WO2022219851A1 - Resin-molding device and method for producing resin molded article - Google Patents
Resin-molding device and method for producing resin molded article Download PDFInfo
- Publication number
- WO2022219851A1 WO2022219851A1 PCT/JP2021/048395 JP2021048395W WO2022219851A1 WO 2022219851 A1 WO2022219851 A1 WO 2022219851A1 JP 2021048395 W JP2021048395 W JP 2021048395W WO 2022219851 A1 WO2022219851 A1 WO 2022219851A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- resin material
- resin
- unit
- imaging
- release film
- Prior art date
Links
- 239000011347 resin Substances 0.000 title claims abstract description 222
- 229920005989 resin Polymers 0.000 title claims abstract description 222
- 238000000465 moulding Methods 0.000 title claims abstract description 48
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 239000000463 material Substances 0.000 claims abstract description 148
- 238000003384 imaging method Methods 0.000 claims abstract description 42
- 238000005286 illumination Methods 0.000 claims abstract description 8
- 238000004458 analytical method Methods 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 17
- 238000012545 processing Methods 0.000 claims description 15
- 239000000758 substrate Substances 0.000 description 30
- 238000003860 storage Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 5
- 238000000748 compression moulding Methods 0.000 description 4
- 230000007723 transport mechanism Effects 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 3
- 238000010191 image analysis Methods 0.000 description 3
- 238000005303 weighing Methods 0.000 description 3
- 238000013473 artificial intelligence Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000010365 information processing Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000004308 accommodation Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000007405 data analysis Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000007619 statistical method Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/56—Coatings, e.g. enameled or galvanised; Releasing, lubricating or separating agents
- B29C33/68—Release sheets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/18—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/34—Feeding the material to the mould or the compression means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/58—Measuring, controlling or regulating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
Definitions
- the present invention relates to a resin molding apparatus and a method for manufacturing a resin molded product.
- Patent Document 1 describes a technique of placing a release film on a table, supplying a liquid resin onto the release film, and imaging this with a camera (see FIG. 3, etc.).
- Patent Document 2 describes a technique of placing a release film on a moving table and then supplying granular resin onto the release film and observing it (paragraphs 0048 and 0049, FIG. 1st prize).
- the in-plane uniformity of the resin material is identified by observing the resin material laminated on the release film.
- the camera is arranged above the resin material, and the illumination is also arranged above. Therefore, the irradiation direction of illumination is inclined with respect to the imaging direction. As a result, shadows are formed on the resin material, causing brightness and darkness, which may lead to erroneous recognition of in-plane uniformity.
- a resin molding apparatus comprises a table at least partially translucent, an illumination section capable of illuminating from below the table, a resin material supply section for supplying a resin material onto the table, and the table.
- An imaging unit capable of imaging the resin material supplied above from above, and a resin molding unit performing resin molding using the resin material supplied onto the table are provided.
- a method for manufacturing a resin molded product according to the present invention comprises the steps of: supplying a resin material onto a table at least partially translucent; and performing resin molding using the resin material supplied on the table.
- FIG. 4 is a cross-sectional view schematically showing a resin material supply section;
- FIG. 4 is a diagram for explaining an imaging state by an imaging unit;
- FIG. 10 is a diagram showing an example of recesses in a state in which a resin material is supplied;
- FIG. 10 is a flowchart which shows the one part operation
- FIG. 10 is a flowchart showing the procedure of analysis processing executed in step S230 of FIG. 9;
- FIG. 10 is a flowchart showing the procedure of analysis processing executed in step S230 of FIG. 9;
- FIG. 4 is a cross-sectional view for explaining irradiation of light onto a resin material; It is the photograph of the resin material imaged with the resin molding apparatus to which this invention is applied. It is the photograph of the resin material imaged by the conventional resin molding apparatus.
- each drawing may be schematically drawn by appropriately omitting or exaggerating objects for easy understanding.
- FIG. 1 is a schematic plan view of a resin molding apparatus 100 according to this embodiment.
- the resin molding apparatus 100 is configured to perform resin sealing on a substrate W to which electronic elements such as a semiconductor chip, a resistor element, and a capacitor element are connected, thereby manufacturing a resin molded product.
- the component mounting surface of the substrate W on which electronic components are mounted is resin-sealed.
- Examples of the substrate W used here include semiconductor substrates such as silicon wafers, lead frames, printed wiring boards, metal substrates, resin substrates, glass substrates, ceramic substrates, and the like.
- the substrate W may be a carrier used for FOWLP (Fan Out Wafer Level Packaging) and FOPLP (Fan Out Panel Level Packaging). Wiring may already be provided on the substrate W, or wiring may not be provided.
- the resin molding apparatus 100 includes a substrate supply/storage module A (hereinafter also simply referred to as “module A”) and two resin molding modules B (hereinafter also simply referred to as “module B”). ), a resin material supply module C (hereinafter also simply referred to as “module C”), and a first controller 14 .
- a PLC Programmable Logic Controller
- PC Personal Computer
- the first control unit 14 includes a CPU (Central Processing Unit), RAM (Random Access Memory), ROM (Read Only Memory), etc., and is configured to control each of modules A to C according to information processing. ing.
