WO2023082702A1 - Chip for high-speed signal transmission, and chip stacking structure - Google Patents

Chip for high-speed signal transmission, and chip stacking structure Download PDF

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Publication number
WO2023082702A1
WO2023082702A1 PCT/CN2022/107767 CN2022107767W WO2023082702A1 WO 2023082702 A1 WO2023082702 A1 WO 2023082702A1 CN 2022107767 W CN2022107767 W CN 2022107767W WO 2023082702 A1 WO2023082702 A1 WO 2023082702A1
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WIPO (PCT)
Prior art keywords
chip
ground pad
transmission line
electrically connected
signal
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PCT/CN2022/107767
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French (fr)
Chinese (zh)
Inventor
胡立辉
李志伟
于飞
史文俊
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华为技术有限公司
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Publication of WO2023082702A1 publication Critical patent/WO2023082702A1/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/52Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/528Geometry or layout of the interconnection structure
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/065Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/065Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L25/0657Stacked arrangements of devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
    • H01L2225/04All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
    • H01L2225/065All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L2225/06503Stacked arrangements of devices
    • H01L2225/06513Bump or bump-like direct electrical connections between devices, e.g. flip-chip connection, solder bumps

Definitions

  • the present application relates to the field of chip technology, and in particular to a chip for high-speed signal transmission, a chip stacking structure, a chip packaging structure and electronic equipment.
  • the transmission rate of signals between any two chips needs to be further improved (for example, requires The transmission rate is increased to 200Gbps), so that the transmission rate of the communication link of the communication system to which any two chips belong is also increased.
  • bandwidth is an important factor affecting the transmission rate. Specifically, the larger the bandwidth, the higher the transmission rate; the smaller the bandwidth, the lower the transmission rate. For two chips, the greater the bandwidth between them, the greater the signal transmission rate between the two chips.
  • two chips are usually connected by wire bonding (WB).
  • the first chip 31 and the second chip 32 are connected by wires 5 .
  • the present application provides a chip for high-speed signal transmission and a chip stacking structure, which are used to solve the problem of limited signal transmission rate between two chips in the prior art.
  • the present application also provides a chip packaging structure and electronic equipment including the aforementioned chip or the aforementioned chip stacking structure.
  • the present application provides a chip, which includes a signal pad, a first ground pad, an active area, a first transmission line, and a second transmission line.
  • the signal pad is electrically connected to the active area through the first transmission line
  • the first ground pad is electrically connected to the active area through the second transmission line.
  • the length of the second transmission line is less than the distance between the signal pad and the first ground pad and the first The sum of the lengths of the transmission lines.
  • the signal pad is closer to the first edge of the chip relative to the active area, the first ground pad is closer to the first edge of the chip than the active area, or the distance between the first ground pad and the first edge and the active area The distance from the region to the first edge is equal.
  • reducing the equivalent inductance of the second transmission line by reducing the length of the second transmission line is conducive to improving the resonant frequency of the transmission link between any two chips, thereby improving the inductance of any two chips. transfer rate between.
  • the second transmission line connecting the first ground pad and the active region If it is perpendicular to the first transmission line, it can be considered to meet the equality defined here. However, the first ground pad and the active area can be located on the second transmission line, and it is not necessary to limit that their geometric centers must be located on the second transmission line. Transmission line.
  • the second transmission line is a straight line or a broken line.
  • the first transmission line is a straight line.
  • the chip further includes a second ground pad and a third transmission line, and the second ground pad and the active region pass through The third transmission line is electrically connected, and the length of the third transmission line is less than the sum of the distance from the signal pad to the second ground pad and the length of the first transmission line.
  • the signal pad is closer to the first edge of the chip relative to the active area
  • the second ground pad is closer to the first edge of the chip than the active area, or the distance between the second ground pad and the first edge and the active area The distance from the region to the first edge is equal.
  • reducing the equivalent inductance of the third transmission line by reducing the length of the third transmission line is conducive to improving the resonant frequency of the transmission link between any two chips, thereby improving the inductance of any two chips. transfer rate between.
  • the third transmission line is a straight line or a broken line.
  • the chip further includes a first auxiliary ground pad, and the first The second transmission line includes a first section of transmission line and a second section of transmission line.
  • the first auxiliary ground pad is electrically connected to the active area through a first transmission line
  • the first auxiliary ground pad is electrically connected to the first ground pad through a second transmission line.
  • the equivalent capacitance of the transmission link is reduced by increasing the first auxiliary ground pad, which is conducive to improving the resonant frequency of the transmission link between any two chips, thereby improving the transfer rate between.
  • the chip is a photodiode PD chip, or, the The above chip is a transimpedance amplifier TIA chip.
  • the present application further provides a chip stacking structure, the chip stacking structure includes a first chip and a second chip arranged in a stack.
  • Both the above-mentioned first chip and the above-mentioned second chip are the chips described in the first aspect or any implementation manner of the first aspect.
  • the signal pads of the first chip are electrically connected to the signal pads of the second chip
  • the first ground pads of the first chip are electrically connected to the first ground pads of the second chip.
  • the first chip and the second chip are stacked, which is beneficial to shorten the interconnection path between the two chips, thereby increasing the rate of signal transmission between the first chip and the second chip.
  • both the first chip and the second chip include a first auxiliary ground pad, and the first auxiliary ground pad of the first chip and the second chip The first auxiliary ground pad is electrically connected.
  • both the first chip and the second chip include a second ground pad, and the first chip's The second ground pad is electrically connected to the second ground pad of the second chip.
  • both the first chip and the second chip include a second auxiliary ground
  • the second auxiliary ground pad of the first chip is electrically connected to the second auxiliary ground pad of the second chip.
  • the signal pad of the first chip and the first The signal pads of the two chips are electrically connected by soldering material.
  • the first ground pad of the first chip is electrically connected to the first ground pad of the second chip through soldering material.
  • the present application further provides a chip packaging structure, which includes a packaging substrate and the chip stack structure according to any one of the implementation manners of the second aspect, and the packaging substrate is electrically connected to the chip stack structure.
  • the present application further provides an electronic device, the electronic device includes a printed circuit board and the chip packaging structure described in the third aspect, the printed circuit board is electrically connected to the chip packaging structure.
  • Figure 1 is a schematic structural diagram of a WB connection between any two chips
  • FIG. 2 is a schematic structural diagram of the electronic device 1;
  • FIG. 3 is a schematic diagram of the internal structure of the optical module
  • FIG. 4 is a schematic structural view of the first chip 31
  • FIG. 5 is a schematic structural view of the second chip 32
  • FIG. 6 is a schematic structural diagram of a first chip 31 and a second chip 32 stacked
  • 7A-7B are simulation data diagrams of signal transmission performance between the first chip 31 and the second chip 32;
  • FIG. 9 is an equivalent circuit diagram in which the first chip 31 and the second chip 32 are electrically connected by FC;
  • 10A-10B are simulation data diagrams of signal transmission performance between the first chip 31 and the second chip 32 .
  • the embodiment of the present application provides an electronic device 1 .
  • the electronic device 1 includes, but is not limited to, an optical communication device, where the optical communication device may be, for example, an optical module, an optical engine, and an optical device.
  • the electronic device 1 includes a chip package structure 10, a printed circuit board (printed circuit board, PCB) 11 and an electrical connection structure 12, and the chip package structure 10 is electrically connected to the PCB 11 through the electrical connection structure 12, so that the chip package The structure 10 can realize signal transmission with other devices on the PCB 11 .
  • a chip package structure 10 a printed circuit board (printed circuit board, PCB) 11 and an electrical connection structure 12, and the chip package structure 10 is electrically connected to the PCB 11 through the electrical connection structure 12, so that the chip package The structure 10 can realize signal transmission with other devices on the PCB 11 .
  • the electrical connection structure 12 may be a ball grid array (BGA), or a flexible printed circuit (FPC).
  • BGA ball grid array
  • FPC flexible printed circuit
  • the electrical connection structure 12 can also use a connection terminal with a slot-type fixing structure. (socket), the connection terminal can also be called a connector or a socket.
  • Figure 3 shows the main functional modules and connections between modules in a typical optical module.
  • the electronic device 1 may also include a transmitting optical component (Transmitter Optical Sub-Assembly, TOSA), a clock signal recovery (Clock Data Recovery, CDR) or an optical digital signal processing (Optical Digital Signal Process, oDSP).
  • TOSA Transmitter Optical Sub-Assembly
  • CDR clock Data Recovery
  • oDSP optical digital signal processing
  • the above-mentioned chip package structure 10 can be used as a Receiver Optical Sub-Assembly (ROSA).
  • ROSA Receiver Optical Sub-Assembly
  • the signal flow direction in the optical module is: the electrical signal transmitted from the PCB11 is shaped by the CDR or oDSP and transmitted to the TOSA.
  • the TOSA is used to convert the electrical signal into an optical signal and transmit the optical signal into the optical fiber.
  • ROSA receives the optical signal from the optical fiber, converts the optical signal into an electrical signal, and transmits the electrical signal to the CDR or oDSP, and the CDR or oDSP restores the electrical signal.
  • the chip package structure 10 will be described below.
  • the chip package structure 10 includes a chip stack structure 20 , a package substrate 21 and a solder bump 22 .
  • the chip stack structure 20 is fixed on a package substrate 21 , and the package substrate 21 is used to carry the chip stack structure 20 .
  • the chip stack structure 20 can be electrically connected to the packaging substrate 21 through bumps 22 .
