WO2023124624A1

WO2023124624A1 - Surface acoustic wave filter

Info

Publication number: WO2023124624A1
Application number: PCT/CN2022/132741
Authority: WO
Inventors: 许靓; 郭嘉帅
Original assignee: 深圳飞骧科技股份有限公司
Priority date: 2021-12-28
Filing date: 2022-11-18
Publication date: 2023-07-06
Also published as: CN114268296A

Abstract

The present invention provides a surface acoustic wave filter, comprising: an interdigital transducer, two reflectors disposed opposite to each other on two sides of the interdigital transducer, and a plurality of parameterization units integrated on the interdigital transducer and the two reflectors. The overall performance of the filter is improved by arranging the two reflectors to be opposite to each other on two sides of the interdigital transducer, and by integrating the plurality of parameterization units on the interdigital transducer and the two reflectors. The invention improves the overall performance of a filter by configuring various fingers, apertures and resonators, while achieving a small volume and low costs and having a wide range of applications.

Description

A surface acoustic wave filter

technical field

The invention relates to the technical field of filters, in particular to a surface acoustic wave filter.

Background technique

With the commercialization of 5G-NR technology, the frequency bands supported by personal mobile handsets have increased from a few to more than a dozen. Interference between these frequency bands is becoming more and more serious, so there is a very urgent need for high-performance filters.

A filter is a frequency selection device. Traditional filters can pass specific frequency components in a signal while greatly attenuating other frequency components. Utilizing this frequency selection function of the filter, it is possible to filter out interference noise or perform spectrum analysis. Any device or system that can pass specific frequency components in a signal while greatly attenuating or suppressing other frequency components is called a filter.

However, traditional filters have poor filtering effect, low performance, large size, high cost, and small application range.

Therefore, it is necessary to provide a new surface acoustic wave filter to solve the above technical problems.

Contents of the invention

In view of the deficiencies of the above related technologies, the present invention proposes a surface acoustic wave filter that can integrate multiple parameterized units, has high performance, small volume, and low cost.

In order to solve the above-mentioned technical problems, an embodiment of the present invention provides a surface acoustic wave filter, including: an interdigital transducer, two reflectors arranged on opposite sides of the interdigital transducer, and an integrated A plurality of parameterized units on the interdigital transducer and the two reflectors.

Preferably, the plurality of parameterization units include a first parameterization unit, a second parameterization unit, a third parameterization unit, a fourth parameterization unit, a fifth parameterization unit and a sixth parameterization unit arranged at intervals , the first parameterization unit, the third parameterization unit and the fifth parameterization unit are arranged side by side, and the second parameterization unit, the fourth parameterization unit and the sixth parameterization unit are arranged side by side.

Preferably, the first parameterization unit includes oppositely arranged first energy sink bars, a plurality of first finger bars arranged between the first energy sink bars, and a plurality of first finger bars respectively arranged A plurality of apertures on and resonators disposed on the plurality of apertures;

The aperture includes a first aperture and a second aperture corresponding to the first aperture, and the resonator includes a first resonator disposed on the first aperture and a second aperture disposed on the second aperture Second resonator.

Preferably, the parameters of the first parameterization unit include:

The number of the plurality of first fingers, the metallization ratio and the structural period of the distance between the first fingers and the reflector, the length of the first aperture, the length of the second aperture, the The distance between the first aperture and the second aperture, the width of the energy sink bar, the ratio of the base of the triangle of the first resonator to the width of the first finger bar, the triangle of the first resonator The ratio of the height to the width of the first fingers, wherein the number of the first fingers is an odd number and greater than or equal to three.

Preferably, the second parameterization unit and the first parameterization unit are arranged at intervals along the first direction of the first parameterization unit; the second parameterization unit includes a second energy sink bar oppositely arranged, A plurality of second finger bars arranged between the second energy sink bars and a plurality of apertures respectively arranged on the plurality of second finger bars; the apertures include a first aperture and the first aperture Correspondingly set the second aperture.

