WO2022202630A1 - ころ軸受 - Google Patents

ころ軸受 Download PDF

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Publication number
WO2022202630A1
WO2022202630A1 PCT/JP2022/012430 JP2022012430W WO2022202630A1 WO 2022202630 A1 WO2022202630 A1 WO 2022202630A1 JP 2022012430 W JP2022012430 W JP 2022012430W WO 2022202630 A1 WO2022202630 A1 WO 2022202630A1
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WO
WIPO (PCT)
Prior art keywords
layer
dlc
metal
film
roller bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2022/012430
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English (en)
French (fr)
Japanese (ja)
Inventor
勇策 木場
一将 ▲瀬▼古
径生 堀
浩二 三宅
祥和 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTN Corp
Nippon ITF Inc
Original Assignee
NTN Corp
Nippon ITF Inc
NTN Toyo Bearing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NTN Corp, Nippon ITF Inc, NTN Toyo Bearing Co Ltd filed Critical NTN Corp
Priority to CN202280023246.3A priority Critical patent/CN117441066A/zh
Priority to JP2023509109A priority patent/JPWO2022202630A1/ja
Publication of WO2022202630A1 publication Critical patent/WO2022202630A1/ja
Priority to US18/369,909 priority patent/US20240003386A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/58—Raceways; Race rings
    • F16C33/583—Details of specific parts of races
    • F16C33/585—Details of specific parts of races of raceways, e.g. ribs to guide the rollers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
    • F03D—WIND MOTORS
    • F03D80/00—Details, components or accessories not provided for in groups F03D1/00 - F03D17/00
    • F03D80/70—Bearing or lubricating arrangements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/34—Rollers; Needles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/58—Raceways; Race rings
    • F16C33/62—Selection of substances
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C19/00—Bearings with rolling contact, for exclusively rotary movement
    • F16C19/22—Bearings with rolling contact, for exclusively rotary movement with bearing rollers essentially of the same size in one or more circular rows, e.g. needle bearings
    • F16C19/34—Bearings with rolling contact, for exclusively rotary movement with bearing rollers essentially of the same size in one or more circular rows, e.g. needle bearings for both radial and axial load
    • F16C19/38—Bearings with rolling contact, for exclusively rotary movement with bearing rollers essentially of the same size in one or more circular rows, e.g. needle bearings for both radial and axial load with two or more rows of rollers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2204/00—Metallic materials; Alloys
    • F16C2204/40—Alloys based on refractory metals
    • F16C2204/44—Alloys based on chromium
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2206/00—Materials with ceramics, cermets, hard carbon or similar non-metallic hard materials as main constituents
    • F16C2206/02—Carbon based material
    • F16C2206/04—Diamond like carbon [DLC]
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2206/00—Materials with ceramics, cermets, hard carbon or similar non-metallic hard materials as main constituents
    • F16C2206/80—Cermets, i.e. composites of ceramics and metal
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2240/00—Specified values or numerical ranges of parameters; Relations between them
    • F16C2240/40—Linear dimensions, e.g. length, radius, thickness, gap
    • F16C2240/60—Thickness, e.g. thickness of coatings
    • F16C2240/64—Thickness, e.g. thickness of coatings in the nanometer range
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C23/00—Bearings for exclusively rotary movement adjustable for aligning or positioning
    • F16C23/06—Ball or roller bearings
    • F16C23/08—Ball or roller bearings self-adjusting
    • F16C23/082—Ball or roller bearings self-adjusting by means of at least one substantially spherical surface
    • F16C23/086—Ball or roller bearings self-adjusting by means of at least one substantially spherical surface forming a track for rolling elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/31—Wind motors

Definitions

  • the present invention relates to roller bearings, and for example, technology applied to self-aligning roller bearings, tapered roller bearings, cylindrical roller bearings, etc. that support the main shafts of wind turbine generators.
  • the DLC film has the drawback that extremely large internal stress is generated due to the difference in structure from the target substrate during film formation, and the film tends to peel off due to the decrease in adhesion of the DLC film.
  • an intermediate layer is provided in the film structure, and a gradient layer of metal and carbon with an appropriate concentration gradient is formed.
