WO2022259927A1 - ソーワイヤ用電着線及び金属線、並びに、ソーワイヤ用電着線の製造方法 - Google Patents
ソーワイヤ用電着線及び金属線、並びに、ソーワイヤ用電着線の製造方法 Download PDFInfo
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- WO2022259927A1 WO2022259927A1 PCT/JP2022/022216 JP2022022216W WO2022259927A1 WO 2022259927 A1 WO2022259927 A1 WO 2022259927A1 JP 2022022216 W JP2022022216 W JP 2022022216W WO 2022259927 A1 WO2022259927 A1 WO 2022259927A1
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- wire
- saw
- electrodeposited
- tungsten
- tensile strength
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- 229910052751 metal Inorganic materials 0.000 title claims description 77
- 239000002184 metal Substances 0.000 title claims description 77
- 238000004519 manufacturing process Methods 0.000 title claims description 28
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims abstract description 46
- 229910052721 tungsten Inorganic materials 0.000 claims abstract description 18
- 239000010937 tungsten Substances 0.000 claims abstract description 18
- 229910001080 W alloy Inorganic materials 0.000 claims abstract description 16
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 31
- 238000004070 electrodeposition Methods 0.000 claims description 30
- 229910052799 carbon Inorganic materials 0.000 claims description 28
- 239000011247 coating layer Substances 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 19
- 239000006061 abrasive grain Substances 0.000 claims description 17
- 238000004804 winding Methods 0.000 claims description 15
- 239000011162 core material Substances 0.000 description 64
- 239000010410 layer Substances 0.000 description 37
- 238000010438 heat treatment Methods 0.000 description 23
- 238000007747 plating Methods 0.000 description 21
- 238000005868 electrolysis reaction Methods 0.000 description 20
- 230000000052 comparative effect Effects 0.000 description 16
- 238000005520 cutting process Methods 0.000 description 13
- 238000005530 etching Methods 0.000 description 9
- 229910052702 rhenium Inorganic materials 0.000 description 8
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 description 8
- 239000003921 oil Substances 0.000 description 7
- 238000005491 wire drawing Methods 0.000 description 7
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- 238000005238 degreasing Methods 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 4
- 239000000470 constituent Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 229910052700 potassium Inorganic materials 0.000 description 4
- 239000011591 potassium Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 230000014509 gene expression Effects 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229910052741 iridium Inorganic materials 0.000 description 2
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910052762 osmium Inorganic materials 0.000 description 2
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000001953 recrystallisation Methods 0.000 description 2
- DECCZIUVGMLHKQ-UHFFFAOYSA-N rhenium tungsten Chemical compound [W].[Re] DECCZIUVGMLHKQ-UHFFFAOYSA-N 0.000 description 2
- 229910052707 ruthenium Inorganic materials 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 229910052684 Cerium Inorganic materials 0.000 description 1
- 229910001335 Galvanized steel Inorganic materials 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910002090 carbon oxide Inorganic materials 0.000 description 1
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 description 1
- 239000004567 concrete Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000008151 electrolyte solution Substances 0.000 description 1
- 239000008397 galvanized steel Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002345 surface coating layer Substances 0.000 description 1
- 238000009864 tensile test Methods 0.000 description 1
- 229910001930 tungsten oxide Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D61/00—Tools for sawing machines or sawing devices; Clamping devices for these tools
- B23D61/18—Sawing tools of special type, e.g. wire saw strands, saw blades or saw wire equipped with diamonds or other abrasive particles in selected individual positions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
- B24D3/06—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D15/00—Electrolytic or electrophoretic production of coatings containing embedded materials, e.g. particles, whiskers, wires
- C25D15/02—Combined electrolytic and electrophoretic processes with charged materials
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/06—Wires; Strips; Foils
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D61/00—Tools for sawing machines or sawing devices; Clamping devices for these tools
- B23D61/18—Sawing tools of special type, e.g. wire saw strands, saw blades or saw wire equipped with diamonds or other abrasive particles in selected individual positions
- B23D61/185—Saw wires; Saw cables; Twisted saw strips
Definitions
- the present invention relates to an electrodeposited wire for saw wire, a metal wire, and a method for manufacturing an electrodeposited wire for saw wire.
