도 3은 이건 발명의 일 실시 형태에 따른 플라즈마용 샤워 헤드와 가스분배판의 고정식 풀림방지 체결구조에 있어 언록킹 너트, 중공 가이드부, 분배판 고정볼트 및 록킹 캡의 분리, 결합된 상태를 도시한 사시도이다.3 shows a state in which an unlocking nut, a hollow guide unit, a distribution plate fixing bolt, and a locking cap are separated and coupled in a fixed anti-loosening fastening structure between a plasma shower head and a gas distribution plate according to an embodiment of the present invention. It is a perspective view.
도 4는 이건 발명의 일 실시 형태에 따른 플라즈마용 샤워 헤드와 가스분배판의 고정식 풀림방지 체결구조를 분리하여 도시한 종단면도이다.4 is a longitudinal cross-sectional view showing a fixed anti-loosening fastening structure between a plasma shower head and a gas distribution plate according to an embodiment of the present invention in isolation.
도 5는 이건 발명의 일 실시 형태에 따른 플라즈마용 샤워 헤드와 가스분배판의 고정식 풀림방지 체결구조를 도시한 종단면도이다.5 is a longitudinal cross-sectional view showing a fixed anti-loosening fastening structure between a shower head for plasma and a gas distribution plate according to an embodiment of the present invention.
이건 발명의 구체적인 실시 형태를 첨부된 도면들을 참조하여 설명하면 다음과 같다.Hereinafter, specific embodiments of the present invention will be described with reference to the accompanying drawings.
도 1은 이건 발명에 따른 제1 부재에 해당하는 플라즈마용 샤워 헤드와 제2 부재에 해당하는 가스분배판의 고정식 풀림 방지 체결 구조체의 내부와 외부를 일부 절개하여 도시한 사시도이고, 도 2는 제1 부재인 플라즈마용 샤워 헤드와 제2 부재인 가스분배판의 고정식 풀림방지 체결구조체를 분리 도시한 사시도이다.1 is a perspective view showing the inside and outside of a fixed anti-loosening fastening structure of a plasma shower head corresponding to a first member and a gas distribution plate corresponding to a second member according to the present invention by partially cutting away, and FIG. It is a perspective view separately showing the fixed anti-loosening fastening structure of the plasma shower head, which is one member, and the gas distribution plate, which is the second member.
도 3은 이건 발명에 따른 고정식 풀림방지 체결구조체를 구성하는 언록킹 너트, 중공 가이드부, 분배판 고정볼트 및 록킹 캡의 분리(도 3(a)), 결합된 상태(도 3(b))를 도시한 사시도이고, 도 4는 이건 발명에 따른 고정식 풀림 방지 체결 구조체를 분리하여 도시한 종단면도이며, 도 5는 이건 발명에 따른 고정식 풀림 방지 체결 구조체를 도시한 종단면도이다.Figure 3 is a separation (Fig. 3 (a)), coupled state (Fig. 3 (b)) of the unlocking nut, the hollow guide portion, the distribution plate fixing bolt and the locking cap constituting the fixed anti-loosening fastening structure according to the present invention Figure 4 is a longitudinal cross-sectional view of the fixed anti-loosening fastening structure according to the present invention, Figure 5 is a longitudinal cross-sectional view showing the fixed anti-loosening fastening structure according to the present invention.
이건 발명에 따른 고정식 풀림 방지 체결 구조체는, 충분한 조임력이 확보 될 수 있도록 하여 작업 과정에서 진동이 발생되는 것을 방지하여 정밀도가 높은 제품을 셍산하거나, 정밀도가 높은 공정을 안정적으로 수행할 수 있다. 또한, 제1 부재와 제2 부재 사이의 결합력의 변화가 발생되는 것을 막거나 감소시킬 수 있다.The fixed anti-loosening fastening structure according to the present invention can secure sufficient clamping force to prevent vibration during the work process, thereby producing a high-precision product or stably performing a high-precision process. In addition, it is possible to prevent or reduce the occurrence of a change in bonding force between the first member and the second member.
