WO2023035287A1 - Diamond film coated ornament and preparation method for diamond film coating - Google Patents

Diamond film coated ornament and preparation method for diamond film coating Download PDF

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WO2023035287A1
WO2023035287A1 PCT/CN2021/118355 CN2021118355W WO2023035287A1 WO 2023035287 A1 WO2023035287 A1 WO 2023035287A1 CN 2021118355 W CN2021118355 W CN 2021118355W WO 2023035287 A1 WO2023035287 A1 WO 2023035287A1
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moissanite
diamond
diamond film
jewelry
conformal
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PCT/CN2021/118355
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French (fr)
Chinese (zh)
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吕反修
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吕反修
何金鑫
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    • AHUMAN NECESSITIES
    • A44HABERDASHERY; JEWELLERY
    • A44CPERSONAL ADORNMENTS, e.g. JEWELLERY; COINS
    • A44C17/00Gems or the like
    • AHUMAN NECESSITIES
    • A44HABERDASHERY; JEWELLERY
    • A44CPERSONAL ADORNMENTS, e.g. JEWELLERY; COINS
    • A44C27/00Making jewellery or other personal adornments
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02Pretreatment of the material to be coated
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26Deposition of carbon only
    • C23C16/27Diamond only
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/503Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using dc or ac discharges
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/511Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using microwave discharges

Definitions

  • the invention relates to a diamond film coating ornament and a method for preparing the diamond film coating, belonging to the field of chemical coating.
  • Moissanite is a single crystal form of silicon carbide (SiC), which does not exist naturally in the Earth's environment (Moissanite is found in craters and is believed to come from extraterrestrial bodies).
  • Synthetic moissanite is an excellent wide-bandgap semiconductor material, and it is one of the main research objects of a new generation of high-performance semiconductor materials around the world.
  • the refractive index of moissanite is 2.46-2.59, which is higher than that of diamond (diamond) (2.42), so its brilliance (fire color) is better than that of diamond.
  • its thermal conductivity is also very high (490W/cm.K), so it is a high imitation diamond with the highest fidelity with diamond (diamond).
  • Moissanite is also very hard (Mohs hardness 9.2), it is still significantly different from diamond hardness (Mohs hardness 10). Therefore, a layer of diamond film (diamond) film is applied on the surface of Moissanite jewelry, so that it has the same physical and chemical properties as diamonds, but also has the same high hardness as diamonds, and it will never wear and tear like diamonds. "Grains will last forever” has become the goal pursued by people.
  • Neogi et al disclosed in US Patent (US20160029748A1) a method for preparing a nano-diamond coating on the surface of various gem ornaments including Moissanite by using a nano-diamond powder slurry dip coating method.
  • the slurry dipping method is essentially a physical method.
  • the adhesion between the nano-diamond coating and the gemstone substrate only comes from the "Van der Waals force" between the nano-diamond particles and the gemstone surface atoms, which is a weak force. force, thus resulting in poor adhesion.
  • K. Nassau et al once disclosed in the patent (CN108823550A, WO98/21386) a method of applying a diamond film coating on the surface of moissanite (Moissanite) ornaments by chemical vapor deposition (CVD). Due to the special shape of gem ornaments (such as diamond rings), K. Nassau and others designed a sample table with a round hole, so that the diameter of the round hole is slightly smaller than the girdle diameter of the diamond ring ornaments.
  • the pavilion of the pointed (inverted cone) can be placed firmly in the round hole, and the table and crown of the diamond ring are placed in the diamond film deposition atmosphere (H 2 /CH 4 , or H 2 / CH 4 /Ar high temperature or high temperature plasma atmosphere) to achieve the purpose of depositing diamond film.
  • the diamond film deposition atmosphere H 2 /CH 4 , or H 2 / CH 4 /Ar high temperature or high temperature plasma atmosphere
  • the pavilion of the diamond ring jewelry is in the shape of an inverted pyramid, there are only a few edges of the pavilion in contact with the circular hole, and they are all point contacts, which will inevitably lead to a high temperature (or high temperature plasma) atmosphere for diamond film deposition.
  • the heat conduction between the moissanite sample in the sample and the sample stage becomes extremely poor (thermal blockage).
  • the Moissanite sample will inevitably heat up rapidly until it is higher than the optimum temperature range (700-1000°C) required for diamond film deposition.
  • the present invention aims at the defect that the above-mentioned circular hole sample stage cannot effectively dissipate heat, and proposes an improved sample stage design, which changes the thermal contact between the moissanite and the sample stage from point contact to surface contact, so that it can High optical quality diamond film-coated moissanite ornaments were prepared under conditions within a range of quality diamond film deposition process parameters.
  • the present invention also proposes a surface pretreatment method that can greatly increase the nucleation rate of the diamond film on the moissanite surface, aiming at the requirement of extremely low surface roughness of the optical coating. At the same time, the preparation process of diamond film-coated moissanite jewelry was optimized.
  • the object of the present invention is to provide a diamond film coated ornament.
  • Another object of the present invention is to provide a method for preparing a diamond film coating on the surface of an ornament.
  • a diamond film-coated ornament is characterized in that a layer of diamond film coating is coated on the surface of the moissanite ornament, the average grain size of the diamond film is 50 nanometers to 200 nanometers, the surface roughness is less than 10nm, and the thickness of the diamond film is 0.1-200 nanometers. 0.5 microns.
  • the diamond film-coated ornament is prepared through the following steps:
  • Ultrasonic grinding pretreatment is carried out to moissanite jewelry in the suspension of nano-diamond powder; The time is 1 hour ⁇ 6 hours;
  • diamond film deposition adopts "two-stage method": nucleation stage and growth stage, the concentration of methane in the nucleation stage is 3% ⁇ 10%, and the time is 5 ⁇ 20 minutes; The methane concentration in the growth stage is 0.5% ⁇ 2%, and the time is 10 minutes ⁇ 120 minutes; the pressure of the deposition furnace is set at 3kPa ⁇ 20kPa.
  • the plasma treatment and the in-situ diamond film deposition adopt DC arc plasma jet CVD or microwave plasma CVD.
  • the moissanite jewelry adopts nano-diamond suspension for ultrasonic grinding pretreatment; the diamond particle size in the nano-diamond suspension is between 5 nanometers and 200 nanometers, and the concentration of the nano-diamond particles is 5%-20%. Grinding pretreatment time is 1 hour ⁇ 6 hours.
  • the pure copper conformal sample stage has an inverted conical conformal hole, and its cone angle is slightly smaller than that of the inverted pyramid at the moissanite jewelry pavilion, with a deviation of 0° ⁇ -2°, and a certain force will be applied during use.
  • the moissanite jewelry is pressed into the inverted conical conformal hole of the conformal sample stand, forcing the conical hole to undergo plastic deformation, forming surface contact with the edges and corners of the moissanite jewelry pavilion placed on it.
  • the diamond film-coated ornament described in this application is prepared through the following steps:
  • Ultrasonic grinding pretreatment is carried out to moissanite jewelry in the suspension of nano-diamond powder; The time is 1 hour ⁇ 6 hours;
  • diamond film deposition adopts "two-stage method": nucleation stage and growth stage, the concentration of methane in the nucleation stage is 3% ⁇ 10%, and the time is 5 ⁇ 20 minutes; The methane concentration in the growth stage is 0.5% ⁇ 2%, and the time is 10 minutes ⁇ 120 minutes; the pressure of the deposition furnace is set at 3kPa ⁇ 20kPa.
  • the plasma treatment and the in-situ diamond film deposition adopt DC arc plasma jet CVD or microwave plasma CVD.
  • the moissanite jewelry adopts nano-diamond suspension for ultrasonic grinding pretreatment; the diamond particle size in the nano-diamond suspension is between 5 nanometers and 200 nanometers, and the concentration of the nano-diamond particles is 5%-20%. Grinding pretreatment time is 1 hour ⁇ 6 hours.
  • the pure copper conformal sample stage has an inverted conical conformal hole, and its cone angle is slightly smaller than that of the inverted pyramid at the moissanite jewelry pavilion, with a deviation of 0° ⁇ -2°, and a certain force will be applied during use.
  • the moissanite jewelry is pressed into the inverted conical conformal hole of the conformal sample stand, forcing the conical hole to undergo plastic deformation, forming surface contact with the edges and corners of the moissanite jewelry pavilion placed on it.
  • An improved conformal hole sample stage It can be used to prepare diamond film-coated moissanite ornaments with high optical quality.
  • the conformal sample stage should be made of materials with high thermal conductivity, easy deformation, and resistance to high temperature and atomic hydrogen etching in the diamond film deposition environment. Pure copper is the best choice. Although molybdenum and tungsten have good thermal conductivity, they are difficult to undergo plastic deformation.
  • Graphite has good thermal conductivity and plastic deformation ability, but it is very easy to be etched by atomic hydrogen, so it is not recommended to use .
  • the conformal inverted cone sample stage made of pure copper can greatly improve the heat conduction ability from the diamond ring sample through the sample stage during the diamond film deposition process, so that it can be processed under conditions close to high optical quality diamond film deposition (high power, high pressure , close distance (from the excitation source)) to deposit high optical quality diamond film coating on the surface of the diamond ring jewelry (table and crown). This is further illustrated in Figure 2.
  • the present invention adopts a method for ultrasonically grinding and pretreating moissanite ornaments in a suspension of nano-diamond powder to achieve the purpose of uniform nucleation of ultra-high-density diamonds.
  • ultra-high-density diamond nucleation is achieved by ultrasonic grinding of nano-diamond suspensions
  • most of the substrate materials used are single crystal silicon or silicon oxide (OAWilliams et al.Diamond & Related Materials 15 (2006) 654 –658)
  • the diamond nucleation density can reach 10 10 -10 12 /cm 2 .
  • the present invention utilizes nano-diamond suspension to carry out ultrasonic pretreatment on moissanite ornaments to realize ultra-high density diamond nucleation, so far there is no literature report.
  • the diamond nucleation density is as high as 2.5x10 13 /cm 2 . It strongly guarantees the diamond film coating with extremely low surface roughness.
  • the surface roughness of the diamond film coating finally obtained by the present invention is less than Ra 10nm.
  • An example of ultra-high-density uniform nucleation of a diamond film is shown in Figure 3.
  • a method for coating a diamond film on the surface of a moissanite ornament comprising the following steps: step 1: carrying out ultrasonic grinding pretreatment to the moissanite ornament in a suspension of nano-diamond powder; step 2: removing the moissanite ornament from The nano-diamond powder suspension is taken out, followed by ultrasonic cleaning with deionized water and absolute ethanol (alcohol); step 3: pressing the moissanite jewelry into the inverted tapered hole of the pre-selected conformal sample stage ; Step 4: placing the moissanite jewelry together with the conformal sample stage in a diamond film deposition furnace for plasma treatment; Step 5: injecting methane for in-situ diamond film deposition.
  • the nano-diamond particle size in the nano-diamond powder suspension is between 5 nm and 200 nm, and the concentration of the nano-diamond powder is 5% ⁇ 20%.
  • the time for the ultrasonic grinding pretreatment in the nano-diamond suspension is 1 hour ⁇ 6 hours.
  • step 3 the material of the conformal sample stage is pure copper.
  • the conformal sample stage is provided with an inverted conical hole for placing moissanite ornaments, and its cone angle is slightly smaller than the cone angle of the moissanite ornament pavilion (deviation is 0° to -2°).
  • a pressure of 50Kgf ⁇ 250Kgf (depending on the size of the moissanite ornament) is used to press the moissanite ornament into the inverted tapered hole of the conformal sample holder.
  • step 4 the plasma treatment adopts DC arc plasma injection or microwave plasma.
  • the temperature of the plasma treatment is 700°C-1000°C
  • the time of the plasma treatment is 5 minutes-30 minutes.
  • the purpose of plasma treatment is to completely remove the remaining organic root groups (derived from nano-diamond suspension) on the surface of moissanite jewelry, and activate the surface of moissanite jewelry.
  • the in-situ deposition of the diamond film in step 5 includes the following two stages: nucleation and growth of the diamond film.
  • concentration of methane in the nucleation stage is 3%-10%, and the time is 5-20 minutes; the methane concentration in the growth stage is 0.5%-2%, and the time is 10 minutes-120 minutes.
  • the pressure of the deposition furnace is set at 3kPa-20kPa.
  • the moissanite ornaments coated with diamond film on the surface prepared by the method of the present invention can show various physical and chemical properties of diamond while maintaining the optical properties (fire color) of moissanite, and its surface hardness reaches the hardness of diamond. It can greatly improve the scratch resistance of moissanite.
  • An improved method for preparing high optical quality diamond film coating on the surface of moissanite jewelry The prepared diamond film coated moissanite jewelry has the hardness and excellent hardness of diamond while maintaining the fire color of moissanite. scratch resistance performance.
  • the moissanite jewelry pavilion forms a surface contact, making it possible to deposit a high optical quality diamond film on the surface of the moissanite jewelry.
  • a method for realizing ultra-high density diamond nucleation on the surface of moissanite jewelry Ultrasonic grinding in nano-diamond suspension, combined with an optimized nucleation process, enables the diamond nucleation density to reach 2.5x10 13 /cm 2 .
  • a method for preparing a high-optical-quality diamond film on the surface of a moissanite ornament comprising the following steps: Step 1: Ultrasonic grinding pretreatment of the Moissanite ornament in a nano-diamond suspension; Step 2: Moissanite The ornaments are taken out from the nano-diamond powder suspension and cleaned; step 3: pressing the moissanite ornaments into the pre-set conformal sample stage so that it forms surface contact with the inverted tapered hole of the sample stage; step 4 : Place the moissanite jewelry together with the conformal sample stage in a diamond film deposition furnace for plasma treatment; step 5: feed methane, and use a two-stage method (nucleation stage and growth stage) to carry out the in-situ diamond film deposition.
  • the moissanite ornament coated with a diamond film on the surface of the present invention can maintain the optical performance (fire color) of the moissanite ornament while having various physical and chemical properties of diamond, and the surface hardness has reached the hardness of diamond, and has excellent Anti-scratch properties.
  • batch deposition of diamond film-coated moissanite ornaments can be realized.
