WO2022209275A1 - 移相器及びその移相方法 - Google Patents
移相器及びその移相方法 Download PDFInfo
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- WO2022209275A1 WO2022209275A1 PCT/JP2022/004275 JP2022004275W WO2022209275A1 WO 2022209275 A1 WO2022209275 A1 WO 2022209275A1 JP 2022004275 W JP2022004275 W JP 2022004275W WO 2022209275 A1 WO2022209275 A1 WO 2022209275A1
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- transmission line
- movable electrode
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- state
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- 238000000034 method Methods 0.000 title claims description 14
- 230000010363 phase shift Effects 0.000 title claims description 3
- 230000005540 biological transmission Effects 0.000 claims abstract description 152
- 230000007246 mechanism Effects 0.000 claims abstract description 56
- 230000008878 coupling Effects 0.000 claims abstract description 24
- 238000010168 coupling process Methods 0.000 claims abstract description 24
- 238000005859 coupling reaction Methods 0.000 claims abstract description 24
- 230000008859 change Effects 0.000 claims abstract description 21
- 230000004043 responsiveness Effects 0.000 abstract description 5
- 230000005674 electromagnetic induction Effects 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 6
- 239000004973 liquid crystal related substance Substances 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 230000005611 electricity Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/18—Phase-shifters
- H01P1/184—Strip line phase-shifters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/18—Phase-shifters
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q3/00—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system
- H01Q3/26—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the relative phase or relative amplitude of energisation between two or more active radiating elements; varying the distribution of energy across a radiating aperture
- H01Q3/30—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the relative phase or relative amplitude of energisation between two or more active radiating elements; varying the distribution of energy across a radiating aperture varying the relative phase between the radiating elements of an array
- H01Q3/34—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the relative phase or relative amplitude of energisation between two or more active radiating elements; varying the distribution of energy across a radiating aperture varying the relative phase between the radiating elements of an array by electrical means
- H01Q3/36—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the relative phase or relative amplitude of energisation between two or more active radiating elements; varying the distribution of energy across a radiating aperture varying the relative phase between the radiating elements of an array by electrical means with variable phase-shifters
Definitions
- the present invention relates to an antenna phase shifter and a phase shifting method thereof.
- a phase shifter that controls the phase using liquid crystal is known (see Patent Document 1, for example).
- An object of the present disclosure is to provide a phase shifter and its phase shifting method that solve the above-mentioned problems.
- One aspect for achieving the above object is a plurality of transmission lines with different lengths each having one end connected to an antenna element and having gaps formed therein; an ON state provided in each gap of the transmission line, moving in a direction parallel to the transmission line, overlapping the ends of the transmission line at both ends of the gap, and electromagnetically inductively coupling to the ends of the transmission line; a plurality of movable electrodes that move in a parallel direction and switch to an off state in which at least one of the transmission line ends at both ends of the gap does not overlap and at least one of the transmission line ends is not electromagnetically inductively coupled; a plurality of MEMS mechanisms for respectively moving the movable electrodes; with The MEMS mechanism is a phase shifter that changes the phase difference by switching the length of the transmission line by switching the movable electrode between an on state and an off state.
- One aspect for achieving the above object is a pair of fixed electrodes provided at the ends of the transmission line at both ends of the gap formed in the transmission line connected to the antenna element; a movable electrode that moves in at least one of a parallel direction and a perpendicular direction to the fixed electrodes while overlapping both ends of the pair of fixed electrodes and being electromagnetically coupled; a MEMS mechanism for moving the movable electrode; with The MEMS mechanism moves the movable electrode in a parallel direction to change an overlap amount between both ends of the movable electrode and a pair of fixed electrodes, and moves the movable electrode in a vertical direction to change the movable electrode.
- the phase shifter may change the phase difference by performing at least one of changing the distance between both ends of and the pair of fixed electrodes.
