WO2023085775A1

WO2023085775A1 - Method for inspecting flatness of screen printer

Info

Publication number: WO2023085775A1
Application number: PCT/KR2022/017559
Authority: WO
Inventors: 심은혁; 곽병길
Original assignee: 한화정밀기계 주식회사
Priority date: 2021-11-09
Filing date: 2022-11-09
Publication date: 2023-05-19
Also published as: CN118215821A; KR20230067210A

Abstract

The present invention relates to a method for inspecting the flatness of a screen printer. The method for inspecting the flatness of a screen printer comprises the steps of: correcting the flatness prior to a screen printing process of the screen printer through a sensor unit provided on the screen printer; and correcting the flatness during the screen printing process of the screen printer, wherein prior to the screen printing process of the screen printer, the flatness of a substrate, a backup block, and a stage of the screen printer may be checked, and during the screen printing process of the screen printer, the warpage of the substrate and the flatness of a mask of the screen printer may be checked. In addition, the method for inspecting the flatness of the screen printer as described above may be implemented in various ways according to embodiments.

Description

How to check the flatness of a screen printer

The present invention relates to a method for inspecting the flatness of a screen printer, for example, in fixing the screen printer, the flatness of a substrate/mask/stage is monitored to check for poor adhesion between a mask and a substrate, and the screen printer can improve the adhesion. It relates to a flatness inspection method of.

The screen printer is a device that makes a solder pattern on the board by pressing the board mounted on the stage to the bottom of the mask and pushing solder into the opening of the mask. When making a solder pattern on a board through such a screen printer, the adhesion between the bottom of the mask and the top of the board is a very important factor in order to make the solder pattern constant.

Factors affecting the degree of adhesion between the mask and the substrate include the thickness of the substrate, the flatness of the mask, and the planarity of the stage. Here, the thickness of the substrate is not good in terms of adhesion because the error in the thickness of the substrate for each lot is not considered. In addition, even in the case of the plan view of the mask or the plan view of the stage, it is measured when the module manufacturer first manufactures it, or it is measured and used only during the initial setting (calibration) of the equipment or during regular inspection, so there is no monitoring of the deformed part after that. Adhesion in actual production is not good.

In addition, in order to improve the adhesion between the mask and the substrate, not only the flatness of the mask, but also the planarity of the substrate including the upper surface of the stage surrounding the substrate and the backup block must be good.

Accordingly, there is a need for a process for improving adhesion between a mask and a substrate in a screen printing process of a screen printer.

(Prior art literature)

Domestic Patent Registration No. 10-1273542 (2013.06.04)

The technical problem to be achieved by the present invention is to improve the adhesion between the mask and the substrate by detecting the flatness of the substrate, backup block, stage, substrate warpage, and mask in various ways before or during the screen printing process of the screen printer. It is intended to provide a flatness inspection method of a screen printer that enables

The problems to be solved by the present invention are not limited to the above-mentioned problems, and other problems not mentioned will be clearly understood by those skilled in the art from the following description.

The flatness inspection method of a screen printer according to an embodiment of the present invention,

Correcting the flatness before the screen printing process through a sensor unit provided in the screen printer, and correcting the flatness during the screen printing process,

The flatness of the substrate, the backup block and the stage of the screen printer may be checked before the screen printing revolution, and the flatness of the warpage and mask of the substrate of the screen printer may be checked during the screen printing process.

The sensor unit includes a laser sensor,

The laser sensor may be mounted on a gantry of the screen printer and moved to a designated position in order to correct the flatness before the screen printing rotation and to correct the flatness during the screen printing process.

The value measured by the sensor unit is applied to the control unit, and the control unit compares the measured value with a reference value,

The control unit may store a reference value for the height difference, a coordinate value of a location to be measured, and a reference height value measured at the measurement location, and compare the measured value with the reference value to detect the height difference.

In the step of correcting the flatness before revolution,

automatically correcting the height of the substrate by measuring the heights of the stage and the substrate;

Checking the normal installation of the backup block by measuring the height of the edge clamp of the stage and the backup block; and

The method may include checking flatness of the stage through measurement values at designated positions of an edge plate and a top plate of the stage.

