WO2022227758A1 - Procédé et dispositif d'épissage et de traitement de lentille holographique - Google Patents

Procédé et dispositif d'épissage et de traitement de lentille holographique Download PDF

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Publication number
WO2022227758A1
WO2022227758A1 PCT/CN2022/074903 CN2022074903W WO2022227758A1 WO 2022227758 A1 WO2022227758 A1 WO 2022227758A1 CN 2022074903 W CN2022074903 W CN 2022074903W WO 2022227758 A1 WO2022227758 A1 WO 2022227758A1
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WIPO (PCT)
Prior art keywords
holographic lens
grating
sub
lens substrate
fringes
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PCT/CN2022/074903
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English (en)
Chinese (zh)
Inventor
邹文龙
华露
李朝明
吴建宏
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苏州大学
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Publication of WO2022227758A1 publication Critical patent/WO2022227758A1/fr

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0012—Optical design, e.g. procedures, algorithms, optimisation routines
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/44—Grating systems; Zone plate systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses

Definitions

  • the present application relates to the technical field of information optics, in particular to a method and device for splicing and processing a holographic lens.
  • Geosynchronous orbit satellites have high temporal resolution and continuous detection capabilities, and have become an important development direction in the field of remote sensing satellites.
  • Large aperture telescope imaging systems can effectively improve the spatial resolution of satellites in geosynchronous orbit.
  • the increase in the diameter of the mirror in the traditional mirror imaging system will lead to an increase in the mass and volume of the system, which exceeds the limit of the vehicle.
  • the splicing technology of multiple small-aperture mirrors requires precise control of the common phase between the sub-mirrors, which requires high performance of the wavefront sensor.
  • diffraction imaging technology [Zhang Jian, Li Mengjuan, Yin Ganghua, et al.
  • Changchun Chinese Academy of Sciences, 2017] designed a thin film diffraction telescope system and produced a 320mm diameter four-step polyimide thin film primary mirror , measured the support structure and imaging performance of thin-film diffractive mirrors; Zhang Jian et al. [Zhang Jian, Li Mengjuan, Yin Ganghua, et al. Large-aperture thin-film Fresnel diffractive element for space telescopes [J]. Optical Precision Engineering, 2016, 24(6): 1289-1296] A two-step Fresnel zone plate with a diameter of 400mm was fabricated on a glass substrate by ultraviolet lithography and ion beam etching, and the polyamide was completed by a replication process.
  • the measured diffraction efficiency is 34%.
  • the fabrication methods of the primary diffraction mirror are UV lithography or laser direct writing.
  • the aperture of the element is limited by the aperture of the equipment. For areas with small line widths, both UV lithography and laser direct writing will produce manufacturing errors. .
  • Liao Zhou et al. Liao Zhou, Qiu Qi, Zhang Yudong. Numerical simulation of block-spliced telescopes [J]. Acta Optics Sinica, 2014, 34(7): 0722002] established a theoretical model of a spliced telescope imaging system.
  • the purpose of the present application is to provide a splicing processing method and device for a holographic lens, the manufacturing method is simple and controllable, and meets the requirements of high spatial resolution of a large-diameter telephoto system.
  • a method for splicing and processing a holographic lens characterized in that the method comprises:
  • the step S1 includes: the laser beam emitted from the laser is divided into transmitted light and reflected light by a beam splitter prism,
  • the transmitted light enters the first spatial filter and after filtering, the transmitted light beam becomes the first spherical wave of emission, and the transmitted light after passing through the half mirror is projected on the holographic lens substrate to be exposed;
  • the reflected light After the reflected light is deflected by the first reflecting mirror and the second reflecting mirror, it is incident on the second spatial filter. After filtering, the reflected light beam becomes the second spherical wave emitted, which is incident on the half mirror, and is reflected and projected. onto the holographic lens substrate to be exposed,
  • the first spherical wave and the second spherical wave interfere on the holographic lens to form interference fringes of concentric rings.
  • the circular sub-grating diaphragm is placed in front of the holographic lens substrate, and the holographic lens substrate is recorded separately.
  • the interference fringes of the first spherical wave and the second spherical wave are developed to obtain a circular sub-grating.
  • first and second for example: the first spherical wave and the second spherical wave are only for the convenience of expression to distinguish the numbers of multiple components of the same type, not for the structure. , and the specific limitation of the shape should not be construed as a limitation on the sequence.
  • this step S2 includes:
  • the real-time interference light fields of the first spherical wave and the second spherical wave are superimposed on the central circular sub-grating of the prepared holographic lens substrate to obtain Moire fringes.
  • the moire fringes after obtaining the moire fringes, it also includes,
  • the parallel plate Insert the parallel plate into the optical path, and move the parallel plate to half of the beam aperture, the first spherical wave is deflected by the parallel plate, and an additional optical path difference is introduced, and the moire fringes change from zero fringe state to Moiré fringes with concentric rings and set them as standard fringes.
  • step S4 exposing the first sub-grating includes:
  • the first sub-grating after exposing the first sub-grating, it further includes:
  • the holographic lens substrate Rotate the holographic lens substrate based on the adjustment device, so that the holographic lens substrate rotates 90° clockwise around the optical axis, and fine-tune the holographic lens substrate adjustment device so that the phase of the fringes collected in real time is consistent with the standard fringes, and the first sub-grating on the edge of the holographic lens substrate is opened.
  • the diaphragm is used to collect fringes in real time, and compare the real-time fringes with the standard fringes.
  • the piezoelectric ceramics of the first reflector By adjusting the piezoelectric ceramics of the first reflector, the phases of the real-time collected fringes and the standard fringes are consistent until the second sub-grating on the edge of the holographic lens substrate is exposed.
  • the second sub-grating diaphragm at the edge of the holographic lens substrate is closed, and the third sub-grating and the fourth sub-grating at the edge of the holographic lens substrate are sequentially exposed in sequence.
  • the embodiment of the present application provides a splicing and processing device for a holographic lens, which is characterized by comprising:
  • the holographic lens exposure splicing control device includes:
  • the first attitude console of the first spatial filter the second attitude console of the second spatial filter, piezoelectric ceramic, parallel plate and moire fringe monitoring module,
  • the first attitude console and the second attitude console are used to adjust the spatial position of the first spherical wave and the second spherical wave
  • the piezoelectric ceramic is connected to the first reflector, and is used to control the micro-displacement of the first reflector to change the optical path of the reflected light in real time,
  • the parallel plate is used to deflect the optical path, so that the positions of the first spherical wave and the second spherical wave are slightly displaced, and the formed optical field interference fringes are superimposed with the prepared holographic lens, thereby forming moire fringes.
  • the holographic lens substrate adjusting device includes:
  • the holographic lens substrate has a five-dimensional adjustment frame, a rotating frame and a diaphragm, and the diaphragm is placed in front of the holographic lens substrate.
  • the five-dimensional adjustment frame of the holographic lens substrate is connected to the holographic lens substrate to adjust the spatial position of the holographic lens substrate,
  • the rotating frame is configured to be rotatable around the optical axis to realize multiple splicing exposures; the diaphragm is used to block the areas on the holographic lens substrate that do not need exposure, and sequentially expose the areas to be exposed.
  • the circular sub-grating aperture and the first sub-grating aperture at the edge of the holographic lens there are five types of apertures, the circular sub-grating aperture and the first sub-grating aperture at the edge of the holographic lens, the second sub-grating aperture at the edge of the holographic lens, the third sub-grating aperture at the edge of the holographic lens, and the fourth sub-grating aperture at the edge of the holographic lens
  • the grating diaphragm, the circular sub-grating diaphragm is used to shield light when making the circular sub-grating
  • the sub-grating diaphragm at the edge of the holographic lens is used to shield the light when the first to fourth sub-gratings are produced at the edge of the holographic lens.
  • the Moiré fringe monitoring module includes a camera, an image acquisition and display module, the camera is connected to an image acquisition and display module, and the image acquisition and display module displays the camera in real time. An image of the moiré pattern taken.
  • a circular sub-grating is prepared in the center of the holographic lens substrate.
  • the circular sub-grating is a sub-region of the holographic lens.
  • the relative position of the holographic lens substrate and the real-time interference light field is adjusted so that the circular sub-grating is The grating and the real-time interference light field are partially overlapped to generate Moiré fringes.
  • the holographic lens substrate is adjusted to make the moiré fringes zero, and the remaining sub-gratings at the edge of the holographic lens substrate are sequentially exposed and processed to obtain a large-diameter holographic lens.
  • the splicing processing method of the holographic lens proposed in the embodiment of the present application is particularly suitable for processing large-diameter gratings of more than 400 mm, and the splicing precision is high.
