WO2023098822A1 - High-reliability low-inductance power module packaging structure - Google Patents
High-reliability low-inductance power module packaging structure Download PDFInfo
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- WO2023098822A1 WO2023098822A1 PCT/CN2022/135923 CN2022135923W WO2023098822A1 WO 2023098822 A1 WO2023098822 A1 WO 2023098822A1 CN 2022135923 W CN2022135923 W CN 2022135923W WO 2023098822 A1 WO2023098822 A1 WO 2023098822A1
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- 238000004806 packaging method and process Methods 0.000 title claims abstract description 46
- 239000000758 substrate Substances 0.000 claims abstract description 11
- 239000003990 capacitor Substances 0.000 claims description 21
- 238000001816 cooling Methods 0.000 claims description 4
- 238000003466 welding Methods 0.000 claims description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 3
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 3
- 238000010521 absorption reaction Methods 0.000 abstract description 6
- 238000005476 soldering Methods 0.000 abstract 1
- 230000003071 parasitic effect Effects 0.000 description 14
- 239000003985 ceramic capacitor Substances 0.000 description 10
- 239000004065 semiconductor Substances 0.000 description 10
- 238000010586 diagram Methods 0.000 description 9
- 238000005538 encapsulation Methods 0.000 description 8
- 239000000306 component Substances 0.000 description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 230000005669 field effect Effects 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000004382 potting Methods 0.000 description 2
- 238000010248 power generation Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
- H01L23/3677—Wire-like or pin-like cooling fins or heat sinks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
- H01L23/3672—Foil-like cooling fins or heat sinks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/528—Geometry or layout of the interconnection structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/528—Geometry or layout of the interconnection structure
- H01L23/5283—Cross-sectional geometry
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/528—Geometry or layout of the interconnection structure
- H01L23/5286—Arrangements of power or ground buses
Definitions
- the present application relates to a packaging structure of a power module, in particular to a packaging structure of a power module with high reliability and low inductance.
- the power semiconductor device is the core component of the power module, which is responsible for the turn-on and turn-off of the circuit.
- Figure 1 is a level three-phase full-bridge motor driver circuit, in which Q1 ⁇ Q6 are power semiconductor devices.
- Commonly used power semiconductors include insulated gate bipolar transistors (IGBTs), silicon field effect transistors (Si MOSFETs) and silicon carbide field effect transistors. Transistors (SiC MOSFETs).
- IGBTs insulated gate bipolar transistors
- Si MOSFETs silicon field effect transistors
- SiC MOSFETs Transistors
- the current change of the power semiconductor device when the current is turned off will generate a voltage spike on the parasitic inductance of the circuit. The voltage spike may break down the power semiconductor device or cause electromagnetic interference so that the circuit cannot work normally.
- the energy stored in the parasitic inductance will be dissipated in the form of heat, reducing the efficiency of the circuit. Therefore, reducing the parasitic inductance of the circuit has become one
- One of the main purposes of the present application is to provide a power module packaging structure to solve the above problems.
- a power module packaging structure is characterized in that it includes: a packaging case including a first surface and a second surface, wherein the first surface and the The second surface is respectively located on the upper side and the lower side of the packaging casing; a substrate is packaged in the packaging casing and is parallel to the first surface and the second surface, wherein the substrate is provided with at least A power element; and a plurality of absorbing terminals arranged on the first surface and respectively connected to a first power supply end and a second power supply end of the at least one power element in the packaging case; wherein the The plurality of absorbing terminals are coupled to a absorbing circuit by welding or bonding, and the absorbing circuit is used to eliminate an internal inductance generated by connecting the plurality of absorbing terminals to the at least one power element and the first power supply terminal And the second power supply terminal is connected to an external inductance generated by an external power supply. .
- Figure 1 is a level three-phase full-bridge motor driver circuit
- FIG. 2 is a schematic diagram of a plurality of parasitic inductances of the level three-phase full-bridge motor driver circuit 1 .
- FIG. 3 is a power module packaging structure and an equivalent circuit diagram of a power module according to an embodiment of the present application.
- FIG. 4 is a power module packaging structure and an equivalent circuit diagram of a power module according to another embodiment of the present application.
- FIG. 5 is a cross-sectional view of a package structure of a power module according to an embodiment of the present application.
- FIG. 6 is a cross-sectional view of a package structure of a power module according to an embodiment of the present application.
- FIG. 7 is a cross-sectional view of a package structure of a power module according to another embodiment of the present application.
- FIG. 2 is a schematic diagram of a plurality of parasitic inductances of the level three-phase full-bridge motor driver circuit 1 .
- the level three-phase full-bridge motor driver circuit 1 includes a power module 10 , a DC support capacitor 12 , a battery 14 and a motor 16 .
- the operation of the level three-phase full-bridge motor driver circuit 1 is a common technology, and will not be repeated here.
- the multiple parasitic inductances of the level three-phase full-bridge motor driver circuit 1 include: an internal inductance Lc of the DC support capacitor 12, an external inductance Lbus generated by connecting the power module 10 to the DC support capacitor 12 and the battery 14, and the power module 10 An internal inductance Li generated by the package.
- the power module 10 includes power semiconductor devices Q1 - Q6 and is packaged in a first packaging case, and the power semiconductor devices Q1 - Q6 are connected to a copper bar outside the first packaging case to generate internal inductance Li.
- the power semiconductor devices Q1 ⁇ Q6 are turned on or off, the current change will generate a voltage spike on the internal inductance Li, and the voltage spike may break down the power semiconductor devices Q1 ⁇ Q6 so that the level three-phase full-bridge motor driver circuit 1 cannot normal work.
- the external inductance Lbus and the capacitor internal inductance Lc may also generate voltage spikes so that the level three-phase full-bridge motor driver circuit 1 cannot work normally.
