WO2022270938A1 - Photoionizer - Google Patents

Photoionizer Download PDF

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Publication number
WO2022270938A1
WO2022270938A1 PCT/KR2022/008931 KR2022008931W WO2022270938A1 WO 2022270938 A1 WO2022270938 A1 WO 2022270938A1 KR 2022008931 W KR2022008931 W KR 2022008931W WO 2022270938 A1 WO2022270938 A1 WO 2022270938A1
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WO
WIPO (PCT)
Prior art keywords
unit
ionizer
cable
irradiation units
housing
Prior art date
Application number
PCT/KR2022/008931
Other languages
French (fr)
Korean (ko)
Inventor
이동훈
이병준
허시환
Original Assignee
(주)선재하이테크
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Application filed by (주)선재하이테크 filed Critical (주)선재하이테크
Publication of WO2022270938A1 publication Critical patent/WO2022270938A1/en

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
    • H05F3/00—Carrying-off electrostatic charges
    • H05F3/06—Carrying-off electrostatic charges by means of ionising radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith
    • H01J35/165—Vessels; Containers; Shields associated therewith joining connectors to the tube
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
    • H05G1/02—Constructional details
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
    • H05G1/02—Constructional details
    • H05G1/025—Means for cooling the X-ray tube or the generator

Definitions

  • the present invention relates to a photo ionizer that removes static electricity using electromagnetic waves for static elimination.
  • LCDs liquid crystal displays
  • OLEDs organic light emitting diodes
  • a static electricity discharging device capable of removing static electricity from a wafer or the like in a manufacturing process of semiconductors and display devices.
  • Static elimination devices are largely divided into corona discharge devices and X-ray emission devices.
  • X-ray devices have overcome the disadvantages of corona discharge devices such as sputtering by high voltage discharge, generation of ozone gas, and inconvenience caused by ion balance adjustment.
  • a radiation type device that is, an X-ray irradiation type photo ionizer is mainly used.
  • An X-ray irradiation type photo ionizer is a device that generates and emits X-rays to ionize gas molecules to neutralize the static electricity on the surface of an object to be neutralized. It mainly emits soft X-rays. is implemented as Since these photoionizers do not generate fine dust and do not require convection of air, they have been in the limelight and have been developed in various ways.
  • Patent Document 1 (Registered Patent Publication KR 10-2138092) discloses a photo ionizer configured by combining a plurality of voltage generating assemblies for generating high voltage and a plurality of X-ray tube modules for irradiating soft X-rays for static elimination to a body. .
  • the optical ionizer disclosed in Patent Document 1 has an apex of being able to easily attach and detach the X-ray tube module and securing a sufficient creepage distance, but a plurality of voltage generating assemblies and a plurality of X-ray tube modules are attached to a bar-type body As it is combined, the overall volume of the photo ionizer increases, making it difficult to place it in a narrow place or a place where access is difficult. In addition, in order to overlap the irradiation area at a high density, it becomes more bulky, so the installation space is reduced. There is a problem in that it is difficult to substantially overlap the irradiation area of the lance ray tube module at a high density in a narrow place.
  • the present invention was invented to solve the above problems, and to provide a photo ionizer capable of overlapping electromagnetic waves for static elimination at a high density while being able to be installed regardless of location, such as in a narrow space or a place with difficulty in access.
  • the purpose is invented to solve the above problems, and to provide a photo ionizer capable of overlapping electromagnetic waves for static elimination at a high density while being able to be installed regardless of location, such as in a narrow space or a place with difficulty in access. The purpose.
  • an optical ionizer includes an ionizer unit equipped with a plurality of irradiators for radiating electromagnetic waves for static elimination, and configured to supply power to the ionizer unit. It includes a body and a unit cable configured to connect the ionizer unit and the body, and the plurality of irradiation units are electrically connected in series.
  • the plurality of irradiation units may be electrically connected to a circuit board installed on the ionizer unit, and a circuit pattern electrically connecting the plurality of irradiation units in series may be formed on the circuit board.
  • the plurality of irradiation units may be attached to the ionizer unit so as to radiate electromagnetic waves for static elimination in the same direction as the direction in which the cable is connected to the ionizer unit.
  • the plurality of irradiation units may be attached to the ionizer unit so as to radiate the electromagnetic wave for static elimination in a direction orthogonal to a direction in which the cable is connected to the ionizer unit.
  • the body may be configured such that a plurality of ionizer units are connected.
  • the unit cable may be configured to be detachable from the body and the ionizer unit.
  • connection port configured to be coupled to the body is formed at a side end of the unit cable connected to the body, and a coupling hole opened in the body to allow a portion of the connection port to be inserted in order to fasten the connection port to the body. may be formed.
  • the said unit cable may be comprised by the 1st unit cable and the 2nd unit cable comprised so that mutual coupling and separation are possible.
  • the ionizer unit includes a case in which the plurality of irradiation units are mounted, and the case is configured such that a first housing and a second housing are coupled to form a space therein, and the plurality of irradiation units are formed in the space. They may be electrically connected in series.
  • the said circuit board may be accommodated in the said space part.
  • an insulating material may be filled in the said space part.
  • the body may be configured to be connectable to another body.
  • the plurality of irradiation units may be mounted on the ionizer unit so that a distance between adjacent irradiation units is equal to or less than a predetermined length so that electromagnetic waves emitted from the plurality of irradiation units can be overlapped.
  • the plurality of irradiation units may be attached to the ionizer unit so that the distance between adjacent irradiation units is 50 mm or less.
  • the irradiation unit may be detachably attached to the ionizer unit.
  • a heat sink structure for heat dissipation may be formed in the ionizer unit.
  • the optical ionizer of the present invention can be easily installed even in a narrow space or a place that is difficult to access, and has an effect of being able to irradiate an object with high-density electromagnetic waves for static elimination.
  • FIG. 1 is a perspective view of a photoionizer according to an embodiment of the present invention.
  • Fig. 2 is a diagram showing a photoionizer according to an embodiment of the present invention with a control device connected thereto.
  • FIG 3 is a perspective view showing a combination of an ionizer unit, a unit cable, and a connector according to the first embodiment of the present invention.
  • FIG. 4 is an exploded perspective view of the ionizer unit of the first embodiment of the present invention.
  • FIG 5 is a view showing a cross section of the ionizer unit according to the first embodiment of the present invention.
  • FIG. 6 is a diagram showing the front and back sides of a circuit board according to an embodiment of the present invention.
  • FIG. 7 is a perspective view showing a combination of an ionizer unit, a unit cable, and a connector according to a second embodiment of the present invention.
  • FIG. 8 is an exploded perspective view of an ionizer unit according to a second embodiment of the present invention.
  • FIG. 9 is a view showing a cross section of a body of one embodiment of the present invention.
  • FIG. 10 is a view showing a structure in which a body is connected to another body in one embodiment of the present invention.
  • FIG. 11 is a view showing a cross section of a unit cable according to an embodiment of the present invention.
  • FIG. 12 is a view showing coupling and separation of a first unit cable and a second unit cable according to an embodiment of the present invention.
  • FIG. 1 is a perspective view of a photo ionizer 1 according to an embodiment of the present invention
  • FIG. 2 is a view showing the configuration of the photo ionizer 1 according to an embodiment of the present invention in a state in which a control device 500 is connected. to be.
  • An optical ionizer 1 includes an ionizer unit 100 irradiating electromagnetic waves for static elimination, a body 200 configured to supply power to the ionizer unit 100, and the ionizer unit ( 100) and a unit cable 300 connecting the body 200.
  • the body 200 receives power from an external device (control device 500), and the high voltage generating module 210 installed in the body 200 generates power. High voltage power is generated, power is supplied to the ionizer unit 100 through the unit cable 300, and the ionizer unit 100 receiving the high voltage power generates electromagnetic waves for static elimination by the irradiation unit 110 to investigate
  • the ionizer unit 100 of the first embodiment of the present invention will be described in detail with reference to FIGS. 3 to 6 .
  • FIG. 3 is a perspective view showing a combination of an ionizer unit 100, a unit cable 300, and a connector 400 according to the first embodiment of the present invention
  • FIG. 4 is an ionizer according to the first embodiment of the present invention It is an exploded perspective view of the unit 100
  • Figure 5 is a view showing a cross section of the ionizer unit 100 of the first embodiment of the present invention
  • Figure 6 is a front side of the circuit board 150 of one embodiment of the present invention It is a view showing (Fig. 6 (a)) and the back (Fig. 6 (b)).
  • the ionizer unit 100 is connected to the body 200 by the unit cable 300, a plurality of irradiation units 110 for irradiating electromagnetic waves for static elimination are installed, and a plurality of irradiation units (110) is configured to be electrically connected in series.
  • a plurality of irradiation units 110 for irradiating electromagnetic waves for static elimination are installed, and a plurality of irradiation units (110) is configured to be electrically connected in series.
  • two irradiation units 110 are installed, and three or more irradiation units 110 may be installed.
  • the irradiation unit 110 is a means for generating and irradiating electromagnetic waves for static elimination.
  • the electromagnetic waves for static elimination are not particularly limited as long as they are electromagnetic waves capable of static elimination, but in general, soft X-rays are generated and irradiated.
  • X-rays are electromagnetic waves corresponding to about 1/1000 of the wavelength of visible light, and are produced by rapid deceleration when electrons collide with nuclei or when empty orbits deep in atoms trap electrons.
  • X-rays are generally classified into soft X-rays (soft X-rays) and hard X-rays (hard X-rays) according to material permeability. Radiation with high penetrability used is called hard X-ray.
  • the energy of soft X-rays is as low as one tenth of that of hard X-rays, and the effect of direct irradiation is much less.
  • Soft X-rays have a wavelength of 1 to 1000 ⁇ and an energy of 1 to 10 keV, and are used to remove static electricity.
  • a soft X-ray tube configured to generate soft X-rays may be used as the irradiation unit 110, and the soft X-ray tube basically includes a tube body made of glass or ceramic, a filament that emits electrons, and , It is composed of a focusing tube for focusing electrons and a target window for emitting soft X-rays when electrons collide with each other.
  • a high voltage of several kV to several tens of kV may be applied from the high voltage generating module 210 installed on the body 200 with two terminals 111 exposed to the outside through the unit cable 300 .
  • the target window may be made of a beryllium (Be) material, for example, and a target material that generates X-rays when electrons emitted from the filament collide with the inner surface thereof may be applied.
  • the target material may be applied to the beryllium window in a thickness of 0.5 ⁇ m to 1 ⁇ m, and the material may be gold (Au) or tungsten (W).
  • the ionizer unit 100 includes a plurality of irradiation units 110, a case 130, a circuit board 150, and a cable connector 160.
  • the case 130 is constituted by the first housing 131 and the second housing 132, and the first housing 131 and the second housing 132 are coupled to form a space inside.
  • the first housing 131 and the second housing 132 are coupled by a housing coupling bolt 140 .
  • Both the first housing 131 and the second housing 132 may be made of a conductive metal material, and only the first housing 131 may be made of a conductive metal material.
  • a plurality of irradiation unit mounting holes 133 for mounting a plurality of irradiation units 110 are formed on a surface of the first housing 131 opposite to the side coupled to the second housing 132. .
  • the plurality of irradiation unit mounting holes 133 are formed so that adjacent irradiation units 110 can be mounted at a predetermined interval.
  • the plurality of irradiation units 110 are coupled to the first housing 131 to radiate electromagnetic waves in the same direction (for example, when the irradiation unit 110 is a cylindrical soft X-ray tube, the central axis of the soft X-ray tube is coupled to be parallel to each other), the interval may be set to a predetermined value or less so that the irradiation area of the electromagnetic wave overlaps when the electromagnetic wave is irradiated to the object to be irradiated.
  • the interval may be preferably set to 50 mm or less, and the interval refers to a distance between centers of the irradiation unit mounting holes 133.
  • the irradiation unit 110 is mounted in the irradiation unit mounting hole 133 of the first housing 131, and the irradiation unit fixing plate 120 having a through hole 121 through which electromagnetic waves pass from the irradiation unit 110 is the irradiation unit 110. It is coupled to the first housing 131 by a fixing bolt 122 to cover a part of the.
  • the target window of the irradiation unit 110 is electrically connected to the first housing 131, and as described later, as the first housing 131 is grounded, the target window of the irradiation unit 110 also can be grounded together.
  • the irradiation unit 110 When the irradiation unit 110 is coupled to the first housing 131, two terminals 111 are exposed for each irradiation unit inside the first housing 131, and the exposed terminals 111 are connected to the irradiation unit 110. It is electrically connected to the circuit board 150 on which the circuit pattern is formed so as to electrically connect in series. Two power supply lines included in the unit cable 300 are connected to the circuit board 150 to supply power to the irradiation unit 110 .
  • circuit board 150 A detailed configuration of the circuit board 150 will be described with reference to FIG. 6 .
  • the circuit board 150 may be, for example, a Printed Circuit Board (PCB) board.
  • PCB Printed Circuit Board
  • the circuit board 150 has two through-holes 151 respectively formed on the left and right sides (referring to FIG. 6(a) ), and one irradiation unit 110 is formed in the two through-holes 151 on the left side. )
  • the two terminals 111 exposed from the circuit board 150 are inserted from the back side of the circuit board 150 and joined by a soldering method, and exposed from another irradiation part 110 to the two through-holes 151 on the right side.
  • Two terminals 111 are inserted from the rear side of the circuit board 150 and joined by a soldering method.
  • a first pattern line 154 is formed in the circuit board 150 so that one through hole 151 on the left side and one through hole 151 on the right side are electrically connected.
  • the lower left through hole 151 and the lower right through hole 151 are connected to the first pattern line 154 in the drawing, but this is an embodiment and one of the through holes 151 on the left side and one of the through holes 151 on the right side are connected. It is not particularly limited as long as one of the through holes is connected.
  • Left and right through-holes 151 not connected by the first pattern line 154 are electrically connected to the first power pattern 152 and the second power pattern 153 formed on the front surface of the circuit board 150, respectively.
  • the first power supply pattern 152 and the second power supply pattern 153 are respectively connected to the two power supply lines of the unit cable 300 by a soldering method.
  • workability can be improved by electrically connecting the plurality of irradiation units 110 in series using the circuit board 150 .
  • the configuration of electrically connecting the plurality of irradiation units 110 in series using the circuit board 150 is only one embodiment of the present invention, and if the structure of electrically connecting the plurality of irradiation units 110 in series, a wire Various methods may be adopted, such as a connection method, a connector connection method, and the like, and are not particularly limited.
  • the total amount of current consumption can be reduced compared to a configuration in which the plurality of irradiation units 110 are connected in parallel under the condition that the same current flows through them.
  • the total amount of current consumption is reduced, hypertrophy of the high voltage generating module 210 provided in the body 200 can be suppressed.
  • a ground bolt 134 is screwed into the first housing 131 .
  • the ground bolt 134 serves to ground the first housing 131 by fixing the ground wire of the unit cable 300 connected to the ionizer unit 100 to the first housing 131, As described above, the target window of the irradiation unit 110 coupled to the first housing 131 may be grounded.
  • a heat sink structure for effectively dissipating heat to the outside may be formed on an outer surface of the first housing 131 .
  • a concavo-convex structure 137 may be formed on an outer surface of the first housing 131 to increase a surface area in contact with external air.
  • the concavo-convex structure 137 is only one embodiment and is not particularly limited as long as it is a structure that can effectively dissipate heat.
  • the heat sink structure may be formed on each or any one of the first housing 131 and the second housing 132 .
  • the heat generated in the ionizer unit 100 can be effectively dissipated by this heat sink structure, and the ionizer unit 100 can be Excessive temperature rise can be suppressed.
  • an injection hole 135 for injecting an insulating material into the case and a cable coupling hole in which the cable connector 160 are coupled is formed.
  • the cable connector 160 is coupled to the cable coupling hole 136 , and the unit cable 300 is introduced into the second housing 132 through the cable connector 160 .
  • the two power supply lines included in the introduced unit cable 300 are connected to the first power supply pattern 152 and the second power supply pattern 153 of the circuit board, respectively, and the ground line is a ground bolt 134 It is coupled to the first housing 131 by.
  • the second housing 132 and the first housing 131 are connected to the circuit board 150 and the first housing 131 when the two power supply lines and the ground line of the unit cable 300 are coupled to each other. They are coupled by housing coupling bolts 140. As the first housing 131 and the second housing 132 are coupled, a space is formed inside the case 130, and a circuit board 150 is disposed in the space to electrically connect the plurality of irradiation units 110. connect in series with
  • an insulating material is injected into the space inside the case 130 through the injection hole 135 to to mold As the insulating material is filled and molded into the space inside the case 130 , it is possible to prevent a short circuit from occurring due to a high voltage discharge phenomenon inside the case 130 .
  • a closing plate 170 is coupled to the second housing 132 to cover the injection hole 135, thereby forming the injection hole 135. close A through hole is formed in the closing plate 170 so that the cable connector 160 can pass therethrough, and the closing plate 170 is attached to the second housing 132 by a separate closing plate coupling bolt 171.
  • the ionizer unit 100 of the first embodiment of the present invention as described above is configured to be connected to the body 200 having the high voltage generating module 210 by the unit cable 300, the ionizer unit 100 ) itself does not have a configuration for generating a separate high voltage, so the volume is minimized. Therefore, the ionizer unit 100 of the first embodiment of the present invention can be easily installed in a narrow place or a place where access is difficult.
  • the plurality of irradiators 110 irradiate electromagnetic waves to an object, they are attached to the ionizer unit 100 at predetermined intervals so that the irradiation areas overlap, thereby reducing the volume and at the same time providing high-density electromagnetic waves for static elimination (for example, , Soft X-rays) can be generated and irradiated to maximize static elimination efficiency.
  • high-density electromagnetic waves for static elimination for example, Soft X-rays
  • An ionizer unit 100 according to a second embodiment of the present invention will be described with reference to FIGS. 7 and 8 .
  • the irradiation direction of the plurality of irradiation units 110 is the same as the direction in which the unit cable 300 is connected to the case 130. Since they are the same, it may not be easy to install them in a place where electromagnetic waves need to be irradiated in a direction orthogonal to the direction in which the unit cable 300 is introduced.
  • the irradiation direction of the plurality of irradiation units 110 and the direction in which the unit cable 300 is connected to the case 130 are perpendicular to each other. It consists of
  • the irradiation direction of the irradiation unit 110 coupled to the first housing 131 and the direction coupled to the unit cable 300 to the case 130 are orthogonal,
  • a cable coupling hole 136 to which the cable connector 160 is coupled is formed on one side surface of the second housing 132 .
  • the side surface of the one side where the cable coupling hole 136 of the second housing 132 is formed may not be sufficient to firmly fix the cable connector 160, the side surface has a predetermined height outward.
  • a protruding portion may be formed, and the cable coupling hole 136 may be formed in the protruding portion.
  • the opposite side of the surface where the cable coupling hole 136 of the second housing 132 is formed can be configured to be open, and the first housing 131 ) and the second housing 132 are coupled, an insulating material is injected into the open side of the second housing 132, and the open side of the second housing 132 is covered and closed by the closing plate 170.
  • an insulating material may be injected by forming a separate injection hole on one side of the second housing 132 in the same way as the ionizer unit 100 of the first embodiment.
  • the injection hole may be closed with another closing plate similarly to the first embodiment.
  • the unit cable 300 is introduced as the direction in which the unit cable 300 is coupled to the ionizer unit 100 and the irradiation direction of electromagnetic waves are orthogonal
  • the ionizer unit 100 can be easily installed even in a place where the direction and the direction of irradiating electromagnetic waves are orthogonal.
  • the ionizer unit 100 of the first embodiment and the ionizer unit 100 of the second embodiment can be appropriately selected according to the installation location of the ionizer unit 100, and are provided in one body 200.
  • the ionizer unit of one embodiment and the ionizer unit of the second embodiment may be connected together.
  • the body 200 has a bar-shaped body case 220, and a high voltage generating module 210 for generating power supplied to the ionizer unit 100 is installed therein.
  • the body case 220 is shown in a bar shape, but this is only one embodiment and the shape of the body case 220 is not particularly limited.
  • a fastening hole 221 to which the unit cable 300 can be coupled is formed on one side of the body case 220 .
  • the unit cable 300 can be directly inserted into the fastening hole 221 so that the unit cable 300 and the body 200 can be coupled, and the connector 400 coupled to the unit cable 300 is inserted so that the unit cable ( 300) and the body 200 may be combined.
  • the fastening hole 221 may have various shapes depending on how the unit cable 300 is connected.
  • a plurality of ionizer units 100 may be connected to the body 200, and in this case, as many fastening holes 221 as the number of ionizer units 100 connected may be formed in the body case 220. . Also, depending on the embodiment, a plurality of ionizer units 100 may be connected to one fastening hole 221 .
  • a control device 500 supplying power to the high voltage generating module 210 and controlling the high voltage generating module 210 and the ionizer unit 100 may be connected to the body 200 .
  • the control device 500 is connected to the body through a separate control cable 510, and the control cable 510 can be detachably coupled to the control device 500 and the body 200.
  • control device 500 may be integrally formed with the body 200 .
  • the high voltage generating module 210 is installed inside the body case 220 as many as the number of ionizer units. However, the present invention is not limited thereto, and one high voltage generating module 210 may be configured to supply power to a plurality of ionizer units 100 according to embodiments.
  • the body 200 may be configured to be connected to another body 200 by a cable (body connection cable 250) or the like.
  • one end in the longitudinal direction of the body 200 and one end in the longitudinal direction of the other body 200 may be connected through a body connection cable 250, and the body connection cable 250 It may be configured to be detachable from the body.
  • a plurality of bodies 200 can be controlled by one control device 500 .
  • the unit cable 300 is configured to connect the ionizer unit 100 and the body 200 .
  • the uni-cable 300 includes two power supply lines and one ground line, and the two power supply lines and one ground line are coated together with an insulating material to form one unit cable line.
  • two power supply lines and one ground line are each covered with a separate insulating material.
  • the two power supply lines are coupled to the circuit board 150 of the ionizer unit 100 by a soldering method, and the ground line is connected to the ground bolt 134
  • the unit cable 300 is electrically coupled to the ionizer unit 100.
  • the unit cable 300 and the ionizer unit 100 may be detachably connected.
  • connectors for connection that can be coupled to each other are formed on the unit cable 300 and the ionizer unit 100, so that the connectors for connection are detachable from each other, so that the unit cable 300 and the ionizer unit (100) can be detached.
  • this is only one embodiment and is not particularly limited as long as the unit cable 300 and the ionizer unit 100 are detachable structures.
  • a connector 400 may be formed at a side end of the unit cable 300 coupled to the body 200 so as to be detachable from the body 200 .
  • a portion of the connector 400 is inserted into a fastening hole 221 formed in the body case 220 of the body, and a terminal protrusion formed on the inserted portion is inside the body case 220 of the body 200.
  • the unit cable 300 and the body 200 can be coupled by being coupled to the terminal groove formed in the body 200 .
  • the unit cable 300 may be composed of a first unit cable 310 and a second unit cable 320 that can be separated and combined with each other.
  • a protruding terminal is formed on one of the second unit cable side end of the first unit cable 310 and the first unit cable side end of the second unit cable 320
  • a grooved terminal is formed on the other side
  • the ionizer unit 100 is installed in the installation place in a state where the unit cable 300 is separated into the first unit cable 310 and the second unit cable 320, the first unit cable 310 ) and the second unit cable 320 to supply power to the ionizer unit, so that the ionizer unit 100 can be easily installed even in places where it is difficult to install with a long cable connected.

Abstract

A photoionizer of the present invention includes: an ionizer unit having mounted therein a plurality of irradiation portions emitting electromagnetic waves for static elimination; a body configured to supply power to the ionizer unit; and a unit cable configured to connect the ionizer unit to the body, wherein the plurality of irradiation portions are electrically connected in series.

