WO2022227220A1 - Heat dissipation device having flat heat pipe and cooling liquid plate composite structure and manufacturing method for heat dissipation device - Google Patents

Heat dissipation device having flat heat pipe and cooling liquid plate composite structure and manufacturing method for heat dissipation device Download PDF

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Publication number
WO2022227220A1
WO2022227220A1 PCT/CN2021/097438 CN2021097438W WO2022227220A1 WO 2022227220 A1 WO2022227220 A1 WO 2022227220A1 CN 2021097438 W CN2021097438 W CN 2021097438W WO 2022227220 A1 WO2022227220 A1 WO 2022227220A1
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Prior art keywords
cooling liquid
layer
heat pipe
flat
plate
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PCT/CN2021/097438
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French (fr)
Chinese (zh)
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秦贯丰
刘治猛
崔立峰
尹辉斌
彭可文
翁万良
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东莞理工学院
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Publication of WO2022227220A1 publication Critical patent/WO2022227220A1/en

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    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F1/00Details not covered by groups G06F3/00 - G06F13/00 and G06F21/00
    • G06F1/16Constructional details or arrangements
    • G06F1/20Cooling means
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2200/00Indexing scheme relating to G06F1/04 - G06F1/32
    • G06F2200/20Indexing scheme relating to G06F1/20
    • G06F2200/201Cooling arrangements using cooling fluid
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02DCLIMATE CHANGE MITIGATION TECHNOLOGIES IN INFORMATION AND COMMUNICATION TECHNOLOGIES [ICT], I.E. INFORMATION AND COMMUNICATION TECHNOLOGIES AIMING AT THE REDUCTION OF THEIR OWN ENERGY USE
    • Y02D10/00Energy efficient computing, e.g. low power processors, power management or thermal management

Definitions

  • the invention relates to the technical field of radiators, in particular to a radiator with a composite structure of a flat plate heat pipe and a cooling liquid plate.
  • the principle is that the heat generated by the high heat flux density device is conducted to the heat pipe, so that the working fluid in the heat pipe undergoes a phase change to transfer the heat to the bottom plate, and then the heat is dissipated through the forced convection between the fins and the air.
  • the heat pipe inlaid on the bottom surface of the radiator can be arranged in various ways.
  • the power density of a single central processing unit (CPU) of today's supercomputers is as high as 20W/cm 2 , and a huge amount of heat must be removed from the CPU and the cabinet in time to ensure the normal operation of the supercomputing center.
  • Using a finned heat exchanger to dissipate the heat from the CPU into the air can no longer solve this problem.
  • the cooling method for supercomputing CPUs and large data centers mainly adopts liquid cooling method, that is, the cooling liquid is used to transport heat to the outdoor, including cold liquid plate cooling and immersion cooling. Both methods have their own advantages and disadvantages.
  • the said cooling liquid plate is in contact with the surface of the CPU, and the cooling liquid is carried inside and the heat is carried away. Cooling plate heat dissipation is convenient for system debugging and maintenance (after all, a lot of debugging and maintenance is unavoidable for supercomputing), but the cooling effect of cold liquid plate is inferior to that of immersion heat dissipation.
  • the heat transfer analysis between the cooling liquid plate in the prior art from the heating device (heat source, such as CPU) to the cooling liquid (cooling source) of the cooling liquid plate is as follows: the heat Q generated by the CPU passes through The thermal conductive adhesive layer, and then from the thermal conductive adhesive layer (silicon grease film) to the cooling liquid plate (including the upper cooling liquid plate and the lower cooling liquid plate), and then from the cooling liquid plate to the cooling liquid, the cooling liquid plate is an aluminum plate.
  • the overall heat transfer coefficient U can be expressed as:
  • U is the total heat transfer coefficient
  • ⁇ 1 is the thermal conductivity of the silicone grease (5Wm -1 K -1 )
  • ⁇ 2 is the thermal conductivity of the aluminum plate (237Wm -1 K -1 ).
  • h 3 is the film heat transfer coefficient of the cooling liquid on the inner surface of the flow channel of the aluminum plate.
  • the total heat transfer thermal resistance 1/(UA) is the sum of the thermal resistance R 1 of the silicone grease film, the thermal resistance R 2 of the aluminum plate, and the thermal resistance R 3 of the cooling liquid heat transfer film (heat transfer boundary layer).
  • the heat transfer coefficient of the liquid film can be calculated by the following formula. Calculations are omitted.
  • the heat transfer resistance of the cooling liquid film is nearly 24 times that of the aluminum plate (R 3 /R 2 ) and 100 times that of the silicone grease film (R 3 /R 1 ).
  • the main heat transfer resistance comes from Heat transfer liquid film between coolant and aluminum plate. It can be seen that to strengthen the cooling effect of the cooling liquid plate, the key is to strengthen the heat transfer between the cooling liquid and the cooling liquid plate. Strengthening the turbulent flow between the cooling liquid and the cooling liquid plate can increase the turbulent flow intensity of the cooling liquid. However, increasing the turbulent flow intensity means increasing the flow rate of the cooling liquid, which is extremely unfavorable for large-scale CPU cluster use (such as supercomputing). For example, if one CPU doubles the coolant flow rate, for a supercomputing cabinet, there are hundreds or thousands of CPUs, which means that the coolant flow rate is doubled!
  • the purpose of the present invention is to provide a radiator with a composite structure of a flat plate heat pipe and a cooling liquid plate, which can realize the integration of the flat heat pipe and the cooling liquid plate, and the flat heat pipe and the cooling liquid plate.
  • the heating element contacts and transfers heat through conduction, and the heat is taken away by the cooling liquid in the cooling liquid plate.
  • Another object of the present invention is to provide a method for making a radiator with a composite structure of a flat heat pipe and a cooling liquid plate, which is simple to operate, easy to control, and has high production efficiency, which can be used in large-scale production and the quality of the radiator produced. Stable, long service life and good heat dissipation.
  • a radiator with a composite structure of a flat plate heat pipe and a cooling liquid plate comprising a base plate, the base plate comprising a cooling liquid plate layer and an upper end surface and/or an upper end surface and/or a cooling liquid plate layer disposed on the cooling liquid plate layer.
  • the flat heat pipe layer on the lower end surface, the cooling liquid flow channel is arranged in the cooling liquid plate layer;
  • cooling fins are arranged in the cooling liquid flow channel.
  • a plurality of row holes arranged in parallel are arranged in the flat plate heat pipe layer.
  • the inner wall of the row of holes is provided with a porous medium layer.
  • both ends of the hole row channel are provided with sealing plugs, and the sealing plug is used to seal both ends of the hole row channel.
  • a plurality of cooling liquid flow passages arranged in parallel are arranged in the cooling liquid plate layer, and the row holes are arranged in parallel with the cooling liquid flow passages.
  • both ends of the cooling liquid plate layer are provided with end caps, and the end caps are provided with a cooling liquid inlet and a cooling liquid outlet.
  • the substrate is an aluminum substrate, and the cold liquid plate layer and the flat-plate heat pipe layer are integrally formed.
  • the base plate includes a cold liquid plate layer and a flat plate heat pipe layer disposed on the lower end surface of the cold liquid plate layer.
  • the upper and lower end surfaces of the cold liquid plate layer are provided with flat plate heat pipe layers.
  • the above-mentioned manufacturing method of a radiator with a flat plate heat pipe and a cooling liquid plate composite structure comprises the following steps:
  • a plurality of rows of holes are arranged in the production layer of the flat-plate heat pipe;
  • a porous medium layer is arranged on the inner wall surface of the row holes of the production layer of the flat heat pipe;
  • a porous medium layer is arranged on the inner wall surface of the row holes of the flat-plate heat pipe fabrication layer
  • End caps are respectively provided at both ends of the cooling liquid plate manufacturing layer with built-in cooling fins, and the end caps are provided with a cooling liquid inlet and a cooling liquid outlet.
  • the manufacturing method of the porous medium layer includes the following steps:
  • A1 Insert a pin in the center of each row of holes along the axial direction, and the cross-sectional area of the pin is set to leave a gap of 0.5-1mm with the inner wall of the row of holes after insertion;
  • the aluminum substrate is placed vertically, and aluminum powder or aluminum alloy powder is filled in the remaining gaps of each row of holes;
  • Fill the sintering furnace with nitrogen, and the partial pressure of moisture in the nitrogen atmosphere is 0.001-0.02kPa; heat the sintering furnace at a heating rate of 5-8°C/min until 560-600°C; maintain it in a nitrogen protective atmosphere at least 1h;
  • the partial pressure of moisture in the nitrogen atmosphere is 0.001-0.02kPa; the sintering furnace is heated at a heating rate of 5-8°C/min until 560-600°C; maintained in a nitrogen protective atmosphere for at least 1 hour .
  • the radiator of the present invention has a composite structure of a flat heat pipe and a cooling liquid plate, the radiator can realize the integration of the flat heat pipe and the cooling liquid plate, the flat heat pipe contacts the heating element and transfers heat through conduction, and the cooling
  • the cooling liquid in the liquid plate takes away heat and has good heat dissipation performance, which can be suitable for heat dissipation of electronic heating elements, especially ultra-high power density and densely arranged electronic elements.
  • Another object of the present invention is to provide a method for making a radiator with a composite structure of a flat heat pipe and a cooling liquid plate, which is simple to operate, easy to control, and has high production efficiency, which can be used in large-scale production and the quality of the radiator produced. Stable, long service life and good heat dissipation.
  • FIG. 1 is a cross-sectional side view of a cooling liquid plate in the prior art
  • Fig. 2 is a cross-sectional top view along A-A in Fig. 1;
  • Example 3 is a cross-section of the substrate of Example 1;
  • Fig. 4 is the schematic diagram that the aluminum powder of embodiment 1 is filled into the row hole of flat heat pipe;
  • Embodiment 7 is a schematic cross-sectional view of Embodiment 1;
  • Example 8 is a cross-section of the substrate of Example 2.
  • FIG. 9 is a partial enlarged view of a section of flat heat pipe layer and a cooling liquid plate of Example 2;
  • Reference numerals are: 11, upper cooling liquid plate; 12, lower cooling liquid plate; 13, cooling liquid chamber; 14, fixing bolts; 15, heating element; 16, thermal conductive adhesive layer; 17, cooling liquid flow channel; 18, Flat heat pipe layer; 19, end cap; 20, base plate; 21, pin; 22, row hole; 23, cooling fin; 24, condensation area; 25, evaporation area; 26, porous medium layer; 27, steam channel ; 28, sealing plug.
  • a heat sink with a composite structure of a flat heat pipe and a cooling liquid plate including a base plate 20 , and the base plate 20 includes a cooling liquid plate layer and a flat-plate heat pipe layer 18 arranged on the upper end face and/or the lower end face of the cooling liquid plate layer, the cooling liquid flow channel 17 is arranged in the cooling liquid plate layer; the cooling liquid flow channel 17 is arranged with radiating fins twenty three.
  • the flat-plate heat pipe layer 18 is provided with a plurality of row holes 22 arranged in parallel.
  • the inner wall of the row holes 22 is provided with a porous medium layer 26 .
  • sealing plugs 28 are provided at both ends of the channels of the row holes 22 , and the sealing plugs 28 are used to seal the two ends of the channels of the row holes 22 .
  • the row holes 22 are used to install a low-boiling-point working medium, and the low-boiling-point working medium is preferably, but not limited to, acetone and R134a.
  • a plurality of cooling liquid flow channels 17 arranged in parallel are arranged in the cooling liquid plate layer, and the row holes 22 are arranged in parallel with the cooling liquid flow channels 17 .
  • both ends of the cooling liquid plate layer are provided with end caps 19, and the end caps 19 are provided with a cooling liquid inlet and a cooling liquid outlet.
  • the substrate 20 is an aluminum substrate 20 , and the cold liquid plate layer and the flat-plate heat pipe layer 18 are integrally formed.
  • the base plate 20 includes a cold liquid plate layer and a flat plate heat pipe layer 18 disposed on the lower end surface of the cold liquid plate layer.
  • a flat plate heat pipe layer 18 is provided on both the upper end surface and the lower end surface of the cold liquid plate layer.
  • the above-mentioned manufacturing method of a radiator with a flat plate heat pipe and a cooling liquid plate composite structure includes the following steps:
  • an aluminum substrate 20 is fabricated by extrusion molding, precision casting or 3D printing.
  • the aluminum substrate 20 includes a cold liquid plate fabrication layer and a flat heat pipe fabrication layer; the aluminum substrate 20 can be A schematic diagram of the structure of the two-layer substrate 20 or the structure of the three-layer substrate 20; the plate walls between the channels in the substrate 20 have no trachoma or cracks that can cause leakage.
  • a plurality of holes 22 are arranged in the production layer of the flat heat pipe; the holes 22 constituting the flat heat pipe can be square holes or round holes; the size is controlled within a certain range, such as 1 ⁇ 1mm 2 /piece -5 ⁇ 5mm 2 /piece, or circular holes with a diameter of 1-5mm, the number of the row holes 22 is determined by the width of the flat heat pipe layer 18 .
  • the length and width of the flat heat pipe are usually larger than the size of the heating element 15 such as the CPU, so as to increase the effective heat transfer area;
  • the size of the square holes is preferably 1 ⁇ 1mm 2 /piece, 2 ⁇ 2mm 2 /piece, 3 ⁇ 3mm 2 / and 4 ⁇ 4mm 2 /piece, 5 ⁇ 5mm 2 /piece;
  • the size of the circular hole is preferably 1mm, 2mm, 3mm, 4mm and 5mm in diameter;
  • a porous medium layer 26 is provided on the inner wall surface of the row holes 22 of the flat heat pipe fabrication layer;
  • the thickness of the porous medium layer 26 is 0.5-1 mm, and the porous medium layer 26 is preferably 0.5 mm, 0.6 mm, 0.7 mm, 0.8 mm, 0.9 mm and 1 mm.
