WO2023082197A1 - Semiconductor chip package - Google Patents

Semiconductor chip package Download PDF

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Publication number
WO2023082197A1
WO2023082197A1 PCT/CN2021/130432 CN2021130432W WO2023082197A1 WO 2023082197 A1 WO2023082197 A1 WO 2023082197A1 CN 2021130432 W CN2021130432 W CN 2021130432W WO 2023082197 A1 WO2023082197 A1 WO 2023082197A1
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WO
WIPO (PCT)
Prior art keywords
pad
differential
plated
semiconductor chip
chip package
Prior art date
Application number
PCT/CN2021/130432
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French (fr)
Chinese (zh)
Inventor
杨方旭
石林
孙世虎
Original Assignee
华为技术有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 华为技术有限公司 filed Critical 华为技术有限公司
Priority to PCT/CN2021/130432 priority Critical patent/WO2023082197A1/en
Priority to CN202180100754.2A priority patent/CN117678327A/en
Publication of WO2023082197A1 publication Critical patent/WO2023082197A1/en

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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/11Printed elements for providing electric connections to or between printed circuits

Definitions

  • Embodiments of the present disclosure relate to the field of semiconductors, and more particularly, to semiconductor chip packaging.
  • Embodiments of the present disclosure aim to provide a solution for reducing differential crosstalk of an interconnection structure in a semiconductor chip package without significantly increasing the size of the semiconductor chip package.
  • a semiconductor chip package includes a first differential interconnect assembly and a second differential interconnect assembly adjacent to the first differential interconnect assembly.
  • Each differential interconnection assembly includes a pair of pads for transmitting differential signals and a pair of plated-through holes electrically connected to the pair of pads, respectively. If the polarities of adjacent pads between the first differential interconnection component and the second differential interconnection component are opposite in the planar projection of the semiconductor chip package, the first differential interconnection component and the second differential interconnection component are reversed in the planar projection of the semiconductor chip package. Adjacent plated-through holes between the second differential interconnection components have the same polarity.
  • the crosstalk between adjacent plated holes is just opposite in polarity to the crosstalk between adjacent pads, and therefore, can at least partially cancel the crosstalk between adjacent pads, thereby reducing the size of the semiconductor chip package significantly.
  • the embodiments of the present disclosure can keep the pin map (also referred to as pad arrangement) unchanged, thus having good compatibility.
  • the embodiments of the present disclosure may not increase or add as little isolation ground pads between differential pairs as possible.
  • the first differential interconnection component includes: a first pad and a second pad, disposed on the substrate, for transmitting the first differential signal.
  • the first differential interconnection assembly further includes a first plated-through hole and a second plated-through hole disposed in the substrate and electrically connected to the first pad and the second pad respectively.
  • the second differential interconnection component is adjacent to the first differential interconnection component, and the second differential interconnection component includes: a third pad and a fourth pad, arranged on the substrate, and used for transmitting the second differential signal.
  • the second differential interconnection assembly includes a third plated-through hole and a fourth plated-through hole, disposed in the substrate, and electrically connected to the third pad and the fourth pad, respectively.
  • the second pad in the first differential interconnection assembly is adjacent to the third pad in the second differential interconnection assembly, and the first plated-through hole in the first differential interconnection assembly Adjacent to the third plated through hole in the second differential interconnect assembly.
  • the polarity of the signal transmitted by the second pad and the third pad is the same, and the polarity of the signal transmitted by the first plated hole and the third plated hole is opposite; or, the signal transmitted by the second pad and the third pad.
  • the polarities of the signals are reversed, and the signals carried by the first plated-through hole and the third plated-through hole are of the same polarity.
  • connection line between the first pad and the second pad and the connection line between the first plated hole and the second plated hole are perpendicular to each other, and
  • the connection line between the third pad and the fourth pad and the connection line between the third plated hole and the fourth plated hole are perpendicular to each other.
  • the first pad in the first differential interconnect assembly is adjacent to the fourth pad in the second differential interconnect assembly.
  • the first plated-through hole is located on one side of the first pad and the second pad, and the second plated-through hole is located on the other side of the first pad and the second pad.
  • the first pad and the fourth pad are arranged in a first row, and the second pad and the third pad are arranged in a second row adjacent to the first row.
  • the second pads and the third pads are arranged in adjacent rows and adjacent columns.
  • the first to fourth pads are arranged in a row, and the first to fourth plated holes are located at one side of the row.
  • connection line between the first pad and the second pad and the connection line between the third pad and the fourth pad are perpendicular to each other.
  • the line between the first pad and the second pad is perpendicular to the line between the first plated hole and the second plated hole, and the line between the third pad and the fourth pad
  • the connection line between the third plated hole and the fourth plated hole is parallel to each other, and the connection line between the first pad and the second pad and the connection line between the third pad and the fourth pad
  • the connecting lines are perpendicular to each other.
  • the first pads are arranged in a first row
  • the second pads are arranged in a second row
  • the third pads and fourth pads are arranged in a third row.
  • the semiconductor chip package further includes one or more plated-through holes for electrical connection to ground, disposed in the substrate, between the first pad and the second pad in a planar projection of the semiconductor chip package and/or one or more plated-through holes for electrical connection to ground, disposed in the substrate between the third pad and the fourth pad in the planar projection of the semiconductor chip package.
  • Quantitative adjustment of impedance control and crosstalk elimination can be realized by setting one or more ground holes in the semiconductor chip package.
  • the first pad and the second pad are respectively connected to the first plated hole and the second plated hole through a double helix blind buried hole; and/or the third pad and the fourth pad are connected through
  • the double helix blind buried holes are respectively connected with the first plated hole and the second plated hole.
  • the double-helix blind buried holes include a first plurality of blind buried holes electrically connected to each other and a second plurality of blind buried holes electrically connected to each other, the first plurality of blind buried holes are stacked along the first direction, and the second plurality of blind buried holes
  • the buried vias are stacked along a second direction opposite to the first direction. In this way, a flexible outlet can be achieved and wire winding can be prevented.
  • the substrate includes a laminated substrate or a printed circuit board (Printed Circuit Board, PCB).
  • PCB printed Circuit Board
  • the semiconductor chip package further includes a third differential interconnection component and a fourth differential interconnection component.
  • the third differential interconnection assembly includes: a fifth pad and a sixth pad disposed on the substrate for transmitting a third differential signal; and a fifth plated hole and a sixth plated hole disposed in the substrate, and are electrically connected to the fifth pad and the sixth pad respectively.
  • the fourth differential interconnection assembly includes: a seventh pad and an eighth pad disposed on the substrate for transmitting a fourth differential signal; and a seventh plated hole and an eighth plated hole disposed in the substrate, and are electrically connected to the seventh pad and the eighth pad respectively.
  • the sixth pad in the third differential interconnection component is adjacent to the seventh pad in the fourth differential interconnection component
  • the fifth pad in the third differential interconnection component is adjacent to the seventh pad in the fourth differential interconnection component.
  • the eight pads are adjacent, and the fifth plated through hole in the third differential interconnection assembly is adjacent to the sixth plated through hole in the fourth differential interconnection assembly.
  • the polarity of the signal transmitted by the sixth pad and the seventh pad is the same, and the polarity of the signal transmitted by the fifth plated hole and the sixth plated hole is opposite; or the signal transmitted by the sixth pad and the seventh pad
  • the polarity of the plated-through hole is opposite, and the polarity of the signal transmitted by the fifth plated-through hole and the sixth plated-through hole is the same.
  • the fifth pad and the eighth pad are arranged in the third row, and the sixth pad and the seventh pad are arranged in the fourth row adjacent to the third row.
  • the pad and the second pad are arranged in the first column
  • the fifth pad and the sixth pad are arranged in the second column adjacent to the first column
  • the third pad and the fourth pad are arranged in the same column as the second column.
  • the seventh pad and the eighth pad are arranged in the fourth column adjacent to the third column. In this manner, crosstalk between each pair of the four differential interconnect assemblies can be reduced.
  • the first differential interconnection component, the second differential interconnection component, the third differential interconnection component and the fourth differential interconnection component form a basic unit and are periodically arranged on the substrate. In this arrangement, the crosstalk between each pair of differential interconnection components can be reduced.
  • FIG. 1 shows a planar projection of a semiconductor chip package according to a known solution.
  • FIG. 2 shows a planar projection of a semiconductor chip package according to some embodiments of the present disclosure.
  • FIG. 3 illustrates a partial cross-sectional view of a semiconductor chip package according to some embodiments of the present disclosure.
  • FIG. 4 shows the principle of crosstalk cancellation for the semiconductor chip package shown in FIG. 2 .
  • FIG. 5 shows the principle of crosstalk cancellation for the semiconductor chip package shown in FIG. 2 .
  • FIG. 6 shows a planar projection of a semiconductor chip package according to some embodiments of the present disclosure.
  • FIG. 7 shows a planar projection of a semiconductor chip package according to some embodiments of the present disclosure.
  • FIG. 8 shows a planar projection of a semiconductor chip package according to some embodiments of the present disclosure.
  • FIG. 9 illustrates a partial cross-sectional view of a semiconductor chip package according to some embodiments of the present disclosure.
  • FIG. 10 shows a planar projection of a semiconductor chip package according to some embodiments of the present disclosure.
  • Figure 11 illustrates the effect of crosstalk cancellation according to some embodiments of the present disclosure.
  • Figure 12 illustrates the effect of crosstalk cancellation according to some embodiments of the present disclosure.
  • Figure 13 illustrates the effect of crosstalk cancellation according to some embodiments of the present disclosure.
  • Figure 14 illustrates the effect of crosstalk cancellation according to some embodiments of the present disclosure.
  • Figure 15 illustrates the effect of crosstalk cancellation according to some embodiments of the present disclosure.
  • Fig. 16 shows the outlet scheme according to the existing scheme.
  • FIG. 17 shows a schematic diagram of an outlet scheme according to some embodiments of the present disclosure.
  • FIG. 18 shows a schematic diagram of an outlet scheme according to some embodiments of the present disclosure.
  • FIG. 19 shows a schematic diagram of an outlet scheme according to some embodiments of the present disclosure.
  • Figure 20 shows a schematic diagram of a ground hole layout according to some embodiments of the present disclosure.
  • Figure 21 shows a schematic diagram of a ground hole layout according to some embodiments of the present disclosure.
  • Figure 22 shows a schematic diagram of a ground hole layout according to some embodiments of the present disclosure.
  • the term “comprising” and its similar expressions should be interpreted as an open inclusion, that is, “including but not limited to”.
  • the term “based on” should be understood as “based at least in part on”.
  • the term “one embodiment” or “the embodiment” should be read as “at least one embodiment”.
  • the terms “first”, “second”, etc. may refer to different or the same object.
  • the term “and/or” means at least one of the two items associated with it. For example "A and/or B" means A, B, or A and B. Other definitions, both express and implied, may also be included below.
  • FIG. 1 shows a planar projection of a semiconductor chip package according to an existing solution, which shows the arrangement of solder balls and plated through holes (Plated Through Holes, PTHs).
  • the spacing between two PTHs is smaller than the spacing between two differential solder balls, ie "tight coupling".
  • the solder ball 101 and the PTH 103 partially overlap, so the solder ball 101 and the PTH 103 are tightly coupled.
  • solder ball 102 partially overlaps with PTH 104
  • solder ball 109 partially overlaps with PTH 111
  • solder ball 110 partially overlaps with PTH 112 .
  • the solder ball 101 is electrically connected to the PTH 103, and is used to transmit a positive polarity signal in the differential signal
  • the solder ball 102 is electrically connected to the PTH 104, and is used to transmit a negative polarity signal in the differential signal
  • the solder ball 109 is electrically connected to the PTH 111 for transmitting a positive polarity signal in the differential signal
  • the solder ball 110 is electrically connected to the PTH 112 for transmitting a negative polarity signal in the differential signal.
  • the solder ball 101 and the solder ball 102 are referred to as a first differential pair
  • the solder ball 109 and the solder ball 110 are referred to as a second differential pair.
  • solder balls are aligned with the PTH in planar projection.
  • the solder ball "aligned" with the PTH in planar projection means that the centers of the solder ball and the PTH overlap each other in the planar projection.
  • solder ball 105 is aligned with PTH 107
  • solder ball 106 is aligned with PTH 108
  • solder ball 113 is aligned with PTH 115
  • solder ball 114 is aligned with PTH 116.
  • the solder ball 105 is electrically connected to the PTH 107, and is used to transmit a positive polarity signal in the differential signal
  • the solder ball 106 is electrically connected to the PTH 108, and is used to transmit a negative polarity signal in the differential signal
  • the solder ball 113 is electrically connected to the PTH 115 for transmitting a positive polarity signal in the differential signal
  • the solder ball 114 is electrically connected to the PTH 116 for transmitting a negative polarity signal in the differential signal.
  • the solder ball 105 and the solder ball 106 are referred to as the third differential pair
  • the solder ball 113 and the solder ball 114 are referred to as the fourth differential pair.
  • FIG. 1 shows two different solutions, and usually only one solution may be implemented in a specific implementation process.
  • FIG. 1 only shows the "alignment” scheme as an example for explanation. It should be understood that the following description is also applicable to the "tight coupling" scheme.
  • in-phase crosstalk exists between adjacent solder balls, that is, in-phase crosstalk exists between solder ball 101 and solder ball 105
  • in-phase crosstalk exists between solder ball 102 and solder ball 106
  • in-phase crosstalk also exists between adjacent PTHs, that is, in-phase crosstalk exists between PTH 103 and PTH 107
  • in-phase crosstalk exists between PTH 104 and PTH 108.
  • reverse phase crosstalk exists between adjacent solder balls (ie, solder ball 102 and solder ball 109), and reverse phase crosstalk exists between adjacent PTHs (ie, PTH 104 and PTH 111).
  • PTHs ie, PTH 104 and PTH 111
  • FIG. 1 shows a plurality of ground solder balls 120 located on ground pads of a package substrate. As shown in FIG. 1 , a column of ground solder balls is arranged between the first differential pair and the third differential pair to isolate crosstalk between differential signals. In order to reduce the crosstalk between the differential signals of the first differential pair and the third differential pair, one or more columns of ground solder balls can be added between the first differential pair and the third differential pair, which will increase the size of the semiconductor chip package. Similarly, in order to reduce the crosstalk between the differential signals of the first differential pair and the second differential pair, one or more rows of ground solder balls can be added between the first differential pair and the second differential pair, which will also increase the package size.
  • FIG. 2 shows a planar projection of a semiconductor chip package according to some embodiments of the present disclosure.
  • the solder ball 201 is electrically connected to the PTH 203, and is used to transmit a positive polarity signal in the differential signal
  • the solder ball 202 is electrically connected to the PTH 204, and is used to transmit a negative polarity signal in the differential signal.
  • solder balls 201 can be placed on pads on the package substrate, and such pads are also called ball landing pads (Ball Landing Pad).
  • solder ball 205 is electrically connected to the PTH 207, and is used to transmit the positive polarity signal in the differential signal
  • solder ball 206 is electrically connected to the PTH 208, and is used to transmit the negative polarity signal in the differential signal
  • the solder ball 209 is electrically connected to the PTH 211 connection, used to transmit positive polarity signals
  • solder ball 210 and PTH 212 are electrically connected, used to transmit negative polarity signals in differential signals
  • solder balls 213 and PTH 215 are electrically connected, used to transmit positive polarity signals in differential signals
  • solder The ball 214 is electrically connected to the PTH 216 for transmitting the negative polarity signal in the differential signal.
  • FIG. 2 shows a plurality of ground solder balls 220 . It should be understood that in the embodiments of the present disclosure, positive polarity and negative polarity are provided as examples only, and positive polarity and negative polarity can generally be interchanged with each other.
  • the first differential interconnection assembly includes solder balls 201, solder balls 202, PTH 203, and PTH 204
  • the second differential interconnection assembly includes solder balls 209, solder balls 210, PTH 211, and PTH 212
  • the third differential interconnect assembly includes solder ball 205, solder ball 206, PTH 207, and PTH 208
  • the fourth differential interconnect assembly includes solder ball 213, solder ball 214, PTH 215, and PTH 216.
  • solder ball 201 and the solder ball 202 are referred to as the first differential pair
  • solder ball 209 and the solder ball 210 are referred to as the second differential pair
  • solder ball 205 and the solder ball 206 are referred to as the third differential pair
  • solder ball 213 and the solder ball 214 are referred to as a fourth differential pair.
  • the connection line between the solder ball 201 and the solder ball 202 may be perpendicular to the connection line between the PTH 203 and the PTH 204, and other differential interconnection components may also have the same positional relationship.
