WO2023105593A1 - 光回路素子、集積型光デバイスおよび集積型光デバイスの製造方法 - Google Patents

光回路素子、集積型光デバイスおよび集積型光デバイスの製造方法 Download PDF

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Publication number
WO2023105593A1
WO2023105593A1 PCT/JP2021/044780 JP2021044780W WO2023105593A1 WO 2023105593 A1 WO2023105593 A1 WO 2023105593A1 JP 2021044780 W JP2021044780 W JP 2021044780W WO 2023105593 A1 WO2023105593 A1 WO 2023105593A1
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WO
WIPO (PCT)
Prior art keywords
optical
signal light
circuit element
integrated
optical device
Prior art date
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Ceased
Application number
PCT/JP2021/044780
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English (en)
French (fr)
Japanese (ja)
Inventor
優生 倉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
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Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to US18/714,001 priority Critical patent/US20250030484A1/en
Priority to JP2023565700A priority patent/JPWO2023105593A1/ja
Priority to PCT/JP2021/044780 priority patent/WO2023105593A1/ja
Publication of WO2023105593A1 publication Critical patent/WO2023105593A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04B—TRANSMISSION
    • H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
    • H04B10/50—Transmitters
    • H04B10/516—Details of coding or modulation
    • H04B10/54—Intensity modulation
    • H04B10/541—Digital intensity or amplitude modulation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/124—Geodesic lenses or integrated gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/125—Bends, branchings or intersections
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/27—Optical coupling means with polarisation selective and adjusting means
    • G02B6/2706—Optical coupling means with polarisation selective and adjusting means as bulk elements, i.e. free space arrangements external to a light guide, e.g. polarising beam splitters
    • G02B6/2713—Optical coupling means with polarisation selective and adjusting means as bulk elements, i.e. free space arrangements external to a light guide, e.g. polarising beam splitters cascade of polarisation selective or adjusting operations
    • G02B6/272—Optical coupling means with polarisation selective and adjusting means as bulk elements, i.e. free space arrangements external to a light guide, e.g. polarising beam splitters cascade of polarisation selective or adjusting operations comprising polarisation means for beam splitting and combining
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4286—Optical modules with optical power monitoring
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/27—Optical coupling means with polarisation selective and adjusting means
    • G02B6/2753—Optical coupling means with polarisation selective and adjusting means characterised by their function or use, i.e. of the complete device
    • G02B6/2766—Manipulating the plane of polarisation from one input polarisation to another output polarisation, e.g. polarisation rotators, linear to circular polarisation converters

