WO2023109266A1 - Chip packaging structure and photoelectric apparatus thereof - Google Patents

Chip packaging structure and photoelectric apparatus thereof Download PDF

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Publication number
WO2023109266A1
WO2023109266A1 PCT/CN2022/124162 CN2022124162W WO2023109266A1 WO 2023109266 A1 WO2023109266 A1 WO 2023109266A1 CN 2022124162 W CN2022124162 W CN 2022124162W WO 2023109266 A1 WO2023109266 A1 WO 2023109266A1
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Prior art keywords
cpo
chip
packaging structure
cpa
substrate
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PCT/CN2022/124162
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French (fr)
Chinese (zh)
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汤宁峰
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中兴通讯股份有限公司
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Publication of WO2023109266A1 publication Critical patent/WO2023109266A1/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/12Mountings, e.g. non-detachable insulating substrates
    • H01L23/14Mountings, e.g. non-detachable insulating substrates characterised by the material or its electrical properties
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/367Cooling facilitated by shape of device
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/16Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04BTRANSMISSION
    • H04B10/00Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
    • H04B10/25Arrangements specific to fibre transmission

Definitions

  • the present application relates to but not limited to the field of integrated chips, and in particular relates to a chip packaging structure and an optoelectronic device thereof.
  • serializer/deserializer SVSerializer
  • SerDes serializer/deserializer
  • CPO Co-Packaged Optics
  • CPO In optoelectronic equipment, CPO is usually packaged with Application Specific Integrated Circuit (ASIC) chips into Co-Packaged Assemble (CPA).
  • ASIC Application Specific Integrated Circuit
  • CPA Co-Packaged Assemble
  • Embodiments of the present application provide a chip packaging structure and an optoelectronic device thereof.
  • the embodiment of the present application provides a chip packaging structure, including: a co-mounted component CPA substrate, the CPA substrate is provided with a first through hole; a photoelectric co-mounted optical module CPO, the CPO is packaged in the CPA The first surface of the substrate; the ASIC chip, the ASIC chip is packaged on the second surface of the CPA substrate, wherein the first surface is located on the opposite side of the second surface, and the ASIC chip passes through the first The vias are electrically connected to the CPO.
  • an embodiment of the present application provides an optoelectronic device, including the chip packaging structure as described in the first aspect.
  • Figure 1 is a schematic structural diagram of the existing CPO and ASIC chips packaged on the same side of the CPA substrate;
  • FIG. 2 is a schematic cross-sectional view of a chip packaging structure provided by an embodiment of the present application
  • FIG. 3 is a schematic cross-sectional view of a chip packaging structure provided in Embodiment 1 of the present application;
  • FIG. 4 is an exploded view of the chip package structure provided in Embodiment 1 of the present application.
  • FIG. 5 is a schematic cross-sectional view of a chip packaging structure provided in Embodiment 2 of the present application.
  • FIG. 6 is an exploded view of the chip package structure provided by Embodiment 2 of the present application.
  • the present application discloses a chip packaging structure and an optoelectronic device thereof.
  • the chip packaging structure includes: a CPA substrate, the CPA substrate is provided with a first through hole; a CPO, the CPO is packaged on the first surface of the CPA substrate; an ASIC chip, the ASIC chip is packaged on the second surface of the CPA substrate, wherein the first surface is located on the opposite side of the second surface, and the ASIC chip is connected to the CPO circuit through the first through hole connect.
  • the ASIC chip and the CPO are respectively arranged on opposite sides of the CPA substrate, so that the ASIC chip can be directly electrically connected to the CPO through the first through hole of the CPA substrate, effectively reducing the gap between the ASIC chip and the CPO.
  • the length of the transmission link between them improves the electrical signal transmission performance of the CPA.
  • Fig. 1 is a schematic structural diagram of the existing CPO and ASIC chip packaged on the same side of the CPA substrate.
  • both the ASIC chip and the CPO are packaged on the same side of the CPA substrate.
  • the transmission of the SerDes between the two needs to set up an electrical link channel in the CPA substrate.
  • the transmission link of the electrical signal is long, resulting in high transmission power consumption, poor signal integrity, and difficult implementation of CPO direct drive.
  • the present application provides a chip packaging structure, including:
  • the CPA substrate 100 is provided with a first through hole 110;
  • CPO200, CPO200 is packaged on the first surface of the CPA substrate 100;
  • the ASIC chip 300 , the ASIC chip 300 is packaged on the second surface of the CPA substrate 100 , wherein the first surface is located on the opposite side of the second surface, and the ASIC chip 300 is electrically connected to the CPO 200 through the first through hole 110 .
  • the CPO200 and the ASIC chip 300 are no longer packaged on the same side of the CPA substrate 100, but the ASIC chip 300 and the CPO200 are respectively arranged on opposite sides of the CPA substrate 100, effectively reducing the ASIC
  • the length of the transmission link between the chip and the CPO200 improves the electrical signal transmission performance of the CPA.
  • the inner wall of the first through hole 110 is plated with a conductive material, and the first through hole 110 is set
  • the CPO solder balls 261 and the ASIC chip solder balls 310 are respectively welded on both sides of the via holes.
  • the electrical links connected to the CPO 200 and the ASIC chip 300 respectively pass through the first through holes 110, not many here. Do limited.
  • the ASIC chip in the embodiment of the present application may be a Switch chip or a Graphics Processing Unit (GPU), which is not limited here.
  • GPU Graphics Processing Unit
  • the present embodiment takes the CPO200 packaged on the front side of the CPA substrate 100 and the ASIC chip 300 packaged on the back side of the CPA substrate 100 as an example for description, which does not limit the CPO200 or the ASIC chip 300 packaged on the CPA substrate 100
  • the specific location, the technical solution of this embodiment is also applicable to the situation where the CPO 200 is packaged on the reverse side of the CPA substrate 100 and the ASIC chip 300 is packaged on the front side of the CPA substrate 100 .
  • CPO200 is packaged on CPA substrate 100 through CPO connector 210, one side of CPO connector 210 is packaged with CPO200, and the other side of CPO connector 210 is connected to first through hole 110 of CPA substrate 100 , it can be understood that the detachable connection between the CPO200 and the CPO connector 210 facilitates the replacement and maintenance of the CPO200 with a relatively high loss rate.
