WO2023011592A1 - Composant supérieur de creuset et champ thermique de four monocristallin - Google Patents

Composant supérieur de creuset et champ thermique de four monocristallin Download PDF

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Publication number
WO2023011592A1
WO2023011592A1 PCT/CN2022/110288 CN2022110288W WO2023011592A1 WO 2023011592 A1 WO2023011592 A1 WO 2023011592A1 CN 2022110288 W CN2022110288 W CN 2022110288W WO 2023011592 A1 WO2023011592 A1 WO 2023011592A1
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WO
WIPO (PCT)
Prior art keywords
crucible
side body
crucible side
support
curved portion
Prior art date
Application number
PCT/CN2022/110288
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English (en)
Chinese (zh)
Inventor
马少林
谢志宴
张龙龙
杨少平
李侨
马宝
周锐
邓浩
赵领航
程磊
Original Assignee
隆基绿能科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CN202121825651.6U external-priority patent/CN215800045U/zh
Priority claimed from CN202122388463.8U external-priority patent/CN216712312U/zh
Application filed by 隆基绿能科技股份有限公司 filed Critical 隆基绿能科技股份有限公司
Publication of WO2023011592A1 publication Critical patent/WO2023011592A1/fr

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    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure

Definitions

  • the present application relates to the technical field of crystal growth, in particular to a crucible side component and a single crystal furnace thermal field.
  • a crucible for supporting a quartz crucible is required in the crystal growth process.
  • This crucible is generally a graphite crucible or a carbon-carbon crucible.
  • Chinese patent CN211921739U discloses a split-type carbon-carbon crucible structure, as shown in Figure 5.
  • the carbon-carbon crucible is connected separately by the crucible side and the crucible support.
  • the connection method is the cooperation method of gravity contact.
  • a certain contact area is set between the upper end surface of the crucible support and the lower end surface of the crucible side.
  • the main defect is that during the crystal growth process, the hardness of the quartz crucible will decrease after being heated and become very soft.
  • the quartz crucible will squat down and tear quickly without other supports, resulting in the rapid outflow of silicon liquid. Thereby ironing through the bottom of the furnace or bellows, and then causing serious silicon leakage accidents.
  • the purpose of this application is to provide a crucible side and a crucible side assembly, which are used to improve the service life of the crucible side and the safety of production.
  • the application provides a crucible, including:
  • the crucible side body has an inverted cone-shaped bottom and a mounting hole at the center of the bottom;
  • the crucible bottom is positioned in the installation hole, the crucible bottom and the crucible side body are coaxially arranged, and the crucible bottom and the crucible side body are connected in a detachable locking manner.
  • the crucible side body and the crucible bottom are locked and connected.
  • the combination of the crucible side body and the crucible bottom will play a supporting role, which can prevent the occurrence of The quartz crucible quickly squats and tears, causing the silicon liquid to flow out and burn through the furnace bottom or bellows, thereby preventing serious silicon leakage accidents, ensuring production safety, and improving the service life of the crucible side;
  • Disassemble the locking connection the connection is tight and easy to disassemble.
  • the bottom of the crucible can be removed and the solid silicon in the crucible can be cleaned, which reduces the difficulty of cleaning.
  • the periphery of the installation hole is uniformly provided with a plurality of connecting holes along the circumferential direction; the edge of the bottom of the crucible is uniformly provided with a plurality of through holes along the circumferential direction, and the through holes correspond to the connecting holes one by one.
  • the main body of the crucible is fixedly connected.
  • the bottom of the crucible is threadedly connected with the main body of the crucible side.
  • the installation hole of the side body of the crucible is provided with internal threads, and the part connecting the bottom of the crucible with the installation hole is provided with external threads, and the two are tightly screwed together by threads. catch;
  • the crucible bottom and the crucible side body are respectively provided with a screw connection structure and a screw connection groove, and after aligning the screw connection structure of the crucible bottom with the screw connection groove of the crucible side body, through the way of screw connection Realize the locking connection of the two.