Definitions

  • the present disclosure relates to an optical circuit element, an integrated optical device in which an optical circuit element and an optical functional element are directly connected, and a method of manufacturing an integrated optical device.
  • PLC PLC
  • Si-Photonics Si-Photonics
  • PLC is a waveguide type optical device with excellent features such as low loss, high reliability, and high degree of design freedom.
  • a PLC with integrated functions is installed.
  • SiP is an optical device that has a high degree of freedom in design, although it is not as good as PLC in terms of low loss, and can realize even smaller optical circuits with a small waveguide bending radius.
  • transmission devices in optical fiber transmission include Photo Diodes (hereinafter referred to as PDs) that convert light and electrical signals, Laser Diodes (hereinafter referred to as LDs). ), or an optical functional element such as an optical modulator is also mounted.
  • PDs Photo Diodes
  • LDs Laser Diodes
  • an optical functional element such as an optical modulator is also mounted.
  • optical waveguides such as PLCs that perform optical signal processing and optical devices such as PDs that perform high-speed photoelectric conversion made of indium phosphide (InP) materials are used. There is a need for integrated, highly functional integrated optical devices.
  • An integrated optical device having such a form for example, integrates a phase modulator on an InP chip, a polarization rotator and a polarization beam combiner on a PLC, and optically couples the chips through lenses. It is configured.
  • the PLC is used as the polarization mux chip, so the mounting area is small compared to the conventional method of constructing polarization synthesis with a spatial optical system. , has the advantage of simplifying optical axis alignment.
  • Such a form of optical coupling by combining an optical circuit element (for example, PLC) and an optical functional element (for example, a PD using an InP-based material) is expected to reduce the size of the device and increase the degree of freedom in designing the optical circuit. superior in terms of Therefore, in order to expand the communication capacity, development of integrated optical devices such as a PD having a waveguide structure suitable for broadening the bandwidth and an optical phase modulator having a high-speed phase modulation function is underway. However, in recent years, there has been an increasing demand for further miniaturization. etc.) are strongly desired.
  • the interface of the connecting portion is filled with a UV curing adhesive, the adhesive is cured by UV irradiation, and the optical fiber and the PLC are connected by adhesion.
  • a UV curing adhesive the adhesive is cured by UV irradiation, and the optical fiber and the PLC are connected by adhesion.
  • FIG. 1 is a diagram conceptually showing the structure of a prior art integrated optical device 10 in which an optical circuit element 11 and an optical functional element 12 are directly connected.
  • the optical circuit element is a PLC used as a polarization Mux chip
  • the optical functional element is an InP chip that performs phase modulation.
  • an integrated optical device 10 includes an optical circuit element 11 that serves as a platform for inputting and outputting signal light, and an optical functional element 12 that modulates and amplifies signals (here, phase modulation). , and the optical circuit element 11 and the optical functional element 12 are optically coupled by direct connection.
  • the optical circuit element 11 combines a polarization rotator 13 that rotates the polarization of part of the signal light, and the signal light that has been polarization-rotated by the polarization rotator 13 and the signal light that has not been polarization-rotated.
  • a polarization beam combiner 14 is further included, and the optical functional device 12 further includes a phase modulator 15 for phase-modulating the input signal light.
  • the optical circuit element 11 and the optical functional element 12 are directly connected after being aligned so as not to cause optical loss, as described above.
  • a large optical loss can occur due to mode field mismatch.
  • SOA semiconductor optical amplifier
  • FIG. 2 is a diagram conceptually showing the structure of an integrated optical device 20 that compensates for optical loss due to mode field mismatch at the connection portion according to the prior art.
  • the optical circuit element is a PLC used as a polarization Mux chip
  • the optical functional element is an InP-based chip that performs phase modulation.
  • the integrated optical device 20 further includes an optical amplifier 21 that amplifies the signal light input from the optical functional element 12 to the optical circuit element 11 through the connecting portion.
  • the optical amplifier 21 performs optical amplification to compensate for the optical loss due to the mode field mismatch at the connecting portion, and for example, the SOA described above can be applied.
  • the integrated optical device having such a configuration can maintain a high signal light output even though it is an integrated optical device in which the optical circuit element and the optical functional element are directly connected with the optical loss caused by the connecting portion. It becomes possible.
  • the optical amplifier installed on the optical circuit element becomes a loss medium when it is not performing optical amplification due to current application, so it can be a factor of attenuation of the output light. As a result, it may be difficult to adjust the position by the optical output monitor in the above-described alignment in the direct connection.
  • the optical amplifier is an SOA
  • a through port is provided in the vicinity of the input waveguide connected to the SOA, and the output light from the through port is monitored. Since the alignment is not performed while monitoring the optical coupling at , there is a problem that optical loss occurs due to positional deviation during sliding.
  • the present disclosure has been made in view of the problems described above, and aims to integrate an optical circuit element equipped with an optical amplifier and an optical functional element such as an optical modulator to: Provided is an integrated optical device capable of easily fabricating waveguide connections and realizing highly accurate optical coupling.
  • the present disclosure provides an integrated optical device in which an optical circuit element and an optical functional element are directly connected to each other, in which signal light input from the optical functional element to the optical circuit element through a connecting portion is An optical amplifier for amplification, and a connection tap port installed between the optical amplifier and the connection section for branching a part of the signal light input from the optical functional element through the connection section and outputting it to the outside, and connecting
  • the optical tap port includes an input port for receiving the signal light input from the optical functional element to the optical circuit element through the connecting portion, a demultiplexer for branching part of the signal light, and a part of the branched signal light.
  • an integrated optical device comprising a first output port for outputting to the outside and a second output port for outputting part of the branched signal light to an optical amplifier.
  • FIG. 1 is a diagram conceptually showing the structure of a prior art integrated optical device in which an optical circuit element and an optical functional element are directly connected;
  • FIG. 1 conceptually shows the structure of an integrated optical device that compensates for optical loss due to mode field mismatch at a connection according to the prior art;
  • FIG. 1 is a diagram conceptually showing the structure of an integrated optical device in which an optical circuit element and an optical functional element are directly connected according to the present disclosure;
  • FIG. 4 is a flow chart illustrating a method of manufacturing an integrated optical device according to the present disclosure;
  • 1 is a diagram conceptually showing the structure of an integrated optical device in which an optical circuit element and an optical functional element are directly connected according to the present disclosure;
  • FIG. 3 is a diagram conceptually showing the structure of an integrated optical device 30 in which the optical circuit element 11 and the optical functional element 12 are directly connected according to the present disclosure.
  • the optical circuit element is a PLC used as a polarization Mux chip
