WO2022181180A1 - Inductor component - Google Patents

Abstract

A plurality of thin magnetic strips (40A to 40F) are layered in a direction orthogonal to a main surface of the thin magnetic strips (40A to 40F). In the cross section orthogonal to the central axis of an inductor wiring, the axis along the main surface is a first axis (X), and the axis orthogonal to the main surface in the cross section is a second axis (Z). An element assembly has the plurality of thin magnetic strips (40A to 40F) and a plurality of non-magnetic layers (50A to 50E). The plurality of thin magnetic strips (40A to 40F) are layered along the second axis (Z). Each of the non-magnetic layers (50A to 50E) is positioned between thin magnetic strips (40A to 40F) adjacent along the second axis (Z). The average value of the dimension of the thin magnetic strips (40A to 40F) in the direction along the second axis (Z) is the thin magnetic strip thickness, and the average value of the dimension of the non-magnetic layers (50A to 50E) in the direction along the second axis (Z) is the non-magnetic layer thickness. In this case, the percentage of the non-magnetic layer thickness with respect to the thin magnetic strip thickness is greater than 3%.

Description

inductor components

The present disclosure relates to inductor components.

The inductor component described in Patent Document 1 includes an element body and inductor wiring extending inside the element body. The body is made of inorganic filler and resin. For example, in the magnetic composite body, the material of the inorganic filler is a magnetic material. Moreover, the average particle size of the inorganic filler is 5 μm or less.

JP 2019-192920 A

In the inductor component described in Patent Document 1, various characteristics of the inductor component are improved by increasing the filling rate of the inorganic filler in the element body. However, the inductor component described in Patent Document 1 assumes a structure in which inorganic filler particles are randomly dispersed in the element, and no other structure of the magnetic material in the element is studied.

In order to solve the above problems, the present invention includes a plurality of flat magnetic ribbons made of a magnetic material, wherein the plurality of magnetic ribbons are laminated in a direction perpendicular to the main surface of the magnetic ribbons. and an inductor wiring extending along the main surface inside the base body, and the main body in a cross-sectional view orthogonal to the central axis, with the axis along which the inductor wiring extends as a central axis. When an axis along the surface is defined as a first axis and an axis perpendicular to the main surface in the cross-sectional view is defined as a second axis, the element is positioned between the magnetic ribbons adjacent to each other along the second axis. a plurality of non-magnetic layers made of a non-magnetic material, wherein an average value of dimensions of the plurality of magnetic ribbons in a direction along the second axis is defined as a thickness of the magnetic ribbon; In the inductor component, the percentage of the thickness of the non-magnetic layer to the thickness of the magnetic ribbon is greater than 3%, where the average value of the dimension along the second axis is the thickness of the non-magnetic layer.

A magnetic field is generated when a current is passed through the inductor wiring. When a magnetic field is generated, the magnetic flux passes through the magnetic ribbon that constitutes the element body, and an eddy current is generated in the magnetic ribbon. The larger the eddy current, the larger the eddy current loss of the inductor component, which is the loss caused by the generation of the eddy current.

According to the above inductor component, the element body includes a plurality of magnetic ribbons laminated along the second axis, a plurality of nonmagnetic layers made of a nonmagnetic material and positioned between adjacent magnetic ribbons, have. That is, the above inductor component has a regular structure of magnetic ribbons stacked along the second axis.

Here, in the above inductor component, the thickness of the non-magnetic layer affects the eddy current loss that occurs. When the percentage of the thickness of the non-magnetic layer to the thickness of the magnetic ribbon is greater than 3%, the occurrence of eddy current loss can be suppressed.

It should be noted that "along" includes cases in which there is no direct contact, but at a distance. For example, "along the first axis" means not only those that are in direct contact with the first axis and along the first axis, but also those that are not in direct contact with the first axis and are along the first axis at a distance. Also includes Also, "along" means that they are substantially in parallel, and includes those that are slightly inclined due to manufacturing errors or the like.

It is possible to suppress the occurrence of eddy current loss in inductor parts in which multiple magnetic ribbons are laminated.

3 is an exploded perspective view of an inductor component; FIG. 2 is a plan view of the first portion of the inductor component; FIG. FIG. 3 is a cross-sectional view of the inductor component taken along line 3-3 in FIG. 2; FIG. 4 is a partially enlarged view of FIG. 3; Explanatory drawing of the manufacturing method of inductor components. Explanatory drawing of the manufacturing method of inductor components. Explanatory drawing of the manufacturing method of inductor components. Explanatory drawing of the manufacturing method of inductor components. Explanatory drawing of the manufacturing method of inductor components. Explanatory drawing of the manufacturing method of inductor components. Explanatory drawing of the manufacturing method of inductor components. Explanatory drawing of the manufacturing method of inductor components. Explanatory drawing of the manufacturing method of inductor components. Explanatory drawing of the manufacturing method of inductor components. Explanatory drawing of the manufacturing method of inductor components. Explanatory drawing of the manufacturing method of inductor components. A graph showing the results of the simulation. Sectional drawing of the inductor component of a modification.

<One Embodiment of Inductor Component>
An embodiment of the inductor component will be described below. In addition, in order to facilitate understanding, the drawings may show constituent elements in an enlarged manner. The dimensional ratios of components may differ from those in reality or in other figures. In addition, although cross-sectional views are hatched, there are cases where the hatching of some components is omitted to facilitate understanding. Furthermore, there are cases where only some members among the plurality of members are given reference numerals.

(overall structure)
As shown in FIG. 1 , inductor component 10 includes element body 20 and inductor wiring 30 . The element body 20 has a plurality of magnetic strips 40 , a plurality of nonmagnetic layers 50 , a plurality of nonmagnetic portions 60 , and a plurality of nonmagnetic films 70 .

The magnetic ribbon 40 is flat. A plurality of magnetic ribbons 40 are laminated in a direction orthogonal to the main surface MF of the magnetic ribbons 40 . The flat plate shape means a thin shape having the main surface MF, but it is not limited to a rectangular parallelepiped with a thin thickness. , there may be holes inside.

The inductor wiring 30 extends linearly along the main surface MF inside the element body 20 . The axis along which inductor wiring 30 extends is defined as central axis CA. In this embodiment, the direction in which the central axis CA extends matches the direction in which one of the sides of the quadrangular main surface MF extends.

As shown in FIG. 3, in a cross-sectional view perpendicular to the central axis CA, the axis along the main surface MF is defined as a first axis X, and the axis perpendicular to the main surface MF is defined as a second axis Z. One of the directions along the first axis X is defined as a first positive direction X1, and the other direction along the first axis X is defined as a first negative direction X2. One of the directions along the central axis CA is defined as a positive direction Y1, and the other direction along the central axis CA is defined as a negative direction Y2. Further, one of the directions along the second axis Z is defined as a second positive direction Z1, and the other direction along the second axis Z is defined as a second negative direction Z2.

As shown in FIG. 1, the inductor component 10 is composed of a first portion P1, a second portion P2, and a third portion P3, which are sequentially laminated along the second axis Z. Among the three portions P1 to P3, the first portion P1 is located at the end of the second negative direction Z2 along the second axis Z. As shown in FIG.

As shown in FIG. 2, the first portion P1 has a square shape when viewed from the direction along the second axis Z. The first portion P<b>1 has a plurality of magnetic strips 40 , a plurality of nonmagnetic layers 50 , a plurality of nonmagnetic portions 60 , and a plurality of nonmagnetic films 70 .

As shown in FIG. 3, each magnetic ribbon 40 of the first portion P1 is laminated in the direction along the second axis Z in a cross-sectional view perpendicular to the central axis CA. As shown in FIG. 2, each magnetic ribbon 40 of the first portion P1 has a square shape when viewed from the direction along the second axis Z. As shown in FIG. When viewed along the second axis Z, each side of each magnetic ribbon 40 is parallel to the first axis X or the central axis CA.

