WO2022252282A1 - 一种长光程微型红外气室及红外气体传感器 - Google Patents

一种长光程微型红外气室及红外气体传感器 Download PDF

Info

Publication number
WO2022252282A1
WO2022252282A1 PCT/CN2021/099790 CN2021099790W WO2022252282A1 WO 2022252282 A1 WO2022252282 A1 WO 2022252282A1 CN 2021099790 W CN2021099790 W CN 2021099790W WO 2022252282 A1 WO2022252282 A1 WO 2022252282A1
Authority
WO
WIPO (PCT)
Prior art keywords
infrared gas
optical
reflector
light
detector
Prior art date
Application number
PCT/CN2021/099790
Other languages
English (en)
French (fr)
Inventor
卿笃安
曹绍情
Original Assignee
深圳市诺安传感技术有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 深圳市诺安传感技术有限公司 filed Critical 深圳市诺安传感技术有限公司
Publication of WO2022252282A1 publication Critical patent/WO2022252282A1/zh

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106—General arrangement of respective parts
    • G01N2021/0112—Apparatus in one mechanical, optical or electronic block

Definitions

  • the invention relates to the technical field of infrared sensing, in particular to a long optical path miniature infrared gas chamber and a sensor.
  • Industrial gas sensors are an important guarantee for gas safety. With the rapid development of my country's economy and the continuous optimization of industrial applications of the Internet of Things, industrial sensors have gradually developed in the direction of low power consumption, miniaturization, and portability in recent years. Among them, the infrared optical gas sensor has the advantages of fast response, high measurement accuracy, strong anti-interference ability, long service life, etc., and will not appear harmful gas poisoning, aging, etc., and has been widely recognized by the market.
  • the working principle of the infrared optical gas sensor is to use the natural vibration and rotation frequency of gas molecules to absorb the infrared light signal of a specific wavelength. Therefore, by detecting the power change of the specific wavelength light signal interacting with the gas molecule, the Accurate detection of specific gas concentrations.
  • the detection resolution of the infrared gas sensor is mainly related to the effective optical path of the sensor's optical gas chamber and the absorption rate of the gas.
  • the volume and weight of the sensor are often large. Miniature sensors are limited by their volume, and the optical path is difficult to meet the high-resolution test requirements.
  • the Chinese utility model patent with the announcement number CN202092949U proposes a "C"-shaped optical channel with multiple continuous reflective surfaces
  • the Chinese invention patent with the patent publication number CN101825566A proposes a "spiral-shaped" air channel.
  • US Patent No. 7,244,939B2 proposes a multi-reflection "ring" air chamber channel. The reflection of light in these reflective optical air chambers will cause attenuation of light reflection and affect the accuracy of detection signals.
  • the optical path can be increased by designing a mirror resonant cavity so that the beam is reflected back and forth in the gas chamber, such as using a White cell and a Herriott cell, but this structure requires a mid-infrared laser with excellent collimation as a light source, which is expensive .
  • the present invention provides a long optical path micro-infrared gas chamber and sensor.
  • the requirements of the gas chamber for the divergence angle of the light source can be guaranteed within an effective volume.
  • the larger effective optical path improves the resolution of the sensor for gas detection.
  • a long optical path miniature infrared gas cell characterized in that it includes an optical gas cell body, and the optical gas cell body includes an annular outer reflective wall and an inner reflective wall disposed inside the outer reflective wall;
  • the outer reflective wall includes a plurality of concave reflectors, and the sides of the plurality of concave reflectors are sequentially connected to form a ring;
  • the internal reflection wall includes a plurality of plane reflectors, the sides of the plurality of plane reflectors are sequentially connected to form a regular polygon, and the center of curvature of each of the concave reflectors is located on the corresponding interior angle centerline of the regular polygon, And the light reflected by the center of each plane mirror onto the concave reflector is reflected and then enters the center of the next plane mirror.
  • the inner reflective wall and the outer reflective wall of the main body of the optical gas cell are connected through a bottom plate.
  • d is the distance from the center of the concave reflector to the apex of the regular polygon adjacent to it, a is the side length of the regular polygon, n is the number of sides of the regular polygon, and n is greater than or equal to 3.
  • the plane reflector and the concave reflector are alternately arranged along the circumferential direction to form a pair of reflectors;
  • the concave reflectors reflect back and forth, and transmit forward along the circumferential channel between the inner reflective wall and the outer reflective wall.
  • the light emitted by the light source is incident on the plane reflector at an angle of ⁇ , and then reflected to the adjacent concave reflector at the same reflection angle, and the focal point of the incident light coincides with the center point of the plane reflector;
  • the concave reflector focuses the light reflection to the center position of the next adjacent planar reflector, the light is reflected back and forth between the planar reflector and the concave reflector, and along the inner reflection wall
  • the circumferential channel between the outer reflective wall and the folding type propagates forward.
  • the main structure of the optical air chamber composed of the inner reflection wall, the outer reflection wall and the bottom plate is integrally formed.
  • the infrared gas sensor based on the optical gas cell structure includes a circuit board and the above-mentioned long optical path miniature infrared gas cell, and the circuit board is provided with a light source and a photodetector , the light source and the photodetector extend to the inside of the main body of the optical gas cell of the long optical path micro-infrared gas cell.
  • the light source obliquely enters one of the plane reflectors of the main body of the optical air cell, and the focal point of the lens at the light source coincides with the center point of the plane reflector.
  • the present invention is characterized in that the main body of the optical air cell is provided with a light source through hole for passing through the light source, and the main body of the optical air cell is also provided with a detector through hole for passing through the detector.
  • the present invention according to the above solution is characterized in that the inner reflective wall and the outer reflective wall of the main body of the optical air cell are connected through a bottom plate, and the light source through hole is close to a concave reflector of the outer reflective wall.
  • the detector through hole is arranged on the bottom plate between the inner reflective wall and the outer reflective wall, and a slope reflector is arranged directly above the detector through hole, and the light is incident on the detector. ;
  • the through hole of the detector is located inside the internal reflection wall, and a through hole is opened on one of the plane mirrors of the internal reflection wall, and the reflected light enters the detector through the through hole.
  • the present invention can be applied to a small infrared gas sensor, and through the structural design of the outer reflective wall and inner reflective wall inside the optical gas chamber, the light emitted by the light source can be reflected after multiple reflections. Received by the optical detector, the purpose of increasing the effective optical path in a limited volume is achieved, and the resolution of the sensor for gas detection is improved. At the same time, through the shape design of the outer reflective wall and the inner reflective wall, the light is fully prevented from being reflected and propagated.
  • the scattering attenuation in the process ensures the optical power intensity reaching the photodetector, thereby ensuring the accuracy of gas detection; in addition, the present invention reduces the application of unnecessary internal components, fully reduces the cost of the sensor, and is beneficial to the miniature infrared gas sensor. promotion and application.
