WO2023016072A1

WO2023016072A1 - Electrohydrodynamic multi-spray head apparatus

Info

Publication number: WO2023016072A1
Application number: PCT/CN2022/097368
Authority: WO
Inventors: 徐洲龙; 黄永安; 董淼; 陈建魁
Original assignee: 广东思谷智能技术有限公司
Priority date: 2021-08-09
Filing date: 2022-06-07
Publication date: 2023-02-16
Also published as: CN113578555A

Abstract

Disclosed is an electrohydrodynamic multi-spray head apparatus, comprising an ink seat, sealing connectors, a flow channel plate, precision spray heads, and a printing base. The sealing connectors used for connecting to enable ink to flow in and out are provided on an upper surface of the ink seat; the flow channel plate for guiding the ink is provided on a lower surface of the ink seat; the flow channel plate is provided with a plurality of precision spray heads; the plurality of precision spray heads are all communicated with the flow channel plate; the printing base is provided below the precision spray heads at an interval; nozzles of the plurality of precision spray heads are all provided facing the printing base; a power supply apparatus is separately electrically connected to the ink seat and the printing base. In the present apparatus, the ink is dispersed into a large number of micro-nano-scale small droplets in a mode of high voltage of a ten thousand volts level, such that micro-nano-scale thin film manufacturing is implemented, and the surface is flat and uniform and does not have bumps and pits; and a multi-spray heads mode is adopted to improve the yield rate, such that the efficiency of thin film manufacturing is greatly improved, and the production capacity of an industrial field is improved.

Description

An electrofluid multi-nozzle device

technical field

The invention belongs to the related technical field of electrofluid nozzles, and in particular relates to an electrofluid multi-nozzle device.

Background technique

With the development of nanotechnology, electrofluid spray film formation, as the most promising process method for preparing micro-nano-scale thin films, has attracted widespread attention from academic and industrial circles. The basic principle of electrohydrodynamic spray is based on electrohydrodynamic spray, which evenly spreads small ink droplets on electronic chips or other components that need to be filmed. The preparation objects include semiconductor photoresist films, flat panel display glass coatings, organic packaging layers, metal films, photoelectric conversion films, etc., involving display, electronics, energy and other fields.

However, the electrofluid spray in the prior art produces large droplets, poor uniformity, low surface flatness, and prone to bumps and pits, which affect the quality of the film.

Contents of the invention

Based on the deficiencies of the prior art, the present invention provides an electrofluid multi-nozzle device, which uniformly splits the ink into micro-nano-scale droplets by applying a high-voltage electric field, and spreads them on the surface of the target substrate.

An electrofluid multi-jet device, comprising an ink base, a plurality of precision nozzles for ink jetting, a power supply unit, and a printing base, the upper surface of the ink base is provided with a sealed connection head for connecting the ink in and out, the ink The lower surface of the seat is provided with a flow channel plate for guiding the ink, and the flow channel plate is provided with a plurality of precision nozzles, and the plurality of precision nozzles are all connected with the flow channel plate, and the precision nozzles are arranged at intervals below There is the printing base, the nozzles of a plurality of precision nozzles are all set towards the printing base, and the power supply device is electrically connected with the ink base and the printing base respectively.

Further, an annular micro-channel is opened on the channel plate, and the precision nozzles are equidistantly distributed in the annular micro-channel.

Further, there are two sealing connectors, one of which is used to connect ink flowing into the ink holder, and the other sealing connector is used to connect ink to flow out of the ink holder.

Further, the inner diameters of the plurality of precision nozzles are all micron-level apertures, and the power supply device has a voltage of 20KV.

Further, the distance between the nozzles of the precision spray head and the printing base is 30-60 mm.

Further, it also includes a plurality of anti-collision posts, and a plurality of anti-collision posts are arranged around all precision sprinkler heads.

Further, it also includes a pressure plate, the pressure plate is provided with a plurality of through holes for positioning the precision nozzle on the flow channel plate, and the pressure plate is connected with the flow channel plate.