- the energy stored in the multiple parasitic inductances will be consumed in the form of heat, which reduces the efficiency of the level three-phase full-bridge motor driver circuit 1 .
- a first snubber circuit can be arranged inside the first packaging case, which is used to eliminate the gap between the first packaging case. The impact of the external inductance Lbus, the internal inductance Lc of the capacitor, and the internal inductance Li in the first packaging shell on the level three-phase full-bridge motor driver circuit 1 .
- the first absorption circuit can be a decoupling ceramic capacitor, which couples the power semiconductor devices Q1-Q6 and the DC support capacitor 12 and the battery 14 outside the first packaging case to eliminate the The external inductance Lbus of the capacitor, the internal inductance Lc of the capacitor, and the internal inductance Li in the first packaging shell have an impact on the level three-phase full-bridge motor driver circuit 1 .
- the decoupling ceramic capacitor is packaged in the first package by potting, the ceramic material of the decoupling ceramic capacitor and the cured epoxy resin used in the potting process may be due to the internal temperature in the first package being too high. high risk of reliability.
- the decoupling ceramic capacitors are packaged in the first packaging case, the capacitance value of the decoupling ceramic capacitors cannot be adjusted according to the actual circuit operation, resulting in a matching problem.
- FIG. 3 is a power module packaging structure 30 and an equivalent circuit diagram 32 of the power module 10 according to an embodiment of the present application.
- the power module package structure 30 includes a second package case 302 , a substrate, a plurality of sink terminals 304 , a signal terminal 306 and a plurality of power terminals 308 .
- the second packaging case 302 includes a first surface and a second surface, wherein the first surface and the second surface are respectively located on the upper side and the lower side of the second packaging case 302 .
- At least one power element is disposed on the substrate and packaged in the second packaging case 302 .
- the substrate can be parallel to the first surface and the second surface.
- a plurality of absorbing terminals 304 are disposed on the first surface of the second package case 302 , and are coupled to the first power terminal and the second power terminal of at least one power element in the second package case 302 by copper bars.
- the signal terminals 306 and the plurality of power terminals 308 are disposed outside the second packaging case 302 , in other words, they are not limited to be disposed on the upper side, the lower side or the surroundings of the second packaging case 302 .
- the signal terminal 306 is coupled to a signal end of at least one power element in the second packaging case 302 by using a copper bar, and a plurality of power terminals 308 are coupled to the first terminal of at least one power element in the second packaging case 302 by using a copper bar.
- FIG. 3 is a top view of the power module packaging structure 30 , so only the first surface is shown, while the second surface and the substrate are respectively on the lower side and the inner side of the module packaging structure 30 .
- the level three-phase full-bridge motor driver circuit 1 starts to operate.
- the internal inductance Lc of the capacitor, the external inductance Lbus and the internal inductance Li may cause the problem that the three-phase full-bridge motor driver circuit 1 cannot work normally or the efficiency is reduced.
- a plurality of absorbing terminals 304 are coupled to a second absorbing circuit by welding or bonding, which is used to eliminate the external inductance Lbus and the internal inductance Lc of the capacitor outside the second package shell and the internal inductance Lc in the second package shell. Effect of internal inductance Li on level three-phase full-bridge motor driver circuit 1.
- At least one power element may be the power module 10 composed of the first transistor QH and the second transistor QL.
- the second absorbing circuit may be a decoupling ceramic capacitor, which is coupled to the first power terminal and the second power terminal of at least one power element.
- the capacitance value of the decoupling ceramic capacitor can be greater than 1 ⁇ F.
- the decoupling ceramic capacitor is disposed on the first surface outside the second packaging case, so the capacitance value of the decoupling ceramic capacitor can be adjusted according to actual circuit operation to avoid matching problems.
- FIG. 4 is a power module packaging structure 40 and an equivalent circuit diagram 42 of the power module 10 according to another embodiment of the present application.
- the difference between the power module packaging structure 40 and the power module packaging structure 30 is that the plurality of absorbing terminals 404 are coupled to the signal terminal of at least one power element in the second packaging casing 302 using copper bars.
- a plurality of absorbing terminals 404 are coupled to a third absorbing circuit by welding or bonding, and are used to eliminate the external inductance Lbus and the internal inductance Lc of the capacitor outside the second package shell 302 and the internal inductance Li in the second package shell. level three-phase full-bridge motor driver circuit 1.
- At least one power element may be the power module 10 composed of the first transistor QH and the second transistor QL.
- the fourth absorbing circuit may include a first decoupling capacitor, a second decoupling capacitor, a first resistor, and a second resistor, wherein the first decoupling capacitor is connected in series with the first resistor and coupled through a plurality of absorbing terminals Between the first power supply terminal and the signal terminal; the second decoupling capacitor is connected in series with the second resistor, and is coupled between the second power supply terminal and the signal terminal through a plurality of absorbing terminals.
- the high-frequency current component is mainly provided by the first decoupling capacitor and the second decoupling capacitor, so the internal inductor Li and the external
- the current variation of the inductor Lbus decreases, and the voltage spikes caused by the multiple parasitic inductances also decrease accordingly.
- the first resistor and the second resistor can avoid circuit oscillation and reduce voltage spikes caused by multiple parasitic inductances. Therefore, the problem that the multiple parasitic inductances cause the three-phase full-bridge motor driver circuit 1 to fail to work normally or reduce efficiency is solved.
- the fourth snubber circuit is disposed on the first surface outside the second packaging case, so the capacitance or resistance of the fourth snubber circuit can be adjusted according to actual circuit operation to avoid matching problems. It should be noted that those skilled in the art may appropriately add other elements of the fourth snubber circuit, such as diodes, according to needs, without limitation thereto.