  • the embodiment of the present application also provides a chip stacking structure 20 .
  • the chip stack structure 20 includes a first chip 31 , a second chip 32 and soldering materials.
  • the first chip 31 and the second chip 32 are stacked and arranged, and the first chip 31 and the second chip 32 are electrically connected by soldering material.
  • the soldering material may be a copper pillar (Copper Pillar) or a flip-chip flip-chip soldering bump (Controlled Collapsed Chip Connection Bump, C4Bump) or a gold bump (Gold Bump).
  • the first chip 31 and the second chip 32 are connected in a flip chip (Flip Chip, FC) manner.
  • FC Flip Chip
  • the interconnection path between the first chip 31 and the second chip 32 can be shortened, thereby increasing the rate of signal transmission between the first chip 31 and the second chip 32 .
  • the first chip 31 includes an active area 310 , a first ground pad 311 , a second ground pad 312 , a signal pad 313 , a first transmission line 314 , a second transmission line 315 and a third transmission line 316 .
  • the active area 310 is the part where the first chip 31 performs functions
  • the signal pad 313 is used for signal transmission
  • the first ground pad 311 and the second ground pad 312 are used for ground protection.
  • the signal pad 313 is electrically connected to the active area 310 through the first transmission line 314; the first ground pad 311 is electrically connected to the active area 310 through the second transmission line 315; the second ground pad 312 is electrically connected to the active area 310 through the third
  • the transmission line 316 is electrically connected.
  • the second chip 32 includes an active area 320, a first ground pad 321, a second ground pad 322, a signal pad 323, a first transmission line 324, a second transmission line 325 and a third transmission line 326 .
  • the active area 320 is the part where the second chip 32 performs functions
  • the signal pad 323 is used for signal transmission
  • the first ground pad 321 and the second ground pad 322 are used for ground protection.
  • the signal pad 323 is electrically connected to the active area 320 through the first transmission line 324; the first ground pad 321 is electrically connected to the active area 320 through the second transmission line 325; the second ground pad 322 is electrically connected to the active area 320 through the third
  • the transmission line 326 is electrically connected.
  • the first chip 31 and the second chip 32 are connected in a FC manner.
  • the first ground pad 311 , the second ground pad 312 and the signal pad 313 of the first chip 31 are regularly arranged, that is, the above three pads are located on the same straight line.
  • the first ground pad 321 , the second ground pad 322 and the signal pad 323 of the second chip 32 are regularly arranged, that is, the above three pads are located on the same straight line.
  • the first ground pad 311 of the first chip 31 is electrically connected to the first ground pad 321 of the second chip 32; the second ground pad 312 of the first chip 31 is electrically connected to the second ground pad 322 of the second chip 32 Connection; the signal pad 313 of the first chip 31 is electrically connected to the signal pad 323 of the second chip 32 .
  • the above-mentioned first chip 31 may be an optical chip, such as a photodiode (Photo Diode, PD) or APD (Avalanche Photo Diode, avalanche photodiode).
  • the above-mentioned second chip 32 may be an electrical chip, such as a TIA (Trans-impedance Amplifier, transimpedance amplifier).
  • the chip packaging structure 10 may be a ROSA.
  • the signal flow direction in the chip packaging structure 10 is: the optical signal transmitted from the optical fiber is transmitted to the PD, the PD converts the optical signal into an electrical signal, and transmits the electrical signal to the TIA, and the TIA amplifies the electrical signal, and
  • the amplified electrical signal is transmitted to other electrical processing chips on the electronic device 1 , such as CDR or oDSP, and the amplified electrical signal is further processed by the CDR or oDSP.
  • FIG. 7A is used to analyze the resonance and 3dB bandwidth of the transmission link between the first chip 31 and the second chip 32
  • FIG. 7B is used to analyze the group of the transmission link between the first chip 31 and the second chip 32. Latency performance.
  • bandwidth is an important factor affecting the transmission rate. Specifically, the larger the bandwidth, the higher the transmission rate; the smaller the bandwidth, the lower the transmission rate. Correspondingly, the greater the bandwidth between the two chips, the greater the signal transmission rate between the two chips. Resonance is an important factor that limits the bandwidth between any two chips, and at the same time, resonance will cause the group delay performance of the signal to deteriorate. Among them, resonance refers to the resonance that occurs in the transmission link between two chips.
  • the 3dB bandwidth refers to the corresponding frequency bandwidth when the amplitude of the signal is equal to twice the root of half of the maximum value.
  • the group delay performance is used to characterize the phase of each frequency component of the signal. The smaller the group delay, the smaller the phase difference of each frequency component transmission, which is more conducive to high-speed signal transmission.
  • the abscissa represents the frequency, and the unit is GHz; the ordinate represents the insertion loss of the signal attenuation, and the unit is dB. It can be seen from FIG. 7A that the signal has a large resonance at 110 GHz, and the 3dB bandwidth is 78 GHz.
  • the abscissa represents the frequency, and the unit is GHz; the ordinate represents the group delay Group Delay of the signal on the transmission link, and the unit is ps.
  • the group delay curve becomes significantly curved, that is, the flatness of the group delay curve decreases.
  • the reduced flatness of the group delay curve means that the group delay performance of the signal deteriorates sharply, which is not conducive to achieving a higher transmission rate of the signal between the first chip 31 and the second chip 32 .
  • the present application further provides a chip, which may be the above-mentioned first chip 31 or the above-mentioned second chip 32 .
  • the chip is described below through a specific embodiment.
  • the first chip 31 includes an active area 310, a first ground pad 311, a second ground pad 312, a signal pad 313, a first transmission line 314, a second transmission line 315 and The third transmission line 316 .
  • the signal pad 313 is electrically connected to the active area 310 through the first transmission line 314;
  • the first ground pad 311 is electrically connected to the active area 310 through the second transmission line 315;
  • the second ground pad 312 is electrically connected to the active area 310 through
  • the third transmission line 316 is electrically connected.
  • the length of the second transmission line 315 is less than the sum of the distance from the signal pad 313 to the first ground pad 311 and the length of the first transmission line 314 .
  • the signal pad 313 is closer to the first edge 100 of the first chip 31 relative to the active region 310
  • the first ground pad 311 is closer to the first edge 100 of the first chip 31 relative to the active region 310, or, the first The distance between the ground pad 311 and the first edge 100 and the distance between the active region 310 and the first edge 100 are equal.
  • the first transmission line 314 is a straight line.
  • the second transmission line 315 is a straight line or a broken line.
  • the third transmission line 316 is a straight line or a broken line.
  • the equality here should be based on the understanding of those skilled in the art, and should not be rigidly understood as absolute equality in the mathematical sense.
  • the second transmission line connecting the first ground pad and the active region is perpendicular to the first
  • the transmission lines can be considered to be equal as defined here. However, it is only necessary that the first ground pad and the active area be located on the second transmission line, and it is not necessary to define that their geometric centers must be located on the second transmission line.
  • the second transmission line 315 is perpendicular to the first transmission line 314
  • the third transmission line 316 is perpendicular to the first transmission line 314
  • the included angle between the second transmission line 315 and the first transmission line 314 is an acute angle
  • the included angle between the third transmission line 316 and the first transmission line 314 is an acute angle.
  • the positions of the first ground pad 311 and the second ground pad 312 may be unchanged or changed.
  • the length of the part of the second transmission line 315 parallel to the first transmission line 314 is shorter than the length of the first transmission line 314, and the length of the part of the third transmission line 316 parallel to the first transmission line 314 The length is less than the length of the first transmission line 314 .
  • the first ground pad 311 is closer to the active area 310
  • the second ground pad 312 is closer to the active area 310 .
  • the second chip 32 includes an active area 320 , a first ground pad 321 , a second ground pad 322 , a signal pad 323 , a first transmission line 324 , a second transmission line 325 and a third transmission line 326 .
  • the signal pad 323 is electrically connected to the active area 320 through the first transmission line 324;
  • the first ground pad 321 is electrically connected to the active area 320 through the second transmission line 325;
  • the second ground pad 322 is electrically connected to the active area 320 through
  • the third transmission line 326 is electrically connected.
  • the pads and transmission lines on the second chip 32 adopt the same arrangement as the pads and transmission lines on the first chip 31 , and the first chip 31 and the second chip 32 are electrically connected by FC. Specifically, the first ground pad 311 of the first chip 31 is electrically connected to the first ground pad 321 of the second chip 32; the second ground pad 312 of the first chip 31 is connected to the second ground pad of the second chip 32 The pads 322 are electrically connected; the signal pads 313 of the first chip 31 are electrically connected to the signal pads 323 of the second chip 32 .
  • C1 is the equivalent capacitance of the signal pad 313 of the first chip 31;
  • C2 is the common equivalent capacitance of the first ground pad 311 of the first chip 31 and the second ground pad 312 of the first chip 31.
  • C3 is the equivalent capacitance of the signal pad 323 of the second chip 32 ;
  • C4 is the common equivalent capacitance of the first ground pad 321 of the second chip 32 and the second ground pad 322 of the second chip 32 .
  • the above pads are all connected to ground.
  • B1 is a solder material between the signal pad 312 of the first chip 31 and the signal pad 323 of the second chip 32 .
  • B2 is between the first ground pad 311 of the first chip 31 and the first ground pad 321 of the second chip 32, and the second ground pad 312 of the first chip 31 and the first ground pad of the second chip 32. Solder material between discs 322.
