WO2022181182A1

WO2022181182A1 - Inductor component

Info

Publication number: WO2022181182A1
Application number: PCT/JP2022/003068
Authority: WO
Inventors: 敢三宅; 博美辻; 充小田原
Original assignee: 株式会社村田製作所
Priority date: 2021-02-26
Filing date: 2022-01-27
Publication date: 2022-09-01

Abstract

The present disclosure provides an inductor component (10) that suppresses eddy current loss when a current flows through an inductor wire (30). The inductor component (10) is provided with an element (20) including a plurality of thin magnetic ribbons (40), and an inductor wire (30). In the element (20), a plurality of thin magnetic ribbons (40) are laminated in a direction orthogonal to a main surface (MF) of a thin magnetic ribbon (40). The element (20) has a magnetic part (80) arranged in the same position as the inductor wire (30) along a direction following a second axis (Z). The magnetic part (80) contains a plurality of magnetic bodies (80a) comprising a magnetic material. With the cross-section of the magnetic body (80a) having the largest area among the cross-sections of the magnetic bodies (80a) when divided in a direction orthogonal to the second axis (Z) set as the maximum cross-section, the area of the maximum cross-section of the plurality of magnetic bodies (80a) is smaller than the area of the main surface (MF) of the thin magnetic ribbon (40).

Description

inductor components

The present disclosure relates to inductor components.

The inductor component described in Patent Document 1 includes an element body and inductor wiring extending inside the element body. The base body is made of a composite body containing inorganic filler and resin. For example, a magnetic composite body among composite bodies contains a magnetic material as a material of an inorganic filler.

JP 2019-192920 A

For inductor parts, it is not desirable for eddy current loss to increase when current flows through the inductor wiring.

An inductor component for solving the above problems includes a plurality of flat magnetic ribbons made of a magnetic material, and the plurality of magnetic ribbons are laminated in a direction orthogonal to a main surface of the magnetic ribbons. and an inductor wiring extending along the main surface inside the element. When the axis along which the inductor wiring extends is taken as a central axis, the axis along the main surface in a cross-sectional view perpendicular to the central axis is taken as a first axis, and the axis perpendicular to the main surface in a cross-sectional view is taken as a second axis , the element has a magnetic portion arranged at the same position as the inductor wiring in the direction along the second axis. The magnetic portion contains a plurality of magnetic bodies made of a magnetic material. When the cross section of the magnetic body having the maximum area among the cross sections of the magnetic body cut in the direction orthogonal to the second axis is defined as the maximum cross section, the area of the maximum cross section of the plurality of magnetic bodies is , smaller than the area of the main surface.

When a current flows through the inductor wiring, a magnetic field is generated inside the element, and eddy currents are generated in each magnetic ribbon due to the magnetic flux passing through the magnetic ribbon. If the eddy current generated in each magnetic ribbon is large, the eddy current loss of the inductor component becomes large.

Here, when a magnetic field is generated by energization of the inductor wiring, a portion of the element that is arranged at the same position as the inductor wiring in the direction along the second axis and is adjacent to the inductor wiring Through the mating parts the magnetic flux passes in substantially orthogonal directions.

According to the above configuration, a plurality of magnetic bodies having the maximum cross-sectional area smaller than the area of the main surface of the magnetic ribbon are arranged in the relevant portion of the element. Therefore, the generated eddy current is less likely to increase in this portion. Therefore, the eddy current loss of the inductor component can be reduced as compared with the case where the magnetic ribbon is arranged in the relevant portion of the element.

It should be noted that "along" includes cases in which there is no direct contact, but at a distance. For example, "along the first axis" means not only those that are in direct contact with the first axis and along the first axis, but also those that are not in direct contact with the first axis and are along the first axis at a distance. Also includes Also, "along" means that they are substantially in parallel, and includes those that are slightly inclined due to manufacturing errors or the like.

According to the above configuration, it is possible to suppress an increase in eddy current loss when a current is passed through the inductor wiring.

2 is an exploded perspective view of the inductor component in the first embodiment; FIG. The top view which shows the 1st part of the same inductor component. FIG. 3 is a cross-sectional view of the inductor component taken along line 3-3 in FIG. 2; FIG. 3 is a cross-sectional view of the inductor component taken along line 4-4 in FIG. 2; Explanatory drawing of the manufacturing method of the same inductor component. Explanatory drawing of the same manufacturing method. Explanatory drawing of the same manufacturing method. Explanatory drawing of the same manufacturing method. Explanatory drawing of the same manufacturing method. Explanatory drawing of the same manufacturing method. Explanatory drawing of the same manufacturing method. Explanatory drawing of the same manufacturing method. Explanatory drawing of the same manufacturing method. Explanatory drawing of the same manufacturing method. Explanatory drawing of the same manufacturing method. Explanatory drawing of the same manufacturing method. Sectional drawing of the inductor component of a comparative example. 4 is a table showing each parameter in the inductor component of the example and the inductor component of the comparative example; Sectional drawing of the inductor component in 2nd Embodiment. Sectional drawing of the same inductor component. 4 is a table showing each parameter in the inductor component of the example and the inductor component of the comparative example; 10 is a flowchart for explaining the flow of a method for manufacturing an inductor component according to the third embodiment; Explanatory drawing of the manufacturing method of the same inductor component. Explanatory drawing of the same manufacturing method. Explanatory drawing of the same manufacturing method. Explanatory drawing of the same manufacturing method. Explanatory drawing of the same manufacturing method. Explanatory drawing of the same manufacturing method. Explanatory drawing of the same manufacturing method. Explanatory drawing of the same manufacturing method. Explanatory drawing of the same manufacturing method. Sectional drawing of the inductor component of a modification.

<First Embodiment>
An embodiment of the inductor component will be described below. In addition, in order to facilitate understanding, the drawings may show constituent elements in an enlarged manner. The dimensional ratios of components may differ from those in reality or in other figures. In addition, although cross-sectional views are hatched, there are cases where the hatching of some components is omitted to facilitate understanding. Furthermore, there are cases where only some members among the plurality of members are given reference numerals.

(overall structure)
As shown in FIG. 1 , inductor component 10 includes element body 20 and inductor wiring 30 . The element body 20 has a plurality of magnetic ribbons 40 . The magnetic ribbon 40 is flat. A plurality of magnetic ribbons 40 are laminated in a direction orthogonal to the main surface MF of the magnetic ribbons 40 . The flat plate shape means a thin shape having a main surface, but it is not limited to a rectangular parallelepiped with a thin thickness. There may be holes inside.

The inductor wiring 30 extends linearly along the main surface MF inside the element body 20 . The axis along which inductor wiring 30 extends is defined as central axis CA. The direction of the central axis CA coincides with the direction in which the current flows when the current flows through the inductor wiring 30 . In this embodiment, the direction in which the central axis CA extends matches the direction in which one of the sides of the quadrangular main surface MF extends.

As shown in FIG. 3, in a cross-sectional view perpendicular to the central axis CA, the axis along the main surface MF is defined as a first axis X, and the axis perpendicular to the main surface MF is defined as a second axis Z. One of the two directions along the first axis X is defined as a first positive direction X1, and the direction opposite to the first positive direction X1 is defined as a first negative direction X2. Also, one of the two directions along the second axis Z is defined as a second positive direction Z1, and the direction opposite to the second positive direction Z1 is defined as a second negative direction Z2. Also, one of the two directions along the central axis CA is defined as the positive direction Y1, and the opposite direction of the positive direction Y1 is defined as the negative direction Y2.

As shown in FIG. 1, the inductor component 10 is composed of a first portion P1, a second portion P2, and a third portion P3, which are sequentially laminated along the second axis Z. The three parts P1-P3 are aligned along the second axis Z. As shown in FIG. Of the three parts P1-P3, the second part P2 is located in the center. The first portion P1 is positioned further in the second negative direction Z2 than the second portion P2. The third portion P3 is located in the second positive direction Z1 relative to the second portion P2.

As shown in FIG. 2, the first portion P1 has a square shape when viewed from the direction along the second axis Z. The first portion P1 has a plurality of magnetic strips 40, a plurality of interlayer non-magnetic portions 50, a plurality of non-magnetic portions 60, and a plurality of non-magnetic films .

As shown in FIG. 3, each magnetic ribbon 40 of the first portion P1 is laminated in the direction along the second axis Z in a cross-sectional view perpendicular to the central axis CA. As shown in FIG. 2, each magnetic ribbon 40 of the first portion P1 has a square shape when viewed from the direction along the second axis Z. As shown in FIG. When viewed along the second axis Z, each side of each magnetic ribbon 40 is parallel to the first axis X or the central axis CA. All the dimensions in the direction along the second axis Z of the plurality of magnetic strips 40 are the same.

As shown in FIGS. 3 and 4, two magnetic ribbons 40 are arranged side by side at the same position along the second axis Z in the direction along the third axis orthogonal to the second axis Z with a gap therebetween. there is Also, two magnetic strips 40 are arranged at the same position along the second axis Z with a gap in the direction along the fourth axis perpendicular to the second axis Z and the third axis. The third axis is coaxial with the central axis CA, and the fourth axis coincides with the first axis X. Therefore, in this embodiment, the magnetic strips 40 are arranged not only in the direction along the second axis Z, but also in the directions along the first axis X and the central axis CA.

The magnetic ribbon 40 is made of a magnetic material. The magnetic material is, for example, a metallic magnetic material including Fe, Ni, Co, Cr, Cu, Al, Si, B, P, and the like. In this embodiment, the magnetic material is a metallic magnetic material containing Fe and Si.

As shown in FIGS. 3 and 4, the interlayer non-magnetic portion 50 is located between the magnetic strips 40 adjacent to each other in the direction along the second axis Z. As shown in FIGS. The interlayer non-magnetic portion 50 fills the entire space between the magnetic ribbons 40 adjacent to each other in the direction along the second axis Z. As shown in FIG. The interlayer nonmagnetic portion 50 is made of a nonmagnetic material. Non-magnetic materials are, for example, acrylic resins, epoxy resins, and silicone resins. In this embodiment, a non-magnetic material is interposed between the magnetic strips 40 adjacent to each other in the direction along the second axis Z. As shown in FIG. 3 and 4, the interlayer non-magnetic portion 50 is illustrated by lines.