  • the CPO 200 may be directly welded to the CPA substrate 100 , which does not limit the connection method between the CPO 200 and the CPA substrate 100 .
  • the CPO connector 210 is generally larger in size, therefore, multiple CPO 200 can be packaged under the condition that the number of CPO connector 210 interfaces and the layout space allow, so as to realize the maximization of the CPO connector 210 interface
  • the number of CPO connector 210 interfaces and the layout space allow so as to realize the maximization of the CPO connector 210 interface
  • four CPO200s are arranged in a square shape at the CPO connector 210 to make the capacity density of the CPO200 more compact.
  • Those skilled in the art have the motivation to adjust the specific number and layout of the CPO200 according to actual needs. Here Not much to limit.
  • CPO200 the number and connection positions of CPO200 depend on the SerDes signal transmission path with ASIC chip 300.
  • the SerDes of ASIC chip 300 is designed in the middle of the chip. Therefore, in order to realize the connection between CPO200 and To minimize the transmission path between the ASIC chips 300 , it is necessary to align the CPO 200 with the middle of the ASIC chip 300 , so as to realize the transmission of the SerDes through the first through hole 110 .
  • a larger CPO connector 210 can be covered on the CPA substrate 100 and positioned on the opposite side of the ASIC chip 300, and then the CPO200 can be connected to the CPA connector by adjusting the CPO200.
  • the full-coverage alignment method can make more alignment points between the CPO200 and the ASIC chip 300, and the ASIC chip 300 can design more SerDes areas. Large, can improve the design flexibility of the ASIC chip 300 .
  • the CPO200 can also be laid out in the manner shown in FIG. One through hole 110 is sufficient for connection.
  • CPO200 is not arranged side by side, so CPO connector 210 can also be omitted, and CPO200 can be soldered directly to CPA substrate 100.
  • the size of CPO200 Not limited by the CPO connector 210 , the design size of the CPO200 can be appropriately increased if the size of the CPA substrate 100 allows, which is beneficial to improving the design flexibility of the CPO200 and reducing the design difficulty of the CPO200 .
  • the chip packaging structure of this embodiment is also provided with a first heat sink 410 and a second heat sink 420 , and the first heat sink 410 is arranged on the top of the CPO200 side, the second heat sink 420 is disposed on the lower side of the ASIC chip 300 .
  • first radiator 410 and the second radiator 420 can be liquid-cooled radiators or air-cooled radiators; liquid-cooled radiators are small in size and easy to install, while air-cooled Compared with the liquid cooling radiator, the air duct design is more troublesome to install. It can be understood that those skilled in the art can choose the specific type of the first radiator 410 or the second radiator according to the actual heat dissipation space, and can also be immersed Type cooling, not limited here.
  • the number of the first heat sink 410 or the second heat sink 420 can be arbitrary.
  • those skilled in the art have the motivation to select the specific number of the first heat sink 410 or the second heat sink 420 according to actual needs, and there is no limitation here.
  • the chip packaging structure of this embodiment is further provided with a line card main board 500, and the line card main board 500 is connected to the CPA substrate 100 through at least two line card connectors 510, thereby realizing the ASIC chip 300. Power supply, clock supply and connection of control signals.
  • the reverse side of the CPA substrate 100 forms a first space between the line card connector 510 and the line card main board 500.
  • the first space can provide a setting space for the ASIC chip 300 and the second heat sink 420.
  • this embodiment does not limit the specific height of the line card connector 510.
  • Those skilled in the art have the motivation to adjust the specific height of the line card connector 510 according to the volume of the heat sink. For example, referring to FIGS. 3 and 4, if Considering the use of an air-cooled heat sink to dissipate heat from the ASIC chip 300, it is necessary to consider the design of the air duct and select a line card connector 510 with a relatively high height for adaptation.
  • a liquid-cooled heat dissipation method is used to realize the heat dissipation of the ASIC chip 300.
  • the height of the line card connector 510 can be appropriately reduced, which is not limited here.
  • this embodiment takes CPO200 packaged on the reverse side of the CPA substrate 100 and the ASIC chip 300 packaged on the front side of the CPA substrate 100 as an example for description. This is not to limit the CPO200 or ASIC chip 300 packaged on the CPA substrate 100. The specific location, the technical solution of this embodiment is also applicable to the situation where the CPO 200 is packaged on the front side of the CPA substrate 100 and the ASIC chip 300 is packaged on the back side of the CPA substrate 100 .
  • the chip packaging structure of this embodiment is similar to that of Embodiment 1, mainly having the following differences:
  • the SerDes of the ASIC chip 300 is designed around the chip.
  • the CPO200 is aligned with the edge area of the ASIC chip 300, so that the CPO200 It is connected with the ASIC chip 300 through the first through hole 110 .
  • CPO200 can also be laid out in the manner shown in FIG.
  • the hole 110 can be connected.
  • the CPO200 in this embodiment is directly welded to the CPA substrate 100. It can be understood that the welding method is compared with the CPO connector 210 shown in FIG. 4 to achieve the CPO200 and the CPA substrate 100
  • the packaging method can reduce insertion loss and cost, which does not limit the connection method between CPO200 and CPA substrate 100.
  • CPO200 is packaged on CPA substrate 100 through CPO connector 210. Technicians can choose according to the actual situation.
  • this embodiment does not limit the specific number and specific size of CPO200.
  • those skilled in the art have the motivation to adjust the specific number and layout of the CPO 200 according to actual needs, which are not limited here.
  • CPO200 comprises EIC220, PIC230, pigtail 240 and optical fiber connector 250, and EIC220 is electrically connected with ASIC chip 300, and PIC230 is coupled with pigtail 240, and pigtail 240 is connected away from one end of described PIC230 Fiber optic connector 250.
  • EIC220 is soldered to CPO substrate 260 through EIC solder balls 221.
  • the CPO substrate 260 is soldered to the CPA substrate 100 through the CPO solder balls 261. Since the ASIC chip 300 is packaged on the CPA substrate 100 through the ASIC chip solder balls 310, the EIC solder balls 221 pass through the second through hole 262 in the CPO substrate 260 and the CPA substrate 100.
