CN116936337A - Pulse vacuum ultraviolet lamp with adjustable pulse width - Google Patents
Pulse vacuum ultraviolet lamp with adjustable pulse width Download PDFInfo
- Publication number
- CN116936337A CN116936337A CN202210357596.5A CN202210357596A CN116936337A CN 116936337 A CN116936337 A CN 116936337A CN 202210357596 A CN202210357596 A CN 202210357596A CN 116936337 A CN116936337 A CN 116936337A
- Authority
- CN
- China
- Prior art keywords
- vacuum ultraviolet
- coupler
- radio frequency
- lamp tube
- pulse width
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- PQXKHYXIUOZZFA-UHFFFAOYSA-M lithium fluoride Chemical compound [Li+].[F-] PQXKHYXIUOZZFA-UHFFFAOYSA-M 0.000 claims abstract description 28
- 239000010453 quartz Substances 0.000 claims abstract description 24
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 24
- 239000007787 solid Substances 0.000 claims abstract description 16
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 claims abstract description 14
- 229910001635 magnesium fluoride Inorganic materials 0.000 claims abstract description 14
- 229910000859 α-Fe Inorganic materials 0.000 claims abstract description 14
- 238000007789 sealing Methods 0.000 claims abstract description 13
- 229910052751 metal Inorganic materials 0.000 claims abstract description 12
- 239000002184 metal Substances 0.000 claims abstract description 12
- 230000005284 excitation Effects 0.000 claims abstract description 7
- 239000007789 gas Substances 0.000 claims description 21
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 230000009969 flowable effect Effects 0.000 claims description 2
- 239000001257 hydrogen Substances 0.000 claims description 2
- 229910052739 hydrogen Inorganic materials 0.000 claims description 2
- 229910052743 krypton Inorganic materials 0.000 claims description 2
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052724 xenon Inorganic materials 0.000 claims description 2
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 claims description 2
- 239000001307 helium Substances 0.000 claims 1
- 229910052734 helium Inorganic materials 0.000 claims 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- 230000006698 induction Effects 0.000 description 6
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 5
- 239000013078 crystal Substances 0.000 description 4
- 230000005674 electromagnetic induction Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- 238000010364 biochemical engineering Methods 0.000 description 2
- 230000005281 excited state Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000005283 ground state Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/30—Vessels; Containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/048—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using an excitation coil
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/30—Vessels; Containers
- H01J61/302—Vessels; Containers characterised by the material of the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/36—Seals between parts of vessels; Seals for leading-in conductors; Leading-in conductors
- H01J61/366—Seals for leading-in conductors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B20/00—Energy efficient lighting technologies, e.g. halogen lamps or gas discharge lamps
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Discharge Lamps And Accessories Thereof (AREA)
- Circuit Arrangements For Discharge Lamps (AREA)
Abstract
The invention relates to a pulse vacuum ultraviolet lamp with adjustable pulse width, which consists of a solid relay, a 2650 kHz radio frequency generator, a coupler and a plasma discharge cavity. The plasma discharge cavity is composed of a quartz lamp tube, a metal bulb, a lithium fluoride or magnesium fluoride window sheet, a window sheet fixing cover, a quartz lamp tube fixing disc, a quartz lamp tube sealing ring and a window sheet sealing ring. The coupler is composed of a coupler support rod, a ferrite core and an excitation coil. The center of the plasma discharge cavity is a quartz lamp tube, a coupler is arranged in the quartz lamp tube, and a vacuum ultraviolet light output end of the plasma discharge cavity is provided with a lithium fluoride or magnesium fluoride window sheet. 2650 The kHz radio frequency generator is connected with a 220V/110V power socket through a solid relay, and the working state of the solid relay is controlled by a pulse voltage of 3 ‒ 10V. The radio frequency current generated by the radio frequency generator flows through the coupler to excite the luminous medium gas in the plasma discharge cavity to form plasma, so that vacuum ultraviolet light is generated. The generated vacuum ultraviolet light is output through a lithium fluoride or magnesium fluoride window sheet. The pulse width of the pulse vacuum ultraviolet light is determined by the pulse width of the pulse voltage of 3 ‒ 10V of the control solid state relay, so that the pulse width-adjustable pulse vacuum ultraviolet light is formed.
Description
Technical Field
The invention relates to a pulse vacuum ultraviolet lamp with adjustable pulse width, which can be used as a vacuum ultraviolet light source in the fields of analytical instruments, basic scientific research, biochemical engineering, electronic manufacturing and the like, and belongs to the technical field of electronics.