  • S4 block one end of the exhaust hole 22 to make it airtight, and use a plug for laser welding sealing or a plug for argon arc welding to form a sealing plug 28; inject a low-boiling point working medium into the exhaust hole 22; the working medium Including but not limited to acetone, R134a.
  • a porous medium layer 26 is provided on the inner wall surface of the row holes 22 of the flat-plate heat pipe fabrication layer;
  • End caps 19 are respectively provided at both ends of the cold liquid plate fabrication layer with built-in cooling fins 23, and the end caps 19 are provided with a cooling liquid inlet and a cooling liquid outlet.
  • the manufacturing method of the porous medium layer 26 includes the following steps:
  • the cross-sectional area of the pin 21 is large enough to leave a gap of 0.5-1mm with the inner wall surface of the row hole 22; insert the pin
  • the aluminum substrate 20 of 21 is placed vertically, and aluminum powder or aluminum alloy powder is filled into the remaining gap of each row of holes 22; the width of the gap is preferably 0.5mm, 0.6mm, 0.7mm, 0.8mm, 0.9mm, 1mm ;
  • the aluminum powder or aluminum alloy powder is filled in the way of natural gravity accumulation, and mechanical vibration can be applied to assist filling, but no mechanical external force is applied to compact, so that the thin layer maintains a high porosity, as shown in Figure 4,
  • the granular material in FIG. 4 is aluminum powder or aluminum alloy powder; the pin 21 is a square pin or a cylindrical pin with a circular cross-section;
  • Fill the sintering furnace with nitrogen, and the partial pressure of moisture in the nitrogen atmosphere is 0.001-0.02kPa; heat the sintering furnace at a heating rate of 5-8°C/min until 560-600°C; maintain it in a nitrogen protective atmosphere at least 1h;
  • the porous medium layer 26 is made of aluminum powder or aluminum alloy powder through a powder metallurgy sintering process.
  • the aluminum powder or aluminum alloy powder can be, but not limited to, spherical or nearly spherical particles, and the diameter can be in the range of 1-500 ⁇ m.
  • a more uniform particle diameter distribution (that is, a narrower particle diameter distribution range) is selected as much as possible to ensure the porosity and permeability of the porous medium layer 26; non-spherical (irregular shape) ) particles are beneficial to increase the porosity and permeability of the sintered thin layer; the raw material aluminum powder or aluminum alloy powder can be evenly mixed with an appropriate amount of sintering aids, such as tin powder and magnesium powder, and the dosage is 0.1 of the aluminum powder. -1wt%, you can also not use it.
  • a radiator with a composite structure of a flat plate heat pipe and a cooling liquid plate includes a base plate 20, the base plate 20 includes a cooling liquid plate layer and a heat sink disposed on the upper end surface and the lower end surface of the cooling liquid plate layer
  • Two flat heat pipe layers 18 are provided with cooling liquid flow channels 17 in the cooling liquid plate layers.
  • the flat heat pipe layer 18 is used for contacting with electronic components, so as to dissipate heat from the electronic components, and the electronic components are CPU or other electronic components.
  • the substrate 20 is an aluminum substrate 20 , and the cold liquid plate layer and the flat heat pipe layer 18 are integrally formed.
  • the radiator is a composite radiator having a composite structure of a flat heat pipe and a cooling liquid plate.
  • the cooling liquid plate layer provided with the cooling liquid plate and the flat heat pipe layer 18 provided with the flat heat pipe are integrally arranged.
  • the flat-plate heat pipe layer 18 is provided with a plurality of row holes 22 arranged in parallel.
  • the inner wall of the row holes 22 is provided with a porous medium layer 26 . Due to the arrangement of the above structure, a plurality of flat plate heat pipes distributed in parallel are formed in the flat plate heat pipe layer 18 .
  • sealing plugs 28 are provided at both ends of the passage of the row holes 22 , and the sealing plugs 28 are used to seal both ends of the passage of the row holes 22 .
  • the cooling liquid channel 17 is provided with heat dissipation fins 23 to enhance the heat dissipation effect.
  • the cooling liquid plate in the prior art is shown in Figures 1-2.
  • the cooling liquid plate includes an upper cooling liquid plate 11 and a lower cooling liquid plate 12.
  • the upper cooling liquid plate 11 and the lower cooling liquid plate 12 are fixed by fixing bolts 14.
  • a cooling liquid cavity 13 and a cooling liquid flow channel 17 are formed between the upper cooling liquid plate 11 and the lower cooling liquid.
  • the heat conduction analysis of the cooling liquid plate in use is as follows: the heat Q generated by the heating element 15 such as (CPU) passes through the thermal conductive adhesive layer 16, and then from the thermal conductive adhesive layer 16 (silicone film) to the cooling liquid plate (including the upper cooling liquid plate 11).
  • the cooling liquid plate is an aluminum plate
  • the thermally conductive adhesive layer 16 is a silicone grease film. The heat dissipation effect of the above cooling liquid plate needs to be improved.
  • the present invention is an integrated radiator combining a flat heat pipe and a cooling liquid plate, and is used for ultra-high power density and densely arranged electronic components, such as CPU and circuit board temperature control in a supercomputing center cabinet.
  • Theoretical estimation shows that the heat transfer resistance can still be reduced to around 0.01K ⁇ W -1 under the condition of greatly reducing the coolant flow rate.
  • the heat transfer density can be guaranteed up to 70W ⁇ cm -2 .
  • is the density of the cooling water (1 g ⁇ cm ⁇ 3 ), and S is the cross-sectional area (5 cm 2 ) of the cooling liquid flow channel 17 of the cooling liquid plate. It can be seen that within this flow velocity range, the flow is laminar flow. The low flow rate can effectively reduce the energy consumption required to pump the cooling water.
  • the radiator is provided with three layers, the uppermost layer and the lowermost layer are both flat heat pipe layers 18, the flat heat pipe layer 18 is provided with a plurality of row holes 22, and the row holes 22 are built with a porous medium layer 26, and the porous medium
  • the layer 26 constitutes a liquid-absorbing wick built into the drain hole 22, and the flat-plate heat pipe layer 18 contacts the electronic heating element 15 (such as the CPU) to transmit the heat generated by it; 17.
  • the heat transmitted through the plate heat pipe is taken away by the cooling liquid.
  • the composite heat sink is made of metal with good thermal conductivity (such as aluminum or aluminum alloy).
  • a plurality of cooling liquid flow channels 17 arranged in parallel are arranged in the cooling liquid plate layer, and the row holes 22 are arranged in parallel with the cooling liquid flow channels 17 .
  • Both ends of the cooling liquid plate layer are provided with end caps 19, the end caps 19 are provided with a cooling liquid inlet and a cooling liquid outlet, and a distributor is arranged in the cooling liquid inlet.
  • the cooling liquid plate layer is set as an intermediate layer, and the cooling liquid plate layer is provided with many parallel cooling liquid flow sub-chambers, and a plurality of cooling liquid flow channels 17 are formed, which serve as the equivalent of the cooling fins 23. It can cover the entire area where the flat plate heat pipe is located, that is, the effective heat transfer area of the cooling liquid plate to the cooling liquid is enlarged.
  • Both ends of the radiator are provided with end caps 19 and liquid inlet and outlet ports for the inflow and outflow of the cooling liquid, and the cooling liquid is evenly distributed into the cooling liquid flow channel 17 through the distributor.
  • a heat sink with a composite structure of a flat plate heat pipe and a cooling liquid plate includes a base plate 20, and the base plate 20 includes a cooling liquid plate layer and A flat heat pipe layer 18 is arranged on the lower end face of the cooling liquid plate layer, and cooling liquid flow channels 17 are arranged in the cooling liquid plate layer.
  • the radiator is provided with two layers, one is the flat heat pipe layer 18, the flat heat pipe layer 18 is provided with a plurality of row holes 22, the row holes 22 have a built-in porous medium layer 26, and the porous medium layer 26 constitutes a built-in In the liquid absorbing core in the discharge hole 22, the flat heat pipe layer 18 contacts with the electronic heating element 15 (such as the CPU) to transmit the heat generated by it; The liquid removes the heat transferred through the flat heat pipe.
  • the composite heat sink is made of metal with good thermal conductivity (such as aluminum or aluminum alloy).
  • the above-mentioned manufacturing method of the radiator with the composite structure of the flat heat pipe and the cooling liquid plate includes the following steps:
  • an aluminum substrate 20 is produced by an extrusion molding method, and the aluminum substrate 20 includes a cold liquid plate fabrication layer and a flat heat pipe fabrication layer; the aluminum substrate 20 is a three-layer substrate 20 structure;
  • a plurality of holes 22 are arranged in the production layer of the flat heat pipe; the holes 22 constituting the flat heat pipe are square holes, the size of which is 2 ⁇ 2 mm 2 /piece, and the number of holes 22 is determined by the flat heat pipe layer.
  • the width of 18 determines that the length and width of the flat heat pipe are larger than the size of the heating element 15 such as the CPU, so as to increase the effective heat transfer area;
  • a porous medium layer 26 is provided on the inner wall surface of the row holes 22 of the flat-plate heat pipe fabrication layer;
  • a porous medium layer 26 is provided on the inner wall surface of the row holes 22 of the flat-plate heat pipe fabrication layer;
  • End caps 19 are respectively provided at both ends of the cold liquid plate fabrication layer with built-in cooling fins 23, and the end caps 19 are provided with a cooling liquid inlet and a cooling liquid outlet.
  • the manufacturing method of the porous medium layer 26 includes the following steps:
  • A3 Fill the sintering furnace with nitrogen, and the partial pressure of moisture in the nitrogen atmosphere is 0.01kPa; heat the sintering furnace at a heating rate of 6 °C/min until 580 °C; keep it in a nitrogen protective atmosphere for at least 1h;
  • the porous medium layer 26 is made of aluminum powder through a powder metallurgy sintering process.
  • the aluminum powder is spherical or approximately spherical particles, and the diameter is in the range of 50-100 ⁇ m;
  • the above-mentioned manufacturing method of the radiator with the composite structure of the flat heat pipe and the cooling liquid plate includes the following steps:
  • an aluminum substrate 20 is made by means of precision casting, and the aluminum substrate 20 includes a cold liquid plate fabrication layer and a flat-plate heat pipe fabrication layer; the aluminum substrate 20 can be a two-layer substrate 20 structural schematic diagram;
  • a plurality of holes 22 are arranged in the production layer of the flat heat pipe; the holes 22 constituting the flat heat pipe are square holes, the size of which is controlled at 3 ⁇ 3mm 2 /piece; the number of holes 22 is determined by the flat heat pipe layer The width of 18 is determined.
  • the length and width of the flat heat pipe are usually larger than the size of the heating element 15 such as the CPU, in order to increase the effective heat transfer area;
  • a porous medium layer 26 is provided on the inner wall surface of the row holes 22 of the flat-plate heat pipe fabrication layer;
  • a porous medium layer 26 is provided on the inner wall surface of the row holes 22 of the flat-plate heat pipe fabrication layer;
  • End caps 19 are respectively provided at both ends of the cold liquid plate fabrication layer with built-in cooling fins 23, and the end caps 19 are provided with a cooling liquid inlet and a cooling liquid outlet.
  • the manufacturing method of the porous medium layer 26 includes the following steps:
  • A3 Fill the sintering furnace with nitrogen, and the partial pressure of moisture in the nitrogen atmosphere is 0.02kPa; heat the sintering furnace at a heating rate of 5°C/min until it reaches 560°C; keep it in a nitrogen protective atmosphere for 1h;
  • the aluminum alloy powder of the porous medium layer 26 is made by a powder metallurgy sintering process, and the aluminum alloy powder is spherical or approximately spherical particles with a diameter in the range of 50-100 ⁇ m,
  • the alloy powder is evenly mixed with an appropriate amount of sintering aid, the sintering aid is composed of tin powder and magnesium powder according to a weight ratio of 1:1, and the addition amount of the sintering aid is 1 wt % of the aluminum alloy powder.
  • the above-mentioned manufacturing method of the radiator with the composite structure of the flat heat pipe and the cooling liquid plate includes the following steps:
  • an aluminum substrate 20 is produced by an extrusion molding method, and the aluminum substrate 20 includes a cold liquid plate fabrication layer and a flat heat pipe fabrication layer; the aluminum substrate 20 is a three-layer substrate 20 structure;
  • a plurality of holes 22 are arranged in the production layer of the flat heat pipe; the holes 22 constituting the flat heat pipe are circular holes with a diameter of 3 mm, and the number of holes 22 is determined by the width of the flat heat pipe layer 18. The length and width are larger than the size of the heating element 15 such as the CPU, so as to increase the effective heat transfer area;
  • a porous medium layer 26 is provided on the inner wall surface of the row holes 22 of the flat-plate heat pipe fabrication layer;
  • a porous medium layer 26 is provided on the inner wall surface of the row holes 22 of the flat-plate heat pipe fabrication layer;
  • End caps 19 are respectively provided at both ends of the cooling liquid plate manufacturing layer with built-in cooling fins 23, and the end caps 19 are provided with a cooling liquid inlet and a cooling liquid outlet.