Description

광 이오나이저optical ionizer
본 발명은 제전용 전자기파를 이용하여 정전기를 제거하는 광 이오나이저에 관한 것이다.The present invention relates to a photo ionizer that removes static electricity using electromagnetic waves for static elimination.
전자 기기 및 통신 기술의 발전에 따라, 최근 들어, 반도체와 LCD(Liquid Cristal Display), OLED(Organic Light Emitting Diode) 등의 디스플레이 장치의 사용이 급증하고 있다.With the development of electronic devices and communication technology, the use of display devices such as semiconductors, liquid crystal displays (LCDs), organic light emitting diodes (OLEDs), and the like is rapidly increasing in recent years.
반도체와 디스플레이 장치의 제조 공정에서는 웨이퍼가 정전기에 의해 대전됨에 따라, 미세한 먼지가 부착되거나 소자가 훼손되는 등의 문제점이 발생할 수 있으며, 반도체 및 디스플레이 장치 등의 생산 수율 저하로 이어지게 된다.In the manufacturing process of semiconductors and display devices, as wafers are charged by static electricity, problems such as adhesion of fine dust or damage to devices may occur, leading to a decrease in production yield of semiconductors and display devices.
이러한 정전기를 제전하기 위해 반도체와 디스플레이 장치의 제조 공정에서는 웨이퍼 등의 정전기를 제거할 수 있는 제전 장치가 사용되는 것이 일반적이다.In order to discharge such static electricity, it is common to use a static electricity discharging device capable of removing static electricity from a wafer or the like in a manufacturing process of semiconductors and display devices.
제전 장치는 크게 코로나 방전식 장치와 엑스선 방사식 장치로 구분되며, 최근에는 코로나 방전식 장치가 갖고 있는 고전압 방전에 의한 스퍼터링 현상, 오존가스 발생, 이온 밸런스 조정에 따른 불편 등의 단점을 극복한 엑스선 방사식 장치, 즉 엑스선 조사식의 광 이오나이저(Photo Ionizer)가 주로 사용되고 있다.Static elimination devices are largely divided into corona discharge devices and X-ray emission devices. Recently, X-ray devices have overcome the disadvantages of corona discharge devices such as sputtering by high voltage discharge, generation of ozone gas, and inconvenience caused by ion balance adjustment. A radiation type device, that is, an X-ray irradiation type photo ionizer is mainly used.
엑스선 조사식의 광 이오나이저는 엑스선(X-ray)을 생성하고 이를 방사하여 기체 분자를 이온화함으로써 제전 대상 물체 표면의 정전기를 중화하는 장치로, 주로 연엑스선(Soft X-ray)을 조사하는 방식으로 구현된다. 이러한 광 이오나이저는 미세먼지를 발생시키지 않고 공기를 대류시킬 필요도 없기 때문에 더욱 각광을 받으며 다양한 방식으로 개발되어 왔다.An X-ray irradiation type photo ionizer is a device that generates and emits X-rays to ionize gas molecules to neutralize the static electricity on the surface of an object to be neutralized. It mainly emits soft X-rays. is implemented as Since these photoionizers do not generate fine dust and do not require convection of air, they have been in the limelight and have been developed in various ways.
특허문헌 1(등록특허공보 KR 10-2138092)에는 고전압을 발생하는 복수개의 전압 발생 어셈플리와 제전용 연엑스선을 조사하는 복수개의 엑스선관 모듈이 바디에 결합되어 구성되는 광 이오나이저가 개시되어 있다.Patent Document 1 (Registered Patent Publication KR 10-2138092) discloses a photo ionizer configured by combining a plurality of voltage generating assemblies for generating high voltage and a plurality of X-ray tube modules for irradiating soft X-rays for static elimination to a body. .
이러한 특허문헌 1에 개시된 광 이오나이저는, 엑스선관 모듈을 쉽게 탈부착 가능하게 하고 연면거리를 충분히 확보할 수 있다는 정점이 있으나, 복수개의 전압 발생 어셈플리와 복수개의 엑스선관 모듈이 바 타입의 바디에 결합함에 따라, 전체적인 광 이오나이저의 부피가 커지게 되어, 협소한 장소나 접근이 곤란한 장소에 배치하기 어려운 문제점이 있으며, 또한, 조사 영역을 고밀도로 중첩시키기 위해서는 더욱 부피가 커지게 되어 설치 공간이 협소한 장소에서 실질적으로 엔스선관 모듈의 조사 영역을 고밀도로 중첩시키기 어려운 문제점이 있다.The optical ionizer disclosed in Patent Document 1 has an apex of being able to easily attach and detach the X-ray tube module and securing a sufficient creepage distance, but a plurality of voltage generating assemblies and a plurality of X-ray tube modules are attached to a bar-type body As it is combined, the overall volume of the photo ionizer increases, making it difficult to place it in a narrow place or a place where access is difficult. In addition, in order to overlap the irradiation area at a high density, it becomes more bulky, so the installation space is reduced. There is a problem in that it is difficult to substantially overlap the irradiation area of the lance ray tube module at a high density in a narrow place.
본 발명은 상기의 문제점을 해결하기 위해 발명된 것으로, 협소한 공간이나 접근 곤란한 장소 등과 같이 장소에 구애받지 않고 설치가 가능함과 동시에 제전용 전자기파를 고밀도로 중첩시킬 수 있는 광 이오나이저를 제공하는 것을 목적으로 한다.The present invention was invented to solve the above problems, and to provide a photo ionizer capable of overlapping electromagnetic waves for static elimination at a high density while being able to be installed regardless of location, such as in a narrow space or a place with difficulty in access. The purpose.
또한, 본 발명은 위에 언급한 목적으로 제한되지 않으며, 언급되지 않은 또 다른 목적들은 아래의 기재로부터 본 발명의 기술분야에서 통상의 지식을 지닌 자에게 명확하게 이해될 수 있을 것이다.In addition, the present invention is not limited to the above-mentioned purpose, and other objects not mentioned will be clearly understood by those skilled in the art from the following description.
상기와 같은 과제를 해결하기 위하여, 본 발명의 일 실시형태에 따른 광 이오나이저는, 제전용 전자기파를 방사하는 복수개의 조사부가 장착되는 이오나이저 유닛과, 상기 이오나이저 유닛에 전원을 공급하도록 구성되는 몸체와, 상기 이오나이저 유닛과 상기 몸체를 연결하도록 구성되는 유닛 케이블을 포함하고, 상기 복수개의 조사부는 전기적으로 직렬로 연결되어 있는 것을 특징으로 한다.In order to solve the above problems, an optical ionizer according to an embodiment of the present invention includes an ionizer unit equipped with a plurality of irradiators for radiating electromagnetic waves for static elimination, and configured to supply power to the ionizer unit. It includes a body and a unit cable configured to connect the ionizer unit and the body, and the plurality of irradiation units are electrically connected in series.
또한, 상기 복수개의 조사부는 상기 이오나이저 유닛에 설치되는 회로 기판에 전기적으로 접속되며, 상기 회로기판에는 상기 복수개의 조사부를 전기적으로 직렬로 연결하는 회로 패턴이 형성되어 있어도 된다.Further, the plurality of irradiation units may be electrically connected to a circuit board installed on the ionizer unit, and a circuit pattern electrically connecting the plurality of irradiation units in series may be formed on the circuit board.
또한, 상기 복수개의 조사부는, 상기 이오나이저 유닛에 상기 케이블이 접속되는 방향과 동일한 방향으로 제전용 전자기파를 방사하도록 상기 이오나이저 유닛에 장착되어 있어도 된다.Further, the plurality of irradiation units may be attached to the ionizer unit so as to radiate electromagnetic waves for static elimination in the same direction as the direction in which the cable is connected to the ionizer unit.
또한, 상기 복수개의 조사부는, 상기 이오나이저 유닛에 상기 케이블이 접속되는 방향과 직교하는 방향으로 상기 제전용 전자기파를 방사하도록 상기 이오나이저 유닛에 장착되어 있어도 된다.Further, the plurality of irradiation units may be attached to the ionizer unit so as to radiate the electromagnetic wave for static elimination in a direction orthogonal to a direction in which the cable is connected to the ionizer unit.
또한, 상기 몸체는 복수개의 이오나이저 유닛이 접속되도록 구성되어 있어도 된다.Further, the body may be configured such that a plurality of ionizer units are connected.
또한, 상기 유닛 케이블은, 상기 몸체 및 상기 이오나이저 유닛과 탈착 가능하도록 구성되어 있어도 된다.Further, the unit cable may be configured to be detachable from the body and the ionizer unit.
또한, 상기 유닛 케이블의 상기 몸체에 접속되는 측 단부에는 상기 몸체에 결합하도록 구성되는 접속구가 형성되어 있으며, 상기 몸체에는 상기 접속구를 상기 몸체에 체결하기 위해 상기 접속구의 일부가 삽입되도록 개구되는 체결 구멍이 형성되어 있어도 된다.In addition, a connection port configured to be coupled to the body is formed at a side end of the unit cable connected to the body, and a coupling hole opened in the body to allow a portion of the connection port to be inserted in order to fasten the connection port to the body. may be formed.
또한, 상기 유닛 케이블은, 서로 결합 및 분리 가능하도록 구성되는 제1 유닛 케이블과 제2 유닛 케이블에 의해 구성되어 있어도 된다.Moreover, the said unit cable may be comprised by the 1st unit cable and the 2nd unit cable comprised so that mutual coupling and separation are possible.
또한, 상기 이오나이저 유닛은 상기 복수개의 조사부가 장착되는 케이스를 포함하고, 상기 케이스는 제1 하우징과 제2 하우징이 결합하여 내부에 공간부를 형성하도록 구성되며, 상기 복수개의 조사부는 상기 공간부에서 전기적으로 직렬로 연결되어 있어도 된다.In addition, the ionizer unit includes a case in which the plurality of irradiation units are mounted, and the case is configured such that a first housing and a second housing are coupled to form a space therein, and the plurality of irradiation units are formed in the space. They may be electrically connected in series.
또한, 상기 회로 기판이 상기 공간부에 수용되어 있어도 된다.Moreover, the said circuit board may be accommodated in the said space part.
또한, 상기 공간부에는 절연 물질이 채워져 있어도 된다.In addition, an insulating material may be filled in the said space part.
또한, 상기 몸체는 다른 몸체와 연결가능하게 구성되어 있어도 된다.Also, the body may be configured to be connectable to another body.
또한, 상기 복수의 조사부는, 상기 복수의 조사부로부터 방사되는 전자기파가 중첩될 수 있도록, 인접하는 조사부 사이의 거리가 소정 길이 이하가 되도록 상기 이오나이저 유닛에 장착되어도 된다.Further, the plurality of irradiation units may be mounted on the ionizer unit so that a distance between adjacent irradiation units is equal to or less than a predetermined length so that electromagnetic waves emitted from the plurality of irradiation units can be overlapped.
또한, 상기 복수의 조사부는, 인접하는 조사부 사이의 거리가 50㎜ 이하가 되도록 상기 이오나이저 유닛에 장착되어도 된다.Further, the plurality of irradiation units may be attached to the ionizer unit so that the distance between adjacent irradiation units is 50 mm or less.
또한, 상기 조사부는 상기 이오나이저 유닛에 탈착 가능하게 장착되어 있어도 된다.Further, the irradiation unit may be detachably attached to the ionizer unit.
또한, 상기 이오나이저 유닛에는 방열용 히트 싱크 구조가 형성되어 있어도 된다.In addition, a heat sink structure for heat dissipation may be formed in the ionizer unit.
본 발명의 광 이오나이저는, 협소한 공간이나 접근 곤란한 장소에도 용이하게 설치가 가능함과 함께 제전용 전자기파를 대상물에 고밀도로 조사할 수 있는 있는 효과를 가진다.The optical ionizer of the present invention can be easily installed even in a narrow space or a place that is difficult to access, and has an effect of being able to irradiate an object with high-density electromagnetic waves for static elimination.
도 1 은 본 발명의 일 실시형태의 광 이오나이저의 사시도이다.1 is a perspective view of a photoionizer according to an embodiment of the present invention.
도 2는 제어 장치가 연결된 상태의 본 발명의 일 실시형태의 광 이오나이저를 나타내는 도면이다.Fig. 2 is a diagram showing a photoionizer according to an embodiment of the present invention with a control device connected thereto.
도 3은 본 발명의 제1 실시형태의 이오나이저 유닛과 유닛 케이블과 접속구가 결합된 형태를 보여주는 사시도이다.3 is a perspective view showing a combination of an ionizer unit, a unit cable, and a connector according to the first embodiment of the present invention.