  • solder balls 201 and 205 are located in the first row
  • solder balls 202 and 206 are located in the second row
  • solder balls 209 are located in the third row
  • solder balls 210 are located in the fourth row. Therefore, the third differential pair is arranged in parallel with the first differential pair.
  • the solder balls 201 and 202 are located in the first column
  • the solder balls 209 and 210 are located in the second column. Therefore, the second differential pair is arranged diagonally to the first differential pair.
  • the structures shown in FIG. 2 can be periodically arranged as basic units on the substrate to form an arrangement array. In this arrangement, the crosstalk between each pair of differential interconnection components can be reduced.
  • FIG. 3 shows a cross-sectional view of a part of a semiconductor chip package according to some embodiments of the present disclosure.
  • FIG. 3 shows a solder ball 324 and a PTH 309 electrically connected to the solder ball 324.
  • PTH 309 passes through core 310 of the package substrate.
  • the core 310 occupies most of the thickness of the package substrate, therefore, the PTH 309 is an interconnection structure in the package substrate that is mainly used to realize the function of vertical interconnection.
  • Solder ball 324 may be any one of solder ball 201 , solder ball 202 , solder ball 305 , solder ball 206 , solder ball 209 , solder ball 210 , solder ball 213 and solder ball 214 shown in FIG. 2 .
  • the PTH 309 may be any one of the PTH 203, PTH 204, PTH 207, PTH 208, PTH 211, PTH 212, PTH 215 and PTH 216 shown in FIG. 2 .
  • solder balls 324 are disposed on a packaging substrate, which may be a laminated substrate.
  • the packaging substrate includes dielectric layers 301-308, wiring layers 331-338, and a core 310 located between wiring layers 334 and 335, wherein wiring layer 331 is located between dielectric layers 301 and 302, and the wiring layer 332 is located between the dielectric layers 302 and 303, the wiring layer 333 is located between the dielectric layers 303 and 304, the wiring layer 334 is located between the dielectric layer 304 and the core 310, and the wiring layer 335 is located between the core 310 and the dielectric layer 305
  • the wiring layer 336 is located between the dielectric layers 305 and 306
  • the wiring layer 337 is located between the dielectric layers 306 and 307
  • the wiring layer 338 is located between the dielectric layers 307 and 308 .
  • the dielectric layer 301 is provided with a blind buried via (Blind Buried Via, BB Via) 311, and the blind buried via is a vertical interconnection inside the package substrate, and is used to connect the interconnection outside the package substrate to the PTH.
  • the dielectric layer 302 is provided with a blind buried hole 312
  • the dielectric layer 303 is provided with a blind buried hole 313
  • the dielectric layer 304 is provided with a blind buried hole 314
  • the dielectric layer 305 is provided with a blind buried hole 315.
  • 306 is provided with blind and buried holes 316
  • the dielectric layer 307 is provided with blind and buried holes 317
  • the dielectric layer 308 is provided with blind and buried holes 318 .
  • the core 310 is provided with a PTH 309 for interconnecting the wiring layers 334 and 335.
  • the wiring layer 331 interconnects the blind buried holes 311 and 312, the wiring layer 332 interconnects the blind buried holes 312 and 313, the wiring layer 333 interconnects the blind buried holes 313 and 314, and the wiring layer 334 interconnects the blind buried holes 314 and the PTH 309 Interconnection, the wiring layer 335 interconnects the PTH 309 and the blind buried hole 315, the wiring layer 336 interconnects the blind buried hole 315 and 316, the wiring layer 337 interconnects the blind buried hole 316 and 317, and the wiring layer 338 interconnects the blind buried hole 317 and 318 are interconnected.
  • the semiconductor chip package also includes a die 322, which is in contact with the blind buried hole 311 through a bump 323, and is further electrically connected with the solder ball 324 through the blind buried holes 312-318 and the PTH 309, thereby transmitting signals.
  • the semiconductor chip package may further include a resin 321 . It should be understood that in other embodiments, the resin 321 may also be replaced by a metal cover or the like.
  • the solder ball 324 may be disposed on a pad (not shown) on the package substrate, that is, the solder ball may be disposed between the solder ball 324 and the blind buried hole 318 .
  • the bump 323 may also be disposed on a pad (not shown) on the package substrate, that is, a pad may be disposed between the bump 323 and the blind buried hole 311 . Due to the corresponding relationship between the solder balls and the solder pads, the description about the solder balls here is also applicable to the solder pads corresponding to the solder balls.
  • FIG. 4 and FIG. 5 respectively illustrate the principle of crosstalk cancellation between adjacent differential interconnection components in FIG. 2 .
  • the two kinds of interference can cancel each other out. For example, if the interference between the closest PTHs between two adjacent differential interconnect assemblies is in-phase interference, the interference between the closest solder balls between two adjacent differential interconnect assemblies is in-phase interference. If they interfere with each other, the two interferences can be canceled out.
  • the interference between the closest PTHs between two adjacent differential interconnect components is anti-phase interference
  • the interference between the closest solder balls between two adjacent differential interconnect components If it is in-phase interference, the two interferences can also be canceled out.
  • adjacent means that no other differential interconnection components are included between two differential interconnection components.
  • FIG. 4 shows the principle of crosstalk cancellation between the first differential interconnection component and the third differential interconnection component in FIG. 2 .
  • the solder ball 201 in the first differential interconnection assembly is adjacent to the solder ball 205 in the third differential interconnection assembly and transmits signals of the same polarity, so there is in-phase crosstalk between them.
  • the "adjacent" here means that the solder ball 201 in the first differential interconnection component and the solder ball 205 in the third differential interconnection component do not include other components in the first differential interconnection component and the third differential interconnection component. Solder balls.
  • the solder ball 202 in the first differential interconnection assembly is adjacent to the solder ball 206 in the third differential interconnection assembly and transmits signals of the same polarity, therefore, there is also in-phase crosstalk between the two. That is, the interference between the closest solder balls between the first differential interconnection component and the third differential interconnection component is in-phase interference.
  • PTH 203 in the first differential interconnection assembly is adjacent to PTH 208 in the third differential interconnection assembly and carries signals of opposite polarity, therefore, there is reverse crosstalk between the two. That is, the interference between the closest PTHs between the first differential interconnection component and the third differential interconnection component is anti-phase interference, which will at least partially cancel the interaction between the first differential interconnection component and the third differential interconnection component.
  • the "adjacent" here means that the PTH 203 in the first differential interconnection component and the PTH 208 in the third differential interconnection component do not include other PTHs in the first differential interconnection component and the third differential interconnection component.
  • FIG. 5 shows the principle of crosstalk cancellation between the first differential interconnection component and the second differential interconnection component in FIG. 2 .
  • the solder ball 202 in the first differential interconnection assembly is adjacent to the solder ball 209 in the second differential interconnection assembly and transmits signals of opposite polarity, therefore, there is anti-phase crosstalk between the two . That is, the interference between the closest solder balls between the first differential interconnection component and the second differential interconnection component is anti-phase interference.
  • PTH 203 in the first differential interconnection assembly is adjacent to PTH 211 in the second differential interconnection assembly and transmits signals of the same polarity, therefore, there is in-phase crosstalk between the two, i.e., the first differential interconnection assembly
  • the interference between the closest PTH and the second differential interconnection component is in-phase interference, which will at least partially offset the anti-phase crosstalk between the solder balls of the first differential interconnection component and the third differential interconnection component.
  • FIG. 6 shows a planar projection of a semiconductor chip package according to some embodiments of the present disclosure.
  • the first differential interconnection assembly includes a solder ball 401, a solder ball 402, a PTH 403, and a PTH 404, wherein the solder ball 401 and the solder ball 402 are electrically connected to the PTH 404 and the PTH 403, respectively.
  • the second differential interconnect assembly includes solder ball 405, solder ball 406, PTH 407, and PTH 408, wherein solder ball 405 and solder ball 406 are electrically connected to PTH 408 and PTH 407, respectively.
  • solder balls 401, 402, 405, 406 and PTHs 403, 404, 407, and 408 can be implemented by the embodiment shown in FIG. 3 .
  • the solder balls 401 , 402 , 405 and 406 may be arranged in a straight line or in a row so as to be conveniently arranged at the edge of the semiconductor chip package.
  • the solder balls 401 and 402 may be located on the edge of the semiconductor chip package, so that the PTHs 403 and 404 cannot be arranged on both sides of the connection line between the solder balls 401 and 402, but on the same side.
  • the solder balls 405 and 406 may be located at the edge of the semiconductor chip package, so that the PTHs 407 and 408 cannot be placed on both sides of the connection between the solder balls 405 and 406, but on the same side.
  • the solder ball 402 in the first differential interconnection assembly is adjacent to the solder ball 405 in the second differential interconnection assembly, and transmits signals of opposite polarity, so there is reverse crosstalk. That is, the interference between the closest solder balls between the first differential interconnection component and the second differential interconnection component is anti-phase interference.
  • PTH 403 in the first differential interconnection is adjacent to PTH 407 in the second differential interconnection and transmits signals of the same polarity, so there is in-phase crosstalk
  • PTH 404 in the first differential interconnection is adjacent to PTH 407 in the second differential interconnection.
  • the PTHs 408 in the second differential interconnect are adjacent and carry signals of the same polarity, so there is in-phase crosstalk. That is, the interference between the closest PTHs between the first differential interconnection component and the second differential interconnection component is in-phase interference. In this way, in-phase and anti-phase crosstalk can cancel each other out.
  • FIG. 7 shows a planar projection of a semiconductor chip package according to some embodiments of the present disclosure.
  • the first differential interconnection assembly includes a solder ball 501, a solder ball 502, a PTH 503, and a PTH 504, wherein the solder ball 501 and the solder ball 502 are electrically connected to the PTH 503 and the PTH 504, respectively.
  • the second differential interconnect assembly includes solder ball 505, solder ball 506, PTH 507, and PTH 508, wherein solder ball 505 and solder ball 506 are electrically connected to PTH 507 and PTH 508, respectively.
  • solder balls 501, 502, 505, 506 and PTHs 503, 504, 507, and 508 can be implemented by the embodiment shown in FIG. 3 .
  • This arrangement can be flexibly arranged at the corner of the semiconductor chip package, for example, the upper right corner of FIG. 7 may correspond to the corner of the semiconductor chip package. Due to the limitation of the space at the corner, the spatial arrangement of the solder balls is limited, and the solder balls cannot be arranged according to the layout shown in FIG. 2 .
  • the connection between the solder ball 501 and the solder ball 502 in the first differential interconnection assembly is the same as the connection between the solder ball 505 and the solder ball 506 in the second differential interconnection assembly.
  • the lines are perpendicular to each other to accommodate the space requirements at the corners of the semiconductor chip package.
  • connection between PTH 503 and PTH 504 in the first differential interconnection component and the connection between PTH 507 and PTH 508 in the second differential interconnection component are parallel to each other.
  • the solder ball 502 in the first differential interconnection assembly is adjacent to the solder ball 506 in the second differential interconnection assembly and transmits signals of the same polarity, so there is in-phase crosstalk. That is, the interference between the closest solder balls between the first differential interconnection component and the second differential interconnection component is in-phase interference.
  • PTH 504 in the first differential interconnect assembly is adjacent to PTH 507 in the second differential interconnect assembly and carries signals of opposite polarity, so there is anti-phase crosstalk. That is, the interference between the closest PTHs between the first differential interconnection component and the second differential interconnection component is anti-phase interference. In this way, in-phase and anti-phase crosstalk can cancel each other out.
  • FIG. 8 shows a planar projection of a semiconductor chip package according to some embodiments of the present disclosure.
  • the first differential interconnection assembly includes a solder ball 601, a solder ball 602, a PTH 603, and a PTH 604, wherein the solder ball 601 and the solder ball 602 are electrically connected to the PTH 604 and the PTH 603, respectively.
  • the second differential interconnect assembly includes solder ball 605, solder ball 606, PTH 607, and PTH 608, wherein solder ball 605 and solder ball 606 are electrically connected to PTH 607 and PTH 608, respectively.
  • solder balls 601, 602, 605, 606 and PTHs 603, 604, 607, and 608 can be implemented by the embodiment shown in FIG.
  • connection between the solder ball 601 and the solder ball 602 in the first differential interconnect assembly is the same as the connection between the solder ball 605 and the solder ball 606 in the second differential interconnect assembly.
  • the lines are perpendicular to each other.
  • the wiring between PTH 603 and PTH 604 in the first differential interconnection assembly and the wiring between PTH 607 and PTH 608 in the second differential interconnection assembly are parallel to each other so as to fit the corner of the semiconductor chip package. space requirements.
  • connection line between solder ball 601 and solder ball 602 and the connection line between PTH 603 and PTH 604 are perpendicular to each other, and the connection line between solder ball 605 and solder ball 606 is perpendicular to PTH 607 and The connections between the PTHs 608 are parallel to each other.
  • the solder ball 602 in the first differential interconnection assembly is adjacent to the solder ball 606 in the second differential interconnection assembly, and transmits signals of the same polarity, so there is in-phase crosstalk.
  • PTH 604 in the first differential interconnection assembly is adjacent to PTH 608 in the second differential interconnection assembly and carries signals of opposite polarity, thus presenting anti-phase crosstalk. In this way, in-phase and anti-phase crosstalk can cancel each other out.
  • FIG. 9 illustrates a cross-sectional view of a portion of a semiconductor chip package according to some embodiments of the present disclosure.
  • solder balls 324 are connected to a printed circuit board (Printed Circuit Board, PCB) to form a next-level package, wherein the printed circuit board includes layers 731-733.
  • the layer 731 is provided with a trace 741
  • the layer 731 is provided with a PTH 742
  • the layer 733 is provided with a trace 743.
  • the above embodiments shown in conjunction with FIGS. 2 and 4-8 can also be applied to solder balls 324 and PTH 742.
  • solder ball 324 may be any one of solder ball 201 , solder ball 202 , solder ball 305 , solder ball 206 , solder ball 209 , solder ball 210 , solder ball 213 and solder ball 214 shown in FIG. 2 .
  • the PTH 742 may be any one of the PTH 203, PTH 204, PTH 207, PTH 208, PTH 211, PTH 212, PTH 215 and PTH 216 shown in FIG. 2 .
  • FIG. 10 shows a planar projection of a semiconductor chip package according to some embodiments of the present disclosure.
  • FIG. 10 further shows PTH 801 to PTH 805 located between the two differential interconnect components, and these PTHs all serve as ground vias.
  • PTH 801 to PTH 804 may be arranged symmetrically. However, it should be understood that the PTH 805 may also not be included.
  • the connecting line of PTH 806 and PTH 807 passes through the midpoint of PTH 203 and PTH 204.
  • connection of PTH 203 and PTH 204 can also pass through the midpoint of PTH 806 and PTH 807. It should be understood that there may also be the same PTH between the solder ball 205 and the solder ball 206 , however, for simplicity, the PTH between the solder ball 205 and the solder ball 206 is omitted in FIG. 10 .
  • PTH 806 and PTH 807 can also be replaced by other numbers of PTH holes such as one or three.
  • the distance from PTH 801-PTH 804 to the corresponding signal PTH hole is represented as R
  • the angle between PTH 801-PTH 804 and the corresponding signal PTH hole is represented as ⁇
  • the distance between PTH 806 and PTH 807 The angle between the connection line and the horizontal direction is expressed as ⁇ .
  • the distance between PTH 801 and PTH 203 is R
  • the distance between PTH 802 and PTH 203 is R
  • the distance between PTH 803 and PTH 208 is R
  • the distance between PTH 804 and PTH 208 is R.
  • FIG. 10 and FIG. 11 are described in conjunction with the first differential interconnection assembly and the third differential interconnection assembly shown in FIG. 2 .
  • this structure is also applicable to the first differential interconnection component and the second differential interconnection component as shown in FIG. 2 .
  • adjusting the size of the angle ⁇ can also optimize the effect of crosstalk cancellation.
  • FIG. 12 illustrates crosstalk between the first differential interconnection assembly and the third differential interconnection assembly as shown in FIG. 2 when located at the edge of a semiconductor chip package.
  • the first differential interconnection component and the third differential interconnection component of FIG. 2 have a gain of 10 dB+ in a wider frequency band (DC ⁇ 40 GHz).
  • FIG. 13 illustrates crosstalk between the first differential interconnection assembly and the third differential interconnection assembly as shown in FIG. 2 when located inside a semiconductor chip package.
  • the first differential interconnection component and the third differential interconnection component of FIG. 2 have a gain of 10dB+ in a wider frequency band (15GHz ⁇ 40GHz).
  • FIG. 14 illustrates crosstalk between the first differential interconnect assembly and the second differential interconnect assembly as shown in FIG. 2 .
  • the first differential interconnection assembly and the second differential interconnection assembly of FIG. 2 have a gain of 10 dB+ in a wider frequency band (DC ⁇ 40 GHz).