  • the effect of the integral crucible side body can be achieved by means of evenly distributed locking of the threaded connectors, which is convenient for disassembly and assembly.
  • the bottom of the crucible is an integrally formed stepped structure, including:
  • a base a plurality of through holes are arranged on the edge of the base;
  • the boss is arranged at the top center of the base, and the boss is fitly connected with the installation hole.
  • the upper surface of the base is in contact with the bottom surface of the crucible side body.
  • silicon leakage occurs, the silicon liquid will flow out from the connection between the boss and the mounting hole, and pass through the base.
  • the upper surface of the crucible flows out to the surroundings to prevent the silicon liquid from directly entering the center hole of the support rod from the bottom center of the crucible side body, thereby scalding through the bottom of the furnace or the bellows to cause an imperceptible silicon leakage accident.
  • the side wall of the boss is obliquely connected to the upper surface of the base, and the diameter of the upper end of the mounting hole is smaller than that of the lower end.
  • the side wall of the boss matched with the installation hole forms a diversion slope, which has the effect of diversion.
  • the ratio of the diameter d of the base to the diameter D of the middle part of the crucible body is 1/3-1/2.
  • the crucible side body, crucible bottom and threaded connectors are all made of C/C composite material.
  • the material has excellent characteristics of high temperature resistance and high toughness, and has a small specific gravity.
  • the crucible side made of this material is light in weight, good in toughness, easy to install and disassemble, and can well release the horizontal direction. expansion force.
  • the present application provides a crucible assembly, including:
  • the crucible is the crucible described in the first aspect
  • the supporting rod is arranged under the bottom of the crucible to carry the side of the crucible, and the supporting rod is detachably connected to the bottom of the base.
  • the bottom of the base is provided with a positioning groove
  • the top protrusion of the support rod is provided with a supporting platform adapted to the positioning groove
  • connection reliability between the supporting rod and the bottom of the crucible is improved through embedded positioning and installation.
  • the through holes are arranged in the positioning grooves.
  • the top end of the supporting rod puts pressure on the threaded connector, which plays a certain pre-tightening effect, and improves the reliability of the threaded connector connecting the crucible bottom and the crucible side body.
  • Another object of the present application is to provide a crucible side assembly and a single crystal furnace thermal field, which are used in the manufacture of single crystals, to solve the problem that when the graphite crucible or the crucible support rod breaks, the quartz crucible sinks and breaks, and the silicon liquid Outgoing technical issues.
  • the present application provides a crucible side assembly, which is used in the thermal field of a single crystal furnace, and the crucible side assembly includes: a crucible side body, a crucible bottom and a crucible support.
  • the crucible bottom is filled in the bottom opening of the crucible side body, and is used to cooperate with the crucible side body to carry the quartz crucible in the thermal field.
  • the crucible bottom can be separated from the crucible side body along the direction from the bottom of the crucible side body to the top of the crucible side body, and can cooperate with the crucible side body along the direction from the top of the crucible side body to the bottom of the crucible side body.
  • the crucible support is arranged at the bottom of the crucible side body and is used to support the crucible side body and the crucible bottom.
  • the crucible bottom is filled in the bottom opening of the crucible side body, and is used to cooperate with the crucible side body to carry the quartz crucible in the thermal field.
  • the crucible bottom can be separated from the crucible side body along the direction from the bottom of the crucible side body to the top of the crucible side body, and can cooperate with the crucible side body along the direction from the top of the crucible side body to the bottom of the crucible side body.
  • the crucible support is arranged at the bottom of the crucible side body and is used to support the crucible side body and the crucible bottom.
  • the bottom of the crucible and the crucible side body can cooperate to carry the quartz crucible, which prevents the quartz crucible from sinking and cracking.
  • the bottom of the crucible is located inside the bottom of the main body of the crucible side.