도 4는 본 발명의 제1 실시형태의 이오나이저 유닛의 분해 사시도이다.4 is an exploded perspective view of the ionizer unit of the first embodiment of the present invention.
도 5는 본 발명의 제1 실시형태의 이오나이저 유닛의 단면을 보여주는 도면이다.5 is a view showing a cross section of the ionizer unit according to the first embodiment of the present invention.
도 6는 본 발명의 일 실시형태의 회로 기판의 앞면과 뒷면을 나타내는 도면이다.6 is a diagram showing the front and back sides of a circuit board according to an embodiment of the present invention.
도 7은 본 발명의 제2 실시형태의 이오나이저 유닛과 유닛 케이블과 접속구가 결합된 형태를 보여주는 사시도이다.7 is a perspective view showing a combination of an ionizer unit, a unit cable, and a connector according to a second embodiment of the present invention.
도 8는 본 발명의 제2 실시형태의 이오나이저 유닛의 분해 사시도이다.8 is an exploded perspective view of an ionizer unit according to a second embodiment of the present invention.
도 9은 본 발명의 일 실시형태의 몸체의 단면을 보여주는 도면이다.9 is a view showing a cross section of a body of one embodiment of the present invention.
도 10는 본 발명의 일 실시형태에 있어서 몸체가 다른 몸체와 연결되는 구조를 나타내는 도면이다.10 is a view showing a structure in which a body is connected to another body in one embodiment of the present invention.
도 11은 본 발명의 일 실시형태의 유닛 케이블의 단면을 보여주는 도면이다.11 is a view showing a cross section of a unit cable according to an embodiment of the present invention.
도 12은 본 발명의 일 실시형태의 제1 유닛 케이블과 제2 유닛 케이블이 결합 및 분리되는 모습을 보여주는 도면이다.12 is a view showing coupling and separation of a first unit cable and a second unit cable according to an embodiment of the present invention.
<부호의 설명><Description of codes>
1 : 광 이오나이저1: Photoionizer
100 : 이오나이저 유닛100: ionizer unit
110 : 조사부110: investigation department
111 : 단자111: terminal
120 : 조사부 고정판120: irradiation unit fixing plate
121 : 관통 구멍121: through hole
122 : 고정 볼트122: fixing bolt
130 : 케이스130: case
131 : 제1 하우징131: first housing
132 : 제2 하우징132: second housing
133 : 조사부 장착 구멍133: irradiation unit mounting hole
134 : 접지 볼트134: ground bolt
135 : 주입 구멍135: injection hole
136 : 케이블 결합 구멍136: cable coupling hole
137 : 요철 구조137: uneven structure
140 : 결합 볼트140: coupling bolt
150 : 회로 기판150: circuit board
151 : 관통홀151: through hole
152 : 제1 전원 패턴152: first power pattern
153 : 제2 전원 패턴153: second power pattern
154 : 제1 패턴 라인154: first pattern line
160 : 케이블 접속구160: cable connection port
170 : 마감 플레이트170: finish plate
171 : 마감 플레이트 결합 볼트171: finish plate coupling bolt
200 : 몸체200: body
210 : 고전압 발생 모듈210: high voltage generation module
220 : 바디 케이스220: body case
250 : 몸체 연결 케이블250: body connection cable
300 : 유닛 케이블300: unit cable
310 : 제1 유닛 케이블310: first unit cable
320 : 제2 유닛 케이블320: second unit cable
400 : 접속구400: connection port
500 : 제어 장치500: control device
510 : 제어 케이블510: control cable
본 발명의 목적, 특정한 장점들 및 신규한 특징들은 첨부된 도면들과 연관되는 이하의 상세한 설명과 실시예로부터 더욱 명백해질 것이다. 본 명세서에서 각 도면의 구성요소들에 참조번호를 부가함에 있어서, 동일한 구성요소들에 한해서는 비록 다른 도면상에 표시되더라도 가능한 한 동일한 번호를 가지도록 하고 있음에 유의하여야 한다. 또한, 제1, 제2 등의 용어는 다양한 구성요소들을 설명하는데 사용될 수 있지만, 상기 구성요소들은 상기 용어들에 의해 한정되어서는 안 된다. 상기 용어들은 하나의 구성요소를 다른 구성요소로부터 구별하는 목적으로만 사용된다. 또한, 본 발명을 설명함에 있어서, 관련된 공지 기술에 대한 구체적인 설명이 본 발명의 요지를 불필요하게 흐릴 수 있다고 판단되는 경우 그 상세한 설명은 생략한다.Objects, certain advantages and novel features of the present invention will become more apparent from the following detailed description and examples taken in conjunction with the accompanying drawings. In adding reference numerals to components of each drawing in this specification, it should be noted that the same components have the same numbers as much as possible even if they are displayed on different drawings. Also, terms such as first and second may be used to describe various components, but the components should not be limited by the terms. These terms are only used for the purpose of distinguishing one component from another. In addition, in describing the present invention, if it is determined that a detailed description of related known technologies may unnecessarily obscure the subject matter of the present invention, the detailed description will be omitted.
이하, 첨부된 도면을 참조하여 본 발명의 예시적인 실시형태를 상세히 설명한다.Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.
도 1 은 본 발명의 일 실시형태의 광 이오나이저(1)의 사시도이며, 도 2 는 제어 장치(500)가 연결된 상태의 본 발명의 일 실시형태의 광 이오나이저(1)의 구성을 나타내는 도면이다.1 is a perspective view of a photo ionizer 1 according to an embodiment of the present invention, and FIG. 2 is a view showing the configuration of the photo ionizer 1 according to an embodiment of the present invention in a state in which a control device 500 is connected. to be.
본 발명의 일 실시형태의 광 이오나이저(1)는 제전용 전자기파를 조사하는 이오나이저 유닛(100)과 이오나이저 유닛(100)에 전원을 공급하도록 구성되는 몸체(200) 및 상기 이오나이저 유닛(100)과 상기 몸체(200)를 연결하는 유닛 케이블(300)을 포함한다.An optical ionizer 1 according to an embodiment of the present invention includes an ionizer unit 100 irradiating electromagnetic waves for static elimination, a body 200 configured to supply power to the ionizer unit 100, and the ionizer unit ( 100) and a unit cable 300 connecting the body 200.
본 발명의 일 실시형태의 광 이오나이저(1)는 몸체(200)가 외부 장치(제어 장치(500))로부터 전원을 공급받아, 몸체(200)에 설치되는 고접압 발생 모듈(210)에 의해 고전압 전원을 생성하고, 상기 유닛 케이블(300)을 통해 상기 이오나이저 유닛(100)에 전원을 공급하며, 고전압 전원을 공급받은 이오나이저 유닛(100)은 조사부(110)에 의해 제전용 전자기파를 생성하여 조사한다.In the optical ionizer 1 according to an embodiment of the present invention, the body 200 receives power from an external device (control device 500), and the high voltage generating module 210 installed in the body 200 generates power. High voltage power is generated, power is supplied to the ionizer unit 100 through the unit cable 300, and the ionizer unit 100 receiving the high voltage power generates electromagnetic waves for static elimination by the irradiation unit 110 to investigate
이하, 각 구성에 대해서 상세히 설명한다.Hereinafter, each configuration will be described in detail.
본 발명의 제1 실시형태의 상기 이오나이저 유닛(100)을 도 3 내지 도 6를 참조하여 상세히 설명한다.The ionizer unit 100 of the first embodiment of the present invention will be described in detail with reference to FIGS. 3 to 6 .
도 3은 본 발명의 제1 실시형태의 이오나이저 유닛(100)과 유닛 케이블(300)과 접속구(400)가 결합된 형태를 보여주는 사시도이며, 도 4 는 본 발명의 제1 실시형태의 이오나이저 유닛(100)의 분해 사시도이고, 도 5 는 본 발명의 제1 실시형태의 이오나이저 유닛(100)의 단면을 보여주는 도면이고, 도 6 은 본 발명의 일 실시형태의 회로 기판(150)의 앞면(도 6의 (a))과 뒷면(도 6의 (b))을 나타내는 도면이다.3 is a perspective view showing a combination of an ionizer unit 100, a unit cable 300, and a connector 400 according to the first embodiment of the present invention, and FIG. 4 is an ionizer according to the first embodiment of the present invention It is an exploded perspective view of the unit 100, Figure 5 is a view showing a cross section of the ionizer unit 100 of the first embodiment of the present invention, Figure 6 is a front side of the circuit board 150 of one embodiment of the present invention It is a view showing (Fig. 6 (a)) and the back (Fig. 6 (b)).
본 발명의 제1 실시형태의 이오나이저 유닛(100)은 상기 몸체(200)에 상기 유닛 케이블(300)에 의해 연결되며, 제전용 전자기파를 조사하는 조사부(110)가 복수개 설치되며, 복수개의 조사부(110)는 전기적으로 직렬로 연결되도록 구성된다. 도 3 내지 도 5에서 2개의 조사부(110)가 설치되는 예시적인 것이며, 3개 이상의 조사부(110)가 설치되어도 된다.The ionizer unit 100 according to the first embodiment of the present invention is connected to the body 200 by the unit cable 300, a plurality of irradiation units 110 for irradiating electromagnetic waves for static elimination are installed, and a plurality of irradiation units (110) is configured to be electrically connected in series. In FIGS. 3 to 5, two irradiation units 110 are installed, and three or more irradiation units 110 may be installed.
상기 조사부(110)는 제전용 전자기파를 생성하여 조사하는 수단이며, 제전용 전자기파는 제전할 수 있는 전자기파라면 특별히 제한되지 않으나, 일반적으로 연엑스선을 생성하여 조사한다.The irradiation unit 110 is a means for generating and irradiating electromagnetic waves for static elimination. The electromagnetic waves for static elimination are not particularly limited as long as they are electromagnetic waves capable of static elimination, but in general, soft X-rays are generated and irradiated.
엑스선(X-ray)은 가시광선 파장의 약 1/1000에 해당하는 전자기파로서, 전자가 핵과 충돌할때 빠른 감속에 의해 생기거나 원자내의 깊은 곳의 빈 궤도가 전자를 포획할 때 발생한다. X선은 일반적으로 물질 투과성에 따라 연엑스선(연X선)과 경엑스선(경X선)으로 구분되는 데, 얇은 공기 층에 의해서도 쉽게 흡수되는 투과성이 낮은 방사선을 연엑스선이라고 하고, 륀트겐 등에 사용되는 투과성이 높은 방사선을 경엑스선이라 한다. 연엑스선의 에너지는 경엑스선에 비하여 수십분의 1 정도로 낮고 직접조사에 의한 영향 또한 훨씬 적다. 연엑스선은 파장은 1 ~ 1000Å이며, 에너지는 1~10keV 정도로서 정전기 제거용으로 사용된다.X-rays are electromagnetic waves corresponding to about 1/1000 of the wavelength of visible light, and are produced by rapid deceleration when electrons collide with nuclei or when empty orbits deep in atoms trap electrons. X-rays are generally classified into soft X-rays (soft X-rays) and hard X-rays (hard X-rays) according to material permeability. Radiation with high penetrability used is called hard X-ray. The energy of soft X-rays is as low as one tenth of that of hard X-rays, and the effect of direct irradiation is much less. Soft X-rays have a wavelength of 1 to 1000 Å and an energy of 1 to 10 keV, and are used to remove static electricity.
본 발명의 실시형태에 있어서, 상기 조사부(110)로서 연엑스선을 발생하도록 구성되는 연엑스선 튜브가 사용될 수 있으며, 연엑스선 튜브는 기본적으로 유리 또는 세라믹 재질의 튜브 몸체와, 전자를 방출하는 필라멘트와, 전자를 집속하는 집속관과, 전자가 충돌하여 연엑스선을 방사하는 타겟창에 의해 구성된다.In an embodiment of the present invention, a soft X-ray tube configured to generate soft X-rays may be used as the irradiation unit 110, and the soft X-ray tube basically includes a tube body made of glass or ceramic, a filament that emits electrons, and , It is composed of a focusing tube for focusing electrons and a target window for emitting soft X-rays when electrons collide with each other.
또한, 외부로 2개의 단자(111)가 노출되어 상기 몸체(200)에 설치되는 고전압 발생 모듈(210)로부터 상기 유닛 케이블(300)을 통해 수kV ~ 수십kV의 고전압이 인가될 수 있다.In addition, a high voltage of several kV to several tens of kV may be applied from the high voltage generating module 210 installed on the body 200 with two terminals 111 exposed to the outside through the unit cable 300 .
