WO2023002289A1 - 発光装置 - Google Patents
発光装置 Download PDFInfo
- Publication number
- WO2023002289A1 WO2023002289A1 PCT/IB2022/056311 IB2022056311W WO2023002289A1 WO 2023002289 A1 WO2023002289 A1 WO 2023002289A1 IB 2022056311 W IB2022056311 W IB 2022056311W WO 2023002289 A1 WO2023002289 A1 WO 2023002289A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- layer
- light
- emitting device
- abbreviation
- phenyl
- Prior art date
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- 239000000126 substance Substances 0.000 claims abstract description 68
- 239000000463 material Substances 0.000 claims description 155
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- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- SLIUAWYAILUBJU-UHFFFAOYSA-N pentacene Chemical compound C1=CC=CC2=CC3=CC4=CC5=CC=CC=C5C=C4C=C3C=C21 SLIUAWYAILUBJU-UHFFFAOYSA-N 0.000 description 1
- 125000001792 phenanthrenyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3C=CC12)* 0.000 description 1
- KBBSSGXNXGXONI-UHFFFAOYSA-N phenanthro[9,10-b]pyrazine Chemical compound C1=CN=C2C3=CC=CC=C3C3=CC=CC=C3C2=N1 KBBSSGXNXGXONI-UHFFFAOYSA-N 0.000 description 1
- 125000001791 phenazinyl group Chemical group C1(=CC=CC2=NC3=CC=CC=C3N=C12)* 0.000 description 1
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- BZBAYMUKLAYQEO-UHFFFAOYSA-N phenylborane Chemical compound BC1=CC=CC=C1 BZBAYMUKLAYQEO-UHFFFAOYSA-N 0.000 description 1
- 150000005359 phenylpyridines Chemical class 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
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- 229920000078 poly(4-vinyltriphenylamine) Polymers 0.000 description 1
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- PBMFSQRYOILNGV-UHFFFAOYSA-N pyridazine Chemical group C1=CC=NN=C1 PBMFSQRYOILNGV-UHFFFAOYSA-N 0.000 description 1
- 150000003222 pyridines Chemical class 0.000 description 1
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- HYXGAEYDKFCVMU-UHFFFAOYSA-N scandium oxide Chemical compound O=[Sc]O[Sc]=O HYXGAEYDKFCVMU-UHFFFAOYSA-N 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
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- PJANXHGTPQOBST-UHFFFAOYSA-N stilbene Chemical group C=1C=CC=CC=1C=CC1=CC=CC=C1 PJANXHGTPQOBST-UHFFFAOYSA-N 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- DKWSBNMUWZBREO-UHFFFAOYSA-N terbium Chemical compound [Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb][Tb] DKWSBNMUWZBREO-UHFFFAOYSA-N 0.000 description 1
- IFLREYGFSNHWGE-UHFFFAOYSA-N tetracene Chemical compound C1=CC=CC2=CC3=CC4=CC=CC=C4C=C3C=C21 IFLREYGFSNHWGE-UHFFFAOYSA-N 0.000 description 1
- 125000005579 tetracene group Chemical group 0.000 description 1
- UGNWTBMOAKPKBL-UHFFFAOYSA-N tetrachloro-1,4-benzoquinone Chemical compound ClC1=C(Cl)C(=O)C(Cl)=C(Cl)C1=O UGNWTBMOAKPKBL-UHFFFAOYSA-N 0.000 description 1
- 125000003698 tetramethyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 230000003685 thermal hair damage Effects 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
- 125000004665 trialkylsilyl group Chemical group 0.000 description 1
- 150000003852 triazoles Chemical group 0.000 description 1
- 125000005580 triphenylene group Chemical group 0.000 description 1
- LENZDBCJOHFCAS-UHFFFAOYSA-N tris Chemical compound OCC(N)(CO)CO LENZDBCJOHFCAS-UHFFFAOYSA-N 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- GPPXJZIENCGNKB-UHFFFAOYSA-N vanadium Chemical group [V]#[V] GPPXJZIENCGNKB-UHFFFAOYSA-N 0.000 description 1
- 125000001834 xanthenyl group Chemical group C1=CC=CC=2OC3=CC=CC=C3C(C12)* 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
- TYHJXGDMRRJCRY-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) tin(4+) Chemical compound [O-2].[Zn+2].[Sn+4].[In+3] TYHJXGDMRRJCRY-UHFFFAOYSA-N 0.000 description 1
- OPCPDIFRZGJVCE-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) titanium(4+) Chemical compound [O-2].[Zn+2].[In+3].[Ti+4] OPCPDIFRZGJVCE-UHFFFAOYSA-N 0.000 description 1
- ZVWKZXLXHLZXLS-UHFFFAOYSA-N zirconium nitride Chemical compound [Zr]#N ZVWKZXLXHLZXLS-UHFFFAOYSA-N 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/121—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/122—Pixel-defining structures or layers, e.g. banks
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
- G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/02—Details
- H05B33/06—Electrode terminals
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/12—Light sources with substantially two-dimensional radiating surfaces
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/12—Light sources with substantially two-dimensional radiating surfaces
- H05B33/14—Light sources with substantially two-dimensional radiating surfaces characterised by the chemical or physical composition or the arrangement of the electroluminescent material, or by the simultaneous addition of the electroluminescent material in or onto the light source
- H05B33/145—Arrangements of the electroluminescent material
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/12—Light sources with substantially two-dimensional radiating surfaces
- H05B33/22—Light sources with substantially two-dimensional radiating surfaces characterised by the chemical or physical composition or the arrangement of auxiliary dielectric or reflective layers
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/12—Light sources with substantially two-dimensional radiating surfaces
- H05B33/22—Light sources with substantially two-dimensional radiating surfaces characterised by the chemical or physical composition or the arrangement of auxiliary dielectric or reflective layers
- H05B33/24—Light sources with substantially two-dimensional radiating surfaces characterised by the chemical or physical composition or the arrangement of auxiliary dielectric or reflective layers of metallic reflective layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/11—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
- H10K50/125—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers specially adapted for multicolour light emission, e.g. for emitting white light
- H10K50/13—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers specially adapted for multicolour light emission, e.g. for emitting white light comprising stacked EL layers within one EL unit
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/805—Electrodes
- H10K59/8051—Anodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/805—Electrodes
- H10K59/8052—Cathodes
Definitions
- One aspect of the present invention relates to an organic compound, a light-emitting device, a display module, a lighting module, a display device, a light-emitting device, an electronic device, a lighting device, and an electronic device.
- a technical field of one embodiment of the invention disclosed in this specification and the like relates to a product, a method, or a manufacturing method.
- one aspect of the invention relates to a process, machine, manufacture, or composition of matter. Therefore, the technical field of one embodiment of the present invention disclosed in this specification more specifically includes semiconductor devices, display devices, liquid crystal display devices, light-emitting devices, lighting devices, power storage devices, storage devices, imaging devices, and the like.
- Driving methods or their manufacturing methods can be mentioned as an example.
- Light-emitting devices (organic EL devices) utilizing electroluminescence (EL) using organic compounds have been put to practical use.
- the basic structure of these light-emitting devices is to sandwich an organic compound layer (EL layer) containing a light-emitting material between a pair of electrodes.
- EL layer organic compound layer
- Such a light-emitting device is self-luminous, when it is used as a pixel of a display, it has advantages such as high visibility and no need for a backlight, compared to liquid crystal, and is particularly suitable for a flat panel display.
- Another great advantage of a display using such a light-emitting device is that it can be made thin and light. Another feature is its extremely fast response speed.
- a light-emitting device using such a light-emitting device is suitable for various electronic devices, and research and development are being pursued for a light-emitting device having better characteristics.
- the pixel area is small, and therefore the structure of the peripheral portion of the pixel electrode tends to have a greater effect. For example, if light emitted unintentionally through a microcavity structure with a different optical path length occurs in the periphery of the pixel electrode due to leakage current, the emission spectrum becomes broad and color purity deteriorates. And it becomes remarkable in a blue light-emitting device with a short optical path length in the original microcavity structure, resulting in a large decrease in the blue index.
- an object of one embodiment of the present invention is to provide a high-definition light-emitting device that emits blue light with a favorable blue index.
- a pixel electrode A, a pixel electrode B arranged adjacent to the pixel electrode A, a common electrode, and an EL layer A sandwiched between the pixel electrode A and the common electrode are provided.
- the EL layer A has an opening A provided to overlap with the electrode A and an opening B provided to overlap with the pixel electrode B
- the EL layer A has a light-emitting layer A, and the light-emitting layer A , a luminescent material A, the luminescent material A emitting blue light
- the EL layer A is in contact with the common electrode through the opening A
- the EL layer B is in contact with the common electrode through the opening B
- an end portion of the pixel electrode A is covered with the EL layer A, and an end portion of the pixel electrode B is covered with the EL layer B. It is a light emitting device.
- an end portion of the EL layer A is covered with the insulating layer, and an end portion of the EL layer B is covered with the insulating layer. It is a light emitting device.
- another embodiment of the present invention includes a pixel electrode A, a pixel electrode B arranged adjacent to the pixel electrode A, a common electrode, and an EL layer interposed between the pixel electrode A and the common electrode.
- the EL layer A has an opening A provided to overlap with the pixel electrode A and an opening B provided to overlap with the pixel electrode B, and the EL layer A is a first EL layer having a light-emitting layer A.
- the EL layer B comprising a first EL layer B having a light-emitting layer B; a second EL layer positioned between one EL layer B and the common electrode;
- the light-emitting layer A includes a light-emitting material A;
- One EL layer A is in contact with the pixel electrode A, the first EL layer B is in contact with the pixel electrode B, and the second EL layer A is in contact with the first EL layer A.
- the second EL layer B is in contact with the first EL layer B through the opening B.
- the second EL layer is in contact with the insulating layer and the common electrode in a region that does not overlap with the pixel electrode A and the pixel electrode B. It is a light emitting device that is sandwiched.
- an end portion of the pixel electrode A is covered with the first EL layer A
- an end portion of the pixel electrode B is covered with the first EL layer A.
- the light-emitting device is covered with an EL layer B.
- an end portion of the first EL layer A is covered with the insulating layer, and an end portion of the first EL layer B is covered with the insulating layer.
- another embodiment of the present invention is a light-emitting device having the above structure, in which the insulating layer contains an organic compound.
- another embodiment of the present invention is a light-emitting device having the above structure, in which side surfaces of the opening A and the opening B are tapered and the taper angle is less than 90°.
- another embodiment of the present invention is the light-emitting device having the above structure, in which the distance between the facing ends of the pixel electrode A and the pixel electrode B is 0.5 ⁇ m or more and 5 ⁇ m or less.
- another embodiment of the present invention is the light-emitting device having the above structure, in which the pixel electrode A, the EL layer A, and the common electrode are in contact with each other and overlap with each other in an area of 5 ⁇ m 2 or more and 15 ⁇ m 2 or less. .
- another embodiment of the present invention is a light-emitting device having the above structure, in which the EL layer A has a half width of an emission spectrum emitted from the opening A of 20 nm or less.
- another embodiment of the present invention is a light-emitting device having the above structure, in which the half width of the emission spectrum of the light-emitting substance A is 30 nm or less.
- another embodiment of the present invention is an electronic device including any of the light-emitting devices described above, a sensor, an operation button, and a speaker or a microphone.
- the light-emitting device in this specification includes an image display device using a light-emitting device.
- a module in which a connector such as an anisotropic conductive film or TCP (Tape Carrier Package) is attached to the light emitting device a module in which a printed wiring board is provided at the end of the TCP, or a COG (Chip On Glass) method for the light emitting device
- the light-emitting device may also include a module in which an IC (integrated circuit) is directly mounted. Additionally, lighting fixtures and the like may have light emitting devices.
- One embodiment of the present invention can provide a high-definition light-emitting device that emits blue light with a favorable blue index.
- 1A, 1B, and 1C are schematic diagrams of light emitting devices.
- 2A and 2B are schematic diagrams of light emitting devices.
- 3A and 3B are diagrams showing an active matrix light emitting device.
- 4A and 4B are diagrams showing an active matrix light emitting device.
- FIG. 5 is a diagram showing an active matrix type light emitting device.
- 6A and 6B are diagrams showing a passive matrix light emitting device.
- 7A to 7D are diagrams showing configuration examples of the display device.
- 8A to 8F are diagrams illustrating an example of a method for manufacturing a display device.
- 9A to 9F are diagrams illustrating an example of a method for manufacturing a display device.
- 10A and 10B are diagrams showing an illumination device.
- 11A, 11B1, 11B2, and 11C are diagrams showing an electronic device.
- 12A, 12B, and 12C are diagrams showing an electronic device.
- FIG. 13 is a diagram showing an illumination device.
- FIG. 14 is a diagram showing an illumination device.
- FIG. 15 is a diagram showing an in-vehicle display device and a lighting device.
- 16A and 16B are diagrams showing an electronic device.
- 17A, 17B and 17C are diagrams showing electronic devices.
- FIG. 18 is a diagram illustrating a configuration example of a display device.
- 19 is a diagram showing the current efficiency-luminance characteristics of light-emitting device 1, light-emitting device 2, and comparative light-emitting device 1.
- FIG. 20 is a diagram showing blue index-current density characteristics of light-emitting device 1, light-emitting device 2, and comparative light-emitting device 1.
- FIG. FIG. 21 is a diagram showing emission spectra of Light-Emitting Device 1, Light-Emitting Device 2, and Comparative Light-Emitting Device 1.
- FIG. 22 shows the 2D spectroradiometer measurement results in the example.
- FIG. 23 shows the 2D spectroradiometer measurement results in the example.
- 24A and 24B are diagrams of measured EL intensities in 2D spectroradiometer measurements.
- 25A and 25B are diagrams of measured EL intensity in 2D spectroradiometer measurement.
- FIG. 26A is a diagram for explaining a light-emitting device in Examples
- FIG. 26B is a diagram for explaining a cross-sectional STEM image and a 2D spectroradiometer image for explaining a light-emitting mechanism in Examples.
- a device manufactured using a metal mask or FMM fine metal mask, high-definition metal mask
- a device with an MM (metal mask) structure is sometimes referred to as a device with an MML (metal maskless) structure.
- FIG. 1A shows a diagram of a light-emitting device in a light-emitting device of one embodiment of the present invention.
- the light-emitting device has an EL layer 103 between a pair of electrodes (a pixel electrode (anode) 101 and a common electrode (cathode) 102).
- the EL layer 103 is in contact with the pixel electrode 101 and the common electrode 102, and emits light when a voltage is applied between the pixel electrode 101 and the common electrode 102 and current flows.
- a light-emitting device of one embodiment of the present invention includes a plurality of such light-emitting devices.
- the EL layer 103 is positioned between the first EL layer 103(1) including the light emitting layer, the first EL layer 103(1) and the common electrode 102, and the first EL layer 103(1). 103(1) and a second EL layer 103(2) in contact with the common electrode .
- a layer closer to the cathode than the light-emitting layer a hole blocking layer, an electron transport layer, and an electron injection layer
- EL layer 103 (EL layer 103(1) if EL layer 103(2) is provided) in each light emitting device separates it from adjacent light emitting devices in at least one direction.
- the EL layer 103 (EL layer 103(1)) may be provided to cover at least one pair of sides of the pixel electrode 101 as shown in FIGS.
- the end portion of the EL layer 103 (EL layer 103 ( 1 )) may be provided inside the end portion of 101 .
- At least a pair of opposing ends of the EL layer 103 (or the EL layer 103(1) when the EL layer 103(2) is provided) is covered with an insulating layer 125 containing an organic compound.
- An opening 128 is formed in the insulating layer 125 so as to overlap with the pixel electrode 101 .
- the common electrode 102 is in contact with the EL layer 103 in the opening 128 (in contact with the EL layer 103(2) when the EL layer 103(2) is provided).
- an insulating layer 126 may be provided between the EL layer 103 (EL layer 103 ( 1 )) and the insulating layer 125 .
- the insulating layer 126 preferably contains an inorganic compound, more preferably aluminum oxide.
- the upper portion of the EL layer 103 (EL layer 103(1)) has a two-layer structure and the side surfaces thereof have a single-layer structure, with the upper surface being thicker than the side surfaces.
- the EL layer 103 preferably has a layered structure as shown in FIG. 2B and has at least a light-emitting layer 113 .
- a hole-injection layer 111, a hole-transport layer 112, a light-emitting layer 113, an electron-transport layer 114, an electron-injection layer 115, and the like may be included.
- it may have a hole blocking layer, an electron blocking layer, an exciton blocking layer, an intermediate layer (charge generation layer), and the like. Note that these are examples, and layers other than the light-emitting layer 113 may or may not be provided, and a layer having a plurality of functions may be formed instead of the plurality of functions.
- the light-emitting layer 113 has a light-emitting substance.
- the light-emitting substance is preferably a substance that emits blue light (with an emission peak wavelength of 440 nm to 480 nm, preferably 455 nm to 465 nm), because the effect is more remarkable.
- a blue light-emitting substance it is preferable to use one whose emission spectrum has a half width of 30 nm or less.
- FIG. 2A shows a light-emitting device structure having a configuration different from that of FIG.
- the light-emitting device shown in FIG. 2A is not provided with the insulating layer 125 in the light-emitting device shown in FIG.
- the EL layer 103 and the pixel electrode are in contact with each other through the portion 128 . Further, the EL layer 103 is continuously provided, and the common electrode 102 is in contact with the upper surface of the EL layer 103 in a wider range than the pixel electrode.
- the common electrode located at the position overlapping the opening of the insulating film In addition to the current flowing between them, current may also unintentionally flow between them and common electrodes located in the periphery.
