WO2023123560A1 - Système et procédé de mesure de paroi interne fondés sur une pièce de hauteur de vecteur profond - Google Patents

Système et procédé de mesure de paroi interne fondés sur une pièce de hauteur de vecteur profond Download PDF

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WO2023123560A1
WO2023123560A1 PCT/CN2022/071516 CN2022071516W WO2023123560A1 WO 2023123560 A1 WO2023123560 A1 WO 2023123560A1 CN 2022071516 W CN2022071516 W CN 2022071516W WO 2023123560 A1 WO2023123560 A1 WO 2023123560A1
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workpiece
gauge
wall
point
deep
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PCT/CN2022/071516
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Chinese (zh)
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陈远流
胡朋
居冰峰
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浙江大学
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Publication of WO2023123560A1 publication Critical patent/WO2023123560A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/20—Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures

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  • the invention relates to a method for measuring the overall shape of the inner wall of a deep sagittal height workpiece, in particular to a measurement scheme and a measurement system for measuring the overall shape of the inner wall of a deep sagittal height workpiece by using dual sensors to separately measure different areas of the inner wall and then performing surface splicing.
  • Fukayako workpieces are widely used in precision equipment in aerospace, nuclear physics and other fields. Due to its unique geometry and specific functions, it plays a role that cannot be replaced by other single or assembled parts. At the same time, due to its critical position, during the assembly process of these ultra-precision equipment, its geometric and contour errors will lead to greater assembly errors, thereby reducing the accuracy and reliability of the equipment. Therefore, as our performance requirements for these ultra-precision equipment become more and more stringent, our requirements for Fukayako's workpieces are also getting higher and higher, especially for the geometric dimension accuracy of its inner wall and the quality of its inner contour.
  • Fukayako workpieces are mainly processed by high-precision machine tools, such as Fast Tool Servo (FTS).
  • FTS Fast Tool Servo
  • the processing process is easily affected by abnormal factors such as environment and materials, which will lead to the occurrence of defects in Fukayako workpieces and reduce the processing quality of Fukayako workpieces. Therefore, in order to ensure the geometric dimension accuracy, contour quality and consistency of the deep sagittal workpiece, and to further improve the quality of the workpiece through secondary processing, it is necessary to accurately evaluate the inner wall geometric dimension and inner wall contour quality of the deep sagittal workpiece.
  • the current measurement methods are mainly aimed at measuring the outer wall of deep sagittal workpieces.
  • Existing measurement schemes such as three-coordinate measuring machines cannot measure the bottom of the inner wall due to their large probes and low measurement efficiency.
  • Optical measurement methods have optical path interference or measurement angles are too large etc. cannot meet the requirements of the full-scale measurement of the inner wall.
  • a detection scheme that can measure the overall shape of the inner wall of the deep sagittal workpiece is needed.
  • the purpose of the present invention is to provide a deep sagittal workpiece that uses dual sensors to measure different areas of the inner wall separately and then perform surface splicing to meet the demand that the existing measurement method cannot realize the complete measurement of the inner wall of the deep sagittal workpiece.
  • Inner wall full-face measurement scheme and measurement system is to provide a deep sagittal workpiece that uses dual sensors to measure different areas of the inner wall separately and then perform surface splicing to meet the demand that the existing measurement method cannot realize the complete measurement of the inner wall of the deep sagittal workpiece.
  • Inner wall measurement system based on deep sagittal workpieces including:
  • the horizontal base is equipped with an XY positioning platform, and the XY positioning platform includes an X-direction motion platform that moves in the X direction and a Y-direction motion platform that moves in the Y direction; a turntable is set on the XY positioning platform for rotating around the Z direction; the workpiece Seat, arranged on the turntable, for placing deep sagittal workpieces; a vertical base, on which a Z-direction motion platform that moves in the Z direction is provided; a lateral gauge, arranged on the Z-direction motion platform, for measuring the inner wall and side wall of the deep sagittal workpiece; and an axial gauge, which is arranged on the Z-direction motion platform for measuring the inner wall and bottom wall of the deep sagittal workpiece.
  • a space posture adjustment device for the first member which is arranged between the turntable and the workpiece seat, and is used to drive the workpiece seat to rotate around the X direction or/and around the Y direction.