The dimension along the second axis Z of each interlayer nonmagnetic portion 50 is smaller than the dimension along the second axis Z of each magnetic ribbon 40 .
As shown in FIG. 2, the non-magnetic portion 60 is located between the magnetic strips 40 aligned at the same position along the second axis Z. As shown in FIG. The non-magnetic portion 60 fills all the spaces between the magnetic strips 40 arranged at the same position in the direction along the second axis Z. As shown in FIG. As described above, at the same position along the second axis Z, there are a total of four magnetic ribbons 40, two along the central axis CA and two along the first axis X. There are four magnetic parts 60 . The non-magnetic portion 60 is made of a non-magnetic material. That is, the non-magnetic material is interposed between the magnetic ribbons 40 adjacent to each other in the direction orthogonal to the second axis Z. As shown in FIG. In this embodiment, the non-magnetic portion 60 is made of the same material as the interlayer non-magnetic portion 50 .

The non-magnetic film 70 is positioned at each of the ends of the first positive direction X1 and the first negative direction X2 in the first portion P1. The non-magnetic film 70 covers the entire end surfaces of the magnetic ribbon 40 in the direction along the first axis X. As shown in FIG. In addition, the non-magnetic film 70 covers the entire area of both end faces in the direction along the first axis X of the interlayer non-magnetic portion 50 . Furthermore, the non-magnetic film 70 covers the entire end surfaces of the non-magnetic portion 60 in the direction along the first axis X. As shown in FIG. Therefore, the end faces of the first portion P1 in the first positive direction X1 along the first axis X are all composed of the non-magnetic film 70 . Similarly, the end face of the first portion P1 along the first axis X in the first negative direction X2 is entirely composed of the non-magnetic film 70 . The non-magnetic film 70 is made of a non-magnetic material. In this embodiment, the nonmagnetic film 70 is made of the same material as the interlayer nonmagnetic portion 50 .

As shown in FIG. 1, the second portion P2 is located in the second positive direction Z1 when viewed from the first portion P1. The second portion P2 has the same square shape as the first portion P1 when viewed from the direction along the second axis Z. As shown in FIG.

The second portion P2 is composed of an inductor wiring 30, a magnetic portion 80, and a plurality of non-magnetic films 70. The magnetic part 80 is arranged at the same position as the inductor wiring 30 in the direction along the second axis Z. As shown in FIG.

The inductor wiring 30 has a rectangular shape when viewed from the direction along the second axis Z, and extends linearly along the central axis CA. The end face of the inductor wiring 30 in the positive direction Y1 constitutes part of the outer surface of the second portion P2 and is exposed from the element body 20 . Similarly, the end face of the inductor wiring 30 in the negative direction Y2 constitutes part of the outer surface of the second portion P2 and is exposed from the element body 20 .

When viewed from the second axis Z, the end face of the inductor wiring 30 in the positive direction Y1 and the end face in the negative direction Y2 are parallel to the first axis X. In addition, the central axis CA of the inductor wiring 30 is positioned at the center of the second portion P2 in the direction along the first axis X. As shown in FIG. Therefore, the central axis CA, which is the axis along which the inductor wiring 30 extends, passes through the center of the second portion P2 in the direction along the first axis X. As shown in FIG. The dimension along the first axis X of the inductor wiring 30 is half the dimension along the first axis X of the second portion P2.

The material of the inductor wiring 30 is a conductive material. Conductive materials are, for example, Cu, Ag, Au, Al, or alloys thereof. In this embodiment, the material of the inductor wiring 30 is Cu.

As shown in FIG. 3, the inductor wiring 30 has a rectangular shape in a cross section perpendicular to the central axis CA. Here, in a cross section perpendicular to the central axis CA, a virtual rectangle VR with a minimum area is drawn that circumscribes the inductor wiring 30 and has a first side along the first axis X and a second side along the second axis Z. . In this embodiment, the inductor wiring 30 is rectangular in the cross section perpendicular to the central axis CA. Further, the long side of the outer shape of the inductor wiring 30 is along the first axis X in the cross section perpendicular to the central axis CA. Furthermore, the short side of the inductor wiring 30 is along the second axis Z in the cross section orthogonal to the central axis CA. Therefore, the virtual rectangle VR matches the contour of the inductor wiring 30 . A first side of the virtual rectangle VR is longer than a second side of the virtual rectangle VR.

In the second portion P<b>2 , the portion other than the inductor wiring 30 is composed of the magnetic portion 80 and the plurality of nonmagnetic films 70 .
As shown in FIG. 3, in the second portion P2, the magnetic portion 80 is arranged in the first positive direction X1 of the inductor wiring 30 in a cross-sectional view perpendicular to the central axis CA. Also, the magnetic portion 80 is arranged in the first negative direction X2 of the inductor wiring 30 . That is, each magnetic part 80 is arranged at the same position as the inductor wiring 30 in the direction along the second axis Z. As shown in FIG.

Each magnetic part 80 contains a plurality of magnetic bodies 80a made of a magnetic material. A cross section of the magnetic body 80a when the magnetic body 80a is cut in a direction orthogonal to the second axis Z is referred to as a "magnetic body cross section." In the magnetic body 80a, the cross section of the magnetic body at the position where the area of the cross section of the magnetic body becomes maximum is referred to as the "maximum cross section". At this time, the area of the maximum cross-section of the plurality of magnetic bodies 80 a is smaller than the area of the main surface MF of the magnetic ribbon 40 .

It should be noted that, among the plurality of magnetic bodies 80a included in the magnetic portion 80, a small amount of magnetic bodies 80a having a maximum cross-sectional area larger than the area of the main surface MF of the magnetic ribbon 40 may be mixed. In particular, in the magnetic portion 80 located away from the inductor wiring 30, the magnetic body 80a having a maximum cross-sectional area larger than the main surface MF may be present in order to reduce the generation of eddy current.

By the way, it is more preferable to make the volume of the magnetic material 80a smaller than the volume of the magnetic ribbon 40 . This makes it easy to make the area of the maximum cross section of the magnetic material 80 a smaller than the area of the main surface MF of the magnetic ribbon 40 . However, the volume of the magnetic body 80a need not be smaller than the volume of the magnetic ribbon 40 as long as the area of the maximum cross section of the magnetic body 80a can be made smaller than the area of the main surface MF.

In this embodiment, the magnetic material 80a, which is the magnetic material contained in the magnetic portion 80, is magnetic powder. The average particle size of the magnetic powder referred to here is preferably 30 μm or less. In addition, the average particle diameter is, for example, the median diameter "D50".

Examples of methods for measuring the average particle size include the following methods. In the cross section of the magnetic part 80 as shown in FIG. 3, images of the cross section of the magnetic part 80 containing 30 or more magnetic powders are acquired at three positions different from each other. A cross-sectional image is acquired by an SEM (Scanning Electron Microscope) whose magnification is adjusted to an appropriate size. The "appropriate magnitude of magnification" referred to here is a magnitude between 1000 times and 10000 times. Then, from those images, the particle size of the magnetic powder is calculated as a value converted from the area. Among the particle sizes, the central value (cumulative 50% value) when arranged in ascending order is taken as the average particle size.

The magnetic material 80a is, for example, metal magnetic powder, which is an example of magnetic powder. In this case, for example, at least one of iron and an alloy containing iron can be used as the metal magnetic powder. The magnetic portion 80 may contain metal magnetic powder other than iron-based metals, such as iron and alloys containing iron. Metal magnetic powders other than iron-based metals are, for example, nickel, chromium, copper, aluminum, and alloys thereof.

Each magnetic part 80 is made of a non-magnetic material and has a non-magnetic binder 80b containing magnetic powder, that is, a magnetic substance 80a. In this case, the magnetic portion 80 is not a laminated structure of the magnetic ribbons 40 such as the first portion P1 and the third portion P3, but an integral molded body.

The non-magnetic binder 80b is made of resin, for example. Such a resin is, for example, a resin material such as an epoxy resin. That is, the magnetic portion 80 can be said to be a resin composite portion in which the non-magnetic binder 80b is made of resin. Considering insulation and moldability, it is preferable to employ polyimide resin, acrylic resin, or phenol resin as the resin. The term "non-magnetic" as used herein means that the relative magnetic permeability is "1". In addition, the term “insulating” means that the specific resistance is “1 MΩ·cm” or more.

The non-magnetic film 70 is located at the end of the first positive direction X1 and the end of the first negative direction X2 in the second portion P2. The non-magnetic film 70 of the second portion P2 is continuous with the non-magnetic film 70 of the first portion P1.

The third portion P3 is located in the second positive direction Z1 of the second portion P2. When viewed from the second axis Z, the third portion P3 has the same square shape as the first portion P1. The third portion P3 is composed of a plurality of magnetic strips 40, a plurality of interlayer non-magnetic portions 50, a plurality of non-magnetic portions 60, and a plurality of non-magnetic films . In the present embodiment, the third portion P3 has a structure symmetrical with the first portion P1 with the second portion P2 interposed therebetween, and thus detailed description thereof will be omitted.

(Regarding the first magnetic ribbon and the second magnetic ribbon)
As shown in FIG. 3, in the cross section of the inductor component 10 perpendicular to the central axis CA of the inductor wiring 30, the end of the inductor wiring 30 in the first positive direction X1 is defined as the first wiring end IP1, and the first negative The end in the direction X2 is defined as a second wiring end IP2.

Among the magnetic ribbons 40 laminated in the direction along the second axis Z with respect to the inductor wiring 30, the magnetic ribbon 40 having the shortest distance along the second axis Z from the first wiring end IP1 is selected as the first magnetic ribbon. A ribbon 41 is used. Of the two ends of the first magnetic ribbon 41 along the first axis X, the end in the first positive direction X1 is called a first end MP11, and the end in the first negative direction X2 is called a second end MP12.

Among the magnetic ribbons 40 laminated in the direction along the second axis Z with respect to the inductor wiring 30, the magnetic ribbon 40 having the shortest distance along the second axis Z from the second wiring end IP2 is selected as the first magnetic ribbon 40. 2 magnetic ribbon 42 . Of the two ends of the second magnetic ribbon 42 along the first axis X, the end in the first positive direction X1 is called a first end MP21, and the end in the first negative direction X2 is called a second end MP22.

The magnetic ribbon 40, which at least partially overlaps the inductor wiring 30 when viewed from the direction along the second axis Z, is the magnetic ribbon 40 laminated in the direction along the second axis Z with respect to the inductor wiring 30. be. Therefore, in the present embodiment, the magnetic ribbon 40 in the first portion P1 and the magnetic ribbon 40 in the third portion P3 are laminated in the direction along the second axis Z with respect to the inductor wiring 30. be.

