WO2023010757A1 - 半导体工艺生产线的控制方法、装置、设备及存储介质 - Google Patents

半导体工艺生产线的控制方法、装置、设备及存储介质 Download PDF

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WO2023010757A1
WO2023010757A1 PCT/CN2021/138409 CN2021138409W WO2023010757A1 WO 2023010757 A1 WO2023010757 A1 WO 2023010757A1 CN 2021138409 W CN2021138409 W CN 2021138409W WO 2023010757 A1 WO2023010757 A1 WO 2023010757A1
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information
site
deleted
associated data
production line
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English (en)
French (fr)
Inventor
朱道凤
苏笙华
谢明宏
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Changxin Memory Technologies Inc
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Changxin Memory Technologies Inc
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    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00—Administration; Management
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00—Administration; Management
    • G06Q10/06—Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
    • G06Q10/063—Operations research, analysis or management
    • G06Q10/0631—Resource planning, allocation, distributing or scheduling for enterprises or organisations
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00—Administration; Management
    • G06Q10/06—Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
    • G06Q10/063—Operations research, analysis or management
    • G06Q10/0633—Workflow analysis
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q50/00—Information and communication technology [ICT] specially adapted for implementation of business processes of specific business sectors, e.g. utilities or tourism
    • G06Q50/04—Manufacturing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Definitions

  • the present disclosure relates to but not limited to a control method, device, equipment and storage medium of a semiconductor process production line.
  • the present disclosure provides a control method, device, equipment and storage medium of a semiconductor process production line.
  • a control method of a semiconductor process production line comprising:
  • parameter information of the process site to be deleted wherein the parameter information includes product information, process information and/or site number information related to the process site to be deleted;
  • obtaining an associated process site that has an associated relationship with the process site to be deleted, and associated data information includes:
  • the configuration information includes pre-stored product information of multiple products, at least one pre-stored process information of each product, and each of the multiple process sites of each of the pre-stored process information The pre-stored site number information;
  • an associated process site that has an associated relationship with the associated data information is obtained.
  • the obtaining associated data information associated with the process site to be deleted according to the configuration information and the parameter information includes:
  • At least one pre-stored process information of the product and the process information in the parameter information determine the first associated data information that is associated with the process site to be deleted in the process to which the process information belongs;
  • At least one pre-stored process information of the product and the process information in the parameter information it is determined that other processes in the at least one pre-stored process information except the process to which the process information belongs exist with the process site to be deleted
  • the second associated data information of the association relationship it is determined that other processes in the at least one pre-stored process information except the process to which the process information belongs exist with the process site to be deleted.
  • the obtaining the associated process sites associated with the associated data information according to the associated data information includes:
  • the first associated data information obtain a first associated process site that has an associated relationship with the first associated data information
  • a second associated process site that has an associated relationship with the second associated data information is obtained.
  • control method further includes:
  • the process station to be deleted is deleted.
  • control method further includes:
  • the associated process site and the associated data information associated with the process site to be deleted are displayed.
  • control method further includes:
  • the input information including adjustment information and the parameter information
  • a second aspect of an embodiment of the present disclosure provides a control device for a semiconductor process production line, the device comprising:
  • the receiving module receives parameter information of the process site to be deleted, wherein the parameter information includes product information, process information and/or site number information related to the process site to be deleted;
  • Obtaining module obtains the associated process site that has an associated relationship with the process site to be deleted, and associated data information;
  • An execution module if the associated process site and the associated data information have not been updated, send a first update prompt message.
  • the acquisition module is configured to:
  • the configuration information includes pre-stored product information of multiple products, at least one pre-stored process information of each product, and each of the multiple process sites of each of the pre-stored process information The pre-stored site number information;
  • an associated process site that has an associated relationship with the associated data information is obtained.
  • the acquisition module is configured to:
  • At least one pre-stored process information of the product and the process information in the parameter information determine the first associated data information that is associated with the process site to be deleted in the process to which the process information belongs;
  • At least one pre-stored process information of the product and the process information in the parameter information it is determined that other processes in the at least one pre-stored process information except the process to which the process information belongs exist with the process site to be deleted
  • the second associated data information of the association relationship it is determined that other processes in the at least one pre-stored process information except the process to which the process information belongs exist with the process site to be deleted.
  • the acquisition module is configured to:
  • the first associated data information obtain a first associated process site that has an associated relationship with the first associated data information
  • a second associated process site that has an associated relationship with the second associated data information is obtained.
  • control device further includes:
  • the process station to be deleted is deleted.
  • control device further includes:
  • the associated process site and the associated data information associated with the process site to be deleted are displayed.
  • control device further includes:
  • the input information including adjustment information and the parameter information
  • a third aspect of the embodiments of the present disclosure provides a control device for a semiconductor process production line, where the control device includes:
  • memory for storing processor-executable instructions
  • the processor is configured to perform:
  • parameter information of the process site to be deleted wherein the parameter information includes product information, process information and/or site number information related to the process site to be deleted;
  • a computer-readable storage medium When the instructions in the storage medium are executed by the processor of the control equipment of the semiconductor process production line, the control equipment of the semiconductor process production line can execute:
  • parameter information of the process site to be deleted wherein the parameter information includes product information, process information and/or site number information related to the process site to be deleted;
  • FIG. 1 is a flow chart of a method for controlling a semiconductor process production line according to an exemplary embodiment
  • Fig. 2 is a flow chart showing a method for controlling a semiconductor process production line according to an exemplary embodiment.
  • Fig. 3 is a flowchart showing a method for controlling a semiconductor process production line according to an exemplary embodiment.
  • Fig. 4 is a flow chart showing a method for controlling a semiconductor process production line according to an exemplary embodiment.
  • Fig. 5 is a flow chart showing a method for controlling a semiconductor process production line according to an exemplary embodiment.
  • Fig. 6 is a flowchart showing a method for controlling a semiconductor process production line according to an exemplary embodiment.
  • Fig. 7 is a block diagram of a control device for a semiconductor process production line according to an exemplary embodiment.
  • Fig. 8 is a block diagram of a computer device according to an exemplary embodiment.
  • SPC Statistical Process Control
  • the present disclosure provides a control method for a semiconductor process production line, which is applied to control equipment of the semiconductor process production line.
  • the parameter information of the process station to be deleted is received, and the parameter information includes product information, process information and/or serial number information related to the process station to be deleted.
  • the parameter information an associated process site that has an associated relationship with the process site to be deleted, and associated data information are obtained. If the associated process site and the associated information have not been updated, a first update prompt message is issued.
  • the parameter information of the process site to be deleted find out the associated process site that has an association relationship with the process site to be deleted, and check it.
  • the first update prompt message will be issued to remind the user to update the associated process site and associated information in time to avoid the problem that other associated process sites cannot be used after the site to be deleted is deleted. Ensure the normal operation of the semiconductor process production line.
  • An exemplary embodiment of the present disclosure provides a method for controlling a semiconductor process production line, which can be applied to control equipment for a semiconductor process line.
  • the standard specification management system and the basic record specification management system are pre-stored in the semiconductor process line control equipment.
  • the standard specification management system includes the process flow database of the semiconductor process production line, and the basic record specification management system includes the process flow record database of the semiconductor process line.
  • FIG. 1 shows a flow chart of a control method for a semiconductor process production line provided according to an exemplary embodiment of the present disclosure:
  • the parameter information of the process site to be deleted is input into the basic record specification management system, and the semiconductor process production line control equipment receives the parameter information, and based on the parameter information in the standard specification management search within the system.
  • the parameter information of the process site to be deleted can be the product information in the process site to be deleted, and the product information can be but not limited to the product number; the parameter information of the process site to be deleted can also be process information, and the process information can be but not limited to the process flow number; the parameter information of the process station to be deleted may be, but not limited to, the station number information, and the station number information may be a digital number, etc.
  • the parameter information can satisfy any one of the above information, or can satisfy the above information at the same time, or can be a free combination of different information.
  • the parameter information is not limited to the above-mentioned product information, process information and site number information, it can also be a representative key function field related to the site, as long as it can fully refer to the site to be deleted.
  • the semiconductor process production line control equipment extracts all associated process sites associated with the process site to be deleted and all associated data associated with the process site to be deleted from the standard specification management system according to the parameter information information, complete the retrieval steps, and realize the effective positioning of associated process sites and associated data information.
  • control equipment of the semiconductor process production line locates the associated process site or associated data information that has an associated relationship with the process site to be deleted, which is convenient for users to view.
