WO2022250032A1 - ヘッドアップディスプレイ、及び、ヘッドアップディスプレイの設計方法 - Google Patents

ヘッドアップディスプレイ、及び、ヘッドアップディスプレイの設計方法 Download PDF

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Publication number
WO2022250032A1
WO2022250032A1 PCT/JP2022/021188 JP2022021188W WO2022250032A1 WO 2022250032 A1 WO2022250032 A1 WO 2022250032A1 JP 2022021188 W JP2022021188 W JP 2022021188W WO 2022250032 A1 WO2022250032 A1 WO 2022250032A1
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WO
WIPO (PCT)
Prior art keywords
display
light
head
retarder
optical element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2022/021188
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English (en)
French (fr)
Japanese (ja)
Inventor
初彦 西村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Seiki Co Ltd
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Nippon Seiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Seiki Co Ltd filed Critical Nippon Seiki Co Ltd
Priority to JP2023523475A priority Critical patent/JP7823659B2/ja
Priority to US18/563,661 priority patent/US20240280808A1/en
Priority to DE112022002776.2T priority patent/DE112022002776T5/de
Publication of WO2022250032A1 publication Critical patent/WO2022250032A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01—Head-up displays
    • G02B27/0101—Head-up displays characterised by optical features
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60K—ARRANGEMENT OR MOUNTING OF PROPULSION UNITS OR OF TRANSMISSIONS IN VEHICLES; ARRANGEMENT OR MOUNTING OF PLURAL DIVERSE PRIME-MOVERS IN VEHICLES; AUXILIARY DRIVES FOR VEHICLES; INSTRUMENTATION OR DASHBOARDS FOR VEHICLES; ARRANGEMENTS IN CONNECTION WITH COOLING, AIR INTAKE, GAS EXHAUST OR FUEL SUPPLY OF PROPULSION UNITS IN VEHICLES
    • B60K35/00—Instruments specially adapted for vehicles; Arrangement of instruments in or on vehicles
    • B60K35/20—Output arrangements, i.e. from vehicle to user, associated with vehicle functions or specially adapted therefor
    • B60K35/21—Output arrangements, i.e. from vehicle to user, associated with vehicle functions or specially adapted therefor using visual output, e.g. blinking lights or matrix displays
    • B60K35/23—Head-up displays [HUD]
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0012—Optical design, e.g. procedures, algorithms, optimisation routines
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01—Head-up displays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G02B5/3083—Birefringent or phase retarding elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60K—ARRANGEMENT OR MOUNTING OF PROPULSION UNITS OR OF TRANSMISSIONS IN VEHICLES; ARRANGEMENT OR MOUNTING OF PLURAL DIVERSE PRIME-MOVERS IN VEHICLES; AUXILIARY DRIVES FOR VEHICLES; INSTRUMENTATION OR DASHBOARDS FOR VEHICLES; ARRANGEMENTS IN CONNECTION WITH COOLING, AIR INTAKE, GAS EXHAUST OR FUEL SUPPLY OF PROPULSION UNITS IN VEHICLES
    • B60K2360/00—Indexing scheme associated with groups B60K35/00 or B60K37/00 relating to details of instruments or dashboards
    • B60K2360/20—Optical features of instruments
    • B60K2360/25—Optical features of instruments using filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01—Head-up displays
    • G02B27/0101—Head-up displays characterised by optical features
    • G02B2027/0118—Head-up displays characterised by optical features comprising devices for improving the contrast of the display / brillance control visibility