  • the crucible side body includes a side wall and a curved portion, the top opening of the crucible side body is formed on the first side of the side wall, the second side of the side wall is connected to the first side of the curved portion, A bottom opening of the crucible body is formed on the second side of the bend. The bottom of the crucible cooperates with the second side of the bend.
  • the main body of the crucible side is composed of a side wall and a curved part.
  • the curved shape of the bottom is more conducive to carrying the quartz crucible, and can be attached to the bottom of the quartz crucible. After the crucible support or the crucible support rod breaks, it can avoid The quartz crucible shakes violently, causing the silicon liquid to flow out.
  • the bottom of the crucible is detachably arranged on the second side of the curved portion.
  • the crucible bottom can be separated from the curved part along the direction from the bottom of the crucible side body to the top of the crucible side body.
  • the crucible bottom can cooperate with the curved part along the direction from the top of the crucible side body to the bottom of the crucible side body.
  • the crucible bottom and the crucible side body are connected in a detachable manner, and are located inside the bottom of the crucible side body. It fits well and will not cause the bottom of the crucible to fall off due to the pressure of the sinking of the quartz crucible.
  • the detachable connection makes it easier to replace the bottom of the pot, which saves maintenance costs to a certain extent.
  • the second side of the curved portion has a first locking structure
  • the bottom of the crucible has a second locking structure matching the first locking structure.
  • the first locking structure is a groove or a boss
  • the second locking structure is a boss or a groove.
  • the first clamping structure is a descending wedge structure
  • the second clamping structure is a rising wedge structure.
  • the first clamping structure of the curved part matches the second clamping structure of the bottom of the crucible, and there is no need to fix the curved part to the bottom of the crucible through other connectors.
  • the pressure is high, the connection between the curved part and the bottom of the crucible will become tighter and tighter due to the external force, and the connection will not be suddenly broken due to the sinking pressure of the quartz crucible.
  • the distance between the first side of the curved portion and the top opening of the crucible side body is smaller than the distance between the second side of the curved portion and the top opening of the crucible side body.
  • the horizontal position of the first side of the curved portion is slightly higher than the horizontal position of the second side of the curved portion, and the entire curved portion is a structure extending obliquely downward. Therefore, when the crucible support or the support rod supporting the crucible breaks due to abnormality, the curved portion fits the bottom of the crucible and matches the shape of the quartz crucible. Based on this, the curved portion and the bottom of the crucible not only support the quartz crucible in the vertical direction, but also support the quartz crucible in the horizontal direction toward the central axis of the crucible body, which is beneficial to better support the quartz crucible.
  • the crucible side body is integrally formed. Therefore, the side wall and the curved part of the crucible side body are an integrally formed structure, that is, there is no connection gap between the side wall and the curved part. burst due to pressure.
  • the bottom of the crucible has a first surface that carries the quartz crucible in the thermal field, and a second surface opposite to the first surface; the first surface of the bottom of the crucible has a structure that matches the quartz crucible; The second side of the crucible bottom has a matching structure with the crucible base.
  • the first surface of the crucible bottom matches the bottom of the quartz crucible
  • the second surface of the crucible bottom matches the crucible support.
  • the bottom of the crucible is located between the quartz crucible and the crucible support, and is designed to fit the quartz crucible and the crucible support. The quartz crucible shakes violently, causing the silicon liquid to flow out.
  • the crucible side body, the crucible bottom and the crucible support are all made of carbon carbon or graphite. Since both the carbon-carbon material and the graphite material are high-strength materials, the crucible side components are stronger when these two materials are used, which is beneficial to better support the quartz crucible.
  • the present application also provides a thermal field of a single crystal furnace, including the crucible side assembly described in the first aspect or any possible implementation manner of the first aspect.
  • the beneficial effect of the thermal field of the single crystal furnace provided by the second aspect is the same as the beneficial effect of the crucible side assembly described in the first aspect or any possible implementation of the first aspect, and will not be repeated here.