At the same position along the second axis Z, two magnetic ribbons 40 are arranged side by side in the direction along the third axis perpendicular to the second axis Z with a gap therebetween. Also, two magnetic strips 40 are arranged at the same position along the second axis Z with a gap in the direction along the fourth axis perpendicular to the second axis Z and the third axis. The third axis coincides with the central axis CA, and the fourth axis coincides with the first axis X. Therefore, in this embodiment, the magnetic strips 40 are arranged not only in the direction along the second axis Z, but also in the directions along the first axis X and the central axis CA.

The magnetic ribbon 40 is made of a magnetic material. The magnetic material is, for example, a metallic magnetic material containing Fe, Ni, Co, Cr, Cu, Al, Si, B, P and the like. In this embodiment, the magnetic material is a metallic magnetic material containing Fe and Si.

As shown in FIG. 3, the non-magnetic layer 50 is located between the magnetic ribbons 40 adjacent to each other in the direction along the second axis Z. As shown in FIG. The non-magnetic layer 50 fills all the spaces between the adjacent magnetic strips 40 in the direction along the second Z axis. The non-magnetic layer 50 is made of a non-magnetic material. The non-magnetic material is, for example, acrylic resin, epoxy resin, or silicone resin. In addition, in FIG. 3, the non-magnetic layer 50 is illustrated by lines.

As shown in FIG. 2, the non-magnetic portion 60 is located between the magnetic ribbons 40 arranged at the same position along the second axis Z. As shown in FIG. The non-magnetic portion 60 fills the entire space between the magnetic strips 40 arranged at the same position in the direction along the second axis Z. As shown in FIG. As described above, at the same position along the second axis Z, there are a total of four magnetic ribbons 40, two along the central axis CA and two along the first axis X. There are four magnetic parts 60 . The non-magnetic portion 60 is made of a non-magnetic material. In this embodiment, the material of the non-magnetic portion 60 is the same material as that of the non-magnetic layer 50 .

The non-magnetic film 70 is located at the end of the first positive direction X1 along the first axis X and the end of the first negative direction X2 opposite to the first positive direction X1 in the first portion P1. . The non-magnetic film 70 covers the entire end surfaces of the magnetic ribbon 40 in the direction along the first axis X. As shown in FIG. In addition, the non-magnetic film 70 covers the entire end surfaces of the non-magnetic layer 50 in the direction along the first axis X. As shown in FIG. Furthermore, the non-magnetic film 70 covers the entire end surfaces of the non-magnetic portion 60 in the direction along the first axis X. As shown in FIG. Therefore, the end faces of the first portion P1 in the first positive direction X1 along the first axis X are all composed of the non-magnetic film 70 . Similarly, the end face of the first portion P1 along the first axis X in the first negative direction X2 is entirely composed of the non-magnetic film 70 . The non-magnetic film 70 is made of a non-magnetic material. In this embodiment, the material of the non-magnetic film 70 is the same as that of the non-magnetic layer 50 .

As shown in FIG. 1, the second portion P2 is located in the second positive direction Z1 that is opposite to the second negative direction Z2 along the second axis Z when viewed from the first portion P1. The second portion P2 has the same square shape as the first portion P1 when viewed from the direction along the second axis Z. As shown in FIG.

The second portion P2 is composed of an inductor wiring 30, a plurality of magnetic strips 40, a plurality of non-magnetic layers 50, a plurality of non-magnetic portions 60, and a plurality of non-magnetic films .
The inductor wiring 30 has a rectangular shape when viewed from the direction along the second axis Z, and extends linearly along the central axis CA. The end face of the inductor wiring 30 in the positive direction Y1 along the central axis CA constitutes part of the outer surface of the second portion P2 and is exposed from the element body 20. As shown in FIG. Similarly, the end face of the inductor wiring 30 in the negative direction Y2, which is the opposite direction to the positive direction Y1 along the central axis CA, constitutes part of the outer surface of the second portion P2 and is exposed from the element body 20. there is

When viewed from the second axis Z, the end face of the inductor wiring 30 in the positive direction Y1 and the end face in the negative direction Y2 are parallel to the first axis X. In addition, the central axis CA of the inductor wiring 30 is positioned at the center of the second portion P2 in the direction along the first axis X. As shown in FIG. Therefore, the central axis CA, which is the axis along which the inductor wiring 30 extends, passes through the center of the second portion P2 in the direction along the first axis X. As shown in FIG. The dimension along the first axis X of the inductor wiring 30 is half the dimension along the first axis X of the second portion P2.

The material of the inductor wiring 30 is a conductive material. Conductive materials are, for example, Cu, Ag, Au, Al, or alloys thereof. In this embodiment, the material of the inductor wiring 30 is Cu.

As shown in FIG. 3, the inductor wiring 30 has a rectangular shape in a cross section perpendicular to the central axis CA. Here, in a cross section perpendicular to the central axis CA, a virtual rectangle VR with a minimum area is drawn that circumscribes the inductor wiring 30 and has a first side along the first axis X and a second side along the second axis Z. . In this embodiment, the inductor wiring 30 is rectangular in the cross section perpendicular to the central axis CA. Further, the long side of the outer shape of the inductor wiring 30 is along the first axis X in the cross section perpendicular to the central axis CA. Furthermore, the short side of the inductor wiring 30 is along the second axis Z in the cross section orthogonal to the central axis CA. Therefore, the virtual rectangle VR matches the contour of the inductor wiring 30 . A first side of the virtual rectangle VR is longer than a second side of the virtual rectangle VR.

In the second portion P2, portions other than the inductor wiring 30 are composed of a plurality of magnetic strips 40, a plurality of nonmagnetic layers 50, a plurality of nonmagnetic portions 60, a plurality of nonmagnetic films, as in the first portion P1. 70 and .

As shown in FIG. 3, each magnetic ribbon 40 of the second portion P2 is laminated in a direction along the second axis Z in a cross-sectional view perpendicular to the central axis CA. As shown in FIG. 2, each magnetic strip 40 of the second portion P2 has a rectangular shape when viewed from the direction along the second axis Z. As shown in FIG. The long side of each magnetic strip 40 is parallel to the central axis CA when viewed from the direction along the second axis Z. As shown in FIG.

As shown in FIG. 1, in the second portion P2, the magnetic ribbon 40 is positioned on both sides of the first positive direction X1 and the first negative direction X2 along the first axis X when viewed from the inductor wiring 30. . That is, in the second portion P2, two magnetic ribbons 40 are arranged in a line along the first axis X with the inductor wiring 30 interposed therebetween. In addition, two magnetic strips 40 are arranged at the same position along the second axis Z and spaced apart in the direction along the central axis CA.

The non-magnetic layer 50 of the second portion P2 is positioned between the magnetic strips 40 adjacent to each other in the direction along the second axis Z, similarly to the first portion P1 described above. That is, as shown in FIG. 3, the magnetic ribbons 40 and the non-magnetic layers 50 are alternately laminated in the direction along the second axis Z, similar to the first portion P1.

The non-magnetic portion 60 of the second portion P2 is located between the magnetic strips 40 arranged at the same position along the second axis Z. The non-magnetic portion 60 fills the entire space between the magnetic strips 40 arranged at the same position in the direction along the second axis Z. As shown in FIG. The position of the non-magnetic portion 60 of the second portion P2 overlaps part of the non-magnetic portion 60 of the first portion P1 when viewed from the direction along the second axis Z. As shown in FIG. The non-magnetic portion 60 of the second portion P2 is continuous with the non-magnetic portion 60 of the first portion P1. The non-magnetic portion 60 does not exist between the inductor wiring 30 and the magnetic ribbon 40 in the second portion P2.