  • the semiconductor process production line control equipment retrieves the associated process site and associated data information associated with the process site to be deleted in the standard specification management system, locate the associated process site and associated data information, and send the first 1. Update the prompt message to warn the user. The user checks and updates it, and removes the association between the associated process site and the associated data information and the process site to be deleted, so that after the process site to be deleted is deleted, the control equipment of the semiconductor process production line can still operate normally.
  • the semiconductor process line control equipment retrieves the associated process site and associated data information associated with the process site to be deleted in the standard specification management system, the semiconductor process line control equipment can directly locate and display the above-mentioned associated process site and associated data information , which is convenient for users to view.
  • both the associated process site and the associated data information can be displayed on the display interface in the form of pop-up windows.
  • Multiple pop-up windows are arranged and set, and preview content with key function fields can be displayed in each pop-up window for The user quickly browses and judges whether an update is required based on the preview content. If an update is required, the user can click on the corresponding pop-up window to quickly enter the corresponding associated process site or associated data information.
  • the associated process station and associated data information may be displayed on the display interface in the form of a list. Users can select different lists, directly enter the corresponding associated process site or associated data information, and process them.
  • the standard specification management system when the standard specification management system is established during the formulation process of the semiconductor process production line, the standard specification management system includes the process flow of all products of the semiconductor process production line. Different products have different process flows, and each process flow includes multiple process stations, and the connections between the multiple process stations form a corresponding process flow. If the relevant data of any process site is deleted rashly, the associated process site or associated data information will become invalid, the semiconductor process production line will be paralyzed, unable to be used normally, and even the products on the process line will be damaged, which will increase the production loss rate and maintenance cost.
  • the first update prompt message By sending out the first update prompt message to warn the user that there is associated data, the user can check and update it in a targeted manner, so that the user can quickly process it and avoid production line paralysis.
  • An exemplary embodiment of the present disclosure provides a control method for a semiconductor process production line, which can be applied to control equipment for a semiconductor process production line.
  • the standard specification management system and the basic record specification management system are pre-stored in the semiconductor process line control equipment.
  • the standard specification management system includes the process flow database of the semiconductor process production line, and the basic record specification management system includes the process flow record database of the semiconductor process line.
  • FIG. 2 shows a flow chart of a control method for a semiconductor process production line provided according to an exemplary embodiment of the present disclosure:
  • S21 Receive parameter information of the process station to be deleted, wherein the parameter information includes product information, process information and/or station number information related to the process station to be deleted.
  • step S21 the method involved in step S21 is the same as the method involved in step S11 in the above embodiment, and will not be repeated here.
  • the configuration information includes pre-stored product information of multiple products, at least one pre-stored process information of each product, and pre-stored station number information of each process station among the multiple stations of each pre-stored process information.
  • the control device of the semiconductor process production line uses the received parameter information of the process site to be deleted to search or traverse in the configuration information to find associated data information that is associated with the parameter information of the process site to be deleted.
  • the associated data information may be a parameter field that has a combination relationship or an associated function with the parameter information.
  • the parameter field is, for example, the pollution level allowed to enter the station, the pollution level defined outbound, the special material processing identification, the monitoring group identification, the script number before the process, the script number after the process, or the number of the pre-measurement site, and the destination site for data transmission number, rework process number, or,
  • Rework Process Return Site Number Rework Process Cycle Reference Site Number, Branch Process Number, Branch Process Return Site Number, or,
  • Time control end station number time control execution operation station, time control update start station number, time control update end station number, etc.
  • the semiconductor process production line control equipment finally determines the associated process site that has an associated relationship with the associated data information according to the associated data information.
  • step S25 the method involved in step S25 is the same as the method involved in step S13 in the above embodiment, and will not be repeated here.
  • configuration information is set.
  • search or traverse to find the associated data information that is associated with the parameter information of the process site to be deleted in the configuration information, and according to the associated data information, finally Determine the associated process site, improve the search efficiency, and effectively save retrieval time.
  • An exemplary embodiment of the present disclosure provides a method for controlling a semiconductor process production line, which can be applied to control equipment for a semiconductor process line.
  • the standard specification management system and the basic record specification management system are pre-stored in the semiconductor process line control equipment.
  • the standard specification management system includes the process flow database of the semiconductor process production line, and the basic record specification management system includes the process flow record database of the semiconductor process line.
  • FIG. 3 shows a flow chart of a method for controlling a semiconductor process production line provided according to an exemplary embodiment of the present disclosure:
  • S31 Receive parameter information of the process station to be deleted, wherein the parameter information includes product information, process information and/or station number information related to the process station to be deleted.
  • the configuration information includes pre-stored product information of multiple products, at least one pre-stored process information of each product, and pre-stored station number information of each process station among the multiple stations of each pre-stored process information.
  • step S31-step S32 are the same as the methods involved in step S21-step S22 in the above embodiment, and will not be repeated here.
  • the semiconductor process production line control equipment determines the process flow of the process station to be deleted according to the pre-stored process information of the product stored in the standard specification management system and the process information in the input parameter information of the process station to be deleted.
  • the semiconductor process production line control equipment searches out the first associated data information that is associated with the process site to be deleted under the same process flow.
  • pre-stored process information of a product is not limited to one, and the pre-stored process information of a product may be one, two or more.
  • step S33 Also include in step S33:
  • the first associated data information may be a combination relationship or a parameter field of an associated function set on other process sites except the process site to be deleted within the same process flow.
  • the parameter fields of the set combination relationship or associated function are, for example, the previous measurement station number, the data transmission destination station number, the rework process return station number, the rework process cycle reference station number, the branch process return station number, the time control end station number, etc. .
  • the semiconductor process production line control equipment matches the process information in the input parameter information of the process site to be deleted according to the pre-stored process information of the product stored in the standard specification management system. If it is found that the first associated data information exists, the feedback displays the first associated process site that has an associated relationship with the first associated data information, and the first associated process site may be a site number.
  • the semiconductor process production line control equipment determines the process flow of the process station to be deleted according to the pre-stored process information of the product stored in the standard specification management system and the process information in the input parameter information of the process station to be deleted.
  • the semiconductor process production line control device searches for other process flows other than the process flow to which the process site to be deleted belongs, and searches out the second associated data information that is associated with the process site to be deleted.
  • pre-stored process information of a product is not limited to one, and the pre-stored process information of a product may be one, two or more.
  • step S34 Also include in step S34:
  • the second associated data information may be a parameter field that has a set combination relationship or associated function with the process site to be deleted in other process flows.
  • the parameter field of the set combination relationship or associated function is, for example, the sub-process number of the update time control and the start station number of the update time control, or the sub-flow number of the update time control and the end station number of the update time control.
  • the first associated data information under the same process flow as the process site to be deleted is searched to determine the first associated process site, and the information of the process flow to which the process site to be deleted belongs is searched Other process sites to identify second associated process sites, conduct a comprehensive search, and reduce the risk of process deletions.
  • An exemplary embodiment of the present disclosure provides a control method for a semiconductor process production line, which can be applied to control equipment for a semiconductor process production line.
  • the standard specification management system and the basic record specification management system are pre-stored in the semiconductor process line control equipment.
  • the standard specification management system includes the process flow database of the semiconductor process production line, and the basic record specification management system includes the process flow record database of the semiconductor process line.
  • FIG. 4 shows a flow chart of a control method for a semiconductor process production line provided according to an exemplary embodiment of the present disclosure:
  • S41 Receive parameter information of the process station to be deleted, where the parameter information includes product information, process information and/or station number information related to the process station to be deleted.
  • step S41-step S43 are the same as the methods involved in step S11-step S13 in the above embodiment, and will not be repeated here.
  • control equipment of the semiconductor process production line acquires that the associated process site and the associated data information have been updated, and displays a prompt interface to remind the user that the update is complete, so that the user can perform the next operation.
  • control device of the semiconductor process production line receives the confirmation operation information displayed by the user on the prompt interface, and then deletes the process site to be deleted.
  • the prompt interface displays an operation button, for example: yes or no , if yes, continue to submit the operation, otherwise stop the submission operation for data confirmation, prompt the user whether the update is completed, and reduce the risk of process deletion.
  • An exemplary embodiment of the present disclosure provides a method for controlling a semiconductor process production line, which can be applied to control equipment for a semiconductor process line.
  • the standard specification management system and the basic record specification management system are pre-stored in the semiconductor process line control equipment.