  • Fig. 1 is a schematic diagram of the structure of the crucible side body of the present application
  • Fig. 2 is the crucible bottom structure schematic diagram of the present application
  • Fig. 3 is a schematic diagram of the crucible side assembly of the present application.
  • Fig. 4 is the structural representation of the crucible side assembly of the present application.
  • Fig. 5 is a schematic diagram of a crucible side assembly in the prior art
  • Fig. 6 is a schematic diagram of the crucible side assembly provided by the embodiment of the present application.
  • Fig. 7 is a schematic diagram of the crucible body provided by the embodiment of the present application.
  • Figure 8 is a schematic diagram of the bottom of the crucible provided by the embodiment of the present application.
  • Fig. 9 is a schematic diagram of a crucible holder provided in an embodiment of the present application.
  • first and second are used for descriptive purposes only, and cannot be interpreted as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, a feature defined as “first” and “second” may explicitly or implicitly include one or more of these features.
  • “plurality” means two or more, unless otherwise specifically defined.
  • a first feature being "on” or “under” a second feature may include direct contact between the first and second features, and may also include the first and second features Not in direct contact but through another characteristic contact between them.
  • “above”, “above” and “above” the first feature on the second feature include that the first feature is directly above and obliquely above the second feature, or simply means that the first feature is horizontally higher than the second feature.
  • “Below”, “beneath” and “under” the first feature to the second feature include that the first feature is directly below and obliquely below the second feature, or simply means that the first feature has a lower level than the second feature.
  • the crucible side in the prior art is a structure with an open bottom, as shown in Figure 5, the crucible body 02 is a structure with an open bottom, and the crucible holder 01 is connected separately with the crucible body 02 at the opening, and the connection method is the cooperation of gravity contact In this way, when the crucible breaks due to abnormality, the quartz crucible will squat down and tear quickly without other supports, causing the silicon liquid to flow out quickly, thereby scalding through the bottom of the furnace or the bellows, and causing serious silicon leakage accidents.
  • a crucible side including a crucible side body 1 and a crucible bottom 2, the bottom of the crucible side body 1 is in an inverted cone shape and an installation hole 11 is opened at the center of the bottom; the crucible bottom 2 is positioned In the installation hole 11, the crucible bottom 2 and the crucible side body 1 are arranged coaxially, and the crucible bottom 2 and the crucible side body 1 are connected in a detachable locking manner.
  • the crucible side body 1 and the crucible bottom 2 of the present application are locked and connected.
  • the quartz crucible quickly squats and tears, causing the silicon liquid to flow out and burn through the furnace bottom or bellows, thereby preventing serious silicon leakage accidents, ensuring production safety, and improving the service life of the crucible side; and the crucible with detachable locking connection
  • the main body 1 and the crucible bottom 2 are tightly connected and easy to disassemble. When a crucible is broken, the crucible bottom 2 can be removed and the solid silicon in the crucible can be cleaned, which reduces the difficulty of cleaning.
  • the crucible bottom 2 and the crucible side body 1 are tightly connected by threaded connectors, specifically, a plurality of connection holes 12 are evenly opened on the periphery of the mounting hole 11 along the circumferential direction; the edge of the crucible bottom 2 is evenly opened along the circumferential direction
  • a plurality of through holes 3 correspond to the connection holes 12 one by one, and the crucible bottom 2 and the crucible side body 1 are fixedly connected by threaded connectors such as locking bolts.
  • the locking bolts can be M10/
  • Various models such as M12/M20 are riveted to ensure that the strength and tolerance meet the requirements of use, and the combined crucible side is normally installed in the hot field for use.
  • the bottom 2 of the crucible is threadedly connected with the main body 1 of the crucible side. It may be that the mounting hole 11 of the crucible side body 1 is provided with an internal thread, and the part where the bottom 2 of the crucible is connected with the mounting hole 11 is provided with an external thread. Screw together tightly.