- One aspect for achieving the above object is a plurality of transmission lines with different lengths each having one end connected to an antenna element and having gaps formed therein; an ON state provided in each gap of the transmission line, moving in a direction parallel to the transmission line, overlapping the ends of the transmission line at both ends of the gap, and electromagnetically inductively coupling to the ends of the transmission line; a plurality of first movable electrodes that move in a parallel direction and switch to an OFF state in which at least one of the transmission line ends at both ends of the gap does not overlap and at least one of the transmission line ends is not electromagnetically coupled; a pair of fixed electrodes provided at both ends of the gap of the transmission line; a second movable electrode that overlaps both ends of the pair of fixed electrodes and is electromagnetically coupled, and moves in at least one of a direction parallel to and perpendicular to the fixed electrodes; a plurality of MEMS mechanisms for respectively moving the first and second movable electrodes; with The MEMS mechanism switches the length of the transmission path by switching the first
- the phase shifter may change the phase difference by at least one of changing one and changing the coupling capacitance of the second movable electrode and the fixed electrode.
- One aspect for achieving the above object is a plurality of transmission lines with different lengths each having one end connected to an antenna element and having gaps formed therein; an ON state provided in each gap of the transmission line, moving in a direction parallel to the transmission line, overlapping the ends of the transmission line at both ends of the gap, and electromagnetically inductively coupling to the ends of the transmission line; a plurality of movable electrodes that move in a parallel direction and switch to an off state in which at least one of the transmission line ends at both ends of the gap does not overlap and at least one of the transmission line ends is not electromagnetically inductively coupled; a plurality of MEMS mechanisms for respectively moving the movable electrodes;
- a phase shifting method for a phase shifter comprising:
- the MEMS mechanism may be a phase shifting method of a phase shifter, wherein the phase difference is changed by switching the length of the
- One aspect for achieving the above object is a pair of fixed electrodes provided at the ends of the transmission line at both ends of the gap formed in the transmission line connected to the antenna element; a movable electrode that moves in at least one of a parallel direction and a perpendicular direction to the fixed electrodes while overlapping both ends of the pair of fixed electrodes and being electromagnetically coupled; a MEMS mechanism for moving the movable electrode;
- a phase shifting method for a phase shifter comprising: The MEMS mechanism moves the movable electrode in a parallel direction to change an overlap amount between both ends of the movable electrode and a pair of fixed electrodes, and moves the movable electrode in a vertical direction to change the movable electrode.
- One aspect for achieving the above object is a plurality of transmission lines with different lengths each having one end connected to an antenna element and having gaps formed therein; an ON state provided in each gap of the transmission line, moving in a direction parallel to the transmission line, overlapping the ends of the transmission line at both ends of the gap, and electromagnetically inductively coupling to the ends of the transmission line; a plurality of first movable electrodes that move in a parallel direction and switch to an OFF state in which at least one of the transmission line ends at both ends of the gap does not overlap and at least one of the transmission line ends is not electromagnetically coupled; a pair of fixed electrodes provided at transmission line ends at both ends of the gap; a second movable electrode that overlaps both ends of the pair of fixed electrodes and is electromagnetically coupled, and moves in at least one of a direction parallel to and perpendicular to the fixed electrodes; a plurality of MEMS mechanisms for respectively moving the first and
- FIG. 1 is a diagram showing a schematic configuration of a phase shifter according to this embodiment.
- the phase shifter 1 according to this embodiment includes a plurality of transmission lines 2 having different lengths, a plurality of movable electrodes 3 provided on each transmission line 2, and a plurality of MEMS mechanisms 4 provided on each of the movable electrodes 3. and has.
- An antenna element 5 is connected to one end of the transmission line 2 .
- the antenna element 5 is, for example, a patch antenna or the like, and has a signal supply window 51 or the like.
- Each transmission line 2 is provided with gaps 21 at regular intervals.
- a first transmission line 2a, a second transmission line 2b, a third transmission line 2c, and a fourth transmission line 2d are provided from left to right in FIG. 1, and the lengths are set longer in this order.
- the transmission line 2 is made of, for example, a conductive metal member such as copper.
- a movable electrode 3 movable in a direction parallel to each transmission line 2 is provided in the gap 21 of each transmission line 2 .
- the movable electrode 3 is made of, for example, a conductive metal member such as copper.
- FIG. 2 is a diagram schematically showing the operation of the movable electrode according to this embodiment. The movable electrode 3 moves in a parallel direction without contact while maintaining a constant distance from the transmission line 2 .