  • FIG. 15 illustrates crosstalk between the first differential interconnect assembly and the second differential interconnect assembly as shown in FIG. 6 .
  • the first differential interconnection component and the second differential interconnection component in FIG. 10dB+ gain As shown in FIG. 15, compared with FIG. 1, the first differential interconnection component and the second differential interconnection component in FIG. 10dB+ gain.
  • FIG. 16 shows a schematic diagram of package routing due to differential polarity reversal on the bump and ball sides.
  • the solder ball 901 and the solder ball 902 are respectively used to transmit a positive polarity signal and a negative polarity signal in the differential signal.
  • the bumps 905 and 906 are respectively used to transmit the positive polarity signal and the negative polarity signal in the differential signal. Therefore, at the time of connection, there is a case where the package is wound.
  • FIG. 17 shows a schematic diagram of an outlet layout according to some embodiments of the present disclosure.
  • Figure 17 omits the solder balls.
  • FIG. 17 also shows blind and buried holes 1003 to 1008 .
  • the blind and buried holes 1003 to 1008 present a ladder-like structure, similar to a DNA double helix structure.
  • blind and buried holes 1003, 1005 and 1007 are stacked along a first direction, wherein the first direction represents the direction from the blind and buried holes 1003 to the blind and buried holes 1007; the blind and buried holes 1004, 1006 and 1008 are stacked along the One direction is opposite to the stacking in a second direction, wherein the second direction represents the direction from the blind buried hole 1004 to the blind buried hole 1008 .
  • Blind and buried vias 1004, 1006 and 1008 are used to electrically connect the bumps to the PTH 203, and blind and buried vias 1003, 1005 and 1007 are used to electrically connect the bumps to the PTH 204.
  • the lead wire 1011 has a negative polarity
  • the lead wire 1012 has a positive polarity.
  • the blind and buried vias 1003 , 1005 and 1007 may respectively correspond to the blind and buried vias 314 , 313 and 312 as shown in FIG. 9 .
  • the lead 1011 may correspond to the wiring layer 331 as shown in FIG. 9 , and is used for connecting with the bump 323 .
  • blind and buried vias 1004 , 1006 and 1008 may correspond to blind and buried vias 314 , 313 and 312 as shown in FIG. 9 , respectively.
  • the lead 1012 may correspond to the wiring layer 331 as shown in FIG.
  • FIG. 17 does not show the blind and buried vias between the PTH and the solder balls. It should be understood that the blind and buried vias between the PTH and the solder balls can also be similarly arranged.
  • FIG. 18 shows a schematic diagram of an outlet layout according to some embodiments of the present disclosure.
  • Figure 18 omits the solder balls.
  • FIG. 18 also shows blind and buried holes 1003 to 1008 .
  • the blind and buried holes 1003 to 1008 present a ladder-like structure, similar to a DNA double helix structure. Therefore, the lead wire 1111 has a positive polarity, and the lead wire 1112 has a negative polarity.
  • the blind and buried vias 1003 , 1005 and 1007 may respectively correspond to the blind and buried vias 314 , 313 and 312 as shown in FIG. 9 .
  • the lead 1111 may correspond to the wiring layer 331 as shown in FIG.
  • blind and buried vias 1004 , 1006 and 1008 may correspond to blind and buried vias 314 , 313 and 312 as shown in FIG. 9 , respectively.
  • the lead 1112 may correspond to the wiring layer 331 as shown in FIG. 9 , and is used for connecting with the bump 323 .
  • FIG. 18 does not show the blind and buried vias between the PTH and the solder balls. It should be understood that the blind and buried vias between the PTH and the solder balls can also be similarly arranged. In Figure 17, the leads are drawn out from the left, while in Figure 18 the leads are drawn out from the right, which will lead to a switching of the polarity, so that a flexible wiring scheme can be realized and wire winding can be prevented.
  • FIG. 19 shows a schematic diagram of an outlet layout according to some embodiments of the present disclosure.
  • Figure 19 omits the solder balls.
  • FIG. 19 shows PTH 1201 and PTH 1202, which are respectively used to transmit negative polarity signals and positive polarity signals in differential signals.
  • PTHs 1221 and 1222 are used for grounding, corresponding to PTHs 806 and 807 shown in Figure 10.
  • the blind and buried holes 1203 to 1208 present a stepped structure. Therefore, the lead wire 1211 is of negative polarity, and the lead wire 1212 is of positive polarity.
  • the blind and buried vias 1203 , 1205 and 1207 may respectively correspond to the blind and buried vias 314 , 313 and 312 as shown in FIG.
  • the lead 1211 may correspond to the wiring layer 331 as shown in FIG. 9 , and is used for connecting with the bump 323 .
  • blind and buried vias 1204 , 1206 and 1208 may correspond to blind and buried vias 314 , 313 and 312 as shown in FIG. 9 , respectively.
  • the lead 1212 may correspond to the wiring layer 331 as shown in FIG. 9 , and is used for connecting with the bump 323 .
  • FIG. 19 does not show the blind and buried vias between the PTH and the solder balls. It should be understood that the blind and buried vias between the PTH and the solder balls can also be similarly arranged.
  • the solution shown in FIG. 19 is a middle outlet solution, which can be used to replace the left side outlet solution shown in FIG. 17 .
  • FIG. 20 shows a schematic diagram of a layout of ground holes according to some embodiments of the present disclosure. Compared to Figure 17, one ground hole PTH 1301 replaces two ground holes PTH 406 and 407. As shown in Figure 20, PTH 1301 is located between PTH 203 and PTH 204.
  • FIG. 21 shows a schematic diagram of a layout of ground holes according to some embodiments of the present disclosure. Compared with FIG. 17, three ground holes PTH 1401 to PTH 1403 replace two ground holes PTH 406 and 407. As shown in Figure 21, PTH 1402 is located between PTH 203 and PTH 204.
  • FIG. 22 shows a schematic diagram of a layout of ground holes according to some embodiments of the present disclosure. Compared with FIG. 17, three ground holes PTH 1501 to PTH 1503 replace two ground holes PTH 406 and 407. As shown in Figure 22, PTH 1502 is located between PTH 203 and PTH 204.

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Abstract

Embodiments of the present disclosure relate to a semiconductor chip package. In the semiconductor chip package, a first pair of pads transmit differential signals and are electrically connected to a first pair of plating holes. A second pair of pads also transmit differential signals and are electrically connected to a second pair of plating holes. The polarities of signals transmitted by adjacent pads among the two pairs of pads are the same, and the polarities of signals transmitted by adjacent plating holes among the two pairs of plating holes are opposite, and vice versa. In this way, differential crosstalk in a semiconductor chip package can be at least partially counteracted.

Description

半导体芯片封装Semiconductor Chip Packaging 技术领域technical field
本公开的实施例涉及半导体领域,并且更具体地涉及半导体芯片封装。Embodiments of the present disclosure relate to the field of semiconductors, and more particularly, to semiconductor chip packaging.
背景技术Background technique
在高速串行解串器(Serializer-Deserializer,SerDes)、转换器、时钟等领域中,封装差分信号焊球之间的串扰已经成为限制系统性能进一步提升的关键因素。在现有的方案中,通过增加更多的接地焊球隔离来减小封装差分串扰。这会使半导体芯片封装的尺寸增大,从而导致芯片竞争力下降。In the fields of high-speed serializer-deserializer (Serializer-Deserializer, SerDes), converter, clock, etc., the crosstalk between package differential signal solder balls has become a key factor limiting the further improvement of system performance. In existing solutions, package differential crosstalk is reduced by adding more ground ball isolation. This increases the size of the semiconductor chip package, resulting in a decrease in chip competitiveness.
发明内容Contents of the invention
本公开的实施例目的在于提供一种在不显著增加半导体芯片封装的尺寸的基础上降低半导体芯片封装中的互连结构的差分串扰的方案。Embodiments of the present disclosure aim to provide a solution for reducing differential crosstalk of an interconnection structure in a semiconductor chip package without significantly increasing the size of the semiconductor chip package.
在一些实施例中,提供了一种半导体芯片封装。该半导体芯片封装包括第一差分互连组件和与第一差分互连组件相邻的第二差分互连组件。每一个差分互连组件包括用于传送差分信号的一对焊盘和与一对焊盘分别电连接的一对镀覆孔。如果在半导体芯片封装的平面投影中第一差分互连组件和第二差分互连组件之间相邻的焊盘的极性相反,则在半导体芯片封装的平面投影中第一差分互连组件和第二差分互连组件之间相邻的镀覆孔的极性相同。反之,如果在半导体芯片封装的平面投影中第一差分互连组件和第二差分互连组件之间相邻的焊盘的极性相同,则在半导体芯片封装的平面投影中第一差分互连组件和第二差分互连组件之间相邻的镀覆孔的极性相反。In some embodiments, a semiconductor chip package is provided. The semiconductor chip package includes a first differential interconnect assembly and a second differential interconnect assembly adjacent to the first differential interconnect assembly. Each differential interconnection assembly includes a pair of pads for transmitting differential signals and a pair of plated-through holes electrically connected to the pair of pads, respectively. If the polarities of adjacent pads between the first differential interconnection component and the second differential interconnection component are opposite in the planar projection of the semiconductor chip package, the first differential interconnection component and the second differential interconnection component are reversed in the planar projection of the semiconductor chip package. Adjacent plated-through holes between the second differential interconnection components have the same polarity. Conversely, if the polarities of adjacent pads between the first differential interconnection component and the second differential interconnection component are the same in the planar projection of the semiconductor chip package, the first differential interconnection in the planar projection of the semiconductor chip package The polarity of adjacent plated-through holes between the component and the second differential interconnect component is reversed.
相邻镀覆孔之间的串扰与相邻焊盘之间的串扰的极性正好相反,因此,可以至少部分抵消相邻焊盘之间的串扰,从而在不显著增加半导体芯片封装的尺寸的基础上降低半导体芯片封装中的焊盘的差分串扰。进一步地,本公开的实施例可以保持引脚地图(也称焊盘排布)不变,从而具有良好的兼容性。另外,本公开的实施例可以不增加或者尽可能少地增加差分对之间的隔离地焊盘。The crosstalk between adjacent plated holes is just opposite in polarity to the crosstalk between adjacent pads, and therefore, can at least partially cancel the crosstalk between adjacent pads, thereby reducing the size of the semiconductor chip package significantly. Basically reduce the differential crosstalk of the bonding pads in the semiconductor chip package. Further, the embodiments of the present disclosure can keep the pin map (also referred to as pad arrangement) unchanged, thus having good compatibility. In addition, the embodiments of the present disclosure may not increase or add as little isolation ground pads between differential pairs as possible.
在一些实施例中,第一差分互连组件包括:第一焊盘和第二焊盘,设置在基板上,用于传送第一差分信号。第一差分互连组件还包括第一镀覆孔和第二镀覆孔,设置在基板中,并且分别与第一焊盘和第二焊盘电连接。第二差分互连组件,与第一差分互连组件相邻,第二差分互连组件包括:第三焊盘和第四焊盘,设置在基板上,用于传送第二差分信号。第二差分互连组件包括第三镀覆孔和第四镀覆孔,设置在基板中,并且分别与第三焊盘和第四焊盘电连接。在半导体芯片封装的平面投影中,第一差分互连组件中的第二焊盘与第二差分互连组件中的第三焊盘相邻,第一差分互连组件中的第一镀覆孔与第二差分互连组件中的第三镀覆孔相邻。第二焊盘和第三焊盘传送的信号的极性相同,并且第一镀覆孔和第三镀覆孔传送的信号的极性相反;或者,第二焊盘和第三焊盘传送的信号的极性相反,并且第一镀覆孔和第三镀覆孔传送的信号的极性相同。In some embodiments, the first differential interconnection component includes: a first pad and a second pad, disposed on the substrate, for transmitting the first differential signal. The first differential interconnection assembly further includes a first plated-through hole and a second plated-through hole disposed in the substrate and electrically connected to the first pad and the second pad respectively. The second differential interconnection component is adjacent to the first differential interconnection component, and the second differential interconnection component includes: a third pad and a fourth pad, arranged on the substrate, and used for transmitting the second differential signal. The second differential interconnection assembly includes a third plated-through hole and a fourth plated-through hole, disposed in the substrate, and electrically connected to the third pad and the fourth pad, respectively. In the planar projection of the semiconductor chip package, the second pad in the first differential interconnection assembly is adjacent to the third pad in the second differential interconnection assembly, and the first plated-through hole in the first differential interconnection assembly Adjacent to the third plated through hole in the second differential interconnect assembly. The polarity of the signal transmitted by the second pad and the third pad is the same, and the polarity of the signal transmitted by the first plated hole and the third plated hole is opposite; or, the signal transmitted by the second pad and the third pad The polarities of the signals are reversed, and the signals carried by the first plated-through hole and the third plated-through hole are of the same polarity.
在一些实施例中,在半导体芯片封装的平面投影中,第一焊盘和第二焊盘之间的连线与 第一镀覆孔和第二镀覆孔之间的连线彼此垂直,并且第三焊盘和第四焊盘之间的连线与第三镀覆孔与第四镀覆孔之间的连线彼此垂直。通过将焊盘与镀覆孔垂直设置,可以将镀覆孔与焊盘的位置彼此错开。以这种方式,有可能实现焊盘和镀覆孔的串扰极性的不同,从而产生互相抵消的效果。In some embodiments, in the planar projection of the semiconductor chip package, the connection line between the first pad and the second pad and the connection line between the first plated hole and the second plated hole are perpendicular to each other, and The connection line between the third pad and the fourth pad and the connection line between the third plated hole and the fourth plated hole are perpendicular to each other. By placing the pad perpendicular to the plated hole, the position of the plated hole and the pad can be staggered from each other. In this way, it is possible to achieve differences in the crosstalk polarity of the pads and plated-through holes, thereby creating a mutually canceling effect.
在一些实施例中,第一差分互连组件中的第一焊盘与第二差分互连组件中的第四焊盘相邻。In some embodiments, the first pad in the first differential interconnect assembly is adjacent to the fourth pad in the second differential interconnect assembly.
在一些实施例中,第一镀覆孔位于第一焊盘和第二焊盘的一侧,第二镀覆孔位于第一焊盘和第二焊盘的另一侧。In some embodiments, the first plated-through hole is located on one side of the first pad and the second pad, and the second plated-through hole is located on the other side of the first pad and the second pad.
在一些实施例中,第一焊盘与第四焊盘布置在第一行,并且第二焊盘和第三焊盘布置在与第一行相邻的第二行。In some embodiments, the first pad and the fourth pad are arranged in a first row, and the second pad and the third pad are arranged in a second row adjacent to the first row.
在一些实施例中,第二焊盘和第三焊盘布置在相邻的行和相邻的列。In some embodiments, the second pads and the third pads are arranged in adjacent rows and adjacent columns.
在一些实施例中,第一焊盘至第四焊盘布置在一行,第一镀覆孔至第四镀覆孔位于行的一侧。In some embodiments, the first to fourth pads are arranged in a row, and the first to fourth plated holes are located at one side of the row.
在一些实施例中,第一焊盘和第二焊盘之间的连线与第三焊盘与第四焊盘之间的连线彼此垂直。In some embodiments, the connection line between the first pad and the second pad and the connection line between the third pad and the fourth pad are perpendicular to each other.
在一些实施例中,第一焊盘和第二焊盘之间的连线与第一镀覆孔和第二镀覆孔之间的连线彼此垂直,第三焊盘和第四焊盘之间的连线与第三镀覆孔与第四镀覆孔之间的连线彼此平行,并且第一焊盘和第二焊盘之间的连线与第三焊盘与第四焊盘之间的连线彼此垂直。In some embodiments, the line between the first pad and the second pad is perpendicular to the line between the first plated hole and the second plated hole, and the line between the third pad and the fourth pad The connection line between the third plated hole and the fourth plated hole is parallel to each other, and the connection line between the first pad and the second pad and the connection line between the third pad and the fourth pad The connecting lines are perpendicular to each other.
在一些实施例中,第一焊盘布置在第一行,第二焊盘布置在第二行,并且第三焊盘和第四焊盘布置在第三行。In some embodiments, the first pads are arranged in a first row, the second pads are arranged in a second row, and the third pads and fourth pads are arranged in a third row.
在一些实施例中,半导体芯片封装还包括一个或多个镀覆孔,用于电连接到地,设置在基板中,在半导体芯片封装的平面投影中位于第一焊盘与第二焊盘之间;和/或一个或多个镀覆孔,用于电连接到地,设置在基板中,在半导体芯片封装的平面投影中位于第三焊盘与第四焊盘之间。通过在半导体芯片封装中设置一个或多个地孔,可以实现阻抗控制和串扰消除的量化调节。In some embodiments, the semiconductor chip package further includes one or more plated-through holes for electrical connection to ground, disposed in the substrate, between the first pad and the second pad in a planar projection of the semiconductor chip package and/or one or more plated-through holes for electrical connection to ground, disposed in the substrate between the third pad and the fourth pad in the planar projection of the semiconductor chip package. Quantitative adjustment of impedance control and crosstalk elimination can be realized by setting one or more ground holes in the semiconductor chip package.