- FIG. 5 is a cross-sectional view of a package structure of a power module according to an embodiment of the present application.
- the cutting plane at the cutting plane of the power module packaging structure 50 may be a cut-away view 52 or a cut-away view 54.
- the plurality of sink terminals and at least one power element are at a relative position, so that the internal inductance Li is minimized.
- the plurality of absorbing terminals in the sectional view 52 or the sectional view 54 are all adjacent to at least one power element on the substrate, so that the internal inductance Li is minimized.
- the plurality of absorbing terminals are disposed at positions lower than, equal to or higher than the first surface.
- the plurality of absorbing terminals are disposed at a position lower than the first surface. Therefore, when the absorbing circuit is soldered or bonded to the plurality of absorbing terminals, it may also be lower than the first surface.
- the plurality of absorbing terminals are arranged at a position equal to the first surface, so when the absorbing circuit is welded or bonded to the plurality of absorbing terminals, it will be higher than the first surface. As for the plurality of absorbing terminals being disposed at a position higher than the first surface, it can be deduced accordingly, which will not be repeated here.
- FIG. 6 to FIG. 7 are cross-sectional views of a power module packaging structure according to another embodiment of the present application.
- the encapsulation case of the power module encapsulation structure 60 is a single-sided cooling module, the tangent plane of the power module encapsulation structure 60 may be a sectional view 62 , and the heat dissipation surface is disposed on the second surface of the encapsulation shell.
- the encapsulation shell of the power module encapsulation structure 70 is a double-sided cooling module, the tangent plane of the power module encapsulation structure 70 may be a sectional view 72, and the heat dissipation surfaces are arranged on the first surface and the second surface of the encapsulation shell.
- a plurality of absorbing terminals are arranged on the first surface of the packaging case, and the absorbing circuit is welded or bonded to the plurality of absorbing terminals, which solves the problem of the three-phase full-bridge motor driver caused by the plurality of parasitic inductances.
- Circuit 1 cannot work normally or the efficiency is reduced.
- the components of the snubber circuit can be adjusted according to the actual circuit operation to avoid the matching problem.
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Abstract
Disclosed in the present application is a power module packaging structure, comprising: a package housing, which comprises a first surface and a second surface, wherein the first surface and the second surface are respectively located on an upper side and a lower side of the package housing; a substrate, which is packaged in the package housing and is parallel to the first surface and the second surface, wherein at least one power element is arranged on the substrate; and a plurality of absorption terminals, which are arranged on the first surface and are respectively connected to a first power supply end and a second power supply end of the at least one power element inside the package housing. The plurality of absorption terminals are coupled to an absorption circuit by means of soldering or bonding, and the absorption circuit is used for eliminating an internal inductance that is generated by the connection between the at least one power element and the plurality of absorption terminals and an external inductance that is generated by the connection between the first power supply end and the second power supply end, as well as an external power supply.
Description
本申请涉及一种功率模块封装结构,尤其涉及一种高可靠性低电感的功率模块封装结构。The present application relates to a packaging structure of a power module, in particular to a packaging structure of a power module with high reliability and low inductance.
能源危机、气候变迁等因素使得科技界及工业界努力发展以可再生能源替代石化能源的技术,这些技术都需借助功率模块来执行电能的转换。例如:太阳能发电过程中光伏发电板产生直流电,变换成频率和幅值固定的交流电,最后连接到电网。又例如:电动汽车的功率模块将电池的直流电变换为频率和幅值可以调节的交流电以驱动电机的输出扭矩。Factors such as the energy crisis and climate change have made the scientific and industrial circles strive to develop technologies that replace petrochemical energy with renewable energy. These technologies require the use of power modules to perform electrical energy conversion. For example: in the process of solar power generation, photovoltaic power generation panels generate direct current, transform it into alternating current with fixed frequency and amplitude, and finally connect it to the grid. Another example: the power module of an electric vehicle converts the DC power of the battery into an AC power whose frequency and amplitude can be adjusted to drive the output torque of the motor.
功率半导体器件是功率模块的核心部件,负责电路的开通和关断。例如图1是电平三相全桥电机驱动器电路,其中Q1~Q6是功率半导体器件,常用的功率半导体有绝缘栅双极晶体管(IGBT)、硅场效晶体管(Si MOSFET)及碳化硅场效晶体管(SiC MOSFET)。功率半导体器件在关断电流时的电流变化会在电路的寄生电感上产生电压尖峰,电压尖峰可能会击穿功率半导体器件或是造成电磁干扰使得电路无法正常工作。此外,寄生电感上所存储的能量会以热的形式消耗,使得电路的效率降低。因此,减小电路的寄生电感便成为业界关注的课题之一。The power semiconductor device is the core component of the power module, which is responsible for the turn-on and turn-off of the circuit. For example, Figure 1 is a level three-phase full-bridge motor driver circuit, in which Q1~Q6 are power semiconductor devices. Commonly used power semiconductors include insulated gate bipolar transistors (IGBTs), silicon field effect transistors (Si MOSFETs) and silicon carbide field effect transistors. Transistors (SiC MOSFETs). The current change of the power semiconductor device when the current is turned off will generate a voltage spike on the parasitic inductance of the circuit. The voltage spike may break down the power semiconductor device or cause electromagnetic interference so that the circuit cannot work normally. In addition, the energy stored in the parasitic inductance will be dissipated in the form of heat, reducing the efficiency of the circuit. Therefore, reducing the parasitic inductance of the circuit has become one of the topics concerned by the industry.
发明内容Contents of the invention
本申请的主要目的之一在于提供一种功率模块封装结构,以解决上述问题。One of the main purposes of the present application is to provide a power module packaging structure to solve the above problems.
