LU504110B1 - Pulsed vacuum ultraviolet lamp with adjustable pulse width - Google Patents
Pulsed vacuum ultraviolet lamp with adjustable pulse width Download PDFInfo
- Publication number
- LU504110B1 LU504110B1 LU504110A LU504110A LU504110B1 LU 504110 B1 LU504110 B1 LU 504110B1 LU 504110 A LU504110 A LU 504110A LU 504110 A LU504110 A LU 504110A LU 504110 B1 LU504110 B1 LU 504110B1
- Authority
- LU
- Luxembourg
- Prior art keywords
- vacuum ultraviolet
- radio frequency
- window piece
- coupler
- pulse width
- Prior art date
Links
- PQXKHYXIUOZZFA-UHFFFAOYSA-M lithium fluoride Chemical compound [Li+].[F-] PQXKHYXIUOZZFA-UHFFFAOYSA-M 0.000 claims abstract description 28
- 239000010453 quartz Substances 0.000 claims abstract description 23
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 23
- 239000007787 solid Substances 0.000 claims abstract description 17
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 claims abstract description 14
- 229910001635 magnesium fluoride Inorganic materials 0.000 claims abstract description 14
- 229910000859 α-Fe Inorganic materials 0.000 claims abstract description 14
- 238000007789 sealing Methods 0.000 claims abstract description 13
- 229910052751 metal Inorganic materials 0.000 claims abstract description 12
- 239000002184 metal Substances 0.000 claims abstract description 12
- 230000005284 excitation Effects 0.000 claims abstract description 7
- 239000007789 gas Substances 0.000 claims description 21
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 8
- 229910052786 argon Inorganic materials 0.000 claims description 4
- 239000001257 hydrogen Substances 0.000 claims description 3
- 229910052739 hydrogen Inorganic materials 0.000 claims description 3
- 229910052743 krypton Inorganic materials 0.000 claims description 3
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052724 xenon Inorganic materials 0.000 claims description 3
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims 2
- 239000001307 helium Substances 0.000 claims 1
- 229910052734 helium Inorganic materials 0.000 claims 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 6
- 239000013078 crystal Substances 0.000 description 4
- 229910052753 mercury Inorganic materials 0.000 description 4
- 230000005674 electromagnetic induction Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- 238000010364 biochemical engineering Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000001939 inductive effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000005283 ground state Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/048—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using an excitation coil
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/30—Vessels; Containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/30—Vessels; Containers
- H01J61/302—Vessels; Containers characterised by the material of the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/36—Seals between parts of vessels; Seals for leading-in conductors; Leading-in conductors
- H01J61/366—Seals for leading-in conductors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B20/00—Energy efficient lighting technologies, e.g. halogen lamps or gas discharge lamps
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Discharge Lamps And Accessories Thereof (AREA)
- Circuit Arrangements For Discharge Lamps (AREA)
Abstract
A pulsed vacuum ultraviolet lamp with adjustable pulse width comprises a solid relay, a 2650 kHz radio frequency signal generator, a coupler and a plasma discharge chamber. The plasma discharge chamber comprises a quartz lamp tube, a metal bulb, a lithium fluoride or magnesium fluoride window piece, a window piece fixing cover, a quartz lamp tube fixing disc, a quartz lamp tube sealing ring and a window piece sealing ring. The coupler comprises a coupler supporting rod, a ferrite core and an excitation coil. The quartz lamp tube is arranged in a centre of the plasma discharge chamber, the coupler is arranged in the quartz lamp tube, and an output end of the vacuum ultraviolet light of the plasma discharge chamber is provided with the lithium fluoride or magnesium fluoride window piece. The 2650 kHz radio frequency signal generator is connected with a 220V/110V power socket through the solid relay, and the operating state of the solid relay is controlled by a 3 - 10V pulse voltage. Radio frequency current generated by the radio frequency signal generator flows through the coupler, excites light-emitting gas medium in the plasma discharge chamber, and forms plasma to generate the vacuum ultraviolet light. The generated vacuum ultraviolet light is outputted through the lithium fluoride or magnesium fluoride window piece. The pulse width of pulsed vacuum ultraviolet light is determined by the pulse width of the 3 - 10V pulse voltage which controls the solid relay, to form the pulsed vacuum ultraviolet light with adjustable pulse width.
Description
PULSED VACUUM ULTRAVIOLET LAMP WITH ADJUSTABLE PULSE WIDTH
LU504110
The present disclosure relates to a pulsed vacuum ultraviolet lamp with adjustable pulse width, which can be used as a vacuum ultraviolet light source used in the fields of analytical instruments, basic scientific research, biochemical engineering and electronic manufacturing, and belongs to the technical field of electronics.