  • the manufacturing method of the porous medium layer 26 includes the following steps:
  • A3 Fill the sintering furnace with nitrogen, and the partial pressure of moisture in the nitrogen atmosphere is 0.001kPa; heat the sintering furnace at a heating rate of 8°C/min until it reaches 600°C; keep it in a nitrogen protective atmosphere for at least 1h;
  • the porous medium layer 26 is made of aluminum powder through a powder metallurgy sintering process.
  • the aluminum powder is spherical or approximately spherical particles, and the diameter is in the range of 50-100 ⁇ m;
  • the working principle is as follows:
  • the substrate 20 is an aluminum substrate 20, and a layer of aluminum-based powder metallurgy sintered porous medium is attached to the inner wall of the row of holes 22 of the aluminum-based flat heat pipe layer 18 to form a porous In the medium layer 26, a steam channel 27 is formed in the middle of the pipe of the row hole 22.
  • the aluminum-based powder metallurgy sintered porous medium layer 26 is also called a liquid absorbing core, and its inner pores are connected to each other; the heat pipe contains a low-boiling-point working medium, and the inside of the pipe is in a negative pressure state.
  • the working medium evaporates and boils, absorbs the latent heat of evaporation, and flows to the cold end along the steam passage 27 .
  • the steam condenses and separates out at the cold end, releasing the latent heat of condensation; and then quickly returns to the location of the heat source through the capillary action of the wick.
  • the radiator forms a condensation zone 24 and an evaporation zone 25 .
  • the heat transported by the evaporation and condensation of the working fluid and its speed make the heat pipe have a thermal conductivity more than 10 times higher than that of a homogeneous metal conductor.
  • the temperature difference of the heat pipe from the heat source (evaporating end) to the cold source (condensing end) is less than 0.1K, that is, the entire flat heat pipe has excellent temperature uniformity.
  • a hollow heat pipe without a wick must be inclined at a certain angle during use.
  • the heat source is at the lower end and the cold source is at the upper end.
  • the condensed wages rely on gravity to return to the heat source.
  • the flat heat pipe with the liquid-absorbing core of the present application can automatically return from the cold source end to the heat source end by means of capillary action, thereby forming an internal circulation of the working medium, and the heat pipe can work normally regardless of whether it is placed flat or at any angle.
  • the cooling liquid plate layer is provided with a plurality of parallel cooling liquid flow channels 17, and the discharge holes 22 are arranged in parallel with the cooling liquid flow channels 17; It is used for the inflow and outflow of the cooling liquid, and evenly distributes the cooling liquid to the cooling liquid flow channel 17 .
  • the flat heat pipe When used as a radiator, the flat heat pipe is in close contact with the high-density power heating device. The heat is transferred from the heating element 15 to the flat heat pipe, from the flat heat pipe to the cooling liquid, and then brought to the outside by the cooling liquid. After cooling, the coolant is pumped back to the coolant plate for circulation.
  • the heat transfer from the electronic heating element 15 to the cooling liquid is strengthened, thereby reducing the thermal resistance from the heat source to the cooling source. It can be seen that the present invention is not intended to strengthen the connection between the CPU and the cooling liquid plate.
  • the heat transfer and the reduction of the thermal resistance R 1 enhance the heat transfer between the cooling liquid plate and the cooling liquid, that is, the R 3 in the above calculation is reduced in a targeted manner.
  • the present invention adopts the above-mentioned cold liquid plate radiator, and the heat transfer effect from the cold liquid plate to the cooling liquid will be greatly improved (theoretical calculation, the thermal resistance of the cold liquid plate without heat pipes is 0.0842K ⁇ W -1 , and the heat transfer with embedded heat pipe arrays is 0.0842K ⁇ W -1 .
  • the cooling liquid plate that is, the thermal resistance of the radiator in this application is 0.03-0.04K ⁇ W -1 , which is about 50% of the original thermal resistance); due to the increase in the actual heat transfer effect, the size of the cooling liquid plate can be adjusted from the original one.
  • the size of the circuit board is reduced to a size that is roughly equal to or slightly larger than the CPU, and the length is comparable to the circuit board, which is reduced to about 1/3 of the original cooling plate.

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Abstract

The present invention relates to the technical field of heat dissipation devices, and in particular to a heat dissipation device having a flat heat pipe and cooling liquid plate composite structure and a manufacturing method for the heat dissipation device. The heat dissipation device comprises a substrate, the substrate comprises a cooling liquid plate layer and flat heat pipe layers provided on the upper end face and/or the lower end face of the cooling liquid plate layer, and cooling liquid flow channels are formed in the cooling liquid plate layer. The heat dissipation device can achieve integration of the flat heat pipes and the cooling liquid plate, the flat heat pipe is in contact with a heating element and heat is transferred by means of conduction, and the heat is taken away by a cooling liquid in the cooling liquid plate, so that the heat dissipation device is good in heat dissipation performance and is suitable for heat dissipation of electronic heating elements, especially electronic elements which are ultrahigh in power density and are densely arranged. The heat dissipation device has simple operations in the manufacturing method, is convenient in control, is high in production efficiency, and is capable of being used for large-scale production; moreover, the produced heat dissipation devices are stable in quality, long in service life and good in heat dissipation performance.

Description

具有平板热管和冷却液板复合结构的散热器及其制作方法Radiator with composite structure of flat heat pipe and cooling liquid plate and method of making the same 技术领域technical field
本发明涉及散热器技术领域,具体涉及一种具有平板热管和冷却液板复合结构的散热器。The invention relates to the technical field of radiators, in particular to a radiator with a composite structure of a flat plate heat pipe and a cooling liquid plate.
背景技术Background technique
以CPU为代表的现代电子芯片由于其集成度、封装密度以及工作时钟频率的不断提高,其单位面积的发热量迅速增加,如果不能有效散热控温的话,高温必将使芯片失效或崩溃。研究文献表明,在某些敏感温度段,单个半导体元件的温度每升高10℃,系统可靠性降低50%。针对大型计算机服务器CPU散热的特点,优化散热器传热结构和提高散热片表面传热系数可有效提高其散热效果,如将热管镶嵌于散热器底面通过相变进行强化换热,可在原散热面积基础上提高效率。其原理是高热流密度器件产生的热量传导至热管,使热管内工质发生相变将热量传递给底板,然后再通过翅片与空气的强迫对流将热量散掉。热管镶嵌于散热器底面可以有多种排布方式,其目的就是尽量使高热流密度器与热管的蒸发段大面积接触。但是,当今超级计算机的单个中央处理器CPU的功率密度已经高达20W/cm 2,巨量的热能必须及时从CPU以及机柜中移出才能保证超算中心的正常工作。用翅片换热器把CPU的热量散发到空气中已经不能解决这一问题。这对散热控温技术提出了严峻的挑战。目前针对超算CPU及大型数据中心的散热主要采用液冷方式,即用冷却液把热量输运到室外,包括冷液板式散热和浸没式散热,两种方式各有优缺点。所说的冷液板与CPU表面接触,内部走冷却液并把热量带走。冷液板式散热便于系统的调试和维护(毕竟对于超算而言大量的调试和维护是不可避免的),但冷液板散热效果逊于浸没式散热。后者虽然有很好的散热控温效果,但整个主板浸没在冷却液中,对冷却液提出了很高的要求。目前主要是采用的高性能氟化液,不但价格昂贵,而且系统调试和维护很不方便。 Due to the continuous improvement of the integration level, packaging density and operating clock frequency of modern electronic chips represented by CPU, the calorific value per unit area increases rapidly. Research literature shows that, in some sensitive temperature sections, the system reliability is reduced by 50% for every 10℃ increase in the temperature of a single semiconductor element. According to the characteristics of large computer server CPU heat dissipation, optimizing the heat transfer structure of the radiator and improving the heat transfer coefficient of the surface of the heat sink can effectively improve the heat dissipation effect. based on improving efficiency. The principle is that the heat generated by the high heat flux density device is conducted to the heat pipe, so that the working fluid in the heat pipe undergoes a phase change to transfer the heat to the bottom plate, and then the heat is dissipated through the forced convection between the fins and the air. The heat pipe inlaid on the bottom surface of the radiator can be arranged in various ways. However, the power density of a single central processing unit (CPU) of today's supercomputers is as high as 20W/cm 2 , and a huge amount of heat must be removed from the CPU and the cabinet in time to ensure the normal operation of the supercomputing center. Using a finned heat exchanger to dissipate the heat from the CPU into the air can no longer solve this problem. This poses a serious challenge to heat dissipation and temperature control technology. At present, the cooling method for supercomputing CPUs and large data centers mainly adopts liquid cooling method, that is, the cooling liquid is used to transport heat to the outdoor, including cold liquid plate cooling and immersion cooling. Both methods have their own advantages and disadvantages. The said cooling liquid plate is in contact with the surface of the CPU, and the cooling liquid is carried inside and the heat is carried away. Cooling plate heat dissipation is convenient for system debugging and maintenance (after all, a lot of debugging and maintenance is unavoidable for supercomputing), but the cooling effect of cold liquid plate is inferior to that of immersion heat dissipation. Although the latter has a good heat dissipation and temperature control effect, the entire motherboard is immersed in the coolant, which puts forward high requirements for the coolant. At present, high-performance fluorinated liquid is mainly used, which is not only expensive, but also inconvenient for system debugging and maintenance.
如图1-2所示,现有技术中的冷却液板从发热器件(热源,如CPU)到冷液板的冷却液(冷源)之间的传热分析如下:CPU产生的热量Q通过导热胶层,再从导热胶层(硅脂膜)到冷却液板(包括上冷液板和下冷液板),再从冷却液板到冷却液,冷却液板为铝板。As shown in Figure 1-2, the heat transfer analysis between the cooling liquid plate in the prior art from the heating device (heat source, such as CPU) to the cooling liquid (cooling source) of the cooling liquid plate is as follows: the heat Q generated by the CPU passes through The thermal conductive adhesive layer, and then from the thermal conductive adhesive layer (silicon grease film) to the cooling liquid plate (including the upper cooling liquid plate and the lower cooling liquid plate), and then from the cooling liquid plate to the cooling liquid, the cooling liquid plate is an aluminum plate.
总传热系数U可以表达为:The overall heat transfer coefficient U can be expressed as:
Figure PCTCN2021097438-appb-000001
Figure PCTCN2021097438-appb-000001
式中U为总传热系数,δ 1为硅脂膜厚(10μm=10×10 -6m),λ 1为硅脂的导热系数(5Wm -1K -1),δ 2为铝板厚度(2mm=2×10 -3m),λ 2为铝板的导热系数(237Wm -1K -1)。h 3为冷却液在铝板的流道内表面的膜传热系数。设传热面积为CPU的面积A=5×5=25cm 2=25×10 -4m 2。总的传热热阻1/(UA),是硅脂膜热阻R 1、铝板热阻R 2、冷却液传热膜(传热边界层)热阻R 3之和。 In the formula, U is the total heat transfer coefficient, δ 1 is the thickness of the silicone grease (10μm=10×10 -6 m), λ 1 is the thermal conductivity of the silicone grease (5Wm -1 K -1 ), and δ 2 is the thickness of the aluminum plate ( 2mm=2×10 -3 m), and λ 2 is the thermal conductivity of the aluminum plate (237Wm -1 K -1 ). h 3 is the film heat transfer coefficient of the cooling liquid on the inner surface of the flow channel of the aluminum plate. Let the heat transfer area be the area of the CPU A=5×5=25cm 2 =25×10 −4 m 2 . The total heat transfer thermal resistance 1/(UA) is the sum of the thermal resistance R 1 of the silicone grease film, the thermal resistance R 2 of the aluminum plate, and the thermal resistance R 3 of the cooling liquid heat transfer film (heat transfer boundary layer).
(1)硅脂膜的热阻(R 1),硅脂膜的厚度δ 1=10μm=10×10 -6m,导热系数λ 1=5W·m -1·K -1 (1) Thermal resistance of silicone grease film (R 1 ), thickness of silicone grease film δ 1 =10μm=10×10 -6 m, thermal conductivity λ 1 =5W·m -1 ·K -1
Figure PCTCN2021097438-appb-000002
Figure PCTCN2021097438-appb-000002
(2)铝板的热阻(R 2),铝板厚 2=2mm,导热系数λ 2=237W·m -1·K -1 (2) Thermal resistance of aluminum plate (R 2 ), aluminum plate thickness 2 = 2mm, thermal conductivity λ 2 = 237W·m -1 ·K -1
Figure PCTCN2021097438-appb-000003
Figure PCTCN2021097438-appb-000003
(3)冷却液的液膜传热热阻(R 3), (3) The liquid film heat transfer resistance of the cooling liquid (R 3 ),
假设冷却液在流道中的流速在0.5m·s -1,液膜传热系数可由下式计算。计算省略。 Assuming that the flow rate of the cooling liquid in the flow channel is 0.5m·s -1 , the heat transfer coefficient of the liquid film can be calculated by the following formula. Calculations are omitted.