为解决上述问题,根据本申请的一个方面,一种功率模块封装结构,其特征在于,包括:一封装壳体,包括一第一表面及一第二表面,其中所述第一表面及所述第二表面分别位于所述封装壳体的上侧及下侧;一基板,封装于所述封装壳体内并平行于所述第一表面及所述第二表面,其中所述基板上设置有至少一功率元件;以及复数个吸收端子,设置于所述第一表面上,并分别连接至所述封装壳体内的所述至少一功率元件的一第一电源端及一第二电源端;其中所述复数个吸收端子以焊接或粘结而耦接一吸收电路,所述吸收电路用来消除所述复数个吸收端子连接所述至少一功率元件所产生的一内部电感以及所述第一电源端及所述第二电源端连接一外部电源所产生的一外部电感。。In order to solve the above problems, according to one aspect of the present application, a power module packaging structure is characterized in that it includes: a packaging case including a first surface and a second surface, wherein the first surface and the The second surface is respectively located on the upper side and the lower side of the packaging casing; a substrate is packaged in the packaging casing and is parallel to the first surface and the second surface, wherein the substrate is provided with at least A power element; and a plurality of absorbing terminals arranged on the first surface and respectively connected to a first power supply end and a second power supply end of the at least one power element in the packaging case; wherein the The plurality of absorbing terminals are coupled to a absorbing circuit by welding or bonding, and the absorbing circuit is used to eliminate an internal inductance generated by connecting the plurality of absorbing terminals to the at least one power element and the first power supply terminal And the second power supply terminal is connected to an external inductance generated by an external power supply. .
图1是电平三相全桥电机驱动器电路Figure 1 is a level three-phase full-bridge motor driver circuit
图2是电平三相全桥电机驱动器电路1的复数个寄生电感的示意图。FIG. 2 is a schematic diagram of a plurality of parasitic inductances of the level three-phase full-bridge motor driver circuit 1 .
图3为本申请实施例功率模块的功率模块封装结构和等效电路图。FIG. 3 is a power module packaging structure and an equivalent circuit diagram of a power module according to an embodiment of the present application.
图4为本申请另一实施例功率模块的功率模块封装结构和等效电路图。FIG. 4 is a power module packaging structure and an equivalent circuit diagram of a power module according to another embodiment of the present application.
图5为本申请一实施例功率模块封装结构的切面图。FIG. 5 is a cross-sectional view of a package structure of a power module according to an embodiment of the present application.
图6为本申请一实施例功率模块封装结构的切面图。FIG. 6 is a cross-sectional view of a package structure of a power module according to an embodiment of the present application.
图7为本申请另一实施例功率模块封装结构的切面图。FIG. 7 is a cross-sectional view of a package structure of a power module according to another embodiment of the present application.
其中,附图标记说明如下:Wherein, the reference signs are explained as follows:
1 电平三相全桥电机驱动器电路1 level three-phase full-bridge motor driver circuit
10 功率模块10 power modules
12 直流支撑电容12 DC support capacitor
14 电池14 batteries
16 电机16 motors
30、40、50、60、70 功率模块封装结构30, 40, 50, 60, 70 Power module package structure
32、42 等效电路图32, 42 Equivalent circuit diagram
52、54、62、72 切面图52, 54, 62, 72 Sections
302 封装壳体302 package shell
304、404 吸收端子304, 404 absorbing terminal
306 信号端子306 signal terminal
308 电源端子308 power terminal
在说明书及后续的权利要求书当中使用了某些词汇来指代特定的组件。本领域中的技术人员应可理解,硬件制造商可能会用不同的名词来称呼同一个元件。本说明书及后续的权利要求书并不以名称的差异来做为区分元件的方式,而是以元件在功能上的差异来做为区分的准则。在通篇说明书及后续的权利要求书当中所提及的“包括”是开放式的用语,故应解释成“包括但不限定于”。以外,“耦接”一词在此是包括任何直接及间接的电气连接手段。因此,若文中描述第一装置耦接于第二装置,则代表第一装置可直接电气连接于第二装置,或通过其他装置或连接手段间接地电气连接至第二装置。Certain terms are used throughout the specification and following claims to refer to particular components. Those skilled in the art should understand that hardware manufacturers may use different terms to refer to the same component. This description and the following claims do not use the difference in name as a way to distinguish components, but use the difference in function of components as a criterion for distinguishing. "Includes" mentioned throughout the specification and the following claims is an open term, so it should be interpreted as "including but not limited to". In addition, the term "coupled" here includes any direct and indirect means of electrical connection. Therefore, if it is described that the first device is coupled to the second device, it means that the first device may be directly electrically connected to the second device, or indirectly electrically connected to the second device through other devices or connection means.