Preferably, the parameters of the second parameterization unit include:

The number of the plurality of second fingers, the metallization ratio and the structural period of the distance between the second fingers and the reflector, the length of the first aperture, the length of the second aperture, the The distance between the first aperture and the second aperture, the width of the second energy sink bar, wherein the number of the second fingers is an odd number and greater than or equal to three.

Preferably, the third parameterization unit is arranged along the second direction of the first parameterization unit, and the third parameterization unit includes a third energy-sink bar arranged oppositely, arranged on the third energy-sink bar a plurality of third fingers between the bars, a plurality of apertures respectively disposed on the plurality of third fingers, and resonators disposed on a plurality of the apertures;

The aperture includes a first aperture and a second aperture corresponding to the first aperture, and the resonator includes a third resonator arranged on the first aperture and a third resonator arranged on the second aperture Four resonators.

Preferably, the parameters of the third parameterization unit include:

The number of the plurality of third fingers, the metallization ratio and the structural period of the distance between the third fingers and the reflector, the length of the first aperture, the length of the second aperture, the The distance between the first aperture and the second aperture, the width of the energy-sinking bar, the ratio of the triangle base of the third resonator to the width of the third finger bar, the triangle of the third resonator The ratio of the height to the width of the third finger, wherein the number of the third finger is an odd number and greater than or equal to three.

Preferably, the fourth parameterization units are arranged at intervals along the first direction of the third parameterization unit, and the fourth parameterization units include oppositely arranged fourth energy sink bars, arranged on the fourth energy sink A plurality of fourth finger bars between the bars and a plurality of apertures respectively disposed on the plurality of fourth finger bars; the apertures include a first aperture and a second aperture corresponding to the first aperture.

Preferably, the parameters of the fourth parameterization unit include:

The plurality of fourth fingers is an odd number and greater than or equal to 3, the distance between the fourth fingers and the reflector, the metallization ratio and the structural period of the distance between the fourth fingers and the reflector, The length of the first aperture, the length of the second aperture, the distance between the first aperture and the second aperture, the width of the fourth energy sink bar, wherein, the number of the fourth fingers It is an odd number and greater than or equal to 3.

Preferably, the fifth parameterization unit is arranged at intervals along the second direction of the third parameterization unit, and the fifth parameterization unit includes a fifth energy sink bar arranged oppositely and a fifth energy sink bar arranged on the fifth energy sink A plurality of fifth finger bars between the bars, the plurality of fifth finger bars are arranged side by side.

Preferably, the sixth parameterization unit is arranged at intervals along the second direction of the fourth parameterization unit, and the sixth parameterization unit includes a plurality of sixth fingers arranged side by side.

Compared with the prior art, in the surface acoustic wave filter of the present invention, two reflectors are arranged oppositely on both sides of the interdigital transducer, and the interdigital transducer and the two reflectors are integrated Multiple parameterized units on the filter can improve the overall performance of the filter by integrating multiple parameter units, and also have the effect of small size and low cost, and are widely used.

Description of drawings

The present invention will be described in detail below in conjunction with the accompanying drawings. The content of the above or other aspects of the present invention will become clearer and easier to understand through the detailed description in conjunction with the following drawings. In the attached picture:

FIG. 1 is a schematic structural diagram of a surface acoustic wave filter provided by an embodiment of the present invention;

FIG. 2 is a schematic structural diagram of a first parameter unit provided by an embodiment of the present invention;

FIG. 3 is a schematic structural diagram of a resonator of a first parameter unit provided by an embodiment of the present invention;

FIG. 4 is a schematic structural diagram of a second parameter unit provided by an embodiment of the present invention;

FIG. 5 is a schematic structural diagram of a third parameter unit provided by an embodiment of the present invention;

FIG. 6 is a schematic structural diagram of a fourth parameter unit provided by an embodiment of the present invention;

FIG. 7 is a schematic structural diagram of a fifth parameter unit provided by an embodiment of the present invention;

Fig. 8 is a schematic structural diagram of a sixth parameter unit provided by an embodiment of the present invention.