타겟창은 일례로서 베릴륨(Be) 재질로 이루어질 수 있으며, 내면에 필라멘트로부터 방출된 전자가 충돌하면 엑스선을 발생하는 타겟물질이 도포될 수 있다. 또한, 타겟물질은 베릴륨 창에 0.5㎛ 내지 1㎛의 두께로 도포될 수 있으며, 그 소재는 금(Au) 또는 텅스턴(W)일 수 있다.The target window may be made of a beryllium (Be) material, for example, and a target material that generates X-rays when electrons emitted from the filament collide with the inner surface thereof may be applied. In addition, the target material may be applied to the beryllium window in a thickness of 0.5 μm to 1 μm, and the material may be gold (Au) or tungsten (W).
본 발명의 제1 실시형태의 이오나이저 유닛(100)은 복수개의 상기 조사부(110), 케이스(130), 회로기판(150) 및 케이블 접속구(160)를 포함한다.The ionizer unit 100 according to the first embodiment of the present invention includes a plurality of irradiation units 110, a case 130, a circuit board 150, and a cable connector 160.
상기 케이스(130)는 제1 하우징(131)과 제2 하우징(132)에 의해 구성되며, 제1 하우징(131)과 제2 하우징(132)이 결합하여 내부에 공간부가 형성된다. 제1 하우징(131)과 제2 하우징(132)은 하우징 결합 볼트(140)에 의해 결합된다. The case 130 is constituted by the first housing 131 and the second housing 132, and the first housing 131 and the second housing 132 are coupled to form a space inside. The first housing 131 and the second housing 132 are coupled by a housing coupling bolt 140 .
제1 하우징(131)과 제2 하우징(132)은 모두 도전성을 가진 금속재로 이루어 질 수 있으며, 제1 하우징(131)만 도전성을 가진 금속재로 이루어질 수도 있다.Both the first housing 131 and the second housing 132 may be made of a conductive metal material, and only the first housing 131 may be made of a conductive metal material.
제1 하우징(131)에는 상기 제2 하우징(132)과 결합되는 측의 반대측 면에 복수개의 조사부(110, 예를 들어, 연엑스선 튜브)가 장착되기 위한 조사부 장착 구멍(133)이 복수개 형성된다. 복수의 조사부 장착 구멍(133)은 서로 인접하는 조사부(110)가 소정 간격을 가지고 장착될 수 있도록 형성된다. A plurality of irradiation unit mounting holes 133 for mounting a plurality of irradiation units 110 (eg, soft X-ray tubes) are formed on a surface of the first housing 131 opposite to the side coupled to the second housing 132. . The plurality of irradiation unit mounting holes 133 are formed so that adjacent irradiation units 110 can be mounted at a predetermined interval.
복수의 조사부(110)는 동일한 방향으로 전자기파를 조사하도록 상기 제1 하우징(131)에 결합되며(예를 들어, 조사부(110)가 원통 형상의 연엑스선 튜브인 경우, 연엑스선 튜브의 중심축이 서로 평행하도록 결합됨), 상기 간격은 전자기파를 조사 대상물에 조사할 때 전자기파의 조사 영역이 중첩되도록 소정값 이하로 설정될 수 있다. 상기 간격은 바람직하게는 50㎜ 이하로 설정될 수 있으며, 상기 간격은 조사부 장착 구멍(133)의 중심부 사이의 거리를 의미한다.The plurality of irradiation units 110 are coupled to the first housing 131 to radiate electromagnetic waves in the same direction (for example, when the irradiation unit 110 is a cylindrical soft X-ray tube, the central axis of the soft X-ray tube is coupled to be parallel to each other), the interval may be set to a predetermined value or less so that the irradiation area of the electromagnetic wave overlaps when the electromagnetic wave is irradiated to the object to be irradiated. The interval may be preferably set to 50 mm or less, and the interval refers to a distance between centers of the irradiation unit mounting holes 133.
상기 제1 하우징(131)의 조사부 장착 구멍(133)에 조사부(110)가 장착되고, 조사부(110)로부터 전자기파가 통과하는 관통구멍(121)을 갖는 조사부 고정판(120)이 상기 조사부(110)의 일부를 덮도록 고정 볼트(122)에 의해 상기 제1 하우징(131)에 결합된다. 상기와 같은 구성에 의해 조사부(110)의 타겟창이 상기 제1 하우징(131)과 전기적으로 접속하게 되며, 후술하는 바와 같이 제1 하우징(131)이 접지됨에 따라, 상기 조사부(110)의 타겟창도 함께 접지될 수 있다.The irradiation unit 110 is mounted in the irradiation unit mounting hole 133 of the first housing 131, and the irradiation unit fixing plate 120 having a through hole 121 through which electromagnetic waves pass from the irradiation unit 110 is the irradiation unit 110. It is coupled to the first housing 131 by a fixing bolt 122 to cover a part of the. With the above configuration, the target window of the irradiation unit 110 is electrically connected to the first housing 131, and as described later, as the first housing 131 is grounded, the target window of the irradiation unit 110 also can be grounded together.
상기 제1 하우징(131)에 상기 조사부(110)가 결합되면 상기 제1 하우징(131) 내측에 조사부 마다 2개의 단자(111)가 노출되며, 노출된 단자(111)는 상기 조사부(110)를 전기적으로 직렬로 연결하도록 회로 패턴이 형성되는 회로 기판(150)에 전기적으로 접속된다. 상기 회로 기판(150)에는 상기 유닛 케이블(300)에 포함되는 2개의 전원공급선이 접속되어 상기 조사부(110)에 전원이 공급된다. When the irradiation unit 110 is coupled to the first housing 131, two terminals 111 are exposed for each irradiation unit inside the first housing 131, and the exposed terminals 111 are connected to the irradiation unit 110. It is electrically connected to the circuit board 150 on which the circuit pattern is formed so as to electrically connect in series. Two power supply lines included in the unit cable 300 are connected to the circuit board 150 to supply power to the irradiation unit 110 .
상기 회로 기판(150)의 상세한 구성에 대해서는 도 6를 참조하여 설명한다.A detailed configuration of the circuit board 150 will be described with reference to FIG. 6 .
도 6의 (a)는 회로 기판(150)의 앞면을 나타내며, (b)는 회로 기판(150)의 뒷면을 나타낸다. 회로 기판(150)은 예를 들어 PCB(Printed Circuit Board) 기판일 수 있다.6 (a) shows the front side of the circuit board 150, and (b) shows the back side of the circuit board 150. The circuit board 150 may be, for example, a Printed Circuit Board (PCB) board.
상기 회로 기판(150)에는 좌측 및 우측(도 6의 (a)를 기준으로 함)에 각각 2개의 관통홀(151)이 형성되며, 좌측의 2개의 관통홀(151)에 하나의 조사부(110)에서 노출되는 2개의 단자(111)가 상기 회로 기판(150)의 뒷면측으로부터 삽입되어 납땜 방식에 의해 결합되고, 우측의 2개의 관통홀(151)에 또 다른 하나의 조사부(110)에서 노출되는 2개의 단자(111)가 상기 회로 기판(150)의 뒷면측으로부터 삽입되어 납땜 방식에 의해 결합된다. The circuit board 150 has two through-holes 151 respectively formed on the left and right sides (referring to FIG. 6(a) ), and one irradiation unit 110 is formed in the two through-holes 151 on the left side. ) The two terminals 111 exposed from the circuit board 150 are inserted from the back side of the circuit board 150 and joined by a soldering method, and exposed from another irradiation part 110 to the two through-holes 151 on the right side. Two terminals 111 are inserted from the rear side of the circuit board 150 and joined by a soldering method.
또한, 상기 회로 기판(150)에는 좌측의 1개의 관통홀(151)과 우측의 1개의 관통홀(151)이 전기적으로 연결되도록 제1 패턴 라인(154)이 형성되어 있다. 도 6에서는 도면상 좌하측 관통홀(151)과 우하측 관통홀(151)이 제1 패턴라인(154)에 연결되어 있으나, 이는 일 실시형태이며 좌측의 관통홀(151) 중 하나와 우측의 관통홀 중 하나가 연결되는 형태라면 특별히 제한되지 않는다.In addition, a first pattern line 154 is formed in the circuit board 150 so that one through hole 151 on the left side and one through hole 151 on the right side are electrically connected. In FIG. 6 , the lower left through hole 151 and the lower right through hole 151 are connected to the first pattern line 154 in the drawing, but this is an embodiment and one of the through holes 151 on the left side and one of the through holes 151 on the right side are connected. It is not particularly limited as long as one of the through holes is connected.
상기 제1 패턴 라인(154)에 의해 연결되어 있지 않은 좌우측의 관통홀(151)은 각각 회로 기판(150)의 앞면에 형성되는 제1 전원 패턴(152)과 제2 전원 패턴(153)에 전기적으로 접속되며, 제1 전원 패턴(152)과 제2 전원 패턴(153)은 상기 유닛 케이블(300)의 2개의 전원공급선에 각각 납땜 방식에 의해 접속된다.Left and right through-holes 151 not connected by the first pattern line 154 are electrically connected to the first power pattern 152 and the second power pattern 153 formed on the front surface of the circuit board 150, respectively. , and the first power supply pattern 152 and the second power supply pattern 153 are respectively connected to the two power supply lines of the unit cable 300 by a soldering method.
위와 같은 구성에 의해 예를 들어 제1 전원 패턴(152)으로부터 공급된 전류가 제1 패턴 라인(154)을 거쳐 제2 전원 패턴(153)으로 흐르게 되며(전류가 역방향으로 흐르도록 구성될 수도 있음은 당연하다), 회로 기판(150)에 의해 복수개의 상기 조사부(110)는 전기적으로 직렬로 연결된다. By the above configuration, for example, the current supplied from the first power supply pattern 152 flows through the first pattern line 154 to the second power supply pattern 153 (the current may be configured to flow in the reverse direction) is natural), the plurality of irradiation units 110 are electrically connected in series by the circuit board 150 .
본 발명의 일 실시형태는, 회로 기판(150)을 이용하여 복수개의 조사부(110)를 전기적으로 직렬로 연결함에 따라, 작업성을 향상시킬 수 있다.In one embodiment of the present invention, workability can be improved by electrically connecting the plurality of irradiation units 110 in series using the circuit board 150 .
다만, 회로 기판(150)을 이용하여 복수개의 조사부(110)를 전기적으로 직렬로 연결하는 구성은 본 발명의 일 실시형태일 뿐이며, 복수개의 조사부(110)를 전기적으로 직렬로 연결하는 구조라면 와이어 연결 방식, 커넥터 연결 방식 등과 같이 다양한 방식이 채택될 수 있으며, 특별히 제한되지 않는다.However, the configuration of electrically connecting the plurality of irradiation units 110 in series using the circuit board 150 is only one embodiment of the present invention, and if the structure of electrically connecting the plurality of irradiation units 110 in series, a wire Various methods may be adopted, such as a connection method, a connector connection method, and the like, and are not particularly limited.
본 발명은 복수의 조사부(110)가 전기적으로 직렬로 연결됨에 따라, 복수의 조사부(110)에 동일 전류가 흐르고 조건에서, 병렬로 연결되는 구성에 비해, 전체 소비 전류량을 저감할 수 있고. 또한, 전체 소비 전류량의 저감에 따라, 상기 몸체(200)에 구비되는 고전압 발생 모듈(210)의 비대화를 억제할 수 있다.According to the present invention, as the plurality of irradiation units 110 are electrically connected in series, the total amount of current consumption can be reduced compared to a configuration in which the plurality of irradiation units 110 are connected in parallel under the condition that the same current flows through them. In addition, as the total amount of current consumption is reduced, hypertrophy of the high voltage generating module 210 provided in the body 200 can be suppressed.
제1 하우징(131)의 내측에는 접지 볼트(134)가 나사결합되어 있다. 상기 접지 볼트(134)는 이오나이저 유닛(100)에 접속되는 유닛 케이블(300)의 접지선을 상기 제1 하우징(131)에 고정시켜, 상기 제1 하우징(131)을 접지시키는 역할을 하며, 상술한 바와 같이, 상기 제1 하우징(131)에 결합하는 상기 조사부(110)의 타겟창을 접지상태로 할 수 있다.A ground bolt 134 is screwed into the first housing 131 . The ground bolt 134 serves to ground the first housing 131 by fixing the ground wire of the unit cable 300 connected to the ionizer unit 100 to the first housing 131, As described above, the target window of the irradiation unit 110 coupled to the first housing 131 may be grounded.