请参考图2,图2是电平三相全桥电机驱动器电路1的复数个寄生电感的示意图。电平三相全桥电机驱动器电路1包括一功率模块10、一直流支撑电容12、一电池14以及一电机16。电平三相全桥电机驱动器电路1的运作为通常技术,在此不赘述。电平三相全桥电机驱动器电路1的复数个寄生电感包含:直流支撑电容12的一电容内部电感 Lc、功率模块10与直流支撑电容12和电池14连接所产生的一外部电感Lbus以及功率模块10封装产生的一内部电感Li。详细来说,功率模块10包含功率半导体器件Q1~Q6并封装于一第一封装壳体中,功率半导体器件Q1~Q6连接到第一封装壳体外部的一铜排会产生内部电感Li。当功率半导体器件Q1~Q6开通或关断时的电流变化会在内部电感Li上产生一电压尖峰,电压尖峰可能会击穿功率半导体器件Q1~Q6使得电平三相全桥电机驱动器电路1无法正常工作。类似地,电平三相全桥电机驱动器电路1运作时,外部电感Lbus和电容内部电感Lc也可能产生电压尖峰使得电平三相全桥电机驱动器电路1无法正常工作。此外,复数个寄生电感上所存储的能量会以热的形式消耗,使得电平三相全桥电机驱动器电路1的效率降低。Please refer to FIG. 2 , which is a schematic diagram of a plurality of parasitic inductances of the level three-phase full-bridge motor driver circuit 1 . The level three-phase full-bridge motor driver circuit 1 includes a power module 10 , a DC support capacitor 12 , a battery 14 and a motor 16 . The operation of the level three-phase full-bridge motor driver circuit 1 is a common technology, and will not be repeated here. The multiple parasitic inductances of the level three-phase full-bridge motor driver circuit 1 include: an internal inductance Lc of the DC support capacitor 12, an external inductance Lbus generated by connecting the power module 10 to the DC support capacitor 12 and the battery 14, and the power module 10 An internal inductance Li generated by the package. In detail, the power module 10 includes power semiconductor devices Q1 - Q6 and is packaged in a first packaging case, and the power semiconductor devices Q1 - Q6 are connected to a copper bar outside the first packaging case to generate internal inductance Li. When the power semiconductor devices Q1~Q6 are turned on or off, the current change will generate a voltage spike on the internal inductance Li, and the voltage spike may break down the power semiconductor devices Q1~Q6 so that the level three-phase full-bridge motor driver circuit 1 cannot normal work. Similarly, when the level three-phase full-bridge motor driver circuit 1 is operating, the external inductance Lbus and the capacitor internal inductance Lc may also generate voltage spikes so that the level three-phase full-bridge motor driver circuit 1 cannot work normally. In addition, the energy stored in the multiple parasitic inductances will be consumed in the form of heat, which reduces the efficiency of the level three-phase full-bridge motor driver circuit 1 .
为了解决复数个寄生电感造成三相全桥电机驱动器电路1无法正常工作或是效率降低的问题,可以在第一封装壳体内部设置一第一吸收电路,其用来消除第一封装壳体之外的外部电感Lbus和电容内部电感Lc以及第一封装壳体内的内部电感Li对电平三相全桥电机驱动器电路1造成的影响。详细来说,第一吸收电路可以是一解偶陶瓷电容,其耦接功率半导体器件Q1~Q6以及第一封装壳体之外的直流支撑电容12和电池14以消除第一封装壳体之外的外部电感Lbus和电容内部电感Lc以及第一封装壳体内的内部电感Li对电平三相全桥电机驱动器电路1造成的影响。然而,当解偶陶瓷电容是采灌封工艺封装于第一封装壳体内时,解偶陶瓷电容的陶瓷材料与灌封工艺使用的环氧树脂固化物可能因为第一封装壳体内的内部温度过高而产生可靠性风险。此外,因为解偶陶瓷电容封装于第一封装壳体内,解偶陶瓷电容的电容值无法根据实际电路运作而调整而产生匹配问题。In order to solve the problem that the three-phase full-bridge motor driver circuit 1 cannot work normally or the efficiency is reduced due to a plurality of parasitic inductances, a first snubber circuit can be arranged inside the first packaging case, which is used to eliminate the gap between the first packaging case. The impact of the external inductance Lbus, the internal inductance Lc of the capacitor, and the internal inductance Li in the first packaging shell on the level three-phase full-bridge motor driver circuit 1 . In detail, the first absorption circuit can be a decoupling ceramic capacitor, which couples the power semiconductor devices Q1-Q6 and the DC support capacitor 12 and the battery 14 outside the first packaging case to eliminate the The external inductance Lbus of the capacitor, the internal inductance Lc of the capacitor, and the internal inductance Li in the first packaging shell have an impact on the level three-phase full-bridge motor driver circuit 1 . However, when the decoupling ceramic capacitor is packaged in the first package by potting, the ceramic material of the decoupling ceramic capacitor and the cured epoxy resin used in the potting process may be due to the internal temperature in the first package being too high. high risk of reliability. In addition, since the decoupling ceramic capacitors are packaged in the first packaging case, the capacitance value of the decoupling ceramic capacitors cannot be adjusted according to the actual circuit operation, resulting in a matching problem.
请参考图3,图3为本申请实施例功率模块10的功率模块封装结构30和等效电路图32。功率模块封装结构30包括一第二封装壳体302、一基板、复数个吸收端子304、一信号端子306和复数个电源端子308。第二封装壳体302包括一第一表面及一第二表面,其中第一表面及第二表面分别位于第二封装壳体302的上侧及下侧。至少一功率元件设置于基板上并封装于第二封装壳体302内,此外,基板可以平行于第一表面及第二表面。复数个吸收端子304设置于第二封装壳体302的第一表面上,利用铜排耦接至第二封装壳体302内至少一功率元件的第一电源端和第二电源端。信号端子306和复数个电源端子308设置于第二封装壳体302外,换言之,不限于设置于第二封装壳体302的上侧、下侧或四周。信号端子306利用铜排耦接至第二封装壳体302内至少一功率元件的一信号端,复数个电源端子308利用铜排耦接至第二封装壳体302内至少一功率元件的第一电源端和第二电源端。需注意地,图3为功率模块封装结构30的上视图,因此仅示出第一表面,而第二表面及基板分别为于模块封装结构30的下侧和内侧。Please refer to FIG. 3 . FIG. 3 is a power module packaging structure 30 and an equivalent circuit diagram 32 of the power module 10 according to an embodiment of the present application. The power module package structure 30 includes a second package case 302 , a substrate, a plurality of sink terminals 304 , a signal terminal 306 and a plurality of power terminals 308 . The second packaging case 302 includes a first surface and a second surface, wherein the first surface and the second surface are respectively located on the upper side and the lower side of the second packaging case 302 . At least one power element is disposed on the substrate and packaged in the second packaging case 302 . In addition, the substrate can be parallel to the first surface and the second surface. A plurality of absorbing terminals 304 are disposed on the first surface of the second package case 302 , and are coupled to the first power terminal and the second power terminal of at least one power element in the second package case 302 by copper bars. The signal terminals 306 and the plurality of power terminals 308 are disposed outside the second packaging case 302 , in other words, they are not limited to be disposed on the upper side, the lower side or the surroundings of the second packaging case 302 . The signal terminal 306 is coupled to a signal end of at least one power element in the second packaging case 302 by using a copper bar, and a plurality of power terminals 308 are coupled to the first terminal of at least one power element in the second packaging case 302 by using a copper bar. power terminal and a second power terminal. It should be noted that FIG. 3 is a top view of the power module packaging structure 30 , so only the first surface is shown, while the second surface and the substrate are respectively on the lower side and the inner side of the module packaging structure 30 .