  • the standard specification management system includes the process flow database of the semiconductor process production line, and the basic record specification management system includes the process flow record database of the semiconductor process line.
  • FIG. 5 shows a flow chart of a control method for a semiconductor process production line provided according to an exemplary embodiment of the present disclosure:
  • S51 Receive parameter information of the process station to be deleted, where the parameter information includes product information, process information and/or station number information related to the process station to be deleted.
  • step S51-step S53 are the same as the methods involved in step S41-step S43 in the above embodiment, and will not be repeated here.
  • control equipment of the semiconductor process production line receives the viewing operation information acting on the display prompt interface, it indicates that there are still associated process sites and associated data information that have not been updated, and the associated process associated with the process site to be deleted is displayed. Site and associated data information for further verification.
  • a prompt interface is displayed, and the prompt interface contains reminder text, associated settings of the site to be deleted, and associated data Links, users can click to download to view details, continue operation buttons, etc., so that users can view associated data information.
  • An exemplary embodiment of the present disclosure provides a method for controlling a semiconductor process production line, which can be applied to control equipment for a semiconductor process line.
  • the standard specification management system and the basic record specification management system are pre-stored in the semiconductor process line control equipment.
  • the standard specification management system includes the process flow database of the semiconductor process production line, and the basic record specification management system includes the process flow record database of the semiconductor process line.
  • FIG. 6 shows a flow chart of a control method for a semiconductor process production line provided according to an exemplary embodiment of the present disclosure:
  • S61 Receive parameter information of the process station to be deleted, where the parameter information includes product information, process information and/or station number information related to the process station to be deleted.
  • step S61-step S53 are the same as the methods involved in step S51-step S53 in the above embodiment, and will not be repeated here.
  • the semiconductor process line control equipment receives input information input by the user, and the input information includes adjustment information and parameter information.
  • the adjustment information may be newly added or modified data information
  • the parameter information may be data information to be deleted.
  • control equipment of the semiconductor process production line judges whether the adjustment information is related to the process site to be deleted, so as to reduce the risk of process deletion.
  • step S66 is executed to prompt the user for conflicting requirements.
  • step S67 the control equipment of the semiconductor process production line searches the standard specification management system to delete the process flow to which the process station belongs and to delete other process flows that belong to the process station to check whether the matching information has been made in this application Clear or modify. If not, execute step S66 to prompt the user to make synchronous changes. If changes have been made, proceed to the next step of retrieval judgment.
  • the control equipment of the semiconductor process line manages the parameter information of the selected process site to be deleted in the standard specification according to the basic record specification management system.
  • the management system queries and obtains the associated process sites that are associated with the process site to be deleted, as well as the associated data information, and determines whether the deletion of the process site to be deleted will affect the function of the semiconductor process production line. According to the impact results, users are prompted in the form of pop-up reminders or error reports, reducing operational risks and improving change efficiency.
  • control device for a semiconductor process production line.
  • the control device in this embodiment includes: a receiving module 110, an acquisition module 120, and an execution module 130. The method shown in Figure 1.
  • the receiving module 110 receives parameter information of the process site to be deleted, wherein the parameter information includes product information, process information and/or site number information related to the process site to be deleted.
  • the obtaining module 120 obtains the associated process site that has an associated relationship with the process site to be deleted and the associated data information according to the parameter information.
  • the execution module 130 if the associated process site and associated data information has not been updated, sends out a first update prompt message.
  • the semiconductor process production line control equipment searches out the associated process sites and associated data information that are associated with the process sites to be deleted through the parameter information of the sites to be deleted input by the user, alerts the user, and reduces the risk of process deletion.
  • control device for a semiconductor process production line.
  • the control device in this embodiment includes: a receiving module 110, an acquisition module 120, and an execution module 130.
  • the obtaining module 120 is configured to obtain configuration information; the configuration information includes pre-stored product information of a plurality of products, at least one pre-stored process information of each product, and a pre-stored process information of each process site in a plurality of process sites of each pre-stored process information. Station number information; according to the configuration information and parameter information, obtain associated data information associated with the process station to be deleted; obtain associated process stations associated with the associated data information according to the associated data information.
  • control device for a semiconductor process production line.
  • the control device in this embodiment includes: a receiving module 110, an acquisition module 120, and an execution module 130.
  • the acquisition module 120 is configured to determine, according to at least one pre-stored process information of the product and the process information in the parameter information, the first associated data information that is associated with the process site to be deleted in the process to which the process information belongs; The information and the process information in the parameter information determine at least one second associated data information in which processes other than the process to which the process information belongs in the at least one pre-stored process information are associated with the process site to be deleted.
  • the obtaining module 120 is configured to obtain, according to the first associated data information, the first associated process site associated with the first associated data information; and obtain the second associated process site associated with the second associated data information according to the second associated data information. Associate craft site.
  • control device for a semiconductor process production line.
  • the control device in this embodiment includes: a receiving module 110, an acquisition module 120, and an execution module 130.
  • the execution module 130 is configured to display a prompt interface if the associated process site and associated data information have been updated; and delete the process site to be deleted if receiving confirmation operation information for displaying the prompt interface.
  • control device for a semiconductor process production line.
  • the control device in this embodiment includes: a receiving module 110, an acquisition module 120, and an execution module 130. The method shown in Figure 5.
  • the execution module 130 is configured to display the associated process site and the associated data information associated with the process site to be deleted if receiving the viewing operation information for displaying the prompt interface.
  • control device for a semiconductor process production line.
  • the control device in this embodiment includes: a receiving module 110, an acquisition module 120, and an execution module 130. The method shown in Figure 6.
  • the receiving module 110 is set to receive input information, the input information includes adjustment information and parameter information; judge whether there is a relationship between the process site to be deleted and the adjustment information, if so, send an error message; if not, send a second update prompt message.
  • Fig. 8 is a block diagram of a computer device 800 for ... according to an exemplary embodiment.
  • the computer device 800 may be provided as a control device of a semiconductor process line.
  • a computer device 800 includes a processor 801 , and the number of processors can be set to one or more as required.
  • the computer device 800 also includes a memory 802 for storing instructions executable by the processor 801 , such as application programs.
  • the number of memories can be set to one or more as required. It can store one or more applications.
  • the processor 801 is configured to execute instructions to perform the above method.
  • the embodiments of the present disclosure may be provided as a method, an apparatus (device), or a computer program product. Accordingly, the present disclosure can take the form of an entirely hardware embodiment, an entirely software embodiment, or an embodiment combining software and hardware aspects. Furthermore, the present disclosure may take the form of a computer program product embodied on one or more computer-usable storage media having computer-usable program code embodied therein.
  • Computer storage media includes volatile and nonvolatile, removable and non-removable media implemented in any method or technology for storage of information, such as computer readable instructions, data structures, program modules, or other data , including but not limited to RAM, ROM, EEPROM, flash memory or other memory technology, CD-ROM, digital versatile disk (DVD) or other optical disk storage, magnetic cartridges, tape, magnetic disk storage or other magnetic storage devices, or can be used in Any other medium, etc. that stores desired information and can be accessed by a computer.
  • communication media typically embodies computer readable instructions, data structures, program modules or other data in a modulated data signal such as a carrier wave or other transport mechanism, and may include any information delivery media, as is well known to those skilled in the art.
  • a computer-readable storage medium including instructions, such as a memory 802 including instructions, which can be executed by the processor 801 of the device 800 to complete the above method.
  • the computer readable storage medium may be ROM, random access memory (RAM), CD-ROM, magnetic tape, floppy disk, optical data storage device, and the like.
  • a computer-readable storage medium that, when instructions in the storage medium are executed by a processor of the control device of the semiconductor process line, enables the control device of the semiconductor process line to perform:
  • Receive parameter information of the process site to be deleted where the parameter information includes product information, process information and/or site number information related to the process site to be deleted;
  • These computer program instructions may also be stored in a computer-readable memory capable of directing a computer or other programmable data processing apparatus to operate in a specific manner, such that the instructions stored in the computer-readable memory produce an article of manufacture comprising instruction means, the instructions
  • the device realizes the function specified in one or more procedures of the flowchart and/or one or more blocks of the block diagram.
  • an associated process site that has an association relationship with the process site to be deleted is found and checked. If the associated process site and associated information have not been updated, a first update prompt message is sent to remind the user to update the associated process site and associated information in time.

