WO2022181184A1 - Inductor component - Google Patents

Abstract

An inductor component (10) includes an element (20). In the element (20), plate-shaped magnetic thin strips (40) are layered in a direction orthogonal to a main face of the magnetic thin strips (40). Inside the element (20), inductor wiring extends along the main face. An axis of extension of a straight-line portion, of the inductor wiring, which has the greatest dimension of extension serves as a center axis. In a cross-sectional view orthogonal to the center axis, an axis along the main face is a first axis (X), and an axis orthogonal to the main face is a second axis. A second virtual rectangle (VR2) is drawn, said rectangle having, when viewed from the direction along the second axis, the smallest area circumscribed by the magnetic thin strips (40). In this case, the second virtual rectangle (VR2) includes a long side (L1) and a short side (L2) which is shorter than the long side (L1). The long side (L1) of the second virtual rectangle (VR2) is parallel with the center axis.

Description

inductor components

The present disclosure relates to inductor components.

The inductor component described in Patent Document 1 includes an element body and inductor wiring extending inside the element body. The body is made of inorganic filler and resin. For example, for the magnetic composite body, the material of the inorganic filler is a magnetic material.

JP 2019-192920 A

The inductor component described in Patent Document 1 is in a state in which inorganic filler particles are randomly dispersed in the element body. Therefore, Patent Literature 1 does not mention how the arrangement of the magnetic materials affects the characteristics of the inductor component if a plurality of magnetic materials are regularly arranged in the element body. Therefore, it is necessary to find a configuration of an element that can obtain desirable characteristics in an inductor component in which magnetic materials are regularly arranged.

In order to solve the above problems, the present invention includes a plurality of flat magnetic ribbons made of a magnetic material, wherein the plurality of magnetic ribbons are laminated in a direction perpendicular to the main surface of the magnetic ribbons. and an inductor wiring extending along the main surface inside the element body, the inductor wiring having a linear portion extending linearly and having the largest extension dimension of the straight line. The axis along which the portion extends is defined as a central axis, the axis along the main surface in a cross-sectional view orthogonal to the central axis is defined as a first axis, the axis orthogonal to the main surface in cross-sectional view is defined as a second axis, and the second axis is defined as a second axis. When a virtual rectangle having a minimum area circumscribing the magnetic ribbon when viewed along the axis is drawn, the virtual rectangle has long sides and short sides shorter than the long sides, and the long sides are: An inductor component parallel to the central axis.

According to the above configuration, in the inductor component, the flat magnetic strips are laminated in the direction perpendicular to the main surface. Moreover, the magnetic ribbon has a regular structure in which a plurality of magnetic ribbons are arranged in a direction orthogonal to the main surface. In such a structure, the long side of the imaginary rectangle having the smallest circumscribing area on the magnetic ribbon is parallel to the central axis, so that the eddy current loss generated in the inductor component can be expected to be reduced.

It should be noted that "along" includes cases in which there is no direct contact, but at a distance. For example, "along the first axis" means not only those that are in direct contact with the first axis and along the first axis, but also those that are not in direct contact with the first axis and are along the first axis at a distance. Also includes Also, "along" means that they are substantially in parallel, and includes those that are slightly inclined due to manufacturing errors or the like.

It is possible to reduce eddy current loss in inductor parts in which magnetic ribbons are laminated.

2 is an exploded perspective view of the inductor component of the first embodiment; FIG. 4 is a plan view of the first portion of the inductor component of the first embodiment; FIG. FIG. 3 is a cross-sectional view of the inductor component taken along line 3-3 in FIG. 2; Explanatory drawing of the manufacturing method of inductor components. Explanatory drawing of the manufacturing method of inductor components. Explanatory drawing of the manufacturing method of inductor components. Explanatory drawing of the manufacturing method of inductor components. Explanatory drawing of the manufacturing method of inductor components. Explanatory drawing of the manufacturing method of inductor components. Explanatory drawing of the manufacturing method of inductor components. Explanatory drawing of the manufacturing method of inductor components. Explanatory drawing of the manufacturing method of inductor components. Explanatory drawing of the manufacturing method of inductor components. Explanatory drawing of the manufacturing method of inductor components. Explanatory drawing of the manufacturing method of inductor components. FIG. 2 is a perspective view of an inductor component of a first comparative example; 4 is a table showing comparison results between the inductor component of the first comparative example and the inductor component of the first embodiment; Simulation results showing the relationship between AX dimension and eddy current loss. FIG. 4 is an exploded perspective view of an inductor component according to a second embodiment; The top view of the 1st part of the inductor component of 2nd Embodiment. FIG. 21 is a cross-sectional view of the inductor component taken along line 21-21 in FIG. 20; FIG. 4 is a perspective view of an inductor component of a second comparative example; 10 is a table showing comparison results between the inductor component of the second comparative example and the inductor component of the second embodiment; Simulation results showing the relationship between AX dimension and eddy current loss.

<First Embodiment of Inductor Component>
A first embodiment of the inductor component will be described below. In addition, in order to facilitate understanding, the drawings may show constituent elements in an enlarged manner. The dimensional ratios of components may differ from those in reality or in other figures. In addition, although cross-sectional views are hatched, there are cases where the hatching of some components is omitted to facilitate understanding. Furthermore, there are cases where only some members among the plurality of members are given reference numerals.

<Overall composition>
As shown in FIG. 1 , inductor component 10 includes element body 20 and inductor wiring 30 . The element body 20 has a plurality of magnetic ribbons 40 made of a magnetic material, a plurality of nonmagnetic layers 50 , a plurality of nonmagnetic portions 60 , and a plurality of nonmagnetic films 70 .

The magnetic ribbon 40 is flat. A plurality of magnetic ribbons 40 are laminated in a direction orthogonal to the main surface MF of the magnetic ribbons 40 . The flat plate shape means a thin shape having a main surface, but it is not limited to a rectangular parallelepiped with a thin thickness. There may be holes inside.

The inductor wiring 30 extends linearly along the main surface MF inside the element body 20 . The inductor wiring 30 has a linear portion 30A extending linearly. The extending axis of the linear portion 30A of the inductor wiring 30 having the longest dimension is defined as the central axis CA. In this embodiment, the entire inductor wiring 30 is the straight portion 30A.

As shown in FIG. 3, in a cross-sectional view perpendicular to the central axis CA, the axis along the main surface MF is defined as a first axis X, and the axis perpendicular to the main surface MF is defined as a second axis Z. One of the directions along the first axis X is defined as a first positive direction X1, and the other direction along the first axis X is defined as a first negative direction X2. One of the directions along the central axis CA is defined as a positive direction Y1, and the other direction along the central axis CA is defined as a negative direction Y2. Further, one of the directions along the second axis Z is defined as a second positive direction Z1, and the other direction along the second axis Z is defined as a second negative direction Z2. In addition, let the cross section shown in FIG. 3 be a 1st cross section.

As shown in FIG. 3, in the cross section of the inductor component 10 orthogonal to the central axis CA, the inductor wiring 30 has a rectangular shape with long sides and short sides shorter than the long sides. Here, in a cross section perpendicular to the central axis CA, a first imaginary rectangle VR1 with a minimum area that circumscribes the inductor wiring 30 and has a first side along the first axis X and a second side along the second axis Z draw. The long side of the outer shape of the inductor wiring 30 is along the first axis X in the cross section perpendicular to the central axis CA. Furthermore, the short side of the inductor wiring 30 is along the second axis Z in the cross section orthogonal to the central axis CA. Therefore, the first virtual rectangle VR<b>1 matches the outer shape of the inductor wiring 30 . The first side of the first virtual rectangle VR1 is longer than the second side of the first virtual rectangle VR1.

As shown in FIG. 1, the inductor component 10 is composed of a first portion P1, a second portion P2, and a third portion P3. The three parts P1 to P3 are arranged in this order along the second axis Z. Among the three portions P1 to P3, the first portion P1 is located at the end of the second negative direction Z2 along the second axis Z. As shown in FIG.

As shown in FIG. 2, the first portion P1 has a square shape when viewed from the direction along the second axis Z. The first portion P<b>1 has a plurality of magnetic strips 40 , a plurality of nonmagnetic layers 50 , a plurality of nonmagnetic portions 60 , and a plurality of nonmagnetic films 70 . In the first portion P<b>1 , the plurality of magnetic strips 40 , the plurality of nonmagnetic layers 50 , the plurality of nonmagnetic portions 60 , and the nonmagnetic film 70 form part of the element body 20 .

As shown in FIG. 3, each magnetic ribbon 40 of the first portion P1 is laminated in the direction along the second axis Z in the first cross-sectional view perpendicular to the central axis CA. The main surface MF of each magnetic ribbon 40 is perpendicular to the second axis Z. As shown in FIG. That is, the thickness direction of each magnetic strip 40 is along the second axis Z. As shown in FIG. As shown in FIG. 2, each magnetic ribbon 40 of the first portion P1 has a rectangular shape when viewed from the direction along the second axis Z. As shown in FIG. In the first portion P1, the shapes and dimensions of the plurality of magnetic strips 40 are all the same.