도 1 내지 도 5에 제시된 것처럼, 이건 발명의 일 실시 형태에 따른 고정식 풀림 방지 체결 구조체는, 제1 부재(100), 너트(200), 제2 부재(400), 고정볼트(500) 및 록킹 캡(600)을 포함한다.As shown in Figures 1 to 5, this is a fixed anti-loosening fastening structure according to an embodiment of the present invention, a first member 100, a nut 200, a second member 400, a fixing bolt 500 and a locking Includes cap 600.
여기에서, 상기 제1 부재(100)는, 반도체 제조 장치인 플라즈마 식각 장치의 샤워 헤드부일 수 있으며, 소정 두께를 갖는 원판형태의 Si로 이루어진 몸체(101)에 소정 깊이를 갖는 다수개의 너트 삽입구(110)가 적소에 구비될 수 있다.Here, the first member 100 may be a shower head of a plasma etching device, which is a semiconductor manufacturing device, and a plurality of nut insertion holes ( 110) may be provided in place.
상기 너트(200)는, 언록킹 너트(201)와 중공 가이드부(300)로 구성될 수 있다. 이러한 상기 너트 삽입구(110)는 너트(200)를 구성하는 언록킹 너트(201)가 삽입된 상태에서 중공 가이드부(300)에 의하여 언록킹 너트(201)가 분리되는 것을 방지할 수 있도록 구비된다. 상기 너트 삽입구(110)는, 바닥에 장홈의 형태를 갖는 회전 방지편 삽입홈(111)이 구비되어 있고, 상기 회전 방지편 삽입홈(111)의 상부에서 몸체(101)의 상부까지 내주연부에 둥근 암나사의 형태를 갖는 가이드 너트부(112)가 구비된다.The nut 200 may be composed of an unlocking nut 201 and a hollow guide part 300 . The nut insertion hole 110 is provided to prevent the unlocking nut 201 constituting the nut 200 from being separated by the hollow guide part 300 in the inserted state. . The nut insertion hole 110 has an anti-rotation piece insertion groove 111 having a long groove shape at the bottom, and an inner circumference from the top of the anti-rotation piece insertion groove 111 to the top of the body 101. A guide nut portion 112 having a round female screw shape is provided.
상기 언록킹 너트(201)는 너트 삽입구(110)에 삽입되어 후술되는 고정볼트(500)의 볼트 몸체(510)에 구비된 볼트 숫나사부(511)가 나사결합되는 과정에서 체결력에 의하여 제2 부재(400)의 하부인 밑면이 제1 부재(100)의 상부인 윗면과 일정한 압력으로 맞대어져 고정된 상태가 유지될 수 있도록 구비된다.The unlocking nut 201 is inserted into the nut insertion hole 110, and the bolt male screw portion 511 provided in the bolt body 510 of the fixing bolt 500 to be described later is screwed into the second member by the fastening force in the process. The bottom surface, which is the lower part of the 400, is provided so that a fixed state can be maintained by facing the upper surface, which is the upper part, of the first member 100 with a constant pressure.
이를 위해, 상기 언록킹 너트(201)는 너트 몸체(210)의 하부에 소정 두께를 가지며 양측방향으로 초승달형태로 돌출된 회전 방지편(220)이 구비되어 몸체(101)의 회전 방지편 삽입홈(111)에 삽입됨으로써, 고정볼트(500)를 조이는 과정에서 너트 몸체(210)가 같이 회전되는 것을 방지할 수 있게 된다.To this end, the unlocking nut 201 is provided with anti-rotation pieces 220 protruding in a crescent shape in both directions and having a predetermined thickness at the bottom of the nut body 210 to insert grooves for the anti-rotation pieces of the body 101. By being inserted into (111), it is possible to prevent the nut body 210 from being rotated together in the process of tightening the fixing bolt 500.