Correcting the height of the substrate,

moving and fixing the substrate to a position for printing;

measuring heights of the upper surface of the stage and the upper surface of the substrate through a laser sensor;

storing a height value of the upper surface of the stage and a value of the upper surface of the substrate; and

The method may include comparing a height difference between a height value of the top surface of the stage and a height value of the top surface of the substrate with a set reference value.

In the step of comparing the height difference,

When the height difference exceeds the reference value, the height of the substrate may be corrected by adjusting the height of the stage using a motor so that the height difference is less than the reference value.

The step of checking the normal installation of the backup block,

moving a laser sensor to a designated position of the edge clamp of the stage;

measuring a distance value of the edge clamp with the laser sensor;

moving the laser sensor to a designated position of the backup block;

measuring a distance value of the backup block with the laser sensor; and

The method may include determining whether a difference between the distance value of the edge clamp and the distance value of the backup block exceeds a set reference value.

In the step of determining the difference value between the distance values,

If the difference value exceeds the reference value, an error may be generated and production may be stopped, and if the difference value does not exceed the reference value, the screen printing process may be continued.

The step of checking the flatness of the stage,

moving the laser sensor to designated positions on the edge plate and top plate of the stage;

measuring height values at designated positions of the edge plate and the top plate; and

A step of comparing the measured height value with a set reference value may be included.

In the step of comparing the height value,

When the measured height value exceeds the reference value, the stage flatness error is generated and the occurrence of the error is notified;

When the measured height value does not exceed the reference value, the screen printing process may be performed.

In the step of correcting the flatness during the screen printing process,

Checking the warpage of the substrate by measuring the edge clamp of the stage and the height value of the substrate; and

The method may include checking flatness of the mask by measuring height values of set positions of the mask.

The step of checking the warpage of the board,

moving the laser sensor to a designated position of an edge clamp of the stage;

measuring a distance value of an upper surface of the edge clamp with the laser sensor;

moving the laser sensor to a designated position on the substrate;

measuring a distance value of the upper surface of the substrate with the laser sensor; and

The method may include determining whether a difference value between a distance value of the upper surface of the edge clamp and a distance value of the upper surface of the substrate exceeds a set reference value.

In the step of determining the difference value between the distance values,

If the difference value exceeds the reference value, an error is generated and production is stopped, and if the difference value does not exceed the reference value, the screen fritting process may be performed.

Checking the flatness of the mask,

moving the laser sensor to a designated position on the mask;

measuring a distance value from a designated position of the mask with the laser sensor;

moving the laser sensor to another designated location on the mask;

measuring a distance value from a designated position of the mask with the laser sensor; and

A step of comparing a difference between the measured values with a set reference value may be included.

In the step of comparing the measured values,

If the difference value exceeds the reference value, an error is generated and production is stopped, and if the difference value does not exceed the reference value, the screen printing process may proceed.

Details of other embodiments are included in the detailed description and drawings.

As described above, the flatness inspection method of a screen printer according to an embodiment of the present invention detects the flatness of a substrate, a backup block, a stage, a substrate warpage, and a mask before or during the screen printing process of the screen printer. Accordingly, the adhesion between the mask and the board can be improved, and the solder pattern can be made constant on the board, and thus various problems caused by defects in the solder pattern can be prevented in advance.

The effects of the present invention are not limited to the effects mentioned above, and other effects not mentioned will be clearly understood by those skilled in the art from the description of the claims.

1 is a diagram schematically illustrating a screen printer according to an embodiment of the present invention.

2 is a flowchart schematically illustrating a method for automatically correcting the height of a substrate for correcting flatness before the screen printing revolution of the screen printer in the flatness inspection method of the screen printer according to an embodiment of the present invention.

3 is a flowchart schematically illustrating a method of checking a normal installation state of a backup block for correcting flatness before a screen printing process of a screen printer in a flatness inspection method of a screen printer according to an embodiment of the present invention. .