  • FIG. 1 is a schematic structural view of Embodiment 1 of the present invention.
  • Fig. 2 is a schematic diagram of another viewing angle of Embodiment 1 of the present invention.
  • Embodiment 3 is a schematic diagram of light propagation in an application example of Embodiment 1 of the present invention.
  • FIG. 4 is an optical path diagram of an application example of Embodiment 1 of the present invention.
  • Fig. 5 is a dimensional drawing of Embodiment 1 of the present invention.
  • FIG. 6 is a schematic structural diagram of Embodiment 2 of the present invention.
  • FIG. 7 is a schematic diagram of an application example of Embodiment 2 of the present invention.
  • FIG. 8 is a schematic diagram of light propagation in an application example of Embodiment 2 of the present invention.
  • FIG. 9 is an optical path diagram of an application example of Embodiment 2 of the present invention.
  • Fig. 10 is a dimensional drawing of Embodiment 2 of the present invention.
  • an infrared gas sensor includes a long optical path miniature infrared gas chamber and a circuit board, the circuit board is provided with a light source, a photodetector 40 and other electronic components, and the light source and the photodetector 40 extend To the interior of the optical cell body of the long optical path miniature infrared cell.
  • the light source is used to emit light, and the light propagates inside the long optical path micro-infrared gas chamber and is received by the photodetector 40 after interacting with the gas to be measured. result.
  • a long optical path miniature infrared gas chamber includes an optical gas chamber main body, and the inner wall of the optical gas chamber main body is coated or electroplated with a reflective layer.
  • the main body of the optical gas chamber communicates with the external environment to be measured through an air inlet channel (not shown in the figure), and the gas in the external environment to be measured enters into the main body of the optical air chamber through the air inlet channel.
  • the main body of the optical cell includes an annular outer reflective wall 10 and an inner reflective wall 20 located inside the outer reflective wall 10. Both the outer reflective wall 10 and the inner reflective wall 20 are connected to the bottom plate 11, and the bottom plate 11 is provided with a light detector for passing through the light.
  • the detector through hole 12 of the detector, and the light source through hole (not shown in the figure) for passing the light source is also opened on the bottom plate 11 .
  • the outer reflective walls 10 and the inner reflective walls 20 are alternately arranged along the circumferential direction, so that the light is alternately reciprocated between the outer reflective walls 10 and the inner reflective walls 20 to propagate along the circumferential direction, and finally received by the photodetector.
  • This embodiment is suitable for occasions where the size of the detector is small and can be accommodated in the inner cavity of the inner reflective wall.
  • the main body of the optical air cell in the present invention is provided with a light source focusing mirror 30 for accommodating the light source.
  • the cross-section of the side wall of the light source focusing mirror 30 is straight or arc-shaped, and the arc-shaped light source focusing mirror 30 is more conducive to focusing and utilizing the light emitted by the light source, increasing the utilization rate of the light source.
  • the outer reflection wall 10 comprises a plurality of (n) concave reflectors 101, and the side faces of the plurality of (n) concave reflectors 101 are connected successively to form a ring;
  • the inner reflection wall 20 comprises a plurality of plane reflectors 201 of equal size, and The sides of reflector 201 are connected successively to form a regular polygon, and each outer corner of the regular polygon is towards the center of the corresponding concave reflector 101, so that the center of curvature of each concave reflector 101 is located at the corresponding outer corner (i.e. inner corner) of the regular polygon On the center line, and then ensure that the light reflected by the midpoint of each plane mirror 201 can reach the center position of the adjacent plane mirror 201 after being focused and reflected by the concave mirror 101 .
  • the number of plane mirrors 201 and concave mirrors 101 is 5, that is, five plane mirrors 201 are arranged in a regular pentagon, and five concave mirrors 101 are arranged on the periphery of the regular pentagon.
  • each concave reflector 101 is located on the center line of the interior angle of the corresponding regular polygon (i.e. the connection line between the interior angle and the center of the regular polygon), each of the concave reflector 101
  • the curvature of the position is the same, and its radius of curvature R satisfies:
  • d is the distance from the center of the concave reflector 101 to the apex of the regular polygon adjacent to it, a is the side length of the regular polygon, n is the number of sides of the regular polygon, and n is greater than or equal to 3.
  • the light source in the light source focusing mirror 30 obliquely shoots into one of the plane reflectors 201 of the main body of the optical cell, the opening of the light source focusing mirror 30 is provided with a lens, and the focal point of the lens coincides with the center point of the plane reflector 201, so that the light emitted by the light source
  • the light can be focused on the center point of the plane reflector 201 .
  • the incident angle ⁇ of the centerline of the light source satisfies:
  • n is the number of sides of the internal reflection wall 20 of the main body of the optical gas cell.
  • the number of sides of the regular polygon is n ⁇ 3, which can be adjusted according to the required resolution. The larger n is, the longer the optical path is and the higher the resolution is.
  • the light is reciprocally reflected between the plane reflector 201 and the concave reflector 101 , and transmitted along the circumferential direction of the channel between the inner reflective wall 20 and the outer reflective wall 10 .
  • the sensor implementation process :
  • the light source of divergent infrared light is incident on the center of the plane reflector 201 after being focused by the lens at a certain angle.
  • the plane reflector 201 reflects the light and then enters the concave reflector 101.
  • the center of the adjacent plane reflector 201 circulates in this way so that the light is folded and forwarded along the circumferential direction between the inner reflective wall 20 and the outer reflective wall 10 of the long optical path micro-infrared gas chamber until it is incident on the photodetector.
  • the internal reflection wall 20 of this embodiment is a hollow structure inside, the detector through hole 12 is located in the cavity of the internal reflection wall 20, and one of the plane mirrors 201 (the m (m ⁇ n) plane plane of the internal reflection wall 20
  • the reflector preferably the last plane reflector
  • the photodetector 40 is placed in the cavity of the reflective wall 20 after passing through the detector through hole 12, and the light is incident through the through hole 21 to photodetector 40.
  • the center of the light source focusing mirror 30, the center of each plane reflector 201, and the center of the through hole 21 are located on the same plane, and this plane is parallel to the bottom plate 11 of the main body of the optical cell.
  • the interior of the internal reflection wall 20 is a frosted surface, and the light entering the interior of the internal reflection wall 20 is received by the light detector through the diffuse reflection of the frosted surface.
  • the outer reflective wall 10 includes a first concave reflector M1, a second concave reflector M2, a third concave reflector M3, a fourth concave reflector M4 and a fifth concave reflector M5.
  • the reflecting wall 20 includes a first plane mirror N1, a second plane mirror N2, a third plane mirror N3, a fourth plane mirror N4 and a fifth plane mirror N5, and the light source focusing mirror 30 is arranged on the first concave mirror At M1, the through hole 21 is located at the center of the fifth flat mirror N5.
  • the second concave reflector M2 reflects and focuses the light into the center of the second plane reflector N2, and so on, the light passes through the third concave reflector M3 and the third plane reflection in the same way.