Further, the upper surface of the flow channel plate is provided with a first groove, and a peripheral sealing ring is provided in the groove, and a nozzle sealing ring is provided on each of the precision nozzles, and a nozzle sealing ring is provided on the flow channel plate. The second groove that the sealing ring fits into.

Further, a recessed platform is provided on the upper surface of the ink holder, the sealing connection head is arranged in the lower recessed platform, and an anti-corrosion sealing ring is provided between the lower recessed platform and the sealing connection head.

Further, the ink seat, flow channel plate and precision nozzle are all made of metal materials, and the anti-corrosion sealing ring, nozzle sealing ring and peripheral sealing ring are all made of VMQ silicone.

Generally speaking, compared with the prior art, the present invention mainly has the following beneficial technical effects:

The ink is connected to the ink seat through the sealed connection head, and the power supply device is respectively connected with the ink seat and the printing base, so that the ink in the ink seat is activated under the high-voltage electrostatic field of the 10,000-volt level, and then the ink is activated. It is dispersed into a large number of small micro-nano droplets, and at the same time, the ink in the ink seat communicates with a plurality of the precision nozzles through the flow channel plate, so that the precision nozzles are all charged with high voltage, and the connection between the precision nozzles and the printing base The high voltage of the 10,000-volt level is applied between them to form a strong electric field, the ink is sprayed from the precision nozzle, and evenly spread on the surface of the electronic chip or other components that need to be filmed on the printing base, and the spraying is completed. This device passes through the 10,000-volt The high-level high-pressure method disperses the ink into a large number of micro-nano-level small droplets, so as to realize the micro-nano-level thin film manufacturing and the surface is flat and uniform without bumps and pits, and the yield rate is improved. The multi-nozzle method is used to greatly improve the yield The efficiency of film preparation is improved. The preparation objects include semiconductor photoresist film, flat panel display glass coating, organic packaging layer, metal film, and photoelectric conversion film. It has a wide range of applications and improves the production capacity of industrial sites.

Description of drawings

The present invention can be further understood from the following description taken in conjunction with the accompanying drawings. The components in the figures are not necessarily to scale, emphasis instead being placed upon illustrating the principles of the embodiments. Like reference numerals designate corresponding parts in the different views.

Fig. 1 is a schematic diagram of the structure of an electrofluid multi-nozzle device in an embodiment of the present invention;

Fig. 2 is the front view of electrofluid multi-nozzle device in the embodiment of the present invention;

3 is a front sectional view of an electrofluid multi-nozzle device in an embodiment of the present invention;

Fig. 4 is a working principle diagram of the electrofluid multi-nozzle device in the embodiment of the present invention;

Fig. 5 is a schematic diagram of enlarged structure at I place in the embodiment of the present invention;

Fig. 6 is a schematic diagram of the structure of the ink holder in the embodiment of the present invention;

Fig. 7 is a cross-sectional view of the connection between the precision nozzle and the flow channel plate in the embodiment of the present invention.

Throughout the drawings, the same reference numerals are used to designate the same elements or structures, wherein:

1. Sealed connection head; 2. Anti-corrosion sealing ring; 3. Ink seat; 4. Peripheral sealing ring; 5. Flow channel plate; 6. Precision nozzle; 7. Nozzle sealing ring; 8. Pressure plate; ;10. Printing abutment; 11. Annular microfluidic channel; 12. Power supply device; 13. Through hole; 14. First groove; 15. Second groove; 16. Lower concave platform; 17. Connector body; 18. Tightening part; 19. Locking part.

Detailed ways

In order to make the purpose, technical solutions and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with its embodiments; it should be understood that the specific embodiments described here are only used to explain the present invention and are not intended to limit the present invention. invention. Other systems, methods and/or features of this embodiment will become apparent to those skilled in the art after reviewing the following detailed description. It is intended that all such additional systems, methods, features and advantages be included within this description, be within the scope of the invention, and be protected by the following claims. Additional features of the disclosed embodiments are described in, and will be apparent from, the following detailed description.