  • the crucible bottom 2 and the crucible side body 1 can be respectively provided with a screw joint structure and a screw joint groove. After aligning the screw joint structure of the crucible bottom 2 with the screw joint groove of the crucible side body 1, the way to realize the locking connection of the two.
  • the crucible bottom 2 and the crucible side body 1 can also be connected in other manners that can realize the detachable locking of the two, and no examples will be given here.
  • the crucible bottom 2 is an integrated stepped structure, including: a base 21 and a boss 22, a plurality of through holes 3 are arranged on the edge of the base 21; the boss 22 is arranged at the top center of the base 21, The two are coaxially connected, and the boss 22 is fitly connected with the mounting hole 11 .
  • the boss 22 is connected to the mounting hole 11
  • the upper surface of the base 21 is in contact with the bottom surface of the crucible body 1.
  • silicon leakage occurs, the silicon liquid will flow out from the connection between the boss 22 and the mounting hole 11.
  • the side wall of the boss 22 is obliquely connected to the upper surface of the base 21, and the upper end aperture of the mounting hole 11 is smaller than the lower end aperture.
  • the side wall of the boss 22 matched with the mounting hole 11 forms a diversion slope to prevent silicon leakage. After the accident, it is beneficial for the silicon liquid to flow out to both sides, so that the silicon liquid can be effectively controlled.
  • the stepped crucible bottom 2 can be designed as a multi-layered stepped structure, and the corresponding installation hole 11 is in a shape suitable for it, which can further prevent silicon leakage.
  • the ratio of the diameter d of the base 21 to the middle diameter D of the side body 1 is 1/3-1/2. In the case that it is conducive to the outflow of silicon liquid, it can bear better load and is suitable for a large amount of feeding.
  • the crucible side body 1, the crucible bottom 2 and the threaded connectors are all made of C/C composite material.
  • the material has excellent properties such as high temperature resistance and high toughness, and has a small specific gravity.
  • the crucible side made of this material is light in weight, good in toughness, easy to disassemble and assemble, and can well release the horizontal expansion force received.
  • the embodiment of the present application provides a crucible side assembly, including: a crucible side and a supporting rod 4, the crucible side is the above-mentioned crucible side; The bottom of the detachable connection.
  • the combination of the crucible side body 1 and the crucible bottom 2 will support the quartz crucible, which can prevent the quartz crucible from squatting and tearing quickly, thereby preventing serious silicon leakage In the event of an accident, this solution can be applied to a thermal field with a larger feeding amount (loading amount ⁇ 1000kg).
  • loading amount ⁇ 1000kg the quartz crucible will be supported by other components, and will not be torn quickly to cause the problem of rapid outflow of silicon liquid.
  • the bottom of the base 21 is provided with a positioning groove 23, and the top protrusion of the support rod 4 is provided with a support platform adapted to the positioning groove 23.
  • the connection reliability between the support rod 4 and the bottom of the crucible 2 is improved. .
  • the through hole 3 is set in the positioning groove 23 .
  • the top of the supporting rod 4 puts pressure on the threaded connector, which plays a certain pre-tightening effect, and improves the reliability of the threaded connector connecting the crucible bottom 2 and the crucible side body 1 .
  • Fig. 5 illustrates a schematic diagram of a crucible side assembly in the prior art.
  • the crucible side assembly in the prior art is composed of a crucible body 02 and a crucible holder 01 .
  • the crucible side assembly outside the quartz crucible is only composed of two parts: the crucible body 02 and the crucible holder 01.
  • the crucible body 02 cooperates with the crucible holder 01 to form a crucible side assembly located outside the quartz crucible for carrying the quartz crucible.
  • a crucible support rod is also arranged under the crucible support 01, which cooperates with the crucible support 01 to support the quartz crucible and the silicon liquid in the quartz crucible.