In the figure, 1. The first parameterization unit, 2. The second parameterization unit, 3. The third parameterization unit, 4. The fourth parameterization unit, 5. The fifth parameterization unit, 6. The sixth parameterization unit , 7, interdigital transducer, 8, reflector, 9, the first energy sink bar, 10, the first finger bar, 11, the aperture, 111, the first aperture, 112, the second aperture, 12, the resonator, 121, the first resonator, 122, the second resonator, 123, the third resonator, 124, the fourth resonator, 13, the second energy sink bar, 14, the second finger bar, 15, the third energy sink bar , 16. The third bar, 17. The fourth bar, 18. The fourth bar, 19. The fifth bar, 20. The fifth bar, 21. The sixth bar, 22. The structural cycle 23. The distance between the finger strip and the reflector.

Detailed ways

Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

The specific implementations/examples described here are specific specific implementations of the present invention, and are used to illustrate the concept of the present invention. limit. In addition to the embodiments described here, those skilled in the art can also adopt other obvious technical solutions based on the claims of the application and the contents disclosed in the description, and these technical solutions include adopting any obvious changes made to the embodiments described here. The replacement and modified technical solutions are all within the protection scope of the present invention.

The following descriptions of the various embodiments refer to the accompanying drawings to illustrate specific embodiments in which the present invention can be practiced. The directional terms mentioned in the present invention, such as up, down, front, back, left, right, inside, outside, side, etc., are only directions referring to the attached drawings. Therefore, the directional terms used are used to illustrate and understand the present invention, but not to limit the present invention.

1-8, the present invention provides a surface acoustic wave filter, including: an interdigital transducer 7, two reflectors 8 arranged on both sides of the interdigital transducer 7, And a plurality of parameterization units integrated on the interdigital transducer 7 and the two reflectors 8 .

Among them, the interdigital transducer 7 (IDT) is to form a metal pattern on the surface of the piezoelectric substrate in the shape of crossed fingers of two hands, and its function is to realize the sound-electric transduction. The interdigital transducer 7 is the most basic unit of the surface acoustic wave device. Only by accurately analyzing the IDT can the response of the surface acoustic wave device be predicted, and then the performance tolerance reliability design and performance optimization design of the device chip layout can be implemented. The transducer (input transducer) at the left end of the substrate of the interdigital transducer 7 converts the incoming electrical signal into an acoustic signal through the inverse piezoelectric effect. The transducer (output transducer) converts the acoustic signal into an electrical signal for output.

The reflector 8 is a radar wave reflector 8 of different specifications made from sheet metal according to different purposes. When the radar electromagnetic wave scans to the corner reflection, the electromagnetic wave will be refracted and amplified on the metal corner to generate a strong echo signal, and a strong echo target will appear on the radar screen.

The plurality of parameterization units include a first parameterization unit 1, a second parameterization unit 2, a third parameterization unit 3, a fourth parameterization unit 4, a fifth parameterization unit 5 and a sixth parameterization unit arranged at intervals. A parameterization unit 6, the first parameterization unit 1, the third parameterization unit 3 and the fifth parameterization unit 5 are arranged side by side, the second parameterization unit 2, the fourth parameterization unit 4 and the Six parameterization units 6 are arranged side by side.

Specifically, by setting two reflectors 8 opposite to each other on both sides of the interdigital transducer 7, the first parameterization unit 1 integrated on the interdigital transducer 7 and the two reflectors 8 , the second parameterization unit 2, the third parameterization unit 3, the fourth parameterization unit 4, the fifth parameterization unit 5 and the sixth parameterization unit 6, by adjusting the first parameterization unit 1, the second parameterization unit 2. Different fingers, apertures, and resonators on the third parameterization unit 3, the fourth parameterization unit 4, the fifth parameterization unit 5, and the sixth parameterization unit 6 to improve the overall performance of the surface acoustic wave filter, At the same time, it also has the effects of small size and low cost, and is widely used.