- Patent Document 1 discloses a saw wire comprising a metal wire made of a tungsten alloy and abrasive grains electrodeposited on its surface.
- An object of the present invention is to provide an electrodeposited wire for saw wire that can achieve both high tensile strength and high straightness, and a metal wire used as the core wire thereof.
- An electrodeposited wire for saw wire includes a core wire made of tungsten or a tungsten alloy, has a tensile strength of 4800 MPa or more, and has a straightness of 400 mm or more per length of 500 mm.
- a metal wire according to an aspect of the present invention is used as a core wire of an electrodeposited wire for saw wire, has a carbon coating layer on the surface, has a tensile strength of 4800 MPa or more, and is wound around a winding frame. be.
- a method for manufacturing an electrodeposited wire for saw wire includes a removal step of removing the carbon coating layer from a metal wire having a carbon coating layer and made of tungsten or a tungsten alloy, and the removal step. and an electrodeposition step of electrodepositing abrasive grains on the metal wire after polishing.
- the removal step and the electrodeposition step are performed in series.
- an electrodeposited wire for saw wire that can achieve both high tensile strength and high straightness, and a metal wire used as its core wire.
- FIG. 1 is a schematic cross-sectional view of an electrodeposited wire for saw wire according to an embodiment.
- FIG. 2 is a process drawing showing a manufacturing method of an electrodeposited wire for saw wire according to a comparative example.
- FIG. 3 is a process chart showing the method of manufacturing the electrodeposited wire for saw wire according to the embodiment.
- FIG. 4 is a schematic perspective view of a metal wire used as the core wire of the electrodeposited wire for saw wire according to the embodiment.
- FIG. 5 is a schematic cross-sectional view of the metal wire shown in FIG.
- FIG. 6 is a process diagram showing a method for manufacturing an electrodeposited wire for saw wire according to a modification of the embodiment.
- each figure is a schematic diagram and is not necessarily strictly illustrated. Therefore, for example, scales and the like do not necessarily match in each drawing. Moreover, in each figure, the same code
- FIG. 1 is a schematic cross-sectional view of an electrodeposited wire 1 for saw wire according to the present embodiment.
- the saw wire electrodeposited wire 1 is used as a saw wire for cutting semiconductor ingots such as silicon and silicon carbide.
- a silicon wafer can be manufactured by cutting a silicon ingot using the electrodeposited wire 1 for saw wire.
- the object to be cut by the electrodeposited wire for saw wire 1 is not limited to a semiconductor ingot, and may be a solid object (lump) made of various solid materials such as metal, resin, glass, or concrete.
- the electrodeposited wire 1 for saw wire includes a core wire 10 , a plating layer 11 and abrasive grains 12 .
- the core wire 10 is a metal wire made of tungsten or a tungsten alloy.
- the content of tungsten contained in the core wire 10 is, for example, 90 wt % or more, but is not limited to this.
- the content of tungsten contained in the core wire 10 may be 95 wt% or more, 99 wt% or more, 99.9 wt% or more, or 99.99 wt% or more. good too.
- the core wire 10 may contain unavoidable impurities that cannot be avoided during the manufacturing process.
- a tungsten alloy is, for example, an alloy of tungsten (W) and one or more metals other than tungsten.
- a metal other than tungsten is, for example, rhenium (Re).
- the content of rhenium contained in the core wire 10 made of a rhenium-tungsten alloy (ReW) is, for example, 0.1 wt % or more and 10 wt % or less, but is not limited thereto.
- the rhenium content may be 1 wt% or more, 3 wt% or more, or 5 wt% or more.
- the tensile strength of the core wire 10 can be increased.
- the rhenium content is too high, it is difficult to thin the core wire 10 while maintaining a high tensile strength. Specifically, disconnection is more likely to occur, making it difficult to draw a long wire.
- the workability of the core wire 10 can be improved.
- by reducing the content of rare and expensive rhenium it becomes possible to mass-produce long core wires 10 at low cost.
- the metal used for alloying with tungsten may be osmium (Os), ruthenium (Ru), or iridium (Ir).
