WO2022208661A1 - 測距装置、測距装置の制御方法及び測距システム - Google Patents

測距装置、測距装置の制御方法及び測距システム Download PDF

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Publication number
WO2022208661A1
WO2022208661A1 PCT/JP2021/013546 JP2021013546W WO2022208661A1 WO 2022208661 A1 WO2022208661 A1 WO 2022208661A1 JP 2021013546 W JP2021013546 W JP 2021013546W WO 2022208661 A1 WO2022208661 A1 WO 2022208661A1
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WIPO (PCT)
Prior art keywords
beam diameter
incident
light
incident position
distance
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Ceased
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PCT/JP2021/013546
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English (en)
French (fr)
Japanese (ja)
Inventor
大祐 武井
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NEC Corp
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NEC Corp
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Publication date
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Priority to JP2023509966A priority Critical patent/JP7517595B2/ja
Priority to PCT/JP2021/013546 priority patent/WO2022208661A1/ja
Priority to US18/273,461 priority patent/US20240103141A1/en
Publication of WO2022208661A1 publication Critical patent/WO2022208661A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/483—Details of pulse systems
    • G01S7/486—Receivers
    • G01S7/4868—Controlling received signal intensity or exposure of sensor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/483—Details of pulse systems
    • G01S7/484—Transmitters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/42—Simultaneous measurement of distance and other co-ordinates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4814—Constructional features, e.g. arrangements of optical elements of transmitters alone
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/483—Details of pulse systems
    • G01S7/486—Receivers
    • G01S7/4861—Circuits for detection, sampling, integration or read-out
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/497—Means for monitoring or calibrating

Definitions

  • the present invention relates to a ranging device, a ranging device control method, and a ranging system capable of improving spatial resolution in measurement by, for example, LiDAR (Light Detection and Ranging).
  • LiDAR Light Detection and Ranging
  • Patent Literature 1 discloses a technique for improving distance measurement resolution in measurement by LiDAR.
  • the present invention has been made in view of the above problems, and an object of the present invention is to provide a distance measuring device, a distance measuring device control method, and a distance measuring system capable of improving the spatial resolution in measurement by LiDAR or the like. to provide.
  • the distance measuring device of the present invention is distance measuring means for measuring the distance between the light emitting means and the incident position based on the reflected light of the laser beam that has entered the incident position of the object from the light emitting means with the first beam diameter; beam diameter adjusting means for adjusting the beam diameter of the laser beam incident on the incident position to a second beam diameter according to the distance; data generation means for generating sensing data regarding the object based on the reflected light corresponding to the laser light incident on the incident position from the light emission means with the second beam diameter; with The beam diameter adjusting means adjusts the beam diameter of the laser light so that the second beam diameter at the incident position is smaller than the first beam diameter at the incident position.
  • control method of the distance measuring device of the present invention includes: measuring the distance between the light emitting means and the incident position based on the reflected light of the laser beam that has entered the incident position of the object from the light emitting means with the first beam diameter; adjusting the beam diameter of the laser light incident on the object according to the distance to a second beam diameter smaller than the first beam diameter; Sensing data relating to the object is generated based on the reflected light corresponding to the laser light incident with the second beam diameter from the light emitting means.
  • the ranging system of the present invention is distance measuring means for measuring the distance between the light emitting means and the incident position based on the reflected light of the laser beam that has entered the incident position of the object from the light emitting means with the first beam diameter; beam diameter adjusting means for adjusting the beam diameter of the laser beam incident on the incident position to a second beam diameter according to the distance; data generation means for generating sensing data regarding the object based on the reflected light corresponding to the laser light incident on the incident position from the light emission means with the second beam diameter; with The beam diameter adjusting means adjusts the beam diameter of the laser light so that the second beam diameter at the incident position is smaller than the first beam diameter at the incident position.
  • a ranging device a ranging device control method, and a ranging system capable of improving the spatial resolution in measurements by LiDAR or the like.