  • the prepared diamond film-coated moissanite jewelry has the same fire color as the uncoated moissanite jewelry, and also has the hardness of diamond and excellent scratch resistance. It is a high-performance high imitation diamond product .
  • the preparation method described in the application can effectively overcome the poor thermal contact of the special-shaped moissanite (such as diamond ring) jewelry with the sample stage during the diamond film deposition process, it is difficult to obtain high quality, high light transmittance diamond film coating, and a large number of The temperature and the uniformity of the chemical vapor environment during the simultaneous deposition of samples are difficult.
  • the industrialized production of diamond film-coated Moissanite can be realized.
  • Figure 1 uses DC arc plasma jet diamond film CVD equipment, and the diamond-coated Moissanite jewelry prepared with a round-hole copper sample stage (see Figure 2 on the right) cannot obtain high optical quality diamond film coatings.
  • Left 6.5mm (1 carat) D color Moissanite uncoated sample (rough stone);
  • Middle The distance between the sample stage and the nozzle of the plasma torch is 60mm, the pressure is 2.3KPa (17Torr), the methane concentration is 1%, the input power 8KW.
  • the surface temperature of the Moissanite sample was as high as 1150°C, and the surface of the sample was completely blackened after only 10 minutes of deposition;
  • Right High-quality optical-grade F60mm self-supporting diamond film (unpolished) grown on the same equipment.
  • Process conditions nozzle distance 20mm, input power 20KW, pressure 6KPa (45Torr), methane concentration 0.5%, temperature 900°C, time 24 hours;
  • FIG. 2 Conformal pure copper sample stage with inverted conical hole. Left: Hole design for an inverted conical hole. The taper angle is 96°, the tolerance is 0o ⁇ -2o, the diameter of the taper hole is slightly smaller than the girdle diameter of the diamond ring to be coated, and a small-diameter round hole is designed in the lower part to prevent the tip of the diamond ring pavilion from breaking when it is pressed in. Before the diamond film is deposited, the moissanite jewelry to be coated is pressed into the conformal hole, forcing the plastic deformation of the contact part between the conformal hole and the inverted cone-shaped pavilion of the moissanite jewelry, thereby forming a surface contact.
  • Fig. 3 Field emission scanning electron micrograph of ultra-high density diamond nucleation.
  • Nucleation pretreatment Sonication in 30nm nanodiamond suspension for 2 hours.
  • Nucleation process DC arc plasma CVD system is adopted, the nozzle distance is 25mm, the pressure is 6KPa, the power is 10KW, the methane concentration is 4%, and the nucleation time is 10 minutes.
  • the size of the diamond crystal nucleus shown in the figure is only 15-20nm, and the diamond nucleation density is as high as 2.5x10 13 /cm 2 ;
  • FIG. 4 Comparison of fire color between diamond film coated Moissanite and uncoated (raw stone). Left: Uncoated, Right: Coated. A DC arc plasma jet CVD system is used. Coating process: nucleation: nozzle distance 25mm, pressure 6KPa, power 10KW, methane concentration 4%, nucleation time 10 minutes; growth: methane concentration reduced to 1%, time: 30 minutes;
  • Figure 5 Field emission scanning electron microscope (FSEM) image of the diamond film-coated Moissanite surface topography shown in Figure 4. It can be seen that the continuous dense diamond film shows obvious diamond (111) micro-facet characteristics, the average grain size is about 80-100nm, and the surface roughness is less than 10nm;
  • FSEM Field emission scanning electron microscope
  • Figure 7 left the surface morphology of diamond film-coated moissanite prepared by ultrasonic grinding of 5 micron and 1 micron mixed diamond powder for 2 hours pretreatment nucleation method and two-stage method (nucleation and growth). Discrete large-sized grains appear, and the fire color of the coated Moissanite becomes poor;
  • the Vickers hardness calculated according to the indentation measurement data shown in the figure is as high as 117GPa, the average hardness calculated according to 10 test points is 84 ⁇ 7GPa, and the diamond hardness is 80-110GPa.
  • the diamond film coating moissanite prepared by the technology of the present invention has reached the hardness of diamond;
  • Figure 9 Scratch resistance of diamond film-coated Moissanite.
  • the scratch tester is used for testing, single crystal diamond stylus, the maximum scribing pressure is 20N, the scribing distance is 2mm, and the acoustic emission signal is recorded while scratching.
  • the optical microscope image shows that the scribe needle has been carved into the moissanite, forming obvious grooves, showing many discontinuous lateral cracks on both sides of the grooves, corresponding to a series of discontinuous acoustic emission peaks on the acoustic emission spectrum.
  • FIG. 10 Thickness of diamond film coating.
  • the thickness of the diamond film coating was measured under a field emission scanning electron microscope using a prefabricated fractured mosaic sample. The thickness of the diamond film coating measured from the fracture image shown in the figure is 0.2-0.3 ⁇ m;
  • Fig. 11 adopts the 6.5mm (1 carat) diamond film-coated Moissanite drill produced in batches by the technology of the present invention.
  • the diameter of the sample stage is 62mm, which can allow 55 grains of 6.5mm (1 carat) diamond film-coated Moissanite to be deposited at one time;
  • Figure 12 is a comparison of fire color of diamond film-coated Moissanite and uncoated sample (raw stone) prepared by microwave plasma CVD system. Center position: Uncoated rough, left and right diamond coated samples. Adopt 6KW domestic microwave plasma CVD system. Power: 3KW; Pressure: 4.04KPa; Methane concentration: 5%; Plasma etching time: 5 minutes; Deposition time: 1.5 hours; The pretreatment process is the same as DC arc plasma CVD.
  • the most important core content of the present invention is the fundamental improvement of the circular hole sample stage that K. Nassau et al adopt in its disclosed patent technology.
  • the surface temperature of the Moissanite sample was as high as 1150°C, and the surface of the sample was completely blackened after only 10 minutes of deposition; right: a high-quality optical-grade ⁇ 60mm self-supporting diamond film (unpolished) grown on the same equipment.
  • Process conditions nozzle distance 20mm, input power 20KW, pressure 6KPa (45Torr), methane concentration 0.5%, temperature 900°C, time 24 hours. It can be seen from accompanying drawing 1 that the circular hole sample stage designed by K. Nassau et al. can only deposit diamond film under normal deposition conditions (low power, low pressure, long distance). Even so, the quality of the diamond film is too poor to meet the requirements for high optical quality diamond film coatings.
  • the present invention has designed a kind of inverted conical hole conformal pure copper sample stage.
  • Left Schematic diagram of the hole shape design for an inverted conical hole.
  • the taper angle is 96°
  • the tolerance is 0° to -2°
  • the diameter of the taper hole is slightly smaller than the girdle diameter of the diamond ring to be coated
  • a small-diameter round hole is designed in the lower part to prevent the tip of the diamond ring from breaking when it is pressed in.
  • the moissanite jewelry to be coated Before the deposition of the diamond film, the moissanite jewelry to be coated is pressed into the conformal hole, forcing the plastic deformation of the contact part between the conformal hole and the inverted cone-shaped pavilion of the moissanite jewelry, thereby forming a surface contact.
  • Another core content of the present invention is to realize ultra-high density (more than 10 10 /cm 2 ) diamond nucleation technology on the surface of Moissanite samples.
  • the optical properties of diamond film coatings depend on the intrinsic optical quality of the coating (i.e., the absorption coefficient, related to crystal structure and crystal defects) and the surface roughness of the diamond film (directly related to surface scattering). For optical coatings with very small thicknesses, the influence of surface roughness on optical properties is more important than that of crystal intrinsic quality.
  • the present invention adopts a nucleation pretreatment method of ultrasonic grinding in nano-diamond suspension to greatly increase the diamond nucleation density.
  • the diamond nucleation density is as high as 2.5x10 13 /cm 2
  • the specific process conditions are: the particle size of nano-diamond is 30 nm, and the ultrasonic treatment time is 2 hours: DC arc plasma CVD system is used , nozzle distance 25mm, pressure 6KPa, power 10KW, methane concentration 4%, nucleation time 10 minutes.
  • Another core content of the present invention is to form an optimized method for applying high optical quality diamond film coating on Moissanite. Its specific content is as follows:
  • the method includes the following steps: Step 1: performing ultrasonic grinding pretreatment on moissanite jewelry in nanometer diamond powder suspension.
  • the particle size of the nano-diamond powder is between 5 nanometers and 200 nanometers
  • the concentration of the nano-diamond powder is 5% ⁇ 20%
  • the pretreatment time of ultrasonic grinding is 2 hours ⁇ 6 hours.
  • the purpose of this step is mainly to increase the nucleation density of the diamond film deposition, so that the nucleation density of the diamond film is greater than 10 10 cm -2 .
  • step 2 take out the moissanite jewelry from the nano-diamond powder suspension, and clean it, and use deionized water and absolute ethanol (alcohol) to ultrasonically clean it according to the cleaning procedure. blow dry.
  • step 3 the moissanite jewelry is pressed into a preset conformal sample stage for maintenance.
  • Moissanite in order to keep Moissanite, with reference to Figure 2, an inverted conical hole for maintaining a Moissanite jewelry can be provided in the conformal sample stand, and the depth of the conical hole is about 4/5 of the bottom depth, the cone angle of the inverted cone is roughly 96°, and the tolerance of 0° ⁇ -2° is specially designed.
  • the best choice for the material of the conformal sample stage is pure copper.
  • Moissanite can be pressed into the inverted conical hole of the conformal sample stage by applying a pressure of 50Kgf ⁇ 250Kgf, forcing it to form surface contact with the inverted conical hole of the copper sample stage.
  • step 4 the Moissanite jewelry is placed together with the conformal sample stage in the diamond film deposition furnace for plasma treatment .
  • diamond film deposition methods such as DC Arc Plasma Jet (DC Arc Plasma Jet) CVD, microwave plasma CVD (MWCVD), and hot wire CVD (HFCVD) can be used for diamond film coating of Moissanite.
  • DC Arc Plasma Jet DC Arc Plasma Jet
  • MWCVD microwave plasma CVD
  • HFCVD hot wire CVD
  • plasma treatment employs DC arc plasma jet or microwave plasma.
  • the temperature of the plasma treatment is 700°C ⁇ 1000°C, and the time of the plasma treatment is 5 minutes ⁇ 30 minutes.
  • step 5 methane is introduced, and then the in-situ diamond film deposition is carried out.
  • the in-situ deposition of the diamond film described in step 5 includes the following two stages: nucleation and growth of the diamond film.
  • the concentration of methane in the nucleation stage is 3% ⁇ 10%, and the time is 5 ⁇ 20 minutes; the concentration of methane in the growth stage is 0.5% ⁇ 2%, and the time is 10 minutes ⁇ 120 minutes.
  • the pressure of the deposition furnace is set to 3kPa ⁇ 20kPa.
  • Example 1 Batch deposition of diamond film-coated Moissanite jewelry by DC arc plasma jet CVD system
  • Moissanite samples were first ultrasonically milled in a 30 nm diamond powder suspension for 2 h.
  • the Moissanite sample into a DC arc plasma CVD diamond film deposition furnace, and treat it in argon/hydrogen plasma for 5 minutes (Ar: 3slm; H2: 8slm; chamber pressure: 3 ⁇ 20kPa; plasma torch current: 90 ⁇ 120A; voltage: 97 ⁇ 110V; nozzle distance: 25mm).
  • the concentration of methane in the nucleation stage is 3% ⁇ 10%, and the time is 5 ⁇ 20 minutes; the concentration of methane in the growth stage is 0.5% ⁇ 2%, and the time is 10 minutes ⁇ 120 minutes.
  • the sample surface temperature is 700 ⁇ 1000°C.
  • the current is cut off to terminate the deposition of the diamond film, and the coated Moissanite sample can be taken out after cooling for 10 minutes.
  • the Moissanite sample of this diamond film coating has no difference in its degree of transparency and brilliance (fire color) and uncoated Moissanite (rough stone) under the naked eye or the low-magnification optical microscope photograph of illustration.
  • left side Adopt 5 micron and 1 micron mixed diamond powder ultrasonic grinding 2 hours pretreatment nucleation method and two-stage method (nucleation and growth) to prepare the surface morphology of diamond film coating Moissanite. Discrete large-sized grains appear, and the fire color of the coated Moissanite becomes poor;
  • the Vickers hardness calculated according to the indentation measurement data shown in the figure is as high as 117GPa, the average hardness calculated according to 10 test points is 84 ⁇ 7GPa, and the diamond hardness is 80-110GPa.
  • the diamond film-coated moissanite prepared by the technology of the invention has reached the hardness of diamond.
  • the scratch resistance ability of diamond film coating moissanite The scratch tester is used for testing, single crystal diamond stylus, the maximum scribing pressure is 20N, the scribing distance is 2mm, and the acoustic emission signal is recorded while scratching.
  • the optical microscope image shows that the scribe needle has been carved into the moissanite, forming obvious grooves, showing many discontinuous lateral cracks on both sides of the grooves, corresponding to a series of discontinuous acoustic emission peaks on the acoustic emission spectrum.
  • the thickness of the diamond film coating was measured under a field emission scanning electron microscope using a prefabricated fractured mosaic sample.
  • the diamond film coating thickness measured from the illustrated fracture images is 0.2–0.3 ⁇ m.
  • Example 2 Preparation of diamond film-coated Moissanite by microwave plasma CVD diamond film deposition equipment
  • the domestic 6KW grade stainless steel resonant cavity microwave plasma CVD diamond film deposition system is adopted.
  • the pretreatment process of Moissanite nuclei is exactly the same as that of DC arc plasma jet CVD.
  • hot-filament CVD can also be used to prepare diamond film-coated moissanite, due to the low temperature of the hot filament and insufficient gas activation, the concentration of atomic hydrogen is very low, which seriously affects the quality of the diamond film. Therefore, it is not recommended.