  • the space attitude adjustment device of the first member includes two first angular positions that rotate around the X direction and the Y direction respectively.
  • the lateral gauge and axial gauge are respectively arranged on the corresponding second space attitude adjustment devices;
  • the two spatial attitude adjustment devices are used to drive the lateral gauge and the axial gauge to rotate around the X direction or/and the Z direction.
  • the space attitude adjustment device of the second member includes two second angular positions that rotate around the X direction and the Z direction respectively.
  • both the lateral gauge and the axial gauge include a measuring rod and a measuring ball arranged on the end of the measuring rod.
  • the inner wall measurement method based on the deep sagittal height workpiece is used in the above-mentioned inner wall measurement system based on the deep sagittal height workpiece, comprising: step (1) correcting the lateral gauge and the axial gauge to a vertical state; step (2) correcting the workpiece seat so that The deep sagittal height workpiece is in a horizontal state; step (3) is by making the lateral gauge move against the inner wall side wall of the deep sagittal height workpiece along the generatrix of the deep sagittal height workpiece, to measure the surface shape of the deep sagittal height workpiece inner wall side wall; by making The axial meter moves on the inner wall bottom wall of the deep sagittal workpiece axis along the busbar base of the deep sagittal workpiece to measure the surface shape of the inner wall bottom wall of the deep sagittal workpiece; step (4) splicing the surface shape of the inner wall side wall and the shape of the inner wall bottom wall The complete surface shape of the deep sagittal workpiece is
  • the lateral gauge and the axial gauge have measuring balls, by which the measuring balls lean against the inner wall of the deep sagittal workpiece; in the process of step (3), there is a measuring ball track, and there is a measuring ball track on the measuring ball track
  • Point coordinates P Ai (x 0 , y Ai , z Ai ) there is a slope k Ai and the corresponding inclination angle ⁇ Ai of the point relative to the coordinate system; the radius of the measuring ball at the angle ⁇ Ai is calculated according to the slope k Ai and the corresponding inclination angle ⁇ Ai ;
  • the inner wall side wall point coordinates P Ai ' (x 0 ', y Ai ' , z Ai ' ) of the corresponding point coordinates P Ai (x 0 , y Ai , z Ai ) can be obtained;
  • step (3) in the process of step (3), there is a measuring ball trajectory, and there is a point coordinate P Bi (x 0 , y Bi , z Bi ) on the measuring ball trajectory, the point is relative to the coordinate system There is a slope k Bi and the corresponding inclination angle ⁇ Bi ; calculate the radius of the measuring ball at the angle ⁇ Bi according to the slope k Bi and the corresponding inclination angle ⁇ Bi ; according to the one-to-one mapping relationship, the corresponding point coordinates P Bi (x 0 , y Bi , z Bi ) inner wall side wall point coordinates P Bi '(x 0 ', y Bi ', z Bi '); by calculating multiple point coordinates P Bi (x 0 , y Bi , z Bi ) corresponding inner wall side Wall point coordinates P Bi '(x 0 ', y Bi ', z Bi '), to obtain the surface shape of the continuous inner wall and side wall.