  • the optical functional element is an InP-based chip that performs phase modulation.
  • the integrated optical device 30 according to the present disclosure includes an optical circuit element 11 serving as a platform for signal light input/output, and signal modulation, amplification, etc. (here, , phase modulation), and the waveguide formed in the optical circuit element 11 and the waveguide formed in the optical functional element 12 are optically coupled by direct connection.
  • the optical circuit element 11 includes a polarization rotator 13 that rotates the polarization of part of the signal light, and multiplexes the signal light whose polarization has been rotated by the polarization rotator 13 and the signal light whose polarization has not been rotated. and a polarization beam combiner 14, an optical amplifier 21 installed on a substrate using an InP-based material, and performing optical amplification of signal light input from the optical functional element 12 to the optical circuit element 11 through the connection portion, and connection and the optical amplifier 21, and for outputting part of the signal light input from the optical functional element 12 to the optical circuit element 11 through the connecting portion to the outside of the integrated optical device 30; , further includes.
  • the connection tap port 31 includes an input port 311 for inputting the signal light from the optical functional element 12 through a connecting portion, a demultiplexer 312 for branching a part of the input signal light, and a branched signal light. It includes an output port 313 for outputting part of the signal light to the outside, and an output port 314 for outputting part of the branched signal light to the optical amplifier 21 .
  • the demultiplexer 312 can be, for example, a directional coupler, a Y branch, a multimode interferometer, or a Variable Optical Attenuator (hereinafter referred to as VOA).
  • VOA Variable Optical Attenuator
  • the optical circuit element 11 may be, for example, a PLC in which a waveguide is formed on a Si substrate.
  • the optical amplifier 21 may be, for example, an SOA formed on a substrate to which an InP-based material is applied.
  • the optical amplifier 21 is preferably fixed inside a groove provided so that the height of the waveguide of the optical circuit element 11 and that of its own waveguide are the same.
  • the integrated optical device 30 configured in this way according to the present disclosure can use part of the signal light output from the connection tap port 31 to monitor for alignment.
  • the connection tap port 31 is configured to tap a portion of the signal light before inputting it to the optical amplifier 21 . Therefore, it is not necessary to pass the optical amplifier 21 in output monitoring of signal light for alignment. Therefore, since the above-described optical loss due to the optical amplifier 21 does not occur, it is possible to perform alignment with higher precision than in the prior art.
  • FIG. 4 is a flowchart illustrating a method 40 of manufacturing an integrated optical device 30 according to the present disclosure.
  • the manufacturing method 40 of the integrated optical device 30 according to the present disclosure includes preparing the optical circuit element 11 and the optical functional element 12 (corresponding to step 41 in FIG. 4), and fixing the optical functional element 12 (step 42 in FIG. 4). (corresponding to step 42 in FIG. 4), adjusting 43 (corresponding to step 43 in FIG. 4) so that the end face of the waveguide of the optical circuit element 11 and the end face of the waveguide of the optical functional device 12 are parallel to each other, and the optical circuit The optical circuit element 11 and the optical functional element 12 are aligned while inputting the signal light from the element 11 and monitoring the output of the signal light output from the connection tap port (corresponding to step 44 in FIG. 4). (corresponding to step 45 in FIG. 4).
  • a method for connecting the optical circuit element 11 and the optical functional element 12 can be, for example, adhesion using a UV curable resin.
  • the optical amplifier 21 does not need to be operated because the output of the signal light output from the connection tap port is monitored in the alignment of the optical circuit element 11 and the optical functional element 12 . Therefore, there is no need to probe the optical amplifier 21 for alignment, and the work process for alignment can be simplified and shortened. In particular, this effect is great for integrated optical devices including multiple optical amplifiers.
  • the signal light output from the output port 313 of the connection tap port 31 is output to the side surface on the long side of the integrated optical device 30.
  • the integrated optical device according to the present disclosure may further include a mechanism for changing the optical path of the signal light output from the connection tap port 31 in the direction perpendicular to the substrate surface.
  • FIG. 5 is a diagram conceptually showing the structure of an integrated optical device 50 in which the optical circuit element 11 and the optical functional element 12 are directly connected according to the present disclosure.
  • the integrated optical device 50 converts the optical path of the signal light branched from the connection tap port 31 and used for alignment onto the optical circuit element 11 of the integrated optical device 30 in the direction perpendicular to the substrate surface.
  • the optical path changer 51 can be, for example, a grating coupler or a mirror. Moreover, the direction of conversion may be the top side (the side where the optical amplifier 21 or the like is installed) or the back side (the side where the optical amplifier 21 or the like is not installed) with respect to the substrate surface. .
  • the integrated optical device 50 having such a configuration is configured to output the signal light for alignment branched at the connection tap port 31 in a direction perpendicular to the substrate surface. Therefore, since there is no geometric interference between the measuring device and the optical fiber for monitoring the output signal light and the fixing jig, alignment can be performed more easily.
  • the compensation effect of the signal light due to the operation of the optical amplifier 21 was also verified.
  • a signal light having a wavelength of 1.55 ⁇ m and an optical intensity of 0 dBm was input to the directly connected integrated optical device 50 to the optical circuit element 11, and the signal output via the optical functional element 12 and the optical amplifier 21 was obtained.
  • Light intensity evaluation was performed.
  • the optical amplifier 21 was operated with a current of 300 mA applied.
  • an integrated optical device without the optical amplifier 21 was also prepared, and the intensity of output light was similarly evaluated. Note that SOA is applied to the optical amplifier 21 here as well.
  • the intensity of the output light was ⁇ 18 dBm in the integrated optical device without the SOA, whereas the intensity of the output light was ⁇ 6 dBm in the integrated optical device 50 without the SOA. It showed higher intensity than the integrated optical device. That is, the integrated optical device 50 according to the present disclosure is an integrated optical device in which dissimilar materials are directly bonded, but optical loss due to differences in refractive index and shape is compensated for, and signal light having high intensity can be output. was taken.
  • the integrated optical device according to the present disclosure monitors the signal light through the connection tap port 31 without going through the optical amplifier 21. It is configured for alignment. By monitoring part of the signal light branched by the connection tap port 31, optical loss caused by the optical amplifier 21 and complicated work during alignment can be suppressed, and alignment of the connection portion can be performed with high accuracy. It becomes possible to carry out easily.
  • the integrated optical device according to the present disclosure is an integrated optical device by direct connection that is advantageous for miniaturization, and it is possible to perform alignment of the connecting portion with high precision and simplicity compared to the conventional technology. Therefore, it is expected to be applied to optical fiber transmission equipment with increased communication capacity.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electromagnetism (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Signal Processing (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Optical Integrated Circuits (AREA)
PCT/JP2021/044780 2021-12-06 2021-12-06 光回路素子、集積型光デバイスおよび集積型光デバイスの製造方法 Ceased WO2023105593A1 (ja)