Here, as shown in FIG. 1, when viewed from the direction along the second axis Z, a second imaginary rectangle VR2 having the smallest area circumscribing each magnetic strip 40 constituting the first portion P1 is drawn. In this embodiment, each magnetic ribbon 40 has a rectangular shape when viewed from the direction along the second axis Z, so the second imaginary rectangle VR2 matches the outer shape of each magnetic ribbon 40 . The second virtual rectangle VR2 has a long side L1 and a short side L2 shorter than the long side L1. A long side L1 of the second virtual rectangle VR2 is parallel to the central axis CA. In this way, the second virtual rectangle VR2 is a shape related to the magnetic strip 40. As shown in FIG. Therefore, the second virtual rectangle VR2 is different from the above-described first virtual rectangle VR1 indicating the shape of the inductor wiring 30. FIG.

As shown in FIG. 1, four magnetic strips 40 are arranged in parallel with the short side L2 of the second virtual rectangle VR2 via the non-magnetic portion 60 at the same position along the second axis Z. . Also, two magnetic strips 40 are arranged at the same position along the second axis Z in a direction parallel to the long side L1 with the non-magnetic portion 60 interposed therebetween. That is, the plurality of magnetic strips 40 are arranged in a matrix in a direction parallel to the long side L1 and a direction parallel to the short side L2. In this way, M cells are arranged in a certain direction and N cells are arranged in a direction orthogonal thereto, and a total of N×M cells are arranged in a matrix. Further, the number of magnetic strips 40 arranged in the direction parallel to the short side L2 is greater than the number arranged in the direction parallel to the long side L1.

The magnetic ribbon 40 is made of a magnetic material. The magnetic material is, for example, a metal magnetic material containing elements such as Fe, Ni, Co, Cr, Cu, Al, Si, B, and P. In this embodiment, the magnetic material is a metal magnetic material containing Fe element and Si element.

As shown in FIG. 3, the element body 20 includes a non-magnetic layer 50 made of a non-magnetic material between adjacent magnetic strips 40 along the second axis Z in the first cross-sectional view. The non-magnetic layer 50 fills all the spaces between the adjacent magnetic strips 40 in the direction along the second Z axis. Non-magnetic materials are, for example, acrylic resins, epoxy resins, and silicone resins. In addition, in FIG. 3, the non-magnetic layer 50 is illustrated by lines.

The dimensions of the non-magnetic layer 50 in the direction along the second axis Z are all the same. That is, the intervals between pairs of magnetic strips 40 adjacent in the direction along the second axis Z are all equal. In addition, the dimension of each nonmagnetic layer 50 along the second axis Z is smaller than the dimension of each magnetic ribbon 40 along the second axis Z. As shown in FIG.

As shown in FIG. 2, the element body 20 has a non-magnetic portion 60 between adjacent magnetic strips 40 at the same position along the second axis Z. As shown in FIG. The non-magnetic portion 60 fills the entire space between the magnetic strips 40 arranged at the same position in the direction along the second axis Z. As shown in FIG. As described above, at the same position along the second axis Z, there are two magnetic ribbons 40 parallel to the long side L1 and four magnetic ribbons 40 parallel to the short side L2. Ten non-magnetic portions 60 are present. The non-magnetic portion 60 is made of a non-magnetic material. In this embodiment, the material of the non-magnetic portion 60 is the same material as that of the non-magnetic layer 50 .

The non-magnetic film 70 is located at the end of the first positive direction X1 along the first axis X and the end of the first negative direction X2 opposite to the first positive direction X1 in the first portion P1. . The non-magnetic film 70 covers the entire end surfaces of the magnetic ribbon 40 in the direction along the first axis X. As shown in FIG. In addition, the non-magnetic film 70 covers the entire end surfaces of the non-magnetic layer 50 in the direction along the first axis X. As shown in FIG. Furthermore, the non-magnetic film 70 covers the entire end surfaces of the non-magnetic portion 60 in the direction along the first axis X. As shown in FIG. Therefore, the end faces of the first portion P1 in the first positive direction X1 along the first axis X are all composed of the non-magnetic film 70 . Similarly, the end face of the first portion P1 along the first axis X in the first negative direction X2 is entirely composed of the non-magnetic film 70 . The non-magnetic film 70 is made of a non-magnetic material. In this embodiment, the material of the non-magnetic film 70 is the same as that of the non-magnetic layer 50 .

As shown in FIG. 1, the second portion P2 is located in the second positive direction Z1 that is opposite to the second negative direction Z2 along the second axis Z when viewed from the first portion P1. The second portion P2 has the same square shape as the first portion P1 when viewed from the direction along the second axis Z. As shown in FIG.

The second portion P2 is composed of an inductor wiring 30, a plurality of magnetic strips 40, a plurality of non-magnetic layers 50, a plurality of non-magnetic portions 60, and a plurality of non-magnetic films .
The inductor wiring 30 has a rectangular shape when viewed from the direction along the second axis Z. As shown in FIG. The axis of the linear portion 30A of the inductor wiring 30 that extends the longest is the central axis CA. The end face of the inductor wiring 30 in the positive direction Y1 along the central axis CA constitutes part of the outer surface of the second portion P2 and is exposed from the element body 20. As shown in FIG. Similarly, the end face of the inductor wiring 30 in the negative direction Y2, which is the opposite direction to the positive direction Y1 along the central axis CA, constitutes part of the outer surface of the second portion P2 and is exposed from the element body 20. there is

When viewed from the second axis Z, the end face in the positive direction Y1 and the end face in the negative direction Y2 along the central axis CA of the inductor wiring 30 are parallel to the first axis X. In addition, the central axis CA of the inductor wiring 30 is positioned at the center of the second portion P2 in the direction along the first axis X. As shown in FIG. Therefore, the central axis CA, which is the axis along which the linear portion 30A of the inductor wiring 30 extends, passes through the center of the second portion P2 in the direction along the first axis X. As shown in FIG. The dimension of the inductor wiring 30 in the direction along the first axis X is about a quarter of the dimension in the direction along the first axis X of the second portion P2.

The material of the inductor wiring 30 is a conductive material. Conductive materials are, for example, Cu, Ag, Au, Al, or alloys thereof. In this embodiment, the material of the inductor wiring 30 is Cu.

In the second portion P2, portions other than the inductor wiring 30 are composed of a plurality of magnetic strips 40, a plurality of nonmagnetic layers 50, a plurality of nonmagnetic portions 60, a plurality of nonmagnetic films, as in the first portion P1. 70 and .

As shown in FIG. 3, each magnetic ribbon 40 of the second portion P2 is laminated in the direction along the second axis Z in the first cross-sectional view perpendicular to the central axis CA. As shown in FIG. 1, each magnetic strip 40 of the second portion P2 has a rectangular shape when viewed from the direction along the second axis Z. As shown in FIG. All the dimensions in the direction along the second axis Z of the plurality of magnetic strips 40 are the same.

Here, as shown in FIG. 1, when viewed from the direction along the second axis Z, a second imaginary rectangle VR2 having the smallest area circumscribing each magnetic strip 40 forming the second portion P2 is drawn. In this embodiment, each magnetic ribbon 40 has a rectangular shape when viewed from the direction along the second axis Z, so the second imaginary rectangle VR2 matches the outer shape of each magnetic ribbon 40 . The second virtual rectangle VR2 has a long side L1 and a short side L2 shorter than the long side L1. A long side L1 of the second virtual rectangle VR2 is parallel to the central axis CA.

As shown in FIG. 1, in the second portion P2, the magnetic ribbon 40 is positioned on both sides of the first positive direction X1 and the first negative direction X2 along the first axis X when viewed from the inductor wiring 30. . That is, in the second portion P2, the magnetic thin strips 40 are arranged two by two in the direction parallel to the short side L2 with the inductor wiring 30 interposed therebetween, for a total of four. Of the four magnetic ribbons 40 aligned in the direction parallel to the short side L2, the two outer magnetic ribbons 40 have the same shape and dimensions as the magnetic ribbons 40 of the first portion P1. Of the four magnetic strips 40 aligned in the direction parallel to the short sides L2, the short sides L2 of the two central magnetic strips 40 are the same as the short sides L2 of the two outer magnetic strips 40. about one-half. Also, two magnetic strips 40 are arranged at the same position along the second axis Z in a direction parallel to the long side L1 with the non-magnetic portion 60 interposed therebetween. That is, the plurality of magnetic strips 40 are arranged in a matrix in the second portion P2 as well.

The non-magnetic layer 50 of the second portion P2 is positioned between the magnetic strips 40 adjacent to each other in the direction along the second axis Z, similarly to the first portion P1 described above. That is, as shown in FIG. 1, the magnetic ribbons 40 and the non-magnetic layers 50 of the second portion P2 are alternately laminated in the direction along the second axis Z, similar to the first portion P1.

The non-magnetic portion 60 of the second portion P2 is located between the magnetic strips 40 arranged at the same position along the second axis Z. The non-magnetic portion 60 fills the entire space between the magnetic strips 40 arranged at the same position in the direction along the second axis Z. As shown in FIG. The position of the non-magnetic portion 60 of the second portion P2 overlaps part of the non-magnetic portion 60 of the first portion P1 when viewed from the direction along the second axis Z. As shown in FIG. The non-magnetic portion 60 of the second portion P2 is continuous with the non-magnetic portion 60 of the first portion P1.

The non-magnetic film 70 is located at the end of the first positive direction X1 and the end of the first negative direction X2 in the second portion P2. The non-magnetic film 70 of the second portion P2 is continuous with the non-magnetic film 70 of the first portion P1.