Figure PCTCN2021097438-appb-000004
Figure PCTCN2021097438-appb-000004
h 3≈5000W·m -2·K -1 h 3 ≈5000W·m -2 ·K -1
因此,从热源到冷源的总热阻为Therefore, the total thermal resistance from the heat source to the cold source is
R=R 1+R 2+R 3=0.0008+0.0034+0.08=0.0842K·W -1 R=R 1 +R 2 +R 3 =0.0008+0.0034+0.08=0.0842K·W −1
根据以上计算,冷却液膜的传热热阻是铝板热阻的(R 3/R 2)近24倍,是硅脂膜的(R 3/R 1)100倍,主要的传热热阻来自于冷却液与铝板之间的传热液膜。由此可见,要强化冷液板的散热效果,关键是强化冷却液与冷液板间的传热。强化冷却液与冷液板之间可通过增加冷却液的湍流强度,然而增加湍流强度意味着增加冷却液的流速,这对于CPU大规模集群式使用(如超算)极其不利。譬如1个CPU增加1倍的冷却液流速,对于超算的1个机柜,就有几百上千个CPU,这就意味着冷却液几百上千的流量倍增! According to the above calculations, the heat transfer resistance of the cooling liquid film is nearly 24 times that of the aluminum plate (R 3 /R 2 ) and 100 times that of the silicone grease film (R 3 /R 1 ). The main heat transfer resistance comes from Heat transfer liquid film between coolant and aluminum plate. It can be seen that to strengthen the cooling effect of the cooling liquid plate, the key is to strengthen the heat transfer between the cooling liquid and the cooling liquid plate. Strengthening the turbulent flow between the cooling liquid and the cooling liquid plate can increase the turbulent flow intensity of the cooling liquid. However, increasing the turbulent flow intensity means increasing the flow rate of the cooling liquid, which is extremely unfavorable for large-scale CPU cluster use (such as supercomputing). For example, if one CPU doubles the coolant flow rate, for a supercomputing cabinet, there are hundreds or thousands of CPUs, which means that the coolant flow rate is doubled!
发明内容SUMMARY OF THE INVENTION
为了克服现有技术中存在的缺点和不足,本发明的目的在于提供一种具有平板热管和冷却液板复合结构的散热器,该散热器可实现平板热管与冷却液板一体化,平板热管与发热元件接触并通过传导传热,由冷却液板中的冷却液带走热量,散热性能好,可用于超高功率密度、并且密集布置的电子元件。In order to overcome the shortcomings and deficiencies in the prior art, the purpose of the present invention is to provide a radiator with a composite structure of a flat plate heat pipe and a cooling liquid plate, which can realize the integration of the flat heat pipe and the cooling liquid plate, and the flat heat pipe and the cooling liquid plate. The heating element contacts and transfers heat through conduction, and the heat is taken away by the cooling liquid in the cooling liquid plate.
本发明的另一目的在于提供一种具有平板热管和冷却液板复合结构的散热器的制作方法,该方法操作简单,控制方便,生产效率高,可用于大规模生产,生产的散热器产品质量稳定,使用寿命长,具有良好的散热性能。Another object of the present invention is to provide a method for making a radiator with a composite structure of a flat heat pipe and a cooling liquid plate, which is simple to operate, easy to control, and has high production efficiency, which can be used in large-scale production and the quality of the radiator produced. Stable, long service life and good heat dissipation.
本发明的目的通过下述技术方案实现:一种具有平板热管和冷却液板复合结构的散热器,包括基板,所述基板包括冷液板层以及设置于冷液板层的上端面和/或下端面的平板式热管层,所述冷液板层内设置有冷却液流道;The object of the present invention is achieved by the following technical solutions: a radiator with a composite structure of a flat plate heat pipe and a cooling liquid plate, comprising a base plate, the base plate comprising a cooling liquid plate layer and an upper end surface and/or an upper end surface and/or a cooling liquid plate layer disposed on the cooling liquid plate layer. The flat heat pipe layer on the lower end surface, the cooling liquid flow channel is arranged in the cooling liquid plate layer;
进一步的,所述冷却液流道内设置有散热翅片。Further, cooling fins are arranged in the cooling liquid flow channel.
进一步的,所述平板式热管层内设置有多个平行设置的排孔。Further, a plurality of row holes arranged in parallel are arranged in the flat plate heat pipe layer.
进一步的,所述排孔的内壁设置有多孔介质层。Further, the inner wall of the row of holes is provided with a porous medium layer.
进一步的,所述排孔孔道的两端均设置有密封堵头,所述密封堵头用于密封排孔孔道的两端。Further, both ends of the hole row channel are provided with sealing plugs, and the sealing plug is used to seal both ends of the hole row channel.
进一步的,所述冷液板层内设置有多个平行设置的冷却液流道,所述排孔与冷却液流道平行设置。Further, a plurality of cooling liquid flow passages arranged in parallel are arranged in the cooling liquid plate layer, and the row holes are arranged in parallel with the cooling liquid flow passages.
进一步的,所述冷液板层的两端均设置有端盖,所述端盖设置有冷却液进口和冷却液出口。Further, both ends of the cooling liquid plate layer are provided with end caps, and the end caps are provided with a cooling liquid inlet and a cooling liquid outlet.
进一步的,所述基板为铝基板,所述冷液板层和平板式热管层一体成型。Further, the substrate is an aluminum substrate, and the cold liquid plate layer and the flat-plate heat pipe layer are integrally formed.
进一步的,所述基板包括冷液板层以及设置于冷液板层的下端面的平板式热管层。Further, the base plate includes a cold liquid plate layer and a flat plate heat pipe layer disposed on the lower end surface of the cold liquid plate layer.
进一步的,所述冷液板层的上端面和下端面均设置有平板式热管层。Further, the upper and lower end surfaces of the cold liquid plate layer are provided with flat plate heat pipe layers.
本发明的另一目的通过下述技术方案实现:上述具有平板热管和冷却液板复合结构的散热器的制作方法,包括如下步骤:Another object of the present invention is achieved through the following technical solutions: the above-mentioned manufacturing method of a radiator with a flat plate heat pipe and a cooling liquid plate composite structure comprises the following steps:
S1、以纯铝或铝合金做材料,制作铝基板,所述铝基板包括冷液板制作层和平板式热管制作层;S1. Use pure aluminum or aluminum alloy as a material to make an aluminum substrate, and the aluminum substrate includes a cold liquid plate production layer and a flat heat pipe production layer;
S2、在平板式热管制作层内设置有多个排孔;S2. A plurality of rows of holes are arranged in the production layer of the flat-plate heat pipe;
S3、平板式热管制作层的排孔内壁面设置多孔介质层;S3. A porous medium layer is arranged on the inner wall surface of the row holes of the production layer of the flat heat pipe;
S4、封堵住排孔的一端使之密闭;往排孔中注入低沸点工质;S4. Block one end of the exhaust hole to make it airtight; inject a low-boiling-point working medium into the exhaust hole;
S5、在负压下,对排孔的另一端进行密闭,将低沸点工质密封在所述排孔内,得到包括多个平板热管的平板式热管层;S5, under negative pressure, seal the other end of the row of holes, and seal the low-boiling point working medium in the row of holes to obtain a flat-plate heat pipe layer including a plurality of flat-plate heat pipes;
S6、在平板式热管制作层的排孔内壁面设置多孔介质层;S6, a porous medium layer is arranged on the inner wall surface of the row holes of the flat-plate heat pipe fabrication layer;
S7、在内置有散热翅片的冷液板制作层两端分别设置端盖,所述端盖设置有冷却液进口和冷却液出口。S7. End caps are respectively provided at both ends of the cooling liquid plate manufacturing layer with built-in cooling fins, and the end caps are provided with a cooling liquid inlet and a cooling liquid outlet.
所述步骤S4中,多孔介质层的制作方法包括如下步骤:In the step S4, the manufacturing method of the porous medium layer includes the following steps:
A1、在每个排孔的中央沿轴向均插入一根插针,所述插针的截面积大小设为插入后留出与排孔内壁面0.5-1mm的间隙;将所述插入插针的铝基板垂直放置,在每个排孔的余下的空隙中填充装入铝粉或铝合金粉末;A1. Insert a pin in the center of each row of holes along the axial direction, and the cross-sectional area of the pin is set to leave a gap of 0.5-1mm with the inner wall of the row of holes after insertion; The aluminum substrate is placed vertically, and aluminum powder or aluminum alloy powder is filled in the remaining gaps of each row of holes;
A2、将已经插入了插针并填充了铝粉或铝合金粉末的铝基板工件置入粉末冶金烧结炉中,持续抽真空,排除氧气50-70min;A2. Put the aluminum substrate workpiece with inserted pins and filled with aluminum powder or aluminum alloy powder into the powder metallurgy sintering furnace, continue to vacuumize, and remove oxygen for 50-70min;
A3、往烧结炉中充入氮气,氮气气氛的水分的分压为0.001-0.02kPa;以5-8℃/min的升温速度加热烧结炉,直至560-600℃;在氮气保护气氛中维持至少1h;A3. Fill the sintering furnace with nitrogen, and the partial pressure of moisture in the nitrogen atmosphere is 0.001-0.02kPa; heat the sintering furnace at a heating rate of 5-8°C/min until 560-600°C; maintain it in a nitrogen protective atmosphere at least 1h;
A4、烧结完成后自然冷却至常温,然后拔出插针,制得多孔介质层。A4. After the sintering is completed, it is naturally cooled to normal temperature, and then the pin is pulled out to obtain a porous medium layer.
进一步的,所述步骤A3中,氮气气氛的水分的分压为0.001-0.02kPa;以5-8℃/min的升温速度加热烧结炉,直至560-600℃;在氮气保护气氛中维持至少1h。Further, in the step A3, the partial pressure of moisture in the nitrogen atmosphere is 0.001-0.02kPa; the sintering furnace is heated at a heating rate of 5-8°C/min until 560-600°C; maintained in a nitrogen protective atmosphere for at least 1 hour .
本发明的有益效果:本发明的具有平板热管和冷却液板复合结构的散热器,该散热器可实现平板热管与冷却液板一体化,平板热管与发热元件接触并通过传导传热,由冷却液板中的冷却液带走热量,散热性能好,可适用于电子发热元件特别是超高功率密度、并且密集布置的电子元件的散热。Beneficial effects of the present invention: the radiator of the present invention has a composite structure of a flat heat pipe and a cooling liquid plate, the radiator can realize the integration of the flat heat pipe and the cooling liquid plate, the flat heat pipe contacts the heating element and transfers heat through conduction, and the cooling The cooling liquid in the liquid plate takes away heat and has good heat dissipation performance, which can be suitable for heat dissipation of electronic heating elements, especially ultra-high power density and densely arranged electronic elements.
本发明的另一目的在于提供一种具有平板热管和冷却液板复合结构的散热器的制作方法,该方法操作简单,控制方便,生产效率高,可用于大规模生产,生产的散热器产品质量稳定,使用寿命长,具有良好的散热性能。Another object of the present invention is to provide a method for making a radiator with a composite structure of a flat heat pipe and a cooling liquid plate, which is simple to operate, easy to control, and has high production efficiency, which can be used in large-scale production and the quality of the radiator produced. Stable, long service life and good heat dissipation.
附图说明Description of drawings
图1为现有技术中冷却液板的剖面侧视示图;1 is a cross-sectional side view of a cooling liquid plate in the prior art;
图2为图1中沿A-A处的剖面俯视图;Fig. 2 is a cross-sectional top view along A-A in Fig. 1;
图3为实施例1的基板横截面;3 is a cross-section of the substrate of Example 1;
图4为实施例1的铝粉充装入平板热管排孔的示意图;Fig. 4 is the schematic diagram that the aluminum powder of embodiment 1 is filled into the row hole of flat heat pipe;
图5为实施例1的散热器的剖面侧视图;5 is a cross-sectional side view of the heat sink of Embodiment 1;
图6为实施例1的散热器的俯视图;6 is a top view of the heat sink of Embodiment 1;
图7为实施例1的横截面示意图;7 is a schematic cross-sectional view of Embodiment 1;
图8为实施例2的基板截面;8 is a cross-section of the substrate of Example 2;
图9为实施例2的一段平板热管层与冷却液板的局部放大图;9 is a partial enlarged view of a section of flat heat pipe layer and a cooling liquid plate of Example 2;
附图标记为:11、上冷液板;12、下冷液板;13、冷液腔;14、固定螺栓;15、发热元件;16、导热胶层;17、冷却液流道;18、平板式热管层;19、端盖;20、基板;21、插针;22、排孔;23、散热翅片;24、冷凝区;25、蒸发区;26、多孔介质层;27、蒸汽通道;28、密封堵头。Reference numerals are: 11, upper cooling liquid plate; 12, lower cooling liquid plate; 13, cooling liquid chamber; 14, fixing bolts; 15, heating element; 16, thermal conductive adhesive layer; 17, cooling liquid flow channel; 18, Flat heat pipe layer; 19, end cap; 20, base plate; 21, pin; 22, row hole; 23, cooling fin; 24, condensation area; 25, evaporation area; 26, porous medium layer; 27, steam channel ; 28, sealing plug.
具体实施方式Detailed ways
为了便于本领域技术人员的理解,下面结合实施例及附图对本发明作进一步的说明,实施方式提及的内容并非对本发明的限定。In order to facilitate the understanding of those skilled in the art, the present invention will be further described below with reference to the embodiments and the accompanying drawings, and the contents mentioned in the embodiments are not intended to limit the present invention.
如图3-9所示,在本发明的一种典型的实施方式中,提供了一种具有平板热管和冷却液板复合结构的散热器,包括基板20,所述基板20包括冷液板层以及设置于冷液板层的上端面和/或下端面的平板式热管层18,所述冷液板层内设置有冷却液流道17;所述冷却液流道17内设置有散热翅片23。As shown in FIGS. 3-9 , in a typical embodiment of the present invention, a heat sink with a composite structure of a flat heat pipe and a cooling liquid plate is provided, including a base plate 20 , and the base plate 20 includes a cooling liquid plate layer and a flat-plate heat pipe layer 18 arranged on the upper end face and/or the lower end face of the cooling liquid plate layer, the cooling liquid flow channel 17 is arranged in the cooling liquid plate layer; the cooling liquid flow channel 17 is arranged with radiating fins twenty three.