The nonmagnetic film 70 is located at the end of the first positive direction X1 along the first axis X and the end of the first negative direction X2, which is the opposite direction to the first positive direction X1, in the second portion P2. . The non-magnetic film 70 of the second portion P2 is continuous with the non-magnetic film 70 of the first portion P1.

The third portion P3 is located in the second positive direction Z1 of the second portion P2. When viewed from the second axis Z, the third portion P3 has the same square shape as the first portion P1. The third portion P3 is composed of a plurality of magnetic ribbons 40, a plurality of nonmagnetic layers 50, a plurality of nonmagnetic portions 60, and a plurality of nonmagnetic films . In the present embodiment, the third portion P3 has a structure symmetrical with the first portion P1 with the second portion P2 interposed therebetween, and thus detailed description thereof will be omitted. Thus, the element body 20 includes a plurality of magnetic ribbons 40 , a plurality of nonmagnetic layers 50 , a plurality of nonmagnetic portions 60 , and a plurality of nonmagnetic films 70 .

(Regarding the thickness of the magnetic ribbon and the thickness of the non-magnetic layer)
The dimensions of the magnetic ribbon 40 and the non-magnetic layer 50 in the direction along the second axis Z will be described in detail. The dimensions of the magnetic strips 40 in the direction along the second axis Z vary by up to about 20% for each magnetic strip 40 due to manufacturing errors. Also, the dimensions of the non-magnetic layer 50 along the second axis Z vary by up to about 20% due to manufacturing errors.

Here, the average value of the dimensions of the magnetic ribbon 40 in the direction along the second axis Z is defined as the magnetic ribbon thickness Tm, and the average value of the dimensions in the direction along the second axis Z of the nonmagnetic layer 50 is defined as the nonmagnetic layer thickness Tm. Let the thickness be Tnm. A method for measuring each thickness will be described.

First, the dimension of each magnetic ribbon 40 in the direction along the second axis Z is measured. As shown in FIG. 4, one image is taken with an electron microscope so that six magnetic ribbons 40 and five nonmagnetic layers 50 are contained in a cross section perpendicular to the central axis CA. In the image, the magnetic ribbons 40 arranged in the second positive direction Z1 along the second axis Z are divided into magnetic ribbons 40A, 40B, 40C, 40D, and 40D. 40E and magnetic ribbon 40F. In this case, in the image, the minimum dimension of the magnetic ribbon 40A in the direction along the second axis Z is measured as the first dimension Tm1. Similarly, in the image, the minimum dimension of the magnetic ribbon 40B in the direction along the second axis Z is measured as the second dimension Tm2. Similarly, in the image, the minimum dimension of the magnetic ribbon 40C in the direction along the second axis Z is measured as the third dimension Tm3. Similarly, in the image, the minimum dimension of the magnetic ribbon 40D in the direction along the second axis Z is measured as a fourth dimension Tm4. Similarly, in the image, the minimum dimension of the magnetic ribbon 40E in the direction along the second axis Z is measured as a fifth dimension Tm5.

Then, the average value of these first dimension Tm1 to fifth dimension Tm5 is calculated as the magnetic ribbon thickness Tm. In the above embodiment, the magnetic ribbon thickness Tm is 20 μm. Further, each of the first dimension Tm1 to the fifth dimension Tm5 is 80% or more and 120% or less of the magnetic ribbon thickness Tm.

Next, the dimension of the non-magnetic layer 50 in the direction along the second axis Z is measured. As shown in FIG. 4, the nonmagnetic layer 50 positioned between the magnetic ribbons 40A and 40B in the same image obtained by measuring the magnetic ribbon thickness Tm is referred to as the nonmagnetic layer 50A. The nonmagnetic layer 50 positioned between the magnetic ribbon 40B and the magnetic ribbon 40C is referred to as a nonmagnetic layer 50B. The nonmagnetic layer 50 located between the magnetic ribbon 40C and the magnetic ribbon 40D is referred to as a nonmagnetic layer 50C. The non-magnetic layer 50 located between the magnetic ribbon 40D and the magnetic ribbon 40E is referred to as a non-magnetic layer 50D. The non-magnetic layer 50 located between the magnetic ribbons 40E and 40F is referred to as a non-magnetic layer 50E.

In the image shown in FIG. 4, the minimum dimension of the non-magnetic layer 50A in the direction along the second axis Z is measured as the first dimension Tnm1. The minimum dimension of the non-magnetic layer 50B in the direction along the second axis Z is measured as a second dimension Tnm2. The minimum dimension of the nonmagnetic layer 50C in the direction along the second axis Z is measured as a third dimension Tnm3. The minimum dimension of the non-magnetic layer 50D in the direction along the second axis Z is measured as a fourth dimension Tnm4. The minimum dimension of the nonmagnetic layer 50E in the direction along the second axis Z is measured as a fifth dimension Tnm5.

Then, the average value of these first dimension Tnm1 to fifth dimension Tnm5 is calculated as the non-magnetic layer thickness Tnm. In the above embodiment, the non-magnetic layer thickness Tnm is greater than 3 μm. Therefore, the percentage of the non-magnetic layer thickness Tnm to the magnetic ribbon thickness Tm is greater than 15%. That is, the nonmagnetic layer thickness Tnm is greater than 0.6 μm, and the percentage of the nonmagnetic layer thickness Tnm to the magnetic ribbon thickness Tm is greater than 3%. Furthermore, each of the first dimension Tnm1 to the fifth dimension Tnm5 is 80% or more and 120% or less of the non-magnetic layer thickness Tnm.

(Regarding the first magnetic ribbon)
As shown in FIG. 3, in a cross-sectional view orthogonal to the central axis CA, the end of the inductor wiring 30 in the first positive direction X1 is defined as a first wiring end IP1. Further, in a cross-sectional view orthogonal to the central axis CA, the end of the inductor wiring 30 in the first negative direction X2 is defined as a second wiring end IP2.

Then, among the magnetic ribbons 40 laminated in the direction along the second axis Z with respect to the inductor wiring 30, the magnetic ribbon 40 having the shortest distance along the second axis Z from the first wiring end IP1 is selected as the first magnetic ribbon 40. 1 magnetic ribbon 41 . Note that the magnetic ribbon 40, which at least partially overlaps with the inductor wiring 30 when viewed from the direction along the second axis Z, is laminated in the direction along the second axis Z with respect to the inductor wiring 30. is 40. Therefore, in the present embodiment, the magnetic ribbon 40 in the first portion P1 and the magnetic ribbon 40 in the third portion P3 are laminated in the direction along the second axis Z with respect to the inductor wiring 30. be. On the other hand, the magnetic ribbon 40 in the second portion P2 is not laminated in the direction along the second axis Z with respect to the inductor wiring 30 . In addition, the first magnetic ribbon 41 is the magnetic ribbon 40 located most in the second negative direction Z2 among the magnetic ribbons 40 in the first portion P1, and the magnetic ribbon 40 most located in the second negative direction Z2 among the magnetic ribbons 40 in the third portion P3. and the magnetic ribbon 40 located in the positive direction Z1.

As shown in FIG. 3, in one magnetic strip 40, the end in the first positive direction X1 is the first end MP1, and the end in the first negative direction X2 is the second end MP2. At this time, the range excluding both ends of one magnetic strip 40 in the direction along the first axis X is defined as a first range AR1. In other words, in one magnetic strip 40, the coordinates indicating the position of the second end MP2 in the direction along the first axis X are set to zero. In one magnetic strip 40, let 1 be the coordinate indicating the position of the first end MP1 in the first positive direction X1 along the first axis X in the direction along the first axis X. As shown in FIG. At this time, the range in which the coordinates indicating the position in the direction along the first axis X are larger than 0 and smaller than 1 is the first range AR1. Then, as shown in FIG. 3, a first imaginary straight line VL1 is drawn in a direction along the second axis Z while passing through the first wiring end IP1. At this time, the first virtual straight line VL1 passes through the first range AR1 of the first magnetic ribbon 41 .