- Each module A to C will be described in detail below.
- Each of the modules is detachable and replaceable with other modules.
- each of the modules A to C can be increased or decreased.
- Module A is a module for supplying pre-sealed substrates W and storing sealed substrates W, and includes a substrate supply section 1, a substrate storage section 2, a substrate placement section 3, and a substrate transfer mechanism 4. ,have.
- the substrate supply section 1 is configured to supply the pre-sealing substrate W onto the substrate mounting section 3 .
- the substrate storage part 2 is configured to store a sealed substrate W (resin molded product).
- the substrate mounting part 3 is configured to move in the arrow Y direction between a position corresponding to the substrate supply part 1 and a position corresponding to the substrate storage part 2 .
- the substrate transport mechanism 4 is configured to move in the directions of the arrows X and Y across the module A and the module B. is held and transported to module B. Alternatively, the sealed substrate W manufactured in the module B is placed on the substrate placement part 3 of the module A. As shown in FIG.
- Each module B is a module for molding a resin material, and has a compression molding section 5 for manufacturing a sealed substrate W (resin molded product) by compression molding.
- a black granular resin material P is used.
- the compression molding unit 5 has an upper mold 52 , a lower mold 51 facing the upper mold 52 , and a mold clamping mechanism 53 .
- the upper mold 52 is configured to hold the substrate W on its lower surface.
- the lower mold 51 has a bottom member and side members for forming a concave cavity 51C. That is, the bottom member constitutes the bottom surface of the cavity 51C, and the side member constitutes the side surface of the cavity 51C.
- a resin material P prepared in the module C is placed in the cavity 51C, as will be described later.
- the mold clamping mechanism 53 is configured to clamp the upper mold 52 and the lower mold 51 on which the resin material P is arranged.
- Module C is a module for supplying a resin material. As shown in FIG. 1, the module C includes a moving table 6, a resin material container 7, a resin material supply unit 8, a release film supply unit 9, an imaging unit 300, a resin material transport mechanism 90, have. Furthermore, this module C is provided with an HDD (Hard Disc Drive) 200 and a second controller 150 . This second controller 150 corresponds to the controller of the present invention. Each configuration will be described in detail below.
- HDD Hard Disc Drive
- Moving table> 2 is a plan view of the moving table
- FIG. 3 is a sectional view of FIG.
- the moving table 6 is configured to move in the direction of the arrow X and the direction of the arrow Y in the module C.
- a concave portion 61 is formed in the upper surface of the moving table 6, and a light guide plate 62 is arranged in this concave portion 61.
- an LED module 63 as an illumination unit is arranged on the side end face of the light guide plate 62 .
- the upper surface of the light guide plate 62 emits light.
- the light guide plate 62 a known plate made of acrylic resin or the like can be appropriately used, and a reflective film or a diffusion film can be provided as necessary.
- a suction port (not shown) is formed around the light guide plate 62 on the upper surface of the moving table 6, and is configured to hold a release film 73 described below by suction.
- FIG. 4 is a side view for explaining the operation of the release film supplying section.
- a release film supply unit 9 for placing a release film 73 on the upper surface of the moving table 6 is provided at one end of the moving table 6 .
- the release film supply unit 9 includes a roll 91 on which the release film 73 is wound, a delivery unit 92 that feeds the release film 73 from the roll 91 and arranges it on the moving table 6, and the release film 73. and a cutting portion 93 for cutting.
- the feeding unit 92 is configured to hold the end of the release film 73 wound on the roll 91 and feed the release film 73 by separating from the roll 91 . ing.
- the extractor 92 moves above the moving table 6 from one end to the other end.
- the release film 73 is placed on the moving table 6 .
- the release film 73 on the moving table 6 is sucked by the above suction port and held on the moving table 6 .
- the release film 73 is cut by a cutting section 93 at the end on the roll 91 side. As a result, the sheet-shaped release film 73 is arranged on the moving table 6 .
- the resin material container 7 has a frame member 72 and a moving mechanism (not shown) for moving the member.
- the frame-shaped member 72 is formed in a rectangular shape and placed on the moving table 6 on which the release film 73 is placed by the moving mechanism.
- recesses 71 into which the resin material is supplied are formed. That is, the release film 73 constitutes the bottom surface of the recess 71 , and the frame member 72 constitutes the side surface of the recess 71 .
- the recess 71 has a space corresponding to the size of the cavity 51C of the lower mold 51 of the module B. As shown in FIG.
- FIG. 6 is a cross-sectional view schematically showing a resin material supply section.
- the resin material supply unit 8 is configured to supply a preset weight of the resin material P to the concave portion 71 of the frame-shaped member 72. a portion 16;
- the storage unit 11 temporarily stores the granular resin material P and supplies the resin material P to the transport path 12 .
- the resin material supplied to the conveying path 12 is discharged from the ejection port 121 at the end and supplied to the concave portion 71 of the frame-shaped member 72 .