  • the first through hole 110 of the ASIC chip is aligned and electrically connected with the ASIC chip solder ball 310, thereby realizing the connection between the EIC220 and the ASIC chip 300; the PIC230 is packaged on the CPO substrate 260 through the PIC solder ball 231, and the specific solder balls connected to each other can be Selection is based on actual needs.
  • This embodiment only describes the connection relationship between two chips. The specific selection of solder balls is not within the scope of this embodiment, and will not be repeated in the future.
  • the present application also provides an optoelectronic device (not shown in the figure), including the chip packaging structure described in any one of the above embodiments.
  • the optoelectronic device in this embodiment may be a switch, a router, an artificial intelligence (AI) device, a Compute Express Link (CXL) product, etc., which involve photoelectric conversion and use SerDes technology to achieve high-speed
  • the transfer device is fine.
  • the ASIC chip 300 and the CPO 200 are respectively arranged on opposite sides of the CPA substrate 100, the ASIC chip 300 can It is directly electrically connected to the CPO200 through the first through hole 110 of the CPA substrate 100, effectively reducing the length of the transmission link between the ASIC chip 300 and the CPO200, and improving the electrical signal transmission performance of the CPA, thereby making the computing speed or switching speed of the optoelectronic device There has been a significant improvement.

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Abstract

Disclosed in the present application are a chip packaging structure and a photoelectric apparatus thereof. The chip packaging structure comprises: a CPA substrate (100), wherein the CPA substrate (100) is provided with a first through hole (110); a CPO (200), wherein the CPO (200) is packaged on a first surface of the CPA substrate (100); and an ASIC chip (300), wherein the ASIC chip (300) is packaged on a second surface of the CPA substrate (100), the first surface is located on an opposite side of the second surface, and the ASIC chip (300) is electrically connected to the CPO (200) by means of the first through hole (110).

Description

芯片封装结构及其光电设备Chip Packaging Structure and Its Optoelectronic Devices
相关申请的交叉引用Cross References to Related Applications
本申请基于申请号为202111532291.5、申请日为2021年12月15日的中国专利申请提出,并要求该中国专利申请的优先权,该中国专利申请的全部内容在此引入本申请作为参考。This application is based on a Chinese patent application with application number 202111532291.5 and a filing date of December 15, 2021, and claims the priority of this Chinese patent application. The entire content of this Chinese patent application is hereby incorporated by reference into this application.
技术领域technical field
本申请涉及但不限于集成芯片领域,尤其涉及一种芯片封装结构及其光电设备。The present application relates to but not limited to the field of integrated chips, and in particular relates to a chip packaging structure and an optoelectronic device thereof.
背景技术Background technique
串行器/解串行器(SERializer/DESerializer,SerDes)技术能够有效提高串行通信速率,在Switch芯片和路由器芯片得到了大量的应用。随着SerDes的速率不断提升,信号完整性和功耗之间的冲突愈发明显,光电共装光模块(Co-Packaged Optics,CPO)的出现很好地解决了这个问题。The serializer/deserializer (SERializer/DESerializer, SerDes) technology can effectively improve the serial communication rate, and has been widely used in Switch chips and router chips. As the rate of SerDes continues to increase, the conflict between signal integrity and power consumption becomes more and more obvious. The emergence of Co-Packaged Optics (CPO) solves this problem well.
在光电设备中,CPO通常与专用集成电路(Application Specific Integrated Circuit,ASIC)芯片封装成共装组件(Co-Packaged Assemble,CPA),但是,在目前CPA的封装结构中,ASIC芯片与CPO封装与CPA基板的同一侧,为了实现SerDes的传输,需要在CPA基板中设置电链路,这就导致电信号的传输链路较长,对CPO的直驱以及CPA的整体功耗都会带来不利的影响。In optoelectronic equipment, CPO is usually packaged with Application Specific Integrated Circuit (ASIC) chips into Co-Packaged Assemble (CPA). However, in the current packaging structure of CPA, ASIC chip and CPO packaging On the same side of the CPA substrate, in order to realize the transmission of SerDes, it is necessary to set up an electrical link in the CPA substrate, which leads to a longer transmission link of electrical signals, which will be unfavorable to the direct drive of the CPO and the overall power consumption of the CPA. Influence.
发明内容Contents of the invention
以下是对本文详细描述的主题的概述。本概述并非是为了限制权利要求的保护范围。The following is an overview of the topics described in detail in this article. This summary is not intended to limit the scope of the claims.
本申请实施例提供了一种芯片封装结构及其光电设备。Embodiments of the present application provide a chip packaging structure and an optoelectronic device thereof.
第一方面,本申请实施例提供了一种芯片封装结构,包括:共装组件CPA基板,所述CPA基板设置有第一通孔;光电共装光模块CPO,所述CPO封装于所述CPA基板的第一表面;ASIC芯片,所述ASIC芯片封装于所述CPA基板的第二表面,其中,所述第一表面位于所述第二表面的对侧,所述ASIC芯片通过所述第一通孔与所述CPO电连接。In the first aspect, the embodiment of the present application provides a chip packaging structure, including: a co-mounted component CPA substrate, the CPA substrate is provided with a first through hole; a photoelectric co-mounted optical module CPO, the CPO is packaged in the CPA The first surface of the substrate; the ASIC chip, the ASIC chip is packaged on the second surface of the CPA substrate, wherein the first surface is located on the opposite side of the second surface, and the ASIC chip passes through the first The vias are electrically connected to the CPO.
第二方面,本申请实施例提供了一种光电设备,包括如第一方面所述的芯片封装结构。In a second aspect, an embodiment of the present application provides an optoelectronic device, including the chip packaging structure as described in the first aspect.
本申请的其它特征和优点将在随后的说明书中阐述,并且,部分地从说明书中变得显而易见,或者通过实施本申请而了解。本申请的目的和其他优点可通过在说明书、权利要求书以及附图中所特别指出的结构来实现和获得。Additional features and advantages of the application will be set forth in the description which follows, and, in part, will be obvious from the description, or may be learned by practice of the application. The objectives and other advantages of the application will be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.