- the movable electrode 3 moves in a direction parallel to the transmission line 2, overlaps the ends of the transmission line at both ends of the gap 21, and enters an ON state (left side in FIG. 2) in which it is electromagnetically inductively coupled to the ends of the transmission line.
- the movable electrode 3 is turned on, the transmission line ends at both ends of the gap 21 and both ends of the movable electrode 3 are capacitively coupled to conduct electricity.
- the movable electrode 3 moves in a direction parallel to the transmission line 2 and does not overlap at least one of the transmission line ends at both ends of the gap 21, so that at least one of the transmission line ends is in an OFF state (Fig. 2 right).
- the movable electrode 3 is turned off, one end of the transmission line at both ends of the gap 21 and one end of the movable electrode 3 are not capacitively coupled and conduct electricity. In this manner, the movable electrode 3 has a switching function of switching between an ON state and an OFF state by moving in the parallel direction.
- the MEMS mechanism 4 is provided on the movable electrode 3 and moves the movable electrode 3 in a parallel direction.
- the MEMS mechanism 4 is connected to the movable electrode 3 through an insulator.
- a MEMS (Micro Electro Mechanical Systems) mechanism is a device with a micron-level structure in which mechanical elements such as sensors, actuators, and electronic circuits are integrated on a semiconductor silicon substrate, glass substrate, or organic material.
- the MEMS mechanism 4 has the characteristic of being able to move the movable electrode 3 minutely and at high speed.
- the MEMS mechanism 4 changes the phase difference by switching the length of the transmission line 2 by switching each movable electrode 3 between ON and OFF states.
- phase shift method of the phase shifter 1 will be specifically described.
- the MEMS mechanism 4 switches on the movable electrode 3 in the gap 21 of the third longest transmission line 2c and the other first, second and fourth transmission lines 2a, 2b. , 2d switches the movable electrode 3 in the gap 21 to the off state.
- the MEMS mechanism 4 switches the movable electrode 3 in the gap 21 of the longest first transmission line 2a to the ON state, and turns off the movable electrode 3 in the gaps 21 of the other second to fourth transmission lines 2b, 2c, and 2d. switch to state.
- the MEMS mechanism 4 switches the movable electrodes 3 in the gaps 21 of the transmission lines 2 of a specific length to the ON state, and switches the movable electrodes 3 in the gaps 21 of the other transmission lines 2 to the OFF state.
- the phase difference can be freely changed.
- the MEMS mechanism 4 changes the phase difference by switching the length of the transmission line 2 by switching the movable electrode 3 between the ON state and the OFF state.
- the movable electrode 3 can be switched between the ON state and the OFF state at high speed using the high-speed operation feature of the MEMS mechanism 4, the phase difference can be changed at high speed, and the responsiveness of the antenna can be increased.
- the response speed of a liquid crystal antenna is about several ms to several tens of ms
- the response speed of the phase shifter according to this embodiment is about 10 ⁇ s to 100 ⁇ s, which is extremely high.
- the MEMS mechanism 4 uses electrostatic force, it is less susceptible to temperature fluctuations than liquid crystals and has excellent controllability. Therefore, the phase difference can be controlled with higher accuracy. Furthermore, since the MEMS mechanism 4 can be formed over a large area, an antenna of a desired size can be manufactured at low cost. Furthermore, since the finer lines progress as the frequency increases, it is advantageous to use the minute MEMS mechanism 4 according to this embodiment.
- a dielectric may be inserted between the movable electrode 3 and the transmission line ends at both ends of the gap 21 . As a result, a wavelength shortening effect is produced, and the phase shifter 1 can be further miniaturized.
- FIG. 3 is a block diagram showing a schematic configuration of the phase shifter according to this embodiment.
- a phase shifter 20 according to this embodiment includes a pair of fixed electrodes 22 , a movable electrode 3 provided on the pair of fixed electrodes 22 , and a MEMS mechanism 4 provided on the movable electrode 3 .
- a pair of fixed electrodes 22 are provided at transmission line ends on both ends of a gap 21 formed in the transmission line 2 .
- the fixed electrode 22 is made of, for example, a conductive metal member such as copper.