详细来说,当复数个电源端子308连接到一外部电源使得电平三相全桥电机驱动器电路1开始运作。电容内部电感Lc、外部电感Lbus以及内部电感Li可能造成三相全桥电机驱动器电路1无法正常工作或是效率降低的问题。为了解决此问题,复数个吸收端子304以焊接或粘结而耦接一第二吸收电路,用来消除第二封装壳体之外的外部电感Lbus和电容内部电感Lc以及第二封装壳体内的内部电感Li对电平三相全桥电机驱动器电路1造成的影响。例如,请参考图3的等效电路图32,至少一功率元件可以是第一晶体管QH和第二晶体管QL组成的功率模块10。第二吸收电路可以是解偶陶瓷电容,其耦接至少一功率元件的第一电源端和第二电源端。在一实施例中,解偶陶瓷电容的电容值可以大于1μF,在第一晶体管QH和第二晶体管QL开通或关断的过程中,高频的电流分量主要由解偶陶瓷电容提供,因此内部电感Li和外部电感Lbus的电流变化减小,而复数个寄生电感引起的电压尖峰也跟着变小。因此解决了复数个寄生电感造成三相全桥电机驱动器电路1无法正常工作或是效率降低的问题。此外,解偶陶瓷电容设置于第二封装壳体外的第一表面,因此解偶陶瓷电容的电容值可以根据实际电路运作而调整而避免了匹配问题。In detail, when the plurality of power terminals 308 are connected to an external power source, the level three-phase full-bridge motor driver circuit 1 starts to operate. The internal inductance Lc of the capacitor, the external inductance Lbus and the internal inductance Li may cause the problem that the three-phase full-bridge motor driver circuit 1 cannot work normally or the efficiency is reduced. In order to solve this problem, a plurality of absorbing terminals 304 are coupled to a second absorbing circuit by welding or bonding, which is used to eliminate the external inductance Lbus and the internal inductance Lc of the capacitor outside the second package shell and the internal inductance Lc in the second package shell. Effect of internal inductance Li on level three-phase full-bridge motor driver circuit 1. For example, please refer to the equivalent circuit diagram 32 of FIG. 3 , at least one power element may be the power module 10 composed of the first transistor QH and the second transistor QL. The second absorbing circuit may be a decoupling ceramic capacitor, which is coupled to the first power terminal and the second power terminal of at least one power element. In an embodiment, the capacitance value of the decoupling ceramic capacitor can be greater than 1 μF. During the process of turning on or off the first transistor QH and the second transistor QL, the high-frequency current component is mainly provided by the decoupling ceramic capacitor, so the internal The current variation of the inductor Li and the external inductor Lbus decreases, and the voltage spikes caused by the multiple parasitic inductances also decrease accordingly. Therefore, the problem that the multiple parasitic inductances cause the three-phase full-bridge motor driver circuit 1 to fail to work normally or reduce efficiency is solved. In addition, the decoupling ceramic capacitor is disposed on the first surface outside the second packaging case, so the capacitance value of the decoupling ceramic capacitor can be adjusted according to actual circuit operation to avoid matching problems.
请参考图4,图4为本申请另一实施例功率模块10的功率模块封装结构40和等效电路图42。功率模块封装结构40与功率模块封装结构30的差异是复数个吸收端子404利用铜排另耦接至第二封装壳体302内至少一功率元件的信号端。复数个吸收端子404以焊接或粘结而耦接一第三吸收电路,用来消除第二封装壳体302之外的外部电感Lbus和电容内部电感Lc以及第二封装壳体内的内部电感Li对电平三相全桥电机驱动器电路1造成的影响。例如,请参考图4的等效电路图42,至少一功率元件可以是第一晶体管QH和第二晶体管QL组成的功率模块10。第四吸收电路可以包括一第一解耦电容、一第二解耦电容、一第一电阻以及一第二电阻,其中第一解耦电容串连第一电阻并透过复数个吸收端子耦接于第一电源端以及信号端之间;第二解耦电容串连第二电阻,透过复数个吸收端子耦接于第二电源端以及信号端之间。在一实施例中,在第一晶体管QH和第二晶体管QL开通或关断的过程中,高频的电流分量主要由第一解耦电容和第二解耦电容提供,因此内部电感Li和外部电感Lbus的电流变化减小,而复数个寄生电感引起的电压尖峰也跟着变小。第一电阻和第二电阻可以避免电路震荡并且减小复数个寄生电感引起的电压尖峰。因此解决了复数个寄生电感造成三相全桥电机驱动器电路1无法正常工作或是效率降低的问题。此外,第四吸收电路设置于第二封装壳体外的第一表面,因此第四吸收电路电容值或电阻值可以根据实际电路运作而调整而避免了匹配问题。需注意地,本领域技术人员可根据所需,适当增加第四吸收电路的其他元件,如二极管,而不限于此。Please refer to FIG. 4 . FIG. 4 is a power module packaging structure 40 and an equivalent circuit diagram 42 of the power module 10 according to another embodiment of the present application. The difference between the power module packaging structure 40 and the power module packaging structure 30 is that the plurality of absorbing terminals 404 are coupled to the signal terminal of at least one power element in the second packaging casing 302 using copper bars. A plurality of absorbing terminals 404 are coupled to a third absorbing circuit by welding or bonding, and are used to eliminate the external inductance Lbus and the internal inductance Lc of the capacitor outside the second package shell 302 and the internal inductance Li in the second package shell. level three-phase full-bridge motor driver circuit 1. For example, please refer to the equivalent circuit diagram 42 of FIG. 4 , at least one power element may be the power module 10 composed of the first transistor QH and the second transistor QL. The fourth absorbing circuit may include a first decoupling capacitor, a second decoupling capacitor, a first resistor, and a second resistor, wherein the first decoupling capacitor is connected in series with the first resistor and coupled through a plurality of absorbing terminals Between the first power supply terminal and the signal terminal; the second decoupling capacitor is connected in series with the second resistor, and is coupled