- the light excited by the current (leakage current) differs from the assumed light emission position, so the optical path length from the light emitting device to the outside of the device deviates from the expected wavelength range for some light. may be lost.
- the light-emitting device having the configuration shown in FIG. The peak shifts to the long wavelength side. As a result, the color purity is lowered, and the blue index is particularly lowered.
- the blue index (BI) is a value obtained by dividing the current efficiency (cd/A) by the y chromaticity, and is one of the indices representing the emission characteristics of blue light emission.
- Blue light emission tends to have higher color purity as the y chromaticity is smaller.
- Blue light emission with high color purity can express blue in a wide range even if the luminance component is small, and the use of blue light emission with high color purity reduces the luminance required to express blue.
- the effect of reducing power consumption can be obtained from Therefore, the BI that takes into account the y chromaticity, which is one of the indicators of blue purity, is preferably used as a means of expressing the efficiency of blue light emission. It can be said that there is
- the half width of the emission spectrum obtained from the opening 128 can be 20 nm or less.
- a high-definition light-emitting device corresponds to, for example, a light-emitting device in which adjacent pixel electrodes are arranged at very narrow intervals of about 0.5 ⁇ m to 5 ⁇ m, preferably about 0.5 ⁇ m to 1 ⁇ m.
- the light-emitting area in one light-emitting device (the area of the portion where the pixel electrode, the EL layer, and the common electrode are in contact and overlapped (overlapping without an insulating layer interposed)) is 5 ⁇ m 2 or more and 15 ⁇ m 2 or less, preferably corresponds to a light-emitting device of 5 ⁇ m 2 or more and 10 ⁇ m 2 or less.
- the light-emitting device of one embodiment of the present invention can also reduce leakage current (also referred to as lateral leakage current, lateral leakage current, or lateral leakage current) that can occur between adjacent light-emitting devices. becomes. For example, when a hole injection layer is shared between adjacent sub-pixels, lateral leakage current may occur due to the hole injection layer. On the other hand, in the light-emitting device of one embodiment of the present invention, since the adjacent light-emitting device and the EL layer 103 (the EL layer 103(1)) are separated in at least one direction, lateral leakage current is substantially generated. or the lateral leakage current can be made extremely small.
- leakage current also referred to as lateral leakage current, lateral leakage current, or lateral leakage current
- the light-emitting device of one embodiment of the present invention can provide a display device with a wider margin for alignment accuracy between different patternings and less variation than the light-emitting device illustrated in FIGS.
- the light-emitting device of one embodiment of the present invention includes the EL layer 103 including a plurality of layers between a pair of electrodes, the pixel electrode (anode) 101 and the common electrode (cathode) 102, as described above.
- 103 has a light-emitting material, a light-emitting layer 113 having at least a first organic compound (and a second organic compound), and may have a hole-blocking layer having a third organic compound. preferable.
- the anode is preferably formed using a metal, an alloy, a conductive compound, a mixture thereof, or the like having a large work function (specifically, 4.0 eV or more).
- a metal an alloy, a conductive compound, a mixture thereof, or the like having a large work function (specifically, 4.0 eV or more).
- ITO indium oxide-tin oxide
- IWZO indium oxide-zinc oxide
- IWZO indium oxide containing tungsten oxide and zinc oxide
- These conductive metal oxide films are usually formed by a sputtering method, but may be produced by applying a sol-gel method or the like.
- indium oxide-zinc oxide is formed by a sputtering method using a target in which 1 to 20 wt % of zinc oxide is added to indium oxide.
- Indium oxide (IWZO) containing tungsten oxide and zinc oxide is formed by a sputtering method using a target containing 0.5 to 5 wt% of tungsten oxide and 0.1 to 1 wt% of zinc oxide relative to indium oxide.
- materials used for the anode include, for example, gold (Au), platinum (Pt), nickel (Ni), tungsten (W), chromium (Cr), molybdenum (Mo), iron (Fe), cobalt ( Co), copper (Cu), palladium (Pd), or nitrides of metal materials (eg, titanium nitride).
- metal materials eg, titanium nitride
- graphene can also be used as the material used for the anode.
- the laminated structure is not particularly limited, and includes a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, an electron injection layer, and a carrier block layer.
- Various layer structures can be applied, such as (hole blocking layer, electron blocking layer), exciton blocking layer, charge generating layer, and the like. Note that any layer may not be provided.
- a structure having a hole-injection layer 111, a hole-transport layer 112, a light-emitting layer 113, a hole-blocking layer, an electron-transport layer 114, and an electron-injection layer 115 is described below. Be specific.
- the hole-injection layer 111 is a layer containing a substance having acceptor properties. Either an organic compound or an inorganic compound can be used as the substance having acceptor properties.
- a compound having an electron-withdrawing group can be used as the substance having acceptor properties, and 7,7,8,8-tetracyano-2,3,5,6-tetrafluoroquinodimethane (abbreviation: F4-TCNQ), chloranil, 2,3,6,7,10,11 -hexacyano-1,4,5,8,9,12-hexaazatriphenylene (abbreviation: HAT-CN), 1, 3,4,5,7,8-hexafluorotetracyano-naphthoquinodimethane (abbreviation: F6-TCNNQ), 2-(7-dicyanomethylene-1,3,4,5,6,8,9,10 -octafluoro-7H-pyrene-2-ylidene)malononitrile and the like.
- F4-TCNQ 7,7,8,8-tetracyano-2,3,5,6-tetrafluoroquinodimethane
- HAT-CN 2,3,6,7,10,11 -
- a compound in which an electron-withdrawing group is bound to a condensed aromatic ring having a plurality of heteroatoms such as HAT-CN
- a condensed aromatic ring having a plurality of heteroatoms such as HAT-CN
- [3] radialene derivatives having an electron-withdrawing group are preferable because they have very high electron-accepting properties.
- molybdenum oxide, vanadium oxide, ruthenium oxide, tungsten oxide, manganese oxide, or the like can be used in addition to the organic compounds described above.
- phthalocyanine-based complex compounds such as phthalocyanine (abbreviation: H 2 Pc) or copper phthalocyanine (CuPc), 4,4′-bis[N-(4-diphenylaminophenyl)-N-phenylamino]biphenyl (abbreviation: : DPAB), N,N'-bis ⁇ 4-[bis(3-methylphenyl)amino]phenyl ⁇ -N,N'-diphenyl-(1,1'-biphenyl)-4,4'-diamine (abbreviation : DNTPD), or a polymer such as poly(3,4-ethylenedioxythiophene)/poly(styrenesulfonic acid) (PEDOT/PSS).
- PEDOT/PSS poly(3,4-ethylene
- organic compounds having acceptor properties are easy to use because they are easily vapor-deposited and easily formed into a film.
- a composite material in which a hole-transporting material contains the above acceptor substance can be used. Note that by using a composite material in which an acceptor substance is contained in a material having a hole-transporting property, a material for forming an electrode can be selected regardless of the work function. In other words, not only a material with a large work function but also a material with a small work function can be used as the anode.
- Various organic compounds such as aromatic amine compounds, carbazole derivatives, aromatic hydrocarbons, and polymer compounds (oligomers, dendrimers, polymers, etc.) can be used as the hole-transporting material used for the composite material.
- a material having a hole-transport property used for the composite material is preferably a substance having a hole mobility of 1 ⁇ 10 ⁇ 6 cm 2 /Vs or more.
- Organic compounds that can be used as a material having a hole-transport property in the composite material are specifically listed below.
- DTDPPA 4,4'-bis[ N-(4-diphenylaminophenyl)-N-phenylamino
- carbazole derivatives include 3-[N-(9-phenylcarbazol-3-yl)-N-phenylamino]-9-phenylcarbazole (abbreviation: PCzPCA1), 3,6-bis[N- (9-phenylcarbazol-3-yl)-N-phenylamino]-9-phenylcarbazole (abbreviation: PCzPCA2), 3-[N-(1-naphthyl)-N-(9-phenylcarbazol-3-yl) amino]-9-phenylcarbazole (abbreviation: PCzPCN1), 4,4′-di(N-carbazolyl)biphenyl (abbreviation: CBP), 1,3,5-tris[4-(N-carbazolyl)phenyl]benzene ( Abbreviation: TCPB), 9-[4-(10-phenyl-9-anthracenyl)phenyl]-9
- aromatic hydrocarbons examples include 2-tert-butyl-9,10-di(2-naphthyl)anthracene (abbreviation: t-BuDNA), 2-tert-butyl-9,10-di(1-naphthyl) anthracene, 9,10-bis(3,5-diphenylphenyl)anthracene (abbreviation: DPPA), 2-tert-butyl-9,10-bis(4-phenylphenyl)anthracene (abbreviation: t-BuDBA), 9, 10-di(2-naphthyl)anthracene (abbreviation: DNA), 9,10-diphenylanthracene (abbreviation: DPAnth), 2-tert-butylanthracene (abbreviation: t-BuAnth), 9,10-bis(4-methyl) -1-naphthyl)anthracene (abbreviation: DM
- pentacene, coronene, etc. can also be used. It may also have a vinyl skeleton.
- aromatic hydrocarbons having a vinyl group include 4,4′-bis(2,2-diphenylvinyl)biphenyl (abbreviation: DPVBi), 9,10-bis[4-(2,2- diphenylvinyl)phenyl]anthracene (abbreviation: DPVPA) and the like.
- DPVBi 4,4′-bis(2,2-diphenylvinyl)biphenyl
- DPVPA 9,10-bis[4-(2,2- diphenylvinyl)phenyl]anthracene
- an organic compound of one embodiment of the present invention can also be used.
- poly(N-vinylcarbazole) (abbreviation: PVK) or poly(4-vinyltriphenylamine) (abbreviation: PVTPA)
- PVK poly(4-vinylcarbazole)
- PVTPA poly(4-vinyltriphenylamine)
- PTPDMA poly[N-(4- ⁇ N'-[4-(4-diphenylamino) phenyl]phenyl-N′-phenylamino ⁇ phenyl)methacrylamide]
- PTPDMA poly[N,N′-bis(4-butylphenyl)-N,N′-bis(phenyl)benzidine]
- Polymer compounds such as Poly-TPD
- a material having a hole-transporting property that is used for the composite material preferably has any one of a carbazole skeleton, a dibenzofuran skeleton, a dibenzothiophene skeleton, and an anthracene skeleton.
- aromatic amines having a substituent containing a dibenzofuran ring or a dibenzothiophene ring aromatic monoamines having a naphthalene ring, or aromatic monoamines having a 9-fluorenyl group bonded to the amine nitrogen via an arylene group. good.
- these organic compounds are substances having an N,N-bis(4-biphenyl)amino group because a light-emitting device with a long life can be manufactured.
- organic compounds include N-(4-biphenyl)-6,N-diphenylbenzo[b]naphtho[1,2-d]furan-8-amine (abbreviation: BnfABP), N,N-bis(4-biphenyl)-6-phenylbenzo[b]naphtho[1,2-d]furan-8-amine (abbreviation: BBABnf), 4,4′-bis(6-phenylbenzo[b ]naphtho[1,2-d]furan-8-yl)-4′′-phenyltriphenylamine (abbreviation: BnfBB1BP), N,N-bis(4-biphenyl)benzo[b]naphtho[1,2- d]furan-6-
- the material having a hole-transport property used for the composite material is more preferably a substance having a relatively deep HOMO level of ⁇ 5.7 eV to ⁇ 5.4 eV.
- the material having a hole-transporting property used for the composite material is a substance having a relatively deep HOMO level, the induction of holes can be moderately suppressed, and a light-emitting device having a long life can be obtained. .
- the refractive index of the layer can be lowered by further mixing an alkali metal or alkaline earth metal fluoride into the composite material (preferably, the atomic ratio of fluorine atoms in the layer is 20% or more). can. Also by this, a layer with a low refractive index can be formed inside the EL layer 103, and the external quantum efficiency of the light-emitting device can be improved.
- the hole injection layer 111 By forming the hole injection layer 111, the hole injection property is improved, and a light-emitting device with a low driving voltage can be obtained.
- the hole-transport layer 112 is formed containing a material having hole-transport properties.
- a material having a hole-transport property preferably has a hole mobility of 1 ⁇ 10 ⁇ 6 cm 2 /Vs or more.
- Examples of the hole-transporting material include 4,4′-bis[N-(1-naphthyl)-N-phenylamino]biphenyl (abbreviation: NPB) and N,N′-bis(3-methylphenyl).
- TPD 4,4'-bis[N-(spiro-9,9'-bifluorene-2- yl)-N-phenylamino]biphenyl
- BSPB 4,4'-bis[N-(spiro-9,9'-bifluorene-2- yl)-N-phenylamino]biphenyl
- BPAFLP 4-phenyl-4′-(9-phenylfluoren-9-yl)triphenylamine
- mBPAFLP 4-phenyl-3′-(9 -phenylfluoren-9-yl)triphenylamine
- PCBA1BP 4,4' -diphenyl-4′′-(9-phenyl-9H-carbazol-3-yl)triphenylamine
- PCBBi1BP 4,4' -diphenyl-4′′-(9-phenyl-9H-carbazol-3-yl)triphenylamine
- a compound having an aromatic amine skeleton or a compound having a carbazole skeleton is preferable because it has good reliability, high hole-transport properties, and contributes to a reduction in driving voltage.
- the substances exemplified as the materials having a hole-transport property that are used for the composite material of the hole-injection layer 111 can also be suitably used as the material for the hole-transport layer 112 .
- the light-emitting layer 113 preferably contains a light-emitting substance and a first organic compound. In addition, it may further contain a second organic compound. Note that the light-emitting layer 113 may contain other materials at the same time. Alternatively, a laminate of two layers having different compositions may be used.
- the first organic compound is an electron-transporting organic compound
- the second organic compound is a hole-transporting organic compound.
- the luminescent substance may be a fluorescent substance, a phosphorescent substance, or a substance exhibiting thermally activated delayed fluorescence (TADF).
- TADF thermally activated delayed fluorescence
- fluorescent light-emitting substance examples include the following. Fluorescent substances other than these can also be used.
- condensed aromatic diamine compounds typified by pyrenediamine compounds such as 1,6FLPAPrn, 1,6mMemFLPAPrn, and 1,6BnfAPrn-03 are preferable because of their high hole-trapping properties and excellent luminous efficiency or reliability.
- a phosphorescent light-emitting substance is used as the light-emitting substance in the light-emitting layer 113
- examples of materials that can be used include the following.
- an organometallic iridium complex having a pyrazine skeleton can provide red light emission with good chromaticity.
- other known substances that emit red phosphorescence can also be used.
- tris(4-methyl-6-phenylpyrimidinato)iridium (III) (abbreviation: [Ir(mpm) 3 ]), tris(4-t-butyl-6-phenylpyrimidinato)iridium (III) (abbreviation: [Ir(tBuppm) 3 ]), (acetylacetonato)bis(6-methyl-4-phenylpyrimidinato)iridium (III) (abbreviation: [Ir(mppm) 2 (acac)]), ( acetylacetonato)bis(6-tert-butyl-4-phenylpyrimidinato)iridium(III) (abbreviation: [Ir(tBuppm) 2 (acac)]), (acetylacetonato)bis[6-(2- norbornyl)-4-phenylpyrimidinato]iridium(III) (abbreviation: [Ir(nbppm
- an organometallic iridium complex having a pyrimidine skeleton is particularly preferable because it is remarkably excellent in reliability and luminous efficiency.
- Fullerene and its derivatives, acridine and its derivatives, eosin derivatives and the like can be used as the TADF material.
- metal-containing porphyrins containing magnesium (Mg), zinc (Zn), cadmium (Cd), tin (Sn), platinum (Pt), indium (In), palladium (Pd), and the like are included.
- the metal-containing porphyrin include protoporphyrin-tin fluoride complex (SnF 2 (Proto IX)), mesoporphyrin-tin fluoride complex (SnF 2 (Meso IX)), and hematoporphyrin represented by the following structural formulas.
- the heterocyclic compound has a ⁇ -electron-rich heteroaromatic ring and a ⁇ -electron-deficient heteroaromatic ring
- the heterocyclic compound has both high electron-transporting properties and high hole-transporting properties, which is preferable.
- a pyridine skeleton, a diazine skeleton (pyrimidine skeleton, pyrazine skeleton, pyridazine skeleton), and a triazine skeleton are preferred because they are stable and reliable.
- a benzofuropyrimidine skeleton, a benzothienopyrimidine skeleton, a benzofuropyrazine skeleton, and a benzothienopyrazine skeleton are preferred because they have high acceptor properties and good reliability.
- an acridine skeleton, a phenoxazine skeleton, a phenothiazine skeleton, a furan skeleton, a thiophene skeleton, and a pyrrole skeleton are stable and reliable.
- a dibenzofuran skeleton is preferable as the furan skeleton, and a dibenzothiophene skeleton is preferable as the thiophene skeleton.
- a dibenzothiophene skeleton is preferable as the thiophene skeleton.
- the pyrrole skeleton an indole skeleton, a carbazole skeleton, an indolocarbazole skeleton, a bicarbazole skeleton, and a 3-(9-phenyl-9H-carbazol-3-yl)-9H-carbazole skeleton are particularly preferred.
- a substance in which a ⁇ -electron-rich heteroaromatic ring and a ⁇ -electron-deficient heteroaromatic ring are directly bonded has both the electron-donating property of the ⁇ -electron-rich heteroaromatic ring and the electron-accepting property of the ⁇ -electron-deficient heteroaromatic ring. It is particularly preferable because it becomes stronger and the energy difference between the S1 level and the T1 level becomes smaller, so that thermally activated delayed fluorescence can be efficiently obtained.