Definitions

  • the present disclosure relates to a head-up display mounted on a vehicle.
  • the display light emitted by the liquid crystal display is reflected by multiple reflecting mirrors, passes through a translucent dust-proof cover that covers the exit port, and is then reflected by the windshield of the vehicle, allowing the driver to see the light. Visually recognize a virtual image of the display light with the eye.
  • each optical element such as a reflecting mirror, a translucent dustproof cover, a windshield, etc.
  • unintended polarization and brightness reduction may occur in the display light due to the influence of the arrangement of each optical element. have been discovered by the inventors of the present disclosure.
  • an object of the present disclosure is to improve the display quality of a head-up display.
  • the head-up display of the present disclosure includes an indicator that emits display light representing vehicle information; a case having an exit opening for housing the indicator and emitting the display light to the outside; an optic including a translucent dust-proof cover covering the exit port; and a retarder which is composed of a plurality of retardation plates having different polarization characteristics and arranged at a predetermined inclination with respect to the principal ray of the display light.
  • the head-up display design method of the present disclosure includes: A method for designing a head-up display in which display light emitted by a display element is visually recognized through an optical element and a retarder,
  • the retarder is composed of a plurality of retardation plates having different polarization characteristics, and is arranged on the optical path of the display light at a predetermined inclination with respect to the principal ray of the display light, a first step of setting the light propagation properties of the optic; and a second step of setting a target value of the emitted light of the optical element, and calculating the tilt and the polarization characteristics of each of the plurality of retardation plates, which are approximate solutions to the target value.
  • the display quality of the virtual image displayed by the head-up display is improved.
  • a head-up display HUD of the present disclosure will be described with reference to the accompanying drawings.
  • the head-up display HUD is mounted in the instrument panel of the vehicle, and projects display light PL toward the windshield WS of the vehicle in front of the passenger (mainly the driver) P.
  • the display light PL reflected by the windshield WS allows the passenger P to see a virtual image V of the display light PL in front of the windshield WS.
  • the head-up display HUD includes a display element 1, a phase shifter 2, a first reflecting mirror 31, a second reflecting mirror 32, a control section 4, and an exit opening covered with a translucent dustproof cover 33. has a case C.
  • the indicator 1 emits display light representing vehicle information. Of this display light, a reference ray passing through the center of the indicator 1 is defined as a principal ray PL.
  • the display 1 is, for example, a liquid crystal display, and has a light source 11 and a liquid crystal panel 12 .
  • the display device 1 may be an organic EL display device, a projector, or the like, in addition to the liquid crystal display device.
  • the light source 11 is a backlight that illuminates the liquid crystal panel 12 .
  • the light source 11 is, for example, an LED that emits white light.
  • various lenses such as a collimator lens are arranged between the light source 11 and the liquid crystal panel 12 to make the light emitted by the light source 11 uniform and parallel.
  • the liquid crystal panel 12 is, for example, a TFT (Thin Film Transistor) type active matrix panel.
  • the liquid crystal panel 12 has a liquid crystal cell composed of a pair of transparent substrates, a liquid crystal layer sealed between the two substrates, and a polarizing filter facing each other with the liquid crystal cell interposed therebetween.
  • the direction of the liquid crystal molecules of the liquid crystal layer is controlled, and each pixel arranged in a matrix is in a transmissive state or an opaque state. can be switched.
  • the liquid crystal panel 12 can also be defined as a polarizer because the non-polarized light from the light source 11 passing through the pixels in the transmissive state is polarized into linearly polarized light.
  • the liquid crystal panel 12 displays a predetermined image by switching between a transmissive state and an opaque state for each pixel under the control of the control unit 4 .
  • This image is, for example, graphics or numbers representing vehicle information such as vehicle speed, vehicle warning, and route guide information.