between the second power supply terminal and the signal terminal through a plurality of absorbing terminals. In one embodiment, when the first transistor QH and the second transistor QL are turned on or off, the high-frequency current component is mainly provided by the first decoupling capacitor and the second decoupling capacitor, so the internal inductor Li and the external The current variation of the inductor Lbus decreases, and the voltage spikes caused by the multiple parasitic inductances also decrease accordingly. The first resistor and the second resistor can avoid circuit oscillation and reduce voltage spikes caused by multiple parasitic inductances. Therefore, the problem that the multiple parasitic inductances cause the three-phase full-bridge motor driver circuit 1 to fail to work normally or reduce efficiency is solved. In addition, the fourth snubber circuit is disposed on the first surface outside the second packaging case, so the capacitance or resistance of the fourth snubber circuit can be adjusted according to actual circuit operation to avoid matching problems. It should be noted that those skilled in the art may appropriately add other elements of the fourth snubber circuit, such as diodes, according to needs, without limitation thereto.
请参考图5,图5为本申请一实施例功率模块封装结构的切面图。功率模块封装结 构50的切面处的切面可以是一切面图52或一切面图54。在一实施例中,复数个吸收端子与至少一功率元件处于一相对位置,使得内部电感Li最小。例如,切面图52或切面图54中的复数个吸收端子皆与基板上的至少一功率元件相邻,使得内部电感Li最小。在另一实施例中,复数个吸收端子设置于低于、等于或高于第一表面的位置。例如,切面图52中,复数个吸收端子设置于低于第一表面的位置,因此,当吸收电路焊接或粘结于复数个吸收端子上时也可能低于第一表面。切面图54中,复数个吸收端子设置于等于第一表面的位置,因此,当吸收电路焊接或粘结于复数个吸收端子上时会高于第一表面。关于复数个吸收端子设置于高于第一表面的位置,可据此类推,在此不再赘述。Please refer to FIG. 5 , which is a cross-sectional view of a package structure of a power module according to an embodiment of the present application. The cutting plane at the cutting plane of the power module packaging structure 50 may be a cut-away view 52 or a cut-away view 54. In one embodiment, the plurality of sink terminals and at least one power element are at a relative position, so that the internal inductance Li is minimized. For example, the plurality of absorbing terminals in the sectional view 52 or the sectional view 54 are all adjacent to at least one power element on the substrate, so that the internal inductance Li is minimized. In another embodiment, the plurality of absorbing terminals are disposed at positions lower than, equal to or higher than the first surface. For example, in the cut-away view 52 , the plurality of absorbing terminals are disposed at a position lower than the first surface. Therefore, when the absorbing circuit is soldered or bonded to the plurality of absorbing terminals, it may also be lower than the first surface. In the cut-away view 54, the plurality of absorbing terminals are arranged at a position equal to the first surface, so when the absorbing circuit is welded or bonded to the plurality of absorbing terminals, it will be higher than the first surface. As for the plurality of absorbing terminals being disposed at a position higher than the first surface, it can be deduced accordingly, which will not be repeated here.
请参考图6至图7,图6至图7为本申请另一实施例功率模块封装结构的切面图。功率模块封装结构60的封装壳体是一单面冷却模块,功率模块封装结构60的切面处的切面可以是一切面图62,散热面设置于封装壳体的第二表面上。功率模块封装结构70的封装壳体是一双面冷却模块,功率模块封装结构70的切面处的切面可以是一切面图72,散热面设置于封装壳体的第一表面和第二表面上。Please refer to FIG. 6 to FIG. 7 . FIG. 6 to FIG. 7 are cross-sectional views of a power module packaging structure according to another embodiment of the present application. The encapsulation case of the power module encapsulation structure 60 is a single-sided cooling module, the tangent plane of the power module encapsulation structure 60 may be a sectional view 62 , and the heat dissipation surface is disposed on the second surface of the encapsulation shell. The encapsulation shell of the power module encapsulation structure 70 is a double-sided cooling module, the tangent plane of the power module encapsulation structure 70 may be a sectional view 72, and the heat dissipation surfaces are arranged on the first surface and the second surface of the encapsulation shell.
综上所述,本申请实施例在封装壳体的第一表面上设置复数个吸收端子,吸收电路焊接或粘结于复数个吸收端子上,解决了复数个寄生电感造成三相全桥电机驱动器电路1无法正常工作或是效率降低的问题。此外,根据实际电路运作可以调整吸收电路的元件而避免了匹配问题。To sum up, in the embodiment of the present application, a plurality of absorbing terminals are arranged on the first surface of the packaging case, and the absorbing circuit is welded or bonded to the plurality of absorbing terminals, which solves the problem of the three-phase full-bridge motor driver caused by the plurality of parasitic inductances. Circuit 1 cannot work normally or the efficiency is reduced. In addition, the components of the snubber circuit can be adjusted according to the actual circuit operation to avoid the matching problem.