- An aromatic ring to which an electron-withdrawing group such as a cyano group is bonded may be used instead of the ⁇ -electron-deficient heteroaromatic ring.
- an aromatic amine skeleton, a phenazine skeleton, or the like can be used as the ⁇ -electron-rich skeleton.
- the ⁇ -electron-deficient skeleton includes a xanthene skeleton, a thioxanthene dioxide skeleton, an oxadiazole skeleton, a triazole skeleton, an imidazole skeleton, an anthraquinone skeleton, a boron-containing skeleton such as phenylborane or borantrene, and a nitrile such as benzonitrile or cyanobenzene.
- An aromatic ring or heteroaromatic ring having a group or a cyano group, a carbonyl skeleton such as benzophenone, a phosphine oxide skeleton, a sulfone skeleton, or the like can be used.
- a ⁇ -electron-deficient skeleton and a ⁇ -electron-rich skeleton can be used in place of at least one of the ⁇ -electron-deficient heteroaromatic ring and the ⁇ -electron-rich heteroaromatic ring.
- TADF materials which are capable of very fast and reversible intersystem crossing and emit light according to the thermal equilibrium model between singlet and triplet excited states, may be used.
- a TADF material has an extremely short emission lifetime (excitation lifetime) as a TADF material, and can suppress a decrease in efficiency in a high luminance region in a light emitting device.
- excitation lifetime emission lifetime
- materials such as those having the molecular structures shown below are exemplified.
- the TADF material is a material having a small difference between the S1 level and the T1 level and having a function of converting energy from triplet excitation energy to singlet excitation energy by reverse intersystem crossing. Therefore, triplet excitation energy can be up-converted (reverse intersystem crossing) to singlet excitation energy with a small amount of thermal energy, and a singlet excited state can be efficiently generated. Also, triplet excitation energy can be converted into luminescence.
- an exciplex also called exciplex, exciplex, or exciplex
- exciplex in which two kinds of substances form an excited state has an extremely small difference between the S1 level and the T1 level, and the triplet excitation energy is replaced by the singlet excitation energy. It functions as a TADF material that can be converted into
- a phosphorescence spectrum observed at a low temperature may be used as an index of the T1 level.
- a tangent line is drawn at the tail of the fluorescence spectrum on the short wavelength side
- the energy of the wavelength of the extrapolated line is the S1 level
- a tangent line is drawn at the tail of the phosphorescence spectrum on the short wavelength side
- the extrapolation When the energy of the wavelength of the line is the T1 level, the difference between S1 and T1 is preferably 0.3 eV or less, more preferably 0.2 eV or less.
- the S1 level of the host material is preferably higher than the S1 level of the TADF material.
- the T1 level of the host material is preferably higher than the T1 level of the TADF material.
- the light-emitting device of one embodiment of the present invention a significant effect can be obtained when the light-emitting substance is a substance that emits blue light; therefore, one embodiment of the present invention is applied to a light-emitting device that includes a light-emitting substance that emits blue light. is preferred.
- Examples of electron-transporting materials used for the host material include bis(10-hydroxybenzo[h]quinolinato)beryllium(II) (abbreviation: BeBq 2 ), bis(2-methyl-8-quinolinolato)(4-phenylpheno) Lato)aluminum (III) (abbreviation: BAlq), bis(8-quinolinolato)zinc (II) (abbreviation: Znq), bis[2-(2-benzoxazolyl)phenolato]zinc (II) (abbreviation: ZnPBO) ), metal complexes such as bis[2-(2-benzothiazolyl)phenolato]zinc(II) (abbreviation: ZnBTZ), and organic compounds having a ⁇ -electron-deficient heteroaromatic ring.
- BeBq 2 bis(2-methyl-8-quinolinolato)(4-phenylpheno) Lato)aluminum (III)
- organic compounds having a ⁇ -electron-deficient heteroaromatic ring examples include 2-(4-biphenylyl)-5-(4-tert-butylphenyl)-1,3,4-oxadiazole (abbreviation: PBD), 3-(4-biphenylyl)-4-phenyl-5-(4-tert-butylphenyl)-1,2,4-triazole (abbreviation: TAZ), 1,3-bis[5-(p-tert-butyl Phenyl)-1,3,4-oxadiazol-2-yl]benzene (abbreviation: OXD-7), 9-[4-(5-phenyl-1,3,4-oxadiazol-2-yl) Phenyl]-9H-carbazole (abbreviation: CO11), 2,2′,2′′-(1,3,5-benzenetriyl)tris(1-phenyl-1H-benzimidazole) (abbreviation: TP
- an organic compound containing a heteroaromatic ring having a diazine skeleton, an organic compound containing a heteroaromatic ring having a pyridine skeleton, and an organic compound containing a heteroaromatic ring having a triazine skeleton are preferable because of their high reliability.
- an organic compound containing a heteroaromatic ring having a diazine (pyrimidine or pyrazine) skeleton and an organic compound containing a heteroaromatic ring having a triazine skeleton have high electron-transport properties and contribute to reduction in driving voltage.
- An organic compound having an amine skeleton or a ⁇ -electron rich heteroaromatic ring can be used as a hole-transporting material used for the host material.
- Examples of the organic compound having an amine skeleton or a ⁇ -electron rich heteroaromatic ring include 4,4′-bis[N-(1-naphthyl)-N-phenylamino]biphenyl (abbreviation: NPB), N,N '-Bis(3-methylphenyl)-N,N'-diphenyl-[1,1'-biphenyl]-4,4'-diamine (abbreviation: TPD), 4,4'-bis[N-(spiro- 9,9′-bifluoren-2-yl)-N-phenylamino]biphenyl (abbreviation: BSPB), 4-phenyl-4′-(9-phenylfluoren-9-yl)triphenylamine (abbreviation:
- a compound having an aromatic amine skeleton or a compound having a carbazole skeleton is preferable because it has good reliability, high hole-transport properties, and contributes to a reduction in driving voltage.
- the organic compound exemplified as the material having a hole-transport property in the hole-transport layer 112 can also be used as the host hole-transport material.
- TADF materials can also be used as electron-transporting materials or hole-transporting materials.
- the materials previously mentioned as the TADF material can be similarly used.
- the triplet excitation energy generated in the TADF material is converted into singlet excitation energy by reverse intersystem crossing, and the energy is transferred to the light-emitting substance, thereby increasing the luminous efficiency of the light-emitting device.
- the TADF material functions as an energy donor, and the light-emitting substance functions as an energy acceptor.
- the S1 level of the TADF material is preferably higher than the S1 level of the fluorescent material.
- the T1 level of the TADF material is preferably higher than the S1 level of the fluorescent material. Therefore, the T1 level of the TADF material is preferably higher than the T1 level of the fluorescent emitter.
- a TADF material that emits light that overlaps the wavelength of the absorption band on the lowest energy side of the fluorescent light-emitting substance.
- the fluorescent light-emitting substance has a protective group around the luminophore (skeleton that causes light emission) of the fluorescent light-emitting substance.
- the protecting group is preferably a substituent having no ⁇ bond, preferably a saturated hydrocarbon.
- an alkyl group having 3 to 10 carbon atoms, a substituted or unsubstituted cyclo Examples include an alkyl group and a trialkylsilyl group having 3 to 10 carbon atoms, and it is more preferable to have a plurality of protecting groups.
- Substituents that do not have a ⁇ -bond have poor carrier-transporting functions, and can increase the distance between the TADF material and the luminophore of the fluorescent emitter with little effect on carrier transport or carrier recombination.
- the luminophore refers to an atomic group (skeleton) that causes luminescence in a fluorescent light-emitting substance.
- the luminophore preferably has a skeleton having a ⁇ bond, preferably contains an aromatic ring, and preferably has a condensed aromatic ring or a condensed heteroaromatic ring.
- the condensed aromatic ring or condensed heteroaromatic ring includes a phenanthrene skeleton, a stilbene skeleton, an acridone skeleton, a phenoxazine skeleton, a phenothiazine skeleton, and the like.
- a naphthalene skeleton, anthracene skeleton, fluorene skeleton, chrysene skeleton, triphenylene skeleton, tetracene skeleton, pyrene skeleton, perylene skeleton, coumarin skeleton, quinacridone skeleton, and naphthobisbenzofuran skeleton are particularly preferred because of their high fluorescence quantum yield.
- a material having an anthracene skeleton is suitable as the host material.
- a substance having an anthracene skeleton is used as a host material for a fluorescent light-emitting substance, it is possible to realize a light-emitting layer with good luminous efficiency and durability.
- a substance having an anthracene skeleton to be used as a host material a substance having a diphenylanthracene skeleton, particularly a 9,10-diphenylanthracene skeleton is preferable because it is chemically stable.
- the host material has a carbazole skeleton
- the host material contains a benzocarbazole skeleton in which a benzene ring is further condensed to carbazole
- the HOMO becomes shallower than that of carbazole by about 0.1 eV.
- the host material contains a dibenzocarbazole skeleton
- the HOMO becomes shallower than that of carbazole by about 0.1 eV, making it easier for holes to enter, excellent in hole transportability, and high in heat resistance, which is preferable. .
- a substance having both a 9,10-diphenylanthracene skeleton and a carbazole skeleton is more preferable as a host material.
- a benzofluorene skeleton or a dibenzofluorene skeleton may be used instead of the carbazole skeleton.
- Such substances include 9-phenyl-3-[4-(10-phenyl-9-anthryl)phenyl]-9H-carbazole (abbreviation: PCzPA), 3-[4-(1-naphthyl)- Phenyl]-9-phenyl-9H-carbazole (abbreviation: PCPN), 9-[4-(10-phenyl-9-anthracenyl)phenyl]-9H-carbazole (abbreviation: CzPA), 7-[4-(10- Phenyl-9-anthryl)phenyl]-7H-dibenzo[c,g]carbazole (abbreviation: cgDBCzPA), 6-[3-(9,10-diphenyl-2-anthryl)phenyl]-benzo[b]naphtho[1 ,2-d]furan (abbreviation: 2mBnfPPA), 9-phenyl-10- ⁇ 4-(9-pheny
- a phosphorescent material can be used as part of the mixed material.
- a phosphorescent light-emitting substance can be used as an energy donor that provides excitation energy to a fluorescent light-emitting substance when the fluorescent light-emitting substance is used as the light-emitting substance.
- the mixed materials may form an exciplex.
- the mixed materials may form an exciplex.
- At least one of the materials forming the exciplex may be a phosphorescent substance. By doing so, triplet excitation energy can be efficiently converted into singlet excitation energy by reverse intersystem crossing.
- the HOMO level of the material having a hole-transporting property is higher than or equal to the HOMO level of the material having an electron-transporting property.
- the LUMO level of the material having a hole-transporting property is preferably higher than or equal to the LUMO level of the material having an electron-transporting property.
- the LUMO level and HOMO level of the material can be derived from the electrochemical properties (reduction potential and oxidation potential) of the material measured by cyclic voltammetry (CV) measurement.
- an exciplex is performed by comparing, for example, the emission spectrum of a material having a hole-transporting property, the emission spectrum of a material having an electron-transporting property, and the emission spectrum of a mixed film in which these materials are mixed. can be confirmed by observing the phenomenon that the emission spectrum of each material shifts to a longer wavelength (or has a new peak on the longer wavelength side).
- the transient photoluminescence (PL) of a material having a hole-transporting property, the transient PL of a material having an electron-transporting property, and the transient PL of a mixed film in which these materials are mixed are compared, and the transient PL lifetime of the mixed film is This can be confirmed by observing the difference in transient response, such as having a component with a longer lifetime than the transient PL lifetime of each material, or having a larger proportion of a delayed component.
- the transient PL described above may be read as transient electroluminescence (EL).
- the formation of an exciplex can also be confirmed. can be confirmed.
- the hole blocking layer is in contact with the light-emitting layer 113 and contains an organic compound that has an electron-transport property and can block holes.
- the organic compound that constitutes the hole blocking layer it is preferable to use a material that has excellent electron transport properties, low hole transport properties, and a deep HOMO level.
- the HOMO level is 0.5 eV or more deeper than the HOMO level of the material included in the light-emitting layer 113, and the electron mobility at the square root of the electric field intensity [V/cm] of 600 is 1 ⁇ 10.
- a material having an electron mobility of ⁇ 6 cm 2 /Vs or more is preferred.
- 2- ⁇ 3-[3-(N-phenyl-9H-carbazol-3-yl)-9H-carbazol-9-yl]phenyl ⁇ dibenzo[f,h]quinoxaline abbreviation: 2mPCCzPDBq
- 2- ⁇ 3-[2-(N-phenyl-9H-carbazol-3-yl)-9H-carbazol-9-yl]phenyl ⁇ dibenzo[f,h]quinoxaline abbreviation: 2mPCCzPDBq-02
- 2- ⁇ 3-[ 3-(N-phenyl-9H-carbazol-2-yl)-9H-carbazol-9-yl]phenyl ⁇ dibenzo[f,h]quinoxaline abbreviation: 2mPCCzPDBq-03
- an organic material having a HOMO level deeper than the HOMO level of the material contained in the light-emitting layer 113 is selected from materials that can be used for the hole-transporting layer, which will be described later. It is better to use a compound.
- the electron-transporting layer 114 is an organic compound having an electron-transporting property, and is a substance having an electron mobility of 1 ⁇ 10 ⁇ 6 cm 2 /Vs or more at a square root of an electric field strength [V/cm] of 600. is preferred. Note that any substance other than these substances can be used as long as it has a higher electron-transport property than hole-transport property.
- the organic compound an organic compound having a ⁇ -electron-deficient heteroaromatic ring is preferable.
- Examples of the organic compound having a ⁇ -electron-deficient heteroaromatic ring include an organic compound containing a heteroaromatic ring having a polyazole skeleton, an organic compound containing a heteroaromatic ring having a pyridine skeleton, and an organic compound containing a heteroaromatic ring having a diazine skeleton. and an organic compound containing a heteroaromatic ring having a triazine skeleton, or a plurality thereof.
- organic compounds having a ⁇ -electron-deficient heteroaromatic ring that can be used in the electron-transporting layer include 2-(4-biphenylyl)-5-(4-tert-butylphenyl)-1, 3,4-oxadiazole (abbreviation: PBD), 3-(4-biphenylyl)-4-phenyl-5-(4-tert-butylphenyl)-1,2,4-triazole (abbreviation: TAZ), 1 ,3-bis[5-(p-tert-butylphenyl)-1,3,4-oxadiazol-2-yl]benzene (abbreviation: OXD-7), 9-[4-(5-phenyl-1 ,3,4-oxadiazol-2-yl)phenyl]-9H-carbazole (abbreviation: CO11), 2,2′,2′′-(1,3,5-benzenetriyl)tris(1-phenyl -1H-
- an organic compound containing a heteroaromatic ring having a diazine skeleton, an organic compound containing a heteroaromatic ring having a pyridine skeleton, and an organic compound containing a heteroaromatic ring having a triazine skeleton are preferable because of their high reliability.
- an organic compound containing a heteroaromatic ring having a diazine (pyrimidine or pyrazine) skeleton and an organic compound containing a heteroaromatic ring having a triazine skeleton have high electron-transport properties and contribute to reduction in driving voltage.
- the electron-transporting layer 114 having this structure may also serve as the electron-injecting layer 115 .
- Liq lithium
- Yb ytterbium
- lithium is also preferable.
- a layer made of an electron-transporting substance containing an alkali metal, an alkaline earth metal, or a compound thereof, or an electride may be used. Examples of the electride include a mixed oxide of calcium and aluminum to which electrons are added at a high concentration.
- the electron-injecting layer 115 contains a substance having an electron-transporting property (preferably an organic compound having a bipyridine skeleton) and the above alkali metal or alkaline-earth metal fluoride at a concentration higher than or equal to a microcrystalline state (50 wt % or higher). It is also possible to use a thin layer. Since the layer has a low refractive index, it is possible to provide a light-emitting device with better external quantum efficiency.
- a metal, an alloy, an electrically conductive compound, a mixture thereof, or the like having a small work function (specifically, 3.8 eV or less) can be used as a material for forming the cathode.
- a metal, an alloy, an electrically conductive compound, a mixture thereof, or the like having a small work function (specifically, 3.8 eV or less) can be used as a material for forming the cathode materials.
- alkali metals such as lithium (Li) or cesium (Cs)
- various conductive materials such as Al, Ag, ITO, silicon or silicon oxide-containing indium oxide-tin oxide can be used regardless of the magnitude of the work function.
- polar materials can be used as the cathode.
- Films of these conductive materials can be formed by a dry method such as a vacuum evaporation method or a sputtering method, an inkjet method, a spin coating method, or the like. Alternatively, it may be formed by a wet method using a sol-gel method, or may be formed by a wet method using a paste of a metal material.
- a method for forming the EL layer 103 various methods can be used regardless of whether it is a dry method or a wet method.
- a vacuum deposition method, a gravure printing method, an offset printing method, a screen printing method, an inkjet method, a spin coating method, or the like may be used.
- each electrode or each layer described above may be formed using a different film formation method.
- the structure of the layer provided between the anode and the cathode is not limited to the above.
- a light emitting region in which holes and electrons recombine is provided at a site distant from the anode and the cathode. configuration is preferred.
- the hole-transporting layer or the electron-transporting layer in contact with the light-emitting layer 113 suppresses energy transfer from excitons generated in the light-emitting layer.
- FIGS. 3A and 3B are a light-emitting devices manufactured using the light-emitting device described in Embodiments 1 and 2
- FIG. 3A is a top view showing the light-emitting device
- FIG. 3B is a cross-sectional view taken along dashed-dotted line AB and dashed-dotted line CD shown in FIG. 3A.