- the movable electrode 3 is provided across the gap 21 of the transmission line 2 .
- the pair of fixed electrodes 22 and the transmission line ends at both ends of the gap 21 may be integrally formed.
- An antenna element 5 is connected to one end of the transmission line 2 .
- FIG. 4 is a diagram schematically showing the operation of the movable electrode according to this embodiment.
- a pair of fixed electrodes 22 are arranged at a constant distance.
- the movable electrode 3 moves parallel to each fixed electrode 22 without contact while maintaining a constant distance from each fixed electrode 22 .
- a pair of fixed electrodes 22 are overlapped with both ends of the movable electrode 3 and are electromagnetically inductively coupled.
- the coupling capacitance between the left fixed electrode 22 and the left end of the movable electrode 3 is C1
- the coupling capacitance between the right fixed electrode 22 and the right end of the movable electrode 3 is C2.
- the MEMS mechanism 4 moves the movable electrode 3 in a parallel direction to change the amount of overlap between both ends of the movable electrode 3 and the pair of fixed electrodes 22 . Thereby, the phase difference can be changed by changing the coupling capacitance between the movable electrode 3 and the fixed electrode 22 . Note that the MEMS mechanism 4 is formed at a position that does not affect the signal.
- one movable electrode 3, one gap 21, and one MEMS mechanism 4 are provided in the transmission line 2, but the present invention is not limited to this.
- the number of movable electrodes 3, gaps 21, and MEMS mechanisms 4 provided in the transmission line 2 may be arbitrary.
- the MEMS mechanism 4 moves the movable electrode 3 in the parallel direction to change the amount of overlap between the movable electrode 3 and each fixed electrode 22 .
- the amount of overlap between the movable electrode 3 and each fixed electrode 22 can be changed at high speed by using the feature of high-speed operation of the MEMS mechanism 4, the phase difference can be changed at high speed, and the responsiveness of the antenna can be improved at high speed.
- the MEMS mechanism 4 can change the amount of overlap between both ends of the movable electrode 3 and the pair of fixed electrodes 22 to continuously change the coupling capacitance between the movable electrode 3 and the fixed electrodes 22 .
- the phase difference can be finely adjusted according to the amount of overlap, and the fine adjustment of the phase difference can be performed at high speed.
- the MEMS mechanism 4 moves the movable electrode 3 in the vertical direction, changes the distance between both ends of the movable electrode 3 and the pair of fixed electrodes 22, changes the coupling capacitance between the movable electrode 3 and the fixed electrode 22, and changes the position.
- the phase difference may be changed. It should be noted that the MEMS mechanism 4 is more preferable to move the movable electrode 3 in the parallel direction, as described above, in that strong capacitive coupling can be maintained.
- the MEMS mechanism 4 moves the movable electrode 3 in the parallel direction to change the amount of overlap between both ends of the movable electrode 3 and the pair of fixed electrodes 22, and moves the movable electrode 3 in the vertical direction to move the movable electrode 3.
- the phase difference may be changed by changing the distance between both ends of the electrode 3 and the pair of fixed electrodes 22 .
- FIG. 5 is a diagram showing a schematic configuration of a phase shifter according to this embodiment.
- the phase shifter 30 according to this embodiment includes a plurality of transmission lines 2 having different lengths, a plurality of first and second movable electrodes 31 and 32 provided on each transmission line 2, and first and second movable electrodes 31 and 32 provided on each transmission line 2. and a plurality of MEMS mechanisms 4 provided on the electrodes 31 and 32 .
- An antenna element 5 is connected to one end of the transmission line 2 .
- a plurality of gaps 21 are formed in each transmission line 2 .
- Fixed electrodes 22 may be provided at the ends of the transmission line at both ends of the gap 21 .
- the first movable electrode 31 is provided in the gap 21 of the transmission line 2, moves in a direction parallel to the transmission line 2, overlaps the transmission line ends at both ends of the gap 21, and is in an ON state in which it is electromagnetically coupled to the transmission line ends. become.
- the first movable electrode 31 moves in a direction parallel to the transmission line 2 and does not overlap at least one of the transmission line ends at both ends of the gap 21, and in an off state in which at least one of the transmission line ends is not electromagnetically inductively coupled. become.
