WO2023060895A1 - Pulsed vacuum ultraviolet lamp with adjustable pulse width - Google Patents

Pulsed vacuum ultraviolet lamp with adjustable pulse width Download PDF

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WO2023060895A1
WO2023060895A1 PCT/CN2022/093726 CN2022093726W WO2023060895A1 WO 2023060895 A1 WO2023060895 A1 WO 2023060895A1 CN 2022093726 W CN2022093726 W CN 2022093726W WO 2023060895 A1 WO2023060895 A1 WO 2023060895A1
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vacuum ultraviolet
pulse width
coupler
radio frequency
lamp tube
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PCT/CN2022/093726
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French (fr)
Chinese (zh)
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WO2023060895A8 (en
WO2023060895A9 (en
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束继年
程诗宇
杨波
张作建
李震
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中国科学院大学
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/048—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using an excitation coil
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/302—Vessels; Containers characterised by the material of the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/36—Seals between parts of vessels; Seals for leading-in conductors; Leading-in conductors
    • H01J61/366—Seals for leading-in conductors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B20/00—Energy efficient lighting technologies, e.g. halogen lamps or gas discharge lamps

Definitions

  • the invention relates to a pulsed vacuum ultraviolet lamp with adjustable pulse width, which can be used as a vacuum ultraviolet light source in the fields of analytical instruments, basic scientific research, biochemical industry and electronic manufacturing, and belongs to the field of electronic technology.
  • the vacuum ultraviolet lamp is a device that can emit vacuum ultraviolet light with a wavelength of 100-200nm. It is widely used in the fields of analytical instruments, basic scientific research, biochemical industry and electronic manufacturing. Vacuum ultraviolet lamps generally use DC discharge, radio frequency magnetically induced discharge, microwave discharge and pulse discharge to excite gas discharge to generate plasma, and then excite neutral gas atoms through electron collisions in the plasma to produce excited state atoms or excimers. Vacuum ultraviolet light is radiated when atoms or excimers spontaneously transition to the ground state.
  • the main luminescent medium gases are hydrogen (121.6nm), krypton (123.9nm/ ⁇ 146nm), argon (105.9nm/ ⁇ 126nm) and xenon (147.6nm/ ⁇ 172nm).
  • the DC discharge vacuum ultraviolet lamp uses a direct current discharge between two electrodes to excite the luminescent medium gas. This type of vacuum ultraviolet lamp is due to the metal atoms sputtered by the metal electrode deposited on the surface of the crystal window, resulting in a decrease in light transmittance, thereby reducing the vacuum ultraviolet lamp. service life.
  • the radio frequency magnetically induced discharge vacuum ultraviolet lamp is also called the electrodeless vacuum ultraviolet lamp. Its core structure is a glass or quartz bulb sealed with a luminescent medium gas and its externally wound coil. The vacuum ultraviolet light generated in the bulb is output by a crystal window (such as a magnesium fluoride or lithium fluoride window) that is transparent to the vacuum ultraviolet light.
  • the excitation power supply is a radio frequency power supply.
  • the radio frequency current flows through the coil, an induced magnetic field is generated, and the induced magnetic field excites the luminescent medium gas in the bulb to generate plasma, thereby generating vacuum ultraviolet light.
  • the frequency of the radio frequency is generally 13.56MHz or higher, and the lower radio frequency is difficult to start under low voltage. Because traditional vacuum ultraviolet lamps are not easy to glow, they generally work continuously and radiate vacuum ultraviolet light continuously.
  • the luminous flux output by the vacuum ultraviolet lamp gradually decreases. To a certain extent It affects the service life of the vacuum ultraviolet lamp.
  • the service life of magnesium fluoride windows is generally thousands of hours, while the service life of lithium fluoride windows is only tens of hours.
  • the lighting electrodeless lamp described in the patent US3521120 is composed of a coil wound ferrite ring column and a hollow spherical bulb. The center space of the hollow spherical bulb is matched with the ferrite column. Mercury, the inside of the bulb is coated with a fluorescent substance.
  • the two electrodeless lamps applied by John Anderson are the original structures of the currently popular lighting electrodeless lamps in the world. However, the practical commercial lighting electrodeless lamps were not developed by Philips until 20 years later. In 1990, Philips introduced an electromagnetic induction lighting system with a working radio frequency of 2650kHz, and its working principle is similar to that of US3500118A and US3521120.
  • the electrodeless lamp in the visible light band excited by 2650kHz radio frequency has become a mature commercial lighting product, which consists of three parts: radio frequency generator, coupler and bulb.