4 is a flowchart schematically illustrating a stage flatness check method for correcting the flatness before the screen printing revolution of the screen printer in the flatness inspection method of the screen printer according to an embodiment of the present invention.

5 is an operation diagram schematically illustrating a stage flatness check before a process of a screen printing job of a screen printer in a flatness inspection method of a screen printer according to an embodiment of the present invention.

6 is a flowchart schematically illustrating a method of checking a warpage of a substrate during a screen printing process of a screen printer in a flatness inspection method of a screen printer according to an embodiment of the present invention.

7 is a diagram schematically showing an operation of checking a warpage of a substrate during a screen printing process of a screen printer in a flatness inspection method of a screen printer according to an embodiment of the present invention.

8 is a flowchart schematically illustrating a method for checking flatness of a mask during a screen printing process of a screen printer in a flatness inspection method of a screen printer according to an embodiment of the present invention.

9 is a diagram schematically illustrating a mask flatness check operation during a screen printing process of a screen printer in a flatness inspection method of a screen printer according to an embodiment of the present invention.

Advantages and features of the present invention, and methods of achieving them, will become clear with reference to the detailed description of the following embodiments taken in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various different forms, and only these embodiments make the disclosure of the present invention complete, and common knowledge in the art to which the present invention belongs. It is provided to completely inform the person who has the scope of the invention, and the present invention is only defined by the scope of the claims. Like reference numbers designate like elements throughout the specification.

Thus, in some embodiments, well-known process steps, well-known structures and well-known techniques have not been described in detail in order to avoid obscuring the interpretation of the present invention.

Terminology used herein is for describing the embodiments and is not intended to limit the present invention. In this specification, singular forms also include plural forms unless specifically stated otherwise in a phrase. As used herein, "comprises" and/or "comprising" refers to the presence or addition of one or more other elements, steps, operations and/or elements other than the mentioned elements, steps, operations and/or elements. It is used in the sense of not excluding. And "and/or" includes each and every combination of one or more of the recited items.

In addition, the embodiments described in this specification will be described with reference to cross-sectional views and/or schematic views, which are ideal exemplary views of the present invention. Accordingly, the shape of the illustrative drawings may be modified due to manufacturing techniques and/or tolerances. Therefore, embodiments of the present invention are not limited to the specific shapes shown, but also include changes in shapes generated according to manufacturing processes. In addition, in each drawing shown in the present invention, each component may be shown somewhat enlarged or reduced in consideration of convenience of description. Like reference numbers designate like elements throughout the specification.

Hereinafter, the present invention will be described with reference to drawings for explaining a flatness inspection method of the screen printer 100 according to embodiments of the present invention.

1 is a schematic diagram of a screen printer 100 according to an embodiment of the present invention.

Referring to FIG. 1, the screen printer 100 of the present invention includes a stage composed of a pair of top plates 110 and a pair of edge plates 120, and a backup block 130 and auxiliary blocks provided therebetween ( 140), a motor 150 for driving the stage, a mask 160, and a sensor unit, specifically a laser sensor 170.

In one embodiment of the present invention, the sensor unit may be described as an example of including a laser sensor as described above as a configuration capable of measuring the height of the substrate. However, the sensor unit is not limited to the laser sensor, and may be modified or modified as long as it has a configuration capable of measuring the height of the substrate.

In the screen printer 100, in order to improve adhesion between the mask 160 and the substrate 180, not only the flatness of the mask 160 but also the upper surface of the stage surrounding the substrate 180 and the substrate including the backup block 130 The flatness of (180) is important. Accordingly, it is preferable to inspect the substrate 180 before or during the screen printing process so that the screen printing process can proceed only in a state where the adhesion is higher than a set level.

The flatness inspection method of the screen printer 100 according to an embodiment of the present invention may include implementing correction before a screen printing process and correcting flatness during a screen printing process.

For example, the step of implementing the screen-printing revolution correction step includes automatically correcting the height of the substrate 180, checking the normal installation of the backup block 130, and checking the flatness of the stage. The step of implementing correction during the screen printing process may include checking the warpage of the substrate 180 and checking the flatness of the mask 160 .