  • the embodiment of the present application provides a crucible side assembly, which includes: a crucible side body 11 , a crucible bottom 30 and a crucible support 21 .
  • the crucible bottom 30 is filled in the bottom opening of the crucible side body 11 and used to cooperate with the crucible side body 11 to carry the quartz crucible in the thermal field.
  • the crucible bottom 30 can be separated from the crucible side body 11 along the direction from the bottom of the crucible side body 11 to the top of the crucible side body 11; Help body 11 cooperate.
  • the crucible support 21 is arranged at the bottom of the crucible side body 11 for supporting the crucible side body 11 and the crucible bottom 30 .
  • the crucible bottom 30 needs to be combined with the crucible side body 11, secondly the crucible side body 11 and the crucible bottom 30 are integrally installed on the crucible support 21, and finally the rest of the single crystal furnace thermal field components are assembled according to It is required that the installation is completed, and the monocrystalline silicon can be prepared normally.
  • the crucible bottom 30 is filled in the bottom opening of the crucible side body 11, and is used to cooperate with the crucible side body 11 to carry the quartz crucible in the thermal field.
  • the crucible bottom 30 can be separated from the crucible side body 11 along the direction from the bottom of the crucible side body 11 to the top of the crucible side body 11, and the crucible bottom can be separated from the crucible side along the direction from the top of the crucible side body 11 to the bottom of the crucible side body 11.
  • the body 11 cooperates.
  • the crucible support 21 is arranged at the bottom of the crucible side body 11 for supporting the crucible side body 11 and the crucible bottom 30 .
  • the crucible bottom 30 cooperates with the crucible side body 11 to carry the quartz crucible, which prevents the quartz crucible from sinking and breaking.
  • the crucible bottom 30 is located inside the bottom of the crucible side body 11.
  • the crucible bottom 30 is tightly attached to the bottom of the crucible side body 11 under the gravity of the quartz crucible, and will not sink due to the quartz crucible.
  • the pressure causes the crucible bottom 30 to come off. This solves the technical problem in the prior art that the quartz crucible loses the support of the crucible support 21, causing the quartz crucible to sink and break, and then the silicon liquid flows out.
  • Fig. 7 illustrates a schematic diagram of a crucible body provided by an embodiment of the present application.
  • the crucible side body 11 includes a side wall 111 and a curved portion 112, the top opening of the crucible side body 11 is formed on the first side of the side wall 111, and the side wall 111
  • the second side of the crucible is connected to the first side of the curved portion 112, and the bottom opening of the crucible body 11 is formed on the second side of the curved portion 112.
  • the crucible bottom 30 cooperates with the second side of the curved portion 112 .
  • the side wall 111 of the crucible side body 11, the curved portion 112 of the crucible side body 11 and the crucible bottom 30 cooperate to carry the quartz crucible and the silicon liquid in the quartz crucible in the thermal field.
  • the crucible side body 11 is composed of a side wall 111 and a curved portion 112, and the curved shape of the bottom is more conducive to carrying the quartz crucible, and can be attached to the bottom of the quartz crucible, on the crucible holder 21 or to support the crucible holder After the supporting rod of 21 breaks, it can avoid strong shaking of the quartz crucible, and then make the silicon liquid flow out.
  • Fig. 8 illustrates a schematic diagram of a crucible bottom provided by an embodiment of the present application.
  • the crucible bottom 30 is detachably disposed on the second side of the curved portion 112 .
  • the crucible bottom 30 can be separated from the curved portion 112 along the direction from the bottom of the crucible side body 11 to the top of the crucible side body 11 .
  • the crucible bottom 30 can cooperate with the curved portion 112 along the direction from the top of the crucible side body 11 to the bottom of the crucible side body 11 .
  • the crucible bottom 30 is detachably connected to the crucible side body, and is located inside the bottom of the crucible side body 11.