In the drawings of the embodiments of the present invention, the same or similar symbols correspond to the same or similar components; The orientation or positional relationship indicated by etc. is based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or component must have a specific orientation, use a specific Orientation structure and operation, therefore, the terms describing the positional relationship in the drawings are only for illustrative purposes, and should not be construed as limitations on this patent. Those of ordinary skill in the art can understand the specific meanings of the above terms according to specific situations.

In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described this time are only used to explain the present invention, not to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below may be combined with each other as long as they do not constitute a conflict with each other.

An electrofluid multi-jet device, comprising an ink base 3, a plurality of precision nozzles 6 for inkjet, a power supply unit 12, and a printing base 10, the power supply unit 12 is preferably a 10,000-volt voltage, and the ink base 3 The upper surface is provided with a sealing connection head 1 for connecting the ink in and out, and the lower surface of the ink seat 3 is provided with a flow channel plate 5 for guiding the ink. The flow channel plate 5 is provided with a plurality of precision nozzles 6, many Each of the precision nozzles 6 is in communication with the flow channel plate 5, the printing base 10 is arranged at intervals below the precision nozzles 6, and the nozzles of a plurality of precision nozzles 6 are all arranged towards the printing base 10, The power supply device 12 is electrically connected to the ink holder 3 and the printing base 10 respectively.

Specifically, as shown in Figures 1-7, the ink is connected to the ink holder 3 through the sealed connection head 1, and the power supply device 12 is connected to the ink holder 3 and the printing base 10 respectively, so that the ink holder 3 The ink is excited under the high-voltage electrostatic field of the 10,000-volt level, and then the ink is dispersed into a large number of micro-nano-scale droplets. At the same time, the ink in the ink seat 3 communicates with the multiple precise The nozzles 6 are connected so that the precision nozzles 6 are charged with high voltage, and the high voltage of 10,000 volts is applied between the precision nozzles 6 and the printing base 10 to form a strong electric field, and the ink is ejected from the precision nozzles 6 and spread evenly on the printing surface. The surface of the electronic chip or other components that need to be filmed on the base 10 is sprayed. This device disperses the ink into a large number of micro-nano-scale droplets through a high-pressure method of the 10,000-volt level, thereby realizing a micro-nano-scale film. Manufactured and the surface is flat and uniform without bumps and pits, which improves the yield rate and adopts the method of multi-nozzles, which greatly improves the efficiency of film preparation. The preparation objects include semiconductor photoresist films, flat panel display glass coatings, and organic packaging layers. , metal film, and photoelectric conversion film, with a wide range of applications, which improves the production capacity of the industrial site.

In one of the embodiments, as shown in FIG. 6 , an annular micro-channel 11 is opened on the flow channel plate 5, and the precision nozzles 6 are equidistantly distributed in the annular micro-channel 11. When in the seat 3, the ink seat 3 flows through the channel plate 5, and the ink is evenly dispersed along the annular micro channel 11 through the annular micro channel 11 on the channel plate 5, so that the equidistant in the annular micro channel 11 The distributed precision spray heads 6 distribute the same ink, which improves the spraying effect of the precision spray heads 6 .

Further, there are two sealed connection heads 1, one of which is used to connect the ink to flow into the ink seat 3, and the other sealed connection head 1 is used to connect the ink to flow out of the ink holder 3. Seat 3, when the ink in the ink seat is too little, ink can be filled into the ink seat 3 through one of the sealed connectors 1, and ink can be filled into the ink seat 3 through another sealed connector 1 when the ink in the ink seat is too much Extract the excess ink inside, which is convenient for users to operate and easier to use.

In one of the embodiments, the inner diameters of the plurality of precision nozzles 6 are all micron-scale apertures, and the power supply device 12 is a 20KV-level voltage, and the 20KV-level voltage enables the ink to disperse into smaller micronano-scale droplets At the same time, the inner diameter of the precision nozzle 6 is a micron-level aperture so that the size of the ejected ink droplet can be reduced, and the ink flows through the inside of the hole of the precision nozzle 6, so that it can form a nano-level liquid at the tip of the nozzle of the precision nozzle 6. Drops, improve spraying accuracy.