Further, in the present embodiment, a plurality of magnetic ribbons 40 are continuously laminated in the second positive direction Z1 with respect to the inductor wiring 30 in the first portion P1. In a cross-sectional view perpendicular to the central axis CA, the first imaginary straight line VL1 is the first magnetic strip 40 among the plurality of magnetic strips 40 continuously laminated in the second positive direction Z1 from the first magnetic strip 41. It passes through the first range AR1 of two or more magnetic ribbons 40 that are continuously laminated including the ribbon 41 . Specifically, the first imaginary straight line VL1 is the first straight line of all the magnetic ribbons 40 continuously stacked on the first magnetic ribbon 41 among the magnetic ribbons 40 included in the first portion P1. It passes through the range AR1.

A second imaginary straight line extending along the second axis Z passes through a second end MP2 in a first negative direction X2, which is the opposite direction of the first positive direction X1 along the first axis X of the first magnetic ribbon 41. Subtract VL2. At this time, the second virtual straight line VL2 passes through the inductor wiring 30 . In this embodiment, it is positioned substantially at the center of the inductor wiring 30 in the direction along the first axis X. As shown in FIG.

In addition, in the present embodiment, the inductor component 10 has a line-symmetrical structure with the second axis Z passing through the center in the direction along the first axis X as the axis of symmetry. Here, a third imaginary straight line VL3 is drawn in a direction along the second axis Z while passing through the second wiring end IP2 of the inductor wiring 30 . Among the magnetic ribbons 40 laminated in the direction along the second axis Z with respect to the inductor wiring 30, the magnetic ribbon 40 having the shortest distance along the second axis Z from the second wiring end IP2 is selected as the first magnetic ribbon 40. 2 magnetic ribbon 42 . In this case, the third imaginary straight line VL3 passes through the first range AR1 of the second magnetic ribbon 42 in a cross-sectional view orthogonal to the central axis CA. More specifically, the third imaginary straight line VL3 passes through the center of the second magnetic ribbon 42 in the direction along the first axis X. As shown in FIG.

In addition, in the present embodiment, in a cross-sectional view perpendicular to the central axis CA, the third imaginary straight line VL3 is the first line of the two or more magnetic ribbons 40 including the second magnetic ribbon 42 that are continuously laminated. It passes through the range AR1. Specifically, the third imaginary straight line VL3 is the first straight line of all the magnetic ribbons 40 continuously stacked on the second magnetic ribbon 42 among the magnetic ribbons 40 included in the first portion P1. It passes through the range AR1.

Furthermore, in a cross-sectional view orthogonal to the central axis CA, the third imaginary straight line VL3 is continuously laminated including the second magnetic ribbon 42 among the magnetic ribbons 40 included in the third portion P3. It passes through the first range AR1 of two or more magnetic ribbons 40 . Specifically, the third imaginary straight line VL3 is the first straight line of all the magnetic ribbons 40 continuously stacked on the second magnetic ribbon 42 among the magnetic ribbons 40 included in the third portion P3. It passes through the range AR1. More specifically, the third imaginary straight line VL3 passes through the centers of all the magnetic ribbons 40 that are continuously stacked on the second magnetic ribbon 42 . In this manner, it is preferable that the third imaginary straight line VL3 passes through the first range AR1 with respect to the second magnetic ribbon 42 in a cross-sectional view perpendicular to the central axis CA.

(Manufacturing method of inductor component)
Next, a method for manufacturing inductor component 10 will be described.
As shown in FIG. 5, first, a copper foil preparation step for preparing a copper foil 81 is performed. Since the copper foil 81 constitutes the inductor wiring 30 , the thickness of the copper foil 81 is prepared to have a thickness necessary for the inductor wiring 30 . In the following description, it is assumed that the copper foil 81 is arranged such that the two main surfaces of the copper foil 81 are orthogonal to the second axis Z, and a cross section orthogonal to the central axis CA is shown. do.

Next, as shown in FIG. 6, when viewed from the direction along the second axis Z of both principal surfaces of the copper foil 81 perpendicular to the second axis Z, the plurality of magnetic ribbons in the second portion P2 A first covering step is performed to cover areas other than the area occupied by 40 . Specifically, first, of the surface of the copper foil 81 facing the second negative direction Z2 along the second axis Z, a first covering portion that covers the second portion P2 other than the range occupied by the plurality of magnetic strips 40. form 82; In forming the first covering portion 82, the entire surface of the copper foil 81 along the second axis Z and facing the second negative direction Z2 is coated with a photosensitive dry film resist. Next, the dry film resist is cured by exposing the portion where the first covering portion 82 is to be formed. Next, similarly, a dry film resist is applied to the surface of the copper foil 81 facing the second positive direction Z1 along the second axis Z, and the portion where the first covering portion 82 is to be formed is exposed to light. Cure the dry film resist. After that, the uncured portion of the applied dry film resist is peeled off with a chemical solution. As a result, the hardened portion of the applied dry film resist is formed as the first covering portion 82 . Note that photolithography in other steps described later is also the same step, and detailed description thereof will be omitted.

Next, as shown in FIG. 7, a copper foil etching step is performed to etch the copper foil 81 exposed from the first covering portion 82 . By etching the copper foil 81 partially covered with the first covering portion 82, the exposed copper foil 81 is removed.

Next, as shown in FIG. 8, a first covering portion removing step for removing the first covering portion 82 is performed. Specifically, the first covering portion 82 is peeled off by wet etching the first covering portion 82 with a chemical.

Next, a second covering step is performed to cover the range occupied by the plurality of magnetic ribbons 40 when viewed from the direction along the second axis Z of both surfaces of the copper foil 81 orthogonal to the second axis Z. Specifically, first, as shown in FIG. 9, the dry film resist R is applied to the entire surface of the copper foil 81 along the second axis Z and facing the second positive direction Z1. Next, as shown in FIG. 10, by photolithography, the surface of the copper foil 81 facing the second positive direction Z1 along the second axis Z is formed into a magnetic thin film when viewed from the direction along the second axis Z. A second covering portion 83 covering areas other than the area occupied by the band 40 and the non-magnetic layer 50 is formed. After that, similarly, by photolithography, the magnetic ribbon 40 and the non-magnetic ribbon 40 are formed by photolithography when viewed from the direction along the second axis Z of the surface facing the second negative direction Z2 along the second axis Z of the copper foil 81 . A second covering portion 83 is formed to cover areas other than the area occupied by the layer 50 .

Next, a layered body preparation step is performed to prepare a layered body 84 in which the magnetic ribbon 40 and the non-magnetic layer 50 are layered.
First, for example, a ribbon is prepared as the magnetic ribbon 40 . The ribbon is made of, for example, NANOMET (registered trademark) manufactured by Tohoku Magnet Institute, Metglas (registered trademark) or FINEMET (registered trademark) manufactured by Hitachi Metals, FeSiB, FeSiBCr, or the like. This strip is cut into 10 mm squares. A non-magnetic material such as an epoxy resin film is laminated on the cut strip. The epoxy resin film has a predetermined thickness greater than 3% of the ribbon thickness. In this embodiment, the percentage of the thickness of the epoxy resin film to the thickness of the ribbon is greater than 15%, and the thickness of the epoxy resin film is greater than 3 μm. Furthermore, the cut ribbon is laminated on the laminated epoxy resin film. After alternately laminating the thin strips and the non-magnetic material in this manner, the thin strips and the non-magnetic material are hardened and adhered by a vacuum heating and pressurizing device. Then, by dicing into a desired size, a laminate 84 in which a plurality of magnetic ribbons 40 and nonmagnetic layers 50 are laminated can be prepared. In this embodiment, the laminate 84 includes a first laminate 84A that forms the magnetic ribbon 40 and the non-magnetic layer 50 in the first portion P1 and the third portion P3, and a magnetic ribbon 40 and the non-magnetic layer 50 in the second portion P2. Two types are prepared, namely, the second laminate 84B that constitutes the magnetic layer 50 .

