WO2022198717A1 - Buse d'aspiration multifonctionnelle et procédé de fonctionnement - Google Patents

Buse d'aspiration multifonctionnelle et procédé de fonctionnement Download PDF

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Publication number
WO2022198717A1
WO2022198717A1 PCT/CN2021/085347 CN2021085347W WO2022198717A1 WO 2022198717 A1 WO2022198717 A1 WO 2022198717A1 CN 2021085347 W CN2021085347 W CN 2021085347W WO 2022198717 A1 WO2022198717 A1 WO 2022198717A1
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WO
WIPO (PCT)
Prior art keywords
suction nozzle
nozzle body
slotted
adjustment
arm
Prior art date
Application number
PCT/CN2021/085347
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English (en)
Chinese (zh)
Inventor
屈显波
黄祥恩
王波
Original Assignee
桂林芯飞光电子科技有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 桂林芯飞光电子科技有限公司 filed Critical 桂林芯飞光电子科技有限公司
Publication of WO2022198717A1 publication Critical patent/WO2022198717A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices

Definitions

  • the invention relates to the technical field of nozzles, in particular to a multifunctional suction nozzle and a working method.
  • the present invention provides a multifunctional suction nozzle and a working method, which solve the technical problem of poor working adaptability of the suction nozzle in the prior art.
  • a multifunctional suction nozzle comprising a suction nozzle body, a suction nozzle body driving device for driving the suction nozzle body to rotate or move axially, and the suction nozzle body comprises a suction nozzle body 1, a suction nozzle body 2, and a suction nozzle body 1 disposed on the suction nozzle body 1 .
  • Several slotted adjusting arms are stacked in sequence between the two suction nozzle bodies, wherein at least three of the slotted adjusting arms can independently axially slide between the first suction nozzle body and the second suction nozzle body and be locked in a certain position.
  • the aforesaid multifunctional suction nozzle further comprises a slotted adjustment gear
  • the slotted adjustment arm comprises a slotted adjustment arm 1, a slotted adjustment arm 2, a slotted adjustment arm 3, a slotted adjustment arm 1, a slotted adjustment arm
  • the second slotted adjusting arm and the third slotted adjusting arm are provided with racks.
  • the slotted adjusting gear meshes with the corresponding rack in the slotted adjusting arm.
  • the aforesaid multifunctional suction nozzle further comprises an adjustment ring for adjusting the distance between the first suction nozzle body and the second suction nozzle body;
  • the adjustment ring includes an adjustment ring 1 and an adjustment ring 2, the adjustment ring 1 is connected to the outer surface of the suction nozzle body, and the adjustment ring 2 is connected to the outer surface of the suction nozzle body 2.
  • the suction nozzle body 1 and the suction nozzle body 2 are respectively provided with an inner cone section 1.
  • the second inner cone section, the outer diameter of the cross section of the inner cone section 1 and the inner cone section 2 increase or decrease sequentially along the axis direction of the nozzle body, and the adjustment ring 1 and the adjustment ring 2 are respectively provided with the inner cone section. 1.
  • the aforesaid multi-functional suction nozzle the first suction nozzle body and the second suction nozzle body are connected by a guide rod, all the slotted adjustment arms are provided with waist-shaped holes, the guide rods pass through the waist-shaped holes, and the grooves are The two sides of the second adjusting arm are respectively connected with the first slotted adjusting arm and the third slotted adjusting arm through the sealing strip.
  • the aforesaid multifunctional suction nozzle when the suction nozzle body acts on the working object, at least one slotted adjusting arm is not in contact with the working object, and the working object end of the suction nozzle body forms a position to be protected from the working object notch.
  • the rack includes a rack one, a rack two, a rack three, and a rack one, which are sequentially arranged on the first slotted adjustment arm, the second slotted adjustment arm, and the third slotted adjustment arm.
  • the heights of the second rack, rack three, and rack three to the nozzle body increase in turn.
  • the suction nozzle body drive device includes a rotation adjustment gear for driving the suction nozzle body to rotate with the axis center of the circle and a size adjustment gear for driving the suction nozzle body to slide axially;
  • the first nozzle body meshes with the rotation adjustment gear through the rotating adjustment tooth surface
  • the second suction nozzle body meshes with the size adjustment gear through the size adjustment tooth surface
  • a working method of a multifunctional suction nozzle characterized in that:
  • At least one slotted adjusting arm is not in contact with the working object, and the working object end of the suction nozzle body forms a notch that avoids the position to be protected by the working object;
  • the above-mentioned working method of the multifunctional suction nozzle when the distance between the working object and the suction nozzle body changes, on the premise that the pore diameter in the suction nozzle body remains unchanged, the distance between the suction nozzle body and the working object is changed. The distance is adjusted to the preset range.