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Abstract

本公开提供一种半导体工艺生产线的控制方法、装置、设备及存储介质，半导体工艺生产线的控制方法应用于半导体工艺生产线控制设备，其包括接收待删除工艺站点的参数信息；根据参数信息，获得与待删除工艺站点存在关联关系的关联工艺站点，以及关联数据信息；若关联工艺站点和关联数据信息未进行更新，发出第一更新提示信息。

Description

半导体工艺生产线的控制方法、装置、设备及存储介质
本公开基于申请号为202110894579.0，申请日为2021年08月05日，申请名称为“半导体工艺生产线的控制方法、装置、设备及存储介质”的中国专利申请提出，并要求该中国专利申请的优先权，该中国专利申请的全部内容在此引入本公开作为参考。
技术领域
本公开涉及但不限于一种半导体工艺生产线的控制方法、装置、设备及存储介质。
背景技术
在半导体制造中，晶圆(Wafer)加工工序多，每道工序的制程参数复杂且包含多种功能。制程间需要相互参考和限制，以保证制程控制的准确和灵活性。因此，任意制程的增删，不仅会使当前制程功能失效，还可能影响其他制程的正常运行。
发明内容
以下是对本公开详细描述的主题的概述。本概述并非是为了限制权利要求的保护范围。
本公开提供一种半导体工艺生产线的控制方法、装置、设备及存储介质。
根据本公开实施例的第一方面，提供一种半导体工艺生产线的控制方法，所述控制方法包括：
接收待删除工艺站点的参数信息，其中，所述参数信息包括与所述待删除工艺站点相关的产品信息、流程信息和/或站点编号信息；
根据所述参数信息，获得与所述待删除工艺站点存在关联关系的关联工艺站点，以及关联数据信息；
若所述关联工艺站点和所述关联数据信息未进行更新，发出第一更新提示信息。
根据本公开的一些实施例，所述根据所述参数信息，获得与所述待删除工艺站点存在关联关系的关联工艺站点，以及关联数据信息，包括：
获取配置信息；所述配置信息包括多个产品的预存产品信息，以及每个所述产品的至少一个预存流程信息，以及每个所述预存流程信息的多个工艺站点中每个所述工艺站点的预存站点编号信息；
根据所述配置信息和所述参数信息，获得与所述待删除工艺站点存在关联关系的关联数据信息；
根据所述关联数据信息，获得与所述关联数据信息存在关联关系的关联工艺站点。
根据本公开的一些实施例，所述根据所述配置信息和所述参数信息，获得与所述待删除工艺站点存在关联关系的关联数据信息，包括：
根据所述产品的至少一个预存流程信息和所述参数信息中的所述流程信息，确定所述流程信息所属流程中与所述待删除工艺站点存在关联关系的第一关联数据信息；
根据所述产品的至少一个预存流程信息和所述参数信息中的所述流程信息，确定所述至少一个预存流程信息中除所述流程信息所属流程外的其他流程与所述待删除工艺站点存在关联关系的第二关联数据信息。
根据本公开的一些实施例，所述根据所述关联数据信息，获得与所述关联数据信息存在关联关系的关联工艺站点，包括：
根据所述第一关联数据信息，获得与所述第一关联数据信息存在关联关系的第一关联工艺站点；
根据所述第二关联数据信息，获得与所述第二关联数据信息存在关联关系的第二关联工艺站点。
根据本公开的一些实施例，所述控制方法还包括：
若所述关联工艺站点和所述关联数据信息已完成更新,显示提示界面；
若接收到作用于所述显示提示界面的确认操作信息，删除所述待删除工艺站点。
根据本公开的一些实施例，所述控制方法还包括：
若接收到作用于所述显示提示界面的查看操作信息，显示与所述待删除工艺站点存在关联的所述关联工艺站点和所述关联数据信息。
根据本公开的一些实施例，所述控制方法还包括：
接收输入信息，所述输入信息包括调整信息和所述参数信息；
判断所述待删除工艺站点与所述调整信息是否存在关联，若是，发出报错提示信息；
若否，发出第二更新提示信息。
本公开实施例第二方面提供一种半导体工艺生产线的控制装置，所述装置包括：
接收模块，接收待删除工艺站点的参数信息，其中，所述参数信息包括与所述待删除工艺站点相关的产品信息、流程信息和/或站点编号信息；
获取模块，根据所述参数信息，获得与所述待删除工艺站点存在关联 关系的关联工艺站点，以及关联数据信息；
执行模块，若所述关联工艺站点和所述关联数据信息未进行更新，发出第一更新提示信息。
根据本公开的一些实施例，所述获取模块被配置为：
获取配置信息；所述配置信息包括多个产品的预存产品信息，以及每个所述产品的至少一个预存流程信息，以及每个所述预存流程信息的多个工艺站点中每个所述工艺站点的预存站点编号信息；
根据所述配置信息和所述参数信息，获得与所述待删除工艺站点存在关联关系的关联数据信息；
根据所述关联数据信息，获得与所述关联数据信息存在关联关系的关联工艺站点。
根据本公开的一些实施例，所述获取模块被配置为：
根据所述产品的至少一个预存流程信息和所述参数信息中的所述流程信息，确定所述流程信息所属流程中与所述待删除工艺站点存在关联关系的第一关联数据信息；
根据所述产品的至少一个预存流程信息和所述参数信息中的所述流程信息，确定所述至少一个预存流程信息中除所述流程信息所属流程外的其他流程与所述待删除工艺站点存在关联关系的第二关联数据信息。
根据本公开的一些实施例，所述获取模块被配置为：
根据所述第一关联数据信息，获得与所述第一关联数据信息存在关联关系的第一关联工艺站点；
根据所述第二关联数据信息，获得与所述第二关联数据信息存在关联关系的第二关联工艺站点。
根据本公开的一些实施例，所述控制装置还包括：
若所述关联工艺站点和所述关联数据信息已完成更新，显示提示界面；
若接收到作用于所述显示提示界面的确认操作信息，删除所述待删除工艺站点。
根据本公开的一些实施例，所述控制装置还包括：
若接收到作用于所述显示提示界面的查看操作信息，显示与所述待删除工艺站点存在关联的所述关联工艺站点和所述关联数据信息。
根据本公开的一些实施例，所述控制装置还包括：
接收输入信息，所述输入信息包括调整信息和所述参数信息；
判断所述待删除工艺站点与所述调整信息是否存在关联，若是，发出报错提示信息；
若否，发出第二更新提示信息。
本公开实施例第三方面提供一种半导体工艺生产线的控制设备，所述控制设备包括：
处理器；
用于存储处理器可执行指令的存储器；
其中，所述处理器被配置为执行：
接收待删除工艺站点的参数信息，其中，所述参数信息包括与所述待删除工艺站点相关的产品信息、流程信息和/或站点编号信息；
根据所述参数信息，获得与所述待删除工艺站点存在关联关系的关联工艺站点，以及关联数据信息；
若所述关联工艺站点和所述关联数据信息未进行更新，发出第一更新提示信息。
根据本公开实施例的第四方面，提供一种计算机可读存储介质，当所述存储介质中的指令由半导体工艺生产线的控制设备的处理器执行时，使得半导体工艺生产线的控制设备能够执行：
接收待删除工艺站点的参数信息，其中，所述参数信息包括与所述待删除工艺站点相关的产品信息、流程信息和/或站点编号信息；
根据所述参数信息，获得与所述待删除工艺站点存在关联关系的关联工艺站点，以及关联数据信息；
若所述关联工艺站点和所述关联数据信息未进行更新，发出第一更新提示信息。
在阅读并理解了附图和详细描述后，可以明白其他方面。
附图说明
并入到说明书中并且构成说明书的一部分的附图示出了本公开的实施例，并且与描述一起用于解释本公开实施例的原理。在这些附图中，类似的附图标记用于表示类似的要素。下面描述中的附图是本公开的一些实施例，而不是全部实施例。对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，可以根据这些附图获得其他的附图。
图1是根据一示例性实施例示出的一种半导体工艺生产线的控制方法的流程图；
图2是根据一示例性实施例示出的一种半导体工艺生产线的控制方法 的流程图。
图3是根据一示例性实施例示出的一种半导体工艺生产线的控制方法的流程图。
图4是根据一示例性实施例示出的一种半导体工艺生产线的控制方法的流程图。