Next, a laminate arrangement step for arranging the laminate 84 is performed.
As shown in FIG. 11, of the laminate 84, the first laminate 84A constituting the magnetic ribbon 40 and the non-magnetic layer 50 in the third portion P3 is placed in the second positive direction along the second axis Z of the copper foil 81. Temporarily adhered to the surface facing the direction Z1 with a thermoplastic adhesive 85 . The thermoplastic adhesive 85 is indicated by thick lines in FIGS. 11 to 16. FIG.

Next, as shown in FIG. 12, the whole is inverted in the direction along the second axis Z. Then, as shown in FIG. 13, of the laminate 84, the second laminate 84B constituting the magnetic ribbon 40 and the non-magnetic layer 50 in the second portion P2 is aligned along the second axis Z of the first laminate 84A. It is arranged on a portion not in contact with the copper foil 81 of the surface facing the second positive direction Z1. Specifically, the second laminate 84B can be arranged by pressing the laminate 84 into the opening of the copper foil 81 by pressing or the like.

Next, as shown in FIG. 14, the first laminate 84A constituting the magnetic ribbon 40 and the non-magnetic layer 50 in the first portion P1 of the laminate 84 is moved along the second axis Z of the copper foil 81. The thermoplastic adhesive 85 temporarily adheres to the surface facing the second positive direction Z1 and the surface facing the second positive direction Z1 along the second laminate 84B. Thereby, the laminated body 84 is arranged.

Next, as shown in FIG. 15, a press process is performed. Pressing is performed in a state in which the whole is covered with a resin material 86 that is a non-magnetic material. Thereby, each layer in the direction along the second axis Z is crimped.
Next, as shown in FIG. 16, a singulation process is performed. Specifically, for example, it is separated into pieces by dicing along the break lines DL. The portion between the first laminates 84A arranged in the direction along the first axis X in the second covering portion 83 described above becomes the non-magnetic portion 60. As shown in FIG. In addition, portions of the second covering portion 83 between the first laminates 84A and between the second laminates 84B arranged in the direction along the central axis CA serve as the non-magnetic portions 60 . Furthermore, the thermoplastic adhesive 85 remains on both surfaces of the inductor wiring 30 in the direction along the second axis Z as part of the non-magnetic layer 50 . Note that in the example shown in FIG. 16, the laminate 84 is cut along the end face in the first positive direction X1 and the end face in the first negative direction X2. After that, the non-magnetic film 70 made of a non-magnetic material is applied to the end faces of the laminate 84 in the first positive direction X1 and the end faces in the first negative direction X2. Thus, the inductor component 10 can be formed. By this method, the thermoplastic adhesive 85 also wraps around the side surfaces of the inductor wiring 30 facing the first positive direction X1 and the side surfaces facing the first negative direction X2. Insulation is ensured without contact.

(About simulation)
Next, simulation results comparing the characteristics obtained for the inductor component 10 with those of the inductor component of the comparative example will be described. Femtet (registered trademark) of Murata Software Co., Ltd. was used for the simulation.

First, the simulation conditions will be described.
The software used is Femtet 2019 manufactured by Murata Software. The solver is magnetic field harmonic analysis. The model is three dimensional. A standard mesh size is 0.25 mm. The magnetic material is an amorphous metal magnetic ribbon made of Fe, Si, Cr and B. The relative magnetic permeability μr is 7000 and the saturation magnetic flux density Bs is 1.3T. A magnetic material BH curve that satisfies B=Bs×tanh (μ0×μr×H/Bs) was used. For the BH curve of the magnetic material, a portion where the relative permeability μr is 1 or more is used so as not to fall below the magnetic permeability of the vacuum, and the function of Femtet2019 is used to extrapolate the magnetic permeability of the vacuum. The material of the inductor wiring 30 is copper. Moreover, the electrical conductivity of the magnetic material is 0.568181818MS/m. The wiring applied current is a sine wave of 300 kHz with an amplitude of 2.25A.

Next, the conditions for the dimensions and position of the model of the inductor component used in the simulation will be described.
The dimension of the inductor wiring 30 in the direction along the first axis X is 1000 μm. The dimension of the inductor wiring 30 in the direction along the second axis Z is 100 μm. The dimension of the inductor wiring 30 in the direction along the central axis CA is 2400 μmm.

The dimension of the magnetic ribbon 40 in the direction along the first axis X is 990 μm. The dimension of the magnetic ribbon 40 in the direction along the second axis Z is 20 μm. The dimension of the magnetic strip 40 in the direction along the central axis CA is 990 μm.

The non-magnetic layer 50 is a non-magnetic material and an insulator. The dimension of the nonmagnetic layer 50 along the second axis Z is 0.06 to 10.00 μm. The dimension of the nonmagnetic portion 60 along the first axis X is 20 μm. The dimension of the non-magnetic portion 60 along the central axis CA is 20 μm. The number of magnetic ribbons 40 laminated in the direction along the second axis Z is 41 pieces. The number of magnetic ribbons 40 arranged in the direction along the first axis X is two. The number of magnetic strips 40 arranged in the direction along the central axis CA is two.

The position of the inductor wiring 30 is arranged so that the center of gravity of the inductor wiring 30 coincides with the position of the center of gravity of the element body 20 . The relative magnetic permeability μr of the nonmagnetic material of the nonmagnetic layer 50, the nonmagnetic portion 60, and the nonmagnetic film 70 is set to 1. A non-magnetic and insulating gap of 100 nm was provided at the portion where the inductor wiring 30 and the magnetic ribbon 40 were in contact with each other.

The dimension of the inductor component 10 in the direction along the first axis X is 2020 μm. In the simulation, the element body 20 has films of the same nonmagnetic material as the nonmagnetic film 70 at both ends in the direction along the central axis CA. The dimension of the membrane in the direction along the central axis CA is 10 μm. Therefore, the dimension of the element body 20 in the direction along the central axis CA is 2020 μm. That is, in this simulation, the dimension of the inductor wiring 30 in the direction along the central axis CA is larger than the dimension in the direction along the central axis CA of the element body 20 by 380 μm. Therefore, the simulation is performed with the inductor wiring 30 protruding by 190 μm from the end face of the element body 20 in the positive direction Y1 and the inductor wiring 30 protruding by 190 μm from the end face of the element body 20 in the negative direction Y2. In addition, the dimension of the inductor component 10 along the second axis Z changes depending on the dimension of the nonmagnetic layer 50 along the second axis Z. FIG.

As shown in FIG. 17, the dimension of the non-magnetic layer 50 in the direction along the second axis Z is changed within the range of 0.06 to 10.00 μm, and the current applied to the wiring is a sine wave of 300 kHz with amplitude. The eddy current loss ACloss obtained at 2.25 A was calculated by simulation. The eddy current loss ACloss is calculated as Joule heat. In order to adjust the non-magnetic layer thickness Tnm, for example, the thickness of the epoxy resin film in the manufacturing method described above may be changed.