Abstract

The present disclosure relates to a diamond film coated ornament and a preparation method for a diamond film coating, and belongs to the field of chemical coatings. The diamond film coated ornament, characterized in that a surface of a moissanite ornament is plated with a diamond film coating, and the diamond film has an average crystal grain size of 50 nm-200 nm, a surface roughness of less than 10 nm, and a thickness of 0.1-0.5 μm. The method may achieve a uniform and dense diamond film coating with a good optical performance on the surface of the moissanite ornament. The moissanite ornament plated with a diamond film on the surface thereof prepared by the method may show various physicochemical properties of diamond while maintaining the optical performance (fire) of moissanite, and the surface hardness thereof reaches the hardness of diamond, which greatly improves the scratch resistance of moissanite.

Description

一种金刚石膜涂层饰品以及制备金刚石膜涂层的方法A kind of diamond film coating ornament and the method for preparing diamond film coating 技术领域technical field
本发明涉及一种金刚石膜涂层饰品以及制备金刚石膜涂层的方法,属于化学物镀膜领域。The invention relates to a diamond film coating ornament and a method for preparing the diamond film coating, belonging to the field of chemical coating.
背景技术Background technique
莫桑石是碳化硅(SiC)的单晶体形态,在地球环境自然界中并不存在(莫桑石是在陨石坑中发现的,被认为来自地外天体)。人工合成的莫桑石是一种优良的宽禁带半导体材料,是目前世界各国对于新一代高性能半导体材料的主要研究对象之一。莫桑石的折射率为2.46-2.59,比金刚石(钻石)的折射率还高(2.42),因此其闪亮程度(火色)比钻石还要好。加上其热导率也非常高(490W/cm.K),因此是与金刚石(钻石)逼真度最高的高仿钻石。莫桑石尽管其硬度也很高(莫氏硬度9.2),但与钻石的硬度(莫氏硬度10)仍有明显的差别。因此,在莫桑石饰品表面施加一层金刚石膜(钻石)薄膜,使其具有和钻石一样的物理化学特性的同时,也具有和钻石一样高的硬度,和钻石一样永不磨损、一样“一粒恒久远”就成为人们追求的目标。Moissanite is a single crystal form of silicon carbide (SiC), which does not exist naturally in the Earth's environment (Moissanite is found in craters and is believed to come from extraterrestrial bodies). Synthetic moissanite is an excellent wide-bandgap semiconductor material, and it is one of the main research objects of a new generation of high-performance semiconductor materials around the world. The refractive index of moissanite is 2.46-2.59, which is higher than that of diamond (diamond) (2.42), so its brilliance (fire color) is better than that of diamond. In addition, its thermal conductivity is also very high (490W/cm.K), so it is a high imitation diamond with the highest fidelity with diamond (diamond). Although Moissanite is also very hard (Mohs hardness 9.2), it is still significantly different from diamond hardness (Mohs hardness 10). Therefore, a layer of diamond film (diamond) film is applied on the surface of Moissanite jewelry, so that it has the same physical and chemical properties as diamonds, but also has the same high hardness as diamonds, and it will never wear and tear like diamonds. "Grains will last forever" has become the goal pursued by people.
在本发明之前Neogi等在美国专利(US20160029748A1)中公开了采用纳米金刚石粉末浆料浸涂法在包括莫桑石在内的各种宝石饰品表面制备纳米金刚石涂层的方法。然而浆料浸涂法本质上是一种物理方法,纳米金刚石涂层与宝石衬底的附着力仅仅来源于纳米金刚石颗粒与宝石表面原子间的“范德瓦尔斯力“,这是一种弱作用力,因此会导致附着力很差。此外,浆料浸涂法很难保证涂层厚 度的均匀性和重复性。更重要的是纳米金刚石粉末的光学性能欠佳,影响涂层后宝石的火色。这对于宝石饰品来说,是完全不可接受的。Before the present invention, Neogi et al disclosed in US Patent (US20160029748A1) a method for preparing a nano-diamond coating on the surface of various gem ornaments including Moissanite by using a nano-diamond powder slurry dip coating method. However, the slurry dipping method is essentially a physical method. The adhesion between the nano-diamond coating and the gemstone substrate only comes from the "Van der Waals force" between the nano-diamond particles and the gemstone surface atoms, which is a weak force. force, thus resulting in poor adhesion. In addition, it is difficult to ensure the uniformity and repeatability of the coating thickness by the slurry dipping method. More importantly, the optical performance of nano-diamond powder is poor, which affects the fire color of gemstones after coating. This is completely unacceptable for gem jewelry.
K.纳索等曾在专利(CN108823550A,WO98/21386)中公开了一种采用化学气相沉积(CVD)方法在碳硅石(莫桑石)饰品表面施加金刚石膜涂层的方法。由于宝石饰品的形状特殊(如钻戒),K.纳索等设计了一种带圆孔的样品台,让圆孔的直径略小于钻戒饰品的腰径。这样一来,尖顶(倒锥状)的亭部就可以稳稳当当地放置在圆孔之中,而让钻戒的台面和冠部置于金刚石膜沉积气氛(H 2/CH 4,或H 2/CH 4/Ar高温或高温等离子体气氛)之中,达到可以沉积金刚石膜的目的。 K. Nassau et al once disclosed in the patent (CN108823550A, WO98/21386) a method of applying a diamond film coating on the surface of moissanite (Moissanite) ornaments by chemical vapor deposition (CVD). Due to the special shape of gem ornaments (such as diamond rings), K. Nassau and others designed a sample table with a round hole, so that the diameter of the round hole is slightly smaller than the girdle diameter of the diamond ring ornaments. In this way, the pavilion of the pointed (inverted cone) can be placed firmly in the round hole, and the table and crown of the diamond ring are placed in the diamond film deposition atmosphere (H 2 /CH 4 , or H 2 / CH 4 /Ar high temperature or high temperature plasma atmosphere) to achieve the purpose of depositing diamond film.
然而,由于钻戒饰品的亭部是倒棱锥形的,亭部与圆孔仅有几条棱边接触,且均为点接触,这必然地会导致处于金刚石膜沉积高温(或高温等离子体)气氛中的莫桑钻样品与样品台之间的热传导变得极差(热阻塞)。其结果必然会导致莫桑钻样品迅速升温,直至高于金刚石膜沉积所要求的最佳温度范围(700-1000℃)。为了降低莫桑钻样品表面温度,就必须降低输入功率,或降低沉积腔气体压力,如果还不能满足金刚石膜沉积温度要求,就只能将莫桑钻样品从高温气流(或高温等离子体)移开,而不得不采用所谓远程沉积(Remote Deposition)模式。这正是K.纳索等在专利申请的两个实施例中,均采用微波等离子体远程沉积,以及很低的压力(2Torr,正常金刚石膜沉积压力为20-400Torr)的原由(见CN108823550A;WO98/21386第13页)。However, since the pavilion of the diamond ring jewelry is in the shape of an inverted pyramid, there are only a few edges of the pavilion in contact with the circular hole, and they are all point contacts, which will inevitably lead to a high temperature (or high temperature plasma) atmosphere for diamond film deposition. The heat conduction between the moissanite sample in the sample and the sample stage becomes extremely poor (thermal blockage). As a result, the Moissanite sample will inevitably heat up rapidly until it is higher than the optimum temperature range (700-1000°C) required for diamond film deposition. In order to reduce the surface temperature of the Moissanite sample, it is necessary to reduce the input power or reduce the gas pressure in the deposition chamber. If the temperature requirement for the deposition of the diamond film cannot be met, the Moissanite sample can only be moved from the high-temperature gas flow (or high-temperature plasma). Open, but had to use the so-called remote deposition (Remote Deposition) mode. This is just the reason why K. Nassau et al. used microwave plasma remote deposition and very low pressure (2Torr, normal diamond film deposition pressure is 20-400Torr) in the two embodiments of the patent application (see CN108823550A; WO98/21386 page 13).
然而,对于莫桑石饰品(对任何宝石饰品都一样)来说,涂层后保持颜色(火色)不发生变化是最关键的技术要求。这意味着金刚石膜必须具有尽可能高的光学性能和尽可能低的表面粗糙度(由于金刚石膜的表面粗糙度与金刚石膜的厚度直接相关,这就要求金刚石膜的厚度不能太大)。众所周知,原子氢浓度是金刚石膜光学质量的决定性因素,高光学质量金刚石膜(特别是高质量金刚石单晶) 的制备要求非常高的原子氢浓度。这样的条件只有在高功率,高压力,和与激发源(高温热丝、微波等离子体球、或直流电弧等离子体炬喷口等)的距离尽可能小的情况下才能实现(见:《金刚石膜制备与应用》第一章,吕反修主编,上卷,科学出版社,2014)。显而易见,K.纳索等在实施例中采用微波等离子体远程沉积与此背道而驰,实属迫不得已。However, for moissanite jewelry (as for any gemstone jewelry), maintaining the color (fire color) after coating is the most critical technical requirement. This means that the diamond film must have the highest possible optical performance and the lowest possible surface roughness (since the surface roughness of the diamond film is directly related to the thickness of the diamond film, this requires that the thickness of the diamond film should not be too large). It is well known that atomic hydrogen concentration is the decisive factor for the optical quality of diamond films, and the preparation of high optical quality diamond films (especially high-quality diamond single crystals) requires very high atomic hydrogen concentration. Such conditions can only be realized under the condition of high power, high pressure, and the distance from the excitation source (high-temperature hot wire, microwave plasma ball, or DC arc plasma torch nozzle, etc.) as small as possible (see: "diamond film Preparation and Application", the first chapter, edited by Lu Fanxiu, Volume 1, Science Press, 2014). Obviously, the use of microwave plasma remote deposition by K. Nassau et al. runs counter to this in the embodiment, and it is really a last resort.
本发明人曾在早期研究工作中采用与K.纳索类似的圆孔样品台,分别采用直流电弧等离子体喷射CVD和微波等离子体CVD系统进行过在高质量(D色)克拉级莫桑石饰品台面和冠部沉积金刚石膜涂层的试验。发现在采用直流电弧等离子体喷射时,只有在远远偏离最佳沉积工艺条件下才能勉强进行金刚石膜沉积,且膜的质量极差。如附图1所示。In the early research work, the present inventor used a circular hole sample stage similar to K. Nassau, and used DC arc plasma jet CVD and microwave plasma CVD systems to carry out high-quality (D color) carat grade moissanite. Trials of deposited diamond film coatings on jewelry tabletops and crowns. It is found that when DC arc plasma spraying is used, the diamond film can only be deposited barely under the conditions far away from the optimum deposition process, and the quality of the film is extremely poor. As shown in Figure 1.
本发明针对上述圆孔样品台不能有效地散热的缺陷,提出了一种改进的样品台设计,把莫桑钻与样品台的热接触从点接触变为面接触,从而可以在接近正常高光学质量金刚石膜沉积工艺参数范围的条件下制备高光学质量金刚石膜涂层莫桑石饰品。此外,本发明还针对光学涂层极低表面粗糙度的要求,提出了一种可以极大地提高莫桑石表面金刚石膜形核率的表面预处理方法。同时还对金刚石膜涂层莫桑石饰品制备工艺进行了优化。The present invention aims at the defect that the above-mentioned circular hole sample stage cannot effectively dissipate heat, and proposes an improved sample stage design, which changes the thermal contact between the moissanite and the sample stage from point contact to surface contact, so that it can High optical quality diamond film-coated moissanite ornaments were prepared under conditions within a range of quality diamond film deposition process parameters. In addition, the present invention also proposes a surface pretreatment method that can greatly increase the nucleation rate of the diamond film on the moissanite surface, aiming at the requirement of extremely low surface roughness of the optical coating. At the same time, the preparation process of diamond film-coated moissanite jewelry was optimized.
发明内容Contents of the invention
本发明的目的是提供一种金刚石膜涂层饰品。The object of the present invention is to provide a diamond film coated ornament.
本发明的另一目的是提供一种饰品表面制备金刚石膜涂层的方法。Another object of the present invention is to provide a method for preparing a diamond film coating on the surface of an ornament.
一种金刚石膜涂层饰品,其特征是在莫桑石饰品表面镀有一层金刚石膜涂层,所述金刚石膜平均晶粒度50纳米-200纳米,表面粗糙度小于10nm,金刚石膜厚度0.1-0.5微米。A diamond film-coated ornament is characterized in that a layer of diamond film coating is coated on the surface of the moissanite ornament, the average grain size of the diamond film is 50 nanometers to 200 nanometers, the surface roughness is less than 10nm, and the thickness of the diamond film is 0.1-200 nanometers. 0.5 microns.
所述金刚石膜涂层饰品通过一下步骤制备得到:The diamond film-coated ornament is prepared through the following steps:
1)在纳米金刚石粉末悬浮液中对莫桑石饰品进行超声研磨预处理;纳米金刚石粒度在5纳米至200纳米之间,所述纳米金刚石粉末的浓度为5%-20%,超声研磨预处理的时间为1小时∽6小时;1) Ultrasonic grinding pretreatment is carried out to moissanite jewelry in the suspension of nano-diamond powder; The time is 1 hour ∽ 6 hours;
2)将莫桑石饰品从所述纳米金刚石粉末悬浮液中取出,并进行清洗;2) Moissanite ornaments are taken out from the nano-diamond powder suspension, and cleaned;
3)对莫桑石饰品施加一定的力,将其压入预先设定的纯铜保形样品台倒圆锥形孔中,使其与圆锥形孔形成紧密接触,即面接触,压力为50kgf∽250kgf;3) Apply a certain force to the moissanite jewelry, and press it into the pre-set inverted conical hole of the pure copper conformal sample stand, so that it forms a close contact with the conical hole, that is, surface contact, and the pressure is 50kgf∽ 250kgf;
4)将莫桑石饰品连同所述保形样品台一同放置于金刚石膜沉积炉中进行等离子体处理,所述等离子体处理的温度为700℃∽1000℃,所述等离子体处理的时间为5分钟∽30分钟;4) Place the moissanite jewelry together with the conformal sample stage in a diamond film deposition furnace for plasma treatment, the temperature of the plasma treatment is 700°C∽1000°C, and the time of the plasma treatment is 5 minute ∽ 30 minutes;
5)通入甲烷,进行原位金刚石膜沉积;金刚石膜沉积采用“两段法”:形核阶段和生长阶段,形核阶段甲烷的浓度为3%∽10%,时间为5∽20分钟;生长阶段甲烷浓度为0.5%∽2%,时间为10分钟∽120分钟;所述沉积炉的压力设置为3kPa∽20kPa。5) Introduce methane for in-situ diamond film deposition; diamond film deposition adopts "two-stage method": nucleation stage and growth stage, the concentration of methane in the nucleation stage is 3%∽10%, and the time is 5∽20 minutes; The methane concentration in the growth stage is 0.5%∽2%, and the time is 10 minutes∽120 minutes; the pressure of the deposition furnace is set at 3kPa∽20kPa.