제1 하우징(131)의 외측면에는 외부로 열을 효과적으로 방열하기 위한 히트 싱크 구조가 형성될 수 있다. 일 실시예로서 도 3에 도시된 바와 같이 제1 하우징(131)의 외측면에 외부공기와의 접촉하는 표면적을 넓히는 형태의 요철 구조(137)을 형성할 수 있다. 다만, 이러한 요철 구조(137)는 일 실시형태일 뿐이고 열을 효과적을 방열할 수 있는 구조라면 특별히 제한되지 않는다. A heat sink structure for effectively dissipating heat to the outside may be formed on an outer surface of the first housing 131 . As one embodiment, as shown in FIG. 3 , a concavo-convex structure 137 may be formed on an outer surface of the first housing 131 to increase a surface area in contact with external air. However, the concavo-convex structure 137 is only one embodiment and is not particularly limited as long as it is a structure that can effectively dissipate heat.
또한, 히트 싱크 구조는 제1 하우징(131)과 제2 하우징(132) 각각 또는 어느 일방에 형성될 수도 있다. In addition, the heat sink structure may be formed on each or any one of the first housing 131 and the second housing 132 .
이러한 히트 싱크 구조에 의해 이오나이저 유닛(100)에서 발생하는 열을 효과적으로 방열할 수 있고, 작은 부피의 케이스(130)에 복수의 조사부(110)를 인접하여 설치함에 따른 이오나이저 유닛(100)의 과도한 온도 상승을 억제할 수 있다. The heat generated in the ionizer unit 100 can be effectively dissipated by this heat sink structure, and the ionizer unit 100 can be Excessive temperature rise can be suppressed.
상기 제2 하우징(132)의 상기 제1 하우징(131)과 결합되는 측의 반대측 면에는 케이스 내부에 절연 물질을 주입하기 위한 주입 구멍(135)과 케이블 접속구(160)가 결합되는 케이블 결합 구멍(136)이 형성된다. On the surface of the second housing 132 opposite to the side coupled to the first housing 131, an injection hole 135 for injecting an insulating material into the case and a cable coupling hole in which the cable connector 160 are coupled ( 136) is formed.
케이블 결합 구멍(136)에는 케이블 접속구(160)가 결합되고, 케이블 접속구(160)를 통해 유닛 케이블(300)이 제2 하우징(132)의 내측으로 도입된다. 상술한 바와 같이, 도입된 유닛 케이블(300)에 포함되는 2개의 전원공급선은 각각 회로 기판의 제1 전원 패턴(152)과 제2 전원 패턴(153)에 접속되며, 접지선은 접지 볼트(134)에 의해 제1 하우징(131)에 결합된다.The cable connector 160 is coupled to the cable coupling hole 136 , and the unit cable 300 is introduced into the second housing 132 through the cable connector 160 . As described above, the two power supply lines included in the introduced unit cable 300 are connected to the first power supply pattern 152 and the second power supply pattern 153 of the circuit board, respectively, and the ground line is a ground bolt 134 It is coupled to the first housing 131 by.
상기 유닛 케이블(300)의 2개의 전원 공급선과 접지선이 각각 상기 회로 기판(150)과 상기 제1 하우징(131)에 결합된 상태에서 상기 제2 하우징(132)과 상기 제1 하우징(131)이 하우징 결합 볼트(140)에 의해 결합된다. 상기 제1 하우징(131)과 제2 하우징(132)이 결합됨에 따라, 케이스(130) 내부에 공간부가 형성되며, 공간부에 회로 기판(150)이 배치되어 상기 복수의 조사부(110)를 전기적으로 직렬로 연결한다.The second housing 132 and the first housing 131 are connected to the circuit board 150 and the first housing 131 when the two power supply lines and the ground line of the unit cable 300 are coupled to each other. They are coupled by housing coupling bolts 140. As the first housing 131 and the second housing 132 are coupled, a space is formed inside the case 130, and a circuit board 150 is disposed in the space to electrically connect the plurality of irradiation units 110. connect in series with
상기 제1 하우징(131)과 상기 제2 하우징(132)을 상기 하우징 결합 볼트(140)에 의해 결합한 후, 상기 주입 구멍(135)을 통해 절연 물질을 케이스(130) 내부의 공간부에 주입하여 몰딩한다. 케이스(130) 내부의 공간부에 절연 물질이 채워쳐 몰딩됨에 따라, 케이스(130) 내부에서 고전압 방전 현상에 의해 단락이 발생하는 것을 방지할 수 있다.After combining the first housing 131 and the second housing 132 by the housing coupling bolt 140, an insulating material is injected into the space inside the case 130 through the injection hole 135 to to mold As the insulating material is filled and molded into the space inside the case 130 , it is possible to prevent a short circuit from occurring due to a high voltage discharge phenomenon inside the case 130 .
상기 절연 물질을 케이스(130) 내부의 공간부에 주입하여 몰딩한 후, 상기 주입 구멍(135)을 덮도록 마감 플레이트(170)를 상기 제2 하우징(132)에 결합하여 상기 주입 구멍(135)을 폐쇄한다. 상기 마감 플레이트(170)에는 상기 케이블 접속구(160)가 통과할 수 있도록 관통구멍이 형성되며, 상기 마감 플레이트(170)는 별도의 마감 플레이트 결합 볼트(171)에 의해 상기 제2 하우징(132)에 결합될 수 있다.After the insulating material is injected into the space inside the case 130 and molded, a closing plate 170 is coupled to the second housing 132 to cover the injection hole 135, thereby forming the injection hole 135. close A through hole is formed in the closing plate 170 so that the cable connector 160 can pass therethrough, and the closing plate 170 is attached to the second housing 132 by a separate closing plate coupling bolt 171. can be combined
상기와 같은 본 발명의 제1 실시형태의 이오나이저 유닛(100)은 고전압 발생 모듈(210)을 구비하는 몸체(200)와 유닛 케이블(300)에 의해 연결되도록 구성되기 때문에 이오아이저 유닛(100) 자체는 별도의 고전압 발생을 위한 구성을 구비하고 있지 않으므로, 부피가 최소화된다. 따라서, 본 발명의 제1 실시형태의 이오나이저 유닛(100)을 협소한 장소나 접근이 어려운 장소에 용이하게 설치할 수 있다. Since the ionizer unit 100 of the first embodiment of the present invention as described above is configured to be connected to the body 200 having the high voltage generating module 210 by the unit cable 300, the ionizer unit 100 ) itself does not have a configuration for generating a separate high voltage, so the volume is minimized. Therefore, the ionizer unit 100 of the first embodiment of the present invention can be easily installed in a narrow place or a place where access is difficult.
나아가, 복수개의 조사부(110)가 대상물에 전자기파를 조사할 때 조사 영역이 겹치도록 소정 간격을 가지고 상기 이오나이저 유닛(100)에 장착됨으로써, 부피를 작게하면서 동시에 고밀도의 제전용 전자기파(예를 들어, 연엑스선)를 생성 및 조사하여 제전 효율을 극대화할 수 있다.Furthermore, when the plurality of irradiators 110 irradiate electromagnetic waves to an object, they are attached to the ionizer unit 100 at predetermined intervals so that the irradiation areas overlap, thereby reducing the volume and at the same time providing high-density electromagnetic waves for static elimination (for example, , Soft X-rays) can be generated and irradiated to maximize static elimination efficiency.
본 발명의 제2 실시형태의 이오나이저 유닛(100)에 대해 도 7 및 도 8을 참조하여 설명한다.An ionizer unit 100 according to a second embodiment of the present invention will be described with reference to FIGS. 7 and 8 .
상기 제1 실시형태의 이오나이저 유닛(100)은 도 3 및 도 4에 도시된 바와 같이 복수개의 조사부(110)의 조사 방향이 상기 케이스(130)에 상기 유닛 케이블(300)이 접속되는 방향과 동일하기 때문에, 상기 유닛 케이블(300)이 도입되는 방향과 직교하는 방향으로 전자기파를 조사할 필요가 있는 장소에 설치하는 것이 용이하지 않을 수 있다.In the ionizer unit 100 of the first embodiment, as shown in FIGS. 3 and 4, the irradiation direction of the plurality of irradiation units 110 is the same as the direction in which the unit cable 300 is connected to the case 130. Since they are the same, it may not be easy to install them in a place where electromagnetic waves need to be irradiated in a direction orthogonal to the direction in which the unit cable 300 is introduced.
도 7 및 도 8의 본 발명의 제2 실시형태의 이오나이저 유닛(100)은 복수개의 조사부(110)의 조사 방향과 상기 케이스(130)에 상기 유닛 케이블(300)이 접속되는 방향이 직교하도록 구성된다.In the ionizer unit 100 of the second embodiment of the present invention shown in FIGS. 7 and 8 , the irradiation direction of the plurality of irradiation units 110 and the direction in which the unit cable 300 is connected to the case 130 are perpendicular to each other. It consists of
구체적으로 제2 실시형태의 이오나이저 유닛(100)은 제1 하우징(131)에 결합되는 조사부(110)의 조사 방향과 상기 케이스(130)에 유닛 케이블(300)이 결합하는 방향이 직교하도록, 제2 하우징(132)의 일측 옆면에 케이블 접속구(160)가 결합하는 케이블 결합 구멍(136)이 형성된다. Specifically, in the ionizer unit 100 of the second embodiment, the irradiation direction of the irradiation unit 110 coupled to the first housing 131 and the direction coupled to the unit cable 300 to the case 130 are orthogonal, A cable coupling hole 136 to which the cable connector 160 is coupled is formed on one side surface of the second housing 132 .
이 경우, 제2 하우징(132)의 케이블 결합 구멍(136)이 형성되는 상기 일측 옆면의 두께가 상기 케이블 접속구(160)를 견고하게 고정하기에 충분하지 않을 수 있으므로, 상기 옆면에 외측으로 소정 높이로 돌출하는 돌출부를 형성하고, 돌출부에 상기 케이블 결합 구멍(136)을 형성하여도 된다.In this case, since the thickness of the side surface of the one side where the cable coupling hole 136 of the second housing 132 is formed may not be sufficient to firmly fix the cable connector 160, the side surface has a predetermined height outward. A protruding portion may be formed, and the cable coupling hole 136 may be formed in the protruding portion.
또한, 제2 실시형태의 이오나이저 유닛(100)에 있어서는, 상기 제2 하우징(132)의 케이블 결합 구멍(136)이 형성되는 면의 반대측이 개방되도록 구성할 수 있으며, 상기 제1 하우징(131)과 상기 제2 하우징(132)을 결합한 후 상기 제2 하우징(132)의 개방된 측으로 절연 물질을 주입하고, 마감 플레이트(170)에 의해 상기 제2 하우징(132)의 개방된 측을 덮어 폐쇄하도록 구성될 수 있다. In addition, in the ionizer unit 100 of the second embodiment, the opposite side of the surface where the cable coupling hole 136 of the second housing 132 is formed can be configured to be open, and the first housing 131 ) and the second housing 132 are coupled, an insulating material is injected into the open side of the second housing 132, and the open side of the second housing 132 is covered and closed by the closing plate 170. can be configured to
다만 이는 일 실시예일 뿐이며, 상기 제1 실시형태의 이오니아저 유닛(100)과 동일하게 제2 하우징(132)의 일측면에 별도의 주입 구멍을 형성하여 절연 물질을 주입할 수도 있다. 이 경우, 제1 실시형태와 동일하게 별도의 마감 플레이트에 의해 주입 구멍을 폐쇄하여도 된다. However, this is only an example, and an insulating material may be injected by forming a separate injection hole on one side of the second housing 132 in the same way as the ionizer unit 100 of the first embodiment. In this case, the injection hole may be closed with another closing plate similarly to the first embodiment.
본 발명의 제2 실시형태의 이오나이저 유닛(100)은, 이오나이저 유닛(100)에 유닛 케이블(300)이 결합하는 방향과 전자기파의 조사 방향이 직교함에 따라, 유닛 케이블(300)이 도입되는 방향과 전자기파를 조사하는 방향이 직교하는 장소에도 이오나이저 유닛(100)을 용이하게 설치할 수 있다.In the ionizer unit 100 according to the second embodiment of the present invention, the unit cable 300 is introduced as the direction in which the unit cable 300 is coupled to the ionizer unit 100 and the irradiation direction of electromagnetic waves are orthogonal The ionizer unit 100 can be easily installed even in a place where the direction and the direction of irradiating electromagnetic waves are orthogonal.