- This light-emitting device includes a drive circuit portion (source line drive circuit) 601, a pixel portion 602, and a drive circuit portion (gate line drive circuit) 603 indicated by dotted lines for controlling light emission of the light-emitting device.
- 604 is a sealing substrate
- 605 is a sealing material
- the inside surrounded by the sealing material 605 is a space 607 .
- a lead-out wiring 608 is a wiring for transmitting signals input to the source line driving circuit 601 and the gate line driving circuit 603. Video signals, clock signals, Receives start signal, reset signal, etc. Although only the FPC is shown here, a printed wiring board (PWB) may be attached to the FPC.
- PWB printed wiring board
- the light emitting device in this specification includes not only the main body of the light emitting device but also the state in which the FPC or PWB is attached thereto.
- a driver circuit portion and a pixel portion are formed over the element substrate 610.
- a source line driver circuit 601 which is the driver circuit portion and one pixel in the pixel portion 602 are shown.
- the element substrate 610 is manufactured using a plastic substrate made of FRP (Fiber Reinforced Plastics), PVF (Polyvinyl Fluoride), polyester or acrylic resin, in addition to a substrate made of glass, quartz, organic resin, metal, alloy, semiconductor, etc. do it.
- FRP Fiber Reinforced Plastics
- PVF Polyvinyl Fluoride
- acrylic resin acrylic resin
- a transistor used for a pixel or a driver circuit there is no particular limitation on the structure of a transistor used for a pixel or a driver circuit.
- an inverted staggered transistor or a staggered transistor may be used.
- a top-gate transistor or a bottom-gate transistor may be used.
- a semiconductor material used for a transistor is not particularly limited, and silicon, germanium, silicon carbide, gallium nitride, or the like can be used, for example.
- an oxide semiconductor containing at least one of indium, gallium, and zinc, such as an In-Ga-Zn-based metal oxide, may be used.
- the crystallinity of a semiconductor material used for a transistor is not particularly limited, either an amorphous semiconductor or a semiconductor having crystallinity (a microcrystalline semiconductor, a polycrystalline semiconductor, a single crystal semiconductor, or a semiconductor having a partially crystalline region). may be used. It is preferable to use a crystalline semiconductor because deterioration of transistor characteristics can be suppressed.
- an oxide semiconductor for a semiconductor device such as a transistor used in a touch sensor or the like, which is described later, in addition to the transistor provided in the pixel or the driver circuit.
- an oxide semiconductor with a wider bandgap than silicon is preferably used. With the use of an oxide semiconductor having a wider bandgap than silicon, current in the off state of the transistor can be reduced.
- the oxide semiconductor preferably contains at least indium (In) or zinc (Zn).
- it is an oxide semiconductor containing an oxide represented by an In-M-Zn-based oxide (M is a metal such as Al, Ti, Ga, Ge, Y, Zr, Sn, La, Ce, or Hf). is more preferred.
- the semiconductor layer has a plurality of crystal parts, the c-axes of the crystal parts are oriented perpendicular to the formation surface of the semiconductor layer or the upper surface of the semiconductor layer, and grain boundaries are formed between adjacent crystal parts. It is preferable to use an oxide semiconductor film that does not have
- the low off-state current of the above transistor having a semiconductor layer allows charge accumulated in a capacitor through the transistor to be held for a long time.
- By applying such a transistor to a pixel it is possible to stop the driver circuit while maintaining the gradation of an image displayed in each display region. As a result, an electronic device with extremely low power consumption can be realized.
- a base film is preferably provided in order to stabilize the characteristics of the transistor or the like.
- an inorganic insulating film such as a silicon oxide film, a silicon nitride film, a silicon oxynitride film, or a silicon nitride oxide film can be used, and can be manufactured as a single layer or a stacked layer.
- the base film is formed using the sputtering method, CVD (Chemical Vapor Deposition) method (plasma CVD method, thermal CVD method, MOCVD (Metal Organic CVD) method, etc.), ALD (Atomic Layer Deposition) method, coating method, printing method, etc. can. Note that the base film may not be provided if it is not necessary.
- the FET 623 represents one of transistors formed in the drive circuit section 601 .
- the drive circuit may be formed by various CMOS circuits, PMOS circuits, or NMOS circuits.
- CMOS circuits complementary metal-oxide-semiconductor
- PMOS circuits PMOS circuits
- NMOS circuits CMOS circuits
- a driver integrated type in which a driver circuit is formed over a substrate is shown, but this is not always necessary, and the driver circuit can be formed outside instead of over the substrate.
- the pixel portion 602 is formed of a plurality of pixels including a switching FET 611, a current control FET 612, and a first electrode 613 electrically connected to the drain thereof, but is not limited to this.
- the pixel portion may be a combination of one or more FETs and a capacitive element.
- an insulator 614 is formed to cover the end of the first electrode 613 .
- it can be formed by using a positive photosensitive acrylic resin film.
- a curved surface having a curvature is formed at the upper end or the lower end of the insulator 614 .
- a positive photosensitive acrylic resin is used as the material of the insulator 614
- a negative photosensitive resin or a positive photosensitive resin can be used as the insulator 614.
- An EL layer 616 and a second electrode 617 are formed over the first electrode 613 .
- the first electrode 613 functions as an anode.
- a material that can be used for the anode it is desirable to use a material with a large work function.
- a single layer film such as an ITO film, an indium tin oxide film containing silicon, an indium oxide film containing 2 to 20 wt% zinc oxide, a titanium nitride film, a chromium film, a tungsten film, a Zn film, or a Pt film.
- a lamination of a film containing silver as a main component a lamination of a titanium nitride film and a film containing aluminum as a main component, a three-layer structure of a titanium nitride film, a film containing aluminum as a main component, and a titanium nitride film are also available. can be used.
- the wiring resistance is low, good ohmic contact can be obtained, and the wiring can function as an anode.
- the EL layer 616 is formed by various methods such as an evaporation method using an evaporation mask, an inkjet method, a spin coating method, and the like.
- the EL layer 616 has the structure described in Embodiments 1 and 2. FIG.
- the second electrode 617 formed over the EL layer 616 a material with a small work function (Al, Mg, Li, Ca, or an alloy or compound thereof (MgAg, MgIn, AlLi, etc.), or the like) is used. ) is preferably used.
- the second electrode 617 is a thin metal or alloy thin film and a transparent conductive film (ITO, 2 to 20 wt. % zinc oxide, indium tin oxide containing silicon, zinc oxide (ZnO), etc.).
- the first electrode 613, the EL layer 616, and the second electrode 617 form a light-emitting device.
- the light-emitting device is the light-emitting device described in the first and second embodiments. Note that although a plurality of light-emitting devices are formed in the pixel portion, the light-emitting device according to this embodiment includes the light-emitting device described in Embodiments 1 and 2 and a light-emitting device having a structure other than that. Both devices may be mixed. At this time, in the light-emitting device of one embodiment of the present invention, since a common hole-transport layer can be used between light-emitting devices that emit light of different wavelengths, the manufacturing process of the light-emitting device is simple and cost-effective. be able to.
- the sealing substrate 604 is bonding to the element substrate 610 with the sealing material 605, a structure in which the light emitting device 618 is provided in the space 607 surrounded by the element substrate 610, the sealing substrate 604, and the sealing material 605 is obtained.
- the space 607 is filled with a filler, which may be filled with an inert gas (nitrogen, argon, or the like) or may be filled with a sealing material. Deterioration due to the influence of moisture can be suppressed by forming a recess in the sealing substrate and providing a desiccant in the recess, which is a preferable configuration.
- an epoxy resin or glass frit is preferably used for the sealant 605 .
- these materials be materials that are impermeable to moisture or oxygen as much as possible.
- a plastic substrate made of FRP (Fiber Reinforced Plastics), PVF (Polyvinyl Fluoride), polyester, acrylic resin, or the like can be used.
- a protective film may be provided over the cathode.
- the protective film may be formed of an organic resin film or an inorganic insulating film.
- a protective film may be formed so as to cover the exposed portion of the sealant 605 .
- the protective film can be provided to cover the exposed side surfaces of the front and side surfaces of the pair of substrates, the sealing layer, the insulating layer, and the like.
- a material that does not allow impurities such as water to pass through easily can be used for the protective film. Therefore, it is possible to effectively suppress diffusion of impurities such as water from the outside to the inside.
- oxides, nitrides, fluorides, sulfides, ternary compounds, metals or polymers can be used.
- the protective film is preferably formed using a film formation method with good step coverage.
- One of such methods is an atomic layer deposition (ALD) method.
- a material that can be formed using an ALD method is preferably used for the protective film.
- ALD method it is possible to form a dense protective film with reduced defects such as cracks or pinholes, or with a uniform thickness.
- the protective film using the ALD method, it is possible to form a uniform protective film with few defects on the surface having a complicated uneven shape, the upper surface, the side surface, and the rear surface of the touch panel.
- the light-emitting device in this embodiment mode uses the light-emitting device described in Embodiment Modes 1 and 2, the light-emitting device can have excellent characteristics. Specifically, since the light-emitting devices described in Embodiments 1 and 2 have high emission efficiency, a light-emitting device with low power consumption can be obtained. In addition, the light-emitting device can have excellent display quality.
- FIG. 4A and 4B show an example of a light-emitting device in which color purity is improved by providing a colored layer (color filter) or the like.
- FIG. 4A shows a substrate 1001, a base insulating film 1002, a gate insulating film 1003, gate electrodes 1006, 1007, 1008, a first interlayer insulating film 1020, a second interlayer insulating film 1021, a peripheral portion 1042, a pixel portion 1040, a driving A circuit portion 1041, anodes 1024R, 1024G, and 1024B of the light emitting device, a partition 1025, an EL layer 1028, a common electrode (cathode) 1029 of the light emitting device, a sealing substrate 1031, a sealing material 1032, and the like are illustrated.
- the colored layers (red colored layer 1034R, green colored layer 1034G, and blue colored layer 1034B) are provided on the transparent substrate 1033.
- a black matrix 1035 may be further provided.
- a transparent substrate 1033 provided with colored layers and a black matrix is aligned and fixed to the substrate 1001 . Note that the colored layers and the black matrix 1035 are covered with an overcoat layer 1036 .
- FIG. 4B shows an example in which colored layers (a red colored layer 1034R, a green colored layer 1034G, and a blue colored layer 1034B) are formed between the gate insulating film 1003 and the first interlayer insulating film 1020.
- the colored layer may be provided between the substrate 1001 and the sealing substrate 1031 .
- the light emitting device has a structure (bottom emission type) in which light is extracted from the side of the substrate 1001 on which the FET is formed (bottom emission type). ) as a light emitting device.
- FIG. 5 shows a cross-sectional view of a top emission type light emitting device.
- a substrate that does not transmit light can be used as the substrate 1001 . It is formed in the same manner as the bottom emission type light emitting device until the connection electrode for connecting the FET and the anode of the light emitting device is fabricated.
- a third interlayer insulating film 1037 is formed to cover the electrode 1022 . This insulating film may play a role of planarization.
- the third interlayer insulating film 1037 can be formed using the same material as the second interlayer insulating film, or other known materials.
- the anodes 1024R, 1024G, and 1024B of the light-emitting device are anodes here, but they may be cathodes. Further, in the case of a top emission type light emitting device as shown in FIG. 5, it is preferable to use the anode as a reflective electrode.
- the structure of the EL layer 1028 is the same as that described for the EL layer 103 in Embodiment Mode 1. FIG.
- sealing can be performed with a sealing substrate 1031 provided with colored layers (a red colored layer 1034R, a green colored layer 1034G, and a blue colored layer 1034B).
- a black matrix 1035 may be provided on the sealing substrate 1031 so as to be positioned between pixels.
- the colored layers (red colored layer 1034R, green colored layer 1034G, blue colored layer 1034B) or the black matrix may be covered by an overcoat layer (not shown). Note that a light-transmitting substrate is used as the sealing substrate 1031 .
- a microcavity structure can be preferably applied to a top emission type light emitting device.
- a light-emitting device having a microcavity structure is obtained by using one electrode as an electrode including a reflective electrode and the other electrode as a semi-transmissive/semi-reflective electrode. At least an EL layer is present between the reflective electrode and the semi-transmissive/semi-reflective electrode, and at least a luminescent layer serving as a luminescent region is present.
- the reflective electrode is assumed to be a film having a visible light reflectance of 40% to 100%, preferably 70% to 100%, and a resistivity of 1 ⁇ 10 ⁇ 2 ⁇ cm or less.
- the semi-transmissive/semi-reflective electrode is a film having a visible light reflectance of 20% to 80%, preferably 40% to 70%, and a resistivity of 1 ⁇ 10 ⁇ 2 ⁇ cm or less. .
- Light emitted from the light-emitting layer included in the EL layer is reflected by the reflective electrode and the semi-transmissive/semi-reflective electrode to resonate.
- the light-emitting device can change the optical distance between the reflective electrode and the semi-transmissive/semi-reflective electrode by changing the thickness of the transparent conductive film, the composite material, the carrier transport material, or the like.
- the reflective electrode and the semi-transmissive/semi-reflective electrode it is possible to intensify light with a wavelength that resonates and attenuate light with a wavelength that does not resonate.
- the light reflected back by the reflective electrode interferes greatly with the light (first incident light) directly incident on the semi-transmissive/semi-reflective electrode from the light-emitting layer. It is preferable to adjust the optical distance between the electrode and the light-emitting layer to (2n-1) ⁇ /4 (where n is a natural number of 1 or more and ⁇ is the wavelength of emitted light to be amplified). By adjusting the optical distance, it is possible to match the phases of the first reflected light and the first incident light and further amplify the light emitted from the light emitting layer.
- the EL layer may have a structure having a plurality of light-emitting layers or a structure having a single light-emitting layer.
- a structure in which a plurality of EL layers are provided with a charge-generating layer interposed in one light-emitting device and one or more light-emitting layers are formed in each EL layer may be applied.
- microcavity structure By having a microcavity structure, it is possible to increase the emission intensity of a specific wavelength in the front direction, so that power consumption can be reduced.
- a microcavity structure that matches the wavelength of each color can be applied to all sub-pixels. A light-emitting device with excellent characteristics can be obtained.
- the light-emitting device in this embodiment mode uses the light-emitting device described in Embodiment Modes 1 and 2, the light-emitting device can have excellent characteristics. Specifically, since the light-emitting devices described in Embodiments 1 and 2 have high emission efficiency, a light-emitting device with low power consumption can be obtained. In addition, the light-emitting device can have excellent display quality.
- FIG. 6A and 6B show a passive matrix light emitting device manufactured by applying the present invention.
- 6A is a perspective view showing the light emitting device
- FIG. 6B is a cross-sectional view of FIG. 6A taken along the dashed-dotted line XY.
- an EL layer 955 is provided between an electrode 952 and an electrode 956 over a substrate 951 .
- the ends of the electrodes 952 are covered with an insulating layer 953 .
- a partition layer 954 is provided over the insulating layer 953 .
- the sidewalls of the partition layer 954 are inclined such that the distance between one sidewall and the other sidewall becomes narrower as the partition wall layer 954 approaches the substrate surface. That is, the cross section of the partition layer 954 in the short side direction is trapezoidal, and the bottom side (the side facing the same direction as the surface direction of the insulating layer 953 and in contact with the insulating layer 953) is the upper side (the surface of the insulating layer 953). direction and is shorter than the side that does not touch the insulating layer 953).
- the partition layer 954 in this manner, defects in the light-emitting device due to static electricity or the like can be prevented.
- the light-emitting device described in Embodiments 1 and 2 is also used in a passive matrix light-emitting device, and the light-emitting device can have high display quality or low power consumption. .
- the light-emitting device described above can control a large number of minute light-emitting devices arranged in a matrix, so that the light-emitting device can be suitably used as a display device for expressing images.
- FIG. 7A shows a schematic top view of a light-emitting device 450 of one embodiment of the present invention.
- the light-emitting device 450 includes a plurality of light-emitting devices 110R that emit red, light-emitting devices 110G that emit green, and light-emitting devices 110B that emit blue.
- the light emitting region of each light emitting device is labeled with R, G, and B. As shown in FIG.
- the light emitting devices 110R, 110G, and 110B are arranged in a matrix.
- FIG. 7A shows a so-called stripe arrangement in which light emitting devices of the same color are arranged in one direction. Note that the arrangement method of the light emitting devices is not limited to this, and an arrangement method such as a delta arrangement or a zigzag arrangement may be applied, or a pentile arrangement may be used.
- the light emitting device 110R, the light emitting device 110G, and the light emitting device 110B are arranged in the X direction.
- light emitting devices of the same color are arranged in the Y direction that intersects with the X direction.
- the light emitting device 110R, the light emitting device 110G, and the light emitting device 110B are light emitting devices having the above configurations.
- FIG. 7B is a schematic cross-sectional view corresponding to the dashed-dotted line A1-A2 in FIG. 7A
- FIG. 7C is a schematic cross-sectional view corresponding to the dashed-dotted line B1-B2.
- FIG. 7B shows cross sections of the light emitting device 110R, the light emitting device 110G, and the light emitting device 110B.
- the light emitting device 110R has a pixel electrode (anode) 101R, a first EL layer 120R, a second EL layer 121, and a common electrode 102.
- FIG. The light-emitting device 110G has a pixel electrode (anode) 101G, a first EL layer 120G, a second EL layer (electron injection layer) 121, and a common electrode 102.
- the light-emitting device 110B has a pixel electrode (anode) 101B, a first EL layer 120B, a second EL layer 121, and a common electrode 102.
- the second EL layer 121 and the common electrode 102 are commonly provided for the light emitting device 110R, the light emitting device 110G, and the light emitting device 110B.