  • the step (1) includes the correction of the lateral or axial gauge space inclination based on a standard sphere, which includes the steps of: step (1.1) setting a standard sphere on the workpiece seat; step (1.2) looking for the first benchmark surface; the first datum plane is the center plane on the standard sphere, and the first datum plane is parallel to a certain plane in the three-dimensional coordinate system; step (1.3) drives the lateral gauge or axial gauge against the first On the outer contour of a datum plane, and move linearly along the outer contour of the first datum plane; record the first position where the measured value of the lateral gauge or axial gauge is the smallest during the movement process, and the first position with a certain distance from the first position Two positions, and record minimum measured value and measured value respectively; Step (1.4) calculates according to minimum measured value and measured value the spatial inclination ⁇ A of lateral gauge or axial gauge and first reference axis; Described first reference axis and The first reference plane is set vertically; step (1.5) drives the second component
  • the calculation method in step (1.4) includes: during the movement of the lateral gauge or axial gauge, there are first position measurement side Z A0 O A0 , second position measurement side Z An O An , right triangle O A Q n O An and right triangle O An T A P A , the space inclination ⁇ A is ⁇ P A O An T A ; wherein, the value of the measuring side Z A0 O A0 at the first position is S A0 , the second position The value of the measuring side Z An O An is S An ; in the right triangle O A Q A O An , the point O A is the center of the standard sphere, and the point O An is the measurement of the lateral gauge or axial gauge on the second position Z An The center of the sphere, the point Q A is the intersection point of the lateral extension side of point O A and the vertical extension side of point O An ; in the right triangle O An T A P A , point P A is the lateral gauge or The intersection of the vertical extension side of the measuring ball center of the axial meter and
  • 2
  • the step (1) also includes, measuring the roundness of the measuring ball in the lateral gauge or axial gauge based on the standard ball, which includes step (1.6) setting the standard ball on the workpiece seat; step (1.7) looking for the first Two datum planes; the second datum plane is the central plane on the standard sphere, and the second datum plane is parallel to a certain plane in the three-dimensional coordinate system; step (1.8) drives the lateral gauge or axial gauge against the set on the outer contour of the second datum plane, and move linearly along the outer contour of the second datum plane; record the first position with the smallest measured value during the movement of the lateral gauge or axial gauge, and a certain distance from the first position The second position of the distance, and record the minimum measured value and the measured value respectively; step (1.9) calculate the radius r Ai of the measuring ball under different positions according to the minimum measured value and several measured values, and integrate the radius r Ai of the measuring ball to obtain the measuring ball roundness.
  • step (1.9) includes:
  • step (2) includes, based on the corrected lateral gauge or axial gauge, correcting the space inclination of the workpiece seat, which includes: step (2.1) placing a deep sagittal height workpiece on the workpiece seat; step (2.2) Drive the axial gauge to move towards the X direction at the z 1 ' height in the deep sagittal workpiece, find the point P 1 ' with the largest measured value, and record its coordinate values (x 1 ', y 1 ', z 1 '); the drive shaft The azimuth moves towards the X direction at the z 2 'height of the deep sagittal workpiece, finds the point P 2 ' with the largest measured value, and records its coordinates (x 2 ', y 2 ', z 2 '); drives the axial gage Move towards the Y direction at the z 3 ' height in the deep sagittal workpiece, find the point P 3 ' with the largest measured value, and record its coordinate values (x 3 ', y 3 ',
  • Step (2.3) calculates the inclination angle ⁇ ⁇ of the workpiece seat around the X direction and the inclination angle ⁇ b around the Y direction according to the formula (11), (12);
  • the step (4) includes: according to the coordinate relationship between the surface shape of the side wall of the inner wall and the shape of the bottom wall of the inner wall, determine the overlapping area between the two shapes, and the coordinate change matrix of the two measured shapes; Measure the surface shape and carry out coordinate changes to obtain the complete surface shape of the inner wall of the workpiece.
  • This patent combines lateral gauges and axial gauges to measure the inner wall shape of deep sagittal workpieces.
  • the measurement structure and measurement method are not affected by optical fibers, and can achieve the purpose of measurement for deep sagittal workpieces of various sizes.
  • this patent drives the six-degree-of-freedom motion platform to perform the previous correction of the workpiece seat, lateral gauge, and axial gauge, effectively increasing the accuracy of deep sagittal height workpiece detection.
  • Figure 1 is a schematic structural view of the inner wall measurement system.
  • Fig. 2(a) is a schematic diagram of the correction of the space inclination of the side gauge.
  • Fig. 2(b) is a schematic diagram of the correction of the spatial inclination of the axial gauge.
  • Fig. 3(a) is a schematic diagram of measuring the roundness of a ball measured by a lateral gauge.
  • Fig. 3(b) is a schematic diagram of measuring spherical roundness in the axial gauge.
  • Fig. 4 is a schematic diagram of measurement results of spherical roundness measurement.
  • Figure 5(a) is a top schematic view of the lateral gauge when correcting the inclination angle of the workpiece seat space.
  • Fig. 5(b) is a three-dimensional schematic view of the lateral gauge when correcting the inclination angle of the workpiece seat space.