The third portion P3 is located in the second positive direction Z1 of the second portion P2. When viewed from the second axis Z, the third portion P3 has the same square shape as the first portion P1. The third portion P3 is composed of a plurality of magnetic ribbons 40, a plurality of nonmagnetic layers 50, a plurality of nonmagnetic portions 60, and a plurality of nonmagnetic films . As shown in FIG. 1, in the third portion P3, a second imaginary rectangle VR2 having the smallest area circumscribing the magnetic strips 40 constituting the third portion P3 is drawn when viewed from the direction along the second axis Z. . At this time, the second virtual rectangle VR2 of the magnetic ribbon 40 in the third portion P3 matches the second virtual rectangle VR2 in the first portion P1. That is, in the present embodiment, the third portion P3 has a structure symmetrical with the first portion P1 with the second portion P2 interposed therebetween. Therefore, detailed description of the third portion P3 is omitted.

<Regarding the first magnetic ribbon>
As shown in FIG. 3, in the first cross-sectional view orthogonal to the central axis CA, the end of the inductor wiring 30 in the first positive direction X1 is defined as a first wiring end IP1. Further, in the first cross-sectional view orthogonal to the central axis CA, the end of the inductor wiring 30 in the first negative direction X2 is defined as a second wiring end IP2.

Then, among the magnetic ribbons 40 laminated in the direction along the second axis Z with respect to the inductor wiring 30, the magnetic ribbon 40 having the shortest distance along the second axis Z from the first wiring end IP1 is selected as the first magnetic ribbon 40. 1 magnetic ribbon 41 . Note that the magnetic ribbon 40, which at least partially overlaps with the inductor wiring 30 when viewed from the direction along the second axis Z, is laminated in the direction along the second axis Z with respect to the inductor wiring 30. is 40. Therefore, in the present embodiment, the magnetic ribbon 40 in the first portion P1 and the magnetic ribbon 40 in the third portion P3 are laminated in the direction along the second axis Z with respect to the inductor wiring 30. be. On the other hand, the magnetic ribbon 40 in the second portion P2 is not laminated in the direction along the second axis Z with respect to the inductor wiring 30 . In the first magnetic ribbon 41, among the magnetic ribbons 40 closest to the first wiring end IP1, the magnetic ribbon 40 located closest to the second negative direction Z2 in the first portion P1 and the magnetic ribbon 40 in the third portion P3 and the magnetic ribbon 40 positioned closest to the second positive direction Z1.

In the first magnetic ribbon 41, the end in the first positive direction X1 is defined as a first end MP11, and the end in the first negative direction X2 is defined as a second end MP12. At this time, the range excluding both ends of the first magnetic ribbon 41 in the direction along the first axis X is defined as a first range AR11. Then, as shown in FIG. 3, a virtual straight line VL passing through the first wiring end IP1 and extending in a direction along the second axis Z is drawn. At this time, the virtual straight line VL passes through the first range AR11 of the first magnetic ribbon 41 . More specifically, the virtual straight line VL passes through the center of the first magnetic strip 41 in the direction along the first axis X. As shown in FIG. In other words, the second end MP12 of each first magnetic strip 41 is positioned substantially at the center of the inductor wiring 30 in the direction along the first axis X. As shown in FIG.

In addition, in the present embodiment, the inductor component 10 has a line-symmetrical structure with the second axis Z passing through the center in the direction along the first axis X as the axis of symmetry. Therefore, when a virtual straight line VL is drawn in a direction along the second axis Z while passing through the second wiring end IP2 in the first negative direction X2 along the first axis X of the inductor wiring 30, the virtual straight line VL is , the center of the first magnetic ribbon 41 in the direction along the first axis X passing through the imaginary straight line VL.

<Regarding the aspect ratio>
The long sides L1 of the second imaginary rectangles VR2 of the first portion P1 to the third portion P3 are all parallel to the central axis CA. It should be noted that "the long side L1 and the central axis CA are parallel" is to allow a deviation caused by a manufacturing error or the like. In other words, not only is it completely parallel, but it also includes an error of about several degrees which is unavoidably caused during manufacturing.

Here, the aspect ratio is the ratio of the long side L1 of the second virtual rectangle VR2 to the short side L2 of the second virtual rectangle VR2. In this embodiment, the dimension of the long side L1 of the second imaginary rectangle VR2 of the first portion P1 is 990 μm. The dimension of the short side L2 of the second imaginary rectangle VR2 of the first portion P1 is 485 μm. Therefore, the aspect ratio of the magnetic ribbon 40 forming the first portion P1 is 2 or more.

In the second portion P2, the magnetic ribbons 40 located at the end of the first positive direction X1 and the end of the first negative direction X2 of the first axis X are the same as the magnetic ribbons 40 forming the first portion P1. Shape. Therefore, the aspect ratio of the magnetic ribbon 40 is 2 or more.

The long side L1 of the second imaginary rectangle VR2 of the magnetic ribbon 40 adjacent to the inductor wiring 30 of the second portion P2 is 990 μm. The short side L2 of the second imaginary rectangle VR2 of the magnetic ribbon 40 is 232.5 μm. Therefore, the aspect ratio of the magnetic ribbon 40 that constitutes the second portion P2 and is adjacent to the inductor wiring 30 is 4 or more. The long side L1 of the second imaginary rectangle VR2 of each magnetic strip 40 forming the second portion P2 is parallel to the central axis CA.

The magnetic ribbons 40 forming the third portion P3 have the same shape as the magnetic ribbons 40 forming the first portion P1. Therefore, the aspect ratio of each magnetic strip 40 forming the third portion P3 is 2 or more. The long side L1 of the second imaginary rectangle VR2 of each magnetic ribbon 40 of the third portion P3 is parallel to the central axis CA.

<Manufacturing method of inductor parts>
Next, a method for manufacturing inductor component 10 will be described.
As shown in FIG. 4, first, a copper foil preparation step for preparing the copper foil 101 is performed. Since the copper foil 101 constitutes the inductor wiring 30 , the thickness of the copper foil 101 is prepared to have a thickness necessary for the inductor wiring 30 . In the following description, the copper foil 101 is arranged such that the two main surfaces of the copper foil 101 are orthogonal to the second axis Z, and the end surface orthogonal to the central axis CA is shown. do.

Next, as shown in FIG. 5, when viewed from the direction along the second axis Z of both principal surfaces of the copper foil 101 orthogonal to the second axis Z, the plurality of magnetic ribbons in the second portion P2 A first covering step is performed to cover areas other than the area occupied by 40 . Specifically, first, of the surface of the copper foil 101 facing the second negative direction Z2, the first covering portion 102 is formed to cover areas other than the area occupied by the plurality of magnetic ribbons 40 in the second portion P2. In forming the first covering portion 102, a photosensitive dry film resist is applied to the entire surface of the copper foil 101 facing the second negative direction Z2. Next, the dry film resist is cured by exposing the portion where the first covering portion 102 is to be formed. Next, similarly, the dry film resist is applied to the surface of the copper foil 101 facing the second positive direction Z1, and the portion forming the first covering portion 102 is exposed to light to cure the dry film resist. . After that, the uncured portion of the applied dry film resist is peeled off with a chemical solution. As a result, the hardened portion of the applied dry film resist is formed as the first covering portion 102 . Note that photolithography in other steps described later is also the same step, and detailed description thereof will be omitted.

Next, as shown in FIG. 6, a copper foil etching step is performed to etch the copper foil 101 exposed from the first covering portion 102 . By etching the copper foil 101 partially covered with the first covering portion 102, the exposed copper foil 101 is removed.

Next, as shown in FIG. 7, a first covering portion removing step for removing the first covering portion 102 is performed. Specifically, the first covering portion 102 is peeled off by wet etching the first covering portion 102 with a chemical.

Next, a second covering step is performed to cover the range occupied by the plurality of magnetic strips 40 when viewed from the direction along the second axis Z of both surfaces of the copper foil 101 orthogonal to the second axis Z. Specifically, first, as shown in FIG. 8, a dry film resist R is applied to the entire surface of the copper foil 101 facing the second positive direction Z1. Next, as shown in FIG. 9, by photolithography, the magnetic ribbon 40 and the non-magnetic layer are formed by photolithography when viewed from the direction along the second axis Z among the surfaces of the copper foil 101 facing the second positive direction Z1. A second covering portion 103 covering the area other than the area occupied by 50 is formed. After that, similarly, by photolithography, a surface of the copper foil 101 facing the second negative direction Z2, other than the area occupied by the magnetic ribbon 40 and the non-magnetic layer 50 when viewed from the direction along the second axis Z, is formed. A second covering portion 103 covering the is formed.

Next, a lamination preparation step is performed to prepare the laminate 104 in which the magnetic ribbon 40 and the non-magnetic layer 50 are laminated.
First, for example, the laminated body 104 in which the magnetic ribbon 40 and the non-magnetic layer 50 are laminated is prepared. For example, a ribbon is prepared as the magnetic ribbon 40 . The ribbon is made of, for example, NANOMET (registered trademark) manufactured by Tohoku Magnet Institute, Metglas (registered trademark) or FINEMET (registered trademark) manufactured by Hitachi Metals, FeSiB, FeSiBCr, or the like. Cut this ribbon. A non-magnetic material is applied to the cut ribbon by spin coating. The non-magnetic material is, for example, epoxy resin varnish. The cut strip is laminated on the coated non-magnetic material. After alternately laminating the thin strips and the non-magnetic material in this manner, the thin strips and the non-magnetic material are hardened and adhered by a vacuum heating and pressurizing device. Then, by dicing into a desired size, a laminated body 104 in which a plurality of magnetic ribbons 40 and nonmagnetic layers 50 are laminated can be prepared. In the present embodiment, the laminate 104 includes a first laminate 104A that constitutes the magnetic ribbon 40 and the nonmagnetic layer 50 in the first portion P1 and the third portion P3, and a magnetic ribbon 40 and the nonmagnetic layer 50 in the second portion P2. A second laminate 104B that forms the magnetic layer 50 is prepared. Although there are two types of the second laminate 104B that constitute the second portion P2, which have different dimensions, the same reference numerals are used for the sake of convenience.