- the content of osmium, ruthenium or iridium is similar to that of rhenium, for example. In these cases, the same effect as in the case of rhenium-tungsten alloy can be obtained.
- the core wire 10 may be made of an alloy of tungsten and two or more metals other than tungsten.
- the core wire 10 has a substantially circular cross-sectional shape perpendicular to the axial direction.
- the axial direction is the direction in which the core wire 10 extends.
- the core wire 10 has a substantially constant wire diameter along the wire axis direction.
- the wire diameter of the core wire 10 is, for example, 100 ⁇ m or less, but is not limited to this.
- the wire diameter of the core wire 10 may be 80 ⁇ m or less, 60 ⁇ m or less, 50 ⁇ m or less, 40 ⁇ m or less, 30 ⁇ m or less, or 20 ⁇ m or less. It may be 10 ⁇ m or less.
- the wire diameter of the core wire 10 becomes smaller, the wire diameter of the electrodeposition wire 1 for saw wire also becomes smaller. As the wire diameter of the electrodeposited wire 1 for saw wire is reduced, the cutting margin of the object to be cut is reduced. Therefore, loss of cutting objects can be reduced, and the number of wafers that can be obtained can be increased.
- the wire diameter of the core wire 10 is, for example, 5 ⁇ m or more. As a result, the cross-sectional area of the core wire 10 does not become too small, and the absolute strength of the core wire 10 can be ensured within a range that can be used as a saw wire.
- the plating layer 11 covers the surface of the core wire 10 . Specifically, the plating layer 11 covers the entire surface of the core wire 10 over the entire circumference around the wire axis of the core wire 10 .
- the plating layer 11 is provided to fix the abrasive grains 12 by electrodeposition.
- the plating layer 11 adheres and covers at least a portion of the plurality of abrasive grains 12 .
- the plating layer 11 contains nickel, for example.
- the plating layer 11 may be a plating layer made of nickel alone or a plating layer made of a nickel alloy.
- the plating layer 11 may be multi-layered.
- the plating layer 11 is formed with a substantially uniform thickness along the wire axis of the core wire 10 .
- the thickness of the plating layer 11 is, for example, 10 ⁇ m or less, but is not limited to this.
- the thickness of the plating layer 11 may be 5 ⁇ m or less, or may be 2 ⁇ m or less.
- the wire diameter of the electrodeposited wire 1 for saw wire also becomes smaller. Therefore, the loss of cutting objects can be reduced.
- the thickness of the plating layer 11 is, for example, 1 ⁇ m or more. Thereby, the abrasive grains 12 can be held sufficiently strongly.
- the abrasive grains 12 are hard particles, such as diamond or CBN (cubic boron nitride) particles.
- a plurality of abrasive grains 12 are arranged dispersedly on the surface of the core wire 10 .
- the average grain size of the plurality of abrasive grains 12 is, for example, 10 ⁇ m or less.
- the plurality of abrasive grains 12 adhere to the surface of the core wire 10 by being at least partially covered with the plating layer 11 .
- the tensile strength of the electrodeposited wire 1 for saw wire shown in FIG. 1 is 4800 MPa or more.
- the tensile strength may be 5000 MPa or more, 5200 MPa or more, 5500 MPa or more, or 5700 MPa or more.
- the tensile strength is, for example, 6000 MPa or less, but may exceed 6000 MPa.
- Tensile strength can be measured, for example, based on the Japanese Industrial Standards tensile test (JIS H 4460 8).
- the electrodeposited wire 1 for saw wire is often used by being strongly stretched on the guide roller of the cutting device (wire saw device).
- the electrodeposited wire 1 for saw wire rotates together with the guide roller to cut the object to be cut. Therefore, the higher the tensile strength of the electrodeposited wire 1 for saw wire, the stronger the tension on the guide roller can be, so that the swing width of the electrodeposited wire 1 for saw wire can be reduced. By reducing the swing width, the cutting margin of the object to be cut is reduced. As a result, the loss of cutting objects can be reduced.
- the straightness of the electrodeposited wire 1 for saw wire is expressed by the natural drooping length per 500 mm length.