- the transport path 12 is vibrated by the vibrating portion 13, thereby transporting the resin material P to the ejection port side.
- the weighing unit 16 is configured to measure the weight of the resin material P in the resin material supply unit 8.
- the first control unit 14 controls the vibrating unit 13 based on the weighing result of the weighing unit 16 so that the amount of the resin material P supplied to the resin material storage unit 7 becomes a target value.
- the resin material P dropped from the discharge port 121 of the resin material supply unit 8 is evenly spread over the concave portion 71 by the relative movement of the moving table 6 with respect to the discharge port of the resin material supply unit 8 .
- FIG. 7 is a diagram for explaining an imaging state by the imaging unit.
- the imaging unit 300 is configured to capture an image of the resin material P supplied to the concave portion 71 of the frame member 72 from above and generate image data.
- the image pickup unit 300 picks up an image of the resin material P in the recess 71 with the moving table 6 positioned below the image pickup unit 300, for example.
- the imaging unit 300 is configured by a camera module including an image sensor such as a CCD (Charge Coupled Device) image sensor or a CMOS (Complementary Metal Oxide Semiconductor) image sensor.
- the resin material P is irradiated with light from below through the release film 73 by the light guide plate 62 described above.
- the HDD 200 described above is configured to store image data generated by the imaging section 300 .
- the HDD 200 may be replaced with another storage medium such as a solid state drive.
- the second control unit 150 includes a CPU, RAM, ROM, etc., and is configured to control the imaging unit 300 and the like according to information processing. Various controls by the first control unit 14 and the second control unit 150 will be described later in detail.
- the resin material transport mechanism 90 is configured to move in the arrow X direction and the arrow Y direction in the modules C and B. As shown in FIG. As shown in FIG. 5B, the resin material transport mechanism 90 separates the frame member 72 containing the resin material P and the release film 73 from the moving table 6 . Then, it is configured to convey this to the lower mold 51 of the module B and supply the resin material P to the cavity 51C of the lower mold 51 .
- FIG. 8 is a diagram showing an example of the recess 71 in a state in which the resin material P is supplied.
- the recess 71 includes a region T30 and a region T40. Although the resin material P is sufficiently supplied in the region T30, the resin material P is insufficient in the region T40. In the region where the resin material P is insufficient, the bottom surface of the recess 71 is exposed. The color of the bottom surface of the recess 71 is closer to white than the resin material P. As shown in FIG.
- the imaging section 300 images the resin material P supplied to the frame-shaped member 72 before performing resin molding.
- the second control section 150 analyzes the image data generated by the imaging section 300 and controls the resin material supply section 8 based on the analysis results.
- the resin material supply section 8 is controlled based on the analysis result of the supply state of the resin material P in the recess 71, so the supply state of the resin material P in the recess 71 is improved.
- the resin molding apparatus 100 it is possible to prevent a situation in which resin molded products having variations in thickness within one resin molded product are manufactured. The operation of the resin molding apparatus 100 will be described in detail below.
- FIG. 9 is a flow chart showing part of the operation procedure in the resin molding apparatus 100. As shown in FIG. The processing shown in this flow chart is executed in a state where the concave portion 71 of the frame-shaped member 72 is positioned below the discharge port 121 of the resin material supply section 8 . The processing shown in the left flowchart is executed by the first control unit 14 and the processing shown in the right flowchart is executed by the second control unit 150 .
- the first control unit 14 controls the resin material supply unit 8 to discharge the resin material P toward the recess 71 (step S100).
- the first control unit 14 determines whether or not the ejection of the resin material P is completed (step S110). When it is determined that the ejection of the resin material P has not been completed (NO in step S110), the first control unit 14 continues to perform necessary processes while the resin material P is being ejected. For example, the first controller 14 moves the moving table 6 so that the resin material P is evenly supplied to the concave portion 71 .
- the first control unit 14 sends a signal (imaging instruction signal) instructing imaging by the imaging unit 300 to the second control unit 150. Send (S120).
- the second control unit 150 determines whether or not an imaging instruction signal has been received from the first control unit 14 (step S200). If it is determined that the imaging instruction signal has not been received (NO in step S200), second control unit 150 waits until the imaging instruction signal is received.
- second control unit 150 causes imaging unit 300 to image resin material P in concave portion 71 from above and generate image data. is controlled (step S210).
- the second control unit 150 controls the imaging unit 300 to store the image data generated by the imaging unit 300 in the HDD 200 (step S220).
- the second control unit 150 executes image data analysis processing (step S230).
- FIG. 10 is a flowchart showing the procedure of analysis processing executed in step S230 of FIG.
- second control unit 150 reads image data stored in HDD 200 (step S300).
- the second control unit 150 applies gradation processing and binarization processing to the read image data (step S310).
- each pixel of image data is classified into 256 levels [0 (dark)-255 (bright)]. For example, white pixels are assigned “255” and black pixels are assigned "0".
- each pixel of image data is classified as "white” or "black”. For example, pixels whose values assigned by the gradation process are equal to or greater than the threshold X1 (eg, 200) are classified as "white”, and pixels whose values assigned by the gradation process are less than the threshold X1 are classified as "black”. be.