  • FIG. 1 is a block diagram showing a configuration example of a distance measuring device according to a first embodiment of the present invention
  • FIG. FIG. 2 is a diagram for explaining the details of the distance measuring device according to the first embodiment of the present invention
  • FIG. FIG. 2 is a diagram for explaining the details of the distance measuring device according to the first embodiment of the present invention
  • FIG. FIG. 2 is a diagram for explaining the details of the distance measuring device according to the first embodiment of the present invention
  • FIG. FIG. 2 is a diagram for explaining the details of the distance measuring device according to the first embodiment of the present invention
  • FIG. FIG. 2 is a diagram for explaining the details of the distance measuring device according to the first embodiment of the present invention
  • FIG. 4 is a flow chart showing an operation example of the distance measuring device according to the first embodiment of the present invention. It is a block diagram which shows the structural example of the modification of the distance measuring device in the 1st Embodiment of this invention. It is a block diagram which shows the structural example of the distance measuring device in the 2nd Embodiment of this invention. 9 is a flow chart showing an operation example of the distance measuring device according to the second embodiment of the present invention.
  • FIG. 1 is a block diagram showing a configuration example of the distance measuring device 1.
  • FIG. 2, 3, 4 and 5 are diagrams for explaining the details of the distance measuring device 1.
  • FIG. FIG. 6 is a flowchart for explaining an operation example of the distance measuring device 1. As shown in FIG.
  • the configuration of the distance measuring device 1 will be explained.
  • the distance measuring device 1 includes a light source section 10 and a control section 20 .
  • the light source unit 10 and the control unit 20 are integrally provided in FIG. 1, they may be provided separately.
  • the light source unit 10 and the control unit 20 can communicate with each other through communication means (not shown).
  • the light source unit 10 includes light emitting means 11 and light receiving means 13 .
  • the light emitting means 11 irradiates the monitoring target MT with laser light.
  • the laser light is pulsed laser light.
  • the light emitting means 11 emits laser light from the light input/output terminal OI provided in the light source section 10.
  • FIG. As a result, the irradiated laser light propagates along the optical path OP and enters the incident position FP of the monitored object MT.
  • the optical path OP is a line segment connecting the optical input/output end OI and the incident position FP.
  • the MT to be monitored is a communication tower.
  • the light emitting means 11 irradiates the monitoring target MT with the laser light by emitting the laser light at a preset angle.
  • the light receiving means 13 receives laser light reflected at the incident position FP of the monitoring target MT (hereinafter referred to as "laser reflected light").
  • laser reflected light For example, in the examples of FIGS. 2, 3 and 4, the light receiving means 13 receives laser reflected light from the monitoring target MT via the optical path OP and the optical input/output terminal OI. Further, by changing the direction in which the light source unit 10 irradiates laser light as described later, the light receiving unit 13 receives the laser reflected light from different reflection points FP1, FP2, and FP3 as shown in FIG. can receive.
  • the control unit 20 includes distance measuring means 21 , beam diameter adjusting means 22 , data generating means 23 and output control means 24 .
  • the distance measuring means 21, the beam diameter adjusting means 22, the data generating means 23, and the output control means 24 do not need to be provided in one control section 20. may operate as one system.
  • a program for implementing each of the distance measuring means 21, the beam diameter adjusting means 22, the data generating means 23 and the output controlling means 24 in an information processing device such as a computer may be stored in a storage medium such as a hard disk drive.
  • the distance measuring means 21 measures the distance between the light emitting means 11 and the incident position FP based on the reflected light of the laser beam that has entered the incident position FP of the monitored object MT from the light emitting means 11 .
  • FIG. 2 shows the positional relationship between the light source unit 10 and the monitored object MT by the x-axis, y-axis and z-axis.
  • FIG. 3 shows the positional relationship between the light source unit 10 and the monitoring target MT by the z-axis and the a-axis. The a-axis is obtained by orthographically projecting the optical path OP onto the xy plane.
  • FIG. 4 shows the positional relationship between the light source section 10 and the monitoring target MT on the xy plane.
  • the light emitting means 11 emits laser light in a direction indicated by an arbitrary elevation/depression angle ⁇ 1 with reference to the xy plane.