- the first movable electrode 31 has a switching function of switching between an ON state and an OFF state by moving in the parallel direction.
- a pair of fixed electrodes 22 are provided at the ends of the transmission line at both ends of the gap 21 .
- the fixed electrodes 22 may be configured integrally with the transmission line ends at both ends of the gap 21 .
- the second movable electrode 32 moves in a direction parallel to the fixed electrodes 22 while overlapping both ends of the pair of fixed electrodes 22 and being electromagnetically coupled.
- the second movable electrode 32 may move vertically with respect to the fixed electrodes 22 while overlapping both ends of the pair of fixed electrodes 22 and electromagnetic induction coupling.
- the MEMS mechanism 4 moves the first and second movable electrodes 31, 32, respectively.
- the MEMS mechanism 4 switches the length of the transmission line 2 by switching the first movable electrode 31 between ON and OFF states.
- the phase difference can be adjusted stepwise according to the length of the transmission path 2 set in advance, and the phase difference can be modulated widely.
- the MEMS mechanism 4 changes the amount of overlap between both ends of the second movable electrode 32 and the pair of fixed electrodes 22 to change the coupling capacitance between the second movable electrode 32 and the fixed electrode 22 .
- the phase difference can be finely adjusted according to the amount of overlap, and the phase difference can be finely adjusted.
- the phase difference can be roughly adjusted. Furthermore, by adjusting the overlapping amount of the second movable electrode 32 and changing the coupling capacitance between the second movable electrode 32 and the fixed electrode 22, the phase difference can be finely adjusted. This enables easy and highly accurate phase difference adjustment.
- the number of transmission lines 2, the number and positions of the first and second movable electrodes 31 and 32, the position of the gap 21, and the shape of the transmission line 2 shown in FIG. As long as the length of the transmission line 2 can be switched by switching the first movable electrode 31 between the ON state and the OFF state, the number of the transmission lines 2, the positions of the gaps 21, and the shape of the transmission line 2 may be arbitrary. .