Here, when checking the flatness of the substrate 180, the backup block 130, the stage, the warpage of the substrate 180, and the mask 160, the sensor unit can be used. In particular, in the present invention, the sensor unit may be described as being the laser sensor 170 as an example. At this time, the laser sensor 170 can be moved to a designated position through the movement of the X/Y gantry using the laser sensor 170 mounted on the X/Y gantry.

The measured value detected by the sensor unit may be applied to the controller, and the value measured by the sensor unit may be compared and detected with a reference value stored in the controller.

Specifically, looking at the method of detecting the height difference, a separate controller includes coordinate values of a position designated by the user, a reference value for the height difference (height difference reference value), a reference height value measured at the measurement position, and a measurement value. The coordinate values of the location are stored. A measurement value measured by the sensor unit may be applied to the control unit, and the control unit may detect a height difference through a process of comparing the stored reference value and the applied measurement value.

Hereinafter, a flatness inspection method of the screen printer 100 having the above structure can be described in detail.

2 shows a method for automatically correcting the height of a substrate 180 (S100) for correcting the flatness before the screen printing process of the screen printer in the flatness inspection method of the screen printer 100 according to an embodiment of the present invention. It is a schematic flow chart.

Referring to FIG. 2 , in order to compensate for the thickness deviation of each lot of the substrate 180, when the height of the upper surface of the stage and the upper surface of the substrate 180 is changed, the flatness of the substrate 180 is inspected and corrected. There is a need. In order to compensate for the thickness deviation of each lot of the substrate 180, when the height of the upper surface of the stage and the upper surface of the substrate 180 is changed, the laser sensor 170 measures it, and the difference between the measured value is applied to the stage. The height of the substrate 180 may be automatically adjusted using the motor 150 mounted thereon.

Specifically, the step of correcting the height of the substrate 180 for flatness correction before the screen printing rotation of the screen printer (S100) can be reviewed.

First, automatic production starts through the screen printer (automatic production step (S110)). The substrate 180 is moved to a position for printing and fixed (moving and fixing the substrate 180 step (S120)). Specifically, after moving the substrate 180 to a position for printing, the stage is moved up and down in the Z-axis direction (up and down direction), and a backup table (BUT) is raised.

The heights of the upper surface of the stage and the upper surface of the substrate 180 are measured by the laser sensor 170 (step of measuring the heights of the stage and the substrate 180 (S130)). For example, the height of the top surface of the stage and the substrate 180 is measured by mounting the laser sensor 170 downward on a gantry capable of moving in X/Y directions.

The height value of the upper surface of the stage and the value of the upper surface of the substrate 180 detected by the laser sensor 170 are stored (detection value storage step (S140)).

The height difference between the height value of the upper surface of the stage and the upper surface of the substrate 180 is compared with a set reference value (comparing the detected value with the set reference value (step S150)).

The detection value is compared with the set reference value, and when the height difference exceeds the reference value, the height of the stage is adjusted by the motor 150 so that the height difference is less than the reference value, thereby lowering the height of the substrate 180. correct

3 is a method for inspecting the flatness of the screen printer 100 according to an embodiment of the present invention, in which the normal installation state of the backup block 130 for correcting the flatness before the screen printing revolution of the screen printer is checked (S200). ) is a flowchart schematically showing the method.

Referring to FIG. 3 , when a user arranges components for a screen printing operation before a screen printing process of a screen printer, the backup block 130 may be mismounted by mistake.

Even when the backup block 130 is erroneously mounted, the erroneous mounting of the backup block 130 is detected as the adhesion is lowered, and correction thereof is required.

Specifically, in the step of checking the normal installation of the backup block 130 for correcting the flatness before the screen printing process of the screen printer (S200), the laser sensor 170 is set at the designated position of the edge clamp on the stage Move to (moving step to the laser sensor 170 designated position (S210)).

After the laser sensor 170 is moved to the designated position, the edge clamp, specifically, the distance value of the upper surface of the edge clamp is measured by the laser sensor 170 (measuring the distance of the edge clamp (step S220)).