A vacuum ultraviolet lamp is a device which can emit vacuum ultraviolet light with wavelength of 100 - 200 nm, and is widely used in the fields of analytical instruments, basic scientific research, biochemical engineering and electronic manufacturing. The vacuum ultraviolet lamp generally excites gas discharge through DC discharge, radio-frequency magnetic induced discharge, microwave discharge and pulse discharge to produce plasma, and then excites neutral gas atoms by electron collision in plasma to produce excited atoms or excimers. When the excited atoms or excimers spontaneously transition to a ground state, vacuum ultraviolet light is radiated. The main light-emitting gas medium includes hydrogen (121.6 nm), krypton (123.9 nm/-146 nm), argon (105.9 nm/-126 nm) and xenon (147.6 nm/-172 nm). The traditional small vacuum ultraviolet lamps mainly use DC discharge and radio frequency magnetic induced discharge. The vacuum ultraviolet lamp of DC discharge uses the
DC discharge between two electrodes to excite the light-emitting gas medium. Such vacuum ultraviolet lamp reduces the transmittance because the metal atoms sputtered by the metal electrodes are deposited on the surface of a crystal window piece, thereby reducing the service life of the vacuum ultraviolet lamp. The vacuum ultraviolet lamp of radio frequency magnetic induced discharge, also known as an electrodeless vacuum ultraviolet lamp, has the core structure of a glass or quartz bulb encapsulated with light-emitting gas medium and a coil wrapped outside. The vacuum ultraviolet light produced in the bulb is outputted by a crystal window piece (such as magnesium fluoride or lithium fluoride window piece) capable of transmitting vacuum ultraviolet light. An excitation power supply is a radio frequency power supply. When the radio frequency current flows through the coil, an induced magnetic field is generated and excites the light-emitting gas medium in the bulb to produce plasma, so as to produce vacuum ultraviolet light. Because there is no metal electrode in the bulb of the vacuum ultraviolet lamp of radio frequency magnetic induced discharge, there is no deposition of metal vapor on the inner surface of the window piece that outputs the vacuum ultraviolet light and the service life of the window piece is long. The frequency of radio frequency is generally 13.56MHz or higher, and lower radio frequency is difficult to glow at low voltage. Because the traditional vacuum ultraviolet lamps are not easy to glow, they generally work continuously and continue to radiate the vacuum ultraviolet light. However, because the transmittance of the crystal window piece under the irradiation of the vacuum ultraviolet light may be gradually LU504110 degraded, the luminous flux outputted by the vacuum ultraviolet lamp is gradually reduced and the service life of vacuum ultraviolet lamp is affected to some extent. The magnesium fluoride window piece generally has service life of thousands of hours, and the lithium fluoride window piece has service life of tens of hours only.
In 1882, Philip Diehl obtained a U.S. patent for an inductive incandescent lamp (US255497A), which used electromagnetic induction to transfer energy through a coil outside a bulb to another coil sealed inside the bulb, thereby solving the problem of air leakage of bulb electrodes, and was a prototype of an electrodeless lamp. In 1967 and 1968, John Anderson of
General Electric Company filed patents for illuminating electrodeless lamps (US3500118A and
US3521120A). The patent US3500118 used a coil-wrapped ferrite ring; an annular lamp tube penetrates through the ferrite ring; the lamp tube is filled with mercury vapor; the inner wall of the bulb is coated with fluorescent substances; radio frequency of 100-500 kHz is applied to the coil for generating an induced magnetic field; and under the enhancement action of ferrite, the induced magnetic field excites the mercury plasma to glow. The illuminating electrodeless lamp described in the patent US3521120A comprises a coil-wrapped ferrite ring column and a hollow spherical bulb. The central space size of the hollow spherical bulb is matched with a ferrite column. The bulb is filled with 2-4 Torr of argon and 40-50 mg of mercury, and the inner wall of the bulb is coated with fluorescent substances. Two electrodeless lamps filed by John
Anderson were the original structures of the current internationally popular illuminating electrodeless lamps. However, the practical commercial illuminating electrodeless lamps were developed by Philips company after 20 years. In 1990, Philips company introduced an electromagnetic induction illuminating system with operating radio frequency of 2650 kHz, and its operating principle was similar to that of the US3500118A and US3521120A. At present, the 2650 kHz radio frequency excited electrodeless lamps in visible band has become a mature commercial illuminating product which comprises a radio frequency signal generator, a coupler and a bulb. The radio frequency signal generator generates 2650 kHz radio frequency current.