所述步骤4)和步骤5)中,所述等离子体处理和原位金刚石膜沉积采用直流电弧等离子体喷射CVD或微波等离子体CVD。In the step 4) and step 5), the plasma treatment and the in-situ diamond film deposition adopt DC arc plasma jet CVD or microwave plasma CVD.
所述莫桑石饰品采用纳米金刚石悬浮液进行超声研磨预处理;所述纳米金刚石悬浮液中金刚石粒度在5纳米至200纳米之间,所述纳米金刚石颗粒的浓度为5%-20%,超声研磨预处理的时间为1小时∽6小时。The moissanite jewelry adopts nano-diamond suspension for ultrasonic grinding pretreatment; the diamond particle size in the nano-diamond suspension is between 5 nanometers and 200 nanometers, and the concentration of the nano-diamond particles is 5%-20%. Grinding pretreatment time is 1 hour∽6 hours.
所述纯铜保形样品台具有倒圆锥形保形孔,其锥角略小于莫桑石饰品亭部倒棱锥的锥角,偏差为0°∽-2°,在使用时施加一定的力将莫桑石饰品压入保形样品台的倒圆锥形保形孔中,迫使圆锥孔发生塑性变形,与置于其上的莫桑钻饰品亭部棱角形成面接触。The pure copper conformal sample stage has an inverted conical conformal hole, and its cone angle is slightly smaller than that of the inverted pyramid at the moissanite jewelry pavilion, with a deviation of 0°∽-2°, and a certain force will be applied during use. The moissanite jewelry is pressed into the inverted conical conformal hole of the conformal sample stand, forcing the conical hole to undergo plastic deformation, forming surface contact with the edges and corners of the moissanite jewelry pavilion placed on it.
本申请所述金刚石膜涂层饰品通过以下步骤制备得到:The diamond film-coated ornament described in this application is prepared through the following steps:
1)在纳米金刚石粉末悬浮液中对莫桑石饰品进行超声研磨预处理;纳米金刚石粒度在5纳米至200纳米之间,所述纳米金刚石粉末的浓度为5%-20%,超声研磨预处理的时间为1小时∽6小时;1) Ultrasonic grinding pretreatment is carried out to moissanite jewelry in the suspension of nano-diamond powder; The time is 1 hour ∽ 6 hours;
2)将莫桑石饰品从所述纳米金刚石粉末悬浮液中取出,并进行清洗;2) Moissanite ornaments are taken out from the nano-diamond powder suspension, and cleaned;
3)对莫桑石饰品施加一定的力,将其压入预先设定的纯铜保形样品台倒圆锥形孔中,使其与圆锥形孔形成紧密接触,即面接触,压力为50kgf∽250kgf;3) Apply a certain force to the moissanite jewelry, and press it into the pre-set inverted conical hole of the pure copper conformal sample stand, so that it forms a close contact with the conical hole, that is, surface contact, and the pressure is 50kgf∽ 250kgf;
4)将莫桑石饰品连同所述保形样品台一同放置于金刚石膜沉积炉中进行等离子体处理,所述等离子体处理的温度为700℃∽1000℃,所述等离子体处理的时间为5分钟∽30分钟;4) Place the moissanite jewelry together with the conformal sample stage in a diamond film deposition furnace for plasma treatment, the temperature of the plasma treatment is 700°C∽1000°C, and the time of the plasma treatment is 5 minute ∽ 30 minutes;
5)通入甲烷,进行原位金刚石膜沉积;金刚石膜沉积采用“两段法”:形核阶段和生长阶段,形核阶段甲烷的浓度为3%∽10%,时间为5∽20分钟;生长阶段甲烷浓度为0.5%∽2%,时间为10分钟∽120分钟;所述沉积炉的压力设置为3kPa∽20kPa。5) Introduce methane for in-situ diamond film deposition; diamond film deposition adopts "two-stage method": nucleation stage and growth stage, the concentration of methane in the nucleation stage is 3%∽10%, and the time is 5∽20 minutes; The methane concentration in the growth stage is 0.5%∽2%, and the time is 10 minutes∽120 minutes; the pressure of the deposition furnace is set at 3kPa∽20kPa.
所述步骤4)和步骤5)中,所述等离子体处理和原位金刚石膜沉积采用直流电弧等离子体喷射CVD或微波等离子体CVD。In the step 4) and step 5), the plasma treatment and the in-situ diamond film deposition adopt DC arc plasma jet CVD or microwave plasma CVD.
所述莫桑石饰品采用纳米金刚石悬浮液进行超声研磨预处理;所述纳米金刚石悬浮液中金刚石粒度在5纳米至200纳米之间,所述纳米金刚石颗粒的浓度为5%-20%,超声研磨预处理的时间为1小时∽6小时。The moissanite jewelry adopts nano-diamond suspension for ultrasonic grinding pretreatment; the diamond particle size in the nano-diamond suspension is between 5 nanometers and 200 nanometers, and the concentration of the nano-diamond particles is 5%-20%. Grinding pretreatment time is 1 hour∽6 hours.
所述纯铜保形样品台具有倒圆锥形保形孔,其锥角略小于莫桑石饰品亭部倒棱锥的锥角,偏差为0°∽-2°,在使用时施加一定的力将莫桑石饰品压入保形样品台的倒圆锥形保形孔中,迫使圆锥孔发生塑性变形,与置于其上的莫桑钻饰 品亭部棱角形成面接触。The pure copper conformal sample stage has an inverted conical conformal hole, and its cone angle is slightly smaller than that of the inverted pyramid at the moissanite jewelry pavilion, with a deviation of 0°∽-2°, and a certain force will be applied during use. The moissanite jewelry is pressed into the inverted conical conformal hole of the conformal sample stand, forcing the conical hole to undergo plastic deformation, forming surface contact with the edges and corners of the moissanite jewelry pavilion placed on it.
一种改进的保形孔样品台。可用于制备高光学质量金刚石膜涂层莫桑石饰品。An improved conformal hole sample stage. It can be used to prepare diamond film-coated moissanite ornaments with high optical quality.
针对K.纳索等在专利(CN108823550A,WO98/21386)中提出的圆孔样品台不能有效地散热,无法在高质量金刚石膜正常沉积工艺参数范围在莫桑石饰品表面制备高光学质量金刚石膜涂层的缺陷,提出了一种具有与钻戒饰品亭部倒稜锥形相似形状(保形)的圆锥形孔的样品台设计。圆锥孔的锥角略小于钻戒亭部的锥角(96℃)。然后再施加一定的压力将钻戒饰品亭部压入样品台的保形孔中,迫使圆锥孔与钻戒饰品亭部棱锥的稜接触部分发生塑性变形,从而迫使其接触性质从点接触(样品台保形孔锥角比钻戒饰品亭部锥角略小,不可能形成完美的线接触)变为面接触。保形样品台应选择高导热、易变形、且能耐受金刚石膜沉积环境的高温和原子氢刻蚀的材料制造。纯铜是最佳的选择,钼和钨虽然导热率也不算差,但很难发生塑性变形;石墨的导热性和塑性变形能力都不差,但极易被原子氢刻蚀,不推荐使用。采用纯铜制造的保形倒锥孔样品台可以极大地改善在金刚石膜沉积过程中从钻戒样品通过样品台的热传导能力,从而可以在接近高光学质量金刚石膜沉积条件下(高功率、高压力、近距离(离激发源))在钻戒饰品表面(台面和冠部)沉积高光学质量金刚石膜涂层。在附图2中对此进行了进一步的说明。The round hole sample stage proposed by K. Nasuo et al. in the patent (CN108823550A, WO98/21386) cannot effectively dissipate heat, and cannot prepare high optical quality diamond films on the surface of moissanite jewelry within the normal deposition process parameter range of high quality diamond films Coating defects, a sample stage design with a conical hole similar in shape (conformal) to the inverted pyramid shape of the diamond ring jewelry pavilion was proposed. The cone angle of the conical hole is slightly smaller than the cone angle (96°C) of the pavilion of the diamond ring. Then apply a certain pressure to press the diamond ring jewelry pavilion into the conformal hole of the sample stage, forcing the conical hole and the edge contact part of the diamond ring jewelry pavilion pyramid to undergo plastic deformation, thereby forcing its contact properties from point contact (sample stage protection) The cone angle of the shape hole is slightly smaller than the cone angle of the diamond ring jewelry pavilion, and it is impossible to form a perfect line contact) to surface contact. The conformal sample stage should be made of materials with high thermal conductivity, easy deformation, and resistance to high temperature and atomic hydrogen etching in the diamond film deposition environment. Pure copper is the best choice. Although molybdenum and tungsten have good thermal conductivity, they are difficult to undergo plastic deformation. Graphite has good thermal conductivity and plastic deformation ability, but it is very easy to be etched by atomic hydrogen, so it is not recommended to use . The conformal inverted cone sample stage made of pure copper can greatly improve the heat conduction ability from the diamond ring sample through the sample stage during the diamond film deposition process, so that it can be processed under conditions close to high optical quality diamond film deposition (high power, high pressure , close distance (from the excitation source)) to deposit high optical quality diamond film coating on the surface of the diamond ring jewelry (table and crown). This is further illustrated in Figure 2.
一种在莫桑石饰品表面实现超高密度金刚石均匀形核(大于10 10/cm 2)的方法。 A method for realizing uniform nucleation of ultra-high-density diamond (greater than 10 10 /cm 2 ) on the surface of moissanite jewelry.
本发明采用了一种在纳米金刚石粉末悬浮液中对莫桑石饰品进行超声研磨预处理的方法,实现超高密度金刚石均匀形核的目的。虽然在文献中曾有人报道过采用纳米金刚石悬浮液超声研磨处理实现超高密度金刚石形核,但采用的衬底 材料多为单晶硅或氧化硅(O.A.Williams et al.Diamond&Related Materials 15 (2006)654–658),金刚石形核密度可达10 10-10 12/cm 2。而本发明利用纳米金刚石悬浮液对莫桑石饰品进行超声预处理实现超高密度金刚石形核迄今尚无文献报道。且金刚石形核密度高达2.5x10 13/cm 2。有力地保证了获得极低表面粗糙度的金刚石膜涂层。本发明最终获得的金刚石膜涂层表面粗糙度小于Ra 10nm。金刚石膜超高密度均匀形核实例见附图3。 The present invention adopts a method for ultrasonically grinding and pretreating moissanite ornaments in a suspension of nano-diamond powder to achieve the purpose of uniform nucleation of ultra-high-density diamonds. Although it has been reported in the literature that ultra-high-density diamond nucleation is achieved by ultrasonic grinding of nano-diamond suspensions, most of the substrate materials used are single crystal silicon or silicon oxide (OAWilliams et al.Diamond & Related Materials 15 (2006) 654 –658), the diamond nucleation density can reach 10 10 -10 12 /cm 2 . However, the present invention utilizes nano-diamond suspension to carry out ultrasonic pretreatment on moissanite ornaments to realize ultra-high density diamond nucleation, so far there is no literature report. And the diamond nucleation density is as high as 2.5x10 13 /cm 2 . It strongly guarantees the diamond film coating with extremely low surface roughness. The surface roughness of the diamond film coating finally obtained by the present invention is less than Ra 10nm. An example of ultra-high-density uniform nucleation of a diamond film is shown in Figure 3.
一种在莫桑石饰品表面镀金刚石膜的方法,该方法包括如下步骤:步骤1:在纳米金刚石粉末悬浮液中对莫桑石饰品进行超声研磨预处理;步骤2:将莫桑石饰品从所述纳米金刚石粉末悬浮液中取出,用去离子水和无水乙醇(酒精)依次进行超声清洗;步骤3:将莫桑石饰品压入预先选定的保形样品台的倒锥形孔中;步骤4:将莫桑石饰品连同所述保形样品台一同放置于金刚石膜沉积炉中进行等离子体处理;步骤5:通入甲烷,进行原位金刚石膜沉积。A method for coating a diamond film on the surface of a moissanite ornament, the method comprising the following steps: step 1: carrying out ultrasonic grinding pretreatment to the moissanite ornament in a suspension of nano-diamond powder; step 2: removing the moissanite ornament from The nano-diamond powder suspension is taken out, followed by ultrasonic cleaning with deionized water and absolute ethanol (alcohol); step 3: pressing the moissanite jewelry into the inverted tapered hole of the pre-selected conformal sample stage ; Step 4: placing the moissanite jewelry together with the conformal sample stage in a diamond film deposition furnace for plasma treatment; Step 5: injecting methane for in-situ diamond film deposition.
进一步地,在步骤1中,所述纳米金刚石粉末悬浮液中纳米金刚石粒度在5纳米至200纳米之间,所述纳米金刚石粉末的浓度为5%∽20%。Further, in step 1, the nano-diamond particle size in the nano-diamond powder suspension is between 5 nm and 200 nm, and the concentration of the nano-diamond powder is 5%∽20%.
更进一步地,所述在纳米金刚石悬浮液中超声研磨预处理的时间为1小时∽6小时。Furthermore, the time for the ultrasonic grinding pretreatment in the nano-diamond suspension is 1 hour∽6 hours.
进一步地,在步骤3中,所述保形样品台的材料为纯铜。Further, in step 3, the material of the conformal sample stage is pure copper.
进一步地,所述保形样品台中设置有用于放置莫桑石饰品的倒圆锥形孔,其锥角比莫桑石饰品亭部锥角略小(偏差为0°至-2°)。在步骤3中,使用50Kgf∽250Kgf的压力(取决于莫桑石饰品的尺寸)将莫桑石饰品压入所述保形样品台的所述倒锥形孔中。Further, the conformal sample stage is provided with an inverted conical hole for placing moissanite ornaments, and its cone angle is slightly smaller than the cone angle of the moissanite ornament pavilion (deviation is 0° to -2°). In step 3, a pressure of 50Kgf∽250Kgf (depending on the size of the moissanite ornament) is used to press the moissanite ornament into the inverted tapered hole of the conformal sample holder.