图5是根据一示例性实施例示出的一种半导体工艺生产线的控制方法的流程图。
图6是根据一示例性实施例示出的一种半导体工艺生产线的控制方法的流程图。
图7是根据一示例性实施例示出的一种半导体工艺生产线的控制装置的框图。
图8是根据一示例性实施例示出的一种计算机设备的框图。
具体实施方式
为使本公开实施例的目的、技术方案和优点更加清楚，下面将结合本公开实施例中的附图，对公开实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例是本公开一部分实施例，而不是全部的实施例。基于本公开中的实施例，本领域技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本公开保护的范围。需要说明的是，在不冲突的情况下，本公开中的实施例及实施例中的特征可以相互任意组合。
晶圆加工工序中，制程间的相互参考和限制，常采用统计过程控制(Statistical Process Control，简称SPC)。SPC是一种借助数理统计方法的过程控制工具，它对生产过程进行分析评价。例如，当前制程将量测数据传输给指定前制程供参考，以分析出风险，并采取措施消除其影响。
但是，若是误删相关数据，或者，未及时对相关数据进行调整，可能会造成制程出错、生产中止或者产品污染等问题。当对其制程控制参数进行查询，或者，获取相关重要功能参数时，由于每道生产工序中的制程控制参数种类较多且数量庞大，操作过于复杂且易遗漏，用户无法尽快获取完整的相关数据，不能准确判断删除操作的正确性。
本公开提供了一种半导体工艺生产线的控制方法，应用于半导体工艺生产线控制设备。该控制方法中，接收待删除工艺站点的参数信息，参数信息包括与待删除工艺站点相关的产品信息、流程信息和/或编号信息。根据参数信息，获得与待删除工艺站点存在关联关系的关联工艺站点，以及关联数据信息。若关联工艺站点和关联信息未进行更新，发出第一更新提示信息。本 公开中通过接收到待删除工艺站点的参数信息，查找出与待删除工艺站点存在关联关系的关联工艺站点，并对其进行核查。若关联工艺站点和关联信息未更新，则发出第一更新提示信息，以提醒用户，对关联工艺站点和关联信息进行及时更新，避免发生待删除站点删除后，其他关联工艺站点无法使用的问题，保证半导体工艺生产线的正常运行。
本公开示例性的实施例中提供一种半导体工艺生产线的控制方法，该控制方法可应用于半导体工艺生产线控制设备。半导体工艺生产线控制设备内预存有标准规格管理系统和基本记录规格管理系统。标准规格管理系统包括半导体工艺生产线的工艺流程数据库，基本记录规格管理系统包括半导体工艺生产线的工艺流程记录数据库。
如图1所示，图1示出了根据本公开一示例性的实施例提供的半导体工艺生产线的控制方法的流程图：
S11、接收待删除工艺站点的参数信息，其中，参数信息包括与待删除工艺站点相关的产品信息、流程信息和/或站点编号信息。
在该步骤中，当需要删除其中一个工艺站点时，将其待删除工艺站点的参数信息输入至基本记录规格管理系统，半导体工艺生产线控制设备接收到该参数信息，并基于参数信息在标准规格管理系统内进行检索。
待删除工艺站点的参数信息可以是待删除工艺站点内的产品信息，产品信息可以是但不限于产品编号；待删除工艺站点的参数信息也可以是流程信息，流程信息可以是但不限于工艺流程的编号；待删除工艺站点的参数信息可以是但不限于站点编号信息，站点编号信息可以是数字编号等。
当然，可以理解的是，参数信息可以满足任一一种上述信息，也可以是同时满足上述信息，亦或者可以是不同信息的自由组合，在此，不做具体限定，以实际设计为准。且参数信息不限于上述产品信息、流程信息和站点编号信息，也可以是与该站点相关的具有代表性的关键功能字段，只要是能够充分指代待删除站点即可。
S12、根据参数信息，获得与待删除工艺站点存在关联关系的关联工艺站点，以及关联数据信息。
在该步骤中，半导体工艺生产线控制设备根据参数信息，从标准规格管理系统内，提取出所有与待删除工艺站点存在关联关系的关联工艺站点，以及所有与待删除工艺站点存在关联关系的关联数据信息，完成检索步骤，实现了对关联工艺站点和关联数据信息的有效定位。
半导体工艺生产线控制设备根据参数信息，定位至与待删除工艺站点存 在关联关系的关联工艺站点或者关联数据信息，便于用户查看。
S13、若关联工艺站点和关联数据信息未进行更新，发出第一更新提示信息。
在该步骤中，若半导体工艺生产线控制设备检索出标准规格管理系统内，存在与待删除工艺站点相关联的关联工艺站点和关联数据信息，定位至关联工艺站点和关联数据信息处，并发出第一更新提示信息，以警示用户。用户对其核查和更新，去除关联工艺站点和关联数据信息与待删除工艺站点的关联，使得待删除工艺站点被删除后，半导体工艺生产线控制设备依然可以正常运行。
当半导体工艺生产线控制设备检索出标准规格管理系统内，存在与待删除工艺站点相关联的关联工艺站点和关联数据信息时，半导体工艺生产线控制设备可以直接定位并显示上述关联工艺站点和关联数据信息，方便用户查看。
一个示例中，关联工艺站点和关联数据信息均可以以弹窗的形式展示在显示界面处，多个弹窗之间排列设置，每个弹窗内可以显示具有关键功能字段的预览内容，以供用户快速浏览，并根据预览内容判断出是否需要更新。若需要更新，用户可以点选对应的弹窗，以快速进入至该对应的关联工艺站点处或者关联数据信息处。
另一个示例中，关联工艺站点和关联数据信息可以以列表的形式展示在显示界面处。用户可以选择不同的列表，直接进入至对应的关联工艺站点处或者关联数据信息处，并对其进行处理。
需要说明的是，上述定位显示关联工艺站点和关联数据信息的方式仅是列举一种可以实现方式，并不对本申请构成限制。
本公开实施例所提供的半导体工艺生产线的控制方法，半导体工艺生产线在制定过程中，建立标准规格管理系统时，标准规格管理系统内包含半导体工艺生产线的所有产品的工艺流程。不同的产品具有不同的工艺流程，每个工艺流程包括多个工艺站点，多个工艺站点之间的连接形成对应的工艺流程。若是贸然删除任意工艺站点的相关数据，则会导致关联工艺站点或者关联数据信息失效，半导体工艺生产线瘫痪，无法正常使用，甚至损坏工艺生产线上的产品，增加了生产损耗率和维修成本。通过发出第一更新提示信息，警示用户存在关联数据，则用户可以对其针对性核查和更新，以便于用户快速处理，避免出现生产线瘫痪。
本公开示例性的实施例中提供一种半导体工艺生产线的控制方法，该控 制方法可应用于半导体工艺生产线控制设备。半导体工艺生产线控制设备内预存有标准规格管理系统和基本记录规格管理系统。标准规格管理系统包括半导体工艺生产线的工艺流程数据库，基本记录规格管理系统包括半导体工艺生产线的工艺流程记录数据库。
如图2所示，图2示出了根据本公开一示例性的实施例提供的半导体工艺生产线的控制方法的流程图：
S21、接收待删除工艺站点的参数信息，其中，参数信息包括与待删除工艺站点相关的产品信息、流程信息和/或站点编号信息。
在该步骤中，步骤S21中所涉及到的方法与上述实施例中步骤S11中所涉及到的方法相同，在此，不再重复赘述。
S22、获取配置信息。
在该步骤中，获取标准规格管理系统内的配置信息。配置信息包括多个产品的预存产品信息，以及每个产品的至少一个预存流程信息，以及每个预存流程信息的多个站点中每个工艺站点的预存站点编号信息。
S23、根据配置信息和参数信息，获得与待删除工艺站点存在关联关系的关联数据信息。
在该步骤中，半导体工艺生产线控制设备通过接收到的待删除工艺站点的参数信息，采用搜索或者遍历的方式在配置信息中查找与待删除工艺站点的参数信息存在关联关系的关联数据信息。关联数据信息可以是与参数信息存在组合关系或者存在关联功能的参数字段。
其中，参数字段例如是允许进站污染等级、出站定义污染等级、特殊材料加工标识、监测群组标识、制程前脚本编号、制程后脚本编号，或者，前量测站点编号、数据传输目标站点编号、返工流程编号，或者，
返工流程返回站点编号、返工流程循环参考站点编号、分支流程编号、分支流程返回站点编号，或者，