  • Fig. 6 is a schematic diagram of the inspection process of the inner wall of the deep-sag workpiece.
  • Fig. 7(a) is a schematic diagram of the lateral gauge detecting the inner wall surface of a deep sagittal workpiece.
  • Fig. 7(b) is a schematic diagram of the axial gauge detecting the inner wall surface of a deep sagittal workpiece.
  • the embodiment of the present invention relates to a full-scale measurement scheme and measurement system for deep-sagittal workpiece inner walls that use dual sensors to measure different areas of the inner wall separately and then perform surface splicing. It is suitable for information electronics, aerospace, new energy, biomedical, etc. The field of ultra-precision machining and measuring products as key components.
  • the workpiece seat 108 is used to place the deep sagittal workpiece 109;
  • Lateral gauge 111 used for measuring the inner wall and side wall of deep sagittal workpiece 109
  • Axial meter 112 used for measuring the inner wall and bottom wall of deep sagittal workpiece 109;
  • a six-degree-of-freedom motion platform, the workpiece seat 108, the lateral gauge 111 and the axial gauge 112 are installed on the six-degree-of-freedom motion platform, and is used to drive the workpiece base 108 to perform six degrees of freedom relative to the lateral gauge 111 or the axial gauge 112. sports.
  • the six-degree-of-freedom motion platform in this patent includes a horizontal base 103 and a vertical base 101, the horizontal base 103 is used to install the workpiece seat 108, and the vertical base 101 is used to install the lateral gauge 111 and the axial gauge 112 .
  • the horizontal base 103 includes a horizontal base plate, on which there are X-direction motion platform 105, Y-direction motion platform 104, turntable 106, first member space attitude adjustment device 107 and
  • the workpiece seat 108 specifically, the X-direction motion platform 105 is an X-direction slide rail device, and the Y-direction motion platform 104 is a Y-direction slide rail device, for the turntable 106 to be arranged above the Y-shaped slide rail device, They are respectively used to drive the workpiece seat 108 to move towards the X direction, move towards the Y direction, and rotate around the Z direction;
  • the first component space posture adjustment device 107 can be two first angular positions stacked together, and the The workpiece seat 108 is arranged on the first angle stage, and the two first angle stages are respectively used to drive the workpiece seat 108 to rotate around the X direction and the Y direction.
  • the vertical base 101 is placed on one side of the horizontal base 103, and includes a vertical base plate perpendicular to the horizontal base plate.
  • the vertical base plate is provided with a Z-direction motion platform 102 and two second component space posture adjustment devices 110,
  • the two second component space posture adjustment devices 110 are respectively equipped with the lateral gauge 111 and the axial gauge 112 .
  • the Z-direction motion platform 102 is specifically a Z-direction slide rail device. Since the two second component space posture adjustment devices 110 are installed above the Z-direction slide rail device, the side gauge will be driven at the same time when the Z-direction slide rail device is working.
  • lateral gauge 111 and axial gauge 112 lift, by changing the height position of lateral gauge 111 and axial gauge 112, relatively changing the relative position between workpiece seat 108 and lateral gauge 111 or axial gauge 112, also just realized workpiece seat 108 Z direction adjustment.
  • There are two space attitude adjustment devices 110 for the second member and the two second member space attitude adjustment devices 110 are respectively used to drive the lateral gauge 111 and the axial gauge 112 to rotate around the Z direction and the X direction, and pass
  • the rotation of the lateral gauge 111 or the axial gauge 112 around the Z direction makes the workpiece rotate relative to it;
  • the second component space attitude adjustment device 110 specifically includes two rotating around the X direction and around the Z direction respectively.
  • the second corner platform In combination with the vertical base 101 , the horizontal base 103 and the components on the vertical base 101 and the horizontal base 103 , adjustment of the six degrees of freedom of the workpiece seat 108 is realized.
  • the lateral gauge 111 in this patent reads by abutting against the inner wall of the deep sagittal workpiece 109, and its end is provided with an abutment rod that contacts the inner wall of the deep sagittal workpiece 109.
  • the shape changes to swing or stretch, and the lateral gauge 111 will record the readings of the rod after swinging or stretching under different conditions, so as to reflect the shape of the inner wall and side wall of the workpiece 109 .