进一步地,在步骤4中,所述等离子体处理采用直流电弧等离子体喷射或微 波等离子体。Further, in step 4, the plasma treatment adopts DC arc plasma injection or microwave plasma.
进一步地,所述等离子体处理的温度为700℃-1000℃,所述等离子体处理的时间为5分钟-30分钟。等离子体处理的目的是彻底去除莫桑石饰品表面残存的有机根团(来源于纳米金刚石悬浮液),并活化莫桑石饰品表面。Further, the temperature of the plasma treatment is 700°C-1000°C, and the time of the plasma treatment is 5 minutes-30 minutes. The purpose of plasma treatment is to completely remove the remaining organic root groups (derived from nano-diamond suspension) on the surface of moissanite jewelry, and activate the surface of moissanite jewelry.
进一步地,在步骤5中所述的金刚石膜原位沉积包括以下两个阶段:金刚石膜形核和生长。形核阶段甲烷的浓度为3%-10%,时间为5-20分钟;生长阶段甲烷浓度为0.5%-2%,时间为10分钟-120分钟。所述沉积炉的压力设置为3kPa-20kPa。Further, the in-situ deposition of the diamond film in step 5 includes the following two stages: nucleation and growth of the diamond film. The concentration of methane in the nucleation stage is 3%-10%, and the time is 5-20 minutes; the methane concentration in the growth stage is 0.5%-2%, and the time is 10 minutes-120 minutes. The pressure of the deposition furnace is set at 3kPa-20kPa.
通过本发明的方法,可以实现在莫桑石饰品表面获得均匀致密、光学性能优异的金刚石膜涂层。用本发明的方法制备的表面镀有金刚石膜的莫桑石饰品,可在保持莫桑石光学性能(火色)的同时,显现金刚石的各种物理化学性能,其表面硬度达到金刚石的硬度,可大大地提高莫桑石抗划伤的性能。Through the method of the invention, a uniform and dense diamond film coating with excellent optical properties can be obtained on the surface of the moissanite jewelry. The moissanite ornaments coated with diamond film on the surface prepared by the method of the present invention can show various physical and chemical properties of diamond while maintaining the optical properties (fire color) of moissanite, and its surface hardness reaches the hardness of diamond. It can greatly improve the scratch resistance of moissanite.
一种改进的在莫桑石饰品表面制备高光学质量金刚石膜涂层的方法,所制备的金刚石膜涂层莫桑石饰品在保持莫桑石的火色的同时,还具有金刚石的硬度和优异的抗划伤性能。一种可用于金刚石膜涂层莫桑石饰品制备的具有倒圆锥孔的纯铜保形样品台,在施加压力将莫桑石饰品压入倒圆锥孔时,可迫使圆锥孔发生塑性变形,与莫桑石饰品亭部形成面接触,从而使其在莫桑石饰品表面沉积高光学质量金刚石膜成为可能。一种在莫桑石饰品表面实现超高密度金刚石形核的方法。采用在纳米金刚石悬浮液中进行超声研磨,配合优化的形核工艺,使金刚石形核密度达到了2.5x10 13/cm 2。一种在莫桑石饰品表面制备高光学质量金刚石膜的方法,该方法包括如下步骤:步骤1:在纳米金刚石悬浮液中对莫桑石饰品进行超声研磨预处理;步骤2:将莫桑石饰品从所述纳米金刚石粉末悬浮液中取出,并进行清洗;步骤3:将莫桑石饰品压入预先设定的保形样品台,使其与样品台倒锥形孔形成面接触;步骤4:将莫桑石饰品连同所述保形样品台一同放置于金 刚石膜沉积炉中进行等离子体处理;步骤5:通入甲烷,采用两段法(形核阶段和生长阶段)进行原位金刚石膜沉积。本发明的表面镀有金刚石膜的莫桑石饰品,可在保持莫桑石饰品光学性能(火色)的同时,具有金刚石的各种物理化学性质,表面硬度达到了金刚石的硬度,具有优异的抗划伤的性能。采用本发明的技术,可实现金刚石膜涂层莫桑石饰品的批量沉积。 An improved method for preparing high optical quality diamond film coating on the surface of moissanite jewelry. The prepared diamond film coated moissanite jewelry has the hardness and excellent hardness of diamond while maintaining the fire color of moissanite. scratch resistance performance. A pure copper conformal sample stage with an inverted conical hole that can be used for the preparation of diamond film-coated moissanite jewelry. The moissanite jewelry pavilion forms a surface contact, making it possible to deposit a high optical quality diamond film on the surface of the moissanite jewelry. A method for realizing ultra-high density diamond nucleation on the surface of moissanite jewelry. Ultrasonic grinding in nano-diamond suspension, combined with an optimized nucleation process, enables the diamond nucleation density to reach 2.5x10 13 /cm 2 . A method for preparing a high-optical-quality diamond film on the surface of a moissanite ornament, the method comprising the following steps: Step 1: Ultrasonic grinding pretreatment of the Moissanite ornament in a nano-diamond suspension; Step 2: Moissanite The ornaments are taken out from the nano-diamond powder suspension and cleaned; step 3: pressing the moissanite ornaments into the pre-set conformal sample stage so that it forms surface contact with the inverted tapered hole of the sample stage; step 4 : Place the moissanite jewelry together with the conformal sample stage in a diamond film deposition furnace for plasma treatment; step 5: feed methane, and use a two-stage method (nucleation stage and growth stage) to carry out the in-situ diamond film deposition. The moissanite ornament coated with a diamond film on the surface of the present invention can maintain the optical performance (fire color) of the moissanite ornament while having various physical and chemical properties of diamond, and the surface hardness has reached the hardness of diamond, and has excellent Anti-scratch properties. By adopting the technology of the invention, batch deposition of diamond film-coated moissanite ornaments can be realized.
所制备金刚石膜涂层莫桑石饰品,具有和未涂层莫桑石饰品同样的火色,同时还具有金刚石的硬度和极其优异的抗划伤能力,是一种高性能的高仿钻石产品。The prepared diamond film-coated moissanite jewelry has the same fire color as the uncoated moissanite jewelry, and also has the hardness of diamond and excellent scratch resistance. It is a high-performance high imitation diamond product .
本申请所述制备方法可有效地克服异形莫桑石(如钻戒)饰品在金刚石膜沉积过程中与样品台的热接触很差,难以获得高质量,高透光性金刚石膜涂层,以及大量样品同时沉积时的温度及化学气相环境的均匀性难题。借助本发明所公开的技术,可以实现金刚石膜涂层莫桑钻的工业化生产。The preparation method described in the application can effectively overcome the poor thermal contact of the special-shaped moissanite (such as diamond ring) jewelry with the sample stage during the diamond film deposition process, it is difficult to obtain high quality, high light transmittance diamond film coating, and a large number of The temperature and the uniformity of the chemical vapor environment during the simultaneous deposition of samples are difficult. With the help of the technology disclosed in the invention, the industrialized production of diamond film-coated Moissanite can be realized.
附图说明Description of drawings
图1采用直流电弧等离子体喷射金刚石膜CVD设备,用圆孔铜样品台(见图2右)制备的金刚石涂层莫桑石饰品无法获得高光学质量金刚石膜涂层。左:6.5mm(1克拉)D色莫桑钻未涂层样品(原石);中:样品台与等离子体炬喷口距离为60mm,压力为2.3KPa(17Torr),甲烷浓度为1%,输入功率8KW。莫桑钻样品表面温度高达1150℃,沉积仅仅10分钟,样品表面已完全发黑;右:在同一设备上生长的高质量光学级F60mm自支撑金刚石膜(未抛光)。工艺条件:喷口距20mm,输入功率20KW,压力6KPa(45Torr),甲烷浓度0.5%,温度900℃,时间24小时;Figure 1 uses DC arc plasma jet diamond film CVD equipment, and the diamond-coated Moissanite jewelry prepared with a round-hole copper sample stage (see Figure 2 on the right) cannot obtain high optical quality diamond film coatings. Left: 6.5mm (1 carat) D color Moissanite uncoated sample (rough stone); Middle: The distance between the sample stage and the nozzle of the plasma torch is 60mm, the pressure is 2.3KPa (17Torr), the methane concentration is 1%, the input power 8KW. The surface temperature of the Moissanite sample was as high as 1150°C, and the surface of the sample was completely blackened after only 10 minutes of deposition; Right: High-quality optical-grade F60mm self-supporting diamond film (unpolished) grown on the same equipment. Process conditions: nozzle distance 20mm, input power 20KW, pressure 6KPa (45Torr), methane concentration 0.5%, temperature 900°C, time 24 hours;
图2倒圆锥孔保形纯铜样品台。左:倒圆锥孔的孔形设计图。锥角为96°,公差为0o∽-2o,圆锥孔直径略小于欲涂层钻戒的腰径,下部设计了一个小直径圆孔,以避免钻戒亭部尖锥在压入时折断。在金刚石膜沉积前将要涂层的莫桑石 饰品压入保形孔,迫使保形孔与莫桑石饰品倒锥形亭部棱角接触部分发生塑性变形,从而形成面接触。右:K.纳索等所用的圆孔样品台孔形示意图,孔的直径略小于莫桑石饰品的腰径。在沉积前将莫桑石饰品放在圆孔中,莫桑石饰品倒棱锥亭部的棱与圆孔为点接触;Figure 2 Conformal pure copper sample stage with inverted conical hole. Left: Hole design for an inverted conical hole. The taper angle is 96°, the tolerance is 0o∽-2o, the diameter of the taper hole is slightly smaller than the girdle diameter of the diamond ring to be coated, and a small-diameter round hole is designed in the lower part to prevent the tip of the diamond ring pavilion from breaking when it is pressed in. Before the diamond film is deposited, the moissanite jewelry to be coated is pressed into the conformal hole, forcing the plastic deformation of the contact part between the conformal hole and the inverted cone-shaped pavilion of the moissanite jewelry, thereby forming a surface contact. Right: Schematic diagram of the hole shape of the round hole sample stage used by K. Nasso et al. The diameter of the hole is slightly smaller than the girdle diameter of the moissanite jewelry. Put the moissanite jewelry in the round hole before deposition, and the edge of the inverted pyramid pavilion of the moissanite jewelry is in point contact with the round hole;
图3超高密度金刚石形核场发射扫描电镜照片。形核预处理:在30nm纳米金刚石悬浮液中超声2小时。形核工艺:采用直流电弧等离子体CVD系统,喷口距25mm,压力6KPa,功率10KW,甲烷浓度4%,形核时间10分钟。图示金刚石晶核尺寸仅为15-20nm,金刚石形核密度高达2.5x10 13/cm 2Fig. 3 Field emission scanning electron micrograph of ultra-high density diamond nucleation. Nucleation pretreatment: Sonication in 30nm nanodiamond suspension for 2 hours. Nucleation process: DC arc plasma CVD system is adopted, the nozzle distance is 25mm, the pressure is 6KPa, the power is 10KW, the methane concentration is 4%, and the nucleation time is 10 minutes. The size of the diamond crystal nucleus shown in the figure is only 15-20nm, and the diamond nucleation density is as high as 2.5x10 13 /cm 2 ;
图4金刚石膜涂层莫桑钻与未涂层(原石)火色的对比。左:未涂层,右:已涂层。采用直流电弧等离子体喷射CVD系统。涂层工艺:形核:喷口距25mm,压力6KPa,功率10KW,甲烷浓度4%,形核时间10分钟;生长:甲烷浓度降为1%,时间:30分钟;Figure 4 Comparison of fire color between diamond film coated Moissanite and uncoated (raw stone). Left: Uncoated, Right: Coated. A DC arc plasma jet CVD system is used. Coating process: nucleation: nozzle distance 25mm, pressure 6KPa, power 10KW, methane concentration 4%, nucleation time 10 minutes; growth: methane concentration reduced to 1%, time: 30 minutes;
图5:图4所示金刚石膜涂层莫桑钻表面形貌场发射扫描电镜(FSEM)图像。可见连续致密金刚石膜,呈现明显的金刚石(111)显微刻面特征,平均晶粒度约为80-100nm,表面粗糙度小于10nm;Figure 5: Field emission scanning electron microscope (FSEM) image of the diamond film-coated Moissanite surface topography shown in Figure 4. It can be seen that the continuous dense diamond film shows obvious diamond (111) micro-facet characteristics, the average grain size is about 80-100nm, and the surface roughness is less than 10nm;
图6金刚石膜涂层莫桑钻表面小角度X-射线衍射谱,可见明显尖锐的(111)和(220)金刚石衍射峰。说明图5所示确实是多晶金刚石膜;Figure 6 The small-angle X-ray diffraction spectrum of the diamond film-coated Moissanite surface, clearly sharp (111) and (220) diamond diffraction peaks can be seen. Illustrate that shown in Fig. 5 is indeed polycrystalline diamond film;
图7左:采用5微米和1微米混合金刚石粉末超声研磨2小时预处理形核方法和两段法(形核和生长)制备的金刚石膜涂层莫桑钻表面形貌。出现了离散的大尺寸晶粒,涂层莫桑钻火色变差;右:未经任何预处理,清洗后直接生长的金刚石膜涂层莫桑钻表面形貌。金刚石膜均匀性很差,晶粒尺寸很大,且不致密,莫桑钻样品在沉积后完全失透(见附图1)。说明了本发明采用纳米金刚石悬浮液的优越性;Figure 7 left: the surface morphology of diamond film-coated moissanite prepared by ultrasonic grinding of 5 micron and 1 micron mixed diamond powder for 2 hours pretreatment nucleation method and two-stage method (nucleation and growth). Discrete large-sized grains appear, and the fire color of the coated Moissanite becomes poor; Right: The surface morphology of the diamond film-coated Moissanite grown directly after cleaning without any pretreatment. The uniformity of the diamond film is very poor, the grain size is very large, and it is not dense, and the Moissanite sample is completely devitrified after deposition (see accompanying drawing 1). Illuminated the present invention adopts the superiority of nano-diamond suspension;
图8金刚石膜涂层莫桑钻的维氏硬度压痕照片。采用上海联尔试验设备有 限公司生产的HVT-100型显微硬度计进行测试。采用标准金刚石四棱锥压头。载荷P为0.025kg(0.245N),保压时间10秒。每个样品测试10个点,用激光共聚焦显微镜测量金刚石膜涂层莫桑钻硬度压痕对角线长度,按公式:Hv=1854.4P/a 2计算维氏硬度。图中显微尺标为4mm。按图示压痕测量数据计算的维氏硬度高达117GPa,按10个测试点计算的平均硬度为84±7GPa,金刚石硬度为80-110GPa。按本发明技术制备的金刚石膜涂层莫桑钻达到了金刚石的硬度; Fig. 8 Vickers hardness indentation photos of diamond film-coated Moissanite. The HVT-100 microhardness tester produced by Shanghai Lianer Testing Equipment Co., Ltd. was used for testing. Standard diamond pyramid indenter is used. The load P is 0.025kg (0.245N), and the holding time is 10 seconds. Test 10 points for each sample, measure the diagonal length of the diamond film-coated Moissanite hardness indentation with a laser confocal microscope, and calculate the Vickers hardness according to the formula: Hv=1854.4P/a 2 . The microscale in the figure is 4 mm. The Vickers hardness calculated according to the indentation measurement data shown in the figure is as high as 117GPa, the average hardness calculated according to 10 test points is 84±7GPa, and the diamond hardness is 80-110GPa. The diamond film coating moissanite prepared by the technology of the present invention has reached the hardness of diamond;
图9金刚石膜涂层莫桑钻的抗划伤能力。采用划痕试验仪进行测试,单晶金刚石划针,最大刻划压力20N,刻划距离2mm,在进行刻划的同时记录声发射信号。(a)未涂层样品(原石):在约8N时开始出现声发射信号(3N时的信号为螺丝钉不慎落地时的噪声)。光学显微镜图像显示划针已经刻入莫桑石,形成明显的沟槽,在沟槽两侧呈现许多不连续的侧向裂纹,与声发射谱上的一系列不连续声发射峰相对应。(b)金刚石膜涂层莫桑石;直至接近20N时才出现声发射峰,从光镜照片来看,此时划针已经压破金刚石膜表面,金刚石膜发生脆性断裂,断口非常平整,膜已卷起,说明金刚石膜本身具有不小的应力,且为压应力。Figure 9. Scratch resistance of diamond film-coated Moissanite. The scratch tester is used for testing, single crystal diamond stylus, the maximum scribing pressure is 20N, the scribing distance is 2mm, and the acoustic emission signal is recorded while scratching. (a) Uncoated sample (rough stone): The acoustic emission signal begins to appear at about 8N (the signal at 3N is the noise when the screw accidentally lands). The optical microscope image shows that the scribe needle has been carved into the moissanite, forming obvious grooves, showing many discontinuous lateral cracks on both sides of the grooves, corresponding to a series of discontinuous acoustic emission peaks on the acoustic emission spectrum. (b) Moissanite coated with diamond film; the acoustic emission peak does not appear until it is close to 20N. According to the light microscope photo, the scribing needle has broken the surface of the diamond film at this time, and the diamond film has a brittle fracture, and the fracture is very smooth. It has been rolled up, indicating that the diamond film itself has not a small stress, and it is compressive stress.