- the straightness of the electrodeposited wire 1 for saw wire (natural drooping length per length of 500 mm) is 400 mm or more.
- the straightness of the electrodeposited wire 1 for saw wire may be 450 mm or more, 475 mm or more, 485 mm or more, 490 mm or more, or 495 mm or more.
- the natural drooping length can be measured, for example, based on the Japanese Industrial Standard straightness test (JIS H 4460 15).
- the electrodeposited wire 1 for saw wire can be stretched straight, the object to be cut can be cut smoothly, and the occurrence of disconnection during cutting can be reduced.
- the electrodeposited wire 1 for saw wire has a tensile strength of 4800 MPa or more and a straightness of 400 mm or more per 500 mm length. That is, the electrodeposited wire for saw wire 1 can achieve both high tensile strength and high straightness.
- FIG. 2 is a process drawing showing a manufacturing method of an electrodeposited wire for saw wire according to a comparative example.
- a line is drawn (S10).
- wire drawing an ingot made of tungsten or a tungsten alloy is swaged or rolled to form a wire-shaped tungsten wire.
- the tungsten wire is heated (annealed), and the tungsten wire is drawn (thinned) using a wire drawing die while being heated.
- Wire drawing uses a lubricant in which graphite is dispersed in water.
- Wire drawing is performed repeatedly until a desired wire diameter is obtained using a plurality of wire drawing dies with different hole diameters.
- the tungsten wire is heated at a heating temperature lower than the heating temperature during the previous drawing. That is, the heating temperature is lowered stepwise.
- the final heating temperature is, for example, 400° C., which contributes to refinement of crystal grains.
- the wire is drawn at room temperature without heating.
- Normal temperature is, for example, a temperature in the range of 0°C or higher and 50°C or lower, and is 30°C as an example.
- a tungsten wire with high tensile strength is obtained.
- a tungsten wire having a tensile strength of 4800 MPa or more is obtained.
- the surface of the tungsten wire immediately after drawing is coated with carbon.
- Graphite is contained in the lubricant used for wire drawing, so that the film is formed more firmly, and the slippage of the wire during unwinding in the subsequent process is improved.
- Electrolysis is performed by generating a potential difference between the tungsten wire and the counter electrode while the tungsten wire and the counter electrode are immersed in an electrolytic solution such as an aqueous sodium hydroxide solution. Electrolysis removes the carbon adhering to the surface. Fine adjustment of the wire diameter of the tungsten wire is also possible by electrolysis.
- the tungsten wire after electrolysis is wound on a bobbin (S12).
- a tungsten wire can be stored and distributed in a state wound on a bobbin. Since it can be stored for a certain period of time, the tungsten wire can be used for other applications such as meshes in addition to saw wire applications, if desired.
- the tungsten wire is unwound from the bobbin to produce an electrodeposited wire for saw wire (S13).
- the tungsten wire unwound from the bobbin is an electrolyzed tungsten wire.
- a tungsten wire that has undergone electrolysis has a rough surface, so that it does not slide well, and the straightness of the wire may be lowered when it is unwound. In some cases, unwinding may cause disconnection of the tungsten wire.
- Electrodeposition is performed on the tungsten wire from which the oxide layer and oil layer have been removed (S15). As a result, an electrodeposited wire for saw wire is manufactured, which is a tungsten wire having abrasive grains electrodeposited on the surface thereof.
- Table 1 below shows the wire diameter, tensile strength and straightness of the electrodeposited wires for saw wires according to Comparative Examples 1 to 5.
- Comparative Examples 1 and 4 no heat treatment (S16) was performed.
- Comparative Examples 2, 3 and 5 heat treatment (S16) is performed.
- the heating temperature in Comparative Examples 2 and 5 is the same, and the heating temperature in Comparative Example 3 is different from Comparative Examples 2 and 5.
- Comparative Examples 1 to 3 the straightness of the tungsten wire immediately before winding was 490 mm and the tensile strength was 5120 MPa. As shown in Comparative Example 1, when the heat treatment (S16) is not performed, the tensile strength remains high, but the straightness is lowered. On the other hand, as shown in Comparative Examples 2 and 3, straightness is enhanced by performing heat treatment (S16). However, the heat treatment reduces the tensile strength. The higher the heat treatment temperature, the higher the straightness, but the lower the tensile strength.