  • the axial meter 112 in this patent abuts against the bottom wall of the inner wall of the workpiece 109 for reading, and its end is provided with a rod that contacts the inner wall and bottom wall of the workpiece 109, which will change with the shape of the surface of the abutted object
  • the lateral gauge 111 will record the readings of the extension rod under different conditions, so as to reflect the shape of the inner wall and bottom wall of the workpiece 109 .
  • a measuring ball 202 is provided at the end of the abutment rod, and the measuring ball 202 is used to ensure that the lateral gauge 111 is in smooth contact with the inner wall of the deep sagittal workpiece 109; correspondingly, setting the measuring ball 202 will reverse the lateral gauge 111 and the shaft
  • the reading of the direction gauge 112 starts from the center of circle of the measuring ball 202 to the other end of the pole.
  • the inner wall measurement of the deep sag workpiece 109109 is performed, and the method includes measuring the deep sag by moving the lateral gauge 111 against the inner wall sidewall of the deep sag workpiece 109 along the generatrix of the deep sag workpiece 109
  • the surface shape of the workpiece 109 inner wall side wall by making the axial meter 112 move on the deep sagittal height workpiece 109 axis inner wall bottom wall along the busbar base of the deep sagittal height workpiece 109, measure the surface shape of the deep sagittal height workpiece 109 inner wall bottom wall; splicing
  • the surface shape of the side wall of the inner wall and the bottom wall of the inner wall obtain the complete surface shape of the Fukiyako workpiece 109 .
  • the splicing method can use point cloud splicing algorithm to splice two measured surface shapes.
  • this patent also includes a correction method based on the inner wall measurement of deep sagittal workpiece 109, which includes:
  • Step (1) correcting the lateral gauge 111 and the axial gauge 112 to a vertical state
  • Step (2) Correcting the workpiece seat 108 so that the deep sagittal height workpiece 109 is in a horizontal state.
  • the step (1) includes correcting the space inclination of the lateral gauge 111 or the axial gauge 112 based on the standard sphere 201, which includes;
  • Step (1.2) searches for the first datum plane;
  • the first datum plane is the center plane on the standard sphere 201, and the first datum plane is parallel to a certain plane in the three-dimensional coordinate system;
  • Step (1.3) Drive the lateral gauge 111 or the axial gauge 112 against the outer contour of the first reference plane, and move linearly along the outer contour of the first reference plane; record the lateral gauge 111 or the axial gauge The first position Z A0 with the smallest measured value during the movement of the meter 112, and the second position Z An at a certain distance from the first position Z A0 , and record the smallest measured value S A0 and the measured value S An respectively;
  • Step (1.4) Calculate the space inclination ⁇ A between the lateral gauge 111 or the axial gauge 112 and the first reference axis according to the minimum measured value S A0 and the measured value S An ; the first reference axis is perpendicular to the first reference plane set up;
  • Step (1.5) Drive the second component space posture adjustment device 110 to correct the angle difference between the lateral gauge 111 or the axial gauge 112 and the first reference axis according to the value of the spatial inclination ⁇ A.
  • the spatial inclination angle ⁇ A between the lateral gauge 111 and the X-axis can be calculated by the Pythagorean law.
  • first position measurement side Z A0 O A0 there are first position measurement side Z A0 O A0 , second position measurement side Z An O An , right triangle O A Q A O during the movement of lateral gauge 111 or axial gauge 112 An and right-angled triangle O An T A P A , at this time, the space inclination ⁇ A is ⁇ P A O An T A ; wherein, the value of the measuring side Z A0 O A0 at the first position is S A0 , the second position The value of measuring side Z An O An is S An ;
  • Point O A is the center of the standard sphere 201, and the point O An is the center of a certain central plane of the measuring ball 202 of the lateral gauge 111 or axial gauge 112 on the second position Z An ,
  • Point Q A is the intersection point of the horizontal extension side of point O A and the vertical extension side of point O An ;
  • point P A is the vertical extension side of the center of the measuring ball 202 of the lateral gauge 111 or the axial gauge 112 on the first position Z An and the second position measuring side Z An O An Intersection point, point T A is the vertical point of point O An on side T A O A0 ;
  • 2
  • the spatial inclination ⁇ between the lateral gauge 111 and the Z-axis should also be adjusted with the XY as the first reference plane A , this is because the lateral gauge 111 moves vertically for measurement during the actual working process, so when the lateral gauge 111 is corrected, it is only necessary to adjust the spatial inclination ⁇ A between the lateral gauge 111 and the X-axis and Z-axis That's it.