  • a method is adopted in which the stress is relieved by tilting the
  • the film quality including the bonding state and composition state of the elements is an important factor that affects the adhesion, and it is required to ensure the adhesion by ensuring an appropriate film quality.
  • An object of the present invention is to provide a roller bearing that can suppress peeling of the DLC film and improve wear resistance.
  • a roller bearing according to the present invention includes an inner member, an outer member, rollers interposed between the raceway surfaces of the inner member and the outer member, and a retainer that retains the rollers.
  • a DLC film is provided on the surface or the raceway surface of the inner member and the outer member, and the DLC film includes, in order from the substrate side, a metal layer (Cr), an intermediate layer containing metal and DLC, and a surface layer containing DLC.
  • the intermediate layer is a two-layer structure having an upper layer and a lower layer
  • the upper layer is a DLC-rich layer having more DLC than the lower layer
  • the lower layer is the upper It is a metal-rich layer containing more metal than the layer, and the thickness of the metal-rich layer is 100 nm or more and 300 nm or less.
  • the intermediate layer is a two-layer structure having an upper layer and a lower layer
  • the upper layer is a DLC-rich layer with more DLC than the lower layer
  • the lower layer is metal-rich with more metal than the upper layer. layer.
  • the thickness of the metal-rich layer is set to an appropriate thickness of 100 nm or more and 300 nm or less, the adhesion of the DLC film to the outer peripheral surface of the roller is improved, and peeling of the DLC film can be suppressed. Therefore, it is possible to improve the wear resistance of the roller bearing and extend the life of the bearing.
  • the intermediate layer may have a gradient composition in which the metal content decreases and the DLC content increases from the metal layer side toward the surface layer side.
  • the intermediate layer has excellent adhesion on both sides of the metal layer and the surface layer. This can more reliably suppress the peeling of the DLC film.
  • the DLC film may contain Cr in the intermediate layer and the metal underlayer.
  • the film thickness of the metal layer may be 400 nm or more and 800 nm or less. If the film thickness of each layer is too thin when the DLC film is formed, the bonding strength between the layers decreases during the growth of the film, resulting in a decrease in adhesion. On the other hand, if the film thickness of the layer is too thick, the stress in the film increases and shear delamination may occur in the film when a load is applied. According to this configuration, by setting the film thickness of the metal layer to 400 nm or more and 800 nm or less, the adhesion of the DLC film to the base material can be enhanced, and peeling of the DLC film can be suppressed more reliably.
  • the film thickness of the surface layer containing the DLC may be 500 nm or more and 2500 nm or less. By defining the film thickness of the DLC layer in this manner, the adhesion of the DLC film can be further enhanced.
  • the DLC layer including the DLC-rich layer and the DLC-containing surface layer may have a nanoindentation hardness of 16 GPa or more and less than 25 GPa.
  • a DLC layer with excellent abrasion resistance can be obtained.
  • a DLC layer having a nanoindentation hardness of 25 GPa or more is difficult to achieve in view of the manufacturing method.
  • the DLC layer including the DLC-rich layer and the surface layer, and the metal-rich layer in the intermediate layer have a G peak at a peak position of 1540 cm ⁇ 1 or more in the Raman spectrum, and the DLC layer and the metal-rich layer
  • the ID/IG ratio in the Raman spectrum may be 0.8 or more and 2.0 or less.
  • the "film quality" of the DLC film to be evaluated, including the bonding state and composition content state, is also a factor that greatly affects the film properties. Evaluation by Raman spectroscopy is performed as one of methods for evaluating the properties of this film, and a predetermined peak appears at a specific position and intensity according to the structure of the DLC.
  • a DLC film is provided on one or both of the raceway surface of the inner member and the raceway surface of the outer member, and the DLC film comprises, in order from the substrate side, a metal layer, an intermediate layer containing metal and DLC, and a surface layer containing DLC,
  • the intermediate layer has a two-layer structure having an upper layer and a lower layer, wherein the upper layer is a DLC-rich layer with more DLC than the lower layer, and the lower layer is metal-rich with more metal than the upper layer. and the thickness of the metal-rich layer may be 100 nm or more and 300 nm or less.