제1 실시형태의 이오나이저 유닛(100)과 제2 실시형태의 이오나이저 유닛(100)은 이오나이저 유닛(100)이 설치 장소에 따라, 적절히 선택될 수 있으며, 하나의 몸체(200)에 제1 실시형태의 이오나이저 유닛과 제2 실시형태의 이오나이저 유닛이 함께 접속될 수도 있다.The ionizer unit 100 of the first embodiment and the ionizer unit 100 of the second embodiment can be appropriately selected according to the installation location of the ionizer unit 100, and are provided in one body 200. The ionizer unit of one embodiment and the ionizer unit of the second embodiment may be connected together.
다음으로, 도 9 및 도 10 를 참조하여 본 발명의 일 실시형태에 따른, 몸체(200)에 대해 설명한다.Next, the body 200 according to an embodiment of the present invention will be described with reference to FIGS. 9 and 10 .
상기 몸체(200)는 바 형상의 바디 케이스(220)를 구비하고, 내부에 상기 이오나이저 유닛(100)에 공급하는 전원을 발생하는 고전압 발생 모듈(210)이 설치된다. 도 9 및 도 10에서는 상기 바디 케이스(220)가 바 형상으로 도시되어 있으나, 이는 일 실시형태일 뿐이며 상기 바디 케이스(220)의 형상은 특별히 제한되지 않는다.The body 200 has a bar-shaped body case 220, and a high voltage generating module 210 for generating power supplied to the ionizer unit 100 is installed therein. 9 and 10, the body case 220 is shown in a bar shape, but this is only one embodiment and the shape of the body case 220 is not particularly limited.
상기 바디 케이스(220)의 일측면에는 상기 유닛 케이블(300)이 결합할 수 있는 체결 구멍(221)이 형성된다. 상기 체결 구멍(221)에는 유닛 케이블(300)이 직접 삽입되어 유닛 케이블(300)과 몸체(200)가 결합될 수 있으며, 유닛 케이블(300)에 결합되는 접속구(400)가 삽입되어 유닛 케이블(300)과 몸체(200)가 결합될 수도 있다. 상기 체결 구멍(221)은 상기 유닛 케이블(300)이 접속되는 방식에 따라, 다양한 형상일 수 있다.A fastening hole 221 to which the unit cable 300 can be coupled is formed on one side of the body case 220 . The unit cable 300 can be directly inserted into the fastening hole 221 so that the unit cable 300 and the body 200 can be coupled, and the connector 400 coupled to the unit cable 300 is inserted so that the unit cable ( 300) and the body 200 may be combined. The fastening hole 221 may have various shapes depending on how the unit cable 300 is connected.
상기 몸체(200)에는 복수개의 이오나이저 유닛(100)이 연결될 수 있으며, 이 경우 상기 바디 케이스(220)에는 연결되는 이오나이저 유닛(100)의 개수 만큼의 체결 구멍(221)이 형성될 수 있다. 또한, 실시형태에 따라 하나의 체결 구멍(221)에 복수개의 이오나이저 유닛(100)이 연결되어도 된다.A plurality of ionizer units 100 may be connected to the body 200, and in this case, as many fastening holes 221 as the number of ionizer units 100 connected may be formed in the body case 220. . Also, depending on the embodiment, a plurality of ionizer units 100 may be connected to one fastening hole 221 .
상기 몸체(200)에는 상기 고전압 발생 모듈(210)에 전원을 공급하고 상기 고전압 발생 모듈(210)과 상기 이오나이저 유닛(100)을 제어하는 제어 장치(500)가 연결될 수 있다. 상기 제어 장치(500)는 별도의 제어 케이블(510)을 통해 상기 몸체에 접속되며, 상기 제어 케이블(510)은 상기 제어 장치(500)와 상기 몸체(200)에 탈착 가능하게 결합될 수 있다. A control device 500 supplying power to the high voltage generating module 210 and controlling the high voltage generating module 210 and the ionizer unit 100 may be connected to the body 200 . The control device 500 is connected to the body through a separate control cable 510, and the control cable 510 can be detachably coupled to the control device 500 and the body 200.
또한, 실시형태에 따라서는 상기 제어 장치(500)는 상기 몸체(200)와 일체로 형성될 수 있다.Also, depending on the embodiment, the control device 500 may be integrally formed with the body 200 .
상기 고전압 발생 모듈(210)은 상기 이오나이저 유닛의 개수 만큼 상기 바디 케이스(220) 내부에 설치된다. 다만 본 발명은 이에 한정되지 않으며 실시형태에 따라서는 하나의 고전압 발생 모듈(210)이 복수개의 이오나이저 유닛(100)에 전원을 공급하도록 구성될 수 있다.The high voltage generating module 210 is installed inside the body case 220 as many as the number of ionizer units. However, the present invention is not limited thereto, and one high voltage generating module 210 may be configured to supply power to a plurality of ionizer units 100 according to embodiments.
또한, 상기 몸체(200)는 다른 몸체(200)와 케이블(몸체 연결 케이블(250)) 등에 의해 연결되도록 구성될 수 있다.In addition, the body 200 may be configured to be connected to another body 200 by a cable (body connection cable 250) or the like.
구체적으로, 도 10과 같이, 상기 몸체(200)의 길이방향 일측 단부와 다른 몸체(200)의 길이 방향 일측 단부가 몸체 연결 케이블(250)에 통해 연결될 수 있으며, 상기 몸체 연결 케이블(250)은 몸체에 탈착이 가능하도록 구성될 수 있다. 이러한 구성에 의해 하나의 제어 장치(500)에 의해 복수개의 몸체(200)를 제어할 수 있다. Specifically, as shown in FIG. 10, one end in the longitudinal direction of the body 200 and one end in the longitudinal direction of the other body 200 may be connected through a body connection cable 250, and the body connection cable 250 It may be configured to be detachable from the body. With this configuration, a plurality of bodies 200 can be controlled by one control device 500 .
다음으로 도 11 및 도 12을 참조하여, 본 발명의 일 실시형태의 유닛 케이블(300)에 대해 상세히 설명한다.Next, with reference to FIGS. 11 and 12, a unit cable 300 according to an embodiment of the present invention will be described in detail.
상기 유닛 케이블(300)은 상기 이오나이저 유닛(100)과 상기 몸체(200)를 연결하도록 구성되어 있다. 또한, 상기 유니 케이블(300)은 2개의 전원공급선과 1개의 접지선을 포함하고, 2개의 전원공급선과 1개의 접지선은 절연재에 의해 함께 피복되어 하나의 유닛 케이블 선을 이룬다. 또한, 2개의 전원공급선과 1개의 접지선은 각각 별도의 절연재에 의해 피복되어 있다.The unit cable 300 is configured to connect the ionizer unit 100 and the body 200 . In addition, the uni-cable 300 includes two power supply lines and one ground line, and the two power supply lines and one ground line are coated together with an insulating material to form one unit cable line. In addition, two power supply lines and one ground line are each covered with a separate insulating material.
상술한 바와 같이, 본 발명의 일 실시형태에 있어서, 상기 2개의 전원공급선이 상기 이오나이저 유닛(100)의 회로 기판(150)에 납땜 방식에 의해 결합되고, 상기 접지선이 접지 볼트(134)에 의해 제1 하우징(131)에 고정됨으로써, 상기 유닛 케이블(300)이 상기 이오나이저 유닛(100)과 전기적으로 결합된다. As described above, in one embodiment of the present invention, the two power supply lines are coupled to the circuit board 150 of the ionizer unit 100 by a soldering method, and the ground line is connected to the ground bolt 134 By being fixed to the first housing 131 by the above, the unit cable 300 is electrically coupled to the ionizer unit 100.
실시형태에 따라서는, 상기 유닛 케이블(300)과 상기 이오나이저 유닛(100)은 탈착 가능하게 접속될 수도 있다. 예를 들면, 상기 유닛 케이블(300)과 상기 이오나이저 유닛(100)에 서로 결합가능한 접속용 커넥터가 각각 형성되어 당해 접속용 커넥터를 서로 탈착하는 형태로 상기 유닛 케이블(300)과 상기 이오나이저 유닛(100)이 탈착될 수 있다. 다만, 이는 일 실시형태일 뿐이며 유닛 케이블(300)과 상기 이오니아저 유닛(100)이 탈착 가능한 구조라면 특별히 제한되지 않는다.Depending on the embodiment, the unit cable 300 and the ionizer unit 100 may be detachably connected. For example, connectors for connection that can be coupled to each other are formed on the unit cable 300 and the ionizer unit 100, so that the connectors for connection are detachable from each other, so that the unit cable 300 and the ionizer unit (100) can be detached. However, this is only one embodiment and is not particularly limited as long as the unit cable 300 and the ionizer unit 100 are detachable structures.
상기 유닛 케이블(300)의 상기 몸체(200)와 결합하는 측 단부에는 상기 몸체(200)에 탈착가능하도록 접속구(400)가 형성될 수 있다. 상기 접속구(400)는 상기 몸체의 바디 케이스(220)에 형성되는 체결 구멍(221)에 일부가 삽입되고, 상기 삽입된 일부에 형성되는 단자 돌기가 상기 몸체(200)의 바디 케이스(220) 내부에 형성되는 단자 홈에 결합함으로써, 상기 유닛 케이블(300)과 상기 몸체(200)가 결합될 수 있다.A connector 400 may be formed at a side end of the unit cable 300 coupled to the body 200 so as to be detachable from the body 200 . A portion of the connector 400 is inserted into a fastening hole 221 formed in the body case 220 of the body, and a terminal protrusion formed on the inserted portion is inside the body case 220 of the body 200. The unit cable 300 and the body 200 can be coupled by being coupled to the terminal groove formed in the body 200 .
도 11 및 도 12에 도시된 바와 같이, 상기 유닛 케이블(300)은 서로 분리 및 결합 가능한 제1 유닛 케이블(310)과 제2 유닛 케이블(320)에 의해 구성될 수 있다. 이 경우, 제1 유닛 케이블(310)의 제2 유닛 케이블측 단부와 제2 유닛 케이블(320)의 제1 유닛 케이블측 단부 중 일방에 돌기형 단자가 형성되고, 타방에 홈형 단자가 형성되어, 상기 돌기형 단자와 상기 홈형 단자가 결합 및 분리됨으로써, 상기 제1 유닛 케이블(310)과 상기 제2 유닛 케이블(320)이 분리 및 결합될 수 있다. 상기 돌기형 단자와 상기 홈형 단자에 의해 상기 제1 유닛 케이블(310)과 상기 제2 유닛 케이블(320)에 각각 포함되는 2개의 전원공급선과 1개의 접지선이 전기적으로 연결되거나 차단될 수 있다. As shown in FIGS. 11 and 12 , the unit cable 300 may be composed of a first unit cable 310 and a second unit cable 320 that can be separated and combined with each other. In this case, a protruding terminal is formed on one of the second unit cable side end of the first unit cable 310 and the first unit cable side end of the second unit cable 320, and a grooved terminal is formed on the other side, When the protruding terminal and the groove-type terminal are coupled and separated, the first unit cable 310 and the second unit cable 320 may be separated and coupled. Two power supply lines and one ground line respectively included in the first unit cable 310 and the second unit cable 320 may be electrically connected or blocked by the protruding terminal and the groove-type terminal.
본 발명은 상기 유닛 케이블(300)을 제1 유닛 케이블(310)과 제2 유닛 케이블(320)로 분리한 상태에서 이오나이저 유닛(100)을 설치 장소에 설치한 후에, 제1 유닛 케이블(310)과 제2 유닛 케이블(320)을 결합하여 이오나이저 유닛에 전원을 공급하는 것이 가능하기 때문에, 긴 케이블을 연결한 상태로는 설치가 곤란한 장소에도 용이하게 이오나이저 유닛(100)을 설치할 수 있다는 장점이 있다.In the present invention, after the ionizer unit 100 is installed in the installation place in a state where the unit cable 300 is separated into the first unit cable 310 and the second unit cable 320, the first unit cable 310 ) and the second unit cable 320 to supply power to the ionizer unit, so that the ionizer unit 100 can be easily installed even in places where it is difficult to install with a long cable connected. There are advantages.
이상에서 대표적인 실시예를 통하여 본 발명에 대하여 상세하게 설명하였으나, 본 발명이 속하는 기술분야에서 통상의 지식을 가진 자는 상술한 실시예에 대하여 본 발명의 범주에서 벗어나지 않는 한도 내에서 다양한 변형이 가능함을 이해할 것이다. 그러므로 본 발명의 권리범위는 설명된 실시예에 국한되어 정해져서는 안 되며, 후술하는 특허청구범위뿐만 아니라 이 특허청구범위와 균등한 것들에 의해 정해져야 한다.Although the present invention has been described in detail through representative examples above, those skilled in the art to which the present invention pertains can make various modifications to the above-described embodiments without departing from the scope of the present invention. will understand Therefore, the scope of the present invention should not be limited to the described embodiments and should not be defined, and should be defined by not only the claims to be described later, but also those equivalent to these claims.