在一个实施例中,所述平板式热管层18内设置有多个平行设置的排孔22。所述排孔22的内壁设置有多孔介质层26。In one embodiment, the flat-plate heat pipe layer 18 is provided with a plurality of row holes 22 arranged in parallel. The inner wall of the row holes 22 is provided with a porous medium layer 26 .
在一个实施例中,所述排孔22孔道的两端均设置有密封堵头28,所述密封堵头28用于密封排孔22孔道的两端。所述排孔22内用于装设低沸点工质,所述低沸点工质优选但不限于为如丙酮和R134a。In one embodiment, sealing plugs 28 are provided at both ends of the channels of the row holes 22 , and the sealing plugs 28 are used to seal the two ends of the channels of the row holes 22 . The row holes 22 are used to install a low-boiling-point working medium, and the low-boiling-point working medium is preferably, but not limited to, acetone and R134a.
在一个实施例中,所述冷液板层内设置有多个平行设置的冷却液流道17,所述排孔22与冷却液流道17平行设置。In one embodiment, a plurality of cooling liquid flow channels 17 arranged in parallel are arranged in the cooling liquid plate layer, and the row holes 22 are arranged in parallel with the cooling liquid flow channels 17 .
在一个实施例中,所述冷液板层的两端均设置有端盖19,所述端盖19设置有冷却液进口和冷却液出口。In one embodiment, both ends of the cooling liquid plate layer are provided with end caps 19, and the end caps 19 are provided with a cooling liquid inlet and a cooling liquid outlet.
在一个实施例中,所述基板20为铝基板20,所述冷液板层和平板式热管层18一体成型。In one embodiment, the substrate 20 is an aluminum substrate 20 , and the cold liquid plate layer and the flat-plate heat pipe layer 18 are integrally formed.
在一个实施例中,所述基板20包括冷液板层以及设置于冷液板层的下端面的平板式热管层18。In one embodiment, the base plate 20 includes a cold liquid plate layer and a flat plate heat pipe layer 18 disposed on the lower end surface of the cold liquid plate layer.
在一个实施例中,所述冷液板层的上端面和下端面均设置有平板式热管层18。In one embodiment, a flat plate heat pipe layer 18 is provided on both the upper end surface and the lower end surface of the cold liquid plate layer.
在本申请另一种典型的实施方式中,上述具有平板热管和冷却液板复合结构的散热器的制作方法,包括如下步骤:In another typical embodiment of the present application, the above-mentioned manufacturing method of a radiator with a flat plate heat pipe and a cooling liquid plate composite structure includes the following steps:
S1、以纯铝或铝合金做材料,用挤压成型、精密铸造或3D打印的方法制作出铝基板20,所述铝基板20包括冷液板制作层和平板式热管制作层;铝基板20可以为两层的基板20结构示意图或者三层的基板20结构;基板20内的孔道之间的板壁未有可导致渗漏的沙眼或裂纹。S1. Using pure aluminum or aluminum alloy as a material, an aluminum substrate 20 is fabricated by extrusion molding, precision casting or 3D printing. The aluminum substrate 20 includes a cold liquid plate fabrication layer and a flat heat pipe fabrication layer; the aluminum substrate 20 can be A schematic diagram of the structure of the two-layer substrate 20 or the structure of the three-layer substrate 20; the plate walls between the channels in the substrate 20 have no trachoma or cracks that can cause leakage.
S2、在平板式热管制作层内设置有多个排孔22;构成平板热管的排孔22,可以是方孔,也可以是圆孔;其尺寸控制在一定范围,如1×1mm 2/个-5×5mm 2/个,或直径为1-5mm的圆孔,排孔22的个数由平板式热管层18的宽度决定。平板热管的长度和宽度,通常比发热元件15如CPU的尺寸要大,以便增加有效热量传输面积;所述方孔的尺寸优选为1×1mm 2/个、2×2mm 2/个、3×3mm 2/和4×4mm 2/个、5×5mm 2/个;所述圆孔的尺寸优选为直径为1mm、2mm、3mm、4mm和5mm; S2. A plurality of holes 22 are arranged in the production layer of the flat heat pipe; the holes 22 constituting the flat heat pipe can be square holes or round holes; the size is controlled within a certain range, such as 1×1mm 2 /piece -5×5mm 2 /piece, or circular holes with a diameter of 1-5mm, the number of the row holes 22 is determined by the width of the flat heat pipe layer 18 . The length and width of the flat heat pipe are usually larger than the size of the heating element 15 such as the CPU, so as to increase the effective heat transfer area; the size of the square holes is preferably 1×1mm 2 /piece, 2×2mm 2 /piece, 3× 3mm 2 / and 4×4mm 2 /piece, 5×5mm 2 /piece; the size of the circular hole is preferably 1mm, 2mm, 3mm, 4mm and 5mm in diameter;
S3、平板式热管制作层的排孔22内壁面设置多孔介质层26;所述多孔介质层26为附着于排孔22内壁面由多孔介质做成的、具毛细管作用的薄层。所述多孔介质层26的厚度为0.5-1mm,所述多孔介质层26优选为0.5mm、0.6mm、0.7mm、0.8mm、0.9mm和1mm。S3. A porous medium layer 26 is provided on the inner wall surface of the row holes 22 of the flat heat pipe fabrication layer; The thickness of the porous medium layer 26 is 0.5-1 mm, and the porous medium layer 26 is preferably 0.5 mm, 0.6 mm, 0.7 mm, 0.8 mm, 0.9 mm and 1 mm.
S4、封堵住排孔22的一端使之密闭,采用堵头激光焊密封或堵头氩弧焊密封,形成密封堵头28;往排孔22中注入低沸点工质;所述的工质包括但不限于丙酮、R134a。S4, block one end of the exhaust hole 22 to make it airtight, and use a plug for laser welding sealing or a plug for argon arc welding to form a sealing plug 28; inject a low-boiling point working medium into the exhaust hole 22; the working medium Including but not limited to acetone, R134a.
S5、在负压下,对排孔22的另一端进行密闭,采用堵头激光焊,或堵头氩弧焊,将低沸点工质密封在所述排孔22内,得到包括多个平板热管的平板式热管层18;S5. Under negative pressure, seal the other end of the row hole 22, and use plug laser welding or plug argon arc welding to seal the low-boiling point working medium in the row hole 22 to obtain a plurality of flat heat pipes. The flat plate heat pipe layer 18;
S6、平板式热管制作层的排孔22内壁面设置多孔介质层26;S6, a porous medium layer 26 is provided on the inner wall surface of the row holes 22 of the flat-plate heat pipe fabrication layer;
S7、在内置有散热翅片23的冷液板制作层两端分别设置端盖19,所述端盖19设置有冷却液进口和冷却液出口。S7. End caps 19 are respectively provided at both ends of the cold liquid plate fabrication layer with built-in cooling fins 23, and the end caps 19 are provided with a cooling liquid inlet and a cooling liquid outlet.
进一步的,所述步骤S4中,多孔介质层26的制作方法包括如下步骤:Further, in the step S4, the manufacturing method of the porous medium layer 26 includes the following steps:
A1、在每个排孔22的中央沿轴向均插入一根插针21,所述插针21的截面积大小以留出与排孔22内壁面0.5-1mm的间隙;将所述插入插针21的铝基板20垂直放置,在每个排孔22的余下的空隙中填充装入铝粉或铝合金粉末;间隙的宽度优选为0.5mm、0.6mm、0.7mm、0.8mm、0.9mm、1mm;所述的铝粉或铝合金粉末以自然重力堆积的方式填充,可施加机械振动辅助填充,但不施加机械外力压实,以便该薄层保持较高的孔隙率,如图4所示,图4中颗粒状物质为铝粉或铝合金粉末;所述插针21为方形针或者为截面呈圆形的圆柱形针;A1. Insert a pin 21 along the axial direction in the center of each row hole 22, the cross-sectional area of the pin 21 is large enough to leave a gap of 0.5-1mm with the inner wall surface of the row hole 22; insert the pin The aluminum substrate 20 of 21 is placed vertically, and aluminum powder or aluminum alloy powder is filled into the remaining gap of each row of holes 22; the width of the gap is preferably 0.5mm, 0.6mm, 0.7mm, 0.8mm, 0.9mm, 1mm ; The aluminum powder or aluminum alloy powder is filled in the way of natural gravity accumulation, and mechanical vibration can be applied to assist filling, but no mechanical external force is applied to compact, so that the thin layer maintains a high porosity, as shown in Figure 4, The granular material in FIG. 4 is aluminum powder or aluminum alloy powder; the pin 21 is a square pin or a cylindrical pin with a circular cross-section;
A2、将已经插入了插针21并填充了铝粉或铝合金粉末的铝基板20工件置入粉末冶金烧结炉中,持续抽真空,排除氧气50-70min;A2. Put the aluminum substrate 20 workpiece with the pins 21 inserted and filled with aluminum powder or aluminum alloy powder into the powder metallurgy sintering furnace, continue to vacuumize, and remove oxygen for 50-70min;
A3、往烧结炉中充入氮气,氮气气氛的水分的分压为0.001-0.02kPa;以5-8℃/min的升温速度加热烧结炉,直至560-600℃;在氮气保护气氛中维持至少1h;A3. Fill the sintering furnace with nitrogen, and the partial pressure of moisture in the nitrogen atmosphere is 0.001-0.02kPa; heat the sintering furnace at a heating rate of 5-8°C/min until 560-600°C; maintain it in a nitrogen protective atmosphere at least 1h;
A4、烧结完成后自然冷却至常温,然后拔出插针21,制得多孔介质层26;所得烧结后的多孔介质层26的孔隙率在40-50%;A4. After the sintering is completed, it is naturally cooled to normal temperature, and then the pin 21 is pulled out to obtain the porous medium layer 26; the porosity of the obtained sintered porous medium layer 26 is 40-50%;
进一步的,所述步骤A1中,所述多孔介质层26用铝粉或铝合金粉末,经由粉末冶金烧结工艺制成。所述的铝粉或铝合金粉末,可以但不限于是球状或近似球状的颗粒,直径可在1-500μm的范围。优选地是在50-100μm范围,尽量选择较均一的颗粒直径分布(即较窄的颗粒直径分布范围)有利于保证所述的多孔介质层26的孔隙率和渗透性;非球状(不规则形状)的颗粒有利于增加烧结薄层的孔隙率和渗透性;所述的原料铝粉或铝合金粉末,可均匀拌入适量的烧结助剂,如锡粉、镁粉,用量为铝粉的0.1-1wt%,也可以不用。Further, in the step A1, the porous medium layer 26 is made of aluminum powder or aluminum alloy powder through a powder metallurgy sintering process. The aluminum powder or aluminum alloy powder can be, but not limited to, spherical or nearly spherical particles, and the diameter can be in the range of 1-500 μm. It is preferably in the range of 50-100 μm, and a more uniform particle diameter distribution (that is, a narrower particle diameter distribution range) is selected as much as possible to ensure the porosity and permeability of the porous medium layer 26; non-spherical (irregular shape) ) particles are beneficial to increase the porosity and permeability of the sintered thin layer; the raw material aluminum powder or aluminum alloy powder can be evenly mixed with an appropriate amount of sintering aids, such as tin powder and magnesium powder, and the dosage is 0.1 of the aluminum powder. -1wt%, you can also not use it.
实施例1Example 1
如图3-7所示,一种具有平板热管和冷却液板复合结构的散热器,包括基板20,所述基板20包括冷液板层以及设置于冷液板层的上端面和下端面的两个平板式热管层18,所述冷液板层内设置有冷却液流道17。所述平板式热管层18用于与电子元件接触,以便对电子元件进行散热,所述电子元件为CPU或者其他电子元件。As shown in Figures 3-7, a radiator with a composite structure of a flat plate heat pipe and a cooling liquid plate includes a base plate 20, the base plate 20 includes a cooling liquid plate layer and a heat sink disposed on the upper end surface and the lower end surface of the cooling liquid plate layer Two flat heat pipe layers 18 are provided with cooling liquid flow channels 17 in the cooling liquid plate layers. The flat heat pipe layer 18 is used for contacting with electronic components, so as to dissipate heat from the electronic components, and the electronic components are CPU or other electronic components.
进一步的,所述基板20为铝基板20,所述冷液板层和平板式热管层18一体成型。散热器为具有平板热管和冷却液板复合结构的复合散热器,将设有冷液板的冷液板层和设有平板热管的平板式热管层18一体化设置。Further, the substrate 20 is an aluminum substrate 20 , and the cold liquid plate layer and the flat heat pipe layer 18 are integrally formed. The radiator is a composite radiator having a composite structure of a flat heat pipe and a cooling liquid plate. The cooling liquid plate layer provided with the cooling liquid plate and the flat heat pipe layer 18 provided with the flat heat pipe are integrally arranged.
进一步的,所述平板式热管层18内设置有多个平行设置的排孔22。所述排孔22的内壁设置有多孔介质层26。由于上述结构的设置,平板式热管层18内形成了多个平行分布的平板热管。Further, the flat-plate heat pipe layer 18 is provided with a plurality of row holes 22 arranged in parallel. The inner wall of the row holes 22 is provided with a porous medium layer 26 . Due to the arrangement of the above structure, a plurality of flat plate heat pipes distributed in parallel are formed in the flat plate heat pipe layer 18 .
进一步的,所述排孔22孔道的两端均设置有密封堵头28,所述密封堵头28用于密封排孔22孔道的两端。所述冷却液流道17内设置有散热翅片23,增强了散热效果。Further, sealing plugs 28 are provided at both ends of the passage of the row holes 22 , and the sealing plugs 28 are used to seal both ends of the passage of the row holes 22 . The cooling liquid channel 17 is provided with heat dissipation fins 23 to enhance the heat dissipation effect.