  • the crucible bottom 30 When carrying a quartz crucible, the crucible bottom 30 is in contact with the curved portion 112 under the gravity of the quartz crucible. It fits tightly, and the bottom 30 of the crucible will not fall off due to the sinking pressure of the quartz crucible.
  • the detachable connection makes it easier to replace the crucible bottom 30, which saves maintenance costs to a certain extent.
  • the second side of the curved portion 112 has a first engaging structure 1121
  • the crucible bottom 30 has a second engaging structure matching the first engaging structure 1121 301.
  • the curved portion 112 is fixedly connected to the crucible bottom 30 through the first locking structure 1121 and the second locking structure 301 .
  • the first clamping structure 1121 of the curved part 112 matches the second clamping structure 301 of the crucible bottom 30, and there is no need to fix the curved part 112 to the crucible bottom 30 through other connecting pieces.
  • the connection between the curved portion 112 and the crucible bottom 30 will become more and more tight due to external force, and the connection will not be suddenly broken due to the sinking pressure of the quartz crucible.
  • first locking structure 1121 is a groove or a boss (not shown in the figure), and the second locking structure 301 is a boss or a groove (not shown in the figure).
  • first clamping structure 1121 is a descending wedge structure (not shown in the figure), and the second clamping structure 301 is a rising wedge structure (not shown in the figure)
  • the second engaging structure 301 is a boss matching the first engaging structure 1121; when the first engaging structure 1121 is a boss, the second engaging structure 301 is The second engaging structure 301 is a groove matching the first engaging structure 1121 .
  • the first locking structure 1121 and the second locking structure 301 are matched, so they can be completely attached.
  • the first clamping structure 1121 and the second clamping structure 301 will be pressed tighter and tighter under the pressure of the quartz crucible sinking, so that the crucible bottom 30 and the crucible
  • the curved portion 112 of the main body 11 is tightly connected, so that the connection will not be suddenly broken due to the sinking pressure of the quartz crucible.
  • the distance between the first side of the curved portion 112 and the top opening of the crucible side body 11 is smaller than the distance between the second side of the curved portion 112 and the top opening of the crucible side body 11 .
  • the horizontal position of the first side of the curved portion 112 is slightly higher than the horizontal position of the second side of the curved portion 112 , and the entire curved portion 112 is a structure extending obliquely downward. Therefore, when the crucible holder 21 or the support rod in the thermal field of the single crystal furnace breaks due to abnormality, the curved portion 112 cooperates with the crucible bottom 30 to match the shape of the quartz crucible. Based on this, the curved portion and the bottom of the crucible not only support the quartz crucible in the vertical direction, but also support the quartz crucible in the horizontal direction toward the central axis of the crucible side body 11, which is beneficial to better support the quartz crucible.
  • the crucible side body 11 is an integrally formed crucible side body 11 . Therefore, the side wall 111 and the curved part 112 of the crucible side body 11 are integrally formed structures, that is, there is no connection gap between the side wall 111 and the curved part 112. Based on this, when the crucible side body 11 carries the quartz crucible, it will not Sudden rupture by downward pressure of the quartz crucible.
  • Fig. 9 illustrates a schematic diagram of a pot holder provided by an embodiment of the present application.
  • the crucible bottom 30 has a first surface for carrying the quartz crucible in the thermal field, and a second surface opposite to the first surface; the first surface of the crucible bottom 30 The surface has a structure matching the quartz crucible; the second surface of the crucible bottom 30 has a structure matching the crucible holder 21 .
  • the first surface of the crucible bottom 30 matches the bottom of the quartz crucible
  • the second surface of the crucible bottom 30 matches the crucible holder 21 .
  • the crucible bottom 30 is located between the quartz crucible and the crucible holder 21, and is designed to fit the quartz crucible and the crucible holder 21, and the three are completely fitted together.
  • the crucible side body 11 , the crucible bottom 30 and the crucible support 21 are all made of carbon carbon or graphite.