  • the retarder 2 is a laminated retardation plate obtained by laminating a plurality of retardation films that produce different retardations. Different phase differences refer to, for example, different azimuth angles and ellipticity angles with respect to specific wavelengths. Further, the phase shifter 2 is arranged at an angle of ⁇ degrees with respect to the principal ray of the display light PL emitted from the display element 2 on the optical path of the display light PL. As shown in FIG. 3, in this embodiment, a retarder 2 is arranged between an indicator 1 and an optical element 3. As shown in FIG. Also, the phase shifter 2 is assumed to be formed by laminating three retardation films 21, 22, and 23 made of resin. The inclination ⁇ of the retarder 2 and the characteristics of the respective retardation films 21 to 23 will be described in detail in the "Procedure for designing the retarder 2" below.
  • An optical element 3 is defined as an optical member that reflects or transmits the display light PL on the optical path through which the display light PL reaches the passenger P's eyes.
  • the optical element 3 corresponds to the first reflecting mirror 31, the second reflecting mirror 32, the translucent dustproof cover 33, and the windshield WS.
  • an optic included in the head-up display HUD is defined as an internal optic.
  • the internal optics correspond to the first reflecting mirror 31 , the second reflecting mirror 32 , and the translucent dustproof cover 33 .
  • an optic outside the head-up display HUD is defined as an external optic.
  • the windshield WS corresponds to the external optics.
  • the first reflecting mirror 31 is a reflecting mirror that reflects the display light PL that has passed through the phase shifter 2 toward the second reflecting mirror 32 .
  • the first reflecting mirror 31 is, for example, a plane mirror.
  • the second reflecting mirror 32 is a reflecting mirror that reflects the display light PL reflected by the first reflecting mirror 31 toward the exit port of the case C.
  • the second reflecting mirror 32 is, for example, a concave mirror.
  • the translucent dustproof cover 33 is a transparent resin film such as acrylic resin or polycarbonate resin.
  • the translucent dustproof cover 33 covers the exit opening formed in the case C and is curved along the exit opening.
  • the control unit 4 is a circuit board having a microcontroller that controls the indicator 1 .
  • Case C is a case made of black resin or metal that has light shielding properties. Case C accommodates indicator 1 , phase shifter 2 , first reflector 31 , second reflector 32 , and controller 4 .
  • Design procedure for phase shifter 2 A design procedure for the phase shifter 2 will be described below with reference to FIG. Optimal values (approximate solutions) for the properties and arrangement of the three retardation films 21, 22, and 23 are obtained by the following design procedure.
  • Step S1 the quantitative evaluation values of the incident light and the output light of each optical element 3 are measured at three light wavelengths of red, green, and blue, and the light propagation characteristics of each optical element 3 are calculated from the quantitative evaluation values. do. Note that this measurement is performed without the phase shifter 2 . After performing step S1, step S2 is performed.
  • the wavelength of red light is 488 nm, for example.
  • the wavelength of green light is, for example, 532 nm.
  • the wavelength of blue light is, for example, 632 nm.
  • the optical elements 3 are the first reflecting mirror 31, the second reflecting mirror 32, the translucent dustproof cover 33, and the windshield WS.
  • the measurement of the quantitative evaluation value of the light incident on the first reflecting mirror 31 located in the frontmost stage is also the quantitative evaluation value of the light emitted from the indicator 1 since the phase shifter 2 is absent.
  • the measurement of the quantitative evaluation values of the incident light and outgoing light of the optical element 3 indicates, for example, the Stokes parameter.
  • the Stokes parameters of the incident light a ( ⁇ ) of one optical element 3 at the wavelength ⁇ are four Stokes parameters Sa0 ( ⁇ ), Sa1 ( ⁇ ), Sa2 ( ⁇ ), and Sa3 ( ⁇ ) Measure parameters.
  • the Stokes parameter of the emitted light b( ⁇ ) of one optical element 3 at the wavelength ⁇ is the four Stokes parameters Sb0( ⁇ ), Sb1( ⁇ ), Sb2( ⁇ ), and Sb3( ⁇ ) to measure.
  • the light propagation characteristics of the optic 3 are, for example, an amplitude ratio angle and a phase difference. These amplitude ratio angles and phase differences can be derived from the Stokes parameters described above.
  • Step S2 the target value of the output light b( ⁇ ) at the wavelength ⁇ of the last optical element 3 is set, and the polarization characteristics and arrangement of the phase shifter 2 that satisfies this target value (or approximates the target value) are calculated. do.