  • the curved grating lines are spliced, and the manufacturing process is simple and controllable, and it can be mounted on satellites in geosynchronous orbit to meet the high spatial resolution requirements of large-diameter telescopic systems.
  • FIG. 1 is a light path diagram of exposure and splicing of a holographic lens according to an embodiment of the present application.
  • FIG. 2 is a schematic diagram of splicing a holographic lens according to an embodiment of the present application.
  • FIG. 3 is a Moiré fringe formed by the superposition of the circular sub-grating and the real-time interference light field according to the embodiment of the present application.
  • FIG. 4 is a measurement optical path of a holographic lens interferometer according to an embodiment of the present application.
  • FIG. 5 is a schematic diagram of a measurement result of a holographic lens according to an embodiment of the present application.
  • 1-beam splitting prism 2-first reflector, 3-piezoelectric ceramics, 4-second reflector, 5-first spatial filter, 6-second spatial filter, 7-semi-transparent mirror , 8- the attitude console of the first spatial filter, 9- the attitude console of the second spatial filter, 10- parallel plate, 11- holographic lens substrate, 12- holographic lens substrate attitude adjustment system, 13- moire fringe monitoring system .
  • the present application proposes a splicing and processing method for a holographic lens, the method comprising:
  • Exposure After exposing the first sub-grating on the edge of the holographic lens substrate, rotate the preset angle to expose and sequentially splicing other sub-gratings on the edge of the holographic lens substrate to obtain a large-diameter holographic lens.
  • four sub-gratings are arranged on the edge of the holographic lens substrate, which is rotated by 90°.
  • 6 sub-gratings are arranged on the edge of the holographic lens substrate, which is rotated by 60°, so as to sequentially splicing other sub-gratings on the edge of the holographic lens substrate. grating.
  • a parallel plate is used to deflect the optical path, and the beam aperture is enlarged due to the beam deflection, and the curved grating lines are sequentially spliced into each edge sub-grating (such as the first to fourth sub-gratings) by rotating exposure to obtain Large aperture holographic lens.
  • edge sub-grating such as the first to fourth sub-gratings
  • four sub-gratings are arranged on the edge of the hologram lens substrate.
  • the number of edge-configured sub-gratings is not limited, so long as the curved grating lines can be spliced through the rotational exposure of the holographic lens substrate.
  • the method of the circular sub-grating is described with reference to FIG. 1 and FIG. 2 , firstly, the circular sub-grating is fabricated in the center of the holographic lens substrate. According to FIG. 1, the laser beam emitted from the laser is divided into transmitted light and reflected light by the beam splitter prism 1,
  • the transmitted light enters the first spatial filter 5, and after filtering, the transmitted light beam becomes the first spherical wave emitted, and after passing through the half mirror 7, the transmitted light is projected onto the holographic lens substrate 11 to be exposed;
  • the reflected light After the reflected light is turned by the first reflecting mirror 2 and the second reflecting mirror 4, it is incident on the second spatial filter 6. After filtering, the reflected light beam becomes the second spherical wave emitted, which is incident on the half mirror 7. , the reflection is projected onto the holographic lens substrate 11 to be exposed.
  • the first spherical wave and the second spherical wave interfere on the holographic lens 11 to form interference fringes of concentric rings.
  • the center of the interference fringes is coincident with the center of the holographic lens substrate.
  • the circular sub-grating diaphragm is placed in front of the holographic lens substrate, the interference fringes of the first and second spherical waves are recorded on the holographic lens substrate, the circular sub-grating is obtained by developing, and the holographic lens substrate is reset (restored to its original position), Reset the circular sub-grating diaphragm.
  • exposing a circular sub-grating at the geometric center of the grating substrate further includes resetting after development.
  • the method further includes: adjusting the relative position of the grating substrate and the real-time interference light field, so that the circular sub-grating and the real-time interference light field are adjusted.
  • the Moiré fringe is zero stripe state (that is, no black circular stripe state), at this time, insert the parallel plate 10 into the optical path, move the parallel plate 10 to the half position of the beam aperture, and the first spherical wave is deflected by the parallel plate 10 and introduced into the optical path.
  • the above-mentioned moiré fringes change from zero fringe state to moiré fringes of concentric rings, as shown in Figure 3, the moiré fringes at this time are recorded in real time with a camera and set as standard fringes.