- the threshold X1 eg, 200
- FIG. 11 is a diagram for explaining the area included in the image data showing the recess 71.
- the image data includes regions T1-T18.
- the second control unit 150 calculates numerical data corresponding to each of the regions T1 to T18 included in the image data (step S320).
- this numerical data is the number of pixels classified as "white” in each region. That is, in step S320, the number of pixels classified as "white” in each of regions T1-T18 is calculated.
- a large number of pixels classified as “white” means that the resin material P is not evenly supplied and that the surface of the concave portion 71 is exposed over a large area.
- the second control unit 150 compares each numerical data calculated in step S320 with a threshold value X2 (eg, 10), and determines whether or not a problem occurs in each of the regions T1 to T18 (step S330 ). For example, the second control unit 150 determines that an area in which the numerical data exceeds the threshold value X2 is "defective (NG)", and an area in which the numerical data is equal to or less than the threshold value X2 is determined to be "good (OK)". judge. That is, in step S320, it is determined whether or not there is a shortage of the resin material P in each region of the concave portion 71 corresponding to each of the regions T1 to T18 (whether or not the number of "white” pixels is greater than the threshold value X2). or) is determined. The second control unit 150 generates analysis data based on the comparison result in step S330 (step S340).
- a threshold value X2 eg, 10
- FIG. 12 is a diagram showing an example of analysis data.
- the analysis data D1 includes the OK/NG judgment result in each area of the image data and the number of pixels classified as "white” in each area of the image data.
- the second control unit 150 transmits the analysis data D1 to the first control unit 14 (step S240).
- the first control unit 14 determines whether or not the analysis data D1 has been received from the second control unit 150 (step S130). If it is determined that analysis data D1 has not been received (NO in step S130), first control unit 14 waits until analysis data D1 is received.
- the first control unit 14 determines whether or not there is any problem with the state of the resin material P in the recess 71 based on the analysis data D1. (step S140). For example, the first control unit 14 determines that there is a problem with the state of the resin material P of the recess 71 (NG) when any of the regions T1-T18 is determined to be "NG”, and the region T1-T18 is determined to be "NG", it is determined that there is no problem with the state of the resin material P in the concave portion 71 (OK).
- the first control unit 14 controls each configuration so as to proceed to the step of resin molding (step S150). . That is, the first control unit 14 maintains the operation state of the resin material supply unit 8 without changing the operation state of the resin material supply unit 8 even when the resin material supply unit 8 is controlled next time.
- the first control unit 14 executes the processing when it is determined to be NG (step S160). That is, the first control unit 14 changes the contents of control when the resin material supply unit 8 is controlled next time, stores the changed contents, and stops the resin molding apparatus 100 . For example, when the resin material supply unit 8 is controlled next time, the first control unit 14 eliminates the shortage of the resin material P in the region (T1-T18) determined to have the shortage of the resin material P.
- the resin material supply unit 8 is controlled as follows.
- the first control unit 14 reduces the amount of the resin material P to be supplied to the region where the shortage of the resin material P has not occurred, and supplies the region where the shortage of the resin material P has occurred.
- the amount of resin material P is increased. As a result, the resin material P is evenly supplied to the concave portion 71 .
- FIG. 14 is an example of the imaged image, and white portions are portions through which light is transmitted (the thickness of the resin material P is approximately 1.0 mm). That is, it is considered that the resin material P is not densely laminated in this white portion and that voids are formed inside.
- FIG. 15 are images of the same resin material P.
- the central portion (dotted line) of the resin material appears to be densely laminated, but in FIG. 14, a white portion is generated at this portion, and it can be seen that a gap is formed inside. .
- the shadow of the resin material P makes it appear as if the resin material P is densely laminated when light is irradiated obliquely from above.
- irradiating light from the lower side of the resin material P in this way has the advantage that it is easy to see even with the naked eye, regardless of inspection with a camera.
- the configuration of the moving table 6 is not particularly limited, and various modes are possible as long as the resin material P can be irradiated with light from below.
- the light guide plate 62 is used to irradiate light.
- the resin material P can be irradiated with light from below.
- the type of light source is not particularly limited, and for example, organic EL, inorganic EL, etc. can be used in addition to LED.
- the arrangement range of the light-transmitting material on the moving table 6 can be appropriately changed according to the size of the concave portion 71 of the frame-shaped member 72 or the imaging range.
- the wavelength of the light from the light source may be changed according to the type of resin material used. That is, since light may be absorbed depending on the type of resin material, the wavelength of light can be selected according to the type of resin material so that the light can sufficiently pass through areas where the resin material is not dense. .
- the present invention can also be applied to liquid resin such as paste. Even with such a resin material, light can pass through areas where the layers are not densely laminated, so these areas can be identified.
- the resin molded portion of the present invention corresponds to the module B shown in the above embodiment, but the configuration of the module B is an example, and various modes are possible. That is, the configuration is not particularly limited as long as resin molding is performed using the resin material supplied on the moving table 6 .