상기 너트 몸체(210) 및 회전 방지편(220)에는 관통되는 형태를 갖는 암나사부(230)가 구비되어 고정볼트(500)의 볼트 몸체(510)에 구비된 볼트 숫나사부(511)가 용이하게 결합될 수 있게 된다.The nut body 210 and the anti-rotation piece 220 are provided with a female screw portion 230 having a penetrating shape, so that the bolt male screw portion 511 provided in the bolt body 510 of the fixing bolt 500 is easily can be combined.
상기 중공 가이드부(300)는 언록킹 너트(201)가 상부로 인출(돌출)되는 것을 방지하여 고정볼트(500)에 충분한 체결력이 제공될 수 있도록 구비된 것으로, 언록킹 너트(201)의 너트 몸체(210) 외경과 동일한 내경을 갖는 중공 가이드 몸체(310) 외주연부에 숫나사부(320)가 구비되어 있고, 상기 중공 가이드 몸체(320)의 상단에 공구 삽입부(330)가 구비되어 별도의 공구를 이용하여 가이드 너트부(112)에 충분한 조임력으로 나사결합될 수 있도록 구비된다.The hollow guide part 300 is provided to prevent the unlocking nut 201 from being pulled out (protruding) upward to provide sufficient fastening force to the fixing bolt 500, and the nut of the unlocking nut 201 A male screw portion 320 is provided at the outer periphery of the hollow guide body 310 having the same inner diameter as the outer diameter of the body 210, and a tool insertion portion 330 is provided at the upper end of the hollow guide body 320 to provide a separate It is provided so that it can be screwed into the guide nut portion 112 with sufficient tightening force using a tool.
상기 제2 부재(400)는 볼트 머리 걸림홈(410)의 바닥에 볼트 몸체 관통홀(420)이 상부에서 하부를 향하여 완전하게 관통된 형태를 갖도록 구비됨으로써,상기 고정볼트(500)의 볼트 몸체(510)가 제2 부재(400)를 관통하여 하부로 위치된 언록킹 너트(201)의 암나사부(230)에 나사결합될 수 있도록 구비된다.The second member 400 is provided with a bolt body through hole 420 at the bottom of the bolt head locking groove 410 completely penetrating from the top to the bottom, so that the bolt body of the fixing bolt 500 510 penetrates the second member 400 and is provided so that it can be screwed into the female screw portion 230 of the unlocking nut 201 positioned downward.
상기 고정볼트(500)는 볼트 숫나사부(511)를 갖는 볼트 몸체(510)의 상부에 다각홈(521)을 갖는 다각 볼트 헤드(520)가 구비되어 미도시된 렌치 등을 이용하여 조이거나 풀 수 있으며, 상기 다각 볼트 헤드(520)의 하부에 풀림방지부(530)가 결합됨으로써, 다각 볼트 헤드(520)가 결합된 상태에서 역방향으로 풀리는 것을 방지할 수 있도록 구비된다.The fixing bolt 500 is provided with a polygonal bolt head 520 having a polygonal groove 521 on top of a bolt body 510 having a bolt male thread portion 511, so that it can be tightened or loosened using a wrench or the like not shown. In addition, the anti-loosening unit 530 is coupled to the lower portion of the polygonal bolt head 520 to prevent the polygonal bolt head 520 from being released in the opposite direction in the coupled state.
이를 위해, 상기 풀림방지부(530)는 2겹의 플레이트링 와셔로 구비되어, 항상 볼트 걸림홈(410)의 바닥으로부터 상부를 향하여 일정한 탄성력이 작용되도록 하여 풀리는 것을 방지할 수 있게 된다.To this end, the anti-loosening part 530 is provided with two layers of plate ring washers, so that a constant elastic force always acts from the bottom of the bolt locking groove 410 toward the top, thereby preventing loosening.