Next, a laminate arrangement step for arranging the laminate 104 is performed.
As shown in FIG. 10, of the laminate 104, the thermoplastic adhesive 105 is applied to the surface facing the second negative direction Z2 of the first laminate 104A constituting the magnetic ribbon 40 and the non-magnetic layer 50 in the third portion P3. apply. Then, the first laminated body 104A is fitted into the opening of the second covering portion 103. As shown in FIG. The thermoplastic adhesive 105 is indicated by thick lines in FIGS. 10 to 15. FIG.

Next, as shown in FIG. 11, the whole is inverted in the direction along the second axis Z. Then, as shown in FIG. 12, of the laminate 104, the second laminate 104B constituting the magnetic ribbon 40 and the non-magnetic layer 50 in the second portion P2 is aligned with the second positive direction Z1 of the first laminate 104A. is arranged on a portion not in contact with the copper foil 101 of the surface facing the . Specifically, the second laminate 104B can be arranged by pressing the laminate 104 into the opening of the copper foil 101 by pressing or the like.

Next, as shown in FIG. 13, of the laminate 104, the first laminate 104A constituting the magnetic ribbon 40 and the non-magnetic layer 50 in the first portion P1 is placed along the second positive direction Z1 of the copper foil 101. Temporary bonding is performed with a thermoplastic adhesive 105 to the facing surface and the surface facing the second positive direction Z1 of the second laminate 104B. Thereby, the laminated body 104 is arranged.

Next, as shown in FIG. 14, a pressing process is performed. Pressing is performed in a state in which the whole is covered with a resin material 106 that is a non-magnetic material. Thereby, each layer in the direction along the second axis Z is crimped.

Next, as shown in FIG. 15, a singulation process is performed. Specifically, for example, it is separated into pieces by dicing along the break lines DL. A portion of the second covering portion 103 described above, which is between the first stacked bodies 104A arranged in the direction along the first axis X, becomes the non-magnetic portion 60 . In addition, portions of the second covering portion 103 between the first laminated bodies 104A and between the second laminated bodies 104B arranged in the direction along the central axis CA serve as non-magnetic portions 60 . Further, the thermoplastic adhesive 105 remains as part of the non-magnetic layer 50 on both sides of the inductor wiring 30 in the direction along the second axis Z, and the like. Note that in the example shown in FIG. 15 , the laminate 104 is cut along the end face in the first positive direction X1 and the end face in the first negative direction X2. After that, a non-magnetic film 70 made of a non-magnetic material is applied to the end faces of the laminate 104 in the first positive direction X1 and the end faces in the first negative direction X2. Thus, the inductor component 10 can be formed. By this method, the thermoplastic adhesive 105 also wraps around the side surfaces of the inductor wiring 30 facing the first positive direction X1 and the side surfaces facing the first negative direction X2. Insulation is ensured without contact.

<About simulation>
Next, using the inductor component 10 of the first embodiment as a first example, a simulation will be described in which the characteristics obtained in this first example are compared with the inductor component 80 of a first comparative example. Femtet (registered trademark) of Murata Software Co., Ltd. was used for the simulation.

<Simulation conditions>
The software used is Femtet 2019 manufactured by Murata Software. The solver is static magnetic field analysis. The model is three dimensional. A standard mesh size is 0.25 mm. The magnetic material is an amorphous metal magnetic thin film made of Fe, Si, Cr, and B, the relative magnetic permeability μr is 7000, and the saturation magnetic flux density Bs is 1.3T. A magnetic material BH curve that satisfies B=Bs×tanh (μ0×μr×H/Bs) was used. In addition, the portion where the relative magnetic permeability μr is 1 or more was used, and the function of Femtet2019 was used to extrapolate the magnetic permeability of the vacuum. The material of the inductor wiring 30 is copper.

The dimension of the magnetic ribbon 40 in the direction along the first axis X is 485 μm. The dimension of the magnetic ribbon 40 in the direction along the second axis Z is 20 μm. The dimension of the magnetic strip 40 in the direction along the central axis CA is 990 μm. The dimension of the nonmagnetic layer 50 in the direction along the second axis Z is 2 μm. The number of magnetic ribbons 40 laminated in the direction along the second axis Z is 41 pieces. The number of magnetic strips 40 arranged in the direction along the first axis X is four. The number of magnetic strips 40 arranged in the direction along the central axis CA is two. The dimension in the direction along the central axis CA of the non-magnetic portion 60 positioned between the magnetic ribbons 40 adjacent in the direction along the central axis CA is 20 μm.

The dimension of the inductor wiring 30 in the direction along the first axis X is 0.5 mm. The dimension of the inductor wiring 30 in the direction along the second axis Z is 0.1 mm. The dimension of the inductor wiring 30 in the direction along the central axis CA is 2400 μm. In this simulation, the dimension of the base body 20 along the central axis CA is 2020 μm. That is, in this simulation, the dimension of the inductor wiring 30 in the direction along the central axis CA is larger than the dimension in the direction along the central axis CA of the element body 20 by 380 μm. Therefore, the simulation is performed with the inductor wiring 30 protruding by 190 μm from the end face of the element body 20 in the positive direction Y1 and the inductor wiring 30 protruding by 190 μm from the end face of the element body 20 in the negative direction Y2.

The position of the inductor wiring 30 is arranged so that the center of gravity of the inductor wiring 30 coincides with the position of the center of gravity of the element body 20 . A non-magnetic insulating gap of 100 nm was provided in the portion where the inductor wiring 30 and the magnetic ribbon 40 were in contact with each other. The relative magnetic permeability μr of the nonmagnetic material of the nonmagnetic layer 50 and the nonmagnetic portion 60 was set to 1.

A sinusoidal electric signal is input to the inductor wiring 30 of the inductor component 10 . The amplitude of the electrical signal is 2.25A and the frequency of the electrical signal is 3MHz.
In the inductor component 10 described above, the dimension along the first axis X of the non-magnetic portion 60 positioned between the magnetic strips 40 adjacent along the first axis X is defined as the AX dimension. A simulation was performed by dividing the AX dimension step by step in the range of 1 to 10.0 μm.

On the other hand, as shown in FIG. 16, the inductor component 80 of the first comparative example includes a magnetic ribbon 81, a nonmagnetic layer 82, a nonmagnetic portion 83, and inductor wiring 84 having the following dimensions.
In the inductor component 80 of the first comparative example, it is assumed that a second imaginary rectangle having a minimum area circumscribing the magnetic ribbon 81 when viewed from the direction along the second axis Z is drawn. The dimension of the magnetic ribbon 81 along the first axis X is 990 μm. The dimension of the magnetic ribbon 81 in the direction along the second axis Z is 20 μm. The dimension of the magnetic strip 81 along the central axis CA is 485 μm. That is, the aspect ratio of the long sides of the second virtual rectangle to the short sides of the second virtual rectangle is greater than two. On the other hand, the long side of the magnetic ribbon 81 of the first comparative example extends parallel to the first axis X. As shown in FIG. That is, the direction of the long side of the magnetic ribbon differs between the first comparative example and the first embodiment.

The number of magnetic strips 81 stacked in the direction along the second axis Z is 41. The number of the magnetic strips 81 arranged in the direction along the first axis X is two. The number of magnetic strips 81 arranged in the direction along the central axis CA is four. The dimension of the non-magnetic layer 82 along the second axis Z is 2 μm. The dimension of the non-magnetic portion 83 positioned between the magnetic strips 81 in the direction along the central axis CA is 20 μm.

The dimension of the inductor wiring 84 in the direction along the first axis X is 0.5 mm. The dimension of the inductor wiring 84 in the direction along the second axis Z is 0.1 mm. The dimension of the inductor wiring 84 in the direction along the central axis CA is 2400 μm. In this simulation, the dimension in the direction along the central axis CA of the element including the magnetic ribbon 81 and the non-magnetic portion 83 is 2020 μm. That is, in this simulation, the dimension of the inductor wiring 84 in the direction along the central axis CA is larger than the dimension in the direction along the central axis CA of the element body by 380 μm. Therefore, the simulation is performed with the inductor wiring 84 protruding by 190 μm from the end face of the element body in the positive direction Y1 and the inductor wiring 84 protruding by 190 μm from the end face of the element body in the negative direction Y2.

The position of the inductor wiring 30 is arranged so that the center of gravity of the inductor wiring 84 coincides with the position of the center of gravity of the element. A non-magnetic insulating gap of 100 nm was provided at the portion where the inductor wiring 30 and the magnetic ribbon 81 were in contact with each other. The relative magnetic permeability μr of the nonmagnetic material of the nonmagnetic layer 82 and the nonmagnetic portion 83 is set to 1.