The coupler is a coil-wrapped ferrite core, and has the function of enhancing the electromagnetic induction effect. The bulb is generally a glass bulb filled with certain inert buffer gas and solid mercury, and the solid mercury is used for producing mercury vapor as a light- emitting medium. The inner surface of the bulb is coated with a layer of fluorescent substance used for converting the ultraviolet light into visible light. Due to large-scale commercial development, the structure and the performance of the radio frequency signal generator and the coupler of the 2650 kHz radio frequency excited electrodeless lamp in visible band have been deeply optimized and innovated, and have the instantaneous glowing function, and the cost of accessories has been greatly reduced. However, currently, the 2650 kHz radio frequency excited electrodeless lamp technology in visible band has not been used for generating vacuum ultraviolet light.
SUMMARY OF PRESENT INVENTION LU504110
In order to overcome the shortcomings of the vacuum ultraviolet light in the prior art, the present disclosure provides a pulsed vacuum ultraviolet lamp with adjustable pulse width. The light source uses a radio frequency signal generator and a coupler of a commercial illuminating electrodeless lamp, is combined with a metal bulb and liquid light-emitting gas medium, and uses a solid relay to control the radio frequency signal generator to form the pulsed vacuum ultraviolet lamp with adjustable pulse width, which can greatly reduce the cost of the vacuum ultraviolet lamp, delay the reduction of transmittance of the crystal window piece, and prolong the service life of the vacuum ultraviolet lamp.
The technical solution adopted by the patent of the present disclosure is: 1. the current inputted to the radio frequency signal generator is controlled by the solid relay; 2. a quartz lamp tube, a metal bulb, a lithium fluoride or magnesium fluoride window piece, a window piece fixing cover, a quartz lamp tube fixing disc, a quartz lamp tube sealing ring and a window piece sealing ring constitute a plasma discharge chamber of the vacuum ultraviolet lamp according to the drawings; 3. the quartz lamp tube is in the centre of the plasma discharge chamber; 4. the coupler comprises a coupler supporting rod, a ferrite core and an excitation coil is placed in the quartz lamp tube; 5. the output end of the vacuum ultraviolet light of the plasma discharge chamber is provided with a lithium fluoride or magnesium fluoride window piece sealed by a sealing ring; 6. the plasma discharge chamber is filled with light-emitting gas medium with certain pressure; 7. the radio frequency current generated by the radio frequency signal generator flows through the coil wrapped on the ferrite core by a wire; and under the enhancement action of the ferrite core, a radio frequency inductive magnetic field excites the light-emitting gas medium in the metal bulb, to form plasma, so as to generate the vacuum ultraviolet light; 8. the vacuum ultraviolet light is outputted through the lithium fluoride or magnesium fluoride window piece; 9. a pulse signal controls the switching on and off of the solid relay, so as to control the pulse width of the pulsed vacuum ultraviolet light.
The present disclosure has the beneficial effect of providing a pulsed vacuum ultraviolet light source with low price, long service life, replaceable window piece and adjustable pulse width for the application field of the vacuum ultraviolet light.
Fig. 1 is a structural schematic diagram of a pulsed vacuum ultraviolet lamp with adjustable pulse width according to the present disclosure, wherein: 1. solid relay, 2. wire, 3. control signal line, 4. wire, 5. 2650 kHz radio frequency signal generator, 6. radio frequency cable, 7. coupler supporting rod, 8. ferrite core, 9. excitation coil, 10. quartz lamp tube, 11. metal bulb, 12. plasma discharge chamber, 13. lithium fluoride or magnesium fluoride window piece, 14. window piece fixing cover, 15. gas inlet pipe, 16. gas outlet pipe, 17. quartz lamp tube fixing disc, 18. quartz lamp tube sealing ring, 19. window piece sealing ring.
DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS LU504110
Embodiments of the present disclosure are described in detail below in combination with the drawings. The embodiments are implemented on the premise of the technical solution of the present disclosure, and the protection scope of the present disclosure is not limited to the following embodiments.
As shown in Fig.1, in a pulsed vacuum ultraviolet lamp,
A solid relay 1 is connected with a 220V/110V power socket through a wire 2; 3 - 10 V voltage is provided for the solid relay 1 by a control signal line 3, so that the solid relay is in on state;
The 2650 kHz radio frequency signal generator 5 is powered by 220V/110V current outputted by the solid relay 1 through a wire 4;
A coupler supporting rod 7, a ferrite core 8 and an excitation coil 9 form a coupler;
A quartz lamp tube 10, a metal bulb 11, a lithium fluoride or magnesium fluoride window piece 13, a window piece fixing cover 14, a quartz lamp tube fixing disc 17, a quartz lamp tube sealing ring 18 and a window piece sealing ring 19 form a plasma discharge chamber 12;
Light-emitting gas medium flows into the plasma discharge chamber through a gas inlet pipe 15, and then flows out through a gas outlet pipe 16, to form pressure of about 30-300 Pa in the plasma discharge chamber,
Radio frequency current outputted by the 2650 kHz radio frequency signal generator 5 flows to the coupler through a radio frequency cable 6;
An induced magnetic field is generated by the radio frequency current which flows through the coupler, exciting the light-emitting gas medium to generate plasma in the plasma discharge chamber 12;
Vacuum ultraviolet light generated by the plasma in the plasma discharge chamber 12 is outputted through the lithium fluoride or magnesium fluoride window piece 13;
The solid relay 1 is switched to an off state and stops the output of the vacuum ultraviolet light when 3 - 10V voltage for controlling light-emitting time is reduced to 0 V.