상기 록킹 캡(600)은 제2 부재(400)의 볼트 머리 걸림홈(410)에 삽입되도록 동일한 형태를 갖는 캡 몸체(610) 내부에 다각 볼트 헤드(520)의 모서리 부분이 걸려지도록 삽입되는 록킹홈(621)이 원형배열로 반복되는 볼트 헤드 록킹부(620)가 구비된다.The locking cap 600 is inserted into the cap body 610 having the same shape so as to be inserted into the bolt head engaging groove 410 of the second member 400 so that the corner portion of the polygonal bolt head 520 is caught. A bolt head locking portion 620 in which grooves 621 are repeated in a circular arrangement is provided.
상기 캡 몸체(610)의 외측에는 공구 걸림홈(630)이 구비되어 미도시된 공구를 이용하여 볼트 머리 걸림홈(410)에 삽입되면서 다각 볼트 헤드(520)의 모서리가 록킹홈(621)에 삽입될 수 있게 된다.A tool locking groove 630 is provided on the outside of the cap body 610, and while a tool not shown is used to insert the bolt head into the bolt head locking groove 410, the edge of the polygonal bolt head 520 locks into the locking groove 621. can be inserted.
이러한 상기 캡 몸체(610)는 볼트 머리 걸림홈(410)에 간섭이 없게 삽입되도록 하기 위한 방안으로 양측단부가 반원형태를 가지며, 외측으로 소정 길이로 연장된 형태를 갖도록 구비됨으로써, 볼트 머리 걸림홈(410)에 삽입된 상태에서 일정 한도 이상으로 유동되는 것을 방지할 수 있게 된다.The cap body 610 has both ends of a semicircular shape as a way to be inserted into the bolt head locking groove 410 without interference, and is provided to have a form extending outward to a predetermined length, so that the cap body 610 has a bolt head locking groove. It is possible to prevent flow beyond a certain limit in a state inserted into 410.
이를 위해, 도5의 상부에 확대 도시된 바와 같이, 록킹 캡(600)의 캡 몸체(610) 외부면과 제2 부재(400)의 볼트 머리 걸림홈(410) 내부면 사이가 소정 간격이 유지될 수 있도록 하는 것이 바람직하다. 이때, 상기 록킹홈(621)은 소정의 간격, 바람직하게는 약 15°간격을 갖는 산형태의 홈 또는 돌기로 구비될 수 있다.To this end, as shown enlarged at the top of FIG. 5, a predetermined distance is maintained between the outer surface of the cap body 610 of the locking cap 600 and the inner surface of the bolt head locking groove 410 of the second member 400. It is desirable to make it possible. At this time, the locking groove 621 may be provided with a mountain-shaped groove or protrusion having a predetermined interval, preferably about 15° interval.
이는 분배판 고정볼트(500)의 다각 볼트 헤드(520)가 6각형태를 가짐으로써, 각각의 모서리 부분이 삽입되어 고정될 수 있도록 하기 위함이며, 이는 24개로 배열되도록 하는 것이 바람직하다.This is to ensure that the polygonal bolt head 520 of the distribution plate fixing bolt 500 has a hexagonal shape, so that each corner portion can be inserted and fixed, and it is preferable to arrange 24 of them.
한편, 이건 발명에서는 언록킹 너트(201)에 암나사부(230)가 너트 몸체(210)와 회전 방지편(220)을 단순하게 관통되는 형태를 갖도록 하였으나, 이러한 형태 이외에 중심에서 일정 거리를 갖는 위치 즉, 일정 간격으로 편심된 위치에 구비되도록 할 수 있다.On the other hand, in this invention, the female screw portion 230 of the unlocking nut 201 has a shape that simply penetrates the nut body 210 and the anti-rotation piece 220, but in addition to this shape, a position having a certain distance from the center That is, it may be provided at an eccentric position at regular intervals.
이러한 경우, 상기 분배판 고정 볼트(500)의 조임력에 의하여 당겨지는 과정에서 언록킹 너트(201)의 중심을 기준으로 암나사부(230)가 구비된 부분은 제2 부재(400)의 하부를 향하여 당겨지게 됨과 동시에 대응되는 부분은 몸체(101)의 회전 방지편 삽입홈(111)으로 눌려지게 됨에 따라 유동이 발생되는 것을 더욱 방지할 수 있게 된다.In this case, in the process of being pulled by the tightening force of the distribution plate fixing bolt 500, the part provided with the female screw part 230 based on the center of the unlocking nut 201 is directed toward the lower part of the second member 400. At the same time as being pulled, the corresponding part is pressed into the anti-rotation piece insertion groove 111 of the body 101, so that flow can be further prevented.