A sinusoidal electric signal is input to the inductor wiring 84 of the inductor component 80 . The amplitude of the electrical signal is 2.25A and the frequency of the electrical signal is 3MHz.
In the inductor component 80 described above, the dimension along the first axis X of the non-magnetic portion 83 positioned between the magnetic strips 81 in the direction along the first axis X is defined as the AX dimension. The simulation was performed by dividing the AX dimension step by step in the range of 1 to 10.0 μm.

<Simulation results>
As shown in FIGS. 17 and 18, the eddy current loss of the inductor component 10 of the first example is smaller than the eddy current loss of the inductor component 80 of the first comparative example regardless of the AX dimension. rice field. In addition, the inductor component 10 and the inductor component 80 had smaller eddy current loss as the AX dimension increased. Specifically, in the inductor component 10 of the first embodiment, the eddy current loss was 189.6 mW when the AX dimension was 1 μm. The larger the AX dimension of the inductor component 10, the smaller the eddy current loss. In the inductor component 10, the eddy current loss was 33.8 mW when the AX dimension was 10 μm. Also, in the inductor component 80 of the first comparative example, the eddy current loss was 232.6 mW when the AX dimension was 1 μm. The larger the AX dimension of the inductor component 80, the smaller the eddy current loss. In the inductor component 80, the eddy current loss was 50.4 mW when the AX dimension was 10 μm.

<About the action of the first embodiment>
When a current flows through the inductor wire 30 of the inductor component 10 in the direction along the central axis CA, a magnetic field is generated around the inductor wire 30 . If the direction of the magnetic flux when current flows through the inductor wiring 30 intersects with each magnetic ribbon 40 , an eddy current is generated in each magnetic ribbon 40 . Since the magnetic ribbon 40 generates heat when the eddy current is generated, part of the current of the inductor wiring 30 is consumed as heat. That is, eddy current loss occurs in the inductor wiring 30 .

<About the effect of the first embodiment>
(1-1) In the first embodiment, the long side L1 of the second imaginary rectangle VR2 of the magnetic ribbon 40 is parallel to the central axis CA of the linear portion 30A of the inductor wiring 30. FIG. The eddy current loss of the inductor component 10 satisfying the conditions is smaller than the eddy current loss of the inductor component 80 of the first comparative example. By determining the direction of the long side L1 of the magnetic ribbon 40 as in the first embodiment, the eddy current loss is reduced in the inductor component 10 in which the magnetic ribbon 40 is laminated in the direction along the second axis Z. be able to.

(1-2) In the inductor component 10 of the first embodiment, the aspect ratio of the second imaginary rectangle VR2 of the magnetic strip 40 is at least 2 or more. That is, the length of the long side L1 of the second virtual rectangle VR2 extending parallel to the central axis CA is ensured to be at least double the length of the short side L2 of the second virtual rectangle VR2. By securing a considerable length of the long side L1 extending parallel to the central axis CA, the eddy current loss can be effectively reduced.

(1-3) In the first embodiment, the plurality of magnetic strips 40 are arranged in a matrix. In such a structure, if the dimensions of the element body 20 are the same, compared to the case where only one magnetic ribbon 40 is arranged in the direction along the central axis CA, one of the magnetic ribbons 40 Smaller contact area. Therefore, the eddy current generated in the magnetic ribbon 40 can be reduced.

(1-4) In the first embodiment, the number of magnetic ribbons 40 arranged in the direction parallel to the short side L2 is greater than the number arranged in the direction parallel to the long side L1. there is By arranging the magnetic ribbons 40 in different numbers depending on the direction in this way, it is easy to design the shape of the element body 20 to have a standard outer shape.

(1-5) Assume that the same number of magnetic strips 40 are arranged in the direction parallel to the long side L1 of the second imaginary rectangle VR2 and in the direction parallel to the short side L2. In this case, the aspect ratio of the element body 20 is about 2 reflecting the aspect ratio of the magnetic ribbon 40 . In the first embodiment, at the same position along the second axis Z, the number of the magnetic ribbons 40 aligned in the direction parallel to the short side L2 is greater than that at the same position along the second axis Z along the long side L1. is larger than the number of the magnetic strips 40 arranged in the direction parallel to . By configuring the magnetic ribbon 40 in such a manner, the aspect ratio of the element body 20 can be made different from the aspect ratio of the magnetic ribbon 40 .

(1-6) According to the above embodiment, the virtual straight line VL passes through the first range AR11 of the first magnetic ribbon 41. Therefore, of the magnetic flux generated when current flows through the inductor wiring 30, most of the magnetic flux in the direction along the imaginary straight line VL in the vicinity of the first wiring end IP1 of the inductor wiring 30 is It passes through a portion excluding the end in the direction along the first axis X. That is, of the magnetic flux generated when the current flows through the inductor wiring 30, the magnetic flux passing through the ends in the direction along the first magnetic ribbon 41 is reduced. Therefore, it is possible to suppress the disturbance of the magnetic flux and the local concentration of the magnetic flux.

(1-7) According to the above embodiment, the material of the magnetic ribbon 40 contains Fe element and Si element. Therefore, a high relative magnetic permeability μr can be obtained as a magnetic material.
<Second Embodiment of Inductor Component>
A second embodiment of the inductor component will be described below. In addition, in order to facilitate understanding, the drawings may show constituent elements in an enlarged manner. The dimensional ratios of components may differ from those in reality or in other figures. In addition, although cross-sectional views are hatched, there are cases where the hatching of some components is omitted to facilitate understanding. Furthermore, there are cases where only some members among the plurality of members are given reference numerals. In addition, in the second embodiment, the description of the same configuration as in the first embodiment will be simplified or omitted.

<Overall composition>
As shown in FIG. 19 , inductor component 10 includes element body 20 and inductor wiring 30 . Inductor wiring 30 extends inside element body 20 along main surface MF. The inductor wiring 30 has a linear portion 30A extending linearly. The extending axis of the linear portion 30A of the inductor wiring 30 having the longest dimension is defined as the central axis CA. In this embodiment, the entire inductor wiring 30 is the straight portion 30A.

As shown in FIG. 20, the inductor component 10 is composed of a first portion P1, a second portion P2, and a third portion P3. The three parts P1 to P3 are arranged in this order along the second axis Z. Among the three portions P1 to P3, the first portion P1 is located at the end of the second negative direction Z2 along the second axis Z. As shown in FIG.

As shown in FIG. 20, the first portion P1 has a substantially square shape when viewed from the direction along the second axis Z. The first portion P<b>1 has a plurality of magnetic strips 40 , a plurality of nonmagnetic layers 50 , a plurality of nonmagnetic portions 60 , and a plurality of nonmagnetic films 70 . In the first portion P1, the plurality of magnetic strips 40, the plurality of nonmagnetic layers 50, the plurality of nonmagnetic portions 60, and the plurality of nonmagnetic films 70 form part of the element body 20. .

As shown in FIG. 21, each magnetic ribbon 40 of the first portion P1 is laminated in the direction along the second axis Z in the first cross-sectional view perpendicular to the central axis CA. As shown in FIG. 20, each magnetic strip 40 of the first portion P1 has a rectangular shape when viewed from the direction along the second axis Z. As shown in FIG. In the first portion P1, the shapes and dimensions of the plurality of magnetic strips 40 are all the same.

Here, as shown in FIG. 19, a second imaginary rectangle VR2 having the smallest area circumscribing each magnetic ribbon 40 constituting the first portion P1 is drawn when viewed from the direction along the second axis Z. In this embodiment, each magnetic ribbon 40 has a rectangular shape when viewed from the direction along the second axis Z, so the second imaginary rectangle VR2 matches the outer shape of each magnetic ribbon 40 . The second virtual rectangle VR2 has a long side L1 and a short side L2 shorter than the long side L1. A long side L1 of the second virtual rectangle VR2 is parallel to the central axis CA.

As shown in FIG. 21, eight magnetic ribbons 40 are arranged in parallel with the short side L2 of the second virtual rectangle VR2 via the non-magnetic portion 60. As shown in FIG. Two magnetic strips 40 are arranged in parallel with the long side L1 with the non-magnetic portion 60 interposed therebetween. That is, the plurality of magnetic strips 40 are arranged in a matrix in a direction parallel to the long side L1 and a direction parallel to the short side L2. Further, the number of magnetic strips 40 arranged in the direction parallel to the short side L2 is greater than the number arranged in the direction parallel to the long side L1.

As shown in FIG. 20, the element body 20 has non-magnetic portions 60 between adjacent magnetic strips 40 at the same position along the second axis Z. As shown in FIG. The non-magnetic portion 60 fills the entire space between the magnetic strips 40 arranged at the same position in the direction along the second axis Z. As shown in FIG. As described above, at the same position along the second axis Z, there are two magnetic ribbons 40 in the direction parallel to the long side L1 and eight magnetic ribbons 40 in the direction parallel to the short side L2, for a total of 16. There are 22 non-magnetic portions 60 . The configuration of the non-magnetic film 70 is the same as that of the first embodiment.

As shown in FIG. 19, the second portion P2 is positioned in the second positive direction Z1 when viewed from the first portion P1. The second portion P2 has the same square shape as the first portion P1 when viewed from the direction along the second axis Z. As shown in FIG.