- the number and position of the second movable electrodes 32 may be arbitrary as long as the phase difference can be finely adjusted.
- one or more gaps 21 may be newly formed in the transmission line 2 shown in FIG. 1 and the second movable electrode 32 may be provided in each gap 21 .
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Abstract
Description
本開示の目的は、上述した課題を解決する移相器及びその移相方法を提供することである。
一端がアンテナ素子に接続され、ギャップが夫々形成された長さの異なる複数の伝送路と、
前記伝送路のギャップに夫々設けられ、前記伝送路に対し平行方向に移動し該ギャップの両端の伝送路端部に重なり該伝送路端部に電磁誘導結合するオン状態と、前記伝送路に対し平行方向に移動し該ギャップの両端の伝送路端部の少なくとも一方と重ならず、該伝送路端部の少なくとも一方が電磁誘導結合しないオフ状態と、に切り替わる複数の可動電極と、
前記可動電極を夫々移動させる複数のMEMS機構と、
を備え、
前記MEMS機構は、前記可動電極をオン状態及びオフ状態に切り替え伝送路の長さを切り替えることで、位相差を変化させる、移相器
である。
上記目的を達成するための一態様は、
アンテナ素子に接続された伝送路に形成されたギャップの両端の伝送路端部に設けられた一対の固定電極と、
該一対の固定電極の両方と両端が重なり電磁誘導結合しつつ、該固定電極に対し平行方向及び垂直方向のうちの少なくとも一方に移動する可動電極と、
前記可動電極を移動させるMEMS機構と、
を備え、
前記MEMS機構は、前記可動電極を平行方向に移動させて、前記可動電極の両端と一対の固定電極との重なり量を変化させる、及び、前記可動電極を垂直方向に移動させて、前記可動電極の両端と一対の固定電極との距離を変化させる、のうちの少なくとも一方を行うことで、位相差を変化させる、移相器
であってもよい。
上記目的を達成するための一態様は、
一端がアンテナ素子に接続され、ギャップが夫々形成された長さの異なる複数の伝送路と、
前記伝送路のギャップに夫々設けられ、前記伝送路に対し平行方向に移動し該ギャップの両端の伝送路端部に重なり該伝送路端部に電磁誘導結合するオン状態と、前記伝送路に対し平行方向に移動し該ギャップの両端の伝送路端部の少なくとも一方と重ならず、該伝送路端部の少なくとも一方が電磁誘導結合しないオフ状態と、に切り替わる複数の第1可動電極と、
前記伝送路のギャップの両端に設けられた一対の固定電極と、
該一対の固定電極の両方と両端が重なり電磁誘導結合しつつ、該固定電極に対し平行方向及び垂直方向のうちの少なくとも一方に移動する第2可動電極と、
前記第1及び第2可動電極を夫々移動させる複数のMEMS機構と、
を備え、
前記MEMS機構は、前記第1可動電極をオン状態及びオフ状態に切り替え伝送路の長さを切り替える、および、前記第2可動電極の両端と一対の固定電極との重なり量及び距離のうちの少なくとも一方を変化させ、前記第2可動電極及び固定電極の結合容量を変化させる、のうちの少なくとも一方により、位相差を変化させる、移相器
であってもよい。
上記目的を達成するための一態様は、
一端がアンテナ素子に接続され、ギャップが夫々形成された長さの異なる複数の伝送路と、
前記伝送路のギャップに夫々設けられ、前記伝送路に対し平行方向に移動し該ギャップの両端の伝送路端部に重なり該伝送路端部に電磁誘導結合するオン状態と、前記伝送路に対し平行方向に移動し該ギャップの両端の伝送路端部の少なくとも一方と重ならず、該伝送路端部の少なくとも一方が電磁誘導結合しないオフ状態と、に切り替わる複数の可動電極と、
前記可動電極を夫々移動させる複数のMEMS機構と、
を備える移相器の移相方法であって、
前記MEMS機構は、前記可動電極をオン状態及びオフ状態に切り替え伝送路の長さを切り替えることで、位相差を変化させる、移相器の移相方法
であってもよい。
上記目的を達成するための一態様は、
アンテナ素子に接続された伝送路に形成されたギャップの両端の伝送路端部に設けられた一対の固定電極と、
該一対の固定電極の両方と両端が重なり電磁誘導結合しつつ、該固定電極に対し平行方向及び垂直方向のうちの少なくとも一方に移動する可動電極と、
前記可動電極を移動させるMEMS機構と、
を備える移相器の移相方法であって、