现有技术中的冷却液板如图1-2所示,冷却液板包括上冷液板11和下冷液板12,所述上冷液板11和下冷液板12采用固定螺栓14固定,上冷液板11和下冷液液之间形成冷液腔13和冷却液流道17。该冷却液板使用时的热传导分析如下:发热元件15如(CPU)产生的热量Q通过导热胶层16,再从导热胶层16(硅脂膜)到冷却液板(包括上冷液板11和下冷液板12),再从冷却液板到冷却液,冷却液板为铝板,导热胶层16为硅脂膜。上述冷却液板的散热效果有待改进。The cooling liquid plate in the prior art is shown in Figures 1-2. The cooling liquid plate includes an upper cooling liquid plate 11 and a lower cooling liquid plate 12. The upper cooling liquid plate 11 and the lower cooling liquid plate 12 are fixed by fixing bolts 14. , a cooling liquid cavity 13 and a cooling liquid flow channel 17 are formed between the upper cooling liquid plate 11 and the lower cooling liquid. The heat conduction analysis of the cooling liquid plate in use is as follows: the heat Q generated by the heating element 15 such as (CPU) passes through the thermal conductive adhesive layer 16, and then from the thermal conductive adhesive layer 16 (silicone film) to the cooling liquid plate (including the upper cooling liquid plate 11). and the lower cooling liquid plate 12), and then from the cooling liquid plate to the cooling liquid, the cooling liquid plate is an aluminum plate, and the thermally conductive adhesive layer 16 is a silicone grease film. The heat dissipation effect of the above cooling liquid plate needs to be improved.
本发明为结合了平板热管和冷液板的一体化散热器,用于超高功率密度、并且密集布置的电子元件,如超算中心机柜的CPU及电路板温度控制。通过增加冷却液与冷液板的有效传热面积,提高冷液板传热散热效果。提出了平板 式热管与冷却液板整合的解决方案。理论估算,在大大降低了冷却液流速的条件下仍可以使传热阻降低到0.01K·W -1附近。可以保证热量传输密度高达70W·cm -2The present invention is an integrated radiator combining a flat heat pipe and a cooling liquid plate, and is used for ultra-high power density and densely arranged electronic components, such as CPU and circuit board temperature control in a supercomputing center cabinet. By increasing the effective heat transfer area between the cooling liquid and the cooling liquid plate, the heat transfer and heat dissipation effect of the cooling liquid plate is improved. A solution for the integration of the flat heat pipe and the cooling liquid plate is proposed. Theoretical estimation shows that the heat transfer resistance can still be reduced to around 0.01K·W -1 under the condition of greatly reducing the coolant flow rate. The heat transfer density can be guaranteed up to 70W·cm -2 .
水的质量流速的计算:一个CPU产生的热量500W(即500J/s),必须等于流水带走的热量,才能稳定CPU的温度不至于上升。Calculation of the mass flow rate of water: The heat generated by a CPU is 500W (ie 500J/s), which must be equal to the heat taken away by the flowing water, in order to stabilize the temperature of the CPU from rising.
Figure PCTCN2021097438-appb-000005
Figure PCTCN2021097438-appb-000005
式中Q为CPU的发热功率,
Figure PCTCN2021097438-appb-000006
为水的质量流速,c p为水的比热容(=4.2J·g -1·K -1),ΔT为水的升温,取水的升温幅度为5K,例如从20℃升温至25℃,上述计算表明冷却水的质量流速为每秒24克即可满足CPU控温要求。
where Q is the heating power of the CPU,
Figure PCTCN2021097438-appb-000006
is the mass flow rate of water, c p is the specific heat capacity of water (=4.2J·g -1 ·K -1 ), ΔT is the temperature rise of water, and the temperature rise range of water intake is 5K, for example, from 20°C to 25°C, the above calculation It shows that the mass flow rate of cooling water is 24 grams per second, which can meet the CPU temperature control requirements.
假设冷液板的冷却液流道17的横截面积是10cm×0.5cm=5cm 2,则所需冷却水的流速是 Assuming that the cross-sectional area of the cooling liquid channel 17 of the cooling liquid plate is 10cm×0.5cm=5cm 2 , the required flow rate of cooling water is
Figure PCTCN2021097438-appb-000007
Figure PCTCN2021097438-appb-000007
式中ρ为冷却水的密度(1g·cm -3),S为冷液板冷却液流道17的横截面积(5cm 2)。可见,在此流速范围内,流动为层流流动。低流速可以有效降低泵送冷却水所需的能耗。 In the formula, ρ is the density of the cooling water (1 g·cm −3 ), and S is the cross-sectional area (5 cm 2 ) of the cooling liquid flow channel 17 of the cooling liquid plate. It can be seen that within this flow velocity range, the flow is laminar flow. The low flow rate can effectively reduce the energy consumption required to pump the cooling water.
本实施例中,散热器设置为三层,最上层和最下层均为平板式热管层18,平板式热管层18设置有多个排孔22,排孔22内置有多孔介质层26,多孔介质层26构成内置于排孔22内的吸液芯,平板式热管层18与电子发热元件15(如CPU)接触传输其产生的热量;另一层为具有散热翅片23结构的冷却液流道17,由冷却液带走经由平板热管所传输的热量。所述的复合散热器由热传导性良好的金属(如铝或铝合金)做成。In this embodiment, the radiator is provided with three layers, the uppermost layer and the lowermost layer are both flat heat pipe layers 18, the flat heat pipe layer 18 is provided with a plurality of row holes 22, and the row holes 22 are built with a porous medium layer 26, and the porous medium The layer 26 constitutes a liquid-absorbing wick built into the drain hole 22, and the flat-plate heat pipe layer 18 contacts the electronic heating element 15 (such as the CPU) to transmit the heat generated by it; 17. The heat transmitted through the plate heat pipe is taken away by the cooling liquid. The composite heat sink is made of metal with good thermal conductivity (such as aluminum or aluminum alloy).
进一步的,所述冷液板层内设置有多个平行设置的冷却液流道17,所述排孔22与冷却液流道17平行设置。所述冷液板层的两端均设置有端盖19,所述端盖19设置有冷却液进口和冷却液出口,所述冷却进液口内设有分配器。Further, a plurality of cooling liquid flow channels 17 arranged in parallel are arranged in the cooling liquid plate layer, and the row holes 22 are arranged in parallel with the cooling liquid flow channels 17 . Both ends of the cooling liquid plate layer are provided with end caps 19, the end caps 19 are provided with a cooling liquid inlet and a cooling liquid outlet, and a distributor is arranged in the cooling liquid inlet.
本实施例的所述冷液板层设为中间层,冷液板层设置了很多个平行的冷却液流动分室,形成有多个冷却液流道17,其中起到了相当于散热翅片23的作用,覆盖整个平板式热管所在的区域,即扩大了冷液板对冷却液的有效传热面积。如图6和图7所示。散热器的两端装有端盖19和进出液口,用于冷却液的流进和流出,并通过分配器均匀分配冷却液至冷却液流道17中。In this embodiment, the cooling liquid plate layer is set as an intermediate layer, and the cooling liquid plate layer is provided with many parallel cooling liquid flow sub-chambers, and a plurality of cooling liquid flow channels 17 are formed, which serve as the equivalent of the cooling fins 23. It can cover the entire area where the flat plate heat pipe is located, that is, the effective heat transfer area of the cooling liquid plate to the cooling liquid is enlarged. As shown in Figure 6 and Figure 7. Both ends of the radiator are provided with end caps 19 and liquid inlet and outlet ports for the inflow and outflow of the cooling liquid, and the cooling liquid is evenly distributed into the cooling liquid flow channel 17 through the distributor.
实施例2Example 2
本实施例与实施例1的不同之处在于:如图8-9所示,一种具有平板热管和冷却液板复合结构的散热器,包括基板20,所述基板20包括冷液板层以及设置于冷液板层的下端面的一个平板式热管层18,所述冷液板层内设置有冷却液流道17。本实施例中,散热器设置为两层,一层为平板式热管层18,平板式热管层18设置有多个排孔22,排孔22内置有多孔介质层26,多孔介质层26构成内置于排孔22内的吸液芯,平板式热管层18与电子发热元件15(如CPU)接触传输其产生的热量;另一层为具有散热翅片23结构的冷却液流道17,由冷却液带走经由平板热管所传输的热量。所述的复合散热器由热传导性良好的金属(如铝或铝合金)做成。The difference between this embodiment and Embodiment 1 is that, as shown in FIGS. 8-9 , a heat sink with a composite structure of a flat plate heat pipe and a cooling liquid plate includes a base plate 20, and the base plate 20 includes a cooling liquid plate layer and A flat heat pipe layer 18 is arranged on the lower end face of the cooling liquid plate layer, and cooling liquid flow channels 17 are arranged in the cooling liquid plate layer. In this embodiment, the radiator is provided with two layers, one is the flat heat pipe layer 18, the flat heat pipe layer 18 is provided with a plurality of row holes 22, the row holes 22 have a built-in porous medium layer 26, and the porous medium layer 26 constitutes a built-in In the liquid absorbing core in the discharge hole 22, the flat heat pipe layer 18 contacts with the electronic heating element 15 (such as the CPU) to transmit the heat generated by it; The liquid removes the heat transferred through the flat heat pipe. The composite heat sink is made of metal with good thermal conductivity (such as aluminum or aluminum alloy).
实施例3Example 3
本实施例中,上述具有平板热管和冷却液板复合结构的散热器的制作方法,包括如下步骤:In this embodiment, the above-mentioned manufacturing method of the radiator with the composite structure of the flat heat pipe and the cooling liquid plate includes the following steps:
S1、以纯铝做材料,用挤压成型方法制作出铝基板20,所述铝基板20包括冷液板制作层和平板式热管制作层;铝基板20为三层的基板20结构;S1. Using pure aluminum as a material, an aluminum substrate 20 is produced by an extrusion molding method, and the aluminum substrate 20 includes a cold liquid plate fabrication layer and a flat heat pipe fabrication layer; the aluminum substrate 20 is a three-layer substrate 20 structure;
S2、在平板式热管制作层内设置有多个排孔22;构成平板热管的排孔22为方孔,其尺寸为如2×2mm 2/个,排孔22的个数由平板式热管层18的宽度 决定,平板热管的长度和宽度,比发热元件15如CPU的尺寸要大,以便增加有效热量传输面积; S2. A plurality of holes 22 are arranged in the production layer of the flat heat pipe; the holes 22 constituting the flat heat pipe are square holes, the size of which is 2×2 mm 2 /piece, and the number of holes 22 is determined by the flat heat pipe layer. The width of 18 determines that the length and width of the flat heat pipe are larger than the size of the heating element 15 such as the CPU, so as to increase the effective heat transfer area;
S3、平板式热管制作层的排孔22内壁面设置多孔介质层26;S3, a porous medium layer 26 is provided on the inner wall surface of the row holes 22 of the flat-plate heat pipe fabrication layer;
S4、封堵住排孔22的一端使之密闭,采用堵头激光焊密封形成密封堵头28;往排孔22中注入低沸点工质;所述的工质为丙酮。S4. Block one end of the exhaust hole 22 to make it airtight, and use the plug to seal by laser welding to form a sealing plug 28; inject a low-boiling-point working medium into the exhaust hole 22; the working medium is acetone.
S5、在负压下,对排孔22的另一端进行密闭,采用堵头激光焊,将低沸点工质密封在所述排孔22内,得到包括多个平板热管的平板式热管层18;S5, under negative pressure, seal the other end of the row hole 22, and use plug laser welding to seal the low-boiling point working medium in the row hole 22 to obtain a flat plate heat pipe layer 18 including a plurality of flat plate heat pipes;
S6、平板式热管制作层的排孔22内壁面设置多孔介质层26;S6, a porous medium layer 26 is provided on the inner wall surface of the row holes 22 of the flat-plate heat pipe fabrication layer;
S7、在内置有散热翅片23的冷液板制作层两端分别设置端盖19,所述端盖19设置有冷却液进口和冷却液出口。S7. End caps 19 are respectively provided at both ends of the cold liquid plate fabrication layer with built-in cooling fins 23, and the end caps 19 are provided with a cooling liquid inlet and a cooling liquid outlet.
进一步的,所述步骤S4中,多孔介质层26的制作方法包括如下步骤:Further, in the step S4, the manufacturing method of the porous medium layer 26 includes the following steps:
A1、在每个排孔22的中央沿轴向均插入一根插针21,所述插针21的截面积大小以留出与排孔22内壁面0.6mm的间隙;将所述插入插针21的铝基板20垂直放置,在每个排孔22的余下的空隙中填充装入上述铝粉;所述的铝粉以自然重力堆积的方式填充,施加机械振动辅助填充;A1. Insert a pin 21 in the center of each row of holes 22 along the axial direction, and the cross-sectional area of the pin 21 is sized to leave a gap of 0.6 mm with the inner wall surface of the row of holes 22; insert the pin 21 The aluminum substrate 20 is placed vertically, and the above-mentioned aluminum powder is filled in the remaining gaps of each row of holes 22; the aluminum powder is filled in the way of natural gravity accumulation, and mechanical vibration is applied to assist the filling;
A2、将已经插入了插针21并填充了铝粉或铝合金粉末的铝基板20工件置入粉末冶金烧结炉中,持续抽真空,排除氧气60min;A2. Put the aluminum substrate 20 workpiece into which the pins 21 have been inserted and filled with aluminum powder or aluminum alloy powder into the powder metallurgy sintering furnace, continue to vacuumize, and remove oxygen for 60 minutes;
A3、往烧结炉中充入氮气,氮气气氛的水分的分压为0.01kPa;以6℃/min的升温速度加热烧结炉,直至580℃;在氮气保护气氛中维持至少1h;A3. Fill the sintering furnace with nitrogen, and the partial pressure of moisture in the nitrogen atmosphere is 0.01kPa; heat the sintering furnace at a heating rate of 6 °C/min until 580 °C; keep it in a nitrogen protective atmosphere for at least 1h;
A4、烧结完成后自然冷却至常温,然后拔出插针21,制得多孔介质层26;所得烧结后的多孔介质层26的孔隙率在46%;A4. After the sintering is completed, it is naturally cooled to normal temperature, and then the pin 21 is pulled out to obtain the porous medium layer 26; the porosity of the obtained sintered porous medium layer 26 is 46%;
进一步的,所述步骤A1中,所述多孔介质层26用铝粉,经由粉末冶金烧结工艺制成。所述的铝粉为球状或近似球状的颗粒,直径在50-100μm范围;Further, in the step A1, the porous medium layer 26 is made of aluminum powder through a powder metallurgy sintering process. The aluminum powder is spherical or approximately spherical particles, and the diameter is in the range of 50-100 μm;
本实施例的其余内容与实施例1相似,这里不再赘述。The rest of the content of this embodiment is similar to that of Embodiment 1, and will not be repeated here.