  • the elevation/depression angle ⁇ 1 is an angle formed by a straight line extending vertically downward from the optical input/output end OI of the laser beam and the optical path OP.
  • the light emitting means 11 emits laser light in a direction indicated by an arbitrary azimuth angle ⁇ 2 with respect to the x-axis.
  • the azimuth angle ⁇ 2 is the angle formed by the reference line L set on the xy plane and the optical path OP.
  • Each of the elevation/depression angle ⁇ 1 and the azimuth angle ⁇ 2 is set independently by the distance measuring means 21 .
  • the distance measuring means 21 obtains the length of the optical path OP from the time from when the light emitting means 11 irradiates the laser beam to when the light receiving means 13 receives the reflected laser light (hereinafter referred to as time t). .
  • the length of the optical path OP is obtained by dividing the value obtained by multiplying the time t by the speed of light by two.
  • the laser light is incident on different incident positions FP.
  • the light source unit 10 emits laser light according to a plurality of predetermined elevation angles ⁇ 1 and a plurality of azimuth angles ⁇ 2, thereby receiving reflected laser light reflected at a plurality of incident positions FP of the monitoring target MT.
  • the distance measuring means 21 obtains the distance (the length of the optical path OP) from the light input/output end OI of the light emitting means 11 for each of the plurality of incident positions FP of the monitored object MT.
  • the light source unit 10 changes at least one of the elevation/depression angle ⁇ 1 and the azimuth angle ⁇ 2 to cause laser light to enter different incident positions FP.
  • the light source unit 10 outputs laser light along optical paths OP1, OP2, and OP3 shown in FIG. receive light.
  • the distance measuring means 21 obtains the distance (the length of the optical path OP) to each incident position according to the distance measuring method described above.
  • the distance measuring means 21 associates the elevation/depression angle ⁇ 1 and the azimuth angle ⁇ 2 at the time when the laser beam is emitted with the distance to the incident position where the laser beam is reflected, and outputs the result to the beam diameter adjusting means 22. Output.
  • the beam diameter adjusting means 22 adjusts the beam diameter of the laser beam incident on the incident position FP of the object from the light emitting means 11 according to the distance obtained by the distance measuring means 21 .
  • the distance measuring means 21 measures the distance between the incident position FP and the light emitting means 11 based on the laser reflected light of the laser light output from the light emitting means 11 .
  • the light emitting means 11 emits a laser beam having a predetermined beam diameter from a beam expander provided in the light emitting means 11 when the distance measuring means 21 measures the distance. At this time, the distances between the plurality of lenses in the beam expander are set so that parallel laser beams are emitted from the beam expander.
  • the laser light which is parallel when it is emitted, is diffused before entering the incident position FP, and then enters the incident position FP.
  • a first beam diameter is defined as a beam diameter at the time when the parallel laser beam is incident on the incident position FP.
  • the distance measuring means 21 can obtain the first beam diameter based on the distance to the incident position FP and the beam diameter of the laser beam at the time of emission.
  • the beam expander may be provided inside the light source section 10 or may be provided in the control section 20 .
  • the beam diameter adjusting means 22 Based on the distance to the incident position output from the distance measuring means 21, the beam diameter adjusting means 22 makes the beam incident on the incident position FP from the light emitting means 11 at the elevation/depression angle ⁇ 1 and the azimuth angle ⁇ 2 associated with the incident position.
  • the beam diameter of the laser light to be used is set as the second beam diameter.
  • the beam diameter adjusting means 22 controls the beam expander so that the laser beam is converged at the distance obtained by the distance measuring means 21 more than when the laser beam was emitted.
  • the beam diameter adjuster 22 refers to a lookup table that associates the distances between the lenses included in the beam expander with the distances to the incident position FP.
  • the beam diameter adjusting means 22 adjusts the distance between the lenses according to the distance to the incident position FP from the point at which the parallel laser beam is emitted, thereby changing the distance to the incident position FP.
  • a laser beam can be made incident with a second beam diameter smaller than the first beam diameter.
  • the beam diameter adjusting means 22 associates the elevation/depression angle ⁇ 1 and the azimuth angle ⁇ 2 with the second beam diameter, and outputs them to the data generating means 23 .