时间控制结束站点编号、超出时间控制执行操作站点、时间控制更新起始站点编号、时间控制更新结束站点编号等。
当然，可以理解的是，上述关于关联数据信息的示例仅是对本申请进行示例性说明，并不对本申请构成限制。
S24、根据关联数据信息，获得与关联数据信息存在关联关系的关联工艺站点。
在该步骤中，半导体工艺生产线控制设备根据关联数据信息，最终确定与该关联数据信息存在关联关系的关联工艺站点。
S25、若关联工艺站点和关联数据信息未进行更新，发出第一更新提示信息。
在该步骤中，步骤S25中所涉及到的方法与上述实施例中步骤S13中所涉及到的方法相同，在此，不再重复赘述。
本公开实施例所提供的半导体工艺生产线的控制方法，设置配置信息。当确定待删除工艺站点的参数信息时，基于该参数信息，采用搜索或者遍历的方式在配置信息中查找与待删除工艺站点的参数信息存在关联关系的关联数据信息，并根据关联数据信息，最终确定关联工艺站点，提高了查找效率，有效节省检索时间。
本公开示例性的实施例中提供一种半导体工艺生产线的控制方法，该控制方法可应用于半导体工艺生产线控制设备。半导体工艺生产线控制设备内预存有标准规格管理系统和基本记录规格管理系统。标准规格管理系统包括半导体工艺生产线的工艺流程数据库，基本记录规格管理系统包括半导体工艺生产线的工艺流程记录数据库。
如图3所示，图3示出了根据本公开一示例性的实施例提供的半导体工艺生产线的控制方法的流程图：
S31、接收待删除工艺站点的参数信息，其中，参数信息包括与待删除工艺站点相关的产品信息、流程信息和/或站点编号信息。
S32、获取配置信息；配置信息包括多个产品的预存产品信息，以及每个产品的至少一个预存流程信息，以及每个预存流程信息的多个站点中每个工艺站点的预存站点编号信息。
在该步骤中，步骤S31-步骤S32中所涉及到的方法与上述实施例中步骤S21-步骤S22中所涉及到的方法相同，在此，不再重复赘述。
S33、根据产品的至少一个预存流程信息和参数信息中的流程信息，确定流程信息所述流程中与待删除工艺站点存在关联关系的第一关联数据信息。
在该步骤中，半导体工艺生产线控制设备根据标准规格管理系统内预存的产品的预存流程信息，以及输入的待删除工艺站点的参数信息中的流程信息，确定待删除工艺站点所处的工艺流程。半导体工艺生产线控制设备在同一工艺流程下，搜索出与待删除工艺站点存在关联关系的第一关联数据信息。
需要说明的是，产品的预存流程信息不限于一个，产品的预存流程信息可以是一个、两个或者多个。
在步骤S33中还包括：
S331、根据第一关联数据信息，获得与第一关联数据信息存在关联关系 的第一关联工艺站点。
在步骤S33中，第一关联数据信息可以是同一工艺流程内，除待删除工艺站点以外的其他工艺站点上设定的组合关系或者关联功能的参数字段。
设定的组合关系或者关联功能的参数字段例如是前量测站点编号、数据传输目标站点编号、返工流程返回站点编号、返工流程循环参考站点编号、分支流程返回站点编号、时间控制结束站点编号等。
半导体工艺生产线控制设备根据标准规格管理系统内预存的产品的预存流程信息，与输入的待删除工艺站点的参数信息中的流程信息做匹配。若匹配到存在第一关联数据信息，则反馈显示与第一关联数据信息存在关联关系的第一关联工艺站点，第一关联工艺站点可以是站点编号。
S34、根据产品的至少一个预存流程信息和参数信息中的流程信息，确定至少一个预存流程信息中除流程信息所属流程外的其他流程与待删除工艺站点存在关联关系的第二关联数据信息。
在该步骤中，半导体工艺生产线控制设备根据标准规格管理系统内预存的产品的预存流程信息，以及输入的待删除工艺站点的参数信息中的流程信息，确定待删除工艺站点所处的工艺流程。半导体工艺生产线控制设备搜索待删除工艺站点所属工艺流程外的其他工艺流程，搜索出与待删除工艺站点存在关联关系的第二关联数据信息。
需要说明的是，产品的预存流程信息不限于一个，产品的预存流程信息可以是一个、两个或者多个。
在步骤S34中还包括：
S341、根据第二关联数据信息，获得与第二关联数据信息存在关联关系的第二关联工艺站点。
在步骤S34中，第二关联数据信息可以是其他工艺流程内，与待删除工艺站点存在设定的组合关系或者关联功能的参数字段。
设定的组合关系或者关联功能的参数字段例如是更新时间控制的支流程编号和更新时间控制起始站点编号，或更新时间控制的支流程编号和更新时间控制结束站点编号。
本公开实施例所提供的半导体工艺生产线的控制方法，搜索与待删除工艺站点同一工艺流程下的第一关联数据信息，以确定第一关联工艺站点，以及搜索与待删除工艺站点所属工艺流程的其他工艺站点，以确定第二关联工艺站点，全面搜索，降低工艺删减风险。
本公开示例性的实施例中提供一种半导体工艺生产线的控制方法，该控 制方法可应用于半导体工艺生产线控制设备。半导体工艺生产线控制设备内预存有标准规格管理系统和基本记录规格管理系统。标准规格管理系统包括半导体工艺生产线的工艺流程数据库，基本记录规格管理系统包括半导体工艺生产线的工艺流程记录数据库。
如图4所示，图4示出了根据本公开一示例性的实施例提供的半导体工艺生产线的控制方法的流程图：
S41、接收待删除工艺站点的参数信息，其中，参数信息包括与待删除工艺站点相关的产品信息、流程信息和/或站点编号信息。
S42、根据参数信息，获得与待删除工艺站点存在关联关系的关联工艺站点，以及关联数据信息。
S43、若关联工艺站点和关联数据信息未进行更新，发出第一更新提示信息。
在该步骤中，步骤S41-步骤S43中所涉及到的方法与上述实施例中步骤S11-步骤S13中所涉及到的方法相同，在此，不再重复赘述。
S44、若关联工艺站点和关联数据信息已完成更新，显示提示界面。
在该步骤中，半导体工艺生产线控制设备获取到关联工艺站点和关联数据信息已完成更新，显示提示界面，提示用户更新完毕，以便于用户进行下一步操作。
S45、若接收到作用于显示提示界面的确认操作信息，删除待删除工艺站点。
在该步骤中，用户确认后，半导体工艺生产线控制设备接收到用户作用于显示提示界面的确认操作信息，则删除待删除工艺站点。
本公开实施例所提供的半导体工艺生产线的控制方法，通过设置提示界面，若不存在与待删除工艺站点存在关联的关联工艺站点和关联数据信息，则提示界面显示操作按钮，例如：是或者否，是则继续提交操作，否则停止提交操作进行数据确认，提示用户更新是否完成，降低工艺删减风险。
本公开示例性的实施例中提供一种半导体工艺生产线的控制方法，该控制方法可应用于半导体工艺生产线控制设备。半导体工艺生产线控制设备内预存有标准规格管理系统和基本记录规格管理系统。标准规格管理系统包括半导体工艺生产线的工艺流程数据库，基本记录规格管理系统包括半导体工艺生产线的工艺流程记录数据库。
如图5所示，图5示出了根据本公开一示例性的实施例提供的半导体工艺生产线的控制方法的流程图：
S51、接收待删除工艺站点的参数信息，其中，参数信息包括与待删除工艺站点相关的产品信息、流程信息和/或站点编号信息。
S52、根据参数信息，获得与待删除工艺站点存在关联关系的关联工艺站点，以及关联数据信息。
S53、若关联工艺站点和关联数据信息未进行更新，发出第一更新提示信息。
在该步骤中，步骤S51-步骤S53中所涉及到的方法与上述实施例中步骤S41-步骤S43中所涉及到的方法相同，在此，不再重复赘述。
S54、若接收到作用于显示提示界面的查看操作信息，显示与待删除工艺站点存在关联的关联工艺站点和关联数据信息。
在该步骤中，若半导体工艺生产线控制设备接收到作用于显示提示界面的查看操作信息，则表明还存在未更新的关联工艺站点和关联数据信息，则显示与待删除工艺站点存在关联的关联工艺站点和关联数据信息，以便于进一步核查。
本公开所提供的半导体工艺生产线的控制方法，若待删除工艺站点的参数信息与其他工艺站点存在关联关系，则显示提示界面，提示界面内包含提醒文字、待删除站点存在关联设定、关联资料链接、用户可点击下载查看详细、继续操作按钮等，便于用户查看关联数据信息。