- the imaging unit 300 performs imaging after the ejection of the resin material P is completed.
- the imaging timing by the imaging unit 300 is not limited to this.
- the imaging unit 300 may be arranged near the ejection port of the resin material supply unit 8 and constantly capture a moving image of the concave portion 71 while the resin material P is being supplied by the resin material supply unit 8 .
- the second control unit 150 determines in real time whether or not there is a problem with the state of the resin material P in the concave portion 71 based on the moving image data being captured, and determines the control contents of the resin material supply unit 8. can be changed in real time.
- image analysis was performed through gradation processing and binarization processing.
- the technique used for image analysis is not limited to this. For example, based on the results of unevenness measurement based on a 3D image of the recess 71, a region in which the resin material P is insufficient in the recess 71 may be detected, pattern matching, a statistical method, AI (Artificial Intelligence), or the like. may be used to detect a region in which the resin material P is insufficient in the concave portion 71 .
- AI Artificial Intelligence
- the first control unit 14 controls the shortage of the resin material P from the next time.
- the amount of the resin material P to be supplied to the area where the shortage of the resin material P has occurred is decreased, and the amount of the resin material P to be supplied to the area where the shortage of the resin material P has occurred is increased.
- the content of control by the first control unit 14 from the next time is not limited to this.
- the first control unit 14 refers to the analysis data D1 to increase the amount of the resin material P to be supplied to an area with fewer pixels classified as "white", The amount of resin material P supplied to a region with more pixels may be increased.
- the resin molding apparatus 100 is controlled by the first controller 14 and the second controller 150 .
- the control performed by the first control unit 14 and the second control unit 150 may be configured by a common control unit, or may be realized by, for example, one computer, or by three or more controllers. It may be implemented by a computer.
- the resin molding apparatus 100 includes the HDD 200 .
- resin molding apparatus 100 does not necessarily need to include HDD 200 .
- the HDD 200 may exist on a cloud server, for example.
- the second control unit 150 accesses the cloud server via a communication unit (not shown).
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Abstract
Description
図1は、本実施形態に係る樹脂成形装置100の概略平面図である。樹脂成形装置100は、半導体チップ、抵抗素子、キャパシタ素子等の電子素子が接続された基板Wに樹脂封止を施し、樹脂成形品を製造するように構成されている。この樹脂成形装置100においては、基板Wのうち電子部品が搭載された部品搭載面が樹脂封止される。 <1. Configuration of Resin Molding Apparatus>
FIG. 1 is a schematic plan view of a
モジュールAは、封止前基板Wの供給、及び封止済基板Wの収納を行うモジュールであり、基板供給部1と、基板収納部2と、基板載置部3と、基板搬送機構4と、を有している。基板供給部1は、封止前基板Wを基板載置部3上に供給するように構成されている。基板収納部2は、封止済基板W(樹脂成形品)を収納するように構成されている。基板載置部3は、基板供給部1に対応する位置と基板収納部2に対応する位置との間で矢印Y方向に移動するように構成されている。基板搬送機構4は、モジュールAとモジュールBとに亘って、矢印X方向及び矢印Y方向に移動するように構成されており、例えば、モジュールAにおいて基板載置部3上の封止前基板Wを保持し、モジュールBに搬送する。あるいは、モジュールBで製造された封止済基板Wを、モジュールAの基板載置部3上に載置する。 <1-1. Module A>
Module A is a module for supplying pre-sealed substrates W and storing sealed substrates W, and includes a