  • Mirror N3, the fourth concave reflector M4, the fourth plane reflector N4, and the fifth concave reflector M5 reflect and enter the fifth plane reflector N5, and enter the interior of the internal reflection wall 20 through the through hole 21, and pass through the interior After diffuse reflection on the inner wall of the reflective wall 20 , the light is uniformly incident on the receiving surface of the photodetector and received by the photodetector 40 , and the photodetector 40 converts the received light signal into a visualized gas concentration through a circuit.
  • the main body of the optical air chamber is integrally formed, that is, the inner reflective wall 20 , the outer reflective wall 10 , the bottom plate 11 , and the light source focusing mirror 30 are integrally formed.
  • a long optical path miniature infrared gas chamber is different from Embodiment 1 in that the number n of sides of a regular polygon in this embodiment is 6, that is, the plane reflector 201 and the concave reflector 101 The number is 6, that is, the 6 plane reflectors 201 are arranged in a hexagon, and the 6 concave reflectors 101 are arranged on the periphery of the regular hexagon.
  • each concave reflector 101 is located on the center line of the interior angle of the corresponding regular polygon (i.e. the connection line between the interior angle and the center of the regular polygon), each of the concave reflector 101
  • the curvature of the position is the same, and its radius of curvature R satisfies:
  • d is the distance from the center of the concave reflector 101 to the apex of the regular polygon adjacent to it, a is the side length of the regular polygon, n is the number of sides of the regular polygon, and n is greater than or equal to 3.
  • the light source obliquely enters one of the plane reflectors 201 of the main body of the optical air cell, and the incident light of the light source is parallel to the bottom plate 11 of the main body of the optical air cell.
  • the incident angle ⁇ of the centerline of the light source satisfies:
  • n is the number of sides of the internal reflection wall 20 of the main body of the optical gas cell.
  • the number of sides of the regular polygon is n ⁇ 3, which can be adjusted according to the required resolution. The larger n is, the longer the optical path is and the higher the resolution is.
  • the lens focal point of the light source focusing mirror 30 coincides with the center point of the plane reflector 201 , so that the light emitted by the light source can be focused on the center point of the plane reflector 201 .
  • the internal reflection wall 20 of the present embodiment is a solid structure (can also be a hollow structure), and the detector through hole 12 is located between the external reflection wall 10 and the internal reflection wall 20 (outside of the m (m ⁇ n) plane mirror) ), and a bevel reflector 13 is provided directly above the detector through hole 12, so that the light detector extends between the outer reflector wall 10 and the inner reflector wall 20 through the detector through hole 12, and enters into the bevel reflector 13 The reflected light can directly enter the position of the light detector.
  • the center of the light source focusing mirror 30 , the center of each plane reflector, and the center of the slope reflector 13 are located on the same plane, and this plane is parallel to the bottom plate of the main body of the optical gas chamber.
  • This embodiment is applicable to occasions where the detector has a large size and needs to be installed outside the internal reflection wall, and the internal reflection wall in this embodiment can be a hollow structure or a solid structure.
  • the center height of the slope reflector 13 is consistent with the center height of the inner reflection wall 20 .
  • the inclination angle of the slope reflector 13 relative to the bottom plate 11 is 45°, so that the light incident on the slope reflector 13 in the transverse direction is reflected by 90° and enters the photodetector directly below it.
  • the main body of the optical air cell is provided with an inner concave arc edge 14, and the inner concave surface of the inner concave arc edge faces the side of the light source facing away from the light source.
  • the stray light of the light source can be blocked by the concave arc edge 14, thereby enhancing the stability of the sensor.
  • the outer reflective wall 10 includes a first concave reflector P1, a second concave reflector P2, a third concave reflector P3, a fourth concave reflector P4, a fifth concave reflector P5 and a first concave reflector P5.
  • the internal reflection wall 20 includes a first plane mirror Q1, a second plane mirror Q2, a third plane mirror Q3, a fourth plane mirror Q4, and a fifth plane mirror Q5 and the sixth plane reflector Q6
  • the light source focusing mirror 30 is disposed at the first concave reflector P1
  • the light detector 40 is located outside the fifth plane reflector Q5 after passing through the detector through hole 12 .
  • the light beam (shown by the light in the figure) emitted by the light source enters the center of the first plane reflector Q1 at an incident angle of 60°, and the first plane reflector Q1 reflects the light and scatters it into the second concave surface
  • the second concave reflector P2 reflects and focuses the light into the center of the second plane reflector Q2, and so on, the light passes through the third concave reflector P3 and the third plane reflector Q3 in the same way
  • the reflection of the fourth concave reflector P4, the fourth plane reflector Q4, the fifth concave reflector P5, and the fifth plane reflector Q5 are injected into the slope reflector, and are transmitted to the optical detector after being reflected by the slope reflector 13
  • the receiving surface of the receiver is received by the photodetector 40, and the photodetector 40 converts the received light signal into a visualized gas concentration through a circuit.
  • the main body of the optical air chamber is integrally formed, that is, the inner reflective wall 20 , the outer reflective wall 10 , the bottom plate 11 , the light source focusing mirror 30 , and the inclined reflector 13 are all integrally formed.
  • the number of concave reflectors and plane reflectors in the above-mentioned two embodiments is only shown, and other numbers of concave reflectors and plane reflectors can realize the purpose shown in the present invention;
  • the positions can be adjusted according to the specific application environment.
  • the present invention changes the traditional air chamber structure of simple reflection through the cooperation of the "quincunx-shaped" outer reflective wall and the “polygonal” inner reflective wall, so that the light is folded and transmitted forward in the air chamber, effectively increasing the size of the light in a limited space.
  • the optical path is increased, the detection resolution of the sensor is improved, and the attenuation in the light propagation process is reduced at the same time; in addition, the invention has a simple structure, reduces the sensor's requirements for the light source beam, and reduces the requirements for high-precision components at the same time. up from the cost of the sensor.
  • Example 2 the number of plane reflectors and concave reflectors are both 6) and US Patent US7244939B2 as an example for comparison
  • the standard 4-series gas sensor in the industry has an outer diameter of 20 cm
  • the optical path length of the chamber is about 4 cm
  • the optical path length of the optical gas cell in Example 2 of the present invention is 6.5 cm. It can be seen from the comparison that after the optical gas cell structure of the present invention is applied to the infrared gas sensor, the optical path length of the interaction between the traditional infrared gas sensor and the gas to be measured is increased by more than 1.5 times, and it can be achieved without changing the outer dimension of the infrared gas sensor. Under the premise, improve the effective optical path length.
  • optical path length refers to the optical path length that the light emitted by the light source propagates axially along the pair of reflectors on the inner and outer walls of the gas chamber and reaches the detector; at the same time, with the logarithm of the plane reflector and the concave reflector Increase, the effective optical path will also increase.