  • the step of beam deflecting and expanding the beam aperture also includes: fine-tuning the first mirror 2, so that the reflected beam is deflected toward the edge of the holographic lens substrate, and by adjusting the first spatial filter 5 and the second spatial filter
  • the three-dimensional adjustment frame of 6 makes the moire fringes of the circular sub-grating in the center of the holographic lens substrate return to the above standard fringes.
  • Exposure splicing is performed based on the deflection of the beam and the rotation of the grating substrate so that the moire fringes of the circular sub-grating and the real-time interference light field are consistent with the previous reference fringes.
  • the above-mentioned first sub-grating at the edge of the holographic lens substrate includes:
  • the second sub-grating diaphragm on the edge of the holographic lens substrate Open the second sub-grating diaphragm on the edge of the holographic lens substrate, collect the moire fringes in FIG. 3 in real time, compare the real-time fringes with the standard fringes, and adjust the piezoelectric ceramics 3 of the first reflector to make the real-time collected fringes match the standard fringes.
  • the phases of the fringes are consistent until the exposure of the second sub-grating at the edge of the holographic lens substrate is completed, and the aperture of the second sub-grating at the edge of the holographic lens substrate is closed.
  • the third and fourth sub-gratings at the edge of the holographic lens substrate are exposed sequentially.
  • the central circular sub-grating of the holographic lens substrate is sealed with a sealing ring, and the edge sub-gratings are developed.
  • the holographic lens substrate After developing, put the holographic lens substrate into the measuring optical path of the interferometer.
  • the measuring optical path is shown in Figure 4.
  • the interferometer emits a convergent spherical wave, and the convergence point is just at the focal point of the holographic lens.
  • the spherical wave is incident on the holographic lens substrate, and its -1st-order diffracted light becomes parallel light, and the parallel light returns to the interferometer along the original optical path through the auxiliary mirror.
  • the measurement results are shown in Figure 5, the splicing error between each seam (the seam is the black line in the figure, the splicing of the first sub-grating - the fourth sub-grating and the circular sub-grating in the center of the substrate can refer to Figure 2) All are better than 0.1 ⁇ ( ⁇ is the wavelength).
  • the embodiment of the present application provides a holographic lens splicing and processing device of the above method, and the device includes:
  • a holographic lens exposure recording device a holographic lens exposure splicing control device and a holographic lens substrate adjustment device.
  • FIG. 1 the holographic lens exposure splicing optical path diagram of the embodiment of the application is shown
  • the laser beam emitted from the laser is divided into transmitted light and reflected light by the beam splitter prism 1,
  • the transmitted light enters the first spatial filter 5, and after filtering, the transmitted light beam becomes the first spherical wave emitted, and after passing through the half mirror 7, the transmitted light is projected onto the holographic lens substrate 11 to be exposed;
  • the reflected light After the reflected light is turned by the first reflecting mirror 2 and the second reflecting mirror 4, it is incident on the second spatial filter 6. After filtering, the reflected light beam becomes the second spherical wave emitted, which is incident on the half mirror 7. , the reflection is projected onto the holographic lens substrate 11 to be exposed.
  • the first spherical wave and the second spherical wave interfere on the holographic lens 11 to form interference fringes of concentric rings.
  • the holographic lens exposure splicing control device includes: an attitude console 8 of the first spatial filter 5 , an attitude console 9 of the second spatial filter 6 , a piezoelectric ceramic 3 , a parallel plate 10 and a moire fringe monitoring system 13 .
  • the attitude console 8 of the first spatial filter 5 and the attitude console 9 of the second spatial filter 6 are used to adjust the spatial positions of the first spherical wave and the second spherical wave.
  • Piezoelectric ceramics are used to control the micro-displacement of the first reflecting mirror 2 to change the optical path of the reflected light in real time.
  • the parallel plate 10 deflects the optical path, so that the positions of the first spherical wave and the second spherical wave are slightly displaced, and the formed optical field interference fringes are superimposed with the prepared holographic lens to form moire fringes.
  • the moire fringe monitoring system 13 includes a camera, an image acquisition and display system, and displays the image of the moiré fringes in real time.
  • the holographic lens substrate adjusting device mainly includes: a five-dimensional adjusting frame of the holographic lens substrate, a rotating frame and a diaphragm.
  • the five-dimensional adjustment frame of the holographic lens substrate is used to adjust the spatial position of the holographic lens substrate, and the rotating frame can rotate around the optical axis to realize multiple splicing exposures.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Holo Graphy (AREA)