  • L1 is the equivalent inductance of the first transmission line 314 of the first chip 31
  • L2 is the overall equivalent inductance of the second transmission line 315 of the first chip 31 and the third transmission line 316 of the first chip 31
  • L3 is the equivalent inductance of the first transmission line 324 of the second chip 32
  • L4 is the overall equivalent inductance of the second transmission line 325 of the second chip 32 and the third transmission line 326 of the second chip 32 .
  • the resonant frequency F of the transmission link between the first chip 31 and the second chip 32 is proportional to the reciprocal of the square root of (L*C), that is, the resonant frequency F is inversely proportional to the square root of (L*C).
  • C represents the equivalent total capacitance of the transmission link
  • L represents the equivalent total inductance of the transmission link, that is, L includes L1, L2, L3, and L4. Therefore, by reducing the length of the transmission line, the equivalent inductance of the transmission link between the first chip 31 and the second chip 32 is reduced, which is conducive to improving the resonant frequency of the transmission link, thereby improving bandwidth and group delay performance , so as to increase the transmission rate between the first chip 31 and the second chip 32 .
  • the above-mentioned first chip 31 may be an optical chip, such as PD (Photo Diode, photodiode) or APD (Avalanche Photo Diode, avalanche photodiode).
  • the above-mentioned second chip 32 may be an electrical chip, such as a TIA (Trans-impedance Amplifier, transimpedance amplifier).
  • Fig. 10A is used for analyzing the resonance and 3dB bandwidth of the transmission link between the first chip 31 and the second chip 32
  • Fig. 10B is used for analyzing the group of the transmission link between the first chip 31 and the second chip 32 Latency performance.
  • the abscissa represents the frequency, and the unit is GHz; the ordinate represents the insertion loss of the signal attenuation, and the unit is dB.
  • the WB interconnection and the traditional FC interconnection.
  • the resonant frequency of the above embodiment is extended from 110 GHz to 160 GHz, and the 3dB bandwidth is increased from 74 GHz to 105 GHz.
  • the abscissa represents the frequency, and the unit is GHz; the ordinate represents the group delay Group Delay of the signal on the transmission link, and the unit is ps.
  • the group delay curve of the above embodiment is flatter, that is, each frequency component of the signal sent by the first chip 31, after passing through the transmission link, are transmitted to the second chip 32 almost simultaneously, which shows that the above embodiment can greatly improve the group delay performance of the transmission link.

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  • Microelectronics & Electronic Packaging (AREA)
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Abstract

Provided in the present application is a chip for high-speed signal transmission. The chip comprises a signal pad, a first ground pad, an active area, a first transmission line, and a second transmission line. The length of the second transmission line is less than the sum of the distance from the signal pad to the first ground pad and the length of the first transmission line. Further provided in the present application is another chip for high-speed signal transmission. A first auxiliary ground pad of the chip is electrically connected to the active area by means of the second transmission line; and the first auxiliary ground pad is electrically connected to the first ground pad by means of a third transmission line. By using the two chips provided in the present application, the signal transmission rate between any two chips can be improved, thereby improving the transmission rate of a communication link of a communication system to which the any two chips belong. In addition, further provided in the present application are a chip stacking structure using the chips, a chip packaging structure, and an electronic device.

Description

用于高速信号传输的芯片及芯片堆叠结构Chip and chip stack structure for high-speed signal transmission
本申请要求于2021年11月09日提交中国专利局、申请号为202111320892.X、申请名称为“用于高速信号传输的芯片及芯片堆叠结构”的中国专利申请的优先权,其全部内容通过引用结合在本申请中。This application claims the priority of the Chinese patent application with the application number 202111320892.X and the application name "chip and chip stack structure for high-speed signal transmission" submitted to the China Patent Office on November 09, 2021, the entire content of which is passed References are incorporated in this application.
技术领域technical field
本申请涉及芯片技术领域,尤其涉及一种用于高速信号传输的芯片、芯片堆叠结构、芯片封装结构及电子设备。The present application relates to the field of chip technology, and in particular to a chip for high-speed signal transmission, a chip stacking structure, a chip packaging structure and electronic equipment.
背景技术Background technique
现如今,通信系统对其内部芯片间传输速率的要求越来越高。以双倍密度的四通道小封装可插拔(Quad Small Form Factor Pluggable-Dual Density,QSFP-DD)模块为例,任意两个芯片之间的信号的传输速率还需要进一步的提升(例如,要求将传输速率提升至200Gbps),如此,该任意两个芯片所属的通信系统的通信链路的传输速率也得以提升。应当知道的是,带宽是影响传输速率的一个重要因素,具体的,带宽越大,传输速率越大;带宽越小,传输速率越小。对于两个芯片来说,它们之间的带宽越大,则该两个芯片之间的信号传输速率也越大。当前,两个芯片之间通常采用引线键合(Wire Bonding,WB)的连接方式,如图1所示,第一芯片31和第二芯片32通过引线5进行连接。采用WB接合的两个芯片,由于它们之间的带宽过小,导致它们之间的信号传输速率较小,且这种信号传输速率已经无法满足当前通信系统对通信链路的传输速率的要求。Nowadays, communication systems require higher and higher transmission rates between their internal chips. Taking the quad small form factor pluggable (Quad Small Form Factor Pluggable-Dual Density, QSFP-DD) module with double density as an example, the transmission rate of signals between any two chips needs to be further improved (for example, requires The transmission rate is increased to 200Gbps), so that the transmission rate of the communication link of the communication system to which any two chips belong is also increased. It should be known that bandwidth is an important factor affecting the transmission rate. Specifically, the larger the bandwidth, the higher the transmission rate; the smaller the bandwidth, the lower the transmission rate. For two chips, the greater the bandwidth between them, the greater the signal transmission rate between the two chips. Currently, two chips are usually connected by wire bonding (WB). As shown in FIG. 1 , the first chip 31 and the second chip 32 are connected by wires 5 . Two chips bonded by WB, because the bandwidth between them is too small, the signal transmission rate between them is small, and this signal transmission rate can no longer meet the transmission rate requirements of the current communication system for the communication link.
发明内容Contents of the invention
本申请提供一种用于高速信号传输的芯片以及芯片堆叠结构,用于解决现有技术中两个芯片之间信号传输速率受限的问题。另外,本申请还提供一种包括前述芯片或者前述芯片堆叠结构的芯片封装结构及电子设备。The present application provides a chip for high-speed signal transmission and a chip stacking structure, which are used to solve the problem of limited signal transmission rate between two chips in the prior art. In addition, the present application also provides a chip packaging structure and electronic equipment including the aforementioned chip or the aforementioned chip stacking structure.
第一方面,本申请提供了一种芯片,该芯片包括信号焊盘、第一地焊盘、有源区、第一传输线以及第二传输线。信号焊盘与有源区通过第一传输线电连接,第一地焊盘与有源区通过第二传输线电连接,第二传输线的长度小于信号焊盘到第一地焊盘的距离与第一传输线的长度之和。信号焊盘相对于有源区更靠近芯片的第一边缘,第一地焊盘相对于有源区更靠近芯片的第一边缘,或者,第一地焊盘与第一边缘的距离以及有源区与第一边缘的距离相等。在上述技术方案中,通过减小第二传输线的长度来减小第二传输线的等效电感量,有利于提高任意两个芯片之间的传输链路的谐振频率,进而提高该任意两个芯片之间的传输速率。In a first aspect, the present application provides a chip, which includes a signal pad, a first ground pad, an active area, a first transmission line, and a second transmission line. The signal pad is electrically connected to the active area through the first transmission line, and the first ground pad is electrically connected to the active area through the second transmission line. The length of the second transmission line is less than the distance between the signal pad and the first ground pad and the first The sum of the lengths of the transmission lines. The signal pad is closer to the first edge of the chip relative to the active area, the first ground pad is closer to the first edge of the chip than the active area, or the distance between the first ground pad and the first edge and the active area The distance from the region to the first edge is equal. In the above technical solution, reducing the equivalent inductance of the second transmission line by reducing the length of the second transmission line is conducive to improving the resonant frequency of the transmission link between any two chips, thereby improving the inductance of any two chips. transfer rate between.
需要说明的是,上述的相等应当以本领域技术人员的理解为准,不应僵化的理解为数学意义上的绝对相等,连接所述第一地焊盘和所述有源区的第二传输线垂直于第一传输线的话,可以认为是满足此处限定的相等的,但是,第一地焊盘和有源区均位于第二传输线即可,不必要限定必须是它们的几何中心位于该第二传输线。It should be noted that the above equality should be based on the understanding of those skilled in the art, and should not be rigidly understood as absolute equality in the mathematical sense. The second transmission line connecting the first ground pad and the active region If it is perpendicular to the first transmission line, it can be considered to meet the equality defined here. However, the first ground pad and the active area can be located on the second transmission line, and it is not necessary to limit that their geometric centers must be located on the second transmission line. Transmission line.
结合第一方面,在第一种可能的实现方式中,所述第二传输线为直线或折线。With reference to the first aspect, in a first possible implementation manner, the second transmission line is a straight line or a broken line.
需要说明的是,在本申请中,所述第一传输线为直线。It should be noted that, in this application, the first transmission line is a straight line.