Among the plurality of magnetic ribbons 40 of the first portion P1, the magnetic ribbon 40 located closest to the first wiring end IP1 and the first magnetic ribbon 40 of the plurality of magnetic ribbons 40 of the third portion P3 are located closest to the first wiring end IP1. Each of the magnetic ribbons 40 positioned closest to the wiring end IP1 is the first magnetic ribbon 41 . In addition, among the plurality of magnetic ribbons 40 of the first portion P1, the magnetic ribbon 40 located closest to the second wiring end IP2, and of the plurality of magnetic ribbons 40 of the third portion P3, the second Each of the magnetic ribbons 40 positioned closest to the wiring end IP2 is the second magnetic ribbon 42 .

In the cross section shown in FIG. 3, in one magnetic strip 40, the end in the first positive direction X1 is the first end, and the end in the first negative direction X2 is the second end. At this time, the range excluding both ends of one magnetic strip 40 in the direction along the first axis X is defined as a predetermined range AR11.

When the first virtual straight line VL1 extending in the direction along the second axis Z is drawn through the first wiring end IP1 of the inductor wiring 30, the first virtual straight line VL1 passes through the predetermined range AR11 of the first magnetic ribbon 41. ing. Specifically, the first imaginary straight line VL1 passes through the center of the first magnetic ribbon 41 in the direction along the first axis X or near the center thereof.

Also, when the second virtual straight line VL2 extending in the direction along the second axis Z is drawn through the second end MP12 of the first magnetic ribbon 41, the second virtual straight line VL2 passes through the inductor wiring 30. Specifically, the second virtual straight line VL2 passes through approximately the center of the inductor wiring 30 in the direction along the first axis X. As shown in FIG.

When the third virtual straight line VL3 extending in the direction along the second axis Z is drawn through the second wiring end IP2 of the inductor wiring 30, the third virtual straight line VL3 passes through the predetermined range AR11 of the second magnetic ribbon 42. ing. Specifically, the third imaginary straight line VL3 passes through the center of the second magnetic ribbon 42 in the direction along the first axis X or near the center thereof.

Also, when the fourth virtual straight line VL4 extending in the direction along the second axis Z is drawn through the first end MP21 of the second magnetic ribbon 42, the fourth virtual straight line VL4 passes through the inductor wiring 30. Specifically, the fourth virtual straight line VL4 passes through approximately the center of the inductor wiring 30 in the direction along the first axis X. As shown in FIG.

(Manufacturing method of inductor component)
Next, a method for manufacturing inductor component 10 will be described.
As shown in FIG. 5, first, a copper foil preparation step for preparing a copper foil 81 is performed. Since the copper foil 81 constitutes the inductor wiring 30 , the thickness of the copper foil 81 is prepared to have a thickness necessary for the inductor wiring 30 . In the following description, it is assumed that the copper foil 81 is arranged such that the two main surfaces of the copper foil 81 are orthogonal to the second axis Z, and a cross section orthogonal to the central axis CA is shown. do.

Next, as shown in FIG. 6, when viewed from the direction along the second axis Z of both principal surfaces of the copper foil 81 orthogonal to the second axis Z, the magnetic portion 80 in the second portion P2 occupies A first covering step is performed to cover areas other than the range. Specifically, first, of the surface of the copper foil 81 facing the second negative direction Z2, the first covering portion 82 is formed to cover the area other than the area occupied by the magnetic portion 80 in the second portion P2. In forming the first covering portion 82, the entire surface of the copper foil 81 facing the second negative direction Z2 is coated with a photosensitive dry film resist. Next, the dry film resist is cured by exposing the portion where the first covering portion 82 is to be formed. Next, the dry film resist is similarly applied to the surface of the copper foil 81 facing the second positive direction Z1, and the portion forming the first covering portion 82 is exposed to light to cure the dry film resist. . After that, the uncured portion of the applied dry film resist is peeled off with a chemical solution. As a result, the hardened portion of the applied dry film resist is formed as the first covering portion 82 . Note that photolithography in other steps described later is also the same step, and detailed description thereof will be omitted.

Next, as shown in FIG. 7, a copper foil etching step is performed to etch the copper foil 81 exposed from the first covering portion 82 . By etching the copper foil 81 partially covered with the first covering portion 82, the exposed copper foil 81 is removed.

Next, as shown in FIG. 8, a first covering portion removing step for removing the first covering portion 82 is performed. Specifically, the first covering portion 82 is peeled off by wet etching the first covering portion 82 with a chemical.

Next, a second covering step is performed to cover the range occupied by the magnetic portion 80 when viewed from the direction along the second axis Z of both surfaces of the copper foil 81 orthogonal to the second axis Z. Specifically, first, as shown in FIG. 9, a dry film resist R is applied to the entire surface of the copper foil 81 facing the second positive direction Z1. Next, as shown in FIG. 10, by photolithography, the magnetic ribbon 40 and the non-magnetic interlayer are formed by photolithography when viewed from the direction along the second axis Z among the surfaces of the copper foil 81 facing the second positive direction Z1. A second covering portion 83 is formed to cover the area other than the area occupied by the portion 50 . After that, similarly, by photolithography, the area occupied by the magnetic ribbon 40 and the interlayer non-magnetic portion 50 when viewed from the direction along the second axis Z on the surface of the copper foil 81 facing the second negative direction Z2. A second covering portion 83 is formed to cover the rest.

Next, a layered body preparation step of preparing a layered body 841 in which the magnetic ribbon 40 and the interlayer non-magnetic portion 50 are layered is performed.
First, for example, a laminated body 841 in which the magnetic ribbon 40 and the interlayer non-magnetic portion 50 are laminated is prepared. For example, a ribbon is prepared as the magnetic ribbon 40 . The ribbon is made of, for example, NANOMET (registered trademark) manufactured by Tohoku Magnet Institute, Metglas (registered trademark) or FINEMET (registered trademark) manufactured by Hitachi Metals, FeSiB, FeSiBCr, or the like. This ribbon is cut into 10 mm squares. A non-magnetic material is applied to the cut ribbon by spin coating. The non-magnetic material is, for example, epoxy resin varnish. The cut strip is laminated on the coated non-magnetic material. After alternately laminating the thin strips and the non-magnetic material in this manner, the thin strips and the non-magnetic material are hardened and adhered by a vacuum heating and pressurizing device. Then, by dicing into a desired size, a laminated body 841 in which a plurality of magnetic strips 40 and interlayer non-magnetic portions 50 are laminated can be prepared. In the present embodiment, the laminate 841 constitutes the magnetic ribbon 40 and the interlayer non-magnetic portion 50 in the first portion P1 and the third portion P3.

Next, a laminate arrangement step of arranging the laminate 841 is performed.
As shown in FIG. 11, the laminate 841 constituting the magnetic ribbon 40 and the interlayer non-magnetic portion 50 in the third portion P3 is adhered to the surface of the copper foil 81 facing the second positive direction Z1 with a thermoplastic adhesive 85. Temporarily attach. The thermoplastic adhesive 85 is indicated by thick lines in FIGS. 11 to 16. FIG.

Next, as shown in FIGS. 11 and 12, the whole is inverted in the direction along the second axis Z. As shown in FIG. 13, of the surface facing the second negative direction Z2 of the laminate 841 constituting the third portion P3, the portion not in contact with the copper foil 81 is coated with varnish containing magnetic powder. For example, the varnish contains thermoplastic resins such as acrylic resins, epoxy resins, and silicon resins. Then, the shape of the cured product 842 of the varnish is adjusted. This cured product 842 becomes the magnetic portion 80 .

Next, as shown in FIG. 14, the laminated body 841 constituting the magnetic ribbon 40 and the interlayer non-magnetic portion 50 in the first portion P1 is separated from the surface of the copper foil 81 facing the second negative direction Z2 and the hardened material 842. Next, as shown in FIG. Temporarily adhered with a thermoplastic adhesive 85 to the surface facing the second negative direction Z2. This forms an intermediate product 84 .

Next, as shown in FIG. 15, a pressing process is performed. Pressing is performed in a state in which the whole is covered with a resin material 86 that is a non-magnetic material. Thereby, each layer in the direction along the second axis Z is crimped.

Next, as shown in FIG. 16, a singulation process is performed. Specifically, for example, it is separated into pieces by dicing along the break lines DL. The portion between the magnetic strips 40 aligned in the direction along the first axis X in the second covering portion 83 described above becomes the non-magnetic portion 60 . A portion of the second covering portion 83 between the magnetic ribbons 40 aligned in the direction along the central axis CA becomes the non-magnetic portion 60 . Furthermore, the thermoplastic adhesive 85 remains on both surfaces of the inductor wiring 30 in the direction along the second axis Z as part of the interlayer non-magnetic portion 50 . In the example shown in FIG. 16, the intermediate product 84 is cut along the end face in the first positive direction X1 and the end face in the first negative direction X2. After that, the non-magnetic film 70 made of a non-magnetic material is applied to the end faces of the laminate 841 in the first positive direction X1 and the end faces in the first negative direction X2. Thus, the inductor component 10 can be formed. By this method, the thermoplastic adhesive 85 also wraps around the side surfaces of the inductor wiring 30 facing the first positive direction X1 and the side surfaces facing the first negative direction X2. Insulation is ensured without direct contact with the wiring 30 .

(About simulation results)
Next, simulation results comparing the characteristics obtained for the inductor component 10 with those of the inductor component of the comparative example will be described. Femtet (registered trademark) of Murata Software Co., Ltd. was used for the simulation.

First, the simulation conditions will be described.
The software used is Femtet 2019 manufactured by Murata Software. The solver is static magnetic field analysis. The model is three dimensional. A standard mesh size is 0.25 mm.

Regarding the inductor wiring 30, the dimension along the second axis Z is 0.1 mm, and the dimension along the central axis CA is 2.4 mm. The dimension along the first axis X is 0.5 mm or 1.00 mm. The material of the inductor wiring 30 is Cu.

The magnetic thin ribbon 40 is an amorphous metal magnetic thin film made of Fe, Si, Cr, and B. The relative magnetic permeability μr is 7000 and the saturation magnetic flux density Bs is 1.3T. Also, the electrical conductivity is 0.568181818MS/m. The BH curve of the magnetic ribbon 40 used satisfies B=Bs×tanh (μ0×μr×H/Bs). For the BH curve of the magnetic material, a portion where the relative permeability μr is "1" or more was used so as not to fall below the magnetic permeability of the vacuum, and the function of Femtet2019 was used to extrapolate the magnetic permeability of the vacuum.

Regarding the magnetic strip 40, the dimension along the first axis X is 0.99 mm, the dimension along the second axis Z is 0.02 mm, and the dimension along the central axis CA is 0.99 mm. and The dimension between the magnetic strips 40 adjacent to each other in the direction along the first axis X is 0.02 mm. The dimension between the magnetic ribbons 40 adjacent to each other in the direction along the second axis Z is 0.002 mm. The dimension between the magnetic ribbons 40 adjacent to each other in the direction along the central axis CA is 0.02 mm. In the simulation, a non-magnetic layer having a thickness of 0.01 mm was provided on both end surfaces of the base body 20 in the direction along the central axis CA.