Claims (5)
1. A pulsed vacuum ultraviolet lamp with adjustable pulse width, comprising a solid relay, a 5 wire, a signal line, a 2650 kHz radio frequency signal generator, a radio frequency cable, a coupler supporting rod, a ferrite core, an excitation coil, a quartz lamp tube, a metal bulb, a lithium fluoride or magnesium fluoride window piece, a window piece fixing cover, a gas inlet pipe, a gas outlet pipe, a quartz lamp tube fixing disc, a quartz lamp tube sealing ring and a window piece sealing ring, wherein the quartz lamp tube, the metal bulb, the lithium fluoride or magnesium fluoride window piece, the window piece fixing cover, the quartz lamp tube fixing disc, the quartz lamp tube sealing ring and the window piece sealing ring constitute a plasma discharge chamber of the vacuum ultraviolet lamp, and the coupler supporting rod, the ferrite core and the excitation coil constitute a coupler and are placed in a centre of the plasma discharge chamber.
2. The pulsed vacuum ultraviolet lamp with adjustable pulse width according to claim 1, wherein the 2650 kHz radio frequency signal generator and the coupler are a 2650 kHz radio frequency signal generator and a coupler of a commercial illuminating electrodeless lamp respectively.
3. The pulsed vacuum ultraviolet lamp with adjustable pulse width according to claim 1, wherein the 2650 kHz radio frequency signal generator is connected with a 220V/110V power socket through the solid relay, and a time of connection is controlled by a 3-10V pulse voltage.
4. The pulsed vacuum ultraviolet lamp with adjustable pulse width according to claim 1, wherein the lithium fluoride or magnesium fluoride window piece capable of transmitting vacuum ultraviolet light is replaceable.
5. The pulsed vacuum ultraviolet lamp with adjustable pulse width according to claim 1, wherein the plasma discharge chamber is filled with liquid light-emitting gas medium of 30 - 300 Pa, and the gas is selected from one or more of hydrogen, argon, krypton and xenon, or selected from mixed gas of one or more of hydrogen, argon, krypton and xenon with helium.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210357596.5A CN116936337A (en) | 2022-04-07 | 2022-04-07 | Pulse vacuum ultraviolet lamp with adjustable pulse width |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| LU504110B1 true LU504110B1 (en) | 2023-07-03 |
Family
ID=85987258
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| LU504110A LU504110B1 (en) | 2022-04-07 | 2022-05-19 | Pulsed vacuum ultraviolet lamp with adjustable pulse width |
Country Status (3)
| Country | Link |
|---|---|
| CN (1) | CN116936337A (en) |
| LU (1) | LU504110B1 (en) |
| WO (1) | WO2023060895A1 (en) |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08190899A (en) * | 1995-01-13 | 1996-07-23 | Hitachi Ltd | Electrodeless fluorescent lamp |
| CN101567297A (en) * | 2008-04-25 | 2009-10-28 | 中国科学院生态环境研究中心 | High-flux electrodeless vacuum ultraviolet light source |
| CN102737953B (en) * | 2011-04-08 | 2016-03-02 | 高永生 | A kind of HF lamp without electrodes |
| CN106941073B (en) * | 2017-03-10 | 2018-11-13 | 中国人民解放军战略支援部队航天工程大学 | A kind of coaxial gas electric discharge vacuum-ultraviolet light source device |
| CN112635294B (en) * | 2020-12-22 | 2022-04-19 | 中国科学技术大学 | Ultra-high brightness vacuum ultraviolet lamp |
| CN114220728B (en) * | 2021-11-12 | 2023-09-12 | 中国人民解放军战略支援部队航天工程大学 | Inert gas discharge vacuum ultraviolet light source |
-
2022
- 2022-04-07 CN CN202210357596.5A patent/CN116936337A/en active Pending
- 2022-05-19 WO PCT/CN2022/093726 patent/WO2023060895A1/en unknown
- 2022-05-19 LU LU504110A patent/LU504110B1/en active IP Right Grant
Also Published As
| Publication number | Publication date |
|---|---|
| WO2023060895A8 (en) | 2023-11-09 |
| WO2023060895A9 (en) | 2023-06-08 |
| CN116936337A (en) | 2023-10-24 |
| WO2023060895A1 (en) | 2023-04-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FG | Patent granted |
Effective date: 20230703 |