各モジュールBは、樹脂材料の成形を行うモジュールであり、圧縮成形によって封止済基板W(樹脂成形品)を製造する圧縮成形部5を有している。この圧縮成形においては、例えば、黒色の顆粒状の樹脂材料Pが用いられる。圧縮成形部5は、上型52と、上型52に対向する下型51と、型締め機構53と、を有している。上型52は、下面に基板Wを保持するように構成されている。一方、下型51は、凹状のキャビティ51Cを形成するための底面部材と側面部材とを有している。すなわち、底面部材がキャビティ51Cの底面を構成し、側面部材がキャビティ51Cの側面を構成する。キャビティ51Cには、後述するように、モジュールCで準備された樹脂材料Pが配置される。そして、型締め機構53は、上型52と、樹脂材料Pが配置された下型51とを型締めするように構成されている。 <1-2. Module B>
Each module B is a module for molding a resin material, and has a compression molding section 5 for manufacturing a sealed substrate W (resin molded product) by compression molding. In this compression molding, for example, a black granular resin material P is used. The compression molding unit 5 has an upper mold 52 , a lower mold 51 facing the upper mold 52 , and a
モジュールCは、樹脂材料を供給するためのモジュールである。図1に示すように、モジュールCは、移動テーブル6と、樹脂材料収容部7と、樹脂材料供給部8と、離型フィルム供給部9と、撮像部300と、樹脂材料搬送機構90と、を有している。さらに、このモジュールCには、HDD(Hard Disc Drive)200と、第2制御部150とが設けられている。この第2制御部150が、本発明の制御部に相当する。以下、各構成について詳細に説明する。 <1-3. Module C>
Module C is a module for supplying a resin material. As shown in FIG. 1, the module C includes a moving table 6, a
図2は移動テーブルの平面図、図3は図2の断面図である。図1に示すように、移動テーブル6は、モジュールCにおいて矢印X方向及び矢印Y方向に移動するように構成されている。図2及び図3に示すように、移動テーブル6の上面には凹部61が形成されており、この凹部61に導光板62が配置されている。また、導光板62の側端面には、照明部としてのLEDモジュール63が配置されており、このLEDモジュール63から照射された光が導光板62に入射し、導光板62内で拡散することで、導光板62の上面が発光するようになっている。導光板62は、アクリル樹脂などで形成された公知のものを適宜用いることができ、必要に応じて、反射フィルムや拡散フィルムを設けることができる。 <1-3-1. Moving table>
2 is a plan view of the moving table, and FIG. 3 is a sectional view of FIG. As shown in FIG. 1, the moving table 6 is configured to move in the direction of the arrow X and the direction of the arrow Y in the module C. As shown in FIG. As shown in FIGS. 2 and 3, a
図4は離型フィルム供給部の動作を説明する側面図である。図4(a)に示すように、移動テーブル6の一端部側には、移動テーブル6の上面に離型フィルム73を配置するための離型フィルム供給部9が設けられている。離型フィルム供給部9は、離型フィルム73が巻き取られたロール91と、このロール91から離型フィルム73を繰り出し、移動テーブル6上に配置する操出部92と、離型フィルム73を切断する切断部93と、を有している。 <1-3-2. Release film supply unit>
FIG. 4 is a side view for explaining the operation of the release film supplying section. As shown in FIG. 4( a ), a release
次に、樹脂材料収容部7について説明する。図5(a)に示すように、樹脂材料収容部7は、枠状部材72と、これを移動させる移動機構(図示省略)とを有している。枠状部材72は矩形状に形成され、移動機構によって、離型フィルム73が配置された移動テーブル6上に配置される。これにより、樹脂材料が供給される凹部71が形成される。すなわち、離型フィルム73がこの凹部71の底面を構成し、枠状部材72は凹部71の側面を構成する。なお、この凹部71は、モジュールBの下型51のキャビティ51Cの大きさに対応する空間を有している。 <1-3-3. Resin Material Storage Unit>
Next, the resin
続いて、樹脂材料供給部8について説明する。図6は樹脂材料供給部を模式的に示す断面図である。樹脂材料供給部8は、予め設定された重量の樹脂材料Pを枠状部材72の凹部71に供給するように構成されており、貯留部11と、搬送路12と、振動部13と、計量部16と、を有している。貯留部11は、顆粒状の樹脂材料Pを一時的に貯留し、この樹脂材料Pを搬送路12に供給する。搬送路12に供給された樹脂材料は、その端部の吐出口121から排出され、枠状部材72の凹部71に供給される。このとき、振動部13によって搬送路12が振動され、これによって樹脂材料Pを吐出口側に搬送するように構成されている。 <1-3-4. Resin Material Supply Unit>
Next, the resin
図7は撮像部による撮像状態を説明するための図である。図7に示すように、撮像部300は、枠状部材72の凹部71に供給された樹脂材料Pを上方から撮像し、画像データを生成するように構成されている。撮像部300は、例えば、移動テーブル6が撮像部300の下方に位置する状態で、凹部71内の樹脂材料Pを撮像する。撮像部300は、例えば、CCD(Charge Coupled Device)イメージセンサ又はCMOS(Complementary Metal Oxide Semiconductor)イメージセンサ等のイメージセンサを含むカメラモジュールで構成される。この撮影の際、上述した導光板62により、離型フィルム73を介して樹脂材料Pの下方から光が照射される。 <1-3-5. Imaging unit>
FIG. 7 is a diagram for explaining an imaging state by the imaging unit. As shown in FIG. 7, the
図1に示すように、樹脂材料搬送機構90は、モジュールC及びモジュールBにおいて、矢印X方向及び矢印Y方向に移動するように構成されている。図5(b)に示すように、樹脂材料搬送機構90は、樹脂材料Pを収容した枠状部材72及び離型フィルム73を、移動テーブル6から離間する。そして、これをモジュールBの下型51に搬送し、下型51のキャビティ51Cに樹脂材料Pを供給するように構成されている。 <1-3-6. Resin Material Conveying Mechanism>
As shown in FIG. 1, the resin
続いて、上記のように構成されたモジュールCにおける樹脂成形品の厚みの抑制方法について説明する。 <2. Suppression of Variation in Thickness of Resin Molded Products>
Next, a method for suppressing the thickness of the resin molded product in the module C configured as described above will be described.
