WO2022180663A1 - Foreign matter detection device and foreign matter detection method - Google Patents

Foreign matter detection device and foreign matter detection method Download PDF

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Publication number
WO2022180663A1
WO2022180663A1 PCT/JP2021/006778 JP2021006778W WO2022180663A1 WO 2022180663 A1 WO2022180663 A1 WO 2022180663A1 JP 2021006778 W JP2021006778 W JP 2021006778W WO 2022180663 A1 WO2022180663 A1 WO 2022180663A1
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WO
WIPO (PCT)
Prior art keywords
component
inspection area
component mounting
foreign matter
mounting machine
Prior art date
Application number
PCT/JP2021/006778
Other languages
French (fr)
Japanese (ja)
Inventor
恵市 小野
一也 小谷
Original Assignee
株式会社Fuji
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社Fuji filed Critical 株式会社Fuji
Priority to JP2023501697A priority Critical patent/JP7473735B2/en
Priority to DE112021007148.3T priority patent/DE112021007148T5/en
Priority to PCT/JP2021/006778 priority patent/WO2022180663A1/en
Priority to CN202180091856.2A priority patent/CN116746292A/en
Publication of WO2022180663A1 publication Critical patent/WO2022180663A1/en

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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/08Monitoring manufacture of assemblages
    • H05K13/081Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/08Monitoring manufacture of assemblages
    • H05K13/083Quality monitoring using results from monitoring devices, e.g. feedback loops

Definitions

  • This specification discloses a technology related to a foreign object detection device and a foreign object detection method.
  • the mounting line described in Patent Document 1 includes first camera means, second camera means, and image processing means.
  • the first camera means is a camera means capable of viewing at least a part of the printed circuit board, and is provided so as to be able to image the printed circuit board before the electronic component mounting operation in any of the mounting machines.
  • the second camera means is a camera means capable of capturing the same range as the first camera means in its field of view, and is capable of capturing images of electronic components by any mounter or by a mounter in a process subsequent to the mounter. It is provided so that the printed circuit board can be imaged after the mounting work.
  • the image processing means performs image processing by comparing the image data captured by the second camera means with the image data captured by the first camera means.
  • the mounting line described in Patent Document 1 attempts to detect abnormal solder printing when solder is printed on a printed circuit board, or abnormal mounting of electronic components when electronic components are mounted on a printed circuit board.
  • the mounting of the component may be defective, and it is necessary to determine whether there is any foreign matter adhering to the board.
  • members other than foreign matter are erroneously determined to be foreign matter.
  • the characteristic amount of the inspection area obtained by image processing the image data varies with time in the bonding material applied to the inspection area of the substrate and used to bond the board and the component. There is a possibility of erroneously judging it as a foreign object.
  • the present specification provides a foreign matter detection apparatus and a foreign matter detection method capable of suppressing erroneous determination of foreign matter due to aging of a joining member that joins a board and a component coated on an inspection area of the board. Disclose.
  • a foreign object detection device that includes an acquisition unit, a determination unit, and a setting unit.
  • the acquisition unit acquires a plurality of image data of the same inspection area by imaging at least a part of the inspection area of the substrate a plurality of times during a predetermined allowable time.
  • the determination unit determines whether or not there is a foreign substance adhering to the inspection area based on a difference in feature amounts of the inspection area acquired by image processing each of the plurality of image data acquired by the acquisition unit. .
  • the setting unit detects that the bonding member is mistaken as the foreign matter in the determination unit when the feature amount of the inspection area varies due to a change in the bonding member applied to the inspection area that bonds the substrate and the component over time.
  • the permissible time is set in advance so as not to be judged.
  • This specification also discloses a foreign matter detection method including an acquisition process, a determination process, and a setting process.
  • the acquisition step an inspection area of at least a part of the substrate is imaged a plurality of times during a predetermined allowable time to acquire a plurality of image data of the same inspection area.
  • the determining step determines whether or not there is a foreign substance adhering to the inspection area based on a difference in feature amounts of the inspection area obtained by image processing each of the plurality of image data obtained by the obtaining step. .
  • the bonding member is mistaken as the foreign matter in the determination step due to variation in the feature amount of the inspection region due to a change in the bonding member applied to the inspection region and bonding the component to the substrate over time.
  • the permissible time is set in advance so as not to be judged.
  • the above-described foreign matter detection device it is possible to suppress erroneous determination of foreign matter due to changes over time in the bonding member that is applied to the inspection area of the substrate and joins the board and the component. What has been described above with respect to the foreign object detection device can be similarly applied to the foreign object detection method.
  • FIG. 2 is a configuration diagram showing a configuration example of a work line for substrates; It is a top view which shows the structural example of a component mounting machine.
  • 3 is a block diagram showing an example of control blocks of the foreign object detection device;
  • FIG. 5 is a flow chart showing an example of a control procedure by a foreign object detection device;
  • FIG. 4 is a schematic diagram showing an example of reference data; It is a schematic diagram which shows an example of comparison data. It is a schematic diagram which shows an example of the relationship between allowable time, the 1st required time, and the 2nd required time.
  • 5 is a flow chart showing an example of a control procedure by a foreign object detection device;
  • Embodiment 1-1 Configuration Example of Board-Related Work Line WL0
  • predetermined board-related work is performed on the board 90 .
  • the type and number of board-oriented work machines WM0 that constitute board-oriented work line WL0 are not limited.
  • the board-to-board work line WL0 of the present embodiment includes a plurality of board-to-board work machines WM0 including a printing machine WM1, a print inspection machine WM2, a component mounting machine WM3, a reflow furnace WM4, and an appearance inspection machine WM5.
  • the substrate 90 is transported in this order by the substrate transport device.
  • the printing machine WM1 prints solder on the mounting positions of the plurality of components 91 on the board 90 .
  • the print inspection machine WM2 inspects the printed state of the solder printed by the printer WM1.
  • the component mounter WM3 mounts a plurality of components 91 on a board 90 on which solder has been printed by the printer WM1.
  • the number of component mounting machines WM3 may be one or plural. When a plurality of component mounters WM3 are provided, a plurality of components 91 can be mounted by the plurality of component mounters WM3.
  • the reflow furnace WM4 heats the substrate 90 on which a plurality of components 91 are mounted by the component mounter WM3, melts the solder, and performs soldering.
  • the appearance inspection machine WM5 inspects the mounting state of the plurality of components 91 mounted by the component mounting machine WM3.
  • the board-related work line WL0 can use a plurality of board-related work machines WM0 to transport the boards 90 in sequence and perform production processes including inspection processes to produce the board products 900 .
  • the board-to-board work line WL0 includes board-to-board work machines WM0 such as, for example, a function inspection machine, a buffer device, a board supply device, a board reversing device, a shield mounting device, an adhesive coating device, and an ultraviolet irradiation device. You can prepare.
  • board-to-board work machines WM0 such as, for example, a function inspection machine, a buffer device, a board supply device, a board reversing device, a shield mounting device, an adhesive coating device, and an ultraviolet irradiation device. You can prepare.
  • a plurality of board-oriented work machines WM0 and the line management device LC0 that constitute the board-oriented work line WL0 are communicably connected by a communication unit.
  • the line management device LC0 and the management device HC0 are communicably connected by a communication unit.
  • the communication unit can communicably connect them by wire or wirelessly, and various communication methods can be used.
  • a local information communication network (LAN: Local Area Network) is configured by a plurality of board-to-board work machines WM0, line management devices LC0, and management devices HC0. Therefore, the plurality of board-oriented work machines WM0 can communicate with each other via the communication unit. Also, the plurality of board-oriented work machines WM0 can communicate with the line management device LC0 via the communication unit. Furthermore, the line management device LC0 and the management device HC0 can communicate with each other via the communication unit.
  • LAN Local Area Network
  • the line management device LC0 controls the plurality of board-oriented work machines WM0 that constitute the board-oriented work line WL0, and monitors the operation status of the board-oriented work line WL0.
  • the line management device LC0 stores various control data for controlling the plurality of work machines for board WM0.
  • the line management device LC0 transmits control data to each of the plurality of board-oriented work machines WM0. Further, each of the plurality of board-oriented work machines WM0 transmits the operation status and production status to the line management device LC0.
  • the management device HC0 manages at least one line management device LC0. For example, the operation status and production status of the board-oriented work machine WM0 acquired by the line management device LC0 are transmitted to the management device HC0 as necessary.
  • the management device HC0 is provided with a storage device.
  • the storage device can store various acquired data acquired by the board-oriented work machine WM0. For example, various image data captured by the board-oriented work machine WM0 are included in the acquired data. A record (log data) of the operation status acquired by the board-oriented work machine WM0 is included in the acquired data.
  • the storage device can also store various production information regarding the production of the board product 900 .
  • the substrate work line WL0 is equipped with an input/output device 80.
  • a known input/output device can be used as the input/output device 80 .
  • the input/output device 80 includes a display unit, and displays various data in a visible manner.
  • the display unit is configured by a touch panel, and functions as an input device for receiving various operations by the operator.
  • the component mounting machine WM3 mounts a plurality of components 91 on a board 90 .
  • the component mounting machine WM3 includes a substrate conveying device 11, a component supply device 12, a component transfer device 13, a component camera 14, a substrate camera 15, and a control device 16.
  • the substrate transport device 11 is configured by, for example, a belt conveyor, etc., and transports the substrate 90 in the transport direction (X-axis direction).
  • the substrate 90 is a circuit board on which electronic circuits, electric circuits, magnetic circuits, and the like are formed.
  • the board transfer device 11 carries the board 90 into the component mounting machine WM3 and positions the board 90 at a predetermined position inside the machine. After the component mounting machine WM3 finishes mounting the plurality of components 91, the board transfer device 11 carries the board 90 out of the component mounting machine WM3.
  • the component supply device 12 supplies a plurality of components 91 to be mounted on the board 90 .
  • the component supply device 12 includes a plurality of feeders 12a provided along the transport direction (X-axis direction) of the substrate 90 .
  • Each of the plurality of feeders 12a is equipped with a reel.
  • a carrier tape containing a plurality of components 91 is wound around the reel.
  • the feeder 12a pitch-feeds the carrier tape and supplies the components 91 so as to be picked up at a supply position located on the leading end side of the feeder 12a.
  • the component supply device 12 can also supply relatively large electronic components (for example, lead components) compared to chip components in a state of being arranged on a tray.
  • the component transfer device 13 includes a head driving device 13a and a moving table 13b.
  • the head driving device 13a is configured such that a moving table 13b can be moved in the X-axis direction and the Y-axis direction by a linear motion mechanism.
  • a mounting head 20 is detachably (exchangeably) provided on the moving table 13b by a clamp member.
  • the mounting head 20 uses at least one holding member 30 to pick up and hold the component 91 supplied by the component supply device 12 , and mounts the component 91 on the substrate 90 positioned by the substrate transfer device 11 .
  • a suction nozzle, a chuck, or the like can be used as the holding member 30 .
  • a known imaging device can be used for the component camera 14 and the substrate camera 15 .
  • the component camera 14 is fixed to the base of the component mounter WM3 so that the optical axis faces upward in the vertical direction (Z-axis direction).
  • the component camera 14 can image the component 91 held by the holding member 30 from below.
  • the board camera 15 is provided on the moving table 13b of the component transfer device 13 so that the optical axis is downward in the vertical direction (Z-axis direction).
  • the substrate camera 15 can image the substrate 90 from above.
  • the component camera 14 and the substrate camera 15 perform imaging based on control signals sent from the control device 16 . Image data of captured images captured by the component camera 14 and the board camera 15 are transmitted to the control device 16 .
  • the control device 16 includes a known arithmetic device and storage device, and constitutes a control circuit. Information, image data, and the like output from various sensors provided in the component mounting machine WM3 are input to the control device 16 .
  • the control device 16 sends a control signal to each device based on the control program and predetermined wearing conditions set in advance.
  • control device 16 causes the substrate camera 15 to image the substrate 90 positioned by the substrate transport device 11 .
  • the control device 16 processes the image captured by the board camera 15 and recognizes the positioning state of the board 90 .
  • the control device 16 causes the holding member 30 to collect and hold the component 91 supplied by the component supply device 12 , and causes the component camera 14 to image the component 91 held by the holding member 30 .
  • the control device 16 processes the image captured by the component camera 14 and recognizes the holding posture of the component 91 .
  • the control device 16 moves the holding member 30 upward from the intended mounting position preset by the control program or the like. Further, the control device 16 corrects the planned mounting position based on the positioning state of the substrate 90, the holding attitude of the component 91, and the like, and sets the mounting position where the component 91 is actually mounted.
  • the planned mounting position and mounting position include the position (X-axis coordinate and Y-axis coordinate) as well as the rotation angle.
  • the control device 16 corrects the target position (X-axis coordinate and Y-axis coordinate) and rotation angle of the holding member 30 according to the mounting position.
  • the controller 16 lowers the holding member 30 at the corrected rotation angle at the corrected target position to mount the component 91 on the substrate 90 .
  • the control device 16 repeats the pick-and-place cycle described above to perform a mounting process of mounting a plurality of components 91 on the board 90 .
  • Configuration Example of Foreign Matter Detector 70 As shown in FIG. It is necessary to determine whether or not there is a foreign substance 92 adhering to the substrate 90 . A plurality of image data PD0 obtained by imaging the same inspection area CA0 of at least a part of the substrate 90 are compared, and the presence or absence of the foreign matter 92 is determined based on the difference in the feature amount (for example, pixel luminance etc.) of the image data PD0. In this case, there is a possibility that a member other than the foreign object 92 is erroneously determined to be the foreign object 92 .