  • the radio frequency generator generates a radio frequency current of 2650kHz
  • the coupler is a ferrite core wound around a coil, and its function is to enhance electromagnetic induction.
  • the bulb is generally a glass bulb, filled with a certain amount of inert buffer gas and solid amalgam, which is used to generate mercury vapor as a luminescent medium.
  • the inside surface of the bulb is coated with a phosphor that converts ultraviolet light into visible light.
  • the present invention provides a pulsed vacuum ultraviolet lamp with adjustable pulse width.
  • the light source adopts the radio frequency generator and coupler of the commercial lighting electrodeless lamp, combines the metal bulb and the fluid luminescent medium gas, and uses the solid state relay to control the radio frequency generator to form a pulsed vacuum ultraviolet lamp with adjustable pulse width, which can greatly reduce the vacuum
  • the cost of the UV lamp can delay the decline of the light transmittance of the crystal window and prolong the service life of the vacuum UV lamp.
  • the technical scheme adopted by the patent of the present invention is: 1.
  • the current input to the radio frequency generator is controlled by a solid relay; Plate, quartz lamp tube sealing ring and window sealing ring constitute the plasma discharge chamber of the vacuum ultraviolet lamp according to the drawings in the manual; 3.
  • the center of the plasma discharge chamber is a quartz lamp tube; 4. Coupler support rod, ferrite core and excitation The coupler composed of coils is placed in the quartz lamp tube; 5.
  • the vacuum ultraviolet light output end of the plasma discharge chamber is equipped with a lithium fluoride or magnesium fluoride window sealed by a sealing ring; 6.
  • the plasma discharge chamber is filled with a certain 7.
  • the radio frequency current generated by the radio frequency generator flows through the wires through the coil wound on the ferrite core, and under the enhancement of the ferrite core, the radio frequency induced magnetic field excites the luminescence in the metal bulb
  • the medium gas forms plasma, and then generates vacuum ultraviolet light; 8.
  • the vacuum ultraviolet light is output through the lithium fluoride or magnesium fluoride window; 9.
  • the pulse signal controls the switching on and off of the solid relay, thereby controlling the pulse vacuum ultraviolet light the pulse width.
  • the invention has the beneficial effects of providing a pulsed vacuum ultraviolet light source with low price, long service life, replaceable windows and adjustable pulse width for the application field of vacuum ultraviolet light.
  • Fig. 1 is the structure schematic diagram of pulse vacuum ultraviolet lamp with adjustable pulse width of the present invention, wherein: 1, solid state relay, 2, lead wire, 3, control signal line, 4, lead wire, 5, 2650kHz radio frequency generator, 6, radio frequency lead wire , 7. Coupler support rod, 8. Ferrite core, 9. Excitation coil, 10. Quartz lamp tube, 11. Metal bulb, 12. Plasma discharge chamber, 13. Lithium fluoride or magnesium fluoride window, 14. Window sheet fixing cover, 15. Gas inlet pipe, 16. Gas outlet pipe, 17. Quartz lamp tube fixing plate, 18. Quartz lamp tube sealing ring, 19. Window sheet sealing ring.
  • a pulsed vacuum ultraviolet lamp with adjustable pulse width is composed of a solid state relay, a wire, a signal wire, a 2650kHz radio frequency generator, a radio frequency wire, a coupler support rod, a ferrite core, an excitation Coil, quartz lamp tube, metal bulb, lithium fluoride or magnesium fluoride window, window fixing cover, gas inlet tube, gas outlet tube, quartz tube fixing plate, quartz tube sealing ring and window sealing ring, It is characterized in that: quartz lamp tube, metal bulb, lithium fluoride or magnesium fluoride window, window fixing cover, quartz lamp tube fixing plate, quartz lamp tube sealing ring and window sealing ring form a vacuum ultraviolet lamp according to the drawings in the manual The plasma discharge chamber, the coupler consisting of the coupler support rod, the ferrite core and the exciting coil is placed in the center of the plasma discharge chamber. Its usage method is:
  • Step 1 Connect the solid state relay (1) to the 220V/110V power socket through the wire (2);
  • Step 2 The control signal line (3) provides a voltage of 3-10V to the solid state relay (1), so that the solid state relay is in the on state;
  • Step 3 The 220V/110V current output by the solid state relay (1) supplies power to the 2650kHz RF generator (5) through the wire (4);
  • Step 4 The coupler support rod (7), the ferrite core (8) and the exciting coil (9) constitute the coupler;
  • Step 5 Quartz lamp tube (10), metal bulb (11), lithium fluoride or magnesium fluoride window (13), window fixing cover (14), quartz lamp fixing plate (17), quartz lamp sealing Ring (18) and window sheet sealing ring (19) constitute plasma discharge chamber (12);
  • Step 6 The luminescent medium gas flows into the plasma discharge chamber through the gas inlet pipe (15), and then flows out through the gas outlet pipe (16), forming an air pressure of about 30-300Pa in the plasma discharge chamber;
  • Step 7 The RF current output by the 2650kHz RF generator (5) flows to the coupler through the RF wire (6);
  • Step 8 The radio frequency current flowing through the coupler generates an induced magnetic field, excites the luminescent medium gas, and generates plasma in the plasma discharge chamber (12);
  • Step 9 the vacuum ultraviolet light generated by the plasma in the plasma discharge chamber (12) is output through the lithium fluoride or magnesium fluoride window (13);
  • Step 10 When the voltage of 3-10V that controls the luminescence time drops to 0V, the solid state relay (1) is switched to an off state, and the output of vacuum ultraviolet light is stopped.