- the second EL layer 121 can also
- the first EL layer 120R of the light-emitting device 110R has a light-emitting organic compound that emits light having an intensity in at least the red wavelength range.
- the first EL layer 120G included in the light-emitting device 110G includes a light-emitting organic compound that emits light having an intensity in at least the green wavelength range.
- the first EL layer 120B included in the light-emitting device 110B contains a light-emitting organic compound that emits light having an intensity in at least a blue wavelength range.
- at least light-emitting device 110R is a light-emitting device of one embodiment of the present invention.
- Each of the first EL layer 120R, the first EL layer 120G, and the first EL layer 120B has at least a light-emitting layer, and further includes a hole-blocking layer, an electron-injecting layer, an electron-transporting layer, and a hole-transporting layer. It may comprise one or more of a layer, a hole injection layer, an electron blocking layer, an exciton blocking layer, and the like.
- the second EL layer 121 has a structure without a light-emitting layer.
- the second EL layer 121 is preferably an electron injection layer. Note that in the case where the surfaces of the first EL layers 120R, 120G, and 120B on the second electrode side also serve as an electron-injection layer, the second EL layer 121 is not provided. It doesn't have to be.
- a pixel electrode (anode) 101R, a pixel electrode (anode) 101G, and a pixel electrode (anode) 101B are provided for each light emitting device.
- the common electrode 102 and the second EL layer 121 are preferably provided as a continuous layer common to each light emitting device.
- the hole-transporting layers in the first EL layer 120 are discontinuous between the light-emitting devices with different emission colors, they preferably have the same structure.
- a conductive film having a property of transmitting visible light is used for one of the pixel electrode 101 and the common electrode 102, and a conductive film having a reflective property is used for the other.
- a bottom emission type display device can be obtained.
- a top emission display device can be obtained. Note that by making both the pixel electrodes and the common electrode 102 transparent, a dual-emission display device can be obtained.
- a light-emitting device of one embodiment of the present invention is suitable for a top-emission light-emitting device.
- a first EL layer 120R, a first EL layer 120G, and a first EL layer 120B are provided to cover the ends of the pixel electrode 101R, the pixel electrode 101G, and the pixel electrode 101B, respectively.
- An insulating layer 125 is provided to cover end portions of the first EL layer 120R, the first EL layer 120G, and the first EL layer 120B.
- the insulating layer 125 has openings that overlap the pixel electrode 101R, the pixel electrode 101G, the pixel electrode 101B, the first EL layer 120R, the first EL layer 120G, and the first EL layer 120B.
- the end of the opening of the insulating layer 125 is preferably tapered. Note that end portions of the pixel electrode 101R, the pixel electrode 101G, and the pixel electrode 101B do not have to be covered with the first EL layer 120R, the first EL layer 120G, and the first EL layer 120B, respectively.
- the first EL layer 120R, the first EL layer 120G, and the first EL layer 120B have regions in contact with the upper surfaces of the pixel electrodes 101R, 101G, and 101B, respectively. Also, the ends of the first EL layer 120R, the first EL layer 120G, and the first EL layer 120B are located under the insulating layer 125. FIG. The upper surfaces of the first EL layer 120R, the first EL layer 120G, and the first EL layer 120B are the region in contact with the insulating layer 125 and the second EL layer 121 (in the case of the structure without the second EL layer). has a region in contact with the common electrode 102).
- FIG. 18 is a modification of FIG. 7B.
- the ends of the pixel electrode 101R, the pixel electrode 101G, and the pixel electrode 101B have a tapered shape that widens toward the substrate side, improving the coverage of the film formed thereon.
- end portions of the pixel electrode 101R, the pixel electrode 101G, and the pixel electrode 101B are covered with the first EL layer 120R, the first EL layer 120G, and the first EL layer 120B, respectively.
- a mask layer 107 is formed to cover the EL layer. This works to prevent the EL layer from being damaged during etching by photolithography.
- An insulating layer 108 is provided between the light emitting device 110R, the light emitting device 110G, and the light emitting device 110B.
- the end portion of the insulating layer 108 has a gently tapered shape, so that the second EL layer 121 and the common electrode 102 which are formed later can be prevented from being disconnected.
- the first EL layer 120R, the first EL layer 120G, and the first EL layer 120B are preferably provided so as not to be in contact with each other. This can effectively prevent current from flowing through two adjacent EL layers and causing unintended light emission. Therefore, the contrast can be increased, and a display device with high display quality can be realized.
- the distance between the ends of the EL layers facing each other in adjacent light-emitting devices can be 2 ⁇ m or more and 5 ⁇ m or less by manufacturing using a photolithography method. . Note that this can also be referred to as the interval between the light-emitting layers included in the EL layer. It is difficult to make the thickness less than 10 ⁇ m by a forming method using a metal mask.
- the aperture ratio is 40% or more, 50% or more, 60% or more, 70% or more, 80% or more, further 90% or more and less than 100%. It can also be realized.
- the reliability of the display device can be improved by increasing the aperture ratio of the display device. More specifically, when the lifetime of a display device using an organic EL device and having an aperture ratio of 10% is used as a reference, the life of the display device has an aperture ratio of 20% (that is, the aperture ratio is twice the reference). The life is about 3.25 times longer, and the life of a display device with an aperture ratio of 40% (that is, the aperture ratio is four times the reference) is about 10.6 times longer. As described above, the current density flowing through the organic EL device can be reduced as the aperture ratio is improved, so that the life of the display device can be extended. Since the aperture ratio of the display device of one embodiment of the present invention can be improved, the display quality of the display device can be improved. Further, as the aperture ratio of the display device is improved, the reliability (especially life) of the display device is significantly improved, which is an excellent effect.
- FIG. 7C shows an example in which the EL layer 120R is separated for each light emitting device in the Y direction.
- FIG. 7C shows the cross section of the light emitting device 110R as an example, but the light emitting device 110G and the light emitting device 110B can also have the same shape.
- the EL layer may be continuous in the Y direction, and the EL layer 120R may be formed in a belt shape. By forming the EL layer 120R and the like in strips, a space for dividing them is not required, and the area of the non-light-emitting region between the light-emitting devices can be reduced, so that the aperture ratio can be increased.
- a protective layer 131 is provided on the common electrode 102 to cover the light emitting device 110R, the light emitting device 110G, and the light emitting device 110B.
- the protective layer 131 has a function of preventing impurities such as water from diffusing into each light-emitting device from above.
- the protective layer 131 can have, for example, a single layer structure or a laminated structure including at least an inorganic insulating film.
- inorganic insulating films include oxide films and nitride films such as silicon oxide films, silicon oxynitride films, silicon nitride oxide films, silicon nitride films, aluminum oxide films, aluminum oxynitride films, and hafnium oxide films.
- a semiconductor material such as indium gallium oxide or indium gallium zinc oxide may be used for the protective layer 131 .
- the protective layer 131 a laminated film of an inorganic insulating film and an organic insulating film can be used.
- a structure in which an organic insulating film is sandwiched between a pair of inorganic insulating films is preferable.
- the organic insulating film functions as a planarizing film. As a result, the upper surface of the organic insulating film can be flattened, so that the coverage of the inorganic insulating film thereon can be improved, and the barrier property can be enhanced.
- the upper surface of the protective layer 131 is flat, when a structure (for example, a color filter, an electrode of a touch sensor, or a lens array) is provided above the protective layer 131, an uneven shape due to the structure below may be formed. This is preferable because it can reduce the impact.
- a structure for example, a color filter, an electrode of a touch sensor, or a lens array
- FIG. 7A also shows a connection electrode 101C electrically connected to the common electrode 102.
- FIG. 101 C of connection electrodes are given the electric potential (for example, anode electric potential or cathode electric potential) for supplying to the common electrode 102.
- FIG. The connection electrode 101C is provided outside the display area where the light emitting devices 110R and the like are arranged. Also, in FIG. 7A, the common electrode 102 is indicated by a dashed line.
- connection electrodes 101C can be provided along the periphery of the display area. For example, it may be provided along one side of the periphery of the display area, or may be provided over two or more sides of the periphery of the display area. That is, when the top surface shape of the display area is rectangular, the top surface shape of the connection electrode 101C can be strip-shaped, L-shaped, U-shaped (square bracket-shaped), square, or the like.
- FIG. 7D is a schematic cross-sectional view corresponding to the dashed-dotted line C1-C2 in FIG. 7A.
- FIG. 7D shows a connection portion 130 where the connection electrode 101C and the common electrode 102 are electrically connected.
- the connection portion 130 the common electrode 102 is provided on the connection electrode 101C in contact therewith, and the protective layer 131 is provided to cover the common electrode 102.
- An insulating layer 124 is provided to cover the end of the connection electrode 101C.
- the thin films (insulating film, semiconductor film, conductive film, etc.) constituting the display device can be formed by sputtering, chemical vapor deposition (CVD), vacuum deposition, pulsed laser deposition (PLD). ) method, Atomic Layer Deposition (ALD) method, or the like.
- the CVD method includes a plasma enhanced CVD (PECVD) method, a thermal CVD method, and the like.
- PECVD plasma enhanced CVD
- thermal CVD is the metal organic CVD (MOCVD) method.
- thin films that make up the display device can be applied by spin coating, dipping, spray coating, inkjet, dispensing, screen printing, offset printing, doctor knife method, slit coating, roll coating, curtain coating, etc. It can be formed by a method such as coating or knife coating.
- the thin film when processing the thin film that constitutes the display device, a photolithography method or the like can be used.
- the thin film may be processed by a nanoimprint method, a sandblast method, a lift-off method, or the like.
- an island-shaped thin film may be directly formed by a film formation method using a shielding mask such as a metal mask.
- a photolithography method there are typically the following two methods.
- One is a method of forming a resist mask on a thin film to be processed, processing the thin film by etching or the like, and removing the resist mask.
- the other is a method of forming a photosensitive thin film, then performing exposure and development to process the thin film into a desired shape.
- the light used for exposure can be, for example, i-line (wavelength 365 nm), g-line (wavelength 436 nm), h-line (wavelength 405 nm), or a mixture of these.
- ultraviolet rays, KrF laser light, ArF laser light, or the like can also be used.
- extreme ultraviolet (EUV) light, X-rays, or the like may be used.
- An electron beam can also be used instead of the light used for exposure.
- the use of extreme ultraviolet light, X-rays, or electron beams is preferable because extremely fine processing is possible.
- a photomask is not necessary when exposure is performed by scanning a beam such as an electron beam.
- a dry etching method, a wet etching method, a sandblasting method, or the like can be used to etch the thin film.
- a device manufactured using a metal mask or FMM fine metal mask, high-definition metal mask
- a device with an MM (metal mask) structure is sometimes referred to as a device with an MML (metal maskless) structure.
- a substrate having heat resistance enough to withstand at least later heat treatment can be used.
- a substrate having heat resistance enough to withstand at least later heat treatment can be used as the substrate 100.
- a glass substrate, a quartz substrate, a sapphire substrate, a ceramic substrate, an organic resin substrate, or the like can be used.
- a semiconductor substrate such as a single crystal semiconductor substrate made of silicon, silicon carbide, or the like, a polycrystalline semiconductor substrate, a compound semiconductor substrate such as silicon germanium, or an SOI substrate can be used.
- the substrate 100 it is preferable to use a substrate in which a semiconductor circuit including a semiconductor element such as a transistor is formed over the above semiconductor substrate or insulating substrate.
- the semiconductor circuit preferably constitutes, for example, a pixel circuit, a gate line driver circuit (gate driver), a source line driver circuit (source driver), and the like.
- gate driver gate line driver
- source driver source driver
- an arithmetic circuit, a memory circuit, and the like may be configured.
- a pixel electrode 101R, a pixel electrode 101G, a pixel electrode 101B, and a connection electrode 101C are formed on the substrate 100.
- a conductive film to be a pixel electrode (anode) is formed, a resist mask is formed by photolithography, and unnecessary portions of the conductive film are removed by etching. After that, the pixel electrode 101R, the pixel electrode 101G, and the pixel electrode 101B can be formed by removing the resist mask.
- a conductive film that reflects visible light it is preferable to use a material (for example, silver or aluminum) that has as high a reflectance as possible over the entire wavelength range of visible light. Thereby, not only can the light extraction efficiency of the light emitting device be improved, but also the color reproducibility can be improved.
- a conductive film reflecting visible light is used as each pixel electrode, a so-called top-emission light-emitting device that emits light in the direction opposite to the substrate can be obtained.
- a so-transmitting conductive film is used as each pixel electrode, a so-called bottom-emission light-emitting device in which light is emitted in the direction of the substrate can be obtained.
- the EL film 120Rb has at least a luminescent layer containing a luminescent material and a hole transport layer. Alternatively, one or more of films functioning as an electron injection layer, an electron transport layer, a charge generation layer, or a hole injection layer may be stacked.
- the EL film 120Rb can be formed, for example, by a vapor deposition method, a sputtering method, an inkjet method, or the like. Note that the method is not limited to this, and the film forming method described above can be used as appropriate.
- the EL film 120Rb is preferably a laminated film in which a hole injection layer, a hole transport layer, a light emitting layer, and an electron transport layer are laminated in this order.
- a film having an electron-injection layer can be used as the EL layer 121 to be formed later.
- the EL film 120Rb is preferably formed so as not to be provided on the connection electrode 101C.
- a shielding mask may be used to prevent the EL film 120Rb from being formed on the connection electrode 101C, or the EL film 120Rb may be removed in a later etching process. preferable.
- a mask film 144a is formed to cover the EL film 120Rb. Also, the mask film 144a is provided in contact with the upper surface of the connection electrode 101C.
- the mask film 144a a film having high resistance to the etching process of each EL film such as the EL film 120Rb, that is, a film having a high etching selectivity can be used. Also, the mask film 144a can use a film having a high etching selectivity with respect to a protective film such as a protective film 146a to be described later. Furthermore, as the mask film 144a, a film that can be removed by a wet etching method that causes little damage to each EL film can be used.
- an inorganic film such as a metal film, an alloy film, a metal oxide film, a semiconductor film, or an inorganic insulating film can be used.
- the mask film 144a can be formed by various film forming methods such as a sputtering method, a vapor deposition method, a CVD method, and an ALD method.
- metal materials such as gold, silver, platinum, magnesium, nickel, tungsten, chromium, molybdenum, iron, cobalt, copper, palladium, titanium, aluminum, yttrium, zirconium, and tantalum, or the metal materials can be used.
- a low melting point material such as aluminum or silver.
- a metal oxide such as indium gallium zinc oxide (In--Ga--Zn oxide, also referred to as IGZO) can be used.
- indium oxide, indium zinc oxide (In—Zn oxide), indium tin oxide (In—Sn oxide), indium titanium oxide (In—Ti oxide), indium tin zinc oxide (In—Sn -Zn oxide), indium titanium zinc oxide (In-Ti-Zn oxide), indium gallium tin zinc oxide (In-Ga-Sn-Zn oxide), and the like can be used.
- indium tin oxide containing silicon or the like can be used.
- element M is aluminum, silicon, boron, yttrium, copper, vanadium, beryllium, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten , or one or more selected from magnesium).
- M is preferably one or more selected from gallium, aluminum, and yttrium.
- Inorganic insulating materials such as aluminum oxide, hafnium oxide, and silicon oxide can be used as the mask film 144a.
- aluminum oxide is particularly preferred.
- the mask film 144a it is preferable to use a material that can be dissolved in a chemically stable solvent at least for the film positioned at the top of the EL film 120Rb.
- a material that dissolves in water or alcohol can be suitably used for the mask film 144a.
- wet film formation methods that can be used to form the mask film 144a include spin coating, dipping, spray coating, inkjet, dispensing, screen printing, offset printing, doctor knife method, slit coating, roll coating, curtain coating, and knife coating. There are coats, etc.
- an organic material such as polyvinyl alcohol (PVA), polyvinyl butyral, polyvinylpyrrolidone, polyethylene glycol, polyglycerin, pullulan, water-soluble cellulose, or alcohol-soluble polyamide resin can be used.
- a film produced by the ALD method in particular can be suitably used as a mask film because it is dense and has a high function of protecting the EL layer.
- An aluminum oxide film is particularly suitable.
- the protective film 146a is a film used as a hard mask when etching the mask film 144a later. Moreover, the mask film 144a is exposed when the protective film 146a is processed later. Therefore, the mask film 144a and the protective film 146a are selected from a combination of films having a high etching selectivity. Therefore, a film that can be used for the protective film 146a can be selected according to the etching conditions for the mask film 144a and the etching conditions for the protective film 146a.
- a gas containing fluorine also referred to as a fluorine-based gas
- An alloy containing molybdenum and niobium, an alloy containing molybdenum and tungsten, or the like can be used for the protective film 146a.
- a film capable of obtaining a high etching selectivity that is, capable of slowing the etching rate
- metal oxide films such as IGZO and ITO.
- the protective film 146a is not limited to this, and can be selected from various materials according to the etching conditions of the mask film 144a and the protective film 146a. For example, it can be selected from films that can be used for the mask film 144a.
- a nitride film for example, can be used as the protective film 146a.
- nitrides such as silicon nitride, aluminum nitride, hafnium nitride, titanium nitride, tantalum nitride, tungsten nitride, gallium nitride, and germanium nitride can also be used.
- an oxide film can be used as the protective film 146a.
- an oxide film or an oxynitride film such as silicon oxide, silicon oxynitride, aluminum oxide, aluminum oxynitride, hafnium oxide, or hafnium oxynitride can be used.
- an organic film that can be used for the EL film 120Rb or the like may be used as the protective film 146a.
- the same organic film as used for the EL film 120Rb, the EL film 120Gb, or the EL film 120Bb can be used for the protective film 146a.