The second portion P2 is composed of an inductor wiring 30, a plurality of magnetic ribbons 40, a plurality of non-magnetic layers 50, a non-magnetic portion 60, and a plurality of non-magnetic films .
The inductor wiring 30 has a rectangular shape having long sides and short sides shorter than the long sides in a cross section of the inductor component 10 perpendicular to the central axis CA. The inductor wiring 30 has a rectangular shape when viewed from the direction along the second axis Z, and extends linearly. The axis of the linear portion 30A of the inductor wiring 30 that extends the longest is the central axis CA. The end face of the inductor wiring 30 in the positive direction Y1 constitutes part of the outer surface of the second portion P2 and is exposed from the element body 20 . Similarly, the end face of the inductor wiring 30 in the negative direction Y2 constitutes part of the outer surface of the second portion P2 and is exposed from the element body 20 .

When viewed from the second axis Z, the end face in the positive direction Y1 and the end face in the negative direction Y2 along the central axis CA of the inductor wiring 30 are parallel to the first axis X. In addition, the central axis CA of the inductor wiring 30 is positioned at the center of the second portion P2 in the direction along the first axis X. As shown in FIG. Therefore, the central axis CA, which is the axis along which the linear portion 30A of the inductor wiring 30 extends, passes through the center of the second portion P2 in the direction along the first axis X. As shown in FIG. The dimension of the inductor wiring 30 in the direction along the first axis X is approximately one quarter of the dimension in the direction along the first axis X of the second portion P2.

In the second portion P2, portions other than the inductor wiring 30 are composed of a plurality of magnetic strips 40, a plurality of nonmagnetic layers 50, a plurality of nonmagnetic portions 60, a plurality of nonmagnetic films, as in the first portion P1. 70 and .

As shown in FIG. 21, each magnetic ribbon 40 of the second portion P2 is laminated in the direction along the second axis Z in the first cross-sectional view perpendicular to the central axis CA. As shown in FIG. 19, each magnetic ribbon 40 of the second portion P2 has a rectangular shape when viewed from the direction along the second axis Z. As shown in FIG. All the dimensions in the direction along the second axis Z of the plurality of magnetic strips 40 are the same.

As shown in FIG. 19, when viewed from the direction along the second axis Z, a second imaginary rectangle VR2 having the smallest area circumscribing each magnetic strip 40 forming the second portion P2 is drawn.
As shown in FIG. 19, in the second portion P2, the magnetic ribbon 40 is positioned on both sides of the first positive direction X1 and the first negative direction X2 along the first axis X when viewed from the inductor wiring 30. . That is, in the second portion P2, six magnetic ribbons 40 are arranged in parallel with the short side L2 with the inductor wiring 30 interposed therebetween. Also, two magnetic strips 40 are arranged at the same position along the second axis Z in a direction parallel to the long side L1 with the non-magnetic portion 60 interposed therebetween. That is, the plurality of magnetic strips 40 of the second portion P2 are arranged in a matrix in a direction parallel to the long side L1 and in a direction parallel to the short side L2.

The non-magnetic layer 50 of the second portion P2 is positioned between the magnetic strips 40 adjacent to each other in the direction along the second axis Z, similarly to the first portion P1 described above. The non-magnetic portion 60 of the second portion P2 is located between the magnetic ribbons 40 aligned at the same position along the second axis Z. As shown in FIG. The non-magnetic film 70 is located at the end of the first positive direction X1 and the end of the first negative direction X2 in the second portion P2.

The third portion P3 is located in the second positive direction Z1 of the second portion P2. The third portion P3 is composed of a plurality of magnetic ribbons 40, a plurality of nonmagnetic layers 50, a plurality of nonmagnetic portions 60, and a plurality of nonmagnetic films . The third portion P3 has a structure symmetrical with the first portion P1 with the second portion P2 interposed therebetween.

<Regarding the aspect ratio>
The aspect ratio is the ratio of the long side L1 of the second virtual rectangle VR2 to the short side L2 of the second virtual rectangle VR2. In this embodiment, the dimension of the long side L1 of the second imaginary rectangle VR2 of the first portion P1 is 990 μm. The dimension of the short side L2 of the second imaginary rectangle VR2 of the first portion P1 is 232.5 μm. Therefore, the aspect ratio of the magnetic ribbon 40 of the first portion P1 of the present embodiment is 4 or more.

In this embodiment, each magnetic ribbon 40 forming the second portion P2 has the same shape as each magnetic ribbon 40 forming the first portion P1. Therefore, the aspect ratio of the magnetic ribbon 40 is 4 or more. Furthermore, as shown in FIG. 19, when a second imaginary rectangle VR2 is drawn for each of the magnetic ribbons 40 forming the second portion P2, its long side L1 is parallel to the central axis CA.

Further, each magnetic ribbon 40 forming the third portion P3 has the same shape as each magnetic ribbon 40 forming the first portion P1. Therefore, the aspect ratio of each magnetic strip 40 forming the third portion P3 is 4 or more. Also, as shown in FIG. 19, when the second imaginary rectangle VR2 is drawn for each of the magnetic ribbons 40 forming the third portion P3, its long side L1 is parallel to the central axis CA.

<About simulation>
Next, using the inductor component 10 of the second embodiment as a second example, a simulation will be described in which the characteristics obtained in the second example are compared with the inductor component 90 of a second comparative example. Femtet (registered trademark) of Murata Software Co., Ltd. was used for the simulation.

<Simulation conditions>
The software used is Femtet 2019 manufactured by Murata Software. The solver is static magnetic field analysis. The model is three dimensional. A standard mesh size is 0.25 mm. The magnetic material is an amorphous metal magnetic thin film made of Fe, Si, Cr, and B, the relative magnetic permeability μr is 7000, and the saturation magnetic flux density Bs is 1.3T. A magnetic material BH curve that satisfies B=Bs×tanh (μ0×μr×H/Bs) was used. In addition, the portion where the relative magnetic permeability μr is 1 or more was used, and the function of Femtet2019 was used to extrapolate the magnetic permeability of the vacuum. The material of the inductor wiring 30 is copper.

The dimension of the magnetic ribbon 40 in the direction along the first axis X is 232.5 μm. The dimension of the magnetic ribbon 40 in the direction along the second axis Z is 20 μm. The dimension of the magnetic strip 40 in the direction along the central axis CA is 990 μm. The dimension of the nonmagnetic layer 50 in the direction along the second axis Z is 2 μm. The number of magnetic ribbons 40 laminated in the direction along the second axis Z is 41 pieces. The number of magnetic ribbons 40 arranged in the direction along the first axis X is eight. The number of magnetic strips 40 arranged in the direction along the central axis CA is two. The dimension in the direction along the central axis CA of the non-magnetic portion 60 positioned between the magnetic ribbons 40 adjacent in the direction along the central axis CA is 20 μm.

The dimension of the inductor wiring 30 in the direction along the first axis X is 0.5 mm. The dimension of the inductor wiring 30 in the direction along the second axis Z is 0.1 mm. The dimension of the inductor wiring 30 in the direction along the central axis CA is 2400 μm. In this simulation, the dimension of the base body 20 along the central axis CA is 2020 μm. That is, in this simulation, the dimension of the inductor wiring 30 in the direction along the central axis CA is larger than the dimension in the direction along the central axis CA of the element body 20 by 380 μm. Therefore, the simulation is performed with the inductor wiring 30 protruding by 190 μm from the end face of the element body 20 in the positive direction Y1 and the inductor wiring 30 protruding by 190 μm from the end face of the element body 20 in the negative direction Y2.

The position of the inductor wiring 30 is arranged so that the center of gravity of the inductor wiring 30 coincides with the position of the center of gravity of the element body 20 . A non-magnetic insulating gap of 100 nm was provided in the portion where the inductor wiring 30 and the magnetic ribbon 40 were in contact with each other. The relative magnetic permeability μr of the nonmagnetic material of the nonmagnetic layer 50 and the nonmagnetic portion 60 was set to 1.

A sinusoidal electric signal is input to the inductor wiring 30 of the inductor component 10 . The amplitude of the electrical signal is 2.25A and the frequency of the electrical signal is 3MHz.
In the inductor component 10 described above, the dimension along the first axis X of the non-magnetic portion 60 positioned between the magnetic strips 40 adjacent along the first axis X is defined as the AX dimension. A simulation was performed by dividing the AX dimension step by step in the range of 1 to 10.0 μm.

On the other hand, as shown in FIG. 22, the inductor component 90 of the second comparative example includes a magnetic ribbon 91, a nonmagnetic layer 92, a nonmagnetic portion 93, and inductor wiring 94 having the following dimensions.
In the inductor component 90 of the second comparative example, it is assumed that a second imaginary rectangle having a minimum area circumscribing the magnetic ribbon 91 when viewed from the direction along the second axis Z is drawn. The dimension of the magnetic ribbon 91 along the first axis X is 990 μm. The dimension of the magnetic ribbon 91 in the direction along the second axis Z is 20 μm. The dimension of the magnetic ribbon 91 in the direction along the central axis CA is 232.5 μm. That is, the aspect ratio of the long sides of the second virtual rectangle to the short sides of the second virtual rectangle is greater than four. On the other hand, the long side of the magnetic strip 91 of the second comparative example extends parallel to the first axis X. As shown in FIG. That is, the direction of the long side of the magnetic ribbon differs between the second comparative example and the second embodiment.