Abstract

A pulsed vacuum ultraviolet lamp with an adjustable pulse width, the pulsed vacuum ultraviolet lamp being composed of a solid state relay (1), a 2650 kHz radio frequency generator (5), a coupler, and a plasma discharge chamber (12). The plasma discharge chamber (12) is composed of a quartz lamp tube (10), a metal bulb (11), a lithium fluoride or magnesium fluoride window sheet (13), a window sheet fixing cap (14), a quartz lamp tube fixing disk (17), a quartz lamp tube sealing ring (18), and a window sheet sealing ring (19). The coupler is composed of a coupler support rod (7), a ferrite core (8), and an excitation coil (9). The quartz lamp tube (10) is located in the center of the plasma discharge chamber (12), the coupler is placed in the quartz lamp tube (10), and the lithium fluoride or magnesium fluoride window sheet (13) is mounted at a vacuum ultraviolet light output end of the plasma discharge chamber (12). The 2650 kHz radio frequency generator (5) is connected to a 220V/110V power socket by means of the solid state relay (1), and the operating state of the solid state relay (1) is controlled by a 3-10V pulsed voltage. A radio frequency current generated by the radio frequency generator (5) flows through the coupler to excite luminescent medium gas in the plasma discharge chamber (12), so as to form plasma and thus generate vacuum ultraviolet light. The generated vacuum ultraviolet light is output through the lithium fluoride or magnesium fluoride window sheet (13). The pulse width of pulsed vacuum ultraviolet light is determined by the pulse width of the 3-10V pulsed voltage that controls the solid state relay (1), thereby forming the pulsed vacuum ultraviolet light having an adjustable pulse width.

Description

脉宽可调的脉冲真空紫外灯Pulsed Vacuum Ultraviolet Lamp with Adjustable Pulse Width 所属技术领域Technical field
本发明涉及一种脉宽可调的脉冲真空紫外灯，可作为分析仪器、基础科研、生物化工和电子制造等领域使用的真空紫外光源，属于电子技术领域。The invention relates to a pulsed vacuum ultraviolet lamp with adjustable pulse width, which can be used as a vacuum ultraviolet light source in the fields of analytical instruments, basic scientific research, biochemical industry and electronic manufacturing, and belongs to the field of electronic technology.
背景技术Background technique
真空紫外灯是可以发射波长为100-200nm真空紫外光的装置，在分析仪器、基础科研、生物化工和电子制造等领域有着广泛应用。真空紫外灯一般利用直流放电、射频磁诱导放电、微波放电和脉冲放电等方式激发气体放电产生等离子体，再通过等离子体中电子碰撞激发中性气体原子，产生激发态原子或准分子，激发态原子或准分子向基态自发跃迁时辐射出真空紫外光。主要的发光介质气体有氢气(121.6nm)、氪气(123.9nm/～146nm)、氩气(105.9nm/～126nm)和氙气(147.6nm/～172nm)。传统的小型真空紫外灯多为直流放电和射频磁诱导放电方式。直流放电真空紫外灯利用两个电极之间的直流放电激发发光介质气体，这类真空紫外灯由于金属电极溅射出的金属原子沉积在晶体窗片表面导致透光率下降，从而降低了真空紫外灯的使用寿命。射频磁诱导放电真空紫外灯也称为无极真空紫外灯，其核心结构是封有发光介质气体的玻璃或石英灯泡及其外部缠绕的线圈。灯泡内产生的真空紫外光由可透过真空紫外光的晶体窗片(如氟化镁或氟化锂窗片)输出。激发电源为射频电源，射频电流流过线圈时产生诱导磁场，诱导磁场激发灯泡内的发光介质气体产生等离子体，进而产生真空紫外光。射频磁诱导放电真空紫外灯由于灯泡内没有金属电极，因而输出真空紫外光的窗片内表面没有金属蒸汽的沉积，窗片使用寿命较长。射频的频率一般是13.56MHz或更高，较低的射频频率难以在低电压下起辉。由于传统真空紫外灯不易起辉，一般都是连续工作并持续辐射真空紫外光，然而由于晶体窗片在真空紫外光照射下透射率会逐渐退化，导致真空紫外灯输出的光通量逐渐下降，一定程度上影响真空紫外灯的使用寿命。氟化镁窗片的使用寿命一般为数千小时，而氟化锂窗片的使用寿命只有几十小时。