  • the thickness of the metal-rich layer By setting the thickness of the metal-rich layer to an appropriate thickness of 100 nm or more and 300 nm or less, the adhesion of the DLC film to the raceway surface is improved, and peeling of the DLC film can be suppressed. Therefore, it is possible to further improve the wear resistance of the roller bearing together with the improved adhesion of the DLC film on the roller, thereby further improving the life of the bearing.
  • It may be a roller bearing that supports the main shaft of the wind power generator. In this case, it is possible to extend the life of the roller bearing for use in the wind power generator, and it is excellent in maintainability.
  • FIG. 1 is a longitudinal sectional view of a self-aligning roller bearing according to a first embodiment of the invention
  • FIG. 4 is an explanatory diagram of asymmetric rollers of the self-aligning roller bearing
  • FIG. 4 is a cross-sectional view schematically showing the configuration of a DLC film formed on the outer peripheral surface of a roller of the self-aligning roller bearing; It is a figure which shows typically the structure of the same DLC film.
  • FIG. 5 is a cross-sectional view schematically showing a state in which a DLC film is provided on the raceway surface of a self-aligning roller bearing according to another embodiment of the present invention;
  • FIG. 6 is a vertical cross-sectional view of a self-aligning roller bearing according to still another embodiment of the present invention;
  • 1 is a perspective view showing a main part of an example of a main shaft support device for a wind power generator;
  • this self-aligning roller bearing 1 includes an inner ring 2 as an inner member, an outer ring 3 as an outer member, and two left and right rows interposed between the raceway surfaces of the inner and outer rings 2 and 3. rollers 4 and 5, and retainers 10L and 10R that hold the rollers 4 and 5.
  • the left and right rows of rollers 4 and 5 are arranged between the inner ring 2 and the outer ring 3 in the bearing width direction, that is, in the axial direction.
  • a raceway surface 3a of the outer ring 3 is concave spherical.
  • the outer peripheral surfaces of the rollers 4 and 5 in each of the left and right rows have a cross-sectional shape along the raceway surface 3a of the outer ring 3.
  • the outer peripheral surfaces of the rollers 4 and 5 are curved surfaces in the shape of bodies of revolution obtained by rotating arcs along the raceway surface 3a of the outer ring 3 around the center lines C1 and C2.
  • the inner ring 2 is formed with double-row raceway surfaces 2a and 2b having cross-sectional shapes along the outer peripheral surfaces of the left and right rows of rollers 4 and 5, respectively.
  • Small flanges 6 and 7 are provided at both ends of the outer peripheral surface of the inner ring 2, respectively.
  • a middle rib 8 is provided between the left and right rollers 4 and 5 at the center of the outer peripheral surface of the inner ring 2 .
  • the rollers 4, 5, inner ring 2 and outer ring 3 in each row are made of ferrous material. Any steel generally used as the iron-based material can be used, and examples thereof include high-carbon chromium bearing steel, carbon steel, tool steel, martensitic stainless steel, and carburized steel.
  • This embodiment is an example applied to a self-aligning roller bearing 1 with symmetrical left and right rows, and the contact angles ⁇ 1 and ⁇ 2 of the left and right rows are the same.
  • the terms “left” and “right” in this specification are merely terms for convenience to indicate the relative positional relationship of the bearings in the axial direction. In this specification, “left” and “right” correspond to left and right in each drawing for easy understanding.
  • the rollers 4 and 5 in each of the left and right rows are held by retainers 10L and 10R, respectively.
  • the retainer 10L for the left row has a plurality of pillars 12 extending axially to one side (left side) from an annular portion 11, and the left row rollers 4 are held in pockets between the pillars 12.
  • the retainer 10R for the right row has a plurality of pillars 12 extending from the annular portion 11 to the other side (right side) in the axial direction, and the right row rollers 5 are held in pockets between the pillars 12.
  • the rollers 4 and 5 in each of the left and right rows are asymmetrical rollers in which the positions M1 and M2 of the maximum diameters D1max and D2max are off the centers A1 and A2 of the roller length.