The laser sensor 170, which is moved to the designated position and measures the distance of the edge clamp, is moved to the designated position of the backup block 130 (moving to the designated position of the laser sensor 170 (step S230)).

The laser sensor 170 moved to the designated position of the backup block 130 measures the distance value (height) of the backup block 130 (step of measuring the distance value of the backup block 130 (S240)).

A difference value between the distance value of the edge clamp and the distance value of the backup block 130 is calculated, and it is determined whether the difference value exceeds a set reference value (the distance value of the edge clamp and the distance value of the backup block 130 Comparing the difference value of and the set reference value (S250)).

If the difference value exceeds the reference value, it is determined that the backup block 130 is erroneously mounted, an error is generated, and production is stopped (stopping step (S270)). Also, if the difference value does not exceed the reference value, it is determined that the backup block 130 is correctly mounted and the screen printing process continues (screen printing process step (S260)).

4 is a flowchart schematically showing a stage flatness check method (S300) for correcting the flatness before the screen printing process of the screen printer in the flatness inspection method of the screen printer 100 according to an embodiment of the present invention. am. 5 is an operation diagram schematically illustrating a stage flatness check before a screen printing process of the screen printer in the flatness inspection method of the screen printer 100 according to an embodiment of the present invention.

Referring to FIGS. 4 and 5 , even when the height of the upper surface of the stage before the screen printing process of the screen printer is not flat, the degree of adhesion is not good, which affects it. Accordingly, it is determined whether to proceed with screen printing by checking the flatness of the stage.

Specifically, in order to check the flatness of the stage for flatness correction before the screen printing process of the screen printer, first, the laser sensor 170 is set at designated positions of the edge plate 120 and the top plate 110 of the stage. It moves to (moving step of the laser sensor 170 (S310)).

After the laser sensor 170 is moved to the designated positions of the edge plate 120 and the top plate 110 of the stage, height values are measured at the designated positions of the edge plate 120 and the top plate 110 (step of measuring the heights of the edge plate 120 and the top plate 110 (S320)).

The height value measured by the laser sensor 170 may be stored (measured value storage step (S330)).

The height values of the edge plate 120 and the top plate 110 measured by the laser sensor 170 are compared with a set reference value (measured value comparison step (S340)).

Here, if the measured height value exceeds the reference value, it is determined that the flatness of the stage is out of the standard flatness, a stage flatness error is generated, and the occurrence of the error is notified (stage flatness error generation step ( S350)). In addition, when the measured height value exceeds the reference value, it is determined that the flatness of the stage is within the reference flatness, and the screen printing process is performed.

6 is a flowchart schematically illustrating a method (S400) of checking a warpage of a substrate 180 during a screen printing process of a screen printer in a flatness inspection method of a screen printer 100 according to an embodiment of the present invention. . 7 is a diagram schematically illustrating a warpage check operation of a substrate 180 during a screen printing process of the screen printer in the flatness inspection method of the screen printer 100 according to an embodiment of the present invention.

Referring to FIGS. 6 and 7 , when the substrate 180 that has been moved for automatic production is excessively bent, adhesion may decrease and printing defects may occur. Accordingly, there is a need to inspect the flatness of the moved substrate 180 for automatic production during the screen printing process of the screen printer.

Accordingly, in order to check the warpage of the substrate 180 for flatness correction during the screen printing process of the screen printer, after starting automatic production, the laser sensor 170 is designated by the edge clamp of the stage. It moves to the position (moving step of the laser sensor 170 (S410)).

The laser sensor 170 moved to the designated position of the edge clamp measures the distance value of the upper surface of the edge clamp (measuring the distance value of the upper surface of the edge clamp (S420)).

After measuring the distance value of the upper surface of the edge clamp, the laser sensor 170 is moved to a designated position on the substrate 180 (moving step of the laser sensor 170 (S430)).

The laser is moved to the designated position of the substrate 180, and the distance value of the upper surface of the substrate 180 is measured (measuring the distance value of the upper surface of the substrate 180 (S440)).