  • An optimum solution (approximate solution) for the polarization characteristics and arrangement of the retarder 2 is calculated by a genetic algorithm. The detailed procedure of step S2 of this genetic algorithm is shown in steps S21 to S27 below, and step S21 is executed first.
  • step S21 setting of various condition values of the genetic algorithm is executed. After performing step S21, step S22 is performed.
  • step S22 Specific examples of various condition values in step S22 are as follows. This example obtains the phase shifter 2 with the highest display luminance efficiency when the passenger P does not wear polarized sunglasses and visually recognizes the virtual image V with the naked eye. Further, the initial gene of the phase shifter 2 has neither polarization characteristics nor inclination, so that it does not affect the display light PL at all.
  • step S22 In step S22, one gene is selected from the population of the current generation and set as the setting value of phase shifter 2 to simulate light propagation. This simulation simulates the propagation of the display light PL emitted by the indicator 1 passing through the phase shifter 2 and each optical element 3 . Through this simulation, the quantitative evaluation values of the incident light and outgoing light of each optical element 3 are calculated. After performing step S22, step S23 is performed.
  • Step S23 an evaluation value is calculated based on the evaluation function. This evaluation value is the evaluation value of the set value (gene) of phase shifter 2 . After performing step S23, step S24 is performed.
  • step S24 it is determined whether there is an unselected gene from the population of the current generation. If there are no unselected genes, step S25 is executed. If there are unselected genes, select one from the unselected genes and re-execute step S22.
  • step S25 selection of genes in the population of the current generation is performed.
  • elite selection (20% selection) selects the genes of the current generation population.
  • step S26 is performed.
  • Step S26 In step S26, crossover and mutation are performed based on the genes of the current generation population to create the next generation population. In this embodiment, one-point crossover was adopted as the crossover method, and the mutation rate was set at 10%. After performing step S26, step S27 is performed.
  • Step S27 it is determined whether selection of the next generation is unnecessary. If the number of current generations has reached the number of generations set in step S22, it is determined that selection of the next generation is unnecessary, and step S3 is executed. If the current generation has not reached the number of generations set in step S22, the next generation group created in step S26 is selected as the current generation group, and step S22 is re-executed.
  • step S3 the gene with the highest evaluation value is selected from the genes obtained in step S2 (steps S21 to S27).
  • the retarder 2 having the gene obtained in step S3 as a set value has the following characteristics when the following retardation films 21 to 23 are arranged with an inclination ⁇ of 46°. obtained to be optimal.
  • the retardation film 21 has an azimuth angle of ⁇ 88 degrees at a wavelength of 488 nm and an ellipticity angle of 2.2 degrees. Further, the azimuth angle at a wavelength of 532 nm is ⁇ 88 degrees, and the ellipticity angle is 15 degrees. Also, the azimuth angles at a wavelength of 632 nm are -87 deg and 33 deg.
  • the retardation film 22 has an azimuth angle of ⁇ 42 degrees at a wavelength of 488 nm and an ellipticity angle of 4.4 degrees. Further, the azimuth angle at a wavelength of 532 nm is 39 degrees, and the ellipticity angle is -12 degrees. Also, the azimuth angles at a wavelength of 632 nm are -29 deg and 20 deg.
  • the retardation film 23 has an azimuth angle of ⁇ 34 degrees at a wavelength of 488 nm and an ellipticity angle of ⁇ 34 degrees. Further, the azimuth angle at a wavelength of 532 nm is -20 deg, and the ellipticity angle is 32 deg. Also, the azimuth angles at the wavelength of 632 nm are -7.9 deg and 26 deg.
  • the plurality of retardation films 21 to 23 of the retarder 2 obtained by the optimum solution are used to offset the adverse effects of fine polarized light accumulated due to the arrangement of each optical element 3. It is designed based on a concept completely different from a wave plate such as a ⁇ /4 plate that simply converts linearly polarized light emitted from the indicator 1 into circularly polarized light. In particular, by using a plurality of retardation films 21 to 23, the effects of a plurality of optical elements 3 can be widely offset.