이건 발명은 상술한 특정의 실시예 및 설명에 한정되지 아니하며, 청구범위에서 청구하는 이 건 발명의 요지를 벗어남이 없이 당해 발명이 속하는 기술 분야에서 통상의 지식을 가진 자라면 누구든지 다양한 변형 실시가 가능하며, 그와 같은 변형은 이 건 발명의 보호 범위 내에 있게 된다.This invention is not limited to the specific embodiments and descriptions described above, and anyone having ordinary knowledge in the technical field to which the invention pertains can practice various modifications without departing from the gist of the invention claimed in the claims. It is possible, and such modifications fall within the protection scope of the present invention.
이건 발명은 동일하거나 서로 다른 제1 부재와 제2 부재를 안정적으로 결합하기 위하여 고정볼트에 록킹 캡이 결합되는 체결 구조체에 관한 것으로, 너트 삽입구를 갖는 제1 부재; 너트; 볼트 머리 걸림홈과 볼트 몸체 관통홀을 가지며, 하부가 상기 제1부재의 상부에 안착되도록 구비되는 제2 부재; 및 상기 볼트 몸체 관통홀을 관통하여 상기 너트에 결합되는 고정볼트;를 포함하여, 상기 고정볼트에 록킹 캡이 결합됨으로써 풀림이 방지되도록 체결되므로, 체결력이 낮아지는 것을 방지하여 정밀도가 높은 제조 공정이 수행될 수 있으므로, 산업상 이용가능성이 존재한다.This invention relates to a fastening structure in which a locking cap is coupled to a fixing bolt in order to stably couple the same or different first and second members, the first member having a nut insertion hole; nut; a second member having a bolt head locking groove and a bolt body through-hole, the lower portion of which is provided to be seated on the upper portion of the first member; and a fixing bolt coupled to the nut through the through-hole of the bolt body; since the locking cap is coupled to the fixing bolt to prevent loosening, it prevents the fastening force from being lowered, resulting in a high-precision manufacturing process. Since it can be performed, industrial applicability exists.
Claims (19)
- 너트 삽입구를 갖는 제1 부재;A first member having a nut insertion hole;너트;nut;볼트 머리 걸림홈과 볼트 몸체 관통홀을 가지며, 하부가 상기 제1부재의 상부에 안착되도록 구비되는 제2 부재; 및a second member having a bolt head locking groove and a bolt body through-hole, the lower portion of which is provided to be seated on the upper portion of the first member; and상기 볼트 몸체 관통홀을 관통하여 상기너트에 결합되는 고정볼트;를 포함하고, A fixing bolt passing through the through-hole of the bolt body and coupled to the nut,상기 고정볼트에 록킹 캡이 결합됨으로써 풀림이 방지되도록 체결되는 것을 특징으로 하는, 고정식 풀림방지 체결구조체.A fixed anti-loosening fastening structure, characterized in that fastened to prevent loosening by coupling the locking cap to the fixing bolt.
- 제1항에 있어서,According to claim 1,상기 제1 부재는, 반도체 플라즈마 장치에 사용되는 샤워헤드부인 것을 특징으로 하는, 고정식 풀림방지 체결구조체.The first member is a shower head used in a semiconductor plasma device, characterized in that, the fixed anti-loosening fastening structure.
- 제1항에 있어서,According to claim 1,상기 제2 부재는, 반도체 플라즈마 장치에 사용되는 가스 분배부인 것을 특징으로 하는, 고정식 풀림방지 체결구조체.The second member is a fixed anti-loosening fastening structure, characterized in that the gas distribution portion used in the semiconductor plasma device.