  • the chip light-emitting strip can be avoided, and key parts such as the chip light-emitting strip will not be crushed.
  • the width, depth and offset position of the notch relative to the nozzle body can be adjusted, and the nozzle body adopts a rotatable design.
  • the chip position can be corrected by rotating the nozzle.
  • the suction nozzle of the invention has high production efficiency, one suction nozzle can be compatible with the production and use of multiple suction nozzles, and the time for changing the suction nozzles and adjusting the equipment is reduced.
  • the suction nozzle of the invention has low cost, one suction nozzle can be used against multiple suction nozzles, and when changing different work objects, it can be applied only within the adjustment range of the notch of the invention.
  • Fig. 1 is the overall structure sampling survey drawing one of the present invention
  • Fig. 2 is the overall structure sampling survey drawing two of the present invention.
  • Fig. 3 is a structure diagram of adjusting ring of the present invention.
  • Fig. 4 is the structure diagram of slotted adjusting arm two of the present invention.
  • FIG. 5 is an axial cross-sectional view of the nozzle body of the present invention.
  • FIG. 6 is a partial enlarged view of the nozzle body of the present invention (the notch is opened to the maximum state);
  • Fig. 7 is a partial enlarged view of the nozzle body of the present invention (the notch is inclined toward the two directions of the nozzle body);
  • Figure 8 is a partial enlarged view of the nozzle body of the present invention 3 (the notch is inclined in one direction of the nozzle body);
  • Fig. 9 is a partial enlarged view of the nozzle body of the present invention (the notch is opened to the minimum state);
  • FIG. 10 is a schematic diagram of the self-rotation working process of the nozzle body of the present invention.
  • this embodiment discloses a multi-functional suction nozzle: including a suction nozzle body, a suction nozzle body driving device for driving the suction nozzle body to rotate or move axially, and the suction nozzle body includes a suction nozzle The first body 7, the suction nozzle body 2 6, and a plurality of slotted adjustment arms arranged between the suction nozzle body 1 7 and the suction nozzle body 2 6 in sequence, wherein at least three slotted adjustment arms can be placed on the suction nozzle body 1 7,
  • the nozzle body 26 slides independently in the axial direction (the axial direction of the nozzle body) and is locked in a certain position.
  • the so-called independent axial sliding means that any one of the slotted adjustment arms can slide axially independently, and when the When the slotted adjustment arm slides axially, it will not drive other slotted adjustment arms to move.
  • the following methods can be used:
  • the three slotted adjustment arms include a slotted adjustment arm 1 2 , a slotted adjustment arm 2 3 , and a slotted adjustment arm 3 4 that are stacked in sequence, wherein the center of the slotted adjustment arm 2 3 coincides with the central axis of the nozzle body.
  • the slotted adjusting arm one 2, the slotted adjusting arm two 3, and the slotted adjusting arm three 4 are all provided with racks.
  • the rack includes a rack one 21, a rack two 31, and a rack three 41, which are sequentially arranged on the slotted adjustment arm one 2, the slotted adjustment arm two 3, and the slotted adjustment arm three 4, wherein the rack one 21, the rack gear
  • the heights of the second 31 and the third rack 41 relative to the suction nozzle body are sequentially increased.
  • the slotted adjustment gear 10 can be supported by the third gear bracket 101 .
  • the slotted adjustment gear 10 can be set on the third gear bracket 101, and the three slotted adjustment gears 10 can rotate independently and mesh with the first rack 21, the second rack 31, and the third rack 41 respectively.
  • the corresponding slotted adjustment gear 10 is in a braking state, and the individual control of the three slotted adjustment gears 10 can be in any manner in the prior art.
  • this embodiment further includes an adjustment ring for adjusting the distance between the first suction nozzle body 7 and the second suction nozzle body 6 .
  • the adjusting ring includes adjusting ring one 1 and adjusting ring two 5 , adjusting ring one 1 is connected to the outer surface of suction nozzle body one 7 , and adjusting ring two 5 is connected to the outer surface of suction nozzle body two 6 .
  • the first nozzle body 7 and the suction nozzle body two 6 are respectively provided with an inner cone section 1 72, an inner cone section 2 62, an inner cone section 1 72, and the cross section of the inner cone section 2 62
  • the outer diameter increases or decreases sequentially along the axis direction of the nozzle body, that is to say: the outer surfaces of the inner cone section 1 72 and the inner cone section 2 62 are tapered, and the adjustment ring 1 and the adjustment ring 2 5 are respectively set.
  • One is to provide elastic force to the nozzle body two 6 and the nozzle body one 7 to increase the distance between them. When it becomes larger (the diameter of the inner hole of the nozzle body increases), it can compensate for the gap generated by the side of the nozzle body, so that all the slotted adjustment arms and the nozzle body two 6 and the nozzle body one 7 can fit together, and then realize A seal on the side of the nozzle body.