  • the bonding member 93 for example, solder, adhesive, etc.
  • the joining member 93 may be erroneously determined to be a foreign object 92 . Therefore, the board-to-board work line WL0 of the present embodiment is provided with a foreign matter detection device 70 capable of suppressing erroneous determination of the foreign matter 92 due to changes in the bonding member 93 over time.
  • the foreign object detection device 70 is provided with an acquisition unit 71, a determination unit 72, and a setting unit 73 when viewed as control blocks.
  • the foreign object detection device 70 can also include a transport control section 74 .
  • the foreign matter detection device 70 can also include a mounting control section 75 .
  • the foreign matter detection device 70 of this embodiment includes an acquisition section 71 , a determination section 72 , a setting section 73 , a transport control section 74 and a mounting control section 75 .
  • the foreign matter detection device 70 can be provided in various control devices.
  • the foreign object detection device 70 can be provided in the control device 16 of the component mounting machine WM3, the line management device LC0, the management device HC0, and the like.
  • the foreign object detection device 70 can also be formed on the cloud.
  • an acquisition unit 71, a determination unit 72, a transport control unit 74, and a mounting control unit 75 are configured to control a plurality of (three in the example shown in FIG. 1) components.
  • the setting unit 73 is provided in the control device 16 of each mounting machine WM3, and the setting unit 73 is provided in the management device HC0.
  • the foreign object detection device 70 of the present embodiment executes control according to the flowchart shown in FIG.
  • the acquisition unit 71 performs the process shown in step S12.
  • the determination unit 72 performs the process shown in step S13.
  • the setting unit 73 performs the process shown in step S11. Processing by the transport control unit 74 and the mounting control unit 75 will be described later.
  • the acquisition unit 71 captures images of at least a part of the inspection area CA0 of the substrate 90 a plurality of times during the predetermined allowable time T0, and acquires a plurality of image data PD0 of the same inspection area CA0 (see FIG. 4). shown step S12).
  • the acquisition unit 71 may image the entire mounting area of the board 90 as the inspection area CA0, or may image a part of the mounting area of the board 90 .
  • a component 91 for example, a BGA (Ball Grid Array) component
  • the acquiring unit 71 acquires the mounting area where the component 91 is improperly mounted due to the foreign matter 92, the mounting area where the foreign matter 92 tends to adhere, and the like based on the past mounting results, and inspects these mounting areas. It can also be imaged as area CA0.
  • the acquisition unit 71 can also set the area specified by the user of the component mounting machine WM3 that mounts the component 91 on the board 90 as the inspection area CA0.
  • the board-to-board work line WL ⁇ b>0 of this embodiment includes an input/output device 80 .
  • the user can, for example, use the input/output device 80 to specify an arbitrary area (the entire mounting area of the substrate 90 or a partial mounting area of the substrate 90) as the inspection area CA0.
  • the obtaining unit 71 can display the mounting area of the component 91 on the substrate 90 schematically on the display unit of the input/output device 80 so that the user can select any mounting area.
  • the acquisition unit 71 can acquire the image data PD0 using an imaging device capable of imaging the inspection area CA0.
  • the imaging device is not limited as long as it can capture an image of the inspection area CA0.
  • the imaging device includes a substrate camera 15 capable of imaging a partial mounting area of the substrate 90 from above the substrate 90 and a ceiling camera capable of imaging the entire mounting area of the substrate 90 from above the substrate 90 .
  • the substrate camera 15 is used, and the acquisition unit 71 sets the area designated by the user of the component mounting machine WM3 as the inspection area CA0.
  • the acquisition unit 71 makes the same imaging conditions (for example, exposure time, aperture, illumination time, etc.) that can be set by the imaging device, and causes the same inspection area CA0 to be imaged multiple times.
  • the allowable time T0 is set by the setting unit 73 .
  • Judgment part 72 The determination unit 72 determines whether or not there is a foreign substance 92 adhering to the inspection area CA0 based on the difference in the feature amount of the inspection area CA0 acquired by image processing each of the plurality of image data PD0 acquired by the acquisition unit 71. (step S13 shown in FIG. 4).
  • the first piece of image data PD0 is set as reference data SD0.
  • the other image data PD0 of the plurality (two) of image data PD0 is set as comparison data CD0.
  • determination unit 72 determines that foreign matter 92 adheres to inspection area CA0. decide not to.
  • the feature amount is not limited as long as it is obtained by image processing the image data PD0.
  • the luminance, saturation, brightness, etc. of each pixel of the reference data SD0 and the comparison data CD0 are included in the feature amount.
  • the area of the closed region, the length of the perimeter of the closed region, and the like obtained by performing image processing (for example, binarization processing) on each of the reference data SD0 and the comparison data CD0 are included in the feature amount.
  • the feature amount is the brightness of each pixel of the reference data SD0 and the comparison data CD0.
  • the predetermined threshold value is larger than the feature amount (for example, luminance of a pixel) when the foreign matter 92 is not adhered to the inspection area CA0, and the feature value when the foreign matter 92 is adhered to the inspection area CA0. set to be less than the amount
  • the predetermined threshold value is acquired in advance by, for example, simulation, verification using an actual machine, or the like.
  • FIG. 5 and 6 schematically show an example of a plurality (two) of image data PD0 acquired by the acquisition unit 71.
  • FIG. FIG. 5 shows the reference data SD0
  • FIG. 6 shows the comparison data CD0.
  • 5 and 6 also show a plurality of pixels arranged in a grid pattern.
  • an area AR0 shown in FIGS. 5 and 6 indicates the same area (set of the same plurality of pixels) in the inspection area CA0.
  • the difference between the brightness of the pixels included in the area AR0 shown in FIG. 5 and the brightness of the pixels included in the area AR0 shown in FIG. 6 exceeds a predetermined threshold. Conversely, when the foreign matter 92 does not adhere to the area AR0, the difference between the luminance of the pixels included in the area AR0 shown in FIG. 5 and the luminance of the pixels included in the area AR0 shown in FIG. 6 is equal to or less than the predetermined threshold. .
  • the determining unit 72 can similarly determine when the number of image data PD0 acquired by the acquiring unit 71 is three or more. Specifically, the determination unit 72 calculates the difference between the feature amount of the inspection area CA0 acquired from the reference data SD0 and the feature amount of the inspection area CA0 acquired from each of the plurality of comparison data CD0, and calculates It is possible to determine whether or not the difference between the calculated feature amounts exceeds a predetermined threshold.
  • the foreign object detection device 70 of this embodiment includes a setting section 73 .
  • the setting unit 73 determines that the bonding member 93 is a foreign object 92 in the determination unit 72 when the feature amount of the inspection area CA0 changes due to the change over time of the bonding member 93 that bonds the substrate 90 and the component 91 applied to the inspection area CA0. To prevent erroneous determination, the permissible time T0 is set in advance (step S11 shown in FIG. 4).
  • the joining member 93 is not limited as long as it is a member that joins the substrate 90 and the component 91 .
  • solder, adhesive, etc. are included in the joining member 93 .
  • the joining member 93 is solder.
  • the solder turns from silver to gray as the flux it contains dries. Therefore, there is a possibility that the characteristic amount of the inspection area CA0 will fluctuate due to changes in the solder over time, and there is a possibility that the determination unit 72 will erroneously determine that the solder is a foreign object 92 .
  • the allowable time T0 is obtained in advance by, for example, simulation or verification using an actual machine.
  • the allowable time T0 may vary depending on the type of the joint member 93, and the setting unit 73 can set the allowable time T0 according to the type of the joint member 93.
  • the setting unit 73 can set the allowable time T0 according to the type of solder.
  • the setting unit 73 can set the allowable time T0 according to the type of adhesive.
  • the setting unit 73 can also set the allowable time T0 according to at least one of the temperature and humidity inside the component mounting machine WM3 that mounts the component 91 on the substrate 90 .
  • the acquisition unit 71 can acquire a plurality of pieces of image data PD0 for each component mounting machine WM3. In this case, the determination unit 72 can determine the presence or absence of the foreign matter 92 adhering to the inspection area CA0 inside the component mounting machine WM3. Note that when the allowable time T0 is twice or more the first required time T1, the acquisition unit 71 can also acquire a plurality of pieces of image data PD0 for each of the plurality of component mounters WM3. In this case, the determination unit 72 can determine the presence or absence of the foreign matter 92 for each of the component mounters WM3.
  • the acquisition unit acquires a plurality of image data PDO for each of the plurality of component mounting machines WM3. can also be obtained. Also in this case, the determination unit 72 can determine the presence or absence of the foreign matter 92 for each of the plurality of component mounters WM3.
  • the acquisition unit 71 acquires a plurality of image data PD0 for each component mounting machine WM3, The presence or absence of foreign matter 92 adhering to inspection area CA0 is determined. Further, the acquiring unit 71, the determining unit 72, and the setting unit 73 may have any of the forms already described.
  • Transport control unit 74 and mounting control unit 75 The foreign object detection device 70 applied to the substrate-oriented work line WL0 can perform control according to the flowchart shown in FIG. 8, for example.
  • the component mounter WM3 that mounts the component 91 in the inspection area CA0 is referred to as the target component mounter MT0, and at least one component mounter WM3 provided on the upstream side of the target component mounter MT0 is referred to as the upstream component mounter MU0. do.
  • the allowable time T0 is longer than the first required time T1 and longer than the second required time T2.
  • the plurality of (three) component mounters WM3 will be referred to as a component mounter M1, a component mounter M2, and a component mounter M3 in order from the upstream side.
  • the component mounting machine M3 is assumed to be the target component mounting machine MT0
  • the component mounting machine M1 and the component mounting machine M2 are assumed to be the upstream component mounting machine MU0.
  • the foreign matter detection device 70 determines whether or not the component mounter WM3 is the upstream component mounter MU0 (the component mounter M1 or the component mounter M2) (step S21 shown in FIG. 8).
  • the acquiring unit 71 acquires a plurality of image data PD0 (step S22). Specifically, the acquiring unit 71 acquires the image data PD0 by capturing an image of the inspection area CA0 before starting the mounting process of the component 91 in each of the upstream component mounting machines MU0. After completion, the inspection area CA0 is imaged to obtain image data PD0.
  • the judgment unit 72 judges whether or not the foreign matter 92 adheres to the inspection area CA0 in the upstream component mounting machine MU0 (step S23).
  • the transport control unit 74 controls the upstream component mounting machine MU0.
  • the substrate 90 is carried out to the next component mounting machine WM3 provided downstream of MU0 (step S24).
  • the transport control unit 74 stops carrying out the substrate 90. (step S25).
  • the operator can take out the substrate 90 and check the presence or absence of the foreign matter 92 . Also, if the removal of the foreign matter 92 is possible, the operator can also remove the foreign matter 92 .
  • the foreign object detection device 70 determines whether the component mounting machine WM3 is the target component mounting machine MT0 (the component mounting machine M3). It judges (step S26).
  • the acquiring unit 71 acquires a plurality of image data PD0 (step S27). Specifically, the acquiring unit 71 acquires the image data PD0 by imaging the inspection area CA0 before starting the process of placing the component 91 in the target component mounting machine MT0, and acquires the image data PD0 of the component 91 to be mounted in the inspection area CA0. image data PD0 is acquired by imaging the inspection area CA0 before wearing the .
  • the determination unit 72 determines whether or not the foreign matter 92 adheres to the inspection area CA0 in the target component mounting machine MT0 (step S28).
  • the mounting control unit 75 controls the mounting control unit 75 to perform the mounting operation on the inspection area CA0. Mounting of the component 91 is permitted (step S29). Then, the control by the foreign matter detection device 70 is once terminated.
  • the mounting control unit 75 controls the mounting control unit 75 to perform the mounting operation on the inspection area CA0.
  • the mounting of the component 91 is restricted (step S30). In this case, for example, the operator can take out the substrate 90 and check the presence or absence of the foreign matter 92 . Also, if the removal of the foreign matter 92 is possible, the operator can also remove the foreign matter 92 .
  • the component mounter WM3 is not the target component mounter MT0 (No in step S26), the component mounter WM3 is provided downstream of the target component mounter MT0, and the inspection area CA0 has a component 91 is already installed. Therefore, in this case, the control by the foreign object detection device 70 is once terminated.
  • the acquisition unit 71 acquires the image data PD0 by imaging the inspection area CA0 before starting the mounting process of the component 91 in the upstream component mounting machine MU0 and after finishing the mounting process. Then, when the determining unit 72 determines that the foreign matter 92 is not attached to the inspection area CA0 in the upstream component mounting machine MU0, the transport control unit 74 is provided downstream of the upstream component mounting machine MU0. The substrate 90 is carried out to the next component mounting machine WM3. By sequentially executing the above processes in the upstream component mounting machine MU0, the substrate 90 with no foreign matter 92 adhering to the inspection area CA0 is transported to the target component mounting machine MT0.