  • the data generating means 23 generates sensing data regarding the object MT based on the reflected light corresponding to the laser beam that has entered the incident position FP from the light emitting means 11 with the second beam diameter. Specifically, the data generating means 23 outputs the distance to the incident position FP associated with the elevation/depression angle ⁇ 1 and the azimuth angle ⁇ 2 from the beam diameter adjusting means 22 to the light emitting means 11 .
  • the light emitting means 11 outputs laser light to different incident positions FP by changing at least one of the elevation/depression angle .theta.1 and the azimuth angle .theta.2 in the same manner as described above.
  • the light emitting means 11 changes the second beam diameter
  • the beam expander is controlled so that the laser beam is incident at .
  • the data generating means 23 generates sensing data of the monitored object MT based on the laser reflected light of the laser beam that has entered the monitored object MT with the second beam diameter.
  • Sensing data is generated, for example, based on the intensity of reflected laser light.
  • the monitored object MT is a communication tower
  • cracks will occur as the deterioration progresses.
  • a laser beam incident on a cracked portion is more likely to scatter than a laser beam incident on a crack-free portion. Therefore, the reflected laser light of the laser light incident on the cracked portion has a lower intensity than the laser reflected light of the laser light incident on the non-cracked portion. Therefore, when reflected laser light having an intensity equal to or lower than the threshold value is received by the light receiving means 13, the data generating means 23 detects, as sensing data, data indicating that a crack has occurred at the incident position FP of the laser light. .
  • the bolt attached to the communication tower may come off the screw hole.
  • the data generating means 23 causes the laser light having the second beam diameter to be incident on the incident position FP of the object MT from the light emitting means 11 a plurality of times, and receives the reflected laser light a plurality of times.
  • the data generation means 23 indicates that the bolt has come off at a particular incident position FP if the intensity of the laser reflected light from that incident position FP has decreased from the intensity previously obtained from the same incident position FP. Generate data as sensing data.
  • the data generating means 23 may generate a three-dimensional model of the monitoring target MT based on reflected light from a plurality of incident positions.
  • a three-dimensional model is a collection of points whose positions are uniquely determined by x-axis coordinates, y-axis coordinates, and z-axis coordinates.
  • a three-dimensional model is, for example, a three-dimensional point cloud model.
  • the data generating means 23 obtains the x-coordinate, y-coordinate, and z-coordinate of each incident position FP, and plots them on a coordinate system consisting of the x-axis, y-axis, and z-axis to generate a three-dimensional model of the monitored object MT. do.
  • the data generating means 23 multiplies the length of the optical path OP by cos ⁇ 1 to obtain the difference between the z-coordinate of the optical input/output terminal OI of the laser beam and the z-coordinate of the incident position FP of the laser beam ( H) can be calculated. Thereby, the data generator 23 acquires the relative position of the incident position FP on the z-axis with respect to the optical input/output terminal OI.
  • the data generating means 23 multiplies the length of the optical path OP by sin ⁇ 1 to calculate the length of the optical path OP projected onto the xy plane (D1 in FIG. 4).
  • D1 as shown in FIG. 4, is the length of a line segment connecting the light input/output end OI of the laser light to the incident position FP on the xy plane.
  • the data generator 23 multiplies D1 by sin ⁇ 2 to find the difference (D2 in FIG. 4) between the x-coordinate of the optical input/output terminal OI and the x-coordinate of the incident position FP.
  • the data generating means 23 multiplies D1 by cos ⁇ 2 to find the difference (D3 in FIG. 4) between the y-coordinate of the optical input/output terminal OI and the y-coordinate of the incident position FP.
  • the data generating means 23 can acquire the relative position of the incident position FP on each axis with respect to the optical input/output terminal OI by the above procedure. By repeating the above procedure, the data generation means 23 acquires the relative positions of the plurality of incident positions FP on each axis with respect to the optical input/output terminal OI, and generates a three-dimensional model.
  • the output control means 24 executes control to output the sensing data generated by the data generation means 23 .