- the heat treatment (S16) can improve the straightness without lowering the tensile strength. That is, a tungsten wire having a tensile strength of less than 4800 MPa can be improved in straightness by heat treatment. This is because the heat treatment at about 800° C. hardly causes primary recrystallization.
- FIG. 3 is a process chart showing a method of manufacturing the electrodeposited wire 1 for saw wire according to the present embodiment.
- a line is drawn (S10).
- the delineation is the same as the delineation shown in FIG.
- winding (S12) is performed without performing electrolysis (S11). That is, a metal wire whose surface is coated with carbon is wound around a bobbin without removing the carbon.
- a metal wire having a carbon coating layer on its surface can be stored and distributed while wound on a bobbin. Since it can be stored for a certain period of time, processing (specifically, electrodeposition) for saw wire use becomes possible at the required timing.
- the metal wire unwound from the winding frame is a metal wire having a carbon coating layer on its surface.
- the surface of the metal wire is smooth due to the formation of the carbon coating layer. For this reason, deterioration in the straightness of the metal wire is suppressed when it is unwound.
- the occurrence of disconnection of the metal wire due to unwinding is also suppressed. That is, the unwound metal wire can maintain the same tensile strength as that of the metal wire immediately before being wound on the bobbin.
- electrolysis is performed on the unwound metal wire (S11).
- the specific conditions for electrolysis are the same as those for electrolysis (S11) shown in FIG.
- electrolysis is an example of a removal process that removes the carbon coating layer of the metal wire. Further, fine adjustment of the wire diameter is performed.
- degreasing and/or etching are performed as necessary (S14).
- the metal wire immediately after electrolysis that is, the core wire from which the surface coating layer has been removed
- the conditions can be easily adjusted. Therefore, the surface of the core material can be easily cleaned (no oil layer and/or oxide layer).
- the core material is electrodeposited (S15).
- the specific conditions for electrodeposition are the same as those for electrodeposition (S15) shown in FIG.
- the electrodeposited wire 1 for saw wire in which the abrasive grains 12 are electrodeposited on the surface of the core wire 10 by the plating layer 11, is manufactured.
- electrolysis (S11) and electrodeposition (S15) are performed in series.
- “Performed in a series” means to perform continuously without leaving sufficient time. Sufficient time is, for example, one hour. At least between the electrolysis (S11) and the electrodeposition (S15), winding onto the bobbin is not performed and storage for a predetermined period is not performed. For example, electrolysis (S11) and electrodeposition (S15) are continuously performed in-line.
- the metal wire having the carbon coating layer formed thereon is wound around the bobbin and unwound, thereby suppressing a decrease in straightness during unwinding. Therefore, it is not necessary to perform the heat treatment (S16) for improving the straightness after the electrodeposition. Since heat treatment is not performed, a decrease in tensile strength is suppressed. That is, both high tensile strength and high straightness can be achieved.
- Table 2 below shows the wire diameter, tensile strength and straightness of the electrodeposited wires 1 for saw wire according to Examples 1 and 2.
- Example 1 and 2 the tensile strength and straightness were almost the same immediately after drawing (S10), immediately after unwinding (S13), and immediately after electrodeposition (S15). That is, the tensile strength and straightness of the metal wire obtained by wire drawing are maintained almost as they are even after winding and unwinding. Similarly, the tensile strength and straightness of the unwound metal wire are maintained almost as they are even after electrolysis and electrodeposition.
- the electrodeposited wire for saw wire 1 is not subjected to heat treatment, so both high tensile strength and high straightness can be maintained.
- FIG. 4 is a schematic perspective view of the metal wire 20 used as the core wire of the electrodeposited wire 1 for saw wire according to the present embodiment.
- FIG. 5 is a schematic cross-sectional view of metal wire 20 shown in FIG.
- the metal wire 20 is wound around the bobbin 30.
- the bobbin 30 is an example of a winding frame.