图10金刚石膜涂层的厚度。采用预制断口的镶嵌样品,在场发射扫描电镜下测量了金刚石膜涂层的厚度。从图示断口图像测量的金刚石膜涂层厚度为0.2-0.3μm;Figure 10. Thickness of diamond film coating. The thickness of the diamond film coating was measured under a field emission scanning electron microscope using a prefabricated fractured mosaic sample. The thickness of the diamond film coating measured from the fracture image shown in the figure is 0.2-0.3 μm;
图11采用本发明技术批量生产的6.5mm(1克拉)金刚石膜涂层莫桑钻。样品台直径为62mm,可容许一次沉积55粒6.5mm(1克拉)金刚石膜涂层莫桑钻;Fig. 11 adopts the 6.5mm (1 carat) diamond film-coated Moissanite drill produced in batches by the technology of the present invention. The diameter of the sample stage is 62mm, which can allow 55 grains of 6.5mm (1 carat) diamond film-coated Moissanite to be deposited at one time;
图12采用微波等离子体CVD系统制备的金刚石膜涂层莫桑钻和未涂层样品(原石)火色的对比。中心位置:未镀膜原石,左和右均为金刚石膜涂层样品。采用6KW国产微波等离子体CVD系统。功率:3KW;压力:4.04KPa;甲烷浓度:5%;等离子体刻蚀时间:5分钟;沉积时间:1.5小时;预处理工艺与直流电弧等离子体CVD相同。Figure 12 is a comparison of fire color of diamond film-coated Moissanite and uncoated sample (raw stone) prepared by microwave plasma CVD system. Center position: Uncoated rough, left and right diamond coated samples. Adopt 6KW domestic microwave plasma CVD system. Power: 3KW; Pressure: 4.04KPa; Methane concentration: 5%; Plasma etching time: 5 minutes; Deposition time: 1.5 hours; The pretreatment process is the same as DC arc plasma CVD.
具体实施方式Detailed ways
以下参照附图对本发明进行详细说明。The present invention will be described in detail below with reference to the accompanying drawings.
本发明最重要的核心内容是对K.纳索等在其公开的专利技术中采用的圆孔样品台的根本性改进。The most important core content of the present invention is the fundamental improvement of the circular hole sample stage that K. Nassau et al adopt in its disclosed patent technology.
参照附图1采用与K.纳索等相同的圆孔纯铜样品台,用直流电弧等离子体喷射CVD系统在莫桑石饰品上沉积金刚石膜。附图1左:为6.5mm(1克拉)未涂层的莫桑钻(原石);中:金刚石膜涂层莫桑钻,沉积条件为:样品台与等离子体炬喷口距离为60mm,压力为2.3KPa(17Torr),甲烷浓度为1%,输入功率8KW。莫桑钻样品表面温度高达1150℃,沉积仅仅10分钟,样品表面已完全发黑;右:为在同一设备上生长的高质量光学级Φ60mm自支撑金刚石膜(未抛光)。工艺条件:喷口距20mm,输入功率20KW,压力6KPa(45Torr),甲烷浓度0.5%,温度900℃,时间24小时。从附图1可以看出,采用K.纳索等设计的圆孔样品台只能在偏离正常沉积条件(低功率、低压力、远距离)进行金刚石膜沉积。即便如此,金刚石膜的质量也很差,无法满足高光学质量金刚石膜涂层的要求。Referring to accompanying drawing 1, adopt the same round-hole pure copper sample stage as K. Nassau et al., and deposit diamond film on moissanite jewelry with DC arc plasma jet CVD system. Accompanying drawing 1 left side: be 6.5mm (1 carat) uncoated moissanite (original stone); Middle: diamond film coating moissanite, deposition condition is: the distance between sample platform and plasma torch spout is 60mm, and pressure is 2.3KPa (17Torr), the methane concentration is 1%, and the input power is 8KW. The surface temperature of the Moissanite sample was as high as 1150°C, and the surface of the sample was completely blackened after only 10 minutes of deposition; right: a high-quality optical-grade Φ60mm self-supporting diamond film (unpolished) grown on the same equipment. Process conditions: nozzle distance 20mm, input power 20KW, pressure 6KPa (45Torr), methane concentration 0.5%, temperature 900°C, time 24 hours. It can be seen from accompanying drawing 1 that the circular hole sample stage designed by K. Nassau et al. can only deposit diamond film under normal deposition conditions (low power, low pressure, long distance). Even so, the quality of the diamond film is too poor to meet the requirements for high optical quality diamond film coatings.
参照附图2为此,本发明设计了一种倒圆锥孔保形纯铜样品台。左:倒圆锥孔的孔形设计示意图。锥角为96°,公差为0°至-2°,圆锥孔直径略小于欲涂层钻戒的腰径,下部设计了一个小直径圆孔,以避免钻戒亭部尖锥在压入时折断。在金刚石膜沉积前将要涂层的莫桑石饰品压入保形孔,迫使保形孔与莫桑石饰品倒锥形亭部棱角接触部分发生塑性变形,从而形成面接触。右:K.纳索等所用的圆孔样品台孔形示意图,孔的直径略小于莫桑石饰品的腰径。在沉积前将莫桑石饰品放在圆孔上,莫桑石饰品倒棱锥亭部的棱与圆孔为点接触;For this purpose with reference to accompanying drawing 2, the present invention has designed a kind of inverted conical hole conformal pure copper sample stage. Left: Schematic diagram of the hole shape design for an inverted conical hole. The taper angle is 96°, the tolerance is 0° to -2°, the diameter of the taper hole is slightly smaller than the girdle diameter of the diamond ring to be coated, and a small-diameter round hole is designed in the lower part to prevent the tip of the diamond ring from breaking when it is pressed in. Before the deposition of the diamond film, the moissanite jewelry to be coated is pressed into the conformal hole, forcing the plastic deformation of the contact part between the conformal hole and the inverted cone-shaped pavilion of the moissanite jewelry, thereby forming a surface contact. Right: Schematic diagram of the hole shape of the round hole sample stage used by K. Nasso et al. The diameter of the hole is slightly smaller than the girdle diameter of the moissanite jewelry. Put the moissanite jewelry on the round hole before deposition, and the edge of the inverted pyramid pavilion of the moissanite jewelry is in point contact with the round hole;
本发明的另外一个核心内容是在莫桑钻样品表面实现超高密度(大于10 10/cm 2)金刚石形核技术。金刚石膜涂层的光学性能取决于涂层本征光学质量 (即吸收系数,与晶体结构和晶体缺陷相关)和金刚石膜的表面粗糙度(直接与表面散射相关)。对于厚度很小的光学涂层,表面粗糙度对于光学性能的影响比晶体本征质量的影响更为重要。 Another core content of the present invention is to realize ultra-high density (more than 10 10 /cm 2 ) diamond nucleation technology on the surface of Moissanite samples. The optical properties of diamond film coatings depend on the intrinsic optical quality of the coating (i.e., the absorption coefficient, related to crystal structure and crystal defects) and the surface roughness of the diamond film (directly related to surface scattering). For optical coatings with very small thicknesses, the influence of surface roughness on optical properties is more important than that of crystal intrinsic quality.
参照附图3本发明采用了一种在纳米金刚石悬浮液中进行超声研磨的形核预处理方法来达到极大幅度地提高金刚石形核密度的目的。如附图3所示的场发射扫描电镜照片,金刚石形核密度高达2.5x10 13/cm 2,具体工艺条件为:纳米金刚石粒度为30纳米,超声处理时间2小时:采用直流电弧等离子体CVD系统,喷口距25mm,压力6KPa,功率10KW,甲烷浓度4%,形核时间10分钟。在莫桑石饰品上获得如此高的金刚石形核密度,迄今为止尚未见任何文献报道。附图3的原始放大倍数为5万倍,图中尺标为2微米。 Referring to accompanying drawing 3, the present invention adopts a nucleation pretreatment method of ultrasonic grinding in nano-diamond suspension to greatly increase the diamond nucleation density. As shown in the field emission scanning electron microscope photo in Figure 3, the diamond nucleation density is as high as 2.5x10 13 /cm 2 , and the specific process conditions are: the particle size of nano-diamond is 30 nm, and the ultrasonic treatment time is 2 hours: DC arc plasma CVD system is used , nozzle distance 25mm, pressure 6KPa, power 10KW, methane concentration 4%, nucleation time 10 minutes. Obtaining such a high diamond nucleation density on moissanite jewelry has not been reported in any literature so far. The original magnification of accompanying drawing 3 is 50,000 times, and the scale in the figure is 2 microns.
本发明的另一核心内容是形成了一种优化的在莫桑钻上施加高光学质量金刚石膜涂层的方法。其具体内容如下:Another core content of the present invention is to form an optimized method for applying high optical quality diamond film coating on Moissanite. Its specific content is as follows:
该方法包括如下步骤:步骤1:在纳米金刚石粉末悬浮液中对莫桑石饰品进行超声研磨预处理。其中,纳米金刚石粉末的粒度在5纳米至200纳米之间,纳米金刚石粉末的浓度为5%∽20%,超声研磨预处理的时间为2小时∽6小时。该步骤的目的主要为了提高金刚石膜沉积的形核密度,以使金刚石膜的形核密度大于10 10cm -2The method includes the following steps: Step 1: performing ultrasonic grinding pretreatment on moissanite jewelry in nanometer diamond powder suspension. Wherein, the particle size of the nano-diamond powder is between 5 nanometers and 200 nanometers, the concentration of the nano-diamond powder is 5%∽20%, and the pretreatment time of ultrasonic grinding is 2 hours∽6 hours. The purpose of this step is mainly to increase the nucleation density of the diamond film deposition, so that the nucleation density of the diamond film is greater than 10 10 cm -2 .
经过超声研磨预处理后,在步骤2中:将莫桑石饰品从纳米金刚石粉末悬浮液中取出,并进行清洗,按清洗程序依次采用去离子水和无水乙醇(酒精)超声清洗,经冷风吹干。After ultrasonic grinding pretreatment, in step 2: take out the moissanite jewelry from the nano-diamond powder suspension, and clean it, and use deionized water and absolute ethanol (alcohol) to ultrasonically clean it according to the cleaning procedure. blow dry.