In addition, two magnetic ribbons 40 are aligned in the direction along the first axis X, and two magnetic ribbons 40 are aligned in the direction along the central axis CA. In the direction along the second axis Z, 41 magnetic strips 40 are arranged.

A non-magnetic gap for electrical insulation is provided between the inductor wiring 30 and the magnetic ribbon 40 adjacent to the inductor wiring 30 .
In this simulation, the dimension of the base body 20 along the central axis CA is 2.0 mm. That is, the dimension of the element body 20 along the central axis CA is smaller than the dimension of the inductor wiring 30 along the central axis CA by 0.38 mm. Therefore, the simulation is performed with the inductor wiring 30 projecting 0.19 mm from the end face of the element body 20 in the positive direction Y1 and the inductor wiring 30 projecting 0.19 mm from the end face of the element body 20 in the negative direction Y2.

Regarding the magnetic portion 80, the shape of the magnetic powder contained in the resin is assumed to be a magnetic sphere with a diameter of 30 μm. That is, the magnetic sphere corresponds to the magnetic body 80a. The conductivity of the magnetic spheres is 0.568181818 MS/m. The BH curve of the magnetic sphere used satisfies B=Bs×tanh (μ0×μr×H/Bs). For the BH curve of the magnetic material, a portion where the relative permeability μr is "1" or more was used so as not to fall below the magnetic permeability of the vacuum, and the function of Femtet2019 was used to extrapolate the magnetic permeability of the vacuum.

A sinusoidal electric signal is input to the inductor wiring 30 of such an inductor component. The amplitude of the electrical signal is 2.25 A and the frequency of the electrical signal is 1 MHz.
FIG. 18 shows simulation results of Example 1, Example 2, Example 3, Comparative Example 1, and Comparative Example 2. FIG. In Examples 1 and 2, the magnetic spheres are regularly arranged in the magnetic portion 80 . Specifically, the distance between the magnetic spheres adjacent to each other in the direction along the first axis X, the distance between the magnetic spheres adjacent to each other in the direction along the second axis Z, and the distance between the magnetic spheres adjacent to each other in the direction along the central axis CA The spacing between each mating magnetic sphere is 32.5 μm. That is, in Example 1 and Example 2, a plurality of magnetic spheres are arranged in a direction perpendicular to the second axis Z in the magnetic portion 80 . A non-magnetic portion made of a non-magnetic material is interposed between the magnetic spheres adjacent to each other in the direction orthogonal to the second axis Z. As shown in FIG. Also, in the magnetic portion 80, a plurality of magnetic spheres are arranged in a direction along the second axis Z. As shown in FIG. A non-magnetic portion made of a non-magnetic material is interposed between the magnetic spheres adjacent to each other in the direction along the second Z axis.

On the other hand, in Example 3, the magnetic spheres are arranged irregularly within the magnetic portion 80 .
In addition, in Examples 1 and 3, the dimension of the inductor wiring 30 in the direction along the first axis X is 1.00 mm. In Example 2, the dimension of the inductor wiring 30 in the direction along the first axis X is 0.5 mm. In addition, in FIG. 18, the dimension of the inductor wiring 30 in the direction along the first axis X is described as "wiring width".

FIG. 17 shows a cross section of an inductor component 10A of a comparative example. The first portion P1 and the third portion P3 of the inductor component 10A of the comparative example have the same configuration as the first portion P1 and the third portion P3 of the inductor component 10 of the example. On the other hand, the configuration of second portion P2 of inductor component 10A of the comparative example is different from the configuration of second portion P2 of inductor component 10 of the example. That is, in the second portion P2 of the inductor component 10A, a plurality of magnetic ribbons 40 are laminated in the direction along the second axis Z in the first positive direction X1 of the inductor wiring 30A. Similarly, a plurality of magnetic ribbons 40 are laminated in the direction along the second axis Z in the first negative direction X2 of the inductor wiring 30A.

As shown in FIG. 18, in Comparative Example 1, the dimension of the inductor wiring 30 in the direction along the first axis X is 0.5 mm. In Comparative Example 2, the dimension of the inductor wiring 30 in the direction along the first axis X is 1.00 mm.

As shown in FIG. 18, each of the eddy current losses in Example 1, Example 2, and Example 3 is smaller than the eddy current loss in Comparative Examples 1 and 2. Specifically, the eddy current loss in Example 1 is 16.5 mW, the eddy current loss in Example 2 is 11.9 mW, and the eddy current loss in Example 3 is 11.2 mW. On the other hand, the eddy current loss in Comparative Example 1 is 48.4 mW, and the eddy current loss in Example 2 is 44.0 mW.

(Discussion)
As shown in FIG. 17, in a portion adjacent to the inductor wiring 30 in the direction along the first axis X, if the magnetic material having a large maximum cross-sectional area, that is, the magnetic ribbon 40 exists, the inductor wiring 30 Eddy current loss increases when current is passed. This is because the larger the area of the cross section perpendicular to the second axis Z in the magnetic material present in the portion adjacent to the inductor wiring 30 in the direction along the first axis X, the larger the eddy current in the magnetic material. It is assumed that there is.

In this regard, in each of Examples 1 to 3, the magnetic portion 80 is arranged in the portion adjacent to the inductor wiring 30 in the direction along the first axis X. The magnetic portion 80 has a plurality of magnetic spheres. A magnetic sphere corresponds to the magnetic body 80a. The maximum cross-sectional area of the magnetic sphere is smaller than the maximum cross-sectional area of the magnetic ribbon 40 . Therefore, in each of Examples 1 to 3, the eddy current loss can be made smaller than in each of Comparative Examples 1 and 2.

(Actions and effects in this embodiment)
The following actions and effects can be obtained in this embodiment.
(1-1) A magnetic portion 80 is arranged in the same position as the inductor wiring 30 in the direction along the second axis Z in the element body 20 . The area of the maximum cross section of the magnetic body 80 a contained in the magnetic portion 80 is smaller than the area of the main surface MF of the magnetic ribbon 40 . As a result, the eddy current loss of the inductor component 10 can be reduced compared to the case where the magnetic ribbon 40 is arranged in the same position as the inductor wiring 30 in the direction along the second axis Z in the element body 20 . Therefore, it is possible to suppress an increase in eddy current loss when a current is passed through the inductor wiring 30 .

(1-2) In the present embodiment, the magnetic portion 80 contains magnetic powder as the magnetic material 80a. Accordingly, it is possible to suppress an increase in the area of the maximum cross section of the magnetic body 80a.
(1-3) The magnetic portion 80 has a non-magnetic binder 80b. This makes it difficult for adjacent magnetic particles to come into contact with each other in the magnetic portion 80 . As a result, it is possible to suppress an increase in the area of the maximum cross section of the magnetic body 80a.

(1-4) In the first portion P1 and the third portion P3, a plurality of magnetic ribbons 40 are arranged in the direction along the third axis. A plurality of magnetic strips 40 are also arranged in the direction along the fourth axis. Therefore, an increase in the area of the main surface MF of one magnetic ribbon 40 can be suppressed. As a result, it is possible to suppress an increase in the eddy current generated in each magnetic ribbon 40 . Therefore, an increase in eddy current loss of inductor component 10 can be suppressed.

(1-5) A magnetic ribbon made of a magnetic material in an amorphous state is called an amorphous magnetic ribbon, and a magnetic ribbon made of a crystallized magnetic material such as nanocrystals is called a crystallized magnetic ribbon. In this case, the electrical resistance of the amorphous magnetic ribbon is greater than that of the crystallized magnetic ribbon.

In the present embodiment, all the magnetic ribbons 40 forming the first portion P1 are amorphous magnetic ribbons. As a result, the eddy current generated in the magnetic ribbon 40 forming the first portion P1 can be reduced compared to the case where the magnetic ribbon 40 forming the first portion P1 is a crystallized magnetic ribbon. Therefore, an increase in eddy current loss of inductor component 10 can be suppressed.

Further, in this embodiment, all the magnetic ribbons 40 forming the third portion P3 are amorphous magnetic ribbons. As a result, the eddy current generated in the magnetic ribbon 40 forming the first portion P1 can be reduced compared to the case where the magnetic ribbon 40 forming the third portion P3 is a crystallized magnetic ribbon. Therefore, an increase in eddy current loss of inductor component 10 can be suppressed.

(1-6) In the present embodiment, the first virtual straight line VL1 passes through the predetermined range AR11 of the first magnetic ribbon 41. Therefore, of the magnetic flux generated when a current flows through the inductor wiring 30, most of the magnetic flux in the direction along the first imaginary straight line VL1 in the vicinity of the first wiring end IP1 of the inductor wiring 30 is the first magnetic ribbon 41 except for the end in the direction along the first axis X. That is, of the magnetic flux generated when the current flows through the inductor wiring 30, the magnetic flux passing through the ends in the direction along the first magnetic ribbon 41 is reduced. Therefore, it is possible to suppress the disturbance of the magnetic flux and the local concentration of the magnetic flux. According to such a positional relationship between the first magnetic ribbon 41 and the inductor wiring 30, the characteristic index can be increased regardless of the filling rate of the magnetic material.

The characteristic index here is, for example, (L×Isat)×(L/Rdc). “L” is the inductance of inductor component 10 . “Isat” is the current value when the inductance L is reduced by 20% from the initial inductance L at 0.001 A, and is also called DC superposition characteristic. “Rdc” is the electrical resistance of the inductor wiring 30 to the DC current, that is, the DC wiring resistance.

(1-7) In this embodiment, the third imaginary straight line VL3 passes through the predetermined range AR11 of the second magnetic ribbon . Therefore, of the magnetic flux generated when a current flows through the inductor wiring 30, most of the magnetic flux in the direction along the second virtual straight line VL2 near the second wiring end IP2 of the inductor wiring 30 is generated by the second magnetic ribbon. 42 except for the end in the direction along the first axis X. That is, of the magnetic flux generated when the current flows through the inductor wiring 30, the magnetic flux passing through the ends in the direction along the second magnetic ribbon 42 is reduced. Therefore, it is possible to suppress the disturbance of the magnetic flux and the local concentration of the magnetic flux. According to such a positional relationship between the second magnetic ribbon 42 and the inductor wiring 30, the characteristic index is increased regardless of the filling rate of the magnetic material.