The vacuum ultraviolet lamp is a device that can emit vacuum ultraviolet light with a wavelength of 100-200nm. It is widely used in the fields of analytical instruments, basic scientific research, biochemical industry and electronic manufacturing. Vacuum ultraviolet lamps generally use DC discharge, radio frequency magnetically induced discharge, microwave discharge and pulse discharge to excite gas discharge to generate plasma, and then excite neutral gas atoms through electron collisions in the plasma to produce excited state atoms or excimers. Vacuum ultraviolet light is radiated when atoms or excimers spontaneously transition to the ground state. The main luminescent medium gases are hydrogen (121.6nm), krypton (123.9nm/~146nm), argon (105.9nm/~126nm) and xenon (147.6nm/~172nm). Traditional small vacuum ultraviolet lamps are mostly DC discharge and radio frequency magnetically induced discharge. The DC discharge vacuum ultraviolet lamp uses a direct current discharge between two electrodes to excite the luminescent medium gas. This type of vacuum ultraviolet lamp is due to the metal atoms sputtered by the metal electrode deposited on the surface of the crystal window, resulting in a decrease in light transmittance, thereby reducing the vacuum ultraviolet lamp. service life. The radio frequency magnetically induced discharge vacuum ultraviolet lamp is also called the electrodeless vacuum ultraviolet lamp. Its core structure is a glass or quartz bulb sealed with a luminescent medium gas and its externally wound coil. The vacuum ultraviolet light generated in the bulb is output by a crystal window (such as a magnesium fluoride or lithium fluoride window) that is transparent to the vacuum ultraviolet light. The excitation power supply is a radio frequency power supply. When the radio frequency current flows through the coil, an induced magnetic field is generated, and the induced magnetic field excites the luminescent medium gas in the bulb to generate plasma, thereby generating vacuum ultraviolet light. Since there is no metal electrode in the radio frequency magnetically induced discharge vacuum ultraviolet lamp, there is no deposition of metal vapor on the inner surface of the window that outputs vacuum ultraviolet light, and the service life of the window is longer. The frequency of the radio frequency is generally 13.56MHz or higher, and the lower radio frequency is difficult to start under low voltage. Because traditional vacuum ultraviolet lamps are not easy to glow, they generally work continuously and radiate vacuum ultraviolet light continuously. However, due to the gradual degradation of the transmittance of the crystal window under the irradiation of vacuum ultraviolet light, the luminous flux output by the vacuum ultraviolet lamp gradually decreases. To a certain extent It affects the service life of the vacuum ultraviolet lamp. The service life of magnesium fluoride windows is generally thousands of hours, while the service life of lithium fluoride windows is only tens of hours.