实施例4Example 4
本实施例中,上述具有平板热管和冷却液板复合结构的散热器的制作方法,包括如下步骤:In this embodiment, the above-mentioned manufacturing method of the radiator with the composite structure of the flat heat pipe and the cooling liquid plate includes the following steps:
S1、以铝合金做材料,用精密铸造的方法制作出铝基板20,所述铝基板20包括冷液板制作层和平板式热管制作层;铝基板20可以为两层的基板20结构示意图;S1, using aluminum alloy as a material, an aluminum substrate 20 is made by means of precision casting, and the aluminum substrate 20 includes a cold liquid plate fabrication layer and a flat-plate heat pipe fabrication layer; the aluminum substrate 20 can be a two-layer substrate 20 structural schematic diagram;
S2、在平板式热管制作层内设置有多个排孔22;构成平板热管的排孔22为方孔,其尺寸控制在3×3mm 2/个;排孔22的个数由平板式热管层18的宽度决定。平板热管的长度和宽度,通常比发热元件15如CPU的尺寸要大,以便增加有效热量传输面积; S2. A plurality of holes 22 are arranged in the production layer of the flat heat pipe; the holes 22 constituting the flat heat pipe are square holes, the size of which is controlled at 3×3mm 2 /piece; the number of holes 22 is determined by the flat heat pipe layer The width of 18 is determined. The length and width of the flat heat pipe are usually larger than the size of the heating element 15 such as the CPU, in order to increase the effective heat transfer area;
S3、平板式热管制作层的排孔22内壁面设置多孔介质层26;S3, a porous medium layer 26 is provided on the inner wall surface of the row holes 22 of the flat-plate heat pipe fabrication layer;
S4、封堵住排孔22的一端使之密闭,采用堵头激光焊密封或堵头氩弧焊密封,形成密封堵头28;往排孔22中注入低沸点工质;所述的工质为R134a。S4, block one end of the exhaust hole 22 to make it airtight, and use a plug for laser welding sealing or a plug for argon arc welding to form a sealing plug 28; inject a low-boiling point working medium into the exhaust hole 22; the working medium is R134a.
S5、在负压下,对排孔22的另一端进行密闭,采用堵头氩弧焊,将低沸点工质密封在所述排孔22内,得到包括多个平板热管的平板式热管层18;S5. Under negative pressure, seal the other end of the row hole 22, and seal the low-boiling point working medium in the row hole 22 by plugging argon arc welding to obtain a flat plate heat pipe layer 18 including a plurality of flat plate heat pipes. ;
S6、平板式热管制作层的排孔22内壁面设置多孔介质层26;S6, a porous medium layer 26 is provided on the inner wall surface of the row holes 22 of the flat-plate heat pipe fabrication layer;
S7、在内置有散热翅片23的冷液板制作层两端分别设置端盖19,所述端盖19设置有冷却液进口和冷却液出口。S7. End caps 19 are respectively provided at both ends of the cold liquid plate fabrication layer with built-in cooling fins 23, and the end caps 19 are provided with a cooling liquid inlet and a cooling liquid outlet.
进一步的,所述步骤S4中,多孔介质层26的制作方法包括如下步骤:Further, in the step S4, the manufacturing method of the porous medium layer 26 includes the following steps:
A1、在每个排孔22的中央沿轴向均插入一根插针21,所述插针21的截面积大小以留出与排孔22内壁面0.5mm的间隙;将所述插入插针21的铝基板20垂直放置,在每个排孔22的余下的空隙中填充装入上述铝铝合金粉末,形成多孔介质薄层;所述铝合金粉末以自然重力堆积的方式填充,可施加机械振动辅助填充,但不施加机械外力压实,以便多孔介质薄层保持较高的孔隙率;A1. Insert a pin 21 in the center of each row of holes 22 along the axial direction, and the cross-sectional area of the pin 21 is sized to leave a gap of 0.5mm with the inner wall of the row of holes 22; insert the pin 21 The aluminum substrate 20 is placed vertically, and the above-mentioned aluminum-aluminum alloy powder is filled into the remaining gaps of each row of holes 22 to form a thin layer of porous medium; the aluminum alloy powder is filled in the way of natural gravity accumulation, and mechanical vibration can be applied. Auxiliary filling, but compaction without applying mechanical external force, so that the thin layer of porous medium maintains a high porosity;
A2、将已经插入了插针21并填充了铝合金粉末的铝基板20工件置入粉末冶金烧结炉中,持续抽真空,排除氧气70min;A2. Place the workpiece of the aluminum substrate 20 that has been inserted into the pin 21 and filled with aluminum alloy powder into the powder metallurgy sintering furnace, and continue to vacuumize and remove oxygen for 70 minutes;
A3、往烧结炉中充入氮气,氮气气氛的水分的分压为0.02kPa;以5℃/min的升温速度加热烧结炉,直至560℃;在氮气保护气氛中维持1h;A3. Fill the sintering furnace with nitrogen, and the partial pressure of moisture in the nitrogen atmosphere is 0.02kPa; heat the sintering furnace at a heating rate of 5°C/min until it reaches 560°C; keep it in a nitrogen protective atmosphere for 1h;
A4、烧结完成后自然冷却至常温,然后拔出插针21,制得多孔介质层26;所得烧结后的多孔介质层26的孔隙率在42%;A4. After the sintering is completed, it is naturally cooled to room temperature, and then the pin 21 is pulled out to obtain the porous medium layer 26; the porosity of the obtained sintered porous medium layer 26 is 42%;
进一步的,所述步骤A1中,所述多孔介质层26铝合金粉末,经由粉末冶金烧结工艺制成,所述铝合金粉末为球状或近似球状的颗粒,直径在50-100μm范围,所述铝合金粉末均匀拌入适量的烧结助剂,所述烧结助剂由锡粉和镁粉按照重量比1:1组成,所述烧结助剂的添加量为铝合金粉的1wt%。Further, in the step A1, the aluminum alloy powder of the porous medium layer 26 is made by a powder metallurgy sintering process, and the aluminum alloy powder is spherical or approximately spherical particles with a diameter in the range of 50-100 μm, The alloy powder is evenly mixed with an appropriate amount of sintering aid, the sintering aid is composed of tin powder and magnesium powder according to a weight ratio of 1:1, and the addition amount of the sintering aid is 1 wt % of the aluminum alloy powder.
本实施例的其余内容与实施例2相似,这里不再赘述。The rest of the content of this embodiment is similar to that of Embodiment 2, and will not be repeated here.
实施例3Example 3
本实施例中,上述具有平板热管和冷却液板复合结构的散热器的制作方法,包括如下步骤:In this embodiment, the above-mentioned manufacturing method of the radiator with the composite structure of the flat heat pipe and the cooling liquid plate includes the following steps:
S1、以纯铝做材料,用挤压成型方法制作出铝基板20,所述铝基板20包括冷液板制作层和平板式热管制作层;铝基板20为三层的基板20结构;S1. Using pure aluminum as a material, an aluminum substrate 20 is produced by an extrusion molding method, and the aluminum substrate 20 includes a cold liquid plate fabrication layer and a flat heat pipe fabrication layer; the aluminum substrate 20 is a three-layer substrate 20 structure;
S2、在平板式热管制作层内设置有多个排孔22;构成平板热管的排孔22为圆孔,直径为3mm,排孔22的个数由平板式热管层18的宽度决定,平板热管的长度和宽度,比发热元件15如CPU的尺寸要大,以便增加有效热量传输面积;S2. A plurality of holes 22 are arranged in the production layer of the flat heat pipe; the holes 22 constituting the flat heat pipe are circular holes with a diameter of 3 mm, and the number of holes 22 is determined by the width of the flat heat pipe layer 18. The length and width are larger than the size of the heating element 15 such as the CPU, so as to increase the effective heat transfer area;
S3、平板式热管制作层的排孔22内壁面设置多孔介质层26;S3, a porous medium layer 26 is provided on the inner wall surface of the row holes 22 of the flat-plate heat pipe fabrication layer;
S4、封堵住排孔22的一端使之密闭,采用堵头激光焊密封形成密封堵头28;往排孔22中注入低沸点工质;所述的工质为丙酮。S4. Block one end of the exhaust hole 22 to make it airtight, and use the plug to seal by laser welding to form a sealing plug 28; inject a low-boiling-point working medium into the exhaust hole 22; the working medium is acetone.
S5、在负压下,对排孔22的另一端进行密闭,采用堵头激光焊,将低沸点工质密封在所述排孔22内,得到包括多个平板热管的平板式热管层18;S5, under negative pressure, seal the other end of the row hole 22, and use plug laser welding to seal the low-boiling point working medium in the row hole 22 to obtain a flat plate heat pipe layer 18 including a plurality of flat plate heat pipes;
S6、平板式热管制作层的排孔22内壁面设置多孔介质层26;S6, a porous medium layer 26 is provided on the inner wall surface of the row holes 22 of the flat-plate heat pipe fabrication layer;
S7、在内置有散热翅片23的冷液板制作层两端分别设置端盖19,所述端盖19设置有冷却液进口和冷却液出口。S7. End caps 19 are respectively provided at both ends of the cooling liquid plate manufacturing layer with built-in cooling fins 23, and the end caps 19 are provided with a cooling liquid inlet and a cooling liquid outlet.
进一步的,所述步骤S4中,多孔介质层26的制作方法包括如下步骤:Further, in the step S4, the manufacturing method of the porous medium layer 26 includes the following steps:
A1、在每个排孔22的中央沿轴向均插入一根插针21,所述插针21的截面积大小以留出与排孔22内壁面1mm的间隙;A1. Insert a pin 21 in the center of each row hole 22 along the axial direction, and the cross-sectional area of the pin 21 is sized to leave a gap of 1 mm with the inner wall surface of the row hole 22;
A2、将已经插入了插针21并填充了铝粉或铝合金粉末的铝基板20工件置入粉末冶金烧结炉中,持续抽真空,排除氧气70min;A2. Put the aluminum substrate 20 workpiece into which the pins 21 have been inserted and filled with aluminum powder or aluminum alloy powder into the powder metallurgy sintering furnace, continue to vacuumize, and remove oxygen for 70 minutes;
A3、往烧结炉中充入氮气,氮气气氛的水分的分压为0.001kPa;以8℃/min的升温速度加热烧结炉,直至600℃;在氮气保护气氛中维持至少1h;A3. Fill the sintering furnace with nitrogen, and the partial pressure of moisture in the nitrogen atmosphere is 0.001kPa; heat the sintering furnace at a heating rate of 8°C/min until it reaches 600°C; keep it in a nitrogen protective atmosphere for at least 1h;
A4、烧结完成后自然冷却至常温,然后拔出插针21,制得多孔介质层26;所得烧结后的多孔介质层26的孔隙率在49%;A4. After the sintering is completed, it is naturally cooled to normal temperature, and then the pin 21 is pulled out to obtain the porous medium layer 26; the porosity of the obtained sintered porous medium layer 26 is 49%;
进一步的,所述步骤A1中,所述多孔介质层26用铝粉,经由粉末冶金烧结工艺制成。所述的铝粉为球状或近似球状的颗粒,直径在50-100μm范围;Further, in the step A1, the porous medium layer 26 is made of aluminum powder through a powder metallurgy sintering process. The aluminum powder is spherical or approximately spherical particles, and the diameter is in the range of 50-100 μm;
本实施例的其余内容与实施例3相似,这里不再赘述。The rest of the content of this embodiment is similar to that of Embodiment 3, and will not be repeated here.