结合第一方面或第一方面的第一种可能的实现方式,在第二种可能的实现方式中,芯片还包括第二地焊盘与第三传输线,第二地焊盘与有源区通过第三传输线电连接,第三传输线的长度小于信号焊盘到第二地焊盘的距离与第一传输线的长度之和。信号焊盘相对于有源区更靠近芯片的第一边缘,第二地焊盘相对于有源区更靠近芯片的第一边缘,或者,第二地焊盘与第一边缘的距离以及有源区与第一边缘的距离相等。在上述技术方案中,通过减小第三传输线的长度来减小第三传输线的等效电感量,有利于提高任意两个芯片之间的传输链路的谐振频率,进而提高该任意两个芯片之间的传输速率。With reference to the first aspect or the first possible implementation of the first aspect, in the second possible implementation, the chip further includes a second ground pad and a third transmission line, and the second ground pad and the active region pass through The third transmission line is electrically connected, and the length of the third transmission line is less than the sum of the distance from the signal pad to the second ground pad and the length of the first transmission line. The signal pad is closer to the first edge of the chip relative to the active area, the second ground pad is closer to the first edge of the chip than the active area, or the distance between the second ground pad and the first edge and the active area The distance from the region to the first edge is equal. In the above technical solution, reducing the equivalent inductance of the third transmission line by reducing the length of the third transmission line is conducive to improving the resonant frequency of the transmission link between any two chips, thereby improving the inductance of any two chips. transfer rate between.
结合第一方面的第二种可能的实现方式,在第三种可能的实现方式中,所述第三传输线为直线或折线。With reference to the second possible implementation manner of the first aspect, in a third possible implementation manner, the third transmission line is a straight line or a broken line.
结合第一方面或第一方面的第一种至第三种可能的实现方式中任一种实现方式,在第四种可能的实现方式中,所述芯片还包括第一辅助地焊盘,第二传输线包括第一段传输线和第二段传输线。第一辅助地焊盘与有源区通过第一段传输线电连接,第一辅助地焊盘与第一地焊盘通过第二段传输线电连接。In combination with the first aspect or any one of the first to third possible implementations of the first aspect, in a fourth possible implementation, the chip further includes a first auxiliary ground pad, and the first The second transmission line includes a first section of transmission line and a second section of transmission line. The first auxiliary ground pad is electrically connected to the active area through a first transmission line, and the first auxiliary ground pad is electrically connected to the first ground pad through a second transmission line.
在上述技术方案中,通过增加第一辅助地焊盘来减小传输链路的等效电容量,有利于提高任意两个芯片之间的传输链路的谐振频率,进而提高该任意两个芯片之间的传输速率。In the above technical solution, the equivalent capacitance of the transmission link is reduced by increasing the first auxiliary ground pad, which is conducive to improving the resonant frequency of the transmission link between any two chips, thereby improving the transfer rate between.
结合第一方面或第一方面的第一种至第四种可能的实现方式中的任一种实现方式,在第五种可能的实现方式中,所述芯片为光电二极管PD芯片,或者,所述芯片为跨阻放大器TIA芯片。In combination with the first aspect or any one of the first to fourth possible implementations of the first aspect, in a fifth possible implementation, the chip is a photodiode PD chip, or, the The above chip is a transimpedance amplifier TIA chip.
第二方面,本申请还提供了一种芯片堆叠结构,该芯片堆叠结构包括堆叠设置的第一芯片和第二芯片。上述第一芯片和上述第二芯片均为第一方面或第一方面的任一实施方式所述的芯片。其中,所述第一芯片的信号焊盘与所述第二芯片的信号焊盘电连接,所述第一芯片的第一地焊盘与所述第二芯片的第一地焊盘电连接。在上述技术方案中,第一芯片和第二芯片采用堆叠设置,有利于缩短上述两个芯片之间的互连路径,从而提高第一芯片与第二芯片之间信号传输的速率。In a second aspect, the present application further provides a chip stacking structure, the chip stacking structure includes a first chip and a second chip arranged in a stack. Both the above-mentioned first chip and the above-mentioned second chip are the chips described in the first aspect or any implementation manner of the first aspect. Wherein, the signal pads of the first chip are electrically connected to the signal pads of the second chip, and the first ground pads of the first chip are electrically connected to the first ground pads of the second chip. In the above technical solution, the first chip and the second chip are stacked, which is beneficial to shorten the interconnection path between the two chips, thereby increasing the rate of signal transmission between the first chip and the second chip.
结合第二方面,在第一种可能的实现方式中,所述第一芯片和所述第二芯片均包括第一辅助地焊盘,第一芯片的第一辅助地焊盘与第二芯片的第一辅助地焊盘电连接。With reference to the second aspect, in a first possible implementation manner, both the first chip and the second chip include a first auxiliary ground pad, and the first auxiliary ground pad of the first chip and the second chip The first auxiliary ground pad is electrically connected.
结合第二方面或第二方面的第一种可能的实现方式,在第二种可能的实现方式中,所述第一芯片和第二芯片均包括第二地焊盘,所述第一芯片的所述第二地焊盘与所述第二芯片的所述第二地焊盘电连接。With reference to the second aspect or the first possible implementation manner of the second aspect, in the second possible implementation manner, both the first chip and the second chip include a second ground pad, and the first chip's The second ground pad is electrically connected to the second ground pad of the second chip.
结合第二方面、第二方面的第一种可能的实现方式或第二种可能的实现方式,在第三种可能的实现方式中,所述第一芯片和第二芯片均包括第二辅助地焊盘,所述第一芯片的所述第二辅助地焊盘与所述第二芯片的所述第二辅助地焊盘电连接。With reference to the second aspect, the first possible implementation manner or the second possible implementation manner of the second aspect, in a third possible implementation manner, both the first chip and the second chip include a second auxiliary ground The second auxiliary ground pad of the first chip is electrically connected to the second auxiliary ground pad of the second chip.
结合第二方面或第二方面的第一种至第三种实现方式中任一种可能的实现方式,在第四种可能的实现方式中,所述第一芯片的信号焊盘和所述第二芯片的信号焊盘通过焊接材料电连接。所述第一芯片的第一地焊盘与所述第二芯片的第一地焊盘通过焊接材料电连接。With reference to the second aspect or any possible implementation manner of the first to third implementation manners of the second aspect, in a fourth possible implementation manner, the signal pad of the first chip and the first The signal pads of the two chips are electrically connected by soldering material. The first ground pad of the first chip is electrically connected to the first ground pad of the second chip through soldering material.
第三方面,本申请还提供一种芯片封装结构,该芯片封装结构包括封装基板和如第二方面的任一实施方式所述的芯片堆叠结构,封装基板与上述芯片堆叠结构电连接。In a third aspect, the present application further provides a chip packaging structure, which includes a packaging substrate and the chip stack structure according to any one of the implementation manners of the second aspect, and the packaging substrate is electrically connected to the chip stack structure.
第四方面,本申请还提供一种电子设备,该电子设备包括印刷电路板和第三方面所述的芯片封装结构,所述印刷电路板与所述芯片封装结构电连接。In a fourth aspect, the present application further provides an electronic device, the electronic device includes a printed circuit board and the chip packaging structure described in the third aspect, the printed circuit board is electrically connected to the chip packaging structure.
附图说明Description of drawings
图1为任意两个芯片之间采用WB连接的结构示意图;Figure 1 is a schematic structural diagram of a WB connection between any two chips;
图2为电子设备1的结构示意图;FIG. 2 is a schematic structural diagram of the electronic device 1;
图3为光模块的内部结构示意图;FIG. 3 is a schematic diagram of the internal structure of the optical module;
图4为第一芯片31的一种结构示意图;FIG. 4 is a schematic structural view of the first chip 31;
图5为第二芯片32的一种结构示意图;FIG. 5 is a schematic structural view of the second chip 32;
图6为第一芯片31和第二芯片32堆叠设置的结构示意图;FIG. 6 is a schematic structural diagram of a first chip 31 and a second chip 32 stacked;
图7A-图7B为第一芯片31和第二芯片32之间信号传输性能的仿真数据图;7A-7B are simulation data diagrams of signal transmission performance between the first chip 31 and the second chip 32;
图8A-图8C为第一芯片31的结构示意图;8A-8C are schematic structural views of the first chip 31;
图9为第一芯片31与第二芯片32采用FC电连接的等效电路图;FIG. 9 is an equivalent circuit diagram in which the first chip 31 and the second chip 32 are electrically connected by FC;
图10A-图10B为第一芯片31和第二芯片32之间信号传输性能的仿真数据图。10A-10B are simulation data diagrams of signal transmission performance between the first chip 31 and the second chip 32 .
具体实施方式Detailed ways
下面将结合本申请实施例中的附图,对本申请实施例中的技术方案进行描述,显然,所描述的实施例仅仅是本申请一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动的前提下所获得的所有其他实施例,都属于本发明保护的范围。The following will describe the technical solutions in the embodiments of the application with reference to the drawings in the embodiments of the application. Apparently, the described embodiments are only some of the embodiments of the application, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
本申请实施例提供一种电子设备1。该电子设备1包括但不限于为光通信设备,其中,光通信设备例如可以为光模块、光引擎以及光器件等。The embodiment of the present application provides an electronic device 1 . The electronic device 1 includes, but is not limited to, an optical communication device, where the optical communication device may be, for example, an optical module, an optical engine, and an optical device.