Background
The vacuum ultraviolet lamp is a device capable of emitting vacuum ultraviolet light with the wavelength of 100 ‒ and 200 nm, and has wide application in the fields of analytical instruments, basic scientific research, biochemical engineering, electronic manufacturing and the like. The vacuum ultraviolet lamp generally uses direct current discharge, radio frequency magnetic induction discharge, microwave discharge, pulse discharge and other modes to excite gas discharge to generate plasma, then electrons in the plasma collide to excite neutral gas atoms to generate excited state atoms or excimer molecules, and the excited state atoms or excimer molecules radiate vacuum ultraviolet light when spontaneously transiting to a ground state. The main luminescent medium gases are hydrogen (121.6 nm), krypton (123.9 nm/-146 nm), argon (105.9 nm/-126 nm) and xenon (147.6 nm/-172 nm). The traditional small vacuum ultraviolet lamps are mostly in direct current discharge and radio frequency magnetic induction discharge modes. The direct current discharge vacuum ultraviolet lamp excites luminous medium gas by using direct current discharge between the two electrodes, and the transmittance of the vacuum ultraviolet lamp is reduced due to the fact that metal atoms sputtered by the metal electrodes are deposited on the surface of the crystal window, so that the service life of the vacuum ultraviolet lamp is shortened. The RF magnetic induction discharge vacuum ultraviolet lamp is also called an electrodeless vacuum ultraviolet lamp, and the core structure of the RF magnetic induction discharge vacuum ultraviolet lamp is a glass or quartz bulb sealed with luminous medium gas and a coil wound outside the glass or quartz bulb. The vacuum ultraviolet light generated in the bulb is output by a crystal window (such as magnesium fluoride or lithium fluoride window) that is transparent to the vacuum ultraviolet light. The excitation power supply is a radio frequency power supply, and when radio frequency current flows through the coil, an induced magnetic field is generated, and the induced magnetic field excites luminous medium gas in the bulb to generate plasma so as to generate vacuum ultraviolet light. The RF magnetic induction discharge vacuum ultraviolet lamp has no metal electrode in the bulb, so that the inner surface of the window sheet outputting vacuum ultraviolet light has no deposition of metal vapor, and the window sheet has long service life. The frequency of the radio frequency is typically 13.56MHz or higher, and lower radio frequencies are difficult to ignite at low voltages. Because the traditional vacuum ultraviolet lamp is difficult to start, the vacuum ultraviolet lamp is generally continuously operated and continuously radiates vacuum ultraviolet light, however, the transmittance of the crystal window sheet is gradually degraded under the irradiation of the vacuum ultraviolet light, so that the luminous flux output by the vacuum ultraviolet lamp is gradually reduced, and the service life of the vacuum ultraviolet lamp is affected to a certain extent. The lifetime of magnesium fluoride window is typically thousands of hours, whereas the lifetime of lithium fluoride window is only tens of hours.
Philip Diehl in 1882 has obtained U.S. patent (US 255497) for an induction incandescent lamp which uses electromagnetic induction to transfer energy through a coil outside one bulb to another coil sealed inside the bulb, thereby overcoming the problem of leakage of the bulb electrodes, and is the prototype of the electrodeless lamp. General electric John Anderson in 1967 and 1968 applied for lighting electrodeless lamps (US 3500118 and US 3521120), patent US3500118 applied for lighting electrodeless lamps using a coil wound around a ferrite ring, a ring-shaped lamp tube passing through the ferrite ring, mercury vapor filled in the lamp tube, fluorescent substances coated on the inner wall of the lamp tube, and induced magnetic field generated by applying a radio frequency of 100 ‒ kHz to the coil, wherein the induced magnetic field excites plasma luminescence of mercury under the action of ferrite enhancement. The lighting electrodeless lamp described in patent US3521120 consists of a coil wound ferrite annular column and a hollow spherical bulb, the central space of which is matched with the ferrite column, the bulb is filled with argon gas of 2 ‒ Torr and mercury of 40 ‒ 50 mg, and the inner wall of the bulb is coated with fluorescent substances. The two electrodeless lamps of John Anderson are the original structures of the currently internationally popular lighting electrodeless lamps, however, practical commercial lighting electrodeless lamps were not developed by Philips company until 20 years later. In 1990 Philips corporation introduced an electromagnetic induction lighting system operating at a radio frequency of 2650 kHz, the principle of operation being similar to US3500118A and US 3521120. Currently 2650 kHz radio-frequency excited visible light wave band electrodeless lamp is a mature commercial lighting product, and consists of a radio-frequency generator, a coupler and a bulb. The rf generator generates a 2650 kHz rf current and the coupler is a ferrite core wound around a coil whose function is to enhance electromagnetic induction. The bulb is typically a glass bulb, which is internally filled with a certain amount of inert buffer gas and a solid mercury agent for generating the luminescent medium mercury vapor. The inner surface of the bulb is coated with a layer of fluorescent material for converting ultraviolet light into visible light. Because of large-scale commercial development, the structure and the performance of a radio frequency generator and a coupler of a 2650 kHz radio frequency excited visible light wave band electrodeless lamp are deeply optimized and innovated, the device has an instantaneous starting function, and the cost of accessories is also greatly reduced, but the current 2650 kHz radio frequency excited visible light wave band electrodeless lamp technology is not used for generating vacuum ultraviolet light.