(1-8) In the present embodiment, the first side of the virtual rectangle VR drawn in the cross section orthogonal to the central axis CA is along the first axis X, and the second side of the virtual rectangle VR is along the second axis Z. Along. And the first side is longer than the second side. In this case, the magnetic flux is more likely to concentrate on the first wiring end IP1 and the second wiring end IP2, which are ends in the direction in which the first long side extends. Therefore, depending on the positional relationship between the first magnetic ribbon 41 and the inductor wiring 30, the characteristic index can be increased.

(1-9) In this embodiment, the second imaginary straight line VL2 passes through the inductor wiring 30 in a cross-sectional view perpendicular to the central axis CA. Since the first magnetic ribbon 41 is not excessively large in the direction along the first axis X, the eddy current generated in the first magnetic ribbon 41 is reduced.

(1-10) In this embodiment, the fourth imaginary straight line VL4 passes through the inductor wiring 30 in a cross-sectional view perpendicular to the central axis CA. Since the second magnetic ribbon 42 is not excessively large in the direction along the first axis X, the eddy current generated in the second magnetic ribbon 42 is reduced.

(1-11) In this embodiment, the dimensions of the plurality of magnetic strips 40 in the direction along the second axis Z are all equal. As a result, the magnetic flux density in each magnetic strip 40 is made uniform, and the magnetic flux is hard to concentrate and saturate at a specific location. As a result, the magnetic flux density of the entire element body 20 is improved.

(1-12) In the present embodiment, the dimensions in the direction along the second axis Z of the plurality of interlayer nonmagnetic portions 50 are all equal. Therefore, the disturbance of the magnetic flux generated at the interface between the interlayer non-magnetic portion 50 and the magnetic ribbon 40 can be made uniform.

<Second embodiment>
Next, a second embodiment of the inductor component will be described with reference to FIGS. 19 to 21. FIG. In the following description, the parts that are different from the first embodiment will be mainly described, and the same reference numerals will be given to members that are the same as or correspond to those of the first embodiment, and redundant description will be omitted. do.

19 and 20 show cross sections of the inductor component 10B. FIG. 19 is a cross section of the inductor component 10B perpendicular to the central axis CA of the inductor wiring 30. FIG. 20 is a cross section of inductor component 10B perpendicular to first axis X. FIG.

As shown in FIG. 19, the inductor component 10B is composed of a first portion P1, a second portion P2, and a third portion P3. The configuration of the first portion P1 is the same as that of the first portion P1 in the inductor component 10 of the first embodiment. The configuration of the third portion P3 is the same as that of the third portion P3 in the inductor component 10 of the first embodiment.

The second portion P2 is composed of the inductor wiring 30, the magnetic portion 80B, and the plurality of non-magnetic films 70. As shown in FIG.
The configuration of the inductor wiring 30 is the same as the configuration of the inductor wiring 30 in the inductor component 10 of the first embodiment. That is, the inductor wiring 30 extends in a direction orthogonal to both the first axis X and the second axis Z. As shown in FIG. In other words, the central axis CA of the inductor wiring 30 is orthogonal to both the first axis X and the second axis Z.

In the second portion P2, the portion other than the inductor wiring 30 is composed of the magnetic portion 80B and the plurality of nonmagnetic films 70. As shown in FIG. The configuration of the nonmagnetic film 70 is the same as the configuration of the nonmagnetic film 70 in the inductor component 10 of the first embodiment.

As shown in FIGS. 19 and 20, the magnetic portion 80B is arranged in the first positive direction X1 of the inductor wiring 30 in a cross-sectional view orthogonal to the central axis CA. A magnetic portion 80B is arranged in the first negative direction X2 of the inductor wiring 30 . That is, each magnetic part 80B is arranged at the same position as the inductor wiring 30 in the direction along the second axis Z. As shown in FIG.

Each magnetic portion 80B has a plurality of magnetic bodies. A magnetic body consists of a magnetic material. Also in this embodiment, the area of the maximum cross section of each magnetic material is smaller than the area of the main surface MF of the magnetic ribbon 40 .
In this embodiment, the magnetic material is the minute magnetic ribbon 81B. The fine magnetic ribbon 81B is flat. The term "flat plate" as used herein refers to a thin shape having a main surface, but is not limited to a rectangular parallelepiped with a thin thickness. , there may be holes inside.

The area of the maximum cross section of the minute magnetic ribbon 81B is smaller than the area of the main surface MF of the magnetic ribbon 40. In this embodiment, the volume of the minute magnetic ribbon 81B is smaller than the volume of the magnetic ribbon 40 . Specifically, the dimension along the first axis X of the minute magnetic ribbon 81B is smaller than the dimension along the first axis X of the magnetic ribbon 40 . The dimension in the direction along the central axis CA of the minute magnetic ribbon 81B is smaller than the dimension in the direction along the central axis CA of the magnetic ribbon 40 . The dimension of the minute magnetic ribbon 81B in the direction along the second axis Z may be the same as the dimension in the direction along the second axis Z of the magnetic ribbon 40, or may be different.

If the area of the maximum cross section of the minute magnetic ribbon 81B is smaller than the area of the main surface MF of the magnetic ribbon 40, the volume of the minute magnetic ribbon 81B is not smaller than the volume of the magnetic ribbon 40. may

A non-magnetic material is filled between the micromagnetic ribbons 81B adjacent to each other. In other words, a non-magnetic portion 81Ba made of a non-magnetic material is interposed between the micromagnetic ribbons 81B adjacent to each other.

In each magnetic portion 80B, each fine magnetic ribbon 81B is laminated in the direction along the second axis Z. In addition, at the same position along the second axis Z, a plurality of minute magnetic strips 81B are arranged at intervals in the direction along the third axis orthogonal to the second axis Z. FIG. In addition, at the same position along the second axis Z, a plurality of minute magnetic ribbons 81B are arranged at intervals in a direction along a fourth axis orthogonal to the second axis Z and the third axis. Note that the third axis is the same axis as the central axis CA, and the fourth axis coincides with the first axis X in this embodiment as well.

The fine magnetic ribbon 81B is made of a magnetic material. The magnetic material is, for example, a metallic magnetic material including Fe, Ni, Co, Cr, Cu, Al, Si, B and P and the like. In this embodiment, the magnetic material forming the minute magnetic ribbon 81B is the same as the magnetic material forming the magnetic ribbon 40 .

(About simulation results)
Next, simulation results comparing the characteristics obtained for the inductor component 10B with those of the inductor component of the comparative example will be described. Femtet (registered trademark) of Murata Software Co., Ltd. was used for the simulation.

The magnetic ribbon 40 is made of permalloy magnetic powder made of Ni and Fe. The relative magnetic permeability μr is 7000 and the saturation magnetic flux density Bs is 1.3T. Also, the electrical conductivity is 0.568181818MS/m. The BH curve of the magnetic ribbon 40 used satisfies B=Bs×tanh (μ0×μr×H/Bs). For the BH curve of the magnetic material, a portion where the relative permeability μr is "1" or more was used so as not to fall below the magnetic permeability of the vacuum, and the function of Femtet2019 was used to extrapolate the magnetic permeability of the vacuum.

Regarding the magnetic strip 40, the dimension along the first axis X is 0.99 mm, the dimension along the second axis Z is 0.02 mm, and the dimension along the central axis CA is 0.99 mm. and The dimension between the magnetic strips 40 adjacent to each other in the direction along the first axis X is 0.02 mm. The dimension between the magnetic ribbons 40 adjacent to each other in the direction along the second axis Z is 0.002 mm. The dimension between the magnetic ribbons 40 adjacent to each other in the direction along the central axis CA is 0.02 mm.

A non-magnetic gap for electrical insulation is provided between the inductor wiring 30 and the magnetic ribbon 40 adjacent to the inductor wiring 30 .
In this simulation, the dimension of the base body 20 along the central axis CA is 2.0 mm. That is, the dimension of the element body 20 along the central axis CA is smaller than the dimension of the inductor wiring 30 along the central axis CA by 0.4 mm. Therefore, the simulation is performed with the inductor wiring 30 projecting 0.2 mm from the end face of the element body 20 in the positive direction Y1 and the inductor wiring 30 projecting 0.2 mm from the end face of the element body 20 in the negative direction Y2.

Regarding the magnetic portion 80B, the shape of the fine magnetic ribbon 81B is a cube. The fine magnetic ribbon 81B is made of permalloy magnetic powder made of Ni and Fe. The relative magnetic permeability μr is 7000 and the saturation magnetic flux density Bs is 1.3T. Also, the electrical conductivity is 0.568181818MS/m. A BH curve satisfying B=Bs×tanh (μ0×μr×H/Bs) was used for the micromagnetic ribbon 81B. For the BH curve of the magnetic material, a portion where the relative permeability μr is "1" or more was used so as not to fall below the magnetic permeability of the vacuum, and the function of Femtet2019 was used to extrapolate the magnetic permeability of the vacuum.

A sinusoidal electric signal is input to the inductor wiring 30 of such an inductor component. The amplitude of the electrical signal is 2.25 A and the frequency of the electrical signal is 1 MHz.
FIG. 21 shows simulation results of Examples 4, 5, Comparative Examples 1 and 2. In FIG. Comparative Examples 1 and 2 are the same as those of the first embodiment.

In Example 4, each of the dimensions in the direction along the first axis X, the dimension in the direction along the second axis Z, and the dimension in the direction along the central axis CA of the minute magnetic ribbon 81B is 29 μm. The interval between the minute magnetic ribbons 81B adjacent to each other in the direction along the first axis X is 32.25 μm, and the interval between the minute magnetic ribbons 81B adjacent to each other in the direction along the second axis Z is 32.25 μm. 25 μm. The interval between the magnetic micro ribbons 81B adjacent to each other in the direction along the central axis CA is 32.25 μm.

In Example 5, each of the dimensions in the direction along the first axis X, the dimension in the direction along the second axis Z, and the dimension in the direction along the central axis CA of the minute magnetic ribbon 81B is 28 μm. The interval between the minute magnetic ribbons 81B adjacent to each other in the direction along the first axis X is 32.0 μm, and the interval between the minute magnetic ribbons 81B adjacent to each other in the direction along the second axis Z is 32.0 μm. 0 μm. The interval between the magnetic micro ribbons 81B adjacent to each other in the direction along the central axis CA is 32.0 μm.

As shown in FIG. 21, each of the eddy current losses in Examples 4 and 5 is smaller than the eddy current loss in Comparative Examples 1 and 2. Specifically, the eddy current loss in Example 4 is 18.7 mW, and the eddy current loss in Example 2 is 17.0 mW. On the other hand, the eddy current loss in Comparative Example 1 is 48.4 mW, and the eddy current loss in Example 2 is 44.0 mW.