In this embodiment, the first parameterization unit 1 includes oppositely arranged first energy-receiving bars 9, a plurality of first fingers 10 arranged between the first energy-receiving bars 9, respectively arranged on the A plurality of apertures on the plurality of first finger strips 10 and resonators 12 disposed on the plurality of apertures; the apertures include a first aperture 111 and a second aperture 112 corresponding to the first aperture 111, The resonator 12 includes a first resonator 121 disposed on the first aperture 111 and a second resonator 122 disposed on the second aperture 112 .

Wherein, the parameters of the first parameterization unit 1 include: the number of the plurality of first fingers 10 is Nt, the metallization ratio and the structural period of the distance between the first fingers 10 and the reflector 8 22. The length of the first aperture 111 is W1, the length of the second aperture 112 is W2, the distance between the first aperture 111 and the second aperture 112 is S, and the width of the energy sink is Wb, the ratio of the base of the triangle of the first resonator 121 to the width of the first finger, the ratio of the height of the triangle of the first resonator 121 to the width of the first finger 10, wherein, The number of the first fingers 10 is an odd number and greater than or equal to three.

Specifically, by integrating at least one first parameterization unit 11 on the interdigital transducer 7, and by setting reflectors 8 on both sides of the first parameterization unit 11, the acoustic surface produced by the first parameterization unit 11 The waves are reflected by the reflectors 8 on both sides.

Specifically, the energy is transmitted to multiple first finger bars 10 through the energy sink bar 9 of the first parameterization unit 11, and is transmitted to the resonator 12 through the multiple apertures 11 on the first finger bar 10, and the resonator The resonator 12 can allow a certain frequency signal to pass through and block other frequency signals to achieve the purpose of color selection. When the signal frequency is equal to the natural frequency of the resonator 12, the signal passes smoothly as if passing through a small resistance (or wire). Frequencies far from the natural resonant frequency try to pass through it like a big impedance.

Specifically, since the aperture 11 includes a first aperture 111 and a second aperture 112 corresponding to the first aperture 111, the resonator 12 includes a first resonator 121 arranged on the first aperture 111 And the second resonator 122 arranged on the second aperture 112, through the corresponding setting of the first resonator 121 and the second resonator 122 to block the frequency signal, so that the effective frequency segment can pass through the aperture 11, and then make Filter performance is higher.

Further, the plurality of apertures 11 includes seven, which are arranged at intervals between each other, wherein the resonators 12 of the three apertures 11 are arranged on the same horizontal line, and the resonators 12 on the other four apertures 11 are arranged on the same horizontal line, The positions of the resonators 12 of 3 apertures 11 and the resonators 12 of 4 apertures 11 are different.

In this embodiment, the second parameterization unit 2 and the first parameterization unit 1 are arranged at intervals along the first direction of the first parameterization unit 1; the second parameterization unit 2 includes a relative arrangement The second energy sink bar 13, a plurality of second finger bars 14 arranged between the second energy sink bars 13, and a plurality of apertures 11 respectively arranged on the plurality of second finger bars 14; the The apertures include a first aperture 111 and a second aperture 112 corresponding to the first aperture 111 .

Wherein, the parameters of the second parameterization unit 2 include: the number of the plurality of second fingers 14, the metallization ratio of the distance between the second fingers 14 and the reflector and the structural period 22, so The length of the first aperture 111, the length of the second aperture 112, the distance between the first aperture 111 and the second aperture 112, the width of the second energy sink bar 13, wherein the second The number of finger bars 14 is an odd number and greater than or equal to three.