According to the calculated simulation results, it was found that the eddy current loss ACloss has a correlation with the non-magnetic layer thickness Tnm. As a whole, there was a tendency that the smaller the non-magnetic layer thickness Tnm, the smaller the eddy current loss ACloss. When the nonmagnetic layer thickness Tnm is 0.6 μm or less, that is, when the percentage of the nonmagnetic layer thickness Tnm to the magnetic ribbon thickness Tm is 3% or less, the eddy current loss ACloss hardly changes. On the other hand, when the nonmagnetic layer thickness Tnm is greater than 0.6 μm, that is, when the percentage of the nonmagnetic layer thickness Tnm to the magnetic ribbon thickness Tm is greater than 3%, the greater the nonmagnetic layer thickness Tnm, the more The eddy current loss ACloss was calculated to be small. Furthermore, when the nonmagnetic anti-thickness Tnm is greater than 3.0 μm, that is, when the percentage of the nonmagnetic layer thickness Tnm to the magnetic ribbon thickness Tm is greater than 15%, the nonmagnetic layer thickness Tnm is 0.6 μm or less. The eddy current loss ACloss was about two-thirds or less of the value of . That is, when the nonmagnetic anti-thickness Tnm is greater than 3.0 μm, the eddy current loss ACloss is reduced by about one-third or more compared to when the nonmagnetic layer thickness Tnm is 0.6 μm or less. rice field.

(About the effect of this embodiment)
Next, the effects of the above embodiment will be described.
(1) According to the above embodiment, the element body 20 has a plurality of magnetic ribbons 40 and a plurality of nonmagnetic layers 50 . A plurality of magnetic ribbons 40 are stacked along the second axis Z, and each non-magnetic layer 50 is positioned between adjacent magnetic ribbons 40 along the second axis Z. As shown in FIG. That is, the inductor component 10 of the above embodiment has a regular structure of the magnetic thin strips 40 stacked along the second axis Z. As shown in FIG.

As shown in the simulation results of FIG. 17, when the percentage of the non-magnetic layer thickness Tnm to the magnetic ribbon thickness Tm is 3% or less, even if the non-magnetic layer thickness Tnm is changed, the eddy current The loss ACloss remains almost unchanged. According to the above embodiment, the percentage of the non-magnetic layer thickness Tnm to the magnetic ribbon thickness Tm is greater than 3%. Therefore, as shown in FIG. 17 as a simulation result, there is a correlation that the eddy current loss ACloss decreases as the nonmagnetic layer thickness Tnm increases. Therefore, according to the above embodiment, the generated eddy current loss ACloss can be suppressed as compared with the case where the percentage of the non-magnetic layer thickness Tnm to the magnetic ribbon thickness Tm is 3% or less.

(2) According to the above embodiment, the non-magnetic layer thickness Tnm is greater than 0.6 μm. If the non-magnetic layer thickness Tnm is sufficiently large in this way, it is possible to suppress the generated eddy current loss ACloss regardless of the magnetic ribbon thickness Tm.

(3) According to the simulation results shown in FIG. 17, when the nonmagnetic layer thickness Tnm is greater than 3 μm, the generated eddy current loss ACloss is approximately 3 μm compared to when the nonmagnetic layer thickness Tnm is 0.6 μm or less. 2/2 or less. That is, when the percentage of the nonmagnetic layer thickness Tnm to the magnetic ribbon thickness Tm is greater than 15%, compared to the case where the percentage of the nonmagnetic layer thickness Tnm to the magnetic ribbon thickness Tm is 3% or less. , the generated eddy current loss ACloss can be suppressed to about one-third or more.

(4) According to the above embodiment, the non-magnetic layer thickness Tnm is greater than 3 μm. If the non-magnetic layer thickness Tnm is sufficiently large in this way, the generated eddy current loss ACloss can be greatly suppressed regardless of the magnetic ribbon thickness Tm.

(5) The magnetic flux generated when the current flows through the inductor wiring 30 in the direction along the central axis CA includes magnetic flux penetrating the magnetic ribbon 40 in the direction along the second axis Z. . The magnetic flux entering in this way causes eddy currents in the magnetic ribbon 40 . In addition, when viewed from the direction along the second axis Z, the larger the area of each magnetic ribbon 40, the larger the eddy current. When eddy currents occur, losses occur because magnetic flux energy is lost as heat energy.

According to the above embodiment, two magnetic strips 40 are arranged in the direction along the third axis and the direction along the fourth axis at the same position along the second axis Z. Therefore, the area of the magnetic ribbon 40 when viewed from the direction along the second axis Z is larger than when there is only one magnetic ribbon 40 at the same position along the second axis Z in the second portion P2. become smaller. Therefore, the eddy current generated in one magnetic strip 40 is reduced.

(6) According to the above embodiment, two magnetic strips 40 are arranged in the direction along the first axis X at the same position along the second axis Z. Therefore, a first magnetic thin strip 41 along which a first virtual straight line VL1 passing through the first wiring end IP1 of the inductor wiring 30 passes, and a second magnetic thin strip 41 along which a third virtual straight line VL3 passing through the second wiring end IP2 of the inductor wiring 30 passes. The strip 42 is a different magnetic thin strip 40 . Therefore, the above-described positional relationship between the inductor wire 30 and the first magnetic ribbon 41 can be realized while ensuring a certain size as the dimension of the inductor wire 30 in the direction along the first axis X.

(7) According to the above embodiment, the dimensions of all the magnetic ribbons 40 in the direction along the second axis Z are 80% or more and 120% or less of the magnetic ribbon thickness Tm. That is, it can be said that all the magnetic strips 40 have substantially the same dimensions in the direction along the second axis Z. FIG. As a result, the magnetic flux density in each magnetic strip 40 is made uniform, and the magnetic flux is hard to concentrate and saturate at a specific location. As a result, the magnetic flux density of the entire element body 20 is improved.

(8) According to the first embodiment, the dimensions of all the nonmagnetic layers 50 in the direction along the second axis Z are 80% or more and 120% or less of the nonmagnetic layer thickness Tnm. . In other words, it can be said that the dimensions in the direction along the second axis Z of all the nonmagnetic layers 50 are substantially equal. Therefore, the disturbance of the magnetic flux generated at the interface between the non-magnetic layer 50 and the magnetic ribbon 40 can be made uniform.

(9) According to the above embodiment, the first imaginary straight line VL1 passes through the first range AR1 of the first magnetic ribbon 41 . Therefore, of the magnetic flux generated when a current flows through the inductor wiring 30, most of the magnetic flux in the direction along the first imaginary straight line VL1 in the vicinity of the first wiring end IP1 of the inductor wiring 30 is the first magnetic ribbon 41 except for the end in the direction along the first axis X. That is, of the magnetic flux generated when the current flows through the inductor wiring 30, the magnetic flux passing through the ends in the direction along the first magnetic ribbon 41 is reduced. Therefore, it is possible to suppress the disturbance of the magnetic flux and the local concentration of the magnetic flux. According to such a positional relationship between the first magnetic ribbon 41 and the inductor wiring 30, the obtained inductance L is increased regardless of the filling rate of the magnetic material.

<Other embodiments>
The above embodiment can be implemented with the following modifications. The above embodiments and the following modifications can be implemented in combination within a technically consistent range.

· In the above embodiment, the shape of the element body 20 is not limited to the example of the above embodiment. For example, when viewed from the direction along the second axis Z, the shape of the base body 20 may be rectangular, or polygonal other than quadrangular. Further, for example, the shape of the base body 20 may be circular such as an ellipse when viewed from the direction along the second axis Z. Further, the shape of the base body 20 may be a rectangular parallelepiped, a cube, a polygonal prism, a cylinder, or the like having different dimensions in the direction along the third axis and in the direction along the fourth axis.

In the above embodiment, the shape of the inductor wiring 30 can be appropriately changed as long as the inductor wiring 30 can give inductance L to the inductor component 10 by generating magnetic flux in the magnetic ribbon 40 when current flows. .