  • the acquiring unit 71 images the inspection area CA0 and obtains the image data PD0 before starting the mounting process of the component 91 in the target component mounting machine MT0 and before mounting the component 91 to be mounted in the inspection area CA0. to get Then, when the determining unit 72 determines that the foreign matter 92 is not attached to the inspection area CA0 in the target component mounting machine MT0, the mounting control unit 75 permits mounting of the component 91 to be mounted in the inspection area CA0. do. By executing the above processing in the target component mounting machine MT0, the target component mounting machine MT0 can mount the component 91 to be mounted in the inspection area CA0 where the foreign matter 92 is not adhered.
  • the foreign matter detector 70 can perform the following control. Also in this embodiment, the substrate 90 is sequentially conveyed to a plurality of (three in the example shown in FIG. 1) component mounting machines WM3 that mount components 91 on the substrate 90, and the plurality of components 91 are mounted in sequence. Further, the acquiring unit 71, the determining unit 72, and the setting unit 73 may have any of the forms already described. Further, as shown in FIG.
  • the first component mounting machine MF0 which is one component mounting machine WM3 of the plurality (three) of the component mounting machines WM3
  • the first component mounting machine MF0 When the component mounting machine WM3 provided downstream from MF0 operates normally without stopping due to an error, the second component mounting machine MS0 which is the next component mounting machine WM3 provided downstream from the first component mounting machine MF0.
  • the time expected to be required until the substrate 90 is carried in is assumed to be a second required time T2.
  • the acquisition unit 71 images the inspection area CA0 after the mounting process of the component 91 in the first component mounting machine MF0 is completed and before the board 90 is unloaded. to acquire the image data PD0.
  • the acquisition unit 71 captures the inspection area CA0 and acquires image data after the board 90 is carried into the second component mounting machine MS0 and before starting the mounting process of the component 91 in the second component mounting machine MS0. Get PD0.
  • the determination unit 72 can determine the presence or absence of foreign matter 92 adhering to the inspection area CA0 when the substrate 90 is transported between the first component mounting machine MF0 and the second component mounting machine MS0.
  • the foreign matter detection method includes an acquisition process, a determination process, and a setting process.
  • the acquisition step corresponds to control performed by the acquisition unit 71 .
  • the determination process corresponds to control performed by the determination unit 72 .
  • the setting process corresponds to control performed by the setting unit 73 .
  • the foreign matter detection method can include a transport control step.
  • the transport control process corresponds to control performed by the transport control unit 74 .
  • the foreign object detection method can also include a mounting control step.
  • the mounting control process corresponds to control performed by the mounting control unit 75 .
  • Example of Effect of Embodiment According to the foreign matter detection device 70, it is possible to suppress erroneous determination of the foreign matter 92 due to aging of the joining member 93 that joins the substrate 90 and the component 91, which is applied to the inspection area CA0 of the substrate 90. can. What has been described above with respect to the foreign object detection device 70 can be similarly applied to the foreign object detection method.
  • 70 foreign object detection device
  • 71 acquisition unit
  • 72 determination unit
  • 73 setting unit
  • 74 Conveyance control unit
  • 75 Mounting control unit
  • 90 Substrate
  • 91 Component
  • 92 foreign matter
  • 93 joining member
  • CA0 inspection area
  • PD0 image data
  • SD0 reference data
  • CD0 comparison data
  • WM3 component mounting machine
  • MT0 target component mounting machine
  • MU0 upstream component mounting machine
  • MF0 first component mounting machine
  • MS0 second component mounting machine
  • T0 allowable time
  • T1 first required time
  • T2 second required time.

Abstract

A foreign matter detection device is provided with an acquisition unit, a determination unit, and a setting unit. The acquisition unit captures an inspection region which is at least a part of a substrate a plurality of times during a prescribed allowed time to acquire a plurality of image data in which the same inspection region is captured. The determination unit determines the presence or absence of foreign matter adhering to the inspection region on the basis of differences in feature values of the inspection region acquired by image-processing each of the plurality of image data acquired by the acquisition unit. The setting unit sets the allowed time in advance so that the determination unit does not, due to variations in the feature values of the inspection region caused by changes over time in a bonding member applied to the inspection region and bonding a component to the substrate, mistakenly determine that the bonding member is foreign matter.

Description

異物検出装置および異物検出方法Foreign matter detection device and foreign matter detection method
 本明細書は、異物検出装置および異物検出方法に関する技術を開示する。 This specification discloses a technology related to a foreign object detection device and a foreign object detection method.
 特許文献1に記載の実装ラインは、第一のカメラ手段と、第二のカメラ手段と、画像処理手段とを備えている。第一のカメラ手段は、プリント基板の少なくとも一部を視野に収めることが可能なカメラ手段であって、いずれかの実装機における電子部品の実装作業前にプリント基板を撮像可能に設けられている。第二のカメラ手段は、第一のカメラ手段と同様な範囲を視野に収めることが可能なカメラ手段であって、いずれかの実装機または当該実装機よりも後工程の実装機による電子部品の実装作業後にプリント基板を撮像可能に設けられている。 The mounting line described in Patent Document 1 includes first camera means, second camera means, and image processing means. The first camera means is a camera means capable of viewing at least a part of the printed circuit board, and is provided so as to be able to image the printed circuit board before the electronic component mounting operation in any of the mounting machines. . The second camera means is a camera means capable of capturing the same range as the first camera means in its field of view, and is capable of capturing images of electronic components by any mounter or by a mounter in a process subsequent to the mounter. It is provided so that the printed circuit board can be imaged after the mounting work.
 画像処理手段は、第二のカメラ手段で撮像された画像データを第一のカメラ手段で撮像された画像データと比較して画像処理を行う。これにより、特許文献1に記載の実装ラインは、プリント基板にはんだを印刷した際のはんだの印刷異常、または、プリント基板に電子部品を実装した際の電子部品の実装異常を検出しようとしている。 The image processing means performs image processing by comparing the image data captured by the second camera means with the image data captured by the first camera means. As a result, the mounting line described in Patent Document 1 attempts to detect abnormal solder printing when solder is printed on a printed circuit board, or abnormal mounting of electronic components when electronic components are mounted on a printed circuit board.
特開2007-335524号公報JP 2007-335524 A
 部品の装着位置に異物が付着していると、部品の装着が不良になる可能性があり、基板に付着する異物の有無を判断する必要がある。基板の少なくとも一部の同一の検査領域を撮像した複数の画像データを比較して、画像データの特徴量の差異に基づいて異物の有無を判断する場合、異物以外の部材を異物と誤判断する可能性がある。具体的には、画像データを画像処理して取得した検査領域の特徴量が、基板の検査領域に塗布されている基板と部品を接合する接合部材の経時変化によって変動することにより、接合部材を異物と誤判断する可能性がある。 If foreign matter adheres to the mounting position of the component, the mounting of the component may be defective, and it is necessary to determine whether there is any foreign matter adhering to the board. When comparing a plurality of image data obtained by imaging the same inspection area of at least a part of a substrate and determining the presence or absence of foreign matter based on the difference in the feature amount of the image data, members other than foreign matter are erroneously determined to be foreign matter. there is a possibility. Specifically, the characteristic amount of the inspection area obtained by image processing the image data varies with time in the bonding material applied to the inspection area of the substrate and used to bond the board and the component. There is a possibility of erroneously judging it as a foreign object.
 このような事情に鑑みて、本明細書は、基板の検査領域に塗布されている基板と部品を接合する接合部材の経時変化による異物の誤判断を抑制可能な異物検出装置および異物検出方法を開示する。 In view of such circumstances, the present specification provides a foreign matter detection apparatus and a foreign matter detection method capable of suppressing erroneous determination of foreign matter due to aging of a joining member that joins a board and a component coated on an inspection area of the board. Disclose.
 本明細書は、取得部と、判断部と、設定部とを備える異物検出装置を開示する。前記取得部は、基板の少なくとも一部の検査領域を所定の許容時間の間に複数回撮像して、同一の前記検査領域を撮像した複数の画像データを取得する。前記判断部は、前記取得部によって取得された前記複数の画像データの各々を画像処理して取得した前記検査領域の特徴量の差異に基づいて、前記検査領域に付着する異物の有無を判断する。前記設定部は、前記検査領域に塗布されている前記基板と部品を接合する接合部材の経時変化によって前記検査領域の前記特徴量が変動することにより前記判断部において前記接合部材が前記異物と誤判断されないように、前記許容時間を予め設定する。 This specification discloses a foreign object detection device that includes an acquisition unit, a determination unit, and a setting unit. The acquisition unit acquires a plurality of image data of the same inspection area by imaging at least a part of the inspection area of the substrate a plurality of times during a predetermined allowable time. The determination unit determines whether or not there is a foreign substance adhering to the inspection area based on a difference in feature amounts of the inspection area acquired by image processing each of the plurality of image data acquired by the acquisition unit. . The setting unit detects that the bonding member is mistaken as the foreign matter in the determination unit when the feature amount of the inspection area varies due to a change in the bonding member applied to the inspection area that bonds the substrate and the component over time. The permissible time is set in advance so as not to be judged.
 また、本明細書は、取得工程と、判断工程と、設定工程とを備える異物検出方法を開示する。前記取得工程は、基板の少なくとも一部の検査領域を所定の許容時間の間に複数回撮像して、同一の前記検査領域を撮像した複数の画像データを取得する。前記判断工程は、前記取得工程によって取得された前記複数の画像データの各々を画像処理して取得した前記検査領域の特徴量の差異に基づいて、前記検査領域に付着する異物の有無を判断する。前記設定工程は、前記検査領域に塗布されている前記基板と部品を接合する接合部材の経時変化によって前記検査領域の前記特徴量が変動することにより前記判断工程において前記接合部材が前記異物と誤判断されないように、前記許容時間を予め設定する。 This specification also discloses a foreign matter detection method including an acquisition process, a determination process, and a setting process. In the acquisition step, an inspection area of at least a part of the substrate is imaged a plurality of times during a predetermined allowable time to acquire a plurality of image data of the same inspection area. The determining step determines whether or not there is a foreign substance adhering to the inspection area based on a difference in feature amounts of the inspection area obtained by image processing each of the plurality of image data obtained by the obtaining step. . In the setting step, the bonding member is mistaken as the foreign matter in the determination step due to variation in the feature amount of the inspection region due to a change in the bonding member applied to the inspection region and bonding the component to the substrate over time. The permissible time is set in advance so as not to be judged.
 上記の異物検出装置によれば、基板の検査領域に塗布されている基板と部品を接合する接合部材の経時変化による異物の誤判断を抑制することができる。異物検出装置について上述されていることは、異物検出方法についても同様に言える。 According to the above-described foreign matter detection device, it is possible to suppress erroneous determination of foreign matter due to changes over time in the bonding member that is applied to the inspection area of the substrate and joins the board and the component. What has been described above with respect to the foreign object detection device can be similarly applied to the foreign object detection method.
対基板作業ラインの構成例を示す構成図である。FIG. 2 is a configuration diagram showing a configuration example of a work line for substrates; 部品装着機の構成例を示す平面図である。It is a top view which shows the structural example of a component mounting machine. 異物検出装置の制御ブロックの一例を示すブロック図である。3 is a block diagram showing an example of control blocks of the foreign object detection device; FIG. 異物検出装置による制御手順の一例を示すフローチャートである。5 is a flow chart showing an example of a control procedure by a foreign object detection device; 基準データの一例を示す模式図である。FIG. 4 is a schematic diagram showing an example of reference data; 比較データの一例を示す模式図である。It is a schematic diagram which shows an example of comparison data. 許容時間、第一所要時間および第二所要時間の関係の一例を示す模式図である。It is a schematic diagram which shows an example of the relationship between allowable time, the 1st required time, and the 2nd required time. 異物検出装置による制御手順の一例を示すフローチャートである。5 is a flow chart showing an example of a control procedure by a foreign object detection device;
 1.実施形態
 1-1.対基板作業ラインWL0の構成例
 対基板作業ラインWL0では、基板90に所定の対基板作業を行う。対基板作業ラインWL0を構成する対基板作業機WM0の種類および数は、限定されない。図1に示すように、本実施形態の対基板作業ラインWL0は、印刷機WM1、印刷検査機WM2、部品装着機WM3、リフロー炉WM4および外観検査機WM5の複数の対基板作業機WM0を備えており、基板90は、基板搬送装置によって、この順に搬送される。
1. Embodiment 1-1. Configuration Example of Board-Related Work Line WL0 In the board-relevant work line WL0, predetermined board-related work is performed on the board 90 . The type and number of board-oriented work machines WM0 that constitute board-oriented work line WL0 are not limited. As shown in FIG. 1, the board-to-board work line WL0 of the present embodiment includes a plurality of board-to-board work machines WM0 including a printing machine WM1, a print inspection machine WM2, a component mounting machine WM3, a reflow furnace WM4, and an appearance inspection machine WM5. , and the substrate 90 is transported in this order by the substrate transport device.
 印刷機WM1は、基板90の複数の部品91の装着位置に、はんだを印刷する。印刷検査機WM2は、印刷機WM1によって印刷されたはんだの印刷状態を検査する。図2に示すように、部品装着機WM3は、印刷機WM1によってはんだが印刷された基板90に複数の部品91を装着する。部品装着機WM3は、一つであっても良く、複数であっても良い。部品装着機WM3が複数設けられる場合は、複数の部品装着機WM3が分担して、複数の部品91を装着することができる。 The printing machine WM1 prints solder on the mounting positions of the plurality of components 91 on the board 90 . The print inspection machine WM2 inspects the printed state of the solder printed by the printer WM1. As shown in FIG. 2, the component mounter WM3 mounts a plurality of components 91 on a board 90 on which solder has been printed by the printer WM1. The number of component mounting machines WM3 may be one or plural. When a plurality of component mounters WM3 are provided, a plurality of components 91 can be mounted by the plurality of component mounters WM3.