Specifically, the metallization ratio and structural period 22 of the pitch 23 of the reflector 8 of the second finger strip 14, the length of the first aperture 111 is W1, and the length of the second aperture 112 is W2, so The distance between the first aperture 111 and the second aperture 112 is S, and the width of the second energy sink bar 13 is Wb.

In this embodiment, the third parameterization unit 3 is arranged along the second direction of the first parameterization unit, and the third parameterization unit 3 includes a third energy sink bar 15 arranged oppositely, arranged on A plurality of third finger bars 16 between the third energy sink bars 15, a plurality of apertures respectively arranged on the plurality of third finger bars 16, and resonators arranged on a plurality of the apertures; The aperture includes a first aperture 111 and a second aperture 112 corresponding to the first aperture 111, and the resonator includes a third resonator 123 arranged on the first aperture 111 and a third resonator 123 arranged on the second aperture 111. A fourth resonator 124 on the aperture 112 .

Wherein, the parameters of the third parameterization unit 3 include: the number of the plurality of third fingers 16, the metallization ratio of the distance 23 between the third fingers 16 and the reflector and the structural period 22, The length of the first aperture 111, the length of the second aperture 112, the distance between the first aperture 111 and the second aperture 112, the width of the energy sink bar, the triangular shape of the third resonator The ratio of the base to the width of the fingers, the ratio of the height of the triangle of the third resonator 123 to the width of the third fingers 16, wherein the number of the third fingers 16 is an odd number and greater than or equal to 3.

Specifically, the length of the first aperture 111 is W1, the length of the second aperture 112 is W2, the distance between the first aperture 111 and the second aperture 112 is S, and the energy sink bar 9 The width is Wb, the number of the plurality of third finger bars 16 is Nt, and the Nt is an odd number and greater than or equal to 3, the ratio of the base of the triangle of the third resonator 123 to the width of the third finger bar 16 is m, and the ratio of the height of the triangle of the third resonator 123 to the width of the third finger bar 16 is n.

Specifically, on the basis of the Pcell (parametric unit) of the triangular resonator 12, the spatial distance between the third finger bar 16 of the triangular structure and the reflector 8 is placed in the Pcell module as a variable parameter variable; the above-mentioned triangular resonator 12. For the two Pcell modules of the standard resonator 12, the default distance between the third finger 16 and the reflector 8 is (1-Metallization Ratio (metallization ratio))*Period (period, period).

In this embodiment, the fourth parameterization unit 4 is arranged at intervals along the first direction of the third parameterization unit 3, and the fourth parameterization unit 4 includes a fourth energy-sinking bar 17, which is arranged oppositely. A plurality of fourth finger bars 18 between the fourth energy sink bars 17 and a plurality of apertures respectively arranged on the plurality of fourth finger bars 18; the aperture 11 includes a first aperture 111 and the same as the first aperture 111 The first aperture 111 is correspondingly provided with the second aperture 112 .

Wherein, the parameters of the fourth parameterization unit 4 include: a plurality of the fourth fingers 18 is an odd number and greater than or equal to 3, the distance 23 between the fourth fingers 18 and the reflector, the fourth The metallization ratio and structural period 22 of the spacing 23 between the fingers 18 and the reflector, the length of the first aperture 111, the length of the second aperture 112, the distance between the first aperture 111 and the second aperture 112, the width of the fourth energy sink bar 17, wherein the number of the fourth finger bars 18 is an odd number and greater than or equal to three.

Specifically, the metallization ratio and structural period 22 of the distance 23 between the fourth finger bar 17 and the reflector 8, the length of the first aperture 111 is W1, the length of the second aperture 112 is W2, The distance between the first aperture 111 and the second aperture 112 is S, the width of the fourth energy sink bar 17 is Wb, and the distance between the fourth finger bar 17 and the reflector 8 is Gap.

In this embodiment, the fifth parameterization unit 5 is arranged at intervals along the second direction of the third parameterization unit 3, and the fifth parameterization unit 5 includes a fifth energy sink bar 19 and a set The plurality of fifth finger bars 20 between the fifth energy sink bars 19 are arranged side by side.