For example, in the modified inductor component 110 shown in FIG. 18, the inductor wiring 130 has an elliptical shape in a cross section perpendicular to the central axis CA. Then, a hypothetical rectangle VR2 with a minimum area, which circumscribes the inductor wiring 130 and has a first side along the first axis X and a second side along the second axis Z, is drawn. At this time, the first side of the virtual rectangle VR2 is longer than the second side of the virtual rectangle VR2. As described above, when the long sides of the virtual rectangle VR2 are parallel to the first axis X, the opposite ends of the first magnetic ribbon 41 in the direction along the first axis X of the cross section of the wiring where the magnetic flux is more concentrated. It is more preferable because it corresponds to a region with a small magnetic field.

Further, in the above embodiment, the shape of the inductor wiring 30 in the cross section orthogonal to the central axis CA may be such that the second side along the second axis Z is longer than the first side along the first axis X. Even in this case, the magnetic flux concentrates on the first wiring end IP1, which is the end of the inductor wiring 30 in the first positive direction X1. Therefore, the region of the first magnetic ribbon 41 having a small demagnetizing field corresponds to the first wiring end IP1 of the wiring cross section where the magnetic flux is more concentrated, which is more preferable.

Furthermore, in a cross section perpendicular to the central axis CA, the shape of the inductor wiring 30 may be a shape that does not have symmetry such as linear symmetry or rotational symmetry, such as when it includes one or more protruding portions. In this way, if the symmetry is broken in the cross section perpendicular to the central axis CA, there will be a place where the magnetic flux concentrates more than others. Further, it is preferable to determine the positional relationship of the first magnetic ribbon 41 so that the first wiring end IP1 is a portion such as a projecting portion where the magnetic flux concentrates more than others.

Also, for example, in a cross section orthogonal to the central axis CA, the shape of the inductor wiring 30 may be square or circular. In this case, the virtual rectangle VR drawn in the cross section perpendicular to the central axis CA is a square, and the first side of the virtual rectangle VR does not have to be longer than the second side of the virtual rectangle VR.

The first magnetic strip 41 is determined in accordance with the shape of the inductor wiring 30 in the cross section perpendicular to the central axis CA. In the modification shown in FIG. 18, the distance along the second axis Z from the first wiring end IP1 is the shortest among the magnetic ribbons 40 laminated in the direction along the second axis Z with respect to the inductor wiring 130. The magnetic ribbon 40 is one of the magnetic ribbons 40 included in the second portion P2. Even in this case, the first imaginary straight line VL1 only needs to pass through the first range AR1 of the first magnetic ribbon 41 .

· In the above embodiment, the position of the inductor wiring 30 in the direction along the first axis X is not limited to the example of the above embodiment. The first imaginary straight line VL1 preferably passes through the first range AR1 of the five magnetic ribbons 40, including the first magnetic ribbons 41, arranged continuously in the direction along the second axis Z. More preferably, it passes within the first range AR1 of 40. Therefore, the first imaginary straight line VL1 does not have to pass through substantially the center of all the magnetic ribbons 40 in the direction along the first axis X. Also, the first virtual straight line VL1 may be outside the first range AR1 of the first magnetic ribbon 41 .

· In the above embodiment, the shape of the inductor wiring 30 is not limited to a straight line. It only needs to extend along the main surface MF of the magnetic thin strip 40, and may have, for example, a curved shape as a whole or a meandering shape. For example, both ends of the inductor wiring 30 may protrude from the element body as in the simulation described above.

Also, the inductor wiring 30 may be connected to a lead wiring extending in a direction intersecting the main surface MF, a via wiring extending in a direction along the second axis Z, or the like. Furthermore, a plurality of inductor wirings 30 may be connected to via wirings extending in the direction along the second axis Z, and may have a three-dimensional spiral shape such as a spiral shape or a helical shape as a whole. In this case, the inductor wiring 30 is the portion extending along the main surface MF of the magnetic ribbon 40 .

· In the above-described embodiment, the material of the inductor wiring 30 is not limited to the example of the above-described embodiment as long as it is a conductive material. For example, the material of the inductor wiring 30 may be a conductive resin.

· In the above embodiment, the central axis CA and the third axis may not coincide. Also, the fourth axis does not have to coincide with the first axis X. For example, when the inductor wiring 30 has a meandering shape as described above, the central axis CA extends in a meandering shape. In this case, the third axis should be orthogonal to the second axis Z, and the fourth axis should be orthogonal to the second axis Z and intersect the third axis. Even in this case, if a plurality of magnetic ribbons 40 are aligned in the direction along the third axis or in a direction along the fourth axis, the magnetic ribbons 40 are aligned along the second axis Z. The area of the magnetic ribbon 40 when viewed from the direction along the second axis Z is smaller than when there is one at the same position along the second axis Z. Therefore, the eddy current generated in one magnetic strip 40 is reduced.

The positional relationship between the first virtual straight line VL1 passing through the first wiring end IP1 described in the above embodiment and the first range AR1 of the first magnetic ribbon 41 is , any one cross section. In other words, the positional relationship between the first imaginary straight line VL1 and the first range AR1 of the first magnetic ribbon 41 does not have to be satisfied in all the regions of the inductor wiring 30 . Note that there may be no cross section that satisfies the positional relationship between the first virtual straight line VL1 passing through the first wiring end IP1 and the first range AR1 of the first magnetic ribbon 41 . That is, the position of the first wiring end IP1 of the inductor wiring 30 in the direction along the first axis X does not have to be within the first range AR1 of the first magnetic ribbon 41. It may coincide with the end in the direction along the axis X.

· In the above embodiment, an external electrode may be connected to the portion where the inductor wiring 30 is exposed from the element body 20 . For example, external electrodes may be formed on both end faces of the inductor wiring 30 along the central axis CA and both end faces of the base body 20 along the central axis CA by coating, printing, plating, or the like.

・In the above embodiment, the direction in which the plurality of magnetic strips 40 and the plurality of non-magnetic layers 50 are laminated may not be perpendicular to the central axis CA and the first axis X due to manufacturing errors. . In the above embodiment, the fact that the magnetic ribbons 40 and the like are "laminated in the direction along the second axis Z" allows for such manufacturing errors.

· In the above embodiment, the number of magnetic strips 40 stacked in the direction along the second axis Z should be two or more. In this case, the inductor wiring 30 and the non-magnetic layer 50 should be arranged between the two magnetic ribbons 40 .

· In the above embodiment, the material of the magnetic ribbon 40 is not limited to the examples of the above embodiment as long as it is a magnetic material. For example, it may be Fe or Ni. Metal magnetic materials other than Fe, Ni, Co, Cr, Cu, Al, Si, B, and P may also be used.

· In the above embodiments, the material of the non-magnetic layer 50 is not limited to the examples of the above embodiments as long as it is a non-magnetic material. The non-magnetic layer 50 may be made of a resin other than acrylic resin, epoxy resin, or silicon resin, or may be made of non-magnetic ceramics such as alumina, silica, or glass, or non-magnetic inorganic materials containing these. or a mixture thereof. In this regard, the same applies to the nonmagnetic portion 60 and the nonmagnetic film 70 . The materials of the non-magnetic layer 50, the non-magnetic portion 60 and the non-magnetic film 70 may be different from each other or may be partially different as long as they are non-magnetic materials.

· In the above embodiment, the nonmagnetic layer 50, the nonmagnetic portion 60, and the nonmagnetic film 70 may be integrated or may be separate members. For example, the non-magnetic layer 50 may be hollow, or may be composed of an insulating oxide film obtained by oxidizing the surface of the magnetic ribbon 40 .

· In the above embodiment, the non-magnetic portion 60 may be omitted. In this case, the magnetic ribbons 40 aligned in the direction along the third axis or the fourth axis may be in direct contact with each other. Also, the nonmagnetic portion 60 may exist between the inductor wiring 30 and the magnetic ribbon 40 . In this case, the nonmagnetic portion 60 can ensure insulation between the inductor wiring 30 and the magnetic ribbon 40 .