図9は、樹脂成形装置100における一部の動作手順を示すフローチャートである。このフローチャートに示される処理は、枠状部材72の凹部71が樹脂材料供給部8の吐出口121の下方に位置する状態で実行される。左側のフローチャートに示される処理は第1制御部14によって実行され、右側のフローチャートに示される処理は第2制御部150によって実行される。 <3. Example of operation of resin molding apparatus>
FIG. 9 is a flow chart showing part of the operation procedure in the
本実施形態に係る樹脂成形装置100によれば、次の効果を得ることができる。 <4. Features>
According to the
以上、本発明の一実施形態について説明したが、本発明は上記実施形態に限定されるものではなく、その趣旨を逸脱しない限りにおいて、種々の変更が可能である。例えば、以下の変更が可能である。また、以下の変形例の要旨は適宜組み合わせることができる。 <5. Variation>
Although one embodiment of the present invention has been described above, the present invention is not limited to the above-described embodiment, and various modifications are possible without departing from the scope of the invention. For example, the following changes are possible. Also, the gist of the following modified examples can be combined as appropriate.
63 :LEDモジュール(照明部)
73 :離型フィルム
9 :離型フィルム供給部
100 :樹脂成形装置
150 :第2制御部(制御部)
300 :撮像部 6 Moving table: (table)
63: LED module (illumination part)
73: release film 9: release film supply unit 100: resin molding device 150: second control unit (control unit)
300: imaging unit
Claims (8)
- 少なくとも一部が透光性を有するテーブルと、
前記テーブルの下方から照明可能な照明部と、
前記テーブル上に樹脂材料を供給する樹脂材料供給部と、
前記テーブル上に供給された前記樹脂材料を上方から撮像可能な撮像部と、
前記テーブル上に供給された樹脂材料を用いて樹脂成形を行う樹脂成形部と、
を備えている、樹脂成形装置。 a table at least partially translucent;
a lighting unit capable of lighting from below the table;
a resin material supply unit that supplies a resin material onto the table;
an imaging unit capable of imaging the resin material supplied onto the table from above;
a resin molding unit that performs resin molding using the resin material supplied on the table;
A resin molding device. - 前記テーブルには、透光性を有する導光板が設けられ、
前記照明部は、前記導光板の側端面から光を照射するように構成されている、請求項1に記載の樹脂成形装置。 The table is provided with a light guide plate having translucency,
2. The resin molding apparatus according to claim 1, wherein said illumination unit is configured to irradiate light from a side end face of said light guide plate. - 前記テーブル上に離型フィルムを供給する離型フィルム供給部をさらに備え、
前記テーブル上に配置された前記離型フィルム上に、前記樹脂材料が供給されるように構成されている、請求項1または2に記載の樹脂成形装置。 Further comprising a release film supply unit for supplying a release film onto the table,
3. The resin molding apparatus according to claim 1, wherein said resin material is supplied onto said release film arranged on said table. - 前記撮像部の撮像によって生成された画像データを解析し、解析結果に基づいて前記樹脂材料供給部を制御するように構成された制御部をさらに備えている、請求項1から3のいずれかに記載の樹脂成形装置。 4. The resin material supply unit according to any one of claims 1 to 3, further comprising a control unit configured to analyze image data generated by imaging by said imaging unit and control said resin material supply unit based on the analysis result. Resin molding apparatus as described.
- 前記制御部は、前記画像データに階調処理及び二値化処理を施すことを通じて、前記画像データを解析するように構成されている、請求項4に記載の樹脂成形装置。 5. The resin molding apparatus according to claim 4, wherein the control unit is configured to analyze the image data by applying gradation processing and binarization processing to the image data.
- 少なくとも一部が透光性を有するテーブル上に、樹脂材料を供給するステップと、
前記テーブルの下方から照明を行った状態で、供給された樹脂材料を上方から撮像するステップと、
前記テーブル上に供給された樹脂材料を用いて樹脂成形を行うステップと、
を備えている、樹脂成形品の製造方法。 supplying a resin material onto a table at least partially translucent;
a step of capturing an image of the supplied resin material from above while the table is illuminated from below;
a step of performing resin molding using the resin material supplied on the table;
A method for manufacturing a resin molded product. - 前記樹脂材料を供給するステップに先立って、前記テーブル上に離型フィルムを配置するステップをさらに備え、
前記樹脂材料は、前記離型フィルム上に供給される、請求項6に記載の樹脂成形品の製造方法。 Prior to the step of supplying the resin material, further comprising the step of placing a release film on the table,
7. The method of manufacturing a resin molded product according to claim 6, wherein the resin material is supplied onto the release film. - 前記撮像により生成された画像データを解析し、解析結果に基づいて前記樹脂材料の供給を制御するステップをさらに備えている、請求項5または6に記載の樹脂成形品の製造方法。 The method of manufacturing a resin molded product according to claim 5 or 6, further comprising the step of analyzing image data generated by said imaging, and controlling supply of said resin material based on the analysis result.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020237026114A KR20230128088A (en) | 2021-04-15 | 2021-12-24 | Resin molding device and manufacturing method of resin molding |
CN202180095712.4A CN116981554A (en) | 2021-04-15 | 2021-12-24 | Resin molding device and method for manufacturing resin molded product |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2021-069371 | 2021-04-15 | ||
JP2021069371A JP7482824B2 (en) | 2021-04-15 | 2021-04-15 | Resin molding device and method for manufacturing resin molded product |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2022219851A1 true WO2022219851A1 (en) | 2022-10-20 |
Family
ID=83639548
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2021/048395 WO2022219851A1 (en) | 2021-04-15 | 2021-12-24 | Resin-molding device and method for producing resin molded article |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP7482824B2 (en) |