附图说明Description of drawings
附图用来提供对本申请技术方案的进一步理解,并且构成说明书的一部分,与本申请的实施例一起用于解释本申请的技术方案,并不构成对本申请技术方案的限制。The accompanying drawings are used to provide a further understanding of the technical solution of the present application, and constitute a part of the specification, and are used together with the embodiments of the present application to explain the technical solution of the present application, and do not constitute a limitation to the technical solution of the present application.
图1是现有的CPO与ASIC芯片封装于CPA基板同一侧的结构示意图;Figure 1 is a schematic structural diagram of the existing CPO and ASIC chips packaged on the same side of the CPA substrate;
图2是本申请一个实施例提供的芯片封装结构的剖面示意图;FIG. 2 is a schematic cross-sectional view of a chip packaging structure provided by an embodiment of the present application;
图3是本申请实施例一提供的芯片封装结构的剖面示意图;FIG. 3 is a schematic cross-sectional view of a chip packaging structure provided in Embodiment 1 of the present application;
图4是本申请实施例一提供的芯片封装结构的爆炸图;FIG. 4 is an exploded view of the chip package structure provided in Embodiment 1 of the present application;
图5是本申请实施例二提供的芯片封装结构的剖面示意图;FIG. 5 is a schematic cross-sectional view of a chip packaging structure provided in Embodiment 2 of the present application;
图6是本申请实施例二提供的芯片封装结构的爆炸图。FIG. 6 is an exploded view of the chip package structure provided by Embodiment 2 of the present application.
具体实施方式Detailed ways
为了使本申请的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本申请进行详细说明。应当理解,此处所描述的具体实施例仅用以解释本申请的技术方案,并不用于限定本申请的技术方案。In order to make the purpose, technical solution and advantages of the present application clearer, the present application will be described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the technical solution of the present application, and are not intended to limit the technical solution of the present application.
需要说明的是,虽然在装置示意图中进行了功能模块划分,在流程图中示出了逻辑顺序,但是在某些情况下,可以以不同于装置中的模块划分,或流程图中的顺序执行所示出或描述的步骤。说明书、权利要求书或上述附图中的术语“第一”、“第二”等是用于区别类似的对象,而不必用于描述特定的顺序或先后次序。It should be noted that although the functional modules are divided in the schematic diagram of the device, and the logical sequence is shown in the flowchart, in some cases, it can be executed in a different order than the module division in the device or the flowchart in the flowchart. steps shown or described. The terms "first", "second" and the like in the specification, claims or the above-mentioned drawings are used to distinguish similar objects, and not necessarily used to describe a specific order or sequential order.
本申请公开了一种芯片封装结构及其光电设备,芯片封装结构包括:CPA基板,所述CPA基板设置有第一通孔;CPO,所述CPO封装于所述CPA基板的第一表面;ASIC芯片,所述ASIC芯片封装于所述CPA基板的第二表面,其中,所述第一表面位于所述第二表面的对侧,所述ASIC芯片通过所述第一通孔与所述CPO电连接。根据本申请实施例提供的方案,ASIC芯片与CPO分别设置于CPA基板相互对立的两侧,从而使得ASIC芯片能够直接通过CPA基板的第一通孔与CPO电连接,有效减少ASIC芯片与CPO之间的传输链路的长度,提升CPA的电信号传输性能。The present application discloses a chip packaging structure and an optoelectronic device thereof. The chip packaging structure includes: a CPA substrate, the CPA substrate is provided with a first through hole; a CPO, the CPO is packaged on the first surface of the CPA substrate; an ASIC chip, the ASIC chip is packaged on the second surface of the CPA substrate, wherein the first surface is located on the opposite side of the second surface, and the ASIC chip is connected to the CPO circuit through the first through hole connect. According to the solution provided by the embodiment of the present application, the ASIC chip and the CPO are respectively arranged on opposite sides of the CPA substrate, so that the ASIC chip can be directly electrically connected to the CPO through the first through hole of the CPA substrate, effectively reducing the gap between the ASIC chip and the CPO. The length of the transmission link between them improves the electrical signal transmission performance of the CPA.
参考图1,图1是现有的CPO与ASIC芯片封装于CPA基板同一侧的结构示意图,在该封装结构中,ASIC芯片和CPO均封装于CPA基板的同侧,为了实现CPO与CPA基板之间的SerDes的传输,需要在CPA基板中设置电链路通道,电信号的传输链路较长,导致传输功耗大、信号完整性差和CPO的直驱实现难度大。Referring to Fig. 1, Fig. 1 is a schematic structural diagram of the existing CPO and ASIC chip packaged on the same side of the CPA substrate. In this package structure, both the ASIC chip and the CPO are packaged on the same side of the CPA substrate. The transmission of the SerDes between the two needs to set up an electrical link channel in the CPA substrate. The transmission link of the electrical signal is long, resulting in high transmission power consumption, poor signal integrity, and difficult implementation of CPO direct drive.
为了克服现有CPA封装结构的缺陷,下面结合附图,对本申请实施例进行阐述。In order to overcome the defects of the existing CPA packaging structure, the embodiments of the present application will be described below with reference to the accompanying drawings.
参照图2,本申请提供了一种芯片封装结构,包括:Referring to Figure 2, the present application provides a chip packaging structure, including:
CPA基板100,CPA基板100设置有第一通孔110; CPA substrate 100, the CPA substrate 100 is provided with a first through hole 110;
CPO200,CPO200封装于CPA基板100的第一表面;CPO200, CPO200 is packaged on the first surface of the CPA substrate 100;
ASIC芯片300,ASIC芯片300封装于CPA基板100的第二表面,其中,第一表面位于第二表面的对侧,ASIC芯片300通过第一通孔110与CPO200电连接。The ASIC chip 300 , the ASIC chip 300 is packaged on the second surface of the CPA substrate 100 , wherein the first surface is located on the opposite side of the second surface, and the ASIC chip 300 is electrically connected to the CPO 200 through the first through hole 110 .
值得注意的是,在本实施例中,CPO200与ASIC芯片300不再封装于CPA基板100的同侧,而是将ASIC芯片300与CPO200分别设置于CPA基板100相互对立的两侧,有效减少ASIC芯片与CPO200之间的传输链路的长度,提升CPA的电信号传输性能。It is worth noting that in this embodiment, the CPO200 and the ASIC chip 300 are no longer packaged on the same side of the CPA substrate 100, but the ASIC chip 300 and the CPO200 are respectively arranged on opposite sides of the CPA substrate 100, effectively reducing the ASIC The length of the transmission link between the chip and the CPO200 improves the electrical signal transmission performance of the CPA.