 リフロー炉WM4は、部品装着機WM3によって複数の部品91が装着された基板90を加熱し、はんだを溶融させて、はんだ付けを行う。外観検査機WM5は、部品装着機WM3によって装着された複数の部品91の装着状態などを検査する。このように、対基板作業ラインWL0は、複数の対基板作業機WM0を用いて、基板90を順に搬送し、検査処理を含む生産処理を実行して基板製品900を生産することができる。なお、対基板作業ラインWL0は、例えば、機能検査機、バッファ装置、基板供給装置、基板反転装置、シールド装着装置、接着剤塗布装置、紫外線照射装置などの対基板作業機WM0を必要に応じて備えることもできる。 The reflow furnace WM4 heats the substrate 90 on which a plurality of components 91 are mounted by the component mounter WM3, melts the solder, and performs soldering. The appearance inspection machine WM5 inspects the mounting state of the plurality of components 91 mounted by the component mounting machine WM3. In this way, the board-related work line WL0 can use a plurality of board-related work machines WM0 to transport the boards 90 in sequence and perform production processes including inspection processes to produce the board products 900 . The board-to-board work line WL0 includes board-to-board work machines WM0 such as, for example, a function inspection machine, a buffer device, a board supply device, a board reversing device, a shield mounting device, an adhesive coating device, and an ultraviolet irradiation device. You can prepare.
 対基板作業ラインWL0を構成する複数の対基板作業機WM0およびライン管理装置LC0は、通信部によって通信可能に接続されている。また、ライン管理装置LC0および管理装置HC0は、通信部によって通信可能に接続されている。通信部は、有線または無線によって、これらを通信可能に接続することができ、通信方法は、種々の方法をとり得る。 A plurality of board-oriented work machines WM0 and the line management device LC0 that constitute the board-oriented work line WL0 are communicably connected by a communication unit. Also, the line management device LC0 and the management device HC0 are communicably connected by a communication unit. The communication unit can communicably connect them by wire or wirelessly, and various communication methods can be used.
 本実施形態では、複数の対基板作業機WM0、ライン管理装置LC0および管理装置HC0によって、構内情報通信網(LAN:Local Area Network)が構成されている。よって、複数の対基板作業機WM0は、通信部を介して、互いに通信することができる。また、複数の対基板作業機WM0は、通信部を介して、ライン管理装置LC0と通信することができる。さらに、ライン管理装置LC0および管理装置HC0は、通信部を介して、互いに通信することができる。 In this embodiment, a local information communication network (LAN: Local Area Network) is configured by a plurality of board-to-board work machines WM0, line management devices LC0, and management devices HC0. Therefore, the plurality of board-oriented work machines WM0 can communicate with each other via the communication unit. Also, the plurality of board-oriented work machines WM0 can communicate with the line management device LC0 via the communication unit. Furthermore, the line management device LC0 and the management device HC0 can communicate with each other via the communication unit.
 ライン管理装置LC0は、対基板作業ラインWL0を構成する複数の対基板作業機WM0の制御を行い、対基板作業ラインWL0の動作状況を監視する。ライン管理装置LC0には、複数の対基板作業機WM0を制御する種々の制御データが記憶されている。ライン管理装置LC0は、複数の対基板作業機WM0の各々に制御データを送信する。また、複数の対基板作業機WM0の各々は、ライン管理装置LC0に動作状況および生産状況を送信する。 The line management device LC0 controls the plurality of board-oriented work machines WM0 that constitute the board-oriented work line WL0, and monitors the operation status of the board-oriented work line WL0. The line management device LC0 stores various control data for controlling the plurality of work machines for board WM0. The line management device LC0 transmits control data to each of the plurality of board-oriented work machines WM0. Further, each of the plurality of board-oriented work machines WM0 transmits the operation status and production status to the line management device LC0.
 管理装置HC0は、少なくとも一つのライン管理装置LC0を管理する。例えば、ライン管理装置LC0によって取得された対基板作業機WM0の動作状況および生産状況は、必要に応じて、管理装置HC0に送信される。管理装置HC0には、記憶装置が設けられている。記憶装置は、対基板作業機WM0が取得した種々の取得データを保存することができる。例えば、対基板作業機WM0によって撮像された種々の画像データは、取得データに含まれる。対基板作業機WM0によって取得された稼働状況の記録(ログデータ)などは、取得データに含まれる。また、記憶装置は、基板製品900の生産に関する種々の生産情報を保存することができる。 The management device HC0 manages at least one line management device LC0. For example, the operation status and production status of the board-oriented work machine WM0 acquired by the line management device LC0 are transmitted to the management device HC0 as necessary. The management device HC0 is provided with a storage device. The storage device can store various acquired data acquired by the board-oriented work machine WM0. For example, various image data captured by the board-oriented work machine WM0 are included in the acquired data. A record (log data) of the operation status acquired by the board-oriented work machine WM0 is included in the acquired data. The storage device can also store various production information regarding the production of the board product 900 .
 対基板作業ラインWL0は、入出力装置80を備えている。入出力装置80は、公知の入出力装置を用いることができる。入出力装置80は、表示部を備えており、各種データを視認可能に表示する。また、表示部は、タッチパネルにより構成されており、作業者による種々の操作を受け付ける入力装置としても機能する。 The substrate work line WL0 is equipped with an input/output device 80. A known input/output device can be used as the input/output device 80 . The input/output device 80 includes a display unit, and displays various data in a visible manner. Moreover, the display unit is configured by a touch panel, and functions as an input device for receiving various operations by the operator.
 1-2.部品装着機WM3の構成例
 部品装着機WM3は、基板90に複数の部品91を装着する。図2に示すように、部品装着機WM3は、基板搬送装置11、部品供給装置12、部品移載装置13、部品カメラ14、基板カメラ15および制御装置16を備えている。
1-2. Configuration Example of Component Mounting Machine WM3 The component mounting machine WM3 mounts a plurality of components 91 on a board 90 . As shown in FIG. 2, the component mounting machine WM3 includes a substrate conveying device 11, a component supply device 12, a component transfer device 13, a component camera 14, a substrate camera 15, and a control device 16.
 基板搬送装置11は、例えば、ベルトコンベアなどによって構成され、基板90を搬送方向(X軸方向)に搬送する。基板90は、回路基板であり、電子回路、電気回路、磁気回路などが形成される。基板搬送装置11は、部品装着機WM3の機内に基板90を搬入し、機内の所定位置に基板90を位置決めする。基板搬送装置11は、部品装着機WM3による複数の部品91の装着処理が終了した後に、基板90を部品装着機WM3の機外に搬出する。 The substrate transport device 11 is configured by, for example, a belt conveyor, etc., and transports the substrate 90 in the transport direction (X-axis direction). The substrate 90 is a circuit board on which electronic circuits, electric circuits, magnetic circuits, and the like are formed. The board transfer device 11 carries the board 90 into the component mounting machine WM3 and positions the board 90 at a predetermined position inside the machine. After the component mounting machine WM3 finishes mounting the plurality of components 91, the board transfer device 11 carries the board 90 out of the component mounting machine WM3.
 部品供給装置12は、基板90に装着される複数の部品91を供給する。部品供給装置12は、基板90の搬送方向(X軸方向)に沿って設けられる複数のフィーダ12aを備えている。複数のフィーダ12aの各々には、リールが装備される。リールには、複数の部品91が収納されているキャリアテープが巻回されている。フィーダ12aは、キャリアテープをピッチ送りさせて、フィーダ12aの先端側に位置する供給位置において部品91を採取可能に供給する。また、部品供給装置12は、チップ部品などと比べて比較的大型の電子部品(例えば、リード部品など)を、トレイ上に配置した状態で供給することもできる。 The component supply device 12 supplies a plurality of components 91 to be mounted on the board 90 . The component supply device 12 includes a plurality of feeders 12a provided along the transport direction (X-axis direction) of the substrate 90 . Each of the plurality of feeders 12a is equipped with a reel. A carrier tape containing a plurality of components 91 is wound around the reel. The feeder 12a pitch-feeds the carrier tape and supplies the components 91 so as to be picked up at a supply position located on the leading end side of the feeder 12a. In addition, the component supply device 12 can also supply relatively large electronic components (for example, lead components) compared to chip components in a state of being arranged on a tray.
 部品移載装置13は、ヘッド駆動装置13aおよび移動台13bを備えている。ヘッド駆動装置13aは、直動機構によって移動台13bを、X軸方向およびY軸方向に移動可能に構成されている。移動台13bには、クランプ部材によって装着ヘッド20が着脱可能(交換可能)に設けられている。装着ヘッド20は、少なくとも一つの保持部材30を用いて、部品供給装置12によって供給される部品91を採取し保持して、基板搬送装置11によって位置決めされた基板90に部品91を装着する。保持部材30は、例えば、吸着ノズル、チャックなどを用いることができる。 The component transfer device 13 includes a head driving device 13a and a moving table 13b. The head driving device 13a is configured such that a moving table 13b can be moved in the X-axis direction and the Y-axis direction by a linear motion mechanism. A mounting head 20 is detachably (exchangeably) provided on the moving table 13b by a clamp member. The mounting head 20 uses at least one holding member 30 to pick up and hold the component 91 supplied by the component supply device 12 , and mounts the component 91 on the substrate 90 positioned by the substrate transfer device 11 . For example, a suction nozzle, a chuck, or the like can be used as the holding member 30 .
 部品カメラ14および基板カメラ15は、公知の撮像装置を用いることができる。部品カメラ14は、光軸が鉛直方向(Z軸方向)の上向きになるように、部品装着機WM3の基台に固定されている。部品カメラ14は、保持部材30に保持されている部品91を下方から撮像することができる。基板カメラ15は、光軸が鉛直方向(Z軸方向)の下向きになるように、部品移載装置13の移動台13bに設けられている。基板カメラ15は、基板90を上方から撮像することができる。部品カメラ14および基板カメラ15は、制御装置16から送出される制御信号に基づいて撮像を行う。部品カメラ14および基板カメラ15によって撮像された撮像画像の画像データは、制御装置16に送信される。 A known imaging device can be used for the component camera 14 and the substrate camera 15 . The component camera 14 is fixed to the base of the component mounter WM3 so that the optical axis faces upward in the vertical direction (Z-axis direction). The component camera 14 can image the component 91 held by the holding member 30 from below. The board camera 15 is provided on the moving table 13b of the component transfer device 13 so that the optical axis is downward in the vertical direction (Z-axis direction). The substrate camera 15 can image the substrate 90 from above. The component camera 14 and the substrate camera 15 perform imaging based on control signals sent from the control device 16 . Image data of captured images captured by the component camera 14 and the board camera 15 are transmitted to the control device 16 .
 制御装置16は、公知の演算装置および記憶装置を備えており、制御回路が構成されている。制御装置16には、部品装着機WM3に設けられる各種センサから出力される情報、画像データなどが入力される。制御装置16は、制御プログラムおよび予め設定されている所定の装着条件などに基づいて、各装置に対して制御信号を送出する。 The control device 16 includes a known arithmetic device and storage device, and constitutes a control circuit. Information, image data, and the like output from various sensors provided in the component mounting machine WM3 are input to the control device 16 . The control device 16 sends a control signal to each device based on the control program and predetermined wearing conditions set in advance.
 例えば、制御装置16は、基板搬送装置11によって位置決めされた基板90を基板カメラ15に撮像させる。制御装置16は、基板カメラ15によって撮像された画像を画像処理して、基板90の位置決め状態を認識する。また、制御装置16は、部品供給装置12によって供給された部品91を保持部材30に採取させ保持させて、保持部材30に保持されている部品91を部品カメラ14に撮像させる。制御装置16は、部品カメラ14によって撮像された画像を画像処理して、部品91の保持姿勢を認識する。 For example, the control device 16 causes the substrate camera 15 to image the substrate 90 positioned by the substrate transport device 11 . The control device 16 processes the image captured by the board camera 15 and recognizes the positioning state of the board 90 . Further, the control device 16 causes the holding member 30 to collect and hold the component 91 supplied by the component supply device 12 , and causes the component camera 14 to image the component 91 held by the holding member 30 . The control device 16 processes the image captured by the component camera 14 and recognizes the holding posture of the component 91 .
 制御装置16は、制御プログラムなどによって予め設定される装着予定位置の上方に向かって、保持部材30を移動させる。また、制御装置16は、基板90の位置決め状態、部品91の保持姿勢などに基づいて、装着予定位置を補正して、実際に部品91を装着する装着位置を設定する。装着予定位置および装着位置は、位置(X軸座標およびY軸座標)の他に回転角度を含む。 The control device 16 moves the holding member 30 upward from the intended mounting position preset by the control program or the like. Further, the control device 16 corrects the planned mounting position based on the positioning state of the substrate 90, the holding attitude of the component 91, and the like, and sets the mounting position where the component 91 is actually mounted. The planned mounting position and mounting position include the position (X-axis coordinate and Y-axis coordinate) as well as the rotation angle.