- the bobbin 30 includes a cylindrical (or columnar) core and disc-shaped members having a diameter larger than the outer diameter of the core and provided at both ends of the core.
- the bobbin 30 is, for example, made of galvanized steel, but may be made of other metals or plastics.
- the outer diameter of the core material is, for example, 100 mm or more and 300 mm or less, and the height is 200 mm or more and 300 mm or less, but is not limited to this.
- the outer diameter of the core material is large, the bending stress applied to the metal wire 20 can be reduced because the curve of the metal wire 20 becomes gentle. The strain generated in the metal wire 20 is reduced, and the deterioration of the straightness during unwinding can be suppressed.
- the outer diameter of the core material is small, the metal wire 20 can be compacted, so that it can be stored in a small space and can be easily transported.
- the outer diameter of the core material is 150 mm.
- the total length of the metal wire 20 wound around the bobbin 30 is, for example, 50 km or more and 300 km or less, but is not limited to this.
- the metal wire 20 has a total length on the order of km.
- the bobbin 30 may not be the bobbin around which the metal wire 20 is wound.
- a bobbin referred to as a reel, spool, drum, or the like may be utilized.
- the metal wire 20 includes a core wire 21 and a covering layer 22, as shown in FIG.
- the core wire 21 is substantially the same as the core wire 10 of the electrodeposited wire for saw wire 1 shown in FIG.
- the wire diameter of the core wire 21 may be larger than that of the core wire 10, since the wire diameter may be reduced when the electrolysis (S11 in FIG. 3) is performed.
- the coating layer 22 is a carbon coating layer. That is, the coating layer 22 contains carbon. Specifically, the coating layer 22 contains carbon and tungsten oxide.
- the covering layer 22 is formed with a substantially uniform thickness along the wire axis of the core wire 21 .
- the thickness of the coating layer 22 is, for example, 0.2 ⁇ m or less, but is not limited to this.
- the metal wire 20 has a substantially circular cross-sectional shape perpendicular to the line axis direction.
- the metal wire 20 has a substantially constant wire diameter along the wire axis direction.
- the wire diameter of the metal wire 20 is, for example, 100 ⁇ m or less, but is not limited to this.
- the wire diameter of the metal wire 20 may be 80 ⁇ m or less, 60 ⁇ m or less, 50 ⁇ m or less, 40 ⁇ m or less, 30 ⁇ m or less, or 20 ⁇ m or less. or 10 ⁇ m or less.
- the wire diameter of the metal wire 20 becomes smaller, the wire diameter of the electrodeposition wire 1 for saw wire also becomes smaller. As the wire diameter of the electrodeposited wire 1 for saw wire is reduced, the cutting margin of the object to be cut is reduced. Therefore, loss of cutting objects can be reduced, and the number of wafers that can be obtained can be increased.
- the tensile strength of the metal wire 20 is 4800 MPa or more.
- the tensile strength may be 5000 MPa or more, 5200 MPa or more, 5500 MPa or more, or 5700 MPa or more.
- the tensile strength is, for example, 6000 MPa or less, but may exceed 6000 MPa.
- the electrodeposited wire for saw wire 1 includes the core wire 10 made of tungsten or a tungsten alloy.
- the tensile strength of the electrodeposited wire 1 for saw wire is 4800 MPa or more.
- the straightness per 500 mm length of the electrodeposited wire 1 for saw wire is 400 mm or more.
- the metal wire 20 according to the present embodiment is used as the core wire of the electrodeposited wire 1 for saw wire.
- the metal wire 20 has a carbon coating layer on its surface.
- the tensile strength of the metal wire 20 is 4800 MPa or more.
- the metal wire 20 is wound around a bobbin.
- the wire diameter of the metal wire 20 is 100 ⁇ m or less.
- the wire diameter is small, so the loss of the cutting object can be reduced.
- the metal wire 20 having the carbon coating layer and made of tungsten or a tungsten alloy includes a removing step of removing the carbon coating layer, and a removing step. and an electrodeposition step of electrodepositing abrasive grains on the metal wire 20 after being diced.