在一些实施例中,第一焊盘和第二焊盘通过双螺旋状盲埋孔分别与第一镀覆孔和第二镀覆孔连接;和/或第三焊盘和第四焊盘通过双螺旋状盲埋孔分别与第一镀覆孔和第二镀覆孔连接。双螺旋状盲埋孔包括彼此电连接的第一多个盲埋孔和彼此电连接的第二多个盲埋孔,第一多个盲埋孔沿着第一方向堆叠,第二多个盲埋孔沿着与第一方向相反的第二方向堆叠。以这种方式,可以实现灵活出线,防止绕线。In some embodiments, the first pad and the second pad are respectively connected to the first plated hole and the second plated hole through a double helix blind buried hole; and/or the third pad and the fourth pad are connected through The double helix blind buried holes are respectively connected with the first plated hole and the second plated hole. The double-helix blind buried holes include a first plurality of blind buried holes electrically connected to each other and a second plurality of blind buried holes electrically connected to each other, the first plurality of blind buried holes are stacked along the first direction, and the second plurality of blind buried holes The buried vias are stacked along a second direction opposite to the first direction. In this way, a flexible outlet can be achieved and wire winding can be prevented.
在一些实施例中,基板包括层压基板或印刷电路板(Printed Circuit Board,PCB)。In some embodiments, the substrate includes a laminated substrate or a printed circuit board (Printed Circuit Board, PCB).
在一些实施例中,半导体芯片封装还包括第三差分互连组件和第四差分互连组件。第三差分互连组件包括:第五焊盘和第六焊盘,设置在基板上,用于传送第三差分信号;以及第五镀覆孔和第六镀覆孔,设置在基板中,并且分别与第五焊盘和第六焊盘电连接。第四差分互连组件包括:第七焊盘和第八焊盘,设置在基板上,用于传送第四差分信号;以及第七镀覆孔和第八镀覆孔,设置在基板中,并且分别与第七焊盘和第八焊盘电连接。第三差分互连组件中的第六焊盘与第四差分互连组件中的第七焊盘相邻,第三差分互连组件中的第五焊盘与第四差分互连组件中的第八焊盘相邻,第三差分互连组件中的第五镀覆孔与第四差分互连组件中的第六镀覆孔相邻。第六焊盘和第七焊盘传送的信号的极性相同,并且第五镀覆孔和第六镀覆孔传送的信号的极性相反;或者第六焊盘和第七焊盘传送的信号的极性相反,并且 第五镀覆孔和第六镀覆孔传送的信号的极性相同。在半导体芯片封装的平面投影中,第五焊盘与第八焊盘布置在第三行,并且第六焊盘和第七焊盘布置在与第三行相邻的第四行,第一焊盘和第二焊盘布置在第一列,第五焊盘和第六焊盘布置在与第一列相邻的第二列,第三焊盘和第四焊盘布置在与第二列相邻的第三列,第七焊盘和第八焊盘布置在与第三列相邻的第四列。以这种方式,可以降低四个差分互连组件中的每一对差分互连组件之间的串扰。In some embodiments, the semiconductor chip package further includes a third differential interconnection component and a fourth differential interconnection component. The third differential interconnection assembly includes: a fifth pad and a sixth pad disposed on the substrate for transmitting a third differential signal; and a fifth plated hole and a sixth plated hole disposed in the substrate, and are electrically connected to the fifth pad and the sixth pad respectively. The fourth differential interconnection assembly includes: a seventh pad and an eighth pad disposed on the substrate for transmitting a fourth differential signal; and a seventh plated hole and an eighth plated hole disposed in the substrate, and are electrically connected to the seventh pad and the eighth pad respectively. The sixth pad in the third differential interconnection component is adjacent to the seventh pad in the fourth differential interconnection component, and the fifth pad in the third differential interconnection component is adjacent to the seventh pad in the fourth differential interconnection component. The eight pads are adjacent, and the fifth plated through hole in the third differential interconnection assembly is adjacent to the sixth plated through hole in the fourth differential interconnection assembly. The polarity of the signal transmitted by the sixth pad and the seventh pad is the same, and the polarity of the signal transmitted by the fifth plated hole and the sixth plated hole is opposite; or the signal transmitted by the sixth pad and the seventh pad The polarity of the plated-through hole is opposite, and the polarity of the signal transmitted by the fifth plated-through hole and the sixth plated-through hole is the same. In the planar projection of the semiconductor chip package, the fifth pad and the eighth pad are arranged in the third row, and the sixth pad and the seventh pad are arranged in the fourth row adjacent to the third row. The pad and the second pad are arranged in the first column, the fifth pad and the sixth pad are arranged in the second column adjacent to the first column, and the third pad and the fourth pad are arranged in the same column as the second column. In the adjacent third column, the seventh pad and the eighth pad are arranged in the fourth column adjacent to the third column. In this manner, crosstalk between each pair of the four differential interconnect assemblies can be reduced.
在一些实施例中,第一差分互连组件、第二差分互连组件、第三差分互连组件和第四差分互连组件形成一基本单元,在基板上周期性排布。在该排布阵列中,可以降低每一对差分互连组件之间的串扰。In some embodiments, the first differential interconnection component, the second differential interconnection component, the third differential interconnection component and the fourth differential interconnection component form a basic unit and are periodically arranged on the substrate. In this arrangement, the crosstalk between each pair of differential interconnection components can be reduced.
提供发明内容部分是为了以简化的形式来介绍对概念的选择,它们在下文的具体实施方式中将被进一步描述。发明内容部分无意标识本公开的关键特征或主要特征,也无意限制本公开的范围。This Summary is provided to introduce a selection of concepts in a simplified form that are further described below in the Detailed Description. This Summary is not intended to identify key features or principal characteristics of the disclosure, nor is it intended to limit the scope of the disclosure.
附图说明Description of drawings
通过结合附图对本公开示例性实施例进行更详细的描述,本公开的上述以及其他目的、特征和优势将变得更加明显,其中,在本公开示例性实施例中,相同的附图标记通常代表相同部件。The above and other objects, features and advantages of the present disclosure will become more apparent by describing the exemplary embodiments of the present disclosure in more detail with reference to the accompanying drawings, wherein, in the exemplary embodiments of the present disclosure, the same reference numerals are generally represent the same part.
图1示出了根据现有的方案的半导体芯片封装的平面投影。FIG. 1 shows a planar projection of a semiconductor chip package according to a known solution.
图2示出了根据本公开的一些实施例的半导体芯片封装的平面投影。FIG. 2 shows a planar projection of a semiconductor chip package according to some embodiments of the present disclosure.
图3示出了根据本公开的一些实施例的半导体芯片封装的部分截面图。FIG. 3 illustrates a partial cross-sectional view of a semiconductor chip package according to some embodiments of the present disclosure.
图4示出了如图2所示的半导体芯片封装的串扰消除的原理。FIG. 4 shows the principle of crosstalk cancellation for the semiconductor chip package shown in FIG. 2 .
图5示出了如图2所示的半导体芯片封装的串扰消除的原理。FIG. 5 shows the principle of crosstalk cancellation for the semiconductor chip package shown in FIG. 2 .
图6示出了根据本公开的一些实施例的半导体芯片封装的平面投影。FIG. 6 shows a planar projection of a semiconductor chip package according to some embodiments of the present disclosure.
图7示出了根据本公开的一些实施例的半导体芯片封装的平面投影。FIG. 7 shows a planar projection of a semiconductor chip package according to some embodiments of the present disclosure.
图8示出了根据本公开的一些实施例的半导体芯片封装的平面投影。FIG. 8 shows a planar projection of a semiconductor chip package according to some embodiments of the present disclosure.
图9示出了根据本公开的一些实施例的半导体芯片封装的部分截面图。FIG. 9 illustrates a partial cross-sectional view of a semiconductor chip package according to some embodiments of the present disclosure.
图10示出了根据本公开的一些实施例的半导体芯片封装的平面投影。FIG. 10 shows a planar projection of a semiconductor chip package according to some embodiments of the present disclosure.
图11示出了根据本公开的一些实施例的串扰消除的效果。Figure 11 illustrates the effect of crosstalk cancellation according to some embodiments of the present disclosure.
图12示出了根据本公开的一些实施例的串扰消除的效果。Figure 12 illustrates the effect of crosstalk cancellation according to some embodiments of the present disclosure.
图13示出了根据本公开的一些实施例的串扰消除的效果。Figure 13 illustrates the effect of crosstalk cancellation according to some embodiments of the present disclosure.
图14示出了根据本公开的一些实施例的串扰消除的效果。Figure 14 illustrates the effect of crosstalk cancellation according to some embodiments of the present disclosure.
图15示出了根据本公开的一些实施例的串扰消除的效果。Figure 15 illustrates the effect of crosstalk cancellation according to some embodiments of the present disclosure.
图16示出了根据现有的方案的出线方案。Fig. 16 shows the outlet scheme according to the existing scheme.
图17示出了根据本公开的一些实施例的出线方案的示意图。FIG. 17 shows a schematic diagram of an outlet scheme according to some embodiments of the present disclosure.
图18示出了根据本公开的一些实施例的出线方案的示意图。FIG. 18 shows a schematic diagram of an outlet scheme according to some embodiments of the present disclosure.
图19示出了根据本公开的一些实施例的出线方案的示意图。FIG. 19 shows a schematic diagram of an outlet scheme according to some embodiments of the present disclosure.
图20示出了根据本公开的一些实施例的地孔布局的示意图。Figure 20 shows a schematic diagram of a ground hole layout according to some embodiments of the present disclosure.
图21示出了根据本公开的一些实施例的地孔布局的示意图。Figure 21 shows a schematic diagram of a ground hole layout according to some embodiments of the present disclosure.
图22示出了根据本公开的一些实施例的地孔布局的示意图。Figure 22 shows a schematic diagram of a ground hole layout according to some embodiments of the present disclosure.
根据通常的做法,附图中示出的各种特征部可能未按比例绘制。因此,为了清楚起见,可以任意地扩展或减小各种特征部的尺寸。另外,一些附图可能未描绘给定的系统、方法或 设备的所有部件。最后,在整个说明书和附图中,类似的附图标号可用于表示类似的特征部。In accordance with common practice, the various features shown in the drawings may not be drawn to scale. Accordingly, the dimensions of the various features may be arbitrarily expanded or reduced for clarity. Additionally, some figures may not depict all components of a given system, method, or device. Finally, like reference numerals may be used to refer to like features throughout the specification and drawings.
具体实施方式Detailed ways
下面将参照附图更详细地描述本公开的实施例。虽然附图中显示了本公开的某些实施例,然而应当理解的是,本公开可以通过各种形式来实现,而且不应该被解释为限于这里阐述的实施例,相反提供这些实施例是为了更加透彻和完整地理解本公开。应当理解的是,本公开的附图及实施例仅用于示例性作用,并非用于限制本公开的保护范围。Embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although certain embodiments of the present disclosure are shown in the drawings, it should be understood that the disclosure may be embodied in various forms and should not be construed as limited to the embodiments set forth herein; A more thorough and complete understanding of the present disclosure. It should be understood that the drawings and embodiments of the present disclosure are for exemplary purposes only, and are not intended to limit the protection scope of the present disclosure.
在本公开的实施例的描述中,术语“包括”及其类似用语应当理解为开放性包含,即“包括但不限于”。术语“基于”应当理解为“至少部分地基于”。术语“一个实施例”或“该实施例”应当理解为“至少一个实施例”。术语“第一”、“第二”等等可以指代不同的或相同的对象。术语“和/或”表示由其关联的两项的至少一项。例如“A和/或B”表示A、B,或者A和B。下文还可能包括其他明确的和隐含的定义。In the description of the embodiments of the present disclosure, the term "comprising" and its similar expressions should be interpreted as an open inclusion, that is, "including but not limited to". The term "based on" should be understood as "based at least in part on". The term "one embodiment" or "the embodiment" should be read as "at least one embodiment". The terms "first", "second", etc. may refer to different or the same object. The term "and/or" means at least one of the two items associated with it. For example "A and/or B" means A, B, or A and B. Other definitions, both express and implied, may also be included below.
对方向或方位的任何参考仅旨在便于描述,而不以任何方式限制本公开的范围。例如“下部”、“上部”、“水平”、“竖直”、“上方”、“下方”、“朝上”、“朝下”、“顶部”和“底部”及其派生(例如“水平地”、“向上”、“向下”等)等相关术语在讨论中用来指代下文描述的或者在附图中示出的方位。这些相关术语仅仅是为了便于描述,而不要求装置以特定方位构造或操作。Any reference to direction or orientation is for convenience of description only and does not limit the scope of the present disclosure in any way. For example, "lower", "upper", "horizontal", "vertical", "above", "below", "upward", "downward", "top" and "bottom" and their derivatives (such as "horizontal "ground", "upward", "downward", etc.) and related terms are used in the discussion to refer to orientations described below or shown in the accompanying drawings. These relative terms are for convenience of description only and do not require the device to be constructed or operated in a particular orientation.
应理解,本申请实施例提供的技术方案,在以下具体实施例的介绍中,某些重复之处可能不再赘述,但应视为这些具体实施例之间已有相互引用,可以相互结合。It should be understood that for the technical solutions provided by the embodiments of the present application, in the introduction of the following specific embodiments, some repetitions may not be repeated, but it should be considered that these specific embodiments have been referred to each other and can be combined with each other.
图1示出了根据现有的方案的半导体芯片封装的平面投影,其示出了焊球和镀覆孔(Plated Through Hole,PTH)的排列。在一种方案中,在平面投影中,两个PTH之间的间距小于两个差分焊球之间的间距,即“紧耦合”。例如,在图1所示的平面投影中,焊球101和PTH 103部分重叠,因而焊球101和PTH 103紧耦合。类似地,在图1所示的平面投影中,焊球102和PTH 104部分重叠,焊球109和PTH 111部分重叠,并且焊球110和PTH 112部分重叠。例如,焊球101和PTH 103电连接,用于传送差分信号中的正极性信号,焊球102和PTH 104电连接,用于传送差分信号中的负极性信号。类似地,焊球109和PTH 111电连接,用于传送差分信号中的正极性信号,焊球110和PTH 112电连接,用于传送差分信号中的负极性信号。为了方便起见,以下将焊球101和焊球102称为第一差分对,将焊球109和焊球110称为第二差分对。FIG. 1 shows a planar projection of a semiconductor chip package according to an existing solution, which shows the arrangement of solder balls and plated through holes (Plated Through Holes, PTHs). In one solution, in planar projection, the spacing between two PTHs is smaller than the spacing between two differential solder balls, ie "tight coupling". For example, in the planar projection shown in FIG. 1, the solder ball 101 and the PTH 103 partially overlap, so the solder ball 101 and the PTH 103 are tightly coupled. Similarly, in the planar projection shown in FIG. 1 , solder ball 102 partially overlaps with PTH 104 , solder ball 109 partially overlaps with PTH 111 , and solder ball 110 partially overlaps with PTH 112 . For example, the solder ball 101 is electrically connected to the PTH 103, and is used to transmit a positive polarity signal in the differential signal, and the solder ball 102 is electrically connected to the PTH 104, and is used to transmit a negative polarity signal in the differential signal. Similarly, the solder ball 109 is electrically connected to the PTH 111 for transmitting a positive polarity signal in the differential signal, and the solder ball 110 is electrically connected to the PTH 112 for transmitting a negative polarity signal in the differential signal. For convenience, below, the solder ball 101 and the solder ball 102 are referred to as a first differential pair, and the solder ball 109 and the solder ball 110 are referred to as a second differential pair.