Further, the distance between the nozzles of the precision nozzle 6 and the printing base 10 is 30-60 millimeters, so that the strength of the strong electric field formed between the nozzles of the precision nozzle 6 and the printing base 10 is more reasonable. It is beneficial for the ink to be ejected from the precision nozzle 6 .

In one of the embodiments, it also includes a plurality of anti-collision posts 9, and a plurality of anti-collision posts 9 are arranged around all the precision nozzles 6. The anti-collision posts 9 are made of stainless steel to avoid accidental or external forces. The precision nozzle 6 is damaged under the action.

In one of the embodiments, it also includes a pressure plate 8, which is provided with a plurality of through holes 13 for positioning the precision nozzle 6 on the flow channel plate 5, the pressure plate 8 and the flow channel The connection of the plate 5 can accurately position the precision nozzle 6, so that the precision nozzle 6 is not easy to shake.

In one of the embodiments, the upper surface of the flow channel plate 5 is provided with a first groove 14, and the peripheral sealing ring 4 is arranged in the groove, and the nozzle sealing ring 7 is arranged on the precision nozzle 6, so that The flow channel plate 5 is provided with a second groove 15 matching the nozzle sealing ring 7, and the upper surface of the ink base 3 is provided with a lower concave platform 16, and the sealed connection head 1 is arranged in the lower concave platform 16. , an anti-corrosion sealing ring 2 is provided between the lower concave platform 16 and the sealing connection head 1; through the second groove 15, the nozzle sealing ring 7 can be evenly placed between the flow channel plate 5 and the precision nozzle 6 space, to prevent ink leakage; through the first groove 14 provided on the upper surface of the flow channel plate 5, the peripheral sealing ring 4 can be stuck in the first groove 14, the flow channel plate 5 is placed under the ink seat 3, and the ink seat 3 Press the peripheral sealing ring 4 tightly to ensure the sealing of the flow channel plate 5 and prevent ink leakage; through the lower concave platform 16, the anti-corrosion sealing ring 2 can be placed inside to protect the anti-corrosion sealing ring 2 No deformation and movement, the structure is more reasonable and stable.

In one embodiment, as shown in FIG. 5 , the sealing connector 1 includes a connector body 17 , a tightening part 18 and a locking part 19 , and the sealing between the tightening part 18 and the ink base 3 is achieved by turning the tightening part 18 . In the process of turning the tightening part 18 at the same time, the locking part 19 extends to the two opposite inner walls of the lower recessed table 16 until the locking part 19 is clamped on the two opposite inner walls of the lower recessed table 16, that is, the sealing joint 1 adopts an inverted Hook-type joints can prevent the pipeline from falling off.

In one of the embodiments, the ink seat 3, the flow channel plate 5 and the precision nozzle 6 are all made of metal materials, so that the ink seat 3, the flow channel plate 5 and the precision nozzle 6 have good electrical conductivity, and the anti-corrosion The sealing ring 2, the nozzle sealing ring 7 and the peripheral sealing ring 4 are all made of VMQ silica gel. VMQ silica gel is based on silicon obtained from quartz, and is formed by attaching side chains such as methyl and vinyl to silicon atoms. Saturated non-polar rubber with good ink corrosion resistance.

While the invention has been described above with reference to various embodiments, it should be understood that many changes and modifications may be made without departing from the scope of the invention. That said, the methods, systems and devices discussed above are examples. Various configurations may omit, substitute, or add various procedures or components as appropriate. For example, in alternative configurations, the methods may be performed in an order different from that described, and/or various components may be added, omitted, and/or combined. Furthermore, features described with respect to certain configurations may be combined in various other configurations, as different aspects and elements of the configurations may be combined in a similar manner. Furthermore, elements therein may be updated as technology develops, ie, many of the elements are examples and do not limit the scope of the disclosure or claims.