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Application Number Priority Date Filing Date Title
US18/714,001 US20250030484A1 (en) 2021-12-06 2021-12-06 Optical Circuit Device, Integrated Optical Device And Method For Manufacturing Of Integrated Optical Device
JP2023565700A JPWO2023105593A1 (https=) 2021-12-06 2021-12-06
PCT/JP2021/044780 WO2023105593A1 (ja) 2021-12-06 2021-12-06 光回路素子、集積型光デバイスおよび集積型光デバイスの製造方法

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PCT/JP2021/044780 WO2023105593A1 (ja) 2021-12-06 2021-12-06 光回路素子、集積型光デバイスおよび集積型光デバイスの製造方法

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Cited By (2)

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WO2025145552A1 (zh) * 2024-01-02 2025-07-10 武汉光迅科技股份有限公司 一种玻璃与硅光的混合集成结构及其制作方法
JP7785884B1 (ja) 2024-09-10 2025-12-15 Ｎｔｔイノベーティブデバイス株式会社 光変調器およびその製造方法

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JP2001013342A (ja) * 1999-07-01 2001-01-19 Nippon Telegr & Teleph Corp <Ntt> 光半導体装置の作製方法、光半導体、導波路基板、および光半導体装置
EP2597736A1 (en) * 2011-11-22 2013-05-29 Alcatel Lucent Hybrid Laser
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WO2025145552A1 (zh) * 2024-01-02 2025-07-10 武汉光迅科技股份有限公司 一种玻璃与硅光的混合集成结构及其制作方法
JP7785884B1 (ja) 2024-09-10 2025-12-15 Ｎｔｔイノベーティブデバイス株式会社 光変調器およびその製造方法
WO2026058907A1 (ja) * 2024-09-10 2026-03-19 Ｎｔｔイノベーティブデバイス株式会社 光変調器およびその製造方法
JP2026051664A (ja) * 2024-09-10 2026-03-23 Ｎｔｔイノベーティブデバイス株式会社 光変調器およびその製造方法

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