以上所述仅为本发明的优选实施例而已,并不用于限制本发明,对于本领域的技术人员来说,本发明可以有各种更改和变化。凡在本发明的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and changes. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.
Claims (8)
- 一种功率模块封装结构,其特征在于,包括:A power module packaging structure, characterized in that it comprises:一封装壳体,包括一第一表面及一第二表面,其中所述第一表面及所述第二表面分别位于所述封装壳体的上侧及下侧;A packaging case, including a first surface and a second surface, wherein the first surface and the second surface are respectively located on the upper side and the lower side of the packaging case;一基板,封装于所述封装壳体内并平行于所述第一表面及所述第二表面,其中所述基板上设置有至少一功率元件;以及A substrate, packaged in the packaging case and parallel to the first surface and the second surface, wherein at least one power element is disposed on the substrate; and复数个吸收端子,设置于所述第一表面上,并分别连接至所述封装壳体内的所述至少一功率元件的一第一电源端及一第二电源端;A plurality of absorbing terminals are arranged on the first surface and are respectively connected to a first power supply terminal and a second power supply terminal of the at least one power element in the packaging case;其中所述复数个吸收端子以焊接或粘结而耦接一吸收电路,所述吸收电路用来消除所述复数个吸收端子连接所述至少一功率元件所产生的一内部电感以及所述第一电源端及所述第二电源端连接一外部电源所产生的一外部电感。Wherein the plurality of absorbing terminals are coupled to a absorbing circuit by welding or bonding, and the absorbing circuit is used to eliminate an internal inductance generated by connecting the plurality of absorbing terminals to the at least one power element and the first The power supply end and the second power supply end are connected to an external inductance generated by an external power supply.
- 根据权利要求1所述的功率模块封装结构,其特征在于,所述吸收电路包括一解耦电容,其透过所述复数个吸收端子耦接于所述第一电源端以及所述第二电源端之间。The package structure of the power module according to claim 1, wherein the absorbing circuit comprises a decoupling capacitor, which is coupled to the first power supply terminal and the second power supply through the plurality of absorbing terminals between the ends.
- 根据权利要求1所述的功率模块封装结构,其特征在于,所述复数个吸收端子另连接至该封装壳体内的该至少一功率元件的一信号端。The package structure of the power module according to claim 1, wherein the plurality of absorbing terminals are further connected to a signal terminal of the at least one power element in the package case.
- 根据权利要求3所述的功率模块封装结构,其特征在于,所述吸收电路包括:The packaging structure of the power module according to claim 3, wherein the absorbing circuit comprises:一第一解耦电容串连一第一电阻,透过所述复数个吸收端子耦接于所述第一电源端以及所述信号端之间;以及a first decoupling capacitor connected in series with a first resistor, coupled between the first power supply terminal and the signal terminal through the plurality of sink terminals; and一第二解耦电容串连一第二电阻,透过所述复数个吸收端子耦接于所述第二电源端以及所述信号端之间。A second decoupling capacitor is connected in series with a second resistor, and is coupled between the second power supply terminal and the signal terminal through the plurality of sink terminals.
- 根据权利要求1所述的功率模块封装结构,其特征在于,所述复数个吸收端子与该至少一功率元件处于一相对位置,使得所述内部电感最小。The package structure of the power module according to claim 1, wherein the plurality of absorbing terminals and the at least one power element are in a relative position, so that the internal inductance is minimized.
- 根据权利要求1所述的功率模块封装结构,其特征在于,所述复数个吸收端子设置于低于,等于或高于所述第一表面。The package structure of the power module according to claim 1, wherein the plurality of absorbing terminals are arranged lower than, equal to or higher than the first surface.
- 根据权利要求1所述的功率模块封装结构,其特征在于,所述封装壳体是一单 面冷却模块或一双面冷却模块。The power module package structure according to claim 1, wherein the package case is a single-side cooling module or a double-side cooling module.
- 根据权利要求1所述的功率模块封装结构,其特征在于,所述至少一功率元件为一绝缘栅双晶体管以及一碳化硅晶体管的至少其一。The power module packaging structure according to claim 1, wherein the at least one power element is at least one of an insulated gate double transistor and a silicon carbide transistor.
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Publication number | Priority date | Publication date | Assignee | Title |
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CN104604114A (en) * | 2012-08-29 | 2015-05-06 | 株式会社安川电机 | Power conversion apparatus |
CN206976342U (en) * | 2017-08-03 | 2018-02-06 | 张�浩 | A kind of encapsulating structure of low stray inductance power model |
WO2019163114A1 (en) * | 2018-02-25 | 2019-08-29 | 新電元工業株式会社 | Power module and switching power supply |
CN113497014A (en) * | 2020-03-21 | 2021-10-12 | 华中科技大学 | Packaging structure and packaging method of multi-chip parallel power module |
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Publication number | Priority date | Publication date | Assignee | Title |
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CN104604114A (en) * | 2012-08-29 | 2015-05-06 | 株式会社安川电机 | Power conversion apparatus |
CN206976342U (en) * | 2017-08-03 | 2018-02-06 | 张�浩 | A kind of encapsulating structure of low stray inductance power model |
WO2019163114A1 (en) * | 2018-02-25 | 2019-08-29 | 新電元工業株式会社 | Power module and switching power supply |
CN113497014A (en) * | 2020-03-21 | 2021-10-12 | 华中科技大学 | Packaging structure and packaging method of multi-chip parallel power module |
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