- the removal process and the electrodeposition process are performed in series. At this time, for example, in the removing step, the metal wire 20 is electrolyzed to remove the carbon coating layer.
- the electrodeposited wire 1 for saw wire that achieves both high tensile strength and high straightness.
- impurities on the surface of the core wire 10 are sufficiently reduced, so that the adhesion strength between the core wire 10 and the plating layer 11 can be increased.
- detachment of the abrasive grains 12 is suppressed, and deterioration of sharpness during cutting of the object to be cut can be suppressed.
- the method of manufacturing the electrodeposited wire 1 for saw wire further includes a step of unwinding the metal wire 20 from the bobbin around which the metal wire 20 is wound.
- the removing step the carbon coating layer of the metal wire 20 unwound from the bobbin is removed.
- the winding step on the bobbin is not performed.
- the electrodeposited wire 1 for saw wire that achieves both high tensile strength and high straightness.
- the winding and unwinding steps between the removal step and the electrodeposition step adhesion of oxides and/or oil layers to the surface can be suppressed.
- the tungsten wire may be doped with a trace amount of potassium or the like. Doped potassium exists at the grain boundaries of tungsten.
- the content of potassium (K) is, for example, 0.010 wt% or less.
- the present invention can be implemented as a tungsten product including a winding frame such as a bobbin 30 and a metal wire 20 wound around the winding frame.
- FIG. 6 is a process diagram showing a method for manufacturing the electrodeposited wire 1 for saw wire according to a modification of the embodiment.
- the surface of the metal wire unwound from the bobbin is etched without performing an electrolytic process (S24). Etching is performed using, for example, a sodium hydroxide aqueous solution. By etching, the carbon coating layer is removed.
- the core material is electrodeposited (S15).
- the specific conditions for electrodeposition are the same as those for electrodeposition (S15) shown in FIG. Also in the case of the manufacturing method shown in FIG. 6, similarly to the embodiment, the electrodeposited wire 1 for saw wire having high tensile strength and high straightness is manufactured.
- the step of removing the carbon coating layer and the step of electrodeposition are performed in series.
- the meaning of "perform in series" is the same as in the embodiment.
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Abstract
Description
[ソーワイヤ用電着線]
まず、実施の形態に係るソーワイヤ用電着線の構成について、図1を用いて説明する。図1は、本実施の形態に係るソーワイヤ用電着線1の概略断面図である。
以下では、本実施の形態に係るソーワイヤ用電着線1の製造方法について説明する。まず、比較例に係るソーワイヤ用電着線の製造方法及びその問題点について、図2を用いて説明する。図2は、比較例に係るソーワイヤ用電着線の製造方法を示す工程図である。
以下では、図3のステップS12で巻き取られた金属線について、図4及び図5を用いて説明する。
以上のように、本実施の形態に係るソーワイヤ用電着線1は、タングステン又はタングステン合金からなる芯線10を備える。ソーワイヤ用電着線1の引張強度は、4800MPa以上である。ソーワイヤ用電着線1の長さ500mmあたりの真直度は、400mm以上である。
以上、本発明に係るソーワイヤ用電着線、及び、その芯線として用いられる金属線、並びに、ソーワイヤ用電着線の製造方法について、上記の実施の形態などに基づいて説明したが、本発明は、上記の実施の形態に限定されるものではない。
10、21 芯線