  • the output control means 24 outputs the sensing data to the external device (not shown) when instructed by the external device.
  • the distance measuring means 21 acquires distances to a plurality of incident positions FP (S101). Specifically, in the distance measuring means 21, the laser light emitted by the light emitting means 11 is incident on the incident position FP with a first beam diameter, and the reflected laser light from the incident position FP is received by the light receiving means 13. The length of the distance (optical path OP in FIGS. 2 to 4) from the optical input/output terminal OI to the incident position is determined based on the time t. The distance measuring means 21 changes at least one of the elevation/depression angle ⁇ 1 and the azimuth angle ⁇ 2 to determine the distance from the light input/output end OI to each of the plurality of incident positions.
  • the distance measuring means 21 associates the elevation/depression angle .theta.1 and the azimuth angle .theta.2 at the time the laser beam is emitted with the distance to the incident position where the laser beam is reflected, and outputs them to the beam diameter adjusting means 22.
  • the beam diameter adjusting means 22 sets the second beam diameter for each incident position FP based on the acquired distance (S102). Specifically, based on the distance to the incident position FP output from the distance measuring means 21, the beam diameter adjusting means 22 emits light at an elevation/depression angle ⁇ 1 and an azimuth angle ⁇ 2 associated with the incident position FP. A beam diameter of the laser beam to be incident on the incident position FP from the means 11 is set as a second beam diameter. The beam diameter adjusting means 22 associates the elevation/depression angle ⁇ 1 and the azimuth angle ⁇ 2 with the second beam diameter, and outputs them to the data generating means 23 .
  • the data generating means 23 causes the light source unit 10 to enter the laser beam with the second beam diameter adjusted with respect to the incident position FP, and receive the reflected laser beam (S103). At this time, every time at least one of the elevation/depression angle ⁇ 1 and the azimuth angle ⁇ 2 is changed, the light emitting means 11 emits light at the incident position FP with the second beam diameter associated with the changed elevation/depression angle ⁇ 1 and azimuth angle ⁇ 2. A beam expander provided in the light emitting means 11 is controlled so that the light enters.
  • the data generating means 23 generates sensing data based on the reflected laser light received by the light receiving means 13 . Specifically, as described above, the data generating means 23 generates at least one of data indicating that a crack has occurred at the incident position, data indicating that the bolt has come off at the incident position, and a three-dimensional model. to generate
  • the range finder 1 has been described above. As described above, the distance measuring device 1 is provided with the distance measuring means 21, the beam diameter adjusting means 22 and the data generating means 23.
  • FIG. The distance measuring means 21 measures the distance between the light emitting means 11 and the incident position FP on the basis of the reflected light of the laser beam that has entered the incident position FP of the object from the light emitting means 11 with the first beam diameter.
  • the beam diameter adjusting means 22 adjusts the beam diameter of the laser beam incident on the incident position FP from the light emitting means 11 to the second beam diameter according to the distance between the light emitting means 11 and the incident position FP. do.
  • the data generating means 23 generates sensing data related to the object based on the reflected light corresponding to the laser beam that has entered the incident position FP from the light emitting means 11 with the second beam diameter. Also, the beam diameter adjusting means 22 adjusts the beam diameter of the laser light so that the second beam diameter at the incident position is smaller than the first beam diameter at the incident position.
  • sensing data is generated based on the reflected light of the laser light having the second beam diameter adjusted according to the distance between the light emitting means 11 and the incident position FP. be.
  • light has the property of diffusing as the distance it propagates in free space increases. Therefore, even laser light diffuses if the distance from the emission position where the laser light is emitted to the incident position is long. Therefore, when an object is irradiated with light using LiDAR, the beam diameter of the laser light incident at a position far from the emission position is larger than the beam diameter of the laser light incident at a position close to the emission position. At positions far from the position, the resolution of measurements with LiDAR decreases.
  • the beam diameter (second beam diameter) at the incident position of the laser beam for generating sensing data is equal to the distance between the light emitting means 11 and the incident position FP. adjusted accordingly. Therefore, according to the distance measuring device 1, by making the second beam diameter smaller than the first beam diameter, even at a position far from the emission position, the resolution of measurement using LiDAR may be lowered. Since it is suppressed, it is possible to improve the spatial resolution.