The number of magnetic thin ribbons 91 laminated in the direction along the second axis Z is 41 pieces. The number of the magnetic strips 91 arranged in the direction along the first axis X is two. The number of magnetic strips 91 arranged in the direction along the central axis CA is eight. The dimension of the non-magnetic layer 92 along the second axis Z is 2 μm. The dimension of the non-magnetic portion 93 positioned between the magnetic strips 91 in the direction along the central axis CA is 20 μm.

The dimension of the inductor wiring 94 in the direction along the first axis X is 0.5 mm. The dimension of the inductor wiring 94 in the direction along the second axis Z is 0.1 mm. The dimension of the inductor wiring 94 in the direction along the central axis CA is 2400 μm. In this simulation, the dimension in the direction along the central axis CA of the element including the magnetic ribbon 91 and the non-magnetic portion 93 is 2020 μm. That is, in this simulation, the dimension of the inductor wiring 94 in the direction along the central axis CA is larger than the dimension in the direction along the central axis CA of the element body by 380 μm. Therefore, the simulation is performed with the inductor wiring 94 protruding by 190 μm from the end surface of the element body in the positive direction Y1 and the inductor wiring 94 projecting by 190 μm from the end surface of the element body in the negative direction Y2.

The position of the inductor wiring 30 is arranged so that the center of gravity of the inductor wiring 94 coincides with the position of the center of gravity of the element. A non-magnetic insulating gap of 100 nm was provided in the portion where the inductor wiring 30 and the magnetic ribbon 91 were in contact. The relative magnetic permeability μr of the nonmagnetic material of the nonmagnetic layer 92 and the nonmagnetic portion 93 is set to 1.

A sinusoidal electric signal is input to the inductor wiring 94 of the inductor component 90 . The amplitude of the electrical signal is 2.25A and the frequency of the electrical signal is 3MHz.
In the inductor component 90 described above, the non-magnetic portion 93 positioned between the magnetic ribbons 91 in the direction along the first axis X and the non-magnetic portion 93 positioned between the magnetic ribbons 91 in the direction along the first axis X The dimension of the magnetic portion 93 in the direction along the first axis X is defined as the AX dimension. The simulation was performed by dividing the AX dimension step by step in the range of 1 to 10.0 μm.

<Simulation results>
As shown in FIGS. 23 and 24, the eddy current loss of inductor component 10 of the second embodiment is smaller than the eddy current loss of inductor component 90 of the second comparative example regardless of the AX dimension. rice field. In addition, in the inductor component 10 and the inductor component 90, the larger the AX dimension, the smaller the eddy current loss. Specifically, in the inductor component 10 of the second embodiment, the eddy current loss was 48.1 mW when the AX dimension was 1 μm. The larger the AX dimension of the inductor component 10, the smaller the eddy current loss. In the inductor component 10, the eddy current loss was 8.1 mW when the AX dimension was 10 μm. Also, in the inductor component 90 of the second comparative example, the eddy current loss was 185.7 mW when the AX dimension was 1 μm. The larger the AX dimension of the inductor component 90, the smaller the eddy current loss. In the inductor component 90, the eddy current loss was 23.7 mW when the AX dimension was 10 μm.

Here, the eddy current loss in the inductor component 10 of the first embodiment and the eddy current loss in the inductor component 10 of the second embodiment will be compared. For example, when the AX dimension is 1 μm, the inductor component 10 of the first embodiment has an eddy current loss of 33.8 mW. On the other hand, when the AX dimension is 1 μm, the inductor component 10 of the second embodiment has an eddy current loss of 48.1 mW. Also, when comparing the eddy current loss in the inductor components 10 of the first embodiment and the second embodiment for each AX dimension, the inductor component 10 of the second embodiment has smaller eddy current loss in all regions. ing.

<Effects of Second Embodiment>
Next, effects of the second embodiment will be described. The inductor component 10 of the second embodiment has the following effects in addition to the effects (1-1) to (1-5) and (1-7) of the first embodiment.

(2-1) In the second embodiment, the aspect ratios of the second imaginary rectangles VR2 of the magnetic ribbon 40 are all 4 or more. That is, the length of the long side L1 of the second virtual rectangle VR2 extending parallel to the central axis CA is ensured to be four times or more the length of the short side L2 of the second virtual rectangle VR2. By securing a considerable length of the long side L1 extending parallel to the central axis CA, it can be expected that the eddy current loss can be reduced more effectively.

<Other Examples>
The above embodiment can be implemented with the following modifications. The above embodiments and the following modifications can be implemented in combination within a technically consistent range.

· In the above embodiment, the shape of the element body 20 is not limited to the example of the above embodiment. For example, when viewed from the direction along the second axis Z, the shape of the base body 20 may be a rectangular shape, a polygonal shape other than a square, or the like.

- In each of the above-described embodiments, the shape of the inductor wiring 30 can be appropriately changed as long as it can give inductance L to the inductor component 10 by generating a magnetic flux in the element body 20 when a current flows. . For example, both ends of the inductor wiring 30 may protrude from the element body 20 as in the simulation described above.

The inductor wiring 30 may have an elliptical shape in a cross section perpendicular to the central axis CA. Then, a first imaginary rectangle VR1 with a minimum area, which circumscribes the inductor wiring 30 and has a first side along the first axis X and a second side along the second axis Z, is drawn. At this time, the first side of the first virtual rectangle VR1 is longer than the second side of the first virtual rectangle VR1.

Further, in the above embodiment, the shape of the inductor wiring 30 in the cross section perpendicular to the central axis CA may be such that the second side along the second axis Z is longer than the first side along the first axis X.
Furthermore, in a cross section perpendicular to the central axis CA, the shape of the inductor wiring 30 may be a shape that does not have symmetry such as linear symmetry or rotational symmetry, such as when it includes one or more projecting portions.

Furthermore, in a cross section perpendicular to the central axis CA, the shape of the inductor wiring 30 may be square or circular. In this case, the first virtual rectangle VR1 drawn in the cross section perpendicular to the central axis CA is square, and the first side of the first virtual rectangle VR1 is not longer than the second side of the first virtual rectangle VR1.

· In each of the above embodiments, the shape of the inductor wiring 30 need not be entirely linear as long as it has a linear portion 30A. For example, it may have a shape that is bent in the middle, a shape that is partially curved, or a meandering shape. When the inductor wiring 30 has a curved shape or a meandering shape, the inductor wiring 30 has a plurality of linear portions 30A. In this case, the central axis CA is the axis along which the linear portion 30A having the largest extension dimension among the plurality of linear portions 30A extends.

· In the above embodiment, the inductor wiring 30 may have a plurality of linear portions 30A having the longest dimension. In that case, the central axis CA corresponds to an axis along which one of the plurality of linear portions 30A extends, and the long side L1 of the second virtual rectangle VR2 is parallel to the central axis CA. good. That is, when there are a plurality of linear portions 30A that extend the longest in the inductor wiring 30, the long side L1 need not be parallel to all the linear portions 30A.

· In each of the above embodiments, the material of the inductor wiring 30 is not limited to the examples of the above embodiments as long as it is a conductive material. For example, the material of the inductor wiring 30 may be a conductive resin.

· In each of the above embodiments, an external electrode may be connected to the portion where the inductor wiring 30 is exposed from the element body 20 . For example, external electrodes may be formed on both end faces of the inductor wiring 30 along the central axis CA and both end faces of the base body 20 along the central axis CA by coating, printing, plating, or the like.

· In each of the above embodiments, the direction in which the magnetic ribbon 40 and the non-magnetic layer 50 are laminated may not be orthogonal to the central axis CA and the first axis X due to manufacturing errors or the like. In the above embodiment, the fact that the magnetic ribbons 40 and the like are "laminated in the direction along the second axis Z" allows for such manufacturing errors.

- In the first embodiment, the dimension of the short side L2 of the magnetic ribbon 40 adjacent to the inductor wiring 30 in the second portion P2 is half the dimension of the short sides L2 of the two magnetic ribbons 40 on both sides thereof. is not limited to That is, when the magnetic ribbons 40 having different shapes are arranged, the ratio of the short sides L2 is not limited to the example of the above embodiment.

- In each of the above-described embodiments, the number of magnetic strips 40 stacked in the direction along the second axis Z may be two or more.
- In each of the above-described embodiments, the material of the magnetic ribbon 40 is not limited to the examples of the above-described embodiments as long as it is a magnetic material. For example, it may be Fe or Ni. A metal magnetic material containing elements other than Fe, Ni, Co, Cr, Cu, Al, Si, B, and P may also be used.

· In each of the above-described embodiments, the material of the non-magnetic layer 50 is not limited to the examples of the above-described embodiments as long as it is a non-magnetic material. The non-magnetic layer 50 may be made of resin other than acrylic resin, epoxy resin, and silicon resin. The non-magnetic layer 50 may be made of non-magnetic ceramics such as alumina, silica, glass or the like, non-magnetic inorganic substances containing these, voids, or mixtures thereof. In this regard, the same applies to the nonmagnetic portion 60 and the nonmagnetic film 70 . The materials of the nonmagnetic layer 50, the nonmagnetic portion 60, and the nonmagnetic film 70 may be different from each other, or may be partially different, as long as they are nonmagnetic materials.

· In the above embodiment, the nonmagnetic layer 50, the nonmagnetic portion 60, and the nonmagnetic film 70 may be integrated or may be separate members. For example, the non-magnetic layer 50 may be hollow, or may be composed of an insulating oxide film obtained by oxidizing the surface of the magnetic ribbon 40 .