  • both the carbon-carbon material and the graphite material are high-strength materials, the crucible side components are stronger when these two materials are used, which is beneficial to better support the quartz crucible.
  • the embodiment of the present application further provides a thermal field of a single crystal furnace, including the crucible side assembly provided in the above embodiment.
  • the beneficial effect of the thermal field of the single crystal furnace provided by the embodiment of the present application is the same as the beneficial effect of the crucible side assembly described in the above embodiment, and will not be repeated here.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

L'invention concerne un composant supérieur de creuset et un champ thermique de four monocristallin, se rapportant au domaine technique de la croissance des cristaux. Le composant supérieur de creuset comprend une partie supérieure de creuset ; la partie supérieure de creuset comprend un corps supérieur de creuset et un fond de creuset ; le fond du corps supérieur de creuset présente une forme de cône inversé et un trou de montage est formé au centre du fond ; le fond de creuset est positionné dans le trou de montage ; le fond de creuset et le corps supérieur de creuset sont disposés coaxialement ; et le fond de creuset et le corps supérieur de creuset sont verrouillés et connectés de manière détachable. La partie supérieure du creuset et le composant de la partie supérieure du creuset sont utilisés pour la fabrication de la partie supérieure du creuset.
PCT/CN2022/110288 2021-08-05 2022-08-04 Composant supérieur de creuset et champ thermique de four monocristallin WO2023011592A1 (fr)

Applications Claiming Priority (4)

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CN202121825651.6 2021-08-05
CN202121825651.6U CN215800045U (zh) 2021-08-05 2021-08-05 一种埚帮结构及单晶炉热场
CN202122388463.8 2021-09-29
CN202122388463.8U CN216712312U (zh) 2021-09-29 2021-09-29 坩埚及坩埚组件

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000264777A (ja) * 1999-03-16 2000-09-26 Mitsubishi Materials Silicon Corp 単結晶引上装置用黒鉛ルツボおよび単結晶引上装置
CN101560690A (zh) * 2009-06-03 2009-10-21 西安隆基硅材料股份有限公司 直拉单晶炉热场用石墨埚帮
CN201463538U (zh) * 2009-08-11 2010-05-12 湖南金博复合材料科技有限公司 组合坩埚
CN201942783U (zh) * 2010-12-30 2011-08-24 山东伟基炭科技有限公司 一种直拉单晶炉用组合坩埚
CN202688508U (zh) * 2012-07-06 2013-01-23 乐山新天源太阳能科技有限公司 用于单晶炉的石墨坩埚
CN215800045U (zh) * 2021-08-05 2022-02-11 隆基绿能科技股份有限公司 一种埚帮结构及单晶炉热场
CN216712312U (zh) * 2021-09-29 2022-06-10 隆基绿能科技股份有限公司 坩埚及坩埚组件

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000264777A (ja) * 1999-03-16 2000-09-26 Mitsubishi Materials Silicon Corp 単結晶引上装置用黒鉛ルツボおよび単結晶引上装置
CN101560690A (zh) * 2009-06-03 2009-10-21 西安隆基硅材料股份有限公司 直拉单晶炉热场用石墨埚帮
CN201463538U (zh) * 2009-08-11 2010-05-12 湖南金博复合材料科技有限公司 组合坩埚
CN201942783U (zh) * 2010-12-30 2011-08-24 山东伟基炭科技有限公司 一种直拉单晶炉用组合坩埚
CN202688508U (zh) * 2012-07-06 2013-01-23 乐山新天源太阳能科技有限公司 用于单晶炉的石墨坩埚
CN215800045U (zh) * 2021-08-05 2022-02-11 隆基绿能科技股份有限公司 一种埚帮结构及单晶炉热场
CN216712312U (zh) * 2021-09-29 2022-06-10 隆基绿能科技股份有限公司 坩埚及坩埚组件

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