1882年Philip Diehl获得了感应白炽灯的美国专利(US255497)，该专利利用电磁感应通过一个灯泡外的线圈给另一个密封在灯泡内的线圈传递能量，从而克服了灯泡电极漏气的问题，是无极灯的雏形。1967年和1968年通用电气的John Anderson申请了照明无极灯专利(US3500118和US3521120)，专利US3500118使用线圈缠绕铁氧体环，铁氧体环中穿过环形灯管，灯管里充有水银蒸汽，灯泡内壁涂有荧光物质，通过对线圈施加100-500kHz的射频产生诱导磁场，在铁氧体增强的作用下，诱导磁场激发水银的等离子体发光。专利US3521120描述的照明无极灯由一个线圈缠绕铁氧体环柱和一个中空球形灯泡组成，中空球 形灯泡的中心空间大小配合铁氧体柱，灯泡充有2-4Torr的氩气和40-50mg的水银，灯泡内壁涂有荧光物质。John Anderson申请的两个无极灯是目前国际上流行的照明无极灯的原始结构，然而实用的商业化照明无极灯直到20年后才由Philips公司研制出来。1990年Philips公司推出了工作射频为2650kHz的电磁感应照明系统，其工作原理与US3500118A和US3521120相近。目前2650kHz射频激发的可见光波段无极灯已成为成熟的商业化照明产品，它由射频发生器、耦合器和灯泡三部分组成。射频发生器产生2650kHz的射频电流，耦合器是缠绕线圈的铁氧体磁芯，其功能是增强电磁感应作用。灯泡一般为玻璃灯泡，内部充有一定的惰性缓冲气体和固体汞剂，固体汞剂用来产生发光介质汞蒸汽。灯泡的内表面涂有一层荧光物质，用于将紫外光转变成可见光。由于大规模商业化开发，2650kHz射频激发的可见光波段无极灯的射频发生器和耦合器的结构和性能已经经过了深度优化和革新，具有瞬时起辉功能，配件成本也大幅降低，但是目前2650kHz射频激发的可见光波段无极灯技术还没有用于产生真空紫外光。In 1882, Philip Diehl obtained the U.S. patent (US255497) for induction incandescent lamps. This patent uses electromagnetic induction to transmit energy through a coil outside the bulb to another coil sealed inside the bulb, thus overcoming the problem of gas leakage from the bulb electrodes. The prototype of the electrodeless lamp. In 1967 and 1968, John Anderson of General Electric applied for patents for lighting electrodeless lamps (US3500118 and US3521120). The patent US3500118 uses a coil to wind a ferrite ring, and the ferrite ring passes through a circular lamp tube, which is filled with mercury vapor , The inner wall of the bulb is coated with fluorescent substances, and the induced magnetic field is generated by applying 100-500kHz radio frequency to the coil. Under the action of ferrite enhancement, the induced magnetic field excites the mercury plasma to emit light. The lighting electrodeless lamp described in the patent US3521120 is composed of a coil wound ferrite ring column and a hollow spherical bulb. The center space of the hollow spherical bulb is matched with the ferrite column. Mercury, the inside of the bulb is coated with a fluorescent substance. The two electrodeless lamps applied by John Anderson are the original structures of the currently popular lighting electrodeless lamps in the world. However, the practical commercial lighting electrodeless lamps were not developed by Philips until 20 years later. In 1990, Philips introduced an electromagnetic induction lighting system with a working radio frequency of 2650kHz, and its working principle is similar to that of US3500118A and US3521120. At present, the electrodeless lamp in the visible light band excited by 2650kHz radio frequency has become a mature commercial lighting product, which consists of three parts: radio frequency generator, coupler and bulb. The radio frequency generator generates a radio frequency current of 2650kHz, and the coupler is a ferrite core wound around a coil, and its function is to enhance electromagnetic induction. The bulb is generally a glass bulb, filled with a certain amount of inert buffer gas and solid amalgam, which is used to generate mercury vapor as a luminescent medium. The inside surface of the bulb is coated with a phosphor that converts ultraviolet light into visible light. Due to large-scale commercial development, the structure and performance of the RF generator and coupler of the 2650kHz RF-excited electrodeless lamp in the visible light band have been deeply optimized and innovated. Excited visible-band electrodeless lamp technology has not been used to generate vacuum ultraviolet light.
发明内容Contents of the invention
为了克服真空紫外灯现有技术上的不足，本发明提供了一种脉宽可调的脉冲真空紫外灯。该光源采用商业化照明无极灯的射频发生器和耦合器，结合金属灯泡和流动性发光介质气体，并使用固体继电器控制射频发生器，形成脉宽可调的脉冲真空紫外灯，可大大降低真空紫外光灯的成本，延缓晶体窗片透光率的下降，延长真空紫外灯的使用寿命。In order to overcome the deficiencies in the prior art of vacuum ultraviolet lamps, the present invention provides a pulsed vacuum ultraviolet lamp with adjustable pulse width. The light source adopts the radio frequency generator and coupler of the commercial lighting electrodeless lamp, combines the metal bulb and the fluid luminescent medium gas, and uses the solid state relay to control the radio frequency generator to form a pulsed vacuum ultraviolet lamp with adjustable pulse width, which can greatly reduce the vacuum The cost of the UV lamp can delay the decline of the light transmittance of the crystal window and prolong the service life of the vacuum UV lamp.