请参阅图2,该电子设备1包括芯片封装结构10、印刷电路板(printed circuit board,PCB)11以及电连接结构12,芯片封装结构10通过电连接结构12与PCB11电连接,从而使得芯片封装结构10能够与PCB11上的其他器件实现信号传输。Referring to Fig. 2, the electronic device 1 includes a chip package structure 10, a printed circuit board (printed circuit board, PCB) 11 and an electrical connection structure 12, and the chip package structure 10 is electrically connected to the PCB 11 through the electrical connection structure 12, so that the chip package The structure 10 can realize signal transmission with other devices on the PCB 11 .
该电连接结构12可以是焊球阵列(ball grid array,BGA),还可以是柔性印刷电路(Flexible Printed Circuit,FPC)。在可选择的实施方式中,如果芯片封装结构10的尺寸比较大,为了保障该芯片封装结构10与PCB11电连接的可靠性,电连接结构12也可以采用带有插槽式固定结构的连接端子(socket),该连接端子也可以称为连接器或插接器等。The electrical connection structure 12 may be a ball grid array (BGA), or a flexible printed circuit (FPC). In an optional embodiment, if the size of the chip package structure 10 is relatively large, in order to ensure the reliability of the electrical connection between the chip package structure 10 and the PCB 11, the electrical connection structure 12 can also use a connection terminal with a slot-type fixing structure. (socket), the connection terminal can also be called a connector or a socket.
以下以电子设备1为光模块为例进行说明。请参阅图3,图3为典型光模块内主要功能模块及模块之间的连接。在电子设备1为光模块的情况下,该电子设备1还可以包括发送光组件(Transmitter Optical Sub-Assembly,TOSA)、时钟信号恢复(Clock Data Recovery,CDR)或光数字信号处理(Optical Digital Signal Process,oDSP)。在此情况下,上述芯片封装结构10可以作为接收光组件(Receiver Optical Sub-Assembly,ROSA)。The following description will be made by taking the electronic device 1 as an optical module as an example. Please refer to Figure 3. Figure 3 shows the main functional modules and connections between modules in a typical optical module. In the case that the electronic device 1 is an optical module, the electronic device 1 may also include a transmitting optical component (Transmitter Optical Sub-Assembly, TOSA), a clock signal recovery (Clock Data Recovery, CDR) or an optical digital signal processing (Optical Digital Signal Process, oDSP). In this case, the above-mentioned chip package structure 10 can be used as a Receiver Optical Sub-Assembly (ROSA).
光模块中的信号流向为:从PCB11上传输来的电信号,经过CDR或oDSP整形后传输至TOSA,TOSA用于将电信号转换成光信号,并将所述光信号传输至光纤内。ROSA从光纤中接收光信号,将该光信号转换成电信号,并将电信号传输至CDR或oDSP,由CDR或oDSP对该电信号进行恢复处理。The signal flow direction in the optical module is: the electrical signal transmitted from the PCB11 is shaped by the CDR or oDSP and transmitted to the TOSA. The TOSA is used to convert the electrical signal into an optical signal and transmit the optical signal into the optical fiber. ROSA receives the optical signal from the optical fiber, converts the optical signal into an electrical signal, and transmits the electrical signal to the CDR or oDSP, and the CDR or oDSP restores the electrical signal.
以下对芯片封装结构10进行说明。The chip package structure 10 will be described below.
请参阅图2,该芯片封装结构10包括芯片堆叠结构20、封装基板21以及凸点(solder bump)22。其中,芯片堆叠结构20被固定在封装基板21上,封装基板21用于承载芯片堆叠结构20。芯片堆叠结构20可以通过凸点22与封装基板21电连接。Please refer to FIG. 2 , the chip package structure 10 includes a chip stack structure 20 , a package substrate 21 and a solder bump 22 . Wherein, the chip stack structure 20 is fixed on a package substrate 21 , and the package substrate 21 is used to carry the chip stack structure 20 . The chip stack structure 20 can be electrically connected to the packaging substrate 21 through bumps 22 .
本申请实施例还提供一种芯片堆叠结构20。The embodiment of the present application also provides a chip stacking structure 20 .
请参阅图2,该芯片堆叠结构20包括第一芯片31、第二芯片32以及焊接材料。其中,第一芯片31与第二芯片32堆叠设置,第一芯片31与第二芯片32通过焊接材料电连接。示例性的,焊接材料可以为铜柱(Copper Pillar)或覆晶反扣焊接凸块(Controlled Collapsed Chip Connection Bump,C4Bump)或金凸块(Gold Bump)。Please refer to FIG. 2 , the chip stack structure 20 includes a first chip 31 , a second chip 32 and soldering materials. Wherein, the first chip 31 and the second chip 32 are stacked and arranged, and the first chip 31 and the second chip 32 are electrically connected by soldering material. Exemplarily, the soldering material may be a copper pillar (Copper Pillar) or a flip-chip flip-chip soldering bump (Controlled Collapsed Chip Connection Bump, C4Bump) or a gold bump (Gold Bump).
具体的,第一芯片31与第二芯片32采用芯片倒装(Flip Chip,FC)的方式相连接。采用FC的方式,可以缩短第一芯片31与第二芯片32的互连路径,从而提高第一芯片31与第二芯片32之间信号传输的速率。Specifically, the first chip 31 and the second chip 32 are connected in a flip chip (Flip Chip, FC) manner. By adopting the FC method, the interconnection path between the first chip 31 and the second chip 32 can be shortened, thereby increasing the rate of signal transmission between the first chip 31 and the second chip 32 .
请参阅图4,第一芯片31包括有源区310、第一地焊盘311、第二地焊盘312、信号焊盘313、第一传输线314、第二传输线315以及第三传输线316。其中,有源区310为第一芯片31执行功能的部分,信号焊盘313用于信号的传输,第一地焊盘311和第二地焊盘312用于接地保护。信号焊盘313与有源区310通过第一传输线314电连接;第一地焊盘311与有源区310通过第二传输线315电连接;第二地焊盘312与有源区310通过第三传输线316电连接。Referring to FIG. 4 , the first chip 31 includes an active area 310 , a first ground pad 311 , a second ground pad 312 , a signal pad 313 , a first transmission line 314 , a second transmission line 315 and a third transmission line 316 . Wherein, the active area 310 is the part where the first chip 31 performs functions, the signal pad 313 is used for signal transmission, and the first ground pad 311 and the second ground pad 312 are used for ground protection. The signal pad 313 is electrically connected to the active area 310 through the first transmission line 314; the first ground pad 311 is electrically connected to the active area 310 through the second transmission line 315; the second ground pad 312 is electrically connected to the active area 310 through the third The transmission line 316 is electrically connected.
相对应的,请参阅图5,第二芯片32包括有源区320、第一地焊盘321、第二地焊盘322、信号焊盘323、第一传输线324、第二传输线325以及第三传输线326。其中,有源区320为第二芯片32执行功能的部分,信号焊盘323用于信号的传输,第一地焊盘321和第二地焊盘322用于接地保护。信号焊盘323与有源区320通过第一传输线324电连接;第一地焊盘321与有源区320通过第二传输线325电连接;第二地焊盘322与有源区320通过第三传输线326电连接。Correspondingly, referring to FIG. 5, the second chip 32 includes an active area 320, a first ground pad 321, a second ground pad 322, a signal pad 323, a first transmission line 324, a second transmission line 325 and a third transmission line 326 . Wherein, the active area 320 is the part where the second chip 32 performs functions, the signal pad 323 is used for signal transmission, and the first ground pad 321 and the second ground pad 322 are used for ground protection. The signal pad 323 is electrically connected to the active area 320 through the first transmission line 324; the first ground pad 321 is electrically connected to the active area 320 through the second transmission line 325; the second ground pad 322 is electrically connected to the active area 320 through the third The transmission line 326 is electrically connected.
在一种可选的实施方式中,如图6所示,第一芯片31与第二芯片32采用FC的方式相连接。第一芯片31的第一地焊盘311、第二地焊盘312以及信号焊盘313呈规则排列,也即,上述三种焊盘位于同一直线上。相对应的,第二芯片32的第一地焊盘321、第二地焊盘322以及信号焊盘323呈规则排列,也即,上述三种焊盘位于同一直线上。第一芯片31的第一地焊盘311与第二芯片32的第一地焊盘321电连接;第一芯片31的第二地焊盘312与第二芯片32的第二地焊盘322电连接;第一芯片31的信号焊盘313与第二芯片32的信号焊盘323电连接。In an optional implementation manner, as shown in FIG. 6 , the first chip 31 and the second chip 32 are connected in a FC manner. The first ground pad 311 , the second ground pad 312 and the signal pad 313 of the first chip 31 are regularly arranged, that is, the above three pads are located on the same straight line. Correspondingly, the first ground pad 321 , the second ground pad 322 and the signal pad 323 of the second chip 32 are regularly arranged, that is, the above three pads are located on the same straight line. The first ground pad 311 of the first chip 31 is electrically connected to the first ground pad 321 of the second chip 32; the second ground pad 312 of the first chip 31 is electrically connected to the second ground pad 322 of the second chip 32 Connection; the signal pad 313 of the first chip 31 is electrically connected to the signal pad 323 of the second chip 32 .
上述第一芯片31可以为光芯片,例如光电二极管(Photo Diode,PD)或APD(Avalanche Photo Diode,雪崩光电二极管)。上述第二芯片32可以为电芯片,例如TIA(Trans-impedance Amplifier,跨阻放大器)。The above-mentioned first chip 31 may be an optical chip, such as a photodiode (Photo Diode, PD) or APD (Avalanche Photo Diode, avalanche photodiode). The above-mentioned second chip 32 may be an electrical chip, such as a TIA (Trans-impedance Amplifier, transimpedance amplifier).