值得注意的是,本领域技术人员熟知如何通过第一通孔110实现CPO200与ASIC芯片300之间的电连接,例如在第一通孔110的内壁镀有导电材料,并且第一通孔110设置为过孔使得CPO焊球261与ASIC芯片焊球310分别焊接于过孔的两侧,还可以是分别连接于CPO200与ASIC芯片300的电链路贯穿于第一通孔110,在此不多做限定。It is worth noting that those skilled in the art know how to realize the electrical connection between the CPO200 and the ASIC chip 300 through the first through hole 110, for example, the inner wall of the first through hole 110 is plated with a conductive material, and the first through hole 110 is set For the via holes, the CPO solder balls 261 and the ASIC chip solder balls 310 are respectively welded on both sides of the via holes. It is also possible that the electrical links connected to the CPO 200 and the ASIC chip 300 respectively pass through the first through holes 110, not many here. Do limited.
需要说明的是,本申请实施例的ASIC芯片可以是交换(Switch)芯片,还可以是图像处理芯片(Graphics Processing Unit,GPU),在此不多做限定。It should be noted that the ASIC chip in the embodiment of the present application may be a Switch chip or a Graphics Processing Unit (GPU), which is not limited here.
下面通过两个实施例对芯片封装结构的各种实施例进行说明。Various embodiments of the chip packaging structure will be described below through two embodiments.
实施例一:Embodiment one:
为了方便本实施例的描述,本实施例以CPO200封装于CPA基板100的正面,ASIC芯片300封装于CPA基板100的反面为例进行描述,这并不是限制CPO200或ASIC芯片300封装于CPA基板100的具体位置,本实施例的技术方案同样适用于CPO200封装于CPA基板100的 反面,ASIC芯片300封装于CPA基板100的正面的情况。In order to facilitate the description of this embodiment, the present embodiment takes the CPO200 packaged on the front side of the CPA substrate 100 and the ASIC chip 300 packaged on the back side of the CPA substrate 100 as an example for description, which does not limit the CPO200 or the ASIC chip 300 packaged on the CPA substrate 100 The specific location, the technical solution of this embodiment is also applicable to the situation where the CPO 200 is packaged on the reverse side of the CPA substrate 100 and the ASIC chip 300 is packaged on the front side of the CPA substrate 100 .
参考图3和图4,CPO200通过CPO连接器210封装于CPA基板100,CPO连接器210的一侧封装有CPO200,CPO连接器210的另一侧与CPA基板100的第一通孔110相连接,可以理解的是,CPO200通过与CPO连接器210之间的可拆卸连接,方便损耗率比较高的CPO200的更换以及维修。当然,若出于实际需求,还可以如图5所示,CPO200直接焊接于CPA基板100,这并不会对CPO200与CPA基板100的连接方式造成限定。3 and 4, CPO200 is packaged on CPA substrate 100 through CPO connector 210, one side of CPO connector 210 is packaged with CPO200, and the other side of CPO connector 210 is connected to first through hole 110 of CPA substrate 100 , it can be understood that the detachable connection between the CPO200 and the CPO connector 210 facilitates the replacement and maintenance of the CPO200 with a relatively high loss rate. Of course, if it is necessary for actual needs, as shown in FIG. 5 , the CPO 200 may be directly welded to the CPA substrate 100 , which does not limit the connection method between the CPO 200 and the CPA substrate 100 .
值得注意的是,参考图3,CPO连接器210通常尺寸较大,因此,可以在CPO连接器210接口数量和布局空间允许的情况下封装多个CPO200,以实现CPO连接器210接口的最大化利用,例如如图3所示,在CPO连接器210以田字形布局4个CPO200,使得CPO200的容量密度更加紧凑,本领域技术人员有动机根据实际需求调整CPO200的具体数量和布局方式,在此不多作限定。It should be noted that, with reference to FIG. 3 , the CPO connector 210 is generally larger in size, therefore, multiple CPO 200 can be packaged under the condition that the number of CPO connector 210 interfaces and the layout space allow, so as to realize the maximization of the CPO connector 210 interface For example, as shown in FIG. 3 , four CPO200s are arranged in a square shape at the CPO connector 210 to make the capacity density of the CPO200 more compact. Those skilled in the art have the motivation to adjust the specific number and layout of the CPO200 according to actual needs. Here Not much to limit.
值得注意的是,CPO200的数量和连接位置,取决于与ASIC芯片300的SerDes信号传输路径,例如,在本实施例中,ASIC芯片300的SerDes被设计在芯片的中部,因此,为了实现CPO200与ASIC芯片300之间传输路径的最小化,需要将CPO200与ASIC芯片300的中部对齐,从而以第一通孔110实现SerDes的传输。当然,如图3所示,在CPO200的在这种情况下,可以将尺寸较大的CPO连接器210覆盖在CPA基板100,并且位于ASIC芯片300的对侧,再通过调整CPO200在CPA连接器210中的位置,实现CPO200与ASIC芯片300通过第一通孔110连接,采用全覆盖对齐的方式能够使得CPO200与ASIC芯片300之间布局更多的对齐点,ASIC芯片300可以设计SerDes的区域更大,能够提高ASIC芯片300的设计灵活性。It should be noted that the number and connection positions of CPO200 depend on the SerDes signal transmission path with ASIC chip 300. For example, in this embodiment, the SerDes of ASIC chip 300 is designed in the middle of the chip. Therefore, in order to realize the connection between CPO200 and To minimize the transmission path between the ASIC chips 300 , it is necessary to align the CPO 200 with the middle of the ASIC chip 300 , so as to realize the transmission of the SerDes through the first through hole 110 . Of course, as shown in FIG. 3 , in this case of CPO200, a larger CPO connector 210 can be covered on the CPA substrate 100 and positioned on the opposite side of the ASIC chip 300, and then the CPO200 can be connected to the CPA connector by adjusting the CPO200. 210, the CPO200 and the ASIC chip 300 are connected through the first through hole 110, and the full-coverage alignment method can make more alignment points between the CPO200 and the ASIC chip 300, and the ASIC chip 300 can design more SerDes areas. Large, can improve the design flexibility of the ASIC chip 300 .