- the EL film 120Rb and the like can be used in common with a deposition apparatus, which is preferable.
- a resist mask 143a is formed on the protective film 146a at a position overlapping with the pixel electrode 101R and at a position overlapping with the connection electrode 101C (FIG. 8C).
- the resist mask 143a can use a resist material containing a photosensitive resin, such as a positive resist material or a negative resist material.
- the EL film 120Rb is dissolved by the solvent of the resist material. There is a risk of Such a problem can be prevented by using the protective film 146a.
- the resist mask 143a may be formed directly on the mask film 144a without using the protective film 146a.
- etching the protective film 146a it is preferable to use etching conditions with a high selectivity so that the mask film 144a is not removed by the etching.
- Etching of the protective film 146a can be performed by wet etching or dry etching. By using dry etching, reduction of the pattern of the protective film 146a can be suppressed.
- the removal of the resist mask 143a can be performed by wet etching or dry etching.
- the resist mask 143a is preferably removed by dry etching (also referred to as plasma ashing) using an oxygen gas as an etching gas.
- the resist mask 143a is removed while the EL film 120Rb is covered with the mask film 144a, the influence on the EL film 120Rb is suppressed.
- the EL film 120Rb is exposed to oxygen, the electrical characteristics may be adversely affected, so it is suitable for etching using oxygen gas such as plasma ashing.
- the etching of the mask film 144a can be performed by wet etching or dry etching, but it is preferable to use a dry etching method because it can suppress pattern shrinkage.
- Etching the EL film 120Rb and the protective layer 147a by the same treatment is preferable because the process can be simplified and the manufacturing cost of the display device can be reduced.
- Etching gases containing no oxygen as a main component include, for example, noble gases such as CF 4 , C 4 F 8 , SF 6 , CHF 3 , Cl 2 , H 2 O, BCl 3 , H 2 and He. Further, a mixed gas of the above gas and a diluent gas that does not contain oxygen can be used as an etching gas.
- the etching of the EL film 120Rb and the etching of the protective layer 147a may be performed separately. At this time, the EL film 120Rb may be etched first, or the protective layer 147a may be etched first.
- the EL layer 120R and the connection electrode 101C are covered with the mask layer 145a.
- an insulating layer 126b is formed over the mask layers 145a, 145b, and 145c.
- the insulating layer 126b can be formed in a manner similar to that of the mask layers 145a, 145b, and 145c.
- an insulating layer 125b is formed to cover the insulating layer 126b.
- the insulating layer 125b may be formed using a photosensitive organic resin.
- organic materials include acrylic resins, polyimide resins, epoxy resins, imide resins, polyamide resins, polyimideamide resins, silicone resins, siloxane resins, benzocyclobutene resins, phenolic resins, and precursors of these resins. can do.
- an organic material such as polyvinyl alcohol (PVA), polyvinyl butyral, polyvinylpyrrolidone, polyethylene glycol, polyglycerin, pullulan, water-soluble cellulose, or alcohol-soluble polyamide resin can be used as the insulating layer 125b.
- PVA polyvinyl alcohol
- polyvinyl butyral polyvinylpyrrolidone
- polyethylene glycol polyglycerin
- pullulan polyethylene glycol
- polyglycerin polyglycerin
- pullulan polyethylene glycol
- pullulan polyglycerin
- pullulan water-soluble cellulose
- alcohol-soluble polyamide resin water-soluble polyamide resin
- a photoresist can be used as the photosensitive resin in some cases.
- a positive material or a negative material can be used as the photosensitive resin in some cases.
- the insulating layer 125b is preferably subjected to heat treatment after coating.
- the heat treatment is performed at a temperature lower than the heat-resistant temperature of the EL layer.
- the substrate temperature in the heat treatment is 50° C. to 200° C., preferably 60° C. to 150° C., more preferably 70° C. to 120° C. Thereby, the solvent contained in the insulating layer 125b can be removed.
- visible light or ultraviolet light may be irradiated to a region where the insulating layer 125b is removed using a mask.
- the visible light when visible light is used for exposure, the visible light preferably includes i-line (wavelength: 365 nm). Furthermore, visible light including g-line (wavelength 436 nm) or h-line (wavelength 405 nm) may be used.
- TMAH tetramethylammonium hydroxide aqueous solution
- the entire substrate and irradiate the insulating layer 125 with visible light or ultraviolet light.
- the energy density of the exposure may be greater than 0 mJ/cm 2 and less than or equal to 800 mJ/cm 2 , preferably greater than 0 mJ/cm 2 and less than or equal to 500 mJ/cm 2 .
- Such exposure after development can improve the transparency of the insulating layer 125 in some cases.
- the substrate temperature required for heat treatment for deforming the end portion of the insulating layer 125 into a tapered shape in a later step can be lowered.
- the insulating layer 125b can be transformed into the insulating layer 125 having tapered side surfaces.
- the heat treatment is performed at a temperature lower than the heat-resistant temperature of the EL layer.
- the substrate temperature in the heat treatment is 50° C. to 200° C., preferably 60° C. to 150° C., more preferably 70° C. to 130° C.
- the substrate temperature is preferably higher than that in the heat treatment after the insulating layer 125 is applied. Thereby, the corrosion resistance of the insulating layer 125 can also be improved.
- Mask layer 145a, mask layer 145b, and mask layer 145c can be removed by wet etching or dry etching. At this time, it is preferable to use a method that damages the EL layer 120R, the EL layer 120G, and the EL layer 120B as little as possible. In particular, it is preferable to use a wet etching method. For example, it is preferable to use wet etching using a tetramethylammonium hydroxide aqueous solution (TMAH), dilute hydrofluoric acid, oxalic acid, phosphoric acid, acetic acid, nitric acid, or a mixed liquid thereof.
- TMAH tetramethylammonium hydroxide aqueous solution
- the mask layers 145a, 145b, and 145c by dissolving them in a solvent such as water or alcohol.
- a solvent such as water or alcohol.
- various alcohols such as ethyl alcohol, methyl alcohol, isopropyl alcohol (IPA), and glycerin can be used as the alcohol capable of dissolving the mask layers 145a, 145b, and 145c.
- drying treatment is performed in order to remove water contained inside the EL layers 120R, 120G, and 120B and water adsorbed to the surface.
- heat treatment is preferably performed in an inert gas atmosphere or a reduced pressure atmosphere.
- the heat treatment can be performed at a substrate temperature of 50° C. to 200° C., preferably 60° C. to 150° C., more preferably 70° C. to 120° C.
- a reduced-pressure atmosphere is preferable because drying can be performed at a lower temperature.
- the EL layer 120R, the EL layer 120G, and the EL layer 120B can be produced separately.
- the EL layer 121 is formed to cover the EL layer 120R, the EL layer 120G, the EL layer 120B, and the insulating layer 125. Next, as shown in FIG.
- the EL layer 121 can be formed by the same method as the EL film 120Rb. When the EL layer 121 is formed by vapor deposition, it is preferable to use a shielding mask so that the EL layer 121 is not formed on the connection electrode 101C.
- the common electrode 102 can be formed by a film forming method such as vapor deposition or sputtering. Alternatively, a film formed by an evaporation method and a film formed by a sputtering method may be stacked. At this time, it is preferable to form the common electrode 102 so as to include the region where the electron injection layer 115 is formed. That is, the end portion of the electron injection layer 115 can overlap with the common electrode 102 .
- the common electrode 102 is preferably formed using a shielding mask.
- the common electrode 102 is electrically connected to the connection electrode 101C outside the display area.
- a protective layer is formed over the common electrode 102 .
- a sputtering method, a PECVD method, or an ALD method is preferably used for forming the inorganic insulating film used for the protective layer.
- the ALD method is preferable because it has excellent step coverage and hardly causes defects such as pinholes.
- the light-emitting device of one embodiment of the present invention can be manufactured.
- the common electrode 102 and the second EL layer 121 are formed so as to have different top surface shapes is shown, but they may be formed in the same region.
- FIGS. 10B is a top view of the lighting device
- FIG. 10A is a cross-sectional view taken along line ef shown in FIG. 10B.
- an anode 401 is formed over a light-transmitting substrate 400 which is a support.
- the anode 401 corresponds to the pixel electrode 101 in the first embodiment.
- the anode 401 is formed using a translucent material.
- a pad 412 is formed on the substrate 400 for supplying voltage to the cathode 404 .
- An EL layer 403 is formed over the anode 401 .
- the EL layer 403 corresponds to the structure of the EL layer 103 in Embodiments 1 and 2, and the like. In addition, please refer to the said description about these structures.
- a cathode 404 is formed covering the EL layer 403 .
- the cathode 404 corresponds to the common electrode 102 in the first embodiment.
- the cathode 404 is made of a highly reflective material.
- Cathode 404 is supplied with voltage by connecting to pad 412 .
- the lighting device described in this embodiment mode includes the light-emitting device including the anode 401 , the EL layer 403 , and the cathode 404 . Since the light-emitting device has high emission efficiency, the lighting device in this embodiment can have low power consumption.
- the substrate 400 on which the light-emitting device having the above structure is formed and the sealing substrate 407 are fixed and sealed using the sealing materials 405 and 406 to complete the lighting device. Either one of the sealing materials 405 and 406 may be used. Also, a desiccant can be mixed in the inner sealing material 406 (not shown in FIG. 10B), which can absorb moisture, leading to improved reliability.
- the pad 412 and the anode 401 can be used as external input terminals.
- an IC chip 420 or the like having a converter or the like mounted thereon may be provided thereon.
- the lighting device described in this embodiment uses the light-emitting device described in Embodiments 1 and 2 as an EL element, and has high emission efficiency, so that the lighting device has low power consumption. be able to.
- Embodiment 6 examples of electronic devices including the light-emitting device described in Embodiments 1 and 2 as part thereof will be described.
- the light-emitting devices described in Embodiments 1 and 2 are light-emitting devices with high luminous efficiency (especially BI).
- the electronic devices described in this embodiment can have low power consumption because the light-emitting device has high luminous efficiency.
- Examples of electronic equipment to which the above light-emitting device is applied include television equipment (also referred to as television or television receiver), computer monitors, digital cameras, digital video cameras, digital photo frames, mobile phones (mobile phones, Also referred to as a mobile phone device), a portable game machine, a personal digital assistant, a sound reproducing device, a large game machine such as a pachinko machine, and the like. Specific examples of these electronic devices are shown below.
- FIG. 11A shows an example of a television device.
- a display portion 7103 is incorporated in a housing 7101 of the television device. Further, here, a structure in which the housing 7101 is supported by a stand 7105 is shown. An image can be displayed on the display portion 7103.
- the display portion 7103 includes the light-emitting devices described in Embodiments 1 and 2 arranged in matrix.
- the television apparatus can be operated using operation switches provided in the housing 7101 and a separate remote controller 7110 .
- a channel or volume can be operated with an operation key 7109 included in the remote controller 7110, and an image displayed on the display portion 7103 can be operated.
- the remote controller 7110 may be provided with a display portion 7107 for displaying information output from the remote controller 7110 .
- the light-emitting devices described in Embodiments 1 and 2, which are arranged in matrix, can also be applied to the display portion 7107 .
- the television apparatus is configured to include a receiver, modem, or the like.
- the receiver can receive general television broadcasts, and by connecting to a wired or wireless communication network via a modem, it can be unidirectional (from the sender to the receiver) or bidirectional (from the sender to the receiver). It is also possible to communicate information between recipients, or between recipients, etc.).
- FIG. 11B1 shows a computer including a main body 7201, a housing 7202, a display portion 7203, a keyboard 7204, an external connection port 7205, a pointing device 7206, and the like. Note that this computer is manufactured by arranging the light-emitting devices described in Embodiments 1 and 2 in a matrix and using them for the display portion 7203 .
- the computer of FIG. 11B1 may be in the form of FIG. 11B2.
- the computer in FIG. 11B2 is provided with a display unit 7210 instead of the keyboard 7204 and pointing device 7206.
- the display portion 7210 is a touch panel type, and input can be performed by operating an input display displayed on the display portion 7210 with a finger or a dedicated pen. Further, the display portion 7210 can display not only input display but also other images.
- the display portion 7203 may also be a touch panel. Since the two screens are connected by a hinge, it is possible to prevent the screens from being damaged or damaged during storage or transportation.
- FIG. 11C shows an example of a mobile terminal.
- the mobile phone includes a display portion 7402 incorporated in a housing 7401, operation buttons 7403, an external connection port 7404, a speaker 7405, a microphone 7406, and the like. Note that the mobile phone includes a display portion 7402 in which the light-emitting devices described in Embodiments 1 and 2 are arranged in matrix.
- the mobile terminal illustrated in FIG. 11C can also have a structure in which information can be input by touching the display portion 7402 with a finger or the like.
- an operation such as making a call or composing an email can be performed by touching the display portion 7402 with a finger or the like.
- the screen of the display unit 7402 mainly has three modes.
- the first is a display mode mainly for displaying images, and the second is an input mode mainly for inputting information such as characters.
- the third is a display+input mode in which the two modes of the display mode and the input mode are mixed.
- the display portion 7402 is set to a character input mode in which characters are mainly input, and characters displayed on the screen can be input. In this case, it is preferable to display a keyboard or number buttons on most of the screen of the display portion 7402 .
- the orientation (vertical or horizontal) of the mobile terminal is determined, and the screen display of the display unit 7402 is automatically displayed. can be switched automatically.
- Switching of the screen mode is performed by touching the display portion 7402 or operating the operation button 7403 of the housing 7401 . Further, switching can be performed according to the type of image displayed on the display portion 7402 . For example, if the image signal to be displayed on the display unit is moving image data, the mode is switched to the display mode, and if the image signal is text data, the mode is switched to the input mode.
- the input mode a signal detected by the optical sensor of the display portion 7402 is detected, and if there is no input by a touch operation on the display portion 7402 for a certain period of time, the screen mode is switched from the input mode to the display mode. may be controlled.
- the display portion 7402 can also function as an image sensor.
- personal authentication can be performed by touching the display portion 7402 with a palm or a finger and taking an image of a palm print, a fingerprint, or the like.
- a backlight that emits near-infrared light or a sensing light source that emits near-infrared light for the display portion an image of a finger vein, a palm vein, or the like can be captured.
- the application range of the light-emitting device including the light-emitting device described in Embodiments 1 and 2 is extremely wide, and the light-emitting device can be applied to electronic devices in all fields.
- an electronic device with low power consumption can be obtained.
- FIG. 12A is a schematic diagram showing an example of a cleaning robot.
- the cleaning robot 5100 has a display 5101 arranged on the top surface, a plurality of cameras 5102 arranged on the side surface, a brush 5103 and an operation button 5104 . Although not shown, the cleaning robot 5100 has tires, a suction port, and the like on its underside.
- the cleaning robot 5100 also includes various sensors such as an infrared sensor, an ultrasonic sensor, an acceleration sensor, a piezo sensor, an optical sensor, and a gyro sensor.
- the cleaning robot 5100 also has wireless communication means.
- the cleaning robot 5100 can run by itself, detect dust 5120, and suck the dust from a suction port provided on the bottom surface.
- the cleaning robot 5100 can analyze the image captured by the camera 5102 and determine the presence or absence of obstacles such as walls, furniture, or steps. Further, when an object such as wiring that is likely to get entangled in the brush 5103 is detected by image analysis, the rotation of the brush 5103 can be stopped.
- the display 5101 can display the remaining amount of the battery, the amount of sucked dust, and the like.
- the route traveled by cleaning robot 5100 may be displayed on display 5101 .
- the display 5101 may be a touch panel and the operation buttons 5104 may be provided on the display 5101 .
- the cleaning robot 5100 can communicate with a portable electronic device 5140 such as a smart phone. An image captured by the camera 5102 can be displayed on the portable electronic device 5140 . Therefore, the owner of the cleaning robot 5100 can know the state of the room even from outside. In addition, the display on the display 5101 can also be checked with a mobile electronic device such as a smartphone.
- a light-emitting device of one embodiment of the present invention can be used for the display 5101 .
- a robot 2100 shown in FIG. 12B includes an arithmetic device 2110, an illumination sensor 2101, a microphone 2102, an upper camera 2103, a speaker 2104, a display 2105, a lower camera 2106 and an obstacle sensor 2107, and a movement mechanism 2108.
- a microphone 2102 has a function of detecting a user's speech, environmental sounds, and the like. Also, the speaker 2104 has a function of emitting sound. Robot 2100 can communicate with a user using microphone 2102 and speaker 2104 .
- the display 2105 has a function of displaying various information.
- Robot 2100 can display information desired by the user on display 2105 .
- the display 2105 may be equipped with a touch panel.
- the display 2105 may be a detachable information terminal, and by installing it at a fixed position of the robot 2100, charging and data transfer are possible.
- Upper camera 2103 and lower camera 2106 have the function of imaging the surroundings of robot 2100 . Further, the obstacle sensor 2107 can sense the presence or absence of an obstacle in the direction in which the robot 2100 moves forward using the movement mechanism 2108 . Robot 2100 uses upper camera 2103, lower camera 2106 and obstacle sensor 2107 to recognize the surrounding environment and can move safely.
- the light-emitting device of one embodiment of the present invention can be used for the display 2105 .
- FIG. 12C is a diagram showing an example of a goggle type display.
- the goggle-type display includes, for example, a housing 5000, a display unit 5001, a speaker 5003, an LED lamp 5004 (including a power switch or an operation switch), a connection terminal 5006, a sensor 5007 (force, displacement, position, speed, acceleration, angular velocity , rpm, distance, light, liquid, magnetism, temperature, chemical substance, sound, time, hardness, electric field, current, voltage, power, radiation, flow rate, humidity, gradient, vibration, smell, or infrared. ), a microphone 5008, a second display portion 5002, a support portion 5012, an earphone 5013, and the like.