 制御装置16は、装着位置に合わせて、保持部材30の目標位置(X軸座標およびY軸座標)および回転角度を補正する。制御装置16は、補正された目標位置において補正された回転角度で保持部材30を下降させて、基板90に部品91を装着する。制御装置16は、上記のピックアンドプレースサイクルを繰り返すことによって、基板90に複数の部品91を装着する装着処理を実行する。 The control device 16 corrects the target position (X-axis coordinate and Y-axis coordinate) and rotation angle of the holding member 30 according to the mounting position. The controller 16 lowers the holding member 30 at the corrected rotation angle at the corrected target position to mount the component 91 on the substrate 90 . The control device 16 repeats the pick-and-place cycle described above to perform a mounting process of mounting a plurality of components 91 on the board 90 .
 1-3.異物検出装置70の構成例
 図2に示すように、部品91の装着位置に異物92(例えば、他の部品91、ごみなど)が付着していると、部品91の装着が不良(例えば、部品91の不装着、浮き、傾きなど)になる可能性があり、基板90に付着する異物92の有無を判断する必要がある。基板90の少なくとも一部の同一の検査領域CA0を撮像した複数の画像データPD0を比較して、画像データPD0の特徴量(例えば、画素の輝度など)の差異に基づいて異物92の有無を判断する場合、異物92以外の部材を異物92と誤判断する可能性がある。
1-3. Configuration Example of Foreign Matter Detector 70 As shown in FIG. It is necessary to determine whether or not there is a foreign substance 92 adhering to the substrate 90 . A plurality of image data PD0 obtained by imaging the same inspection area CA0 of at least a part of the substrate 90 are compared, and the presence or absence of the foreign matter 92 is determined based on the difference in the feature amount (for example, pixel luminance etc.) of the image data PD0. In this case, there is a possibility that a member other than the foreign object 92 is erroneously determined to be the foreign object 92 .
 具体的には、画像データPD0を画像処理して取得した検査領域CA0の特徴量が、基板90の検査領域CA0に塗布されている基板90と部品91を接合する接合部材93(例えば、はんだ、接着剤など)の経時変化によって変動することにより、接合部材93を異物92と誤判断する可能性がある。そこで、本実施形態の対基板作業ラインWL0には、接合部材93の経時変化による異物92の誤判断を抑制可能な異物検出装置70が設けられている。 Specifically, the feature amount of the inspection area CA0 acquired by image processing the image data PD0 is used as the bonding member 93 (for example, solder, adhesive, etc.), there is a possibility that the joining member 93 may be erroneously determined to be a foreign object 92 . Therefore, the board-to-board work line WL0 of the present embodiment is provided with a foreign matter detection device 70 capable of suppressing erroneous determination of the foreign matter 92 due to changes in the bonding member 93 over time.
 異物検出装置70は、制御ブロックとして捉えると、取得部71と、判断部72と、設定部73とを備えている。異物検出装置70は、搬送制御部74を備えることもできる。異物検出装置70は、装着制御部75を備えることもできる。図3に示すように、本実施形態の異物検出装置70は、取得部71と、判断部72と、設定部73と、搬送制御部74と、装着制御部75とを備えている。 The foreign object detection device 70 is provided with an acquisition unit 71, a determination unit 72, and a setting unit 73 when viewed as control blocks. The foreign object detection device 70 can also include a transport control section 74 . The foreign matter detection device 70 can also include a mounting control section 75 . As shown in FIG. 3 , the foreign matter detection device 70 of this embodiment includes an acquisition section 71 , a determination section 72 , a setting section 73 , a transport control section 74 and a mounting control section 75 .
 異物検出装置70は、種々の制御装置に設けることができる。例えば、異物検出装置70は、部品装着機WM3の制御装置16、ライン管理装置LC0、管理装置HC0などに設けることができる。異物検出装置70は、クラウド上に形成することもできる。図3に示すように、本実施形態の異物検出装置70では、取得部71、判断部72、搬送制御部74および装着制御部75は、複数(図1に示す例では、3つ)の部品装着機WM3の各々の制御装置16に設けられ、設定部73は、管理装置HC0に設けられている。 The foreign matter detection device 70 can be provided in various control devices. For example, the foreign object detection device 70 can be provided in the control device 16 of the component mounting machine WM3, the line management device LC0, the management device HC0, and the like. The foreign object detection device 70 can also be formed on the cloud. As shown in FIG. 3, in the foreign matter detection device 70 of the present embodiment, an acquisition unit 71, a determination unit 72, a transport control unit 74, and a mounting control unit 75 are configured to control a plurality of (three in the example shown in FIG. 1) components. The setting unit 73 is provided in the control device 16 of each mounting machine WM3, and the setting unit 73 is provided in the management device HC0.
 また、本実施形態の異物検出装置70は、図4に示すフローチャートに従って、制御を実行する。取得部71は、ステップS12に示す処理を行う。判断部72は、ステップS13に示す処理を行う。設定部73は、ステップS11に示す処理を行う。なお、搬送制御部74および装着制御部75による処理は、後述されている。 Also, the foreign object detection device 70 of the present embodiment executes control according to the flowchart shown in FIG. The acquisition unit 71 performs the process shown in step S12. The determination unit 72 performs the process shown in step S13. The setting unit 73 performs the process shown in step S11. Processing by the transport control unit 74 and the mounting control unit 75 will be described later.
 1-3-1.取得部71
 取得部71は、基板90の少なくとも一部の検査領域CA0を所定の許容時間T0の間に複数回撮像して、同一の検査領域CA0を撮像した複数の画像データPD0を取得する(図4に示すステップS12)。
1-3-1. Acquisition unit 71
The acquisition unit 71 captures images of at least a part of the inspection area CA0 of the substrate 90 a plurality of times during the predetermined allowable time T0, and acquires a plurality of image data PD0 of the same inspection area CA0 (see FIG. 4). shown step S12).
 取得部71は、検査領域CA0として基板90の全部の装着領域を撮像しても良く、基板90の一部の装着領域を撮像しても良い。取得部71は、基板90の一部の装着領域を撮像する場合、例えば、チップ部品と比べて電極の数が多く異物92の影響を受け易い部品91(例えば、BGA(Ball Grid Array)の部品91など)の装着領域を撮像することができる。また、取得部71は、過去の装着実績に基づいて、異物92によって部品91の装着不良が発生した装着領域、異物92が付着し易い装着領域などを知得して、これらの装着領域を検査領域CA0として撮像することもできる。 The acquisition unit 71 may image the entire mounting area of the board 90 as the inspection area CA0, or may image a part of the mounting area of the board 90 . When the acquisition unit 71 captures an image of a part of the mounting area of the substrate 90, for example, a component 91 (for example, a BGA (Ball Grid Array) component) that has a large number of electrodes and is easily affected by a foreign object 92 compared to a chip component. 91) can be imaged. Further, the acquiring unit 71 acquires the mounting area where the component 91 is improperly mounted due to the foreign matter 92, the mounting area where the foreign matter 92 tends to adhere, and the like based on the past mounting results, and inspects these mounting areas. It can also be imaged as area CA0.
 取得部71は、基板90に部品91を装着する部品装着機WM3の使用者によって指定された領域を検査領域CA0とすることもできる。本実施形態の対基板作業ラインWL0は、入出力装置80を備えている。使用者は、例えば、入出力装置80を用いて、任意の領域(基板90の全部の装着領域または基板90の一部の装着領域)を検査領域CA0として指定することができる。この場合、取得部71は、基板90における部品91の装着領域を入出力装置80の表示部に模式的に表示させて、使用者が任意の装着領域を選択可能にすることができる。 The acquisition unit 71 can also set the area specified by the user of the component mounting machine WM3 that mounts the component 91 on the board 90 as the inspection area CA0. The board-to-board work line WL<b>0 of this embodiment includes an input/output device 80 . The user can, for example, use the input/output device 80 to specify an arbitrary area (the entire mounting area of the substrate 90 or a partial mounting area of the substrate 90) as the inspection area CA0. In this case, the obtaining unit 71 can display the mounting area of the component 91 on the substrate 90 schematically on the display unit of the input/output device 80 so that the user can select any mounting area.
 取得部71は、検査領域CA0を撮像可能な撮像装置を用いて、画像データPD0を取得することができる。撮像装置は、検査領域CA0を撮像可能であれば良く、限定されない。例えば、基板90の一部の装着領域を基板90の上方から撮像可能な基板カメラ15、基板90の全部の装着領域を基板90の上方から撮像可能な天井カメラなどは、撮像装置に含まれる。本実施形態では、基板カメラ15が用いられ、取得部71は、部品装着機WM3の使用者によって指定された領域を検査領域CA0とする。なお、取得部71は、撮像装置によって設定可能な撮像条件(例えば、露光時間、絞り、照明時間など)を同一にして、同一の検査領域CA0を複数回撮像させる。また、許容時間T0は、設定部73によって設定される。 The acquisition unit 71 can acquire the image data PD0 using an imaging device capable of imaging the inspection area CA0. The imaging device is not limited as long as it can capture an image of the inspection area CA0. For example, the imaging device includes a substrate camera 15 capable of imaging a partial mounting area of the substrate 90 from above the substrate 90 and a ceiling camera capable of imaging the entire mounting area of the substrate 90 from above the substrate 90 . In this embodiment, the substrate camera 15 is used, and the acquisition unit 71 sets the area designated by the user of the component mounting machine WM3 as the inspection area CA0. Note that the acquisition unit 71 makes the same imaging conditions (for example, exposure time, aperture, illumination time, etc.) that can be set by the imaging device, and causes the same inspection area CA0 to be imaged multiple times. Also, the allowable time T0 is set by the setting unit 73 .
 1-3-2.判断部72
 判断部72は、取得部71によって取得された複数の画像データPD0の各々を画像処理して取得した検査領域CA0の特徴量の差異に基づいて、検査領域CA0に付着する異物92の有無を判断する(図4に示すステップS13)。
1-3-2. Judgment part 72
The determination unit 72 determines whether or not there is a foreign substance 92 adhering to the inspection area CA0 based on the difference in the feature amount of the inspection area CA0 acquired by image processing each of the plurality of image data PD0 acquired by the acquisition unit 71. (step S13 shown in FIG. 4).
 複数(本実施形態では、2つ)の画像データPD0のうちの最初に取得された一の画像データPD0を基準データSD0とする。また、複数(2つ)の画像データPD0のうちの他の一の画像データPD0を比較データCD0とする。このとき、判断部72は、基準データSD0から取得した検査領域CA0の特徴量と、比較データCD0から取得した検査領域CA0の特徴量との差分が所定閾値を超えているときに、検査領域CA0に異物92が付着していると判断する。判断部72は、基準データSD0から取得した検査領域CA0の特徴量と、比較データCD0から取得した検査領域CA0の特徴量との差分が所定閾値以下のときに、検査領域CA0に異物92が付着していないと判断する。 Of the plurality of (two in this embodiment, two) pieces of image data PD0, the first piece of image data PD0 is set as reference data SD0. Also, the other image data PD0 of the plurality (two) of image data PD0 is set as comparison data CD0. At this time, when the difference between the feature amount of the inspection area CA0 obtained from the reference data SD0 and the feature amount of the inspection area CA0 obtained from the comparison data CD0 exceeds a predetermined threshold value, the determination unit 72 It is determined that the foreign matter 92 is attached to the . When the difference between the feature amount of inspection area CA0 obtained from reference data SD0 and the feature amount of inspection area CA0 obtained from comparison data CD0 is equal to or less than a predetermined threshold value, determination unit 72 determines that foreign matter 92 adheres to inspection area CA0. decide not to.
 特徴量は、画像データPD0を画像処理して取得されるものであれば良く、限定されない。例えば、基準データSD0および比較データCD0の画素ごとの輝度、彩度、明度などは、特徴量に含まれる。また、基準データSD0および比較データCD0の各々を画像処理(例えば、二値化処理など)して取得される閉領域の面積、閉領域の外周の長さなどは、特徴量に含まれる。本実施形態では、特徴量は、基準データSD0および比較データCD0の画素ごとの輝度である。 The feature amount is not limited as long as it is obtained by image processing the image data PD0. For example, the luminance, saturation, brightness, etc. of each pixel of the reference data SD0 and the comparison data CD0 are included in the feature amount. In addition, the area of the closed region, the length of the perimeter of the closed region, and the like obtained by performing image processing (for example, binarization processing) on each of the reference data SD0 and the comparison data CD0 are included in the feature amount. In this embodiment, the feature amount is the brightness of each pixel of the reference data SD0 and the comparison data CD0.
 また、上記の所定閾値は、検査領域CA0に異物92が付着していないときの特徴量(例えば、画素の輝度)よりも大きく、且つ、検査領域CA0に異物92が付着しているときの特徴量よりも小さくなるように設定される。所定閾値は、例えば、シミュレーション、実機による検証などによって、予め取得される。 In addition, the predetermined threshold value is larger than the feature amount (for example, luminance of a pixel) when the foreign matter 92 is not adhered to the inspection area CA0, and the feature value when the foreign matter 92 is adhered to the inspection area CA0. set to be less than the amount The predetermined threshold value is acquired in advance by, for example, simulation, verification using an actual machine, or the like.