本发明专利采用的技术方案是：1、由固体继电器控制输入射频发生器的电流；2、石英灯管、金属灯泡、氟化锂或氟化镁窗片、窗片固定盖、石英灯管固定盘、石英灯管密封圈和窗片密封圈依说明书附图构成真空紫外灯的等离子放电腔；3、等离子放电腔中央是石英灯管；4、耦合器支撑杆、铁氧体磁芯和激发线圈构成的耦合器放置于石英灯管内；5、等离子放电腔的真空紫外光输出端装有一个由密封圈密封的氟化锂或氟化镁窗片；6、等离子放电腔里充有一定气压的发光介质气体；7、射频发生器产生的射频电流经导线流过缠在铁氧体磁芯上的线圈，在铁氧体磁芯的增强作用下，射频诱导磁场激发金属灯泡内的发光介质气体形成等离子体，进而产生真空紫外光；8、真空紫外光通过氟化锂或氟化镁窗片输出；9、由脉冲信号控制固体继电器的接通和断开，从而控制脉冲真空紫外光的脉宽。The technical scheme adopted by the patent of the present invention is: 1. The current input to the radio frequency generator is controlled by a solid relay; Plate, quartz lamp tube sealing ring and window sealing ring constitute the plasma discharge chamber of the vacuum ultraviolet lamp according to the drawings in the manual; 3. The center of the plasma discharge chamber is a quartz lamp tube; 4. Coupler support rod, ferrite core and excitation The coupler composed of coils is placed in the quartz lamp tube; 5. The vacuum ultraviolet light output end of the plasma discharge chamber is equipped with a lithium fluoride or magnesium fluoride window sealed by a sealing ring; 6. The plasma discharge chamber is filled with a certain 7. The radio frequency current generated by the radio frequency generator flows through the wires through the coil wound on the ferrite core, and under the enhancement of the ferrite core, the radio frequency induced magnetic field excites the luminescence in the metal bulb The medium gas forms plasma, and then generates vacuum ultraviolet light; 8. The vacuum ultraviolet light is output through the lithium fluoride or magnesium fluoride window; 9. The pulse signal controls the switching on and off of the solid relay, thereby controlling the pulse vacuum ultraviolet light the pulse width.
本发明的有益效果是：为真空紫外光应用领域提供了一种价格低廉、使用寿命长、窗片可更换以及脉宽可调的脉冲真空紫外光源。The invention has the beneficial effects of providing a pulsed vacuum ultraviolet light source with low price, long service life, replaceable windows and adjustable pulse width for the application field of vacuum ultraviolet light.
附图说明Description of drawings
图1为本发明脉宽可调的脉冲真空紫外灯的结构示意图，其中：1、固体继电器，2、导线，3、控制信号线，4、导线，5、2650kHz射频发生器，6、射频导线，7、耦合器支撑杆， 8、铁氧体磁芯，9、激发线圈，10、石英灯管，11、金属灯泡，12、等离子放电腔，13、氟化锂或氟化镁窗片，14、窗片固定盖，15、气体入口管，16、气体出口管，17、石英灯管固定盘，18、石英灯管密封圈，19、窗片密封圈。Fig. 1 is the structure schematic diagram of pulse vacuum ultraviolet lamp with adjustable pulse width of the present invention, wherein: 1, solid state relay, 2, lead wire, 3, control signal line, 4, lead wire, 5, 2650kHz radio frequency generator, 6, radio frequency lead wire , 7. Coupler support rod, 8. Ferrite core, 9. Excitation coil, 10. Quartz lamp tube, 11. Metal bulb, 12. Plasma discharge chamber, 13. Lithium fluoride or magnesium fluoride window, 14. Window sheet fixing cover, 15. Gas inlet pipe, 16. Gas outlet pipe, 17. Quartz lamp tube fixing plate, 18. Quartz lamp tube sealing ring, 19. Window sheet sealing ring.
具体实施方式Detailed ways
下面结合附图对本发明的实施例作详细说明：本实施例在以本发明技术方案为前提下进行，本发明的保护范围不限于下述的实施例。The embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings: this embodiment is carried out on the premise of the technical solution of the present invention, and the protection scope of the present invention is not limited to the following embodiments.