  • At least one slotted adjusting arm is not in contact with the working object, and the working object end of the suction nozzle body forms a notch 13 that avoids the position to be protected by the working object.
  • This embodiment is usually applied to the eutectic process, and the nozzle body absorbs the product through nitrogen, as shown in Figure 10: the work object 14 is provided with strip-shaped light-emitting strips, and these light-emitting strips are the positions to be protected 15. During the eutectic process, the It is necessary to avoid damage to the position 15 to be protected by the nozzle body.
  • the suction nozzle body driving device includes a rotation adjustment gear 8 for driving the suction nozzle body to rotate with the axis center of the circle and a size adjustment gear 9 for driving the suction nozzle body to slide axially.
  • the matching rotation adjustment tooth surface 71 is provided, and the second suction nozzle body 6 is provided with a size adjustment tooth surface 61 matching with the size adjustment gear 9 .
  • the axis of the size adjustment gear 9 is preferably perpendicular to the axis of the suction nozzle body, while the axis of the rotation adjustment gear 8 is usually parallel to the axis of the suction nozzle body.
  • the diameter of the inner hole of the suction nozzle body changes, the magnitude of the change is very small compared to the size of the entire suction nozzle body, which is completely within the elastic range of the sealing strip 32 and will not affect the rotation of the adjusting gear 8
  • the size of the rotating adjusting tooth surface 71 is larger in the axial direction.
  • the rotating adjusting gear 8 can always mesh with the rotating adjusting tooth surface 71.
  • the size adjusting gear 9 can always engage with the size adjustment tooth surface 61.
  • This embodiment also discloses a working method of a multifunctional suction nozzle.
  • the suction nozzle acts on the work object by suction, which specifically includes the following working conditions:
  • At least one slotted adjusting arm is not in contact with the working object, and the working object end of the suction nozzle body forms a notch 13 that avoids the position to be protected by the working object, so that when the suction nozzle absorbs the working object 14, the position 15 to be protected is located inside the slot 13, and the pressing force generated by the adsorption of the suction nozzle body will not damage the position 15 to be protected.
  • the size of the notch 13 can be adjusted by adjusting the distance between the first suction nozzle body 7 and the second suction nozzle body 6, but this adjustment method also changes the diameter of the aperture in the suction nozzle body. Size, specifically: drive the entire nozzle body to slide axially through the size adjustment gear 9; Sliding realized. During the axial sliding process of the entire nozzle body, the relative positions of all the slotted adjusting arms and the nozzle body 1 7 and the nozzle body 2 6 do not change, which together constitute a structurally stable nozzle body.
  • guide rods 12 can be provided on the engaging surfaces of the first suction nozzle body 7 and the second suction nozzle body 6, and the guide rods 12 can be at least relative to the first suction nozzle body 7, 6 and 6.
  • One of the suction nozzle bodies 6 slides axially, all the slotted adjustment arms are provided with waist-shaped holes 33, the axis of the waist-shaped holes 33 is parallel to the axis of the suction nozzle body, and the guide rod 12 passes through all the slotted adjustment arms.
  • the waist-shaped hole 33 does not affect the axial movement of the slotted adjustment arm, and can also fix the slotted adjustment arm.
  • the guide rod 12 can slide axially relative to at least one of the first suction nozzle body 7 and the second suction nozzle body 6 .
  • the notch 13 avoids the position to be protected 15 . That is to say, the offset of the notch 13 can be realized by adjusting the non-axial position of the slotted adjusting arm.
  • E, F, and G in Figure 10 represent the movement trajectory of the nozzle body.
  • the trajectory of the position to be protected 15 changes, that is to say, the position to be protected 15 is not in a straight line state.
  • the bold dotted line A in FIG. 1 , the bold dotted line B in FIG. 2 , the point C in FIG. 5 , and the bold dotted line D in FIG. 6 all represent the center line of the notch 13 .
  • the chip light-emitting strip can be avoided, and key parts such as the chip light-emitting strip will not be crushed.
  • the width, depth and offset position of the notch 13 relative to the suction nozzle body can be adjusted, and the suction nozzle body adopts a rotatable design.
  • the chip position can be corrected by rotating the suction nozzle.
  • the suction nozzle of the invention has high production efficiency, one suction nozzle can be compatible with the production and use of multiple suction nozzles, and the time for changing the suction nozzles and adjusting the equipment is reduced.
  • the suction nozzle of the present invention has low cost, and one suction nozzle can be used against multiple suction nozzles. When changing different work objects, it only needs to be within the adjustment range of the notch 13 in this embodiment.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Supply And Installment Of Electrical Components (AREA)
  • Manipulator (AREA)