前記MEMS機構は、前記可動電極を平行方向に移動させて、前記可動電極の両端と一対の固定電極との重なり量を変化させる、及び、前記可動電極を垂直方向に移動させて、前記可動電極の両端と一対の固定電極との距離を変化させる、のうちの少なくとも一方を行うことで、位相差を変化させる、移相器の移相方法
であってもよい。
上記目的を達成するための一態様は、
一端がアンテナ素子に接続され、ギャップが夫々形成された長さの異なる複数の伝送路と、
前記伝送路のギャップに夫々設けられ、前記伝送路に対し平行方向に移動し該ギャップの両端の伝送路端部に重なり該伝送路端部に電磁誘導結合するオン状態と、前記伝送路に対し平行方向に移動し該ギャップの両端の伝送路端部の少なくとも一方と重ならず、該伝送路端部の少なくとも一方が電磁誘導結合しないオフ状態と、に切り替わる複数の第1可動電極と、
前記ギャップの両端の伝送路端部に設けられた一対の固定電極と、
該一対の固定電極の両方と両端が重なり電磁誘導結合しつつ、該固定電極に対し平行方向及び垂直方向のうちの少なくとも一方に移動する第2可動電極と、
前記第1及び第2可動電極を夫々移動させる複数のMEMS機構と、
を備える移相器の移相方法であって、
前記MEMS機構は、前記第1可動電極をオン状態及びオフ状態に切り替え伝送路の長さを切り替える、および、前記第2可動電極の両端と一対の固定電極との重なり部の量及び距離のうちの少なくとも一方を変化させ、前記第2可動電極及び固定電極の結合容量を変化させる、のうちの少なくとも一方により、位相差を変化させる、移相器の移相方法
であってもよい。
以下、図面を参照して本発明の実施形態について説明する。図1は、本実施形態に係る移相器の概略的な構成を示す図である。本実施形態に係る移相器1は、長さの異なる複数の伝送路2と、各伝送路2に設けられた複数の可動電極3と、各可動電極3に設けられた複数のMEMS機構4と、を備えている。
図3は、本実施形態に係る移相器の概略的な構成を示すブロック図である。本実施形態に係る移相器20は、一対の固定電極22と、一対の固定電極22に設けられた可動電極3と、可動電極3に設けられたMEMS機構4と、を備えている。
図5は、本実施形態に係る移相器の概略的な構成を示す図である。本実施形態に係る移相器30は、長さの異なる複数の伝送路2と、各伝送路2に設けられた複数の第1及び第2可動電極31、32と、第1及び第2可動電極31、32に設けられた複数のMEMS機構4と、を備えている。
この出願は、2021年3月29日に出願された日本出願特願2021-056222を基礎とする優先権を主張し、その開示の全てをここに取り込む。
2 伝送路
3 可動電極
4 MEMS機構
5 アンテナ素子
20 移相器
21 ギャップ
22 固定電極
30 移相器
31 第1可動電極
32 第2可動電極
51 信号供給窓
Claims (6)
- 一端がアンテナ素子に接続され、ギャップが夫々形成された長さの異なる複数の伝送路と、
前記伝送路のギャップに夫々設けられ、前記伝送路に対し平行方向に移動し該ギャップの両端の伝送路端部に重なり該伝送路端部に電磁誘導結合するオン状態と、前記伝送路に対し平行方向に移動し該ギャップの両端の伝送路端部の少なくとも一方と重ならず、該伝送路端部の少なくとも一方が電磁誘導結合しないオフ状態と、に切り替わる複数の可動電極と、
前記可動電極を夫々移動させる複数のMEMS機構と、
を備え、
前記MEMS機構は、前記可動電極をオン状態及びオフ状態に切り替え伝送路の長さを切り替えることで、位相差を変化させる、移相器。 - アンテナ素子に接続された伝送路に形成されたギャップの両端の伝送路端部に設けられた一対の固定電極と、
該一対の固定電極の両方と両端が重なり電磁誘導結合しつつ、該固定電極に対し平行方向及び垂直方向のうちの少なくとも一方に移動する可動電極と、
前記可動電極を移動させるMEMS機構と、
を備え、
前記MEMS機構は、前記可動電極を平行方向に移動させて、前記可動電極の両端と一対の固定電極との重なり量を変化させる、及び、前記可動電極を垂直方向に移動させて、前記可動電極の両端と一対の固定電極との距離を変化させる、のうちの少なくとも一方を行うことで、位相差を変化させる、移相器。 - 一端がアンテナ素子に接続され、ギャップが夫々形成された長さの異なる複数の伝送路と、
前記伝送路のギャップに夫々設けられ、前記伝送路に対し平行方向に移動し該ギャップの両端の伝送路端部に重なり該伝送路端部に電磁誘導結合するオン状態と、前記伝送路に対し平行方向に移動し該ギャップの両端の伝送路端部の少なくとも一方と重ならず、該伝送路端部の少なくとも一方が電磁誘導結合しないオフ状態と、に切り替わる複数の第1可動電極と、
前記伝送路のギャップの両端に設けられた一対の固定電極と、
該一対の固定電極の両方と両端が重なり電磁誘導結合しつつ、該固定電極に対し平行方向及び垂直方向のうちの少なくとも一方に移動する第2可動電極と、
前記第1及び第2可動電極を夫々移動させる複数のMEMS機構と、
を備え、