  • the retarder 2 is composed of three retardation films 21 to 23 in the above-described embodiment, it is not limited to this. At least two retardation films may be used, and for example, five or seven retardation films may be used. As a preferred form, it is preferable to set the number of retardation films of the retarder 2 so as to correspond to each optical element 3 . In this case, since each retardation film can be designed to offset the corresponding optical element 3, when there is a change in the components of the head-up display, the retardation film corresponding to the optical element that is the point of change can be changed to the phase difference film. The design is easy because it can be handled by adding it to the child 2.
  • the retarder 2 may be placed anywhere between the indicator 1 and the external optics (windshield WS).
  • the retarder 2 may be arranged between the second reflecting mirror 32 and the translucent dust-proof cover 33 of the internal optics (the first reflecting mirror 31 , the second reflecting mirror 32 , the translucent dust-proof cover 33 ).
  • the output light from the windshield WS of the external optical element 3, which is the final optical element 3, is evaluated, but the present invention is not limited to this.
  • the emitted light from the translucent dust-proof cover 33 which is the final stage of the internal optics, may be evaluated. Alternatively, it may be configured to evaluate the outgoing light of any optical element 3 .
  • phase shifter 2 when the passenger P does not wear polarized sunglasses and visually recognizes the virtual image V with the naked eye is shown, but it is not limited to this.
  • the present disclosure is suitable for obtaining a retarder 2 that offsets adverse effects due to the arrangement of the optical element 3, etc., in obtaining desired emitted light.
  • the output of the final optical element 3 at each wavelength of the discretized number of the spectrum This can be dealt with by setting an evaluation function for evaluating the intensity of the P-polarized component of incident light.
  • phase shifter 2 when designing the phase shifter 2 that obtains a uniform display quality regardless of the wearing state of polarized sunglasses by the passenger P, "the output light of the last stage optical element 3 at each wavelength of the spectrum discretization number This can be dealt with by setting an evaluation function for evaluating the difference in intensity between the S-polarized component and the P-polarized component. Alternatively, it is also possible to design the phase shifter 2 so as to be closest to circularly polarized light by using an evaluation function that evaluates the "flatness of the polarization component of the light emitted from the last optical element 3".
  • the initial gene of the phase shifter 2 is set so as to have neither polarization characteristics nor inclination and to have no influence on the display light PL, but it is not limited to this.
  • the head-up display of the present disclosure includes a display element 1 that emits display light PL representing vehicle information, and a case that has an emission port that houses the display element 1 and emits the display light PL to the outside.
  • a display element 1 that emits display light PL representing vehicle information
  • an optic 3 including a translucent dust-proof cover 33 covering the exit port, and a plurality of retardation plates 21 to 23 having different polarization characteristics, and having a predetermined inclination ⁇ with respect to the principal ray of the display light PL. and a retarder 2 arranged with
  • the inventor of the present disclosure has the problem that the difference in the incident angle of the display light PL on the first reflecting mirror 31, the second reflecting mirror 32, and the translucent dustproof cover 33 causes an adverse effect such as polarization, and It has been found that this problem can be solved by providing a retarder 2 that cancels out the adverse effects of the optical element 3 .
  • the design method of the head-up display of the present disclosure is a design method of the head-up display in which the display light PL emitted by the indicator 1 is visually recognized via the optical element 3 and the phase element 2 .
  • the retarder 2 is composed of a plurality of retardation plates 21 to 23 having different polarization characteristics, and the phase shifter 2 is arranged on the optical path of the display light PL at a predetermined inclination ⁇ with respect to the principal ray of the display light PL.
  • the retarder 2 can be designed to offset the adverse effect on the display light PL caused by the arrangement of the indicator 1 and the optical element 3 .
  • Indicator 11 Light source 12: Liquid crystal panel (polarizer) 2: retarder 21: retardation film (retardation plate) 22: retardation film (retardation plate) 23: retardation film (retardation plate) 3: Optic (internal optical) 31: first reflecting mirror 32: second reflecting mirror 33: translucent dustproof cover 4: control section WS: windshield (external optical element) HUD: Head-up display PL: Display light