Claims (16)

  1. 제전용 전자기파를 방사하는 복수개의 조사부가 장착되는 이오나이저 유닛과, An ionizer unit equipped with a plurality of irradiators for radiating electromagnetic waves for static elimination;
    상기 이오나이저 유닛에 전원을 공급하도록 구성되는 몸체와, A body configured to supply power to the ionizer unit;
    상기 이오나이저 유닛과 상기 몸체를 연결하도록 구성되는 유닛 케이블을 포함하고, A unit cable configured to connect the ionizer unit and the body,
    상기 복수개의 조사부는 전기적으로 직렬로 연결되어 있는 것을 특징으로 하는 광 이오나이저.The photo ionizer, characterized in that the plurality of irradiation units are electrically connected in series.
  2. 제 1 항에 있어서,According to claim 1,
    상기 복수개의 조사부는 상기 이오나이저 유닛에 설치되는 회로 기판에 전기적으로 접속되며,The plurality of irradiation units are electrically connected to a circuit board installed in the ionizer unit,
    상기 회로기판에는 상기 복수개의 조사부를 전기적으로 직렬로 연결하는 회로 패턴이 형성되어 있는 것을 특징으로 하는 광 이오나이저.The photo ionizer, characterized in that a circuit pattern electrically connecting the plurality of irradiation units in series is formed on the circuit board.
  3. 제 1 항 또는 제 2 항에 있어서,According to claim 1 or 2,
    상기 복수개의 조사부는, 상기 이오나이저 유닛에 상기 케이블이 접속되는 방향과 동일한 방향으로 제전용 전자기파를 방사하도록 상기 이오나이저 유닛에 장착되어 있는 것을 특징으로 하는 광 이오나이저.The photoionizer according to claim 1 , wherein the plurality of irradiation units are mounted on the ionizer unit so as to emit electromagnetic waves for static elimination in the same direction as the direction in which the cable is connected to the ionizer unit.
  4. 제 1 항 또는 제 2 항에 있어서,According to claim 1 or 2,
    상기 복수개의 조사부는, 상기 이오나이저 유닛에 상기 케이블이 접속되는 방향과 직교하는 방향으로 상기 제전용 전자기파를 방사하도록 상기 이오나이저 유닛에 장착되어 있는 것을 특징으로 하는 광 이오나이저.The plurality of irradiation units are mounted on the ionizer unit to radiate the electromagnetic waves for static elimination in a direction orthogonal to a direction in which the cable is connected to the ionizer unit.
  5. 제 1 항 또는 제 2 항에 있어서,According to claim 1 or 2,
    상기 몸체는 복수개의 이오나이저 유닛이 접속되도록 구성되어 있는 것을 특징으로 하는 광 이오나이저 장치.The optical ionizer device according to claim 1, wherein the body is configured such that a plurality of ionizer units are connected.
  6. 제 1 항 또는 제 2 항에 있어서,According to claim 1 or 2,
    상기 유닛 케이블은, 상기 몸체 및 상기 이오나이저 유닛과 탈착 가능하도록 구성되어 있는 것을 특징으로 하는 광 이오나이저.The optical ionizer according to claim 1, wherein the unit cable is detachable from the body and the ionizer unit.
  7. 제 1 항 또는 제 2 항에 있어서,According to claim 1 or 2,
    상기 유닛 케이블의 상기 몸체에 접속되는 측 단부에는 상기 몸체에 결합하도록 구성되는 접속구가 형성되어 있으며,A connector configured to be coupled to the body is formed at a side end of the unit cable connected to the body,
    상기 몸체에는 상기 접속구를 상기 몸체에 체결하기 위해 상기 접속구의 일부가 삽입되도록 개구되는 체결 구멍이 형성되어 있는 것을 특징으로 하는 광 이오나이저.The optical ionizer according to claim 1 , wherein a fastening hole is formed in the body to allow a part of the connecting hole to be inserted in order to fasten the connecting hole to the body.
  8. 제 1 항 또는 제 2 항에 있어서,According to claim 1 or 2,
    상기 유닛 케이블은, 서로 결합 및 분리 가능하도록 구성되는 제1 유닛 케이블과 제2 유닛 케이블에 의해 구성되어 있는 것을 특징으로 하는 광 이오나이저.The optical ionizer, characterized in that the unit cable is composed of a first unit cable and a second unit cable configured to be coupled and separated from each other.
  9. 제 1 항에 있어서,According to claim 1,
    상기 이오나이저 유닛은 상기 복수개의 조사부가 장착되는 케이스를 포함하고,The ionizer unit includes a case in which the plurality of irradiation units are mounted,
    상기 케이스는 제1 하우징과 제2 하우징이 결합하여 내부에 공간부를 형성하도록 구성되며,The case is configured such that the first housing and the second housing are coupled to form a space therein,
    상기 복수개의 조사부는 상기 공간부에서 전기적으로 직렬로 연결되어 있는 것을 특징으로 하는 광 이오나이저.The plurality of irradiation units are electrically connected in series in the space unit.
  10. 제 1 항에 있어서,According to claim 1,
    상기 이오나이저 유닛은 상기 복수개의 조사부가 장착되는 케이스를 포함하고,The ionizer unit includes a case in which the plurality of irradiation units are mounted,
    상기 케이스는 제1 하우징과 제2 하우징이 결합하여 내부에 공간부를 형성하도록 구성되며,The case is configured such that the first housing and the second housing are coupled to form a space therein,
    상기 회로 기판은 상기 공간부에 수용되어 있는 것을 특징으로 하는 광 이오나이저.The photoionizer according to claim 1, wherein the circuit board is accommodated in the space portion.
  11. 제 9 항 또는 제 10 항에 있어서,According to claim 9 or 10,
    상기 공간부에는 절연 물질이 채워져 있는 것을 특징으로 하는 광 이오나이저.The optical ionizer, characterized in that the space portion is filled with an insulating material.
  12. 제 1 항 또는 제 2 항에 있어서,According to claim 1 or 2,
    상기 몸체는 다른 몸체와 연결가능하게 구성되어 있는 것을 특징으로 하는 광 이오나이저.The optical ionizer, characterized in that the body is configured to be connectable to another body.
  13. 제 1 항 또는 제 2 항에 있어서,According to claim 1 or 2,
    상기 복수의 조사부는, 상기 복수의 조사부로부터 방사되는 전자기파가 중첩될 수 있도록, 인접하는 조사부 사이의 거리가 소정 길이 이하가 되도록 상기 이오나이저 유닛에 장착되는 것을 특징으로 하는 광 이오나이저.The plurality of irradiation units are mounted on the ionizer unit so that a distance between adjacent irradiation units is equal to or less than a predetermined length so that electromagnetic waves emitted from the plurality of irradiation units can be overlapped.
  14. 제 1 항 또는 제 2 항에 있어서,According to claim 1 or 2,
    상기 복수의 조사부는, 인접하는 조사부 사이의 거리가 50㎜ 이하가 되도록 상기 이오나이저 유닛에 장착되는 것을 특징으로 하는 광 이오나이저.The plurality of irradiation units are mounted on the ionizer unit so that a distance between adjacent irradiation units is 50 mm or less.
  15. 제 1 항 또는 제 2 항에 있어서,According to claim 1 or 2,
    상기 조사부는 상기 이오나이저 유닛에 탈착 가능하게 장착되어 있는 것을 특징으로 하는 광 이오나이저.The photoionizer according to claim 1, wherein the irradiation unit is detachably attached to the ionizer unit.
  16. 제 1 항 또는 제 2 항에 있어서,According to claim 1 or 2,
    상기 이오나이저 유닛에는 방열용 히트 싱크 구조가 형성되어 있는 것을 특징으로 하는 광 이오나이저.A photoionizer, characterized in that a heat sink structure for heat dissipation is formed in the ionizer unit.
PCT/KR2022/008931 2021-06-25 2022-06-23 Photoionizer WO2022270938A1 (en)