经超声研磨预处理及清洗后的莫桑石饰品,在步骤3中:将莫桑石饰品压入预先设定的保形样品台中保持。其中,以莫桑钻为例,为了保持莫桑钻,参照图 2,可在保形样品台中设置有用于保持一个莫桑石饰品的倒圆锥形孔,圆锥孔的深度大约为莫桑钻亭部深度的4/5,倒锥形的锥角大致为96°,特别设计0°∽-2°的公差,为了便于莫桑钻压入,保形样品台的材料最佳选择为纯铜。莫桑钻可以通过施加50Kgf∽250Kgf的压力将其压入保形样品台的倒圆锥孔中,迫使其与铜样品台倒圆锥孔形成面接触。After the moissanite jewelry has been pre-treated and cleaned by ultrasonic grinding, in step 3: the moissanite jewelry is pressed into a preset conformal sample stage for maintenance. Wherein, taking Moissanite as an example, in order to keep Moissanite, with reference to Figure 2, an inverted conical hole for maintaining a Moissanite jewelry can be provided in the conformal sample stand, and the depth of the conical hole is about 4/5 of the bottom depth, the cone angle of the inverted cone is roughly 96°, and the tolerance of 0°∽-2° is specially designed. In order to facilitate the pressing of Moissanite drills, the best choice for the material of the conformal sample stage is pure copper. Moissanite can be pressed into the inverted conical hole of the conformal sample stage by applying a pressure of 50Kgf∽250Kgf, forcing it to form surface contact with the inverted conical hole of the copper sample stage.
经过超声研磨预处理,并将莫桑钻压入保形样品台的倒圆锥孔后,在步骤4中,将莫桑钻饰品连同保形样品台一同放置于金刚石膜沉积炉中进行等离子体处理。在步骤4中,直流电弧等离子体喷射(DC Arc Plasma Jet)CVD,微波等离子体CVD(MWCVD),和热丝CVD(HFCVD)等金刚石膜沉积方法均可用于莫桑钻的金刚石膜涂层。但是,热丝CVD由于气体活化程度不高,导致原子氢浓度太低,获得具有良好光学性能的金刚石薄膜涂层比较困难。因此,在步骤4中,等离子体处理采用直流电弧等离子体喷射或微波等离子体。等离子体处理的温度为700℃∽1000℃,等离子体处理的时间为5分钟∽30分钟。以彻底去除任何残存在莫桑钻表面上的有机根团(来源于纳米金刚石粉末悬浮液)对金刚石薄膜沉积的影响,并活化莫桑钻样品的表面状态,有利于金刚石膜的均匀沉积和提高金刚石膜的附着力。After ultrasonic grinding pretreatment, and Moissanite is pressed into the inverted conical hole of the conformal sample stage, in step 4, the Moissanite jewelry is placed together with the conformal sample stage in the diamond film deposition furnace for plasma treatment . In step 4, diamond film deposition methods such as DC Arc Plasma Jet (DC Arc Plasma Jet) CVD, microwave plasma CVD (MWCVD), and hot wire CVD (HFCVD) can be used for diamond film coating of Moissanite. However, due to the low degree of gas activation in hot-wire CVD, the concentration of atomic hydrogen is too low, and it is difficult to obtain diamond thin film coatings with good optical properties. Therefore, in step 4, plasma treatment employs DC arc plasma jet or microwave plasma. The temperature of the plasma treatment is 700°C∽1000°C, and the time of the plasma treatment is 5 minutes∽30 minutes. To completely remove the influence of any organic root group (derived from nano-diamond powder suspension) remaining on the surface of Moissanite on the deposition of diamond film, and activate the surface state of the Moissanite sample, which is conducive to the uniform deposition and improvement of diamond film Adhesion of diamond film.
完成等离子体处理后,在步骤5中:通入甲烷,随即进行原位金刚石膜沉积。在步骤5中所述的金刚石膜原位沉积包括以下两个阶段:金刚石膜形核和生长。形核阶段甲烷的浓度为3%∽10%,时间为5∽20分钟;生长阶段甲烷浓度为0.5%∽2%,时间为10分钟∽120分钟。所述沉积炉的压力设置为3kPa∽20kPa。After the plasma treatment is completed, in step 5: methane is introduced, and then the in-situ diamond film deposition is carried out. The in-situ deposition of the diamond film described in step 5 includes the following two stages: nucleation and growth of the diamond film. The concentration of methane in the nucleation stage is 3%∽10%, and the time is 5∽20 minutes; the concentration of methane in the growth stage is 0.5%∽2%, and the time is 10 minutes∽120 minutes. The pressure of the deposition furnace is set to 3kPa∽20kPa.
沉积完成后,冷却10分钟,即可取出已镀膜的莫桑钻的样品。After the deposition is completed, cool for 10 minutes to take out the coated Moissanite sample.
以下进一步以实施例,并结合附图进行更具体的说明:Further with embodiment below, in conjunction with accompanying drawing, carry out more specific description:
实施例一:采用直流电弧等离子体喷射CVD系统批量沉积金刚石膜涂层莫桑钻饰品Example 1: Batch deposition of diamond film-coated Moissanite jewelry by DC arc plasma jet CVD system
以下进一步取直径为6.5mm的莫桑钻(1克拉)的金刚石膜镀膜的例子进行说明。Hereinafter, an example of a diamond film coating on a Moissanite (1 carat) with a diameter of 6.5 mm will be further described.
首先将莫桑钻样品在30nm金刚石粉末悬浮液中超声研磨2小时。Moissanite samples were first ultrasonically milled in a 30 nm diamond powder suspension for 2 h.
将莫桑钻样品取出,清洗干净。Take out the Moissanite sample and clean it.
用150kg力压入高度为30mm、直径为62mm的铜保形样品台表面上预制倒锥形孔中(锥角96°,公差为0°∽-2°)。Press it into a prefabricated inverted tapered hole on the surface of a copper conformal sample stage with a height of 30mm and a diameter of 62mm (cone angle 96°, tolerance 0°∽-2°) with a force of 150kg.
将莫桑钻样品放入直流电弧等离子体CVD金刚石膜沉积炉中,在氩/氢等离子体中处理5分钟(Ar:3slm;H2:8slm;腔压:3∽20kPa;等离子体炬电流:90∽120A;电压:97∽110V;喷口距:25mm)。然后采用两段法进行原位金刚石形核和生长:形核阶段甲烷的浓度为3%∽10%,时间为5∽20分钟;生长阶段甲烷浓度为0.5%∽2%,时间为10分钟∽120分钟。样品表面温度700∽1000℃。Put the Moissanite sample into a DC arc plasma CVD diamond film deposition furnace, and treat it in argon/hydrogen plasma for 5 minutes (Ar: 3slm; H2: 8slm; chamber pressure: 3∽20kPa; plasma torch current: 90 ∽120A; voltage: 97∽110V; nozzle distance: 25mm). Then adopt the two-stage method for in-situ diamond nucleation and growth: the concentration of methane in the nucleation stage is 3%∽10%, and the time is 5∽20 minutes; the concentration of methane in the growth stage is 0.5%∽2%, and the time is 10 minutes∽ 120 minutes. The sample surface temperature is 700∽1000°C.
沉积完成后切断电流,终止金刚石膜沉积,冷却10分钟后即可取出已镀膜的莫桑钻样品。After the deposition is completed, the current is cut off to terminate the deposition of the diamond film, and the coated Moissanite sample can be taken out after cooling for 10 minutes.
参照附图4,该金刚石膜涂层的莫桑钻样品在肉眼或图示低倍光学显微镜照片下其透明程度和闪亮程度(火色)和未涂层莫桑钻(原石)没有区别。With reference to accompanying drawing 4, the Moissanite sample of this diamond film coating has no difference in its degree of transparency and brilliance (fire color) and uncoated Moissanite (rough stone) under the naked eye or the low-magnification optical microscope photograph of illustration.
参照附图5,在场发射扫描电镜高倍(3万倍)照片中可以看出图4所示金刚石膜涂层莫桑钻表面的金刚石膜非常均匀致密,显示明显的金刚石(111)显微刻面特征,晶粒平均尺寸约为80-100nm,表面粗糙度小于Ra10nm。Referring to accompanying drawing 5, it can be seen in the high magnification (30,000 times) photo of the field emission scanning electron microscope that the diamond film on the surface of the diamond film coating Moissanite shown in Figure 4 is very uniform and dense, showing obvious diamond (111) microscopic facets Features, the average grain size is about 80-100nm, and the surface roughness is less than Ra10nm.
参照附图6,金刚石膜涂层莫桑钻表面小角度X-射线衍射谱,可见明显尖锐 的(111)和(220)金刚石衍射峰。说明图5所示确实是多晶金刚石膜。With reference to accompanying drawing 6, the small-angle X-ray diffraction spectrum of diamond film coating moissanite surface, visible sharp (111) and (220) diamond diffraction peaks. It shows that what is shown in Fig. 5 is indeed a polycrystalline diamond film.
参照附图7,左:采用5微米和1微米混合金刚石粉末超声研磨2小时预处理形核方法和两段法(形核和生长)制备的金刚石膜涂层莫桑钻表面形貌。出现了离散的大尺寸晶粒,涂层莫桑钻火色变差;右:未经任何预处理,清洗后直接生长的金刚石膜涂层莫桑钻表面形貌。金刚石膜均匀性很差,晶粒尺寸很大,且不致密,莫桑钻样品在沉积后完全失透(见附图1)。说明了本发明采用纳米金刚石悬浮液进行超高密度金刚石形核的优越性。With reference to accompanying drawing 7, left side: Adopt 5 micron and 1 micron mixed diamond powder ultrasonic grinding 2 hours pretreatment nucleation method and two-stage method (nucleation and growth) to prepare the surface morphology of diamond film coating Moissanite. Discrete large-sized grains appear, and the fire color of the coated Moissanite becomes poor; Right: The surface morphology of the diamond film-coated Moissanite grown directly after cleaning without any pretreatment. The uniformity of the diamond film is very poor, the grain size is very large, and it is not dense, and the Moissanite sample is completely devitrified after deposition (see accompanying drawing 1). It illustrates the superiority of the present invention in adopting the nano-diamond suspension to carry out ultra-high-density diamond nucleation.
参照附图8,金刚石膜涂层莫桑钻的维氏硬度压痕照片。采用上海联尔设备有限公司生产的HVT-100型显微硬度计进行测试。采用标准金刚石四棱锥压头。载荷P为0.025kg(0.245N),保压时间10秒。每个样品测试10个点,用激光共聚焦显微镜测量金刚石膜涂层莫桑钻维氏硬度压痕平均对角线长度,按公式:Hv=1854.4P/a 2计算维氏硬度。图中显微尺标为4μm。按图示压痕测量数据计算的维氏硬度高达117GPa,按10个测试点计算的平均硬度为84±7GPa,金刚石硬度为80-110GPa。按本发明技术制备的金刚石膜涂层莫桑钻达到了金刚石的硬度。 Referring to accompanying drawing 8, the Vickers hardness indentation photograph of diamond film coating Moissanite. The HVT-100 microhardness tester produced by Shanghai Lianer Equipment Co., Ltd. was used for testing. Standard diamond pyramid indenter is used. The load P is 0.025kg (0.245N), and the holding time is 10 seconds. Test 10 points for each sample, measure the average diagonal length of the diamond film-coated Moissanite Vickers hardness indentation with a laser confocal microscope, and calculate the Vickers hardness according to the formula: Hv=1854.4P/a 2 . The microscale in the figure is 4 μm. The Vickers hardness calculated according to the indentation measurement data shown in the figure is as high as 117GPa, the average hardness calculated according to 10 test points is 84±7GPa, and the diamond hardness is 80-110GPa. The diamond film-coated moissanite prepared by the technology of the invention has reached the hardness of diamond.
参照附图9,金刚石膜涂层莫桑钻的抗划伤能力。采用划痕试验仪进行测试,单晶金刚石划针,最大刻划压力20N,刻划距离2mm,在进行刻划的同时记录声发射信号。(a)未涂层样品(原石):在约8N时开始出现声发射信号(3N时的信号为螺丝钉不慎落地时的噪声)。光学显微镜图像显示划针已经刻入莫桑石,形成明显的沟槽,在沟槽两侧呈现许多不连续的侧向裂纹,与声发射谱上的一系列不连续声发射峰相对应。(b)金刚石膜涂层莫桑石;直至接近20N时才出现声发射峰,从光镜照片来看,此时划针已经压破金刚石膜表面,金刚石膜发生脆性断裂,断口非常平整,膜已卷起,说明金刚石膜本身具有不小的应力,且为压应力。因此,通过实验可以说明,表面具有金刚石膜的莫桑石饰品只有在压力足 够大(接近20N)时才被压裂。相比于没有镀金刚石膜的饰品而言,其抗划伤性能大大提升了。Referring to accompanying drawing 9, the scratch resistance ability of diamond film coating moissanite. The scratch tester is used for testing, single crystal diamond stylus, the maximum scribing pressure is 20N, the scribing distance is 2mm, and the acoustic emission signal is recorded while scratching. (a) Uncoated sample (rough stone): The acoustic emission signal begins to appear at about 8N (the signal at 3N is the noise when the screw accidentally lands). The optical microscope image shows that the scribe needle has been carved into the moissanite, forming obvious grooves, showing many discontinuous lateral cracks on both sides of the grooves, corresponding to a series of discontinuous acoustic emission peaks on the acoustic emission spectrum. (b) Moissanite coated with diamond film; the acoustic emission peak does not appear until it is close to 20N. According to the light microscope photo, the scribing needle has broken the surface of the diamond film at this time, and the diamond film has a brittle fracture, and the fracture is very smooth. It has been rolled up, indicating that the diamond film itself has not a small stress, and it is compressive stress. Therefore, it can be shown through experiments that the moissanite jewelry with a diamond film on the surface is only crushed when the pressure is large enough (close to 20N). Compared with jewelry without diamond coating, its scratch resistance performance is greatly improved.
参照附图10金刚石膜涂层的厚度。采用预制断口的镶嵌样品,在场发射扫描电镜下测量了金刚石膜涂层的厚度。从图示断口图像测量的金刚石膜涂层厚度为0.2-0.3μm。With reference to the thickness of accompanying drawing 10 diamond film coatings. The thickness of the diamond film coating was measured under a field emission scanning electron microscope using a prefabricated fractured mosaic sample. The diamond film coating thickness measured from the illustrated fracture images is 0.2–0.3 μm.