  • the method of adjusting on the XY plane is the same as that on the YZ plane, and will not be described in this patent.
  • the YZ surface of the standard ball 201 is also used as the first reference plane, and the axial gauge 112 is moved in the Y direction above the standard ball 201 to find The first position Y B0 where the measured value is the smallest during the movement process and record its minimum value S B0 ; Two positions Y Bn and corresponding measured values S Bn ;
  • the spatial inclination ⁇ B between the axial gauge 112 and the X-axis is calculated according to formulas (6)-(9).
  • the spatial inclination ⁇ B between the axial gauge 112 and the Y axis should be adjusted with the XZ plane as the first reference plane, because the axial During the actual working process, the gauge 112 moves horizontally to measure the deep sagittal height of workpieces.
  • O B O Bn R + r B (6)
  • 2
  • the spatial inclination of the lateral gauge 111 and the axial gauge 112 can be calculated repeatedly to converge to a smaller threshold, such as 0.1 degrees.
  • the space inclination is adjusted.
  • the step (1) also includes, based on the standard ball 201, measuring the roundness of the measuring ball 202 in the lateral gauge 111 or the axial gauge 112, which includes the steps of:
  • the second datum plane is the center plane on the standard sphere 201, and the second datum plane is parallel to a certain plane in the three-dimensional coordinate system;
  • the plane corresponding to the movement direction of the lateral gauge 111 is also the YZ plane.
  • the midline plane parallel to the YZ plane on the standard ball 201 is the second reference
  • the lateral gauge 111 abut on its right side and move towards the Z direction, find the first position Z A0 with the smallest measured value during the movement and record its minimum value S A0 ; then make the lateral gauge 111 continue Move toward the Z direction until the measured value of the lateral gauge 111 is close to the maximum value of its range and then stop, and record the second position Z Ai and the corresponding measured value S Ai .
  • the detected profile is the track of the center of the orbit of the measuring ball 202, not the deep sagittal workpiece 109.
  • Profile for this purpose, it is necessary to detect the roundness profile of the measuring ball 202 to map the inner wall profile of the deep sagittal workpiece 109 according to the roundness profile of the measuring ball 202 when the lateral gauge 111 detects the deep sagittal workpiece 109 .
  • the lateral gauge 111 only uses about 120 degrees of measuring surface in the measurement process, so when detecting the roundness profile of the measuring ball 202, it only needs to determine about 120 degrees Measuring the surface profile of the ball 202 can meet the needs of the work.
  • the plane corresponding to the movement direction of the axial gauge 112 is also the YZ plane, by making the axial gauge 112 112 moves toward the Y direction, finds the first position Y B0 with the smallest measured value in the moving process, and records its minimum value S B0 ; then makes the axial meter 112 continue to move toward the Y direction until the measured value of the axial meter 112 is close to its range Stop after the maximum value, and record the second position Y Bi and the corresponding measured value S Bi .
  • there is a right triangle O B Q Bi O Bi and the roundness profile of the axial gauge 112 measuring ball 202 is obtained by formulas (15)-(19) .