  • the data generating means 23 since the data generating means 23 generates sensing data using laser light having a second beam diameter adjusted according to the distance between the light emitting means 11 and the incident position FP, the second beam diameter Generate sensing data with a spatial resolution corresponding to . Accordingly, the user of the distance measuring device 1 or the like can more accurately grasp the state of the object even at a distant position by referring to the sensing data.
  • the constituent elements of the light emitting means 11, the light receiving means 13, the distance measuring means 21, the beam diameter adjusting means 22, the data generating means 23 and the output controlling means 24 are provided in one distance measuring device 1. ing. On the other hand, these components do not need to be provided in one device, and may be provided in different devices and operate as one system.
  • FIG. 1 A of distance measuring devices are provided with the light source part 10 and the control part 20 like the distance measuring device 1.
  • FIG. The distance measuring device 1A is different from the distance measuring device 1 in that the control section 20 further includes intensity adjusting means 31 and light irradiation limiting means 32 .
  • the distance measuring means 21, the beam diameter adjusting means 22, the data generating means 23, the output controlling means 24, the intensity adjusting means 31, and the light irradiation limiting means 32 need not be provided in one control section 20, and each may be provided in different devices and operate as one system.
  • a program for realizing each of the distance measuring means 21, the beam diameter adjusting means 22, the data generating means 23, the output controlling means 24, the intensity adjusting means 31 and the light irradiation limiting means 32 in an information processing device such as a computer is stored in a hard disk drive. may be stored in a storage medium such as
  • the intensity adjusting means 31 causes the light emitting means 11 to output the laser beam incident on the incident position FP with the second beam diameter at an intensity corresponding to the distance acquired by the distance measuring means 21 .
  • the intensity adjusting means 31 causes the light emitting means 11 to output the laser beam incident on the incident position FP with the second beam diameter with a higher intensity as the distance is longer.
  • the light emitting means 11 changes the angle of elevation/depression .theta.1 and the azimuth angle .theta.2 after the change.
  • a laser beam is output so as to be incident with a beam diameter of 2.
  • the intensity adjusting means 31 adjusts the distance to the incident position associated with the changed elevation/depression angle .theta.1 and the azimuth angle .theta.2.
  • the light emitting means 11 is caused to output the incident laser light with the intensity corresponding to the second beam diameter.
  • the intensity adjusting means 31 causes the light emitting means 11 to output the incident laser light with the second beam diameter at an intensity corresponding to the distance obtained by the distance measuring means 21 . Therefore, according to the distance measuring device 1A, when the distance from the optical input/output end OI to the focal position FP is long, the intensity of the laser light can be increased, thereby suppressing the decrease in the intensity of the reflected laser light. can.
  • the light irradiation limiting means 32 controls the incident position FP at a distance less than a threshold among the distances from the light input/output end OI to each of the plurality of focal positions FP with the second beam diameter.
  • the incident laser light is not output to the light emitting means 11 .
  • the light irradiation restricting means 32 causes the light emitting means 11 to set the incident position at the second beam diameter at the elevation/depression angle ⁇ 1 and the azimuth angle ⁇ 2 associated with the incident position FP at which the distance is less than the threshold.
  • a laser beam that enters the FP is not emitted.
  • the light irradiation limiting means 32 limits the incident position FP at the distance equal to or greater than the threshold among the distances from the light input/output end OI to each of the plurality of focal positions FP with the second beam diameter.
  • the light emitting means 11 is made to output the laser beam incident on the .
  • the light irradiation limiting means 32 causes the light emission means 11 to set the incident position at the second beam diameter at the elevation/depression angle ⁇ 1 and the azimuth angle ⁇ 2 associated with the incident position FP at which the distance is equal to or greater than the threshold.
  • a laser beam incident on the FP is emitted.