在第一芯片31为PD,第二芯片32为TIA的情况下,芯片封装结构10可以为ROSA。In the case that the first chip 31 is a PD and the second chip 32 is a TIA, the chip packaging structure 10 may be a ROSA.
芯片封装结构10中的信号流向为:从光纤传输来的光信号传输至PD,PD将光信号转换成电信号,并将所述电信号传输至TIA,TIA对所述电信号进行放大,并将放大后的电信号传输至电子设备1上的其他电处理芯片,比如CDR或oDSP,由CDR或oDSP对放大后的电信号进行进一步的处理。The signal flow direction in the chip packaging structure 10 is: the optical signal transmitted from the optical fiber is transmitted to the PD, the PD converts the optical signal into an electrical signal, and transmits the electrical signal to the TIA, and the TIA amplifies the electrical signal, and The amplified electrical signal is transmitted to other electrical processing chips on the electronic device 1 , such as CDR or oDSP, and the amplified electrical signal is further processed by the CDR or oDSP.
以第一芯片31为PD,第二芯片32为TIA为例,对由第一芯片31和第二芯片32采用FC方式互连时,所对应的芯片间信号传输性能进行仿真,结果如图7A和图7B所示。其中,图7A用于分析第一芯片31和第二芯片32之间的传输链路的谐振以及3dB带宽,图7B用于分析第一芯片31和第二芯片32之间的传输链路的群时延性能。Taking the first chip 31 as PD and the second chip 32 as TIA as an example, when the first chip 31 and the second chip 32 are interconnected by FC, the corresponding inter-chip signal transmission performance is simulated, and the result is shown in FIG. 7A and shown in Figure 7B. Wherein, FIG. 7A is used to analyze the resonance and 3dB bandwidth of the transmission link between the first chip 31 and the second chip 32, and FIG. 7B is used to analyze the group of the transmission link between the first chip 31 and the second chip 32. Latency performance.
在高速互连领域,带宽是影响传输速率的一个重要因素,具体的,带宽越大,传输速率越大;带宽越小,传输速率越小。相应的,两个芯片之间的带宽越大,则该两个芯 片之间的信号传输速率也越大。谐振是限制任意两个芯片之间的带宽的重要因素,同时,谐振会导致信号的群时延性能变差。其中,谐振是指两个芯片之间的传输链路所发生的谐振。3dB带宽指信号的幅值等于最大值的二分之根号二倍时对应的频带宽度。3dB带宽所对应的频带宽度越宽,则说明信号的衰减越少,越有利于信号的高速率传输。群时延性能用于表征信号的每个频率分量的相位,群时延越小,则说明各频率分量传输的相位差值越小,越有利于信号的高速率传输。In the field of high-speed interconnection, bandwidth is an important factor affecting the transmission rate. Specifically, the larger the bandwidth, the higher the transmission rate; the smaller the bandwidth, the lower the transmission rate. Correspondingly, the greater the bandwidth between the two chips, the greater the signal transmission rate between the two chips. Resonance is an important factor that limits the bandwidth between any two chips, and at the same time, resonance will cause the group delay performance of the signal to deteriorate. Among them, resonance refers to the resonance that occurs in the transmission link between two chips. The 3dB bandwidth refers to the corresponding frequency bandwidth when the amplitude of the signal is equal to twice the root of half of the maximum value. The wider the frequency bandwidth corresponding to the 3dB bandwidth, the less attenuation of the signal, which is more conducive to the high-speed transmission of the signal. The group delay performance is used to characterize the phase of each frequency component of the signal. The smaller the group delay, the smaller the phase difference of each frequency component transmission, which is more conducive to high-speed signal transmission.
如图7A所示,横坐标表示频率,单位是GHz;纵坐标表示信号的衰减量Insertion Loss,单位是dB。由图7A可以看出,信号在110GHz处有较大的谐振,且3dB的带宽为78GHz。As shown in FIG. 7A , the abscissa represents the frequency, and the unit is GHz; the ordinate represents the insertion loss of the signal attenuation, and the unit is dB. It can be seen from FIG. 7A that the signal has a large resonance at 110 GHz, and the 3dB bandwidth is 78 GHz.
如图7B所示,横坐标表示频率,单位是GHz;纵坐标表示信号在传输链路上的群时延Group Delay,单位是ps。由图7B可以看出,在110GHz之后,群时延曲线明显变曲折,也即,群时延曲线的平坦度降低。群时延曲线的平坦度降低意味着信号的群时延性能急剧恶化,不利于信号在第一芯片31和第二芯片32之间达到更高的传输速率。As shown in FIG. 7B , the abscissa represents the frequency, and the unit is GHz; the ordinate represents the group delay Group Delay of the signal on the transmission link, and the unit is ps. It can be seen from FIG. 7B that, after 110 GHz, the group delay curve becomes significantly curved, that is, the flatness of the group delay curve decreases. The reduced flatness of the group delay curve means that the group delay performance of the signal deteriorates sharply, which is not conducive to achieving a higher transmission rate of the signal between the first chip 31 and the second chip 32 .
可以看出上述实施方式中,仍然存在谐振以及群时延性能较差的问题,进而导致两个芯片之间传输速率受限。上述实施方式也称为传统FC方式。为了解决上述问题,进一步提高两个芯片之间信号的传输速率,本申请还提供一种芯片,该芯片可以是上述第一芯片31或上述第二芯片32。以下通过具体实施例对该芯片进行说明。It can be seen that in the above implementation manner, there are still problems of resonance and poor group delay performance, which further lead to a limited transmission rate between the two chips. The above-mentioned embodiment is also referred to as a conventional FC method. In order to solve the above problems and further increase the signal transmission rate between the two chips, the present application further provides a chip, which may be the above-mentioned first chip 31 or the above-mentioned second chip 32 . The chip is described below through a specific embodiment.
以该芯片为第一芯片31为例,第一芯片31包括有源区310、第一地焊盘311、第二地焊盘312、信号焊盘313、第一传输线314、第二传输线315以及第三传输线316。其中,信号焊盘313与有源区310通过第一传输线314电连接;第一地焊盘311与有源区310通过第二传输线315电连接;第二地焊盘312与有源区310通过第三传输线316电连接。Taking the chip as the first chip 31 as an example, the first chip 31 includes an active area 310, a first ground pad 311, a second ground pad 312, a signal pad 313, a first transmission line 314, a second transmission line 315 and The third transmission line 316 . Wherein, the signal pad 313 is electrically connected to the active area 310 through the first transmission line 314; the first ground pad 311 is electrically connected to the active area 310 through the second transmission line 315; the second ground pad 312 is electrically connected to the active area 310 through The third transmission line 316 is electrically connected.
需要注意的是,在本实施例中,第二传输线315的长度小于信号焊盘313到第一地焊盘311的距离与第一传输线314的长度之和。信号焊盘313相对于有源区310更靠近第一芯片31的第一边缘100,第一地焊盘311相对于有源区310更靠近第一芯片31的第一边缘100,或者,第一地焊盘311与第一边缘100的距离以及有源区310与第一边缘100的距离相等。It should be noted that, in this embodiment, the length of the second transmission line 315 is less than the sum of the distance from the signal pad 313 to the first ground pad 311 and the length of the first transmission line 314 . The signal pad 313 is closer to the first edge 100 of the first chip 31 relative to the active region 310, the first ground pad 311 is closer to the first edge 100 of the first chip 31 relative to the active region 310, or, the first The distance between the ground pad 311 and the first edge 100 and the distance between the active region 310 and the first edge 100 are equal.
可选的,第一传输线314为直线。Optionally, the first transmission line 314 is a straight line.
可选的,第二传输线315为直线或折线。Optionally, the second transmission line 315 is a straight line or a broken line.
可选的,第三传输线316为直线或折线。此处的相等应当以本领域技术人员的理解为准,不应僵化的理解为数学意义上的绝对相等,连接所述第一地焊盘和所述有源区的第二传输线垂直于第一传输线的话,可以认为是满足此处限定的相等的,但是,第一地焊盘和有源区均位于第二传输线即可,不必要限定必须是它们的几何中心位于该第二传输线。Optionally, the third transmission line 316 is a straight line or a broken line. The equality here should be based on the understanding of those skilled in the art, and should not be rigidly understood as absolute equality in the mathematical sense. The second transmission line connecting the first ground pad and the active region is perpendicular to the first The transmission lines can be considered to be equal as defined here. However, it is only necessary that the first ground pad and the active area be located on the second transmission line, and it is not necessary to define that their geometric centers must be located on the second transmission line.