如图1所示，本发明所述一种脉宽可调的脉冲真空紫外灯由固体继电器、导线、信号线、2650kHz射频发生器、射频导线、耦合器支撑杆、铁氧体磁芯、激发线圈、石英灯管、金属灯泡、氟化锂或氟化镁窗片、窗片固定盖、气体入口管、气体出口管、石英灯管固定盘、石英灯管密封圈和窗片密封圈组成，其特征在于：石英灯管、金属灯泡、氟化锂或氟化镁窗片、窗片固定盖、石英灯管固定盘、石英灯管密封圈和窗片密封圈依说明书附图构成真空紫外灯的等离子放电腔，耦合器支撑杆、铁氧体磁芯和激发线圈构成的耦合器放置于等离子放电腔的中央。其使用方法为：As shown in Figure 1, a pulsed vacuum ultraviolet lamp with adjustable pulse width according to the present invention is composed of a solid state relay, a wire, a signal wire, a 2650kHz radio frequency generator, a radio frequency wire, a coupler support rod, a ferrite core, an excitation Coil, quartz lamp tube, metal bulb, lithium fluoride or magnesium fluoride window, window fixing cover, gas inlet tube, gas outlet tube, quartz tube fixing plate, quartz tube sealing ring and window sealing ring, It is characterized in that: quartz lamp tube, metal bulb, lithium fluoride or magnesium fluoride window, window fixing cover, quartz lamp tube fixing plate, quartz lamp tube sealing ring and window sealing ring form a vacuum ultraviolet lamp according to the drawings in the manual The plasma discharge chamber, the coupler consisting of the coupler support rod, the ferrite core and the exciting coil is placed in the center of the plasma discharge chamber. Its usage method is:
步骤1：固体继电器(1)通过导线(2)连接220V/110V电源插座；Step 1: Connect the solid state relay (1) to the 220V/110V power socket through the wire (2);
步骤2：控制信号线(3)给固体继电器(1)提供3-10V的电压，使固体继电器处于接通状态；Step 2: The control signal line (3) provides a voltage of 3-10V to the solid state relay (1), so that the solid state relay is in the on state;
步骤3：固体继电器(1)输出的220V/110V电流通过导线(4)给2650kHz射频发生器(5)供电；Step 3: The 220V/110V current output by the solid state relay (1) supplies power to the 2650kHz RF generator (5) through the wire (4);
步骤4：耦合器支撑杆(7)、铁氧体磁芯(8)和激发线圈(9)构成耦合器；Step 4: The coupler support rod (7), the ferrite core (8) and the exciting coil (9) constitute the coupler;
步骤5：石英灯管(10)、金属灯泡(11)、氟化锂或氟化镁窗片(13)、窗片固定盖(14)、石英灯管固定盘(17)、石英灯管密封圈(18)和窗片密封圈(19)构成等离子放电腔(12)；Step 5: Quartz lamp tube (10), metal bulb (11), lithium fluoride or magnesium fluoride window (13), window fixing cover (14), quartz lamp fixing plate (17), quartz lamp sealing Ring (18) and window sheet sealing ring (19) constitute plasma discharge chamber (12);
步骤6：发光介质气体经气体入口管(15)流入等离子放电腔，再经气体出口管(16)流出，在等离子放电腔里形成约30-300Pa的气压；Step 6: The luminescent medium gas flows into the plasma discharge chamber through the gas inlet pipe (15), and then flows out through the gas outlet pipe (16), forming an air pressure of about 30-300Pa in the plasma discharge chamber;
步骤7：2650kHz射频发生器(5)输出的射频电流经射频导线(6)流向耦合器；Step 7: The RF current output by the 2650kHz RF generator (5) flows to the coupler through the RF wire (6);
步骤8：流经耦合器的射频电流产生诱导磁场，激发发光介质气体，在等离子放电腔(12)内产生等离子体；Step 8: The radio frequency current flowing through the coupler generates an induced magnetic field, excites the luminescent medium gas, and generates plasma in the plasma discharge chamber (12);
步骤9：等离子放电腔(12)内等离子体产生的真空紫外光经氟化锂或氟化镁窗片(13)输出；Step 9: the vacuum ultraviolet light generated by the plasma in the plasma discharge chamber (12) is output through the lithium fluoride or magnesium fluoride window (13);
步骤10：当控制发光时间的3-10V的电压降到0V时，固体继电器(1)变换为断开状态，真空紫外光输出停止。Step 10: When the voltage of 3-10V that controls the luminescence time drops to 0V, the solid state relay (1) is switched to an off state, and the output of vacuum ultraviolet light is stopped.

Claims (5)

  1. 脉宽可调的脉冲真空紫外灯由固体继电器、导线、信号线、2650kHz射频发生器、射频导线、耦合器支撑杆、铁氧体磁芯、激发线圈、石英灯管、金属灯泡、氟化锂或氟化镁窗片、窗片固定盖、气体入口管、气体出口管、石英灯管固定盘、石英灯管密封圈和窗片密封圈组成，其特征在于：石英灯管、金属灯泡、氟化锂或氟化镁窗片、窗片固定盖、石英灯管固定盘、石英灯管密封圈和窗片密封圈依说明书附图构成真空紫外灯的等离子放电腔，耦合器支撑杆、铁氧体磁芯和激发线圈构成的耦合器放置于等离子放电腔的中央。The pulse width adjustable pulsed vacuum ultraviolet lamp is composed of solid state relay, wire, signal wire, 2650kHz RF generator, RF wire, coupler support rod, ferrite core, excitation coil, quartz lamp, metal bulb, lithium fluoride Or magnesium fluoride window, window fixing cover, gas inlet pipe, gas outlet pipe, quartz lamp tube fixing plate, quartz lamp tube sealing ring and window sealing ring, characterized in that: quartz lamp tube, metal bulb, fluorine The lithium or magnesium fluoride window, the window fixing cover, the quartz lamp tube fixing plate, the quartz lamp tube sealing ring and the window sealing ring constitute the plasma discharge chamber of the vacuum ultraviolet lamp according to the drawings in the manual, the coupler support rod, the ferrite oxide A coupler consisting of a body magnetic core and an exciting coil is placed in the center of the plasma discharge chamber.