(Discussion)
As shown in FIG. 17, when a magnetic material having a large volume, such as a magnetic strip 40, is present in a portion adjacent to the inductor wiring 30 in the direction along the first axis X, the current flows through the inductor wiring 30. eddy current loss increases. This is because the larger the area of the surface perpendicular to the second axis Z in the magnetic material present in the portion adjacent to the inductor wiring 30 in the direction along the first axis X, the larger the eddy current in the magnetic material. It is assumed that there is.

In this respect, in each of Examples 4 and 5, the magnetic portion 80B is arranged in the portion adjacent to the inductor wiring 30 in the direction along the first axis X. The area of the maximum cross section of the minute magnetic ribbon 81B included in the magnetic portion 80B is smaller than the area of the main surface MF of the magnetic ribbon 40 . Therefore, in Examples 4 and 5, the eddy current loss can be made smaller than in Comparative Examples 1 and 2, respectively.

It should be noted that when Example 4 and Example 5 are compared, the eddy current loss in Example 5 is smaller than the eddy current loss in Example 4, although slightly. This is probably because the maximum cross-sectional area of the minute magnetic ribbon 81B in Example 5 is smaller than the maximum cross-sectional area of the minute magnetic ribbon 81B in Example 4.

(Action and effect)
In this embodiment, in addition to the effects (1-1), (1-3) to (1-12) of the first embodiment, the following effects can be obtained.

(2-1) In this embodiment, the magnetic portion 80B has a plurality of fine magnetic ribbons 81B. In this case, when current flows through the inductor wiring 30, the eddy current generated in the fine magnetic ribbon 81B does not increase. As a result, the eddy current loss of inductor component 10B can be reduced by providing second portion P2 of inductor component 10 with magnetic portion 80B instead of magnetic ribbon 40. FIG.

(2-2) In the magnetic portion 80B, a non-magnetic material is filled between the mutually adjacent minute magnetic ribbons 81B. Therefore, it is possible to suppress contact between the adjacent minute magnetic ribbons 81B. Accordingly, it is possible to prevent a magnetic body having a large maximum cross-sectional area from being provided in the magnetic portion 80B. Therefore, the eddy current loss of inductor component 10B can be reduced.

<Third Embodiment>
The third embodiment differs from the first embodiment in the method of manufacturing inductor component 10 . Therefore, here, a method for manufacturing the inductor component 10 will be described.

As shown in FIG. 22, the method for manufacturing the inductor component 10 includes a first sheet preparation step S11, a second sheet preparation step S12, a stacking step S13, a crimping step S14, a singulation step S15, and sintering. A step S16 and a coating treatment step S17 are provided.

First, the first sheet preparation step S11 is performed. The first sheet 210 has a nonmagnetic layer 211 and a magnetic layer 212 . The magnetic layer 212 contains metal magnetic powder 212M, which is a magnetic material. As shown in FIG. 23 , in manufacturing the first sheet 210 , first, a film made of PET is prepared as the first base material 91 . The first base material 91 may be a substrate such as PET, alumina, or ferrite which is removed when the component is completed, or may be left as the non-magnetic layer 211 of glass. In the following description, two main surfaces of the first base member 91 are arranged so as to be orthogonal to the second axis Z, and a cross section orthogonal to the central axis CA is shown. Also, in FIGS. 23 to 30, the dimensional ratios are greatly changed from those in FIG. 3 for ease of understanding.

A non-magnetic paste made of a non-magnetic and insulating non-magnetic material is applied to the main surface of the first base material 91 facing the second positive direction Z1 and formed into a sheet. Thus, the non-magnetic layer 211 is formed. The non-magnetic layer 211 is made of a non-magnetic material including, for example, alumina, silica, crystallized glass, amorphous glass, and the like.

Next, as shown in FIG. 24, a metal magnetic paste containing metal magnetic powder 212M, which is a magnetic material, is applied to the surface of the non-magnetic layer 211 along the second axis Z and facing the second positive direction Z1. Thus, the magnetic layer 212 is formed. The magnetic layer 212 is made of metal magnetic paste in which the resin 92 contains a magnetic material. Although the details will be described later, part of the magnetic layer 212 shown in FIG. 24 constitutes the magnetic ribbon 40 . Therefore, the metal magnetic paste contains a magnetic material that forms the magnetic ribbon 40 . That is, the metal magnetic paste contains Fe, Ni, Co, Cr, Cu, Al, Si, B, P, and the like as metal magnetic materials.

Next, as shown in FIG. 25, grooves 212H are formed in the magnetic layer 212 by laser processing. The groove 212H penetrates the magnetic layer 212 . A portion of the non-magnetic layer 211 is exposed in the second positive direction Z1 along the second axis Z from the groove 212H when viewed from the direction along the second axis Z. As shown in FIG.

Next, as shown in FIG. 26, the grooves 212H formed in the magnetic layer 212 are filled with a non-magnetic paste made of a non-magnetic and insulating material by printing or the like. Thus, the in-groove non-magnetic portion 213 is formed. At the same time, a plurality of divided magnetic layers 212D obtained by dividing the magnetic layer 212 are formed. Furthermore, the first sheet 210 is prepared by forming the split magnetic layer 212D into a sheet. The first sheets 210 are prepared in the same number as the laminated number of the magnetic strips 40 of the inductor component 10 to be manufactured.

Next, a second sheet preparation step S12 is performed. The second sheet 220 has wiring patterns 221 and negative patterns 222 . First, in manufacturing the second sheet 220, a second base material 93 is prepared as shown in FIG. The second base material 93 may be a substrate such as PET, alumina, or ferrite which is removed when the component is completed, or may be left as the non-magnetic layer 211 of glass. In addition, in the following description, it is assumed that the two main surfaces of the second base material 93 are arranged so as to be orthogonal to the second axis Z. As shown in FIG.

A non-magnetic paste made of a non-magnetic and insulating non-magnetic material is applied to the main surface of the second base material 93 facing the second positive direction Z1 and formed into a sheet. Thus, the non-magnetic layer 211 is formed.

Next, the main surface of the non-magnetic layer 211 facing the second positive direction Z1 is partially coated with a conductive paste by printing or the like. Thereby, the wiring pattern 221 is formed. The wiring pattern 221 is made of a conductive material. For example, the wiring pattern 221 is made of Ag or Cu conductor paste.

The wiring pattern 221 may be formed by a method other than printing such as a screen printing method, a photolithography method using a photosensitive material, a plating method such as semi-additive, or transferring a wiring pattern formed on a separate sheet. A transfer method or the like may also be used. In the case of the plating method or the transfer method, a metal film containing no resin may be used as the material of the wiring pattern 221 instead of the conductive paste.

Next, as shown in FIG. 28, of the main surface facing the second positive direction Z1 of the non-magnetic layer 211, portions where the wiring pattern 221 is not applied are filled and coated with a negative paste by printing or the like. Thus, a negative pattern 222 is formed. Although the details will be described later, the negative pattern 222 constitutes the magnetic portion 80 . Therefore, although illustration is omitted, the negative pattern 222 contains magnetic powder and non-magnetic material that constitute the magnetic portion 80 . Thus, the second sheet 220 is prepared. In this embodiment, the non-magnetic layer 211 serves as a sheet-like base material for forming the wiring pattern 221 and the negative pattern 222 . In this embodiment, the non-magnetic material contained in the magnetic portion 80 is a sinterable non-magnetic material such as alumina or glass.

Next, a lamination step S13 of laminating the prepared first sheet 210 and second sheet 220 is performed. As shown in FIG. 29, first, the first base material 91 is peeled off from the first sheet 210, and the sheet is placed on a predetermined jig table (not shown) while maintaining the vertical direction of the sheet. The magnetic layer 212 of the non-magnetic layer 211 of the first sheet 210 is applied to the surface of the wiring pattern 221 and the negative pattern 222 of the second sheet 220 facing in the opposite direction to the surface on which the non-magnetic layer 211 is applied. Glue the side facing away from the side facing inward. As a result, the first sheet 210 is laminated in the second positive direction Z1 along the second axis Z of the second sheet 220 .

Similarly, the first base material 91 is peeled off from another first sheet 210 . Then, the magnetic layer 212 of the non-magnetic layer 211 in another first sheet 210 is placed on the surface of the first sheet 210 laminated on the second sheet 220 facing in the opposite direction to the surface bonded to the second sheet 220. The surface facing the opposite direction to the coated surface is faced and adhered. Although illustration is omitted, the first sheets 210 are laminated by the number of the magnetic ribbons 40 laminated on the third portion P3 of the inductor component 10 .

Next, the second base material 93 is peeled off from the second sheet 220 . The surface of the first sheet 210 on which the non-magnetic layer 211 of the magnetic layer 212 is applied and the surface of the second sheet 220 facing in the opposite direction to the surface on which the wiring pattern 221 of the non-magnetic layer 211 is applied. are glued together with opposite sides facing each other. Then, the first base material 91 is peeled off from the first sheet 210 .

Similarly, the magnetic layer 212 of another first sheet 210 is attached to the surface of the non-magnetic layer 211 of the first sheet 210 laminated on the second sheet 220 facing in the opposite direction to the surface on which the magnetic layer 212 is applied. The surfaces facing the opposite direction to the surface coated with the non-magnetic layer 211 are made to face each other and adhered. Although illustration is omitted, the same number of first sheets 210 as the number of magnetic ribbons 40 to be laminated on the first portion P1 of the inductor component 10 are laminated. In this manner, the first sheet 210 is repeatedly laminated on both main surfaces of the second sheet 220 . That is, when forming the laminate 200, a plurality of divided magnetic layers 212D are laminated.

Next, the crimping step S14 is performed. The first sheet 210 and the second sheet 220 laminated in the lamination step S13 are press-bonded by pressing such as WIP. Thus, a laminate 200 is formed.

Next, singulation step S15 is performed. As shown in FIG. 30, for example, the laminated body 200 is singulated by dicing along predetermined breaking lines DL. As a result, individual pieces 201 obtained by separating the laminate 200 into pieces are formed. The individual piece portion 201 is composed of a wiring pattern 221 and a divided magnetic layer 212D. A plurality of individual pieces 201 are arranged in a matrix in the laminate 200 . In addition, in this embodiment, the individual piece portion 201 has one wiring pattern 221 .

Next, the sintering step S16 is performed. As shown in FIG. 31, the individual pieces 201 of the laminate 200 that have been singulated in the singulation step S15 are sintered by firing for a predetermined time. As a result, the wiring pattern 221 becomes the inductor wiring 30 of the sintered body. The negative pattern 222 becomes the magnetic portion 80 of the sintered body. The nonmagnetic layer 211 becomes the interlayer nonmagnetic portion 50 of the sintered body. The in-groove non-magnetic portion 213 becomes the non-magnetic portion 60 of the sintered body. Moreover, since the resin volatilizes from the magnetic layer 212 by firing, only the magnetic material remains in the magnetic layer 212 . As a result, a sintered magnetic ribbon 40 made of a magnetic material is formed.