  • the position of the maximum diameter D1max of the left row roller 4 is on the right side of the roller length center A1
  • the position of the maximum diameter D2max of the right row roller 5 is on the left side of the roller length center A2.
  • An induced thrust load is generated in the rollers 4 and 5 in each of the left and right rows of such asymmetric rollers.
  • the middle rib 8 of the inner ring 2 is provided to receive this induced thrust load.
  • the combination of the asymmetric rollers 4, 5 and the middle rib 8 guides the rollers 4, 5 at three points, the inner ring 2, the outer ring 3, and the middle rib 8, so that the guiding accuracy is good.
  • each row of rollers 4 and 5 shown in FIG. 1 has a multi-layered DLC (Diamond-like Carbon) film on its outer peripheral surface.
  • the DLC film 9 includes, in order from the substrate side of the rollers 4 and 5, a metal layer 9a which is a metal base layer, an intermediate layer 9b which is a mixed layer containing metal and DLC, and a surface layer 9b which is a mixed layer containing metal and DLC. It is a three-layer structure with layer 9c. As shown in FIG.
  • the intermediate layer 9b has an upper layer and a lower layer, the upper layer being a DLC-rich layer 9ba with more DLC than the lower layer, and the lower layer having more metal than the upper layer. This is the metal-rich layer 9bb.
  • the downward black triangle mark in FIG. 3B is the C (carbon) concentration gradient Cg.
  • the intermediate layer 9b has a graded composition in which the metal content decreases and the DLC content increases from the metal layer 9a side toward the surface layer 9c side. Specifically, the intermediate layer 9b is divided by a concentration gradient into a DLC-rich layer 9ba having a C (carbon) concentration of 50% by mass or more and a metal-rich layer 9bb having a metal concentration of 50% by mass or more. It is a film having a structure. Furthermore, in the intermediate layer 9b, the film thickness of the metal-rich layer 9bb in the intermediate layer 9b is set to 100 nm or more and 300 nm or less in order to form an appropriate gradient layer and suppress stress inside the film.
  • a DLC film 9 is formed on the outer peripheral surfaces of the rollers 4 and 5 .
  • a method for forming the DLC film 9 for example, a CVD method such as thermal CVD or plasma CVD, a vacuum vapor deposition method, an ion plating method, a sputtering method, a laser ablation method, an ion beam deposition method, a PVD method such as an ion implantation method, or the like can be used. applicable.
  • the metal layer 9a mainly composed of chromium Cr is directly formed on the outer peripheral surfaces of the rollers 4 and 5
  • the intermediate layer 9b mainly composed of metal is formed on the metal layer 9a
  • the DLC is formed on the intermediate layer 9b.
  • a main surface layer 9c is deposited.
  • the content of Cr in the intermediate layer 9b decreases continuously or stepwise from the side of the metal layer 9a toward the side of the surface layer 9c, and the content of DLC in the intermediate layer 9b decreases. getting higher.
  • the intermediate layer 9b can be formed by gradually changing the filling concentration of the raw material gas.
  • the DLC film 9 has a three-layer structure as described above, thereby avoiding sudden changes in physical properties (hardness, elastic modulus, etc.).
  • the metal layer (metal base layer) 9a contains Cr, it has good compatibility with the base material made of a cemented carbide material or an iron-based material. Excellent adhesion.
  • the metal layer 9a preferably has a lower Cr content from the roller surface side toward the intermediate layer 9b side. As a result, the adhesion between the roller surface and the intermediate layer 9b is excellent.
  • test pieces A plurality of cylindrical test pieces (test pieces) are prepared, and a metal-rich layer is formed on the outer peripheral surface of the DLC film with the film thickness (50 nm, 80 nm, ..., over 300 nm) shown in Table 12. For each test piece, two cylinders are tested. A peel resistance confirmation test was carried out. The test conditions are as follows.
  • ⁇ Test piece Cylindrical shape with an inner diameter of 20 mm, an outer diameter of 40 mm, and a width of 12 mm, made of high-carbon chromium bearing steel.
  • FIG. 8 shows an outline of the two-cylinder testing machine.
  • the tester has two parallel rotating shafts S1 and S2.