在另一种方案中,焊球在平面投影中与PTH对齐。焊球在平面投影中与PTH“对齐”表示在平面投影中焊球与PTH的中心彼此重叠。例如,在图1所示的平面投影中,焊球105和PTH 107对齐,焊球106和PTH 108对齐,焊球113和PTH 115对齐,并且焊球114和PTH 116对齐。例如,焊球105和PTH 107电连接,用于传送差分信号中的正极性信号,焊球106和PTH 108电连接,用于传送差分信号中的负极性信号。类似地,焊球113和PTH 115电连接,用于传送差分信号中的正极性信号,焊球114和PTH 116电连接,用于传送差分信号中的负极性信号。为了方便起见,以下将焊球105和焊球106称为第三差分对,将焊球113和焊球114称为第四差分对。In another approach, the solder balls are aligned with the PTH in planar projection. The solder ball "aligned" with the PTH in planar projection means that the centers of the solder ball and the PTH overlap each other in the planar projection. For example, in the planar projection shown in FIG. 1, solder ball 105 is aligned with PTH 107, solder ball 106 is aligned with PTH 108, solder ball 113 is aligned with PTH 115, and solder ball 114 is aligned with PTH 116. For example, the solder ball 105 is electrically connected to the PTH 107, and is used to transmit a positive polarity signal in the differential signal, and the solder ball 106 is electrically connected to the PTH 108, and is used to transmit a negative polarity signal in the differential signal. Similarly, the solder ball 113 is electrically connected to the PTH 115 for transmitting a positive polarity signal in the differential signal, and the solder ball 114 is electrically connected to the PTH 116 for transmitting a negative polarity signal in the differential signal. For convenience, the solder ball 105 and the solder ball 106 are referred to as the third differential pair, and the solder ball 113 and the solder ball 114 are referred to as the fourth differential pair.
应当理解,为了方便起见,图1表示了两种不同的方案,在具体实施过程中,通常可能只实施一种方案。以下将以图1仅示出“对齐”方案为例进行解释说明,应当理解,以下说明同样适用于“紧耦合”方案。It should be understood that, for the sake of convenience, FIG. 1 shows two different solutions, and usually only one solution may be implemented in a specific implementation process. In the following, FIG. 1 only shows the "alignment" scheme as an example for explanation. It should be understood that the following description is also applicable to the "tight coupling" scheme.
如图1所示,在第一差分对和第三差分对之间存在串扰。例如,相邻的焊球之间存在同相串扰,即,焊球101与焊球105之间存在同相串扰,焊球102和焊球106之间存在同相串扰。类似地,相邻的PTH之间也存在同相串扰,即,PTH 103与PTH 107之间存在同相串扰,PTH 104和PTH 108之间存在同相串扰。这些同相串扰彼此叠加,从而增强不同差分对之间的串扰。另外,在第一差分对和第二差分对之间也存在串扰。例如,相邻的焊球(即,焊球102与焊球109)之间存在反相串扰,相邻的PTH(即,PTH 104与PTH 111)之间也存在反相串扰。这些反相串扰彼此叠加,从而增强不同差分对之间的串扰。As shown in FIG. 1, there is crosstalk between the first differential pair and the third differential pair. For example, in-phase crosstalk exists between adjacent solder balls, that is, in-phase crosstalk exists between solder ball 101 and solder ball 105 , and in-phase crosstalk exists between solder ball 102 and solder ball 106 . Similarly, in-phase crosstalk also exists between adjacent PTHs, that is, in-phase crosstalk exists between PTH 103 and PTH 107, and in-phase crosstalk exists between PTH 104 and PTH 108. These in-phase crosstalks add to each other, enhancing the crosstalk between different differential pairs. In addition, there is also crosstalk between the first differential pair and the second differential pair. For example, reverse phase crosstalk exists between adjacent solder balls (ie, solder ball 102 and solder ball 109), and reverse phase crosstalk exists between adjacent PTHs (ie, PTH 104 and PTH 111). These anti-phase crosstalks add to each other, enhancing the crosstalk between different differential pairs.
可以通过设置接地焊球来减小差分对之间的串扰。图1示出了多个接地焊球120,接地焊球120位于封装基板的接地焊盘上。如图1所示,第一差分对和第三差分对之间设置一列接地焊球,用于隔离差分信号之间的串扰。为了降低第一差分对与第三差分对的差分信号之间的串扰,可以在第一差分对和第三差分对之间增加一列或多列接地焊球,这将增加半导体芯片封装的尺寸。类似地,为了降低第一差分对和第二差分对的差分信号之间的串扰,可以在第一差分对和第二差分对之间增加一行或多行接地焊球,这也将增加半导体芯片封装的尺寸。Crosstalk between differential pairs can be reduced by providing ground solder balls. FIG. 1 shows a plurality of ground solder balls 120 located on ground pads of a package substrate. As shown in FIG. 1 , a column of ground solder balls is arranged between the first differential pair and the third differential pair to isolate crosstalk between differential signals. In order to reduce the crosstalk between the differential signals of the first differential pair and the third differential pair, one or more columns of ground solder balls can be added between the first differential pair and the third differential pair, which will increase the size of the semiconductor chip package. Similarly, in order to reduce the crosstalk between the differential signals of the first differential pair and the second differential pair, one or more rows of ground solder balls can be added between the first differential pair and the second differential pair, which will also increase the package size.
本公开的实施例的至少一个目的在于提供一种用于降低差分信号串扰而不显著增加半导体芯片封装的尺寸的技术方案。图2示出了根据本公开的一些实施例的半导体芯片封装的平面投影。在图2的示例中,焊球201和PTH 203电连接,用于传送差分信号中的正极性信号,焊球202和PTH 204电连接,用于传送差分信号中的负极性信号。尽管在图2中未示出,焊球201可以放置在封装基板上的焊盘上,这种焊盘也称焊球放置焊盘(Ball Landing Pad)。下文中将结合图3对这些结构进行详细介绍。类似地,焊球205和PTH 207电连接,用于传送差分信号中的正极性信号,焊球206和PTH 208电连接,用于传送差分信号中的负极性信号;焊球209和PTH 211电连接,用于传送正极性信号,焊球210和PTH 212电连接,用于传送差分信号中的负极性信号;焊球213和PTH 215电连接,用于传送差分信号中的正极性信号,焊球214和PTH 216电连接,用于传送差分信号中的负极性信号。另外,图2示出了多个接地焊球220。应当理解,在本公开的实施例中,正极性和负极性仅作为示例提供,正极性和负极性通常可以彼此互换。At least one object of embodiments of the present disclosure is to provide a technical solution for reducing differential signal crosstalk without significantly increasing the size of a semiconductor chip package. FIG. 2 shows a planar projection of a semiconductor chip package according to some embodiments of the present disclosure. In the example shown in FIG. 2, the solder ball 201 is electrically connected to the PTH 203, and is used to transmit a positive polarity signal in the differential signal, and the solder ball 202 is electrically connected to the PTH 204, and is used to transmit a negative polarity signal in the differential signal. Although not shown in FIG. 2 , solder balls 201 can be placed on pads on the package substrate, and such pads are also called ball landing pads (Ball Landing Pad). These structures will be described in detail below with reference to FIG. 3 . Similarly, the solder ball 205 is electrically connected to the PTH 207, and is used to transmit the positive polarity signal in the differential signal, and the solder ball 206 is electrically connected to the PTH 208, and is used to transmit the negative polarity signal in the differential signal; the solder ball 209 is electrically connected to the PTH 211 connection, used to transmit positive polarity signals, solder ball 210 and PTH 212 are electrically connected, used to transmit negative polarity signals in differential signals; solder balls 213 and PTH 215 are electrically connected, used to transmit positive polarity signals in differential signals, solder The ball 214 is electrically connected to the PTH 216 for transmitting the negative polarity signal in the differential signal. Additionally, FIG. 2 shows a plurality of ground solder balls 220 . It should be understood that in the embodiments of the present disclosure, positive polarity and negative polarity are provided as examples only, and positive polarity and negative polarity can generally be interchanged with each other.
在图2的实施例中,第一差分互连组件包括焊球201、焊球202、PTH 203和PTH 204,第二差分互连组件包括焊球209、焊球210、PTH 211和PTH 212,第三差分互连组件包括焊球205、焊球206、PTH 207和PTH 208,第四差分互连组件包括焊球213、焊球214、PTH 215和PTH 216。另外,为了方便描述,将焊球201和焊球202称为第一差分对,将焊球209和焊球210称为第二差分对,将焊球205和焊球206称为第三差分对,将焊球213和焊球214称为第四差分对。In the embodiment of FIG. 2, the first differential interconnection assembly includes solder balls 201, solder balls 202, PTH 203, and PTH 204, and the second differential interconnection assembly includes solder balls 209, solder balls 210, PTH 211, and PTH 212, The third differential interconnect assembly includes solder ball 205, solder ball 206, PTH 207, and PTH 208, and the fourth differential interconnect assembly includes solder ball 213, solder ball 214, PTH 215, and PTH 216. In addition, for convenience of description, the solder ball 201 and the solder ball 202 are referred to as the first differential pair, the solder ball 209 and the solder ball 210 are referred to as the second differential pair, and the solder ball 205 and the solder ball 206 are referred to as the third differential pair , the solder ball 213 and the solder ball 214 are referred to as a fourth differential pair.
在第一差分互连组件中,焊球201和焊球202之间的连线可以与PTH 203和PTH 204之间的连线垂直,其他差分互连组件也可以具有相同的位置关系。如图2所示,焊球201和焊球205位于第一行,焊球202和焊球206位于第二行,焊球209位于第三行,焊球210位于第四行。因此,第三差分对与第一差分对成平行排布。另外,焊球201和焊球202位于第一列,焊球209和焊球210位于第二列,因此,第二差分对与第一差分对成对角排布。In the first differential interconnection component, the connection line between the solder ball 201 and the solder ball 202 may be perpendicular to the connection line between the PTH 203 and the PTH 204, and other differential interconnection components may also have the same positional relationship. As shown in FIG. 2 , solder balls 201 and 205 are located in the first row, solder balls 202 and 206 are located in the second row, solder balls 209 are located in the third row, and solder balls 210 are located in the fourth row. Therefore, the third differential pair is arranged in parallel with the first differential pair. In addition, the solder balls 201 and 202 are located in the first column, and the solder balls 209 and 210 are located in the second column. Therefore, the second differential pair is arranged diagonally to the first differential pair.
在一些实施例中,如图2所示的结构可以作为基本单元在基板上进行周期性排布,以形成排布阵列。在该排布阵列中,可以降低每一对差分互连组件之间的串扰。In some embodiments, the structures shown in FIG. 2 can be periodically arranged as basic units on the substrate to form an arrangement array. In this arrangement, the crosstalk between each pair of differential interconnection components can be reduced.
为了方便理解图2中的各个部件的三维结构,图3示出了根据本公开的一些实施例的半 导体芯片封装的一部分的截面图。图3示出了焊球324和与焊球324电连接的PTH 309。PTH 309穿过封装基板的芯310。芯310占据封装基板的大部分厚度,因而,PTH 309是封装基板中主要用于实现垂直互连作用的互连结构。焊球324可以是如图2所示的焊球201、焊球202、焊球305、焊球206、焊球209、焊球210、焊球213和焊球214中的任何一个。相应地,PTH 309可以是如图2所示的PTH 203、PTH 204、PTH 207、PTH 208、PTH 211、PTH 212、PTH 215和PTH 216中的任何一个。In order to facilitate understanding of the three-dimensional structure of various components in FIG. 2 , FIG. 3 shows a cross-sectional view of a part of a semiconductor chip package according to some embodiments of the present disclosure. FIG. 3 shows a solder ball 324 and a PTH 309 electrically connected to the solder ball 324. PTH 309 passes through core 310 of the package substrate. The core 310 occupies most of the thickness of the package substrate, therefore, the PTH 309 is an interconnection structure in the package substrate that is mainly used to realize the function of vertical interconnection. Solder ball 324 may be any one of solder ball 201 , solder ball 202 , solder ball 305 , solder ball 206 , solder ball 209 , solder ball 210 , solder ball 213 and solder ball 214 shown in FIG. 2 . Correspondingly, the PTH 309 may be any one of the PTH 203, PTH 204, PTH 207, PTH 208, PTH 211, PTH 212, PTH 215 and PTH 216 shown in FIG. 2 .
如图3所示,焊球324设置在封装基板上,封装基板可以是层压基板。如图3所示,封装基板包括介电层301-308、布线层331-338以及位于布线层334和335之间的芯310,其中布线层331位于介电层301和302之间,布线层332位于介电层302和303之间,布线层333位于介电层303和304之间,布线层334位于介电层304和芯310之间,布线层335位于芯310和介电层305之间,布线层336位于介电层305和306之间,布线层337位于介电层306和307之间,布线层338位于介电层307和308之间。介电层301设置有盲埋孔(Blind Buried Via,BB Via)311,盲埋孔是封装基板内部的垂直互连,用于将封装基板外部的互连与PTH进行连接。类似地,介电层302设置有盲埋孔312,介电层303设置有盲埋孔313,介电层304设置有盲埋孔314,介电层305设置有盲埋孔315,介电层306设置有盲埋孔316,介电层307设置有盲埋孔317,介电层308设置有盲埋孔318。另外,芯310设置有PTH 309,用于将布线层334和335互连。布线层331将盲埋孔311和312互连,布线层332将盲埋孔312和313互连,布线层333将盲埋孔313和314互连,布线层334将盲埋孔314和PTH 309互连,布线层335将PTH 309和盲埋孔315互连,布线层336将盲埋孔315和316互连,布线层337将盲埋孔316和317互连,布线层338将盲埋孔317和318互连。As shown in FIG. 3 , solder balls 324 are disposed on a packaging substrate, which may be a laminated substrate. As shown in FIG. 3 , the packaging substrate includes dielectric layers 301-308, wiring layers 331-338, and a core 310 located between wiring layers 334 and 335, wherein wiring layer 331 is located between dielectric layers 301 and 302, and the wiring layer 332 is located between the dielectric layers 302 and 303, the wiring layer 333 is located between the dielectric layers 303 and 304, the wiring layer 334 is located between the dielectric layer 304 and the core 310, and the wiring layer 335 is located between the core 310 and the dielectric layer 305 The wiring layer 336 is located between the dielectric layers 305 and 306 , the wiring layer 337 is located between the dielectric layers 306 and 307 , and the wiring layer 338 is located between the dielectric layers 307 and 308 . The dielectric layer 301 is provided with a blind buried via (Blind Buried Via, BB Via) 311, and the blind buried via is a vertical interconnection inside the package substrate, and is used to connect the interconnection outside the package substrate to the PTH. Similarly, the dielectric layer 302 is provided with a blind buried hole 312, the dielectric layer 303 is provided with a blind buried hole 313, the dielectric layer 304 is provided with a blind buried hole 314, and the dielectric layer 305 is provided with a blind buried hole 315. 306 is provided with blind and buried holes 316 , the dielectric layer 307 is provided with blind and buried holes 317 , and the dielectric layer 308 is provided with blind and buried holes 318 . In addition, the core 310 is provided with a PTH 309 for interconnecting the wiring layers 334 and 335. The wiring layer 331 interconnects the blind buried holes 311 and 312, the wiring layer 332 interconnects the blind buried holes 312 and 313, the wiring layer 333 interconnects the blind buried holes 313 and 314, and the wiring layer 334 interconnects the blind buried holes 314 and the PTH 309 Interconnection, the wiring layer 335 interconnects the PTH 309 and the blind buried hole 315, the wiring layer 336 interconnects the blind buried hole 315 and 316, the wiring layer 337 interconnects the blind buried hole 316 and 317, and the wiring layer 338 interconnects the blind buried hole 317 and 318 are interconnected.
该半导体芯片封装还包括裸片(die)322,其经由凸块(bump)323与盲埋孔311接触,进一步经由盲埋孔312-318以及PTH 309与焊球324电连接,从而传送信号。另外,该半导体芯片封装还可以包括树脂321。应当理解,在其他实施例中,树脂321也可以由金属盖等来代替。The semiconductor chip package also includes a die 322, which is in contact with the blind buried hole 311 through a bump 323, and is further electrically connected with the solder ball 324 through the blind buried holes 312-318 and the PTH 309, thereby transmitting signals. In addition, the semiconductor chip package may further include a resin 321 . It should be understood that in other embodiments, the resin 321 may also be replaced by a metal cover or the like.
在图3中,焊球324可以设置在位于封装基板上的焊盘(未示出)上,即,在焊球324与盲埋孔318之间可以设置焊盘。另外,凸块323也可以设置在位于封装基板上的焊盘(未示出)上,即,在凸块323与盲埋孔311之间可以设置焊盘。由于焊球与焊盘之间的对应关系,这里关于焊球的描述也同样适用于与焊球对应的焊盘。In FIG. 3 , the solder ball 324 may be disposed on a pad (not shown) on the package substrate, that is, the solder ball may be disposed between the solder ball 324 and the blind buried hole 318 . In addition, the bump 323 may also be disposed on a pad (not shown) on the package substrate, that is, a pad may be disposed between the bump 323 and the blind buried hole 311 . Due to the corresponding relationship between the solder balls and the solder pads, the description about the solder balls here is also applicable to the solder pads corresponding to the solder balls.