Next, the coating treatment step S17 is performed. A non-magnetic film 70, which is a non-magnetic insulator, covers the surface including the breaking line DL diced in the singulation step S15. As a result, the piece portion 201 becomes the inductor component 10 . Note that the volume of the inductor component 10 becomes smaller than the volume of the individual piece portion 201 by the sintering step S16.

<Change example>
Each of the above embodiments can be implemented with the following modifications. Each of the above-described embodiments and the following modifications can be implemented in combination within a technically consistent range.

· The shape of the base body 20 is not limited to the example of the above embodiment. For example, when viewed from the direction along the second axis Z, it may have a rectangular shape, or may have a polygonal shape other than a quadrangle. Further, the shape of the element body 20 may be circular or elliptical when viewed from the direction along the second axis Z. As shown in FIG. Moreover, the shape of the element body 20 may be a cube. Further, the shape of the base body 20 may be a rectangular parallelepiped having different dimensions in the direction along the third axis and the dimension in the direction along the fourth axis, or may be a polygonal column, a cylinder, or the like. may

· The shape of the inductor wiring 30 can be appropriately changed as long as the inductor wiring 30 can give inductance L to the inductor component 10 by generating a magnetic flux in the magnetic ribbon 40 when a current flows.

For example, in the modified inductor component 10C shown in FIG. 32, the inductor wiring 130 has an elliptical shape in the cross section perpendicular to the central axis CA. Then, a hypothetical rectangle VR2 with a minimum area, which circumscribes the inductor wiring 130 and has a first side along the first axis X and a second side along the second axis Z, is drawn. At this time, the first side of the virtual rectangle VR2 is longer than the second side of the virtual rectangle VR2. In this way, if the long side of the virtual rectangle VR2 is parallel to the first axis, the diamagnetic field of the first magnetic ribbon 41 is generated at the end of the wiring cross section in the direction along the first axis X where the magnetic flux is more concentrated. is more preferable because it corresponds to a region with a small .

Further, in each of the above embodiments, the shape of the inductor wiring 30 in the cross section perpendicular to the central axis CA may be such that the second side along the second axis Z is longer than the first side along the first axis X. Even in this case, the magnetic flux concentrates on the first wiring end IP1, which is the end of the inductor wiring 30 in the first positive direction X1. Therefore, the region of the first magnetic ribbon 41 having a small demagnetizing field corresponds to the first wiring end IP1 of the wiring cross section where the magnetic flux is more concentrated, which is more preferable.

Furthermore, in a cross section perpendicular to the central axis CA, the shape of the inductor wiring 30 may be a shape that does not have symmetry such as linear symmetry or rotational symmetry, such as when it includes one or more projecting portions. In this way, if the symmetry is broken in the cross section perpendicular to the central axis CA, there will be a place where the magnetic flux concentrates more than others. Then, it is preferable to determine the positional relationship of the first magnetic ribbon 41 so that the first wiring end IP1 is a portion such as a projecting portion where the magnetic flux concentrates more than others.

In addition, in a cross section orthogonal to the central axis CA, the shape of the inductor wiring 30 may be square or circular. In this case, the virtual rectangle VR drawn in the cross section perpendicular to the central axis CA is a square, and the first side of the virtual rectangle VR does not have to be longer than the second side of the virtual rectangle VR.

· The position of the inductor wiring 30 in the direction along the first axis X is not limited to the example of the above embodiment. It is sufficient that the position of the first wiring end IP1 of the inductor wiring 30 in the direction along the first axis X is within the predetermined range AR11 of the first magnetic ribbon 41 . For example, the first wiring end IP1 may be separated from the center of the first magnetic ribbon 41 in the direction along the first axis X.

If the first virtual straight line VL1 passes through the predetermined range AR11 of the magnetic ribbon 40 different from the first magnetic ribbon 41, the first virtual straight line VL1 passes through the predetermined range AR11 of the first magnetic ribbon 41. VL1 may not pass through.

- The first imaginary straight line VL1 does not have to pass through the predetermined range AR11 in any of the plurality of magnetic strips 40 forming the element body 20 .
The position of the second wiring end IP2 of the inductor wiring 30 in the direction along the first axis X should be within the predetermined range AR11 of the second magnetic ribbon 42 . For example, the second wiring end IP2 may be separated from the center of the second magnetic ribbon 42 in the direction along the first axis X.

If the second virtual straight line VL2 passes through the predetermined range AR11 of the magnetic ribbon 40 different from the second magnetic ribbon 42, the second virtual straight line VL2 passes through the predetermined range AR11 of the second magnetic ribbon 42. VL2 may not pass.

The second imaginary straight line VL2 does not have to pass through the predetermined range AR11 in any of the plurality of magnetic ribbons 40 forming the element body 20 .
- The shape of the inductor wiring 30 is not limited to a linear shape. It only needs to extend along the main surface MF of the magnetic thin strip 40, and may have, for example, a curved shape as a whole or a meandering shape. When the inductor wiring 30 extends on the same plane, it is easy to adjust the arrangement of the first wiring end IP1 of the inductor wiring 30 and the first magnetic ribbon 41 . In this case, the direction along the first axis X may change depending on the position at which the element body 20 is cut.

Also, the inductor wiring 30 may be connected to a lead wiring extending in a direction intersecting the main surface MF, a via wiring extending in a direction along the second axis Z, or the like. Furthermore, a plurality of inductor wirings 30 may be connected to via wirings extending in the direction along the second axis Z, and may have a three-dimensional spiral shape such as a spiral shape or a helical shape as a whole. In this case, the inductor wiring 30 is the portion extending along the main surface MF of the magnetic ribbon 40 .

- The material of the inductor wiring 30 is not limited to the example of the above embodiment as long as it is a conductive material. For example, the material of the inductor wiring 30 may be a conductive resin.
- The central axis CA and the third axis may not coincide. Also, the fourth axis does not have to coincide with the first axis X. For example, when the inductor wiring 30 has a meandering shape as described above, the central axis CA extends in a meandering shape. In this case, the third axis should be orthogonal to the second axis Z, and the fourth axis should be orthogonal to the second axis Z and intersect the third axis. Even in this case, if a plurality of magnetic ribbons 40 are aligned in the direction along the third axis or in a direction along the fourth axis, the magnetic ribbons 40 are aligned along the second axis Z. The area of the magnetic ribbon 40 when viewed from the direction along the second axis Z is smaller than when there is one at the same position along the second axis Z. Therefore, the eddy current generated in one magnetic strip 40 is reduced.

The positional relationship between the first imaginary straight line VL1 passing through the first wiring end IP1 and the predetermined range AR11 of the first magnetic ribbon 41 described in each of the above embodiments is , any one cross section. In other words, the positional relationship between the first virtual straight line VL1 and the predetermined range AR11 of the first magnetic ribbon 41 does not have to be satisfied in all areas of the inductor wiring 30 . If the above positional relationship is satisfied in at least one cross section, the effects of the above embodiments can be obtained at that cross section.

The positional relationship between the second virtual straight line VL2 passing through the second wiring end IP2 and the predetermined range AR11 of the second magnetic ribbon 42 described in each of the above embodiments is , any one cross section. In other words, the positional relationship between the second virtual straight line VL2 and the predetermined range AR11 of the second magnetic strip 42 does not have to be satisfied in the entire region of the inductor wiring 30 . If the above positional relationship is satisfied in at least one cross section, the effects of the above embodiments can be obtained at that cross section.

· An external electrode may be connected to the portion where the inductor wiring 30 is exposed from the element body 20 . For example, external electrodes may be formed on both end surfaces of the inductor wiring 30 in the direction along the central axis CA and both end surfaces of the element body 20 in the direction along the central axis CA by coating, printing, plating, or the like.

· The direction in which the magnetic ribbon 40 and the interlayer non-magnetic portion 50 are laminated may not be orthogonal to the central axis CA and the first axis X due to manufacturing errors or the like. In the above-described embodiment, the fact that the magnetic ribbons 40 and the like are "laminated in the direction along the second axis Z" allows for such manufacturing errors.

· The number of magnetic strips 40 stacked in the direction along the second axis Z should be two or more. In this case, the inductor wiring 30 and the interlayer non-magnetic portion 50 may be arranged between the two magnetic strips 40 .

· The material of the interlayer non-magnetic portion 50 is not limited to the example of the above embodiment as long as it is a non-magnetic material. The interlayer non-magnetic portion 50 may be made of resin other than acrylic resin, epoxy resin, or silicon resin, or may be made of non-magnetic ceramics such as alumina, silica, or glass, or non-magnetic inorganic materials containing these. It may be a void or a mixture thereof. In this regard, the same applies to the nonmagnetic portion 60 and the nonmagnetic film 70 . The materials of the interlayer nonmagnetic portion 50, the nonmagnetic portion 60, and the nonmagnetic film 70 may be different from each other, or may be partially different, as long as they are nonmagnetic materials.

· In each of the above embodiments, the interlayer nonmagnetic portion 50, the nonmagnetic portion 60, and the nonmagnetic film 70 may be integrated or may be separate members. For example, the interlayer non-magnetic portion 50 may be hollow, or may be composed of an insulating oxide film obtained by oxidizing the surface of the magnetic ribbon 40 .

- In each of the above-described embodiments, the interlayer non-magnetic portion 50 may be omitted. In this case, the magnetic ribbons 40 adjacent to each other in the direction along the second axis Z may be in direct contact with each other.
- In the above embodiment, the non-magnetic portion 60 may be omitted. In this case, the magnetic ribbons 40 aligned in the direction along the third axis or the fourth axis may be in direct contact with each other. Also, the nonmagnetic portion 60 may exist between the inductor wiring 30 and the magnetic ribbon 40 . In this case, the nonmagnetic portion 60 can ensure insulation between the inductor wiring 30 and the magnetic ribbon 40 .

It should be noted that "a plurality of magnetic ribbons 40 are laminated" and "a plurality of magnetic ribbons 40 are lined up" specifically mean that the adjacent magnetic ribbons 40 are completely or partially insulated from each other. It refers to the case where there is a physical boundary on a microscopic scale. For example, it does not include a state in which the magnetic strips 40 are sintered and completely integrated.