值得注意的是,当ASIC芯片300的SerDes被设计在芯片的周围,也可以采用图6所示的方式布局CPO200,使得CPO200与ASIC芯片300的边缘区域对齐,能够实现CPO200与ASIC芯片300通过第一通孔110连接即可。当然,在采用CPO200与ASIC芯片300进行四周对齐的情况下,CPO200并非并列设置,因此也可以省去CPO连接器210,直接将CPO200焊接到CPA基板100中,在这种情况下,CPO200的尺寸不会受到CPO连接器210的限制,可以在CPA基板100尺寸允许的情况下,适当增加CPO200的设计尺寸,有利于提高CPO200的设计灵活性,降低CPO200的设计难度。It is worth noting that when the SerDes of the ASIC chip 300 is designed around the chip, the CPO200 can also be laid out in the manner shown in FIG. One through hole 110 is sufficient for connection. Of course, in the case of using CPO200 and ASIC chip 300 to align around, CPO200 is not arranged side by side, so CPO connector 210 can also be omitted, and CPO200 can be soldered directly to CPA substrate 100. In this case, the size of CPO200 Not limited by the CPO connector 210 , the design size of the CPO200 can be appropriately increased if the size of the CPA substrate 100 allows, which is beneficial to improving the design flexibility of the CPO200 and reducing the design difficulty of the CPO200 .
另外,参考图3和图4,为了实现CPO以及ASIC芯片的散热,本实施例的芯片封装结构还设置有第一散热器410和第二散热器420,第一散热器410设置于CPO200的上侧,第二散热器420设置于ASIC芯片300的下侧。In addition, with reference to FIG. 3 and FIG. 4 , in order to realize the heat dissipation of the CPO and the ASIC chip, the chip packaging structure of this embodiment is also provided with a first heat sink 410 and a second heat sink 420 , and the first heat sink 410 is arranged on the top of the CPO200 side, the second heat sink 420 is disposed on the lower side of the ASIC chip 300 .
需要说明的是,第一散热器410和第二散热器420可以是液冷散热器或者是风冷散热器;液冷散热器体积小,安装较方便,而风冷散热器体积大,需要考虑风道设计,相较于液冷散热器,安装较麻烦,可以理解的是,本领域技术人员可以根据实际散热空间大小选用第一散热器410或第二散热器的具体类型,还可以是沉浸式冷却,在此不多做限定。It should be noted that the first radiator 410 and the second radiator 420 can be liquid-cooled radiators or air-cooled radiators; liquid-cooled radiators are small in size and easy to install, while air-cooled Compared with the liquid cooling radiator, the air duct design is more troublesome to install. It can be understood that those skilled in the art can choose the specific type of the first radiator 410 or the second radiator according to the actual heat dissipation space, and can also be immersed Type cooling, not limited here.
值得注意的是,第一散热器410或第二散热器420的数量可以是任意,例如参考图4,4个CPO200通过一个第一散热器410实现散热,ASIC芯片300通过一个第二散热器420实现散热,本领域技术人员有动机根据实际需求选用第一散热器410或第二散热器420的具体数量,在此不多做限定。It should be noted that the number of the first heat sink 410 or the second heat sink 420 can be arbitrary. For example, referring to FIG. To achieve heat dissipation, those skilled in the art have the motivation to select the specific number of the first heat sink 410 or the second heat sink 420 according to actual needs, and there is no limitation here.
另外,参考图3和图4,本实施例的芯片封装结构还设置有线卡主板500,线卡主板500通过至少两个线卡连接器510与CPA基板100相连接,从而实现对ASIC芯片300的电源、时 钟的供给以及控制信号的连接。In addition, referring to FIG. 3 and FIG. 4 , the chip packaging structure of this embodiment is further provided with a line card main board 500, and the line card main board 500 is connected to the CPA substrate 100 through at least two line card connectors 510, thereby realizing the ASIC chip 300. Power supply, clock supply and connection of control signals.
参考图3和图4,CPA基板100的反面通过线卡连接器510与线卡主板500之间形成第一空间,第一空间能够为ASIC芯片300以及第二散热器420提供设置空间,值得注意的是,本实施例并不对线卡连接器510的具体高度做限制,本领域技术人员有动机根据散热器的体积调整线卡连接器510的具体高度,例如,参考图3和图4,如果考虑采用风冷散热器对ASIC芯片300进行散热,则需要考虑风道设计,选用高度较大的线卡连接器510进行适配,而本实施例使用液冷散热方式实现ASIC芯片300的散热,不需要考虑风道设计,可以适当降低线卡连接器510的高度,在此不多做限定。Referring to FIG. 3 and FIG. 4 , the reverse side of the CPA substrate 100 forms a first space between the line card connector 510 and the line card main board 500. The first space can provide a setting space for the ASIC chip 300 and the second heat sink 420. It is worth noting that It is worth noting that this embodiment does not limit the specific height of the line card connector 510. Those skilled in the art have the motivation to adjust the specific height of the line card connector 510 according to the volume of the heat sink. For example, referring to FIGS. 3 and 4, if Considering the use of an air-cooled heat sink to dissipate heat from the ASIC chip 300, it is necessary to consider the design of the air duct and select a line card connector 510 with a relatively high height for adaptation. However, in this embodiment, a liquid-cooled heat dissipation method is used to realize the heat dissipation of the ASIC chip 300. There is no need to consider the design of the air duct, and the height of the line card connector 510 can be appropriately reduced, which is not limited here.
实施例二:Embodiment two:
为了方便本实施例的描述,本实施例以CPO200封装于CPA基板100的反面,ASIC芯片300封装于CPA基板100的正面为例进行描述,这并不是限制CPO200或ASIC芯片300封装于CPA基板100的具体位置,本实施例的技术方案同样适用于CPO200封装于CPA基板100的正面,ASIC芯片300封装于CPA基板100的反面的情况。In order to facilitate the description of this embodiment, this embodiment takes CPO200 packaged on the reverse side of the CPA substrate 100 and the ASIC chip 300 packaged on the front side of the CPA substrate 100 as an example for description. This is not to limit the CPO200 or ASIC chip 300 packaged on the CPA substrate 100. The specific location, the technical solution of this embodiment is also applicable to the situation where the CPO 200 is packaged on the front side of the CPA substrate 100 and the ASIC chip 300 is packaged on the back side of the CPA substrate 100 .