图4和图5分别示出了图2中的相邻的差分互连组件之间的串扰消除的原理。如果两个相邻的差分互连组件之间的最靠近的PTH之间的干扰与最靠近的焊球之间的干扰的特性彼此相反,那么这两种干扰可以互相抵消。例如,如果两个相邻的差分互连组件之间的最靠近的PTH之间的干扰为同相干扰,两个相邻的差分互连组件之间的最靠近的焊球之间的干扰为反相干扰,则这两种干扰可以抵消。又例如,如果两个相邻的差分互连组件之间的最靠近的PTH之间的干扰为反相干扰,两个相邻的差分互连组件之间的最靠近的焊球之间的干扰为同相干扰,则这两种干扰也可以抵消。这里的“相邻”表示两个差分互连组件之间不包含其他差分互连组件。FIG. 4 and FIG. 5 respectively illustrate the principle of crosstalk cancellation between adjacent differential interconnection components in FIG. 2 . If the characteristics of the interference between the closest PTHs and the interference between the closest solder balls between two adjacent differential interconnection components are opposite to each other, the two kinds of interference can cancel each other out. For example, if the interference between the closest PTHs between two adjacent differential interconnect assemblies is in-phase interference, the interference between the closest solder balls between two adjacent differential interconnect assemblies is in-phase interference. If they interfere with each other, the two interferences can be canceled out. For another example, if the interference between the closest PTHs between two adjacent differential interconnect components is anti-phase interference, the interference between the closest solder balls between two adjacent differential interconnect components If it is in-phase interference, the two interferences can also be canceled out. Here, "adjacent" means that no other differential interconnection components are included between two differential interconnection components.
图4示出了图2中的第一差分互连组件与第三差分互连组件之间的串扰消除的原理。如图4所示,第一差分互连组件中的焊球201与第三差分互连组件中的焊球205相邻,并且传送相同极性的信号,因此,两者之间具有同相串扰。这里的“相邻”表示第一差分互连组件中的焊球201与第三差分互连组件中的焊球205之间不包含第一差分互连组件和第三差分互 连组件中的其他焊球。第一差分互连组件中的焊球202与第三差分互连组件中的焊球206相邻,并且传送相同极性的信号,因此,两者之间也具有同相串扰。即,第一差分互连组件和第三差分互连组件之间的最靠近的焊球之间的干扰为同相干扰。然而,第一差分互连组件中的PTH 203与第三差分互连组件中的PTH 208相邻,并且传送相反极性的信号,因此,两者之间具有反向串扰。即,第一差分互连组件和第三差分互连组件之间的最靠近的PTH之间的干扰为反相干扰,这将至少部分抵消第一差分互连组件与第三差分互连组件的焊球之间的同相串扰。这里的“相邻”表示第一差分互连组件中的PTH 203与第三差分互连组件中的PTH 208之间不包含第一差分互连组件和第三差分互连组件中的其他PTH。FIG. 4 shows the principle of crosstalk cancellation between the first differential interconnection component and the third differential interconnection component in FIG. 2 . As shown in FIG. 4 , the solder ball 201 in the first differential interconnection assembly is adjacent to the solder ball 205 in the third differential interconnection assembly and transmits signals of the same polarity, so there is in-phase crosstalk between them. The "adjacent" here means that the solder ball 201 in the first differential interconnection component and the solder ball 205 in the third differential interconnection component do not include other components in the first differential interconnection component and the third differential interconnection component. Solder balls. The solder ball 202 in the first differential interconnection assembly is adjacent to the solder ball 206 in the third differential interconnection assembly and transmits signals of the same polarity, therefore, there is also in-phase crosstalk between the two. That is, the interference between the closest solder balls between the first differential interconnection component and the third differential interconnection component is in-phase interference. However, PTH 203 in the first differential interconnection assembly is adjacent to PTH 208 in the third differential interconnection assembly and carries signals of opposite polarity, therefore, there is reverse crosstalk between the two. That is, the interference between the closest PTHs between the first differential interconnection component and the third differential interconnection component is anti-phase interference, which will at least partially cancel the interaction between the first differential interconnection component and the third differential interconnection component. In-phase crosstalk between solder balls. The "adjacent" here means that the PTH 203 in the first differential interconnection component and the PTH 208 in the third differential interconnection component do not include other PTHs in the first differential interconnection component and the third differential interconnection component.
图5示出了图2中的第一差分互连组件与第二差分互连组件之间的串扰消除的原理。如图5所示,第一差分互连组件中的焊球202与第二差分互连组件中的焊球209相邻,并且传送相反极性的信号,因此,两者之间具有反相串扰。即,第一差分互连组件和第二差分互连组件之间的最靠近的焊球之间的干扰为反相干扰。第一差分互连组件中的PTH 203与第二差分互连组件中的PTH 211相邻,并且传送相同极性的信号,因此,两者之间具有同相串扰,即,第一差分互连组件和第二差分互连组件之间的最靠近的PTH之间的干扰为同相干扰,这将至少部分抵消第一差分互连组件与第三差分互连组件的焊球之间的反相串扰。FIG. 5 shows the principle of crosstalk cancellation between the first differential interconnection component and the second differential interconnection component in FIG. 2 . As shown in FIG. 5, the solder ball 202 in the first differential interconnection assembly is adjacent to the solder ball 209 in the second differential interconnection assembly and transmits signals of opposite polarity, therefore, there is anti-phase crosstalk between the two . That is, the interference between the closest solder balls between the first differential interconnection component and the second differential interconnection component is anti-phase interference. PTH 203 in the first differential interconnection assembly is adjacent to PTH 211 in the second differential interconnection assembly and transmits signals of the same polarity, therefore, there is in-phase crosstalk between the two, i.e., the first differential interconnection assembly The interference between the closest PTH and the second differential interconnection component is in-phase interference, which will at least partially offset the anti-phase crosstalk between the solder balls of the first differential interconnection component and the third differential interconnection component.
图6示出了根据本公开的一些实施例的半导体芯片封装的平面投影。如图6所示,第一差分互连组件包括焊球401、焊球402、PTH 403和PTH 404,其中焊球401和焊球402分别与PTH 404和PTH 403电连接。第二差分互连组件包括焊球405、焊球406、PTH 407和PTH 408,其中焊球405和焊球406分别与PTH 408和PTH 407电连接。例如,焊球401、402、405、406以及PTH 403、404、407和408可以通过如图3所示的实施例来实现。FIG. 6 shows a planar projection of a semiconductor chip package according to some embodiments of the present disclosure. As shown in FIG. 6, the first differential interconnection assembly includes a solder ball 401, a solder ball 402, a PTH 403, and a PTH 404, wherein the solder ball 401 and the solder ball 402 are electrically connected to the PTH 404 and the PTH 403, respectively. The second differential interconnect assembly includes solder ball 405, solder ball 406, PTH 407, and PTH 408, wherein solder ball 405 and solder ball 406 are electrically connected to PTH 408 and PTH 407, respectively. For example, solder balls 401, 402, 405, 406 and PTHs 403, 404, 407, and 408 can be implemented by the embodiment shown in FIG. 3 .
在图6中,焊球401、焊球402、焊球405和焊球406可以沿一条直线布置,或者布置在一行中,从而方便设置在半导体芯片封装的边缘。焊球401和402可以位于半导体芯片封装的边缘,从而PTH 403和404无法设置在焊球401和402之间的连线的两侧,而设置在同一侧。类似地,焊球405和406可以位于半导体芯片封装的边缘,从而PTH 407和408无法设置在焊球405和406之间的连线的两侧,而设置在同一侧。In FIG. 6 , the solder balls 401 , 402 , 405 and 406 may be arranged in a straight line or in a row so as to be conveniently arranged at the edge of the semiconductor chip package. The solder balls 401 and 402 may be located on the edge of the semiconductor chip package, so that the PTHs 403 and 404 cannot be arranged on both sides of the connection line between the solder balls 401 and 402, but on the same side. Similarly, the solder balls 405 and 406 may be located at the edge of the semiconductor chip package, so that the PTHs 407 and 408 cannot be placed on both sides of the connection between the solder balls 405 and 406, but on the same side.
如图6所示,第一差分互连组件中的焊球402与第二差分互连组件中的焊球405相邻,并传送相反极性的信号,因而存在反相串扰。即,第一差分互连组件和第二差分互连组件之间的最靠近的焊球之间的干扰为反相干扰。然而,第一差分互连组件中的PTH 403与第二差分互连组件中的PTH 407相邻,并传送相同极性的信号,因而存在同相串扰,第一差分互连组件中的PTH 404与第二差分互连组件中的PTH 408相邻,并传送相同极性的信号,因而存在同相串扰。即,第一差分互连组件和第二差分互连组件之间的最靠近的PTH之间的干扰为同相干扰。以这种方式,同相串扰和反相串扰可以彼此抵消。As shown in FIG. 6 , the solder ball 402 in the first differential interconnection assembly is adjacent to the solder ball 405 in the second differential interconnection assembly, and transmits signals of opposite polarity, so there is reverse crosstalk. That is, the interference between the closest solder balls between the first differential interconnection component and the second differential interconnection component is anti-phase interference. However, PTH 403 in the first differential interconnection is adjacent to PTH 407 in the second differential interconnection and transmits signals of the same polarity, so there is in-phase crosstalk, and PTH 404 in the first differential interconnection is adjacent to PTH 407 in the second differential interconnection. The PTHs 408 in the second differential interconnect are adjacent and carry signals of the same polarity, so there is in-phase crosstalk. That is, the interference between the closest PTHs between the first differential interconnection component and the second differential interconnection component is in-phase interference. In this way, in-phase and anti-phase crosstalk can cancel each other out.
图7示出了根据本公开的一些实施例的半导体芯片封装的平面投影。如图7所示,第一差分互连组件包括焊球501、焊球502、PTH 503和PTH 504,其中焊球501和焊球502分别与PTH 503和PTH 504电连接。第二差分互连组件包括焊球505、焊球506、PTH 507和PTH 508,其中焊球505和焊球506分别与PTH 507和PTH 508电连接。例如,焊球501、502、505、506以及PTH 503、504、507和508可以通过如图3所示的实施例来实现。该布置可以灵活布置在半导体芯片封装的角落处,例如,图7的右上角可能对应于半导体芯片封装的角落。由于角落处的空间的限制,焊球的空间排布受到限制,无法按照图2所示的布局进行焊球的排布。在图7所示的实施例中,第一差分互连组件中的焊球501和焊球502之间的连线 与第二差分互连组件中的焊球505和焊球506之间的连线彼此垂直,以适应半导体芯片封装的角落处的空间要求。另外,第一差分互连组件中的PTH 503和PTH 504之间的连线与第二差分互连组件中的PTH 507和PTH 508之间的连线彼此平行。FIG. 7 shows a planar projection of a semiconductor chip package according to some embodiments of the present disclosure. As shown in FIG. 7, the first differential interconnection assembly includes a solder ball 501, a solder ball 502, a PTH 503, and a PTH 504, wherein the solder ball 501 and the solder ball 502 are electrically connected to the PTH 503 and the PTH 504, respectively. The second differential interconnect assembly includes solder ball 505, solder ball 506, PTH 507, and PTH 508, wherein solder ball 505 and solder ball 506 are electrically connected to PTH 507 and PTH 508, respectively. For example, solder balls 501, 502, 505, 506 and PTHs 503, 504, 507, and 508 can be implemented by the embodiment shown in FIG. 3 . This arrangement can be flexibly arranged at the corner of the semiconductor chip package, for example, the upper right corner of FIG. 7 may correspond to the corner of the semiconductor chip package. Due to the limitation of the space at the corner, the spatial arrangement of the solder balls is limited, and the solder balls cannot be arranged according to the layout shown in FIG. 2 . In the embodiment shown in FIG. 7, the connection between the solder ball 501 and the solder ball 502 in the first differential interconnection assembly is the same as the connection between the solder ball 505 and the solder ball 506 in the second differential interconnection assembly. The lines are perpendicular to each other to accommodate the space requirements at the corners of the semiconductor chip package. In addition, the connection between PTH 503 and PTH 504 in the first differential interconnection component and the connection between PTH 507 and PTH 508 in the second differential interconnection component are parallel to each other.
如图7所示,第一差分互连组件中的焊球502与第二差分互连组件中的焊球506相邻,并传送相同极性的信号,因而存在同相串扰。即,第一差分互连组件和第二差分互连组件之间的最靠近的焊球之间的干扰为同相干扰。然而,第一差分互连组件中的PTH 504与第二差分互连组件中的PTH 507相邻,并传送相反极性的信号,因而存在反相串扰。即,第一差分互连组件和第二差分互连组件之间的最靠近的PTH之间的干扰为反相干扰。以这种方式,同相串扰和反相串扰可以彼此抵消。As shown in FIG. 7 , the solder ball 502 in the first differential interconnection assembly is adjacent to the solder ball 506 in the second differential interconnection assembly and transmits signals of the same polarity, so there is in-phase crosstalk. That is, the interference between the closest solder balls between the first differential interconnection component and the second differential interconnection component is in-phase interference. However, PTH 504 in the first differential interconnect assembly is adjacent to PTH 507 in the second differential interconnect assembly and carries signals of opposite polarity, so there is anti-phase crosstalk. That is, the interference between the closest PTHs between the first differential interconnection component and the second differential interconnection component is anti-phase interference. In this way, in-phase and anti-phase crosstalk can cancel each other out.
图8示出了根据本公开的一些实施例的半导体芯片封装的平面投影。如图8所示,第一差分互连组件包括焊球601、焊球602、PTH 603和PTH 604,其中焊球601和焊球602分别与PTH 604和PTH 603电连接。第二差分互连组件包括焊球605、焊球606、PTH 607和PTH 608,其中焊球605和焊球606分别与PTH 607和PTH 608电连接。例如,焊球601、602、605、606以及PTH 603、604、607和608可以通过如图3所示的实施例来实现。该布置可以灵活布置在半导体芯片封装的角落处,例如,图8的右上角可能对应于半导体芯片封装的角落。在图8所示的实施例中,第一差分互连组件中的焊球601和焊球602之间的连线与第二差分互连组件中的焊球605和焊球606之间的连线彼此垂直。然而,第一差分互连组件中的PTH 603和PTH 604之间的连线与第二差分互连组件中的PTH 607和PTH 608之间的连线彼此平行,以适应半导体芯片封装的角落处的空间要求。从另一角度而言,焊球601和焊球602之间的连线与PTH 603和PTH 604之间的连线彼此垂直,而焊球605和焊球606之间的连线与PTH 607和PTH 608之间的连线彼此平行。FIG. 8 shows a planar projection of a semiconductor chip package according to some embodiments of the present disclosure. As shown in FIG. 8, the first differential interconnection assembly includes a solder ball 601, a solder ball 602, a PTH 603, and a PTH 604, wherein the solder ball 601 and the solder ball 602 are electrically connected to the PTH 604 and the PTH 603, respectively. The second differential interconnect assembly includes solder ball 605, solder ball 606, PTH 607, and PTH 608, wherein solder ball 605 and solder ball 606 are electrically connected to PTH 607 and PTH 608, respectively. For example, solder balls 601, 602, 605, 606 and PTHs 603, 604, 607, and 608 can be implemented by the embodiment shown in FIG. 3 . This arrangement can be flexibly arranged at the corner of the semiconductor chip package, for example, the upper right corner of FIG. 8 may correspond to the corner of the semiconductor chip package. In the embodiment shown in FIG. 8, the connection between the solder ball 601 and the solder ball 602 in the first differential interconnect assembly is the same as the connection between the solder ball 605 and the solder ball 606 in the second differential interconnect assembly. The lines are perpendicular to each other. However, the wiring between PTH 603 and PTH 604 in the first differential interconnection assembly and the wiring between PTH 607 and PTH 608 in the second differential interconnection assembly are parallel to each other so as to fit the corner of the semiconductor chip package. space requirements. From another point of view, the connection line between solder ball 601 and solder ball 602 and the connection line between PTH 603 and PTH 604 are perpendicular to each other, and the connection line between solder ball 605 and solder ball 606 is perpendicular to PTH 607 and The connections between the PTHs 608 are parallel to each other.
如图8所示,第一差分互连组件中的焊球602与第二差分互连组件中的焊球606相邻,并传送相同极性的信号,因而存在同相串扰。然而,第一差分互连组件中的PTH 604与第二差分互连组件中的PTH 608相邻,并传送相反极性的信号,因而存在反相串扰。以这种方式,同相串扰和反相串扰可以彼此抵消。As shown in FIG. 8 , the solder ball 602 in the first differential interconnection assembly is adjacent to the solder ball 606 in the second differential interconnection assembly, and transmits signals of the same polarity, so there is in-phase crosstalk. However, PTH 604 in the first differential interconnection assembly is adjacent to PTH 608 in the second differential interconnection assembly and carries signals of opposite polarity, thus presenting anti-phase crosstalk. In this way, in-phase and anti-phase crosstalk can cancel each other out.