前記MEMS機構は、前記第1可動電極をオン状態及びオフ状態に切り替え伝送路の長さを切り替える、および、前記第2可動電極の両端と一対の固定電極との重なり量及び距離のうちの少なくとも一方を変化させ、前記第2可動電極及び固定電極の結合容量を変化させる、のうちの少なくとも一方により、位相差を変化させる、移相器。 - 一端がアンテナ素子に接続され、ギャップが夫々形成された長さの異なる複数の伝送路と、
前記伝送路のギャップに夫々設けられ、前記伝送路に対し平行方向に移動し該ギャップの両端の伝送路端部に重なり該伝送路端部に電磁誘導結合するオン状態と、前記伝送路に対し平行方向に移動し該ギャップの両端の伝送路端部の少なくとも一方と重ならず、該伝送路端部の少なくとも一方が電磁誘導結合しないオフ状態と、に切り替わる複数の可動電極と、
前記可動電極を夫々移動させる複数のMEMS機構と、
を備える移相器の移相方法であって、
前記MEMS機構は、前記可動電極をオン状態及びオフ状態に切り替え伝送路の長さを切り替えることで、位相差を変化させる、移相器の移相方法。 - アンテナ素子に接続された伝送路に形成されたギャップの両端の伝送路端部に設けられた一対の固定電極と、
該一対の固定電極の両方と両端が重なり電磁誘導結合しつつ、該固定電極に対し平行方向及び垂直方向のうちの少なくとも一方に移動する可動電極と、
前記可動電極を移動させるMEMS機構と、
を備える移相器の移相方法であって、
前記MEMS機構は、前記可動電極を平行方向に移動させて、前記可動電極の両端と一対の固定電極との重なり量を変化させる、及び、前記可動電極を垂直方向に移動させて、前記可動電極の両端と一対の固定電極との距離を変化させる、のうちの少なくとも一方を行うことで、位相差を変化させる、移相器の移相方法。 - 一端がアンテナ素子に接続され、ギャップが夫々形成された長さの異なる複数の伝送路と、
前記伝送路のギャップに夫々設けられ、前記伝送路に対し平行方向に移動し該ギャップの両端の伝送路端部に重なり該伝送路端部に電磁誘導結合するオン状態と、前記伝送路に対し平行方向に移動し該ギャップの両端の伝送路端部の少なくとも一方と重ならず、該伝送路端部の少なくとも一方が電磁誘導結合しないオフ状態と、に切り替わる複数の第1可動電極と、
前記ギャップの両端の伝送路端部に設けられた一対の固定電極と、
該一対の固定電極の両方と両端が重なり電磁誘導結合しつつ、該固定電極に対し平行方向及び垂直方向のうちの少なくとも一方に移動する第2可動電極と、
前記第1及び第2可動電極を夫々移動させる複数のMEMS機構と、
を備える移相器の移相方法であって、
前記MEMS機構は、前記第1可動電極をオン状態及びオフ状態に切り替え伝送路の長さを切り替える、および、前記第2可動電極の両端と一対の固定電極との重なり部の量及び距離のうちの少なくとも一方を変化させ、前記第2可動電極及び固定電極の結合容量を変化させる、のうちの少なくとも一方により、位相差を変化させる、移相器の移相方法。
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0917300A (ja) * | 1995-06-22 | 1997-01-17 | Rockwell Internatl Corp | 微細電気機械スイッチ |
JP2004282150A (ja) * | 2003-03-12 | 2004-10-07 | Sony Corp | 移相器及びフェーズドアレイアンテナ装置 |
JP2006525642A (ja) * | 2003-04-29 | 2006-11-09 | メドトロニック・インコーポレーテッド | 超小型電気機械式スイッチおよびそれを組み込んだ医療器具 |
JP2007221692A (ja) * | 2006-02-20 | 2007-08-30 | Mitsubishi Electric Corp | 線路長切り替え型移相回路 |
-
2022
- 2022-02-03 WO PCT/JP2022/004275 patent/WO2022209275A1/ja active Application Filing
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0917300A (ja) * | 1995-06-22 | 1997-01-17 | Rockwell Internatl Corp | 微細電気機械スイッチ |
JP2004282150A (ja) * | 2003-03-12 | 2004-10-07 | Sony Corp | 移相器及びフェーズドアレイアンテナ装置 |
JP2006525642A (ja) * | 2003-04-29 | 2006-11-09 | メドトロニック・インコーポレーテッド | 超小型電気機械式スイッチおよびそれを組み込んだ医療器具 |
JP2007221692A (ja) * | 2006-02-20 | 2007-08-30 | Mitsubishi Electric Corp | 線路長切り替え型移相回路 |
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