 図5および図6は、取得部71によって取得された複数(2つ)の画像データPD0の一例を模式的に示している。図5は、基準データSD0を示し、図6は、比較データCD0を示している。なお、図5および図6では、格子状に配置されている複数の画素が合わせて図示されている。また、図5および図6に示す領域AR0は、検査領域CA0のうちの同一の領域(同一の複数の画素の集合)を示している。 5 and 6 schematically show an example of a plurality (two) of image data PD0 acquired by the acquisition unit 71. FIG. FIG. 5 shows the reference data SD0, and FIG. 6 shows the comparison data CD0. 5 and 6 also show a plurality of pixels arranged in a grid pattern. Also, an area AR0 shown in FIGS. 5 and 6 indicates the same area (set of the same plurality of pixels) in the inspection area CA0.
 領域AR0に異物92が付着している場合、図5に示す領域AR0に含まれる画素の輝度と、図6に示す領域AR0に含まれる画素の輝度との差分が所定閾値を超える。逆に、領域AR0に異物92が付着していない場合、図5に示す領域AR0に含まれる画素の輝度と、図6に示す領域AR0に含まれる画素の輝度との差分が所定閾値以下になる。 When the foreign matter 92 adheres to the area AR0, the difference between the brightness of the pixels included in the area AR0 shown in FIG. 5 and the brightness of the pixels included in the area AR0 shown in FIG. 6 exceeds a predetermined threshold. Conversely, when the foreign matter 92 does not adhere to the area AR0, the difference between the luminance of the pixels included in the area AR0 shown in FIG. 5 and the luminance of the pixels included in the area AR0 shown in FIG. 6 is equal to or less than the predetermined threshold. .
 よって、判断部72は、図5に示す領域AR0に含まれる画素の輝度と、図6に示す領域AR0に含まれる画素の輝度との差分が所定閾値を超えているときに、検査領域CA0に異物92が付着していると判断する。判断部72は、図5に示す領域AR0に含まれる画素の輝度と、図6に示す領域AR0に含まれる画素の輝度との差分が所定閾値以下のときに、検査領域CA0に異物92が付着していないと判断する。輝度の比較は、対応する画素ごとに行われる。 Therefore, when the difference between the luminance of the pixels included in the area AR0 shown in FIG. 5 and the luminance of the pixels included in the area AR0 shown in FIG. It is determined that foreign matter 92 is attached. When the difference between the luminance of the pixels included in the area AR0 shown in FIG. 5 and the luminance of the pixels included in the area AR0 shown in FIG. decide not to. The brightness comparison is performed for each corresponding pixel.
 判断部72は、取得部71によって取得される画像データPD0の数が3つ以上の場合についても同様に判断することができる。具体的には、判断部72は、基準データSD0から取得した検査領域CA0の特徴量と、複数の比較データCD0の各々から取得した検査領域CA0の特徴量との差分をそれぞれ算出して、算出した特徴量の差分が所定閾値を超えているか否かをそれぞれ判断することができる。 The determining unit 72 can similarly determine when the number of image data PD0 acquired by the acquiring unit 71 is three or more. Specifically, the determination unit 72 calculates the difference between the feature amount of the inspection area CA0 acquired from the reference data SD0 and the feature amount of the inspection area CA0 acquired from each of the plurality of comparison data CD0, and calculates It is possible to determine whether or not the difference between the calculated feature amounts exceeds a predetermined threshold.
 1-3-3.設定部73
 画像データPD0を画像処理して取得した検査領域CA0の特徴量が、基板90の検査領域CA0に塗布されている基板90と部品91を接合する接合部材93の経時変化によって変動すると、判断部72は、接合部材93を異物92と誤判断する可能性がある。そこで、本実施形態の異物検出装置70は、設定部73を備えている。
1-3-3. Setting unit 73
If the feature amount of the inspection area CA0 acquired by image processing the image data PD0 changes due to the change over time of the joining member 93 that joins the board 90 and the component 91 applied to the inspection area CA0 of the board 90, the determination unit 72 may erroneously determine that the joining member 93 is the foreign object 92 . Therefore, the foreign object detection device 70 of this embodiment includes a setting section 73 .
 設定部73は、検査領域CA0に塗布されている基板90と部品91を接合する接合部材93の経時変化によって検査領域CA0の特徴量が変動することにより判断部72において接合部材93が異物92と誤判断されないように、許容時間T0を予め設定する(図4に示すステップS11)。 The setting unit 73 determines that the bonding member 93 is a foreign object 92 in the determination unit 72 when the feature amount of the inspection area CA0 changes due to the change over time of the bonding member 93 that bonds the substrate 90 and the component 91 applied to the inspection area CA0. To prevent erroneous determination, the permissible time T0 is set in advance (step S11 shown in FIG. 4).
 接合部材93は、基板90と部品91を接合する部材であれば良く、限定されない。例えば、はんだ、接着剤などは、接合部材93に含まれる。本実施形態では、接合部材93は、はんだである。はんだは、含有するフラックスが乾燥するにつれて、銀色から灰色に変色する。そのため、はんだの経時変化によって検査領域CA0の特徴量が変動する可能性があり、判断部72においてはんだが異物92と誤判断される可能性がある。 The joining member 93 is not limited as long as it is a member that joins the substrate 90 and the component 91 . For example, solder, adhesive, etc. are included in the joining member 93 . In this embodiment, the joining member 93 is solder. The solder turns from silver to gray as the flux it contains dries. Therefore, there is a possibility that the characteristic amount of the inspection area CA0 will fluctuate due to changes in the solder over time, and there is a possibility that the determination unit 72 will erroneously determine that the solder is a foreign object 92 .
 許容時間T0は、例えば、シミュレーション、実機による検証などによって、予め取得される。また、接合部材93の種類に応じて許容時間T0が異なる場合があり、設定部73は、接合部材93の種類に応じた許容時間T0を設定することもできる。例えば、設定部73は、はんだの種類に応じた許容時間T0を設定することができる。また、設定部73は、接着剤の種類に応じた許容時間T0を設定することができる。 The allowable time T0 is obtained in advance by, for example, simulation or verification using an actual machine. In addition, the allowable time T0 may vary depending on the type of the joint member 93, and the setting unit 73 can set the allowable time T0 according to the type of the joint member 93. For example, the setting unit 73 can set the allowable time T0 according to the type of solder. Also, the setting unit 73 can set the allowable time T0 according to the type of adhesive.
 部品装着機WM3の機内の温度が高くなるほど、はんだは、含有するフラックスの乾燥が早くなり易い。また、部品装着機WM3の機内の湿度が低くなるほど、はんだは、含有するフラックスの乾燥が早くなり易い。よって、設定部73は、基板90に部品91を装着する部品装着機WM3の機内の温度および湿度のうちの少なくとも一方に応じた許容時間T0を設定することもできる。  The higher the temperature inside the component mounting machine WM3, the faster the flux contained in the solder tends to dry. Also, the lower the humidity inside the component mounting machine WM3, the faster the flux contained in the solder tends to dry. Therefore, the setting unit 73 can also set the allowable time T0 according to at least one of the temperature and humidity inside the component mounting machine WM3 that mounts the component 91 on the substrate 90 .
 1-3-4.対基板作業ラインWL0への適用例
 図1に示す対基板作業ラインWL0では、基板90は、基板90に部品91を装着する複数(同図では、3つ)の部品装着機WM3に順に搬送されて、複数の部品91が順に装着される。図7に示すように、複数(3つ)の部品装着機WM3のうちの一の部品装着機WM3に基板90が搬入されてから、当該部品装着機WM3がエラーで停止することなく正常に作動した場合に当該部品装着機WM3において装着予定の部品91が装着されて当該部品装着機WM3より基板90が搬出されるまでに要すると予想される時間を第一所要時間T1とする。
1-3-4. Example of application to board-handling work line WL0 In board-handling work line WL0 shown in FIG. Then, a plurality of parts 91 are mounted in order. As shown in FIG. 7, after the substrate 90 is carried into one component mounter WM3 of the plurality (three) of the component mounters WM3, the component mounter WM3 operates normally without stopping due to an error. In this case, a first required time T1 is assumed to be required for the component mounting machine WM3 to mount the component 91 to be mounted and for the board 90 to be unloaded from the component mounting machine WM3.
 許容時間T0が第一所要時間T1以上の場合、取得部71は、部品装着機WM3ごとに複数の画像データPD0を取得することができる。この場合、判断部72は、部品装着機WM3の機内において検査領域CA0に付着する異物92の有無を判断することができる。なお、許容時間T0が第一所要時間T1の二倍以上の場合、取得部71は、複数の部品装着機WM3ごとに複数の画像データPD0を取得することもできる。この場合、判断部72は、複数の部品装着機WM3ごとに異物92の有無を判断することができる。また、連続して配置された複数の部品装着機WM3の間に基板搬送コンベアが設けられている場合は、当該複数の部品装着機WM3における各々の第一所要時間T1と、当該複数の部品装着機WM3の間の基板搬送コンベアによる搬送時間に相当し後述する第二所要時間T2との合計が許容時間以内であれば、取得部は、当該複数の部品装着機WM3ごとに複数の画像データPDOを取得することもできる。この場合も、判断部72は、複数の部品装着機WM3ごとに異物92の有無を判断することができる。 When the allowable time T0 is equal to or longer than the first required time T1, the acquisition unit 71 can acquire a plurality of pieces of image data PD0 for each component mounting machine WM3. In this case, the determination unit 72 can determine the presence or absence of the foreign matter 92 adhering to the inspection area CA0 inside the component mounting machine WM3. Note that when the allowable time T0 is twice or more the first required time T1, the acquisition unit 71 can also acquire a plurality of pieces of image data PD0 for each of the plurality of component mounters WM3. In this case, the determination unit 72 can determine the presence or absence of the foreign matter 92 for each of the component mounters WM3. Further, when a board transport conveyor is provided between a plurality of component mounting machines WM3 arranged in succession, the first required time T1 for each of the plurality of component mounting machines WM3 and the component mounting If the total of the transfer time by the substrate transfer conveyor between the component mounting machines WM3 and the second required time T2, which will be described later, is within the allowable time, the acquisition unit acquires a plurality of image data PDO for each of the plurality of component mounting machines WM3. can also be obtained. Also in this case, the determination unit 72 can determine the presence or absence of the foreign matter 92 for each of the plurality of component mounters WM3.
 また、許容時間T0が第一所要時間T1未満の場合、一つの部品装着機WM3において、取得部71による複数の画像データPD0の取得、および、判断部72による異物92の有無の判断が複数回、繰り返される。基板製品900に使用される接合部材93の経時変化についてのシミュレーション、実機による検証結果から、取得部71は、部品装着機WM3ごとに複数の画像データPD0を取得するのが好ましいことが判明した。よって、以下の搬送制御部74および装着制御部75の説明においては、取得部71は、部品装着機WM3ごとに複数の画像データPD0を取得し、判断部72は、部品装着機WM3の機内において検査領域CA0に付着する異物92の有無を判断する。また、取得部71、判断部72および設定部73は、既述したいずれの形態であっても良い。 Further, when the allowable time T0 is less than the first required time T1, in one component mounting machine WM3, acquisition of a plurality of image data PD0 by the acquisition unit 71 and determination of the presence or absence of foreign matter 92 by the determination unit 72 are performed multiple times. ,Repeated. Based on the results of simulations of changes in the bonding members 93 used in the substrate product 900 over time and verification results using actual machines, it has been found that it is preferable for the acquisition unit 71 to acquire a plurality of pieces of image data PD0 for each component mounting machine WM3. Therefore, in the following description of the transport control unit 74 and the mounting control unit 75, the acquisition unit 71 acquires a plurality of image data PD0 for each component mounting machine WM3, The presence or absence of foreign matter 92 adhering to inspection area CA0 is determined. Further, the acquiring unit 71, the determining unit 72, and the setting unit 73 may have any of the forms already described.
 1-3-5.搬送制御部74および装着制御部75
 対基板作業ラインWL0に適用される異物検出装置70は、例えば、図8に示すフローチャートに従って、制御を実行することができる。なお、検査領域CA0に部品91を装着する部品装着機WM3を対象部品装着機MT0とし、対象部品装着機MT0よりも上流側に設けられる少なくとも一つの部品装着機WM3を上流側部品装着機MU0とする。本実施形態において、許容時間T0は、第一所要時間T1以上の長さであり、且つ、第二所要時間T2以上の長さであるものとする。
1-3-5. Transport control unit 74 and mounting control unit 75
The foreign object detection device 70 applied to the substrate-oriented work line WL0 can perform control according to the flowchart shown in FIG. 8, for example. The component mounter WM3 that mounts the component 91 in the inspection area CA0 is referred to as the target component mounter MT0, and at least one component mounter WM3 provided on the upstream side of the target component mounter MT0 is referred to as the upstream component mounter MU0. do. In this embodiment, the allowable time T0 is longer than the first required time T1 and longer than the second required time T2.
 また、説明の便宜上、図1および図7に示すように、複数(3つ)の部品装着機WM3を上流側から順に部品装着機M1、部品装着機M2、部品装着機M3とする。さらに、部品装着機M3を対象部品装着機MT0とし、部品装着機M1および部品装着機M2を上流側部品装着機MU0とする。 Also, for convenience of explanation, as shown in FIGS. 1 and 7, the plurality of (three) component mounters WM3 will be referred to as a component mounter M1, a component mounter M2, and a component mounter M3 in order from the upstream side. Further, the component mounting machine M3 is assumed to be the target component mounting machine MT0, and the component mounting machine M1 and the component mounting machine M2 are assumed to be the upstream component mounting machine MU0.