图9示出了根据本公开的一些实施例的半导体芯片封装的一部分的截面图。与图3相比,在图9中,将焊球324连接到印刷电路板(Printed Circuit Board,PCB)上,以形成下一级的封装,其中印刷电路板包括层731-733。如图9所示,层731设置有走线741,层731设置有PTH 742,层733设置有走线743。以上结合图2和图4-图8所示的实施例也可以应用于焊球324和PTH 742。例如,焊球324可以是如图2所示的焊球201、焊球202、焊球305、焊球206、焊球209、焊球210、焊球213和焊球214中的任何一个。相应地,PTH 742可以是如图2所示的PTH 203、PTH 204、PTH 207、PTH 208、PTH 211、PTH 212、PTH 215和PTH 216中的任何一个。FIG. 9 illustrates a cross-sectional view of a portion of a semiconductor chip package according to some embodiments of the present disclosure. Compared with FIG. 3 , in FIG. 9 , solder balls 324 are connected to a printed circuit board (Printed Circuit Board, PCB) to form a next-level package, wherein the printed circuit board includes layers 731-733. As shown in FIG. 9 , the layer 731 is provided with a trace 741, the layer 731 is provided with a PTH 742, and the layer 733 is provided with a trace 743. The above embodiments shown in conjunction with FIGS. 2 and 4-8 can also be applied to solder balls 324 and PTH 742. For example, solder ball 324 may be any one of solder ball 201 , solder ball 202 , solder ball 305 , solder ball 206 , solder ball 209 , solder ball 210 , solder ball 213 and solder ball 214 shown in FIG. 2 . Correspondingly, the PTH 742 may be any one of the PTH 203, PTH 204, PTH 207, PTH 208, PTH 211, PTH 212, PTH 215 and PTH 216 shown in FIG. 2 .
图10示出了根据本公开的一些实施例的半导体芯片封装的平面投影。与图2相比,图10进一步示出了位于两个差分互连组件之间的PTH 801至PTH 805,这些PTH都作为地孔。例如,PTH 801至PTH 804可以对称设置。然而,应当理解,也可以不包含PTH 805。在第一差分对(焊球201和焊球202)之间具有PTH 806和PTH 807,也作为地孔。PTH 806和PTH 807的连线经过PTH 203和PTH 204的中点。另外,PTH 203和PTH 204的连接也可以经过PTH 806和PTH 807的中点。应当理解,在焊球205和焊球206之间也可以具有相同的PTH,然而,为了简单起见,图10中省略了在焊球205和焊球206之间的PTH。另外,PTH  806和PTH 807也可以由一个或三个等其他数量的PTH孔来代替。FIG. 10 shows a planar projection of a semiconductor chip package according to some embodiments of the present disclosure. Compared with FIG. 2, FIG. 10 further shows PTH 801 to PTH 805 located between the two differential interconnect components, and these PTHs all serve as ground vias. For example, PTH 801 to PTH 804 may be arranged symmetrically. However, it should be understood that the PTH 805 may also not be included. Between the first differential pair (solder ball 201 and solder ball 202) there is a PTH 806 and a PTH 807, also serving as a ground via. The connecting line of PTH 806 and PTH 807 passes through the midpoint of PTH 203 and PTH 204. In addition, the connection of PTH 203 and PTH 204 can also pass through the midpoint of PTH 806 and PTH 807. It should be understood that there may also be the same PTH between the solder ball 205 and the solder ball 206 , however, for simplicity, the PTH between the solder ball 205 and the solder ball 206 is omitted in FIG. 10 . In addition, PTH 806 and PTH 807 can also be replaced by other numbers of PTH holes such as one or three.
在图10中,将PTH 801-PTH 804到对应信号PTH孔的距离表示为R,PTH 801-PTH 804与对应信号PTH孔之间的连线夹角表示为α,PTH 806和PTH 807之间的连线与水平方向的夹角表示为β。例如,PTH 801与PTH 203之间的距离为R,PTH 802与PTH 203之间的距离为R,PTH 803与PTH 208之间的距离为R,PTH 804与PTH 208之间的距离为R。通过调节距离R和夹角β的大小,可以实现阻抗连续性优化,通过调节夹角α的大小和PTH 805的有无可以实现串扰消除的最优化。图11示出了不同α角下串扰消除的效果。In Fig. 10, the distance from PTH 801-PTH 804 to the corresponding signal PTH hole is represented as R, the angle between PTH 801-PTH 804 and the corresponding signal PTH hole is represented as α, and the distance between PTH 806 and PTH 807 The angle between the connection line and the horizontal direction is expressed as β. For example, the distance between PTH 801 and PTH 203 is R, the distance between PTH 802 and PTH 203 is R, the distance between PTH 803 and PTH 208 is R, and the distance between PTH 804 and PTH 208 is R. By adjusting the distance R and the angle β, the impedance continuity can be optimized, and by adjusting the angle α and the presence or absence of PTH 805, the optimization of crosstalk elimination can be realized. Figure 11 shows the effect of crosstalk cancellation at different α angles.
应当理解,图10和图11结合图2所示的第一差分互连组件和第三差分互连组件进行描述。然而,本领域技术人员应当理解,该结构同样适用于如图2所示的第一差分互连组件和第二差分互连组件。例如,在如图2所示的第一差分互连组件和第二差分互连组件中,调节夹角α的大小同样可以优化串扰消除的效果。It should be understood that FIG. 10 and FIG. 11 are described in conjunction with the first differential interconnection assembly and the third differential interconnection assembly shown in FIG. 2 . However, those skilled in the art should understand that this structure is also applicable to the first differential interconnection component and the second differential interconnection component as shown in FIG. 2 . For example, in the first differential interconnection component and the second differential interconnection component as shown in FIG. 2 , adjusting the size of the angle α can also optimize the effect of crosstalk cancellation.
图12示出了在位于半导体芯片封装边缘时如图2所示的第一差分互连组件和第三差分互连组件之间的串扰。如图12所示,与图1相比,图2的第一差分互连组件和第三差分互连组件在较宽频带(DC~40GHz)范围内具有10dB+的收益。FIG. 12 illustrates crosstalk between the first differential interconnection assembly and the third differential interconnection assembly as shown in FIG. 2 when located at the edge of a semiconductor chip package. As shown in FIG. 12 , compared with FIG. 1 , the first differential interconnection component and the third differential interconnection component of FIG. 2 have a gain of 10 dB+ in a wider frequency band (DC˜40 GHz).
图13示出了在位于半导体芯片封装内侧时如图2所示的第一差分互连组件和第三差分互连组件之间的串扰。如图13所示,与图1相比,图2的第一差分互连组件和第三差分互连组件在较宽频带(15GHz~40GHz)范围内具有10dB+的收益。FIG. 13 illustrates crosstalk between the first differential interconnection assembly and the third differential interconnection assembly as shown in FIG. 2 when located inside a semiconductor chip package. As shown in FIG. 13 , compared with FIG. 1 , the first differential interconnection component and the third differential interconnection component of FIG. 2 have a gain of 10dB+ in a wider frequency band (15GHz˜40GHz).
图14示出了如图2所示的第一差分互连组件和第二差分互连组件之间的串扰。如图14所示,与图1相比,图2的第一差分互连组件和第二差分互连组件在较宽频带(DC~40GHz)范围内具有10dB+的收益。FIG. 14 illustrates crosstalk between the first differential interconnect assembly and the second differential interconnect assembly as shown in FIG. 2 . As shown in FIG. 14 , compared with FIG. 1 , the first differential interconnection assembly and the second differential interconnection assembly of FIG. 2 have a gain of 10 dB+ in a wider frequency band (DC˜40 GHz).
图15示出了如图6所示的第一差分互连组件和第二差分互连组件之间的串扰。如图15所示,与图1相比,图6的第一差分互连组件和第二差分互连组件在较宽频带(DC~30GHz)范围内具有较大的串扰收益,在15GHz附近有10dB+的收益。FIG. 15 illustrates crosstalk between the first differential interconnect assembly and the second differential interconnect assembly as shown in FIG. 6 . As shown in FIG. 15, compared with FIG. 1, the first differential interconnection component and the second differential interconnection component in FIG. 10dB+ gain.
图16示出了凸块和焊球侧差分极性相反导致封装绕线的示意图。如图16所示,焊球901和焊球902分别用于传送差分信号中的正极性信号和负极性信号。凸块(bump)905和906分别用于传送差分信号中的正极性信号和负极性信号。因此,在连接时,存在封装绕线的情况。FIG. 16 shows a schematic diagram of package routing due to differential polarity reversal on the bump and ball sides. As shown in FIG. 16 , the solder ball 901 and the solder ball 902 are respectively used to transmit a positive polarity signal and a negative polarity signal in the differential signal. The bumps 905 and 906 are respectively used to transmit the positive polarity signal and the negative polarity signal in the differential signal. Therefore, at the time of connection, there is a case where the package is wound.
图17示出了根据本公开的一些实施例的出线布局的示意图。为了简洁起见,图17省略了焊球。与图10相比,图17还示出了盲埋孔1003至1008,盲埋孔1003至1008呈现阶梯状结构,类似于DNA双螺旋结构。具体而言,盲埋孔1003、1005和1007沿着第一方向堆叠,其中,第一方向表示从盲埋孔1003到盲埋孔1007的方向;盲埋孔1004、1006和1008沿着与第一方向相反的第二方向堆叠,其中,第二方向表示从盲埋孔1004到盲埋孔1008的方向。盲埋孔1004、1006和1008用于将凸块电连接到PTH 203,盲埋孔1003、1005和1007用于将凸块电连接到PTH 204。因此,引线1011为负极性,引线1012为正极性。例如,盲埋孔1003、1005和1007可以分别对应于如图9所示的盲埋孔314、313和312。相应地,引线1011可以对应于如图9所示的布线层331,用于与凸块323连接。例如,盲埋孔1004、1006和1008可以分别对应于如图9所示的盲埋孔314、313和312。相应地,引线1012可以对应于如图9所示的布线层331,用于与凸块323连接。图17没有示出PTH与焊球之间的盲埋孔,应当理解,PTH与焊球之间的盲埋孔也可以类似设置。FIG. 17 shows a schematic diagram of an outlet layout according to some embodiments of the present disclosure. For brevity, Figure 17 omits the solder balls. Compared with FIG. 10 , FIG. 17 also shows blind and buried holes 1003 to 1008 . The blind and buried holes 1003 to 1008 present a ladder-like structure, similar to a DNA double helix structure. Specifically, the blind and buried holes 1003, 1005 and 1007 are stacked along a first direction, wherein the first direction represents the direction from the blind and buried holes 1003 to the blind and buried holes 1007; the blind and buried holes 1004, 1006 and 1008 are stacked along the One direction is opposite to the stacking in a second direction, wherein the second direction represents the direction from the blind buried hole 1004 to the blind buried hole 1008 . Blind and buried vias 1004, 1006 and 1008 are used to electrically connect the bumps to the PTH 203, and blind and buried vias 1003, 1005 and 1007 are used to electrically connect the bumps to the PTH 204. Therefore, the lead wire 1011 has a negative polarity, and the lead wire 1012 has a positive polarity. For example, the blind and buried vias 1003 , 1005 and 1007 may respectively correspond to the blind and buried vias 314 , 313 and 312 as shown in FIG. 9 . Correspondingly, the lead 1011 may correspond to the wiring layer 331 as shown in FIG. 9 , and is used for connecting with the bump 323 . For example, blind and buried vias 1004 , 1006 and 1008 may correspond to blind and buried vias 314 , 313 and 312 as shown in FIG. 9 , respectively. Correspondingly, the lead 1012 may correspond to the wiring layer 331 as shown in FIG. 9 , and is used for connecting with the bump 323 . FIG. 17 does not show the blind and buried vias between the PTH and the solder balls. It should be understood that the blind and buried vias between the PTH and the solder balls can also be similarly arranged.
图18示出了根据本公开的一些实施例的出线布局的示意图。为了简洁起见,图18省略 了焊球。与图10相比,图18还示出了盲埋孔1003至1008,盲埋孔1003至1008呈现阶梯状结构,类似于DNA双螺旋结构。因此,引线1111为正极性,引线1112为负极性。例如,盲埋孔1003、1005和1007可以分别对应于如图9所示的盲埋孔314、313和312。相应地,引线1111可以对应于如图9所示的布线层331,用于与凸块323连接。例如,盲埋孔1004、1006和1008可以分别对应于如图9所示的盲埋孔314、313和312。相应地,引线1112可以对应于如图9所示的布线层331,用于与凸块323连接。图18没有示出PTH与焊球之间的盲埋孔,应当理解,PTH与焊球之间的盲埋孔也可以类似设置。在图17中引线从左侧引出,而在图18中引线从右侧引出,这将导致极性的切换,从而可以实现灵活的出线方案,防止绕线。FIG. 18 shows a schematic diagram of an outlet layout according to some embodiments of the present disclosure. For brevity, Figure 18 omits the solder balls. Compared with FIG. 10 , FIG. 18 also shows blind and buried holes 1003 to 1008 . The blind and buried holes 1003 to 1008 present a ladder-like structure, similar to a DNA double helix structure. Therefore, the lead wire 1111 has a positive polarity, and the lead wire 1112 has a negative polarity. For example, the blind and buried vias 1003 , 1005 and 1007 may respectively correspond to the blind and buried vias 314 , 313 and 312 as shown in FIG. 9 . Correspondingly, the lead 1111 may correspond to the wiring layer 331 as shown in FIG. 9 , and is used for connecting with the bump 323 . For example, blind and buried vias 1004 , 1006 and 1008 may correspond to blind and buried vias 314 , 313 and 312 as shown in FIG. 9 , respectively. Correspondingly, the lead 1112 may correspond to the wiring layer 331 as shown in FIG. 9 , and is used for connecting with the bump 323 . FIG. 18 does not show the blind and buried vias between the PTH and the solder balls. It should be understood that the blind and buried vias between the PTH and the solder balls can also be similarly arranged. In Figure 17, the leads are drawn out from the left, while in Figure 18 the leads are drawn out from the right, which will lead to a switching of the polarity, so that a flexible wiring scheme can be realized and wire winding can be prevented.
图19示出了根据本公开的一些实施例的出线布局的示意图。为了简洁起见,图19省略了焊球。图19示出了PTH 1201和PTH 1202,分别用于传送差分信号中的负极性信号和正极性信号。PTH 1221和1222用于接地,与图10所示的PTH 806和807相对应。盲埋孔1203至1208呈现阶梯状结构。因此,引线1211为负极性,引线1212为正极性。例如,盲埋孔1203、1205和1207可以分别对应于如图9所示的盲埋孔314、313和312。相应地,引线1211可以对应于如图9所示的布线层331,用于与凸块323连接。例如,盲埋孔1204、1206和1208可以分别对应于如图9所示的盲埋孔314、313和312。相应地,引线1212可以对应于如图9所示的布线层331,用于与凸块323连接。图19没有示出PTH与焊球之间的盲埋孔,应当理解,PTH与焊球之间的盲埋孔也可以类似设置。图19中示出的方案为中间出线方案,可以用于替代如图17所示的左侧出线方案。FIG. 19 shows a schematic diagram of an outlet layout according to some embodiments of the present disclosure. For brevity, Figure 19 omits the solder balls. FIG. 19 shows PTH 1201 and PTH 1202, which are respectively used to transmit negative polarity signals and positive polarity signals in differential signals. PTHs 1221 and 1222 are used for grounding, corresponding to PTHs 806 and 807 shown in Figure 10. The blind and buried holes 1203 to 1208 present a stepped structure. Therefore, the lead wire 1211 is of negative polarity, and the lead wire 1212 is of positive polarity. For example, the blind and buried vias 1203 , 1205 and 1207 may respectively correspond to the blind and buried vias 314 , 313 and 312 as shown in FIG. 9 . Correspondingly, the lead 1211 may correspond to the wiring layer 331 as shown in FIG. 9 , and is used for connecting with the bump 323 . For example, blind and buried vias 1204 , 1206 and 1208 may correspond to blind and buried vias 314 , 313 and 312 as shown in FIG. 9 , respectively. Correspondingly, the lead 1212 may correspond to the wiring layer 331 as shown in FIG. 9 , and is used for connecting with the bump 323 . FIG. 19 does not show the blind and buried vias between the PTH and the solder balls. It should be understood that the blind and buried vias between the PTH and the solder balls can also be similarly arranged. The solution shown in FIG. 19 is a middle outlet solution, which can be used to replace the left side outlet solution shown in FIG. 17 .
图20示出了根据本公开的一些实施例的地孔的布局的示意图。与图17相比,一个地孔PTH 1301代替了两个地孔PTH 406和407。如图20所示,PTH 1301位于PTH 203与PTH 204中间。FIG. 20 shows a schematic diagram of a layout of ground holes according to some embodiments of the present disclosure. Compared to Figure 17, one ground hole PTH 1301 replaces two ground holes PTH 406 and 407. As shown in Figure 20, PTH 1301 is located between PTH 203 and PTH 204.