20 金属線
22 被覆層
30 ボビン(巻枠)
Claims (6)
- タングステン又はタングステン合金からなる芯線を備え、
引張強度は、4800MPa以上であり、
長さ500mmあたりの真直度は、400mm以上である、
ソーワイヤ用電着線。 - ソーワイヤ用電着線の芯線として用いられ、
表面に炭素被覆層を有し、
引張強度は、4800MPa以上であり、
巻枠に巻回された、
金属線。 - 線径は、100μm以下である、
請求項2に記載の金属線。 - 炭素被覆層を有し、タングステン又はタングステン合金からなる金属線の前記炭素被覆層を除去する除去工程と、
前記除去工程が行われた後の前記金属線に対して砥粒の電着を行う電着工程と、を含み、
前記除去工程と前記電着工程とは、一連で行われる、
ソーワイヤ用電着線の製造方法。 - 前記除去工程では、前記金属線の電解を行うことで、前記炭素被覆層を除去する、
請求項4に記載のソーワイヤ用電着線の製造方法。 - 前記金属線が巻回された巻枠から前記金属線を巻出す工程をさらに含み、
前記除去工程では、前記巻枠から巻出された前記金属線の前記炭素被覆層を除去し、
前記除去工程と前記電着工程との間では、巻枠への巻取り工程が行われない、
請求項4又は5に記載のソーワイヤ用電着線の製造方法。
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CN202280038462.5A CN117396307A (zh) | 2021-06-11 | 2022-05-31 | 锯线用电沉积线及金属线以及锯线用电沉积线的制造方法 |
KR1020237039198A KR20230169342A (ko) | 2021-06-11 | 2022-05-31 | 쏘 와이어용 전착선 및 금속선, 및 쏘 와이어용 전착선의 제조 방법 |
DE112022003008.9T DE112022003008T5 (de) | 2021-06-11 | 2022-05-31 | Galvanisierter draht für einen sägedraht und metalldraht sowie verfahren zur herstellung eines galvanisierten drahts für einen sägedraht |
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JP2021-098313 | 2021-06-11 |
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Citations (6)
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JPS6311274A (ja) * | 1986-07-01 | 1988-01-18 | Sumitomo Electric Ind Ltd | ワイヤソ−用ワイヤ |
JPH03104553A (ja) * | 1989-09-18 | 1991-05-01 | Goei Seisakusho:Kk | 切断用ワイヤー |
JP2018187741A (ja) * | 2017-05-10 | 2018-11-29 | パナソニックIpマネジメント株式会社 | ソーワイヤー及び切断装置 |
JP2018187739A (ja) * | 2017-05-10 | 2018-11-29 | パナソニックIpマネジメント株式会社 | ソーワイヤー及び切断装置 |
JP2018187740A (ja) * | 2017-05-10 | 2018-11-29 | パナソニックIpマネジメント株式会社 | ソーワイヤー及び切断装置 |
CN210256788U (zh) * | 2018-12-29 | 2020-04-07 | 盛利维尔(中国)新材料技术股份有限公司 | 一种金刚石线锯 |
Family Cites Families (1)
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WO2012124717A1 (ja) * | 2011-03-15 | 2012-09-20 | 栃木住友電工株式会社 | 砥粒固着金属線及びその製造方法 |
-
2021
- 2021-06-11 JP JP2021098313A patent/JP2022189632A/ja active Pending
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2022
- 2022-05-31 DE DE112022003008.9T patent/DE112022003008T5/de active Pending
- 2022-05-31 WO PCT/JP2022/022216 patent/WO2022259927A1/ja active Application Filing
- 2022-05-31 CN CN202280038462.5A patent/CN117396307A/zh active Pending
- 2022-05-31 TW TW111120169A patent/TWI815486B/zh active
- 2022-05-31 KR KR1020237039198A patent/KR20230169342A/ko unknown
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS6311274A (ja) * | 1986-07-01 | 1988-01-18 | Sumitomo Electric Ind Ltd | ワイヤソ−用ワイヤ |
JPH03104553A (ja) * | 1989-09-18 | 1991-05-01 | Goei Seisakusho:Kk | 切断用ワイヤー |
JP2018187741A (ja) * | 2017-05-10 | 2018-11-29 | パナソニックIpマネジメント株式会社 | ソーワイヤー及び切断装置 |
JP2018187739A (ja) * | 2017-05-10 | 2018-11-29 | パナソニックIpマネジメント株式会社 | ソーワイヤー及び切断装置 |
JP2018187740A (ja) * | 2017-05-10 | 2018-11-29 | パナソニックIpマネジメント株式会社 | ソーワイヤー及び切断装置 |
CN210256788U (zh) * | 2018-12-29 | 2020-04-07 | 盛利维尔(中国)新材料技术股份有限公司 | 一种金刚石线锯 |
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JP2022189632A (ja) | 2022-12-22 |
KR20230169342A (ko) | 2023-12-15 |
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