- the light-emitting device of one embodiment of the present invention can be used for the display portion 5001 and the second display portion 5002 .
- FIG. 13 shows an example in which the light-emitting device described in Embodiments 1 and 2 is used for a desk lamp which is a lighting device.
- the desk lamp shown in FIG. 13 has a housing 2001 and a light source 2002 .
- FIG. 14 shows an example in which the light-emitting device described in Embodiments 1 and 2 is used as an indoor lighting device 3001 . Since the light-emitting devices described in Embodiments 1 and 2 have high emission efficiency, the lighting device can have low power consumption. Further, since the light-emitting device described in Embodiments 1 and 2 is thin, it can be used as a thin lighting device.
- the light-emitting device described in Embodiments 1 and 2 can also be mounted on the windshield or dashboard of an automobile.
- FIG. 15 shows one mode in which the light-emitting device described in Embodiments 1 and 2 is used for the windshield or dashboard of an automobile.
- Display regions 5200 to 5203 are displays provided using the light-emitting device described in Embodiments 1 and 2.
- FIG. 15 shows one mode in which the light-emitting device described in Embodiments 1 and 2 is used for the windshield or dashboard of an automobile.
- Display regions 5200 to 5203 are displays provided using the light-emitting device described in Embodiments 1 and 2.
- a display area 5200 and a display area 5201 are display devices mounted with the light-emitting devices described in Embodiments 1 and 2 provided on the windshield of an automobile.
- both the anode and the cathode are made of light-transmitting electrodes so that the opposite side can be seen through, so-called see-through display devices. can be done. If the display is in a see-through state, even if it is installed on the windshield of an automobile, it can be installed without obstructing the view.
- a driving transistor or the like a light-transmitting transistor such as an organic transistor using an organic semiconductor material or a transistor using an oxide semiconductor is preferably used.
- a display region 5202 is a display device in which the light-emitting device described in Embodiments 1 and 2 provided in a pillar portion is mounted.
- the display area 5202 by displaying an image from an imaging means provided on the vehicle body, it is possible to complement the field of view blocked by the pillars.
- the display area 5203 provided on the dashboard part can compensate for the blind spot and improve safety by displaying the image from the imaging means provided on the outside of the vehicle for the field of view blocked by the vehicle body. can be done. By projecting an image so as to complement the invisible part, safety can be confirmed more naturally and without discomfort.
- Display area 5203 may also provide various other information such as navigation information, speed or rpm, air conditioning settings, and the like.
- the display items or layout can be appropriately changed according to the user's preference. Note that these pieces of information can also be provided in the display areas 5200 to 5202 . Further, the display regions 5200 to 5203 can also be used as a lighting device.
- FIG. 16A and 16B show a foldable personal digital assistant 5150.
- FIG. A foldable personal digital assistant 5150 has a housing 5151 , a display area 5152 and a bending portion 5153 .
- FIG. 16A shows the mobile information terminal 5150 in an unfolded state.
- FIG. 16B shows the portable information terminal in a folded state. Although the portable information terminal 5150 has a large display area 5152, it is compact when folded and has excellent portability.
- the display area 5152 can be folded in half by the bent portion 5153 .
- the bending portion 5153 is composed of a stretchable member and a plurality of supporting members, and when folded, the stretchable member stretches.
- the bent portion 5153 is folded with a radius of curvature of 2 mm or more, preferably 3 mm or more.
- the display area 5152 may be a touch panel (input/output device) equipped with a touch sensor (input device).
- a light-emitting device of one embodiment of the present invention can be used for the display region 5152 .
- FIG. 17A to 17C show a foldable personal digital assistant 9310.
- FIG. 17A shows the mobile information terminal 9310 in an unfolded state.
- FIG. 17B shows the portable information terminal 9310 in the middle of changing from one of the unfolded state and the folded state to the other.
- FIG. 17C shows the portable information terminal 9310 in a folded state.
- the portable information terminal 9310 has excellent portability in the folded state, and has excellent display visibility due to a seamless wide display area in the unfolded state.
- the display panel 9311 is supported by three housings 9315 connected by hinges 9313 .
- the display panel 9311 may be a touch panel (input/output device) equipped with a touch sensor (input device).
- the display panel 9311 can be reversibly transformed from the unfolded state to the folded state by bending between the two housings 9315 via the hinges 9313 .
- the light-emitting device of one embodiment of the present invention can be used for the display panel 9311 .
- This embodiment can be implemented by appropriately combining at least part of it with other embodiments described herein.
- Example 1 In this example, a light-emitting device 1, a light-emitting device 2, and a comparative light-emitting device 1 of one embodiment of the present invention are described. Structural formulas of organic compounds used in this example are shown below.
- a silicon oxide film of 400 nm was formed as an insulating film by the CVD method, and then heated at 350° C. for 1 hour in a nitrogen atmosphere. After that, 50 nm of titanium, 70 nm of aluminum, and 6 nm of titanium were formed by sputtering, and heated at 300° C. for 1 hour to form a reflective electrode. Thereafter, a film of indium tin oxide (ITSO) containing silicon oxide was formed as a transparent electrode to a thickness of 10 nm by a sputtering method.
- ITSO indium tin oxide
- ITSO was patterned by wet etching, and a lamination of titanium, aluminum, and titanium was patterned by dry etching to form a pixel electrode 101 with a width of 3 ⁇ m.
- the transparent electrode functions as an anode and can be regarded as a pixel electrode (anode) 101 together with the reflective electrode.
- the substrate was introduced into a vacuum deposition apparatus whose interior was evacuated to about 1 ⁇ 10 ⁇ 4 Pa, and vacuum baked at 170° C. for 60 minutes in a heating chamber in the vacuum deposition apparatus. Allow to cool to some extent.
- the substrate on which the pixel electrodes 101 are formed is fixed to a substrate holder provided in a vacuum vapor deposition apparatus so that the surface on which the pixel electrodes 101 are formed faces downward, and resistance heating is performed on the pixel electrodes 101 .
- N-(1,1'-biphenyl-4-yl)-N-[4-(9-phenyl-9H-carbazol-3-yl)phenyl] represented by the above structural formula (i) was formed by the vapor deposition method used.
- PCBBiF -9,9-dimethyl-9H-fluorene-2-amine
- a hole injection layer 111 was formed by co-evaporation to a thickness of 10 nm so as to obtain OCHD-003).
- a hole transport layer 112 was formed by vapor-depositing PCBBiF to a thickness of 96 nm.
- N,N-bis[4-(dibenzofuran-4-yl)phenyl]-4-amino-p-terphenyl (abbreviation: DBfBB1TP) represented by the above structural formula (ii) was applied to a film thickness of 10 nm.
- An electron blocking layer was formed as follows.
- 2- ⁇ 3-[3-(N-phenyl-9H-carbazol-3-yl)-9H-carbazol-9-yl]phenyl ⁇ represented by the above structural formula (v) is formed on the light-emitting layer 113 .
- Dibenzo[f,h]quinoxaline (abbreviation: 2mPCCzPDBq) was vapor-deposited to a thickness of 20 nm to form a hole blocking layer, and then 2,9-di(2- An electron-transporting layer 114 was formed by vapor-depositing naphthyl)-4,7-diphenyl-1,10-phenanthroline (abbreviation: NBPhen) to a thickness of 15 nm.
- the light-emitting device 1 formed up to the electron transport layer 114 was subjected to an ALD (Atomic Layer Deposition) method using trimethylaluminum (abbreviation: TMA) as a precursor and water vapor as an oxidizing agent to form an aluminum oxide film at 80°C. was deposited to a thickness of 30 nm.
- ALD Advanced Layer Deposition
- TMA trimethylaluminum
- water vapor as an oxidizing agent
- a film of tungsten (W) was formed to a thickness of 50 nm under an argon stream at a pressure of 2.1 Pa and a substrate temperature of 50° C. using a sputtering method.
- a positive photoresist was applied to a film thickness of 700 nm, exposed, and developed to form a photomask slightly larger than the pixel electrode 101 .
- the tungsten film was removed by a dry etching method.
- the photomask was removed by performing O 2 ashing (substrate temperature 10° C., pressure 5.00 Pa, O 2 flow rate 80 sccm, ICP power 800 W, substrate bias 10 W, 15 seconds).
- the aluminum oxide film is removed by dry etching, and using the tungsten film and the aluminum oxide film as masks, the hole injection layer 111 to the electron transport layer 114 (first EL layer) are patterned by dry etching. bottom.
- the tungsten film was removed by dry etching using SF6 , and the exposed upper and side surfaces of the aluminum oxide and the side surface of the first EL layer were covered, and trimethylaluminum (abbreviation: TMA) was used as a precursor by the ALD method, An aluminum oxide film was formed to a thickness of 10 nm at 80° C. using water vapor as an oxidizing agent.
- TMA trimethylaluminum
- a photosensitive organic resin was applied to a thickness of 400 nm, exposed, and developed to form an insulating layer having openings overlapping with the pixel electrodes 101 so that the opening area was 7.32 ⁇ m 2 .
- O 2 ashing and baking at 100° C. for 1 hour under reduced pressure the aluminum oxide film exposed from the opening was removed by wet etching with a developer for 253 seconds.
- the substrate was introduced into a vacuum deposition apparatus whose interior was evacuated to about 1 ⁇ 10 ⁇ 4 Pa, and vacuum baked at 70° C. for 90 minutes in a heating chamber in the vacuum deposition apparatus.
- LiF) and ytterbium (Yb) are co-deposited so that the volume ratio is 1:1 and the film thickness is 2 nm to form the electron injection layer 115, and finally, silver (Ag) and magnesium (Mg) are co-evaporated.
- a cathode (common electrode) 102 was formed by co-evaporation of 1:0.1 and a film thickness of 25 nm, and a film of indium oxide-tin oxide (ITO) was formed to a thickness of 70 nm.
- the common electrode 102 is a semi-transmissive/semi-reflective electrode having a function of reflecting light and a function of transmitting light.
- the light-emitting device 2 was manufactured by almost the same process and layout as the light-emitting device 1, but a different photosensitive organic resin was used. An insulating layer having a portion was formed. After that, it was irradiated with light from an ultra-high pressure mercury lamp for 86 seconds and baked at 100° C. for 600 seconds, which is the difference from the light-emitting device 1 . As a result, the inner side surface of the opening of the insulating layer becomes tapered, which improves the coverage of the film to be formed later.
- Method for producing comparative light-emitting device 1 In the comparative light-emitting device 1, after forming up to the pixel electrode 101 in the same manner as in the light-emitting device 1, the substrate was heated at a substrate temperature of 250° C. for 5 minutes under a reduced pressure of about 1 ⁇ 10 ⁇ 4 Pa, and a silicon oxide film having a thickness of 150 nm was formed by a sputtering method. to form an inorganic insulating layer.
- the inorganic insulating layer was dry-etched by photolithography to form an opening overlapping with the pixel electrode so that the opening area was 7.32 ⁇ m 2 . After O2 ashing, the resist was removed.
- the substrate was introduced into a vacuum deposition apparatus whose interior was evacuated to about 1 ⁇ 10 ⁇ 4 Pa, and vacuum baked at 170° C. for 60 minutes in a heating chamber in the vacuum deposition apparatus. Allow to cool to some extent.
- the hole injection layer 111 to the electron transport layer 114 are formed in the same manner as in the light-emitting device 1, and after forming the electron transport layer, lithium fluoride (LiF) and ytterbium (Yb) are added at a volume ratio of 1. : 1, an electron injection layer 115 was formed by co-evaporation so as to have a film thickness of 2 nm. Finally, silver (Ag) and magnesium (Mg) were co-deposited at a volume ratio of 1:0.1 to a film thickness of 25 nm, and a film of indium oxide-tin oxide (ITO) was formed to a thickness of 70 nm. A common electrode) 102 was formed, and a comparative light-emitting device 1 was produced.
- the common electrode 102 is a semi-transmissive/semi-reflective electrode having a function of reflecting light and a function of transmitting light.
- the laminated structures of the light-emitting device 1, the light-emitting device 2, and the comparative light-emitting device 1 are summarized in the table below.
- the light-emitting device 1, the light-emitting device 2, and the comparative light-emitting device 1 are sealed with a glass substrate in a nitrogen atmosphere glove box so as not to be exposed to the atmosphere (a sealing material is applied around the element, and when sealing UV treatment and heat treatment at 80° C. for 1 hour) were performed. After that, the initial characteristics of light-emitting device 1, light-emitting device 2, and comparative light-emitting device 1 were measured.
- FIG. 19 shows current efficiency-luminance characteristics
- FIG. 20 shows blue index-current density characteristics
- FIG. 21 shows emission spectra of light-emitting device 1, light-emitting device 2, and comparative light-emitting device 1.
- the table below shows the main properties near 1000 cd/m 2 .
- a spectroradiometer (SR-UL1R manufactured by Topcon Corporation) was used to measure luminance, CIE chromaticity, and emission spectrum. Moreover, the measurement of each light-emitting device was performed at room temperature (atmosphere kept at 23° C.).
- the blue index (BI) is a value obtained by dividing the current efficiency (cd/A) by the y chromaticity, and is one of the indices representing the emission characteristics of blue light emission.
- Blue light emission tends to have higher color purity as the y chromaticity is smaller.
- Blue light emission with high color purity can express blue in a wide range even if the luminance component is small, and the use of blue light emission with high color purity reduces the luminance required to express blue.
- the effect of reducing power consumption can be obtained from Therefore, the BI that takes into account the y chromaticity, which is one of the indicators of blue purity, is preferably used as a means of expressing the efficiency of blue light emission. It can be said that there is
- the light-emitting device 1 and the light-emitting device 2 exhibit characteristics lower than that of the comparative light-emitting device 1 in terms of current efficiency, they exhibit deep blue light emission, so that they are light-emitting devices having excellent characteristics as blue light-emitting devices. Understand.
- the emission spectrum of the comparative light-emitting device 1 has a peak wavelength shifted to a longer wavelength, and the half width of the peak in the spectrum is also increased. Further, it can be seen from the table that the chromaticity y of the light-emitting device 1 and the light-emitting device 2 is double or nearly double.
- Light-Emitting Device 1 and Light-Emitting Device 2 are light-emitting devices having better characteristics than Comparative Light-Emitting Device 1 as blue light-emitting devices.
- FIG. 2A As shown in FIG. 2A, in the comparative light-emitting device 1, the common electrode (cathode) 102 is in contact with the EL layer over a wider area than the pixel electrode 101 . As a result, current flows not only between the opening of the inorganic insulating film and the common electrode located at a position overlapping therewith, but also between the common electrode located at the periphery thereof. Since the light emitted from the light excited by such a leakage current differs from the assumed position, the optical path length from the inside of the light emitting device to the outside of the device deviates from the expected wavelength range. may be lost.
- the light emitted in the region without the pixel electrode 101 does not resonate between the pixel electrode 101 and the common electrode (cathode) 102, and is emitted to the outside as light with a broad spectrum shape.
- the angle of the common electrode changes depending on the position due to the unevenness of the inorganic insulating film, such light is easily emitted to the outside of the light emitting device.
- the light from the comparative light-emitting device 1 includes light with a longer wavelength than the light with the expected wavelength and light with a broad spectrum half-value width (broad), resulting in a change in the light emission spectrum.
- the common electrode 102 overlaps the EL layer through the opening of the insulating layer.
- leakage current is less likely to flow in the peripheral portion of the common electrode 102, and luminescence with different wavelengths is less likely to coexist, so luminescence with good color purity can be obtained, and a light-emitting device with a good blue index can be obtained. can.
- the electron transport layer 114 is etched from the hole injection layer 111, and the upper part of the EL layer and the part not covered with the common electrode (electron injection layer) is , aluminum oxide is formed with a thickness of 40 nm and on the side surface with a thickness of 10 nm. This also makes it difficult for leakage current to flow through the EL layer. In addition, since it is possible to suppress the emission of light having different optical path lengths to the outside, it is possible to obtain a light-emitting device having better characteristics.
- the structure of the light-emitting device 2 corresponds to the structure shown in FIG. 1A in Embodiment 1, and the structure of the comparative light-emitting device 1 corresponds to the structure shown in FIG. 26A.
- the structure shown in FIG. 26A includes an insulating layer 127, a pixel electrode (anode) 101 on the insulating layer 127, an insulating layer 125c covering part of the side surface and top surface of the pixel electrode (anode) 101, and the pixel electrode (anode) 101. 101, an EL layer 103 provided to cover the insulating layer 125c, an electron injection layer 104 on the EL layer 103, and a common electrode (cathode) 102 provided on the electron injection layer 104.
- the light-emitting device 2 corresponding to the structure shown in FIG. It is significantly different from the comparative light-emitting device 1 shown in FIG. 26A.
- FIG. 22 and FIG. 23 show the results of measurement with a 2D spectroradiometer for light emitting device 2 and comparative light emitting device 1 that emit light at a current density of 10 mA/cm 2 .
- the colors of the images in FIGS. 22 and 23 are related to the luminous intensity.
- FIG. 22 (light-emitting device 2), a bright region with a width of 1.1 ⁇ m in the center of the image and a region with a width of 1.6 ⁇ m extending to the outside of the bright region and having a slightly lower brightness can be seen.
- the width of the opening provided in the photosensitive organic resin of the light-emitting device 2 is 1.14 ⁇ m, it is assumed that the 1.1 ⁇ m-wide region in the center of the image is the region where the pixel electrode and the EL layer are in contact. Understand.
- FIG. 23 comparative light-emitting device 1
- a bright region with a width of 1.1 ⁇ m in the center of the image and a region with a slightly lower luminance with a width of 2.2 ⁇ m on the outer side can be seen. It can be seen that the luminescence spreads.