  • the data generating means 23 generates the laser reflected light of the laser light incident with the second beam diameter on the incident position FP whose distance from the optical input/output terminal OI is equal to or greater than the threshold, and the laser reflected light from the optical input/output terminal OI. Sensing data is generated based on the reflected light corresponding to the laser light incident with the first beam diameter at the incident position FP whose distance is less than the threshold.
  • the data generating means 23 detects that a crack has occurred in the target object MT, at the focal position FP where the distance to the optical input/output end OI is less than the threshold value, the incident laser beam with the first beam diameter The generation of cracks is detected based on the intensity of the laser reflected light. Further, the data generating means 23 detects the generation of cracks based on the intensity of the reflected laser light of the laser light incident with the second beam diameter at the focal position FP where the distance to the light input/output end OI is equal to or greater than the threshold. To detect.
  • the light irradiation limiting means 32 among the distances from the light input/output end OI to each of the plurality of focal positions FP, for the incident position FP whose distance is less than the threshold,
  • the light emitting means 11 is not caused to output the laser light having the second beam diameter.
  • the laser light diffuses more as the distance from the emitted position to the incident position increases.
  • the laser light is less likely to diffuse if the distance from the emitted position to the incident position is short. Therefore, at a position close to the emission position, the possibility that the resolution of measurement using LiDAR is lowered is small.
  • the distance measuring device 1A by causing the light emitting means 11 to output the laser light having the second beam diameter only for the incident position FP whose distance from the light input/output terminal Oi is equal to or greater than the threshold value, Measurement by LiDAR becomes possible efficiently.
  • FIG. 7 components of the light emitting means 11, the light receiving means 13, the distance measuring means 21, the beam diameter adjusting means 22, the data generating means 23, the output controlling means 24, the intensity adjusting means 31, and the light irradiation limiting means 32 are shown. are provided in one distance measuring device 1A. On the other hand, these components do not need to be provided in one device, and may be provided in different devices and operate as one system.
  • ⁇ Second embodiment> A distance measuring device 2 according to the second embodiment will be described with reference to FIGS. 8 and 9.
  • the distance measuring device 2 includes distance measuring means 21, beam diameter adjusting means 22, and data generating means 23, as shown in FIG.
  • the rangefinder 2 may further have the same components, functions, and connections as the rangefinders 1 and 1A described above.
  • the distance measuring means 21, the beam diameter adjusting means 22, and the data generating means 23 do not need to be provided in one distance measuring device 2, and each is provided in another device and operates as one system. You can Further, a program that causes an information processing device such as a computer to implement each of the distance measuring means 21, the beam diameter adjusting means 22, and the data generating means 23 may be stored in a storage medium such as a hard disk drive.
  • the distance measuring means 21 measures the distance between the light emitting means (not shown) and the incident position based on the reflected light of the laser beam that has entered the incident position of the object with the first beam diameter from the light emitting means (not shown). Note that the distance measuring means 21 may have the same components, functions, and connections as the distance measuring means 21 of the distance measuring devices 1 and 1A described above.
  • the beam diameter adjusting means 22 adjusts the beam diameter of the laser beam incident on the incident position to the second beam diameter according to the distance measured by the distance measuring means 21 .
  • the beam diameter adjusting means 22 may have the same components, functions, and connections as those of the beam diameter adjusting means 22 of the distance measuring devices 1 and 1A described above.
  • the data generating means 23 generates sensing data related to the object based on the reflected light corresponding to the laser beam that has entered the incident position FP with the second beam diameter from the light emitting means. Note that the data generation means 23 may have the same components, functions, and connections as the data generation means 23 of the distance measuring devices 1 and 1A described above.
  • FIG. 9 is a flow chart showing the operation of the distance measuring device 2. As shown in FIG.
  • the distance measuring means 21 measures the distance between the light emitting means and the object based on the reflected light corresponding to the laser beam that has entered the incident position with the first beam diameter (S201).
  • the beam diameter adjusting means 22 adjusts the beam diameter of the laser beam incident on the incident position to the second beam diameter according to the measured distance (S202). At this time, the beam diameter adjusting means 22 adjusts the beam diameter of the laser light so that the second beam diameter at the incident position is smaller than the first beam diameter at the incident position.