· As long as the first magnetic ribbon 41 exists in the first portion P1, the first magnetic ribbon 41 does not have to exist in the third portion P3. Conversely, if the first magnetic ribbon 41 exists in the third portion P3, the first magnetic ribbon 41 may not exist in the first portion P1. Depending on the position of the first wiring end IP1 in the direction along the second axis Z, the first magnetic ribbon 41 may exist only on either the first portion P1 or the third portion P3.

· As long as the second magnetic ribbon 42 exists in the first portion P1, the second magnetic ribbon 42 does not have to exist in the third portion P3. Conversely, if the second magnetic ribbon 42 exists in the third portion P3, the second magnetic ribbon 42 may not exist in the first portion P1. Depending on the position of the second wiring end IP2 in the direction along the second axis Z, the second magnetic ribbon 42 may exist only on either the first portion P1 or the third portion P3.

According to each of the above embodiments, two magnetic strips 40 are arranged in the direction along the first axis X at the same position along the second axis Z, and the direction along the central axis CA, that is, the third axis. 2 are lined up in the . That is, when "M" and "N" are positive integers, "M" magnetic ribbons 40 are arranged in the same position along the second axis Z in the direction along the third axis. "N" pieces are arranged in the direction along the first axis X, that is, the fourth axis, and both "M" and "N" are two. In the above embodiment, "M", which is the number of first magnetic ribbons 41 arranged in the direction along the fourth axis, may be one, or may be three or more. Also, "N", which is the number of magnetic ribbons 40 arranged in the direction along the central axis CA, may be one, or may be three or more. Note that if at least one of "M" and "N" is 2 or more, the area of each magnetic ribbon 40 as viewed from the second axis Z can be reduced, so loss due to eddy currents can be reduced. Easy to make small.

· The magnetic ribbon 40 does not have to be made of an amorphous magnetic material. That is, the magnetic ribbon 40 may be a magnetic ribbon made of a crystallized magnetic material such as nanocrystals. For example, the magnetic ribbon 40 may be a magnetic layer made of FeSiBPCu as a magnetic material. According to this configuration, the saturation magnetic flux density Bs of

inductor components

10 and 10B can be increased.

· In the first embodiment, the magnetic powder contained in the magnetic portion 80 does not have to be an amorphous magnetic material. That is, the magnetic portion 80 may be configured to include a crystallized magnetic material such as nanocrystals.

· In the second embodiment, the fine magnetic ribbon 81B does not have to be made of an amorphous magnetic material. That is, the fine magnetic ribbon 81B may be a ribbon made of a crystallized magnetic material such as nanocrystals.

· In each of the above embodiments, the non-magnetic binder 80b may be made of glass. That is, the

magnetic portions

80 and 80B may be glass composite portions in which the non-magnetic binder 80b is made of glass.

・In the second portion P2, if the

magnetic portions

80 and 80B are arranged in the first positive direction X1 of the inductor wiring 30, the

magnetic portions

80 and 80B should not be arranged in the first negative direction X2 of the inductor wiring 30. may In this case, for example, in the first negative direction X2 of the inductor wiring 30, a laminate in which the magnetic ribbons 40 and the interlayer non-magnetic portions 50 are alternately laminated in the direction along the second axis Z may be arranged. .

· The distance between a pair of magnetic ribbons 40 adjacent to each other in the direction along the second axis Z may be different. For example, if the dimension of the interlayer nonmagnetic portion 50 in the direction along the second axis Z is small, a manufacturing error of about 20% may occur depending on the manufacturing method. Further, for example, as in the modified example described above, part of the interlayer non-magnetic portion 50 may be hollow, so that the gap between a pair of magnetic ribbons 40 adjacent to each other in the direction along the second axis Z may vary. obtain. A gap may also exist between the interlayer non-magnetic portion 50 and the magnetic ribbon 40 . In this case, the distance between a pair of magnetic ribbons 40 adjacent to each other in the direction along the second axis Z is the sum of the lengths of the interlayer nonmagnetic portion 50 and the gap. Therefore, the interval between one pair of magnetic ribbons 40 adjacent in the direction along the second axis Z is , 80% or more and 120% or less, they can be regarded as substantially equal. The interval between a pair of magnetic ribbons 40 adjacent in the direction along the second axis Z is the second Let it be the smallest dimension in the direction along the Z axis. In addition, the average value of the spacing between multiple sets of magnetic ribbons 40 adjacent in the direction along the second axis Z is 5 sets measured from one image in which six or more magnetic ribbons 40 are fitted with an electron microscope. is the average value of the spacing between the magnetic strips 40 of .

- The dimensions of the plurality of magnetic strips 40 in the direction along the second axis Z may not be the same, and may vary by more than 20% from the average value.
- The dimensions of the plurality of interlayer non-magnetic portions 50 in the direction along the second axis Z may be different. If the dimension of the interlayer nonmagnetic portion 50 in the direction along the second axis Z is small, a manufacturing error of about 20% may occur depending on the manufacturing method. Therefore, the dimension of the interlayer nonmagnetic portion 50 in the direction along the second axis Z is 80% or more and 120% or less of the average value of the dimension of the plurality of interlayer nonmagnetic portions 50 in the direction along the second axis Z. If so, they can be considered almost equal. The dimension of one interlayer nonmagnetic portion 50 in the direction along the second axis Z is the average value of three points in one image magnified between 1,000 and 10,000 times with an electron microscope. and In addition, the dimension of the plurality of interlayer nonmagnetic portions 50 in the direction along the second axis Z is one interlayer nonmagnetic portion 50 measured by an electron microscope using a single image containing three or more interlayer nonmagnetic portions 50. is the average value of the dimensions in the direction along the second axis Z of .

- The dimensions of the plurality of interlayer non-magnetic portions 50 in the direction along the second axis Z may not be the same, and may vary by more than 20% from the average value.
- The number and positions of the non-magnetic portions 60 are not limited to those in the above embodiment. The number and positions of the non-magnetic portions 60 may be changed according to the number and positions of the magnetic strips 40 in the direction along the first axis X and in the direction along the central axis CA. Also, the size of the non-magnetic portion 60 may be appropriately changed according to the interval between the magnetic ribbons 40 at the same position in the direction along the second axis Z. FIG.

DESCRIPTION OF

SYMBOLS

10, 10B, 10C... Inductor component 20...

Element body

30, 130... Inductor wiring 40... Magnetic ribbon 41... First magnetic ribbon 42... Second magnetic ribbon 50... Interlayer non-magnetic portion 60... Non-magnetic portion 70...

Non-magnetic film

80, 80B... Magnetic portion 80a... Magnetic material 80b... Non-magnetic binder 81B... Fine magnetic ribbon 81Ba... Non-magnetic part AR11... Predetermined range CA... Central axis IP1... First wire end IP2... Second wire end MF Principal surface MP11, MP21 First end MP12, MP22 Second end VL1 First virtual straight line VL2 Second virtual straight line VL3 Third virtual straight line VL4 Fourth virtual straight line VR, VR2 Virtual rectangle X Third 1st axis Z...2nd axis

Claims

an element body including a plurality of flat magnetic ribbons made of a magnetic material, wherein the plurality of magnetic ribbons are laminated in a direction orthogonal to the main surface of the magnetic ribbon;
an inductor wiring extending along the main surface inside the base body,
When the axis along which the inductor wiring extends is taken as a central axis, the axis along the main surface in a cross-sectional view perpendicular to the central axis is taken as a first axis, and the axis perpendicular to the main surface in a cross-sectional view is taken as a second axis ,
the base body has a magnetic portion arranged at the same position as the inductor wiring in the direction along the second axis;
The magnetic part contains a plurality of magnetic bodies made of a magnetic material,
When the cross section of the magnetic body having the maximum area among the cross sections of the magnetic body cut in the direction orthogonal to the second axis is defined as the maximum cross section, the area of the maximum cross section of the plurality of magnetic bodies is , an inductor component smaller than the area of the main surface.
the plurality of magnetic bodies are magnetic powder,
2. The inductor component according to claim 1, wherein the magnetic portion is made of a non-magnetic material and has a non-magnetic binder containing a plurality of the magnetic powders.
The inductor component according to claim 2, wherein the non-magnetic binder is made of glass.
The inductor component according to claim 2, wherein the non-magnetic binder is made of resin.
The inductor component according to any one of claims 1 to 4, wherein in the magnetic portion, a plurality of the magnetic bodies are arranged in a direction perpendicular to the second axis.
6. The inductor component according to claim 5, wherein in said magnetic portion, a non-magnetic portion made of a non-magnetic material is interposed between said magnetic bodies adjacent to each other in a direction orthogonal to said second axis.
The inductor component according to any one of claims 1 to 6, wherein in the magnetic portion, a plurality of the magnetic bodies are arranged in a direction along the second axis.
8. The inductor component according to claim 7, wherein in the magnetic portion, a nonmagnetic portion made of a nonmagnetic material is interposed between the magnetic bodies that are adjacent to each other in the direction along the second axis.
When "M" and "N" are positive integers, and at least one of "M" and "N" is "2" or more,
At the same position along the second axis, "M" magnetic ribbons are arranged in a direction along a third axis orthogonal to the second axis, and are orthogonal to the second axis and the third axis. The inductor component according to any one of claims 1 to 8, wherein "N" pieces are arranged in a direction along the fourth axis.
The inductor component according to any one of claims 1 to 9, wherein the plurality of magnetic bodies are sintered bodies.
The inductor component according to any one of claims 1 to 9, wherein the plurality of magnetic bodies include the magnetic material in an amorphous state.
When one of the two directions along the first axis is defined as the first positive direction,
In the cross-sectional view,
The end of the inductor wiring in the first positive direction is defined as a first wiring end,
Among the magnetic ribbons laminated in the direction along the second axis with respect to the inductor wiring, the magnetic ribbon having the shortest distance in the direction along the second axis from the end of the first wiring is selected as the first magnetic ribbon. as a magnetic strip,
When the range excluding both ends of the magnetic ribbon in the direction along the first axis is defined as a predetermined range,
When drawing a first imaginary straight line passing through the first wiring end and extending in a direction along the second axis, the first imaginary straight line passes through the predetermined range of the first magnetic strip. 12. The inductor component according to any one of claims 11 to 13.
When the direction opposite to the first positive direction is defined as the first negative direction,
In the cross-sectional view,
When the first positive end of the first magnetic ribbon is defined as a first end and the first negative direction end is defined as a second end,
13. The inductor component according to claim 12, wherein when a second imaginary straight line is drawn through the second end in a direction along the second axis, the second imaginary straight line passes through the inductor wiring.
In the cross-sectional view, when drawing a virtual rectangle with a minimum area that circumscribes the inductor wiring and has a first side along the first axis and a second side along the second axis, the first side is longer than the second side.