 異物検出装置70は、部品装着機WM3が上流側部品装着機MU0(部品装着機M1または部品装着機M2)であるか否かを判断する(図8に示すステップS21)。部品装着機WM3が上流側部品装着機MU0である場合(ステップS21でYesの場合)、取得部71によって複数の画像データPD0が取得される(ステップS22)。具体的には、取得部71は、上流側部品装着機MU0の各々において、部品91の装着処理を開始する前に検査領域CA0を撮像して画像データPD0を取得し、部品91の装着処理が終了した後に検査領域CA0を撮像して画像データPD0を取得する。 The foreign matter detection device 70 determines whether or not the component mounter WM3 is the upstream component mounter MU0 (the component mounter M1 or the component mounter M2) (step S21 shown in FIG. 8). When the component mounting machine WM3 is the upstream component mounting machine MU0 (Yes in step S21), the acquiring unit 71 acquires a plurality of image data PD0 (step S22). Specifically, the acquiring unit 71 acquires the image data PD0 by capturing an image of the inspection area CA0 before starting the mounting process of the component 91 in each of the upstream component mounting machines MU0. After completion, the inspection area CA0 is imaged to obtain image data PD0.
 次に、判断部72は、上流側部品装着機MU0において、検査領域CA0に異物92が付着していないか否かを判断する(ステップS23)。搬送制御部74は、上流側部品装着機MU0において検査領域CA0に異物92が付着していないことが判断部72において判断されたときに(ステップS23でNoの場合)、当該上流側部品装着機MU0よりも下流に設けられる次の部品装着機WM3に基板90を搬出させる(ステップS24)。 Next, the judgment unit 72 judges whether or not the foreign matter 92 adheres to the inspection area CA0 in the upstream component mounting machine MU0 (step S23). When the determination unit 72 determines that the foreign matter 92 is not adhered to the inspection area CA0 in the upstream component mounting machine MU0 (No in step S23), the transport control unit 74 controls the upstream component mounting machine MU0. The substrate 90 is carried out to the next component mounting machine WM3 provided downstream of MU0 (step S24).
 搬送制御部74は、上流側部品装着機MU0において検査領域CA0に異物92が付着していることが判断部72において判断されたときに(ステップS23でYesの場合)、基板90の搬出を停止させる(ステップS25)。この場合、例えば、作業者は、基板90を取り出して、異物92の有無を確認することができる。また、異物92の除去が可能な場合、作業者は、異物92を除去することもできる。 When the determination unit 72 determines that the foreign matter 92 is attached to the inspection area CA0 in the upstream component mounting machine MU0 (Yes in step S23), the transport control unit 74 stops carrying out the substrate 90. (step S25). In this case, for example, the operator can take out the substrate 90 and check the presence or absence of the foreign matter 92 . Also, if the removal of the foreign matter 92 is possible, the operator can also remove the foreign matter 92 .
 部品装着機WM3が上流側部品装着機MU0でない場合(ステップS21でNoの場合)、異物検出装置70は、部品装着機WM3が対象部品装着機MT0(部品装着機M3)であるか否かを判断する(ステップS26)。部品装着機WM3が対象部品装着機MT0である場合(ステップS26でYesの場合)、取得部71によって複数の画像データPD0が取得される(ステップS27)。具体的には、取得部71は、対象部品装着機MT0において、部品91の装着処理を開始する前に検査領域CA0を撮像して画像データPD0を取得し、検査領域CA0に装着予定の部品91を装着する前に検査領域CA0を撮像して画像データPD0を取得する。 When the component mounting machine WM3 is not the upstream component mounting machine MU0 (No in step S21), the foreign object detection device 70 determines whether the component mounting machine WM3 is the target component mounting machine MT0 (the component mounting machine M3). It judges (step S26). When the component mounting machine WM3 is the target component mounting machine MT0 (Yes in step S26), the acquiring unit 71 acquires a plurality of image data PD0 (step S27). Specifically, the acquiring unit 71 acquires the image data PD0 by imaging the inspection area CA0 before starting the process of placing the component 91 in the target component mounting machine MT0, and acquires the image data PD0 of the component 91 to be mounted in the inspection area CA0. image data PD0 is acquired by imaging the inspection area CA0 before wearing the .
 次に、判断部72は、対象部品装着機MT0において、検査領域CA0に異物92が付着していないか否かを判断する(ステップS28)。装着制御部75は、対象部品装着機MT0において検査領域CA0に異物92が付着していないことが判断部72において判断されたときに(ステップS28でNoの場合)、検査領域CA0に装着予定の部品91の装着を許可する(ステップS29)。そして、異物検出装置70による制御は、一旦、終了する。 Next, the determination unit 72 determines whether or not the foreign matter 92 adheres to the inspection area CA0 in the target component mounting machine MT0 (step S28). When the determination unit 72 determines that the foreign matter 92 is not adhered to the inspection area CA0 in the target component mounting machine MT0 (No in step S28), the mounting control unit 75 controls the mounting control unit 75 to perform the mounting operation on the inspection area CA0. Mounting of the component 91 is permitted (step S29). Then, the control by the foreign matter detection device 70 is once terminated.
 装着制御部75は、対象部品装着機MT0において検査領域CA0に異物92が付着していることが判断部72において判断されたときに(ステップS28でYesの場合)、検査領域CA0に装着予定の部品91の装着を規制する(ステップS30)。この場合、例えば、作業者は、基板90を取り出して、異物92の有無を確認することができる。また、異物92の除去が可能な場合、作業者は、異物92を除去することもできる。 When the determining unit 72 determines that the foreign matter 92 is attached to the inspection area CA0 in the target component mounting machine MT0 (Yes in step S28), the mounting control unit 75 controls the mounting control unit 75 to perform the mounting operation on the inspection area CA0. The mounting of the component 91 is restricted (step S30). In this case, for example, the operator can take out the substrate 90 and check the presence or absence of the foreign matter 92 . Also, if the removal of the foreign matter 92 is possible, the operator can also remove the foreign matter 92 .
 なお、部品装着機WM3が対象部品装着機MT0でない場合(ステップS26でNoの場合)、部品装着機WM3は、対象部品装着機MT0よりも下流に設けられており、検査領域CA0には、部品91が既に装着されている。よって、この場合、異物検出装置70による制御は、一旦、終了する。 If the component mounter WM3 is not the target component mounter MT0 (No in step S26), the component mounter WM3 is provided downstream of the target component mounter MT0, and the inspection area CA0 has a component 91 is already installed. Therefore, in this case, the control by the foreign object detection device 70 is once terminated.
 このように、取得部71は、上流側部品装着機MU0において部品91の装着処理を開始する前と装着処理が終了した後に、それぞれ検査領域CA0を撮像して画像データPD0を取得する。そして、上流側部品装着機MU0において検査領域CA0に異物92が付着していないことが判断部72において判断されたときに、搬送制御部74は、当該上流側部品装着機MU0よりも下流に設けられる次の部品装着機WM3に基板90を搬出させる。上流側部品装着機MU0において順に上記の処理が実行されることにより、検査領域CA0に異物92が付着していない基板90が対象部品装着機MT0に搬送される。 In this way, the acquisition unit 71 acquires the image data PD0 by imaging the inspection area CA0 before starting the mounting process of the component 91 in the upstream component mounting machine MU0 and after finishing the mounting process. Then, when the determining unit 72 determines that the foreign matter 92 is not attached to the inspection area CA0 in the upstream component mounting machine MU0, the transport control unit 74 is provided downstream of the upstream component mounting machine MU0. The substrate 90 is carried out to the next component mounting machine WM3. By sequentially executing the above processes in the upstream component mounting machine MU0, the substrate 90 with no foreign matter 92 adhering to the inspection area CA0 is transported to the target component mounting machine MT0.
 また、取得部71は、対象部品装着機MT0において部品91の装着処理を開始する前と、検査領域CA0に装着予定の部品91を装着する前に、それぞれ検査領域CA0を撮像して画像データPD0を取得する。そして、対象部品装着機MT0において検査領域CA0に異物92が付着していないことが判断部72において判断されたときに、装着制御部75は、検査領域CA0に装着予定の部品91の装着を許可する。対象部品装着機MT0において上記の処理が実行されることにより、対象部品装着機MT0は、異物92が付着していない検査領域CA0に、装着予定の部品91を装着することができる。 In addition, the acquiring unit 71 images the inspection area CA0 and obtains the image data PD0 before starting the mounting process of the component 91 in the target component mounting machine MT0 and before mounting the component 91 to be mounted in the inspection area CA0. to get Then, when the determining unit 72 determines that the foreign matter 92 is not attached to the inspection area CA0 in the target component mounting machine MT0, the mounting control unit 75 permits mounting of the component 91 to be mounted in the inspection area CA0. do. By executing the above processing in the target component mounting machine MT0, the target component mounting machine MT0 can mount the component 91 to be mounted in the inspection area CA0 where the foreign matter 92 is not adhered.
 1-3-6.部品装着機WM3の間の基板90の搬送
 部品装着機WM3の間の基板90の搬送中における異物92の付着が問題となる場合、異物検出装置70は、以下に示す制御を行うことができる。この形態においても、基板90は、基板90に部品91を装着する複数(図1に示す例では、3つ)の部品装着機WM3に順に搬送されて、複数の部品91が順に装着される。また、取得部71、判断部72および設定部73は、既述したいずれの形態であっても良い。さらに、図7に示すように、複数(3つ)の部品装着機WM3のうちの一の部品装着機WM3である第一部品装着機MF0より基板90が搬出されてから、第一部品装着機MF0よりも下流に設けられる部品装着機WM3がエラーで停止することなく正常に作動した場合に第一部品装着機MF0よりも下流に設けられる次の部品装着機WM3である第二部品装着機MS0に基板90が搬入されるまでに要すると予想される時間を第二所要時間T2とする。
1-3-6. Conveyance of Board 90 Between Component Mounters WM3 If adhesion of foreign matter 92 during conveyance of the board 90 between component mounters WM3 becomes a problem, the foreign matter detector 70 can perform the following control. Also in this embodiment, the substrate 90 is sequentially conveyed to a plurality of (three in the example shown in FIG. 1) component mounting machines WM3 that mount components 91 on the substrate 90, and the plurality of components 91 are mounted in sequence. Further, the acquiring unit 71, the determining unit 72, and the setting unit 73 may have any of the forms already described. Further, as shown in FIG. 7, after the board 90 is unloaded from the first component mounting machine MF0, which is one component mounting machine WM3 of the plurality (three) of the component mounting machines WM3, the first component mounting machine When the component mounting machine WM3 provided downstream from MF0 operates normally without stopping due to an error, the second component mounting machine MS0 which is the next component mounting machine WM3 provided downstream from the first component mounting machine MF0. The time expected to be required until the substrate 90 is carried in is assumed to be a second required time T2.
 許容時間T0が第二所要時間T2以上の場合、取得部71は、第一部品装着機MF0における部品91の装着処理が終了した後であって基板90が搬出される前に検査領域CA0を撮像して画像データPD0を取得する。また、取得部71は、第二部品装着機MS0に基板90が搬入された後であって第二部品装着機MS0における部品91の装着処理を開始する前に検査領域CA0を撮像して画像データPD0を取得する。この場合、判断部72は、第一部品装着機MF0と第二部品装着機MS0との間において基板90が搬送されるときに検査領域CA0に付着する異物92の有無を判断することができる。 When the allowable time T0 is equal to or longer than the second required time T2, the acquisition unit 71 images the inspection area CA0 after the mounting process of the component 91 in the first component mounting machine MF0 is completed and before the board 90 is unloaded. to acquire the image data PD0. In addition, the acquisition unit 71 captures the inspection area CA0 and acquires image data after the board 90 is carried into the second component mounting machine MS0 and before starting the mounting process of the component 91 in the second component mounting machine MS0. Get PD0. In this case, the determination unit 72 can determine the presence or absence of foreign matter 92 adhering to the inspection area CA0 when the substrate 90 is transported between the first component mounting machine MF0 and the second component mounting machine MS0.
 2.異物検出方法
 異物検出装置70について既述されていることは、異物検出方法についても同様に言える。具体的には、異物検出方法は、取得工程と、判断工程と、設定工程とを備えている。取得工程は、取得部71が行う制御に相当する。判断工程は、判断部72が行う制御に相当する。設定工程は、設定部73が行う制御に相当する。また、異物検出方法は、搬送制御工程を備えることができる。搬送制御工程は、搬送制御部74が行う制御に相当する。異物検出方法は、装着制御工程を備えることもできる。装着制御工程は、装着制御部75が行う制御に相当する。
2. Foreign Matter Detection Method What has already been described about the foreign matter detection device 70 can also be said for the foreign matter detection method. Specifically, the foreign matter detection method includes an acquisition process, a determination process, and a setting process. The acquisition step corresponds to control performed by the acquisition unit 71 . The determination process corresponds to control performed by the determination unit 72 . The setting process corresponds to control performed by the setting unit 73 . Also, the foreign matter detection method can include a transport control step. The transport control process corresponds to control performed by the transport control unit 74 . The foreign object detection method can also include a mounting control step. The mounting control process corresponds to control performed by the mounting control unit 75 .