Specific details are given in the description to provide a thorough understanding of example configurations including implementations. However, configurations may be practiced without these specific details, eg, well-known circuits, procedures, algorithms, structures and techniques have been shown without unnecessary detail in order to avoid obscuring the configuration. This description provides example configurations only, and does not limit the scope, applicability or configurations of the claims. Rather, the preceding description of the configurations will provide those skilled in the art with an enabling description for implementing the described techniques. Various changes may be made in the function and arrangement of elements without departing from the spirit or scope of the disclosure.

In conclusion, it is intended that the foregoing detailed description be considered illustrative rather than restrictive, and should be understood as defining the spirit and scope of the invention. The above embodiments should be understood as only for illustrating the present invention but not for limiting the protection scope of the present invention. After reading the contents of the present invention, skilled persons can make various changes or modifications to the present invention, and these equivalent changes and modifications also fall within the scope defined by the claims of the present invention.

Claims

An electrofluid multi-jet device is characterized in that it comprises an ink base (3), a plurality of precision nozzles (6) for ink jetting, a power supply unit (12) and a printing base (10), the ink base ( 3) The upper surface is provided with a sealed connection head (1) for connecting the ink in and out, and the lower surface of the ink seat (3) is provided with a flow channel plate (5) for guiding the ink, and the flow channel plate (5) A plurality of said precision nozzles (6) are provided, and said precision nozzles (6) are all in communication with said flow channel plate (5), and said printing bases (10) are arranged at intervals below said precision nozzles (6). ), the nozzles of a plurality of precision nozzles (6) are all set towards the printing base (10), and the power supply (12) is electrically connected to the ink base (3) and the printing base (10) respectively .
The electrofluid multi-nozzle device according to claim 1, characterized in that, the flow channel plate (5) is provided with an annular micro-channel (11), and the equidistant distribution in the annular micro-channel (11) Described precision nozzle (6).
The electrofluid multi-nozzle device according to claim 1, characterized in that there are two sealed connection heads (1), and one of the sealed connection heads (1) is used to connect the ink to flow into the ink seat (3), the other sealed connection head (1) is used to connect the ink to flow out of the ink seat (3).
The electrofluid multi-nozzle device according to claim 1, characterized in that the inner diameters of the plurality of precision nozzles (6) are all micron-level apertures, and the power supply device 12 has a voltage of 20KV.
The electrofluid multi-nozzle device according to claim 1, characterized in that the distance between the nozzles of the precision nozzle (6) and the printing base (10) is 30-60 mm.
The electrofluid multi-nozzle device according to claim 1, further comprising a plurality of anti-collision posts (9), and the plurality of anti-collision posts (9) are arranged around all precision nozzles (6).
The electrofluid multi-nozzle device according to claim 1, characterized in that it also includes a pressure plate (8), and the pressure plate (8) is provided with a plurality of holes for positioning the precision nozzle (6) in the flow channel. The through hole (13) of the plate (5), the pressure plate (8) is connected with the flow channel plate (5).
The electrofluid multi-nozzle device according to claim 1, wherein a first groove (14) is opened on the upper surface of the flow channel plate (5), and a peripheral sealing ring (4) is arranged in the groove , the precision nozzles (6) are provided with nozzle sealing rings (7), and the flow channel plate is provided with a second groove (15) matching the nozzle sealing rings (7).
The electrofluid multi-nozzle device according to claim 1, characterized in that, the upper surface of the ink seat (3) is provided with a recessed platform (16), and the sealed connection head (1) is arranged in the recessed platform , an anti-corrosion sealing ring (2) is arranged between the lower concave platform (16) and the sealing joint.
The electrofluid multi-nozzle device according to claim 9, characterized in that, the ink holder (3), the flow channel plate (5) and the precision nozzle (6) are all made of metal materials, and the anti-corrosion sealing ring ( 2), the nozzle sealing ring (7) and the peripheral sealing ring (4) are all made of VMQ silicone.