  • One rotating shaft S1 has a test piece D2 coated with a DLC film, and the other rotating shaft S2 has an untreated test piece F2 as a mating material. It is prepared and configured.
  • Each rotating shaft S1, S2 can be driven to rotate by a motor M, respectively.
  • the load and rotation speed applied to test pieces D2 and F2 were assumed to be values corresponding to the operating conditions of the main bearing of the wind power generator.
  • the lubrication mechanism was a felt pad lubrication system, and a felt pad FP impregnated with lubricating oil was installed directly below each test piece D2, F2.
  • Additive-free low-viscosity oil was used as the lubricant to be used, assuming that the oil was exhausted.
  • SEM scanning electron microscope
  • the intermediate layer 9b has a two-layer structure having an upper layer and a lower layer. It is a metal-rich layer 9bb having more metal than the upper layer. Furthermore, by setting the film thickness of the metal-rich layer 9bb to an appropriate thickness of 100 nm or more and 300 nm or less, it is possible to improve the adhesion of the DLC film to the outer peripheral surfaces of the rollers 4 and 5 and suppress the peeling of the DLC film. Therefore, it is possible to improve the wear resistance of the self-aligning roller bearing 1 and extend the life of the bearing.
  • the intermediate layer 9b has a graded composition in which the metal content decreases and the DLC content increases from the metal layer side to the surface layer side.
  • the intermediate layer 9b has excellent adhesion on both sides of the metal layer 9a and the surface layer 9c. As a result, peeling of the DLC film 9 can be suppressed more reliably.
  • the DLC film 9 has, in order from the substrate side, a metal layer 9a, an intermediate layer 9b containing metal and DLC, and a surface layer 9c containing DLC.
  • the intermediate layer 9b has a two-layer structure having an upper layer and a lower layer, the upper layer being a DLC-rich layer 9ba with more DLC than the lower layer, and the lower layer having more metal than the upper layer. It is the metal-rich layer 9bb, and the film thickness of the metal-rich layer 9bb is 100 nm or more and 300 nm or less.
  • the thickness of the metal-rich layer 9bb By setting the thickness of the metal-rich layer 9bb to an appropriate thickness of 100 nm or more and 300 nm or less, the adhesion of the DLC film 9 to the raceway surface is improved, and peeling of the DLC film 9 can be suppressed. Therefore, it is possible to further improve the wear resistance of the roller bearing together with the improved adhesion of the DLC film on the roller, thereby further improving the life of the bearing.
  • Each of the above embodiments is an example applied to a bilaterally symmetrical self-aligning roller bearing. It may be applied to the self-aligning roller bearing 1 .
  • a DLC film may be provided on the outer peripheral surfaces of the rollers 4 and 5 of the left-right asymmetric self-aligning roller bearing 1, and a DLC film may be provided on one or both of the raceway surfaces 2a, 2b and 3a of the inner and outer rings 2 and 3. may be provided.
  • the DLC film in the roller bearing of the fourth embodiment comprises, in order from the base material side of rollers 4 and 5, a metal layer 9a which is a metal base layer, an intermediate layer which is a mixed layer containing metal and DLC.
  • the intermediate layer 9b is composed of a DLC-rich layer 9ba having a C (carbon) concentration of 50% by mass or more and a metal concentration It has a two-layer structure divided into a 50% by mass or more metal-rich layer 9bb. Furthermore, it has the following structure for the purpose of forming an appropriate gradient layer, relaxing the stress inside the film, and improving the film quality.
  • ⁇ Film thickness of each layer of DLC> If the film thickness of each layer is too thin when the DLC film is formed, the bonding strength between the layers decreases during the growth of the film, resulting in a decrease in adhesion. On the other hand, if the film thickness of the layer is too thick, the stress in the film increases and shear delamination may occur in the film when a load is applied. Therefore, as a result of examining an appropriate film thickness that can ensure adhesion based on the following examples, it was found that ideal adhesion performance can be ensured by setting the film thickness of each DLC layer within the following range.
  • the thickness of the metal-rich layer 9bb of the intermediate layer 9b is 100 nm or more and 300 nm or less.