- the design value of the width of the opening of the inorganic insulating film of Comparative Light-Emitting Device 1 is 1.14 ⁇ m, so the 1.1 ⁇ m-wide region in the center of the image is the region where the pixel electrode and the EL layer are in contact. I understand. It can be seen that the comparative light-emitting device 1 emits light over a wider range than the light-emitting device 2 does.
- 24A, 24B, 25A, and 25B show the results of measuring the emission spectrum at each measurement point in each light emitting device.
- 24 shows the emission spectrum of the light-emitting device 2
- FIG. 25 shows the emission spectrum of the comparative light-emitting device 1 at each measurement point.
- Each measurement point corresponds to a position circled as 1 to 5 in FIGS. 22 and 23 .
- FIGS. 24A and 25B are diagrams of the spectra in FIGS. 24A and 25A normalized by the maximum emission intensity. From FIG. 24B, it was found that the emission spectrum of the light-emitting device 2 hardly changed depending on the measurement position. On the other hand, from FIG. 25B, in the comparative light emitting device 1, although there is no significant change in the shape of the emission spectrum at the measurement points 3, 4, and 5 corresponding to the opening, at the measurement points 2 and 1 outside the opening, A peak appears near 500 nm, and it can be seen that the spectral shape has changed significantly. This is because light emission occurred at a location different from the assumed position due to leakage current through the hole injection layer, and light emission was emitted through cavities with different optical path lengths or not through the cavity. is.
- FIG. 26B shows the result of the cross-sectional STEM image of Comparative Light-Emitting Device 1 and the result of the 2D spectroradiometer measurement image.
- area 150 shows a portion of the 2D spectroradiometer measurement image and area 152 shows the result of the cross-sectional STEM image. That is, FIG. 26B is a drawing in which a portion of the 2D spectroradiometric image and the cross-sectional STEM image are combined.
- a region 150 is an enlarged view of a portion extracted from the 2D spectroradiometric image shown in FIG. 23 so as to match the cross-sectional STEM image. Also, the circled region of measurement point 2 located above region 150 corresponds to measurement point 2 shown in FIG.
- the EL layer 103 since the current flowing through the EL layer 103 affects the upper surface of the insulating layer 125c as indicated by the dashed arrow in the vicinity of the opening, the EL layer 103, In particular, a lateral leak current may occur through the hole injection layer formed below the EL layer 103 . As a result, light emission from the EL layer 103 is confirmed even above the insulating layer 125c, the optical path length changes, and the resonant wavelength changes. Therefore, it is suggested that the light emission of the EL layer 103 from the region overlapping with the insulating layer 125c is broadened, and the spectral shapes shown in FIGS. 25A and 25B have changed.
- the light-emitting device of one embodiment of the present invention does not cause such a change in spectrum, and can provide a light-emitting device with favorable BI.
- an insulating layer also referred to as a structural body or bank
- the light-emitting device of one embodiment of the present invention has a sharper emission spectrum and a better BI than a structure in which an insulating layer covering part of the side surface and top surface of a pixel electrode (anode) is provided. It has been confirmed that a light-emitting device can be provided.
- the structure of one embodiment of the present invention is particularly suitable for a high-definition light-emitting device.
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Abstract
Description
図2A、図2Bは発光デバイスの概略図である。
図3Aおよび図3Bはアクティブマトリクス型発光装置を表す図である。
図4Aおよび図4Bはアクティブマトリクス型発光装置を表す図である。
図5はアクティブマトリクス型発光装置を表す図である。
図6Aおよび図6Bはパッシブマトリクス型発光装置を表す図である。
図7A乃至図7Dは、表示装置の構成例を示す図である。
図8A乃至図8Fは、表示装置の作製方法例を示す図である。
図9A乃至図9Fは、表示装置の作製方法例を示す図である。
図10Aおよび図10Bは照明装置を表す図である。
図11A、図11B1、図11B2および図11Cは電子機器を表す図である。
図12A、図12Bおよび図12Cは電子機器を表す図である。
図13は照明装置を表す図である。
図14は照明装置を表す図である。
図15は車載表示装置及び照明装置を表す図である。
図16Aおよび図16Bは電子機器を表す図である。
図17A、図17Bおよび図17Cは電子機器を表す図である。
図18は、表示装置の構成例を示す図である。
図19は、発光デバイス1、発光デバイス2および比較発光デバイス1の電流効率−輝度特性を表す図である。
図20は、発光デバイス1、発光デバイス2および比較発光デバイス1のブルーインデックス−電流密度特性を表す図である。
図21は、発光デバイス1、発光デバイス2および比較発光デバイス1の発光スペクトルを表す図である。
図22は、実施例における、2D分光放射計測定結果である。
図23は、実施例における、2D分光放射計測定結果である。
図24A、及び図24Bは、2D分光放射計測定におけるEL強度を測定した図である。
図25A、及び図25Bは、2D分光放射計測定におけるEL強度を測定した図である。
図26Aは、実施例における発光デバイスを説明する図であり、図26Bは、実施例における、発光メカニズムを説明する断面STEM像、及び2D分光放射計画像を説明する図である。
図1Aに本発明の一態様の発光装置における発光デバイスの図を示す。当該発光デバイスは、一対の電極(画素電極(陽極)101および共通電極(陰極)102)の間にEL層103を有している。EL層103は、画素電極101および共通電極102に接しており、画素電極101および共通電極102の間に電圧を印加し、電流が流れることで発光する。本発明の一態様の発光装置は、このような発光デバイスが複数設けられている。
続いて、本発明の一態様の発光デバイスの他の構造および材料の例について説明する。本発明の一態様の発光デバイスは、上述のように画素電極(陽極)101と共通電極(陰極)102の一対の電極間に複数の層からなるEL層103を有しており、当該EL層103は、発光材料と、第1の有機化合物(および第2の有機化合物)を少なくとも有する発光層113を有しており、第3の有機化合物を有する正孔ブロック層を有していることが好ましい。
本実施の形態では、実施の形態1および実施の形態2に記載の発光デバイスを用いて作製された発光装置について図3A、及び図3Bを用いて説明する。なお、図3Aは、発光装置を示す上面図、図3Bは図3Aに示す一点鎖線A−Bおよび一点鎖線C−Dで切断した断面図である。この発光装置は、発光デバイスの発光を制御するものとして、点線で示された駆動回路部(ソース線駆動回路)601、画素部602、駆動回路部(ゲート線駆動回路)603を含んでいる。また、604は封止基板、605はシール材であり、シール材605で囲まれた内側は、空間607になっている。
[発光装置]
以下では、上記実施の形態1および実施の形態2に記載の発光デバイスを用いた本発明の一態様の発光装置の他の一例および作製方法について説明する。
以下では、本発明の一態様の表示装置の作製方法の一例について、図面を参照して説明する。ここでは、上記構成例で示した発光装置450を例に挙げて説明する。図8A乃至図9Fは、以下で例示する表示装置の作製方法の、各工程における断面概略図である。また図8A等では、右側に接続部130及びその近傍における断面概略図を合わせて示している。
基板100としては、少なくとも後の熱処理に耐えうる程度の耐熱性を有する基板を用いることができる。基板100として、絶縁性基板を用いる場合には、ガラス基板、石英基板、サファイア基板、セラミック基板、有機樹脂基板などを用いることができる。また、シリコン、炭化シリコンなどを材料とした単結晶半導体基板、多結晶半導体基板、シリコンゲルマニウム等の化合物半導体基板、SOI基板などの半導体基板を用いることができる。
続いて、基板100上に画素電極101R、画素電極101G、画素電極101B、及び接続電極101Cを形成する。まず画素電極(陽極)となる導電膜を成膜し、フォトリソグラフィ法によりレジストマスクを形成し、導電膜の不要な部分をエッチングにより除去する。その後、レジストマスクを除去することで、画素電極101R、画素電極101G、及び画素電極101Bを形成することができる。
続いて、画素電極101R、画素電極101G、および画素電極101B上に、後にEL層120RとなるEL膜120Rbを成膜する。
続いて、EL膜120Rbを覆ってマスク膜144aを形成する。また、マスク膜144aは、接続電極101Cの上面に接して設けられる。
続いて、マスク膜144a上に、保護膜146aを形成する(図8B)。
続いて、保護膜146a上であって、画素電極101Rと重なる位置、及び接続電極101Cと重なる位置に、それぞれレジストマスク143aを形成する(図8C)。
続いて、保護膜146aの、レジストマスク143aに覆われない一部をエッチングにより除去し、帯状の保護層147aを形成する。このとき同時に、接続電極101C上にも保護層147aが形成される。
続いて、レジストマスク143aを除去する(図8D)。
続いて、保護層147aをマスクとして用いて、マスク膜144aの保護層147aに覆われない一部をエッチングにより除去し、帯状のマスク層145aを形成する(図8E)。このとき同時に、接続電極101C上にもマスク層145aが形成される。
続いて、保護層147aをエッチングすると同時に、マスク層145aに覆われないEL膜120Rbの一部をエッチングにより除去し、帯状のEL層120Rを形成する(図8F)。このとき同時に、接続電極101C上の保護層147aも除去される。
同様の工程を繰り返すことによって、島状のEL層120G、EL層120Bと、島状のマスク層145b、145cとを形成することができる(図9A)。
続いて、マスク層145a、マスク層145b、及びマスク層145c上に、絶縁層126bを形成する。絶縁層126bはマスク層145a、マスク層145b、及びマスク層145cと同様に作製することができる。
その後、絶縁層126bを覆って、絶縁層125bを形成する。絶縁層125bは感光性を有する有機樹脂を用いて形成すればよい。当該有機材料としては例えば、アクリル樹脂、ポリイミド樹脂、エポキシ樹脂、イミド樹脂、ポリアミド樹脂、ポリイミドアミド樹脂、シリコーン樹脂、シロキサン樹脂、ベンゾシクロブテン系樹脂、フェノール樹脂、及びこれら樹脂の前駆体等を適用することができる。また、絶縁層125bとして、ポリビニルアルコール(PVA)、ポリビニルブチラル、ポリビニルピロリドン、ポリエチレングリコール、ポリグリセリン、プルラン、水溶性のセルロース、またはアルコール可溶性のポリアミド樹脂等の有機材料を適用することができる場合がある。また、感光性の樹脂としてはフォトレジストを用いることができる場合がある。感光性の樹脂は、ポジ型の材料、またはネガ型の材料を用いることができる場合がある。
続いて、EL層120R、EL層120G、及びEL層120B、絶縁層125を覆ってEL層121を成膜する。
続いて、EL層121及び接続電極101Cを覆って共通電極102を形成する(図9F)。
続いて、共通電極102上に、保護層を形成する。保護層に用いる無機絶縁膜の成膜には、スパッタリング法、PECVD法、またはALD法を用いることが好ましい。特にALD法は、段差被覆性に優れ、ピンホールなどの欠陥が生じにくいため、好ましい。また、有機絶縁膜の成膜には、インクジェット法を用いると、所望のエリアに均一な膜を形成できるため好ましい。
本実施の形態では、実施の形態1および実施の形態2に記載の発光デバイスを照明装置として用いる例を、図10を参照しながら、説明する。図10Bは照明装置の上面図、図10Aは図10Bに示す線分e−fにおける断面図である。
本実施の形態では、実施の形態1および実施の形態2に記載の発光デバイスをその一部に含む電子機器の例について説明する。実施の形態1および実施の形態2に記載の発光デバイスは発光効率(特にBI)の高い発光デバイスである。その結果、本実施の形態に記載の電子機器は、発光デバイスの発光効率が良好なため、消費電力の小さい電子機器とすることが可能である。
まず、シリコン基板上に、絶縁膜としてCVD法により酸化シリコンを400nm成膜した後、窒素雰囲気下350℃で1時間加熱した。この後、スパッタリング法によりチタンを50nm、アルミニウムを70nm、チタンをスパッタリング法により6nm成膜し、300℃で1時間加熱して反射電極を形成した。この後、透明電極として酸化珪素を含むインジウム錫酸化物(ITSO)をスパッタリング法により、10nmの膜厚で成膜した。続いて、フォトリソグラフィ法によりフォトマスクを作製した後、ウェットエッチングでITSOを、ドライエッチングでチタン、アルミニウム、チタンの積層をパターニングして、幅3μmの画素電極101を形成した。なお、透明電極は陽極として機能し、上記反射電極と合わせて画素電極(陽極)101とみなすことができる。
発光デバイス2は発光デバイス1とほぼ同じ工程、レイアウトで作製したが、異なる感光性有機樹脂を用い、塗布成膜した後90℃で90秒焼成し、露光、現像を行い画素電極101と重なる開口部を有する絶縁層を形成した。この後、超高圧水銀ランプにて86秒光を照射し、100℃で600秒焼成を行ったことが発光デバイス1との違いである。これにより、絶縁層開口部の内側側面がテーパ形状となり、その後に形成する膜の被覆性が良好となる。
比較発光デバイス1は、発光デバイス1と同様に画素電極101まで形成した後、1×10−4Pa程度の減圧下、基板温度250℃で5分加熱し、スパッタリング法により酸化シリコンを150nm成膜し、無機絶縁層を形成した。
Claims (12)
- 第1の画素電極と、
前記第1の画素電極に隣接して配置された第2の画素電極と、
共通電極と、
前記第1の画素電極および前記共通電極に挟まれた第1のEL層と、
前記第2の画素電極および前記共通電極に挟まれた第2のEL層と、
前記共通電極および前記第1のEL層並びに前記第2のEL層との間に位置する絶縁層とを有し、
前記絶縁層は、前記第1の画素電極に重なって設けられた第1の開口部と、前記第2の画素電極に重なって設けられた第2の開口部と、を有し、
前記第1のEL層は、第1の発光層を有し、
前記第1の発光層は、第1の発光物質を有し、
前記第1の発光物質は、青色発光を呈し、
前記第1のEL層は、前記第1の画素電極に接しており、
前記第2のEL層は、前記第2の画素電極に接しており、
前記第1のEL層は、前記共通電極と前記第1の開口部を介して接しており、
前記第2のEL層は、前記共通電極と前記第2の開口部を介して接している発光装置。 - 請求項1において、
前記第1の画素電極の端部は、前記第1のEL層によって覆われており、
前記第2の画素電極の端部は、前記第2のEL層によって覆われている発光装置。 - 請求項1において、
前記第1のEL層の端部は、前記絶縁層によって覆われており、
前記第2のEL層の端部は、前記絶縁層によって覆われている発光装置。 - 第1の画素電極と、
前記第1の画素電極に隣接して配置された第2の画素電極と、
共通電極と、
前記第1の画素電極および前記共通電極に挟まれた第1のEL層と、
前記第2の画素電極および前記共通電極に挟まれた第2のEL層と、
前記共通電極および前記第1のEL層並びに前記第2のEL層との間に位置する絶縁層とを有し、
前記絶縁層は、前記第1の画素電極に重なって設けられた第1の開口部と、前記第2の画素電極に重なって設けられた第2の開口部と、を有し、
前記第1のEL層は、第1の発光層を有する第3のEL層と、前記第3のEL層と前記共通電極との間に位置する第4のEL層を有し、
前記第2のEL層は、第2の発光層を有する第5のEL層と、前記第5のEL層と前記共通電極との間に位置する前記第4のEL層を有し、
前記第1の発光層は、第1の発光物質を有し、
前記第1の発光物質は、青色発光を呈し、
前記第3のEL層は、前記第1の画素電極に接しており、
前記第5のEL層は、前記第2の画素電極に接しており、
前記第4のEL層は、前記第3のEL層と前記第1の開口部を介して接しており、
前記第4のEL層は、前記第5のEL層と前記第2の開口部を介して接している発光装置。 - 請求項4において、
前記第1の画素電極および前記第2の画素電極と重ならない領域において、
前記第4のEL層が、前記絶縁層と、前記共通電極とに接して挟まれている発光装置。 - 請求項4において、
前記第1の画素電極の端部は、前記第3のEL層によって覆われており、
前記第2の画素電極の端部は、前記第5のEL層によって覆われている発光装置。 - 請求項4において、
前記第3のEL層の端部は、前記絶縁層によって覆われており、
前記第5のEL層の端部は、前記絶縁層によって覆われている発光装置。 - 請求項1乃至請求項5のいずれか一項において、
前記絶縁層が有機化合物を含む発光装置。 - 請求項1乃至請求項5のいずれか一項において、
前記第1の開口部および前記第2の開口部は側面にテーパ形状を有し、
当該テーパ角は90°未満である発光装置。 - 請求項1乃至請求項5のいずれか一項において、
前記第1の画素電極と前記第2の画素電極の向かい合う端部の間隔は0.5μm以上5μm以下である発光装置。 - 請求項1乃至請求項5のいずれか一項において、
前記第1の画素電極と前記第1のEL層と前記共通電極が接して重なっている部分の面積が、5μm2以上15μm2以下である発光装置。 - 請求項1乃至請求項5のいずれか一項において、
前記第1のEL層が、前記第1の開口部から呈する発光スペクトルの半値幅が20nm以下である発光装置。
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JP2020088065A (ja) * | 2018-11-20 | 2020-06-04 | キヤノン株式会社 | 有機発光素子、表示装置、光電変換装置、照明装置、移動体 |
US20210062087A1 (en) * | 2019-08-29 | 2021-03-04 | Samsung Electronics Co., Ltd. | Quantum dots and device including the same |
JP2021093525A (ja) * | 2019-11-29 | 2021-06-17 | 株式会社Joled | 自発光素子、及び自発光表示パネル |
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US20240324307A1 (en) | 2024-09-26 |
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