 3.実施形態の効果の一例
 異物検出装置70によれば、基板90の検査領域CA0に塗布されている基板90と部品91を接合する接合部材93の経時変化による異物92の誤判断を抑制することができる。異物検出装置70について上述されていることは、異物検出方法についても同様に言える。
3. Example of Effect of Embodiment According to the foreign matter detection device 70, it is possible to suppress erroneous determination of the foreign matter 92 due to aging of the joining member 93 that joins the substrate 90 and the component 91, which is applied to the inspection area CA0 of the substrate 90. can. What has been described above with respect to the foreign object detection device 70 can be similarly applied to the foreign object detection method.
70:異物検出装置、71:取得部、72:判断部、73:設定部、
74:搬送制御部、75:装着制御部、90:基板、91:部品、
92:異物、93:接合部材、CA0:検査領域、PD0:画像データ、
SD0:基準データ、CD0:比較データ、WM3:部品装着機、
MT0:対象部品装着機、MU0:上流側部品装着機、
MF0:第一部品装着機、MS0:第二部品装着機、
T0:許容時間、T1:第一所要時間、T2:第二所要時間。
70: foreign object detection device, 71: acquisition unit, 72: determination unit, 73: setting unit,
74: Conveyance control unit, 75: Mounting control unit, 90: Substrate, 91: Component,
92: foreign matter, 93: joining member, CA0: inspection area, PD0: image data,
SD0: reference data, CD0: comparison data, WM3: component mounting machine,
MT0: target component mounting machine, MU0: upstream component mounting machine,
MF0: first component mounting machine, MS0: second component mounting machine,
T0: allowable time, T1: first required time, T2: second required time.

Claims (14)

  1.  基板の少なくとも一部の検査領域を所定の許容時間の間に複数回撮像して、同一の前記検査領域を撮像した複数の画像データを取得する取得部と、
     前記取得部によって取得された前記複数の画像データの各々を画像処理して取得した前記検査領域の特徴量の差異に基づいて、前記検査領域に付着する異物の有無を判断する判断部と、
     前記検査領域に塗布されている前記基板と部品を接合する接合部材の経時変化によって前記検査領域の前記特徴量が変動することにより前記判断部において前記接合部材が前記異物と誤判断されないように、前記許容時間を予め設定する設定部と、
    を備える異物検出装置。
    an acquisition unit that captures images of at least a part of an inspection area of a substrate a plurality of times within a predetermined allowable time to acquire a plurality of image data of the same inspection area;
    a judgment unit that judges the presence or absence of a foreign substance adhering to the inspection area based on the difference in the feature amount of the inspection area acquired by image processing each of the plurality of image data acquired by the acquisition unit;
    In order to prevent the determination unit from erroneously determining that the bonding member is the foreign matter due to fluctuations in the characteristic amount of the inspection region due to changes over time in the bonding member applied to the inspection region and bonding the substrate and the component, a setting unit that presets the allowable time;
    A foreign object detection device comprising:
  2.  前記取得部は、前記基板に前記部品を装着する部品装着機の使用者によって指定された領域を前記検査領域とする請求項1に記載の異物検出装置。 2. The foreign matter detection device according to claim 1, wherein the acquisition unit uses, as the inspection area, an area specified by a user of a component mounting machine that mounts the component on the board.
  3.  前記判断部は、前記複数の画像データのうちの最初に取得された一の前記画像データである基準データから取得した前記検査領域の前記特徴量と、前記複数の画像データのうちの他の一の前記画像データである比較データから取得した前記検査領域の前記特徴量との差分が所定閾値を超えているときに、前記検査領域に前記異物が付着していると判断し、前記特徴量の前記差分が所定閾値以下のときに、前記検査領域に前記異物が付着していないと判断する請求項1または請求項2に記載の異物検出装置。 The determination unit determines the feature amount of the inspection region obtained from reference data, which is one of the image data obtained first among the plurality of image data, and the other one of the plurality of image data. When the difference between the feature amount of the inspection area obtained from the comparison data, which is the image data of the above, exceeds a predetermined threshold value, it is determined that the foreign matter is adhered to the inspection area, and the feature amount of 3. A foreign matter detection apparatus according to claim 1, wherein when said difference is equal to or less than a predetermined threshold value, it is determined that said foreign matter does not adhere to said inspection area.
  4.  前記特徴量は、前記基準データおよび前記比較データの画素ごとの輝度である請求項3に記載の異物検出装置。 The foreign matter detection device according to claim 3, wherein the feature amount is the brightness of each pixel of the reference data and the comparison data.
  5.  前記設定部は、前記接合部材の種類に応じた前記許容時間を設定する請求項1~請求項4のいずれか一項に記載の異物検出装置。 The foreign matter detection device according to any one of claims 1 to 4, wherein the setting unit sets the allowable time according to the type of the joining member.
  6.  前記設定部は、前記基板に前記部品を装着する部品装着機の機内の温度および湿度のうちの少なくとも一方に応じた前記許容時間を設定する請求項1~請求項5のいずれか一項に記載の異物検出装置。 6. The setting unit according to any one of claims 1 to 5, wherein the setting unit sets the allowable time according to at least one of temperature and humidity inside a component mounting machine that mounts the component on the substrate. foreign object detection device.
  7.  前記接合部材は、はんだである請求項1~請求項6のいずれか一項に記載の異物検出装置。 The foreign matter detection device according to any one of claims 1 to 6, wherein the joining member is solder.
  8.  前記基板は、前記基板に前記部品を装着する複数の部品装着機に順に搬送されて、複数の前記部品が順に装着され、
     前記許容時間は、前記複数の部品装着機のうちの一の前記部品装着機に前記基板が搬入されてから、当該部品装着機がエラーで停止することなく正常に作動した場合に当該部品装着機において装着予定の前記部品が装着されて当該部品装着機より前記基板が搬出されるまでに要すると予想される時間である第一所要時間以上であり、
     前記取得部は、前記部品装着機ごとに前記複数の画像データを取得し、
     前記判断部は、前記部品装着機の機内において前記検査領域に付着する前記異物の有無を判断する請求項1~請求項7のいずれか一項に記載の異物検出装置。
    The substrate is sequentially conveyed to a plurality of component mounting machines that mount the components on the substrate, and the plurality of components are mounted in sequence,
    The allowable time is the time required for the component mounting machine to operate normally without stopping due to an error after the board is carried into the component mounting machine, which is one of the plurality of component mounting machines. is equal to or longer than the first required time, which is the time expected to be required until the board is unloaded from the component mounting machine after the component to be mounted is mounted in
    The acquisition unit acquires the plurality of image data for each component mounting machine,
    The foreign matter detection apparatus according to any one of claims 1 to 7, wherein the judgment section judges the presence or absence of the foreign matter adhering to the inspection area inside the component mounting machine.
  9.  前記取得部は、前記検査領域に前記部品を装着する前記部品装着機である対象部品装着機よりも上流側に設けられる少なくとも一つの前記部品装着機である上流側部品装着機の各々において、前記部品の装着処理を開始する前に前記検査領域を撮像して前記画像データを取得し、前記部品の装着処理が終了した後に前記検査領域を撮像して前記画像データを取得する請求項8に記載の異物検出装置。 In each of the upstream component mounters, which are at least one of the component mounters provided upstream of the target component mounter which is the component mounter that mounts the component in the inspection area, the acquisition unit performs the 9. The method according to claim 8, wherein the inspection area is imaged to obtain the image data before the component mounting process is started, and the inspection area is imaged to obtain the image data after the component mounting process is completed. foreign object detection device.
  10.  前記上流側部品装着機において前記検査領域に前記異物が付着していないことが前記判断部において判断されたときに、当該上流側部品装着機よりも下流に設けられる次の前記部品装着機に前記基板を搬出させ、前記上流側部品装着機において前記検査領域に前記異物が付着していることが前記判断部において判断されたときに、前記基板の搬出を停止させる搬送制御部を備える請求項9に記載の異物検出装置。 When the determining unit determines that the foreign matter is not attached to the inspection area in the upstream component mounting machine, the next component mounting machine provided downstream from the upstream component mounting machine performs the 10. A transport control unit that transports a substrate and stops transporting the substrate when the determination unit determines that the foreign matter is adhered to the inspection area in the upstream component mounting machine. The foreign object detection device according to 1.
  11.  前記取得部は、前記検査領域に前記部品を装着する前記部品装着機である対象部品装着機において、前記部品の装着処理を開始する前に前記検査領域を撮像して前記画像データを取得し、前記検査領域に装着予定の前記部品を装着する前に前記検査領域を撮像して前記画像データを取得する請求項8~請求項10のいずれか一項に記載の異物検出装置。 The acquisition unit acquires the image data by imaging the inspection area before starting the component mounting process in the target component mounting machine, which is the component mounting machine that mounts the component in the inspection area, 11. The foreign matter detection apparatus according to any one of claims 8 to 10, wherein the inspection area is imaged to acquire the image data before mounting the component to be mounted in the inspection area.
  12.  前記対象部品装着機において前記検査領域に前記異物が付着していないことが前記判断部において判断されたときに、前記検査領域に装着予定の前記部品の装着を許可し、前記対象部品装着機において前記検査領域に前記異物が付着していることが前記判断部において判断されたときに、前記検査領域に装着予定の前記部品の装着を規制する装着制御部を備える請求項11に記載の異物検出装置。 When the determining unit determines that the foreign matter is not attached to the inspection area in the target component mounting machine, the component to be mounted in the inspection area is permitted to be mounted, and the target component mounting machine 12. The foreign matter detection according to claim 11, further comprising a mounting control section that restricts mounting of the component to be mounted in the inspection area when the determination section determines that the foreign material is attached to the inspection area. Device.
  13.  前記基板は、前記基板に前記部品を装着する複数の部品装着機に順に搬送されて、複数の前記部品が順に装着され、
     前記許容時間は、前記複数の部品装着機のうちの一の前記部品装着機である第一部品装着機より前記基板が搬出されてから、前記第一部品装着機よりも下流に設けられる前記部品装着機がエラーで停止することなく正常に作動した場合に前記第一部品装着機よりも下流に設けられる次の前記部品装着機である第二部品装着機に前記基板が搬入されるまでに要すると予想される時間である第二所要時間以上であり、
     前記取得部は、前記第一部品装着機における前記部品の装着処理が終了した後であって前記基板が搬出される前に前記検査領域を撮像して前記画像データを取得し、前記第二部品装着機に前記基板が搬入された後であって前記第二部品装着機における前記部品の装着処理を開始する前に前記検査領域を撮像して前記画像データを取得し、
     前記判断部は、前記第一部品装着機と前記第二部品装着機との間において前記基板が搬送されるときに前記検査領域に付着する前記異物の有無を判断する請求項1~請求項12のいずれか一項に記載の異物検出装置。
    The substrate is sequentially conveyed to a plurality of component mounting machines that mount the components on the substrate, and the plurality of components are mounted in sequence,
    The permissible time is the time after the substrate is unloaded from the first component mounting machine, which is one of the component mounting machines among the plurality of component mounting machines, and the component is provided downstream from the first component mounting machine. When the mounter operates normally without stopping due to an error, the time required until the substrate is carried into the second component mounter, which is the next component mounter provided downstream from the first component mounter. is greater than or equal to the second required time, which is the time expected to be
    The acquisition unit acquires the image data by imaging the inspection area after the component mounting process in the first component mounting machine is completed and before the board is carried out, and the second component acquiring the image data by capturing an image of the inspection area after the board is carried into the mounting machine and before starting the mounting process of the component in the second component mounting machine;
    Claims 1 to 12, wherein the judging section judges the presence or absence of the foreign matter adhering to the inspection area when the board is transported between the first component mounting machine and the second component mounting machine. The foreign object detection device according to any one of 1.
  14.  基板の少なくとも一部の検査領域を所定の許容時間の間に複数回撮像して、同一の前記検査領域を撮像した複数の画像データを取得する取得工程と、
     前記取得工程によって取得された前記複数の画像データの各々を画像処理して取得した前記検査領域の特徴量の差異に基づいて、前記検査領域に付着する異物の有無を判断する判断工程と、
     前記検査領域に塗布されている前記基板と部品を接合する接合部材の経時変化によって前記検査領域の前記特徴量が変動することにより前記判断工程において前記接合部材が前記異物と誤判断されないように、前記許容時間を予め設定する設定工程と、
    を備える異物検出方法。
    an acquisition step of capturing images of at least a part of the inspection area of the substrate a plurality of times within a predetermined allowable time to acquire a plurality of image data of the same inspection area;
    a judgment step of judging the presence or absence of a foreign substance adhering to the inspection region based on the difference in the feature amount of the inspection region acquired by image processing each of the plurality of image data acquired in the acquisition step;
    In order to prevent the bonding member from being erroneously determined as the foreign matter in the determination step due to fluctuations in the feature amount of the inspection region due to changes over time in the bonding member applied to the inspection region for bonding the substrate and the component, a setting step of presetting the allowable time;
    A foreign object detection method comprising:
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JP2007335524A (en) * 2006-06-13 2007-12-27 Fuji Mach Mfg Co Ltd Mounting line
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WO2014002283A1 (en) * 2012-06-30 2014-01-03 千住金属工業株式会社 Lead-free solder ball

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007335524A (en) * 2006-06-13 2007-12-27 Fuji Mach Mfg Co Ltd Mounting line
JP2009128345A (en) * 2007-11-28 2009-06-11 Omron Corp Object recognition method and visual inspection apparatus of substrate using the method
WO2014002283A1 (en) * 2012-06-30 2014-01-03 千住金属工業株式会社 Lead-free solder ball

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