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

红外传感技术领域中的一种长光程微型红外气室的红外气体传感器，包括电路板和长光程微型红外气室，电路板上的光源和光探测器（40）延伸至长光程微型红外气室的光学气室主体内部；长光程微型红外气室，包括光学气室主体，光学气室主体包括环形的外反射壁（10）和设于外反射壁（10）内部的内反射壁（20），外反射壁（10）包括多个凹面反射镜（101），多个凹面反射镜（101）的侧面依次连接围成环形，内反射壁（20）包括多个平面反射镜（201），多个平面反射镜（201）的侧面依次连接形成正多边形，每个凹面反射镜（101）的曲率中心位于正多边形中对应的内角中心线上。通过特殊的光学气室结构设计，降低气室对光源发散角的要求，可以在有效的体积内保证较大的有效光程，提高传感器对气体检测的分辨率。

Description

一种长光程微型红外气室及红外气体传感器 技术领域
本发明涉及红外传感技术领域，具体的说，是涉及一种长光程微型红外气室及传感器。
背景技术
工业气体传感器是气体安全的重要保障，随着我国经济的高速发展和物联网工业应用的不断深入优化，工业传感器近年来逐步向低功耗、微型化、便携式方向发展。其中，红外光学气体传感器具有响应快、测量精度高、抗干扰能力强、使用寿命长等优点，且不会出现有害气体中毒、老化等现象，受到市场的广泛认可。红外光学气体传感器的工作原理是利用气体分子因固有的振动、转动频率，而对特定波长的红外光信号具有吸收作用，因此通过探测与气体分子相互作用的特定波长光信号功率变化，即可实现对特定气体浓度的精确检测。
根据朗伯比尔定律可知，红外气体传感器的检测分辨率主要和传感器的光学气室有效光程和气体的吸收率有关，光学气室的有效光程越长，测量精度越高。为了使得红外传感器具备较长的光程，往往导致传感器的体积和重量都很大。微型传感器受其体积的限制，光程很难达到高分辨率的测试要求。
为了在有限的体积内尽量增加传感器光学气室的有效光程，传感器开发人员进行了大量的探索，主要以反射型光学气室为主，通过光线多次反射增加光程。例如，公告号为CN202092949U的中国实用新型专利提出了一种具有多个连续反射面的“C”型光学通道，又如专利公布号为CN101825566A的中国发明专利提出 了一种“螺旋型”的气室通道，再如美国专利US7244939B2提出了一种多次反射的“环形”气室通道，光线在这些反射型的光学气室中反射会导致光线反射产生衰减，影响探测信号的准确性。另外还可以通过设计镜面谐振腔，使得光束在气室腔内来回反射来增加光程，例如采用White池和Herriott池，但是这种结构需要准直性极好的中红外激光作为光源，价格昂贵。
上述缺陷，值得解决。
发明内容
为了克服现有的技术的不足，本发明提供一种长光程微型红外气室及传感器，通过特殊的光学气室结构设计，降低气室对光源发散角的要求，可以在有效的体积内保证较大的有效光程，提高传感器对气体检测的分辨率。
本发明技术方案如下所述：
一种长光程微型红外气室，其特征在于，包括光学气室主体，所述光学气室主体包括环形的外反射壁和设于所述外反射壁内部的内反射壁；
所述外反射壁包括多个凹面反射镜，多个所述凹面反射镜的侧面依次连接围成环形；
所述内反射壁包括多个平面反射镜，多个所述平面反射镜的侧面依次连接形成正多边形，每个所述凹面反射镜的曲率中心位于所述正多边形中对应的内角中心线上，且每个平面镜中心反射至所述凹面反射镜上的光线反射后射入下一面平面反射镜的中心。
根据上述方案的本发明，其特征在于，所述光学气室主体的内反射壁与外反射壁之间通过底板连接。
根据上述方案的本发明，其特征在于，所述凹面反射镜的各位置的曲率相同，且其曲率半径R满足：
Figure PCTCN2021099790-appb-000001
其中d为所述凹面反射镜的中心到与其相邻的所述正多边形的顶点的距离，a为正多边形的边长，n为正多边形的边数，且n大于等于3。
根据上述方案的本发明，其特征在于，在所述光学气室主体内，所述平面反射镜与所述凹面反射镜沿圆周方向交错排列，形成反射镜对；光线在所述平面反射镜与所述凹面反射镜之间往复反射，并沿着所述内反射壁与所述外反射壁之间的周向通道向前传输。
进一步的，光源发出的光线以α角度入射到所述平面反射镜，再以相同反射角反射到相邻的所述凹面反射镜，入射光的焦点与所述平面反射镜的中心点重合；所述凹面反射镜再将光反射聚焦到下一个相邻所述平面反射镜的中心位置，光线在所述平面反射镜与所述凹面反射镜之间如此往复反射，并沿着所述内反射壁与所述外反射壁之间的周向通道折叠型向前传播。
根据上述方案的本发明，其特征在于，所述由内反射壁、外反射壁和底板构成的光学气室主体结构一体成型。
根据上述方案的本发明，其特征在于，所述基于光学气室结构的一种红外气体传感器，包括电路板和上述的长光程微型红外气室，所述电路板上设有光源和光探测器，所述光源和所述光探测器延伸至所述长光程微型红外气室的光学气室主体内部。
根据上述方案的本发明，其特征在于，所述光源斜向射入所述光学气室主体的其中一平面反射镜，且所述光源处的透镜焦点与该平面反射镜的中心点重合。
根据上述方案的本发明，其特征在于，所述光学气室主体内开设有用于穿过光源的光源通孔，所述光学气室主体内还开设有用于穿过探测器的探测器通孔。
根据上述方案的本发明，其特征在于，所述光学气室主体的内反射壁与外反射壁之间通过底板连接，所述光源通孔靠近所述外反射壁的一个凹面反射镜处。
进一步的，所述探测器通孔设于所述内反射壁与所述外反射壁之间的底板上，且所述探测器通孔的正上方设有斜面反射镜，将光入射到探测器；
或，所述探测器通孔位于所述内反射壁的内部，且所述内反射壁的其中一平面反射镜上开设有通孔，反射光通过通孔入射到探测器。