KR (1) | KR20230128088A (en) |
CN (1) | CN116981554A (en) |
WO (1) | WO2022219851A1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2024204028A1 (en) * | 2023-03-27 | 2024-10-03 | アピックヤマダ株式会社 | Compression-molding device and compression-molding method |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013115187A1 (en) * | 2012-01-30 | 2013-08-08 | 旭硝子株式会社 | Release film and method of manufacturing semiconductor device using same |
JP2017209157A (en) * | 2016-05-23 | 2017-11-30 | 富士フイルム株式会社 | Mold, mold manufacturing method, and patterned sheet manufacturing method |
CN110027217A (en) * | 2019-05-06 | 2019-07-19 | 南京铖联激光科技有限公司 | A kind of active monitor-type laser 3D printing device and monitoring method |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6218891U (en) | 1985-07-16 | 1987-02-04 | ||
JP6923503B2 (en) | 2018-11-27 | 2021-08-18 | Towa株式会社 | Resin molding equipment and manufacturing method of resin molded products |
-
2021
- 2021-04-15 JP JP2021069371A patent/JP7482824B2/en active Active
- 2021-12-24 CN CN202180095712.4A patent/CN116981554A/en active Pending
- 2021-12-24 KR KR1020237026114A patent/KR20230128088A/en unknown
- 2021-12-24 WO PCT/JP2021/048395 patent/WO2022219851A1/en active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013115187A1 (en) * | 2012-01-30 | 2013-08-08 | 旭硝子株式会社 | Release film and method of manufacturing semiconductor device using same |
JP2017209157A (en) * | 2016-05-23 | 2017-11-30 | 富士フイルム株式会社 | Mold, mold manufacturing method, and patterned sheet manufacturing method |
CN110027217A (en) * | 2019-05-06 | 2019-07-19 | 南京铖联激光科技有限公司 | A kind of active monitor-type laser 3D printing device and monitoring method |
Also Published As
Publication number | Publication date |
---|---|
KR20230128088A (en) | 2023-09-01 |
CN116981554A (en) | 2023-10-31 |
JP2022164095A (en) | 2022-10-27 |
TW202241688A (en) | 2022-11-01 |
JP7482824B2 (en) | 2024-05-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN106920762B (en) | Semiconductor manufacturing apparatus, semiconductor device manufacturing method, and chip mounter | |
CN108573901B (en) | Bare chip bonding apparatus and method for manufacturing semiconductor device | |
WO2022219851A1 (en) | Resin-molding device and method for producing resin molded article | |
JP2006292419A (en) | Defect inspection device and ptp packaging machine | |
US7817263B2 (en) | Mounting apparatus, inspecting apparatus, inspecting method, and mounting method | |
CN111981976B (en) | Holding member, method of manufacturing the same, inspection mechanism, cutting device, and method of manufacturing holding object | |
CN112284285A (en) | Inspection system, inspection method, cutting device, and resin molding device | |
TWI857292B (en) | Resin molding device and method for manufacturing resin molded product | |
JP5145495B2 (en) | Inspection device | |
KR102476597B1 (en) | Resin molding equipment and manufacturing method of resin molded products | |
JP2020061417A (en) | Substrate processing apparatus and inspection method | |
KR100854437B1 (en) | Suction pad for semicondcutor transfer device | |
JPH10209227A (en) | System and device for inspecting semiconductor integrated circuit, and method for inspecting semiconductor circuit | |
US20220059377A1 (en) | Inspection device, resin molding apparatus, and method of manufacturing resin molded product | |
TWI808864B (en) | Calibration method, and manufacturing method of electronic component | |
CN111609799A (en) | Inspection apparatus and inspection method | |
WO2023037671A1 (en) | Maintenance method and method for manufacturing electronic component | |
JP2023089883A (en) | Resin molding device and method for manufacturing resin molded product | |
JP2019174319A (en) | Inspection system and method for inspection | |
JP2008118013A (en) | Resin sealed device | |
JP6596342B2 (en) | Ultraviolet processing apparatus, bonding system, ultraviolet processing method, program, and computer storage medium | |
JP2023089748A (en) | Component mounting machine | |
KR100990938B1 (en) | Semiconductor package manufactruing apparatus | |
JP2021056039A (en) | Inkjet printing apparatus, device manufactured using the same, uneven coating film formation detection method, and manufacturing method for device | |
JP2005285962A (en) | Method and device for semiconductor component testing |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 21937044 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 20237026114 Country of ref document: KR Kind code of ref document: A |
|
WWE | Wipo information: entry into national phase |
Ref document number: 202180095712.4 Country of ref document: CN |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
WWE | Wipo information: entry into national phase |
Ref document number: 11202307810T Country of ref document: SG |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 21937044 Country of ref document: EP Kind code of ref document: A1 |