本发明的散热器使用时,工作原理如下:When the radiator of the present invention is used, the working principle is as follows:
以两层结构的散热器为例,如图9所示;所述基板20为铝基板20,铝基平板式热管层18排孔22的内壁附有一层铝基粉末冶金烧结多孔介质,形成多孔介质层26,排孔22的管道中部形成蒸汽通道27。所述的铝基粉末冶金烧结多孔介质层26又称为吸液芯,其内孔道彼此相连;热管中含低沸点工质,管内为负压状态。热管工作时,在热源位置,工质蒸发沸腾、吸收蒸发潜热,并沿着蒸汽通道27向冷端流动。蒸汽在冷端冷凝析出、释放出冷凝潜热;然后迅速通过吸液芯的毛细管作用回到热源所在的位置。散热器形成冷凝区24和蒸发区25。这种通过工质的蒸发和冷凝输运的热量及其速度,使得热管具有比同质的金属导体高10倍以上的导热系数。热管从热源(蒸发端)到冷源(冷凝端)的温差不到0.1K,即整个平板热管有优异的均温性。Taking a radiator with a two-layer structure as an example, as shown in FIG. 9; the substrate 20 is an aluminum substrate 20, and a layer of aluminum-based powder metallurgy sintered porous medium is attached to the inner wall of the row of holes 22 of the aluminum-based flat heat pipe layer 18 to form a porous In the medium layer 26, a steam channel 27 is formed in the middle of the pipe of the row hole 22. The aluminum-based powder metallurgy sintered porous medium layer 26 is also called a liquid absorbing core, and its inner pores are connected to each other; the heat pipe contains a low-boiling-point working medium, and the inside of the pipe is in a negative pressure state. When the heat pipe works, at the heat source position, the working medium evaporates and boils, absorbs the latent heat of evaporation, and flows to the cold end along the steam passage 27 . The steam condenses and separates out at the cold end, releasing the latent heat of condensation; and then quickly returns to the location of the heat source through the capillary action of the wick. The radiator forms a condensation zone 24 and an evaporation zone 25 . The heat transported by the evaporation and condensation of the working fluid and its speed make the heat pipe have a thermal conductivity more than 10 times higher than that of a homogeneous metal conductor. The temperature difference of the heat pipe from the heat source (evaporating end) to the cold source (condensing end) is less than 0.1K, that is, the entire flat heat pipe has excellent temperature uniformity.
由于平板热管与冷液板连成一体,对冷却液(即冷源)而言,这一特性使得高温热源向低温热源的传热面积从CPU所在的位置(即图6中的虚线方框),扩展到整块平板热管所在的位置,如图6(三层结构的散热器的剖面侧视图)和图6所示。Since the flat heat pipe is integrated with the cooling liquid plate, for the cooling liquid (ie, the cooling source), this characteristic makes the heat transfer area from the high temperature heat source to the low temperature heat source from the position of the CPU (ie the dashed box in Figure 6). , extended to the position where the whole plate heat pipe is located, as shown in FIG.
通常,无吸液芯的空心热管,在使用时必须有一定角度的倾斜。热源在下端、冷源在上端。冷凝的工资依靠重力,回流到热源端。而本申请具有吸液芯的平板热管则可借助毛细管作用,自动从冷源端回到热源端,从而构成工质内部循环,不论热管平放还是以任何角度放置,均可正常工作。Generally, a hollow heat pipe without a wick must be inclined at a certain angle during use. The heat source is at the lower end and the cold source is at the upper end. The condensed wages rely on gravity to return to the heat source. However, the flat heat pipe with the liquid-absorbing core of the present application can automatically return from the cold source end to the heat source end by means of capillary action, thereby forming an internal circulation of the working medium, and the heat pipe can work normally regardless of whether it is placed flat or at any angle.
所述冷液板层内设置有多个平行设置的冷却液流道17,所述排孔22与冷却液流道17平行设置;复合散热器的两端装有端盖19和进出液口,用于冷却液的流进和流出,并均匀分配冷却液至冷却液流道17中。The cooling liquid plate layer is provided with a plurality of parallel cooling liquid flow channels 17, and the discharge holes 22 are arranged in parallel with the cooling liquid flow channels 17; It is used for the inflow and outflow of the cooling liquid, and evenly distributes the cooling liquid to the cooling liquid flow channel 17 .
作为散热器使用时,其平板热管与高密功率度发热器件紧密接触。热量从所述发热元件15传递给平板热管、从平板热管传递给冷却液,再由冷却液带到室外。冷却液经冷却后被泵回到冷液板循环使用。When used as a radiator, the flat heat pipe is in close contact with the high-density power heating device. The heat is transferred from the heating element 15 to the flat heat pipe, from the flat heat pipe to the cooling liquid, and then brought to the outside by the cooling liquid. After cooling, the coolant is pumped back to the coolant plate for circulation.
通过上述结构的设置,强化了从电子发热元件15到冷却液之间的传热,从而降低了从热源到冷源之间的热阻,可见本发明不是为了强化CPU与冷液板之间的传热、降低热阻R 1,而是强化了冷液板与冷却液之间的传热,即有针对性的降低上述计算中的R 3Through the arrangement of the above structure, the heat transfer from the electronic heating element 15 to the cooling liquid is strengthened, thereby reducing the thermal resistance from the heat source to the cooling source. It can be seen that the present invention is not intended to strengthen the connection between the CPU and the cooling liquid plate. The heat transfer and the reduction of the thermal resistance R 1 enhance the heat transfer between the cooling liquid plate and the cooling liquid, that is, the R 3 in the above calculation is reduced in a targeted manner.
本发明采用上述冷液板散热器,从冷液板到冷却液的传热效果将大大提高(理论计算,无热管的冷液板热阻为0.0842K·W -1,含内嵌热管阵列的冷液板,即本申请的散热器热阻为0.03-0.04K·W -1,为原有热阻的约50%);由于实际传热效果的增加,冷液板的尺寸可以从原先整块电路主板的大小缩减到这样的尺寸:宽度与CPU大致相等或略大,长度与电路主板相当,即缩减到原先冷液板的大约1/3。 The present invention adopts the above-mentioned cold liquid plate radiator, and the heat transfer effect from the cold liquid plate to the cooling liquid will be greatly improved (theoretical calculation, the thermal resistance of the cold liquid plate without heat pipes is 0.0842K·W -1 , and the heat transfer with embedded heat pipe arrays is 0.0842K·W -1 . The cooling liquid plate, that is, the thermal resistance of the radiator in this application is 0.03-0.04K·W -1 , which is about 50% of the original thermal resistance); due to the increase in the actual heat transfer effect, the size of the cooling liquid plate can be adjusted from the original one. The size of the circuit board is reduced to a size that is roughly equal to or slightly larger than the CPU, and the length is comparable to the circuit board, which is reduced to about 1/3 of the original cooling plate.
上述实施例为本发明较佳的实现方案,除此之外,本发明还可以其它方式 实现,在不脱离本发明构思的前提下任何显而易见的替换均在本发明的保护范围之内。The above-mentioned embodiment is the preferred implementation scheme of the present invention, in addition, the present invention can also be realized in other ways, and any obvious replacement under the premise of not departing from the inventive concept is all within the protection scope of the present invention.

Claims (10)

  1. 一种具有平板热管和冷却液板复合结构的散热器,其特征在于:包括基板,所述基板包括冷液板层以及设置于冷液板层的上端面和/或下端面的平板式热管层,所述冷液板层内设置有冷却液流道。A radiator with a composite structure of a flat plate heat pipe and a cooling liquid plate, characterized in that it includes a base plate, and the base plate includes a cooling liquid plate layer and a flat plate heat pipe layer disposed on the upper end face and/or the lower end face of the cooling liquid plate layer , a cooling liquid flow channel is arranged in the cooling liquid plate layer.
  2. 根据权利要求1所述的一种具有平板热管和冷却液板复合结构的散热器,其特征在于:所述平板式热管层内设置有多个平行设置的排孔。A radiator with a composite structure of a flat heat pipe and a cooling liquid plate according to claim 1, wherein a plurality of parallel holes are arranged in the flat heat pipe layer.
  3. 根据权利要求2所述的一种具有平板热管和冷却液板复合结构的散热器,其特征在于:所述排孔的内壁设置有多孔介质层。A radiator with a composite structure of a flat heat pipe and a cooling liquid plate according to claim 2, characterized in that: the inner wall of the row of holes is provided with a porous medium layer.
  4. 根据权利要求2所述的一种具有平板热管和冷却液板复合结构的散热器,其特征在于:所述排孔孔道的两端均设置有密封堵头。A radiator with a composite structure of a flat plate heat pipe and a cooling liquid plate according to claim 2, wherein sealing plugs are provided at both ends of the perforation channel.
  5. 根据权利要求2所述的一种具有平板热管和冷却液板复合结构的散热器,其特征在于:所述冷液板层内设置有多个平行设置的冷却液流道,所述排孔与冷却液流道平行设置。A radiator with a composite structure of a flat heat pipe and a cooling liquid plate according to claim 2, wherein a plurality of cooling liquid flow channels arranged in parallel are arranged in the cooling liquid plate layer, and the row holes are arranged in parallel with each other. The coolant passages are arranged in parallel.
  6. 根据权利要求5所述的一种具有平板热管和冷却液板复合结构的散热器,其特征在于:所述冷液板层的两端均设置有端盖,所述端盖设置有冷却液进口和冷却液出口。A radiator with a composite structure of a flat heat pipe and a cooling liquid plate according to claim 5, wherein both ends of the cooling liquid plate layer are provided with end caps, and the end caps are provided with a cooling liquid inlet and coolant outlet.
  7. 根据权利要求1所述的一种具有平板热管和冷却液板复合结构的散热器,其特征在于:所述基板为铝基板,所述冷液板层和平板式热管层一体成型。A radiator with a composite structure of a flat plate heat pipe and a cooling liquid plate according to claim 1, wherein the substrate is an aluminum substrate, and the cooling liquid plate layer and the flat plate heat pipe layer are integrally formed.
  8. 一种如权利要求3所述具有平板热管和冷却液板复合结构的散热器的制作方法,其特征在于:包括如下步骤:A method for manufacturing a radiator with a composite structure of a flat heat pipe and a cooling liquid plate as claimed in claim 3, wherein the method comprises the following steps:
    S1、以纯铝或铝合金做材料,制作铝基板,所述铝基板包括冷液板制作层和平板式热管制作层;S1. Use pure aluminum or aluminum alloy as a material to make an aluminum substrate, and the aluminum substrate includes a cold liquid plate production layer and a flat heat pipe production layer;
    S2、在平板式热管制作层内设置有多个排孔;S2. A plurality of rows of holes are arranged in the production layer of the flat-plate heat pipe;
    S3、平板式热管制作层的排孔内壁面设置多孔介质层;S3. A porous medium layer is arranged on the inner wall surface of the row holes of the production layer of the flat heat pipe;
    S4、封堵住排孔的一端使之密闭;往排孔中注入低沸点工质;S4. Block one end of the exhaust hole to make it airtight; inject a low-boiling-point working medium into the exhaust hole;
    S5、在负压下,对排孔的另一端进行密闭,将低沸点工质密封在所述排孔内,得到包括多个平板热管的平板式热管层;S5, under negative pressure, seal the other end of the row of holes, and seal the low-boiling point working medium in the row of holes to obtain a flat-plate heat pipe layer including a plurality of flat-plate heat pipes;
    S6、在平板式热管制作层的排孔内壁面设置多孔介质层;S6, a porous medium layer is arranged on the inner wall surface of the row holes of the flat-plate heat pipe fabrication layer;
    S7、在冷液板制作层的两端分别设置端盖,所述端盖设置有冷却液进口和冷却液出口。S7. End caps are respectively provided at both ends of the cold liquid plate fabrication layer, and the end caps are provided with a cooling liquid inlet and a cooling liquid outlet.
  9. 根据权利要求8所述的一种具有平板热管和冷却液板复合结构的散热器,其特征在于:所述步骤S4中,多孔介质层的制作方法包括如下步骤:A radiator with a composite structure of a flat heat pipe and a cooling liquid plate according to claim 8, characterized in that: in the step S4, the manufacturing method of the porous medium layer comprises the following steps:
    A1、在每个排孔的中央均插入一根插针,所述插针的截面积大小设为插入后留出与排孔内壁面0.5-1mm的间隙;将所述插入插针的铝基板垂直放置,在每个排孔的余下的空隙中填充装入铝粉或铝合金粉末;A1. Insert a pin into the center of each row of holes. The cross-sectional area of the pin is set to leave a gap of 0.5-1mm with the inner wall of the row of holes after insertion; the aluminum substrate into which the pin is inserted is vertical Place, fill the remaining gaps of each row of holes with aluminum powder or aluminum alloy powder;
    A2、将已经插入了插针并填充了铝粉或铝合金粉末的铝基板工件置入粉末冶金烧结炉中,持续抽真空,排除氧气;A2. Put the aluminum substrate workpiece with inserted pins and filled with aluminum powder or aluminum alloy powder into the powder metallurgy sintering furnace, and continue to vacuumize to remove oxygen;
    A3、往烧结炉中充入氮气,在氮气保护气氛中进行升温,加热烧结炉进行烧结;A3. Fill the sintering furnace with nitrogen, heat up in a nitrogen protective atmosphere, and heat the sintering furnace for sintering;
    A4、烧结完成后自然冷却至常温,然后拔出插针,制得多孔介质层。A4. After the sintering is completed, it is naturally cooled to normal temperature, and then the pin is pulled out to obtain a porous medium layer.
  10. 根据权利要求1所述的一种具有平板热管和冷却液板复合结构的散热器,其特征在于:所述步骤A3中,氮气气氛的水分的分压为0.001-0.02kPa;以5-8℃/min的升温速度加热烧结炉,直至560-600℃;在氮气保护气氛中维持至少1h。A radiator with a composite structure of a flat heat pipe and a cooling liquid plate according to claim 1, characterized in that: in the step A3, the partial pressure of moisture in the nitrogen atmosphere is 0.001-0.02kPa; The heating rate of /min heats the sintering furnace until 560-600 ° C; maintains it for at least 1 h in a nitrogen protective atmosphere.
PCT/CN2021/097438 2021-04-30 2021-05-31 Heat dissipation device having flat heat pipe and cooling liquid plate composite structure and manufacturing method for heat dissipation device WO2022227220A1 (en)

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