根据上述方案的本发明，其有益效果在于，本发明可以适用于小型的红外气体传感器，通过光学气室内部的外反射壁和内反射壁的结构设计，使得光源发出的光线经过多次反射后再被光探测器接收，实现了在有限的体积内尽量增加有效光程的目的，提高传感器对气体检测的分辨率，同时通过外反射壁与内反射壁的形状设计，充分避免光线在反射传播过程中的散射衰减，保证到达光探测器处的光功率强度，进而保证气体探测精准度；另外，本发明减少了不必要内部部件的应用，充分降低了传感器的成本，有利于微型红外气体传感器的推广及应用。
附图说明
图1为本发明实施例一的结构示意图；
图2为本发明实施例一另一视角的示意图；
图3为本发明实施例一应用实例的光线传播示意图；
图4为本发明实施例一应用实例的光路图；
图5为本发明实施例一的尺寸标注图；
图6为本发明实施例二的结构示意图；
图7为本发明实施例二应用实例的示意图；
图8为本发明实施例二应用实例的光线传播示意图；
图9为本发明实施例二应用实例的光路图；
图10为本发明实施例二的尺寸标注图。
在图中，10-外反射壁；101-凹面反射镜；11-底板；12-探测器通孔；13-斜面反射镜；14-内凹弧边；
20-内反射壁；201-平面反射镜；21-通孔；
30-光源聚焦镜
40-光探测器。
具体实施方式
下面结合附图以及实施方式对本发明进行进一步的描述：
如图1至图10所示，一种红外气体传感器，包括长光程微型红外气室和电路板，电路板上设有光源、光探测器40及其他电子元器件，光源和光探测器40延伸至长光程微型红外气室的光学气室主体内部。光源用于发射光，光线在长光程微型红外气室内部传播并与待测气体相互作用后被光探测器40接收，光探测器40接收光信号后转化为电信号，进而生成气体浓度测量结果。
实施例一
如图1、图2所示，一种长光程微型红外气室，包括光学气室主体，光学气室主体的内壁涂覆或电镀有反光层。光学气室主体通过进气通道(图中未示出)与外界待测环境连通，外界待测环境的气体通过进气通道进入光学气室主体内部。
光学气室主体包括环形的外反射壁10和设于外反射壁10内部的内反射壁20，外反射壁10和内反射壁20均与底板11连接，底板11上开设有用于穿过光探测器的探测器通孔12，底板11上还开设有用于穿过光源的光源通孔(图中未示出)。外反射壁10与内反射壁20沿圆周方向交错排列，使光线在外反射壁10与内反射壁20之间交替往复反射沿周向方向传播，并最终被光探测器接收。本实施例适用于探测器尺寸较小、可容纳于内反射壁内腔的场合。
本发明中的光学气室主体内设有用于容纳光源的光源聚焦镜30，电路板上的光源伸入光学气室主体后置于光源聚焦镜30内。在一个优选实施例中，光源聚焦镜30的侧壁横截面为直线形或弧线形，弧线形的光源聚焦镜30更有利于光源发出的光线进行聚焦利用，增加光源利用率。
外反射壁10包括多个(n个)凹面反射镜101，多个(n个)凹面反射镜101的侧面依次连接围成环形；内反射壁20包括多个尺寸相等的平面反射镜201，平面反射镜201的侧面依次连接形成正多边形，该正多边形的每个外角朝向相对应的凹面反射镜101的中心，使得每个凹面反射镜101的曲率中心位于该正多边形的对应外角(即内角)所在中心线上，进而保证每一平面反射镜201中点反射的光线经过凹面反射镜101的聚焦反射后能够到达相邻平面反射镜201的中心位置。
本实施例中，平面反射镜201和凹面反射镜101的数量均为5，即5面平面反射镜201呈正五边形排列，5面凹面反射镜101设于该正五边形外围。
如图5所示，每一凹面反射镜101的曲率中心(即圆心O1)位于与其对应的正多边形的内角中心线(即该内角与正多边形中心的连线)上，凹面反射镜101的各位置的曲率相同，且其曲率半径R满足：
Figure PCTCN2021099790-appb-000002
其中d为凹面反射镜101的中心到与其相邻的正多边形的顶点的距离，a为正多边形的边长，n为正多边形的边数，且n大于等于3。
光源聚焦镜30内的光源斜向射入光学气室主体的其中一平面反射镜201，光源聚焦镜30开口处设有透镜，透镜焦点与该平面反射镜201的中心点重合，使得光源发出的光线能聚焦于该平面反射镜201的中心点。具体的，光源的中心线的入射角α满足：
Figure PCTCN2021099790-appb-000003
其中n为光学气室主体的内反射壁20的边数。在本实施例中，正多边形的边数n≥3，可根据所需分辨率要求进行调整，n越大则光程越长，分辨率越高。
本发明的光学气室主体内，光线在平面反射镜201与凹面反射镜101之间往复反射，并沿着内反射壁20与外反射壁10之间的通道周向向前传输。在此基础上，该传感器实现过程中：
发散红外光的光源经透镜以一定角度聚焦后入射至平面反射镜201的中心处，平面反射镜201将光线反射后射入凹面反射镜101，凹面反射镜101再将光以相同的角度聚焦到相邻平面反射镜201的中心，如此循环使得光线在长光程微型红外气室的内反射壁20与外反射壁10之间沿圆周方向折叠向前传输，直至入射至光探测器处。
本实施例的内反射壁20为内部中空的结构，探测器通孔12位于内反射壁20的腔内，且内反射壁20的其中一平面反射镜201(第m(m≤n)面平面反射镜，优选为最后一面平面反射镜)上设有用于透过光线的通孔21；光探测器40穿过探测器通孔12后放置于反射壁20的腔内，光线经过通孔21入射到光探测器40。在本实施例中，光源聚焦镜30的中心、各个平面反射镜201的中心、通 孔21的中心位于同一平面，且该平面与光学气室主体的底板11相平行。
优选的，内反射壁20的内部为磨砂表面，通过磨砂表面的漫反射使得进入内反射壁20内部的光线被光探测器接收。
如图3、图4所示，外反射壁10包括第一凹面反射镜M1、第二凹面反射镜M2、第三凹面反射镜M3、第四凹面反射镜M4以及第五凹面反射镜M5，内反射壁20包括第一平面反射镜N1、第二平面反射镜N2、第三平面反射镜N3、第四平面反射镜N4以及第五平面反射镜N5，光源聚焦镜30设于第一凹面反射镜M1处，通孔21位于第五平面反射镜N5的中心。