Disclosure of Invention
In order to overcome the defects of the prior art of the vacuum ultraviolet lamp, the invention provides the pulse vacuum ultraviolet lamp with adjustable pulse width. The light source adopts a radio frequency generator and a coupler of a commercial illumination electrodeless lamp, combines a metal bulb and a flowable luminous medium gas, and uses a solid relay to control the radio frequency generator to form a pulse vacuum ultraviolet lamp with adjustable pulse width, thereby greatly reducing the cost of the vacuum ultraviolet lamp, delaying the decrease of the light transmittance of a crystal window and prolonging the service life of the vacuum ultraviolet lamp.
The technical scheme adopted by the invention is as follows: 1. controlling the current input into the radio frequency generator by the solid relay; 2. the quartz lamp tube, the metal lamp bulb, the lithium fluoride or magnesium fluoride window sheet, the window sheet fixing cover, the quartz lamp tube fixing disc, the quartz lamp tube sealing ring and the window sheet sealing ring form a plasma discharge cavity of the vacuum ultraviolet lamp according to the attached drawing of the specification; 3. the center of the plasma discharge cavity is provided with a quartz lamp tube; 4. the coupler composed of the coupler support rod, the ferrite core and the excitation coil is arranged in the quartz lamp tube; 5. the vacuum ultraviolet light output end of the plasma discharge cavity is provided with a lithium fluoride or magnesium fluoride window sheet sealed by a sealing ring; 6. the plasma discharge cavity is filled with luminous medium gas with certain air pressure; 7. the radio frequency current generated by the radio frequency generator flows through a coil wound on the ferrite magnetic core through a wire, and under the enhancement effect of the ferrite magnetic core, the radio frequency induced magnetic field excites luminous medium gas in the metal bulb to form plasma, so that vacuum ultraviolet light is generated; 8. the vacuum ultraviolet light is output through a lithium fluoride or magnesium fluoride window sheet; 9. the on and off of the solid relay is controlled by the pulse signal, so that the pulse width of the pulse vacuum ultraviolet light is controlled.
The beneficial effects of the invention are as follows: provides a pulse vacuum ultraviolet light source with low price, long service life, replaceable window sheets and adjustable pulse width for the application field of vacuum ultraviolet light.
Drawings
The attached drawing is a schematic structural diagram of the pulse vacuum ultraviolet lamp with adjustable pulse width, wherein: 1. solid relay, 2, wire, 3, control signal line, 4, wire, 5, 2650 kHz radio frequency generator, 6, radio frequency wire, 7, coupler support bar, 8, ferrite core, 9, excitation coil, 10, quartz lamp tube, 11, metal bulb, 12, plasma discharge cavity, 13, lithium fluoride or magnesium fluoride window, 14, window fixed cover, 15, gas inlet pipe, 16, gas outlet pipe, 17, quartz lamp tube fixed disk, 18, quartz lamp tube sealing ring, 19, window sealing ring.
Detailed Description
Embodiments of the present invention will be described in detail below with reference to the attached drawings: the present embodiment is performed on the premise of the technical solution of the present invention, and the protection scope of the present invention is not limited to the following embodiments.
Step 1: the solid relay (1) is connected with a 220V/110V power socket through a lead (2);
step 2: the control signal line (3) provides 3 ‒ and 10V voltage for the solid state relay (1) to enable the solid state relay to be in an on state;
step 3: 220V/110V current output by the solid relay (1) supplies power to a 2650 kHz radio frequency generator (5) through a lead (4);
step 4: the coupler support rod (7), the ferrite core (8) and the excitation coil (9) form a coupler;
step 5: the plasma discharge cavity (12) is formed by a quartz lamp tube (10), a metal lamp bulb (11), lithium fluoride or magnesium fluoride window sheets (13), a window sheet fixing cover (14), a quartz lamp tube fixing disc (17), a quartz lamp tube sealing ring (18) and a window sheet sealing ring (19);
step 6: the luminous medium gas flows into the plasma discharge cavity through the gas inlet pipe (15) and flows out through the gas outlet pipe (16), and the gas pressure of about 30 ‒ Pa is formed in the plasma discharge cavity;
step 7:2650 The radio frequency current output by the kHz radio frequency generator (5) flows to the coupler through the radio frequency lead (6);
step 8: the radio frequency current flowing through the coupler generates an induced magnetic field to excite the luminous medium gas and generate plasma in the plasma discharge cavity (12);
step 9: vacuum ultraviolet light generated by plasma in the plasma discharge cavity (12) is output through a lithium fluoride or magnesium fluoride window (13);
step 10: when the voltage of 3 ‒ 10V controlling the light emission time falls to 0V, the solid state relay (1) is switched to the off state, and the vacuum ultraviolet light output is stopped.