本公开示例性的实施例中提供一种半导体工艺生产线的控制方法，该控制方法可应用于半导体工艺生产线控制设备。半导体工艺生产线控制设备内预存有标准规格管理系统和基本记录规格管理系统。标准规格管理系统包括半导体工艺生产线的工艺流程数据库，基本记录规格管理系统包括半导体工艺生产线的工艺流程记录数据库。
如图6所示，图6示出了根据本公开一示例性的实施例提供的半导体工艺生产线的控制方法的流程图：
S61、接收待删除工艺站点的参数信息，其中，参数信息包括与待删除工艺站点相关的产品信息、流程信息和/或站点编号信息。
S62、根据参数信息，获得与待删除工艺站点存在关联关系的关联工艺站点，以及关联数据信息。
S63、若关联工艺站点和关联数据信息未进行更新，发出第一更新提示信息。
在该步骤中，步骤S61-步骤S53中所涉及到的方法与上述实施例中步骤S51-步骤S53中所涉及到的方法相同，在此，不再重复赘述。
S64、接收输入信息。
在该步骤中，半导体工艺生产线控制设备接收用户输入的输入信息，输入信息包括调整信息和参数信息。其中，调整信息可以是新增或者修改数据信息，参数信息可以是待删除数据信息。
S65、判断待删除工艺站点与调整信息是否存在关联。
在该步骤中，半导体工艺生产线控制设备判断调整信息与待删除工艺站点是否存在关联，降低工艺删减风险。
若存在关联，则执行步骤S66，提示用户需求冲突。
若不存在关联，则执行步骤S67，半导体工艺生产线控制设备在标准规格管理系统内搜索删除工艺站点所属工艺流程和删除工艺站点所属工艺流程的其他工艺流程，检查本次申请是否已将匹配资讯做清除或修改。若未更改，则执行步骤S66，提示用户需做同步变更。若已做更改，则进行下一步检索判断。
S66、发出报错提示信息。
S67、发出第二更新提示信息。
本公开所提供的半导体工艺生产线的控制方法，用户选取工艺站点做删除操作并提交申请时，半导体工艺生产线控制设备根据基本记录规格管理系统内所选择的待删除工艺站点的参数信息，在标准规格管理系统内查询并获取与待删除工艺站点存在关联关系的关联工艺站点，以及关联数据信息，并判断将待删除工艺站点删除后，是否影响半导体工艺生产线的功能。根据影响结果，以弹窗提醒或者报错的形式提示用户，降低作业风险，提高变更效率。
本公开还提出了一种半导体工艺生产线的控制装置，如图7所示，本实施例中的控制装置包括：接收模块110、获取模块120、执行模块130，本实施例中的装置用于实现如图1所示的方法。
在实施过程中，接收模块110，接收待删除工艺站点的参数信息，其中，参数信息包括与待删除工艺站点相关的产品信息、流程信息和/或站点编号信息。获取模块120，根据参数信息，获得与待删除工艺站点存在关联关系的关联工艺站点，以及关联数据信息。执行模块130，若关联工艺站点和关联数据信息未进行更新，发出第一更新提示信息。半导体工艺生产线控制设备通过用户输入的待删除站点的参数信息，搜索出与待删除工艺站点存在关联关系的关联工艺站点和关联数据信息，警示用户，降低工艺删减风险。
本公开还提出了一种半导体工艺生产线的控制装置，如图7所示，本实 施例中的控制装置包括：接收模块110、获取模块120、执行模块130，本实施例中的装置用于实现如图2所示的方法。
获取模块120被配置为获取配置信息；配置信息包括多个产品的预存产品信息，以及每个产品的至少一个预存流程信息，以及每个预存流程信息的多个工艺站点中每个工艺站点的预存站点编号信息；根据配置信息和参数信息，获得与待删除工艺站点存在关联关系的关联数据信息；根据关联数据信息，获得与关联数据信息存在关联关系的关联工艺站点。
本公开还提出了一种半导体工艺生产线的控制装置，如图7所示，本实施例中的控制装置包括：接收模块110、获取模块120、执行模块130，本实施例中的装置用于实现如图3所示的方法。
获取模块120被配置为根据产品的至少一个预存流程信息和参数信息中的流程信息，确定流程信息所属流程中与待删除工艺站点存在关联关系的第一关联数据信息；根据产品的至少一个预存流程信息和参数信息中的流程信息，确定至少一个预存流程信息中除流程信息所属流程外的其他流程与待删除工艺站点存在关联关系的第二关联数据信息。
获取模块120被配置为根据第一关联数据信息，获得与第一关联数据信息存在关联关系的第一关联工艺站点；根据第二关联数据信息，获得与第二关联数据信息存在关联关系的第二关联工艺站点。
本公开还提出了一种半导体工艺生产线的控制装置，如图7所示，本实施例中的控制装置包括：接收模块110、获取模块120、执行模块130，本实施例中的装置用于实现如图4所示的方法。
执行模块130被配置为若关联工艺站点和关联数据信息已完成更新，显示提示界面；若接收到作用于显示提示界面的确认操作信息，删除待删除工艺站点。
本公开还提出了一种半导体工艺生产线的控制装置，如图7所示，本实施例中的控制装置包括：接收模块110、获取模块120、执行模块130，本实施例中的装置用于实现如图5所示的方法。
执行模块130被配置为若接收到作用于显示提示界面的查看操作信息，显示与待删除工艺站点存在关联的关联工艺站点和关联数据信息。
本公开还提出了一种半导体工艺生产线的控制装置，如图7所示，本实施例中的控制装置包括：接收模块110、获取模块120、执行模块130，本实施例中的装置用于实现如图6所示的方法。
接收模块110被设置为接收输入信息，输入信息包括调整信息和参数信 息；判断待删除工艺站点与调整信息是否存在关联，若是，发出报错提示信息；若否，发出第二更新提示信息。
图8是根据一示例性实施例示出的一种用于……的计算机设备800的框图。例如，计算机设备800可以被提供为一半导体工艺生产线的控制设备。参照图8，计算机设备800包括处理器801，处理器的个数可以根据需要设置为一个或者多个。计算机设备800还包括存储器802，用于存储可由处理器801的执行的指令，例如应用程序。存储器的个数可以根据需要设置一个或者多个。其存储的应用程序可以为一个或者多个。处理器801被配置为执行指令，以执行上述方法。
本领域技术人员应明白，本公开的实施例可提供为方法、装置(设备)、或计算机程序产品。因此，本公开可采用完全硬件实施例、完全软件实施例、或结合软件和硬件方面的实施例的形式。而且，本公开可采用在一个或多个其中包含有计算机可用程序代码的计算机可用存储介质上实施的计算机程序产品的形式。计算机存储介质包括在用于存储信息(诸如计算机可读指令、数据结构、程序模块或其他数据)的任何方法或技术中实施的易失性和非易失性、可移除和不可移除介质,包括但不限于RAM、ROM、EEPROM、闪存或其他存储器技术、CD-ROM、数字多功能盘(DVD)或其他光盘存储、磁盒、磁带、磁盘存储或其他磁存储装置、或者可以用于存储期望的信息并且可以被计算机访问的任何其他的介质等。此外，本领域技术人员公知的是，通信介质通常包含计算机可读指令、数据结构、程序模块或者诸如载波或其他传输机制之类的调制数据信号中的其他数据，并且可包括任何信息递送介质。
在示例性实施例中，提供了一种包括指令的计算机可读存储介质，例如包括指令的存储器802，上述指令可由装置800的处理器801执行以完成上述方法。例如，所述计算机可读存储介质可以是ROM、随机存取存储器(RAM)、CD-ROM、磁带、软盘和光数据存储设备等。
一种计算机可读存储介质，当所述存储介质中的指令由半导体工艺生产线的控制设备的处理器执行时，使得半导体工艺生产线的控制设备能够执行：
接收待删除工艺站点的参数信息，其中，参数信息包括与待删除工艺站点相关的产品信息、流程信息和/或站点编号信息；
根据参数信息，获得与待删除工艺站点存在关联关系的关联工艺站点，以及关联数据信息；
若关联工艺站点和关联数据信息未进行更新，发出第一更新提示信息。
本公开是参照根据本公开实施例的方法、装置(设备)和计算机程序产品的流程图和/或方框图来描述的。应理解可由计算机程序指令实现流程图和/或方框图中的每一流程和/或方框、以及流程图和/或方框图中的流程和/或方框的结合。可提供这些计算机程序指令到通用计算机、专用计算机、嵌入式处理机或其他可编程数据处理设备的处理器以产生一个机器，使得通过计算机或其他可编程数据处理设备的处理器执行的指令产生用于实现在流程图一个流程或多个流程和/或方框图一个方框或多个方框中指定的功能的装置。