光学气室主体中，光源发出的光束(图中的光线所示)以α＝54°的入射角射入第一平面反射镜N1的中心，第一平面反射镜N1将光线反射并发散射入第二凹面反射镜M2上，第二凹面反射镜M2将光线反射并聚焦射入第二平面反射镜N2的中心，依次类推，光线以同样的方式依次经过第三凹面反射镜M3、第三平面反射镜N3、第四凹面反射镜M4、第四平面反射镜N4、第五凹面反射镜M5的反射后射入第五平面反射镜N5，并经由通孔21射入内反射壁20内部，经过内反射壁20内壁的漫反射后将光线均匀的入射到光探测器接收面被光探测器40接收，光探测器40将接收到光信号通过电路转化成可视化气体浓度。
为了以示区分，图中的光线均以虚线进行表示。
本实施例中，光学气室主体一体成型，即内反射壁20、外反射壁10、底板11、光源聚焦镜30均一体成型。
实施例二
如图6、图7所示，一种长光程微型红外气室，与实施例一不同的是，本实施例中正多边形的边数n为6，即平面反射镜201和凹面反射镜101的数量均为 6，即6面平面反射镜201呈六边形排列，6面凹面反射镜101设于正六边形外围。
如图10所示，每一凹面反射镜101的曲率中心(即圆心O2)位于与其对应的正多边形的内角中心线(即该内角与正多边形中心的连线)上，凹面反射镜101的各位置的曲率相同，且其曲率半径R满足：
Figure PCTCN2021099790-appb-000004
其中d为凹面反射镜101的中心到与其相邻的正多边形的顶点的距离，a为正多边形的边长，n为正多边形的边数，且n大于等于3。
光源斜向射入光学气室主体的其中一平面反射镜201，且光源的入射光线平行于光学气室主体的底板11。具体的，光源的中心线的入射角α满足：
Figure PCTCN2021099790-appb-000005
其中n为光学气室主体的内反射壁20的边数。在本实施例中，正多边形的边数n≥3，可根据所需分辨率要求进行调整，n越大则光程越长，分辨率越高。光源聚焦镜30的透镜焦点与该平面反射镜201的中心点重合，使得光源发出的光线能聚焦于该平面反射镜201的中心点。
本实施例的内反射壁20为实心结构(也可为空心结构)，探测器通孔12位于外反射壁10与内反射壁20之间(第m(m≤n)面平面反射镜的外侧)，且探测器通孔12的正上方设有斜面反射镜13，使得光探测器通过探测器通孔12伸入外反射壁10与内反射壁20之间，且射入斜面反射镜13的光线经过反射后可以直接射入光探测器的位置处。在本实施例中，光源聚焦镜30的中心、各个平面反射镜的中心、斜面反射镜13的中心位于同一平面，且该平面与光学气室主体的底板相平行。本实施例适用于探测器尺寸较大、需安装于内反射壁外部的场合，且本实施例中的内反射壁可为空心结构，也可为实心结构。
优选的，斜面反射镜13的中心高度与内反射壁20的中心高度一致。在一个具体实施例中，斜面反射镜13相对底板11的倾斜角为45°，使得横向射入斜面反射镜13的光线经过90°反射后射入位于其正下方的光探测器处。
优选的，光学气室主体内设有内凹弧边14，内凹弧边的内凹面朝向光源背向发光的一侧。通过内凹弧边14可以遮挡光源的杂散光，进而增强该传感器的稳定性。
如图8、图9所示，外反射壁10包括第一凹面反射镜P1、第二凹面反射镜P2、第三凹面反射镜P3、第四凹面反射镜P4、第五凹面反射镜P5以及第六凹面反射镜(图中未示出)，内反射壁20包括第一平面反射镜Q1、第二平面反射镜Q2、第三平面反射镜Q3、第四平面反射镜Q4、第五平面反射镜Q5以及第六平面反射镜Q6，光源聚焦镜30设于第一凹面反射镜P1处，光探测器40穿过探测器通孔12后位于第五平面反射镜Q5的外侧。
光学气室主体中，光源发出的光束(图中的光线所示)以60°的入射角射入第一平面反射镜Q1的中心，第一平面反射镜Q1将光线反射并发散射入第二凹面反射镜P2上，第二凹面反射镜P2将光线反射并聚焦射入第二平面反射镜Q2的中心，依次类推，光线以同样的方式依次经过第三凹面反射镜P3、第三平面反射镜Q3、第四凹面反射镜P4、第四平面反射镜Q4、第五凹面反射镜P5、第五平面反射镜Q5的反射后射入斜面反射镜，并经由斜面反射镜13的反射后传输到光探测器接收面被光探测器40接收，光探测器40将接收到光信号通过电路转化成可视化气体浓度。
本实施例中，光学气室主体一体成型，即内反射壁20、外反射壁10、底板11、光源聚焦镜30、斜面反射镜13均一体成型。
上述两个实施例中的凹面反射镜、平面反射镜的数量仅做示意，其他数量的凹面反射镜、平面反射镜均可实现本发明所示目的；同时外反射壁的整体形状以及探测器的位置均可以根据具体应用环境的不同进行调整。
本发明通过“梅花形”的外反射壁与“多边形”的内反射壁相互配合，改变了传统单纯反射的气室结构，使得光在气室内折叠向前传输，在有限的空间内有效增大了光程，提高了传感器的检测分辨率，同时减少了光线传播过程中的衰减；另外，本发明结构简单，降低了传感器对光源光束的要求，同时减少了对高精密元器件的要求，降低了从传感器的成本。
以实施例2(平面反射镜和凹面反射镜的数量均为6)和美国专利US7244939B2为例进行对比说明，在业内规范的4系气体传感器的外径尺寸为20cm，美国专利US7244939B2的完整光学气室光程长度约为4cm，本发明实施例2的光学气室光程长度为6.5cm。对比可知本发明的光学气室结构应用于红外气体传感器后，相较于传统的红外气体传感器与待测气体相互作用的光程长度增加1.5倍以上，可以实现在不改变红外气体传感器外形尺寸的前提下，提高有效光程。
上述的光程长度指的是，由光源发出的光线沿着气室内外壁反射镜对沿轴向传播，并到达探测器的光路长度；同时，随着平面反射镜和凹面反射镜的对数的增加，有效光程也会随之增加。
应当理解的是，对本领域普通技术人员来说，可以根据上述说明加以改进或变换，而所有这些改进和变换都应属于本发明所附权利要求的保护范围。
上面结合附图对本发明专利进行了示例性的描述，显然本发明专利的实现并不受上述方式的限制，只要采用了本发明专利的方法构思和技术方案进行的各种改进，或未经改进将本发明专利的构思和技术方案直接应用于其它场合的，均在本发明的保护范围内。