In this embodiment, the sixth parameterization unit 6 is arranged at intervals along the second direction of the fourth parameterization unit, and the sixth parameterization unit 6 includes a plurality of sixth fingers 21 arranged side by side.

In this embodiment, the number of the plurality of finger bars 21 mentioned above is the same, and they are all seven finger bars 10 grids arranged side by side.

In this embodiment, wherein, Nt: refers to the number of bar grids (IDT), integer type, because IDT is central axis symmetric, so Nt must be an odd number and must be ≥ 3, if it is an even number, the IDT structure will not satisfy If the central axis is symmetrical, an error will be reported, and the expected structural graph cannot be generated. Optionally, Nt is 301.

Ng: The index number of the reflector 8 (Reflector), integer type, parity or even, if the Ng of the Resonator is set to 0, a single IDT structure will be generated. Optionally, Ng is 30.

The metallization ratio (Metallization_Ratio:) a/p must satisfy 0<a/p<1, otherwise an error will be reported. Optionally, the metallization ratio is 0.5.

Pay attention to the following two points when setting triangle_Ratio1:

1. Resonator 12 (Resonator) setting without gap (Gap) structure:

(Triangle_Ratio1*Metallization_Ratio*Period)/2<(1-Metallization_Ratio)*Period, otherwise an error will be reported when generating the expected structure graph, because the above conditions are not met, which will cause a short circuit connection between adjacent gate fingers in the IDT. Triangle_Ratio is the triangle structure ratio, Metallization_Ratio is the metallization ratio, and Period is the period. Optionally, the Period is 1um.

2. Resonator settings with Gap structure:

(Triangle_Ratio1*Metallization_Ratio*Period)/2<min(Gap,(1-Metallization_Ratio)*Period)), otherwise an error will be reported when generating the expected structure graph, because the above conditions are not met, it will cause a short circuit between adjacent gate fingers in the IDT connect. Optionally, Triangle_Ratio1 is 1, and Triangle_Ratio2 is 1.

Wb:Wb<The total length of the reflector busbar (Reflector Busbar), otherwise the 45-degree cut angle at both ends of the reflector busbar path (Reflector Busbar Path) disappears. Optionally, Wb is 1um.

W1, W2: W1 and W2 must be ≥ 0, but cannot be 0 at the same time, otherwise an error will be reported, because when they are 0 at the same time, aperture 11 will disappear. Optionally, W1 is 36um, and W2 is 2.5um.

The following remaining structure parameters need only be greater than zero when set:

Period: structure period 22;

S: the spacing between the first aperture 111 and the second aperture 112;

Gap: the distance between IDT and Reflector, optional, the distance between IDT and Reflector is 1um.

Aperture: The length of aperture 11 in Reflector (Shorted Electrodes, Open-ciucuit Electrodes). When the Pcell parameter setting is wrong, you can modify it according to the prompt information.

The present invention also provides a design method of a surface acoustic wave filter, comprising the steps of: presetting the interdigital transducer 7 in the ADS software; relatively setting two reflectors on the preset interdigital transducer 7 8; and design a plurality of parameterization units on the preset interdigital transducer 7, wherein the plurality of parameterization units are arranged between two reflectors 8; by adjusting each parameter of a plurality of parameterization units , by integrating multiple parameter units to improve the overall performance of the filter, it also has the effect of small size and low cost, and is widely used.

Wherein, the plurality of parameterization units include a first parameterization unit 1, a second parameterization unit 2, a third parameterization unit 3, a fourth parameterization unit 4, a fifth parameterization unit 5 and a Six parameterization units 6, the first parameterization unit 1, the third parameterization unit 3 and the fifth parameterization unit 5 are arranged side by side, the second parameterization unit 2, the fourth parameterization unit 4 and the sixth parameterization unit 6 are arranged side by side.