图21示出了根据本公开的一些实施例的地孔的布局的示意图。与图17相比,三个地孔PTH 1401至PTH 1403代替了两个地孔PTH 406和407。如图21所示,PTH 1402位于PTH 203与PTH 204中间。FIG. 21 shows a schematic diagram of a layout of ground holes according to some embodiments of the present disclosure. Compared with FIG. 17, three ground holes PTH 1401 to PTH 1403 replace two ground holes PTH 406 and 407. As shown in Figure 21, PTH 1402 is located between PTH 203 and PTH 204.
图22示出了根据本公开的一些实施例的地孔的布局的示意图。与图17相比,三个地孔PTH 1501至PTH 1503代替了两个地孔PTH 406和407。如图22所示,PTH 1502位于PTH 203与PTH 204中间。FIG. 22 shows a schematic diagram of a layout of ground holes according to some embodiments of the present disclosure. Compared with FIG. 17, three ground holes PTH 1501 to PTH 1503 replace two ground holes PTH 406 and 407. As shown in Figure 22, PTH 1502 is located between PTH 203 and PTH 204.
尽管已经详细地描述了本公开的实施例及其优势,但应该理解,在不脱离所附权利要求所限定的本公开的范围的情况下,可对本公开做出各种改变、替代和变化。而且,本申请的范围不旨在限于本说明书中所述的工艺、机器装置、制造、物质组成、工具、方法和步骤的具体实施例。本领域的技术人员通过本公开容易理解,根据本公开,可以利用已有的或今后将开发的、与本公开所述相应实施例执行基本相同的功能或者实现基本相同的结果的工艺、机器装置、制造、物质组成、工具、方法或步骤。因此,所附权利要求旨在将这些工艺、机器装置、制造、物质组成、工具、方法或步骤包括在它们的保护范围内。另外,每个权利要求组成单独的实施例,并且各个权利要求和实施例的组合都在本公开的范围内。Although the embodiments of the present disclosure and its advantages have been described in detail, it should be understood that various changes, substitutions and alterations can be made hereto without departing from the scope of the disclosure as defined by the appended claims. Moreover, the scope of the present application is not intended to be limited to the particular embodiments of the process, machine, manufacture, composition of matter, means, methods and steps described in the specification. Those skilled in the art can easily understand from this disclosure that, according to this disclosure, existing or future developed processes and machine devices that perform substantially the same functions or achieve substantially the same results as the corresponding embodiments described in this disclosure can be used , manufacture, composition of matter, tool, method or step. Accordingly, the appended claims are intended to include within their scope such processes, machines, manufacture, compositions of matter, means, methods, or steps. In addition, each claim constitutes a separate embodiment, and combinations of individual claims and embodiments are within the scope of the present disclosure.

Claims (15)

  1. 一种半导体芯片封装,其特征在于,包括:A semiconductor chip package, characterized in that it comprises:
    第一差分互连组件,所述第一差分互连组件包括:A first differential interconnection component, the first differential interconnection component comprising:
    第一焊盘和第二焊盘,设置在基板上,用于传送第一差分信号;以及The first pad and the second pad are arranged on the substrate and are used to transmit the first differential signal; and
    第一镀覆孔和第二镀覆孔,设置在所述基板中,并且分别与所述第一焊盘和所述第二焊盘电连接;以及A first plated-through hole and a second plated-through hole are disposed in the substrate and electrically connected to the first pad and the second pad, respectively; and
    第二差分互连组件,与所述第一差分互连组件相邻,所述第二差分互连组件包括:The second differential interconnection component is adjacent to the first differential interconnection component, and the second differential interconnection component includes:
    第三焊盘和第四焊盘,设置在所述基板上,用于传送第二差分信号;以及The third pad and the fourth pad are arranged on the substrate and are used to transmit the second differential signal; and
    第三镀覆孔和第四镀覆孔,设置在所述基板中,并且分别与所述第三焊盘和所述第四焊盘电连接,a third plated-through hole and a fourth plated-through hole arranged in the substrate and electrically connected to the third pad and the fourth pad respectively,
    其中,在所述半导体芯片封装的平面投影中,所述第一差分互连组件中的第二焊盘与所述第二差分互连组件中的第三焊盘相邻,所述第一差分互连组件中的第一镀覆孔与所述第二差分互连组件中的第三镀覆孔相邻;以及Wherein, in the planar projection of the semiconductor chip package, the second pad in the first differential interconnection assembly is adjacent to the third pad in the second differential interconnection assembly, and the first differential the first plated-through hole in the interconnect assembly is adjacent to the third plated-through hole in the second differential interconnect assembly; and
    其中,所述第二焊盘和所述第三焊盘传送的信号的极性相同,并且所述第一镀覆孔和所述第三镀覆孔传送的信号的极性相反;或者,所述第二焊盘和所述第三焊盘传送的信号的极性相反,并且所述第一镀覆孔和所述第三镀覆孔传送的信号的极性相同。Wherein, the polarities of the signals transmitted by the second pad and the third pad are the same, and the polarities of the signals transmitted by the first plated hole and the third plated hole are opposite; or, the The polarities of the signals transmitted by the second pad and the third pad are opposite, and the polarities of the signals transmitted by the first plated hole and the third plated hole are the same.
  2. 根据权利要求1所述的半导体芯片封装,其特征在于,在所述半导体芯片封装的平面投影中:The semiconductor chip package according to claim 1, wherein, in the plane projection of the semiconductor chip package:
    所述第一焊盘和所述第二焊盘之间的连线与所述第一镀覆孔和所述第二镀覆孔之间的连线彼此垂直,并且所述第三焊盘和所述第四焊盘之间的连线与所述第三镀覆孔与所述第四镀覆孔之间的连线彼此垂直。The line between the first pad and the second pad is perpendicular to the line between the first plated hole and the second plated hole, and the third pad and The connection line between the fourth pads and the connection line between the third plated hole and the fourth plated hole are perpendicular to each other.
  3. 根据权利要求1或2所述的半导体芯片封装,其特征在于,在所述半导体芯片封装的平面投影中:The semiconductor chip package according to claim 1 or 2, wherein, in the planar projection of the semiconductor chip package:
    所述第一差分互连组件中的第一焊盘与所述第二差分互连组件中的第四焊盘相邻。The first pad in the first differential interconnect assembly is adjacent to the fourth pad in the second differential interconnect assembly.
  4. 根据权利要求1-3中任一项所述的半导体芯片封装,其特征在于,在所述半导体芯片封装的平面投影中:The semiconductor chip package according to any one of claims 1-3, wherein, in the planar projection of the semiconductor chip package:
    所述第一镀覆孔位于所述第一焊盘和所述第二焊盘的一侧,所述第二镀覆孔位于所述第一焊盘和所述第二焊盘的另一侧。The first plated through hole is located on one side of the first pad and the second pad, and the second plated hole is located on the other side of the first pad and the second pad .
  5. 根据权利要求1-4中任一项所述的半导体芯片封装,其特征在于,在所述半导体芯片封装的平面投影中:The semiconductor chip package according to any one of claims 1-4, wherein, in the planar projection of the semiconductor chip package:
    所述第一焊盘与所述第四焊盘布置在第一行,并且所述第二焊盘和所述第三焊盘布置在与所述第一行相邻的第二行。The first pad and the fourth pad are arranged in a first row, and the second pad and the third pad are arranged in a second row adjacent to the first row.
  6. 根据权利要求1或2或4所述的半导体芯片封装,其特征在于,在所述半导体芯片封装的平面投影中:The semiconductor chip package according to claim 1, 2 or 4, wherein, in the planar projection of the semiconductor chip package:
    所述第二焊盘和所述第三焊盘布置在相邻的行和相邻的列。The second pads and the third pads are arranged in adjacent rows and adjacent columns.
  7. 根据权利要求1或2所述的半导体芯片封装,其特征在于,在所述半导体芯片封装的平面投影中:The semiconductor chip package according to claim 1 or 2, wherein, in the planar projection of the semiconductor chip package:
    所述第一焊盘至所述第四焊盘布置在一行,所述第一镀覆孔至所述第四镀覆孔位于所述行的一侧。The first to fourth pads are arranged in a row, and the first to fourth plated holes are located at one side of the row.
  8. 根据权利要求1或2或4所述的半导体芯片封装,其特征在于,在所述半导体芯片封装的平面投影中:The semiconductor chip package according to claim 1, 2 or 4, wherein, in the planar projection of the semiconductor chip package:
    所述第一焊盘和所述第二焊盘之间的连线与所述第三焊盘与所述第四焊盘之间的连线彼此垂直。The connection line between the first pad and the second pad and the connection line between the third pad and the fourth pad are perpendicular to each other.
  9. 根据权利要求1所述的半导体芯片封装,其特征在于,在所述半导体芯片封装的平面投影中:The semiconductor chip package according to claim 1, wherein, in the plane projection of the semiconductor chip package:
    所述第一焊盘和所述第二焊盘之间的连线与所述第一镀覆孔和所述第二镀覆孔之间的连线彼此垂直,所述第三焊盘和所述第四焊盘之间的连线与所述第三镀覆孔与所述第四镀覆孔之间的连线彼此平行,并且所述第一焊盘和所述第二焊盘之间的连线与所述第三焊盘与所述第四焊盘之间的连线彼此垂直。The connection line between the first pad and the second pad and the connection line between the first plated hole and the second plated hole are perpendicular to each other, and the third pad and the The connection line between the fourth pad and the connection line between the third plated hole and the fourth plated hole are parallel to each other, and the connection between the first pad and the second pad and the connection line between the third pad and the fourth pad are perpendicular to each other.
  10. 根据权利要求8或9所述的半导体芯片封装,其特征在于,在所述半导体芯片封装的平面投影中:The semiconductor chip package according to claim 8 or 9, wherein, in the planar projection of the semiconductor chip package:
    所述第一焊盘布置在第一行,所述第二焊盘布置在第二行,并且所述第三焊盘和所述第四焊盘布置在第三行。The first pads are arranged in a first row, the second pads are arranged in a second row, and the third pads and the fourth pads are arranged in a third row.
  11. 根据权利要求1-10中任一项所述的半导体芯片封装,其特征在于,还包括:The semiconductor chip package according to any one of claims 1-10, further comprising:
    一个或多个镀覆孔,用于电连接到地,设置在所述基板中,在所述半导体芯片封装的平面投影中位于所述第一焊盘与所述第二焊盘之间;和/或one or more plated-through holes for electrical connection to ground are provided in the substrate between the first pad and the second pad in planar projection of the semiconductor chip package; and /or
    一个或多个镀覆孔,用于电连接到地,设置在所述基板中,在所述半导体芯片封装的平面投影中位于所述第三焊盘与所述第四焊盘之间。One or more plated-through holes for electrical connection to ground are provided in the substrate between the third pad and the fourth pad in planar projection of the semiconductor chip package.
  12. 根据权利要求1-11中任一项所述的半导体芯片封装,其特征在于,The semiconductor chip package according to any one of claims 1-11, characterized in that,
    所述第一焊盘和所述第二焊盘通过双螺旋状盲埋孔分别与所述第一镀覆孔和所述第二镀覆孔连接;和/或The first pad and the second pad are respectively connected to the first plated hole and the second plated hole through a double helix blind buried hole; and/or
    所述第三焊盘和所述第四焊盘通过双螺旋状盲埋孔分别与所述第一镀覆孔和所述第二镀覆孔连接,其中,所述双螺旋状盲埋孔包括彼此电连接的第一多个盲埋孔和彼此电连接的第二多个盲埋孔,所述第一多个盲埋孔沿着第一方向堆叠,所述第二多个盲埋孔沿着与所述第一方向相反的第二方向堆叠。The third pad and the fourth pad are respectively connected to the first plated hole and the second plated hole through a double helix blind buried hole, wherein the double helix blind buried hole includes A first plurality of blind buried holes electrically connected to each other and a second plurality of blind buried holes electrically connected to each other, the first plurality of blind buried holes are stacked along a first direction, and the second plurality of blind buried holes are stacked along a first direction stacking in a second direction opposite to the first direction.
  13. 根据权利要求1-12中任一项所述的半导体芯片封装,其特征在于,The semiconductor chip package according to any one of claims 1-12, characterized in that,
    所述基板包括层压基板或印刷电路板(PCB)。The substrate includes a laminated substrate or a printed circuit board (PCB).
  14. 根据权利要求5所述的半导体芯片封装,其特征在于,还包括:The semiconductor chip package according to claim 5, further comprising:
    第三差分互连组件,所述第三差分互连组件包括:A third differential interconnection component, where the third differential interconnection component includes:
    第五焊盘和第六焊盘,设置在所述基板上,用于传送第三差分信号;以及The fifth pad and the sixth pad are arranged on the substrate and are used to transmit the third differential signal; and
    第五镀覆孔和第六镀覆孔,设置在所述基板中,并且分别与所述第五焊盘和所述第六焊盘电连接;以及fifth plated-through holes and sixth plated-through holes are disposed in the substrate and are electrically connected to the fifth pad and the sixth pad; and
    第四差分互连组件,所述第四差分互连组件包括:A fourth differential interconnection component, where the fourth differential interconnection component includes:
    第七焊盘和第八焊盘,设置在所述基板上,用于传送第四差分信号;以及The seventh pad and the eighth pad are arranged on the substrate and are used to transmit the fourth differential signal; and
    第七镀覆孔和第八镀覆孔,设置在所述基板中,并且分别与所述第七焊盘和所述第八焊盘电连接,The seventh plated-through hole and the eighth plated-through hole are arranged in the substrate and are electrically connected to the seventh pad and the eighth pad respectively,
    其中,所述第三差分互连组件中的第六焊盘与所述第四差分互连组件中的第七焊盘相邻,所述第三差分互连组件中的第五焊盘与所述第四差分互连组件中的第八焊盘相邻,所述第三差分互连组件中的第五镀覆孔与所述第四差分互连组件中的第六镀覆孔相邻;Wherein, the sixth pad in the third differential interconnection assembly is adjacent to the seventh pad in the fourth differential interconnection assembly, and the fifth pad in the third differential interconnection assembly is adjacent to the seventh pad in the third differential interconnection assembly. The eighth pad in the fourth differential interconnection assembly is adjacent, and the fifth plated-through hole in the third differential interconnection assembly is adjacent to the sixth plated-through hole in the fourth differential interconnection assembly;
    其中,所述第六焊盘和所述第七焊盘传送的信号的极性相同,并且所述第五镀覆孔和所述第六镀覆孔传送的信号的极性相反;或者所述第六焊盘和所述第七焊盘传送的信号的极性相反,并且所述第五镀覆孔和所述第六镀覆孔传送的信号的极性相同;以及Wherein, the polarities of the signals transmitted by the sixth pad and the seventh pad are the same, and the polarities of the signals transmitted by the fifth plated hole and the sixth plated hole are opposite; or the The polarities of the signals transmitted by the sixth pad and the seventh pad are opposite, and the polarities of the signals transmitted by the fifth plated hole and the sixth plated hole are the same; and
    其中,在所述半导体芯片封装的平面投影中,所述第五焊盘与所述第八焊盘布置在第三行,并且所述第六焊盘和所述第七焊盘布置在与所述第三行相邻的第四行,所述第一焊盘和所述第二焊盘布置在第一列,所述第五焊盘和所述第六焊盘布置在与所述第一列相邻的第二列,所述第三焊盘和所述第四焊盘布置在与所述第二列相邻的第三列,所述第七焊盘和所述第八焊盘布置在与所述第三列相邻的第四列。Wherein, in the planar projection of the semiconductor chip package, the fifth pad and the eighth pad are arranged in the third row, and the sixth pad and the seventh pad are arranged in the same row as the The fourth row adjacent to the third row, the first pad and the second pad are arranged in the first column, the fifth pad and the sixth pad are arranged in the same row as the first The second column adjacent to the column, the third pad and the fourth pad are arranged in the third column adjacent to the second column, the seventh pad and the eighth pad are arranged In the fourth column adjacent to said third column.
  15. 根据权利要求14所述的半导体芯片封装,其特征在于,The semiconductor chip package according to claim 14, wherein,
    所述第一差分互连组件、所述第二差分互连组件、所述第三差分互连组件和所述第四差分互连组件作为单元在所述基板上周期性排布。The first differential interconnection component, the second differential interconnection component, the third differential interconnection component and the fourth differential interconnection component are periodically arranged as units on the substrate.
PCT/CN2021/130432 2021-11-12 2021-11-12 Semiconductor chip package WO2023082197A1 (en)

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