After calculating the difference between the distance value of the upper surface of the edge clamp measured by the laser sensor 170 and the distance value of the upper surface of the substrate 180, it is determined whether the calculated difference value exceeds a set reference value ( Comparing the detected difference value and the reference value (S450)).

When the difference value exceeds the reference value, it is determined that the board 180 is warped when determining whether or not the board 180 is warpage, an error is generated and a notification about the error is provided so that the user can take action as well as production can be stopped (error occurrence and production stop step (S470)). Also, if the difference value does not exceed the reference value, it is determined that the warpage of the substrate 180 is within a normal range, and the screen fritting process is performed (screen printing process step S460).

8 is a flowchart schematically illustrating a method of checking the flatness of a mask 160 (S500) during a screen printing process of the screen printer in the flatness inspection method of the screen printer 100 according to an embodiment of the present invention. . 9 is a diagram schematically illustrating an operation of checking the flatness of a mask 160 in the flatness inspection method of the screen printer 100 according to an embodiment of the present invention.

Referring to FIGS. 8 and 9 , if the mask 160 is warped or bent during the screen printing process of the screen printer, the flatness of the mask 160 needs to be inspected as the degree of adhesion decreases. That is, the heights of four places of the mask 160, for example, the corners, are measured, and flatness is determined based on the height difference.

Specifically, in order to check the flatness of the mask 160 for flatness correction during the screen printing process of a screen printer, after starting automatic production, the laser sensor 170 is moved to a designated position on the mask 160. It moves (laser sensor 170 moving step (S510)).

The laser sensor 170 moved to the designated position of the mask 160 measures the distance value from the designated position of the mask 160 (measuring the distance value of the mask 160 at the designated position (S520)) .

Also, the laser sensor 170 is moved to another designated position of the mask 160 (moving the laser sensor 170 step (S530)).

The laser sensor 170 moved to another designated position of the mask 160 measures the distance value from the designated position of the mask 160 (measuring the distance value of the mask 160 at another designated position (S540). )).

The difference between the distance values measured at the designated position and the other designated position is compared with a set reference value (comparing the difference value between the measured values and the reference value (S550)).

Here, if the difference value exceeds the reference value, it is determined that the mask 160 is not flat and has warpage or distortion, and an error is generated, informing the user, and production can be stopped (error occurrence and production stop step ( S570)).

In addition, if the difference value does not exceed the reference value, it is determined that the mask 160 is flat, and the screen printing process proceeds (screen printing process step (S560)).

Although the embodiments of the present invention have been described with reference to the above and accompanying drawings, those skilled in the art to which the present invention pertains can implement the present invention in other specific forms without changing the technical spirit or essential features. You will understand that there is Therefore, the embodiments described above should be understood as illustrative in all respects and not limiting.

(Description of code)

100: screen printer

110: top plate

120: edge plate

130: backup block

140: auxiliary block

150: motor

160: mask

170: laser sensor

180: substrate

Claims

The flatness inspection method of the screen printer,

Compensating the flatness before the screen printing process of the screen printer through a sensor provided in the screen printer, and correcting the flatness during the screen printing process of the screen printer,

Checking the flatness of the substrate, backup block and stage of the screen printer before the screen printing revolution of the screen printer, and checking the flatness of the warpage and mask of the substrate of the screen printer during the screen printing process of the screen printer ,

A method for checking the flatness of a screen printer.
According to claim 1,

The sensor unit includes a laser sensor,

The laser sensor is mounted on the gantry of the screen printer and moved to a designated position for flatness correction before the screen printing revolution of the screen printer and flatness correction during the screen printing process of the screen printer.

A method for checking the flatness of a screen printer.
According to claim 2,

The value measured by the sensor unit is applied to the control unit, and the control unit compares the measured value with a reference value,

The control unit stores a reference value for the height difference, a coordinate value of a location to be measured, and a reference height value measured at the measurement location, and compares the measured value with the reference value to detect a height difference.