Wherein, the parameters of the first parameterization unit 1 include: the number of the plurality of first fingers 10 is Nt, the metallization ratio and the structural period of the distance between the first fingers 10 and the reflector 8 22. The length of the first aperture 111 is W1, the length of the second aperture 112 is W2, the distance between the first aperture 111 and the second aperture 112 is S, and the width of the energy sink is Wb, the ratio of the base of the triangle of the first resonator 121 to the width of the first finger, the ratio of the height of the triangle of the first resonator 121 to the width of the first finger 10, wherein, The number of the first fingers 10 is an odd number and greater than or equal to three. By adjusting different fingers and apertures on the first parameterization unit 1, the second parameterization unit 2, the third parameterization unit 3, the fourth parameterization unit 4, the fifth parameterization unit 5 and the sixth parameterization unit 6 , Resonator to improve the overall performance of the surface acoustic wave filter, but also has the effect of small size, low cost, widely used.

Specifically, the energy is transmitted to multiple first finger bars 10 through the first energy sink bar 9 of the first parameterization unit 11, and then transmitted to the resonator 12 through the multiple apertures 11 on the first finger bar 10, Through the resonator 12, a certain frequency signal can be passed through, and other frequency signals can be blocked to achieve the purpose of color selection. When the signal frequency is equal to the natural frequency of the resonator 12, the signal passes smoothly as if passing through a small resistance (or wire). , when frequencies away from the natural resonant frequency try to pass it acts like a large impedance.

Compared with the prior art, in the surface acoustic wave filter of the present invention, two reflectors arranged oppositely on the interdigital transducer and at least one first parameterization integrated on the interdigital transducer unit, the first parameterization unit is arranged between the two reflectors, and the two ends of the first parameterization unit are arranged parallel to the two ends of the reflector; the first parameterization unit includes an opposite arrangement The energy sink bar, a plurality of finger bars arranged between the energy sink bars, a plurality of apertures respectively arranged on a plurality of the finger bars, and a resonator arranged on a plurality of the apertures; the aperture Comprising a first aperture and a second aperture corresponding to the first aperture, the resonator includes a first resonator disposed on the first aperture and a second resonator disposed on the second aperture , by setting different fingers, apertures, and resonators to improve the overall performance of the filter, and also has the effect of small size and low cost, and is widely used.

It should be noted that the various embodiments described above with reference to the accompanying drawings are only used to illustrate the present invention rather than limit the scope of the present invention. Those of ordinary skill in the art should understand that without departing from the spirit and scope of the present invention Any modifications or equivalent replacements made to the present invention shall fall within the scope of the present invention. Further, words appearing in the singular include the plural and vice versa unless the context otherwise requires. Additionally, all or a portion of any embodiment may be utilized with all or a portion of any other embodiment, unless stated otherwise.

Claims

A surface acoustic wave filter, characterized in that it comprises: an interdigital transducer, two reflectors arranged on opposite sides of the interdigital transducer, and integrated between the interdigital transducer and the Multiple parametric elements on the two reflectors described above.
The surface acoustic wave filter according to claim 1, wherein the plurality of parameterization units include a first parameterization unit, a second parameterization unit, a third parameterization unit, and a fourth parameterization unit arranged at intervals. The first parameterization unit, the fifth parameterization unit and the sixth parameterization unit, the first parameterization unit, the third parameterization unit and the fifth parameterization unit are arranged side by side, the second parameterization unit, the sixth parameterization unit The four parameterized units and the sixth parameterized unit are arranged side by side.
The surface acoustic wave filter according to claim 2, wherein the first parameterization unit comprises first energy sink bars arranged oppositely, a plurality of first energy sink bars arranged between the first energy sink bars finger strips, a plurality of apertures respectively disposed on the plurality of first finger strips, and resonators disposed on the plurality of apertures;