It should be noted that "a plurality of magnetic ribbons 40 are laminated" and "a plurality of magnetic ribbons 40 are lined up" specifically mean that the adjacent magnetic ribbons 40 are completely or partially insulated from each other. It refers to the case where there is a physical boundary on a microscopic scale. For example, it does not include a state in which the magnetic ribbons 40 are sintered and completely integrated.

· In the above embodiment, the structure of the element 20 can be changed as long as the element 20 has a plurality of magnetic ribbons 40 and a plurality of non-magnetic layers 50 . For example, the entire second portion P2 except for the inductor wiring 30 may be composed of the magnetic ribbon 40 or may be composed of the non-magnetic layer 50 . Further, when all the portions of the second portion P2 excluding the inductor wiring 30 are composed of the magnetic ribbon 40, the magnetic ribbon 40 may be a composite material of a powdery magnetic material and a non-magnetic material. good. As such a composite material, there is a metal composite material of amorphous metal particles made of Fe, Si, Cr, and B and a resin.

According to the above-described embodiment, two magnetic ribbons 40 are arranged in the direction along the first axis X at the same position along the second axis Z, and are arranged in the direction along the central axis CA, that is, the third axis. 2 are lined up. That is, when "M" and "N" are positive integers, "M" magnetic ribbons 40 are arranged in the same position along the second axis Z in the direction along the third axis. "N" pieces are arranged in the direction along the first axis X, that is, the fourth axis, and both "M" and "N" are two. In the above embodiment, "M", which is the number of first magnetic ribbons 41 arranged in the direction along the fourth axis, may be one, or may be three or more. Also, "N", which is the number of magnetic ribbons 40 arranged in the direction along the central axis CA, may be one, or may be three or more. Note that if at least one of "M" and "N" is 2 or more, the area of each magnetic ribbon 40 as viewed from the second axis Z can be reduced, so loss due to eddy currents can be reduced. Easy to make small.

If the magnitude relationship between the thickness Tm of the magnetic ribbon and the thickness Tnm of the non-magnetic layer described in the above embodiment is satisfied in any one of the cross sections of the inductor wiring 30 perpendicular to the central axis CA, good. In other words, the magnitude relationship between the magnetic ribbon thickness Tm and the non-magnetic layer thickness Tnm does not have to be satisfied in all regions of the inductor wiring 30 .

The dimensions of the plurality of magnetic ribbons 40 in the direction along the second axis Z may be the same, or may vary by more than 20% with respect to the thickness Tm of the magnetic ribbons.
- The dimensions of the plurality of non-magnetic layers 50 in the direction along the second axis Z may be the same, or may vary by more than 20% from the average value. At least, the non-magnetic layer thickness Tnm should be larger than 3% of the magnetic ribbon thickness Tm. If the non-magnetic layer thickness Tnm is 100% or less of the magnetic ribbon thickness Tm, it is easy to avoid an increase in the size of the base body 20 in the direction along the second axis Z. Further, it is preferable to ensure the proportion of the magnetic ribbon 40 in the element body 20 when the nonmagnetic layer thickness Tnm is 50% or less of the magnetic ribbon thickness Tm.

· In the above embodiment, the number and positions of the non-magnetic portions 60 are not limited to the examples in the above embodiment. The number and positions of the non-magnetic portions 60 may be changed according to the number and positions of the magnetic strips 40 in the direction along the first axis X and in the direction along the central axis CA. Also, the size of the non-magnetic portion 60 may be appropriately changed according to the interval between the magnetic ribbons 40 at the same position in the direction along the second axis Z. FIG.

· In the above embodiment, the non-magnetic film 70 may be omitted. In the case of forming the non-magnetic film 70, for example, in the method of manufacturing the inductor component 10, the gap in the direction along the first axis X and the central axis CA of the second covering portion 83 is The dimension in the direction along the first axis X and the central axis CA may be set small. In this case, the non-magnetic film 70 can be formed by the resin material 86 entering the gap between the second covering portion 83 and the laminate 84 .

· In the above embodiment, the method of manufacturing the inductor component 10 is not limited to the above embodiment. For example, without arranging the laminated body 84 on the second covering portion 83, the element body 20 may be laminated in the direction along the second axis Z to form a plurality of sheets, and the plurality of sheets may be laminated. The base body 20 may be formed by

DESCRIPTION OF SYMBOLS 10, 110... Inductor component 20... Element body 30, 130... Inductor wiring 40... Magnetic ribbon 41... First magnetic ribbon 42... Second magnetic ribbon 50... Non-magnetic layer 60... Non-magnetic part 70... Non-magnetic film AR1... First range CA... Central axis MF... Main surface MP1... First end MP2... Second end Tm... Magnetic ribbon thickness Tnm... Non-magnetic layer thickness VL1... First virtual straight line VL2... Second virtual straight line VR , VR2...virtual rectangle X...first axis Z...second axis

Claims (8)

1. a base body including a plurality of tabular magnetic ribbons made of a magnetic material, wherein the plurality of magnetic ribbons are laminated in a direction perpendicular to the main surface of the magnetic ribbon;
   an inductor wiring extending along the main surface inside the base body,
   When the axis along which the inductor wiring extends is taken as a central axis, the axis along the main surface in a cross-sectional view perpendicular to the central axis is taken as a first axis, and the axis perpendicular to the main surface in a cross-sectional view is taken as a second axis ,
   the base body has a plurality of non-magnetic layers made of a non-magnetic material positioned between the magnetic ribbons adjacent to each other along the second axis;
   The average value of the dimensions of the plurality of magnetic ribbons in the direction along the second axis is defined as the magnetic ribbon thickness, and the average value of the dimensions of the plurality of nonmagnetic layers in the direction along the second axis is defined as the nonmagnetic layer thickness. , the percentage of the thickness of the non-magnetic layer to the thickness of the magnetic ribbon is greater than 3%.
2. 2. The inductor component according to claim 1, wherein the percentage of said non-magnetic layer thickness to said magnetic ribbon thickness is greater than 15%.
3. 3. The inductor component according to claim 1, wherein said non-magnetic layer thickness is greater than 0.6 [mu]m.
4. 4. The inductor component according to claim 3, wherein said non-magnetic layer thickness is greater than 3 [mu]m.
5. When "M" and "N" are positive integers and at least one of "M" and "N" is "2" or more,
   At the same position along the second axis, "M" magnetic ribbons are arranged in a direction along a third axis orthogonal to the second axis, and are orthogonal to the second axis and the third axis. The inductor component according to any one of claims 1 to 4, wherein "N" pieces are arranged in a direction along the fourth axis.
6. The dimension of each of the magnetic ribbons in the direction along the second axis is 80% or more and 120% or less of the thickness of the magnetic ribbon, according to any one of claims 1 to 5. inductor components.
7. 7. The dimension according to any one of claims 1 to 6, wherein the dimension of each nonmagnetic layer along the second axis is 80% or more and 120% or less of the thickness of the nonmagnetic layer. inductor components.
8. When one of the two directions along the first axis is defined as the first positive direction,
   In the cross-sectional view,
   The end of the inductor wiring in the first positive direction is defined as a first wiring end,
   Among the magnetic ribbons laminated in the direction along the second axis with respect to the inductor wiring, the magnetic ribbon having the shortest distance in the direction along the second axis from the end of the first wiring is selected as the first magnetic ribbon. as a magnetic strip,
   When the range excluding both ends of the first magnetic ribbon in the direction along the first axis is defined as the first range,
   Claims 1 to 7, wherein when an imaginary straight line passing through the first wiring end and extending in a direction along the second axis is drawn, the imaginary straight line passes through the first range of the first magnetic ribbon. The inductor component according to any one of Claims 1 to 3.

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