这些计算机程序指令也可存储在能引导计算机或其他可编程数据处理设备以特定方式工作的计算机可读存储器中，使得存储在该计算机可读存储器中的指令产生包括指令装置的制造品，该指令装置实现在流程图一个流程或多个流程和/或方框图一个方框或多个方框中指定的功能。
这些计算机程序指令也可装载到计算机或其他可编程数据处理设备上，使得在计算机或其他可编程设备上执行一系列操作步骤以产生计算机实现的处理，从而在计算机或其他可编程设备上执行的指令提供用于实现在流程图一个流程或多个流程和/或方框图一个方框或多个方框中指定的功能的步骤。
在本公开中，术语“包括”、“包含”或者其任何其他变体意在涵盖非排他性的包含，从而使得包括一系列要素的物品或者设备不仅包括那些要素，而且还包括没有明确列出的其他要素，或者是还包括为这种物品或者设备所固有的要素。在没有更多限制的情况下，由语句“包括……”限定的要素，并不排除在包括所述要素的物品或者设备中还存在另外的相同要素。
尽管已描述了本公开的优选实施例，但本领域技术人员一旦得知了基本创造性概念，则可对这些实施例作出另外的变更和修改。所以，所附权利要求意欲解释为包括优选实施例以及落入本公开范围的所有变更和修改。
显然，本领域技术人员可以对本公开进行各种改动和变型而不脱离本公开的精神和范围。这样，倘若本公开的这些修改和变型属于本公开权利要求及其等同技术的范围之内，则本公开的意图也包含这些改动和变型在内。
工业实用性
本公开实施例中的半导体工艺生产线的控制方法中，通过接收到待删除工艺站点的参数信息，查找出与待删除工艺站点存在关联关系的关联工艺站点，并对其进行核查。若关联工艺站点和关联信息未更新，则发出第一更新提示信息，以提醒用户，对关联工艺站点和关联信息进行及时更新。

Claims (16)

  1. 一种半导体工艺生产线的控制方法，包括：
    接收待删除工艺站点的参数信息，其中，所述参数信息包括与所述待删除工艺站点相关的产品信息、流程信息和/或站点编号信息；
    根据所述参数信息，获得与所述待删除工艺站点存在关联关系的关联工艺站点，以及关联数据信息；
    若所述关联工艺站点和所述关联数据信息未进行更新，发出第一更新提示信息。
  2. 根据权利要求1所述的半导体工艺生产线的控制方法，其中，所述根据所述参数信息，获得与所述待删除工艺站点存在关联关系的关联工艺站点，以及关联数据信息，包括：
    获取配置信息；所述配置信息包括多个产品的预存产品信息，以及每个所述产品的至少一个预存流程信息，以及每个所述预存流程信息的多个工艺站点中每个所述工艺站点的预存站点编号信息；
    根据所述配置信息和所述参数信息，获得与所述待删除工艺站点存在关联关系的关联数据信息；
    根据所述关联数据信息，获得与所述关联数据信息存在关联关系的关联工艺站点。
  3. 根据权利要求2所述的半导体工艺生产线的控制方法，其中，所述根据所述配置信息和所述参数信息，获得与所述待删除工艺站点存在关联关系的关联数据信息，包括：
    根据所述产品的至少一个预存流程信息和所述参数信息中的所述流程信息，确定所述流程信息所属流程中与所述待删除工艺站点存在关联关系的第一关联数据信息；
    根据所述产品的至少一个预存流程信息和所述参数信息中的所述流程信息，确定所述至少一个预存流程信息中除所述流程信息所属流程外的其他流程与所述待删除工艺站点存在关联关系的第二关联数据信息。
  4. 根据权利要求3所述的半导体工艺生产线的控制方法，其中，所述根据所述关联数据信息，获得与所述关联数据信息存在关联关系的关联 工艺站点，包括：
    根据所述第一关联数据信息，获得与所述第一关联数据信息存在关联关系的第一关联工艺站点；
    根据所述第二关联数据信息，获得与所述第二关联数据信息存在关联关系的第二关联工艺站点。
  5. 根据权利要求1所述的半导体工艺生产线的控制方法，所述控制方法还包括：
    若所述关联工艺站点和所述关联数据信息已完成更新，显示提示界面；
    若接收到作用于所述显示提示界面的确认操作信息，删除所述待删除工艺站点。
  6. 根据权利要求5所述的半导体工艺生产线的控制方法，所述控制方法还包括：
    若接收到作用于所述显示提示界面的查看操作信息，显示与所述待删除工艺站点存在关联的所述关联工艺站点和所述关联数据信息。
  7. 根据权利要求1所述的半导体工艺生产线的控制方法，所述控制方法还包括：
    接收输入信息，所述输入信息包括调整信息和所述参数信息；
    判断所述待删除工艺站点与所述调整信息是否存在关联，若是，发出报错提示信息；
    若否，发出第二更新提示信息。
  8. 一种半导体工艺生产线的控制装置，包括：
    接收模块，接收待删除工艺站点的参数信息，其中，所述参数信息包括与所述待删除工艺站点相关的产品信息、流程信息和/或站点编号信息；
    获取模块，根据所述参数信息，获得与所述待删除工艺站点存在关联关系的关联工艺站点，以及关联数据信息；
    执行模块，若所述关联工艺站点和所述关联数据信息未进行更新，发出第一更新提示信息。
  9. 根据权利要求8所述的半导体工艺生产线的控制装置，其中，所述获取模块被配置为：
    获取配置信息；所述配置信息包括多个产品的预存产品信息，以及每个所述产品的至少一个预存流程信息，以及每个所述预存流程信息的多个工艺站点中每个所述工艺站点的预存站点编号信息；
    根据所述配置信息和所述参数信息，获得与所述待删除工艺站点存在关联关系的关联数据信息；
    根据所述关联数据信息，获得与所述关联数据信息存在关联关系的关联工艺站点。
  10. 根据权利要求9所述的半导体工艺生产线的控制装置，其中，所述获取模块被配置为：
    根据所述产品的至少一个预存流程信息和所述参数信息中的所述流程信息，确定所述流程信息所属流程中与所述待删除工艺站点存在关联关系的第一关联数据信息；
    根据所述产品的至少一个预存流程信息和所述参数信息中的所述流程信息，确定所述至少一个预存流程信息中除所述流程信息所属流程外的其他流程与所述待删除工艺站点存在关联关系的第二关联数据信息。
  11. 根据权利要求10所述的半导体工艺生产线的控制装置，其中，所述获取模块被配置为：
    根据所述第一关联数据信息，获得与所述第一关联数据信息存在关联关系的第一关联工艺站点；
    根据所述第二关联数据信息，获得与所述第二关联数据信息存在关联关系的第二关联工艺站点。
  12. 根据权利要求8所述的半导体工艺生产线的控制装置，所述控制装置还包括：
    若所述关联工艺站点和所述关联数据信息已完成更新，显示提示界面；
    若接收到作用于所述显示提示界面的确认操作信息，删除所述待删除工艺站点。
  13. 根据权利要求12所述的半导体工艺生产线的控制装置，所述控制装置还包括：
    若接收到作用于所述显示提示界面的查看操作信息，显示与所述待删除工艺站点存在关联的所述关联工艺站点和所述关联数据信息。
  14. 根据权利要求8所述的半导体工艺生产线的控制装置，所述控制装置还包括：
    接收输入信息，所述输入信息包括调整信息和所述参数信息；
    判断所述待删除工艺站点与所述调整信息是否存在关联，若是，发出报错提示信息；
    若否，发出第二更新提示信息。
  15. 一种半导体工艺生产线的控制设备，包括：
    处理器；
    用于存储处理器可执行指令的存储器；
    其中，所述处理器被配置为执行权利要求1-7所述的方法。
  16. 一种计算机可读存储介质，其中，当所述存储介质中的指令由半导体工艺生产线的控制设备的处理器执行时，使得半导体工艺生产线的控制设备能够执行权利要求1-7所述的方法。
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