具体的,在一种实施方式中,如图8A所示,第二传输线315垂直于第一传输线314,且第三传输线316垂直于第一传输线314。在另一种实施方式中,如图8B所示,第二传输线315与第一传输线314之间的夹角为锐角,且第三传输线316与第一传输线314之间的夹角为锐角。相较于图4,第一地焊盘311和第二地焊盘312的位置可以不变,也可以改变。在另一种实施方式中,如图8C所示,第二传输线315平行于第一传输线314的部分的长度小于第一传输线314的长度,且第三传输线316平行于第一传输线314的部分的长度小于第一传输线314的长度。相较于图4,第一地焊盘311更加靠近有源区310,且第二地焊盘312更加靠近有源区310。Specifically, in one implementation manner, as shown in FIG. 8A , the second transmission line 315 is perpendicular to the first transmission line 314 , and the third transmission line 316 is perpendicular to the first transmission line 314 . In another embodiment, as shown in FIG. 8B , the included angle between the second transmission line 315 and the first transmission line 314 is an acute angle, and the included angle between the third transmission line 316 and the first transmission line 314 is an acute angle. Compared with FIG. 4 , the positions of the first ground pad 311 and the second ground pad 312 may be unchanged or changed. In another embodiment, as shown in FIG. 8C, the length of the part of the second transmission line 315 parallel to the first transmission line 314 is shorter than the length of the first transmission line 314, and the length of the part of the third transmission line 316 parallel to the first transmission line 314 The length is less than the length of the first transmission line 314 . Compared with FIG. 4 , the first ground pad 311 is closer to the active area 310 , and the second ground pad 312 is closer to the active area 310 .
相对应的,第二芯片32包括有源区320、第一地焊盘321、第二地焊盘322、信号焊盘323、第一传输线324、第二传输线325以及第三传输线326。其中,信号焊盘323与有源区320通过第一传输线324电连接;第一地焊盘321与有源区320通过第二传输线325电连接;第二地焊盘322与有源区320通过第三传输线326电连接。Correspondingly, the second chip 32 includes an active area 320 , a first ground pad 321 , a second ground pad 322 , a signal pad 323 , a first transmission line 324 , a second transmission line 325 and a third transmission line 326 . Wherein, the signal pad 323 is electrically connected to the active area 320 through the first transmission line 324; the first ground pad 321 is electrically connected to the active area 320 through the second transmission line 325; the second ground pad 322 is electrically connected to the active area 320 through The third transmission line 326 is electrically connected.
第二芯片32上的焊盘和传输线,采取与第一芯片31上的焊盘和传输线相同的设置,并且第一芯片31与第二芯片32采用FC的方式电连接。具体的,第一芯片31的第一地焊盘311与第二芯片32的第一地焊盘321电连接;第一芯片31的第二地焊盘312与第二芯片32的第二地焊盘322电连接;第一芯片31的信号焊盘313与第二芯片32的信号焊盘323电连接。The pads and transmission lines on the second chip 32 adopt the same arrangement as the pads and transmission lines on the first chip 31 , and the first chip 31 and the second chip 32 are electrically connected by FC. Specifically, the first ground pad 311 of the first chip 31 is electrically connected to the first ground pad 321 of the second chip 32; the second ground pad 312 of the first chip 31 is connected to the second ground pad of the second chip 32 The pads 322 are electrically connected; the signal pads 313 of the first chip 31 are electrically connected to the signal pads 323 of the second chip 32 .
以下结合上述第一芯片31和上述第二芯片32采用FC电连接时的等效电路图,对上述实施例的有益效果进行说明。The beneficial effects of the above embodiment will be described below in conjunction with the equivalent circuit diagram when the first chip 31 and the second chip 32 are electrically connected by FC.
请参阅图9,C1为第一芯片31的信号焊盘313的等效电容;C2为第一芯片31的第一地焊盘311和第一芯片31的第二地焊盘312共同的等效电容。C3为第二芯片32的信号焊盘323的等效电容;C4为第二芯片32的第一地焊盘321和第二芯片32的第二地焊盘322共同的等效电容。上述焊盘均接地。Please refer to FIG. 9, C1 is the equivalent capacitance of the signal pad 313 of the first chip 31; C2 is the common equivalent capacitance of the first ground pad 311 of the first chip 31 and the second ground pad 312 of the first chip 31. capacitance. C3 is the equivalent capacitance of the signal pad 323 of the second chip 32 ; C4 is the common equivalent capacitance of the first ground pad 321 of the second chip 32 and the second ground pad 322 of the second chip 32 . The above pads are all connected to ground.
B1为第一芯片31的信号焊盘312和第二芯片32的信号焊盘323之间的焊接材料。B2为第一芯片31的第一地焊盘311和第二芯片32的第一地焊盘321之间,以及第一芯片31的第二地焊盘312和第二芯片32的第一地焊盘322之间的焊接材料。B1 is a solder material between the signal pad 312 of the first chip 31 and the signal pad 323 of the second chip 32 . B2 is between the first ground pad 311 of the first chip 31 and the first ground pad 321 of the second chip 32, and the second ground pad 312 of the first chip 31 and the first ground pad of the second chip 32. Solder material between discs 322.
L1为第一芯片31的第一传输线314的等效电感,L2为第一芯片31的第二传输线315和第一芯片31的第三传输线316整体的等效电感。L3为第二芯片32的第一传输线324的等效电感,L4为第二芯片32的第二传输线325和第二芯片32的第三传输线326整体的等效电感。L1 is the equivalent inductance of the first transmission line 314 of the first chip 31 , and L2 is the overall equivalent inductance of the second transmission line 315 of the first chip 31 and the third transmission line 316 of the first chip 31 . L3 is the equivalent inductance of the first transmission line 324 of the second chip 32 , and L4 is the overall equivalent inductance of the second transmission line 325 of the second chip 32 and the third transmission line 326 of the second chip 32 .
通过减小第一芯片31的第二传输线315的长度和第三传输线316的长度,以及减小第二芯片32的第二传输线325和第三传输线326的长度,从而减小第一芯片31的第二传输线315和第三传输线316的等效电感量L2,以及减小第二芯片32的第二传输线325和第三传输线326的等效电感量L4。而根据谐振原理:By reducing the length of the second transmission line 315 and the length of the third transmission line 316 of the first chip 31, and reducing the lengths of the second transmission line 325 and the third transmission line 326 of the second chip 32, thereby reducing the length of the first chip 31 The equivalent inductance L2 of the second transmission line 315 and the third transmission line 316 and the equivalent inductance L4 of the second transmission line 325 and the third transmission line 326 of the second chip 32 are reduced. And according to the principle of resonance:
F∝1/[2*pi*sqrt(L*C)],F∝1/[2*pi*sqrt(L*C)],
即,第一芯片31与第二芯片32之间传输链路的谐振频率F正比于(L*C)的平方根的倒数,也即,谐振频率F反比于(L*C)的平方根。其中,C表示传输链路等效的总电容,L表示传输链路等效的总电感,也即,L包括L1、L2、L3、L4。因此,通过减小传输线的长度,来减小第一芯片31与第二芯片32之间传输链路的等效电感量,有利于提高传输链路的谐振频率,进而提高带宽和群时延性能,从而提高第一芯片31与第二芯片32间的传输速率。That is, the resonant frequency F of the transmission link between the first chip 31 and the second chip 32 is proportional to the reciprocal of the square root of (L*C), that is, the resonant frequency F is inversely proportional to the square root of (L*C). Wherein, C represents the equivalent total capacitance of the transmission link, and L represents the equivalent total inductance of the transmission link, that is, L includes L1, L2, L3, and L4. Therefore, by reducing the length of the transmission line, the equivalent inductance of the transmission link between the first chip 31 and the second chip 32 is reduced, which is conducive to improving the resonant frequency of the transmission link, thereby improving bandwidth and group delay performance , so as to increase the transmission rate between the first chip 31 and the second chip 32 .
上述第一芯片31可以为光芯片,例如PD(Photo Diode,光电二极管)或APD(Avalanche Photo Diode,雪崩光电二极管)。上述第二芯片32可以为电芯片,例如TIA(Trans-impedance Amplifier,跨阻放大器)。The above-mentioned first chip 31 may be an optical chip, such as PD (Photo Diode, photodiode) or APD (Avalanche Photo Diode, avalanche photodiode). The above-mentioned second chip 32 may be an electrical chip, such as a TIA (Trans-impedance Amplifier, transimpedance amplifier).
以第一芯片31为PD,第二芯片32为TIA为例,对由第一芯片31和第二芯片32采用FC方式互连时,所对应的芯片间信号的传输性能进行仿真,结果如图10A和图10B所示。其中,图10A用于分析第一芯片31和第二芯片32之间的传输链路的谐振以及3dB带宽,图10B用于分析第一芯片31和第二芯片32之间的传输链路的群时延性能。Taking the first chip 31 as PD and the second chip 32 as TIA as an example, when the first chip 31 and the second chip 32 are interconnected by FC, the corresponding inter-chip signal transmission performance is simulated, and the result is shown in the figure 10A and 10B. Wherein, Fig. 10A is used for analyzing the resonance and 3dB bandwidth of the transmission link between the first chip 31 and the second chip 32, and Fig. 10B is used for analyzing the group of the transmission link between the first chip 31 and the second chip 32 Latency performance.
如图10A所示,横坐标表示频率,单位是GHz;纵坐标表示信号的衰减量Insertion  Loss,单位是dB。图中共有3条曲线,分别对应第一芯片31和第二芯片32采用上述实施例的方式互连、WB方式互连以及传统FC方式互连。由图10A可以看出,相较于传统FC方案,上述实施例的谐振频率从110GHz推延到160GHz以后,3dB带宽从74GHz提升到105GHz。As shown in FIG. 10A , the abscissa represents the frequency, and the unit is GHz; the ordinate represents the insertion loss of the signal attenuation, and the unit is dB. There are three curves in the figure, which respectively correspond to the interconnection of the first chip 31 and the second chip 32 in the above-mentioned embodiment, the WB interconnection and the traditional FC interconnection. It can be seen from FIG. 10A that, compared with the traditional FC solution, the resonant frequency of the above embodiment is extended from 110 GHz to 160 GHz, and the 3dB bandwidth is increased from 74 GHz to 105 GHz.