  • the thickness of the metal layer 9a, which is the metal base layer, is 400 nm or more and 800 nm or less.
  • the thickness of the surface layer 9c containing DLC is 500 nm or more and 2500 nm or less.
  • FIG. 9B is an example of a self-aligning roller bearing having a bearing series symbol of "240" and an inner ring inner diameter of 600 mm, in which a plurality of samples with DLC films formed on the rollers were prepared and peeling resistance confirmation tests were conducted.
  • the film thickness of each DLC layer does not satisfy any of the above ranges in Comparative Sample Example 1, whereas the film thickness of each DLC layer satisfies all of the above ranges in this sample example.
  • the test conditions for the peel resistance confirmation test are as follows.
  • the test conditions were assumed to be the rotation speed and load conditions equivalent to the actual use conditions of the wind power generator main bearings. Assuming that the lubricating state during operation is oil depletion, we used additive-free, low-viscosity oil for one month under severe conditions.
  • the thickness of the DLC layer, the thickness of the metal-rich layer, and the thickness of the metal layer in each sample are the films of Comparative Sample Example 1 and this sample example, which were prepared separately from the sample for which the peeling resistance confirmation test was performed.
  • a DLC film cross-section of a test piece corresponding to the structure was measured with, for example, a scanning electron microscope (abbreviated as SEM) at a magnification of 30000 times.
  • the set total film thickness of each sample is the target value of the total film thickness of the DLC film.
  • the rollers of each sample were taken out and the presence or absence of peeling was determined when the DLC film was viewed from above.
  • the peeling occurred over a wide area, or when either the intermediate layer or the metal layer was exposed, it was marked as "x" in the determination of FIG. 9B. In the case of no peeling, " ⁇ " is indicated in the determination of FIG. 9B.
  • Each planar view is when the surface layer of the DLC film is viewed in planar view using an imaging means such as an optical microscope.
  • the thickness of the metal-rich layer 9bb is set to 100 nm or more and 300 nm or less, and the thickness of the metal layer is set to 400 nm or more and 800 nm or less. Delamination of the film can be suppressed more reliably. Further, by setting the film thickness of the surface layer to 500 nm or more and 2500 nm or less, the adhesion of the DLC film can be further enhanced.
  • the DLC layer 9d has a nanoindentation hardness of 16 GPa or more and less than 25 GPa.
  • the nanoindentation hardness can be measured by pressing an indenter of a nanoindentation hardness meter (not shown) against the surface layer 9c of the DLC layer 9d.
  • the nanoindentation hardness of the DLC layer 9d is 16 GPa or more and less than 25 GPa, the DLC layer 9d having excellent abrasion resistance can be obtained. If the nanoindentation hardness of the DLC layer 9d is less than 16 GPa, the structure and properties of the film are likely to mutate. There is
  • the "film quality" of the DLC film to be evaluated is also a factor that greatly affects the film properties.
  • Evaluation by Raman spectroscopy is performed as one of methods for evaluating the properties of this film, and a predetermined peak appears at a specific position and intensity according to the structure of the DLC. Recently, even when the thickness of each layer of the DLC film and the hardness of the DLC layer were controlled, there were cases where peeling occurred due to differences in film quality. Therefore, as a result of analysis by Raman spectroscopy, it was found that a film having a peak position and intensity within the range shown below is desirable from the appearance of the spectrum.
  • the DLC layer of the DLC film and the metal-rich layer of the intermediate layer have a G peak at a peak position of 1540 cm ⁇ 1 or more in the Raman spectrum, and the ID/IG ratio in the Raman spectrum of the DLC layer and the metal-rich layer is 0. .8 or more and 2.0 or less.
  • the Raman spectroscopy a Raman spectrum obtained by irradiating a DLC film sample with a laser beam of a specified wavelength was analyzed. The Raman spectrum was analyzed after being separated into two waveforms of D peak and G peak. The ID is a value obtained by quantifying the area of the D peak of the Raman spectrum, and the IG is a value obtained by quantifying the area of the G peak of the Raman spectrum.
  • Example 2 A plurality of cylindrical samples were prepared, and a peeling resistance confirmation test was carried out by a two-cylinder test for each sample having a DLC film having a film thickness shown in FIG. 10 on the outer peripheral surface.