本实施例的芯片封装结构与实施例一相类似,主要具有以下区别:The chip packaging structure of this embodiment is similar to that of Embodiment 1, mainly having the following differences:
参考图6,在本实施例中,ASIC芯片300的SerDes被设计在芯片的周围,为了实现CPO200与ASIC芯片300之间传输路径的最小化,将CPO200与ASIC芯片300的边缘区域对齐,使得CPO200与ASIC芯片300通过第一通孔110连接。Referring to FIG. 6, in this embodiment, the SerDes of the ASIC chip 300 is designed around the chip. In order to minimize the transmission path between the CPO200 and the ASIC chip 300, the CPO200 is aligned with the edge area of the ASIC chip 300, so that the CPO200 It is connected with the ASIC chip 300 through the first through hole 110 .
值得注意的是,当ASIC芯片300的SerDes设计在芯片的中部,也可以采用图4所示的方式布局CPO200,使得CPO200与ASIC芯片300的中部对齐,能够实现CPO200与ASIC芯片300通过第一通孔110连接即可。It is worth noting that when the SerDes of the ASIC chip 300 is designed in the middle of the chip, CPO200 can also be laid out in the manner shown in FIG. The hole 110 can be connected.
值得注意的是,参考图5,本实施例中的CPO200直接焊接于CPA基板100,可以理解的是,焊接的方式相较于图4所示的采用CPO连接器210实现CPO200与CPA基板100的封装的方式,能够减少插损以及降低成本,这并不会对CPO200与CPA基板100的连接方式造成限定,还可以如图3所示,CPO200通过CPO连接器210封装于CPA基板100,本领域技术人员可以根据实际情况进行选用。It is worth noting that referring to FIG. 5 , the CPO200 in this embodiment is directly welded to the CPA substrate 100. It can be understood that the welding method is compared with the CPO connector 210 shown in FIG. 4 to achieve the CPO200 and the CPA substrate 100 The packaging method can reduce insertion loss and cost, which does not limit the connection method between CPO200 and CPA substrate 100. As shown in Figure 3, CPO200 is packaged on CPA substrate 100 through CPO connector 210. Technicians can choose according to the actual situation.
值得注意的是,本实施例并不对CPO200的具体数量以及具体尺寸做限制,例如参考图6,本实施例在CPA基板100的四周均匀布局8个CPO200,以实现与ASIC芯片300的边缘区域对齐,本领域技术人员有动机根据实际需求调整CPO200的具体数量和布局方式,在此不多作限定。It is worth noting that this embodiment does not limit the specific number and specific size of CPO200. For example, referring to FIG. , those skilled in the art have the motivation to adjust the specific number and layout of the CPO 200 according to actual needs, which are not limited here.
参考图5,在本实施例中,CPO200包括EIC220、PIC230、尾纤240和光纤连接器250,EIC220与ASIC芯片300电连接,PIC230耦合有尾纤240,尾纤240远离所述PIC230的一端连接光纤连接器250。With reference to Fig. 5, in the present embodiment, CPO200 comprises EIC220, PIC230, pigtail 240 and optical fiber connector 250, and EIC220 is electrically connected with ASIC chip 300, and PIC230 is coupled with pigtail 240, and pigtail 240 is connected away from one end of described PIC230 Fiber optic connector 250.
值得注意的是,本实施例并不对EIC220与ASIC芯片300的连接方式,以及PIC230封装于CPO200的具体方式做限定,可以是如图5所示,EIC220通过EIC焊球221焊接于CPO基板260,CPO基板260通过CPO焊球261焊接于CPA基板100,由于ASIC芯片300通过ASIC芯片焊球310封装于CPA基板100,EIC焊球221通过CPO基板260中的第二通孔262以及CPA基板100中的第一通孔110,与ASIC芯片焊球310相互对齐并实现电连接,从而实现EIC220与ASIC芯片300的连接;PIC230通过PIC焊球231封装于CPO基板260,相互进行连接的具体焊球可以根据实际需求选取,本实施例仅描述芯片两两之间的连接关系,具体的焊球选取 不在本实施例的讨论范围内,后续不重复赘述。It is worth noting that this embodiment does not limit the connection method between EIC220 and ASIC chip 300, and the specific method of packaging PIC230 on CPO200. As shown in FIG. 5, EIC220 is soldered to CPO substrate 260 through EIC solder balls 221. The CPO substrate 260 is soldered to the CPA substrate 100 through the CPO solder balls 261. Since the ASIC chip 300 is packaged on the CPA substrate 100 through the ASIC chip solder balls 310, the EIC solder balls 221 pass through the second through hole 262 in the CPO substrate 260 and the CPA substrate 100. The first through hole 110 of the ASIC chip is aligned and electrically connected with the ASIC chip solder ball 310, thereby realizing the connection between the EIC220 and the ASIC chip 300; the PIC230 is packaged on the CPO substrate 260 through the PIC solder ball 231, and the specific solder balls connected to each other can be Selection is based on actual needs. This embodiment only describes the connection relationship between two chips. The specific selection of solder balls is not within the scope of this embodiment, and will not be repeated in the future.
值得注意的是,由于本实施例的CPO200封装于CPA基板100的反面,4个线卡连接器510间隔设置于线卡主板500的四周,每两个线卡连接器510之间形成通道,方便CPO200尾纤240的扇出。It is worth noting that since the CPO 200 of this embodiment is packaged on the reverse side of the CPA substrate 100, four line card connectors 510 are arranged at intervals around the line card main board 500, and channels are formed between every two line card connectors 510, which is convenient Fan-out of CPO200 pigtail 240.
值得注意的是,本实施例并不对线卡连接器510的具体数量做限制,本领域技术人员有动机根据实际需求进行调整。It should be noted that this embodiment does not limit the specific number of line card connectors 510 , and those skilled in the art are motivated to make adjustments according to actual needs.