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KR1020210083271A KR20230000757A (en) 2021-06-25 2021-06-25 Photo ionizer

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR200416558Y1 (en) * 2006-03-02 2006-05-16 신승리 apparatus for connecting a source of electric power
KR100676527B1 (en) * 2006-10-16 2007-01-30 (주)선재하이테크 An ionizer using soft x-ray and a method for removing electric charges of a charged body
KR100853726B1 (en) * 2005-11-25 2008-08-22 에스엠시 가부시키가이샤 Ion balance adjusting method and method of removing charges from workpiece by using the same
KR20130143021A (en) * 2010-12-28 2013-12-30 가부시키가이샤 고가네이 Ion generation device
KR101776476B1 (en) * 2016-03-23 2017-09-07 이동근 X-ray ionizer
KR101946674B1 (en) * 2012-03-02 2019-02-11 하마마츠 포토닉스 가부시키가이샤 X-ray irradiation device and x-ray radiation source

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102138092B1 (en) 2018-10-26 2020-08-13 (주)선재하이테크 X-ray ionizer having easy detachable X-ray tube and having a minimum creeping distance to prevent creeping discharge

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100853726B1 (en) * 2005-11-25 2008-08-22 에스엠시 가부시키가이샤 Ion balance adjusting method and method of removing charges from workpiece by using the same
KR200416558Y1 (en) * 2006-03-02 2006-05-16 신승리 apparatus for connecting a source of electric power
KR100676527B1 (en) * 2006-10-16 2007-01-30 (주)선재하이테크 An ionizer using soft x-ray and a method for removing electric charges of a charged body
KR20130143021A (en) * 2010-12-28 2013-12-30 가부시키가이샤 고가네이 Ion generation device
KR101946674B1 (en) * 2012-03-02 2019-02-11 하마마츠 포토닉스 가부시키가이샤 X-ray irradiation device and x-ray radiation source
KR101776476B1 (en) * 2016-03-23 2017-09-07 이동근 X-ray ionizer

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