- 제1항에 있어서,According to claim 1,상기 제1 부재는, 몸체에 소정 깊이를 갖는 너트 삽입구를 구비하되,The first member is provided with a nut insertion hole having a predetermined depth in the body,상기 너트 삽입구는, The nut insertion hole,바닥에 구비된 회전 방지편 삽입홈; 및An anti-rotation piece insertion groove provided on the bottom; and상기 회전 방지편 삽입홈의 상부에서 몸체의 상부까지 내주연부에 구비된 가이드 너트부;를 포함하는 것을 특징으로 하는, 고정식 풀림방지 체결구조체.A fixed anti-loosening fastening structure comprising a; guide nut portion provided on the inner periphery from the top of the rotation prevention piece insertion groove to the top of the body.
- 제4항에 있어서,According to claim 4,상기 회전 방지편 삽입홈은 장홈의 형태를 갖도록 구비되는 것을 특징으로 하는, 고정식 풀림방지 체결구조체.The anti-rotation piece insertion groove is characterized in that provided to have a long groove shape, a fixed anti-loosening fastening structure.
- 제4항에 있어서,According to claim 4,상기 가이드 너트부는 둥근 암나사의 형태를 갖는 것을 특징으로 하는, 고정식 풀림방지 체결구조체.The guide nut portion is characterized in that it has the form of a round female screw, a fixed anti-loosening fastening structure.
- 제1항에 있어서,According to claim 1,상기 너트는, The nut,상기 너트 삽입구에 회전되는 것이 방지되도록 삽입되는 언록킹 너트; 및an unlocking nut inserted into the nut insertion hole to prevent rotation; and상기 언록킹 너트(201)가 상부로 이동되는 것을 방지하도록 너트 삽입구에 결합되는 중공 가이드부;를 포함하는 것을 특징으로 하는, 고정식 풀림방지 체결구조체.A fixed anti-loosening fastening structure comprising a; hollow guide coupled to the nut insertion hole to prevent the unlocking nut 201 from moving upward.
- 제7항에 있어서,According to claim 7,상기 언록킹 너트는, The unlocking nut,너트 몸체; nut body;상기 너트 몸체의 하부에 구비되고, 소정 두께를 가지며 양측방향을 향하여 초승달형태로 돌출된 회전 방지편; 및anti-rotation pieces provided under the nut body, having a predetermined thickness, and protruding in a crescent shape toward both directions; and상기 너트 몸체 및 회전 방지편이 관통되도록 구비되는 암나사부;를 포함하는 것을 특징으로 하는, 고정식 풀림방지 체결구조체.A fixed anti-loosening fastening structure comprising a; female screw portion provided so that the nut body and the anti-rotation piece penetrate.
- 제7항에 있어서,According to claim 7,상기 중공 가이드부는,The hollow guide part,언록킹 너트의 외경과 동일한 내경을 갖는 중공 가이드 몸체; 및A hollow guide body having the same inner diameter as the outer diameter of the unlocking nut; and상기 중공 가이드 몸체의 외주연부에 구비된 숫나사부;를 포함하는 것을 특징을호 하는, 고정식 풀림방지 체결구조체.A fixed anti-loosening fastening structure comprising a; male screw portion provided on the outer periphery of the hollow guide body.
- 제9항에 있어서,According to claim 9,상기 중공 가이드부는, The hollow guide part,상기 중공 가이드 몸체의 상단에 구비된 공구 삽입부;를 더 포함하는 것을 특징으로 하는, 고정식 풀림방지 체결구조체.The fixed anti-loosening fastening structure, characterized in that it further comprises; a tool insertion portion provided at the top of the hollow guide body.
- 제1항에 있어서,According to claim 1,상기 고정볼트는,The fixing bolt,볼트 숫나사부를 갖는 볼트 몸체의 상부에 다각홈을 갖는 다각 볼트 헤드가 구비되는 것을 특징으로 하는, 고정식 풀림방지 체결구조체.A fixed anti-loosening fastening structure, characterized in that a polygonal bolt head having a polygonal groove is provided on the upper part of the bolt body having a bolt male thread.