Abstract

L'invention concerne un procédé et un dispositif d'épissage et de traitement d'une lentille holographique. Le procédé d'épissage et de traitement consiste à : exposer un sous-réseau circulaire au centre géométrique d'un substrat de lentille holographique (11); ajuster les positions relatives du substrat de lentille holographique (11) et un champ de lumière d'interférence en temps réel, de telle sorte que des franges de moiré du sous-réseau circulaire et du champ de lumière d'interférence en temps réel sont dans un état de frange zéro, et insérer des plaques plates parallèles (10) pour dévier un faisceau de lumière de façon à étendre un diamètre du faisceau de lumière pour obtenir une frange de référence, et enregistrer la frange de référence sur la base d'un dispositif d'enregistrement; et exposer un premier sous-réseau au niveau d'un bord du substrat de lentille holographique (11), et après l'exposition, faire tourner le premier sous-réseau par un angle prédéfini pour l'exposition, et épisser séquentiellement des autres sous-réseaux au niveau du bord du substrat de lentille holographique (11) pour obtenir une lentille holographique à grande ouverture. Selon le procédé, le diamètre du faisceau de lumière est élargi au moyen de la déviation du faisceau de lumière, des lignes de réseau courbées sont épissées au moyen d'une exposition et d'un épissage pour fabriquer la lentille holographique à grande ouverture, et l'exigence de haute résolution spatiale d'un système de téléobjectif à grande ouverture est satisfaite.
PCT/CN2022/074903 2021-04-25 2022-01-29 Procédé et dispositif d'épissage et de traitement de lentille holographique WO2022227758A1 (fr)

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CN202110450575.3A CN115248488A (zh) 2021-04-25 2021-04-25 一种全息透镜的拼接加工方法及装置
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CN117687136B (zh) * 2024-02-04 2024-04-16 安徽中科光栅科技有限公司 一种拼接光栅对准精度检测方法
CN117687135B (zh) * 2024-02-04 2024-04-16 安徽中科光栅科技有限公司 一种虚实光栅对准方法

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US5071207A (en) * 1990-09-25 1991-12-10 The United States Of America As Represented By The United States Department Of Energy Broadband diffractive lens or imaging element
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