Claims (9)

  1. 一种长光程微型红外气室，其特征在于，包括光学气室主体，所述光学气室主体包括环形的外反射壁和设于所述外反射壁内部的内反射壁；
    所述外反射壁包括多个凹面反射镜，多个所述凹面反射镜的侧面依次连接围成环形；
    所述内反射壁包括多个平面反射镜，多个所述平面反射镜的侧面依次连接形成正多边形，每个所述凹面反射镜的曲率中心位于所述正多边形中对应的内角中心线上。
  2. 根据权利要求1所述的长光程微型红外气室，其特征在于，所述光学气室主体的内反射壁与外反射壁之间通过底板连接。
  3. 根据权利要求1所述的长光程微型红外气室，其特征在于，所述凹面反射镜的各位置的曲率相同，且其曲率半径R满足：
    Figure PCTCN2021099790-appb-100001
    其中d为所述凹面反射镜的中心到与其相邻的所述正多边形的顶点的距离，a为正多边形的边长，n为正多边形的边数，且n大于等于3。
  4. 根据权利要求1所述的长光程微型红外气室，其特征在于，在所述光学气室主体内，所述平面反射镜与所述凹面反射镜沿圆周方向交错排列，形成反射镜对；光线在反射镜对之间往复反射，并沿着所述内反射壁与所述外反射壁之间的周向通道向前传输。
  5. 根据权利要求4所述的长光程微型红外气室，其特征在于，光源发出的光线以α角度入射到所述平面反射镜，再以相同反射角反射到相邻的所述凹面反射镜，且入射光的焦点与所述平面反射镜的中心点重合；所述凹面反射镜再将光 反射聚焦到下一相邻所述平面反射镜的中心位置，光线在所述平面反射镜与所述凹面反射镜之间如此往复反射沿圆周形通道方向以折叠方式向前传播。
  6. 根据权利要求1所述的长光程微型红外气室，其特征在于，所述由内反射壁、外反射壁和底板构成的光学气室主体结构一体成型。
  7. 一种长光程微型红外气室的红外气体传感器，其特征在于，包括电路板和权利要求1-6任一项所述的长光程微型红外气室，所述电路板上设有光源和光探测器，所述光源和所述光探测器延伸至所述长光程微型红外气室的光学气室主体内部。
  8. 根据权利要求7所述的长光程微型红外气室的红外气体传感器，其特征在于，光学气室底部中心位置开设用于穿过探测器的探测器通孔，所述探测器穿过所述探测器通孔后位于所述内反射壁的内腔；最后一块内反射壁中心位置开设通光的通孔，光经最后一块外反射壁反射后由所述通孔进入所述内反射壁的内腔，达到探测器处。
  9. 根据权利要求7所述的长光程微型红外气室的红外气体传感器，其特征在于，光学气室底部偏心位置开设用于穿过探测器的探测器通孔，所述探测器穿过所述探测器通孔后位于所述内反射壁与所述外反射壁之间，所述探测器通孔的正上方设有斜面反射镜，光经过斜面反射镜反射后入射到探测器。
PCT/CN2021/099790 2021-06-03 2021-06-11 一种长光程微型红外气室及红外气体传感器 WO2022252282A1 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN202110619840.6A CN113340837B (zh) 2021-06-03 2021-06-03 一种长光程微型红外气室及红外气体传感器
CN202110619840.6 2021-06-03