- 제11항에 있어서,According to claim 11,상기 다각 볼트 헤드의 하부에 풀림방지부가 결합되는 것을 특징으로 하는, 고정식 풀림방지 체결구조체.A fixed anti-loosening fastening structure, characterized in that the anti-loosening part is coupled to the lower part of the polygonal bolt head.
- 제12항에 있어서,According to claim 12,상기 풀림방지부는, 2겹의 플레이트링 와셔로 구비되는 것을 특징으로 하는, 고정식 풀림방지 체결구조체.The anti-loosening part is characterized in that provided with a two-ply plate ring washer, a fixed anti-loosening fastening structure.
- 제1항에 있어서,According to claim 1,상기 록킹 캡은,The locking cap,캡 몸체; 및 cap body; and상기 캡 몸체의 내부에 록킹홈이 원형배열로 반복되도록 구비되는 볼트 헤드 록킹부;를 포함하는 것을 특징으로 하는, 고정식 풀림방지 체결구조체.A fixed anti-loosening fastening structure comprising a; bolt head locking portion provided such that locking grooves are repeatedly arranged in a circular arrangement inside the cap body.
- 제1항에 있어서,According to claim 1,상기 록킹 캡은,The locking cap,캡 몸체; 및 cap body; and상기 캡 몸체의 내부에 록킹 돌기가 원형배열로 반복되도록 구비되는 볼트 헤드 록킹부;를 포함하는 것을 특징으로 하는, 고정식 풀림방지 체결구조체.A fixed anti-loosening fastening structure comprising a; bolt head locking portion provided such that locking protrusions are repeatedly arranged in a circular arrangement inside the cap body.
- 제14항 또는 제15항에 있어서,The method of claim 14 or 15,상기 캡 몸체는,The cap body,양측단부가 반원형태를 가지며, 외측으로 소정 길이로 연장된 형태를 갖도록 구비되는 것을 특징으로 하는, 고정식 풀림방지 체결구조체.A fixed anti-loosening fastening structure, characterized in that both ends have a semicircular shape and have a shape extending outward to a predetermined length.
- 제14항에 있어서,According to claim 14,상기 록킹홈은, 소정의 간격을 갖는 산형태의 홈으로 구비되는 것을 특징으로 하는, 고정식 풀림방지 체결구조체.The locking groove is a fixed anti-loosening fastening structure, characterized in that provided with a mountain-shaped groove having a predetermined interval.
- 제15항에 있어서,According to claim 15,상기 록킹 돌기는, 소정의 간격을 갖는 산형태의 돌기으로 구비되는 것을 특징으로 하는, 고정식 풀림방지 체결구조체.The locking protrusion is a fixed anti-loosening fastening structure, characterized in that provided with mountain-shaped protrusions having a predetermined interval.
- 제14항에 있어서,According to claim 14,상기 록킹 캡은, 상기 캡 몸체의 외측에 구비되는 공구 걸림홈;을 더 포함하는 것을 특징으로 하는, 고정식 풀림방지 체결구조체.The locking cap further comprises a tool locking groove provided on the outside of the cap body, the fixed anti-loosening fastening structure.
Applications Claiming Priority (4)
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KR10-2022-0026703 | 2022-03-02 | ||
KR1020220026703A KR102659510B1 (en) | 2022-03-02 | 2022-03-02 | The fixed type annealing prevention combining structure of the shower head for the plasma and gas distribution plate |
KR1020220125330A KR20240045703A (en) | 2022-09-30 | 2022-09-30 | Fixed anti-loop fastening structure |
KR10-2022-0125330 | 2022-09-30 |
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WO2023167459A1 true WO2023167459A1 (en) | 2023-09-07 |
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PCT/KR2023/002502 WO2023167459A1 (en) | 2022-03-02 | 2023-02-22 | Fixing-type anti-loosening fastening structure |
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