The aperture includes a first aperture and a second aperture corresponding to the first aperture, and the resonator includes a first resonator disposed on the first aperture and a second aperture disposed on the second aperture Second resonator.
The surface acoustic wave filter according to claim 3, wherein the parameters of the first parameterization unit include:

The number of the plurality of first fingers, the metallization ratio and the structural period of the distance between the first fingers and the reflector, the length of the first aperture, the length of the second aperture, the The distance between the first aperture and the second aperture, the width of the energy sink bar, the ratio of the base of the triangle of the first resonator to the width of the first finger bar, the triangle of the first resonator The ratio of the height to the width of the first fingers, wherein the number of the first fingers is an odd number and greater than or equal to three.
The surface acoustic wave filter according to claim 2, wherein the second parameterization unit and the first parameterization unit are arranged at intervals along the first direction of the first parameterization unit; The second parameterization unit includes oppositely arranged second energy sink bars, a plurality of second finger bars arranged between the second energy sink bars, and a plurality of apertures respectively arranged on the plurality of second finger bars; The apertures include a first aperture and a second aperture corresponding to the first aperture.
The surface acoustic wave filter according to claim 5, wherein the parameters of the second parameterization unit include:

The number of the plurality of second fingers, the metallization ratio and the structural period of the distance between the second fingers and the reflector, the length of the first aperture, the length of the second aperture, the The distance between the first aperture and the second aperture, the width of the second energy sink bar, wherein the number of the second fingers is an odd number and greater than or equal to three.
The surface acoustic wave filter according to claim 2, wherein the third parameterization unit is arranged along the second direction of the first parameterization unit, and the third parameterization unit includes oppositely arranged A third energy sink bar, a plurality of third finger bars arranged between the third energy sink bars, a plurality of apertures respectively arranged on the plurality of third finger bars, and a plurality of apertures arranged on the plurality of the third finger bars the resonator;

The aperture includes a first aperture and a second aperture corresponding to the first aperture, and the resonator includes a third resonator arranged on the first aperture and a third resonator arranged on the second aperture Four resonators.
The surface acoustic wave filter according to claim 7, wherein the parameters of the third parameterization unit include:

The number of the plurality of third fingers, the metallization ratio and the structural period of the distance between the third fingers and the reflector, the length of the first aperture, the length of the second aperture, the The distance between the first aperture and the second aperture, the width of the energy-sinking bar, the ratio of the triangle base of the third resonator to the width of the third finger bar, the triangle of the third resonator The ratio of the height to the width of the third finger, wherein the number of the third finger is an odd number and greater than or equal to three.
The surface acoustic wave filter according to claim 2, wherein the fourth parameterization unit is arranged at intervals along the first direction of the third parameterization unit, and the fourth parameterization unit includes oppositely arranged A fourth energy sink bar, a plurality of fourth finger bars arranged between the fourth energy sink bars, and a plurality of apertures respectively arranged on the plurality of fourth finger bars; the apertures include first apertures and A second aperture corresponding to the first aperture.
The surface acoustic wave filter according to claim 9, wherein the parameters of the fourth parameterization unit include:

The plurality of fourth fingers is an odd number and greater than or equal to 3, the distance between the fourth fingers and the reflector, the metallization ratio and the structural period of the distance between the fourth fingers and the reflector, The length of the first aperture, the length of the second aperture, the distance between the first aperture and the second aperture, the width of the fourth energy sink bar, wherein, the number of the fourth fingers It is an odd number and greater than or equal to 3.
The surface acoustic wave filter according to claim 2, wherein the fifth parameterization unit is arranged at intervals along the second direction of the third parameterization unit, and the fifth parameterization unit includes oppositely arranged The fifth energy sinking bar and the plurality of fifth finger bars disposed between the fifth energy sinking bars, the plurality of fifth finger bars are arranged side by side.
The surface acoustic wave filter according to claim 2, wherein the sixth parameterization unit is arranged at intervals along the second direction of the fourth parameterization unit, and the sixth parameterization unit includes Multiple sixth fingers.