Claims (5)
1. Pulse vacuum ultraviolet lamp with adjustable pulse width comprises solid relay, wire, signal line, 2650 kHz radio frequency generator, radio frequency wire, coupler support rod, ferrite core, excitation coil, quartz lamp tube, metal bulb, lithium fluoride or magnesium fluoride window piece, window piece fixed cover, gas inlet pipe, gas outlet pipe, quartz lamp tube fixed disk, quartz lamp tube sealing ring and window piece sealing ring, its characterized in that: the vacuum ultraviolet lamp comprises a quartz lamp tube, a metal lamp bulb, a lithium fluoride or magnesium fluoride window sheet, a window sheet fixing cover, a quartz lamp tube fixing disc, a quartz lamp tube sealing ring and a window sheet sealing ring, wherein a plasma discharge cavity of the vacuum ultraviolet lamp is formed according to the specification and the drawing, and a coupler formed by a coupler supporting rod, a ferrite magnetic core and an excitation coil is arranged in the center of the plasma discharge cavity.
2. The pulse width adjustable pulsed vacuum ultraviolet lamp of claim 1, wherein: 2650 The kHz radio frequency generator and the coupler are 2650 kHz radio frequency generator and coupler of commercial lighting electrodeless lamp.
3. The pulse width adjustable pulsed vacuum ultraviolet lamp of claim 1, wherein: 2650 The kHz RF generator is connected to a 220V/110V power outlet via a solid state relay, and the on time is controlled by a 3 ‒ 10V pulse voltage.
4. The pulse width adjustable pulsed vacuum ultraviolet lamp of claim 1, wherein: the vacuum ultraviolet light transmitting lithium fluoride or magnesium fluoride window is replaceable.
5. The pulse width adjustable pulsed vacuum ultraviolet lamp of claim 1, wherein: the plasma discharge chamber is filled with 30 ‒ Pa of flowable light emitting medium gas (such as hydrogen, argon, krypton, and xenon or their mixture with helium).
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210357596.5A CN116936337A (en) | 2022-04-07 | 2022-04-07 | Pulse vacuum ultraviolet lamp with adjustable pulse width |
| PCT/CN2022/093726 WO2023060895A1 (en) | 2022-04-07 | 2022-05-19 | Pulsed vacuum ultraviolet lamp with adjustable pulse width |
| LU504110A LU504110B1 (en) | 2022-04-07 | 2022-05-19 | Pulsed vacuum ultraviolet lamp with adjustable pulse width |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210357596.5A CN116936337A (en) | 2022-04-07 | 2022-04-07 | Pulse vacuum ultraviolet lamp with adjustable pulse width |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116936337A true CN116936337A (en) | 2023-10-24 |
Family
ID=85987258
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210357596.5A Pending CN116936337A (en) | 2022-04-07 | 2022-04-07 | Pulse vacuum ultraviolet lamp with adjustable pulse width |
Country Status (3)
| Country | Link |
|---|---|
| CN (1) | CN116936337A (en) |
| LU (1) | LU504110B1 (en) |
| WO (1) | WO2023060895A1 (en) |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08190899A (en) * | 1995-01-13 | 1996-07-23 | Hitachi Ltd | Electrodeless fluorescent lamp |
| CN101567297A (en) * | 2008-04-25 | 2009-10-28 | 中国科学院生态环境研究中心 | High-flux electrodeless vacuum ultraviolet light source |
| CN102737953B (en) * | 2011-04-08 | 2016-03-02 | 高永生 | A kind of HF lamp without electrodes |
| CN106941073B (en) * | 2017-03-10 | 2018-11-13 | 中国人民解放军战略支援部队航天工程大学 | A kind of coaxial gas electric discharge vacuum-ultraviolet light source device |
| CN112635294B (en) * | 2020-12-22 | 2022-04-19 | 中国科学技术大学 | Ultra-high brightness vacuum ultraviolet lamp |
| CN114220728B (en) * | 2021-11-12 | 2023-09-12 | 中国人民解放军战略支援部队航天工程大学 | Inert gas discharge vacuum ultraviolet light source |
-
2022
- 2022-04-07 CN CN202210357596.5A patent/CN116936337A/en active Pending
- 2022-05-19 LU LU504110A patent/LU504110B1/en active IP Right Grant
- 2022-05-19 WO PCT/CN2022/093726 patent/WO2023060895A1/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| WO2023060895A1 (en) | 2023-04-20 |
| LU504110B1 (en) | 2023-07-03 |
| WO2023060895A8 (en) | 2023-11-09 |
| WO2023060895A9 (en) | 2023-06-08 |
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