如图10B所示,横坐标表示频率,单位是GHz;纵坐标表示信号在传输链路上的群时延Group Delay,单位是ps。由图10B可以看出,相较于WB和传统FC方案,上述实施例的群时延曲线更平坦,也即,由第一芯片31所发出的信号的各频率分量,经传输链路后,近乎同时传输至第二芯片32,从而说明上述实施例可以大幅改善传输链路的群时延性能。As shown in FIG. 10B , the abscissa represents the frequency, and the unit is GHz; the ordinate represents the group delay Group Delay of the signal on the transmission link, and the unit is ps. It can be seen from FIG. 10B that, compared with the WB and traditional FC solutions, the group delay curve of the above embodiment is flatter, that is, each frequency component of the signal sent by the first chip 31, after passing through the transmission link, are transmitted to the second chip 32 almost simultaneously, which shows that the above embodiment can greatly improve the group delay performance of the transmission link.
结合图10A和图10B,可以得出第一芯片31和第二芯片32之间传输链路的谐振频率提高,3dB带宽提高,且传输链路的群时延性能也得到了提升,进而有利于提高第一芯片31和第二芯片32之间信号的传输速率。Combining Figure 10A and Figure 10B, it can be concluded that the resonant frequency of the transmission link between the first chip 31 and the second chip 32 is increased, the 3dB bandwidth is increased, and the group delay performance of the transmission link is also improved, which is beneficial to The transmission rate of signals between the first chip 31 and the second chip 32 is increased.
在本说明书的描述中,具体特征、结构、材料或者特点可以在任何的一个或多个实施例或示例中以合适的方式结合。In the description of this specification, specific features, structures, materials or characteristics may be combined in any one or more embodiments or examples in an appropriate manner.
以上,仅为本申请的具体实施方式,但本申请的保护范围并不局限于此,任何熟悉本技术领域的技术人员在本申请揭露的技术范围内,可轻易想到变化或替换,都应涵盖在本申请的保护范围之内。因此,本申请的保护范围应以权利要求的保护范围为准。The above is only the specific implementation of the application, but the scope of protection of the application is not limited thereto. Anyone familiar with the technical field can easily think of changes or replacements within the technical scope disclosed in the application, and should cover Within the protection scope of this application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims (12)

  1. 一种芯片,其特征在于,包括:信号焊盘、第一地焊盘、有源区、第一传输线以及第二传输线;A chip, characterized by comprising: a signal pad, a first ground pad, an active area, a first transmission line, and a second transmission line;
    所述信号焊盘与所述有源区通过所述第一传输线电连接,The signal pad is electrically connected to the active region through the first transmission line,
    所述第一地焊盘与所述有源区通过所述第二传输线电连接,所述第二传输线的长度小于所述信号焊盘到所述第一地焊盘的距离与所述第一传输线的长度之和;The first ground pad is electrically connected to the active area through the second transmission line, and the length of the second transmission line is shorter than the distance from the signal pad to the first ground pad and the first the sum of the lengths of the transmission lines;
    所述信号焊盘相对于所述有源区更靠近所述芯片的第一边缘,所述第一地焊盘相对于所述有源区更靠近所述芯片的第一边缘,或者,所述第一地焊盘与所述第一边缘的距离以及所述有源区与所述第一边缘的距离相等。The signal pad is closer to the first edge of the chip relative to the active area, the first ground pad is closer to the first edge of the chip relative to the active area, or, the The distance between the first ground pad and the first edge and the distance between the active region and the first edge are equal.
  2. 根据权利要求1所述的芯片,其特征在于,所述第二传输线为直线或折线。The chip according to claim 1, wherein the second transmission line is a straight line or a broken line.
  3. 根据权利要求1或2所述的芯片,其特征在于,The chip according to claim 1 or 2, characterized in that,
    所述芯片还包括第二地焊盘与第三传输线,The chip also includes a second ground pad and a third transmission line,
    所述第二地焊盘与所述有源区通过所述第三传输线电连接,所述第三传输线的长度小于所述信号焊盘到所述第二地焊盘的距离与所述第一传输线的长度之和;The second ground pad is electrically connected to the active area through the third transmission line, and the length of the third transmission line is shorter than the distance from the signal pad to the second ground pad and the first the sum of the lengths of the transmission lines;
    所述信号焊盘相对于所述有源区更靠近所述芯片的第一边缘,所述第二地焊盘相对于所述有源区更靠近所述芯片的第一边缘,或者,所述第二地焊盘与所述第一边缘的距离以及所述有源区与所述第一边缘的距离相等。The signal pad is closer to the first edge of the chip relative to the active area, the second ground pad is closer to the first edge of the chip relative to the active area, or, the The distance between the second ground pad and the first edge and the distance between the active area and the first edge are equal.
  4. 根据权利要求3所述的芯片,其特征在于,所述第三传输线为直线或折线。The chip according to claim 3, wherein the third transmission line is a straight line or a broken line.
  5. 根据权利要求1至4任一项所述的芯片,其特征在于,The chip according to any one of claims 1 to 4, characterized in that,
    所述芯片还包括第一辅助地焊盘,The chip also includes a first auxiliary ground pad,
    所述第二传输线包括第一段传输线和第二段传输线;The second transmission line includes a first section of transmission line and a second section of transmission line;
    所述第一辅助地焊盘与所述有源区通过所述第一段传输线电连接;The first auxiliary ground pad is electrically connected to the active region through the first transmission line;
    所述第一辅助地焊盘与所述第一地焊盘通过所述第二段传输线电连接。The first auxiliary ground pad is electrically connected to the first ground pad through the second transmission line.
  6. 一种芯片堆叠结构,其特征在于,包括堆叠设置的第一芯片和第二芯片;A chip stack structure, characterized in that it includes a first chip and a second chip stacked;
    所述第一芯片和所述第二芯片均为权利要求1至5任一项所述的芯片;Both the first chip and the second chip are the chips described in any one of claims 1 to 5;
    其中,所述第一芯片的信号焊盘与所述第二芯片的信号焊盘电连接;Wherein, the signal pads of the first chip are electrically connected to the signal pads of the second chip;
    所述第一芯片的第一地焊盘与所述第二芯片的第一地焊盘电连接。The first ground pad of the first chip is electrically connected to the first ground pad of the second chip.
  7. 根据权利要求6所述的芯片堆叠结构,其特征在于,The chip stack structure according to claim 6, characterized in that,
    所述第一芯片和所述第二芯片均包括第一辅助地焊盘,Both the first chip and the second chip include a first auxiliary ground pad,
    所述第一芯片的第一辅助地焊盘与所述第二芯片的第一辅助地焊盘电连接。The first auxiliary ground pad of the first chip is electrically connected to the first auxiliary ground pad of the second chip.
  8. 根据权利要求6或7所述的芯片堆叠结构,其特征在于,The chip stack structure according to claim 6 or 7, characterized in that,
    所述第一芯片和第二芯片均包括第二地焊盘,Both the first chip and the second chip include a second ground pad,
    所述第一芯片的所述第二地焊盘与所述第二芯片的所述第二地焊盘电连接。The second ground pad of the first chip is electrically connected to the second ground pad of the second chip.
  9. 根据权利要求6至8任一项所述的芯片堆叠结构,其特征在于,The chip stack structure according to any one of claims 6 to 8, characterized in that,
    所述第一芯片和第二芯片均包括第二辅助地焊盘,Both the first chip and the second chip include a second auxiliary ground pad,
    所述第一芯片的所述第二辅助地焊盘与所述第二芯片的所述第二辅助地焊盘电连接。The second auxiliary ground pad of the first chip is electrically connected to the second auxiliary ground pad of the second chip.
  10. 根据权利要求6至9任一项所述的芯片堆叠结构,其特征在于,The chip stack structure according to any one of claims 6 to 9, characterized in that,
    所述第一芯片的信号焊盘和所述第二芯片的信号焊盘通过焊接材料电连接;The signal pads of the first chip and the signal pads of the second chip are electrically connected by soldering material;
    所述第一芯片的第一地焊盘与所述第二芯片的第一地焊盘通过焊接材料电连接。The first ground pad of the first chip is electrically connected to the first ground pad of the second chip through soldering material.
  11. 一种芯片封装结构,其特征在于,包括封装基板和如权利要求6至10任一项所 述的芯片堆叠结构,所述封装基板与所述芯片堆叠结构电连接。A chip package structure, characterized in that it comprises a package substrate and the chip stack structure according to any one of claims 6 to 10, the package substrate is electrically connected to the chip stack structure.
  12. 一种电子设备,其特征在于,包括印刷电路板和权利要求11所述的芯片封装结构,所述印刷电路板与所述芯片封装结构电连接。An electronic device, characterized by comprising a printed circuit board and the chip packaging structure according to claim 11, the printed circuit board being electrically connected to the chip packaging structure.
PCT/CN2022/107767 2021-11-09 2022-07-26 Chip for high-speed signal transmission, and chip stacking structure WO2023082702A1 (en)

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US20110019457A1 (en) * 2009-07-23 2011-01-27 Mao Bang Electronic Co., Ltd. Flash memory
US20120112365A1 (en) * 2010-03-26 2012-05-10 Infineon Technologies Ag Semiconductor Packages and Methods For Producing The Same
JP2013131711A (en) * 2011-12-22 2013-07-04 Taiyo Yuden Co Ltd Electronic component
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