A method for checking the flatness of a screen printer.
According to claim 1,

The step of correcting the flatness before the screen printing revolution of the screen printer,

automatically correcting the height of the substrate by measuring the heights of the stage and the substrate;

Checking the normal installation of the backup block by measuring the height of the edge clamp of the stage and the backup block; and

Checking the flatness of the stage through measured values at designated positions of the edge plate and the top plate of the stage,

A method for checking the flatness of a screen printer.
The method of claim 4, wherein the step of correcting the height of the substrate,

moving and fixing the substrate to a position for printing;

measuring heights of the upper surface of the stage and the upper surface of the substrate through a laser sensor;

storing a height value of the upper surface of the stage and a value of the upper surface of the substrate; and

Comprising a step of comparing the height difference between the height value of the upper surface of the stage and the upper surface of the substrate with a set reference value,

A method for checking the flatness of a screen printer.
The method of claim 5, wherein in the step of comparing the height difference,

Correcting the height of the substrate by adjusting the height of the stage through a motor so that the height difference is less than the reference value when the height difference exceeds the reference value.

A method for checking the flatness of a screen printer.
The method of claim 4, wherein the checking of the normal installation of the backup block comprises:

moving a laser sensor to a designated position of the edge clamp of the stage;

measuring a distance value of the edge clamp with the laser sensor;

moving the laser sensor to a designated position of the backup block;

measuring a distance value of the backup block with the laser sensor; and

Determining whether the difference between the distance value of the edge clamp and the distance value of the backup block exceeds a set reference value,

A method for checking the flatness of a screen printer.
The method of claim 7, wherein in the step of determining a difference value between the distance values,

When the difference value exceeds the reference value, an error is generated and production is stopped, and when the difference value does not exceed the reference value, the screen printing process is continued.

A method for checking the flatness of a screen printer.
The method of claim 4, wherein the step of checking the flatness of the stage comprises:

moving the laser sensor to designated positions on the edge plate and top plate of the stage;

measuring height values at designated positions of the edge plate and the top plate; and

Comprising the step of comparing the measured height value with a set reference value,

A method for checking the flatness of a screen printer.
10. The method of claim 9, wherein in the step of comparing the height value,

When the measured height value exceeds the reference value, the stage flatness error is generated and the occurrence of the error is notified;

If the measured height value does not exceed the reference value, the screen printing process is performed.

A method for checking the flatness of a screen printer.
According to claim 1,

The step of correcting the flatness during the screen printing process of the screen printer,

Checking the warpage of the substrate by measuring the edge clamp of the stage and the height value of the substrate; and

Including the step of checking the flatness of the mask by measuring the height values of the set positions of the mask,

A method for checking the flatness of a screen printer.
12. The method of claim 11, wherein checking the warpage of the board comprises:

moving the laser sensor to a designated position of an edge clamp of the stage;

measuring a distance value of an upper surface of the edge clamp with the laser sensor;

moving the laser sensor to a designated position on the substrate;

measuring a distance value of the upper surface of the substrate with the laser sensor; and

Determining whether a difference value between a distance value of the upper surface of the edge clamp and a distance value of the upper surface of the substrate exceeds a set reference value,

A method for checking the flatness of a screen printer.
13. The method of claim 12, wherein in the step of determining a difference value between the distance values,

If the difference value exceeds the reference value, an error is generated and production is stopped, and if the difference value does not exceed the reference value, the screen fritting process is performed.

A method for checking the flatness of a screen printer.
The method of claim 11, wherein the step of checking the flatness of the mask comprises:

moving the laser sensor to a designated position on the mask;

measuring a distance value from a designated position of the mask with the laser sensor;

moving the laser sensor to another designated location on the mask;

measuring a distance value from a designated position of the mask with the laser sensor; and

Comprising the step of comparing the difference value of the measured values with a set reference value,

A method for checking the flatness of a screen printer.
The method of claim 14, In the step of comparing the measured values,

If the difference value exceeds the reference value, an error is generated and production is stopped, and if the difference value does not exceed the reference value, the screen printing process is performed.

A method for checking the flatness of a screen printer.