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Transportation (AREA)
  • Mechanical Engineering (AREA)
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PCT/JP2022/021188 2021-05-25 2022-05-24 ヘッドアップディスプレイ、及び、ヘッドアップディスプレイの設計方法 Ceased WO2022250032A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2023523475A JP7823659B2 (ja) 2021-05-25 2022-05-24 ヘッドアップディスプレイ、及び、ヘッドアップディスプレイの設計方法
US18/563,661 US20240280808A1 (en) 2021-05-25 2022-05-24 Head-up display and method for designing head-up display
DE112022002776.2T DE112022002776T5 (de) 2021-05-25 2022-05-24 Head-up-Display und Konstruktionsverfahren für ein Head-up-Display

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JP2021-087379 2021-05-25
JP2021087379 2021-05-25

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US (1) US20240280808A1 (https=)
JP (1) JP7823659B2 (https=)
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US12399361B2 (en) * 2023-01-11 2025-08-26 Infineon Technologies Ag Distributed optical architecture for vehicle head up display
US12472815B2 (en) * 2023-07-12 2025-11-18 Infineon Technologies Austria Ag Driver and passenger aware content projection

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JP2001195380A (ja) * 2000-01-11 2001-07-19 Alps Electric Co Ltd 遺伝的アルゴリズムの操作方法及びそれを用いた多層膜光フィルタの製造方法
JP2014044244A (ja) * 2012-08-24 2014-03-13 Asahi Kasei E-Materials Corp 映像表示装置
CN106990528A (zh) * 2017-04-06 2017-07-28 长春理工大学 基于双目标遗传算法的极紫外多层膜高精度表征方法
WO2018056154A1 (ja) * 2016-09-22 2018-03-29 株式会社デンソー ヘッドアップディスプレイ装置
JP2018513565A (ja) * 2015-04-20 2018-05-24 ボード・オブ・リージエンツ，ザ・ユニバーシテイ・オブ・テキサス・システム 大面積多層ナノ構造体の加工

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JP6446259B2 (ja) * 2014-12-24 2018-12-26 旭化成株式会社 ヘッドアップディスプレイ装置
JP2017116667A (ja) * 2015-12-22 2017-06-29 株式会社デンソー ヘッドアップディスプレイ装置
JP7434739B2 (ja) 2019-07-11 2024-02-21 日本精機株式会社 ヘッドアップディスプレイ
TW202144858A (zh) * 2020-03-27 2021-12-01 日商日本化藥股份有限公司 抬頭顯示器

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Publication number Priority date Publication date Assignee Title
JP2001195380A (ja) * 2000-01-11 2001-07-19 Alps Electric Co Ltd 遺伝的アルゴリズムの操作方法及びそれを用いた多層膜光フィルタの製造方法
JP2014044244A (ja) * 2012-08-24 2014-03-13 Asahi Kasei E-Materials Corp 映像表示装置
JP2018513565A (ja) * 2015-04-20 2018-05-24 ボード・オブ・リージエンツ，ザ・ユニバーシテイ・オブ・テキサス・システム 大面積多層ナノ構造体の加工
WO2018056154A1 (ja) * 2016-09-22 2018-03-29 株式会社デンソー ヘッドアップディスプレイ装置
CN106990528A (zh) * 2017-04-06 2017-07-28 长春理工大学 基于双目标遗传算法的极紫外多层膜高精度表征方法

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DE112022002776T5 (de) 2024-03-07
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JP7823659B2 (ja) 2026-03-04

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