Publications (1)

Publication Number Publication Date
WO2022252282A1 true WO2022252282A1 (zh) 2022-12-08

Family

ID=77473498

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2021/099790 WO2022252282A1 (zh) 2021-06-03 2021-06-11 一种长光程微型红外气室及红外气体传感器

Country Status (2)

Country Link
CN (1) CN113340837B (zh)
WO (1) WO2022252282A1 (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113865647B (zh) * 2021-09-27 2022-09-30 深圳市诺安传感技术有限公司 一种基于cems的碳排放监测系统
CN114199822B (zh) * 2021-12-10 2024-01-19 北京环境特性研究所 一种气体检测装置及方法
CN115165788B (zh) * 2022-07-20 2023-06-16 深圳市诺安智能股份有限公司 一种高分辨率微型红外气体传感器及其实现方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008145293A (ja) * 2006-12-11 2008-06-26 Riken Keiki Co Ltd 赤外線式ガス検知器
CN103954577A (zh) * 2014-05-11 2014-07-30 西安安通测控技术有限公司 一种微型红外气体检测传感器
CN204405541U (zh) * 2015-02-13 2015-06-17 四川省川煤科技有限公司 一种红外甲烷检测元件装置
CN204731157U (zh) * 2015-07-10 2015-10-28 济南火哨安全科技有限公司 红外甲烷传感器
CN107250764A (zh) * 2015-01-19 2017-10-13 恩特格里斯公司 用于ir及uv监测的小体积长路径长度多程气体池
CN112067572A (zh) * 2020-09-14 2020-12-11 深圳市诺安环境安全股份有限公司 一种高稳定的小型红外气体传感器及制作、实现方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL6813749A (zh) * 1968-09-26 1970-04-01
US5963336A (en) * 1995-10-10 1999-10-05 American Air Liquide Inc. Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use
US7244939B2 (en) * 2003-12-09 2007-07-17 Dynament Limited Gas sensor
JP4214526B2 (ja) * 2004-12-01 2009-01-28 独立行政法人 宇宙航空研究開発機構 ガス成分・濃度測定方法及び装置
CN102680419B (zh) * 2012-05-18 2014-04-09 中国科学院上海光学精密机械研究所 气体传感器的光学气体多程腔
CN103134769A (zh) * 2013-01-31 2013-06-05 广东卓耐普智能技术股份有限公司 一种红外气体传感器
CN209231205U (zh) * 2018-11-20 2019-08-09 云南电网有限责任公司昭通供电局 一种红外长光程气体检测装置
CN109470644B (zh) * 2018-12-29 2024-05-03 汉威科技集团股份有限公司 紧凑型红外光学气体吸收池及红外气体传感器

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008145293A (ja) * 2006-12-11 2008-06-26 Riken Keiki Co Ltd 赤外線式ガス検知器
CN103954577A (zh) * 2014-05-11 2014-07-30 西安安通测控技术有限公司 一种微型红外气体检测传感器
CN107250764A (zh) * 2015-01-19 2017-10-13 恩特格里斯公司 用于ir及uv监测的小体积长路径长度多程气体池
CN204405541U (zh) * 2015-02-13 2015-06-17 四川省川煤科技有限公司 一种红外甲烷检测元件装置
CN204731157U (zh) * 2015-07-10 2015-10-28 济南火哨安全科技有限公司 红外甲烷传感器
CN112067572A (zh) * 2020-09-14 2020-12-11 深圳市诺安环境安全股份有限公司 一种高稳定的小型红外气体传感器及制作、实现方法

Also Published As

Publication number Publication date
CN113340837B (zh) 2021-12-24
CN113340837A (zh) 2021-09-03

Similar Documents

Publication Publication Date Title
WO2022252282A1 (zh) 一种长光程微型红外气室及红外气体传感器
KR100996711B1 (ko) 평행광원을 가진 비분산 적외선 가스 센서
KR100576541B1 (ko) 비분산 적외선 가스 센서를 위한 광 공동
KR101108495B1 (ko) 적외선 가스 센서
WO2021212931A1 (zh) 一种二维多点反射长光程气体传感器探头及气体传感器
KR101719775B1 (ko) 분광 분석에 적합한 측정 셀
CN102809534A (zh) 一种气体浓度检测仪及其气体吸收室
CN112378876B (zh) 一种低功耗微型红外气体传感器及其实现方法
JP2017187468A (ja) 多重反射型セル、分析装置、排ガス分析装置、及び、光の入射方法
WO2016095816A1 (zh) 样品测量池
CN102680402A (zh) 石英音叉增强型光声谱气体池
CN211697465U (zh) 光学吸收池及光电式气体分析仪
CN204314209U (zh) 样品测量池
JPS5824027B2 (ja) ４つの方向から等しく領域を照射する装置
KR101108497B1 (ko) 적외선 가스 센서
CN202433295U (zh) 痕量气体吸收池
CN113109268A (zh) 光声光谱增强装置以及使用该装置进行气体检测的方法
CN101592599A (zh) 宽谱光源红外气体传感器吸收腔
CN106802278B (zh) 双波腹激发的石英增强光声光谱测声器及气体探测装置
CN113237844A (zh) 一种对称式结构的长光程红外气体检测光学腔
US20220214267A1 (en) Compact gas sensor
CN220019380U (zh) 一种圆筒形多次反射吸收池
CN111208083A (zh) 红外气体传感器
CN214668565U (zh) 一种对称式结构的长光程红外气体检测光学腔
CN219737269U (zh) 一种红外气体测量传感器

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 21943641

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 21943641

Country of ref document: EP

Kind code of ref document: A1