Abstract

Buse d'aspiration multifonctionnelle et procédé de fonctionnement. La buse d'aspiration comprend un premier corps de buse d'aspiration (7), un second corps de buse d'aspiration (6), et une pluralité de bras de réglage de rainurage empilés successivement (3-5) disposée entre le premier corps de buse d'aspiration (7) et le second corps de buse d'aspiration (6), au moins trois bras de réglage de rainurage (3-5) pouvant coulisser indépendamment et axialement le long d'un corps de buse d'aspiration et étant verrouillés dans une certaine position. Au cours d'un processus eutectique, la buse d'aspiration peut éviter une barre électroluminescente d'une puce et ne risque pas d'écraser des parties clés de la puce telle que la barre électroluminescente. La largeur et la profondeur d'une encoche (13) peuvent être réglées par rapport à une position de décalage du corps de buse d'aspiration, et une conception rotative est utilisée dans le corps de buse d'aspiration, de telle sorte que, lorsqu'une puce de matière alimentée est inclinée, la position de la puce peut être corrigée par rotation de la buse d'aspiration. La buse d'aspiration présente un rendement de production élevé et un faible coût, et une buse d'aspiration peut être compatible avec de multiples buses d'aspiration pour la production et l'utilisation, de telle sorte que le temps de remplacement de buse d'aspiration et de réglage de dispositif est réduit. Lors du remplacement de différents objets de fonctionnement, la buse est appropriée pour être utilisée uniquement dans une plage de réglage de l'encoche (13).
PCT/CN2021/085347 2021-03-26 2021-04-02 Buse d'aspiration multifonctionnelle et procédé de fonctionnement WO2022198717A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN202110327561.2A CN113066752B (zh) 2021-03-26 2021-03-26 一种多功能吸嘴及工作方法
CN202110327561.2 2021-03-26

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115849011A (zh) * 2023-01-04 2023-03-28 西安策士测试技术有限公司 一种ic芯片吸取机构及吸取方法

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050023773A1 (en) * 2003-07-28 2005-02-03 Sipec Corporation Substrate supporting apparatus
WO2011048130A1 (fr) * 2009-10-22 2011-04-28 Schmid Technology Systems Gmbh Dispositif de préhension par aspiration pour substrats plats
CN203245140U (zh) * 2013-01-09 2013-10-23 广东志成华科光电设备有限公司 一种芯片分选机的双摆臂系统
CN203327391U (zh) * 2013-06-18 2013-12-04 苏州耀新电子有限公司 一种用于贴片机的吸嘴
CN108565241A (zh) * 2018-05-22 2018-09-21 苏州艾科瑞思智能装备股份有限公司 一种芯片倒装式微组装机
CN209488951U (zh) * 2018-12-29 2019-10-11 深圳市恒立泰科技有限公司 一种贴片机用贴片机嘴
CN110610869A (zh) * 2019-10-22 2019-12-24 苏州艾科瑞思智能装备股份有限公司 芯片封装设备
CN112234004A (zh) * 2020-11-18 2021-01-15 深圳新益昌科技股份有限公司 芯片自动修正式固晶机

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050023773A1 (en) * 2003-07-28 2005-02-03 Sipec Corporation Substrate supporting apparatus
WO2011048130A1 (fr) * 2009-10-22 2011-04-28 Schmid Technology Systems Gmbh Dispositif de préhension par aspiration pour substrats plats
CN203245140U (zh) * 2013-01-09 2013-10-23 广东志成华科光电设备有限公司 一种芯片分选机的双摆臂系统
CN203327391U (zh) * 2013-06-18 2013-12-04 苏州耀新电子有限公司 一种用于贴片机的吸嘴
CN108565241A (zh) * 2018-05-22 2018-09-21 苏州艾科瑞思智能装备股份有限公司 一种芯片倒装式微组装机
CN209488951U (zh) * 2018-12-29 2019-10-11 深圳市恒立泰科技有限公司 一种贴片机用贴片机嘴
CN110610869A (zh) * 2019-10-22 2019-12-24 苏州艾科瑞思智能装备股份有限公司 芯片封装设备
CN112234004A (zh) * 2020-11-18 2021-01-15 深圳新益昌科技股份有限公司 芯片自动修正式固晶机

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115849011A (zh) * 2023-01-04 2023-03-28 西安策士测试技术有限公司 一种ic芯片吸取机构及吸取方法

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CN113066752A (zh) 2021-07-02

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