  2. 根据权利要求1所述的脉宽可调的脉冲真空紫外灯，其特征在于：2650kHz射频发生器及耦合器是商业化照明无极灯的2650kHz射频发生器和耦合器。The pulsed vacuum ultraviolet lamp with adjustable pulse width according to claim 1, characterized in that the 2650kHz radio frequency generator and the coupler are the 2650kHz radio frequency generator and the coupler of the commercial lighting electrodeless lamp.
  3. 根据权利要求1所述的脉宽可调的脉冲真空紫外灯，其特征在于：2650kHz射频发生器经固体继电器连接220V/110V电源插座，接通的时间由一个3-10V的脉冲电压控制。The pulsed vacuum ultraviolet lamp with adjustable pulse width according to claim 1, characterized in that: the 2650kHz radio frequency generator is connected to a 220V/110V power socket through a solid state relay, and the switching time is controlled by a 3-10V pulse voltage.
  4. 根据权利要求1所述的脉宽可调的脉冲真空紫外灯，其特征在于：透射真空紫外光的氟化锂或氟化镁窗片是可以更换的。The pulsed vacuum ultraviolet lamp with adjustable pulse width according to claim 1, characterized in that: the lithium fluoride or magnesium fluoride window that transmits vacuum ultraviolet light is replaceable.
  5. 根据权利要求1所述的脉宽可调的脉冲真空紫外灯，其特征在于：等离子放电腔内充有30-300Pa的流动性发光介质气体，所述气体选自氢气、氩气、氪气、氙气中一种或多种，或选自氢气、氩气、氪气、氙气中一种或多种与氦气的混合气体。The pulsed vacuum ultraviolet lamp with adjustable pulse width according to claim 1, characterized in that: the plasma discharge cavity is filled with a fluid luminescent medium gas of 30-300Pa, and the gas is selected from hydrogen, argon, krypton, One or more of xenon, or a mixture of one or more of hydrogen, argon, krypton, xenon and helium.
PCT/CN2022/093726 2022-04-07 2022-05-19 Pulsed vacuum ultraviolet lamp with adjustable pulse width WO2023060895A1 (en)

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JPH08190899A (en) * 1995-01-13 1996-07-23 Hitachi Ltd Electrodeless fluorescent lamp
CN101567297A (en) * 2008-04-25 2009-10-28 中国科学院生态环境研究中心 High-flux electrodeless vacuum ultraviolet light source
CN102737953A (en) * 2011-04-08 2012-10-17 高永生 High-frequency electrodeless lamp
CN106941073A (en) * 2017-03-10 2017-07-11 中国人民解放军装备学院 A kind of coaxial gas electric discharge vacuum-ultraviolet light source device
CN112635294A (en) * 2020-12-22 2021-04-09 中国科学技术大学 Ultra-high brightness vacuum ultraviolet lamp
CN114220728A (en) * 2021-11-12 2022-03-22 中国人民解放军战略支援部队航天工程大学 Inert gas discharge vacuum ultraviolet light source

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08190899A (en) * 1995-01-13 1996-07-23 Hitachi Ltd Electrodeless fluorescent lamp
CN101567297A (en) * 2008-04-25 2009-10-28 中国科学院生态环境研究中心 High-flux electrodeless vacuum ultraviolet light source
CN102737953A (en) * 2011-04-08 2012-10-17 高永生 High-frequency electrodeless lamp
CN106941073A (en) * 2017-03-10 2017-07-11 中国人民解放军装备学院 A kind of coaxial gas electric discharge vacuum-ultraviolet light source device
CN112635294A (en) * 2020-12-22 2021-04-09 中国科学技术大学 Ultra-high brightness vacuum ultraviolet lamp
CN114220728A (en) * 2021-11-12 2022-03-22 中国人民解放军战略支援部队航天工程大学 Inert gas discharge vacuum ultraviolet light source

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