参照附图11采用本发明技术批量生产的6.5mm(1克拉)金刚石膜涂层莫桑钻。样品台直径为62mm,可容许一次沉积55粒6.5mm(1克拉)金刚石膜涂层莫桑钻。从附图12可以看出批量沉积的莫桑石饰品的均匀性很好,这得益于可以精确地控制每一粒莫桑石饰品都以完全相同的压力压入保形孔,从而保证了在大量莫桑石饰品沉积时的温度均匀性。这是本发明的保形样品台的另一优越性。With reference to accompanying drawing 11, adopt the 6.5mm (1 carat) diamond film coating Moissanite of the present invention's technology batch production. The diameter of the sample stage is 62mm, which can allow 55 grains of 6.5mm (1 carat) diamond film-coated Moissanite to be deposited at one time. It can be seen from Figure 12 that the uniformity of the moissanite ornaments deposited in batches is very good, thanks to the precise control that each grain of moissanite ornaments can be pressed into the conformal hole with exactly the same pressure, thus ensuring Temperature uniformity during deposition of large volumes of moissanite jewelry. This is another advantage of the conformal sample stage of the present invention.
实施例二:采用微波等离子体CVD金刚石膜沉积设备制备金刚石膜涂层莫桑钻Example 2: Preparation of diamond film-coated Moissanite by microwave plasma CVD diamond film deposition equipment
采用国产6KW级不锈钢谐振腔微波等离子体CVD金刚石膜沉积系统。莫桑钻形核预处理工艺与采用直流电弧等离子体喷射CVD时完全相同。The domestic 6KW grade stainless steel resonant cavity microwave plasma CVD diamond film deposition system is adopted. The pretreatment process of Moissanite nuclei is exactly the same as that of DC arc plasma jet CVD.
附图12,采用微波等离子体CVD系统制备的金刚石膜涂层莫桑钻和未涂层样品(原石)火色的对比。中心位置:未镀膜原石,左和右均为金刚石膜涂层样品。沉积工艺参数:功率:3KW;压力:4.04KPa;甲烷浓度:5%;等离子体刻蚀时间:5分钟;沉积时间:1.5小时;样品台直接与微波等离子体球接触(浸没式沉积)。可见采用微波等离子体CVD制备的金刚石膜涂层莫桑钻与未镀膜原石的火色没有区别。沉积工艺的唯一区别是微波等离子体CVD工艺没有采用两段法(形核和生长),而是使用一个甲烷浓度(5%)把形核和生长贯穿进行到底。Accompanying drawing 12, the comparison of the fire color of the diamond film-coated Moissanite prepared by the microwave plasma CVD system and the uncoated sample (raw stone). Center position: Uncoated rough, left and right diamond coated samples. Deposition process parameters: power: 3KW; pressure: 4.04KPa; methane concentration: 5%; plasma etching time: 5 minutes; deposition time: 1.5 hours; the sample stage is directly in contact with the microwave plasma ball (immersion deposition). It can be seen that there is no difference in fire color between the diamond film-coated Moissanite prepared by microwave plasma CVD and the uncoated rough. The only difference in the deposition process is that the microwave plasma CVD process does not use a two-stage method (nucleation and growth), but uses a methane concentration (5%) to carry nucleation and growth through to the end.
采用微波等离子体CVD制备金刚石膜涂层莫桑钻和采用直流电弧等离子体CVD制备的金刚石膜涂层莫桑钻在各种性能上没有什么区别。There is no difference in various properties between the diamond film-coated Moissanite prepared by microwave plasma CVD and the diamond film-coated Moissanite prepared by DC arc plasma CVD.
虽然采用热丝CVD也同样能够制备金刚石膜涂层莫桑钻,但由于热灯丝的温度较低,气体活化不充分,导致原子氢浓度很低,严重影响金刚石膜的质量。因此,不建议采用。Although hot-filament CVD can also be used to prepare diamond film-coated moissanite, due to the low temperature of the hot filament and insufficient gas activation, the concentration of atomic hydrogen is very low, which seriously affects the quality of the diamond film. Therefore, it is not recommended.
以上所述仅为本发明的实施例,并非限制本发明的保护范围,凡是利用本发明说明书内容所做的等同结构或者等同流程变换,直接或者间接运用在其他相关技术领域,均应该包含在本发明的专利保护范围内。The above is only an embodiment of the present invention, and does not limit the protection scope of the present invention. Any equivalent structure or equivalent process conversion made by using the content of the description of the present invention, directly or indirectly used in other related technical fields, should be included in this document. inventions within the scope of patent protection.

Claims (9)

  1. 一种金刚石膜涂层饰品,其特征是在莫桑石饰品表面镀有一层金刚石膜涂层,所述金刚石膜平均晶粒度50纳米-200纳米,表面粗糙度小于10nm,金刚石膜厚度0.1-0.5微米。A diamond film-coated ornament is characterized in that a layer of diamond film coating is coated on the surface of the moissanite ornament, the average grain size of the diamond film is 50 nanometers to 200 nanometers, the surface roughness is less than 10nm, and the thickness of the diamond film is 0.1-200 nanometers. 0.5 microns.
  2. 根据权利要求1所述的金刚石膜涂层饰品,其特征在于,所述金刚石膜涂层饰品通过一下步骤制备得到:The diamond film-coated ornament according to claim 1, wherein the diamond film-coated ornament is prepared through the following steps:
    1)在纳米金刚石粉末悬浮液中对莫桑石饰品进行超声研磨预处理;纳米金刚石粒度在5纳米至200纳米之间,所述纳米金刚石粉末的浓度为5%-20%,超声研磨预处理的时间为1小时∽6小时;1) Ultrasonic grinding pretreatment is carried out to moissanite jewelry in the suspension of nano-diamond powder; The time is 1 hour ∽ 6 hours;
    2)将莫桑石饰品从所述纳米金刚石粉末悬浮液中取出,并进行清洗;2) Moissanite ornaments are taken out from the nano-diamond powder suspension, and cleaned;
    3)对莫桑石饰品施加一定的力,将其压入预先设定的纯铜保形样品台倒圆锥形孔中,使其与圆锥形孔形成紧密接触,即面接触,压力为50kgf∽250kgf;3) Apply a certain force to the moissanite jewelry, and press it into the pre-set inverted conical hole of the pure copper conformal sample stand, so that it forms a close contact with the conical hole, that is, surface contact, and the pressure is 50kgf∽ 250kgf;
    4)将莫桑石饰品连同所述保形样品台一同放置于金刚石膜沉积炉中进行等离子体处理,所述等离子体处理的温度为700℃∽1000℃,所述等离子体处理的时间为5分钟∽30分钟;4) Place the moissanite jewelry together with the conformal sample stage in a diamond film deposition furnace for plasma treatment, the temperature of the plasma treatment is 700°C∽1000°C, and the time of the plasma treatment is 5 minute ∽ 30 minutes;
    5)通入甲烷,进行原位金刚石膜沉积;金刚石膜沉积采用“两段法”:形核阶段和生长阶段,形核阶段甲烷的浓度为3%∽10%,时间为5∽20分钟;生长阶段甲烷浓度为0.5%∽2%,时间为10分钟∽120分钟;所述沉积炉的压力设置为3kPa∽20kPa。5) Introduce methane for in-situ diamond film deposition; diamond film deposition adopts "two-stage method": nucleation stage and growth stage, the concentration of methane in the nucleation stage is 3%∽10%, and the time is 5∽20 minutes; The methane concentration in the growth stage is 0.5%∽2%, and the time is 10 minutes∽120 minutes; the pressure of the deposition furnace is set at 3kPa∽20kPa.
  3. 根据权利要求2所述的金刚石膜涂层饰品,其特征在于,所述步骤4)和步骤5)中,所述等离子体处理和原位金刚石膜沉积采用直流电弧等离子体喷射CVD或微波等离子体CVD。The diamond film coated ornament according to claim 2, characterized in that, in said step 4) and step 5), said plasma treatment and in-situ diamond film deposition adopt DC arc plasma jet CVD or microwave plasma CVD.
  4. 根据权利要求1、2或3所述的金刚石膜涂层饰品,其特征在于,所述莫桑石饰品采用纳米金刚石悬浮液进行超声研磨预处理;所述纳米金刚石悬浮液中金刚石粒度在5纳米至200纳米之间,所述纳米金刚石颗粒的浓度为5%-20%,超声研磨预处理的时间为1小时∽6小时。According to claim 1, 2 or 3 described diamond film coating jewelry, it is characterized in that, described Moissanite jewelry adopts nano-diamond suspension to carry out ultrasonic grinding pretreatment; The diamond particle size in described nano-diamond suspension is 5 nanometers Between 200 nanometers, the concentration of the nano-diamond particles is 5%-20%, and the ultrasonic grinding pretreatment time is 1 hour∽6 hours.
  5. 根据权利要求1、2或3所述的金刚石膜涂层饰品,其特征在于,所述纯铜保形样品台具有倒圆锥形保形孔,其锥角略小于莫桑石饰品亭部倒棱锥的锥角,偏差为0°∽-2°,在使用时施加一定的力将莫桑石饰品压入保形样品台的倒圆锥形保形孔中,迫使圆锥孔发生塑性变形,与置于其上的莫桑钻饰品亭部棱角形成面接触。The diamond film-coated ornament according to claim 1, 2 or 3, wherein the pure copper conformal sample stage has an inverted conical conformal hole, and its cone angle is slightly smaller than the inverted pyramid at the pavilion of the moissanite ornament The cone angle is 0°∽-2°. When in use, a certain force is applied to press the moissanite jewelry into the inverted conical conformal hole of the conformal sample stand, forcing the conical hole to undergo plastic deformation. The edges and corners of the moissanite jewelry pavilion on it form surface contact.
  6. 一种饰品表面制备金刚石膜涂层的方法,其特征在于,所述金刚石膜涂层饰品通过以下步骤制备得到:A method for preparing a diamond film coating on the surface of an ornament, characterized in that the diamond film-coated ornament is prepared through the following steps:
    1)在纳米金刚石粉末悬浮液中对莫桑石饰品进行超声研磨预处理;纳米金刚石粒度在5纳米至200纳米之间,所述纳米金刚石粉末的浓度为5%-20%,超声研磨预处理的时间为1小时∽6小时;1) Ultrasonic grinding pretreatment is carried out to moissanite jewelry in the suspension of nano-diamond powder; The time is 1 hour ∽ 6 hours;
    2)将莫桑石饰品从所述纳米金刚石粉末悬浮液中取出,并进行清洗;2) Moissanite ornaments are taken out from the nano-diamond powder suspension, and cleaned;
    3)对莫桑石饰品施加一定的力,将其压入预先设定的纯铜保形样品台倒圆锥形孔中,使其与圆锥形孔形成紧密接触,即面接触,压力为50kgf∽250kgf;3) Apply a certain force to the moissanite jewelry, and press it into the pre-set inverted conical hole of the pure copper conformal sample stand, so that it forms a close contact with the conical hole, that is, surface contact, and the pressure is 50kgf∽ 250kgf;
    4)将莫桑石饰品连同所述保形样品台一同放置于金刚石膜沉积炉中进行等离子体处理,所述等离子体处理的温度为700℃∽1000℃,所述等离子体处理的时间为5分钟∽30分钟;4) Place the moissanite jewelry together with the conformal sample stage in a diamond film deposition furnace for plasma treatment, the temperature of the plasma treatment is 700°C∽1000°C, and the time of the plasma treatment is 5 minute ∽ 30 minutes;
    5)通入甲烷,进行原位金刚石膜沉积;金刚石膜沉积采用“两段法”:形核阶段和生长阶段,形核阶段甲烷的浓度为3%∽10%,时间为5∽20分钟;生长阶段甲烷浓度为0.5%∽2%,时间为10分钟∽120分钟;所述沉积炉的压力设置为3kPa∽20kPa。5) Introduce methane for in-situ diamond film deposition; diamond film deposition adopts "two-stage method": nucleation stage and growth stage, the concentration of methane in the nucleation stage is 3%∽10%, and the time is 5∽20 minutes; The methane concentration in the growth stage is 0.5%∽2%, and the time is 10 minutes∽120 minutes; the pressure of the deposition furnace is set at 3kPa∽20kPa.
  7. 根据权利要求6所述的方法,其特征在于,所述步骤4)和步骤5)中,所述等离子体处理和原位金刚石膜沉积采用直流电弧等离子体喷射CVD或微波等离子体CVD。The method according to claim 6, characterized in that, in the step 4) and step 5), the plasma treatment and the in-situ diamond film deposition adopt DC arc plasma jet CVD or microwave plasma CVD.
  8. 根据权利要求6或7所述的方法,其特征在于,所述莫桑石饰品采用纳米金刚石悬浮液进行超声研磨预处理;所述纳米金刚石悬浮液中金刚石粒度在5纳米至200纳米之间,所述纳米金刚石颗粒的浓度为5%-20%,超声研磨预处理的时间为1小时∽6小时。The method according to claim 6 or 7, wherein the moissanite jewelry adopts a nano-diamond suspension for ultrasonic grinding pretreatment; the diamond particle size in the nano-diamond suspension is between 5 nanometers and 200 nanometers, The concentration of the nano-diamond particles is 5%-20%, and the ultrasonic grinding pretreatment time is 1 hour∽6 hours.
  9. 根据权利要求6或7所述的方法,其特征在于,所述纯铜保形样品台具有倒圆锥形保形孔,其锥角略小于莫桑石饰品亭部倒棱锥的锥角,偏差为0°∽-2°,在使用时施加一定的力将莫桑石饰品压入保形样品台的倒圆锥形保形孔中,迫使圆锥孔发生塑性变形,与置于其上的莫桑钻饰品亭部棱角形成面接触。The method according to claim 6 or 7, wherein the pure copper conformal sample stage has an inverted conical conformal hole, and its cone angle is slightly smaller than the cone angle of the Moissanite jewelry pavilion inverted pyramid, and the deviation is 0°∽-2°, apply a certain force during use to press the moissanite jewelry into the inverted conical conformal hole of the conformal sample stand, forcing the conical hole to undergo plastic deformation, and the moissanite placed on it The corners and corners of the ornament pavilion form surface contact.
PCT/CN2021/118355 2021-09-13 2021-09-14 Diamond film coated ornament and preparation method for diamond film coating WO2023035287A1 (en)

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