  • Comparative Samples 1 and 2 do not meet the requirements for any of the film thickness, peak position, and intensity of each DLC layer, while this sample satisfies all of the film thickness, peak position, and intensity of each DLC layer. meet the requirements.
  • the test conditions are as follows. ⁇ Test piece: Cylindrical shape with an inner diameter of 20 mm, an outer diameter of 40 mm, and a width of 12 mm, made of high-carbon chromium bearing steel. ⁇ The contents of the two-cylinder tester, the load applied to each sample, the conditions such as the number of revolutions, the measurement of the film thickness, and the determination of the presence or absence of peeling are the same as those described with reference to FIG. 8 above.
  • the DLC film of FIG. 9A may be provided on either one or both of the raceway surfaces of the inner and outer rings.
  • the film thickness of each layer of the DLC film is within the defined range, and a DLC film having a film quality having a defined Raman spectrum position and intensity may be provided on either one or both of the raceway surfaces of the inner and outer rings. .
  • a DLC film may be provided on a cylindrical roller bearing or a tapered roller bearing as a reference proposal example, and a DLC film may be provided on one or both of the raceway surface of the inner member and the raceway surface of the outer member. may be
  • FIG. 6 and 7 show an example of a spindle support device for a wind power generator.
  • a casing 23a of a nacelle 23 is horizontally rotatably installed on a support base 21 via a slewing seat bearing 22 (FIG. 7).
  • a main shaft 26 is rotatably installed in a casing 23a of the nacelle 23 via a main shaft support bearing 25 installed in a bearing housing 24, and blades 27 serving as swirling blades are provided on the portion of the main shaft 26 protruding outside the casing 23a. is installed.
  • a self-aligning roller bearing 1 according to any one of the embodiments is applied as the main shaft support bearing 25 .
  • the other end of the main shaft 26 is connected to a speed increaser 28 , and the output shaft of the speed increaser 28 is coupled to the rotor shaft of the generator 29 .
  • the nacelle 23 is turned to an arbitrary angle via a reduction gear 31 by a turning motor 30 .
  • two spindle support bearings 25 are arranged side by side in the illustrated example, one may be provided.
  • Spherical roller bearings, cylindrical roller bearings, and tapered roller bearings according to any of the embodiments, and roller bearings and ball bearings according to reference proposal examples may be used for applications other than wind turbine generators, such as industrial machinery, machine tools, robots, etc. It is also possible to adopt As described above, preferred embodiments have been described with reference to the drawings, but various additions, changes, and deletions can be made without departing from the scope of the present invention. Accordingly, such are also included within the scope of this invention.

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PCT/JP2022/012430 2021-03-22 2022-03-17 ころ軸受 Ceased WO2022202630A1 (ja)

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JP2018115761A (ja) * 2017-01-13 2018-07-26 Ntn株式会社 複列自動調心ころ軸受
JP2018115762A (ja) * 2017-01-13 2018-07-26 Ntn株式会社 複列自動調心ころ軸受および飛出し止め治具
JP2020169713A (ja) * 2019-04-05 2020-10-15 Ntn株式会社 自動調心ころ軸受
JP2021001639A (ja) * 2019-06-20 2021-01-07 Ntn株式会社 複列スラスト針状ころ軸受

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CN103814150B (zh) * 2011-09-22 2015-11-25 Ntn株式会社 硬质膜、硬质膜形成体及滚动轴承
CN111989500B (zh) * 2018-04-20 2022-04-12 Ntn株式会社 多排自动调心滚子轴承

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018115761A (ja) * 2017-01-13 2018-07-26 Ntn株式会社 複列自動調心ころ軸受
JP2018115762A (ja) * 2017-01-13 2018-07-26 Ntn株式会社 複列自動調心ころ軸受および飛出し止め治具
JP2020169713A (ja) * 2019-04-05 2020-10-15 Ntn株式会社 自動調心ころ軸受
JP2021001639A (ja) * 2019-06-20 2021-01-07 Ntn株式会社 複列スラスト針状ころ軸受

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