  • step (2) includes correcting the spatial inclination of the workpiece seat 108 based on the corrected lateral gauge 111 or axial gauge 112, which includes:
  • Step (2.1) Place the deep sagittal workpiece 109 on the workpiece seat 108, and the deep sagittal height workpiece 109 is directly placed in the workpiece seat 108;
  • Step (2.2) Drive the axial gauge 112 to move towards the X direction at the z 1 ′ height in the deep sagittal height workpiece 109, find the point P 1 ′ with the largest measured value, and record its coordinate values (x 1 ′, y1 ′, z1 ′ ); drive the axial meter 112 to move towards the X direction at the height of z 2 ′ in the deep sagittal height workpiece 109, find the point P 2 ′ with the largest measured value, and record its coordinate value (x 2 ′, y 2 ′, z 2 ′ );
  • Step (2.3) calculates the inclination angle ⁇ ⁇ of the workpiece seat 108 around the X direction and the inclination angle ⁇ b around the X direction according to the formulas (20) and (21);
  • the points P 1 ′ and P 2 ′ correspond to two points on the X-direction generatrix of the deep sagittal workpiece 109, and the inclination angle ⁇ ⁇ readings can be obtained by taking the inverse trigonometric function according to the point coordinates, According to the value of the inclination angle ⁇ ⁇ , adjust the first component space posture adjusting device 107 to realize elimination. Similarly, move the axial gauge 112 toward the Y direction to find the inclination angle ⁇ b of the workpiece seat 108 around the Y direction to eliminate.
  • the correction method can make the inclination angle ⁇ ⁇ and the inclination angle ⁇ b converge to a smaller threshold, such as 0.05 degrees, through multiple measurements.
  • the inner wall measurement of the deep sagittal workpiece 109 is performed.
  • the measurement direction of the lateral gauge 111 is from the edge to the center
  • the distance from the measurement end point to the axis of the deep sagittal workpiece 109 is dA
  • the measurement direction of the axial gauge 112 is from the center to the edge of the deep sagittal workpiece 109
  • the distance between the measurement end point and the axis of the deep sagittal workpiece 109 is d B
  • d B >d A the measurement direction of the lateral gauge 111
  • y Ai ′ y Ai -r Ai cos( ⁇ Ai ) (twenty two)
  • z Ai ′ z Ai -r Ai sin( ⁇ Ai ) (twenty three)
  • ⁇ Ai arctan(k Ai ) (twenty four)
  • the rotating workpiece seat 108 After obtaining the generatrix track of the continuous inner wall side wall and the continuous inner wall bottom wall, the rotating workpiece seat 108 continues to measure to obtain the continuous inner wall side wall and the inner wall bottom wall shape, and according to the inner wall side The surface shape of the wall and the surface shape of the bottom wall of the inner wall are spliced.
  • This patent combines the lateral gauge 111 and the axial gauge 112 to measure the inner wall shape of the deep sagittal workpiece 109.
  • the measurement structure and measurement method are not affected by the optical fiber, and the measurement can be achieved for various deep sagittal workpieces 109 of different sizes. Purpose.
  • this patent drives the six-degree-of-freedom motion platform to perform the previous correction of the workpiece seat 108, the lateral gauge 111, and the axial gauge 112, effectively increasing the accuracy of the detection of the deep sagittal height workpiece 109.

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Abstract

Système de mesure de paroi interne fondé sur une pièce de hauteur de vecteur profond comprenant : un siège de pièce (108), utilisé pour mettre en place une pièce de hauteur de vecteur profond (109) ; un compteur latéral (111), utilisé pour mesurer la paroi latérale interne de la pièce à travailler de hauteur de vecteur profond (109) ; un compteur axial (112), utilisé pour mesurer la paroi interne et la paroi inférieure de la pièce à travailler de hauteur de vecteur profond (109) ; et une plateforme de mouvement à six degrés de liberté. Le siège de pièce (108), le compteur latéral (111) et le compteur axial (112) sont montés sur la plateforme de mouvement à six degrés de liberté, la plateforme de mouvement à six degrés de liberté est utilisée pour amener le siège de pièce (108) à effectuer un mouvement à six degrés de liberté par rapport au compteur latéral (111) ou au compteur axial (112), la plateforme de mouvement à six degrés de liberté comprend une base horizontale (103) et une base verticale (101), la base horizontale (103) est utilisée pour fixer le siège de pièce (108), et la base verticale (101) est utilisée pour fixer le compteur latéral (111) et le compteur axial (112).
PCT/CN2022/071516 2021-12-27 2022-01-12 Système et procédé de mesure de paroi interne fondés sur une pièce de hauteur de vecteur profond WO2023123560A1 (fr)

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CN202111619678.4 2021-12-27
CN202111619678.4A CN114279301A (zh) 2021-12-27 2021-12-27 基于深矢高工件的内壁测量系统以及测量方法

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Citations (5)

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