- In the above embodiment, the non-magnetic layer 50 may be omitted. In this case, the magnetic ribbons 40 adjacent to each other in the direction along the second axis Z may be in direct contact with each other.
- In the above embodiment, the non-magnetic portion 60 may be omitted. In this case, the magnetic strips 40 aligned in the direction along the first axis X or the central axis CA may be in direct contact with each other. Also, the nonmagnetic portion 60 may exist between the inductor wiring 30 and the magnetic ribbon 40 . In this case, the nonmagnetic portion 60 can ensure insulation between the inductor wiring 30 and the magnetic ribbon 40 .

Note that "a plurality of magnetic ribbons 40 are stacked" specifically means that the adjacent magnetic ribbons 40 are completely or partially insulated from each other, or a microscopically physical boundary. exists. For example, it does not include a state in which the magnetic ribbons 40 are sintered and completely integrated.

- In each of the above embodiments, the configurations of the magnetic ribbon 40, the non-magnetic layer 50, and the non-magnetic portion 60 can be changed as long as the magnetic ribbon 40 is laminated in a direction orthogonal to the main surface MF. . For example, the entire second portion P2 except for the inductor wiring 30 may be composed of the magnetic ribbon 40 or may be composed of the non-magnetic layer 50 . Further, when all the portions of the second portion P2 excluding the inductor wiring 30 are composed of the magnetic ribbon 40, the magnetic ribbon 40 may be a composite material of a powdery magnetic material and a non-magnetic material. . As such a composite material, there is a metal composite material of amorphous metal particles made of Fe, Si, Cr, and B and a resin.

- In each of the above embodiments, the number of magnetic ribbons 40 aligned in the direction parallel to the short side L2 of the second virtual rectangle VR2 may be the same as the number of the magnetic ribbons 40 aligned in the direction parallel to the long side L1. and can be less.

· In each of the above-described embodiments, the magnetic ribbons 40 do not have to be aligned in the direction parallel to the long side L1 of the second imaginary rectangle VR2 at the same position along the second axis Z. Similarly, the magnetic strips 40 do not have to be aligned in the direction parallel to the short side L2 of the second imaginary rectangle VR2 at the same position along the second axis Z.

· In each of the above embodiments, the aspect ratio of the long side L1 of the second virtual rectangle VR2 to the short side L2 of the second virtual rectangle VR2 may be less than 2 as long as it is greater than 1. In other words, the long side L1 of the magnetic strip 40 should be longer than the short side L2.

· In each of the above embodiments, the dimensions of the plurality of magnetic strips 40 in the direction along the second axis Z may be different. If the dimension of the magnetic ribbon 40 in the direction along the second axis Z is small, a manufacturing error of about 20% may occur depending on the manufacturing method. Therefore, if the dimension of the magnetic ribbons 40 in the direction along the second axis Z is 80% or more and 120% or less of the average value of the dimensions in the direction along the second axis Z of the plurality of magnetic ribbons 40, , can be regarded as approximately equal. The dimension of one magnetic strip 40 in the direction along the second axis Z is the average value of three points in a single image magnified between 1,000 and 10,000 times with an electron microscope. do. In addition, the dimension of the plurality of magnetic ribbons 40 in the direction along the second axis Z is the second dimension of one magnetic ribbon 40 measured by an electron microscope using a single image in which three or more magnetic ribbons 40 fit. It is the average value of the dimensions along the Z axis.

· The dimensions of the plurality of magnetic ribbons 40 in the direction along the second axis Z may not all be the same. They may vary from each other, or may vary by more than 20% from the average value.

· In each of the above-described embodiments, the spacing between a pair of magnetic strips 40 adjacent in the direction along the second axis Z may be different. For example, the dimensions in the direction along the second axis Z of the multiple nonmagnetic layers 50 may be different. If the dimension of the non-magnetic layer 50 along the second axis Z is small, a manufacturing error of about 20% may occur depending on the manufacturing method. Further, for example, as in the modified example described above, part of the non-magnetic layer 50 may become hollow, so that the gap between a pair of magnetic ribbons 40 adjacent to each other in the direction along the second axis Z may vary. . A gap may also exist between the non-magnetic layer 50 and the magnetic ribbon 40 . In this case, the distance between a pair of magnetic ribbons 40 adjacent in the direction along the second axis Z is the sum of the lengths of the nonmagnetic layer 50 and the gap. Therefore, the interval between one pair of magnetic ribbons 40 adjacent in the direction along the second axis Z is , 80% or more and 120% or less, they can be regarded as substantially equal. The interval between a pair of magnetic ribbons 40 adjacent in the direction along the second axis Z is the second Let it be the smallest dimension in the direction along the Z axis. In addition, the average value of the spacing between multiple sets of magnetic ribbons 40 adjacent in the direction along the second axis Z is 5 sets measured from one image in which six or more magnetic ribbons 40 are fitted with an electron microscope. is the average value of the spacing between the magnetic strips 40 of .

· The dimensions of the plurality of nonmagnetic layers 50 in the direction along the second axis Z may not all be the same. They may vary from each other, or may vary by more than 20% from the average value.

· In each of the above-described embodiments, the number and positions of the non-magnetic portions 60 are not limited to the examples of the above-described embodiments. The number and positions of the non-magnetic portions 60 may be changed according to the number and positions of the magnetic strips 40 in the direction along the first axis X and in the direction along the central axis CA. Also, the size of the non-magnetic portion 60 may be appropriately changed according to the interval between the magnetic ribbons 40 at the same position in the direction along the second axis Z. FIG.

- In the above-described embodiment, the virtual straight line VL preferably passes through the first range AR11 of the five magnetic ribbons 40, including the first magnetic ribbons 41, which are continuously arranged in the direction along the second axis Z. It is more preferable to pass through the first range AR11 of the magnetic ribbon 40 of . Therefore, the virtual straight line VL does not have to pass through substantially the center of all the magnetic ribbons 40 in the direction along the first axis X.

· In the above-described first embodiment, the position of the inductor wiring 30 in the direction along the first axis X is not limited to the example of the above-described embodiment. The position of the first wiring end IP1 of the inductor wiring 30 in the direction along the first axis X may be outside the first range AR11 of the first magnetic ribbon 41 . For example, the virtual straight line VL may pass over the non-magnetic portion 60 instead of within the first range AR11.

· In each of the above embodiments, the method of manufacturing the inductor component 10 is not limited to the examples of the above embodiments. For example, the magnetic ribbons 40 and the non-magnetic layers 50 may be alternately laminated on both sides of the sheet on which the inductor wiring 30 is arranged.

DESCRIPTION OF SYMBOLS 10... Inductor component 20... Element body 30... Inductor wiring 30A... Straight line part 40... Magnetic ribbon 41... First magnetic ribbon 50... Non-magnetic layer 60... Non-magnetic part 70... Non-magnetic film CA... Central axis L1... Length Side L2... Short side MF... Main surface VL... Virtual straight line VR1... First virtual rectangle VR2... Second virtual rectangle X... First axis Z... Second axis

Claims (8)

1. an element body including a plurality of flat magnetic ribbons made of a magnetic material, wherein the plurality of magnetic ribbons are laminated in a direction orthogonal to the main surface of the magnetic ribbon;
   an inductor wiring extending along the main surface inside the base body,
   The inductor wiring has a linear portion extending linearly,
   The axis along which the linear portion with the largest extension dimension extends is the central axis, the axis along the main surface in a cross-sectional view perpendicular to the central axis is the first axis, and the axis perpendicular to the main surface in the cross-sectional view is the first axis. When drawing a virtual rectangle with two axes and a minimum area circumscribing the magnetic ribbon when viewed from the direction along the second axis,
   The virtual rectangle has long sides and short sides shorter than the long sides, and the long sides are parallel to the central axis.
2. 2. The inductor component according to claim 1, wherein the aspect ratio is 2 or more when the ratio of the long side to the short side is defined as an aspect ratio.
3. 3. The inductor component according to claim 2, wherein said aspect ratio is 4 or more.
4. The inductor component according to any one of claims 1 to 3, wherein the plurality of magnetic ribbons are arranged in a matrix in a direction parallel to the long side and in a direction parallel to the short side.
5. 5. The inductor according to claim 4, wherein the element includes a non-magnetic portion made of a non-magnetic material between the magnetic ribbons adjacent to each other in a direction parallel to the long side or in a direction parallel to the short side. parts.
6. 6. The inductor according to claim 4, wherein the plurality of magnetic ribbons arranged in the direction parallel to the short sides are larger in number than the magnetic ribbons arranged in the direction parallel to the long sides. parts.
7. When one of the two directions along the first axis is defined as the first positive direction,
   In the cross-sectional view,
   The end of the inductor wiring in the first positive direction is defined as a first wiring end,
   Among the magnetic ribbons laminated in the direction along the second axis with respect to the inductor wiring, the magnetic ribbon having the shortest distance in the direction along the second axis from the end of the first wiring is selected as the first magnetic ribbon. as a magnetic strip,
   When a range excluding both ends of the magnetic ribbon in the direction along the first axis is defined as a first range,
   Claims 1 to 6, wherein when an imaginary straight line passing through the first wiring end and extending in a direction along the second axis is drawn, the imaginary straight line passes through the first range of the first magnetic ribbon. The inductor component according to any one of .
8. The inductor component according to any one of claims 1 to 7, wherein the magnetic ribbon contains Fe element and Si element.

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