  • the data generating means 23 generates sensing data regarding the object based on the reflected light corresponding to the laser beam that has entered the incident position with the second beam diameter from the light emitting means (S203).
  • the distance measuring device 2 has been described above. As described above, the distance measuring device 2 is provided with the distance measuring means 21, the beam diameter adjusting means 22 and the data generating means 23.
  • the distance measuring means 21 measures the distance between the light emitting means and the incident position FP based on the reflected light of the laser beam that has entered the incident position of the object from the light emitting means with the first beam diameter.
  • the beam diameter adjusting means 22 adjusts the beam diameter of the laser beam output from the light emitting means to the second beam diameter according to the distance between the light emitting means and the incident position FP.
  • the data generating means 23 generates sensing data regarding the object based on the reflected light corresponding to the laser light incident with the second beam diameter from the light emitting means.
  • the beam diameter adjusting means 22 adjusts the beam diameter of the laser light so that the second beam diameter at the incident position is smaller than the first beam diameter at the incident position.
  • sensing data is generated based on the reflected light of the laser beam having the second beam diameter adjusted according to the distance between the light emitting means and the incident position FP.
  • light has the property of diffusing as the distance it propagates in free space increases. Therefore, even laser light diffuses if the distance from the emission position where the laser light is emitted to the incident position is long. Therefore, when an object is irradiated with light using LiDAR, the beam diameter of the laser light incident at a position far from the emission position is larger than the beam diameter of the laser light incident at a position close to the emission position. At positions far from the position, the resolution of measurements with LiDAR decreases.
  • the beam diameter (second beam diameter) at the incident position of the laser beam for generating sensing data varies depending on the distance between the light emitting means and the incident position FP. adjusted. Therefore, according to the distance measuring device 2, by making the second beam diameter smaller than the first beam diameter, even at a position far from the emission position, the resolution of measurement using LiDAR may be lowered. Since it is suppressed, it is possible to improve the spatial resolution.
  • the constituent elements of the distance measuring means 21, the beam diameter adjusting means 22 and the data generating means 23 are provided in one distance measuring device 1A.
  • these components do not need to be provided in one device, and may be provided in different devices and operate as one system.
  • Device. (Appendix 7) Further comprising light irradiation limiting means for controlling the light emitting means, the distance measuring means measures a plurality of distances between the light emitting means and each of the plurality of incident positions; The light irradiation limiting means causes the light emitting means to output the laser light having the second beam diameter to the incident position at the distance equal to or greater than a threshold among the plurality of distances, and not causing the light emitting means to output the laser light having the second beam diameter to the incident position at the distance less than the threshold among the distances; The data generating means generates reflected light corresponding to the laser beam incident with the second beam diameter at the incident position at the distance equal to or greater than the threshold, and for the incident position at the distance less than the threshold.
  • the distance measuring device according to any one of appendices 1 to 6. (Appendix 8) measuring the distance between the light emitting means and the incident position based on the reflected light of the laser beam that has entered the incident position of the object from the light emitting means with the first beam diameter; adjusting the beam diameter of the laser light incident on the object according to the distance to a second beam diameter smaller than the first beam diameter; generating sensing data related to the object based on reflected light corresponding to the laser light incident from the light emitting means with the second beam diameter; A control method for a rangefinder.
  • (Appendix 9) distance measuring means for measuring the distance between the light emitting means and the incident position based on the reflected light of the laser beam that has entered the incident position of the object from the light emitting means with the first beam diameter; beam diameter adjusting means for adjusting the beam diameter of the laser beam incident on the incident position to a second beam diameter according to the distance; data generating means for generating sensing data relating to the object based on the reflected light corresponding to the laser beam incident on the incident position with the second beam diameter from the light emitting means; with The beam diameter adjusting means adjusts the beam diameter of the laser light such that the second beam diameter at the incident position is smaller than the first beam diameter at the incident position.

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  • Computer Networks & Wireless Communication (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Electromagnetism (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Measurement Of Optical Distance (AREA)
  • Length Measuring Devices By Optical Means (AREA)
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