除了上述区别以外,本实施例的芯片封装结构的其他部分可以参考实施例一的描述,为了叙述简便在此不重复赘述。In addition to the above differences, other parts of the chip package structure of this embodiment can refer to the description of Embodiment 1, and for the sake of brevity, details are not repeated here.
另外,本申请还提供了一种光电设备(图中未示出),包括如上实施例任一所述的芯片封装结构。In addition, the present application also provides an optoelectronic device (not shown in the figure), including the chip packaging structure described in any one of the above embodiments.
需要说明的是,本实施例的光电设备可以是交换机、路由器、人工智能(Artificial Intelligence,AI)设备、计算快速链路(Compute EXpress Link,CXL)产品等,涉及光电转换并且利用SerDes技术实现高速传输的设备即可。It should be noted that the optoelectronic device in this embodiment may be a switch, a router, an artificial intelligence (AI) device, a Compute Express Link (CXL) product, etc., which involve photoelectric conversion and use SerDes technology to achieve high-speed The transfer device is fine.
需要说明的是,将上述实施例一至实施例二中任意一种芯片封装结构应用至光电设备之后,由于ASIC芯片300与CPO200分别设置于CPA基板100相互对立的两侧,从而使得ASIC芯片300能够直接通过CPA基板100的第一通孔110与CPO200电连接,有效减少ASIC芯片300与CPO200之间的传输链路的长度,提升CPA的电信号传输性能,从而使得光电设备的计算速度或者交换速度有了显著的提升。It should be noted that after applying any one of the chip packaging structures in the first to second embodiments above to the optoelectronic device, since the ASIC chip 300 and the CPO 200 are respectively arranged on opposite sides of the CPA substrate 100, the ASIC chip 300 can It is directly electrically connected to the CPO200 through the first through hole 110 of the CPA substrate 100, effectively reducing the length of the transmission link between the ASIC chip 300 and the CPO200, and improving the electrical signal transmission performance of the CPA, thereby making the computing speed or switching speed of the optoelectronic device There has been a significant improvement.
以上是对本申请的较佳实施进行了具体说明,但本申请并不局限于上述实施方式,熟悉本领域的技术人员在不违背本申请本质的前提下还可作出种种的等同变形或替换,这些等同的变形或替换均包含在本申请权利要求所限定的范围内。The above is a specific description of the preferred implementation of the application, but the application is not limited to the above-mentioned implementation, and those skilled in the art can also make various equivalent deformations or replacements without violating the essence of the application. Equivalent modifications or replacements are all within the scope defined by the claims of the present application.

Claims (10)

  1. 一种芯片封装结构,包括:A chip packaging structure, comprising:
    共装组件CPA基板,所述CPA基板设置有第一通孔;A co-mounted component CPA substrate, the CPA substrate is provided with a first through hole;
    光电共装光模块CPO,所述CPO封装于所述CPA基板的第一表面;A photoelectric co-mounted optical module CPO, the CPO is packaged on the first surface of the CPA substrate;
    专用集成电路ASIC芯片,所述ASIC芯片封装于所述CPA基板的第二表面,其中,所述第一表面位于所述第二表面的对侧,所述ASIC芯片通过所述第一通孔与所述CPO电连接。An application specific integrated circuit ASIC chip, the ASIC chip is packaged on the second surface of the CPA substrate, wherein the first surface is located on the opposite side of the second surface, and the ASIC chip is connected to the second surface through the first through hole The CPO is electrically connected.
  2. 根据权利要求1所述的芯片封装结构,还包括:The chip packaging structure according to claim 1, further comprising:
    CPO连接器,所述CPO连接器的一侧封装有所述CPO,所述CPO连接器的另一侧与所述第一通孔相连接。A CPO connector, wherein the CPO is encapsulated on one side of the CPO connector, and the other side of the CPO connector is connected to the first through hole.
  3. 根据权利要求2所述的芯片封装结构,其中,The chip packaging structure according to claim 2, wherein,
    所述CPO连接器封装有至少两个所述CPO。The CPO connector encapsulates at least two of the CPOs.
  4. 根据权利要求1所述的芯片封装结构,还包括:The chip packaging structure according to claim 1, further comprising:
    第一散热器,所述第一散热器设置于所述CPO远离所述CPA基板的一侧。A first heat sink, the first heat sink is disposed on a side of the CPO away from the CPA substrate.
  5. 根据权利要求4所述的芯片封装结构,还包括:The chip packaging structure according to claim 4, further comprising:
    第二散热器,所述第二散热器设置于所述ASIC芯片远离所述CPA基板的一侧。A second heat sink, the second heat sink is disposed on a side of the ASIC chip away from the CPA substrate.
  6. 根据权利要求5所述的芯片封装结构,其中,The chip packaging structure according to claim 5, wherein,
    所述第一散热器和所述第二散热器为风冷散热器或液冷散热器。The first radiator and the second radiator are air-cooled radiators or liquid-cooled radiators.
  7. 根据权利要求1所述的芯片封装结构,还包括:The chip packaging structure according to claim 1, further comprising:
    线卡主板,所述线卡主板通过至少两个线卡连接器与所述CPA基板相连接。A line card main board, where the line card main board is connected to the CPA substrate through at least two line card connectors.
  8. 根据权利要求1所述的芯片封装结构,其中,所述CPO包括电芯片EIC,所述EIC与所述ASIC芯片电连接。The chip packaging structure according to claim 1, wherein the CPO comprises an electrical chip (EIC), and the EIC is electrically connected to the ASIC chip.
  9. 根据权利要求1所述的芯片封装结构,其中,所述CPO包括光芯片PIC,所述PIC耦合有尾纤,所述尾纤远离所述PIC的一端连接有光纤连接器。The chip packaging structure according to claim 1, wherein the CPO comprises an optical chip PIC, the PIC is coupled with a pigtail, and an end of the pigtail far away from the PIC is connected with an optical fiber connector.
  10. 一种光电设备,包括如权利要求1至9任意一项所述的芯片封装结构。An optoelectronic device, comprising the chip package structure according to any one of claims 1-9.
PCT/CN2022/124162 2021-12-15 2022-10-09 Chip packaging structure and photoelectric apparatus thereof WO2023109266A1 (en)

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